TW201422507A - Substrate transport facility - Google Patents

Abstract

The substrate transport facility has: a top transport cart moving along a moving track to transport a container toward a container transport part; a substrate transport device that takes out a substrate from the container located in a substrate take-out part and transports the substrate toward the substrate processing device; and an intermediate transport device that transports the container between the container transport part and the substrate take-out part by moving a carrying part which carries the container in the horizontal direction. The substrate transport device is formed such that the substrate, in the state of being carried in the carrying part, is taken out from the container located in the substrate take-out part and is transported freely toward the substrate processing device.

Description

Substrate transfer equipment Field of invention

The present invention relates to a substrate transporting apparatus provided with a top transporting vehicle that travels along the traveling rail in a state of being guided by a traveling rail disposed at a top, and a container in which a plurality of substrates are accommodated We transport to container transfer part.

Background of the invention

In the case of the substrate transporting apparatus, the container is transported to the container transporting portion by the top transporting vehicle (see, for example, Japanese Laid-Open Patent Publication No. 2010-137961 (Patent Document 1)).

In the substrate transfer apparatus described in Patent Document 1, the first transfer device and the second transfer device are provided. The first transfer device moves the container in the container by moving the first mounting portion of the container in the horizontal direction. The second transfer device transports the container between the relay portion and the storage portion of the article storage rack by moving the second placing portion of the mounting container in the horizontal direction and the vertical direction; The containers of the container transfer portion are transported to the storage portion of the article storage rack by the first transfer device and the second transfer device.

Then, there is a configuration in which the substrate is set in the vicinity of the article storage rack. The substrate is provided with a mounting table for mounting the support container, and a substrate transfer device that takes out the substrate from the container placed on the mounting table and transports the substrate to the substrate processing apparatus (for example, refer to Japan) JP-A-2008-068963 (Patent Document 2).). In the substrate transfer apparatus described in Patent Document 2, the container is transported between the storage portion of the article storage rack and the mounting table of the substrate take-out portion by the second transport device, and the substrate transport device picks up the substrate from the container on the mounting table. The substrate is transported to the substrate processing apparatus to transport the substrate to the substrate processing apparatus.

In the substrate transfer apparatus described in the above-mentioned Patent Document 1, and the substrate transfer apparatus described in Patent Document 2, it is conceivable that the substrate transfer apparatus is configured as follows. In other words, the container in which the substrate is stored is transported to the container transporting portion by the top transporting vehicle, and the container located at the container transporting portion is transported to the relay portion by the first transporting device, and the container at the relay portion is transported by the second transporting device. The container is transported toward the storage unit of the article storage rack, and the container stored in the storage portion of the article storage rack is transported to the mounting table of the substrate take-out portion. Then, the substrate is taken out from the container placed at the substrate take-out portion in a state of being placed on the mounting table by the substrate transfer device, and the substrate 4 is transferred to the substrate processing apparatus.

However, in the substrate transfer apparatus configured as described above, the first transfer device that moves the first mount portion in the horizontal direction and the second mount portion are horizontally provided in order to transfer the container between the container transfer portion and the substrate take-out portion. The second conveyance device that moves in the direction and the vertical direction is provided with an article storage rack that temporarily stores the container, and a mounting table is provided at the substrate take-out portion, and the configuration of the substrate transfer device becomes complicated. In addition, the container is transported from the first Since the apparatus is transferred to the second conveying apparatus and the container is transferred from the second conveying apparatus to the mounting table, it is difficult to efficiently convey the substrate to the substrate processing apparatus.

Summary of invention

In view of the above circumstances, it is desired to realize a substrate transfer apparatus that can simplify the configuration and efficiently transport the substrate to the substrate processing apparatus.

In the substrate transporting apparatus according to the present invention, the top transporting vehicle moves along the traveling rail while being guided by the traveling rail disposed at the top, and transports the container in which the plurality of substrates are accommodated toward the container. a transfer unit that transports the container between the container transfer portion and the substrate take-out portion, and the substrate transfer device takes out the substrate from the container located at the substrate take-out portion, and the taken-out substrate faces the front side The substrate processing apparatus for processing the substrate is transported; the relay transport apparatus is configured to have a single mounting portion on which the container is placed, and move the loading portion in a horizontal direction to place the container in the container The substrate transport apparatus is configured to take out the substrate from the container placed in the substrate take-out portion in a state of being placed on the mounting portion, and to bring the substrate toward the substrate. The processing device is transported freely.

In other words, the relay transfer device moves the single mounting portion for placing the container in the horizontal direction, whereby the container on the mounting portion can be transferred to another mounting portion. Next, the container placed on the placing portion is transported between the container transporting portion and the substrate taking-out portion. The substrate transfer device can take out the substrate from the container placed at the substrate take-out portion in a state of being placed on the mounting portion, and transport the substrate toward the substrate processing device.

Therefore, the transfer device that transports the container between the container transfer portion and the substrate take-out portion may be provided with a relay transfer device that moves the mount portion in the horizontal direction, and does not require storage of articles temporarily stored in the container. Further, it is not necessary to provide a mounting table for mounting the support container in the substrate take-out portion. Therefore, the structure of the substrate transfer apparatus can be simplified. In addition, since the substrate transfer device directly takes out the substrate from the container placed on the mounting portion of the relay transfer device at the substrate take-out portion, and transports the substrate to the substrate processing device, it is not necessary to transport the container from the relay. The placement portion of the device is transferred to another portion, and the substrate can be easily transported to the substrate processing apparatus efficiently.

Hereinafter, an example suitable for the embodiment of the present invention will be described.

In an embodiment of the substrate transfer apparatus according to the present invention, the substrate is preferably a rectangular plate-like body.

In other words, the substrate is a plate-like body formed into a rectangular shape such as a glass substrate, and the rectangular plate-shaped body can be efficiently taken out from the container and transported to the substrate processing apparatus.

Embodiment of substrate transfer apparatus related to the present invention Preferably, the relay transport device is configured to move the container around the axis of the vertical direction, and transport the container between the container transport portion and the substrate take-out portion.

In other words, the container can be transported between the container transporting portion and the substrate take-out portion by moving the placing portion in a state in which the container is placed on the placing portion.

Then, the surrounding movement of the mounting portion can be realized by, for example, a simple configuration in which the mounting portion is coupled to a connecting portion that is rotatable about a rotation axis in the vertical direction, and the connecting portion is rotated by an electric motor. The configuration of the relay transport device can be simplified.

In the embodiment of the substrate transfer apparatus according to the present invention, it is preferable that a plurality of the substrate take-out portions are provided, and the relay transport device is provided with a plurality of states in which the containers are individually transported to the plurality of substrate take-out portions. The substrate transfer apparatus is configured such that the substrate can be taken out from the container even if the container is in a state of being located at any of the plurality of substrate take-out portions.

In other words, since a plurality of relay transfer devices are provided, the containers can be individually transported to the substrate take-out portions of the plurality of portions. Therefore, even when the containers are present at one of the substrate take-out portions, the containers can be taken out to the other substrates. Transfer. Then, among the plurality of substrate take-out portions, the substrate take-out portion where the container is taken out by the substrate transfer device, and the other substrate take-out portion can be used as a buffer for temporarily storing the container.

Embodiment of substrate transfer apparatus related to the present invention In the above-described top transport vehicle, it is preferable that the top transporting vehicle has a support body that can be suspended and supported by the above-described container, and is configured to be movable in a traveling state in which the support body is moved up to a raised position, and is configured to be The container is transported to the container transporting portion by moving the container downward from the raised position to remove the container onto the mounting portion; the container transporting portion is set to be placed on the container The upper end of the container at the container transporting portion is located below the lower end of the support body of the top transport vehicle in the traveling state, and is transported to the top of the transport state. The lower end of the aforementioned container supported by the vehicle is also located above.

In other words, the container transporting portion is set such that the upper end of the container located at the container transporting portion in the state of being placed on the placing portion is located below the lower end of the support body of the top transporting vehicle in the traveling state, and is more The lower end of the container supported by the top transport vehicle in the traveling state is also located above. Therefore, the position of the mounting portion of the container on which the support is placed at the container transporting portion can be made closer to the top transporting vehicle located slightly above the container transporting portion, and the amount of the support body when the top transporting vehicle is transported toward the container transporting portion can be reduced. The container can be quickly transferred to the container transfer site.

In addition, since the container transporting portion is placed on the mounting portion, the upper end of the container located at the container transporting portion is located below the lower end of the support body of the top transporting vehicle in the traveling state, and therefore the container is transported. There is a container at the site, and the top transport vehicle in the traveling state of the unsupported container can be moved slightly above the container transporting portion.

Embodiment of substrate transfer apparatus related to the present invention In the above, it is preferable to set a low-position container transporting portion and a high-position container transporting portion that is set at a position higher than the low-position container transporting portion as the container transporting portion; a high-position substrate take-out portion at a position higher than the low-level substrate take-out portion is set as the substrate take-out portion, and the container is transported between the low-position container transport portion and the low-position substrate take-out portion. a low-position conveying device and a high-position conveying device that transports the container between the high-position container conveying portion and the high-position substrate taking-out portion as the relay conveying device; and the high-position conveying device has a high height The mounting portion for positioning is disposed at a height higher than a mounting surface on which the container is placed in the mounting portion for a lower position than the low-position conveying device, and is placed at the lower position a lower height of the upper end of the container for the mounting portion; and the lower portion for the lower portion for the lower position The movement trajectory of the mounting portion is provided in a state in which the movement trajectory of the container placed on the mounting portion for the high position is repeated in the vertical direction and the portion that is not overlapped; and the mounting portion for the high position The movement locus of the placement portion for the high position is provided in a state in which the movement locus of the container placed on the placement portion for the low position is repeated in the vertical direction and is not overlapped.

In other words, the placement portion for the low position and the placement portion for the high position are provided in a state in which the movement trajectory of the placement portion for the low position has a container for the placement portion for the placement of the high position. The moving track is repeated in the vertical and horizontal view points, and the moving track of the mounting portion for the high position has a moving track with the container placed in the lower position. The direction view repeats part of it. Therefore, it is possible to reduce the space in the horizontal installation space of the low-position conveying device and the high-position conveying device.

In addition, the mounting portion for the high position is a container that is disposed at a higher position than the mounting surface of the mounting container in the mounting portion for the lower position and that is placed on the mounting portion for the lower position. Since the upper end has a lower height, space saving in the installation space in the vertical direction of the low-position conveying device and the high-position conveying device can be achieved.

Further, the container for the high position and the container for the placement portion for the high position are not overlapped with the movement trajectory of the placement portion for the low position in the vertical direction, and the lower position is used. When the placing portion moves and transports the container, it is not hindered by the placing portion for the high position and the container for placing the placing portion for the high position. Therefore, as described above, the movement trajectory of the mounting portion for placing the high position and the container placed at the high position can be not repeated in the vertical direction. In the state of the portion, the placement portion for the low position is moved to a position corresponding to the low-position container transfer portion and the position corresponding to the low-position substrate extraction portion, and the container is taken out at the low-position container transfer portion and the low-position substrate. Transfer between parts.

Further, in a state in which the container placed on the placing portion for the low position is not overlapped with the movement trajectory of the placing portion for the high position in the vertical direction, the placing portion for the high position can be placed toward the high position container. The position corresponding to the transporting portion and the position corresponding to the high-position substrate transporting portion are moved, and the container is transported between the high-position container transporting portion and the high-position substrate transporting portion.

In this way, a low-position conveying device and a high-position conveying device can be obtained. It is space-saving in the installation space in the horizontal direction and the vertical direction, and the container can be transported by the low-position conveying device without interfering with the container of the placing portion placed at the high position in the high-position conveying device. Transfer to the low-position container transfer position or the low-position substrate take-out portion.

1‧‧‧1st transfer part (container transfer part)

1L‧‧‧low position first transfer position (low position container transfer part)

1H‧‧‧High position first transfer part (high position container transfer part)

2‧‧‧Second transport part (substrate removal part)

2L‧‧‧low position second transfer part (low position substrate take-out part)

2H‧‧‧High position second transfer position (high position substrate take-out part)

3‧‧‧ Container

3LT‧‧‧Moving track

3HT‧‧‧Moving track

4‧‧‧Substrate

5‧‧‧Transporting device (relay transport device)

5L‧‧‧Low position conveyor

5H‧‧‧High position conveying device

6‧‧‧Top transporter

7‧‧‧Substrate processing unit

8‧‧‧Substrate transport device

9‧‧‧ next door

11‧‧‧Loading Department

11L‧‧‧Loading part for low position

11H‧‧‧Placement for high position

11LT‧‧‧Moving track

11HT‧‧‧Moving track

12‧‧‧Support frame

13L‧‧‧Low position electric motor

13H‧‧‧High position electric motor

14a‧‧‧Upper link

14b‧‧‧Bottom link

14c‧‧‧Upper part

14d‧‧‧ under the prominent part

14L‧‧‧Low Position Linkage

14H‧‧‧High Position Linkage

15‧‧‧ components

17‧‧‧ Lifting table

18‧‧‧Mobile robot

18a‧‧‧Support

20‧‧‧Travel track

21‧‧‧Support

E1‧‧‧Container transport field

E2‧‧‧Substrate transfer field

H‧‧‧Transportation control device

P‧‧‧ Axis

The direction of the display of X‧‧‧

1 is a perspective view of a substrate transfer apparatus, FIG. 2 is a plan view of the substrate transfer apparatus, FIG. 3 is a side view of the substrate transfer apparatus, and FIGS. 4(a) and 4(b) are perspective views showing the low position conveyance device and the high position conveyance device. 5(a) and 5(b) are plan views showing the low position conveying device and the high position conveying device, and Fig. 6 is a view showing the movement trajectory and the high position of the container placed on the placing portion for the low position. FIG. 7 is a plan view showing a movement trajectory of a container placed on the mounting portion, and FIG. 7 is a loading portion for displaying a movement path of the container placed on the mounting portion for a high position and a low position; FIG. 8 is a plan view showing a support structure of the mounting portion, FIG. 9 is a control block diagram, and FIG. 10 is a flowchart.

Form for implementing the invention

Hereinafter, embodiments of the present invention will be described based on the drawings.

As shown in FIGS. 1 to 3, the substrate transfer apparatus is provided with a transport device 5 between the first transporting portion 1 (see FIGS. 2 and 3) and the second transporting portion 2 (refer to FIGS. 2 and 3). The container 3 in which a plurality of substrates 4 are accommodated is transported; the top transporting vehicle 6 transports the container 3 between the first transporting portion 1 and itself; the substrate processing apparatus 7 processes the substrate 4; and the substrate transporting device 8 is located The substrate 4 is transferred between the container 3 of the second transfer portion 2 and the substrate processing apparatus 7. In the present embodiment, the top transport vehicle 6 has a mechanism for transporting the container 3 between the first transporting portion 1 and itself, and is movable in the horizontal direction.

In the case of the substrate transporting device, the container 3 is transported to the first transporting portion 1 by the top transporting vehicle 6, and the container 3 is transported from the first transporting portion 1 to the second transporting portion 2 by the transporting device 5, and the substrate transporting device 8 is used. The substrate 4 is taken out from the container 3 located in the second transfer site 2, and the substrate 4 is transferred to the substrate processing apparatus 7.

In addition, the substrate transfer apparatus is configured such that the substrate 4 in which the processing of the substrate processing apparatus 7 has been completed is transferred from the substrate processing apparatus 7 to the container 3 located in the second transfer position 2 by the substrate transfer apparatus 8, and the substrate 4 is stored in the container 3. The container 3 is transported from the second transporting portion 2 to the first transporting portion 1 by the transporting device 5, and the container 3 is transported from the first transporting portion 1 by the top transporting vehicle 6.

The substrate transfer apparatus is installed in a clean room, and a rectangular glass substrate for a liquid crystal panel or the like as the substrate 4 is housed in the container 3. The container 3 has an opening for allowing the substrate 4 to enter and exit on the lateral side, and a flange portion supported by the support body 21 of the top conveyance cart 6 is provided on the upper surface. In addition, although the illustration is omitted, the substrate 4 is housed in the container 3 in a state in which a gap is formed between the substrates 4 adjacent to each other in the horizontal direction.

Incidentally, the substrate processing apparatus 7 is a predetermined process of applying, exposing, and developing the substrate 4.

As shown in FIG. 3, the top transport truck 6 is provided, and the container transporting area E1 of the top transporting vehicle transporting container 3, the substrate processing apparatus 7 and the substrate transporting apparatus 8 are provided, and the substrate of the substrate 4 is transported by the substrate transporting apparatus 8. The transport area E2 is separated by a partition 9 . Then, the transport apparatus 5 is disposed in the substrate transport area E2 so as to be protruded toward the container transport area E1, and transports the container 3 between the container transport area E1 and the substrate transport area E2.

Incidentally, the first transporting portion 1 is set in the container transporting area E1, and the second transporting portion 2 is set in the substrate transporting area E2.

As shown in FIG. 4 and FIG. 5, the low-position first transporting portion 1L and the high-position first transporting portion 1H set at a position higher than the low-position first transporting portion are set as the first transporting portion 1, The second transport portion 2L at the lower position and the second transport portion 2H at the higher position than the second transport portion 2L at the lower position are set as the second transport portion 2.

Then, the transport device 5 is configured to move the single loading portion 11 for placing the container 3 in the horizontal direction, thereby transporting the container 3 between the first transporting portion 1 and the second transporting portion 2. The single mounting portion 11 is formed of a plate-like member having a U-shape (angular U-shape) in the vertical direction.

The mounting portion 11L for lowering the position on which the container 3 is placed is moved in the horizontal direction, and the container 3 is transported at a low position between the low position first conveying portion 1L and the low position second conveying portion 2L. Device 5L, And a high-position conveying device that transports the container 3 between the high-position first conveying portion 1H and the high-position second conveying portion 2H in the horizontal direction by the mounting portion 11H for placing the high position of the container 3 5H comes as the transport device 5.

Incidentally, the first transporting portion 1 corresponds to the container transporting portion, and the second transporting portion 2 corresponds to the substrate taking-out portion. The low-position first transporting portion 1L corresponds to the low-position container transporting portion, and the high-position first transporting portion 1H corresponds to the high-position container transporting portion. The low position second transfer portion 2L corresponds to the low position substrate take-out portion, and the high position second transfer portion 2H corresponds to the high position substrate take-out portion. In this way, a plurality of second transporting portions 2 are provided.

In addition, the conveying device 5 is a relay conveying device that transports the container 3 between the container conveying portion and the substrate take-out portion in such a manner that the placing portion 11 for placing the container 3 is moved in the horizontal direction. The transporting device 5 is provided in a plurality of states in which the containers 3 are individually transported to the second plurality of transporting portions 2 .

As shown in FIG. 1 and FIG. 3, the group of the transfer device 5 which is one of the low position conveyance device 5L and the high position conveyance device 5H is provided in two sets in a state of being arranged in the vertical direction. The upper low position conveyance device 5L and the high position conveyance device 5H, the lower low position conveyance device 5L, and the high position conveyance device 5H are configured in the same manner except for the difference in height. Further, the upper lower position conveying device 5L and the high position conveying device 5H, the lower lower position conveying device 5L, and the high position conveying device 5H are supported by the same support frame 12 at different heights in the vertical direction.

The low position conveying device 5L is set to mount the lower position The portion 11L is freely movable around the axis P along the vertical direction.

Further, as shown in FIG. 8, the low-position connecting portion 14L is rotatably coupled to the output shaft of the low-position electric motor 13L about the axis P, and the lower-position mounting portion 11L is unilaterally supported. The low position connecting portion 14L. Then, the low-position electric motor 13L is used to rotationally drive the low-position connecting portion 14L around the axis P, whereby the lower-position mounting portion 11L is moved around the axis P to bring the container 3 to the low position. 1 Transfer between the transfer portion 1L and the low position second transfer portion 2L.

In the same manner, the high-position conveying device 5H is provided so as to be able to move the mounting portion 11H for the high position around the axis P in the vertical direction, and is configured to connect the high-position connecting portion with the high-position electric motor 13H. The 14H is rotationally driven around the axis P, whereby the high-position mounting portion 11H is moved around the axis P to transport the container 3 between the high-position first transfer portion 1H and the high-position second transfer portion 2H.

In this manner, the placement portion 11L for the low position and the placement portion 11H for the high position are provided so as to be rotatable around the same axis.

The low-position electric motor 13L and the high-position electric motor 13H are supported by the support frame 12 in a state where the low-position electric motor 13L is positioned above the high-position electric motor 13H.

The low-position electric motor 13L is provided in a posture in which the output shaft protrudes upward, and the low-position connecting portion 14L projects upward from the upper connecting portion 14a and the upper protruding portion 14c is integrally coupled to the output of the low-position electric motor 13L. axis.

In addition, the high position electric motor 13H protrudes downward from the output shaft. In the posture, the high-position connecting portion 14H is protruded downward from the lower connecting portion 14b, and the protruding portion 14d is coupled to the output shaft of the high-position electric motor 13H in a state of being integrally rotated.

Then, the lower-side connecting portion 14L of the low-position connecting portion 14L is rotatably connected to the lower portion of the high-position connecting portion 14H in a state of being rotatable about the axis P, and the upper connecting portion 14a of the high-position connecting portion 14H is a winding shaft. The state in which the core P is rotatable is coupled to the protruding portion 14c above the low-position connecting portion 14L.

Further, between the lower position connecting portion 14L upper side connecting portion 14a and the high position connecting portion 14H lower side connecting portion 14b, there is a member 15 supported by the support frame 12, and the lower position connecting portion 14L upper side connecting portion 14a is The state around the axis P is rotatably connected to the upper end portion of the member 15, and the lower connecting portion 14b of the high-position connecting portion 14H is coupled to the lower end portion of the member 15 so as to be rotatable about the axis P.

In this way, the low-position connecting portion 14L and the high-position connecting portion 14H are provided in a state of being sandwiched between the low-position electric motor 13L and the high-position electric motor 13H in the vertical direction. The upper side connecting portion 14a, the lower position connecting portion 14L upper side connecting portion 14a, the high position connecting portion 14H lower side connecting portion 14b, and the lower position connecting portion 14L lower side connecting portion 14b from the upper high position connecting portion 14H. In order of the lower position connecting portion 14L, the upper connecting portion 14a is located between the upper connecting portion 14a and the lower connecting portion 14b of the high position connecting portion 14H, and the lower connecting portion 14b of the high position connecting portion 14H is located at the lower position. The connecting portion 14L is between the upper connecting portion 14a and the lower connecting portion 14b. Thereby, the low position connecting portion can be Each of the 14L and the high-position connecting portion 14H is connected to the support frame 12 at a wide interval in the vertical direction, and the space between the low-position connecting portion 14L and the high-position connecting portion 14H in the vertical direction is reduced.

Then, the mounting portion 11L for the low position connected to the low position connecting portion 14L and the placing portion 11H for the high position connected to the high position connecting portion 14H are located at a lower position than the placing portion 11H for the high position. The mounting surface of the mounting container 3 in the mounting portion 11L (the upper surface of the mounting portion 11H) has a higher height and is lower than the upper end of the container 3 placed on the mounting portion 11L for the lower position. The state to set.

Next, the circumferential movement of the placement portion 11L for the low position and the placement portion 11H for the high position and the positional relationship in the vertical direction viewpoint will be described. Incidentally, the direction in which the container transporting area E1 and the substrate transporting area E2 are arranged is referred to as the front-rear direction of the apparatus (in the direction indicated by the arrow X in FIGS. 2 and 5), and the direction orthogonal to the front-rear direction of the apparatus is referred to as a device. The left and right direction (the direction indicated by the arrow Y in FIGS. 2 and 5) will be described. In this example, the front-rear direction of the device and the left-right direction of the device are parallel to the horizontal plane.

As shown in FIG. 5, the support frame 12 is provided in the substrate transfer area E2, and the axis P is located in the substrate transfer area E2.

The mounting portion 11L for the low position is configured to move in the counter-clockwise direction in the vertical direction from the center of the center P, and to move toward the container transporting area E1, thereby being positioned at a position corresponding to the low-position first transporting portion 1L ( It is moved around in the position shown by the solid line in Fig. 5(a). At this time, the placement portion 11L for the low position is located in the container transport area E1 in the front-rear direction of the apparatus with respect to the axis P. Located on the side.

In addition, the mounting portion 11L for the low position is moved clockwise around the axis P in the vertical direction, and is moved back toward the substrate transporting region E2, thereby corresponding to the low-position second transporting portion 2L. The position (in the position shown by the imaginary line in Fig. 5(a)) moves around. At this time, the placement portion 11L for the low position is located on one side in the left-right direction of the apparatus with respect to the axis P (the upstream side in the traveling direction of the top conveyance vehicle 6).

Then, the mounting portion 11H for the high position is moved clockwise around the axis P in the vertical direction, and is moved toward the container transporting area E1, thereby corresponding to the high-position first transporting portion 1H. The position (in the position shown by the solid line in Fig. 5(b)) moves around. At this time, the placement portion 11H for the high position is located on the side of the container conveyance field E1 in the front-rear direction of the apparatus with respect to the axis P.

In addition, the mounting portion 11H for the high position is moved counterclockwise in the vertical direction from the center of the center P, and is moved back toward the substrate transporting area E2, thereby corresponding to the high position second transporting portion 2H. The position (in the position shown by the imaginary line in Fig. 5(b) is moved around. At this time, the placement portion 11H for the high position is located on the other side in the left-right direction of the apparatus with respect to the axis P (the downstream side in the traveling direction of the top conveyance vehicle 6).

Incidentally, the position corresponding to the transporting portion (lower position first transporting portion 1L, etc.) is the position at which the placing portion 11 of the container 3 is placed when the container 3 is positioned at the transporting portion. Further, the swing angles of the placement portion 11L for the low position and the placement portion 11H for the high position are set to 90 degrees, respectively.

In other words, the lower position conveying device 5L and the upper position on the upper side in Fig. 3 The group of the conveying device 5H is in the positional relationship shown in Fig. 5(b), and the group of the lower position conveying device 5L and the high position conveying device 5H located in the lower side in Fig. 3 is in the positional relationship shown in Fig. 5(a).

As shown in Fig. 5, both the low-position first transporting portion 1L and the high-position first transporting portion 1H are set to be positioned on the side of the container transporting area E1 in the front-rear direction of the apparatus with respect to the axial center P, and the low-position first transporting is performed. The portion 1L and the high-position first conveying portion 1H are set to be at the same position in the vertical direction viewpoint. Then, the mounting portion 11L for the low position that moves to the position corresponding to the low position first conveying portion 1L, and the mounting portion 11H for the high position that is moved to the position corresponding to the high position first conveying portion 1H are both It is moved to the side where the container transporting area E1 is located in the front-rear direction of the apparatus with respect to the axis P, and the mounting portion 11L for the low position and the mounting portion 11H for the high position are located at the same position in the vertical direction. .

Further, the low-position second transporting portion 2L is set to be located on one side in the horizontal direction of the device with respect to the axial center P, and the high-position second transporting portion 2H is set to be located on the other side in the left-right direction of the device with respect to the axial center P, and is low. The position second conveyance portion 2L and the high position second conveyance portion 2H are set to be different positions in the vertical direction viewpoint. Then, the placing portion 11L for the low position that is moved to the position corresponding to the low-position first conveying portion 1L is moved toward one side in the left-right direction of the apparatus with respect to the axis P, and is moved to the first position in the high position. The mounting portion 11H for the high position at the position corresponding to the portion 1H is moved to the other side in the left-right direction of the device with respect to the axis P, and the placing portion 11L for the low position and the placing portion 11H for the high position are up and down. The direction view is in a different position.

Then, as shown in FIG. 5 to FIG. 7 , the placement portion 11L for the low position is provided in the vertical position and the high position in the state of moving to the position corresponding to the low position first conveyance portion 1L. The movement trajectory of the mounting portion 11H and the movement trajectory of the container 3 placed on the mounting portion 11H for the high position are repeated, and in the state of moving to the position corresponding to the second position 2L at the low position, in the up and down direction The movement trajectory of the placement portion 11H for the high position and the movement trajectory of the container 3 placed on the placement portion 11H for the high position are not repeated in the viewpoint.

In the state in which the high-position mounting portion 11H is moved to the position corresponding to the high-position first conveying portion 1H, the movement path of the mounting portion 11L for the lower position in the vertical direction and The movement trajectory of the container 3 placed on the placement portion 11L for the low position is repeated; and when it is moved to the position corresponding to the high position second transfer portion 2H, it is not used for the low position in the vertical direction view. The movement locus of the placement portion 11L and the movement locus of the container 3 placed on the placement portion 11L for the low position are repeated.

Incidentally, in FIG. 6, the movement trajectory of the container 3 placed on the placement portion 11L for the low position is indicated by the chain line 3LT, and the movement trajectory of the placement portion 11H for the high position is indicated by the chain line 11HT. And the movement trajectory of the container 3 placed on the mounting portion 11H for the high position. In addition, in FIG. 7, the movement trajectory of the container 3 placed in the mounting part 11H for high position is shown by the chain line 3HT, and the movement trajectory of the mounting part 11L for low position is shown by the chain line 11LT. The movement locus of the container 3 placed in the placement portion 11L for the low position.

Thus, the placement portion 11L for the low position is set as follows The movement locus of the placement portion 11L for the low position and the movement locus of the container 3 placed on the placement portion 11L for the low position have a movement locus and placement of the placement portion 11H for the high position. The moving track of the container 3 for the high-position mounting portion 11H repeats a repeating portion and a non-overlapping non-repeating portion in the vertical direction view, and the repeating portion and the non-overlapping portion are the mounting portions 11L along the lower position. The direction of movement is arranged. Further, the placement portion 11H for the high position is provided in a state in which the movement locus of the placement portion 11H for the high position and the movement locus of the container 3 placed on the placement portion 11H for the high position have and are low. The moving track of the position mounting portion 11L and the moving track of the container 3 placed on the mounting portion 11L for the low position are repeated portions repeated in the vertical direction view, and non-overlapping non-overlapping portions are repeated. This non-repeating portion is arranged along the moving direction of the placing portion 11L for the high position.

Then, the mounting portion 11H for the high position and the mounting portion 11L for the low position are in the state where the other mounting portions 11L and 11H are not overlapped, and the container 3 is in the first conveying portion 1 and the first 2The transfer parts 2 can be transported freely.

In other words, as shown in Fig. 5 (a), in the state in which the placing portion 11H for the high position is located at the position corresponding to the high-position second conveying portion 2H, the placing portion 11L for the lower position can be made lower and lower. When the position corresponding to the first transporting portion 1L or the position corresponding to the low-position second transporting portion 2L is moved, the container 3 is transported to the low-position first transporting portion 1L or the low-position second transporting portion 2L, and the high-position is not touched. The mounting portion 11H and the container 3 placed on the mounting portion 11H for the high position are used.

Further, as shown in FIG. 5(b), in the state where the placement portion 11L for the low position is located at the position corresponding to the second position 2L at the lower position, the placement portion 11H for the high position can be moved to the high position. The position corresponding to the first transporting portion 1H or the position corresponding to the high-position second transporting portion 2H is moved, and the container 3 is transported to the high-position first transporting portion 1H or the high-position second transporting portion 2H, and is not in contact with the low-position. The placing portion 11L and the container 3 placed on the mounting portion 11L for the low position.

The substrate transfer device 8 includes a lift table 17 and a mobile robot 18, and the lift table 17 is provided between the transfer device 5 and the substrate processing device 7 in the front-rear direction of the device, and is movable up and down. The mobile robot 18 is the lift table 17 Move up and down the device in the left and right direction. The mobile robot 18 has a fork-like support portion 18a that is movable up and down, freely rotatable around a vertical axis, and movable in a horizontal direction.

The substrate transfer device 8 is configured to operate by the elevating and lowering movement of the elevating table 17 and the movement of the mobile robot 18 in the left-right direction of the apparatus and the raising and lowering, rotation, and movement of the support portion 18a. In other words, the substrate transfer device 8 is configured to take out the substrate 4 one by one from the container 3 placed at the lower position of the second transfer portion 2L in a state of being placed on the lower position mounting portion 11L, and to turn the substrate 4 toward the substrate 4 The substrate processing apparatus 7 transports the substrate 4 one by one from the container 3 placed at the high position second transfer portion 2H in the state of being placed on the high-position mounting portion 11H, and the substrate 4 is directed to the substrate processing apparatus 7 The substrate 4 that has been processed by the substrate processing apparatus 7 is transported one by one to the container 3 of the second transporting portion 2 in a state of being placed on the mounting portion 11 for the high position or the low position. The substrate 4 is housed in the container 3.

The substrate transfer device 8 is configured to be in any state of the second transfer portion 2 (the second transfer portion 2L at the low position of the two portions and the second transfer portion 2H at the high position of the two portions) of the container 3 The container 3 allows the substrate 4 to be taken in and out. In the second transfer portion 2 of the four portions, the second transfer portion 2 in which the container 3 is placed in and out of the substrate 4 by the substrate transfer device 8 is used, and the other second transfer portion 2 can serve as a buffer for temporarily storing the container 3. District to use.

As shown in FIGS. 1 to 3, the top transporting vehicle 6 is configured to travel along the traveling rail 20 in a state of being guided by the traveling rail 20 disposed at the top. In addition, the top transport vehicle 6 is configured to support the support body 21 for supporting the container 3 so as to be freely movable and rotatable about an axis in the vertical direction. In other words, the top transport vehicle 6 travels in the vicinity of the transport device 5 in one direction (from the upper left to the lower right in FIG. 1) in the left-right direction of the apparatus.

Then, as shown in FIG. 3, the top transport vehicle 6 is configured to be movable in a state where the support body 21 is moved up to the raised position. In addition, the top transport vehicle 6 is configured to transport the container 3 to the first transporting portion 1 by moving the support body 21 downward from the ascending position to remove the container 3 onto the placing portion 11, so that the support body 21 is raised. The container 3 is transported from the first transporting portion 1 in a form in which the container 3 is pulled up from the mounting portion 11 by moving to the raised position. In this way, the top transport vehicle 6 transports the container 3 in which the first transporting portion 1 is the transport target portion, and transfers the container 3 between the first transporting portion 1 and itself.

Further, the configuration of the top transporting vehicle 6 is such that the container 3 is supported while being stopped at the stop position immediately above the first transporting portion 1. The support body 21 is moved downward, the support of the support body 21 to the container 3 is released, and the container 3 is detached to the placing portion 11 to transport the container 3 to the first transfer portion 1.

In addition, the top transporting vehicle 6 is configured such that the support body 21 of the unsupported container 3 is moved downward while the stop position of the first transporting portion 1 is stopped, and the support body 21 supports the first transporting portion. In the container 3 of 1, the support body 21 which supports the container 3 is moved up, and the container 3 is conveyed from the 1st conveyance site 1.

In the state in which the top transporting vehicle 6 is stopped at a stop position that is set in common at the low-position first transporting portion 1L and the high-position first transporting portion 1H, the container 3 is placed at the low-position first transporting portion 1L or high. It is conveyed freely (transfer freely) between the first transfer position 1H and the self.

In the state where the top transporting vehicle 6 is stopped at the stop position, when the lower position mounting portion 11L is located at the position corresponding to the first transporting portion 1, the top transporting vehicle 6 and the low-position first transporting portion are When the container 3 for transporting the high position is located at a position corresponding to the first transporting portion 1, the container 3 is transported between the top transporting vehicle 6 and the high-position first transporting portion 1H.

The first transporting portion 1 (the low-position first transporting portion 1L and the high-position first transporting portion 1H) is set at a position that is placed on the upper end of the container 3 of the first transporting portion 1 in a state of being placed on the placing portion 11 It is located below the lower end of the support body 21 of the top transport vehicle 6 in the traveling state, and is located above the lower end of the container 3 supported by the top transport vehicle 6 in the traveling state.

Because the first transporting portion 1 can be set close to the top of the top transporting vehicle 6 Therefore, the amount of drop of the support body 21 when the top transport vehicle 6 transports the container 3 to the first transporting portion 1 is small, and the container 3 can be quickly transported to the first transporting portion 1. In addition, even if the container 3 is provided in the first transporting portion 1, the top transporting vehicle 6 in the traveling state of the unsupported container 3 can be freely moved.

As shown in FIG. 9, the substrate conveyance device is provided with a conveyance control device H that controls the operation of the conveyance device 5, the top conveyance carriage 6, and the substrate conveyance device 8.

The transport control device H is configured to control the operation of the top transport vehicle 6 to perform the pre-transfer travel processing for moving the top transport vehicle 6 to the stop position immediately above the first transport portion 1, and to make the top transport vehicle 6 from the first The post-acceptance travel processing of the transport position of the transport position 1 in the immediately preceding position, the unloading process of transporting the container 3 to the first transport position 1 by the top transport vehicle 6, and the transport of the container 3 from the first transport unit by the top transport vehicle 6 1 Pick up handling.

In addition, the conveyance control device H is configured to control the operation of the conveyance device 5 to perform the retracting process of moving the placement portion 11 from the position corresponding to the first conveyance portion 1 to the position corresponding to the second conveyance portion 2, and placing the conveyance device The portion 11 is moved from a position corresponding to the second conveyance portion 2 to a projection process at a position corresponding to the first conveyance portion 1.

Then, based on the flowchart shown in FIG. 10, the transport control device H performs the unloading process, and the container 3 is transported to the lower position first transport portion 1L by the top transport vehicle 6, and the transport control device H performs the pick-up processing. In the case where the transport vehicle 6 transports the container 3 from the high-position first transporting portion 1H as an example, the transport control in which the container 3 is transported between the top transport vehicle 6 and the transport device 5 will be described. Incidentally, the placing portion 11 is normally moved to the second conveying portion 2 Corresponding location.

The conveyance control device H is configured to perform the pre-transfer travel process and the protrusion process after the transfer command for transporting the container 3 to the low-position second transfer portion 2L is performed. The pre-transfer process and the protrusion process are performed to control the movement of the top transport vehicle 6 and the transport device 5 so that the top transport vehicle 6 that supports the container 3 to be transported travels to the immediately preceding stop position of the first transport site 1 and The placement portion 11L for the low position is projected to move to a position corresponding to the low position first conveyance portion 1L. Thereafter, the conveyance control device H executes the retracting process after executing the unloading process. In the unloading process, the top transporting vehicle 6 is controlled to remove the container 3 toward the lower position mounting portion 11L, and the container 3 is transported to the lower position first transporting portion 1L. In addition, the retracting process is to control the operation of the conveying device 5, and the lower position holding portion 11L is moved to a position corresponding to the low position second conveying portion 2L, and the container 3 is conveyed to the lower position second conveying portion 2L.

In other words, the pre-transfer travel processing and the highlight processing usually require a long period of time before the transfer processing, and the placement unit 11 is completed before the top transport vehicle 6 moves to the stop position immediately above the first transport portion 1. The movement of the position corresponding to the first transporting portion 1. Therefore, after the top transport vehicle 6 is advanced to the first transporting position 1, it is not necessary to wait for the start of the unloading process to wait for the mounting portion 11 to protrude to the first transporting portion 1, and the container 3 can be quickly moved. It is conveyed to the 1st conveyance site 1.

As described above, when the container 3 is transported to the low-position second transporting portion 2L by the retracting process, if the transport-out command is not issued, the transport control device H performs the post-transfer travel processing to control the operation of the top transport vehicle 6 so that the operation is performed. The top transport vehicle 6 of the unsupported container 3 travels from the immediately stopped position of the first transporting portion 1.

Further, if there is a carry-out command, the transport control device H performs the highlighting process. In the protrusion processing, the operation of the conveyance device 5 is controlled so that the placement portion 11H for high position is projected to move to a position corresponding to the high position first conveyance portion 1H. Thereafter, the conveyance control device H executes the post-transfer travel processing and the retreat processing after the execution of the pick-up processing. In the pick-up process, the top transport vehicle 6 is controlled to support the container 3 to be carried out by the top transport vehicle 6. In addition, the post-transfer travel processing and the retreat processing are performed to control the movement of the top transport vehicle 6 and the transport device 5 so that the top transport vehicle 6 supporting the container 3 to be carried out advances from the stop position of the first transporting portion 1 Further, the placement portion 11H for the high position is retracted and moved to a position corresponding to the high position second conveyance portion 2H.

Then, when the carry-in command is not issued and only the carry-out command is issued, the transport control device H first performs the pre-transfer travel processing and the highlight processing. The pre-transfer travel processing and the protrusion processing are operations for controlling the top transport vehicle 6 and the transport device 5 so that the top transport vehicle 6 of the unsupported container 3 travels to the stop position immediately above the first transport portion 1 and is used for the high position. The placing portion 11 is projected to move toward a position corresponding to the high position first conveying portion 1H. Thereafter, the conveyance control device H executes the post-transfer travel processing and the retreat processing after the execution of the pick-up processing. In the pick-up process, the top transport vehicle 6 is controlled to support the container 3 to be carried out by the top transport vehicle 6. Further, the post-transfer travel processing and the retreat processing are operations for controlling the top transport vehicle 6 and the transport device 5 so as to support the top transport vehicle 6 of the container 3 to be carried out. The vertical position of the first transporting portion 1 is advanced, and the high-position mounting portion 11H is retracted and moved to a position corresponding to the high-position second transporting portion 2H.

In this way, the container 3 placed on the placing unit 11 is transported between the first transporting portion 1 and the second transporting portion 2 by moving the mounting portion 11 for placing the container 3 in the horizontal direction, and The substrate 4 is taken out from the container 3 placed in the second transfer position 2 while being placed on the mounting portion 11 by the substrate transfer device 8 to transport the substrate 4 to the substrate processing apparatus 7. As a result, the structure of the substrate transfer apparatus can be simplified, and the substrate 4 can be easily transported to the substrate processing apparatus 7 efficiently.

[Do not implement form]

(1) In the above embodiment, the low-position conveying device 5L and the high-position conveying device 5H are provided as the relay conveying device. However, only one of the low-position conveying device 5L and the high-position conveying device 5H may be provided as the middle device. Following the transport device.

(2) The configuration of the above-described embodiment is such that the mounting portion 11 is moved around the axis along the vertical direction to move to a position corresponding to the container transporting portion and a position corresponding to the substrate take-out portion. However, the mounting portion 11 is linearly moved in the horizontal direction to move to a position corresponding to the container transporting portion and a position corresponding to the substrate take-out portion.

Further, the relay conveying device may be configured by a conveyor device including a chain or a belt for placing the support container 3. When the relay conveyance device is configured by the conveyor device as described above, the portion of the chain or the belt that supports the container 3 is supported by the placement portion 11 by the chain. Or the belt is rotationally driven to move the portion (the placing portion 11) on which the support is placed in the horizontal direction.

Incidentally, the single mounting portion 11 may be constituted by one member as in the U-shaped (angular U-shaped) plate-like member of the above-described embodiment, or may be respectively supported by the container 3. The two ends of the device in the lateral direction are configured by a pair of members (for example, endless belts).

(3) In the above embodiment, the container transporting portion is set to be lower than the lower end of the top transporting vehicle 6 at the upper end of the container 3 at the container transporting position in the state of being placed on the placing portion 11, and The lower end of the container 3 supported by the top transport vehicle 6 in the traveling state is located above, but the container transporting portion may be set to be placed in the container transporting portion in the state of being placed on the mounting portion 11. The upper end of the container 3 is located below the lower end of the top transport vehicle 6 in the traveling state, and is located below the lower end of the container 3 supported by the top transport vehicle 6 in the traveling state, even in the container transporting portion. The top transport vehicle 6 having the container 3 and supporting the traveling state of the container 3 can also freely travel.

(4) In the above-described embodiment, the trajectory of the placement portion 11L for the low position is overlapped with the movement trajectory of the placement portion 11H for the high position in the vertical direction. The state in which the portion for the high position is placed on the mounting portion 11H for the high position has the movement trajectory of the mounting portion 11H for the high position and the movement trajectory of the mounting portion 11H for the low position in the vertical direction. The repeating portion and the non-repeating portion are provided. However, the low-position mounting portion 11L and the high-position mounting portion 11H may be moved in the vertical direction with their respective movement trajectories. Set without repeating the status.

Specifically, for example, in the above-described embodiment, the mounting portion 11 may be formed into a comb-like shape in a plan view or the like, and may be used at a position lower than the position corresponding to the low-position first conveying portion 1L. The mounting portion 11L and the mounting portion 11H for the high position at the position corresponding to the high-position first conveying portion 1H are configured so as not to overlap each other in the vertical direction, and the mounting portion 11L for the low position and the high position are used. The placing portions 11H are provided in a state in which the respective movement trajectories are not repeated in the vertical direction.

Incidentally, it is also possible to provide a state in which the entire movement locus of the placement portion 11L for the low position and the movement locus of the placement portion 11H for the high position are overlapped in the vertical direction.

(5) In the above embodiment, the rectangular plate-like body is formed as the substrate 4, but the substrate 4 may be a plate-like body formed by a circular or a slightly circular shape such as a wafer. Further, the container 3 may be a FOUP for wafer storage.

1‧‧‧1st transfer part (container transfer part)

1L‧‧‧low position first transfer position (low position container transfer part)

1H‧‧‧High position first transfer part (high position container transfer part)

2‧‧‧Second transport part (substrate removal part)

2L‧‧‧low position second transfer part (low position substrate take-out part)

2H‧‧‧High position second transfer position (high position substrate take-out part)

3‧‧‧ Container

4‧‧‧Substrate

5‧‧‧Transporting device (relay transport device)

5L‧‧‧Low position conveyor

5H‧‧‧High position conveying device

6‧‧‧Top transporter

7‧‧‧Substrate processing unit

8‧‧‧Substrate transport device

9‧‧‧ next door

11‧‧‧Loading Department

11L‧‧‧Loading part for low position

11H‧‧‧Placement for high position

12‧‧‧Support frame

13L‧‧‧Low position electric motor

13H‧‧‧High position electric motor

15‧‧‧ components

17‧‧‧ Lifting table

18‧‧‧Mobile robot

18a‧‧‧Support

20‧‧‧Travel track

21‧‧‧Support

E1‧‧‧Container transport field

E2‧‧‧Substrate transfer field

The direction of the display of X‧‧‧

Claims (6)

A substrate transporting apparatus having a top transporting vehicle that travels along the traveling rail while being guided by a traveling rail disposed at a top, and transports a container in which a plurality of substrates are accommodated to a container transporting portion; The relay conveyance device transports the container between the container transfer portion and the substrate take-out portion, and the substrate transfer device takes out the substrate from the container located at the substrate take-out portion, and the taken-out substrate is facing up The substrate processing apparatus for processing the substrate is transported; the relay transport apparatus is configured to have a single mounting portion on which the container is placed, and move the loading portion in a horizontal direction to place the container in the foregoing The substrate transfer device is configured to take out the substrate from the container positioned at the substrate take-out portion in a state of being placed on the mounting portion, and the substrate is moved toward the substrate. The substrate processing apparatus can be transported freely. The substrate transfer apparatus of claim 1, wherein the substrate is a plate-like body formed in a rectangular shape. The substrate transfer apparatus according to claim 1 or 2, wherein the relay transfer device is configured to move the container around the axis of the vertical direction, and to remove the container from the container transfer portion and the substrate Transfer between parts. The substrate transfer apparatus according to claim 1 or 2, wherein a plurality of the substrate take-out portions are provided, and the relay transport device is provided in a plurality of states in which the plurality of the substrate take-out portions are transported to the plurality of substrates; The apparatus is configured such that the substrate can be taken out from the container even if the container is in a state of being located at any of the plurality of substrate take-out portions. The substrate transporting apparatus according to claim 1 or 2, wherein the top transporting vehicle has a support body that hangs and supports the container, and is configured to move in a traveling state in which the support body is moved up to a raised position. In the configuration, the container is transported to the container transporting portion by removing the container from the raised position and the container is removed from the loading portion. The container transporting portion is set as follows. a portion at the upper end of the container located at the container transporting portion in a state of being placed on the placing portion, which is lower than the lower end of the support body of the top transporting vehicle in the traveling state, and is more than The lower end of the container supported by the aforementioned top transport vehicle in the traveling state is also located above. The substrate transporting apparatus according to claim 1 or 2, wherein a low-position container transporting portion and a high-position container transporting portion set at a position higher than the low-position container transporting portion are set as the container transporting portion; a low-position substrate take-out portion and a high-position substrate take-out portion set at a position higher than the low-position substrate take-out portion are set as the substrate take-out portion; and the container is provided at the low-position container transport portion and a low-position conveyance device that transports between the low-position substrate take-out portions and a high-position conveyance device that transports the container between the high-position container transfer portion and the high-position substrate take-out portion as the relay transfer device; The mounting portion for the high position of the high-position conveying device is provided at a height higher than a mounting surface on which the container is placed in the mounting portion for a lower position than the low-position conveying device. And being lower than a height of the upper end of the container placed on the mounting portion for the low position; the mounting portion for the low position is placed and placed on the moving track of the mounting portion for the low position The movement trajectory of the container of the placement portion for the high position is set in a state in which a portion of the container in the vertical direction is repeated and a portion that is not overlapped; The mounting portion for the high position has a portion in which the movement trajectory of the mounting portion for the high position overlaps with the movement trajectory of the container placed on the lower portion for mounting the position in the vertical direction, and does not The status setting of the repeated part.