TW201441576A - Cooling device for vacuum coating equipment - Google Patents

Abstract

This invention is a cooling device for a vacuum coating equipment. The cooling device comprises of an air intake tube, an air exhaust tube, and a cold trapping assembly which is placed between the air intake tube and the air exhaust tube. Additionally, the cold trapping assembly is provided with a first curved tube and a second curved tube. A separate cold trapping tube connects between the first curved tube and the air intake tube, between the first and second curved tubes, and between the second curved tube and the air exhaust tube. A baffling assembly is provided in each of these cold trapping tubes; furthermore, each baffling assembly has multiple paralleled inclined panels and a cooling pipe which abuts against each of these inclined panels. This design allows steam that comes from a cavity to condense at the surface of each inclined panel during the process in which steam passes through the baffling assembly; as a result, erosion against the first curved tube and the second curved tube can now be avoided.

Description

Condensing device for vacuum coating equipment

The present invention relates to a vacuum coating apparatus, and more particularly to a condensing apparatus for a vacuum coating apparatus.

Briefly speaking, the so-called vacuum coating is to evacuate the residual gas in the cavity by a vacuum pump to maintain the vacuum inside the cavity, then put a substance to be plated (such as a substrate) into the cavity, and finally a vapor deposition. The source (for example, selenium) is heated to a state of vaporization sublimation, and the gas of the vapor deposition source is attached to the surface of the object to be plated to form a film.

However, in addition to the general water vapor and other high-boiling vapors, the residual gas in the chamber may also contain a little corrosive vapor. In order to avoid the vacuum pump inhaling too much corrosive vapor, the service life is affected, and the cavity and the vacuum pump are usually A cold trap assembly is provided. The cold trap assembly mainly utilizes the low temperature condensation effect to trap the residual gas in the chamber, so that the chamber has a good vacuum. In the conventional technique of the cold trap assembly, the T-type cold trap assembly disclosed in the U.S. Patent No. 6,161,575 affects the smoothness of the vapor flow, so that the solid particles in the vapor are easily accumulated in the T-type cold trap assembly. Internal corrosion causes local corrosion.

SUMMARY OF THE INVENTION A primary object of the present invention is to provide a condensing apparatus for a vacuum coating apparatus which can increase the smoothness of vapor circulation to enhance the efficiency of trapping vapor.

In order to achieve the above object, the condensing device of the present invention is disposed between a cavity and a vacuum pump, and includes an air inlet pipe connecting the cavity, an air outlet pipe connecting the vacuum pump, and an air inlet pipe and the air inlet pipe A cold trap assembly between the outlet pipes. The cold trap assembly has a first curved elbow, a second curved elbow, and a three cold trap tube, the first curved arc and the intake tube, the first and second curved shapes Between the elbows, and the second curved elbow and the gas The tubes are connected together by a cold trap tube, and the first and second curved tubes have opposite bending directions, so that the first and second curved tubes are connected Forming an S-shaped channel. In addition, the cold trap assembly has a three baffle set, each of the baffle plates being disposed in a cold trap tube and having a plurality of inclined baffles arranged side by side and spaced apart, and a cooling water pipe. Each of the cooling water pipes has a plurality of contact segments, each of the contact segments abutting against a side of the inclined baffle for providing a cooling effect to each of the inclined baffles, so that the vapor from the cavity is in contact with each other When the baffle is tilted, it will actually condense on the surface of each of the inclined baffles.

Thereby, the condensing device of the present invention allows the vapor to smoothly flow from the intake pipe toward the gas outlet pipe by the design of the first and second curved elbows of the cold trap assembly without causing particle deposition. At the same time, the side-by-side design of a plurality of inclined baffles of the cold trap assembly can achieve the purpose of improving the efficiency of trapping vapor.

10‧‧‧Condensing device

12‧‧‧ cavity

14‧‧‧vacuum pump

20‧‧‧Intake pipe

30‧‧‧Exhaust pipe

40‧‧‧ Cold trap assembly

41‧‧‧First curved elbow

42‧‧‧Second curved elbow

43‧‧‧ cold trap tube

44‧‧ ‧Baffle group

45‧‧‧Tilt baffle

47‧‧‧Cooling water pipes

472‧‧‧Contact section

474‧‧‧ wearing section

48‧‧‧Liquid recovery tube

50‧‧‧Liquid recovery unit

Figure 1 is a schematic view showing the structure of the present invention.

Figure 2 is a schematic cross-sectional view showing the structure of the present invention.

Figure 3 is a partial perspective cross-sectional view of the present invention, mainly showing the relationship between the inclined baffle and the cooling water pipe.

Figure 4 is a partial plan cross-sectional view of the present invention, mainly showing the relationship between the inclined baffle and the cooling water pipe.

Referring to FIGS. 1 and 2, the condensing device 10 of the present invention is installed between a cavity 12 of a vacuum coating apparatus and a vacuum pump 14, and includes an intake pipe 20 connecting the cavity 12 and a connection vacuum pump 14. The air tube 30, and a cold trap assembly 40 between the air intake tube 20 and the air outlet tube 30.

The cold trap assembly 40 has a first curved elbow 41 and a second curved elbow 42. Between the first curved elbow 41 and the intake pipe 20, between the first and second curved elbows 41, 42, and between the second curved elbow 42 and the outlet pipe 30 respectively by a cold trap The tubes 43 are connected together, and the first and second curved elbows 41, 42 have opposite bending directions such that the first and second curved elbows 41, 42 form an S after joining. Shaped channel. In addition, the cold trap assembly 40 has a six baffle set 44, and the baffle sets 44 are disposed in pairs in a cold trap tube 43 and have a plurality of inclined baffles 45 and a cooling water pipe 47, respectively. The inclined baffles 45 are arranged side by side along the radial direction of the cold trap tube 43 and are arranged at intervals, as shown in FIGS. 3 and 4, and the inclined baffles 45 of the two baffle groups 44 are mirror-symmetrically symmetrical. In the opposite oblique direction, each of the cooling water pipes 47 has a plurality of mutually parallel contact sections 472 and a plurality of mutually parallel piercing sections 474, and the contact sections 472 of the respective cooling water pipes 47 abut against one side of one of the inclined baffles 45, each of which The wearing section 474 of the cooling water pipe 47 is connected between the adjacent two wearing sections 474 and is placed in an inclined baffle 45, so that the cooling water can provide a cooling effect to each inclined baffle when flowing through the cooling water pipes 47. 45. Further, the cold trap assembly 40 further has a liquid recovery pipe 48, one end of which is connected to the second arc elbow 42 and the other end of the liquid recovery pipe 48 is connected to a liquid recovery device 50.

Through the above structure, the vapor in the cavity 12 passes through the first and second curved elbows 41 and 42 of the cold trap assembly 40 from the intake pipe 20, and then enters the vacuum pump 14 through the air outlet pipe 30. Throughout the process, as shown in Fig. 2, once the vapor touches the inclined baffle 45 of the cold trap assembly 40, the cooling effect provided by each of the cooling baffles 47 to the inclined baffles 45 causes the vapor to be in each The inclined surface of the inclined baffle 45 is condensed into a liquid, and the condensed liquid flows to the first and second curved bends 41, 42 along the inclined surface of each inclined baffle 45, and then along the first, The inner wall of the second curved elbows 41, 42 flows to the liquid recovery pipe 48, and finally flows through the liquid recovery pipe 48 to the liquid recovery device 50 for subsequent processing.

In summary, the condensing device 10 of the present invention is designed such that the flow smoothness of the vapor can be greatly improved by the design of the first and second curved elbows 41, 42 of the cold trap assembly 40, so that particle deposition is not easily generated. Avoiding corrosive vapors causing structural damage to the cold trap assembly 40, and at the same time by the inclined baffles 45 of the cold trap assembly 40 The side-by-side spacing configuration can effectively improve the efficiency of trapping vapor to achieve the object of the present invention.

10‧‧‧Condensing device

12‧‧‧ cavity

14‧‧‧vacuum pump

20‧‧‧Intake pipe

30‧‧‧Exhaust pipe

40‧‧‧ Cold trap assembly

48‧‧‧Liquid recovery tube

50‧‧‧Liquid recovery unit

Claims (5)

A condensing device for a vacuum coating device, the vacuum coating device comprising a cavity and a vacuum pump, the condensing device comprising: an air inlet pipe for connecting the cavity; and an air outlet pipe for connecting the vacuum pump; And a cold trap assembly between the intake pipe and the air outlet pipe, and having a first arc bend, a second arc bend, a triple cold trap, and at least three baffle sets, the first Between the curved elbow and the intake pipe, between the first and second curved elbows, and between the second arc elbow and the air outlet pipe are respectively connected by a cold trap pipe And the first and second curved elbows have opposite bending directions, and each of the cold trap tubes is provided with at least one baffle group, and each of the baffle groups has a plurality of rows arranged side by side and arranged at intervals The inclined baffle and a cooling water pipe have a plurality of contact segments, each of the contact segments abutting against a side of the inclined baffle. The condensing device for a vacuum coating apparatus according to claim 1, wherein each of the cold trap tubes is provided with two baffle groups, and the inclined baffles of the two baffle plates are mirror-symmetrical. The condensing device for a vacuum coating apparatus according to claim 1 or 2, wherein the cooling water pipe further has a plurality of stripping sections, each of the piercing sections being connected between the adjacent two of the contact sections and being placed in a The tilting baffle is inside. A condensing device for a vacuum coating apparatus according to claim 1, wherein the plurality of inclined baffles are sequentially arranged along a radial direction of the cold trap tube. A condensing device for a vacuum coating apparatus according to claim 1, wherein the cold trap assembly further has a liquid recovery pipe connected to the second arc bend.