CN108888983A - A kind of cold-trap and film device is deposited altogether - Google Patents
A kind of cold-trap and film device is deposited altogether Download PDFInfo
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- CN108888983A CN108888983A CN201810941108.9A CN201810941108A CN108888983A CN 108888983 A CN108888983 A CN 108888983A CN 201810941108 A CN201810941108 A CN 201810941108A CN 108888983 A CN108888983 A CN 108888983A
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- cold
- trap
- shell
- cooling coil
- flange
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D8/00—Cold traps; Cold baffles
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
Abstract
Film device is deposited the invention discloses a kind of cold-trap and altogether, which is applied in the total vapor deposition film device of thin-film solar cells, to solve the not high technical problem of the filter efficiency existing in the prior art for steaming element altogether.The cold-trap is applied in the total vapor deposition film device of thin-film solar cells, including：Closed shell；Cooling coil is arranged in shell, and cooling coil includes inlet end and an outlet end, the outlet of the input end of cooling coil and the cold source feedway outside shell, the outlet end of cooling coil and the inlet communication of cold source feedway.This cold-trap is installed between chamber additional by steaming together in vacuum pump, the cooling medium that cooling coil can be flowed through can carry out heat exchange with the intracorporal hot fluid of shell is flowed through, so as to be effectively reduced the temperature of hot fluid, and the total steaming element in hot fluid can be made in rear fast deposition to the cold on the surface of cooling coil.
Description
Technical field
The present invention relates to solar energy generation technology fields, and film device is deposited more particularly, to a kind of cold-trap and altogether.
Background technique
There are two types of processes for copper indium gallium selenide CIGS plated film in solar battery sheet, and one is sputtering methods, and one is altogether
Steaming method.
During the technique of total steaming method is realized, due to needing vacuum pump to extract vacuum to total steaming chamber, to guarantee necessity
Base vacuum, and then lead to the total total steaming element steamed in chamber, especially selenium element can permeate into entire vacuum system, make
Element is steamed altogether and passes through vacuum pump in part.
Steaming element altogether can make vacuum pump two problems occur by vacuum pump：One, since total steaming element is from hot environment
Come over, cause thermal damage can be caused to vacuum pump, shorten the service life of vacuum pump；Two, when total steaming element passes through vacuum pump,
It has the total particle for steaming element and is deposited on vacuum pump surface, further shorten the service life of vacuum pump.
In the prior art, shutter is installed between chamber additional by steaming together in vacuum pump, to filter total steaming element,
It reduces and steams element altogether in the deposition on vacuum pump surface.But this structured filter is inefficient, so that the surface of vacuum pump is still
Have and largely steams element deposition altogether.
In consideration of it, how to effectively improve the total filter efficiency for steaming element, become a technical problem urgently to be resolved.
Summary of the invention
The present invention provides a kind of cold-trap and film device is deposited altogether, to solve the mistake existing in the prior art for steaming element altogether
Filter inefficient technical problem.
In a first aspect, in order to solve the above technical problems, a kind of cold-trap provided in an embodiment of the present invention, is applied to the film sun
In the total vapor deposition film device of energy battery, the cold-trap includes：
Closed shell；
Cooling coil is arranged in the shell, and the cooling coil includes inlet end and an outlet end, the cooling coil
Input end and the shell outside cold source feedway outlet, the outlet end of the cooling coil and the cold source supply
To the inlet communication of device.
Preferably, the cold-trap further includes：
It is arranged in the intracorporal support tube of the shell, the outer surface of the support tube offers the through-hole of heat donor fluid circulation,
The cooling coil is coiled in the outer surface of the support tube.
Preferably, the circulating direction of the hot fluid of the central axis of the support tube and the shell forms setting angle.
Preferably, the cold-trap further includes：
Heat-insulated connection component, the heat-insulated connection component are connected to the cooling coil and the cold source feedway.
Preferably, the heat-insulated connection component includes：
Connecting tube, passes through the shell and both ends are connect with the cooling coil and the cold source feedway respectively；
Flange is set in outside the connecting tube and is close to the housing exterior walls, is used for vacuum sealing；
Insulating assembly is arranged between the inner surface of the flange and the outer surface of the connecting tube, and with the flange
Inner surface and the outer surface of the connecting tube be tightly connected.
Preferably, the insulating assembly includes：
Thermal insulator is arranged between the inner surface of the flange and the outer surface of the connecting tube, and with the flange
The outer surface of inner surface and the connecting tube is tightly connected.
Preferably, the insulating assembly further includes：
Heat-insulated reinforcer is arranged between the inner surface of the flange and the outer surface of the connecting tube, and is tightly attached to institute
State the side that thermal insulator deviates from the shell.
Preferably, the heat-insulated reinforcer is low temperature glue.
Preferably, the heat-insulated connection component further includes：Thermal sleeve, the thermal sleeve are set in outside the flange,
And it is interference fitted with the flange.
Second aspect, the embodiment of the present invention provide one kind and film device are deposited altogether, and the film device of vapor deposition altogether includes steaming chamber altogether
Room and vacuum pump, the film device of vapor deposition altogether further includes such as above-mentioned cold-trap, and the shell of the cold-trap steams chamber with described respectively altogether
Room is connected with the vacuum pump.
Compared to existing shutter, the intracorporal cooling coil of cold-trap shell provided by the invention and external cold source are supplied
Device connection, cold source feedway can be continuously cooling coil and provide cooling medium, maintain the temperature on cooling coil surface
It is being suitable for the total low temperature level for steaming element condensation, during hot fluid flows through cold-trap arrival vacuum pump from total steaming chamber, heat
Heat exchange occurs for the cooling medium in fluid and cooling coil, can not only be effectively reduced the temperature of hot fluid, avoid hot fluid
Cause thermal damage was caused to vacuum pump, and can make total steaming element in hot fluid to the cold after fast deposition cooling coil table
Face, absorption (filtering) is high-efficient, reduces the total steaming element in hot fluid in the deposition on vacuum pump surface, substantially prolongs vacuum
The service life of pump.
Detailed description of the invention
Fig. 1 is the connection schematic diagram of cold-trap provided in an embodiment of the present invention；
Fig. 2 is a kind of sectional view of cold-trap provided in an embodiment of the present invention；
Fig. 3 is a kind of sectional view of heat-insulated connection component provided in an embodiment of the present invention；
Fig. 4 is the sectional view of the heat-insulated connection component of another kind provided in an embodiment of the present invention；
Fig. 5 is the section of the heat-insulated connection component provided in an embodiment of the present invention for being connected with ferrule fitting and quick connector
Figure.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
Fig. 1 and Fig. 2 are please referred to, the embodiment of the present invention provides a kind of cold-trap, the total vapor deposition applied to thin-film solar cells
In film device, Fig. 1 is the connection schematic diagram of cold-trap 11, and Fig. 2 is the sectional view of cold-trap 11, which includes：
Closed shell 111, the total steaming chamber 12 that film device is deposited in shell 111 together respectively are connected with vacuum pump 13；
Cooling coil 112 is arranged in shell 111, and cooling coil 112 includes inlet end and an outlet end, cooling tube 112
Inlet end and an outlet end is connected to the export and import of the cold source feedway 14 outside shell 111 respectively.
Cooling coil 112 and outside compared to existing shutter, in the shell 111 of cold-trap 11 provided by the invention
Cold source feedway 14 be connected to, cold source feedway 14 can be continuously cooling coil 112 provide cooling medium, make cooler pan
It is suitable for the total low temperature level for steaming element condensation that the temperature on 112 surface of pipe, which maintains, when hot fluid flows through cold-trap from total steaming chamber 12
During 11 reach vacuum pump 13, heat exchange occurs for the cooling medium in hot fluid and cooling coil 112, can not only be effectively
The temperature for reducing hot fluid, avoids hot fluid from causing cause thermal damage to vacuum pump 13, and can make the total steaming element in hot fluid
Fast deposition is on the surface of cooling coil 112 after to the cold, and absorption (filtering) is high-efficient, and the total steaming element reduced in hot fluid exists
The deposition on 13 surface of vacuum pump, substantially prolongs the service life of vacuum pump 13.
Certainly, cold source feedway 14 can be any refrigerant device for being capable of providing cooling medium, and being also possible to can
The refrigerant pipeline of cooling medium is provided.Shell 111 and the cold source feedway 14 for being provided with the cold-trap 11 of cooling coil 112 are removable
Connection is unloaded, the cold-trap shell 111 for being provided with cooling coil 112 and cold source feedway 14 can be separated, will be individually provided with
The shell 111 of the cold-trap 11 of cooling coil 112 is diverted in occasion or the environment that other need to deposit hot fluid particle, can also be with
By the common movement of the shell 111 of the cold source feedway 14 being assembled together and the cold-trap 11 for being provided with cooling coil 112 and make
With.
Further, cooling coil 112 can be bellows, since the surface area of bellows is larger, so can be into one
The adsorption efficiency of element is steamed in the raising of step altogether.
In embodiment provided by the invention, cold-trap 11 further includes：Support tube 113 in shell 111, support tube are set
113 outer surface offers the first through hole 1131 of heat donor fluid circulation, and cooling coil 112 is coiled in the appearance of support tube 113
Face.
The support tube 113 that first through hole 1131 is offered by being arranged in the shell 111 of cold-trap 11 is incited somebody to action in which can be convenient
Cooler pan pipe dish 112 is wound around 113 outer surface of support tube, so as to effectively improve connecing for cooling coil 112 and hot fluid
Contacting surface product, and then the temperature of hot fluid is reduced, improve the filter efficiency for steaming element altogether.
Further, the second through-hole 1132 is also intensively offered in the outer surface of support tube 113.Each second through-hole 1132
Perforated area be less than first through hole 1131 perforated area.
Heat can be allowed by the first through hole 1131 and the second through-hole 1132 that open up heat donor fluid in 113 outer surface of support tube
Fluid smoothly passes through from shell 111, improves the percent of pass of hot fluid, further to improve hot fluid and cooling coil 112
Contact area, and then improve altogether steam element filtering rate.
Further, since 113 outer surface of support tube opens up the first through hole 1131 and the second through-hole 1132 of heat donor fluid
Hot fluid can be allowed to pass through, so that hot fluid can also be reduced by the pressure difference of 113 front and back of support tube, reduce hot fluid to branch
The impact force for supportting cylinder 113, to improve the stability of support tube 113.
Further, since 113 outer surface of support tube intensively opens up the second through-hole 1132 of heat donor fluid, therefore can pass through
Cooling coil 112 is easily fixed on 113 outer surface of support tube by iron wire, band etc., cold so as to effectively simplify installation
But the operation of coil pipe disk 112 keeps the manufacture of cold-trap and maintenance more convenient, efficient.
In embodiment provided by the invention, the circulating direction of the hot fluid of the central axis and shell 111 of support tube 113
(horizontal circulating direction as shown in Figure 2) forms angle.Optimal, the hot fluid of the central axis and shell 111 of support tube 113
Circulating direction can form 90 degree of angle, i.e. support tube 113 is vertically arranged, perpendicular with horizontal hot fluid circulating direction.
By allowing the circulating direction of the central axis of support tube 113 and the hot fluid of shell 111 to form angle (especially 90 degree of angles),
The cooling coil 112 for being coiled in 113 outer surface of support tube can be made to come into full contact with hot fluid, to reduce the temperature of hot fluid
Degree improves the filter efficiency for steaming element altogether.
In embodiment provided by the invention, Fig. 3 is referred to, cold-trap further includes：Heat-insulated connection component 114 is arranged in shell
The opening of body 111, for being connected to cooling coil 112 and cold source feedway 14, and isolation external environment and cooling medium
Between heat exchange.
Setting is each provided with a heat-insulated connection in the two openings there are two opening on the shell 111 of cold-trap 11
Component 114.One end of one of them heat-insulated connection component 114 and the outlet of cold source feedway 14, the other end and cooling
The input end of coil pipe 112 is connected to, and the cooling medium in cold source feedway 14 is made to enter cooling through a heat-insulated connection component 114
Coil pipe 112；One end of another heat-insulated connection component 114 is connected to the outlet end of cooling coil 112, and the other end and cold source supply
The inlet communication of device 14, the cooling medium for having flowed through cooling coil 112 flow back to cold source feedway 14.It just can so allow cold
Source feedway 14 is lasting to provide cooling medium for cooling coil 112, and the surface temperature of cooling coil 112 is made to maintain low temperature
It is horizontal.
Heat-insulated connection component 114 is set by the opening in shell 111, cooling coil 112 and cold source can be supplied
Device 14 is connected to by heat-insulated connection component 114, and completely cuts off the heat exchange between external environment and cooling medium, supplies cold source
Device 14 avoids cooling medium and external environment that heat occurs and hands over during being continuously the offer cooling medium of cooling coil 112
It changes, and then maintaining the surface temperature of cooling coil 112 always is suitable for the total low temperature level for steaming element condensation, is effectively reduced
The temperature of hot fluid improves the filter efficiency for steaming element altogether.
In embodiment provided by the invention, heat-insulated connection component 114 includes：
Connecting tube 1141, across shell 11 opening and both ends connect respectively with cooling coil 112 and cold source feedway 14
It connects；
Flange 1142 is set in outside connecting tube 1141 and is close to 111 outer wall of shell, is used for vacuum sealing；
Insulating assembly 1143 is arranged between the inner surface of flange 1142 and the outer surface of connecting tube 1141, and and flange
1142 inner surface and the outer surface of connecting tube 1141 are tightly connected.The cooling medium in connecting tube 1142 can be completely cut off in this way
Cryogenic energy is transferred to the vacuum leak in flange 1142, and isolation shell 111.
Specifically, connecting tube 1141 can be stainless steel tube, insulating assembly 1143 can be the lower metal of heat transfer efficiency
Thin slice；Or connecting tube 1141 and insulating assembly 1143 are stainless steel material, and heat-insulated material is coated in connecting tube 1141
Matter.
When cooling medium flows through the connecting tube 1141 of thermal insulating connectors 114, pass through inner surface in flange 1142 and company
Insulating assembly 1143 is set between the outer surface of adapter tube 1141, can not only effectively completely cut off the cooling medium in connecting tube 1141
Cryogenic energy is transferred to flange 1142, moreover it is possible to effectively completely cut off the vacuum leak in shell 111.
In embodiment provided by the invention, insulating assembly 1143 includes：
Thermal insulator 11431 is arranged between the inner surface of flange 1142 and the outer surface of connecting tube 1141, and and flange
1142 inner surface and the outer surface of connecting tube 1141 are tightly connected, the cooling medium low temperature for completely cutting off in connecting tube 1141
Vacuum leak in energy transmission to flange 1142, and isolation shell 111.
Specifically, thermal insulator 11431 is the heat-insulated thin slice of 0.2~1mm of thickness.Thermal insulator 11431 is welded to flange
Between 1142 inner surface and the outer surface of connecting tube 1141.For example, thermal insulator 11431 can be stainless steel thin slice, it is stainless
Steel thin slice is welded between the inner surface of flange 1142 and the outer surface of connecting tube 1141.
By between the inner surface of flange 1142 and the outer surface of connecting tube 1141 throat thickness be 0.2~1mm every
On the one hand warmware 11431 can effectively reduce the contact area of thermal insulator 11431 Yu flange 1142 and connecting tube 1141, drop
The heat conduction efficiency of low thermal insulator 11431, prevents cooling medium cryogenic energy to be transferred to flange 1142；On the other hand it is welded on method
Thermal insulator 11431 between the inner surface of orchid 1142 and the outer surface of connecting tube 1141, moreover it is possible to effectively by the external rings of cold-trap
Border and inner vacuum environment completely cut off, and prevent the vacuum leak in the shell 111 of cold-trap.
In embodiment provided by the invention, insulating assembly 1143 further includes：
Heat-insulated reinforcer 11432 is arranged between the inner surface of flange 1142 and the outer surface of connecting tube 1141, and is close to
Deviate from the side of shell 111 in thermal insulator 11431, for reinforcing the structural strength of thermal insulator 11431, and isolation connecting tube
Cooling medium cryogenic energy in 1141 is transferred to flange 1142.
By the way that heat-insulated reinforcer 11432 is arranged far from the side of shell 111 in thermal insulator 11431, can not only effectively add
The intensity of strong thermal insulator 11431 makes the unlikely breakage of thermal insulator 11431, moreover it is possible to effectively completely cut off the cooling medium in connecting tube 1141
Cryogenic energy is transferred to flange 1142, further prevents the reduction of cooling efficiency.
Specifically, heat-insulated reinforcer 11432 is low temperature glue.
When the temperature of cooling medium is -50 DEG C to 200 DEG C, heat-insulated reinforcer 11432 can be epoxy adhesive, due to
The heat transfer efficiency of epoxy adhesive is a thirtieth or so of the heat transfer efficiency of stainless steel, therefore can prevent isolation connecting tube 1141
Interior cooling medium low temperature capability is transferred to flange 1142.
When the temperature of cooling medium is lower than -50 DEG C, heat-insulated reinforcer 11432 can be low temperature glue, such as encapsulating polyurethane
Glue.
In embodiment provided by the invention, Fig. 4 is referred to, heat-insulated connection component 114 further includes：
Thermal sleeve 1144 is set in outside flange 1142, and is interference fitted with flange 1142.By in 1142 housing of flange
If the thermal sleeve 1144 of interference fit not only can further completely cut off the cooling medium in external environment and connecting tube 1141
Between heat exchange, and when the humidity of external environment is larger, moreover it is possible to prevent from occurring condensing on the outer wall of flange 1142 or
Frost.
Specifically, thermal sleeve 1144 is set in the outer wall of boss of flange 1142, the top setting of thermal sleeve 1144
There are casing boss, the flange boss interference fit of casing boss and flange 1142, and ground is shunk in the bottom end of thermal sleeve 1144
It is close to connecting tube 1141, so that outside air and heat-insulated connection component 114 be kept apart, reduces external environment and connecting tube
1141 heat exchange.
Fig. 5 is referred to, in embodiment provided by the invention, heat-insulated connection component 114 further includes：It is arranged in connecting tube
The ferrule fitting 1145 at 1142 both ends, 111 one end of shell outside ferrule fitting 1145 by a quick connector 1146 with
Cold source feedway 14 connects, the ferrule fitting 1145 of one end and the input end of cooling coil 112 or outlet end in shell 111
Connection.
When cold source feedway 14 to be connected to by heat-insulated connection component 114 with cooling coil 112, by being located at shell
One end setting ferrule fitting 1145 of external connecting tube 1142 and the quick connector 1146 used with the pairing of ferrule fitting 1145,
Can rapidly cold source feedway 14 be connected to or be disconnected with cooling coil 112 by heat-insulated connection component 114, so as to have
Improve working efficiency in effect ground.
In embodiment provided by the invention, the shell 111 of cold-trap is specifically as follows four-way, four-way is opposite and set two
A communication port steams chamber 12 together respectively and vacuum pump 13 connects, and remaining two communication ports are sealed with blind plate.
It further, can also be using one of blind plate as mounting surface, for installing heat-insulated connection component 114；It will be another
One blind plate is as maintenance panel, for overhauling cold-trap and removing the total steaming element on 112 surface of cooling coil.By by the shell of cold-trap
Body 111 is set as four-way, on the one hand can quickly and easily be connected to total steaming chamber 115 and vacuum pump 116；On the other hand true
There are enough spaces that can be used to accommodate cooling coil 112 and support the support tube 113 of cooling coil 112 in empty four-way, it is convenient
Implement above-mentioned technical proposal of the invention.
Further, since four-way is common linker, so especially fixed without the progress of shell 111 to cold-trap 11
System, so as to effectively save manufacturing cost, shortens the generation manufacturing cycle of cold-trap.
It will be appreciated that the shell 111 of cold-trap 11 or threeway, two communication ports that are threeway is opposite and setting are divided
Chamber 12 is not steamed together and vacuum pump 13 connects, and a remaining communication port is sealed with blind plate, as heat-insulated connection component
114 mounting surface uses, and also can achieve effect similar with four-way.
Referring to Figure 1, based on the same inventive concept, the embodiment of the present invention also provides one kind and film device is deposited altogether, the total steaming
Coating apparatus includes steaming chamber 12 and vacuum pump 13, and such as above-mentioned cold-trap 11 as described in the examples altogether.Cold-trap 11 is used for will
It steams chamber 12 altogether to be connected to vacuum pump 13, the specific location of cold-trap 11 can be as shown in Figure 1, positioned at steaming chamber 12 altogether and very
Between sky pump 13, or other positions are connected to as long as the total chamber 12 that steams may be implemented with vacuum pump 13, here not
An another description.
Obviously, those skilled in the art can carry out various modification and variations without departing from this hair to the embodiment of the present invention
Bright spirit and scope.In this way, if these modifications and changes of the present invention belongs to the claims in the present invention and its equivalent technologies
Within the scope of, then the present invention is also intended to include these modifications and variations.
Claims (10)
1. a kind of cold-trap, which is characterized in that the cold-trap is applied in the total vapor deposition film device of thin-film solar cells, described cold
Trap includes：
Closed shell；
Cooling coil, be arranged in the shell, the cooling coil includes inlet end and an outlet end, the cooling coil into
The outlet of cold source feedway outside mouth end and the shell, the outlet end of the cooling coil and cold source supply fill
The inlet communication set.
2. cold-trap as described in claim 1, which is characterized in that the cold-trap further includes：
It is arranged in the intracorporal support tube of the shell, the outer surface of the support tube offers the through-hole of heat donor fluid circulation, described
Cooling coil is coiled in the outer surface of the support tube.
3. cold-trap as claimed in claim 2, which is characterized in that the hot fluid of the central axis of the support tube and the shell
Circulating direction forms setting angle.
4. cold-trap as claimed in claim 3, which is characterized in that the cold-trap further includes：
Heat-insulated connection component, the heat-insulated connection component are connected to the cooling coil and the cold source feedway.
5. cold-trap as claimed in claim 4, which is characterized in that the heat-insulated connection component includes：
Connecting tube, passes through the shell and both ends are connect with the cooling coil and the cold source feedway respectively；
Flange is set in outside the connecting tube and is close to the housing exterior walls, is used for vacuum sealing；
Insulating assembly is arranged between the inner surface of the flange and the outer surface of the connecting tube, and in the flange
Surface and the outer surface of the connecting tube are tightly connected.
6. cold-trap as claimed in claim 5, which is characterized in that the insulating assembly includes：
Thermal insulator is arranged between the inner surface of the flange and the outer surface of the connecting tube, and the interior table with the flange
Face and the outer surface of the connecting tube are tightly connected.
7. cold-trap as claimed in claim 6, which is characterized in that the insulating assembly further includes：
Heat-insulated reinforcer is arranged between the inner surface of the flange and the outer surface of the connecting tube, and be tightly attached to it is described every
Warmware deviates from the side of the shell.
8. cold-trap as claimed in claim 6, which is characterized in that the heat-insulated reinforcer is low temperature glue.
9. cold-trap as claimed in claim 7, which is characterized in that the heat-insulated connection component further includes：Thermal sleeve, it is described every
Thermal sleeve is set in outside the flange, and is interference fitted with the flange.
10. film device is deposited in one kind altogether, the film device of vapor deposition altogether includes steaming chamber and vacuum pump altogether, which is characterized in that described
Vapor deposition film device further includes the described in any item cold-traps of claim 1-9 altogether, and the shell of the cold-trap steams chamber with described respectively altogether
Room is connected with the vacuum pump.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810941108.9A CN108888983A (en) | 2018-08-17 | 2018-08-17 | A kind of cold-trap and film device is deposited altogether |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810941108.9A CN108888983A (en) | 2018-08-17 | 2018-08-17 | A kind of cold-trap and film device is deposited altogether |
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| Publication Number | Publication Date |
|---|---|
| CN108888983A true CN108888983A (en) | 2018-11-27 |
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|---|---|---|---|
| CN201810941108.9A Pending CN108888983A (en) | 2018-08-17 | 2018-08-17 | A kind of cold-trap and film device is deposited altogether |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115466936A (en) * | 2022-09-13 | 2022-12-13 | 安徽其芒光电科技有限公司 | Vacuum-pumping mechanism for vacuum coating equipment and vacuum coating equipment |
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