TW201419426A - Fabricating method for package cover - Google Patents

Fabricating method for package cover Download PDF

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Publication number
TW201419426A
TW201419426A TW101140588A TW101140588A TW201419426A TW 201419426 A TW201419426 A TW 201419426A TW 101140588 A TW101140588 A TW 101140588A TW 101140588 A TW101140588 A TW 101140588A TW 201419426 A TW201419426 A TW 201419426A
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Taiwan
Prior art keywords
cooling
package cover
insulating particles
microwave heating
mold
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TW101140588A
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Chinese (zh)
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Kuo-Rong Yang
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Powertech Technology Inc
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Priority to TW101140588A priority Critical patent/TW201419426A/en
Publication of TW201419426A publication Critical patent/TW201419426A/en

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Abstract

A fabricating method for a package cover is provided. The fabricating method for package cover includes providing a mold with a receiving tank, a plurality of insulating particles scatteredly disposed in the receiving tank, performing microwave heating process to the insulating particles in the receiving tank for forming a melting colloid layer, and performing a cooling process to the melting colloid layer for solidifying the melting colloid layer.

Description

封裝蓋體的製作方法 Package cover body manufacturing method

本發明是有關於一種蓋體的製作方法,且特別是有關於一種封裝蓋體的製作方法。 The present invention relates to a method of fabricating a cover, and more particularly to a method of making a package cover.

隨著電子裝置的輕薄短小化及多功能化,使用於其中的半導體封裝件亦變得更小、更薄且腳距亦愈窄。在此一情況下,供半導體封裝用的環氧樹脂組成物被強烈地要求需具有較高的抗焊接熱性及較高的防水性,因為抗熱性及防水性會影響以環氧樹脂組成物實施封裝而製得的半導體封裝件之信賴性。因此,環氧樹脂組成物含有的無機填料的量有增加的趨勢,以使得以此製成的半導體封裝件有較低的內應力及較低的吸濕性。但是,當無機填料的量增加時,封裝期間的流動性會降低且模塑時的缺陷(例如,導線架變形、金線變形或表面空洞(surface void)等)會增加。 With the lightness, thinness, and versatility of electronic devices, semiconductor packages used therein have also become smaller, thinner, and narrower in pitch. In this case, the epoxy resin composition for semiconductor encapsulation is strongly required to have high solder heat resistance and high water repellency because heat resistance and water repellency affect the implementation of the epoxy resin composition. The reliability of semiconductor packages produced by packaging. Therefore, the amount of the inorganic filler contained in the epoxy resin composition tends to increase, so that the semiconductor package thus produced has a low internal stress and a low hygroscopicity. However, as the amount of the inorganic filler increases, the fluidity during packaging may decrease and defects during molding (for example, lead frame deformation, gold wire deformation, or surface void, etc.) may increase.

為了解決以上的問題,習知嘗試以無機填料之顆粒形狀及粒徑分佈的最適化或者以環氧樹脂、酚系樹脂等在封裝溫度下之黏度的最小化來保持環氧樹脂組成物的流動性並改善其充填特性。但是,降低表面空洞的目標則難以達成,而易產生接合不良的製程問題。因此,降低環氧樹脂組成物之表面空洞成了封裝技術中的一門課題。 In order to solve the above problems, it has been conventionally attempted to maintain the flow of the epoxy resin composition by optimizing the particle shape and particle size distribution of the inorganic filler or by minimizing the viscosity at the package temperature of the epoxy resin or the phenol resin. Sex and improve its filling characteristics. However, the goal of reducing the surface void is difficult to achieve, and it is easy to cause a problem of poor bonding. Therefore, reducing the surface voids of the epoxy resin composition has become a topic in packaging technology.

本發明提供一種封裝蓋體的製作方法,其可製成表面較平整且空洞較少之封裝蓋體。 The invention provides a method for manufacturing a package cover body, which can be made into a package cover body with a flat surface and a small cavity.

本發明提出一種封裝蓋體的製作方法,其包括提供具有一容置槽的一模具,於容置槽中配置多個絕緣顆粒,且絕緣顆粒分散配置於容置槽內。接著對位於容置槽內的絕緣顆粒進行一微波加熱步驟,以形成一熔融態之膠體層,再對熔融態之膠體層進行一降溫冷卻步驟,以固化熔融態之膠體層。 The present invention provides a method for fabricating a package cover, which comprises providing a mold having a receiving groove, a plurality of insulating particles disposed in the receiving groove, and the insulating particles being dispersedly disposed in the receiving groove. Then, the insulating particles located in the accommodating groove are subjected to a microwave heating step to form a molten colloid layer, and then the molten colloid layer is subjected to a cooling cooling step to solidify the molten colloid layer.

在本發明之一實施例中,上述之微波加熱步驟的溫度介於80℃至120℃之間。 In an embodiment of the invention, the temperature of the microwave heating step is between 80 ° C and 120 ° C.

在本發明之一實施例中,封裝蓋體的製作方法更包括對位於容置槽內的絕緣顆粒進行微波加熱步驟之前,提供一微波加熱治具,置放於模具的上方並承靠於容置槽的一上緣。 In an embodiment of the invention, the method for fabricating the package cover further comprises: providing a microwave heating fixture before the microwave heating step of the insulating particles located in the accommodating groove, placing it on the upper part of the mold and bearing the capacity An upper edge of the groove.

在本發明之一實施例中,上述之降溫冷卻步驟的溫度介於10℃至15℃之間。 In an embodiment of the invention, the temperature of the cooling and cooling step is between 10 ° C and 15 ° C.

在本發明之一實施例中,封裝蓋體的製作方法更包括對熔融態之膠體層進行一降溫冷卻步驟之前,提供一冷卻降溫治具,置放於模具的上方並承靠於容置槽的一上緣。 In an embodiment of the invention, the method for fabricating the package cover further comprises: providing a cooling and cooling fixture before the step of cooling the colloidal layer in the molten state, placing it on the upper part of the mold and bearing the receiving groove; An upper edge.

在本發明之一實施例中,上述之絕緣顆粒的材質包括環氧樹脂或矽膠。 In an embodiment of the invention, the material of the insulating particles comprises an epoxy resin or a silicone rubber.

基於上述,本發明對絕緣顆粒進行一微波加熱步驟,以形成一熔融態膠體層,而後再對其熔融態膠體層進行降 溫冷卻步驟,以固化融熔態膠體層而形成一平整之片狀封裝蓋體。由於透過微波加熱及降溫冷卻的步驟可去除絕緣顆粒間之空隙,以使製成之封裝蓋體中無殘留空氣,因而可避免習知環氧樹脂組成物產生表面空洞的風險。如此一來,經由本發明之製造方法所製成之封裝蓋體可具有較佳的製程良率,且因封裝蓋體內無殘留空氣(意即無表面空洞)因而可具有較佳的表面平整度。 Based on the above, the present invention performs a microwave heating step on the insulating particles to form a molten colloid layer, and then lowers the molten colloid layer. The temperature cooling step is to cure the molten colloid layer to form a flat sheet-like package cover. Since the step of microwave heating and cooling and cooling can remove the gap between the insulating particles, so that there is no residual air in the produced package cover, the risk of surface voiding of the conventional epoxy resin composition can be avoided. In this way, the package cover made by the manufacturing method of the present invention can have better process yield and can have better surface flatness because there is no residual air in the package cover body (ie, no surface void). .

為讓本發明之上述特徵和優點能更明顯易懂,下文特舉實施例,並配合所附圖式作詳細說明如下。 The above described features and advantages of the present invention will be more apparent from the following description.

圖1為本發明之一實施例之一種封裝蓋體的製作方法的流程圖。圖2至圖5為本發明之一實施例之一種封裝蓋體的製作方法的剖面示意圖。請先同時參考圖1以及圖2,在本實施例之封裝蓋體的製作流程中,首先,步驟S110為提供一模具100,且模具100具有一容置槽110,接著實行步驟S120,於容置槽110中配置多個絕緣顆粒120,且絕緣顆粒120分散配置於容置槽110內。其中,絕緣顆粒120的材質為絕緣材,例如:環氧樹脂、矽膠。 1 is a flow chart of a method of fabricating a package cover according to an embodiment of the present invention. 2 to 5 are schematic cross-sectional views showing a method of fabricating a package cover according to an embodiment of the present invention. Referring to FIG. 1 and FIG. 2 simultaneously, in the manufacturing process of the package cover of the embodiment, first, in step S110, a mold 100 is provided, and the mold 100 has a receiving groove 110, and then step S120 is performed. A plurality of insulating particles 120 are disposed in the groove 110, and the insulating particles 120 are dispersedly disposed in the receiving groove 110. The material of the insulating particles 120 is an insulating material, such as epoxy resin or silicone rubber.

接著,實行步驟S130,對位於容置槽110內的絕緣顆粒120進行一微波加熱步驟,以形成一熔融態之膠體層,以將絕緣顆粒120間之空氣趕出。最後,實行步驟S140,對熔融態之膠體層進行一降溫冷卻步驟,以固化熔融態之膠體層,並利用降溫冷卻的步驟消除殘存於熔融態膠體層 間之氣泡。 Next, step S130 is performed to perform a microwave heating step on the insulating particles 120 located in the accommodating groove 110 to form a molten colloid layer to drive out the air between the insulating particles 120. Finally, step S140 is performed to perform a cooling and cooling step on the colloidal layer in the molten state to solidify the colloidal layer in the molten state, and the step of cooling and cooling is used to eliminate the remaining colloidal layer in the molten state. Bubble between the two.

請參考圖3,在本實施例之封裝蓋體的製作方法中,對絕緣顆粒進行微波加熱時,可提供一微波加熱治具200,置放於模具100的上方並承靠於容置槽110的一上緣112,以與容置槽100共同形成一第一密閉空間S1。絕緣顆粒120配置於第一密閉空間S1內,而微波加熱治具200對第一密閉空間S1開始進行微波加熱。絕緣顆粒120受熱後開始融熔,且絕緣顆粒120間之空氣因加熱而散逸,接著,絕緣顆粒120形成一熔融態膠體層130。 Referring to FIG. 3 , in the method for fabricating the package cover of the embodiment, when the insulating particles are subjected to microwave heating, a microwave heating fixture 200 may be disposed, placed above the mold 100 and supported by the receiving groove 110 . An upper edge 112 is formed together with the receiving groove 100 to form a first sealed space S1. The insulating particles 120 are disposed in the first sealed space S1, and the microwave heating jig 200 starts microwave heating of the first sealed space S1. The insulating particles 120 start to melt after being heated, and the air between the insulating particles 120 is dissipated by heating. Then, the insulating particles 120 form a molten colloid layer 130.

具體而言,本實施例之微波加熱的步驟中所使用之微波加熱條件如下述:微波加熱的溫度介於80℃至120℃之間,以確保絕緣顆粒120均勻受熱而熔融。值得注意的是,本發明利用微波加熱以進行絕緣顆粒120的熔融步驟,其具有許多習知的加熱方式難以實現的優點,例如:花費時間較短、效率較高,且由於所需之加熱溫度較低,使材料加熱後的熔融結構質地均勻且穩定。 Specifically, the microwave heating conditions used in the microwave heating step of the present embodiment are as follows: the temperature of the microwave heating is between 80 ° C and 120 ° C to ensure that the insulating particles 120 are uniformly heated and melted. It is noted that the present invention utilizes microwave heating to perform the melting step of the insulating particles 120, which has many advantages that are not easily realized by conventional heating methods, such as: shorter time, higher efficiency, and due to the required heating temperature Lower, the molten structure after heating the material is uniform and stable.

請同時參考圖4以及圖5,在本實施例之封裝蓋體的製作方法中,對熔融態膠體層130進行降溫冷卻步驟時,首先將置放於模具100上之微波加熱治具200移除,再將冷卻降溫治具300置放於模具100的上方並承靠於容置槽110的上緣112,以與容置槽110共同形成一第二密閉空間S2。降溫冷卻治具300對第二密閉空間S2開始利用冷卻管路對容置槽110內之熔融態膠體層130進行降溫冷卻。熔融態膠體層130因溫度降低而開始固化,而殘留於熔融 態膠體層130間之氣泡也於冷卻的過程中逐漸消除。最後,如圖5所示,熔融態膠體層130固化為一片狀的封裝蓋體140。 Referring to FIG. 4 and FIG. 5 simultaneously, in the method for manufacturing the package cover of the embodiment, when the molten colloid layer 130 is subjected to a cooling and cooling step, the microwave heating fixture 200 placed on the mold 100 is first removed. Then, the cooling and cooling fixture 300 is placed above the mold 100 and bears against the upper edge 112 of the accommodating groove 110 to form a second sealed space S2 together with the accommodating groove 110. The cooling and cooling jig 300 starts to cool down the molten colloid layer 130 in the accommodating groove 110 by the cooling pipe in the second sealed space S2. The molten colloid layer 130 begins to solidify due to a decrease in temperature, and remains in the molten state. The bubbles between the colloidal layers 130 are also gradually eliminated during the cooling process. Finally, as shown in FIG. 5, the molten colloid layer 130 is cured into a sheet-like package cover 140.

由本實施例之封裝蓋體的製造方法所製成之封裝蓋體140,因其經過微波加熱以及降溫冷卻的步驟,以去除絕緣顆粒120間之空隙以及熔融態膠體層130內之氣泡,故所形成之封裝蓋體140可具有無表面空洞的平整表面。封裝蓋體140可應用於封裝一半導體結構,以覆蓋及保護晶片、銲線以及接點,並使銲線以及接點與外界隔離,以避免外界之濕氣經由接點進入封裝結構內,而導致基板之內部線路失效。當封裝蓋體140用於封裝半導體結構時,因其表面較為平整,其與半導體結構間之接合強度也因此提高。 The package cover 140 made by the method for manufacturing the package cover of the present embodiment is subjected to microwave heating and cooling and cooling to remove voids between the insulating particles 120 and bubbles in the molten colloid layer 130. The formed package cover 140 may have a flat surface free of surface voids. The package cover 140 can be applied to package a semiconductor structure to cover and protect the wafer, the bonding wires and the contacts, and isolate the bonding wires and contacts from the outside to prevent external moisture from entering the package structure through the contacts. This causes the internal wiring of the substrate to fail. When the package cover 140 is used to package a semiconductor structure, the bonding strength between the package and the semiconductor structure is also improved because the surface thereof is relatively flat.

綜上所述,本發明利用一微波加熱治具對絕緣顆粒進行微波加熱,使絕緣顆粒間之空氣散逸而形成一熔融態膠體層,再利用一降溫冷卻治具對其熔融態膠體層進行冷卻,以去除熔融態膠體層中之氣泡,並將融熔態膠體層固化為一片狀之封裝蓋體。由於微波加熱所需的溫度較低,使材料熔融後的質地均勻且結構穩定,且利用微波加熱以及降溫冷卻的步驟去除氣泡後之封裝蓋體表面較為平整,使本發明之製造方法所製成之封裝蓋體可具有較佳的製程良率。 In summary, the present invention utilizes a microwave heating fixture to microwave the insulating particles to dissipate the air between the insulating particles to form a molten colloid layer, and then cool the molten colloid layer by using a cooling cooling fixture. In order to remove the bubbles in the molten colloid layer and solidify the molten colloid layer into a sheet-like encapsulation cover. Since the temperature required for microwave heating is low, the texture after melting of the material is uniform and structurally stable, and the surface of the encapsulating cover after the bubbles are removed by the steps of microwave heating and cooling and cooling is relatively flat, so that the manufacturing method of the present invention is made. The package cover can have a better process yield.

雖然本發明已以實施例揭露如上,然其並非用以限定本發明,任何所屬技術領域中具有通常知識者,在不脫離 本發明之精神和範圍內,當可作些許之更動與潤飾,故本發明之保護範圍當視後附之申請專利範圍所界定者為準。 Although the present invention has been disclosed in the above embodiments, it is not intended to limit the present invention, and any one of ordinary skill in the art does not deviate. In the spirit and scope of the present invention, the scope of protection of the present invention is defined by the scope of the appended claims.

100‧‧‧模具 100‧‧‧Mold

110‧‧‧容置槽 110‧‧‧ accommodating slots

112‧‧‧上緣 112‧‧‧Upper edge

120‧‧‧絕緣顆粒 120‧‧‧Insulating particles

130‧‧‧熔融態膠體層 130‧‧‧Moltened colloidal layer

140‧‧‧封裝蓋體 140‧‧‧Package cover

200‧‧‧微波加熱治具 200‧‧‧Microwave heating fixture

300‧‧‧降溫冷卻治具 300‧‧‧ Cooling and cooling fixture

S1‧‧‧第一密閉空間 S1‧‧‧ first confined space

S2‧‧‧第二密閉空間 S2‧‧‧Second confined space

S110~S140‧‧‧步驟 S110~S140‧‧‧Steps

圖1為本發明之一實施例之一種封裝蓋體的製作方法的流程圖。 1 is a flow chart of a method of fabricating a package cover according to an embodiment of the present invention.

圖2至圖5為本發明之一實施例之一種封裝蓋體的製作方法的剖面示意圖。 2 to 5 are schematic cross-sectional views showing a method of fabricating a package cover according to an embodiment of the present invention.

S110~S140‧‧‧步驟 S110~S140‧‧‧Steps

Claims (6)

一種封裝蓋體的製作方法,包括:提供一模具,該模具具有一容置槽;於該容置槽中配置多個絕緣顆粒,其中該些絕緣顆粒分散配置於該容置槽內;對位於該容置槽內的該些絕緣顆粒進行一微波加熱步驟,以形成一熔融態之膠體層;以及對該熔融態之膠體層進行一降溫冷卻步驟,以固化該熔融態之膠體層。 A method for manufacturing a package cover, comprising: providing a mold, the mold having a receiving groove; and arranging a plurality of insulating particles in the accommodating groove, wherein the insulating particles are dispersedly disposed in the accommodating groove; The insulating particles in the accommodating groove are subjected to a microwave heating step to form a molten colloid layer; and the molten layer is subjected to a cooling cooling step to cure the molten colloid layer. 如申請專利範圍第1項所述之封裝蓋體的製作方法,其中該微波加熱步驟的溫度介於80℃至120℃之間。 The method for fabricating a package cover according to claim 1, wherein the temperature of the microwave heating step is between 80 ° C and 120 ° C. 如申請專利範圍第1項所述之封裝蓋體的製作方法,更包括:對位於該容置槽內的該些絕緣顆粒進行該微波加熱步驟之前,提供一微波加熱治具,置放於該模具的上方並承靠於該容置槽的一上緣。 The method for manufacturing the package cover according to the first aspect of the invention, further comprising: providing a microwave heating fixture before the microwave heating step of the insulating particles located in the receiving groove, Above the mold and bearing against an upper edge of the receiving groove. 如申請專利範圍第1項所述之封裝蓋體的製作方法,其中該降溫冷卻步驟的溫度介於10℃至15℃之間。 The method for fabricating a package cover according to claim 1, wherein the temperature of the cooling and cooling step is between 10 ° C and 15 ° C. 如申請專利範圍第1項所述之封裝蓋體的製作方法,更包括:對該熔融態之膠體層進行一降溫冷卻步驟之前,提供一冷卻降溫治具,置放於該模具的上方並承靠於該容置槽的一上緣。 The method for manufacturing the package cover according to the first aspect of the invention, further comprising: providing a cooling and cooling fixture before the step of cooling the molten layer of the molten layer, placing the mold on the upper side of the mold Relying on an upper edge of the receiving groove. 如申請專利範圍第1項所述之封裝蓋體的製作方法,其中該些絕緣顆粒的材質包括環氧樹脂或矽膠。 The method for manufacturing a package cover according to claim 1, wherein the materials of the insulating particles comprise epoxy resin or silicone rubber.
TW101140588A 2012-11-01 2012-11-01 Fabricating method for package cover TW201419426A (en)

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