TW201505122A - Vacuum clamp - Google Patents

Abstract

This invention discloses a vacuum clamp, including a bear assembly, a seal unit, a clamp connector and at least a vacuum hose. The bear assembly has a receiving groove disposed with at least one first vacuum aperture. The seal unit includes a seal ring that is protruded to form a vacuum trough. The seal ring has at least one second vacuum aperture and is fixed in the receiving groove of the bear assembly. The second vacuum aperture of the seal ring communicates with the first vacuum aperture of the bear assembly. The clamp connector has at least a vacuum extraction port and at least a vacuum extraction orifice communicating with the vacuum extraction port. The clamp connector is fastened to the bear assembly. The first vacuum aperture of the bear assembly communicates with the vacuum extraction orifice of the clamp connector through the vacuum tube. The vacuum clamp of this invention has good airtightness by disposing the seal ring so that a wafer can be hold firmly on the vacuum clamp.

Description

Vacuum clamp

The present invention relates to a jig for holding a wafer, and more particularly to a vacuum jig.

In the semiconductor device manufacturing process, a wafer for manufacturing a semiconductor device needs to be fabricated into a desired semiconductor device after undergoing several processes. The wafer is typically held by a fixture to perform a corresponding process, such as electroplating, electrochemical polishing, and the like.

With the rapid development of semiconductor technology, devices for manufacturing semiconductor devices are also being continuously improved to meet various process requirements, including jigs for holding wafers. There are two types of fixtures, one is a contact type fixture and the other is a non-contact type fixture. A vacuum clamp that positions and clamps a wafer with a vacuum generated vacuum is a typical contact type fixture. A vacuum clamp as disclosed in U.S. Patent No. 6,032,997, the vacuum clamp having a base having a top surface with a plurality of concentric planes distributed over the top surface of the base for supporting the wafer. A concentric groove is formed between each two adjacent concentric planes, and a plurality of through holes pass through the base and communicate with corresponding concentric grooves. Each of the through holes is connected to a vacuum pipe, and the vacuum pipe is connected to the vacuum source. When the wafer contacts the concentric plane, the air in the concentric grooves is discharged through the through holes and the vacuum tube, thereby generating a vacuum negative pressure to fix the wafer on the vacuum chuck.

A vacuum clamp having a substantially square shape has a first surface and a second surface opposite the first surface, as disclosed in U.S. Patent No. 6,164,463. The first surface is provided with a first circular platform and a second circular platform for supporting two different diameter wafers, respectively. The second surface is provided with a third circular platform for supporting a wafer having a further diameter. The first vacuum chamber and the second vacuum chamber are respectively formed on the first circular platform and the second circular platform, and the third vacuum chamber is formed on the third circular platform. Three vacuum passages extend from the inside of the jig body to the outside of the jig body and communicate with three vacuum ports on one side of the jig body. Each vacuum channel is connected to a vacuum chamber and a vacuum source. The air in the vacuum chamber is discharged through the vacuum passage and the vacuum port to generate a vacuum negative pressure to fix the wafer on the circular platform of the vacuum chuck.

However, although the above two types of vacuum jigs are relatively simple in structure, the vacuum jigs are inferior in airtightness, and the wafers held thereon are liable to fall off, thereby causing damage to the wafer.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a vacuum jig having a simple structure and a good airtightness, which is capable of stably holding a wafer.

To achieve the above object, the present invention provides a vacuum clamp comprising: a load bearing assembly, a sealing unit, a clamp connector and at least one vacuum tube. The load bearing assembly has a groove in which at least one first vacuum hole is provided. The sealing unit comprises a sealing ring, the sealing ring protrusion forms a vacuum groove, and the sealing ring is provided with at least one second vacuum hole, the sealing ring is fixedly disposed in the groove of the bearing assembly, and the second vacuum hole of the sealing ring and the bearing assembly are The first vacuum hole is connected through. The clamp connector has at least one air suction port and at least one air suction hole communicating with the air suction port, and the clamp connector is fixedly connected to the load bearing assembly. The vacuum tube communicates the first vacuum hole of the load bearing assembly with the suction hole of the clamp connector.

In one embodiment, the sealing unit further comprises a fixing ring, the fixing ring is provided with at least one second vacuum hole, the fixing ring is placed in the vacuum groove of the sealing ring, the second vacuum hole of the fixing ring and the second vacuum hole of the sealing ring The connecting, fixing ring and sealing ring are fixedly disposed in the groove of the bearing assembly. The retaining ring is a metal ring. The sealing ring is a rubber sealing ring.

In one embodiment, the load bearing assembly includes a carrier body and a base, the carrier body has a base portion and a side wall extending downwardly along the base portion, the base portion and the side wall enclose a receiving space for receiving the base, and the base portion is provided with a mounting hole for mounting the fixture The connecting head is further provided with at least one positioning hole and a receiving groove. One end of the receiving groove communicates with the positioning hole, and the other end of the receiving groove communicates with the mounting hole. The groove and the first vacuum hole are disposed on the base, and the first vacuum hole The vacuum tube is received in the receiving groove.

In one embodiment, a hollow connecting tube is further included. One end of the connecting tube is fixedly mounted in the first vacuum hole of the base, and the other end of the connecting tube passes through the positioning hole of the carrier and is inserted into the vacuum tube. The connecting tube has an L shape, and one end of the connecting tube fixedly mounted in the first vacuum hole of the base has a thread, and the other end of the connecting tube inserted through the positioning hole of the carrying body and inserted into the vacuum tube has a tapered shape.

In one embodiment, the base is provided with a plurality of mutually communicating air slots, the air slots being surrounded by the recesses of the base. At least one pressure relief hole is disposed in the air slot.

In order to achieve the above object, the present invention provides a vacuum clamp comprising: a load bearing assembly, a first sealing unit, a second sealing unit, a clamp connector, and at least one vacuum tube. The load bearing assembly has a first groove and a second groove. The first groove is provided with at least one first vacuum hole, and the load bearing assembly surrounded by the second groove is provided with a vacuum channel. The first sealing unit includes a first sealing ring, the first sealing ring protrusion forms a vacuum groove, and the first sealing ring is provided with at least one second vacuum hole, and the first sealing ring is fixedly disposed in the first groove of the bearing assembly, The second vacuum hole of the first sealing ring is in communication with the first vacuum hole of the load bearing assembly. The second sealing unit includes a second sealing ring fixedly disposed in the second groove of the carrying assembly. The clamp connector has at least one air suction port, at least one air suction hole communicating with the air suction port, and a third vacuum channel communicating with the vacuum channel of the load bearing assembly, and the clamp connector is fixedly connected to the load bearing assembly. The vacuum tube communicates the first vacuum hole of the load bearing assembly with the suction hole of the clamp connector.

In one embodiment, the first groove and the second groove are concentric rings, and the distance between the first groove and the center of the load bearing assembly is greater than the distance between the second groove and the center of the load bearing assembly.

In one embodiment, the first sealing unit further includes a first fixing ring, and the first fixing ring is provided with at least one second vacuum hole, and the first fixing ring is placed in the vacuum groove of the first sealing ring, the first fixing ring The second vacuum hole is in communication with the second vacuum hole of the first sealing ring, and the first fixing ring and the first sealing ring are fixedly disposed in the first groove of the bearing assembly. The second sealing unit further includes a second fixing ring disposed on the inner edge of the second sealing ring, and the second fixing ring and the second sealing ring are fixedly disposed on the bearing The second groove of the assembly. The first fixing ring and the second fixing ring are both metal rings. The first sealing ring and the second sealing ring are both rubber sealing rings.

In one embodiment, the load bearing assembly includes a carrier body and a base, the carrier body has a base portion and a side wall extending downwardly along the base portion, the base portion and the side wall enclose a receiving space for receiving the base, and the base portion is provided with a mounting hole for mounting the fixture The base is further provided with at least one positioning hole and a receiving groove. One end of the receiving groove communicates with the positioning hole, and the other end of the receiving groove communicates with the mounting hole. The first groove and the second groove are disposed on the base, first The vacuum hole is in communication with the positioning hole, and the vacuum tube is received in the receiving groove.

In one embodiment, a hollow connecting tube is further included. One end of the connecting tube is fixedly mounted in the first vacuum hole of the base, and the other end of the connecting tube passes through the positioning hole of the carrier and is inserted into the vacuum tube. The connecting tube has an L shape, and one end of the connecting tube fixedly mounted in the first vacuum hole of the base has a thread, and the other end of the connecting tube inserted through the positioning hole of the carrying body and inserted into the vacuum tube has a tapered shape.

In one embodiment, the bottom surface of the base between the first recess and the second recess is provided with a plurality of mutually communicating air slots. At least one pressure relief hole is disposed in the air slot.

In one embodiment, the bottom surface of the base surrounded by the second recess is provided with a plurality of air slots, and the plurality of air slots are respectively connected to the vacuum passages of the load bearing assembly.

In one embodiment, the load bearing assembly further includes an intermediate plate disposed between the carrier and the base and fixedly connected to the clamp connector, the intermediate plate is provided with a first vacuum passage, and the base is provided with a second vacuum The passage, the first vacuum passage, the second vacuum passage, and the third vacuum passage of the clamp connector are in communication.

In one embodiment, the intermediate plate has an upper surface and a lower surface opposite to the upper surface, and the upper surface and the lower surface of the intermediate plate are respectively provided with annular grooves, and the annular groove surrounds the first vacuum passage, and the two sealing members are respectively disposed at The upper surface of the intermediate plate and the annular groove in the lower surface.

In one embodiment, the center of the intermediate plate, the base and the clamp connector are respectively provided with calibration holes, and the first vacuum channel, the second vacuum channel and the third vacuum channel are respectively arranged adjacent to the calibration holes.

In one embodiment, the intermediate plate, the base and the clamp connector are respectively provided with a plurality of fixing holes, and the plurality of fixing holes are arranged around the calibration hole and the vacuum channel.

In one embodiment, the intermediate plate, the base and the clamp connector are respectively provided with a plurality of shaft holes, and the plurality of shaft holes are arranged around the calibration hole and the vacuum passage.

In summary, the vacuum clamp of the present invention provides a good airtightness of the vacuum clamp by providing a sealing ring, so that the wafer can be firmly clamped to the vacuum fixture.

10‧‧‧bearing assembly

11‧‧‧Carrier

12‧‧‧Intermediate board

13‧‧‧Base

20‧‧‧Clamp connector

21‧‧‧Exhaust port

22‧‧‧Pumping holes

23‧‧‧ third calibration hole

24‧‧‧ third vacuum channel

25‧‧‧ Third Axial Hole

26‧‧‧ third fixed hole

30‧‧‧Seal

40‧‧‧First sealing unit

41‧‧‧First metal ring

42‧‧‧First seal

43‧‧‧second vacuum hole

50‧‧‧Second sealing unit

51‧‧‧Second metal ring

52‧‧‧Second seal

60‧‧‧Connecting tube

70‧‧‧vacuum tube

80‧‧‧seal sleeve

100‧‧‧vacuum fixture

111‧‧‧ base

112‧‧‧Side wall

113‧‧‧ accommodating space

114‧‧‧Assembly holes

115‧‧‧Positioning holes

116‧‧‧ accommodating slot

121‧‧‧First calibration hole

122‧‧‧First vacuum channel

123‧‧‧First shaft hole

124‧‧‧First fixing hole

125‧‧‧ring groove

130‧‧‧Circular recess

131‧‧‧First groove

132‧‧‧second groove

133‧‧‧ screw holes

134‧‧‧First vacuum hole

135‧‧ Air trough

136‧‧‧Second calibration hole

137‧‧‧Second vacuum channel

138‧‧‧Second shaft hole

139‧‧‧Second fixing hole

140‧‧‧ Pressure release hole

421‧‧‧vacuum tank

Figure 1 discloses a top view of a vacuum clamp in accordance with the present invention.

Figure 2 discloses a bottom view of a vacuum clamp in accordance with the present invention.

Figure 3 discloses a top view of a carrier of a vacuum clamp in accordance with the present invention.

Figure 4 discloses a bottom view of a carrier of a vacuum clamp in accordance with the present invention.

Figure 5 discloses a top view of the intermediate plate of the vacuum clamp in accordance with the present invention.

Figure 6 discloses a bottom view of the intermediate plate of the vacuum clamp in accordance with the present invention.

Figure 7 discloses a top view of the base of a vacuum clamp in accordance with the present invention.

Figure 8 discloses a bottom view of the base of the vacuum clamp in accordance with the present invention.

Figure 9 is a cross-sectional view showing the assembly of the load bearing assembly and the jig connector of the vacuum clamp according to the present invention.

Figure 10 discloses a cross-sectional view of a vacuum clamp in accordance with the present invention.

Figure 11 discloses a further cross-sectional view of a vacuum clamp in accordance with the present invention.

Figure 12 discloses an exploded view of the first sealing unit and the second sealing unit of the vacuum clamp according to the present invention.

Figure 13 discloses a perspective view of a connecting tube of a vacuum clamp in accordance with the present invention.

Figure 14 discloses a perspective view of a clamp connector of a vacuum clamp in accordance with the present invention.

Figure 15 discloses a cross-sectional view of a clamp connector of a vacuum clamp in accordance with the present invention.

In order to explain the technical content, structural features, objects and effects of the present invention in detail, the embodiments will be described in detail below with reference to the accompanying drawings.

Referring to FIGS. 1-11, the vacuum clamp 100 disclosed herein is generally circular. The vacuum clamp 100 includes a load bearing assembly 10 and a clamp connector 20 that is fixedly coupled to the load bearing assembly 10. The carrier assembly 10 includes a carrier 11 , an intermediate plate 12 and a base 13 , wherein the intermediate plate 12 is disposed on the carrier 11 and Between the bases 13. The carrier body 11, the intermediate plate 12 and the base 13 are fixed by screws. Obviously, in addition to fixing the carrier 11, the intermediate plate 12 and the base 13 by screws, the carrier 11 and the intermediate plate 12 can be further and The base 13 is fixed together.

As shown in FIGS. 3 and 4, the carrier 11 has a base portion 111 and a side wall 112 extending downward along the edge of the base portion 111. The base portion 111 and the side wall 112 enclose a receiving space 113 to accommodate the intermediate plate 12 and the base 13. A circular fitting hole 114 is opened in the center of the base 111 to mount the jig connector 20. The base portion 111 is also provided with four positioning holes 115. The top surface of the base portion 111 defines four receiving slots 116. One end of each receiving slot 116 communicates with a positioning hole 115, and the other end of the receiving slot 116 communicates with the mounting hole 114. The four positioning holes 115 and the four receiving grooves 116 are symmetrically distributed on the base portion 111.

As shown in FIG. 5 and FIG. 6 , the intermediate plate 12 is a circular plate. The intermediate plate 12 defines a first calibration hole 121 and a first vacuum channel 122 . The first calibration hole 121 is located at the center of the intermediate plate 12 . A vacuum channel 122 is disposed adjacent to the first calibration aperture 121. The intermediate plate 12 is further provided with a plurality of first shaft holes 123 and first fixing holes 124. In this embodiment, the number of the first shaft holes 123 and the first fixing holes 124 are respectively three, and the first shaft holes 123 and the first A fixing hole 124 is alternately arranged around the first calibration hole 121 and the first vacuum passage 122. The intermediate plate 12 has an upper surface and a lower surface opposite to the upper surface. The upper surface and the lower surface of the intermediate plate 12 are respectively provided with an annular groove 125. The annular groove 125 surrounds the first calibration hole 121, the first vacuum channel 122, and the first surface. The shaft hole 123 and the first fixing hole 124. As shown in FIG. 10, the two seal members 30 are respectively disposed on the upper and lower annular grooves 125 of the intermediate plate 12. The purpose is to seal the joint between the intermediate plate 12 and the clamp joint 20, and to seal the joint between the intermediate plate 12 and the base 13 to prevent air from entering the vacuum clamp 100.

As shown in FIGS. 7 and 8, the base 13 has a top surface and a bottom surface opposite to the top surface, and the wafer is fixedly held on the bottom surface of the base 13. The middle portion of the top surface of the base 13 is recessed toward the bottom surface of the base 13 to form a circular recess 130 to receive the intermediate plate 12. The bottom surface of the base 13 is provided with a first groove 131 and a second groove 132. The first groove 131 and the second groove 132 are concentric rings, and the first groove 131 is located between the center of the bottom surface of the base 13. The distance is greater than the distance between the second groove 132 and the center of the bottom surface of the base 13, the first groove 131 being located near the edge of the bottom surface of the base 13, and the second groove 132 being located near the bottom surface of the base 13. Center. A plurality of screw holes 133 are defined in each of the first groove 131 and the second groove 132. The first recess 131 is further provided with a plurality of, for example, four first vacuum holes 134. The first vacuum holes 134 are symmetrically distributed in the first recess 131 and penetrate the top surface and the bottom surface of the base 13. A plurality of mutually communicating air grooves 135 are defined in a bottom surface between the first groove 131 and the second groove 132. The three pressure release holes 140 are symmetrically disposed in the air groove 135 between the first groove 131 and the second groove 132 to release the vacuum negative pressure between the first groove 131 and the second groove 132, thereby causing the crystal The circle is separated from the vacuum jig 100. A second calibration hole 136 is opened in the center of the base 13. The second vacuum passage 137 extends through the base 13 and is disposed adjacent to the second alignment hole 136. The base 13 is further provided with a second shaft hole 138 and a second fixing hole 139. The number of the second shaft hole 138 and the second fixing hole 139 are respectively three, and the second shaft hole 138 and the second fixing hole 139 are alternately distributed on the base. 13 surrounds and surrounds the second calibration hole 136 and the second vacuum channel 137. The second calibration hole 136, the second vacuum channel 137, the second shaft hole 138, and the second fixing hole 139 are all surrounded by the second groove 132. The bottom surface surrounded by the second recess 132 defines a plurality of air slots 135, and the plurality of air slots 135 are respectively in communication with the second vacuum passage 137.

Referring to FIG. 12 simultaneously with FIG. 9 to FIG. 11 , the first sealing unit 40 includes at least one piece of the first metal ring 41 and the first sealing ring 42 . The central portion of the first seal ring 42 is convex to form a vacuum groove 421. A piece of the first metal ring 41 is placed in the vacuum chamber 421. The first metal ring 41 and the first sealing ring 42 are assembled in the first recess 131 of the base 13 by screws, and the screws are inserted into the screw holes 133 of the base 13 to thereby fix the first metal ring 41 and the first sealing ring. 42 and the base 13 are fixed together. The first metal ring 41 and the first sealing ring 42 are respectively provided with four second vacuum holes 43 respectively communicating with the four first vacuum holes 134 of the base 13. In the present embodiment, the first metal ring 41 is two first metal rings 41, and the two first metal rings 41 sandwich the first sealing ring 42. The second sealing unit 50 includes at least one piece of the second metal ring 51 and the second sealing ring 52. The second metal ring 51 is disposed above the inner edge of the second seal ring 52. The second metal ring 51 and the second sealing ring 52 are assembled in the second recess 132 of the base 13 by screws, and the screws are inserted into the screw holes 133 of the base 13 to thereby fix the second metal ring 51 and the second sealing ring. 52 and the base 13 are fixed together. In the present embodiment, the second metal ring 51 is two pieces of the second metal ring 51, and the two second metal rings 51 sandwich the inner edge of the second sealing ring 52. The materials of the first sealing ring 42 and the second sealing ring 52 may be selected from rubber materials according to different process requirements.

Referring to Figure 13 in conjunction with Figures 9 through 10, the connecting tube 60 is a hollow connecting tube 60 which is generally L-shaped. One end of the connecting tube 60 is threaded and fixedly mounted in the first vacuum hole 134 of the base 13. The other end of the connecting tube 60 is substantially tapered. The other end of the connecting tube 60 passes through the positioning hole 115 of the carrier 11 and is inserted into the vacuum tube. 70, the vacuum tube 70 is received in the receiving groove 116 of the carrier 11. Corresponding to the number of the positioning holes 115 and the receiving grooves 116 of the carrier 11, the number of the connecting tubes 60 and the vacuum tubes 70 is four.

Referring to Figures 14 and 15 in conjunction with Figures 1 and 9 to 11, the top surface of the clamp connector 20 is provided with two elongated strip-shaped suction ports 21 which are parallel to each other. The side wall of the clamp connector 20 is provided with four air suction holes 22, and the air suction holes 22 are respectively communicated with the air suction port 21, and the vacuum tube 70 is in communication with the air suction holes 22. The bottom surface of the clamp connector 20 is provided with a third calibration hole 23 and a third vacuum channel 24, wherein the third calibration hole 23 is located at the center of the bottom surface of the clamp connector 20, and the third vacuum channel 24 and the third calibration hole 23 Adjacent to and through the clamp connector 20. The bottom surface of the clamp connector 20 is further provided with a plurality of third shaft holes 25 and a third fixing hole 26. In the embodiment, the number of the third shaft hole 25 and the third fixing hole 26 are respectively three, and the third axis The hole 25 and the third fixing hole 26 are alternately arranged around the third calibration hole 23 and the third vacuum passage 24. Two elongated strip-shaped annular seal sleeves 80 are provided at the suction port 21 to prevent gas from leaking from the suction port 21. The clamp connector 20 is fixedly mounted at the mounting hole 114 of the carrier 11 and inserts the screw into the first fixing hole 124, the second fixing hole 139 and the third fixing hole 26, thereby connecting the clamp connector 20 and the intermediate plate 12. And the base 13 is fixed together. Three main shafts (not shown) are respectively inserted into the first shaft hole 123, the second shaft hole 138, and the third shaft hole 25. A calibration device (not shown) is disposed at the first calibration hole 121, the second calibration hole 136, and the third calibration hole 23 to detect whether the wafer is located at a center position of the vacuum chuck 100.

When the wafer is held by the vacuum jig 100, the bottom surface of the chassis 13 is in contact with the wafer as an adsorption surface. The first seal ring 42 is in contact with the outer edge portion of the wafer, and the gas in the vacuum chamber 421 is sequentially discharged through the second vacuum hole 43, the first vacuum hole 134, the connection tube 60, the vacuum tube 70, the suction hole 22, and the suction port 21. The second sealing ring 52 is in contact with the central portion of the wafer near the center, and the gas in the space enclosed by the second sealing ring 52 and the wafer is sequentially passed through the air groove 135 on the bottom surface of the base 13 surrounded by the second groove 132. The second vacuum passage 137, the first vacuum passage 122, and the third vacuum passage 24 are discharged. The vacuum clamp 100 of the present invention provides the vacuum clamp 100 with good airtightness by providing the first sealing ring 42 and the second sealing ring 52, so that the wafer can be firmly clamped on the vacuum clamp 100.

In view of the above, the present invention has been specifically and specifically disclosed by the above-described embodiments and related drawings, and can be implemented by those skilled in the art. The above-mentioned embodiments are only intended to illustrate the invention, and are not intended to limit the invention. The scope of the invention should be defined by the scope of the invention. Changes in the number of elements described herein or substitution of equivalent elements are still within the scope of the invention.

11‧‧‧Carrier

13‧‧‧Base

41‧‧‧First metal ring

42‧‧‧First seal

43‧‧‧second vacuum hole

51‧‧‧Second metal ring

52‧‧‧Second seal

100‧‧‧vacuum fixture

135‧‧ Air trough

136‧‧‧Second calibration hole

137‧‧‧Second vacuum channel

138‧‧‧Second shaft hole

139‧‧‧Second fixing hole

140‧‧‧ Pressure release hole

Claims (26)

A vacuum clamp, comprising: a load bearing assembly, the load bearing assembly has a groove, the groove is provided with at least one first vacuum hole; a sealing unit, the sealing unit comprises a sealing ring, and the sealing ring is raised Forming a vacuum groove, the sealing ring is provided with at least one second vacuum hole, the sealing ring is fixedly disposed in the groove of the bearing assembly, and the second vacuum hole of the sealing ring is in communication with the first vacuum hole of the bearing assembly; the clamp connector The clamp connector has at least one air suction port and at least one air suction hole communicating with the air suction port, the clamp connector is fixedly connected to the load bearing assembly; and at least one vacuum tube that will carry the first vacuum hole of the assembly It is in communication with the suction hole of the clamp connector. The vacuum clamp according to claim 1, wherein the sealing unit further comprises a fixing ring, and the fixing ring is provided with at least one second vacuum hole, the fixing ring is placed in the vacuum groove of the sealing ring, and the fixing ring is second. The vacuum hole communicates with the second vacuum hole of the sealing ring, and the fixing ring and the sealing ring are fixedly disposed in the groove of the bearing assembly. A vacuum chuck according to claim 2, wherein the fixing ring is a metal ring. A vacuum chuck according to claim 1, wherein the seal ring is a rubber seal ring. The vacuum clamp according to claim 1, wherein the load bearing assembly comprises a carrier body and a base, the carrier body has a base portion and a side wall extending downwardly along the base portion, and the base portion and the side wall enclose a receiving space to accommodate Base, base The assembly hole is provided to install the clamp connector, and the base portion is further provided with at least one positioning hole and a receiving groove. One end of the receiving groove communicates with the positioning hole, and the other end of the receiving groove communicates with the mounting hole, and the groove and the first vacuum hole are disposed on the On the base, the first vacuum hole communicates with the positioning hole, and the vacuum tube is received in the receiving groove. The vacuum clamp according to claim 5, further comprising a hollow connecting pipe, one end of the connecting pipe is fixedly mounted in the first vacuum hole of the base, and the other end of the connecting pipe is inserted through the positioning hole of the carrier body Vacuum tube. The vacuum clamp according to claim 6, wherein the connecting pipe is L-shaped, and one end of the connecting pipe fixedly mounted in the first vacuum hole of the base has a thread, and is inserted into the vacuum tube through the positioning hole of the carrier body. The other end of the connecting tube is tapered. The vacuum chuck according to claim 5, characterized in that the base is provided with a plurality of air grooves communicating with each other, and the air grooves are surrounded by the grooves of the base. A vacuum chuck according to claim 8, wherein at least one of the pressure release holes is provided in the air tank. A vacuum clamp, comprising: a bearing assembly, the load bearing assembly has a first groove and a second groove, wherein the first groove is provided with at least one first vacuum hole, and the second groove is surrounded by a vacuum channel is disposed in the load-bearing assembly; the first sealing unit includes a first sealing ring, the first sealing ring protrusion forms a vacuum groove, and the first sealing ring is provided with at least one second vacuum hole, The first sealing ring is fixedly disposed in the first groove of the bearing assembly, and the second vacuum hole of the first sealing ring is connected to the first vacuum hole of the bearing assembly a second sealing unit, the second sealing unit includes a second sealing ring, the second sealing ring is fixedly disposed in the second groove of the bearing assembly; the clamp connector has at least one air suction port a third vacuum passage communicating with the suction port and a third vacuum passage communicating with the vacuum passage of the load bearing assembly, the clamp connector being fixedly coupled to the load bearing assembly; and at least one vacuum tube carrying the assembly The first vacuum hole is in communication with the suction hole of the clamp connector. The vacuum clamp according to claim 10, wherein the first groove and the second groove are concentric rings, and a distance between the first groove and a center of the carrier assembly is greater than a second groove and The distance between the centers of the bearing assemblies. The vacuum chuck according to claim 10, wherein the first sealing ring and the second sealing ring are both rubber sealing rings. The vacuum clamp according to claim 10, wherein the first sealing unit further comprises a first fixing ring, the first fixing ring is provided with at least one second vacuum hole, and the first fixing ring is placed on the first sealing ring The second vacuum hole of the first fixing ring communicates with the second vacuum hole of the first sealing ring, and the first fixing ring and the first sealing ring are fixedly disposed in the first groove of the bearing assembly. The vacuum clamp according to claim 10, wherein the second sealing unit further comprises a second fixing ring, the second fixing ring is disposed above the inner edge of the second sealing ring, the second fixing ring and the second sealing The ring is fixedly disposed within the second recess of the load bearing assembly. The vacuum chuck according to claim 13 or 14, wherein the first fixing ring and the second fixing ring are metal rings. The vacuum clamp according to claim 10, wherein the load bearing assembly comprises a carrier body and a base, the carrier body has a base portion and a side wall extending downwardly along the base portion, and the base portion and the side wall enclose a receiving space to accommodate The base is provided with a mounting hole for mounting the clamp connector, and the base is further provided with at least one positioning hole and a receiving groove. One end of the receiving groove communicates with the positioning hole, and the other end of the receiving groove communicates with the mounting hole, the first groove and the first The two grooves are disposed on the base, the first vacuum hole is in communication with the positioning hole, and the vacuum tube is received in the receiving groove. The vacuum clamp according to claim 16, further comprising a hollow connecting pipe, one end of the connecting pipe is fixedly mounted in the first vacuum hole of the base, and the other end of the connecting pipe is inserted through the positioning hole of the carrier body Vacuum tube. The vacuum clamp according to claim 17, wherein the connecting tube is L-shaped, and one end of the connecting tube fixedly mounted in the first vacuum hole of the base has a thread, and the vacuum tube is inserted through the positioning hole of the carrier body. The other end of the connecting tube is tapered. The vacuum clamp according to claim 16, wherein the bottom surface of the base between the first groove and the second groove is provided with a plurality of mutually communicating air grooves. A vacuum chuck according to claim 19, characterized in that at least one of the pressure release holes is provided in the air tank. The vacuum clamp according to claim 16, wherein the bottom surface of the base surrounded by the second recess is provided with a plurality of air slots, and the plurality of air slots are respectively connected to the vacuum passage of the load bearing assembly. The vacuum clamp according to claim 16, wherein the load bearing assembly further comprises an intermediate plate disposed between the carrier and the base and fixedly connected with the clamp connector, wherein the intermediate plate is provided with a first vacuum passage The base is provided with a second vacuum channel, and the first vacuum channel, the second vacuum channel and the third vacuum channel of the clamp connector are connected. The vacuum clamp according to claim 22, wherein the intermediate plate has an upper surface and a lower surface opposite to the upper surface, and the upper surface and the lower surface of the intermediate plate are respectively provided with annular grooves, and the annular groove surrounds the first The vacuum passages are respectively disposed in the annular grooves of the upper surface and the lower surface of the intermediate plate. The vacuum clamp according to claim 23, wherein the center plate, the base and the center of the clamp connector are respectively provided with calibration holes, and the first vacuum channel, the second vacuum channel and the third vacuum channel are respectively adjacent to the calibration hole. Arrangement. The vacuum clamp according to claim 24, wherein the intermediate plate, the base and the clamp connector are respectively provided with a plurality of fixing holes, and the plurality of fixing holes are arranged around the calibration hole and the vacuum channel. The vacuum clamp according to claim 24, wherein the intermediate plate, the base and the clamp connector are respectively provided with a plurality of shaft holes, and the plurality of shaft holes are arranged around the calibration hole and the vacuum passage.