TW201432080A - Negative pressure dust-free alignment mechanism - Google Patents

Abstract

Provided is a negative pressure dust-free alignment mechanism including: a fixed platform, four XYθ devices, a movable platform, a leak stopper, a pressure detector and a controller. By this way, when a vacuum pump carries out air extraction of a containing space, the powder dust or oil gas produced from the XYθ devices can be extracted thereby at the same time, so as to keep the containing space clean. Furthermore, an enclosure body and the leak stopper are used to seal the containing space between the fixed platform and the movable platform for further definitely preventing the leakage of powder dust and oil gas. Moreover, the pressure detector is used to detect the pressure value in the containing space at any time to determine whether or not it has reached the standard value. If the pressure value does not reach the standard value, the vacuum pump can be automatically turned on to carry out air extraction.

Description

Negative pressure dust-free alignment mechanism

The invention relates to a negative pressure dust-free alignment mechanism, in particular to a positioning mechanism ring with a surrounding body and a leak-proof body, and pumping the vacuum through a vacuum pump to reach a vacuum state, whereby the pair When the position mechanism moves, there is no dust to pollute the clean room, and the vacuum platform is kept under vacuum to maintain the tightness of the mobile platform and the XY θ device.

According to the clean room, it is widely used in industries that are particularly sensitive to environmental pollution, such as semiconductor production, biochemical technology, biotechnology, precision machinery, pharmaceuticals, hospitals, etc., among which the semiconductor industry has its indoor temperature and humidity and cleanliness. The degree of requirements is particularly strict, so it must be controlled within a certain range of requirements, so as not to affect the process.

However, in various liquid crystal panel manufacturing, inspection equipment, semiconductor manufacturing, inspection setup, screen printing equipment, or printed circuit board manufacturing and inspection equipment, it is necessary to use the alignment platform to perform the program such as the alignment movement; In the middle, since the periphery of the alignment mechanism is an open design, dust or oil is generated when the driving device moves, which is quite disadvantageous to the clean room. Although it has been proposed to use the alignment mechanism to solve the above problems by using the maglev system. The problem, however, is that the control program is cumbersome and the cost is too high.

In other words, how to make the dust and oil stains when the positioning mechanism moves does not leak the environment, so that it can be used in the clean room, which is an important discussion topic in the industry.

The inventor of the present invention succeeded in researching and developing the negative-pressure dust-free alignment mechanism after considering the shortcomings of the above-mentioned conventional counter-institutions that could not be applied to the clean room, and after many years of painstaking research.

An object of the present invention is to provide a negative pressure dust-free alignment mechanism, wherein a peripheral ring of the alignment mechanism is provided with a surrounding body and a leakage stop body, thereby closing the accommodation space formed by the fixed platform and the mobile platform, and The vacuum pump draws a vacuum into the accommodating space to prevent the dust or oil from contaminating the clean room.

The negative pressure dust-free alignment mechanism capable of achieving the above object includes: a fixed platform for providing a measuring device to be set or fixed, and a peripheral body of the fixed platform is provided with a surrounding body at a periphery of the fixed platform The four XY θ devices are disposed on the four quadrant corners of the fixed platform, and each of the XY θ devices is driven by the driving device; and a moving platform is commonly disposed at each of the quadrant angles of the XY The θ device can be moved in the X direction, the Y direction, and the θ direction through the XY θ device; a stop leak body is disposed between the surrounding body and the moving platform, thereby closing the accommodating space formed by the fixed platform and the moving platform. And the leakage stop body is composed of an elastic recovery material, and will return to the original shape when the force is released; a vacuum pump is disposed outside the enclosure, and the suction end is engaged with the accommodation space and accommodates The space is evacuated to make the accommodating space a negative vacuum state, and the vacuum pump is controlled by a controller; a pressure detector is disposed outside the enclosure, and has a sensing end connected to the accommodating space The method is configured to sense a pressure upper value and a lower value in the accommodating space, and convert the pressure value into an electrical signal to be transmitted to the controller; a controller for controlling the XY θ device to drive the mobile platform toward the X direction, the Y direction, and The θ direction moves, and the set pressure value is provided to enable the vacuum pump to pump the accommodating space and determine whether the pressure value measured by the pressure detector reaches the standard. When the pressure reaches the set upper value, the vacuum pump is stopped, if the setting is not reached. Lower value Move to open the vacuum pump was evacuated.

1‧‧‧Fixed platform

11‧‧‧ enclosure

2‧‧‧First XY θ device

21‧‧‧First mobile unit

22‧‧‧First rotating unit

23‧‧‧First drive

3‧‧‧Second XY θ device

31‧‧‧Second mobile unit

32‧‧‧Second rotating unit

33‧‧‧Second drive

4‧‧‧ Third XY θ device

41‧‧‧ Third mobile unit

42‧‧‧ Third rotating unit

43‧‧‧ Third drive

5‧‧‧Fourth XY θ device

51‧‧‧4th mobile unit

52‧‧‧fourth rotation unit

6‧‧‧Mobile platform

61‧‧‧ leaking body

7‧‧‧vacuum pump

71‧‧‧Exhaust end

8‧‧‧ Pressure detector

81‧‧‧Sense end

9‧‧‧ Controller

1 is a perspective view of a negative pressure dust-free alignment mechanism of the present invention; FIG. 2 is a side view of the negative pressure dust-free alignment mechanism; FIG. 3 is a perspective internal view of the negative pressure dust-free alignment mechanism; 4 is a top view of the negative pressure dust-free alignment mechanism; FIG. 5 is a schematic diagram showing clockwise rotation of the mobile platform of the negative pressure dust-free alignment mechanism; FIG. 6 is a movement of the negative pressure dust-free alignment mechanism FIG. 7 is a schematic diagram of X-axis movement of the mobile platform of the negative pressure dust-free alignment mechanism; FIG. 8 is a schematic diagram of Y-axis movement of the mobile platform of the negative pressure dust-free alignment mechanism; A block diagram of the negative pressure dust-free alignment mechanism.

Referring to FIG. 1 to FIG. 4, the negative pressure dust-free alignment mechanism provided by the present invention mainly includes: a fixed platform 1, a four-XY θ device, a mobile platform 6, a leak-stop body 61, and a vacuum gang. The pump 7, a pressure detector 8 and a controller 9 are formed.

The fixed platform 1 is configured to provide an XY θ device for setting or fixing, and a peripheral body 11 is disposed on the periphery of the fixed platform 1 by a top edge plane of the fixed platform 1; wherein the gap between the surrounding body 11 and the fixed platform 1 is Silicone or a filler can be used to increase the gas density.

The four XY θ device is disposed on four quadrant corners of the fixed platform 1, and each of the XY θ devices is driven by a driving device; further illustrating the characteristics of the XY θ device; the first XY θ device 2 and the third XY θ Device 4 has The first and third moving units 21 and 41 and the first and third rotating units 22 and 42 are disposed on the fixed platform 1 to provide the first and third driving units 23 and 43. After driving, there is a device that moves in the Y direction and moves along a X that is perpendicular to Y; the first and third rotating units 22, 42 are disposed on the first and third moving units 21, 41 to provide driving The second XY θ device 3 has a second moving unit 31 and a second rotating unit 32. The second moving unit 31 is disposed on the fixed platform 1 and provides the first The second driving device 33 is driven to have a device that moves in the X direction and moves along a Y that is perpendicular to X; the second rotating unit 32 is disposed on the second moving unit 31 to provide a driven θ The arc of the direction is relatively slid; the fourth XY θ device 5 is located at a non-adjacent opposite corner of the second XY θ device 3, and has a fourth moving unit 51 and a fourth rotating unit 52, the fourth moving unit 51, The system is disposed on the fixed platform 1 and is provided to be driven to move in the X direction. And it means a direction perpendicular to the X and Y of movement; the fourth rotary unit 52, are disposed on a fourth mobile unit 51, is provided in an arc relative to the slide direction θ once driven by rear. The measuring platform is moved to the designated position by the first, second and third driving devices 23, 33, 43.

A moving platform 6 is disposed on each of the XY θ devices of each quadrant angle, and is movable in the X direction, the Y direction, and the θ direction by the XY θ device.

a leak stop body 61 is disposed on the enclosure 11 and the mobile platform 6 And further, the accommodating space formed by the fixed platform 1 and the mobile platform 6 is closed, and the leakage preventing body 61 is composed of an elastic recovery material, and the original shape is restored when the force is released; the leakage body 61 Materials can be selected from natural rubber (NR), styrene butyl rubber (SBR), chlorosulfonated rubber (CSM), chlorobutyl rubber (CR), butyl rubber (IIR) or oil resistant rubber (NBR), etc. As shown in FIG. 2, the cross-section of the leakage preventing body 61 is in a "sub" shape. When the accommodating space is evacuated, the leakage preventing body 61 is biased toward the accommodating space, and the suction is released by the aforementioned material characteristics. After the force is released, the original shape will be restored by itself; in addition, when the leak-stop body 61 is used for a long time, it is inevitable that there will be wear and tear, and the "Asian"-shaped cross-section design is adopted, so that the main wear is on the side of the accommodation space. The opposite side continues to provide a leak-stopping effect.

A vacuum pump 7 is disposed on the outer side of the enclosure 11, and the pumping end 71 is engaged with the accommodating space, and the accommodating space is evacuated to make the accommodating space in a vacuum state, and the vacuum pump 7 is controlled by a vacuum. Controlled by the device 9; further illustrating the characteristics of the vacuum pump 7, in response to the high-tech industry's urgent need for environmental protection and oil and gas pollution-free processes, the vacuum pump 7 series uses dry vacuum pump 7 to make the vacuum pump 7 The air-filled space does not contain oil or moisture, so as to get a clean process.

A pressure detector 8 is disposed outside the enclosure 11 and has a sensing end 81 connected to the accommodating space for sensing the pressure upper and lower values in the accommodating space, and converting the pressure value into telecommunications The number is transmitted to the controller 9.

a controller 9 for controlling the XY θ device to drive the moving flat The table 6 moves in the X direction, the Y direction, and the θ direction, and provides a set pressure value to cause the vacuum pump 7 to evacuate the accommodating space and determine whether the pressure value measured by the pressure detector 8 reaches the standard, when the pressure reaches the setting. The value stops the vacuum pump 7, and if the set value is not reached, the vacuum pump 7 is automatically turned on for pumping.

Therefore, the above is the main component of the negative pressure dust-free alignment mechanism and the assembly method thereof provided by the present invention, and then the use characteristics thereof are as follows: First, the components to be inspected are placed on the mobile platform. 6, and fixed, and open the controller 9, set the pressure value so that the vacuum pump 7 draws air into the accommodating space.

Then, as shown in FIG. 5, when the moving platform 6 is to be rotated by a predetermined angle in the clockwise direction, the second driving device 33 of the second rotating unit 32 moves toward the positive end of the X-axis to drive the second rotation. The second moving unit 31 of the unit 32 simultaneously generates motion, so that the moving platform 6 is driven to rotate clockwise, and the first XY θ device 2, the third XY θ device 4 and the fourth XY θ The device 5 also slides along the predetermined arc at the same time, so that the second driving device 33 serves as a single driving source for the rotational movement, and can be accurately driven without interference.

Moreover, as shown in FIG. 6, when the moving platform 6 is to be rotated by a predetermined angle in the counterclockwise direction, the second driving device 33 of the second rotating unit 32 moves toward the X-axis negative end to drive The second moving unit 31 of the second rotating unit 32 simultaneously generates motion, so that the mobile platform 6 The first XY θ device 2, the third XY θ device 4, and the fourth XY θ device 5 also slide along a predetermined arc at the same time, so that the second driving device is driven by the second driving device. As a single drive source for rotary motion, 33 can be accurately driven without interference.

Next, as shown in FIG. 7, when the moving platform 6 is to be moved in the X-axis direction, the second driving device 33 of the second XY θ device 3 is moved to the X-axis to drive the second XY θ device. The second mobile unit 31 generates motion, so that the mobile platform 6 is driven to perform X-axis movement, and the first XY θ device 2, the third XY θ device 4, and the fourth XY θ device At the same time, the movement of the X-axis is also performed to make the second driving device 33 a single driving source when the X-axis is moved, and the precise driving can be performed without interference.

Next, as shown in FIG. 8, when the moving platform 6 is to be moved in the Y-axis, the first driving device 33 of the first XY θ device 2 and the third driving device of the third XY θ device 4 are used. 43 simultaneously moves in the Y-axis, so that the moving platform 6 is driven to move the Y-axis, and the second XY θ device 3 and the fourth XY θ device 5 are simultaneously driven to perform the Y-axis. The movement is such that the first and third driving devices are driven as the driving source in the Y-axis direction, and the precise driving can be performed with a minimum driving source.

As shown in FIG. 9 , in the operation process, the vacuum pump 7 evacuates the accommodating space to extract the dust or oil generated by the XY θ device, so that the accommodating space is kept clean, and the fixed platform is cleaned. 1 and mobile platform By enclosing the accommodation space between the enclosure 11 and the leakage stop 61, it is ensured that dust and oil and gas are not leaked, and the pressure detector 8 monitors the pressure value of the accommodation space at any time, whether the standard is reached, when the pressure reaches When the upper value is set, the vacuum pump 7 is stopped. If the set value is not reached, the vacuum pump 7 is automatically turned on for pumping.

The detailed description of the preferred embodiments of the present invention is intended to be limited to the scope of the invention, and is not intended to limit the scope of the invention. The patent scope of this case.

In summary, this case is not only innovative in terms of space type, but also can enhance the above-mentioned multiple functions compared with the customary items. It should fully meet the statutory invention patent requirements of novelty and progressiveness, and apply for it according to law. This invention patent application, in order to invent invention, to the sense of virtue.

1‧‧‧Fixed platform

11‧‧‧ enclosure

6‧‧‧Mobile platform

7‧‧‧vacuum pump

71‧‧‧Exhaust end

8‧‧‧ Pressure detector

81‧‧‧Sense end

9‧‧‧ Controller

Claims (3)

The utility model relates to a negative pressure dust-free alignment mechanism, which comprises: a fixed platform for providing a measuring device to be set or fixed, and a surrounding body is arranged on the top edge of the fixed platform to surround the periphery of the fixed platform; the four XY θ device Provided on the four quadrant corners of the fixed platform, each of the XY θ devices is driven by the driving device; a moving platform is disposed on each of the XY θ devices of each quadrant angle, and can be in the X direction through the XY θ device Moving in the Y direction and the θ direction; a leak stop body is disposed between the surrounding body and the moving platform, thereby closing the accommodating space formed by the fixed platform and the moving platform, and the leakage preventing body is an elastic recovery material The composition will return to the original shape when the force is released; a vacuum pump is placed on the outside of the enclosure, and the pumping end is engaged with the accommodating space and the air is ventilated to make the accommodating space a vacuum. a state, and the vacuum pump is controlled by a controller; a pressure detector is disposed on the outer side of the enclosure, and has a sensing end connected to the accommodating space for sensing the pressure upper value in the accommodating space And the next value, and will be pressed The value is converted into a signal signal and transmitted to the controller; a controller for controlling the XY θ device to drive the mobile platform to move in the X direction, the Y direction and the θ direction, and provide a set pressure value for the vacuum pump to pump the accommodating space And determining whether the pressure value measured by the pressure detector reaches the standard, and stopping the vacuum pump when the pressure reaches the set upper value, if If the set value is not reached, the vacuum pump is automatically turned on for pumping. The negative pressure dust-free alignment mechanism according to claim 1, wherein a gap between the enclosure and the fixed platform may be a silicone or a filler to increase the gas density. The negative pressure dust-free alignment mechanism according to the first aspect of the patent application, wherein the vacuum pumping system uses a dry vacuum pump, so that the accommodating space subjected to vacuum pumping does not contain oil or moisture.