TW201413746A - Insulating resin film, pre-cured product, laminate, and multi-layer substrate - Google Patents

Insulating resin film, pre-cured product, laminate, and multi-layer substrate Download PDF

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TW201413746A
TW201413746A TW102123043A TW102123043A TW201413746A TW 201413746 A TW201413746 A TW 201413746A TW 102123043 A TW102123043 A TW 102123043A TW 102123043 A TW102123043 A TW 102123043A TW 201413746 A TW201413746 A TW 201413746A
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resin film
insulating resin
cerium oxide
epoxy resin
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TW102123043A
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TWI612537B (en
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Hidenobu Deguchi
Takashi Nishimura
Yuuya Hayashi
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Sekisui Chemical Co Ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/04Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B15/08Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • B32B15/092Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin comprising epoxy resins
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/18Layered products comprising a layer of synthetic resin characterised by the use of special additives
    • B32B27/20Layered products comprising a layer of synthetic resin characterised by the use of special additives using fillers, pigments, thixotroping agents
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J7/00Chemical treatment or coating of shaped articles made of macromolecular substances
    • C08J7/04Coating
    • C08J7/042Coating with two or more layers, where at least one layer of a composition contains a polymer binder
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J7/00Chemical treatment or coating of shaped articles made of macromolecular substances
    • C08J7/04Coating
    • C08J7/043Improving the adhesiveness of the coatings per se, e.g. forming primers
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K3/00Use of inorganic substances as compounding ingredients
    • C08K3/34Silicon-containing compounds
    • C08K3/36Silica
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • H05K1/0313Organic insulating material
    • H05K1/0353Organic insulating material consisting of two or more materials, e.g. two or more polymers, polymer + filler, + reinforcement
    • H05K1/0373Organic insulating material consisting of two or more materials, e.g. two or more polymers, polymer + filler, + reinforcement containing additives, e.g. fillers
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/46Manufacturing multilayer circuits
    • H05K3/4644Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
    • H05K3/4673Application methods or materials of intermediate insulating layers not specially adapted to any one of the previous methods of adding a circuit layer
    • H05K3/4676Single layer compositions
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2264/00Composition or properties of particles which form a particulate layer or are present as additives
    • B32B2264/10Inorganic particles
    • B32B2264/102Oxide or hydroxide
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00Properties of the layers or laminate
    • B32B2307/20Properties of the layers or laminate having particular electrical or magnetic properties, e.g. piezoelectric
    • B32B2307/206Insulating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2457/00Electrical equipment
    • B32B2457/08PCBs, i.e. printed circuit boards
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J2363/00Characterised by the use of epoxy resins; Derivatives of epoxy resins
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J2483/00Characterised by the use of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon with or without sulfur, nitrogen, oxygen, or carbon only; Derivatives of such polymers
    • C08J2483/04Polysiloxanes
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/02Fillers; Particles; Fibers; Reinforcement materials
    • H05K2201/0203Fillers and particles
    • H05K2201/0206Materials
    • H05K2201/0209Inorganic, non-metallic particles
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/02Fillers; Particles; Fibers; Reinforcement materials
    • H05K2201/0203Fillers and particles
    • H05K2201/0263Details about a collection of particles
    • H05K2201/0269Non-uniform distribution or concentration of particles
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/0011Working of insulating substrates or insulating layers
    • H05K3/0017Etching of the substrate by chemical or physical means
    • H05K3/002Etching of the substrate by chemical or physical means by liquid chemical etching
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/38Improvement of the adhesion between the insulating substrate and the metal
    • H05K3/381Improvement of the adhesion between the insulating substrate and the metal by special treatment of the substrate

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  • Chemical & Material Sciences (AREA)
  • Medicinal Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Laminated Bodies (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Manufacture Of Macromolecular Shaped Articles (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)

Abstract

Provided is an insulating resin film wherein it is possible to prevent changes in dimension caused by the heat of a cured product and to increase the adhesive strength between the cured product and a metal layer. This insulating resin film (1) is used after undergoing a roughening treatment. This insulating resin film (1) has a first main surface (1a) and a second main surface (1b). The first main surface (1a) undergoes the roughening treatment. This insulating resin film (1) contains an epoxy resin, a curing agent, and silica (2). Silica (2) is unevenly distributed such that the content of silica (2) within 100 weight% of a first region (R1), which contains the surface section on the side of the first main surface (1a) that underwent roughening treatment up to a thickness of 0.3 μm, is less than the content of silica (2) within 100 weight% of a second region (R2) which excludes the first region (R1). The content of silica (2) within 100 weight% of the second region (R2) is greater than 30 weight%.

Description

絕緣樹脂膜、預硬化物、積層體及多層基板 Insulating resin film, pre-cured material, laminated body and multilayer substrate

本發明係關於一種例如可較佳地用於在多層基板上形成絕緣層之絕緣樹脂膜。又,本發明係關於一種使用上述絕緣樹脂膜之預硬化物、積層體及多層基板。 The present invention relates to an insulating resin film which can be preferably used, for example, for forming an insulating layer on a multilayer substrate. Moreover, the present invention relates to a pre-cured material, a laminate, and a multilayer substrate using the above-mentioned insulating resin film.

先前,為了獲得積層板及印刷配線板等電子零件,而使用各種樹脂組合物。例如於多層印刷配線板中,為了形成用以使內部之層間絕緣之絕緣層或形成位於表層部分之絕緣層,而使用樹脂組合物。於上述絕緣層之表面上一般積層有作為金屬層之配線。 Conventionally, various resin compositions have been used in order to obtain electronic components such as laminates and printed wiring boards. For example, in a multilayer printed wiring board, a resin composition is used in order to form an insulating layer for insulating the inner layers or to form an insulating layer located in the surface layer portion. A wiring as a metal layer is generally laminated on the surface of the insulating layer.

又,於上述樹脂組合物中,為了降低線膨脹率等,較多情形下調配無機填充材料。近年來,隨著電子機器之小型化及高性能化,對於上述電子零件亦要求配線之微細化及絕緣層之線膨脹率之進一步降低等。又,對於多層印刷配線板之絕緣層,強烈要求與積層於該絕緣層上之其他絕緣層或電路等難以發生剝離。因此,上述絕緣層較理想為不會因熱而使尺寸發生較大變化。為了應對此種要求,有於用以形成絕緣層之上述樹脂組合物中調配大量無機填充材料之情形。 Further, in the above resin composition, in order to reduce the linear expansion ratio and the like, the inorganic filler is often formulated. In recent years, with the miniaturization and high performance of electronic devices, the electronic components are required to have a finer wiring and a further reduction in the linear expansion ratio of the insulating layer. Further, in the insulating layer of the multilayer printed wiring board, it is strongly required that peeling is less likely to occur with other insulating layers or circuits laminated on the insulating layer. Therefore, it is preferable that the insulating layer does not largely change in size due to heat. In order to cope with such a demand, there is a case where a large amount of inorganic filler is formulated in the above resin composition for forming an insulating layer.

又,作為上述樹脂組合物之一例,於下述專利文獻1中揭示有含有環氧樹脂、硬化劑、苯氧樹脂、及平均粒徑為0.01~2μm之無機填充材料之樹脂組合物。進而,於專利文獻1中,亦揭示有含有環氧樹脂、硬化劑、及平均粒徑為0.1~10μm之無機填充材料之樹脂組合物。 Moreover, as an example of the above-mentioned resin composition, the following Patent Document 1 discloses a resin composition containing an epoxy resin, a curing agent, a phenoxy resin, and an inorganic filler having an average particle diameter of 0.01 to 2 μm. Further, Patent Document 1 discloses a resin composition containing an epoxy resin, a curing agent, and an inorganic filler having an average particle diameter of 0.1 to 10 μm.

於專利文獻1中,具有2層積層結構之多層膜之各層係使用上述不同之2種樹脂組合物而形成。且,記載有將該多層膜良好地嵌入設置於基板上之間隙等中。 In Patent Document 1, each layer of a multilayer film having a two-layered laminated structure is formed using the above two different resin compositions. Further, it is described that the multilayer film is favorably embedded in a gap or the like provided on the substrate.

於下述專利文獻2中,揭示有含有硬化性樹脂、無機填料、及硬化促進劑之絕緣樹脂材料。該無機填料含有至少2種具有不同之體積平均粒徑之填料。粒徑較小之粒子(b1)之粒徑為0.01~1.0μm,其次小之粒子(b2)之粒徑為0.30~10μm。粒子(b1)與粒子(b2)之體積平均粒徑之比為1/2~1/100,且重量含量之比為90/10~10/90。粒子(b1)與粒子(b2)中之至少一者係藉由矽烷偶合劑而進行表面處理。 Patent Document 2 listed below discloses an insulating resin material containing a curable resin, an inorganic filler, and a curing accelerator. The inorganic filler contains at least two fillers having different volume average particle diameters. The particle diameter (b1) having a small particle diameter is 0.01 to 1.0 μm, and the particle diameter of the second small particle (b2) is 0.30 to 10 μm. The ratio of the volume average particle diameter of the particles (b1) to the particles (b2) is 1/2 to 1/100, and the ratio of the weight content is 90/10 to 10/90. At least one of the particles (b1) and the particles (b2) is surface-treated by a decane coupling agent.

先前技術文獻 Prior technical literature 專利文獻 Patent literature

專利文獻1:日本專利特開2008-302677號公報 Patent Document 1: Japanese Patent Laid-Open Publication No. 2008-302677

專利文獻2:日本專利特開2004-277735號公報 Patent Document 2: Japanese Patent Laid-Open Publication No. 2004-277735

於專利文獻1中,由於準備2種樹脂組合物而製作多層膜,故而存在多層膜之製作費事、成本變高之問題。又,亦存在於多層膜之層間容易發生剝離之問題。進而於利用層壓等貼合2種樹脂層之情形時,由於2種樹脂層之物性不同,故而亦存在應力增大、產生翹曲之問題。 In Patent Document 1, since two types of resin compositions are prepared to produce a multilayer film, there is a problem in that the production of the multilayer film is troublesome and the cost is high. Further, there is also a problem that peeling easily occurs between the layers of the multilayer film. Further, when two types of resin layers are bonded by lamination or the like, since the physical properties of the two kinds of resin layers are different, there is a problem that stress is increased and warpage occurs.

又,對於專利文獻1中記載之多層膜及專利文獻2中記載之絕緣樹脂材料,有無法使硬化物之表面之表面粗糙度充分地變小之情形。進而,若藉由鍍敷處理等在上述硬化物之表面形成金屬層,則存在難以充分地提高硬化物與金屬層之接著強度之情形。 In addition, in the multilayer resin film described in Patent Document 1 and the insulating resin material described in Patent Document 2, the surface roughness of the surface of the cured product cannot be sufficiently reduced. Further, when a metal layer is formed on the surface of the cured product by a plating treatment or the like, it is difficult to sufficiently increase the bonding strength between the cured product and the metal layer.

又,於為了降低線膨脹率而於用以形成絕緣層之先前之樹脂組合物中調配大量無機填充劑之情形時,若藉由鍍敷處理等在樹脂組合 物之硬化物之表面形成金屬層,則亦存在硬化物與金屬層之接著強度容易變低之問題。 Further, in the case where a large amount of the inorganic filler is blended in the prior resin composition for forming the insulating layer in order to lower the coefficient of linear expansion, the resin combination is applied by plating treatment or the like. When the metal layer is formed on the surface of the cured product, there is also a problem that the strength of the cured product and the metal layer tends to be low.

進而,對於專利文獻1中記載之多層膜及專利文獻2中記載之絕緣樹脂材料,有無法充分地減小硬化物之由熱所導致之尺寸變化之情形,且有上述絕緣層之線膨脹率相對變高之情形。 Further, in the multilayer film described in Patent Document 1 and the insulating resin material described in Patent Document 2, it is not possible to sufficiently reduce the dimensional change caused by heat of the cured product, and the linear expansion ratio of the above insulating layer Relatively high.

本發明之目的在於提供一種絕緣樹脂膜、以及使用該絕緣樹脂膜之預硬化物、積層體及多層基板,上述絕緣樹脂膜可減小硬化物之由熱所導致之尺寸變化,進而於在硬化物之表面形成金屬層之情形時,可提高硬化物與金屬層之接著強度。 An object of the present invention is to provide an insulating resin film, a pre-cured material, a laminate, and a multilayer substrate using the insulating resin film, wherein the insulating resin film can reduce dimensional change caused by heat of the cured product, and further harden When the surface of the object forms a metal layer, the adhesion strength between the cured product and the metal layer can be improved.

本發明之限定之目的在於提供一種絕緣樹脂膜、以及使用該絕緣樹脂膜之預硬化物、積層體及多層基板,上述絕緣樹脂膜可減小粗化處理後之硬化物之表面之表面粗糙度。 An object of the present invention is to provide an insulating resin film, a pre-cured material, a laminate, and a multilayer substrate using the insulating resin film, which can reduce the surface roughness of the surface of the cured product after the roughening treatment .

根據本發明之廣泛之態樣,可提供一種絕緣樹脂膜,其係進行粗化處理而使用者,且具有第1主面與第2主面,上述第1主面為經粗化處理之面,含有環氧樹脂、硬化劑、及二氧化矽,以經粗化處理之面即上述第1主面側之表面部分之厚度0.3μm之第1區域100重量%中的上述二氧化矽之含量少於除上述第1區域以外之第2區域100重量%中的上述二氧化矽之含量之狀態,使上述二氧化矽偏向分佈,且上述第2區域100重量%中之上述二氧化矽之含量多於30重量%。 According to a broad aspect of the present invention, there is provided an insulating resin film which is subjected to a roughening treatment and which has a first main surface and a second main surface, wherein the first main surface is a roughened surface And containing the epoxy resin, the hardener, and the cerium oxide, the surface of the roughened surface, that is, the content of the above-mentioned cerium oxide in the first region 100% by weight of the surface portion of the first main surface side having a thickness of 0.3 μm a state in which the content of the cerium oxide in the second region other than the first region is less than 100% by weight, and the cerium oxide is distributed in a distributed manner, and the content of the cerium oxide in the second region is 100% by weight. More than 30% by weight.

於本發明之絕緣樹脂膜之某一特定之態樣中,上述第2區域100重量%中之上述二氧化矽之含量多於60重量%。 In a specific aspect of the insulating resin film of the present invention, the content of the above-mentioned ceria in 100% by weight of the second region is more than 60% by weight.

於本發明之絕緣樹脂膜之某一特定之態樣中,上述第1區域100重量%中之上述二氧化矽之含量較上述第2區域100重量%中之上述二氧化矽之含量少10重量%以上。 In a specific aspect of the insulating resin film of the present invention, the content of the cerium oxide in 100% by weight of the first region is less than 10% by weight of the cerium oxide in 100% by weight of the second region. %the above.

於本發明之絕緣樹脂膜之某一特定之態樣中,上述環氧樹脂包 含2種以上之第1環氧樹脂,2種以上之上述第1環氧樹脂具有相同之結構單元,且2種以上之上述第1環氧樹脂之上述結構單元之重複數不同,或者上述環氧樹脂包含具有碳-碳不飽和鍵之第2環氧樹脂、及不具有碳-碳不飽和鍵之第3環氧樹脂。 In a specific aspect of the insulating resin film of the present invention, the above epoxy resin package Two or more kinds of first epoxy resins, and two or more of the first epoxy resins have the same structural unit, and the number of repetitions of the structural units of the two or more kinds of the first epoxy resins is different or the ring The oxyresin includes a second epoxy resin having a carbon-carbon unsaturated bond and a third epoxy resin having no carbon-carbon unsaturated bond.

於本發明之絕緣樹脂膜之某一特定之態樣中,該絕緣樹脂膜之整體100重量%中,上述二氧化矽之含量為30重量%以上且85重量%以下。 In a specific aspect of the insulating resin film of the present invention, the content of the cerium oxide is 30% by weight or more and 85% by weight or less based on 100% by weight of the entire insulating resin film.

於本發明之絕緣樹脂膜之某一特定之態樣中,該絕緣樹脂膜之整體100重量%中,上述二氧化矽之含量為60重量%以上且85重量%以下。 In a specific aspect of the insulating resin film of the present invention, the content of the cerium oxide is 60% by weight or more and 85% by weight or less based on 100% by weight of the entire insulating resin film.

於本發明之絕緣樹脂膜之某一特定之態樣中,上述第1主面係經膨潤處理且於膨潤處理後經粗化處理之表面。 In a specific aspect of the insulating resin film of the present invention, the first main surface is subjected to a swelling treatment and is subjected to a roughening treatment after the swelling treatment.

根據本發明之廣泛之態樣,可提供一種預硬化物,其可藉由對上述絕緣樹脂膜之上述第1主面進行粗化處理而獲得。 According to a broad aspect of the present invention, a pre-cured material which can be obtained by subjecting the first main surface of the insulating resin film to a roughening treatment can be provided.

根據本發明之廣泛之態樣,可提供一種積層體,其包含:硬化物,其可藉由使用藉由對上述絕緣樹脂膜之上述第1主面進行粗化處理而獲得之預硬化物,使上述預硬化物硬化而獲得;及金屬層,其積層於上述硬化物之經粗化處理之表面上。 According to a broad aspect of the present invention, there is provided a laminate comprising: a cured product obtained by using a pre-cured product obtained by roughening the first main surface of the insulating resin film, The pre-cured material is obtained by hardening the pre-cured material; and the metal layer is laminated on the roughened surface of the hardened material.

根據本發明之廣泛之態樣,可提供一種多層基板,其包含電路基板及配置於上述電路基板上之絕緣層,且上述絕緣層係藉由對上述絕緣樹脂膜進行粗化處理且使其硬化而形成。 According to a broad aspect of the present invention, a multilayer substrate including a circuit board and an insulating layer disposed on the circuit board, wherein the insulating layer is roughened and hardened by the insulating resin film And formed.

本發明之絕緣樹脂膜含有環氧樹脂、硬化劑、及二氧化矽,以經粗化處理之面即第1主面側之表面部分之厚度0.3μm之第1區域100重量%中的上述二氧化矽之含量少於除上述第1區域以外之第2區域100重量%中的上述二氧化矽之含量之狀態,使上述二氧化矽偏向分 佈,且上述第2區域100重量%中之上述二氧化矽之含量多於30重量%,因此可減小絕緣樹脂膜之硬化物之由熱所導致之尺寸變化。進而,於在上述第1主面經粗化處理之硬化物之表面上形成金屬層之情形時,可提高硬化物與金屬層之接著強度。 The insulating resin film of the present invention contains the epoxy resin, the curing agent, and the cerium oxide, and the surface of the roughened surface, that is, the surface of the first main surface side has a thickness of 0.3 μm in the first region of 100% by weight. The content of the cerium oxide is less than the content of the cerium oxide in 100% by weight of the second region other than the first region, and the cerium oxide is biased In the cloth, and the content of the above-mentioned ceria in 100% by weight of the second region is more than 30% by weight, the dimensional change due to heat of the cured product of the insulating resin film can be reduced. Further, in the case where a metal layer is formed on the surface of the cured body on which the first main surface is roughened, the adhesion strength between the cured product and the metal layer can be improved.

1‧‧‧絕緣樹脂膜 1‧‧‧Insulating resin film

1a‧‧‧第1主面 1a‧‧‧1st main face

1b‧‧‧第2主面 1b‧‧‧2nd main face

2‧‧‧二氧化矽 2‧‧‧2 cerium oxide

6‧‧‧積層對象構件 6‧‧‧Multilayer object components

6a‧‧‧表面 6a‧‧‧ surface

11‧‧‧多層基板 11‧‧‧Multilayer substrate

12‧‧‧電路基板 12‧‧‧ circuit board

12a‧‧‧上表面 12a‧‧‧Upper surface

13~16‧‧‧絕緣層 13~16‧‧‧Insulation

17‧‧‧金屬層(配線) 17‧‧‧metal layer (wiring)

R1‧‧‧第1區域 R1‧‧‧1st area

R2‧‧‧第2區域 R2‧‧‧2nd area

圖1係示意性地表示本發明之一實施形態之絕緣樹脂膜的剖面圖。 Fig. 1 is a cross-sectional view schematically showing an insulating resin film according to an embodiment of the present invention.

圖2係示意性地表示使用本發明之一實施形態之絕緣樹脂膜的多層基板之剖面圖。 Fig. 2 is a cross-sectional view schematically showing a multilayer substrate using an insulating resin film according to an embodiment of the present invention.

以下,詳細地說明本發明。 Hereinafter, the present invention will be described in detail.

(絕緣樹脂膜) (insulating resin film)

本發明之絕緣樹脂膜係進行粗化處理而使用。本發明之絕緣樹脂膜具有第1主面與第2主面。該第1主面為經粗化處理之面。本發明之絕緣樹脂膜含有環氧樹脂、硬化劑、及二氧化矽。於本發明之絕緣樹脂膜中,以經粗化處理之面即上述第1主面側之表面部分之厚度0.3μm之第1區域100重量%中的上述二氧化矽之含量少於除上述第1區域以外之第2區域100重量%中的上述二氧化矽之含量之狀態,使上述二氧化矽偏向分佈。進而,於本發明之絕緣樹脂膜中,上述第2區域100重量%中之上述二氧化矽之含量多於30重量%。 The insulating resin film of the present invention is used for roughening treatment. The insulating resin film of the present invention has a first main surface and a second main surface. The first main surface is a roughened surface. The insulating resin film of the present invention contains an epoxy resin, a hardener, and cerium oxide. In the insulating resin film of the present invention, the content of the cerium oxide in the first region 100% by weight of the surface portion of the surface of the first main surface side which is the roughened surface is 0.3 μm less than the above-mentioned The state of the content of the above-mentioned cerium oxide in 100% by weight of the second region other than the region 1 causes the cerium oxide to be distributed in a biased manner. Further, in the insulating resin film of the present invention, the content of the cerium oxide in 100% by weight of the second region is more than 30% by weight.

本發明之絕緣樹脂膜為單層膜,並非多層膜。因此,不會產生於使用多層膜之情形時成為問題之層間剝離。 The insulating resin film of the present invention is a single layer film and is not a multilayer film. Therefore, it does not occur in the case of the use of a multilayer film, which is a problem of interlayer peeling.

以下,藉由一面參照圖式一面說明本發明之具體之實施形態及實施例而明確本發明。 Hereinafter, the present invention will be clarified by describing specific embodiments and examples of the invention with reference to the drawings.

圖1所示之絕緣樹脂膜1積層於積層對象構件6之表面6a上。絕緣樹脂膜1具有第1主面1a與第2主面1b。第1主面1a與第2主面1b對向。 第1主面1a為經粗化處理之面。第2主面1b與積層對象構件6之表面6a接觸。絕緣樹脂膜1係自第2主面1b側積層於積層對象構件6之表面6a而使用。 The insulating resin film 1 shown in Fig. 1 is laminated on the surface 6a of the layered object member 6. The insulating resin film 1 has a first main surface 1a and a second main surface 1b. The first main surface 1a is opposed to the second main surface 1b. The first main surface 1a is a roughened surface. The second main surface 1b is in contact with the surface 6a of the layered object member 6. The insulating resin film 1 is used by being laminated on the surface 6a of the layered object member 6 from the second main surface 1b side.

絕緣樹脂膜1含有環氧樹脂、硬化劑、及二氧化矽2。因此,可減小絕緣樹脂膜之硬化物之由熱所導致之尺寸變化。若絕緣樹脂膜之整體100重量%中二氧化矽之含量為30重量%以上,則可相當程度地減小絕緣樹脂膜之硬化物之由熱所導致之尺寸變化。 The insulating resin film 1 contains an epoxy resin, a curing agent, and cerium oxide 2. Therefore, the dimensional change caused by heat of the cured product of the insulating resin film can be reduced. When the content of cerium oxide in 100% by weight of the entire insulating resin film is 30% by weight or more, dimensional change due to heat of the cured product of the insulating resin film can be considerably reduced.

於絕緣樹脂膜1中,於經粗化處理之面即第1主面1a側,二氧化矽2以較第2主面1b側少地存在之狀態偏向分佈。即,於絕緣樹脂膜1中,以經粗化處理之面即第1主面1a側之表面部分之厚度0.3μm之第1區域R1之100重量%中的二氧化矽2之含量少於除第1區域R1以外之第2區域R2之100重量%中的二氧化矽2之含量之狀態,使二氧化矽2偏向分佈。作為其結果,於第1主面1a側,絕緣樹脂膜1中之除二氧化矽2以外之成分以較第2主面1b側多地存在之狀態偏向分佈。即,以第1區域R1之100重量%中的除二氧化矽2以外之成分之含量多於第2區域R2之100重量%中的除二氧化矽2以外之成分之含量之狀態,使除二氧化矽2以外之成分偏向分佈。又,較佳為於第1主面1a側,絕緣樹脂膜1中之環氧樹脂及硬化劑以較第2主面1b側多地存在之狀態偏向分佈。又,於絕緣樹脂膜1中,第2區域R2之100重量%中之二氧化矽2之含量多於30重量%。 In the insulating resin film 1, on the side of the first main surface 1a which is the roughened surface, the cerium oxide 2 is distributed in a state where it is less present than the second main surface 1b side. In the insulating resin film 1, the content of cerium oxide 2 in 100% by weight of the first region R1 having a thickness of 0.3 μm on the surface of the first main surface 1a side which is the roughened surface is less than The state of the content of the cerium oxide 2 in 100% by weight of the second region R2 other than the first region R1 causes the cerium oxide 2 to be distributed. As a result, on the first main surface 1a side, the components other than the ceria 2 in the insulating resin film 1 are distributed in a state in which the components are more present than the second main surface 1b side. In other words, the content of the component other than the cerium oxide 2 in 100% by weight of the first region R1 is more than the content of the component other than the cerium oxide 2 in 100% by weight of the second region R2. The components other than cerium oxide 2 are distributed in a biased manner. Moreover, it is preferable that the epoxy resin and the hardener in the insulating resin film 1 are distributed in a state of being more than the second main surface 1b side on the side of the first main surface 1a. Further, in the insulating resin film 1, the content of the cerium oxide 2 in 100% by weight of the second region R2 is more than 30% by weight.

於絕緣樹脂膜整體中,藉由使二氧化矽以上述之狀態偏向分佈,且藉由使除二氧化矽以外之成分或環氧樹脂及硬化劑以上述之狀態偏向分佈,不僅可減小絕緣樹脂膜之硬化物之由熱所導致之尺寸變化,而且亦可於在硬化物之表面形成金屬層之情形時,提高硬化物與金屬層之接著強度。可認為其理由在於,硬化物之第1主面與金屬層之接觸面積變大等。 In the entire insulating resin film, by dispersing the cerium oxide in the above-described state, and by disposing the components other than cerium oxide or the epoxy resin and the hardener in the above-described state, the insulation can be reduced. The dimensional change of the cured product of the resin film due to heat, and the adhesion strength between the cured product and the metal layer can be improved when a metal layer is formed on the surface of the cured product. The reason for this is considered to be that the contact area between the first main surface of the cured product and the metal layer is increased.

於以較高之密度填充有二氧化矽之情形時,在藉由粗化對樹脂進行蝕刻時亦會產生二氧化矽之脫離。於以較高之密度填充有二氧化矽之情形時,浸漬於粗化液中之時間越長,由於對樹脂進行蝕刻而使二氧化矽露出於表面,結果二氧化矽大量存在於表面之速度越快於二氧化矽之脫離之速度。其結果,於以較高之密度填充有二氧化矽之情形時,於粗化後,由於表面存在大量二氧化矽,故而因二氧化矽之凹凸而使表面之表面粗糙度亦變大,且接著強度亦無法表現。另一方面,即便於整體上以較高之密度填充有二氧化矽之情形時,若存在於第1區域中之二氧化矽較少,則亦不會產生如上所述之情形,藉由利用粗化處理削除樹脂可維持微細之粗面,並可藉由樹脂表面之極性化及微細之錨形狀而賦予較高之接著強度。 In the case where cerium oxide is filled at a relatively high density, cerium dioxide is also detached when the resin is etched by roughening. When the cerium oxide is filled at a relatively high density, the longer the immersion in the roughening liquid, the cerium dioxide is exposed on the surface by etching the resin, and as a result, the cerium oxide is present on the surface at a large rate. The faster the bismuth dioxide is removed. As a result, when cerium oxide is filled at a high density, since a large amount of cerium oxide exists on the surface after roughening, the surface roughness of the surface becomes large due to the unevenness of the cerium oxide, and Then the intensity can't be expressed. On the other hand, even if the cerium oxide is filled with a higher density as a whole, if the cerium oxide existing in the first region is small, the above-described situation does not occur, and the use thereof is utilized. The roughening treatment removes the resin to maintain a fine rough surface, and imparts a high bonding strength by the polarity of the resin surface and the fine anchor shape.

又,關於上述絕緣樹脂膜中所含有之上述環氧樹脂,(1)上述環氧樹脂包含2種以上之第1環氧樹脂,2種以上之上述第1環氧樹脂具有相同之結構單元,且2種以上之上述第1環氧樹脂之上述結構單元之重複數不同(以下,有時將以(1)之環氧樹脂之構成而使用之環氧樹脂整體記為環氧樹脂(1)),或者(2)包含具有碳-碳不飽和鍵之第2環氧樹脂、及不具有碳-碳不飽和鍵之第3環氧樹脂(以下,有時將以(2)之環氧樹脂之構成而使用之環氧樹脂整體記為環氧樹脂(2))。上述第2環氧樹脂較佳為具有5個以上之碳-碳不飽和鍵,且分子量為500以上。 Further, in the epoxy resin contained in the insulating resin film, (1) the epoxy resin includes two or more kinds of first epoxy resins, and two or more of the first epoxy resins have the same structural unit. Further, the number of repetitions of the structural unit of the two or more kinds of the first epoxy resins is different (hereinafter, the entire epoxy resin used in the composition of the epoxy resin of (1) may be referred to as an epoxy resin (1). Or (2) a second epoxy resin having a carbon-carbon unsaturated bond and a third epoxy resin having no carbon-carbon unsaturated bond (hereinafter, the epoxy resin of (2) may be used hereinafter) The epoxy resin used as a whole is referred to as an epoxy resin (2)). The second epoxy resin preferably has five or more carbon-carbon unsaturated bonds and has a molecular weight of 500 or more.

於使用上述環氧樹脂(2)之情形時,容易發生微相分離。其理由在於,由於上述第2環氧樹脂含有環氧基,故而可提高與其他環氧樹脂或硬化劑之相溶性,但另一方面由於具有碳-碳不飽和鍵,故而有上述第2環氧樹脂之SP值(solubility parameter,溶解度參數)變低之傾向,且有與其他環氧樹脂或硬化劑之SP值之差變大之傾向。其結果,於熱硬化過程中多少會發生相分離,而可於樹脂中形成微細之錨形狀。 In the case of using the above epoxy resin (2), microphase separation easily occurs. The reason for this is that since the second epoxy resin contains an epoxy group, compatibility with other epoxy resins or curing agents can be improved, but on the other hand, since the carbon-carbon unsaturated bond is present, the second ring is provided. The SP value (solubility parameter) of the oxygen resin tends to be low, and the difference between the SP values of other epoxy resins and curing agents tends to be large. As a result, phase separation occurs somewhat during the heat hardening process, and a fine anchor shape can be formed in the resin.

於使用2種以上之上述第1環氧樹脂之情形時,藉由上述結構單元之重複數之不同可改變相對於粗化液之蝕刻速度,而於樹脂中形成微細之錨形狀。進而,由於2種以上之上述第1環氧樹脂具有相同之結構單元,且具有不同之上述結構單元之重複數,故而樹脂整體之相溶性亦較佳,且可形成微細之錨形狀。 In the case where two or more kinds of the above first epoxy resins are used, the etching rate with respect to the roughening liquid can be changed by the difference in the number of repetitions of the above structural unit, and a fine anchor shape can be formed in the resin. Further, since the two or more kinds of the first epoxy resins have the same structural unit and have different numbers of repetitions of the above structural units, the compatibility of the entire resin is also good, and a fine anchor shape can be formed.

於上述第1區域中,上述環氧樹脂(1)或上述環氧樹脂(2)容易發生微相分離。又,亦由於第1區域中之二氧化矽之含量相對較少,故於上述第1區域中,上述環氧樹脂(1)或上述環氧樹脂(2)變得容易微相分離。因此,藉由使上述第1區域含有上述環氧樹脂(1)或上述環氧樹脂(2),且使上述第1區域中之二氧化矽之含量少於上述第2區域中之二氧化矽之含量,由於上述第1區域中除二氧化矽以外之成分(有機成分)變多,故而可有效地減小粗化處理後之硬化物之表面之表面粗糙度,且可有效地提高硬化物與金屬層之接著強度。 In the first region, the epoxy resin (1) or the epoxy resin (2) is likely to be microphase-separated. Further, since the content of cerium oxide in the first region is relatively small, the epoxy resin (1) or the epoxy resin (2) is likely to be microphase-separated in the first region. Therefore, the first region contains the epoxy resin (1) or the epoxy resin (2), and the content of cerium oxide in the first region is less than that in the second region. Since the content (organic component) other than cerium oxide in the first region is increased, the surface roughness of the surface of the cured product after the roughening treatment can be effectively reduced, and the cured product can be effectively improved. The strength of the bond with the metal layer.

就源自第2區域,進一步減小第1區域之粗化處理後之表面之表面粗糙度,且進一步提高硬化物與金屬層之接著強度之觀點而言,較佳為上述第2區域含有上述環氧樹脂(1)或上述環氧樹脂(2)。 It is preferable that the second region contains the above-described second region from the viewpoint of further reducing the surface roughness of the surface after the roughening treatment of the first region and further improving the adhesion strength between the cured material and the metal layer. Epoxy resin (1) or the above epoxy resin (2).

就進一步減小粗化處理後之表面之表面粗糙度,且進一步提高硬化物與金屬層之接著強度之觀點而言,較佳為上述第1區域100重量%中之上述二氧化矽之含量較上述第2區域100重量%中之上述二氧化矽之含量少10重量%以上,更佳為少30重量%以上,進而較佳為少40重量%以上。 In order to further reduce the surface roughness of the surface after the roughening treatment and further improve the adhesion strength between the cured product and the metal layer, it is preferred that the content of the above-mentioned ceria in the first region 100% by weight is higher. The content of the above-mentioned ceria in 100% by weight of the second region is 10% by weight or more, more preferably 30% by weight or more, and still more preferably 40% by weight or more.

就進一步減小粗化處理後之表面之表面粗糙度,且進一步提高硬化物與金屬層之接著強度,進一步減小硬化物之由熱所導致之尺寸變化之觀點而言,二氧化矽較少之區域(與第1區域不同)之厚度與絕緣樹脂膜整體之厚度無關,較佳為0.1μm以上,更佳為0.3μm以上。二氧化矽較少之區域(與第1區域不同)之厚度較佳為5μm以下,更佳 為3μm以下。又,絕緣樹脂膜之厚度並無特別限制。鑒於近年來之薄壁化之趨勢,上述絕緣樹脂膜之厚度較佳為500μm以下,更佳為300μm以下。絕緣樹脂膜之厚度可為5μm以上,可為10μm以上,亦可為20μm以上。 In order to further reduce the surface roughness of the surface after the roughening treatment, and further increase the adhesion strength between the cured product and the metal layer, and further reduce the dimensional change caused by heat of the cured product, less cerium oxide The thickness of the region (different from the first region) is preferably 0.1 μm or more, and more preferably 0.3 μm or more, regardless of the thickness of the entire insulating resin film. The thickness of the region where the cerium oxide is less (different from the first region) is preferably 5 μm or less, more preferably It is 3 μm or less. Further, the thickness of the insulating resin film is not particularly limited. In view of the trend of thinning in recent years, the thickness of the above-mentioned insulating resin film is preferably 500 μm or less, more preferably 300 μm or less. The thickness of the insulating resin film may be 5 μm or more, may be 10 μm or more, or may be 20 μm or more.

以下,詳細說明上述絕緣樹脂膜中所含有之各成分。 Hereinafter, each component contained in the above-mentioned insulating resin film will be described in detail.

[環氧樹脂] [Epoxy resin]

於絕緣樹脂膜中若二氧化矽以上述之狀態偏向分佈,則上述絕緣樹脂膜中所含有之上述環氧樹脂並無特別限定。作為該環氧樹脂,可使用先前公知之環氧樹脂。上述環氧樹脂係指具有至少1個環氧基之有機化合物。上述環氧樹脂可僅使用1種,亦可併用2種以上。 In the insulating resin film, the cerium oxide is not particularly limited as long as the cerium oxide is distributed in the above-described state. As the epoxy resin, a previously known epoxy resin can be used. The above epoxy resin means an organic compound having at least one epoxy group. The epoxy resin may be used alone or in combination of two or more.

作為上述環氧樹脂,可列舉:雙酚A型環氧樹脂、雙酚F型環氧樹脂、雙酚S型環氧樹脂、苯酚酚醛清漆型環氧樹脂、聯苯型環氧樹脂、聯苯酚醛清漆型環氧樹脂、聯苯酚型環氧樹脂、萘型環氧樹脂、茀型環氧樹脂、苯酚芳烷基型環氧樹脂、萘酚芳烷基型環氧樹脂、二環戊二烯型環氧樹脂、蒽型環氧樹脂、含有金剛烷骨架之環氧樹脂、含有三環癸烷骨架之環氧樹脂、及含有三核作為骨架之環氧樹脂等。 Examples of the epoxy resin include bisphenol A epoxy resin, bisphenol F epoxy resin, bisphenol S epoxy resin, phenol novolak epoxy resin, biphenyl epoxy resin, and biphenol. Aldehyde type epoxy resin, biphenol type epoxy resin, naphthalene type epoxy resin, fluorene type epoxy resin, phenol aralkyl type epoxy resin, naphthol aralkyl type epoxy resin, dicyclopentadiene Epoxy resin, bismuth epoxy resin, epoxy resin containing adamantane skeleton, epoxy resin containing tricyclodecane skeleton, and containing three The core is used as a skeleton epoxy resin.

於絕緣樹脂膜中,為了使二氧化矽容易地以上述之狀態偏向分佈,較佳為上述環氧樹脂包含具有重複結構單元之環氧樹脂、或藉由使用pH值12以上之粗化液之粗化處理可產生酮或羧酸之環氧樹脂。 In the insulating resin film, in order to easily distribute the cerium oxide in the above state, the epoxy resin preferably contains an epoxy resin having a repeating structural unit or a roughening liquid having a pH of 12 or more. The roughening treatment produces an epoxy resin of a ketone or a carboxylic acid.

作為上述具有重複結構單元之環氧樹脂,可列舉酚醛清漆型環氧樹脂。具體而言,可列舉:萘型酚醛清漆環氧樹脂、苯酚芳烷基型酚醛清漆環氧樹脂、萘酚芳烷基型酚醛清漆環氧樹脂、二環戊二烯型酚醛清漆環氧樹脂、含有三環癸烷骨架之酚醛清漆型環氧樹脂、及含有三骨架之酚醛清漆型環氧樹脂、雙酚A型酚醛清漆環氧樹脂及雙酚F型酚醛清漆環氧樹脂等。 Examples of the epoxy resin having a repeating structural unit include a novolac type epoxy resin. Specific examples thereof include a naphthalene type novolac epoxy resin, a phenol aralkyl type novolac epoxy resin, a naphthol aralkyl type novolac epoxy resin, and a dicyclopentadiene type novolac epoxy resin. a novolak type epoxy resin containing a tricyclodecane skeleton, and containing three Skeleton novolac type epoxy resin, bisphenol A novolac epoxy resin and bisphenol F novolac epoxy resin.

作為上述藉由使用pH值12以上之粗化液之粗化處理可產生酮或羧酸之環氧樹脂,可列舉具有碳-碳不飽和鍵之環氧樹脂。具體而言,作為市售品,可列舉:Epolead PB3600(Daicel Chemical公司製造)、Epolead PB4700(Daicel Chemical公司製造)、AT501(Daicel Chemical公司製造)、及CT310(Daicel Chemical公司製造)等。 An epoxy resin having a ketone or a carboxylic acid can be produced by a roughening treatment using a roughening liquid having a pH of 12 or more, and examples thereof include an epoxy resin having a carbon-carbon unsaturated bond. Specific examples of the commercially available product include Epolead PB3600 (manufactured by Daicel Chemical Co., Ltd.), Epolead PB4700 (manufactured by Daicel Chemical Co., Ltd.), AT501 (manufactured by Daicel Chemical Co., Ltd.), and CT310 (manufactured by Daicel Chemical Co., Ltd.).

於絕緣樹脂膜中,為了使二氧化矽容易地以上述之狀態偏向分佈,較佳為上述環氧樹脂包含2種以上之第1環氧樹脂,2種以上之上述第1環氧樹脂具有相同之結構單元,且2種以上之上述第1環氧樹脂之上述結構單元之重複數不同,更佳為上述環氧樹脂包含3種以上之第1環氧樹脂,3種以上之上述第1環氧樹脂具有相同之結構單元,且3種以上之上述第1環氧樹脂之上述結構單元之重複數不同。較佳為2種以上之上述第1環氧樹脂及3種以上之上述第1環氧樹脂具有不同之環氧基數。進而,亦較佳為上述環氧樹脂包含具有5個以上之碳-碳不飽和鍵,且分子量為500以上之第2環氧樹脂。於上述絕緣樹脂膜含有上述環氧樹脂(1)或上述環氧樹脂(2)之情形時,上述絕緣樹脂膜可進而含有與上述環氧樹脂(1)及上述環氧樹脂(2)不同之環氧樹脂。 In the insulating resin film, in order to easily distribute the cerium oxide in the above state, the epoxy resin preferably contains two or more kinds of first epoxy resins, and two or more of the first epoxy resins have the same In the structural unit, the number of repetitions of the structural unit of the two or more kinds of the first epoxy resins is different, and it is more preferable that the epoxy resin includes three or more kinds of the first epoxy resins, and three or more of the first rings The oxygen resin has the same structural unit, and the number of repetitions of the above structural unit of the three or more kinds of the above first epoxy resins is different. Preferably, the two or more kinds of the first epoxy resins and the three or more first epoxy resins have different epoxy groups. Further, it is also preferred that the epoxy resin comprises a second epoxy resin having five or more carbon-carbon unsaturated bonds and having a molecular weight of 500 or more. In the case where the insulating resin film contains the epoxy resin (1) or the epoxy resin (2), the insulating resin film may further contain a different epoxy resin (1) and the epoxy resin (2). Epoxy resin.

就進一步減小粗化處理後之表面之表面粗糙度,且進一步提高硬化物與金屬層之接著強度之觀點而言,較佳為上述第2環氧樹脂具有丁二烯骨架。 It is preferable that the second epoxy resin has a butadiene skeleton from the viewpoint of further reducing the surface roughness of the surface after the roughening treatment and further improving the adhesion strength between the cured product and the metal layer.

就進一步減小粗化處理後之表面之表面粗糙度,且進一步提高硬化物與金屬層之接著強度之觀點而言,2種以上之上述第1環氧樹脂較佳為酚醛清漆型環氧樹脂、雙酚A型環氧樹脂、聯苯型環氧樹脂、雙酚F型環氧樹脂、二環戊二烯型環氧樹脂、或萘型環氧樹脂,更佳為酚醛清漆型環氧樹脂、雙酚A型環氧樹脂、聯苯型環氧樹脂、雙酚F型環氧樹脂、或二環戊二烯型環氧樹脂,亦更佳為酚醛清漆型環氧樹脂、聯苯型環氧樹脂、二環戊二烯型環氧樹脂、或萘型環氧樹脂。 上述第1環氧樹脂特佳為酚醛清漆型環氧樹脂。 From the viewpoint of further reducing the surface roughness of the surface after the roughening treatment and further improving the adhesion strength between the cured product and the metal layer, the two or more kinds of the first epoxy resins are preferably novolac type epoxy resins. , bisphenol A type epoxy resin, biphenyl type epoxy resin, bisphenol F type epoxy resin, dicyclopentadiene type epoxy resin, or naphthalene type epoxy resin, more preferably novolak type epoxy resin , bisphenol A type epoxy resin, biphenyl type epoxy resin, bisphenol F type epoxy resin, or dicyclopentadiene type epoxy resin, and more preferably novolak type epoxy resin, biphenyl type ring An oxygen resin, a dicyclopentadiene type epoxy resin, or a naphthalene type epoxy resin. The first epoxy resin is particularly preferably a novolac type epoxy resin.

較佳為進一步減小粗化處理後之表面之表面粗糙度,上述環氧樹脂包含3種以上之上述第1環氧樹脂,3種以上之上述第1環氧樹脂具有相同之結構單元,且上述第1環氧樹脂100重量%中,上述結構單元之重複數為1(上述結構單元僅為1個而不重複)之第1環氧樹脂之含量為1重量%以上,上述結構單元之重複數為2(上述結構單元為2個)之第1環氧樹脂之含量為10重量%以上,上述結構單元之重複數為3以上(上述結構單元為3個以上)之第1環氧樹脂之含量為25重量%以上。較佳為上述結構單元之重複數為2(上述結構單元為2個)之第1環氧樹脂之含量為25重量%以上,上述結構單元之重複數為3以上(上述結構單元為3個以上)之第1環氧樹脂之含量為35重量%以上。如此,藉由使第1環氧樹脂中環氧基數較多(結構單元之重複數較多)之成分相對較多,而於藉由粗化液之樹脂之削除方法方面產生差異,可形成微細之錨,且可表現更高之接著強度。 It is preferable to further reduce the surface roughness of the surface after the roughening treatment, wherein the epoxy resin includes three or more kinds of the first epoxy resins, and three or more of the first epoxy resins have the same structural unit, and In 100% by weight of the first epoxy resin, the content of the first epoxy resin in which the number of repetitions of the structural unit is 1 (the structural unit is only one and is not repeated) is 1% by weight or more, and the above structural unit is repeated. The content of the first epoxy resin is 2 or more (the number of the above-mentioned structural units is 2), and the content of the first epoxy resin is 10% by weight or more, and the number of repetitions of the structural unit is 3 or more (the structural unit is three or more) of the first epoxy resin. The content is 25% by weight or more. Preferably, the number of repetitions of the structural unit is 2 (two of the structural units), the content of the first epoxy resin is 25% by weight or more, and the number of repetitions of the structural unit is 3 or more (the above structural unit is three or more) The content of the first epoxy resin is 35% by weight or more. In this way, the number of epoxy groups in the first epoxy resin is large (the number of repeating units of the structural unit is large), and the difference in the method of removing the resin by the roughening liquid is fine. Anchor, and can exhibit higher strength.

就進一步減小粗化處理後之表面之表面粗糙度,且進一步提高硬化物與金屬層之接著強度之觀點而言,較佳為上述第1區域中之除上述二氧化矽以外之成分100重量%中,上述第1環氧樹脂整體之含量(上述環氧樹脂(1)之含量)為10重量%以上且80重量%以下,或者上述第1區域中之除上述二氧化矽以外之成分100重量%中,上述第2環氧樹脂與上述第3環氧樹脂之合計含量(上述環氧樹脂(2)之含量)為0.3重量%以上且30重量%以下。就進一步減小粗化處理後之表面之表面粗糙度,且進一步提高硬化物與金屬層之接著強度之觀點而言,較佳為上述第1區域中之除上述二氧化矽以外之成分100重量%中,上述第1環氧樹脂整體之含量(上述環氧樹脂(1)之含量)為70重量%以下。 From the viewpoint of further reducing the surface roughness of the surface after the roughening treatment and further improving the adhesion strength between the cured product and the metal layer, it is preferably 100 parts by weight of the component other than the above-mentioned ceria in the first region. In %, the content of the entire first epoxy resin (the content of the epoxy resin (1)) is 10% by weight or more and 80% by weight or less, or the component 100 other than the above-mentioned ceria in the first region. In the weight %, the total content of the second epoxy resin and the third epoxy resin (the content of the epoxy resin (2)) is 0.3% by weight or more and 30% by weight or less. From the viewpoint of further reducing the surface roughness of the surface after the roughening treatment and further improving the adhesion strength between the cured product and the metal layer, it is preferably 100 parts by weight of the component other than the above-mentioned ceria in the first region. In %, the content of the entire first epoxy resin (the content of the epoxy resin (1)) is 70% by weight or less.

就進一步減小粗化處理後之表面之表面粗糙度,且進一步提高硬化物與金屬層之接著強度之觀點而言,較佳為上述第2區域中之除 上述二氧化矽以外之成分100重量%中,上述第1環氧樹脂整體之含量(上述環氧樹脂(1)之含量)為10重量%以上且80重量%,或者上述第2區域中之除上述二氧化矽以外之成分100重量%中,上述第2環氧樹脂與上述第3環氧樹脂之合計含量(上述環氧樹脂(2)之含量)為0.3重量%以上且30重量%以下。就進一步減小粗化處理後之表面之表面粗糙度,且進一步提高硬化物與金屬層之接著強度之觀點而言,較佳為上述第2區域中之除上述二氧化矽以外之成分100重量%中,上述第1環氧樹脂整體之含量(上述環氧樹脂(1)之含量)為70重量%以下。 In order to further reduce the surface roughness of the surface after the roughening treatment and further improve the adhesion strength between the cured product and the metal layer, it is preferable to remove the surface in the second region. The content of the entire first epoxy resin (the content of the epoxy resin (1)) is 10% by weight or more and 80% by weight or less in the second region, in 100% by weight of the component other than the cerium oxide. In 100% by weight of the components other than the cerium oxide, the total content of the second epoxy resin and the third epoxy resin (the content of the epoxy resin (2)) is 0.3% by weight or more and 30% by weight or less. From the viewpoint of further reducing the surface roughness of the surface after the roughening treatment and further improving the adhesion strength between the cured product and the metal layer, it is preferably 100 parts by weight of the component other than the above-mentioned ceria in the second region. In %, the content of the entire first epoxy resin (the content of the epoxy resin (1)) is 70% by weight or less.

上述環氧樹脂於常溫(23℃)下可為液狀,亦可為固體。 The epoxy resin may be liquid at normal temperature (23 ° C) or may be solid.

就進一步減小硬化物之表面之表面粗糙度,且進一步提高硬化物與金屬層之接著強度之觀點而言,上述環氧樹脂之環氧當量較佳為90以上,更佳為100以上,且較佳為1000以下,更佳為800以下。上述環氧樹脂較佳為包含環氧當量為上述下限以上及上述上限以下之環氧樹脂。 The epoxy resin preferably has an epoxy equivalent of 90 or more, more preferably 100 or more, from the viewpoint of further reducing the surface roughness of the surface of the cured product and further improving the adhesion strength between the cured product and the metal layer. It is preferably 1000 or less, more preferably 800 or less. The epoxy resin preferably contains an epoxy resin having an epoxy equivalent of not less than the above lower limit and not more than the above upper limit.

上述環氧樹脂之分子量較佳為1000以下。於此情形時,容易增加絕緣樹脂膜整體中之二氧化矽之含量。進而,即便二氧化矽之含量較多,亦可獲得流動性較高之絕緣樹脂膜。又,藉由併用重量平均分子量為1000以下之環氧樹脂與熱塑性樹脂,可抑制絕緣樹脂膜之熔融黏度之過度降低。 The molecular weight of the above epoxy resin is preferably 1,000 or less. In this case, it is easy to increase the content of cerium oxide in the entire insulating resin film. Further, even if the content of cerium oxide is large, an insulating resin film having high fluidity can be obtained. Further, by using an epoxy resin having a weight average molecular weight of 1,000 or less and a thermoplastic resin in combination, excessive reduction in the melt viscosity of the insulating resin film can be suppressed.

關於上述環氧樹脂之分子量及下述硬化劑之分子量,於上述環氧樹脂或硬化劑並非聚合物之情形、及可確定上述環氧樹脂或硬化劑之結構式之情形時,係指可根據該結構式算出之分子量。又,於上述環氧樹脂或硬化劑為聚合物之情形時,係指重量平均分子量。 The molecular weight of the epoxy resin and the molecular weight of the curing agent described below may be determined according to the case where the epoxy resin or the curing agent is not a polymer, and the structural formula of the epoxy resin or the curing agent can be determined. The molecular weight calculated from this structural formula. Further, in the case where the above epoxy resin or curing agent is a polymer, it means a weight average molecular weight.

上述重量平均分子量係表示藉由凝膠滲透層析法(GPC)測定之以聚苯乙烯換算之重量平均分子量。 The above weight average molecular weight means a weight average molecular weight in terms of polystyrene measured by gel permeation chromatography (GPC).

[硬化劑] [hardener]

上述絕緣樹脂膜中所含有之硬化劑並無特別限定。作為該硬化劑,可使用先前公知之硬化劑。上述硬化劑可僅使用1種,亦可併用2種以上。 The curing agent contained in the insulating resin film is not particularly limited. As the hardener, a previously known hardener can be used. The curing agent may be used alone or in combination of two or more.

作為上述硬化劑,可列舉:氰酸酯酯化合物(氰酸酯酯硬化劑)、酚化合物(酚硬化劑)、胺化合物(胺硬化劑)、硫醇化合物(硫醇硬化劑)、咪唑化合物、膦化合物、酸酐、活性酯化合物及雙氰胺等。其中,就獲得由熱所導致之尺寸變化更小之硬化物之觀點而言,上述硬化劑較佳為氰酸酯酯化合物或酚化合物。上述硬化劑較佳為氰酸酯酯化合物,亦較佳為酚化合物。上述硬化劑較佳為含有可與上述環氧樹脂之環氧基反應之官能基。 Examples of the curing agent include a cyanate ester compound (cyanate ester curing agent), a phenol compound (phenol curing agent), an amine compound (amine curing agent), a thiol compound (thiol curing agent), and an imidazole compound. , phosphine compounds, acid anhydrides, active ester compounds and dicyandiamide. Among them, the hardener is preferably a cyanate ester compound or a phenol compound from the viewpoint of obtaining a cured product having a smaller dimensional change due to heat. The above hardener is preferably a cyanate ester compound, and is preferably a phenol compound. The above hardener preferably contains a functional group reactive with the epoxy group of the above epoxy resin.

就進一步減小硬化物之表面之表面粗糙度,進一步提高硬化物與金屬層之接著強度,且於硬化物之表面形成更微細之配線之觀點而言,上述硬化劑較佳為氰酸酯酯化合物、酚化合物或活性酯化合物。進而,就對硬化劑賦予更良好之絕緣可靠性之觀點而言,上述硬化劑更佳為氰酸酯酯化合物。 The hardener is preferably a cyanate ester from the viewpoint of further reducing the surface roughness of the surface of the cured product, further improving the adhesion strength between the cured product and the metal layer, and forming a finer wiring on the surface of the cured product. a compound, a phenol compound or an active ester compound. Further, from the viewpoint of imparting more excellent insulation reliability to the curing agent, the above curing agent is more preferably a cyanate ester compound.

藉由使用上述氰酸酯酯化合物,可使二氧化矽之含量較多之絕緣樹脂膜之操作性變得良好,且使硬化物之玻璃轉移溫度進一步變高。上述氰酸酯酯化合物並無特別限定。作為該氰酸酯酯化合物,可使用先前公知之氰酸酯酯化合物。上述氰酸酯酯化合物可僅使用1種,亦可併用2種以上。 By using the cyanate ester compound, the workability of the insulating resin film having a large content of cerium oxide can be improved, and the glass transition temperature of the cured product can be further increased. The cyanate ester compound is not particularly limited. As the cyanate ester compound, a previously known cyanate ester compound can be used. The cyanate ester compound may be used alone or in combination of two or more.

作為上述氰酸酯酯化合物,可列舉:酚醛清漆型氰酸酯酯樹脂、雙酚型氰酸酯酯樹脂、及使該等進行部分三聚化而得之預聚物等。作為上述酚醛清漆型氰酸酯酯樹脂,可列舉:苯酚酚醛清漆型氰酸酯酯樹脂及烷酚型氰酸酯酯樹脂等。作為上述雙酚型氰酸酯酯樹脂,可列舉:雙酚A型氰酸酯酯樹脂、雙酚E型氰酸酯酯樹脂及四甲基雙酚F型氰酸酯酯樹脂等。 Examples of the cyanate ester compound include a novolac type cyanate ester resin, a bisphenol type cyanate ester resin, and a prepolymer obtained by partially trimerating the particles. Examples of the novolak-type cyanate ester resin include a phenol novolac type cyanate ester resin and an alkylphenol type cyanate ester resin. Examples of the bisphenol-type cyanate ester resin include a bisphenol A type cyanate ester resin, a bisphenol E type cyanate ester resin, and a tetramethyl bisphenol F type cyanate ester resin.

作為上述氰酸酯酯化合物之市售品,可列舉:苯酚酚醛清漆型氰酸酯酯樹脂(Lonza Japan公司製造之「PT-30」及「PT-60」)、及使雙酚型氰酸酯酯樹脂進行三聚化而得之預聚物(Lonza Japan公司製造之「BA-230S」、「BA-3000S」、「BTP-1000S」及「BTP-6020S」)等。 The commercially available product of the cyanate ester compound is phenol novolac type cyanate ester resin ("PT-30" and "PT-60" manufactured by Lonza Japan Co., Ltd.), and bisphenol type cyanate. A prepolymer obtained by trimerization of an ester ester resin ("BA-230S", "BA-3000S", "BTP-1000S", and "BTP-6020S" manufactured by Lonza Japan Co., Ltd.).

上述氰酸酯酯化合物之分子量較佳為3000以下。於此情形時,可增加絕緣樹脂膜整體中之二氧化矽之含量,即便二氧化矽之含量較多,亦可獲得流動性較高之絕緣樹脂膜。 The molecular weight of the cyanate ester compound is preferably 3,000 or less. In this case, the content of cerium oxide in the entire insulating resin film can be increased, and even if the content of cerium oxide is large, an insulating resin film having high fluidity can be obtained.

藉由使用上述酚化合物,可使硬化物與金屬層之接著強度進一步變高。又,藉由使用上述酚化合物,例如於對設置於硬化物之表面上之銅之表面進行黑化處理或Cz處理時,可使硬化物與銅之接著強度進一步變高。 By using the above phenol compound, the adhesion strength between the cured product and the metal layer can be further increased. Further, by using the above phenol compound, for example, when the surface of the copper provided on the surface of the cured product is subjected to a blackening treatment or a Cz treatment, the strength of the cured product and the copper can be further increased.

上述酚化合物並無特別限定。作為該酚化合物,可使用先前公知之酚化合物。上述酚化合物可僅使用1種,亦可併用2種以上。 The phenol compound is not particularly limited. As the phenol compound, a previously known phenol compound can be used. These phenol compounds may be used alone or in combination of two or more.

作為上述酚化合物,可列舉:酚醛清漆型酚、聯苯酚型酚、萘型酚、二環戊二烯型酚、芳烷基型酚及二環戊二烯型酚等。 Examples of the phenol compound include novolac type phenol, biphenol type phenol, naphthalene type phenol, dicyclopentadiene type phenol, aralkyl type phenol, and dicyclopentadiene type phenol.

作為上述酚化合物之市售品,可列舉:酚醛清漆型酚(DIC公司製造之「TD-2091」)、聯苯酚醛清漆型酚(明和化成公司製造之「MEH-7851」)、芳烷基型酚化合物(明和化成公司製造之「MEH-7800」)、及具有胺基三骨架之酚(DIC公司製造之「LA1356」及「LA3018-50P」)等。 The commercially available product of the phenol compound may, for example, be a novolac type phenol ("TD-2091" manufactured by DIC Corporation), a biphenol novolak type phenol ("MEH-7851" manufactured by Mingwa Kasei Co., Ltd.), or an aralkyl group. Phenolic compound ("MEH-7800" manufactured by Minghe Chemical Co., Ltd.), and having an amine group III Skeleton phenol ("LA1356" and "LA3018-50P" manufactured by DIC Corporation).

就進一步減小硬化物之表面之表面粗糙度,進一步提高硬化物與金屬層之接著強度,且於硬化物之表面形成更微細之配線之觀點而言,上述酚化合物較佳為聯苯酚醛清漆型酚化合物、或芳烷基型酚化合物。 The phenol compound is preferably a biphenol novolak from the viewpoint of further reducing the surface roughness of the surface of the cured product, further improving the adhesion strength between the cured product and the metal layer, and forming finer wiring on the surface of the cured product. A phenolic compound or an aralkyl type phenol compound.

就進一步減小硬化物之表面之表面粗糙度之觀點而言,較佳為上述酚化合物具有2個以上之酚性羥基。 From the viewpoint of further reducing the surface roughness of the surface of the cured product, it is preferred that the phenol compound has two or more phenolic hydroxyl groups.

上述活性酯化合物具體而言係以下述式(1)所表示之化合物。 The above-mentioned active ester compound is specifically a compound represented by the following formula (1).

R2(COOR1)k‧‧‧式(1) R 2 (COOR 1 ) k ‧‧‧式(1)

如式(1)所示,上述活性酯化合物具有酯基,該酯基顯示與環氧基之反應性,且上述活性酯化合物於反應後不會產生二級羥基而可形成網狀結構。 As shown in the formula (1), the above-mentioned active ester compound has an ester group which exhibits reactivity with an epoxy group, and the above-mentioned active ester compound does not generate a secondary hydroxyl group after the reaction to form a network structure.

上述式(1)中之R1係以下述式(11)、(12)或(13)所表示之基。 R 1 in the above formula (1) is a group represented by the following formula (11), (12) or (13).

上述式(11)~(13)中,A及B分別表示鹵素原子或烷基,m1表示0~5,m2表示0~4,m3表示0~3。於A及B分別為複數個之情形時,複數個A及B之各者可相同,亦可不同。 In the above formulae (11) to (13), A and B each represent a halogen atom or an alkyl group, m 1 represents 0 to 5, m 2 represents 0 to 4, and m 3 represents 0 to 3. In the case where A and B are plural, respectively, each of the plurality of A and B may be the same or different.

上述式(1)中,k為2~4之整數。 In the above formula (1), k is an integer of 2 to 4.

上述式(1)中,R2係以下述式(21)、(22)、(23)、(24)、(25)、(26)、(27)、(28)或(29)所表示之基。 In the above formula (1), R 2 is represented by the following formula (21), (22), (23), (24), (25), (26), (27), (28) or (29). The basis.

[化7] [Chemistry 7]

[化11] [11]

上述式(21)~(29)中,D、E及G分別表示鹵素原子或烷基,X表示硫原子、氧原子、SO2或Co,n1、n2及n3分別表示0~4,n4及n5分別表示0~3,n6表示0~2。於D、E及G分別為複數個之情形時,複數個D、E及G之各者可相同,亦可不同。 In the above formulae (21) to (29), D, E and G each represent a halogen atom or an alkyl group, X represents a sulfur atom, an oxygen atom, SO 2 or Co, and n 1 , n 2 and n 3 represent 0 to 4, respectively. , n 4 and n 5 represent 0~3, respectively, and n 6 represents 0~2. In the case where D, E, and G are plural, respectively, each of the plurality of D, E, and G may be the same or different.

上述活性酯化合物並無特別限定。作為上述活性酯化合物之市售品,可列舉DIC公司製造之「HPC-8000」、「HPC-8000-65T」及「EXB9416-70BK」等。 The above active ester compound is not particularly limited. As a commercial item of the above-mentioned active ester compound, "HPC-8000", "HPC-8000-65T", and "EXB9416-70BK" manufactured by DIC Corporation are mentioned.

就進一步減小硬化物之表面之表面粗糙度,進一步提高硬化物與金屬層之接著強度,且於硬化物之表面形成更微細之配線,且藉由硬化劑賦予良好之絕緣可靠性之觀點而言,較佳為上述硬化劑包含當量為250以下之硬化劑。關於上述硬化劑之當量,例如於硬化劑為氰酸酯酯化合物之情形時,表示氰酸酯酯基當量,於硬化劑為酚化合物之情形時,表示酚性羥基當量,於硬化劑為活性酯化合物之情形時, 表示活性酯基當量。 Further reducing the surface roughness of the surface of the cured product, further improving the adhesion strength between the cured product and the metal layer, and forming finer wiring on the surface of the cured product, and imparting good insulation reliability by the hardener. In other words, it is preferred that the curing agent contains a curing agent having an equivalent weight of 250 or less. The equivalent of the above-mentioned curing agent, for example, when the curing agent is a cyanate ester compound, represents a cyanate ester group equivalent, and when the curing agent is a phenol compound, it represents a phenolic hydroxyl equivalent and is active in a hardener. In the case of an ester compound, Represents the active ester group equivalent.

上述硬化劑之整體100重量%中,當量為250以下之硬化劑之含量較佳為30重量%以上,更佳為50重量%以上。上述硬化劑亦可全部為當量為250以下之硬化劑。若當量為250以下之硬化劑之含量為上述下限以上,則硬化物之表面之表面粗糙度進一步變小,且於絕緣層之表面形成更微細之配線。進而,若當量為250以下之硬化劑之含量為上述下限以上,則硬化物之玻璃轉移溫度進一步變高。 The content of the curing agent having an equivalent weight of 250 or less in 100% by weight of the total amount of the curing agent is preferably 30% by weight or more, and more preferably 50% by weight or more. The above hardeners may all be hardeners having an equivalent weight of 250 or less. When the content of the curing agent having an equivalent weight of 250 or less is at least the above lower limit, the surface roughness of the surface of the cured product is further reduced, and finer wiring is formed on the surface of the insulating layer. Further, when the content of the curing agent having an equivalent weight of 250 or less is at least the above lower limit, the glass transition temperature of the cured product is further increased.

上述硬化劑之分子量較佳為1000以下。上述硬化劑較佳為包含分子量為上述上限以下之硬化劑。於此情形時,絕緣樹脂膜整體中之二氧化矽之含量即便為30重量%以上,即便為40重量%以上,即便為50重量%以上,亦可獲得流動性較高之絕緣樹脂膜。 The molecular weight of the above curing agent is preferably 1,000 or less. The curing agent preferably contains a curing agent having a molecular weight of not more than the above upper limit. In this case, the content of the cerium oxide in the entire insulating resin film is 30% by weight or more, and even if it is 40% by weight or more, even if it is 50% by weight or more, an insulating resin film having high fluidity can be obtained.

上述環氧樹脂與上述硬化劑之調配比並無特別限定。環氧樹脂與硬化劑之調配比可根據環氧樹脂與硬化劑之種類適當決定。上述環氧樹脂之環氧當量與上述硬化劑之當量之比(環氧當量:硬化劑之當量)較佳為1:0.2~1:2,更佳為1:0.3~1:1.5。若當量比滿足上述範圍,則硬化物與金屬層之接著強度進一步變高。 The blending ratio of the epoxy resin to the hardener is not particularly limited. The blending ratio of the epoxy resin to the hardener can be appropriately determined depending on the type of the epoxy resin and the hardener. The ratio of the epoxy equivalent of the epoxy resin to the equivalent of the hardener (equivalent to epoxy equivalent: equivalent of the hardener) is preferably from 1:0.2 to 1:2, more preferably from 1:0.3 to 1:1.5. When the equivalent ratio satisfies the above range, the bonding strength between the cured product and the metal layer is further increased.

上述絕緣樹脂膜之除二氧化矽以外之成分之合計100重量%中,上述環氧樹脂與上述硬化劑之合計含量較佳為50重量%以上,更佳為70重量%以上,且為100重量%(全部之量)以下,較佳為99.9重量%以下,更佳為99.8重量%以下。 The total content of the epoxy resin and the curing agent in the total amount of the components of the insulating resin film other than cerium oxide is preferably 50% by weight or more, more preferably 70% by weight or more, and 100% by weight. % (the total amount) or less is preferably 99.9% by weight or less, more preferably 99.8% by weight or less.

[二氧化矽] [cerium oxide]

藉由使上述絕緣樹脂膜含有二氧化矽,可使硬化物之線膨脹率變低,且硬化物之表面之表面粗糙度有效地變小,硬化物與金屬層之接著強度有效地變高。上述二氧化矽並無特別限定。作為該二氧化矽,可使用先前公知之二氧化矽。上述二氧化矽可僅使用1種,亦可併用2種以上。 When the insulating resin film contains cerium oxide, the linear expansion ratio of the cured product can be lowered, and the surface roughness of the surface of the cured product can be effectively reduced, and the bonding strength between the cured product and the metal layer can be effectively increased. The above cerium oxide is not particularly limited. As the cerium oxide, previously known cerium oxide can be used. The above-mentioned cerium oxide may be used alone or in combination of two or more.

就減小硬化物之表面之表面粗糙度,進一步提高硬化物與金屬層之接著強度,且於硬化物之表面形成更微細之配線,且對硬化物賦予更良好之絕緣可靠性之觀點而言,上述二氧化矽較佳為熔融二氧化矽。 The viewpoint of reducing the surface roughness of the surface of the cured product, further improving the adhesion strength between the cured product and the metal layer, and forming finer wiring on the surface of the cured product, and imparting better insulation reliability to the cured product The above cerium oxide is preferably molten cerium oxide.

上述二氧化矽之平均粒徑較佳為1nm以上,更佳為10nm以上,進而較佳為50nm以上,特佳為150nm以上,且較佳為20μm以下,更佳為10μm以下,進而較佳為5μm以下,特佳為1μm以下。若上述二氧化矽之平均粒徑為上述下限以上及上述上限以下,則於粗化處理後形成之孔之大小變得微細,且孔之數目適當地變多。其結果,硬化物與金屬層之接著強度進一步變高。 The average particle diameter of the above cerium oxide is preferably 1 nm or more, more preferably 10 nm or more, further preferably 50 nm or more, particularly preferably 150 nm or more, and more preferably 20 μm or less, still more preferably 10 μm or less, and further preferably 5 μm or less, particularly preferably 1 μm or less. When the average particle diameter of the cerium oxide is not less than the above lower limit and not more than the above upper limit, the size of the pores formed after the roughening treatment becomes fine, and the number of pores is appropriately increased. As a result, the bonding strength between the cured product and the metal layer is further increased.

作為上述二氧化矽之平均粒徑,係採用成為50%之中值直徑(d50)之值。上述平均粒徑可使用雷射繞射散射方式之粒度分佈測定裝置而測定。 The average particle diameter of the above-mentioned ceria is a value which is 50% of the median diameter (d50). The above average particle diameter can be measured by a particle size distribution measuring apparatus using a laser diffraction scattering method.

上述二氧化矽較佳為球狀,更佳為球狀二氧化矽。於此情形時,硬化物之表面之表面粗糙度有效地變小,進而絕緣層與金屬層之接著強度有效地變高。又,藉由使用球狀二氧化矽,可降低絕緣樹脂膜之熔融黏度,且可增加絕緣樹脂膜中之二氧化矽之含量。於上述二氧化矽為球狀之情形時,上述二氧化矽之縱橫比較佳為2以下,更佳為1.5以下。 The above cerium oxide is preferably spherical, more preferably spherical cerium oxide. In this case, the surface roughness of the surface of the cured product is effectively reduced, and the subsequent strength of the insulating layer and the metal layer is effectively increased. Further, by using the spherical cerium oxide, the melt viscosity of the insulating resin film can be lowered, and the content of cerium oxide in the insulating resin film can be increased. When the cerium oxide is spherical, the aspect ratio of the cerium oxide is preferably 2 or less, more preferably 1.5 or less.

上述二氧化矽較佳為進行表面處理,更佳為藉由偶合劑進行表面處理。藉此,硬化物之表面之表面粗糙度進一步變小,硬化物與金屬層之接著強度進一步變高,且於硬化物之表面形成更微細之配線,且對硬化物賦予更良好之配線間絕緣可靠性及層間絕緣可靠性。 The above-mentioned cerium oxide is preferably subjected to surface treatment, and more preferably subjected to surface treatment by a coupling agent. Thereby, the surface roughness of the surface of the cured product is further reduced, the bonding strength between the cured product and the metal layer is further increased, and finer wiring is formed on the surface of the cured product, and better wiring insulation is imparted to the cured product. Reliability and reliability of interlayer insulation.

作為上述偶合劑,可列舉矽烷偶合劑、鈦酸酯偶合劑及鋁偶合劑等。作為上述矽烷偶合劑,可列舉胺基矽烷、咪唑矽烷、乙烯基矽烷及環氧矽烷等。 Examples of the coupling agent include a decane coupling agent, a titanate coupling agent, and an aluminum coupling agent. Examples of the decane coupling agent include amino decane, imidazolium, vinyl decane, and epoxy decane.

上述絕緣樹脂膜100重量%中,上述二氧化矽之含量較佳為25重量%以上,更佳為30重量%以上,進而較佳為35重量%以上,進而更佳為40重量%以上,特佳為50重量%以上,最佳為60重量%以上,且較佳為95重量%以下,更佳為90重量%以下,進而較佳為85重量%以下。若上述二氧化矽之含量為上述下限以上及上述上限以下,則硬化物之表面之表面粗糙度進一步變小,硬化物與金屬層之接著強度進一步變高,且於硬化物之表面形成更微細之配線,同時,若為該二氧化矽量,則亦可降低金屬銅及硬化物之線膨脹率。於上述絕緣樹脂膜100重量%中之上述二氧化矽之含量為30重量%以上之情形時,可使位於第1主面側與第2主面側之二氧化矽之存在狀態變得更加良好。 In 100% by weight of the insulating resin film, the content of the cerium oxide is preferably 25% by weight or more, more preferably 30% by weight or more, still more preferably 35% by weight or more, and still more preferably 40% by weight or more. It is preferably 50% by weight or more, more preferably 60% by weight or more, and most preferably 95% by weight or less, more preferably 90% by weight or less, still more preferably 85% by weight or less. When the content of the cerium oxide is not less than the above lower limit and not more than the above upper limit, the surface roughness of the surface of the cured product is further reduced, and the strength of the cured product and the metal layer is further increased, and the surface of the cured product is more finely formed. At the same time, if the amount of the cerium oxide is used, the linear expansion ratio of the metallic copper and the cured product can be lowered. When the content of the cerium oxide in the amount of 100% by weight of the insulating resin film is 30% by weight or more, the presence of cerium oxide located on the first main surface side and the second main surface side can be further improved. .

[熱塑性樹脂] [thermoplastic resin]

上述絕緣樹脂膜不含有或含有熱塑性樹脂。較佳為上述絕緣樹脂膜含有熱塑性樹脂。該熱塑性樹脂並無特別限定。作為該熱塑性樹脂,可使用先前公知之熱塑性樹脂。上述熱塑性樹脂可僅使用1種,亦可併用2種以上。 The above insulating resin film does not contain or contain a thermoplastic resin. It is preferable that the insulating resin film contains a thermoplastic resin. The thermoplastic resin is not particularly limited. As the thermoplastic resin, a previously known thermoplastic resin can be used. The thermoplastic resin may be used alone or in combination of two or more.

作為上述熱塑性樹脂,可列舉醯亞胺樹脂、苯氧樹脂、聚乙烯醇縮乙醛樹脂、橡膠成分及有機填料等。上述熱塑性樹脂特佳為苯氧樹脂。藉由使用該苯氧樹脂,由於可調整熔融黏度故而二氧化矽之分散性變得良好,且於硬化過程中,絕緣樹脂膜變得難以潤濕擴散至非意圖之區域中。又,藉由使用熱塑性樹脂,可抑制絕緣樹脂膜相對於電路基板之孔或凹凸之嵌入性之惡化及二氧化矽之不均勻化。 Examples of the thermoplastic resin include a quinone imine resin, a phenoxy resin, a polyvinyl acetal resin, a rubber component, and an organic filler. The above thermoplastic resin is particularly preferably a phenoxy resin. By using the phenoxy resin, the dispersibility of the cerium oxide becomes good because the melt viscosity can be adjusted, and during the hardening process, the insulating resin film becomes difficult to wet and diffuse into the unintended region. Moreover, by using a thermoplastic resin, deterioration of the embedding property of the insulating resin film with respect to the hole or the unevenness of the circuit board and unevenness of the cerium oxide can be suppressed.

作為上述苯氧樹脂,例如可列舉具有雙酚A型之骨架、雙酚F型之骨架、雙酚S型之骨架、聯苯骨架、酚醛清漆骨架、萘骨架及醯亞胺骨架等骨架之苯氧樹脂等。 Examples of the phenoxy resin include a benzene having a bisphenol A type skeleton, a bisphenol F type skeleton, a bisphenol S type skeleton, a biphenyl skeleton, a novolak skeleton, a naphthalene skeleton, and a quinone imine skeleton. Oxygen resin, etc.

作為上述醯亞胺樹脂之市售品,例如可列舉日本高度紙工業公司製造之「SOXR-C」等。 For example, "SOXR-C" manufactured by Japan Kodak Paper Co., Ltd., etc., may be mentioned as a commercial item of the above-mentioned quinone imine resin.

作為上述苯氧樹脂之市售品,例如可列舉:新日鐵住金化學公司製造之「YP50」、「YP55」及「YP70」、及三菱化學公司製造之「1256B40」、「4250」、「4256H40」、「4275」、「YX6954BH30」及「YX8100BH30」等。 For example, "YP50", "YP55" and "YP70" manufactured by Nippon Steel & Sumitomo Chemical Co., Ltd., and "1256B40", "4250" and "4256H40" manufactured by Mitsubishi Chemical Corporation are listed as the commercial products of the phenoxy resin. ", "4275", "YX6954BH30" and "YX8100BH30".

上述熱塑性樹脂之重量平均分子量較佳為5000以上,且較佳為100000以下。較佳為上述熱塑性樹脂包含重量平均分子量為上述上限以下之熱塑性樹脂。上述重量平均分子量表示藉由凝膠滲透層析法(GPC)測定之以聚苯乙烯換算之重量平均分子量。 The weight average molecular weight of the thermoplastic resin is preferably 5,000 or more, and preferably 100,000 or less. It is preferable that the thermoplastic resin contains a thermoplastic resin having a weight average molecular weight of not more than the above upper limit. The above weight average molecular weight means a weight average molecular weight in terms of polystyrene measured by gel permeation chromatography (GPC).

上述熱塑性樹脂之含量並無特別限定。上述絕緣樹脂膜100重量%中,上述熱塑性樹脂之含量(於熱塑性樹脂為苯氧樹脂之情形時為苯氧樹脂之含量)較佳為1重量%以上,更佳為5重量%以上,且較佳為30重量%以下,更佳為20重量%以下,進而更佳為15重量%以下。若上述熱塑性樹脂之含量為上述下限以上及上述上限以下,則硬化物之線膨脹率進一步變低。又,絕緣樹脂膜相對於電路基板之孔或凹凸之嵌入性變得良好。若上述熱塑性樹脂之含量為上述下限以上,則絕緣樹脂膜之成膜性變高,可獲得更良好之硬化物。若上述熱塑性樹脂之含量為上述上限以下,則硬化物之表面之表面粗糙度進一步變小,且硬化物與金屬層之接著強度進一步變高。 The content of the above thermoplastic resin is not particularly limited. The content of the thermoplastic resin (the content of the phenoxy resin when the thermoplastic resin is a phenoxy resin) is preferably 1% by weight or more, more preferably 5% by weight or more, and more preferably 100% by weight of the insulating resin film. It is preferably 30% by weight or less, more preferably 20% by weight or less, still more preferably 15% by weight or less. When the content of the thermoplastic resin is at least the above lower limit and not more than the above upper limit, the linear expansion ratio of the cured product is further lowered. Moreover, the embedding property of the insulating resin film with respect to the hole or the unevenness of the circuit board becomes favorable. When the content of the thermoplastic resin is at least the above lower limit, the film formability of the insulating resin film is increased, and a more excellent cured product can be obtained. When the content of the thermoplastic resin is at most the above upper limit, the surface roughness of the surface of the cured product is further reduced, and the adhesion strength between the cured product and the metal layer is further increased.

[硬化促進劑] [hardening accelerator]

上述絕緣樹脂膜不含有或含有硬化促進劑。較佳為上述絕緣樹脂膜含有硬化促進劑。藉由使用上述硬化促進劑,可使硬化速度進一步變快。藉由使絕緣樹脂膜迅速地硬化,可使硬化物中之交聯結構變得均勻,並且未反應之官能基數減少,結果交聯密度變高。上述硬化促進劑並無特別限定,可使用先前公知之硬化促進劑。上述硬化促進劑可僅使用1種,亦可併用2種以上。 The insulating resin film does not contain or contain a curing accelerator. It is preferable that the insulating resin film contains a curing accelerator. By using the above-mentioned hardening accelerator, the hardening speed can be further increased. By rapidly hardening the insulating resin film, the crosslinked structure in the cured product can be made uniform, and the number of unreacted functional groups is reduced, and as a result, the crosslinking density becomes high. The hardening accelerator is not particularly limited, and a conventionally known hardening accelerator can be used. The above-mentioned hardening accelerator may be used alone or in combination of two or more.

作為上述硬化促進劑,例如可列舉咪唑化合物、磷化合物、胺 化合物及有機金屬化合物等。 Examples of the hardening accelerator include an imidazole compound, a phosphorus compound, and an amine. Compounds and organometallic compounds, etc.

作為上述咪唑化合物,可列舉:2-十一烷基咪唑、2-十七烷基咪唑、2-甲基咪唑、2-乙基-4-甲基咪唑、2-苯基咪唑、2-苯基-4-甲基咪唑、1-苄基-2-甲基咪唑、1-苄基-2-苯基咪唑、1,2-二甲基咪唑、1-氰基乙基-2-甲基咪唑、1-氰基乙基-2-乙基-4-甲基咪唑、1-氰基乙基-2-十一烷基咪唑、1-氰基乙基-2-苯基咪唑、1-氰基乙基-2-十一烷基咪唑鎓偏苯三甲酸鹽、1-氰基乙基-2-苯基咪唑鎓偏苯三甲酸鹽、2,4-二胺基-6-[2'-甲基咪唑基-(1')]-乙基-均三、2,4-二胺基-6-[2'-十一烷基咪唑基-(1')]-乙基-均三、2,4-二胺基-6-[2'-乙基-4'-甲基咪唑基-(1')]-乙基-均三、2,4-二胺基-6-[2'-甲基咪唑基-(1')]-乙基-均三異氰尿酸加成物、2-苯基咪唑異氰尿酸加成物、2-甲基咪唑異氰尿酸加成物、2-苯基-4,5-二羥基甲基咪唑、及2-苯基-4-甲基-5-二羥基甲基咪唑等。 Examples of the imidazole compound include 2-undecylimidazole, 2-heptadecylimidazole, 2-methylimidazole, 2-ethyl-4-methylimidazole, 2-phenylimidazole, and 2-benzene. 4-methylimidazole, 1-benzyl-2-methylimidazole, 1-benzyl-2-phenylimidazole, 1,2-dimethylimidazole, 1-cyanoethyl-2-methyl Imidazole, 1-cyanoethyl-2-ethyl-4-methylimidazole, 1-cyanoethyl-2-undecylimidazole, 1-cyanoethyl-2-phenylimidazole, 1- Cyanoethyl-2-undecylimidazolium trimellitate, 1-cyanoethyl-2-phenylimidazolium trimellitate, 2,4-diamino-6-[2 '-Methylimidazolyl-(1')]-ethyl-all three 2,4-Diamino-6-[2'-undecylimidazolyl-(1')]-ethyl-all three 2,4-Diamino-6-[2'-ethyl-4'-methylimidazolyl-(1')]-ethyl-all three 2,4-Diamino-6-[2'-methylimidazolyl-(1')]-ethyl-all three Isocyanuric acid adduct, 2-phenylimidazolium isocyanurate adduct, 2-methylimidazoisocyanuric acid adduct, 2-phenyl-4,5-dihydroxymethylimidazole, and 2-benzene Base-4-methyl-5-dihydroxymethylimidazole and the like.

作為上述磷化合物,可列舉三苯基膦等。 Examples of the phosphorus compound include triphenylphosphine and the like.

作為上述胺化合物,可列舉:二乙胺、三乙胺、二乙四胺、三乙四胺、及4,4-二甲基胺基吡啶等。 Examples of the amine compound include diethylamine, triethylamine, diethylenetetramine, triethylenetetramine, and 4,4-dimethylaminopyridine.

作為上述有機金屬化合物,可列舉:環烷酸鋅、環烷酸鈷、辛酸錫、辛酸鈷、雙乙醯丙酮鈷(II)、及三乙醯丙酮鈷(III)等。 Examples of the organometallic compound include zinc naphthenate, cobalt naphthenate, tin octylate, cobalt octoate, cobalt(II) acetoacetate, and cobalt(III) triacetate.

上述硬化促進劑之含量並無特別限定。上述絕緣樹脂膜100重量%中,上述硬化促進劑之含量較佳為0.01重量%以上,且較佳為3重量%以下。若上述硬化促進劑之含量為上述下限以上及上述上限以下,則可使絕緣樹脂膜有效地硬化。若上述硬化促進劑之含量為上述下限以上,則變得更難以發生硬化不良,且於粗化處理後可形成更均勻之粗面,硬化物與金屬層之接著強度進一步變高。若上述硬化促進劑之含量為上述上限以下,則絕緣樹脂膜之保存穩定性變得更加良好。 The content of the above hardening accelerator is not particularly limited. In 100% by weight of the insulating resin film, the content of the curing accelerator is preferably 0.01% by weight or more, and preferably 3% by weight or less. When the content of the hardening accelerator is not less than the above lower limit and not more than the above upper limit, the insulating resin film can be effectively cured. When the content of the hardening accelerator is at least the above lower limit, hardening failure is more likely to occur, and a more uniform rough surface can be formed after the roughening treatment, and the strength of the cured product and the metal layer is further increased. When the content of the hardening accelerator is not more than the above upper limit, the storage stability of the insulating resin film is further improved.

[其他成分] [Other ingredients]

為了改善耐衝擊性、耐熱性、樹脂之相溶性及作業性等,於上述絕緣樹脂膜中亦可添加阻燃劑、偶合劑、著色劑、抗氧化劑、紫外線劣化防止劑、消泡劑、增黏劑、觸變性賦予劑、及除上述樹脂以外之其他樹脂等。 In order to improve impact resistance, heat resistance, resin compatibility, workability, and the like, a flame retardant, a coupling agent, a colorant, an antioxidant, an ultraviolet deterioration preventive agent, an antifoaming agent, and the like may be added to the insulating resin film. An adhesive, a thixotropic imparting agent, and other resins other than the above resins.

作為上述偶合劑,可列舉矽烷偶合劑、鈦偶合劑、及鋁偶合劑等。作為上述矽烷偶合劑,可列舉乙烯基矽烷、胺基矽烷、咪唑矽烷、及環氧矽烷等。 Examples of the coupling agent include a decane coupling agent, a titanium coupling agent, and an aluminum coupling agent. Examples of the decane coupling agent include vinyl decane, amino decane, imidazolium, and epoxy decane.

上述偶合劑之含量並無特別限定。上述絕緣樹脂膜100重量%中,上述偶合劑之含量較佳為0.01重量%以上,且較佳為5重量%以下。 The content of the above coupling agent is not particularly limited. In 100% by weight of the insulating resin film, the content of the coupling agent is preferably 0.01% by weight or more, and preferably 5% by weight or less.

作為上述其他樹脂,可列舉:聚苯醚樹脂、二乙烯基苄醚樹脂、聚芳酯樹脂、鄰苯二甲酸二烯丙酯樹脂、苯并樹脂、苯并唑樹脂、雙馬來醯亞胺樹脂、及丙烯酸酯樹脂等。 Examples of the other resin include a polyphenylene ether resin, a divinyl benzyl ether resin, a polyarylate resin, a diallyl phthalate resin, and a benzoate. Resin, benzo An azole resin, a bismaleimide resin, an acrylate resin, or the like.

[絕緣樹脂膜、預硬化物之其他詳細] [Other details of insulating resin film and pre-cured material]

絕緣樹脂膜可藉由使用包含上述環氧樹脂、上述硬化劑、上述二氧化矽、及溶劑之樹脂組合物,將該樹脂組合物加熱至60~140℃,並使其成形為膜狀而獲得。又,第1區域與第2區域可於上述樹脂組合物之乾燥過程中形成。 The insulating resin film can be obtained by heating the resin composition to 60 to 140 ° C by using a resin composition containing the above epoxy resin, the above-mentioned curing agent, the above-mentioned ceria, and a solvent, and forming the film into a film shape. . Further, the first region and the second region may be formed during the drying of the above resin composition.

上述樹脂組合物包含溶劑。藉由使用上述溶劑,可將上述樹脂組合物之黏度控制於適宜之範圍內,而可提高上述樹脂組合物之塗佈性。又,上述溶劑亦可用於獲得包含上述二氧化矽之漿料。上述溶劑可僅使用1種,亦可併用2種以上。 The above resin composition contains a solvent. By using the above solvent, the viscosity of the above resin composition can be controlled within a suitable range, and the coatability of the above resin composition can be improved. Further, the above solvent can also be used to obtain a slurry containing the above-mentioned ceria. These solvents may be used alone or in combination of two or more.

作為上述溶劑,可列舉:丙酮、甲醇、乙醇、丁醇、2-丙醇、2-甲氧基乙醇、2-乙氧基乙醇、1-甲氧基-2-丙醇、2-乙醯氧基-1-甲氧基丙烷、甲苯、二甲苯、甲基乙基酮、N,N-二甲基甲醯胺、甲基異丁基酮、N-甲基-吡咯啶酮、正己烷、環己烷、環己酮、及作為混合物之 石腦油等。 Examples of the solvent include acetone, methanol, ethanol, butanol, 2-propanol, 2-methoxyethanol, 2-ethoxyethanol, 1-methoxy-2-propanol, and 2-acetamidine. Oxy-1-methoxypropane, toluene, xylene, methyl ethyl ketone, N,N-dimethylformamide, methyl isobutyl ketone, N-methyl-pyrrolidone, n-hexane , cyclohexane, cyclohexanone, and as a mixture Naphtha and so on.

較佳為上述溶劑之大部分於製作上述絕緣樹脂膜時去除。因此,上述溶劑之沸點較佳為160℃以下,更佳為140℃以下,進而較佳為120℃以下,特佳為100℃以下。上述絕緣樹脂膜不含有或含有溶劑。於上述絕緣樹脂膜含有溶劑之情形時,上述絕緣樹脂膜100重量%中,上述溶劑之含量較佳為5重量%以下,更佳為3重量%以下,進而較佳為1重量%以下。上述樹脂組合物中之上述溶劑之含量並無特別限定。可考慮上述樹脂組合物之塗佈性等而適當變更上述溶劑之含量。 It is preferred that most of the above solvent is removed when the above-mentioned insulating resin film is produced. Therefore, the boiling point of the solvent is preferably 160 ° C or lower, more preferably 140 ° C or lower, further preferably 120 ° C or lower, and particularly preferably 100 ° C or lower. The above insulating resin film does not contain or contain a solvent. In the case where the insulating resin film contains a solvent, the content of the solvent in 100% by weight of the insulating resin film is preferably 5% by weight or less, more preferably 3% by weight or less, still more preferably 1% by weight or less. The content of the above solvent in the above resin composition is not particularly limited. The content of the above solvent can be appropriately changed in consideration of the coatability of the above resin composition and the like.

作為使上述樹脂組合物成形為膜狀之方法,例如可列舉:使用擠出機將上述樹脂組合物熔融混練並擠出後,藉由T型模具或圓形模具等使其成形為膜狀之擠出成形法;澆鑄包含溶劑之上述樹脂組合物使其成形為膜狀之澆鑄成形法;及先前公知之其他膜成形法等。其中,就可應對薄型化之方面而言,較佳為擠出成形法或澆鑄成形法,更佳為澆鑄成形法。上述膜包含片材。 The method of forming the resin composition into a film shape, for example, melt-kneading and extruding the resin composition using an extruder, and then forming the film into a film shape by a T-die or a circular die. An extrusion molding method; a casting molding method in which the above resin composition containing a solvent is formed into a film shape; and other film forming methods known in the prior art. Among them, in terms of thinning, an extrusion molding method or a casting molding method is preferred, and a casting molding method is more preferred. The above film contains a sheet.

使上述樹脂組合物成形為膜狀,並於利用熱之硬化未過度進行之程度下,例如於90~200℃下使其加熱乾燥1~180分鐘,藉此可獲得上述絕緣樹脂膜。本發明之絕緣樹脂膜可為預硬化前之絕緣樹脂膜,亦可為預硬化後之絕緣樹脂膜。對於預硬化後之絕緣樹脂膜,較佳為以上述第1區域100重量%中之上述二氧化矽之含量少於除上述第1區域以外之第2區域100重量%中的上述二氧化矽之含量之狀態,使上述二氧化矽偏向分佈,且上述第2區域100重量%中之上述二氧化矽之含量多於30重量%。 The resin composition is formed into a film shape, and is heated and dried at 90 to 200 ° C for 1 to 180 minutes to the extent that heat hardening is not excessively performed, whereby the above-mentioned insulating resin film can be obtained. The insulating resin film of the present invention may be an insulating resin film before pre-curing, or may be an insulating resin film after pre-curing. In the pre-hardened insulating resin film, it is preferable that the content of the cerium oxide in 100% by weight of the first region is less than the cerium oxide in 100% by weight of the second region other than the first region. In the state of the content, the cerium oxide is distributed in a biased manner, and the content of the cerium oxide in 100% by weight of the second region is more than 30% by weight.

將可藉由如上所述之乾燥步驟而獲得之絕緣樹脂膜稱為B-階段膜。上述絕緣樹脂膜為半硬化狀態下之半硬化物。半硬化物未完全硬化,可進一步進行硬化。 The insulating resin film which can be obtained by the drying step as described above is referred to as a B-stage film. The insulating resin film is a semi-cured material in a semi-hardened state. The semi-hardened material is not completely hardened and can be further hardened.

較佳為上述絕緣樹脂膜並非預成形體。於上述絕緣樹脂膜並非預成形體之情形時,不會沿玻璃布等而產生遷移。又,於將絕緣樹脂膜層壓或預硬化時,不會於表面上產生由玻璃布引起之凹凸。 It is preferable that the above-mentioned insulating resin film is not a preform. When the insulating resin film is not a preform, migration does not occur along the glass cloth or the like. Further, when the insulating resin film is laminated or pre-hardened, irregularities caused by the glass cloth are not generated on the surface.

上述絕緣樹脂膜可以積層於基材之一表面上之積層膜之狀態而使用。上述積層膜包含上述基材、及積層於上述基材之一表面上之上述絕緣樹脂膜。 The insulating resin film can be used in a state in which a laminated film on one surface of a substrate is laminated. The laminated film includes the substrate and the insulating resin film laminated on one surface of the substrate.

作為上述積層膜之上述基材,可列舉:聚對苯二甲酸乙二酯膜及聚對苯二甲酸丁二酯膜等聚酯樹脂膜、聚乙烯膜及聚丙烯膜等烯烴樹脂膜、聚醯亞胺樹脂膜、銅箔及鋁箔等金屬箔等。上述基材之表面視需要亦可進行脫模處理。 The base material of the laminated film may be a polyester resin film such as a polyethylene terephthalate film or a polybutylene terephthalate film, an olefin resin film such as a polyethylene film or a polypropylene film, or a poly A metal foil such as a ruthenium imide resin film, a copper foil or an aluminum foil. The surface of the above substrate may also be subjected to a mold release treatment as needed.

於使用上述絕緣樹脂膜作為電路之絕緣層之情形時,藉由絕緣樹脂膜形成之絕緣層之厚度較佳為形成電路之導體層(金屬層)之厚度以上。藉由上述絕緣樹脂膜形成之絕緣層之厚度較佳為5μm以上,且較佳為200μm以下。 In the case where the above-mentioned insulating resin film is used as the insulating layer of the circuit, the thickness of the insulating layer formed of the insulating resin film is preferably equal to or greater than the thickness of the conductor layer (metal layer) forming the circuit. The thickness of the insulating layer formed of the insulating resin film is preferably 5 μm or more, and preferably 200 μm or less.

藉由對上述絕緣樹脂膜之上述第1主面進行粗化處理,可獲得經粗化處理之預硬化物。於上述絕緣樹脂膜為預硬化前之絕緣樹脂膜之情形時,較佳為藉由在進行上述絕緣樹脂膜之硬化之後對上述第1主面進行粗化處理,而獲得經粗化處理之預硬化物。藉由對上述絕緣樹脂膜之上述第1主面進行膨潤處理,並於膨潤處理後進行粗化處理,可獲得經膨潤處理及粗化處理之預硬化物。為了於上述預硬化物之表面形成微細之凹凸,對於上述預硬化物,較佳為於粗化處理前進行膨潤處理。對於上述預硬化物,較佳為於預硬化後且粗化處理前進行膨潤處理。但,上述預硬化物亦可未必進行膨潤處理。於上述絕緣樹脂膜中,對上述第1主面進行上述膨潤處理及上述粗化處理。 The pre-cured material subjected to the roughening treatment can be obtained by subjecting the first main surface of the insulating resin film to a roughening treatment. In the case where the insulating resin film is an insulating resin film before pre-curing, it is preferable to obtain a roughening treatment by roughening the first main surface after curing the insulating resin film. Hardened material. The first main surface of the insulating resin film is subjected to a swelling treatment, and after the swelling treatment, the roughening treatment is performed to obtain a pre-cured product which is subjected to a swelling treatment and a roughening treatment. In order to form fine unevenness on the surface of the pre-cured material, it is preferred that the pre-cured material is subjected to a swelling treatment before the roughening treatment. It is preferable that the pre-cured material is subjected to a swelling treatment after pre-hardening and before the roughening treatment. However, the pre-cured material may not necessarily be subjected to swelling treatment. In the insulating resin film, the swelling treatment and the roughening treatment are performed on the first main surface.

為了獲得上述預硬化後之絕緣樹脂膜,較佳為將預硬化前之絕緣樹脂膜藉由自上述第2主面側進行層壓而積層於積層對象構件上 後,進行上述預硬化前之絕緣樹脂膜之硬化。層壓溫度較佳為55℃以上,更佳為65℃以上,且較佳為130℃以下,更佳為120℃以下。層壓壓力較佳為0.5MPa以上,更佳為0.8MPa以上,且較佳為1.5MPa以下,更佳為1.2MPa以下。 In order to obtain the above-mentioned pre-hardened insulating resin film, it is preferable that the insulating resin film before pre-hardening is laminated on the laminated object member by laminating from the second main surface side. Thereafter, the insulating resin film before the pre-hardening is cured. The lamination temperature is preferably 55 ° C or higher, more preferably 65 ° C or higher, and is preferably 130 ° C or lower, more preferably 120 ° C or lower. The lamination pressure is preferably 0.5 MPa or more, more preferably 0.8 MPa or more, and is preferably 1.5 MPa or less, more preferably 1.2 MPa or less.

將上述預硬化前之絕緣樹脂膜藉由進行層壓而積層之方法可使用公知之方法,而無特別限定。例如,於電路基板等積層對象構件上積層上述預硬化前之絕緣樹脂膜,並使用加壓式層壓機進行加壓。此時,可進行加熱,亦可不進行加熱。其次,使用平行板壓製式加熱壓製機,對上述積層對象構件與上述預硬化前之絕緣樹脂膜進行加熱及加壓。藉由加熱及加壓,使上述預硬化前之絕緣樹脂膜預硬化,而可形成預硬化後之絕緣樹脂膜。上述加熱之溫度及上述加壓之壓力可進行適當變更,而並無特別限定。 A method of laminating the insulating resin film before the pre-hardening by lamination may be a known method, and is not particularly limited. For example, the insulating resin film before the pre-hardening is laminated on a laminated object member such as a circuit board, and pressurized by a pressure laminator. At this time, heating may or may not be performed. Next, the laminated object member and the insulating resin film before the pre-hardening are heated and pressurized by a parallel plate pressing type heating press. The insulating resin film before the pre-hardening is pre-cured by heating and pressurization to form an insulating resin film which is pre-cured. The temperature of the heating and the pressure of the pressurization can be appropriately changed, and are not particularly limited.

較佳為於將上述預硬化前之絕緣樹脂膜積層於上述積層對象構件上之後,於160~200℃下進行20分鐘~180分鐘之加熱處理。藉由加熱處理,使上述預硬化前之絕緣樹脂膜預硬化,而可獲得預硬化後之絕緣樹脂膜。於使用上述積層膜之情形時,積層膜之基材可於形成上述預硬化後之絕緣樹脂膜之前去除,亦可於形成上述預硬化後之絕緣樹脂膜之後去除。藉由在此種條件下積層後進行粗化處理,可獲得經粗化處理之預硬化物,且可於預硬化物之表面形成微細之凹凸。預硬化物較佳為於較最終硬化物之玻璃轉移溫度低10~60℃之溫度下進行硬化。 Preferably, the insulating resin film before the pre-hardening is laminated on the layered member, and then heat-treated at 160 to 200 ° C for 20 minutes to 180 minutes. The insulating resin film before the pre-hardening is pre-cured by heat treatment to obtain an insulating resin film which is pre-cured. In the case of using the above laminated film, the substrate of the laminated film may be removed before the pre-cured insulating resin film is formed, or may be removed after the pre-cured insulating resin film is formed. By performing the roughening treatment after laminating under such conditions, the roughened pre-cured material can be obtained, and fine irregularities can be formed on the surface of the pre-cured material. The pre-cured material is preferably hardened at a temperature 10 to 60 ° C lower than the glass transition temperature of the final cured product.

視需要亦可於輥層壓後進行平行板加熱壓製機,而提高上述預硬化後之絕緣樹脂膜之表面之平滑性。例如,可使用平行板加熱壓製機,利用厚度1mm之不鏽鋼板對上述積層對象構件與上述預硬化前之絕緣樹脂膜之積層物進行加熱及加壓。 The parallel plate heating press may be carried out after the roll lamination as needed to improve the smoothness of the surface of the pre-cured insulating resin film. For example, a parallel plate heating press can be used to heat and press the laminate of the above-mentioned laminated object member and the above-mentioned pre-hardened insulating resin film with a stainless steel plate having a thickness of 1 mm.

再者,作為加熱加壓式輥層壓機等加壓式層壓機、及平行板加 熱壓製機等壓製機,可使用市售之裝置。利用輥層壓機所進行之積層較佳為於真空狀態下進行。輥層壓機之滾筒之材質可自表面為軟質之橡膠滾筒、及表面為硬質之金屬滾筒等中適當選擇。平行板加熱壓製機之平板之材質為硬質之金屬。 Furthermore, as a pressure laminating machine such as a heat and pressure roll laminator, and a parallel plate addition A press such as a hot press can be used as a commercially available device. The layering by the roll laminator is preferably carried out under vacuum. The material of the roller of the roll laminator can be appropriately selected from the case of a rubber roller having a soft surface and a metal roller having a hard surface. The flat plate of the parallel plate heating press is made of a hard metal.

於輥層壓機之滾筒與上述積層對象構件、上述絕緣樹脂膜之間、或於平行板加熱壓製機之平板與上述積層對象構件、上述絕緣樹脂膜之間,可使用具有脫模功能之膜,例如鋁箔、銅箔、聚酯樹脂膜、氟樹脂系膜等。 A film having a mold release function can be used between the roll of the roll laminator, the laminated object member, the insulating resin film, or the flat plate of the parallel plate heating press, the laminated object member, and the insulating resin film. For example, an aluminum foil, a copper foil, a polyester resin film, a fluororesin film, or the like.

為了提高上述積層對象構件與上述絕緣樹脂膜之密接性,可使用橡膠片材等具有柔軟性之材料。 In order to improve the adhesion between the laminated object member and the insulating resin film, a material having flexibility such as a rubber sheet can be used.

形成上述預硬化後之絕緣樹脂膜之步驟較佳為將上述預硬化前之絕緣樹脂膜自上述第2主面側積層於上述積層對象構件上,並使用輥層壓機進行加壓後,使用平行板壓製式加熱壓製機進行加熱及加壓,而形成預硬化後之絕緣樹脂膜之步驟。又,於使用上述積層膜之情形時,較佳為於使用輥層壓機進行加壓之後且使用平行板壓製式加熱壓製機進行加熱及加壓之前,或於使用輥層壓機進行加壓之後且使用平行板壓製式加熱壓製機進行加熱及加壓之後去除上述基材。 In the step of forming the pre-cured insulating resin film, the insulating resin film before the pre-hardening is laminated on the laminated object member from the second main surface side, and is pressurized by a roll laminator. The parallel plate pressing type heating press performs heating and pressurization to form a pre-hardened insulating resin film. Further, in the case of using the above laminated film, it is preferred to pressurize after using a roll laminator and before heating and pressurizing using a parallel plate press type heating press, or pressurizing using a roll laminator Thereafter, the substrate was removed after heating and pressurization using a parallel plate press type heating press.

本發明之積層體包括:硬化物,其可藉由使用藉由對上述絕緣樹脂膜之上述第1主面進行粗化處理而獲得之預硬化物,使該預硬化物硬化而獲得;及金屬層,其積層於該硬化物之經粗化處理之表面。該硬化物與該金屬層之接著強度較佳為4.9N/cm以上,更佳為5.9N/cm以上。上述金屬層較佳為銅層,更佳為鍍銅層。 The laminate of the present invention includes a cured product obtained by curing a pre-cured material obtained by subjecting the first main surface of the insulating resin film to a roughening treatment to harden the pre-cured material; and a metal a layer laminated on the roughened surface of the cured product. The bonding strength between the cured product and the metal layer is preferably 4.9 N/cm or more, more preferably 5.9 N/cm or more. The metal layer is preferably a copper layer, more preferably a copper plating layer.

(印刷配線板) (printed wiring board)

上述絕緣樹脂膜可較佳地用於在印刷配線板上形成絕緣層。上述印刷配線板例如可藉由將上述絕緣樹脂膜加熱加壓成形而獲得。 The above insulating resin film can be preferably used for forming an insulating layer on a printed wiring board. The printed wiring board can be obtained, for example, by heating and press-molding the above-mentioned insulating resin film.

對於上述絕緣樹脂膜,可於單面或兩面上積層金屬箔。積層上 述絕緣樹脂膜與金屬箔之方法並無特別限定,可採用公知之方法。例如可使用平行板壓製機或輥層壓機等裝置,一面進行加熱或一面於未加熱之狀態下進行加壓,一面於金屬箔上積層上述絕緣樹脂膜。 For the above insulating resin film, a metal foil can be laminated on one side or both sides. On the layer The method of the insulating resin film and the metal foil is not particularly limited, and a known method can be employed. For example, the insulating resin film may be laminated on the metal foil by heating or while pressing without heating in a device such as a parallel plate press or a roll laminator.

(銅箔積層板及多層基板) (copper foil laminate and multilayer substrate)

上述絕緣樹脂膜可較佳地用於獲得銅箔積層板。作為上述銅箔積層板之一例,可列舉包含銅箔、及積層於該銅箔之一表面上之上述絕緣膜之銅箔積層板。 The above insulating resin film can be preferably used for obtaining a copper foil laminate. An example of the copper foil laminate is a copper foil laminate including a copper foil and the insulating film laminated on one surface of the copper foil.

上述銅箔積層板之上述銅箔之厚度並無特別限定。上述銅箔之厚度較佳為1μm以上,且較佳為50μm以下。又,為了提高使絕緣樹脂膜硬化而成之硬化物(絕緣層)與銅箔之接著強度,較佳為上述銅箔於表面上具有微細之凹凸。凹凸之形成方法並無特別限定。作為上述凹凸之形成方法,可列舉利用使用公知之藥液之處理之形成方法等。 The thickness of the copper foil of the copper foil laminate is not particularly limited. The thickness of the copper foil is preferably 1 μm or more, and preferably 50 μm or less. Further, in order to increase the adhesion strength between the cured product (insulating layer) and the copper foil obtained by curing the insulating resin film, it is preferable that the copper foil has fine irregularities on the surface. The method of forming the unevenness is not particularly limited. Examples of the method for forming the unevenness include a method of forming a treatment using a known chemical liquid, and the like.

又,上述絕緣樹脂膜可較佳地用於獲得多層基板。作為上述多層基板之一例,可列舉包含電路基板、及積層於該電路基板之表面上之絕緣層之多層基板。該多層基板之絕緣層係藉由對上述絕緣樹脂膜進行粗化處理並使其硬化而形成。上述絕緣層較佳為積層於電路基板之設置有電路之表面上。較佳為上述絕緣層之一部分嵌入上述電路間。 Further, the above insulating resin film can be preferably used for obtaining a multilayer substrate. An example of the multilayer substrate is a multilayer substrate including a circuit board and an insulating layer laminated on the surface of the circuit board. The insulating layer of the multilayer substrate is formed by subjecting the insulating resin film to a roughening treatment and curing. Preferably, the insulating layer is laminated on a surface of the circuit substrate on which the circuit is provided. Preferably, one of the insulating layers is partially embedded between the circuits.

對於上述多層基板,較佳為對上述絕緣層之與積層有上述電路基板之表面相反之表面進行粗化處理。粗化處理方法可使用先前公知之粗化處理方法,而並無特別限定。上述絕緣層之表面可於粗化處理之前進行膨潤處理。 In the multilayer substrate, it is preferable that the surface of the insulating layer opposite to the surface on which the circuit board is laminated is roughened. The roughening treatment method may be a conventionally known roughening treatment method, and is not particularly limited. The surface of the above insulating layer may be subjected to a swelling treatment before the roughening treatment.

又,較佳為上述多層基板進而包含積層於上述絕緣層之經粗化處理之表面上之鍍銅層。 Further, it is preferable that the multilayer substrate further includes a copper plating layer laminated on the roughened surface of the insulating layer.

又,作為上述多層基板之其他例,可列舉包含電路基板、積層於該電路基板之表面上之絕緣層、及積層於該絕緣層之與積層有上述 電路基板之表面相反之表面上之銅箔的多層基板。較佳為上述絕緣層及上述銅箔係藉由使用包含銅箔、及積層於該銅箔之一表面上之絕緣樹脂膜之銅箔積層板,對上述絕緣樹脂膜進行粗化處理並使其硬化而形成。進而,上述銅箔較佳為經蝕刻處理,且為銅電路。 Further, as another example of the multilayer substrate, an insulating layer including a circuit board, a layer laminated on a surface of the circuit board, and a laminate layer formed on the insulating layer may be used. A multilayer substrate of copper foil on the surface opposite to the surface of the circuit substrate. Preferably, in the insulating layer and the copper foil, the insulating resin film is roughened by using a copper foil laminate including a copper foil and an insulating resin film laminated on one surface of the copper foil. Formed by hardening. Further, the copper foil is preferably etched and is a copper circuit.

作為上述多層基板之其他例,可列舉包含電路基板、及積層於該電路基板之表面上之複數個絕緣層之多層基板。配置於上述電路基板上之上述複數層絕緣層中之至少1層係藉由對上述絕緣樹脂膜進行粗化處理並使其硬化而形成。較佳為上述多層基板進而包含積層於藉由對上述絕緣樹脂膜進行粗化處理並使其硬化而形成之上述絕緣層之至少一表面上的電路。 As another example of the multilayer substrate, a multilayer substrate including a circuit board and a plurality of insulating layers laminated on the surface of the circuit board can be cited. At least one of the plurality of insulating layers disposed on the circuit board is formed by subjecting the insulating resin film to a roughening treatment and curing. It is preferable that the multilayer substrate further includes a circuit laminated on at least one surface of the insulating layer formed by roughening and hardening the insulating resin film.

圖2中,以部分切口正面剖面圖示意性地表示使用本發明之一實施形態之絕緣樹脂膜之多層基板。 In Fig. 2, a multilayer substrate in which an insulating resin film according to an embodiment of the present invention is used is schematically shown in a front cross-sectional view of a partial slit.

於圖2所示之多層基板11中,於電路基板12之上表面12a上積層有複數層絕緣層13~16。絕緣層13~16為絕緣層。於電路基板12之上表面12a之一部分區域中形成有金屬層17。複數層絕緣層13~16中,位於與電路基板12側相反之外側之表面的絕緣層16以外之絕緣層13~15於上表面之一部分區域中形成有金屬層17。金屬層17為電路。於電路基板12與絕緣層13之間、及所積層之絕緣層13~16之各層間分別配置有金屬層17。下方之金屬層17與上方之金屬層17係藉由未圖示之導孔連接及通孔連接中之至少一者而相互連接。 In the multilayer substrate 11 shown in FIG. 2, a plurality of insulating layers 13 to 16 are laminated on the upper surface 12a of the circuit substrate 12. The insulating layers 13 to 16 are insulating layers. A metal layer 17 is formed in a partial region of the upper surface 12a of the circuit substrate 12. Among the plurality of insulating layers 13 to 16, the insulating layers 13 to 15 other than the insulating layer 16 on the surface opposite to the side on the side opposite to the circuit board 12 are formed with a metal layer 17 in a partial region of the upper surface. Metal layer 17 is an electrical circuit. The metal layer 17 is disposed between the circuit board 12 and the insulating layer 13 and between the respective layers of the insulating layers 13 to 16 of the stacked layers. The lower metal layer 17 and the upper metal layer 17 are connected to each other by at least one of a via connection and a via connection (not shown).

於多層基板11中,絕緣層13~16係藉由對本發明之絕緣樹脂膜進行粗化處理並使其硬化而形成。再者,於圖2中,絕緣層13~16係以略圖而表示。本實施形態中,由於絕緣層13~16之表面經粗化處理,故而於絕緣層13~16之表面形成有未圖示之微細之孔。又,金屬層17到達至微細之孔之內部。又,於多層基板11中,可減小金屬層17之寬度方向之尺寸(L)、及未形成金屬層17之部分之寬度方向之尺寸(S)。 又,於多層基板11中,於未藉由未圖示之導孔連接及通孔連接而連接之上方之金屬層與下方之金屬層之間賦予有良好之絕緣可靠性。 In the multilayer substrate 11, the insulating layers 13 to 16 are formed by roughening and hardening the insulating resin film of the present invention. Further, in Fig. 2, the insulating layers 13 to 16 are shown in a schematic view. In the present embodiment, since the surfaces of the insulating layers 13 to 16 are roughened, fine holes (not shown) are formed on the surfaces of the insulating layers 13 to 16. Further, the metal layer 17 reaches the inside of the fine hole. Further, in the multilayer substrate 11, the dimension (L) in the width direction of the metal layer 17 and the dimension (S) in the width direction of the portion in which the metal layer 17 is not formed can be reduced. Further, in the multilayer substrate 11, good insulation reliability is imparted between the metal layer which is not connected by the via connection and the via connection (not shown) and the underlying metal layer.

(粗化處理及膨潤處理) (roughening and swelling treatment)

作為上述膨潤處理之方法,例如可使用藉由以乙二醇等為主成分之化合物之水溶液或有機溶劑分散液等對絕緣樹脂膜進行處理之方法。膨潤處理中所使用之膨潤液一般含有鹼作為pH值調整劑等。較佳為膨潤液中含有氫氧化鈉。具體而言,例如上述膨潤處理係藉由使用40重量%乙二醇水溶液等,於處理溫度30~85℃下對硬化物處理1~30分鐘而進行。上述膨潤處理之溫度較佳為50~85℃之範圍內。若上述膨潤處理之溫度過低,則有膨潤處理時需要較長之時間,進而硬化物與金屬層之接著強度變低之傾向。 As a method of the swelling treatment, for example, a method of treating an insulating resin film with an aqueous solution of a compound containing a main component such as ethylene glycol or an organic solvent dispersion can be used. The swelling liquid used in the swelling treatment generally contains a base as a pH adjuster or the like. Preferably, the swelling liquid contains sodium hydroxide. Specifically, for example, the swelling treatment is carried out by treating the cured product at a treatment temperature of 30 to 85 ° C for 1 to 30 minutes by using a 40% by weight aqueous solution of ethylene glycol or the like. The temperature of the above swelling treatment is preferably in the range of 50 to 85 °C. When the temperature of the swelling treatment is too low, it takes a long time for the swelling treatment, and the subsequent strength of the cured product and the metal layer tends to be low.

於上述粗化處理時,例如可使用錳化合物、鉻化合物或過硫酸化合物等化學氧化劑等。該等化學氧化劑可於添加水或有機溶劑後以水溶液或有機溶劑分散液之形式使用。粗化處理中所使用之粗化液一般含有鹼作為pH值調整劑等。較佳為粗化液中含有氫氧化鈉。 At the time of the above roughening treatment, for example, a chemical oxidizing agent such as a manganese compound, a chromium compound or a persulfate compound can be used. The chemical oxidizing agents may be used in the form of an aqueous solution or an organic solvent dispersion after adding water or an organic solvent. The roughening liquid used in the roughening treatment generally contains a base as a pH adjuster or the like. Preferably, the roughening liquid contains sodium hydroxide.

作為上述錳化合物,可列舉過錳酸鉀及過錳酸鈉等。作為上述鉻化合物,可列舉重鉻酸鉀及無水鉻酸鉀等。作為上述過硫酸化合物,可列舉過硫酸鈉、過硫酸鉀及過硫酸銨等。 Examples of the manganese compound include potassium permanganate and sodium permanganate. Examples of the chromium compound include potassium dichromate and anhydrous potassium chromate. Examples of the persulfuric acid compound include sodium persulfate, potassium persulfate, and ammonium persulfate.

上述粗化處理之方法並無特別限定。作為上述粗化處理之方法,例如較佳為使用30~90g/L過錳酸或過錳酸鹽溶液及30~90g/L氫氧化鈉溶液,於處理溫度30~85℃及1~30分鐘之條件下對硬化物進行處理之方法。該粗化處理較佳為進行1次或2次。上述粗化處理之溫度較佳為50~85℃之範圍內。 The method of the above roughening treatment is not particularly limited. As a method of the above roughening treatment, for example, it is preferred to use 30-90 g/L permanganic acid or permanganate solution and 30-90 g/L sodium hydroxide solution at a treatment temperature of 30 to 85 ° C and 1 to 30 minutes. A method of treating a cured product under the conditions. The roughening treatment is preferably carried out once or twice. The temperature of the above roughening treatment is preferably in the range of 50 to 85 °C.

硬化物之表面之算術平均粗糙度Ra較佳為20nm以上,且較佳為200nm以下。於此情形時,硬化物與金屬層或配線之接著強度變高,進而於絕緣層之表面形成更微細之配線。 The arithmetic mean roughness Ra of the surface of the cured product is preferably 20 nm or more, and preferably 200 nm or less. In this case, the bonding strength between the cured product and the metal layer or the wiring becomes high, and further finer wiring is formed on the surface of the insulating layer.

以下,藉由列舉實施例及比較例具體說明本發明。本發明並不限定於下述實施例。 Hereinafter, the present invention will be specifically described by way of examples and comparative examples. The invention is not limited to the following examples.

(熱硬化性樹脂) (thermosetting resin)

雙酚A型環氧樹脂(相當於上述第3環氧樹脂,日本化藥公司製造之「RE410S」,環氧當量178) Bisphenol A type epoxy resin (corresponding to the above third epoxy resin, "RE410S" manufactured by Nippon Kayaku Co., Ltd., epoxy equivalent 178)

聯苯型環氧樹脂1(僅為聯苯型環氧樹脂1時相當於上述第1環氧樹脂,且相當於上述第3環氧樹脂,日本化藥公司製造之「NC3000」,環氧當量275) The biphenyl type epoxy resin 1 (only the biphenyl type epoxy resin 1 corresponds to the above first epoxy resin, and corresponds to the above third epoxy resin, "NC3000" manufactured by Nippon Kayaku Co., Ltd., epoxy equivalent 275)

聯苯型環氧樹脂2(僅為聯苯型環氧樹脂2時相當於上述第1環氧樹脂,且相當於上述第3環氧樹脂,日本化藥公司製造之「NC3000H」,環氧當量288) The biphenyl type epoxy resin 2 (only the biphenyl type epoxy resin 2 corresponds to the above first epoxy resin, and corresponds to the above third epoxy resin, "NC3000H" manufactured by Nippon Kayaku Co., Ltd., epoxy equivalent 288)

※聯苯型環氧樹脂1與聯苯型環氧樹脂2之併用亦相當於2種以上之上述第1環氧樹脂 * The combination of biphenyl type epoxy resin 1 and biphenyl type epoxy resin 2 also corresponds to two or more of the above first epoxy resins.

含有橡膠骨架之環氧樹脂1(僅為含有橡膠骨架之環氧樹脂時相當於上述第1環氧樹脂,且相當於上述第2環氧樹脂,Daicel Chemical公司製造之「AT-501」,環氧當量1054,含有苯乙烯-丁二烯骨架) Epoxy resin 1 containing a rubber skeleton (only the first epoxy resin corresponding to the epoxy resin containing a rubber skeleton, and corresponding to the second epoxy resin, "AT-501" manufactured by Daicel Chemical Co., Ltd., ring Oxygen equivalent 1054, containing styrene-butadiene skeleton)

含有橡膠骨架之環氧樹脂2(僅為含有橡膠骨架之環氧樹脂時相當於上述第1環氧樹脂,且相當於上述第2環氧樹脂,Daicel Chemical公司製造之「PB3600」,環氧當量200,含有丁二烯骨架) Epoxy resin 2 containing a rubber skeleton (corresponding to the first epoxy resin in the case of an epoxy resin containing a rubber skeleton, and corresponding to the second epoxy resin, "PB3600" manufactured by Daicel Chemical Co., Ltd., epoxy equivalent 200, containing butadiene skeleton)

(硬化劑) (hardener)

含有胺基三骨架甲酚酚醛清漆硬化劑之溶液(DIC公司製造之「LA3018-50P」,當量151,固形物成分之含量為50重量%,丙二醇單甲醚之含量為50重量%) Amine-based a solution of a skeleton cresol novolac hardener ("LA3018-50P" manufactured by DIC Corporation, equivalent 151, content of solid content is 50% by weight, and content of propylene glycol monomethyl ether is 50% by weight)

(硬化促進劑) (hardening accelerator)

咪唑化合物(四國化成公司製造之「2P4MZ」) Imidazole compound ("2P4MZ" manufactured by Shikoku Chemicals Co., Ltd.)

(二氧化矽) (cerium oxide)

含有二氧化矽之漿料(Admatechs公司製造之「SC2050HNK」,二氧化矽之平均粒徑為0.5μm,二氧化矽藉由胺基矽烷進行了表面處理,二氧化矽之含量為70重量%,環己酮之含量為30重量%) a slurry containing cerium oxide ("SC2050HNK" manufactured by Admatechs Co., Ltd., the average particle diameter of cerium oxide is 0.5 μm, and the cerium oxide is surface-treated with an amino decane, and the content of cerium oxide is 70% by weight. The content of cyclohexanone is 30% by weight)

(熱塑性樹脂) (thermoplastic resin)

含有醯亞胺樹脂之溶液(日本高度紙工業公司製造之「SOXR-C」,固形物成分之含量為20重量%,環戊酮之含量為80重量%) A solution containing a quinone imine resin ("SOXR-C" manufactured by Japan Kotami Paper Co., Ltd., the content of the solid content is 20% by weight, and the content of cyclopentanone is 80% by weight)

(實施例1) (Example 1)

將聯苯型環氧樹脂1(日本化藥公司製造之「NC3000」)13.3重量份、含有橡膠骨架之環氧樹脂1(Daicel Chemical公司製造之「AT-501」)1.5重量份、含有胺基三骨架甲酚酚醛清漆硬化劑之溶液(DIC公司製造之「LA3018-50P」)10重量份(以固形物成分計為5重量份)、咪唑化合物(四國化成公司製造之「2P4MZ」)0.1重量份、含有二氧化矽之漿料(Admatechs公司製造之「SC2050HNK」)69.9重量份(以固形物成分計為48.9重量份)、及含有醯亞胺樹脂之溶液(日本高度紙工業公司製造之「SOXR-C」)5.2重量份(以固形物成分計為1重量份)進行混合,於常溫下進行攪拌直至成為均勻之溶液,獲得樹脂組合物。 13.3 parts by weight of a biphenyl type epoxy resin 1 ("NC3000" manufactured by Nippon Kayaku Co., Ltd.), 1.5 parts by weight of an epoxy resin 1 ("AT-501" manufactured by Daicel Chemical Co., Ltd.) containing a rubber skeleton, and an amine group. three 10 parts by weight of a solution of the skeleton cresol novolak curing agent ("LA3018-50P" manufactured by DIC Corporation) (5 parts by weight based on the solid content), and an imidazole compound ("2P4MZ" manufactured by Shikoku Kasei Co., Ltd.) 0.1 weight 69.9 parts by weight of a slurry containing cerium oxide ("SC2050HNK" manufactured by Admatech Co., Ltd.) (48.9 parts by weight based on the solid content), and a solution containing a quinone imine resin (manufactured by Japan Kotami Paper Co., Ltd.) 5.2 parts by weight (1 part by weight of the solid content) of the SOXR-C") was mixed, and the mixture was stirred at normal temperature until it became a homogeneous solution, and the resin composition was obtained.

準備經脫模處理之透明之第2聚對苯二甲酸乙二酯(PET)膜(Lintec公司製造之「PET5011」,厚度50μm)。於該PET膜之脫模處理面上,以乾燥後之厚度成為50μm之方式,利用模嘴塗機塗佈所獲得之樹脂組合物之後,於60~120℃下使其乾燥,獲得預硬化前之絕緣樹脂膜。其後,於該預硬化前之絕緣樹脂膜之表面上,以60℃熱層壓第1之PET膜(東麗公司製造之「PET T60」,厚度38μm)作為保護膜,獲得積層膜。關於上述積層膜,預硬化前之絕緣樹脂膜於第2之PET膜(PET 5011)側具有第2主面,於第1之PET膜(PET T60)側具有經粗化處理之面即第1主面。 A transparent polyethylene terephthalate (PET) film ("PET5011" manufactured by Lintec Co., Ltd., thickness: 50 μm) which was subjected to release treatment was prepared. On the release-treated surface of the PET film, the obtained resin composition was applied by a die coater so as to have a thickness of 50 μm after drying, and then dried at 60 to 120 ° C to obtain a pre-hardened surface. Insulating resin film. Then, the first PET film ("PET T60" manufactured by Toray Industries, Ltd., thickness: 38 μm) was thermally laminated on the surface of the pre-cured insulating resin film at 60 ° C to obtain a laminated film. In the laminated film, the insulating resin film before pre-curing has a second main surface on the second PET film (PET 5011) side, and the first roughened surface on the first PET film (PET T60) side. Main face.

包含預硬化後之絕緣樹脂膜之積層體之製作 Fabrication of a laminate comprising a pre-hardened insulating resin film

將所獲得之積層膜在剝離第2之PET膜後,自預硬化前之絕緣樹脂膜之第2主面側設置於環氧玻璃基板(FR-4,利昌工業公司製造之「CS-3665」)上。使用真空加壓式層壓機(名機製作所公司製造之「MVLP-500」),將包含環氧玻璃基板、預硬化前之絕緣樹脂膜、及第1之PET膜之積層體於層壓壓力0.5MPa及層壓溫度70℃之條件下進行20秒之加壓加熱,進而於壓製壓力1MPa及壓製溫度90℃之條件下進行40秒之加壓加熱,獲得包含環氧玻璃基板、預硬化前之絕緣樹脂膜、及第1之PET膜之積層體。其後,將第1之PET膜剝離,於烘箱內實施140℃30分鐘之預硬化。如此,獲得環氧玻璃基板與預硬化後之絕緣樹脂膜之積層體A。所獲得之預硬化後之絕緣樹脂膜於環氧玻璃基板側具有第2主面,於與環氧玻璃基板相反之側具有經粗化處理之面即第1主面。 After peeling off the second PET film, the second film surface of the insulating resin film before pre-hardening is placed on the epoxy glass substrate (FR-4, "CS-3665" manufactured by Lichang Industrial Co., Ltd.). )on. The laminated body including the epoxy glass substrate, the pre-hardened insulating resin film, and the first PET film was laminated pressure using a vacuum pressure laminating machine ("MVLP-500" manufactured by Nihon Seisakusho Co., Ltd.). 0.5 MPa and a laminating temperature of 70 ° C were subjected to pressure heating for 20 seconds, and further subjected to pressure heating at a pressing pressure of 1 MPa and a pressing temperature of 90 ° C for 40 seconds to obtain a glass-impregnated substrate, pre-hardened. The insulating resin film and the laminated body of the first PET film. Thereafter, the first PET film was peeled off, and pre-curing was performed in an oven at 140 ° C for 30 minutes. Thus, the laminated body A of the epoxy glass substrate and the pre-hardened insulating resin film was obtained. The obtained pre-cured insulating resin film has a second main surface on the side of the epoxy glass substrate, and has a first main surface which is a roughened surface on the side opposite to the epoxy glass substrate.

(實施例2~15及比較例1、2) (Examples 2 to 15 and Comparative Examples 1 and 2)

將使用之調配成分之種類及調配量以下述表1~3所示之方式進行變更,除此以外,與實施例1同樣地獲得樹脂組合物、包含第1、第2之PET膜及預硬化前之絕緣樹脂膜之積層膜、及包含環氧玻璃基板與預硬化後之絕緣樹脂膜之積層體A。 A resin composition, a first and second PET film, and a pre-hardened layer were obtained in the same manner as in Example 1 except that the types and the amounts of the components to be used were changed as shown in the following Tables 1 to 3. The laminated film of the former insulating resin film and the laminated body A containing the epoxy glass substrate and the pre-hardened insulating resin film.

(評價) (Evaluation)

(1)二氧化矽之存在狀態 (1) The existence state of cerium oxide

對於所獲得之積層體A,進行預硬化後之絕緣樹脂膜之剖面觀察。以下述判定標準對預硬化後之絕緣樹脂膜中之二氧化矽之存在狀態1進行判定。再者,預硬化後之絕緣樹脂膜中之二氧化矽之存在狀態與預硬化前之絕緣樹脂膜中之二氧化矽之存在狀態一致。 With respect to the obtained laminate A, a cross-sectional observation of the pre-hardened insulating resin film was performed. The existence state 1 of the cerium oxide in the pre-hardened insulating resin film was determined by the following criteria. Further, the state of presence of cerium oxide in the pre-hardened insulating resin film coincides with the state of presence of cerium oxide in the insulating resin film before pre-hardening.

[二氧化矽之存在狀態1之判定標準] [Determination criteria for the presence of cerium oxide 1]

A:以經粗化處理之面即第1主面側之表面部分之厚度0.3μm之 第1區域100重量%中的二氧化矽之含量少於除第1區域以外之第2區域100重量%中的二氧化矽之含量之狀態,使上述二氧化矽偏向分佈 A: the thickness of the surface portion of the first main surface side which is the roughened surface is 0.3 μm The content of cerium oxide in 100% by weight of the first region is less than the content of cerium oxide in 100% by weight of the second region other than the first region, and the cerium oxide is distributed to the surface.

B:不符合A之判定標準 B: Does not meet the criteria for A

(2)第1、第2區域中之二氧化矽之存在狀態 (2) The existence state of cerium oxide in the first and second regions

對於所獲得之預硬化前之絕緣樹脂膜,藉由對剖面進行SEM-EDX分析(scanning electron microscope-energy dispersive X-ray analysis,掃描式電子顯微鏡-能量色散X射線分析),而測定經粗化處理之面即第1主面側之表面部分之厚度0.3μm之第1區域中的二氧化矽之含量、及除第1區域以外之第2區域中的二氧化矽之含量。再者,預硬化前之絕緣樹脂膜中之第1、第2區域中的二氧化矽之存在狀態與預硬化後之絕緣樹脂膜中之第1、第2區域中的二氧化矽之存在狀態一致。 The obtained insulating resin film before pre-hardening was subjected to coarsening by SEM-EDX analysis (scanning electron microscope-energy dispersive X-ray analysis). The surface to be treated is the content of cerium oxide in the first region having a thickness of 0.3 μm on the surface of the first main surface side, and the content of cerium oxide in the second region other than the first region. Further, the presence of cerium oxide in the first and second regions in the insulating resin film before pre-hardening and the presence of cerium oxide in the first and second regions in the insulating resin film after pre-curing Consistent.

(3)平均線膨脹率 (3) Average linear expansion ratio

將所獲得之絕緣樹脂膜於190℃下加熱3小時使其硬化,獲得硬化物A。將所獲得之硬化物A切成3mm×25mm之大小。使用線膨脹率計(Seiko Instruments公司製造之「TMA/SS120C」),於拉伸荷重3.3×10-2N、升溫速度5℃/min之條件下,測定經裁出之硬化物於25~150℃下之平均線膨脹率。以下述標準對平均線膨脹率進行判定。 The obtained insulating resin film was heated at 190 ° C for 3 hours to be hardened to obtain a cured product A. The obtained cured product A was cut into a size of 3 mm × 25 mm. Using a linear expansion ratio meter ("TMA/SS120C" manufactured by Seiko Instruments Co., Ltd.), the cut cured product was measured at 25 to 150 under the conditions of a tensile load of 3.3 × 10 -2 N and a heating rate of 5 ° C / min. The average linear expansion ratio at °C. The average linear expansion ratio was judged by the following criteria.

[平均線膨脹率之判定標準] [Criteria for determining the average linear expansion rate]

○○:25ppm以下 ○○: 25ppm or less

○:超過25ppm且為40ppm/℃以下 ○: more than 25 ppm and less than 40 ppm/°C

×:超過40ppm/℃ ×: more than 40ppm/°C

(4)算術平均粗糙度Ra (4) Arithmetic mean roughness Ra

將上述積層體A中之預硬化後之絕緣樹脂膜進行下述(a)膨潤處理之後,進行下述(b)過錳酸鹽處理即粗化處理。 After the pre-hardened insulating resin film in the layered product A is subjected to the following (a) swelling treatment, the following (b) permanganate treatment, that is, a roughening treatment, is performed.

(a)膨潤處理: (a) Swelling treatment:

於60℃之膨潤液(Atotech Japan公司製造之「Swelling Dip Securiganth P」)中放入上述積層體A,振盪20分鐘。其後,以純水洗淨。 The laminate A was placed in a swelling solution ("Swelling Dip Securiganth P" manufactured by Atotech Japan Co., Ltd.) at 60 ° C and shaken for 20 minutes. Thereafter, it is washed with pure water.

(b)過錳酸鹽處理: (b) Permanganate treatment:

於80℃之過錳酸鉀(Atotech Japan公司製造之「Concentrate Compact CP」)粗化水溶液中放入上述積層體,振盪20分鐘,於環氧玻璃基板上獲得經粗化處理之預硬化物。將所獲得之預硬化物利用23℃之洗淨液(Atotech Japan公司製造之「Reduction Securiganth P」)洗淨2分鐘後,以純水進一步洗淨。 The layered product was placed in a roughened aqueous solution of potassium permanganate ("Concentrate Compact CP" manufactured by Atotech Japan Co., Ltd.) at 80 ° C, and shaken for 20 minutes to obtain a roughened pre-cured product on a glass substrate. The pre-cured product obtained was washed with a 23 ° C cleaning solution ("Reduction Securiganth P" manufactured by Atotech Japan Co., Ltd.) for 2 minutes, and then further washed with pure water.

其後,依據JIS B0601-1994,測定預硬化物之經粗化處理之表面之算術平均粗糙度Ra。以下述標準對算術平均粗糙度Ra進行判定。 Thereafter, the arithmetic mean roughness Ra of the roughened surface of the pre-cured material was measured in accordance with JIS B0601-1994. The arithmetic mean roughness Ra is determined by the following criteria.

[算術平均粗糙度Ra之判定標準] [Determination of Arithmetic Mean Roughness Ra]

○:20nm以上且200nm以下 ○: 20 nm or more and 200 nm or less

×:未達20nm或超過200nm ×: less than 20 nm or more than 200 nm

(5)接著強度(剝離強度) (5) Subsequent strength (peel strength)

於上述(4)算術平均粗糙度Ra之評價後,對環氧玻璃基板上之經粗化處理之預硬化物進行下述(c)鍍銅處理。 After the evaluation of the above (4) arithmetic mean roughness Ra, the roughened pre-cured material on the epoxy glass substrate was subjected to the following (c) copper plating treatment.

(c)鍍銅處理: (c) Copper plating:

將上述預硬化物之表面利用60℃之鹼清潔液(Atotech Japan公司製造之「Cleaner Securiganth 902」)處理5分鐘,並脫脂洗淨。洗淨後,將上述預硬化物利用25℃之預浸液(Atotech Japan公司製造之「Pre-dip Neoganth B」)處理2分鐘。其後,將上述預硬化物利用40℃之活化劑溶液(Atotech Japan公司製造之「Activator Neoganth 834」)處理5分鐘,並添加鈀觸媒。其次,利用30℃之還原液(Atotech Japan 公司製造之「Reducer Neoganth WA」)將預硬化物處理5分鐘。 The surface of the pre-cured material was treated with an alkali cleaning solution (Cleaner Securiganth 902, manufactured by Atotech Japan Co., Ltd.) at 60 ° C for 5 minutes, and degreased and washed. After washing, the pre-cured material was treated with a prepreg at 25 ° C ("Pre-dip Neoganth B" manufactured by Atotech Japan Co., Ltd.) for 2 minutes. Thereafter, the pre-cured material was treated with an activator solution (Activator Neoganth 834) manufactured by Atotech Japan Co., Ltd. at 40 ° C for 5 minutes, and a palladium catalyst was added thereto. Next, the pre-cured material was treated for 5 minutes using a reducing solution ("Reducer Neoganth WA" manufactured by Atotech Japan Co., Ltd.) at 30 °C.

其次,將上述預硬化物加入至化學銅液(Atotech Japan公司製造 之「Basic Printganth MSK-DK」、「Copper Printganth MSK」、「Stabilizer Printganth MSK」及「Reducer Cu」)中,實施非電解鍍敷直至鍍敷厚度成為0.5μm左右。於非電解鍍敷後,為了去除殘留之氫氣,於120℃之溫度下實施30分鐘之退火。至非電解鍍敷步驟為止之所有步驟係以燒杯刻度(beaker scale)將處理液設為2L,一面振盪預硬化物一面實施。 Next, the pre-cured material is added to a chemical copper liquid (manufactured by Atotech Japan) In "Basic Printganth MSK-DK", "Copper Printganth MSK", "Stabilizer Printganth MSK" and "Reducer Cu", electroless plating is performed until the plating thickness is about 0.5 μm. After electroless plating, in order to remove residual hydrogen, annealing was performed at a temperature of 120 ° C for 30 minutes. All the steps up to the electroless plating step were carried out while shaking the pre-cured material while setting the treatment liquid to 2 L on a beaker scale.

其次,對經非電解鍍敷處理之預硬化物實施電解鍍敷直至鍍敷厚度成為25μm。作為電解鍍銅而使用硫酸銅溶液(和光純藥工業公司製造之「硫酸銅五水合物」、和光純藥工業公司製造之「硫酸」、Atotech Japan公司製造之「Basic Leveler Cupracid HL」、Atotech Japan公司製造之「修正劑Cupracid GS」),並通入0.6A/cm2之電流。鍍銅處理後,將預硬化物於190℃下加熱90分鐘,使其硬化,獲得形成有鍍銅層之硬化物。 Next, the pre-cured material subjected to the electroless plating treatment was subjected to electrolytic plating until the plating thickness became 25 μm. Copper sulphate solution ("copper sulphate pentoxide" manufactured by Wako Pure Chemical Industries, Ltd., "Sulfuric acid" manufactured by Wako Pure Chemical Industries, Ltd., "Basic Leveler Cupracid HL" manufactured by Atotech Japan Co., Ltd., Atotech Japan The company's "corrector Cupracid GS") is supplied with a current of 0.6 A/cm 2 . After the copper plating treatment, the pre-cured material was heated at 190 ° C for 90 minutes to be hardened to obtain a cured product in which a copper plating layer was formed.

[接著強度之測定方法] [Method of measuring the strength]

於上述形成有鍍銅層之硬化物之鍍銅層之表面切出寬度為10mm之切口。其後,使用拉伸試驗機(島津製作所公司製造之「Autograph」),於十字頭速度為5mm/min之條件下,測定鍍銅層與硬化物之接著強度(剝離強度)。以下述標準對接著強度進行判定。 A slit having a width of 10 mm was cut out on the surface of the copper plating layer on which the hardened layer of the copper plating layer was formed. Then, the tensile strength (peeling strength) of the copper plating layer and the cured product was measured under the conditions of a crosshead speed of 5 mm/min using a tensile tester ("Autograph" manufactured by Shimadzu Corporation). The subsequent strength was judged by the following criteria.

[接著強度之判定標準] [Subsequent strength criteria]

○○:5.9N/cm以上 ○○: 5.9 N/cm or more

○:4.9N/cm以上且未達5.9N/cm ○: 4.9 N/cm or more and less than 5.9 N/cm

×:未達4.9N/cm ×: not up to 4.9 N/cm

將結果示於下述表1~3。 The results are shown in Tables 1 to 3 below.

1‧‧‧絕緣樹脂膜 1‧‧‧Insulating resin film

1a‧‧‧第1主面 1a‧‧‧1st main face

1b‧‧‧第2主面 1b‧‧‧2nd main face

2‧‧‧二氧化矽 2‧‧‧2 cerium oxide

6‧‧‧積層對象構件 6‧‧‧Multilayer object components

6a‧‧‧表面 6a‧‧‧ surface

R1‧‧‧第1區域 R1‧‧‧1st area

R2‧‧‧第2區域 R2‧‧‧2nd area

Claims (10)

一種絕緣樹脂膜,其係進行粗化處理而使用者,且具有第1主面與第2主面,上述第1主面為經粗化處理之面,含有環氧樹脂、硬化劑、及二氧化矽,以經粗化處理之面即上述第1主面側之表面部分之厚度0.3μm之第1區域100重量%中的上述二氧化矽之含量少於除上述第1區域以外之第2區域100重量%中的上述二氧化矽之含量之狀態使上述二氧化矽偏向分佈,上述第2區域100重量%中之上述二氧化矽之含量多於30重量%。 An insulating resin film which is subjected to a roughening treatment and has a first main surface and a second main surface, wherein the first main surface is a roughened surface, and contains an epoxy resin, a hardener, and two In the cerium oxide, the content of the cerium oxide in the 100% by weight of the first region having a thickness of 0.3 μm on the surface of the first main surface side, which is the roughened surface, is less than the second portion other than the first region. The cerium oxide is distributed in a state in which the content of the cerium oxide in the region of 100% by weight is distributed, and the content of the cerium oxide in 100% by weight of the second region is more than 30% by weight. 如請求項1之絕緣樹脂膜,其中上述第2區域100重量%中之上述二氧化矽之含量多於60重量%。 The insulating resin film according to claim 1, wherein the content of the above-mentioned ceria in 100% by weight of the second region is more than 60% by weight. 如請求項1或2之絕緣樹脂膜,其中上述第1區域100重量%中之上述二氧化矽之含量較上述第2區域100重量%中之上述二氧化矽之含量少10重量%以上。 The insulating resin film according to claim 1 or 2, wherein the content of the cerium oxide in 100% by weight of the first region is 10% by weight or more lower than the content of the cerium oxide in 100% by weight of the second region. 如請求項1或2之絕緣樹脂膜,其中上述環氧樹脂包含2種以上之第1環氧樹脂,2種以上之上述第1環氧樹脂具有相同之結構單元,且2種以上之上述第1環氧樹脂之上述結構單元之重複數不同,或者上述環氧樹脂包含具有碳-碳不飽和鍵之第2環氧樹脂、及不具有碳-碳不飽和鍵之第3環氧樹脂。 The insulating resin film according to claim 1 or 2, wherein the epoxy resin comprises two or more first epoxy resins, and the two or more first epoxy resins have the same structural unit, and two or more of the above The epoxy resin has a different number of repeating units of the above structural unit, or the epoxy resin includes a second epoxy resin having a carbon-carbon unsaturated bond and a third epoxy resin having no carbon-carbon unsaturated bond. 如請求項1或2之絕緣樹脂膜,其中絕緣樹脂膜之整體100重量%中,上述二氧化矽之含量為30重量%以上且85重量%以下。 The insulating resin film according to claim 1 or 2, wherein the content of the cerium oxide is 30% by weight or more and 85% by weight or less based on 100% by weight of the entire insulating resin film. 如請求項5之絕緣樹脂膜,其中絕緣樹脂膜之整體100重量%中,上述二氧化矽之含量為60重量%以上且85重量%以下。 The insulating resin film of claim 5, wherein the content of the cerium oxide is 60% by weight or more and 85% by weight or less based on 100% by weight of the entire insulating resin film. 如請求項1或2之絕緣樹脂膜,其中上述第1主面係經膨潤處理且於膨潤處理後經粗化處理之表面。 The insulating resin film according to claim 1 or 2, wherein the first main surface is subjected to a swelling treatment and is subjected to a roughening treatment after the swelling treatment. 一種預硬化物,其可藉由對如請求項1或2之絕緣樹脂膜之上述第1主面進行粗化處理而獲得。 A pre-cured material obtained by subjecting the first main surface of the insulating resin film of claim 1 or 2 to a roughening treatment. 一種積層體,其包含:硬化物,其可藉由使用藉由對如請求項1或2之絕緣樹脂膜之上述第1主面進行粗化處理而獲得之預硬化物,使上述預硬化物硬化而獲得;及金屬層,其積層於上述硬化物之經粗化處理之表面上。 A laminate comprising: a cured product which can be obtained by using a pre-cured product obtained by subjecting the first main surface of the insulating resin film of claim 1 or 2 to a roughening treatment to obtain a pre-cured product Obtained by hardening; and a metal layer laminated on the roughened surface of the hardened material. 一種多層基板,其包含:電路基板、及配置於上述電路基板上之絕緣層,且上述絕緣層係藉由對如請求項1或2之絕緣樹脂膜進行粗化處理並使其硬化而形成。 A multilayer substrate comprising: a circuit board; and an insulating layer disposed on the circuit board, wherein the insulating layer is formed by roughening and hardening the insulating resin film according to claim 1 or 2.
TW102123043A 2012-09-20 2013-06-27 Insulating resin film, pre-cured material, laminated body and multilayer substrate TWI612537B (en)

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