CN217815737U

CN217815737U - Heat preservation pipeline assembly and refrigerating device

Info

Publication number: CN217815737U
Application number: CN202221841493.8U
Authority: CN
Inventors: 范祖金; 王立志
Original assignee: Hangzhou Fuxin Semiconductor Co Ltd
Current assignee: Hangzhou Fuxin Semiconductor Co Ltd
Priority date: 2022-07-15
Filing date: 2022-07-15
Publication date: 2022-11-15
Anticipated expiration: 2032-07-15

Abstract

The application provides a heat preservation pipeline subassembly and refrigerating plant, it is used for semiconductor process equipment, includes: an inner tube, an outer tube, and at least two connecting members. The inner pipe is used for conveying circulating liquid, wherein the circulating liquid is used for cooling or heating. The outer pipe is sleeved outside the inner pipe. The outer pipe is detachably connected with the inner pipe in a sealing mode through at least two connecting parts, and a vacuum interlayer is formed among the outer pipe, the inner pipe and the at least two connecting parts. The problem of circulation liquid pipeline replacement cost is too high has been solved in this application.

Description

Heat preservation pipeline assembly and refrigerating device

Technical Field

The application relates to semiconductor process equipment, in particular to a heat-insulating pipeline assembly and a refrigerating device.

Background

In an etching apparatus for semiconductor manufacturing, temperature is one of important factors affecting etching characteristics. In order to keep the temperature stable at a certain level during the etching process, a cooler (Chiller) is often used. The cooler can cool or heat the upper electrode, the lower electrode, the chamber wall (chamber wall) and other parts of the etching machine table through the circulating liquid (coolant).

For example, the circulating liquid may exchange heat with the refrigerant in the cooler (the refrigerant absorbs heat of the circulating liquid when evaporating), so that the temperature of the circulating liquid decreases. The cooled circulating liquid flows through a load (for example, the load is an electrode) and exchanges heat with the load, so that the load is cooled, the circulating liquid is heated, the heated circulating liquid returns to the cooler to be cooled by the refrigerant, and the circulating liquid is circulated in a reciprocating manner to achieve the purpose of continuously cooling the load. In addition, the circulating liquid can be heated by a heater (heater) to achieve the effect of heating the load. The cooler needs to deliver the circulating fluid to a specified load by means of a pipe. The circulating liquid can exchange heat with the outside through a pipeline in the conveying process, so that the temperature of the circulating liquid is changed too fast, and the effect of refrigerating or heating the circulating liquid is reduced.

In order to prevent the circulating liquid in the pipeline from being influenced by the external temperature and causing the temperature change to be too fast, a layer of outer pipe can be additionally arranged outside the pipeline, an interlayer is formed between the pipeline and the outer pipe, then the two ends of the outer pipe are welded on the pipeline to seal the interlayer, finally the interlayer is vacuumized, and the temperature change of the circulating liquid in the pipeline is prevented by utilizing the good heat insulation property of vacuum. Because the pipeline and the outer pipe are welded together, the pipeline and the outer pipe need to be replaced simultaneously no matter the pipeline is damaged alone to cause circulating liquid leakage or the outer pipe is damaged alone to cause interlayer vacuum to be damaged, and the pipeline or the outer pipe cannot be replaced alone. The replacement of the pipe and the outer pipe at the same time would result in an excessive replacement cost. Therefore, the existing circulating liquid conveying pipeline has the problem of high replacement cost.

SUMMERY OF THE UTILITY MODEL

To there being the too high problem of replacement cost in current circulation liquid pipeline, the application provides a heat preservation pipeline subassembly, and it is used for semiconductor process equipment, includes: an inner tube, an outer tube, and at least two connecting members. The inner pipe is used for conveying circulating liquid, wherein the circulating liquid is used for cooling or heating. The outer pipe is sleeved outside the inner pipe. The outer pipe is detachably and hermetically connected with the inner pipe through the at least two connecting parts, and a vacuum interlayer is formed among the outer pipe, the inner pipe and the at least two connecting parts.

Preferably, the at least two connecting members are detachably and sealingly connected to the inner pipe, at least one of the at least two connecting members is provided at one end of the outer pipe, and at least another one of the at least two connecting members is provided at the other end of the outer pipe.

Preferably, each of the connection members includes a flange provided on the outer pipe and a flange provided on the inner pipe, the vacuum interlayer is formed between the outer pipe, the inner pipe and the flange, and the flange abuts against the flange and is detachably and sealingly connected with the flange.

Preferably, the flange is integrally formed with the outer tube and is located at one end of the outer tube.

Preferably, each of the connection members further includes a fastener and a washer, the washer being located between the flange and the flange, the fastener detachably and sealingly connecting the flange, the washer, and the flange.

Preferably, each of the connection members includes: the vacuum interlayer comprises an elastic pipe fitting and at least two hoop members, one end of the elastic pipe fitting is detachably and hermetically sleeved with the inner pipe, the other end of the elastic pipe fitting is detachably and hermetically sleeved with the outer pipe, and the vacuum interlayer is formed among the outer pipe, the inner pipe and the elastic pipe fitting. The at least two hoop members hoop each of the elastic tube members.

Preferably, the outer tube is provided with at least two connecting ports, and one end of each elastic tube is detachably and hermetically sleeved on each connecting port.

Preferably, the number of the connecting parts is two, and the two connecting parts are respectively arranged at both ends of the outer tube.

Preferably, the outer tube further comprises an air outlet, one end of the air outlet is communicated with the vacuum interlayer, and the other end of the air outlet is connected with a vacuumizing device.

The present application further provides a refrigeration device comprising the insulated pipe assembly.

The beneficial effect of this application lies in: by arranging the inner pipe, the outer pipe and the at least two connecting parts, the outer pipe is sleeved outside the inner pipe to form the heat-insulating pipeline assembly, and a vacuum interlayer is formed among the outer pipe, the inner pipe and the at least two connecting parts. When the inner pipe is arranged in this way to convey the circulating liquid for cooling or heating, a good heat insulation effect can be achieved on the circulating liquid due to the good heat insulation property of the vacuum interlayer. Because the outer pipe is separably and hermetically connected with the inner pipe through the at least two connecting parts, when the circulating liquid leaks due to the fact that only one of the outer pipe and the inner pipe is damaged, the outer pipe and the inner pipe can be separated through dismounting the at least two connecting parts, and then the outer pipe or the inner pipe is respectively replaced without replacing the whole heat-insulating pipeline assembly, so that the replacement cost of the heat-insulating pipeline assembly is reduced.

The foregoing description is only an overview of the technical solutions of the present application, and in order to make the technical solutions of the present application more clear and clear, and to implement the technical solutions according to the content of the description, the present application will be described in detail with reference to the following preferred embodiments of the present application and the accompanying drawings.

Drawings

FIG. 1 is an exploded view of an insulated pipe assembly according to an embodiment of the present application;

FIG. 2 is an elevation view of an insulated pipe assembly according to an embodiment of the present application;

FIG. 3 isbase:Sub>A cross-sectional view taken along line A-A of FIG. 2 in an embodiment of the present application;

FIG. 4 is an exploded view of an insulated pipe assembly according to another embodiment of the present application;

FIG. 5 is an elevation view of an insulated pipe assembly according to another embodiment of the present application;

FIG. 6 is a cross-sectional view taken along line B-B of FIG. 5 in another embodiment of the present application;

FIG. 7 is a schematic view of a refrigeration unit according to an embodiment of the present application.

Wherein, the reference numbers:

1. heat preservation pipeline assembly

10. Inner pipe

11. Outer tube

110. Connecting port

111. Air outlet

12. Connecting part

120. Flange

121. Flange

122. Fastening piece

123. Gasket ring

124. Elastic pipe fitting

125. Hoop member

2. Vacuum-pumping device

3. Refrigerating device

4. Load(s)

Detailed Description

The following description of the embodiments of the present application is provided for illustrative purposes, and other advantages and capabilities of the present application will become apparent to those skilled in the art from the present disclosure.

It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict. The present application will be described in detail below with reference to the accompanying drawings in conjunction with embodiments. In order to make the technical solutions of the present application better understood by those skilled in the art, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only some embodiments of the present application, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments of the present application without making any creative effort, shall fall within the protection scope of the present application.

It should be noted that the terms "first," "second," and the like in the description and claims of this application and in the accompanying drawings are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. Moreover, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover non-exclusive inclusions, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.

It should be noted that unless expressly stated or limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly and include, for example, fixed or removable connections or integral connections; the connection can be mechanical connection or electrical connection; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present application can be understood in a specific case by those of ordinary skill in the art.

Referring to fig. 1 and 2 together, in one embodiment, an insulated pipe assembly 1 for a semiconductor processing apparatus is provided, comprising: an inner tube 10, an outer tube 11 and at least two connecting members 12. The inner tube 10 and the outer tube 11 may be circular tubes made of a relatively high strength material such as stainless steel or an alloy. The inner tube 10 is used for conveying a circulating liquid (coolant), which is used for cooling or heating. The outer tube 11 is sleeved outside the inner tube 10. For example, the outer tube 11 may be coaxially disposed with the inner tube 10. The outer tube 11 is detachably and hermetically connected with the inner tube 10 by at least two connecting members 12, and a vacuum interlayer is formed between the outer tube 11, the inner tube 10 and the at least two connecting members 12.

The heat preservation pipeline assembly 1 is formed by arranging the inner pipe 10, the outer pipe 11 and at least two connecting parts 12 and sleeving the outer pipe 11 outside the inner pipe 10, and a vacuum interlayer is formed among the outer pipe 11, the inner pipe 10 and the at least two connecting parts 12. When the inner pipe 10 is arranged in this way to convey the circulating liquid for cooling or heating, a good heat insulating effect can be provided to the circulating liquid due to the good heat insulating property of the vacuum interlayer. Because the outer pipe 11 is separably and hermetically connected with the inner pipe 10 through the at least two connecting parts 12, when only one of the outer pipe 11 and the inner pipe 10 is damaged to cause leakage of circulating liquid, the outer pipe 11 and the inner pipe 10 can be separated by disassembling the at least two connecting parts 12, and then the outer pipe 11 or the inner pipe 10 is respectively replaced, so that the whole heat-insulating pipeline assembly 1 does not need to be replaced, and the replacement cost of the heat-insulating pipeline assembly 1 is reduced.

Referring to fig. 2 and 3 together, preferably, in one embodiment, at least two connecting members 12 are detachably and hermetically connected to the inner tube 10, at least one of the at least two connecting members 12 is disposed at one end of the outer tube 11, and at least another one of the at least two connecting members 12 is disposed at the other end of the outer tube 11. For example, the number of the connecting members 12 may be two, and the two connecting members are respectively provided at both ends of the outer tube 11. Each connecting member 12 includes a flange 120 provided on the outer pipe 11 and a flange 121 provided on the inner pipe 10, a vacuum interlayer is formed between the outer pipe 11, the inner pipe 10 and the flange 121, and the flange 120 abuts against the flange 121 and is separably and sealingly connected with the flange 121. For example, the flange 121 may be made of a material having a relatively high strength (e.g., stainless steel or alloy), and the outer diameter of the flange 121 may be larger than that of the outer tube 11.

As shown in fig. 3, the flange 121 and the inner tube 10 may be detachably connected in a sealing manner, for example, the flange 121 may be a threaded flange, after an external thread is provided on the outer wall of the inner tube 10, a sealing material such as vacuum sealant and raw material tape is provided on the external thread on the outer wall of the inner tube 10, and then the flange 121 is screwed to the inner tube 10, so that the flange 121 and the inner tube 10 can be detachably connected in a sealing manner. The flange 120 and the outer tube 11 may be inseparably connected, such as welded or integrally formed. The flange 120 and the outer tube 11 may also be detachably and hermetically connected, for example, by providing an internal thread on the flange 120 and an external thread on the outer wall of the outer tube 11, in a manner similar to the connection between the flange 121 and the inner tube 10, such that the internal thread on the flange 120 and the external thread on the outer wall of the outer tube 11 are screwed together. Preferably, the flange 120 is integrally formed with the outer tube 11 and is located at one end of the outer tube 11. For example, the flange 120 may be an integrally formed ring extending radially outward from one end of the outer tube 11, and the flange 120 and the outer tube 11 are coaxially disposed. The flange 120 may be made of a relatively strong material such as stainless steel or an alloy.

Due to the strength of the flange 121 and the flange 120, a large pressure can be received without breakage and leakage. Therefore, the outer pipe 11 and the inner pipe 10 are separably connected in a sealing manner by the flange 121 and the flange 120, and a vacuum interlayer with a higher vacuum degree can be arranged (the higher the vacuum degree of the vacuum interlayer is, the better the heat insulation effect is), so that the heat insulation effect of the heat insulation pipeline assembly 1 can be improved.

As shown in fig. 3, each connecting member 12 preferably further comprises a fastening member 122 and a washer 123, the washer 123 is located between the flange 120 and the flange 121, and the fastening member 122 detachably and sealingly connects the flange 120, the washer 123 and the flange 121. For example, the fasteners 122 may be bolts. A plurality of through holes may be formed in the flange 120 and the flange 121, respectively, and a plurality of fasteners 122 may be inserted through the through holes, respectively, to detachably couple the flange 120 and the flange 121. The number of the through holes on the flange 120 and the flange 121 can be respectively 4, wherein 4 through holes are uniformly distributed on the flange 120 by taking the axis of the outer pipe 11 as the center, and the other 4 through holes are uniformly distributed on the flange 121 by taking the axis of the outer pipe 11 as the center. The washer 123 may be disposed around the inner tube 10 and located inside the reference circle of each through hole, and avoid interference with each fastener 122. The gasket 123 may be a rubber ring.

Referring to fig. 4 and 5 together, preferably, in another embodiment, at least two connecting members 12 are detachably and hermetically connected to the inner tube 10, at least one of the at least two connecting members 12 is disposed at one end of the outer tube 11, and at least another one of the at least two connecting members 12 is disposed at the other end of the outer tube 11. For example, the number of the connecting members 12 may be two, and the two connecting members are respectively provided at both ends of the outer tube 11. Each of the connecting members 12 includes: the elastic tube 124 and the at least two hoop members 125, one end of the elastic tube 124 is detachably and hermetically sleeved on the inner tube 10, the other end of the elastic tube 124 is detachably and hermetically sleeved on the outer tube 11, and a vacuum interlayer is formed among the outer tube 11, the inner tube 10 and the elastic tube 124.

As shown in fig. 6, at least two hoop members 125 hoop each elastic tube member 124, for example, at least one of the at least two hoop members 125 hoops one end of one elastic tube member 124 to the outer tube 11, and at least another one of the at least two hoop members 125 hoops the other end of the same elastic tube member 124 to the inner tube 10. The number of the hoop members 125 may be four, and two hoop members 125 are provided at both ends of the outer tube 11, that is, at least two hoop members 125 are provided for each elastic tube member 124. For example, the elastic tube 124 may be a hose (e.g., a rubber hose) having an inner diameter slightly smaller than the outer diameter of the inner tube 10, and the inner tube 10 and the outer tube 11 are sleeved with the elastic sealing of the elastic tube 124 itself. The at least two hoop members 125 may be at least two high pressure hose clamps, which may be of a metallic material, for example. The size of the band 125 may be selected according to the location of the band, for example, the inner diameter of the band 125 of the band at the outer tube 11 may be larger than the inner diameter of the band 125 of the band at the inner tube 10.

As shown in fig. 4, for example, each hoop 125 may be formed by two fasteners 122 (e.g., bolts) securing two semi-circular rings. Since the hoop member 125 requires a small number of fasteners 122 (two fasteners 122 are used for each hoop member 125 in this embodiment, and are fixed at two ends of each semicircular ring, generally speaking, it is also feasible to use one fastener 122 at one end of each semicircular ring, and hinge the other end), the amount of work for fastening the fasteners 122 is small, and thus the amount of work for detachably and sealingly connecting and disconnecting the outer tube 11 and the inner tube 10 is also reduced. The elastic tube 124 and the hoop 125 are used to connect the outer tube 11 and the inner tube 10, so that the outer tube 11 and/or the inner tube 10 do not need to be reworked, and the processing cost of the outer tube 11 and the inner tube 10 is saved.

Referring to fig. 4 and 6, preferably, the outer tube 11 is provided with at least two connection ports 110, and one end of each elastic tube 124 is detachably and sealingly sleeved on each connection port 110. The respective connection ports 110 may be integrally formed with the outer tube 11 and provided at both ends of the outer tube 11. The connection port 110 may be a reduced port (i.e. the outer diameter of the connection port 110 is smaller than the outer diameter of the outer pipe), for example, the connection port 110 may be a round pipe or a green head with an outer diameter smaller than the outer diameter of the outer pipe 11, and the connection port 110 is a reduced port which can make the outer diameter of the connection port 110 and the outer diameter of the inner pipe 10 close to each other, thereby avoiding the elastic pipe 124 from generating large deformation when being sleeved on the outer pipe 11, which is easy to break and lose efficacy, and shortening the service life thereof.

As shown in fig. 7, preferably, the outer tube 11 further includes an air outlet 111, one end of the air outlet 111 is communicated with the vacuum interlayer, and the other end of the air outlet 111 is connected with the vacuum extractor 2. The evacuation device 2 can evacuate the interlayer via the air outlet 111. The evacuation device 2 may be, for example, a vacuum pump.

As shown in fig. 7, in another embodiment, there is provided a refrigerating apparatus, which includes a refrigerator 3 (chiller), a thermal insulation pipe assembly 1 and a load 4 (for example, the load 4 is an electrode or a chamber wall (chamber wall)), and the load 4 is connected to the refrigerator 3 through the thermal insulation pipe assembly 1. For example, two sets of thermal insulation pipe assemblies 1 may be provided to connect the load 4 and the refrigerator 3, respectively, wherein one set of thermal insulation pipe assemblies 1 is used as a liquid inlet pipe (a pipe indicated by a right arrow in fig. 7), and the other set of thermal insulation pipe assemblies 1 is used as a liquid return pipe (a pipe indicated by a left arrow in fig. 7), and vacuum interlayers of the liquid inlet pipe and the liquid return pipe may be communicated so as to integrally form a vacuum interlayer.

The Vacuum interlayer may be formed by a Vacuum pump in a Vacuum conversion Module (Vacuum Transfer Module) of the etching machine (i.e. the Vacuum pumping device 2 may be a Vacuum pump in the Vacuum conversion Module), or may be formed by a Process Vacuum device (Process Vacuum) provided by the plant system by connecting the plant system (i.e. the Vacuum pumping device 2 may be a Process Vacuum device of the plant system), for example, the air outlet 111 may be connected to the Vacuum pump in the Vacuum conversion Module or the Process Vacuum device of the plant system. The vacuum interlayer is formed by the vacuum pump in the vacuum conversion module or the process vacuum device of the factory system, so that the vacuum interlayer can be formed without additionally arranging the vacuum pump, and the cost for adding the vacuum pump is saved.

The heat preservation pipeline assembly and the refrigeration device provided by the embodiment of the present application are described in detail above, and a person having ordinary skill in the art may change the specific implementation manner and the application scope according to the idea of the embodiment of the present application. In summary, the present disclosure should not be construed as limiting the present application, and all equivalent modifications and changes made according to the spirit and technical ideas of the present application should be covered by the claims of the present application.

Claims

1. An insulated pipe assembly (1) for use in semiconductor processing equipment, comprising:

an inner tube (10) for conveying a circulating liquid, wherein the circulating liquid is used for cooling or heating;

the outer pipe (11) is sleeved outside the inner pipe (10); and

at least two connecting parts (12), the outer tube (11) is detachably connected with the inner tube (10) in a sealing mode through the at least two connecting parts (12), and a vacuum interlayer is formed among the outer tube (11), the inner tube (10) and the at least two connecting parts (12).

2. The insulated pipe assembly (1) according to claim 1, characterized in that the at least two connecting members (12) are detachably sealingly connected to the inner pipe (10), at least one of the at least two connecting members (12) being arranged at one end of the outer pipe (11) and at least another one of the at least two connecting members (12) being arranged at the other end of the outer pipe (11).

3. An insulated pipe assembly (1) according to claim 2, characterized in that each of said connecting members (12) comprises a flange (120) arranged on said outer pipe (11) and a flange (121) arranged on said inner pipe (10), said vacuum interlayer being formed between said outer pipe (11), said inner pipe (10) and said flange (121), said flange (120) abutting said flange (121) and being detachably sealingly connected to said flange (121).

4. An insulated pipe assembly (1) according to claim 3, characterized in that the flange (120) is provided integrally with the outer pipe (11) and is located at one end of the outer pipe (11).

5. An insulated pipe assembly (1) according to claim 4, characterized in that each of said connecting members (12) further comprises a fastening member (122) and a gasket (123), said gasket (123) being located between said flange (120) and said flange (121), said fastening member (122) detachably and sealingly connecting said flange (120), said gasket (123) and said flange (121).

6. Insulating duct assembly (1) according to claim 2, characterized in that each connecting member (12) comprises:

an elastic pipe piece (124), one end of which is detachably and hermetically sleeved on the inner pipe (10), the other end of the elastic pipe piece (124) is detachably and hermetically sleeved on the outer pipe (11), and the vacuum interlayer is formed among the outer pipe (11), the inner pipe (10) and the elastic pipe piece (124); and

at least two hoop members (125) which hoop each of the elastic tube members (124).

7. Heat-insulating pipe assembly (1) according to claim 6, characterised in that said outer pipe (11) is provided with at least two connection ports (110), one end of each elastic tube (124) being adapted to be detachably sealingly received in each connection port (110).

8. Heat-insulating pipe assembly (1) according to any one of claims 1 to 7, characterised in that said connecting members (12) are two in number, said two connecting members (12) being arranged at the two ends of said outer pipe (11), respectively.

9. The insulating duct assembly (1) according to any of claims 1 to 7, characterized in that the outer tube (11) further comprises an air outlet (111), one end of the air outlet (111) is communicated with the vacuum interlayer, and the other end of the air outlet (111) is connected with a vacuum pumping device (2).

10. A refrigeration device, comprising:

insulated pipe assembly (1) according to any of claims 1 to 7.