TW201503395A - Method, computer program, controller and binning apparatus for distributing wafers to bins - Google Patents

Method, computer program, controller and binning apparatus for distributing wafers to bins Download PDF

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TW201503395A
TW201503395A TW102143461A TW102143461A TW201503395A TW 201503395 A TW201503395 A TW 201503395A TW 102143461 A TW102143461 A TW 102143461A TW 102143461 A TW102143461 A TW 102143461A TW 201503395 A TW201503395 A TW 201503395A
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wafer
priority
group
wafers
bins
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TW102143461A
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Chinese (zh)
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Tommaso Vercesi
Santi Luigi De
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Applied Materials Itlia S R L
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B07SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07CPOSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C5/00Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
    • B07C5/34Sorting according to other particular properties
    • B07C5/344Sorting according to other particular properties according to electric or electromagnetic properties

Abstract

A method for delivering wafers to a multitude of bins is provided. The method for delivering wafers to a multitude of bins includes configuring quality classes of the wafers dependent on at least one characteristic of the wafers; configuring priority groups including at least a high priority group and a low priority group; assigning each of the quality classes to one of the priority groups; assigning each of the multitude of bins to one of the priority groups; providing examination results for the wafers; classifying each of the wafers into one of the quality classes according to the examination result of the wafer; and delivering each of the wafers to one of the multitude of bins according to the priority group assigned to the quality class of the wafer. A computer program, a computer readable medium, a controller for a binning apparatus, and a binning apparatus (30) are also provided.

Description

用於將晶片分佈至元件屜的方法、電腦程式、控制器和 組裝裝置 Method, computer program, controller and method for distributing a wafer to a component tray Assembly device

本案的實施方式涉及一種組裝方法、一種製造太陽能電池的方法、一種改進組裝裝置的方法、一種電腦程式、一種包括所述電腦程式的電腦可讀取媒體,以及一種用於將晶片分佈到元件屜的組裝裝置。本案的標的尤其涉及太陽能電池的製造製程以及一種太陽能電池的製造裝置。特別地,本案的標的涉及用於(尤其是太陽能電池的)處理後晶片的組裝的一種方法和裝置。 Embodiments of the present invention relate to an assembly method, a method of manufacturing a solar cell, a method of improving an assembly apparatus, a computer program, a computer readable medium including the computer program, and a method for distributing a wafer to a component drawer Assembly device. The subject matter of this case relates in particular to a manufacturing process of a solar cell and a manufacturing apparatus of a solar cell. In particular, the subject matter of the present disclosure relates to a method and apparatus for the assembly of processed wafers, particularly for solar cells.

太陽能電池是將陽光轉換成為電能的光生伏打設備。典型的太陽能電池(在本文中還可以稱為「電池」)包含基板(在本文中還可以稱為「晶片」)。所述晶片通常由矽製成。所述晶片可能具有形成於晶片中的一或多個p-n結。每一p-n結具有一p型區域和一N型區域。當所述p-n結暴露於陽光時,所述陽光通過光生伏打效應轉變為電。 A solar cell is a photovoltaic device that converts sunlight into electrical energy. A typical solar cell (also referred to herein as a "battery") includes a substrate (which may also be referred to herein as a "wafer"). The wafer is typically made of tantalum. The wafer may have one or more p-n junctions formed in the wafer. Each p-n junction has a p-type region and an n-type region. When the p-n junction is exposed to sunlight, the sunlight is converted to electricity by the photovoltaic effect.

大量太陽能電池裝配成的太陽能電池陣列通常還被 稱為太陽能電池板或者太陽能電池組件。太陽能電池板被出售給最終用戶(諸如私人家庭),以安裝到屋頂上,用於發電私用及/或發電供應給公用電網。 Solar arrays assembled from a large number of solar cells are usually also It is called a solar panel or a solar cell module. Solar panels are sold to end users (such as private homes) for installation on the roof for power generation private and/or power generation to the utility grid.

具有最差性能的太陽能電池實質上限定了整個太陽能電池板的性能。經驗也表明客戶更喜歡各晶片具有同質顏色外觀的太陽能電池板,而非各太陽能電池顏色不同的太陽能電池板。此外,一些電池可能更適於(例如)直接的光入射,而其他的電池更適用於間接的光入射。此對於其他情況可能也成立。 Solar cells with the worst performance substantially define the performance of the entire solar panel. Experience has also shown that customers prefer solar panels with the same color appearance on each wafer, rather than solar panels with different solar cell colors. In addition, some batteries may be more suitable, for example, for direct light incidence, while others are more suitable for indirect light incidence. This may also be true for other situations.

因此,在本領域中期望取決於太陽能電池的特徵來區分所述太陽能電池,並收集具有相同或者非常相似的特性的那些晶片,以與具有不同特徵的其他晶片分離。而且期望此種收集晶片的方式不會在每小時所製成晶片方面降低太陽能電池製造的整體性能。 Accordingly, it is desirable in the art to distinguish the solar cells depending on the characteristics of the solar cell and collect those wafers having the same or very similar characteristics to separate from other wafers having different characteristics. It is also desirable that such a method of collecting wafers does not reduce the overall performance of solar cell fabrication in terms of wafers produced per hour.

鑒於以上所述,本案是針對以下內容。 In view of the above, the case is directed to the following.

根據一個方面,提供了一種將晶片傳送到大量元件屜(bin)的方法。此用於將晶片傳送到大量元件屜的方法包含:取決於所述晶片的至少一個特徵配置所述晶片的品質等級;配置優先順序組,使所述優先順序組至少包含一高優先順序組和一低優先順序組;指派所述品質等級中的每一者到所述優先順序組中的一者;指派所述大量元件屜中的每一者到所述優先順序組中的一個優先順序組;提供所述晶片的檢查結果;根據所述晶片的檢查結果,將所述晶片中的每一者 分類為所述品質等級中的一者;及根據指派給所述晶片的所述品質等級的所述優先順序組,將所述晶片中的每一者傳送到所述大量組件屜中的一者。 According to one aspect, a method of transferring a wafer to a plurality of component bins is provided. The method for transferring a wafer to a plurality of component trays includes: configuring a quality level of the wafer depending on at least one characteristic of the wafer; configuring a priority order group such that the priority order group includes at least one high priority group and a low priority group; assigning each of the quality levels to one of the priority groups; assigning each of the plurality of component drawers to a priority order group of the priority order group Providing an inspection result of the wafer; each of the wafers is inspected according to the inspection result of the wafer Classifying one of the quality levels; and transmitting each of the wafers to one of the plurality of bins based on the prioritized set of the quality levels assigned to the wafer .

根據一方面,提供了一種製造太陽能電池的方法。所述方法包含:提供晶片;在所述晶片上沉積導電通路;及組裝(binning)所述晶片,如本文所描述的。 According to an aspect, a method of fabricating a solar cell is provided. The method includes: providing a wafer; depositing a conductive via on the wafer; and binning the wafer, as described herein.

根據一方面,提供了用於組裝裝置的控制器。所述控制器配置用於執行如本文所描述的方法。 According to an aspect, a controller for assembling a device is provided. The controller is configured to perform a method as described herein.

根據一個方面,提供了一種將晶片傳送到大量元件屜的組裝裝置。所述組裝裝置包含一或多個用於將晶片傳送到大量元件屜的輸送系統。所述組裝裝置更包含如本文所描述的用於控制所述一或多個輸送系統的控制器。 According to one aspect, an assembly apparatus for transferring a wafer to a plurality of component drawers is provided. The assembly apparatus includes one or more delivery systems for transporting wafers to a plurality of component drawers. The assembly apparatus further includes a controller for controlling the one or more delivery systems as described herein.

根據一方面,提供了一種太陽能電池製造裝置。所述太陽能電池製造裝置包含:一或多個沉積裝置,用於在晶片上沉積導電通路;一或多個檢查裝置,用於檢查所述晶片;及如本文所描述的一或多個組裝裝置。 According to an aspect, a solar cell manufacturing apparatus is provided. The solar cell manufacturing apparatus includes: one or more deposition devices for depositing a conductive via on a wafer; one or more inspection devices for inspecting the wafer; and one or more assembly devices as described herein .

根據一方面,提供了一種用於改進組裝裝置的方法。所述組裝裝置包含控制器。所述方法包括將如本文所描述的電腦程式載入到控制器。 According to an aspect, a method for improving an assembly device is provided. The assembly device includes a controller. The method includes loading a computer program as described herein to a controller.

根據一方面,提供了一種電腦程式。所述電腦程式包括電腦代碼,當所述電腦程式在電腦上運行時所述電腦代碼適合於執行如本文所描述的方法。 According to one aspect, a computer program is provided. The computer program includes computer code that is adapted to perform a method as described herein when the computer program is run on a computer.

根據一方面,提供了一種電腦可讀取媒體。所述電腦可讀取媒體儲存如本文所描述的電腦程式。 According to one aspect, a computer readable medium is provided. The computer readable medium stores a computer program as described herein.

自從屬請求項、所述描述以及所述附圖,進一步實施方式、方面、細節以及優點將更顯而易見。 Further embodiments, aspects, details and advantages will become more apparent from the claims, the description and the drawings.

因此,為了可詳細瞭解本案的以上詳述特徵結構,以上簡略概述的本案的更特定描述可參照實施方式。以下描述與本案的實施方式相關的附圖:圖1圖示根據如本文所描述的實施方式的太陽能電池製造裝置的示意圖,所述太陽能電池製造裝置包括組裝裝置;圖2圖示根據如本文所描述的實施方式的太陽能電池製造裝置的示意圖,所述太陽能電池製造裝置包括組裝裝置;圖3圖示根據如本文所描述的實施方式的示例性組裝裝置的示意性俯視圖;圖4圖示根據如本文所描述的實施方式的示例性組裝裝置的示意性俯視圖,其中在元件屜的每一者中繪示示例性優先順序組編號;圖5圖示根據太陽能電池製造的示例性測試運行分出的各種等級內分佈的晶片的示意圖;圖6圖示根據本文描述的實施方式的組裝裝置的說明性側面透視圖;圖7圖示根據本文描述的實施方式的元件屜的說明性三維視圖;圖8圖示根據本領域已知的實施方式的組裝邏輯(binning logics)的圖例;及圖9圖示根據如本文所描述的實施方式的組裝邏輯的圖例。 Therefore, for a more detailed description of the above detailed features of the present invention, a more specific description of the present invention briefly outlined above may be referred to the embodiments. The following is a drawing related to an embodiment of the present invention: FIG. 1 illustrates a schematic diagram of a solar cell manufacturing apparatus including an assembly apparatus according to an embodiment as described herein; FIG. 2 illustrates A schematic diagram of a solar cell manufacturing apparatus of the described embodiment, the solar cell manufacturing apparatus including an assembly apparatus; FIG. 3 illustrates a schematic top view of an exemplary assembly apparatus according to an embodiment as described herein; A schematic top view of an exemplary assembly apparatus of the embodiments described herein, wherein an exemplary priority group number is depicted in each of the component drawers; FIG. 5 illustrates an exemplary test run split according to solar cell fabrication Schematic diagram of wafers distributed within various grades; FIG. 6 illustrates an illustrative side perspective view of an assembly apparatus in accordance with embodiments described herein; FIG. 7 illustrates an illustrative three-dimensional view of a component drawer in accordance with embodiments described herein; A legend illustrating binning logics in accordance with embodiments known in the art; and Figure 9 A legend of assembly logic in accordance with an embodiment as described herein.

現將詳細提及本發明的各種實施方式,其中所述實施方式的一或多個實例圖示於諸圖中。在以下附圖的描述中,相同元件符號代表相同元件。在本案中,僅描述了各實施方式的差異。各實例以解釋說明本發明的方式提供,而並非意欲限制本發明。此外,圖示或者描述為一個實施方式的部分的特徵結構可用於更進一步的實施方式,或者與其他實施方式結合以用於產生更進一步的實施方式。所述描述意欲包括此類修改和變更。 Reference will now be made in detail to the various embodiments of the invention, In the description of the following drawings, the same element symbols represent the same elements. In the present case, only the differences of the various embodiments are described. The examples are provided by way of explanation of the invention and are not intended to limit the invention. Furthermore, the features illustrated or described as part of one embodiment can be used in a further embodiment or in combination with other embodiments for the further embodiments. The description is intended to include such modifications and changes.

用於太陽能電池製造工業的晶片是以一序列各種製程步驟製造的。特別地,通常將一塊(多晶或單晶的)錠料鋸成個體晶片。通常,所述晶片由矽製成。所述晶片可具有150μm以下的厚度,或者甚至100μm以下的厚度。所述晶片的典型大小在10cm x 10cm和20cm x 20cm的範圍之內。如本文所理解的,晶片可以是方形的,視情況可具有切角。 Wafers used in the solar cell manufacturing industry are manufactured in a sequence of various process steps. In particular, a single (polycrystalline or single crystal) ingot is typically sawn into individual wafers. Typically, the wafer is made of tantalum. The wafer may have a thickness of 150 μm or less, or even a thickness of 100 μm or less. Typical dimensions of the wafer are in the range of 10 cm x 10 cm and 20 cm x 20 cm. As understood herein, the wafer can be square, optionally having a chamfer.

所述晶片經歷若干摻雜、鑽鑿、光刻和加熱步驟,以用於製造太陽能電池,所述太陽能電池將裝配到一起以形成太陽能電池板。雖然產業探求一種能夠製造完全相同的和具有最佳化特性的太陽能晶片的製造製程,但是實際上從相同的製造製程獲得的連續晶片彼此之間特性(諸如晶片暴露於陽光下時的性能、晶片的顏色、晶片的物理完整性、晶片對入射光的適應性等)不同。此是由於原材料的差異以及進一步製程步驟中的偏差和干擾。 The wafer undergoes several doping, drilling, photolithography, and heating steps for fabricating solar cells that will be assembled together to form a solar panel. Although the industry seeks a manufacturing process that can produce identical and optimized solar wafers, the actual wafers obtained from the same manufacturing process are characterized by each other (such as the performance of the wafer when exposed to sunlight, wafers). The color, the physical integrity of the wafer, the suitability of the wafer for incident light, etc.) are different. This is due to differences in raw materials and deviations and disturbances in further process steps.

因此,可以對處理後的晶片進行關於一組相關特性 的分析,並且取決於所述分析的結果,可將具有相關特性的晶片收集,以與其他具有不同特性的晶片分離。 Therefore, a processed set of related characteristics can be performed on the processed wafer. The analysis, and depending on the results of the analysis, wafers with associated properties can be collected to separate from other wafers having different characteristics.

所述晶片的收集通常是在元件屜內完成的,所述元件屜在此應理解為單元,所述單元配置用於單元中儲存若干晶片。如在本文中所理解的,元件屜可能是箱子,諸如由聚苯乙烯製成,通常缺漏一個或兩個側壁。換句話說,元件屜可能是僅具有兩個或者三個側壁的箱子。此類箱子的實例如圖7所示。如本文所描述的組裝裝置可配置為使得所述元件屜與所述元件屜的底部(見圖7中的元件符號71)對準,所述元件屜的底部可能與水平面呈角度,例如,呈10°或更大之角度。 The collection of the wafers is generally done in a component drawer, which is here understood to be a unit configured to store several wafers in a cell. As understood herein, the component drawer may be a box, such as made of polystyrene, typically missing one or both side walls. In other words, the component drawer may be a box with only two or three side walls. An example of such a box is shown in Figure 7. The assembly device as described herein may be configured such that the component drawer is aligned with the bottom of the component drawer (see reference numeral 71 in Figure 7), the bottom of which may be at an angle to the horizontal plane, for example, An angle of 10° or more.

術語「傳送晶片到元件屜」、「分佈晶片到元件屜」、「對晶片進行分類」以及「組裝」應理解為含義相同,並且應理解為移動所述晶片到不同的組件屜。所述處理後晶片的特性必須在可選擇的區間內,以便將晶片歸類入各個元件屜。因此每一組件屜內的晶片包含大量非常相似的晶片。在上下文中使用的「類似」必須被理解為進行組裝製程分析的晶片特性相同或者具有邊際偏差。 The terms "transfer wafer to component", "distribute wafer to component", "classify wafer", and "assemble" are understood to have the same meaning and are understood to move the wafer to a different assembly. The characteristics of the processed wafer must be within selectable intervals to classify the wafer into individual bins. Thus the wafer within each bin contains a large number of very similar wafers. "Similar" as used in this context must be understood to mean that the wafer characteristics for the assembly process analysis are the same or have marginal deviations.

每個元件屜具有最大容量。一旦達到個別元件屜的最大容量,必須用空的元件屜替換個別元件屜。此舉可以手動或自動地進行。然而,發明人發現已知的組裝方法會造成整體生產的延遲。例如,當組裝方法執行為使若干元件屜中每個元件屜對應於處理後晶片取決於晶片特性的不同品質等級時,若一個元件屜裝滿並從而需要以空的元件屜替換,則 可能發生整個製造必須中止的情況。如將從本描述顯而易見的是,根據本案的實施方式,即使是元件屜的手工替換(可能需要花費幾分鐘),通常也不會導致生產程序的中止。 Each bin has the maximum capacity. Once the maximum capacity of the individual bins is reached, the individual bins must be replaced with empty bins. This can be done manually or automatically. However, the inventors have found that known assembly methods can cause delays in overall production. For example, when the assembly method is performed such that each of the plurality of bins corresponds to a different quality level of the processed wafer depending on the characteristics of the wafer, if one of the bins is full and thus needs to be replaced with an empty bin, It may happen that the entire manufacturing must be aborted. As will be apparent from the description, even in the case of the embodiment of the present invention, even manual replacement of the component drawer (which may take several minutes) does not usually result in the suspension of the production process.

圖1示意性地圖示根據本文描述的實施方式用於製造太陽能電池的太陽能電池製造裝置1。所述晶片在一或多個處理裝置10中處理。例如,所述說明性圖示的裝置10可能是以下裝置中一或多個裝置的組合:鋸切裝置、清洗裝置、摻雜裝置、沉積裝置、光刻裝置、翻轉裝置、烤箱、檢查裝置、鑽鑿裝置等。特定言之,裝置10可包括若干個光刻裝置,所述光刻裝置配置用於在所述晶片上光刻一或多個導電材料通路。顯著地,處理裝置10可包括一或多個檢查裝置,所述檢查裝置用於所述製程步驟的中間檢查及/或進一步地處理步驟的對準。 Fig. 1 schematically illustrates a solar cell manufacturing apparatus 1 for manufacturing a solar cell according to embodiments described herein. The wafer is processed in one or more processing devices 10. For example, the illustrative illustrated device 10 may be a combination of one or more of the following devices: a sawing device, a cleaning device, a doping device, a deposition device, a lithographic device, a flip device, an oven, an inspection device, Drilling devices, etc. In particular, device 10 can include a plurality of lithographic devices configured to lithographically etch one or more conductive material vias on the wafer. Notably, the processing device 10 can include one or more inspection devices for intermediate inspection of the process steps and/or further alignment of the processing steps.

此外,如在圖1中示意性圖示的,在處理晶片之後,具體地說在完成太陽能電池之後並且在組裝之前,在一或多個檢查裝置20中分析所述晶片。例如,有可能提供一個、兩個、三個或更多個檢查裝置,其中每個檢查裝置配置用於檢查所述晶片的一個特定特性。待分析的特性通常是由操作者依據所述生產程序的技術和經濟需求進行選擇。但是在下文中,待分析特性的一些實例應是示例性論述的。應注意的是,術語「處理後晶片」尤其包括完全製成的太陽能電池。 Furthermore, as schematically illustrated in FIG. 1, the wafer is analyzed in one or more inspection devices 20 after processing the wafer, specifically after completion of the solar cell and prior to assembly. For example, it is possible to provide one, two, three or more inspection devices, each of which is configured to inspect a particular characteristic of the wafer. The characteristics to be analyzed are usually chosen by the operator in accordance with the technical and economic needs of the production process. However, in the following, some examples of the characteristics to be analyzed should be exemplarily discussed. It should be noted that the term "processed wafer" includes, in particular, a fully fabricated solar cell.

例如,一或多個所述檢查裝置可配置用於檢查處理後晶片的物理完整性,具體來說,檢查所述晶片是否包括損壞部分或者邊緣、裂縫、裂痕等等。還可檢查所述晶片是否 有光刻殘留物,也就是說,是否有光刻材料沉積在所述晶片上不應沉積的位置。 For example, one or more of the inspection devices can be configured to check the physical integrity of the processed wafer, in particular, to check whether the wafer includes damaged portions or edges, cracks, cracks, and the like. Can also check if the wafer is There is lithographic residue, that is, whether there is a lithographic material deposited on the wafer where it should not be deposited.

一或多個所述檢查裝置可以配置用於檢查所述太陽能電池的顏色。所述太陽能電池的顏色主要因為兩個原因從而是有關係的。其中一個原因是,使用若干個太陽能電池裝配到一起製成的太陽能電池板的客戶更喜歡同質外觀的太陽能電池板。換句話說,太陽能電池板中的太陽能電池具有不同顏色的太陽能電池板在消費市場上具有缺陷。另一原因是,所述顏色,尤其是晶片中的黑色部分,是與晶片的性能和典型陽光環境下晶片的適應性相關的。明亮的太陽能晶片通常效率比黑色的太陽能電池低,這是因為明亮的太陽能電池比黑色的太陽能電池反射更多的光(並因此吸收更少的光)。 One or more of the inspection devices may be configured to check the color of the solar cell. The color of the solar cell is primarily related for two reasons. One reason for this is that customers who use several solar cells assembled together to make solar panels prefer solar panels of the same appearance. In other words, solar cells in solar panels have solar panels of different colors that have drawbacks in the consumer market. Another reason is that the color, especially the black portion of the wafer, is related to the performance of the wafer and the suitability of the wafer in a typical sunny environment. Bright solar wafers are generally less efficient than black solar cells because bright solar cells reflect more light (and therefore less light) than black solar cells.

所述檢查裝置中的一或多者可以配置用於檢查取決於入射光的反射特性。此檢查可能與所述太陽能電池最適合安裝在世界上的哪個地區的決定相關。例如,靠近赤道的地區中太陽能電池全年暴露於大量直射的以及幾乎直射的陽光,而世界上北半球或南半球的太陽能電池全年暴露於多變的入射光。具體地說,大部分時間入射角都不是垂直的。 One or more of the inspection devices may be configured to inspect a reflection characteristic that depends on incident light. This check may be related to the decision of which solar cell is best suited to be installed in the world. For example, solar cells in the vicinity of the equator are exposed to a large amount of direct and almost direct sunlight throughout the year, while solar cells in the northern or southern hemisphere of the world are exposed to variable incident light throughout the year. Specifically, most of the time the angle of incidence is not vertical.

所述檢查裝置中的一或多者可以配置用於檢查所述太陽能電池的性能。例如,所述檢查裝置可包括太陽能模擬器,所述太陽能模擬器通常適用於根據類似於自然陽光的光譜分佈來產生一束光。可測量所產生的能量。太陽能電池的性能當然是太陽能電池的關鍵因素之一。 One or more of the inspection devices may be configured to check the performance of the solar cell. For example, the inspection device can include a solar simulator that is generally adapted to generate a beam of light according to a spectral distribution similar to natural sunlight. The energy produced can be measured. The performance of solar cells is of course one of the key factors in solar cells.

可根據本案提供各種其他的檢查裝置。此外應注意 的是,本文所描述的組裝方法也適用於中間太陽能電池生產階段的晶片。例如,可以在鋸切之後檢查所述晶片的特性,諸如晶片表面的均一性、晶片厚度的均一性、晶片邊緣的完整性等。隨後所述晶片可以根據它們的特性區分,以進行進一步處理。另外或替代地,所述晶片可以在處理期間如本文所描述的組裝,例如在晶片上光刻一或多個導電通路期間。 Various other inspection devices can be provided in accordance with the present disclosure. Also note The assembly method described herein is also applicable to wafers in the middle solar cell production stage. For example, the characteristics of the wafer can be examined after sawing, such as uniformity of the wafer surface, uniformity of wafer thickness, integrity of the wafer edge, and the like. The wafers can then be differentiated according to their characteristics for further processing. Additionally or alternatively, the wafer may be assembled as described herein during processing, such as during photolithography of one or more conductive vias on a wafer.

太陽能電池具有前側和後側,兩側通常都經處理。具體地說,通常在所述背側和前側中的每一者上執行至少一個光刻程序(可能是兩個或者甚至更多個光刻程序)。因此根據實施方式,尤其可在一或多個檢查裝置20之前、之間或者之後提供翻轉裝置。翻轉裝置應理解為將晶片從一側翻轉到另一側的裝置。例如,所述晶片可以用背側支撐,以用於在一或多個檢查裝置中進行一些前側的檢查。隨即,可以用翻轉裝置翻轉晶片,使所述晶片以前側支撐。因此,一或多個其他檢查裝置可以檢查背側。 The solar cell has a front side and a back side, both sides are usually treated. In particular, at least one lithography process (possibly two or even more lithography processes) is typically performed on each of the back side and the front side. Thus, depending on the embodiment, the turning device can be provided in particular before, between or after one or more inspection devices 20. A flipping device is understood to mean a device that flips the wafer from one side to the other. For example, the wafer can be supported on the back side for some front side inspection in one or more inspection devices. Immediately, the wafer can be flipped with a flipping device to support the wafer on the front side. Therefore, one or more other inspection devices can inspect the back side.

根據實施方式,將所述晶片從檢查裝置20轉送到組裝裝置30。不限於將所述晶片從檢查裝置20傳送到組裝裝置的實施方式,晶片可以用一個傳送帶或者一序列連續的傳送帶在本文描述的任何裝置之內、之前或之後移動晶片。 According to an embodiment, the wafer is transferred from the inspection device 20 to the assembly device 30. Without being limited to embodiments in which the wafer is transferred from the inspection device 20 to the assembly device, the wafer may be moved within, before or after any of the devices described herein with a conveyor belt or a sequence of continuous conveyor belts.

基於檢查結果,可以根據晶片的特性將晶片分類為不同的品質等級(或者此處簡單地稱為「等級」)。所述晶片可以分類為n個不同的等級,其中n代表通常大於24的整數。例如,n可以是48。特別地,本發明人發現所述數量的處理後晶片並非是均勻分佈於所有的品質等級,更確切地說生產製 程通常導致較高數量的太陽能電池在一些等級中,而較低數量的太陽能電池在其他等級中。此將在下文進一步解釋。 Based on the inspection results, the wafers can be classified into different quality levels (or simply referred to herein as "levels") depending on the characteristics of the wafer. The wafers can be classified into n different levels, where n represents an integer generally greater than 24. For example, n can be 48. In particular, the inventors have found that the number of processed wafers is not evenly distributed over all quality levels, more specifically in production. The process typically results in a higher number of solar cells in some grades, while a lower number of solar cells are in other grades. This will be explained further below.

不限於任何實施方式,如所解釋的,晶片的品質等級是取決於所述晶片的至少一個特性配置的。此外,根據本案的各方面,配置優先順序組。所述優先順序組至少包含一個高優先順序組和一個低優先順序組。在本文中,「配置品質等級」或者「配置優先順序組」可被理解為「使品質等級或優先順序組的定義適用於組裝程序。」「配置」具體包括(例如)由操作者定義。另外地或替代地,「配置」可以包括從資料庫或者其他存放裝置(諸如隨機存取設備)讀取個別的定義。 Without being limited to any embodiment, as explained, the quality level of the wafer is configured depending on at least one characteristic of the wafer. In addition, according to aspects of the present case, a priority group is configured. The priority order group includes at least one high priority group and one low priority group. In this document, "configuration quality level" or "configuration priority group" can be understood as "making the definition of quality level or priority group apply to the assembly process." "Configuration" specifically includes, for example, operator definition. Additionally or alternatively, "configuring" may include reading individual definitions from a database or other storage device, such as a random access device.

此外,不限於任何實施方式,根據本案的各方面,將品質等級分別指派給所述優先順序組中的一者,並且大量組件屜中的每一者被指派給所述優先順序組中的一者。如本文中所理解的,指派應理解為使關於指派的資訊可用於組裝製程。「指派」具體而言可包括讓操作者輸入指派定義。另外地或替代地,「指派」可以包括從資料庫或者其他存放裝置(諸如隨機存取設備)讀取指派定義。 Further, without being limited to any embodiment, according to aspects of the present disclosure, quality levels are respectively assigned to one of the priority order groups, and each of a plurality of component bins is assigned to one of the priority order groups By. As understood herein, an assignment should be understood to make information about the assignment available to the assembly process. "Assignment" may specifically include having the operator enter an assignment definition. Additionally or alternatively, "assigning" may include reading an assignment definition from a database or other storage device, such as a random access device.

配置品質等級及/或優先順序組通常是在組裝製程之前完成的,但是在組裝製程期間也可以進行或重複此配置。另外或替代地,指派所述品質等級到所述優先順序組中的一者及/或指派大量元件屜中的每一者通常是在組裝製程之前完成的,但是也可以在所述組裝製程期間進行或重複此指派。 The configuration quality level and/or priority group is usually done before the assembly process, but this configuration can also be done or repeated during the assembly process. Additionally or alternatively, assigning the quality level to one of the priority order groups and/or assigning each of the plurality of component bins is typically done prior to the assembly process, but may also be during the assembly process Make or repeat this assignment.

圖2圖示太陽能電池製造裝置的另一實例。示例性圖示的供應裝置90向處理裝置110-119(諸如一或多個摻雜裝置、一或多個光刻裝置、一或多個鑽鑿裝置、一或多個乾燥烘箱等等)提供未處理的晶片或者預處理後的晶片。如先前所提及的,所述處理裝置可以特別地包括翻轉裝置。處理裝置的數量不受限制。圖2中所述處理裝置111和119之間的點,以及所述檢查裝置121和129之間的點應說明,若有需要,可提供進一步的處理/檢查裝置。 FIG. 2 illustrates another example of a solar cell manufacturing apparatus. The exemplary illustrated supply device 90 provides to the processing device 110-119 (such as one or more doping devices, one or more lithographic devices, one or more drilling devices, one or more drying ovens, etc.) Unprocessed wafer or preprocessed wafer. As mentioned previously, the processing device may in particular comprise a turning device. The number of processing devices is not limited. The point between the processing devices 111 and 119 in Figure 2, and the point between the inspection devices 121 and 129, should be described as providing further processing/inspection devices if desired.

在處理之後,將晶片轉入檢查裝置120-129。檢查裝置的數量可以是三個或更多,或者甚至五個或更多。 After processing, the wafer is transferred to inspection devices 120-129. The number of inspection devices can be three or more, or even five or more.

例如,在圖2的圖例中,第一檢查裝置120檢查晶片的物理完整性。若晶片大部分損壞,則通過其他檢查裝置轉送所述晶片,而不進行進一步的檢查。組裝裝置30隨後將損壞的晶片放入垃圾箱。 For example, in the illustration of Figure 2, the first inspection device 120 checks the physical integrity of the wafer. If the wafer is mostly damaged, the wafer is transferred by other inspection devices without further inspection. The assembly device 30 then places the damaged wafer in the trash can.

作為另一個實例,第二檢查裝置121可以檢查所述晶片的顏色。第三檢查裝置122可以包括陽光模擬器和檢查晶片在某些光照條件下的性能。第四檢查裝置可用於檢查所述晶片的其他特性。為說明性目的,在圖2中描述了一序列的各種檢查裝置120-129。明顯地,此圖示不應將檢查裝置的數量限制為十個,更確切地說,可以選擇適用於分類程序的任何數量。 As another example, the second inspection device 121 can check the color of the wafer. The third inspection device 122 can include a solar simulator and inspect the performance of the wafer under certain lighting conditions. A fourth inspection device can be used to inspect other characteristics of the wafer. For illustrative purposes, a sequence of various inspection devices 120-129 is depicted in FIG. Obviously, this illustration should not limit the number of inspection devices to ten, and rather, any number suitable for the classification procedure can be selected.

一般地,並且不限於圖2所圖示的實施方式,檢查裝置120-129中每一者所測量的資訊可以借助於輸入線125提供到控制器200。所述輸入資訊也可以無線地傳輸。控制器因此 收集關於所檢查的晶片特性的資訊。此允許控制器將晶片指派到正確的品質等級。品質等級通常可以由太陽能電池製造裝置的操作者預定義。 In general, and not limited to the embodiment illustrated in FIG. 2, information measured by each of the inspection devices 120-129 may be provided to the controller 200 by means of an input line 125. The input information can also be transmitted wirelessly. Controller therefore Information about the characteristics of the wafer being inspected is collected. This allows the controller to assign the wafer to the correct quality level. The quality level can generally be predefined by the operator of the solar cell manufacturing device.

根據所圖示的實施方式(不局限於圖2的圖例),控制器200可控制組裝裝置30。控制器200可借助於輸出線210控制組裝裝置30。控制還可以無線地進行。未在附圖中圖示的是,控制器200可以是組裝裝置的部分。或者,組裝裝置具有附加的控制器也是可能的,所述附加控制器從控制器200接收資訊。隨後組裝裝置之控制器可以控制組裝製程。 According to the illustrated embodiment (not limited to the illustration of FIG. 2), the controller 200 can control the assembly device 30. The controller 200 can control the assembly device 30 by means of the output line 210. Control can also be done wirelessly. Not illustrated in the drawings, the controller 200 may be part of an assembly device. Alternatively, it is also possible for the assembly device to have an additional controller that receives information from the controller 200. The controller of the assembled device can then control the assembly process.

圖3圖示組裝裝置的實施方式的詳細示意性俯視圖。如圖所示,組裝裝置具有四十八個元件屜31,所述元件屜排列成6x8陣列,也就是說6行和8列。一般地,並且不限於圖3的圖例,處理後的晶片例如可以借助於如箭頭29所指示的傳送帶進入組裝裝置。晶片可以在組裝裝置內通過例如傳送帶50移動,直到所述晶片被輸送系統(諸如機器人)夾持。 Figure 3 illustrates a detailed schematic top view of an embodiment of an assembly device. As shown, the assembly device has forty-eight component drawers 31 arranged in a 6x8 array, that is, six rows and eight columns. In general, and without limitation to the illustration of FIG. 3, the processed wafer can enter the assembly device, for example, by means of a conveyor belt as indicated by arrow 29. The wafer can be moved within the assembly device by, for example, a conveyor belt 50 until the wafer is held by a conveyor system, such as a robot.

根據應在圖3中說明的實施方式,輸送系統包括一或多個機器人。在圖3的示例性附圖中,四個機器人35、36、37和38排列在組裝裝置內或者組裝裝置上方,以夾持處理後的晶片和將每個晶片分佈到大量元件屜31中的一者。機器人可以排列在傳送帶50上方。每個機器人可以具有一或多個手臂(見圖6),並且每個機器人負責將晶片傳送到特定組的組件屜。通常,每個機器人專門地負責將晶片傳送到特定組的組件屜。特定言之,以r代表機器人的數量並且b代表元件屜的數量,每個機器人配置用於將進入的晶片傳送指派到r個不同的 組件屜。 According to the embodiment which should be illustrated in Figure 3, the delivery system comprises one or more robots. In the exemplary drawing of FIG. 3, four robots 35, 36, 37, and 38 are arranged in or above the assembly device to clamp the processed wafer and distribute each wafer into a plurality of component trays 31. One. The robot can be arranged above the conveyor belt 50. Each robot can have one or more arms (see Figure 6), and each robot is responsible for transferring the wafer to a particular set of bins. Typically, each robot is specifically responsible for transferring wafers to a particular set of bins. In particular, r represents the number of robots and b represents the number of component bins, each robot is configured to assign incoming wafer transfers to r different Assembly drawer.

輸送系統傳送晶片到各種元件屜所需的傳送時間不同。例如,將晶片傳送到更靠近傳送帶的元件屜可能比將晶片傳送到遠離傳送帶的元件屜需要更少的傳送時間。因此,根據本案的各方面,每個元件屜具有限定的傳送時間,所述傳送時間是根據本標的的實施方式的組裝製程需要考慮的。 The transfer time required for the transport system to transport the wafers to the various component drawers is different. For example, transferring a wafer to a bin closer to the conveyor belt may require less transfer time than transferring the wafer to a bin moving away from the conveyor. Thus, in accordance with aspects of the present disclosure, each of the bins has a defined transfer time that is considered in accordance with the assembly process of the embodiment of the subject matter.

根據本案的各方面,每個品質等級被指派到一優先順序組。例如,優先順序組的數量可以是三個、四個、五個或者六個。在下文中,示例性參照五個優先順序組(優先順序組1到優先順序組5),但是並不限制優先順序組的數量範圍。此外,在下文中,為說明性目的,而不應被視為限制,優先順序組1應代表最高的優先順序(「最高優先順序」),優先順序組2應代表與優先順序組1相比降低的優先順序(「高優先順序」),等等。優先順序組5應代表最低的優先順序(「最低優先順序」)。 According to aspects of the present case, each quality level is assigned to a priority group. For example, the number of priority groups can be three, four, five, or six. In the following, five priority order groups (priority group 1 to priority group 5) are exemplarily referred to, but the number range of priority groups is not limited. In addition, hereinafter, for illustrative purposes, and should not be considered as limiting, priority group 1 should represent the highest priority order ("highest priority"), and priority group 2 should represent lower than priority group 1 Priority ("high priority"), and so on. Priority group 5 should represent the lowest priority ("lowest priority").

根據實施方式,只有那些指派給最高優先順序組(諸如優先順序組1)的品質等級是非常常見的(即,大量的晶片落入此等級)。只有那些指派給高優先順序組(諸如優先順序組2)的等級是仍然常見的,但是比優先順序組1的等級的常見程度低,並且比優先順序組3的等級的常見程度高。因此,最低的優先順序組,例如優先順序組5將僅包括相當少見的等級。用語「等級少見/常見」應代表生產製程導致少量/大量的處理後晶片具有如相應品質等級所定義的特性的情況。 According to an embodiment, only those quality levels assigned to the highest priority group (such as priority order group 1) are very common (i.e., a large number of wafers fall into this level). Only those ranks assigned to high priority groups (such as priority group 2) are still common, but are less common than the rank of priority group 1, and are more common than the rank of priority group 3. Therefore, the lowest priority group, such as priority group 5, will only include fairly rare levels. The term "rare level/common" should mean that the production process results in a small/large amount of processed wafer having characteristics as defined by the corresponding quality level.

品質等級指派到優先順序組通常是在太陽能電池製 造裝置的測試運行中完成的。如本文所理解的測試運行和太陽能電池的一般製造相同,唯一的區別是測試運行保存和評估晶片的分析結果。 The quality level assigned to the priority group is usually in solar cell system The test was completed during the test run. The test run as understood herein is identical to the general manufacture of solar cells, the only difference being the test run save and evaluate the wafer's analysis results.

將以簡短的實例說明如此的製程。特別地,為說明起見,所述實例使用少量特性。 A short example will illustrate such a process. In particular, the examples use a small number of properties for purposes of illustration.

在所述實例中,所述太陽能電池生產製程的操作者定義了三個特性,即,物理完整性,有兩個可能結果(是或否);性能,有5個可能結果(即,在來自陽光模擬器的標準化閃光照明情況的五個可能的性能結果區間);及太陽能電池的顏色亮度,有5個取決於太陽能電池的亮度的可能結果(即,五個亮度區間)。因此,因為在晶片損壞的情況下進一步的區分是不必要的,所以此情況對應於1(晶片損壞)+5x5(晶片未損壞並且具有不同的亮度以及性能)=26個等級。或者按照操作者的定義,可以從存放裝置讀取資訊。 In the example, the operator of the solar cell production process defines three characteristics, namely, physical integrity, with two possible outcomes (yes or no); performance, with five possible outcomes (ie, at The five possible performance results of the standardized flash illumination situation of the Sunlight Simulator; and the color brightness of the solar cell, there are five possible outcomes depending on the brightness of the solar cell (ie, five luminance intervals). Therefore, since further discrimination is unnecessary in the case of wafer damage, this case corresponds to 1 (wafer damage) + 5x5 (wafer is not damaged and has different brightness and performance) = 26 levels. Or, according to the operator's definition, information can be read from the storage device.

操作所述太陽能電池製造裝置以生產太陽能電池。因為在這個階段可能仍不清楚晶片將在各等級上的分佈,所以用傳統方式執行組裝,即,可將每個等級指派給一個元件屜。在關於每個等級中分佈的晶片的資訊已經可例如從先前的測試運行得知的情況中,也可以如本文公開的執行組裝。總之,控制組裝裝置的機器人來相應地操作。 The solar cell manufacturing apparatus is operated to produce a solar cell. Since the distribution of the wafers at each level may still not be known at this stage, the assembly is performed in a conventional manner, i.e., each level can be assigned to one of the component drawers. In the case where information about the wafers distributed in each level has been known, for example, from previous test runs, assembly can also be performed as disclosed herein. In summary, the robot controlling the assembly device operates accordingly.

在各實施方式中,儲存檢查結果。在其它實施方式中,卸載分析的詳細結果,但是儲存和收集檢查後晶片往相應等級的分類。此允許建立關於處理後晶片在相應等級內分佈的統計資料。根據本標的的各方面,此統計資料是一般操 作期間進行組裝的基礎。 In various embodiments, the inspection results are stored. In other embodiments, the detailed results of the analysis are offloaded, but the classification of the wafers to the respective levels after storage is collected and collected. This allows for the establishment of statistics on the distribution of the processed wafers within the corresponding levels. According to various aspects of this standard, this statistic is general operation The basis for assembly during the work.

以下將說明如此的統計資料。請注意以下統計資料僅用於說明的目的。因此,統計資料還可以被理解為對每個品質等級的晶片數量進行計算。 The statistics will be explained below. Please note that the following statistics are for illustrative purposes only. Therefore, statistics can also be understood as calculating the number of wafers for each quality level.

鑒於所述結果,可以將所述等級指派給如下的五個優先順序組: In view of the results, the levels can be assigned to the following five priority groups:

將每個元件屜指派給優先順序組。所述指派通常為使得較高優先順序組指派給具有較小傳送時間的元件屜,並且將較低優先順序組指派給具有較大傳送時間的元件屜。如所概述的,如本文所描述的指派可以由操作者完成或自動地完成。所述指派通常是基於所述太陽能電池生產製程的測試運行來執行的。 Assign each bin to the priority group. The assignment is typically such that a higher priority group is assigned to a bin with a smaller transfer time and a lower priority group is assigned to a bin with a larger transfer time. As outlined, the assignment as described herein can be done by an operator or automatically. The assignment is typically performed based on a test run of the solar cell production process.

元件屜的數量可以大於20,或者甚至大於40。具體地說,可以提供24個元件屜或者48個元件屜。根據本案,有可能定義比元件屜多的品質等級。例如,品質等級的數量可以是元件屜的數量的p倍,其中p大於1.0,甚至可能大於1.5或者甚至等於或者大於2.0。例如,有可能在具有24個元件屜的組裝裝置中定義36個品質等級。另一實例是在具有48個元件屜的組裝裝置中定義96個品質等級。 The number of bins can be greater than 20, or even greater than 40. Specifically, 24 component drawers or 48 component drawers can be provided. According to the present case, it is possible to define more quality levels than the component drawer. For example, the number of quality levels may be p times the number of bins, where p is greater than 1.0, and may even be greater than 1.5 or even equal to or greater than 2.0. For example, it is possible to define 36 quality levels in an assembly device having 24 component drawers. Another example is the definition of 96 quality levels in an assembly device with 48 component drawers.

圖4說明具有6×8元件屜陣列(參看元件符號31)和五個優先順序組的實例。在以下實例中,四個機器人35、36、37和38分別配置用於將晶片分別傳送到四個組件屜組51、52、53和54。或者對於一個機器人的情況,可以利用另一輸送系統。術語「元件屜組」應代表大量的元件屜,其中每個元件屜由一個機器人服務。在圖4中圖示的每個元件屜中所繪示的數位應代表在本實例中指派給相應元件屜的優先順序組。為了最佳化所述傳送時間,將優先順序組1指派給靠近傳送帶50和負責機器人35-38的組件屜。在所選擇的實例中,機器人35負責組件屜組51,機器人36負責組件屜組53,機器人37負責組件屜組52,以及機器人38負責組件屜組54。 Figure 4 illustrates an example with a 6 x 8 element array (see element symbol 31) and five priority order groups. In the following examples, four robots 35, 36, 37, and 38 are respectively configured to transfer wafers to four bin groups 51, 52, 53, and 54, respectively. Or for the case of one robot, another delivery system can be utilized. The term "component drawer" shall mean a large number of component drawers, each of which is serviced by a robot. The digits depicted in each of the bins illustrated in Figure 4 should represent the order of priority assigned to the respective bins in this example. In order to optimize the transfer time, priority group 1 is assigned to the bins near the conveyor 50 and the responsible robots 35-38. In the selected example, the robot 35 is responsible for the bin group 51, the robot 36 is responsible for the bin group 53, the robot 37 is responsible for the bin group 52, and the robot 38 is responsible for the bin group 54.

例如,參考在圖4中圖示的組裝裝置俯視圖的左上角所圖示的元件屜組51,機器人35可快速存取指派為優先順序1的三個組件屜。特別地,元件屜組51中具有優先順序4的一個元件屜靠近傳送帶定位,然而所述元件屜遠離機器人35,並且與機器人36的碰撞必須被安全地避免,此導致機器人35為到達具有優先順序4的元件屜必須進行繞道。此外,在所圖示的組件屜組51中,到指派有優先順序5的那兩個組件屜的傳送時間是最大的。因此,將這些組件屜指派給優先順序組5。 For example, referring to the component tray set 51 illustrated in the upper left corner of the top view of the assembled device illustrated in FIG. 4, the robot 35 can quickly access the three bins assigned as priority 1. In particular, one of the component drawers 51 having priority order 4 is positioned close to the conveyor belt, however the component drawer is remote from the robot 35, and collision with the robot 36 must be safely avoided, which causes the robot 35 to have priority in order of arrival. The component drawer of 4 must be bypassed. Further, in the illustrated tray group 51, the transfer time to the two bins assigned with priority order 5 is the largest. Therefore, these bins are assigned to the priority group 5.

根據本案的各方面,並且不限於圖4的實例,指派給一些優先順序組(具體而言為高優先順序組,諸如優先順序組1或者優先順序組2)的組件屜的數量大於相應優先順序組內的等級數量。具體地說,有可能指派給第一優先順序組的元件屜數量是指派給所述優先順序組的品質等級數量的兩倍或更多。根據各實施方式,除最低優先順序組以外的所有優先順序組具有的元件屜數量比所述相應優先順序組的品質等級數量多至少一個。 According to aspects of the present disclosure, and not limited to the example of FIG. 4, the number of bins assigned to some priority order groups (specifically, high priority groups, such as priority order group 1 or priority order group 2) is greater than the corresponding priority order The number of levels within the group. Specifically, it is possible that the number of component trays assigned to the first priority order group is twice or more the number of quality levels assigned to the priority order group. According to various embodiments, all priority groups other than the lowest priority group have at least one more number of component drawers than the corresponding priority order group.

例如,在上表所圖示的實例中,有可能指派八個元件屜給優先順序組1(其中僅指派四個品質等級給這個優先順序組)。此外,在本實例中將有可能指派六個元件屜給優先順序組2(其中僅指派四個品質等級給這個優先順序組)。 For example, in the example illustrated in the above table, it is possible to assign eight bins to the priority group 1 (where only four quality levels are assigned to this priority group). Furthermore, in this example it will be possible to assign six bins to the priority group 2 (where only four quality levels are assigned to this priority group).

根據本案的其他方面,指派給一些優先順序組(具體地說,低優先順序組)的組件屜數量比指派給所述相應優先順序組的品質等級數量少。例如,低優先順序組,諸如優先順序組5,可以包括數量是元件屜的至少1.5倍、2倍、或者 更多倍數的等級。這是因為在低優先順序組中相應品質等級的晶片通常以非常小的比率分佈,如在上文所說明的實例中。例如,在上文的實例中,有可能僅指派4個元件屜給優先順序組5(其中在上文的實例中,指派9個品質等級給這個優先順序組)。不限於任何實施方式,有可能所述最低優先順序組包括數量為元件屜的兩倍、三倍或者更多倍的等級。 According to other aspects of the present disclosure, the number of bins assigned to some priority order groups (specifically, low priority order groups) is less than the number of quality levels assigned to the corresponding priority order group. For example, a low priority group, such as priority group 5, may include at least 1.5 times, 2 times the number of bins, or More multiples of the level. This is because wafers of corresponding quality levels in the low priority group are typically distributed at very small ratios, as in the examples described above. For example, in the above example, it is possible to assign only 4 component drawers to the priority order group 5 (wherein the above example, 9 quality levels are assigned to this priority order group). Without being limited to any embodiment, it is possible that the lowest priority group includes a number that is two, three or more times the number of bins.

圖5以圖表圖示測試運行的結果。y軸,以元件符號401表示,指示這個等級中相對分佈的晶片;x軸,以元件符號400表示,指示相應的等級。特別地,等級的元件符號通常是可自由選擇的並且不考慮在這個等級中的晶片品質。如在圖5中示例性圖示的,品質等級c3表示最大數量晶片所具有的品質,接著是等級c4、c15等等。在各等級(諸如等級c20和c99)中分佈的晶片在本測試運行中邊際化,因此它們圖示在軸上。 Figure 5 graphically illustrates the results of the test run. The y-axis, indicated by component symbol 401, indicates the relative distribution of wafers in this hierarchy; the x-axis, indicated by component symbol 400, indicates the corresponding level. In particular, graded component symbols are generally freely selectable and do not take into account the quality of the wafers in this hierarchy. As exemplarily illustrated in FIG. 5, the quality level c3 represents the quality that the maximum number of wafers has, followed by the levels c4, c15, and the like. Wafers distributed in various levels (such as levels c20 and c99) are marginalized in this test run, so they are illustrated on the axis.

一般地,並且不限於任何實施方式,根據本案將品質等級指派給相應的優先順序組可以基於測試運行的計算結果來執行。有可能使所述指派基於絕對計算結果(即,每個品質等級計算出的晶片)或者基於相對計算結果(即,每個品質等級中晶片的份額,其中所有的份額總量為100%)。 Generally, and without limitation to any of the embodiments, assigning a quality level to a corresponding priority order group according to the present case may be performed based on a calculation result of the test run. It is possible to base the assignment on an absolute calculation result (ie, the wafer calculated for each quality level) or based on a relative calculation result (ie, the share of wafers in each quality level, where the total amount of shares is 100%).

將品質等級指派給優先順序組可以在組裝裝置操作期間進行修正。例如,根據各實施方式,在所述太陽能電池製造的一般操作期間,每個品質等級中晶片的分佈被計算和儲存以進行持續的評估。當評估表明晶片分佈劇烈變化時,有可能向所述品質等級重新指派優先順序組。另外或替代地 ,有可能向所述品質等級重新指派特定的元件屜(其中此舉無論如何是非動態完成的)。 Assigning a quality level to a priority group can be corrected during assembly device operation. For example, according to various embodiments, during normal operation of the solar cell fabrication, the distribution of wafers in each quality level is calculated and stored for ongoing evaluation. When the evaluation indicates a dramatic change in wafer distribution, it is possible to reassign the priority level to the quality level. Additionally or alternatively It is possible to reassign a particular bin to the quality level (wherein this is done non-dynamically anyway).

元件屜的優先順序組通常是在組裝開始前預先定義的。預先定義可以由操作者完成。或者,電腦程式可以使用關於每個機器人到每個元件屜的傳送時間的資訊來指派不同的優先順序組給所述組件屜。 The priority group of the component drawer is usually pre-defined before assembly begins. Pre-definition can be done by the operator. Alternatively, the computer program can assign different priority groups to the bins using information about the transfer time of each robot to each bin.

根據本案的各方面,至少在一些優先順序組(具體地說,低優先順序組)內,在組裝開始之前未定義哪個元件屜接收哪個晶片。反而是,可以開始太陽能電池製造,並且一品質等級的第一晶片由此定義所述第一晶片將傳送到的元件屜的品質等級。另外,一旦所述元件屜裝滿並且用空的元件屜替換,有可能用新的指派替代先前的指派。在操作期間將品質等級指派給元件屜的方式在本文中應稱為「動態元件屜指派」。 According to aspects of the present invention, at least in some priority order groups (specifically, low priority order groups), which component tray receives which wafer is not defined before assembly begins. Instead, solar cell fabrication can begin, and a first grade of quality wafer thus defines the quality level of the bin to which the first wafer will be transferred. In addition, once the component drawer is full and replaced with an empty component drawer, it is possible to replace the previous assignment with a new one. The manner in which the quality level is assigned to the component during operation should be referred to herein as "dynamic tray assignment."

動態元件屜指派僅在相同優先順序組的組件屜內執行。動態元件屜指派尤其可以被用於低優先順序組。對於高優先順序組,所述元件屜可以用預定方式指派給所述品質等級。具體地說,可以讓操作者手動地指派品質等級給元件屜。 Dynamic component tray assignments are only performed within the bins of the same priority group. Dynamic component tray assignments can be used in particular for low priority groups. For a high priority group, the bin can be assigned to the quality level in a predetermined manner. Specifically, the operator can be manually assigned a quality level to the component drawer.

例如,在上表給定的實例中,在優先順序組1內具有最短傳送時間的兩個元件屜可以被指派給品質等級8。在一個優先順序組內具有其次的最短傳送時間的兩個其他元件屜可以被指派給品質等級23。 For example, in the example given in the above table, two bins having the shortest transfer time in the priority group 1 can be assigned to the quality level 8. Two other bins having the next shortest transfer time within one priority group can be assigned to quality level 23.

根據本案的各實施方式,最高優先順序組的各品質 等級分別由不同的機器人處理。例如,在上文實例中,優先順序組1中等級8、14、19和23這四個等級的晶片分別由四個機器人35、36、37和38夾持和傳送到元件屜(例如,機器人35負責等級8;機器人36負責等級14;機器人37負責等級19;及機器人38負責等級23)。此舉可以另外增加組裝的操作速度。 According to various embodiments of the present case, the quality of the highest priority group The levels are handled by different robots. For example, in the above example, the four levels of wafers of ranks 8, 14, 19, and 23 in priority group 1 are respectively clamped and transferred to the component drawer by four robots 35, 36, 37, and 38 (for example, a robot 35 is responsible for level 8; robot 36 is responsible for level 14; robot 37 is responsible for level 19; and robot 38 is responsible for level 23). This can additionally increase the speed of assembly operation.

在一優先順序組(即,高優先順序組)具有的元件屜比等級多的情況下,一些元件屜將保持空置,直到另一組件屜完全被晶片裝滿。一旦這個情況發生,控制器可以開始以下兩個動作。首先,這個等級的其他元件屜隨後可傳遞給至此一直空置的新組件屜。其次,自動地或者通過向操作者發送相應的警報手動地去除裝滿的元件屜並且用空的元件屜替換該裝滿的元件屜,以觸發裝滿的元件屜的更換。控制器可以儲存哪個元件屜是空的,從而若相同優先順序組的(但是可能是不同等級的)另一個元件屜被裝滿並且需要替換時,可以再裝填這個元件屜。由此,在裝滿的元件屜的更換期間,可以持續進行組裝裝置的操作。 In the case where a priority group (i.e., a high priority group) has more component drawers than the level, some of the component drawers will remain empty until the other component drawer is completely filled with the wafer. Once this happens, the controller can start the following two actions. First, the other bins of this class can then be passed to the new bin that has been vacant until now. Secondly, the filled bin is manually removed or replaced by an appropriate alarm to the operator and the filled bin is replaced with an empty bin to trigger the replacement of the filled bin. The controller can store which bins are empty, so that if the same priority group (but possibly a different grade) of another bin is filled and needs to be replaced, the bin can be refilled. Thereby, the operation of the assembly device can be continued during the replacement of the filled component drawer.

根據本案可能有些優先順序組,具體地說是中間優先順序的優先順序組,諸如優先順序組3或者優先順序組4,指派給所述優先順序組的組件屜數量比指派給所述優先順序組的品質等級數量多一個或兩個。使n代表這個優先順序組的元件屜的數量,並且m代表這個優先順序組的品質等級的數量,那麼在組裝裝置操作期間,所述n個元件屜中的m個元件屜可以用m個不同品質等級的晶片裝填。剩餘的(n-m)個元件屜 保持空置,直到其他m個元件屜中的一個裝滿為止。一旦這種情況發生,控制器可獲悉以隨後傳送相應的品質等級到所述空置的組件屜中的一者。控制器可以開始更換裝滿的元件屜。如所描述的,可以手動地或者自動地完成此更換。鑒於晶片在中間優先順序組中相當低的分佈率,不太可能在更換其他元件屜所需的時間內完全裝滿另一個組件屜。因此,組裝裝置的操作可以持續進行,而無需中止。 According to the present case, there may be some priority group, specifically an intermediate priority order group, such as priority group 3 or priority group 4, the number of bins assigned to the priority group is assigned to the priority group The number of quality levels is one or two. Let n represent the number of bins of this priority group, and m represents the number of quality levels of this prioritized group, then m of the n bins can be used differently during the operation of the assembly device Quality grade wafer loading. Remaining (n-m) component drawers Leave it empty until one of the other m bins is full. Once this occurs, the controller can learn to subsequently transmit the corresponding quality level to one of the vacant bins. The controller can begin to replace the filled component drawer. This replacement can be done manually or automatically as described. Given the relatively low distribution rate of the wafers in the intermediate priority group, it is unlikely that the other bin will be completely filled in the time required to replace the other bins. Therefore, the operation of the assembly device can be continued without stopping.

儘管如此,但是當這種情況發生時,當n=m+1時,生產必須中止,直到元件屜的更換完成。然而,當n=m+2時,控制器可以使用第二個預備元件屜,並且組裝裝置的操作不需要中止。 Nevertheless, when this happens, when n = m + 1, the production must be aborted until the replacement of the component drawer is completed. However, when n = m + 2, the controller can use the second spare bin and the operation of the assembly device does not need to be suspended.

在低優先順序組的情況下,這個品質等級的晶片生產的相當少。因此可能指派到一優先順序組的品質等級比指派到所述優先順序組的組件屜更多。在操作中,這個優先順序組的元件屜不會預先,即在組裝裝置操作之前,指派給等級。更確切地說,如所描述的,這個優先順序組中所生產的一品質等級的第一晶片此後定義這個元件屜的等級。有可能以此方式操作組裝裝置,直到例如這個優先順序組中除一個元件屜(或可能是兩個元件屜)以外的所有元件屜都接收到它們的第一晶片。當這種情況發生時,根據各實施方式,控制器已經開始用空的元件屜更換這些非空置的元件屜中的一者。因此,即使在更換期間另一個相同等級的晶片到達,所述晶片已經被傳送到一個空的元件屜(或者兩個空的元件屜中的一個)。因此,這種操作方式也允許操作不中止,與此同 時一個空間和元件屜保存低優先順序品質等級處理的邏輯。 In the case of low priority groups, this quality level of wafer production is quite small. It is therefore possible that the quality level assigned to a priority group is more than the component assigned to the priority group. In operation, the component trays of this priority group are not assigned in advance, i.e., prior to assembly operation. More specifically, as described, the first wafer of a quality level produced in this priority group now defines the level of the bin. It is possible to operate the assembly device in this manner until, for example, all of the component drawers in this priority group except one of the component drawers (or possibly two component drawers) receive their first wafer. When this occurs, according to various embodiments, the controller has begun to replace one of these non-vacant bins with an empty bin. Thus, even if another wafer of the same grade arrives during the replacement, the wafer has been transferred to an empty bin (or one of the two empty bins). Therefore, this mode of operation also allows the operation to not be suspended, and the same A space and a component drawer hold the logic of low priority quality level processing.

因此,一旦高優先順序組中一品質等級的元件屜被裝滿,這個元件屜將被替換。然而,與先前技術相反的是,無需停止生產,而是以機器人將相同等級的晶片進一步傳送到相同優先順序組的另一個空的組件屜。又,由於在所述方面中指派給一些優先順序組的等級比指派給這些優先順序組的組件屜多(至少在最低優先順序組中,即,在所描述的實例中的優先順序組5),所以分類成為盡可能多的不同等級(例如,48個等級)仍然是可行的。 Therefore, once a quality level bin in the high priority group is filled, the bin will be replaced. However, contrary to the prior art, it is not necessary to stop production, but the robot transfers the same level of wafers to another empty bin of the same priority group. Also, since the level assigned to some priority order groups in the aspect is more than the number of components assigned to these priority order groups (at least in the lowest priority order group, ie, the priority order group 5 in the described example) So it is still possible to classify as many different levels as possible (for example, 48 levels).

圖6以示意性側視圖圖示組裝裝置30的實例。組裝裝置包括機器人60,例如在圖6的實例中機器人60可以安裝到所述組裝裝置30的上部70。所述機器人通常定位在傳送帶上(如先前所論述的)。然而,在圖6的視圖中,組件屜31遮擋了看向傳送帶的視線。 Figure 6 illustrates an example of an assembly device 30 in a schematic side view. The assembly device includes a robot 60 that can be mounted to the upper portion 70 of the assembly device 30, such as in the example of FIG. The robot is typically positioned on a conveyor belt (as previously discussed). However, in the view of Fig. 6, the bin 31 obscures the line of sight looking toward the conveyor.

不限於圖6的實例,組裝裝置可以配置用於接收k×l的元件屜陣列,其中k例如是8、9、10或者甚至更多,及/或l是例如6、7、8或者甚至更多。在圖6的實例中,k是10(這就是為什麼所圖示的側視圖允許觀察10個相鄰的元件屜)。 Without being limited to the example of Figure 6, the assembly device can be configured to receive a k x 1 array of bins, where k is, for example, 8, 9, 10 or even more, and/or l is for example 6, 7, 8, or even more many. In the example of Figure 6, k is 10 (this is why the illustrated side view allows viewing of 10 adjacent bins).

如本文所描述的組裝裝置包括一或多個機器人。術語「機器人」應理解為任何配置用於夾持晶片和移動所述晶片的致動單元。具體地說,組裝裝置可以包括兩個、三個、四個或者更多個機器人。使用的機器人越多,組裝越迅速。可以用同一控制器控制所有的機器人。 An assembly device as described herein includes one or more robots. The term "robot" is understood to mean any actuating unit configured to hold a wafer and move the wafer. Specifically, the assembly device may include two, three, four or more robots. The more robots you use, the faster the assembly. All robots can be controlled with the same controller.

機器人可以包括一或多個機器人臂,例如在圖6圖例 中的機器人臂65。此外,機器人可以包括終端執行器,例如在圖6中圖示的終端執行器68,以用於夾持晶片。具體地說,所述終端執行器可以是貝努裡(Bernoulli)夾持器。 The robot may include one or more robot arms, such as the legend in Figure 6. Robot arm 65 in the middle. Additionally, the robot can include a terminal actuator, such as the end effector 68 illustrated in Figure 6, for holding the wafer. In particular, the terminal actuator may be a Bernoulli gripper.

圖8和圖9將圖示本案的下層邏輯(圖9)與已知組裝方法的下層邏輯(圖8)的比較。在本領域中,已知將每個品質等級80指派到元件屜31。還已知這個指派是動態地(即,在操作期間)完成的。 Figures 8 and 9 will illustrate a comparison of the underlying logic of the present case (Figure 9) with the underlying logic of the known assembly method (Figure 8). It is known in the art to assign each quality level 80 to the bins 31. It is also known that this assignment is done dynamically (ie, during operation).

本標的,如圖9中所圖示的,實質上與已知方法的不同在於引入優先順序組82和指派品質等級80和元件屜31兩者到各個優先順序組82。到優先順序組的指派形成了組裝程序的基礎,如本文先前所詳細解釋的。 The subject matter, as illustrated in Figure 9, differs substantially from known methods by introducing a priority order group 82 and assigning both quality level 80 and component drawer 31 to respective priority order groups 82. The assignment to the priority group forms the basis of the assembly process, as explained in detail earlier herein.

因此,本案標的的實施方式提供了一種組裝方法、一種生產太陽能電池的方法、一種改進組裝裝置的方法、一種電腦程式、一種包括所述電腦程式的電腦可讀取媒體,和一個允許更快地組裝及因此更快地製造太陽能電池的組裝裝置。此外,若需要,可指派到元件屜的品質等級的數量可以等於或者甚至大於元件屜的數量。 Accordingly, embodiments of the subject matter of the present disclosure provide an assembly method, a method of producing a solar cell, a method of improving an assembly apparatus, a computer program, a computer readable medium including the computer program, and a permitting faster Assembled and thus faster assembled solar cell assembly devices. Furthermore, the number of quality levels that can be assigned to the bin can be equal to or even greater than the number of bins, if desired.

儘管上述內容針對本發明的實施方式,但可在不脫離本發明的基本範圍的情況下設計本發明的其他及更多實施方式,且本發明之範圍由以下申請專利範圍來決定。 While the foregoing is directed to embodiments of the present invention, the invention may

Claims (20)

一種傳送晶片到大量元件屜的方法,包括以下步驟:取決於晶片的至少一個特性配置所述晶片的品質等級;配置優先順序組,使所述優先順序組至少包含一高優先順序組和一低優先順序組;指派所述品質等級中的每一者到所述優先順序組中的一者;指派所述大量組件屜中的每一者到所述優先順序組中的一者;提供所述晶片的檢查結果;根據所述晶片的檢查結果,將所述晶片中的每一者分類為所述品質等級中的一者;及根據指派給所述晶片的所述品質等級的所述優先順序組,將所述晶片中的每一者傳送到所述大量組件屜中的一者。 A method of transferring a wafer to a plurality of component trays, comprising the steps of: configuring a quality level of the wafer depending on at least one characteristic of the wafer; configuring a priority order group such that the priority order group includes at least one high priority group and one low a priority group; assigning each of the quality levels to one of the priority groups; assigning each of the plurality of components to one of the priority groups; providing the a result of the inspection of the wafer; classifying each of the wafers into one of the quality levels according to the inspection result of the wafer; and according to the priority order of the quality level assigned to the wafer Grouping, transferring each of the wafers to one of the plurality of bins. 如請求項1述及之方法,其中指派給高優先順序組的組件屜數量大於指派給所述高優先順序組的品質等級數量。 The method of claim 1, wherein the number of bins assigned to the high priority group is greater than the number of quality levels assigned to the high priority group. 如請求項2述及之方法,其中指派給高優先順序組的組件屜數量至少是指派給所述高優先順序組的品質等級數量的兩倍。 The method of claim 2, wherein the number of bins assigned to the high priority group is at least twice the number of quality levels assigned to the high priority group. 如先前各請求項中任一項述及之方法,其中指派給低優先順序組的組件屜數量小於指派給所述低優先順序組的品質等 級數量。 A method as recited in any one of the preceding claims, wherein the number of bins assigned to the low priority group is less than the quality assigned to the low priority group, etc. The number of levels. 如請求項4述及之方法,其中指派給所述低優先順序組的品質等級數量至少是指派給所述低優先順序組的組件屜數量的兩倍。 The method of claim 4, wherein the number of quality levels assigned to the low priority group is at least twice the number of bins assigned to the low priority group. 如先前各請求項中任一項述及之方法,其中所述優先順序組還包括至少一個中間優先順序組。 A method as recited in any one of the preceding claims, wherein the prioritized group further comprises at least one intermediate priority group. 如先前各請求項中任一項述及之方法,還包括以下步驟:提供至少100個晶片的檢查結果;及計算每個品質等級的晶片數量;其中基於所述計算結果指派所述品質等級中的每一者到所述優先順序組中的一者。 The method as recited in any one of the preceding claims, further comprising the steps of: providing an inspection result of at least 100 wafers; and calculating a number of wafers of each quality level; wherein the quality level is assigned based on the calculation result Each of the ones to the one of the priority groups. 如請求項7述及之方法,其中與具有較低數量晶片的品質等級相比,具有較高數量晶片的品質等級被指派到更高優先順序或相同優先順序的優先順序組。 The method of claim 7, wherein the quality level having a higher number of wafers is assigned to a higher priority order or a priority order group of the same priority order as compared to a quality level having a lower number of wafers. 如先前各請求項中任一項述及之方法,其中所述晶片的檢查結果中的至少部分被儲存和用於匹配所述品質等級的優先順序等級指派。 A method as recited in any one of the preceding claims, wherein at least a portion of the inspection results of the wafer are stored and used to match a priority level assignment of the quality level. 一種包含電腦程式代碼的電腦程式,其中當所述電腦程式在電腦上運行時所述電腦程式代碼適合於執行如下方法:取決於晶片的至少一個特性配置所述晶片的品質等級;配置優先順序組,使所述優先順序組至少包含一高優先順序組和一低優先順序組;指派所述品質等級中的每一者到所述優先順序組中的一者;指派所述大量組件屜中的每一者到所述優先順序組中的一者;接收所述晶片的檢查結果;根據所述晶片的檢查結果,將所述晶片中的每一者分類為所述品質等級中的一者;及根據指派給所述晶片的所述品質等級的所述優先順序組,控制所述晶片中的每一者到所述大量組件屜中的一者的傳送。 A computer program comprising computer program code, wherein when the computer program is run on a computer, the computer program code is adapted to perform a method of configuring a quality level of the wafer depending on at least one characteristic of the wafer; configuring a priority order group Having the prioritization group include at least one high priority group and one low priority group; assigning each of the quality levels to one of the priority groups; assigning the plurality of components Each of the plurality of priority groups; receiving an inspection result of the wafer; classifying each of the wafers into one of the quality levels according to an inspection result of the wafer; And controlling the transfer of each of the wafers to one of the plurality of bins in accordance with the prioritized set of the quality levels assigned to the wafer. 一種電腦可讀取媒體,所述電腦可讀取媒體儲存如請求項10述及之電腦程式。 A computer readable medium storing the computer program as described in claim 10. 一種用於組裝裝置(30)的控制器(200),所述組裝裝置(30)用於傳送晶片到大量的組件屜(31),所述控制器配置用於執行以下方法:取決於晶片的至少一個特性配置所述晶片的品質等級;配置優先順序組,使所述優先順序組至少包含一高優先 順序組和一低優先順序組;指派所述品質等級中的每一者到所述優先順序組中的一者;指派所述大量組件屜中的每一者到所述優先順序組中的一者;接收所述晶片的檢查結果;根據所述晶片的檢查結果,將所述晶片中的每一者分類為所述品質等級中的一者;及根據指派給所述晶片的所述品質等級的所述優先順序組,控制所述晶片中的每一者到所述大量組件屜中的一者的傳送。 A controller (200) for assembling a device (30) for transferring a wafer to a plurality of bins (31) configured to perform the following method: dependent on the wafer Configuring a quality level of the wafer by at least one characteristic; configuring a priority order group, wherein the priority order group includes at least one high priority a sequence group and a low priority group; assigning each of the quality levels to one of the priority groups; assigning each of the plurality of bins to one of the priority groups Receiving an inspection result of the wafer; classifying each of the wafers into one of the quality levels according to an inspection result of the wafer; and according to the quality level assigned to the wafer The set of prioritizations controls the transfer of each of the wafers to one of the plurality of bins. 一種用於傳送晶片到大量元件屜的組裝裝置(30),包括:至少一個輸送系統,用於傳送晶片到大量元件屜;及如請求項12述及之控制器,其中所述控制器配置用於控制至少一個輸送系統。 An assembly device (30) for transporting a wafer to a plurality of component drawers, comprising: at least one transport system for transporting a wafer to a plurality of component drawers; and a controller as claimed in claim 12, wherein said controller is configured For controlling at least one delivery system. 如請求項13述及之組裝裝置,其中所述輸送系統是機器人。 The assembly device of claim 13, wherein the delivery system is a robot. 如請求項14述及之組裝裝置,其中所述組裝裝置包含至少四個用於傳送晶片到大量組件屜的機器人。 The assembly device of claim 14, wherein the assembly device comprises at least four robots for transferring wafers to a plurality of bins. 如請求項13-15中任意一項述及之組裝裝置,其中包括用於輸送晶片的傳送帶。 An assembly apparatus as claimed in any one of claims 13-15, comprising a conveyor belt for transporting wafers. 如請求項16述及之組裝裝置,其中至少一個輸送系統排列在傳送帶上方。 The assembly device of claim 16, wherein at least one of the delivery systems is arranged above the conveyor belt. 如請求項13-17中任意一項述及之組裝裝置,其中僅將直接鄰近於傳送帶的組件屜指派給高優先順序組。 The assembly device of any of claims 13-17, wherein only the bins directly adjacent to the conveyor are assigned to the high priority group. 如請求項13-18中任意一項述及之組裝裝置,其中所述組裝裝置配置用於容納至少24個元件屜和至少48個組件屜中的一者。 The assembly device of any of claims 13-18, wherein the assembly device is configured to receive one of at least 24 component drawers and at least 48 assembly drawers. 一種太陽能電池製造裝置(1),包括:至少一個沉積裝置(10),用於在晶片上沉積導電通路;至少一個檢查裝置(20),用於檢查晶片;及至少一個組裝裝置(30),如請求項13-19中任意一項所述。 A solar cell manufacturing apparatus (1) comprising: at least one deposition apparatus (10) for depositing a conductive path on a wafer; at least one inspection apparatus (20) for inspecting a wafer; and at least one assembly apparatus (30), As described in any of claims 13-19.
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