TW201402226A - Methods and apparatuses for roll-on coating - Google Patents

Abstract

Coating rollers accepting liquid media provide liquid chemicals to substrates for depositing a thin coating layer on the flat substrates, such as semiconductors or panels. The liquid delivery system can control the flow and the pressure of the liquid to achieve optimum process condition with minimum excess waste. Rollers with non-uniform distribution of liquid media can provide a non-uniform thickness profile on the substrates, which can be used to compensate for the non-uniformity of subsequent processes. The liquid media is cooled to a life-preserving temperature while shielded from the thermal energy heating the substrates to prevent degrading the liquid media. Physical barrier or temperature barrier can be established in vicinities of the rollers to further limit exposing the liquid media to high temperature.

Description

Apparatus and method for rolling coating

The present invention is an apparatus and method for roll coating, and more particularly to an apparatus and method for rolling coating of a coated substrate.

In an optoelectronic device, light is converted to electrical energy via a photoelectric effect and the generated charge is collected via a PN junction of the semiconductor substrate to form a current. The PN junction can be formed by diffusion doping to a large amount of semiconductor material. The diffusion process can be carried out in a doped vapor environment, such as phosphine or phosphorus oxychloride (POCl3), or the doping vapor is released through a solid source. Another process is to apply a doped layer to the substrate and, after heating or igniting, promote diffusion of dopants from the doped layer to the substrate. Another important process for solar cells is film deposition, such as passivation coating or absorber coating.

In-line processes such as on-line doping diffusion or on-line film deposition are the preferred processes for reducing cost and toxicity. For example, in a typical in-line diffusion process, a coating containing dopants is applied to the substrate, and then dopants are diffused from the doped layer to the substrate in the furnace. The doping source may be in a liquid or gaseous form, may or may not contain a solvent, and may or may not contain a carrier gas, and is sprayed, dip coated, spin coated or doped chemically coagulated. . The uniformity and doping levels of such systems are difficult to control, especially for textured surfaces. In addition, these processes often require Excessive amounts of chemicals lead to increased production costs.

The present invention relates to a method and apparatus for coating a substrate, such as coating a thin film or doped layer on a single crystal or polycrystalline germanium substrate. In some embodiments, the present invention discloses a roll coating process for coating a substrate surface coating, such as a passivation coating or an absorber layer, or after the high temperature annealing, the dopant diffuses to A doped layer of the substrate to form a PN junction of the solar cell.

In some embodiments, the present invention discloses a roll-on substrate coating system comprising at least one coating drum body capable of receiving a fluid and migrating fluid to the surface of the drum body. After contacting the surface of a substrate, the fluid on the surface of the coating cylinder will be transferred to the surface of the substrate and a coating formed. The fluid may comprise a solution mixture having an active chemical which forms a solid film layer on the substrate upon drying. The fluid may include a doping chemistry and is continuously supplied to the coating drum body to form a plurality of substrate surface coatings through rolling contact. The dopant chemistry can include boron, arsenic or phosphorous chemicals in the form of a solution or mixture.

In one embodiment, the present invention discloses a fluid supply roller body that includes a cylindrical structure that spans a large substrate or some smaller substrate. The substrate may be disposed above and below the drum body or sandwiched between the two drum bodies and moved as the drum body rotates. The fluid supply drum body can be configured to receive fluid flow at one end and supply fluid to the surface of the drum body. The drum body can be hollow or have internal channels to direct fluid flow along the drum body. Table of the drum body The face may have a plurality of attachment holes distributed along the length of the core of the drum body that communicate with the internal channels to promote fluid transfer to the exterior surface of the drum body. In one embodiment, the drum body may further comprise a soft porous layer covering the outer surface of the drum body and being wetted by the fluid on the surface of the drum body, for example, by fluid flowing out through the holes distributed along the length of the core of the drum body. . After contacting a substrate, the wet porous layer can bring the fluid to the surface of the substrate, effectively coating the fluid layer on the surface of the substrate. In one embodiment, the fluid supply roller body is configured to form a uniform coating throughout the surface of the substrate, for example, through a hole uniformly distributed along the length of the core of the roller body, or through a porous body having a uniform pore density along the length of the roller body. Layer implementation. In another embodiment, the configuration of the drum body is tailored to deliver fluid, effectively providing different coating thicknesses at different locations of the substrate, such as through non-uniformly distributed pores or porous layers having a non-uniform pore density. This thickness non-uniformity can be used to compensate for non-uniformities in subsequent processes, such as non-uniformity of the annealing temperature in the diffusion furnace during push doping.

In one embodiment, a temperature control device, such as a heater or cooler, can be used to heat or cool the fluid, whether at the fluid reservoir, the fluid delivery route, and/or the fluid inside the drum body. In addition, the heater/cooler can be used to heat/cool the drum body and/or to heat/cool the substrate, such as in a coating process.

In some embodiments, the present invention discloses systems and methods for surface coating with highly sensitive chemicals, such as chemicals that are susceptible to degradation at high processing temperatures. Thus, in some embodiments, the present invention provides a hot zone on a substrate, such as Such as: to promote the reaction of chemical substances, and to provide a cooling zone at a slightly distant location, for example: to maintain the life cycle of chemicals, or to prevent chemical substances from degrading due to exposure to high temperatures.

In some embodiments, the hot zone is created by one or more heaters, such as an infrared heater or a resistive heater, and is disposed adjacent the substrate to heat the substrate without heating the liquid chemical. The cooling zone is formed by one or more temperature control devices, such as a cooling device, a Peltiers device, or a refrigeration device, and is disposed in a liquid storage area or in an area adjacent to the coating drum body. To reduce the chance of exposure to high temperatures.

In some embodiments, the present invention discloses a plurality of systems including a heating substrate mechanism; one or more coating roller bodies that contact the substrate and receive a liquid while permitting transfer of liquid to the surface of the substrate through rolling contact; The temperature control device corresponds to the liquid so that the temperature of the liquid is lower than the indoor temperature, preferably below 10 ° C, such as 7 ° C. The coating drum body can include a cylindrical structure that spans a large substrate or some smaller substrate. The substrate may be disposed above and below the drum body or sandwiched between the two drum bodies and moved as the drum body rotates. The coating drum body can be configured to accept fluid from the fluid reservoir, from other drum bodies, or from a guiding mechanism and carry it to the surface of the coating drum body. The surface of the coating drum body may comprise a soft porous layer covering the outer surface of the drum body and being wetted by fluid from the surface of the drum body, for example, fluid from the associated fluid reservoir. After contacting a substrate, the wet porous layer can bring the fluid to the surface of the substrate. The fluid layer is effectively applied to the surface of the substrate. In one embodiment, the fluid supply roller body is configured to form a uniform coating throughout the surface of the substrate, such as through a hole in the porous layer that is evenly distributed along the length of the core of the roller body. In another embodiment, the configuration of the drum body is tailored to deliver fluid, effectively providing different coating thicknesses at different portions of the substrate, such as through non-uniformly distributed pores or porous layers having non-uniform pore density. . This thickness non-uniformity can be used to compensate for non-uniformities in subsequent processes, such as non-uniformity of the annealing temperature in the diffusion furnace during push-doping.

In some embodiments, a heating device, such as a heater, can be used to heat the substrate. It is best to use local heating, for example, to avoid heat transfer to the liquid reservoir. In addition, a heater/cooler can be utilized to heat/cool the coated drum body. For example, an additional heater or cooler can be provided to heat or cool the coating drum body to ensure that the fluid has the proper temperature when it reaches the substrate. The temperature is preferably lower than the temperature of the substrate to prevent degradation of the coating drum body (such as a porous layer) or degradation of highly sensitive chemicals, which in some cases may not be exposed to high temperatures for extended periods of time. in. In order not to affect the progress of the coating process, it is preferred to use an intermediate temperature.

In some embodiments, a temperature control device, such as a cooler, can be used to cool the fluid, whether at the fluid reservoir, the fluid delivery route, and/or at the coating drum body. Preferably, the cooler is disposed adjacent the coating drum body to prevent fluid from being exposed to the heating zone. For example, the distance between the cooler and the coating drum body can be less than 10 centimeters, preferably less than 5 centimeters, thereby effectively preventing fluid in the fluid reservoir from being heated.

In some embodiments, a stirring mechanism is included to balance the temperature at the fluid reservoir. The agitation mechanism may include one or more agitating paddles in conjunction with a rotating mechanism to achieve the effect of agitating the fluid. The agitation mechanism can include a circulation mechanism that circulates fluid through the cooling device. Also, a filter may be added, for example, the filtration is affected by heating.

In some embodiments, the present invention discloses an in-line coating system comprising a plurality of spin coating drum bodies for coating a substrate. A coating drum body may be disposed above the substrate to coat the top surface of the substrate. The coating drum body may be disposed under the substrate to coat the bottom surface of the substrate. The substrate can be sandwiched between the two roller bodies to simultaneously coat the top and bottom surfaces of the substrate. The coating cylinder body can simultaneously act as a transport mechanism to continuously move a plurality of substrates from the input end of the in-line coating system to the output end. The in-line coating system can further include a method of controlling the amount of doping and carrier fluid on the surface of the substrate, such as the addition of a drying drum body that is inherently liquid absorbing.

In some embodiments, the in-line coating system further includes additional coating mechanisms, such as spray nozzles, to provide additional fluid to the substrate surface. The in-line coating system may further include an additional drum wetting mechanism, such as providing an external conveyor belt to transfer fluid to the exterior surface of the drum body, or a basin filled with fluid on the drum body.

In some embodiments, the present invention discloses an integrated in-line process system including an in-line coating system for coating a doped layer on a substrate and an in-line furnace annealing system to drive dopants from the surface The coating is moved into the substrate. The configuration of the coating system and the furnace annealing system may be adjacent to each other or separated, for example: through transport line. The system may also include a pre-processing step such as ozone treatment or chemical oxidation before the program.

The present invention relates to a method and system for uniformly depositing materials on a planar substrate, such as a photovoltaic substrate, and forming a thin layer by a roll-on technique. The thin layer can be a deposited layer of any liquid material. For example, the thin layer may include phosphorus or boron and is deposited on the semiconductor layer to form an emitter after subsequent processing. In a thin film photovoltaic process, the thin layer can also be an absorbing layer such as cadmium sulfide or zinc sulfide.

The invention further relates to the manufacture of solar cells, such as the fabrication of crystalline solar cells, including the process and system for improving doped coatings, and the fabrication of photo-emitter junctions by doping diffusion. Preferably, the substrate is a single crystal or polycrystalline or polycrystalline substrate, although other types of semiconductor substrates may be used. The invention can provide high performance joints, effectively reduce costs and improve the performance of photovoltaic cells and related equipment. In some embodiments, the substrate is first exposed to a fluid-containing surface of a compound comprising a dopant such as phosphorus, arsenic, or boron, such as phosphoric acid (H3PO4). A doped coating will be formed on the surface of the substrate after exposure. Subsequently, the doped coating may be placed in a high temperature environment to cause the dopant to diffuse into the substrate or to anneal at high temperatures in the furnace, for example, between 600 ° C and 1000 ° C.

In another embodiment, the present invention discloses a deposition process employing a liquid roll-on technique, such as an absorber layer in a thin film photovoltaic, including substrate heating control of a deposition operation to form a coating fluid layer, such as by crystallization.

1A is a schematic view showing a process flow of an apparatus and method for rolling coating according to a preferred embodiment of the present invention. A substrate 10 is provided that can include a variety of layers, such as a semiconductor layer. Next, after the substrate 10 passes through the liquid coating process 15, a droplet-free liquid coating 11 is formed on the substrate 10. Layer 11 can effect a liquid coating on the substrate by contacting a fluid surface, followed by placement in a high temperature environment such as drying or annealing to form coating 17. For example, a coating may be formed using a solvent containing cadmium chloride (CdCl 2 ) or cadmium iodide (CdI 2 ) followed by a sulfur (S)-containing environment to form cadmium sulfide (CdS). In addition, a variety of coating processes can be performed to form coatings 18A and 18B. Layers 18A/18B can be annealed 14 in a high temperature environment to form composite coating 19.

1B is a schematic view showing another process flow of the apparatus and method for rolling coating according to a preferred embodiment of the present invention. A substrate 10 is provided, which is preferably a semiconductor substrate such as a single crystal or polycrystalline germanium substrate. Further, the substrate 10 may include a layer of a semiconductor material disposed on the carrier substrate. The carrier substrate can also be non-semiconductor, such as W, ITO or metal mirror material. In addition, other processes may be performed before the substrate 10 is placed in the doping environment. For example, the effect of protecting the substrate can be achieved by forming an oxide passivation layer on the germanium substrate, or the hydrophilic layer can be coated on the surface of the substrate 10, thereby improving the wettability of the surface of the substrate. The passivation layer is more resistant to the phenomenon that the dopant is excessively concentrated on the surface of the semiconductor substrate. For example, after the high-temperature diffusion process, dopants may be excessively concentrated in the interface of the doped layer, which may affect the quality and function of the PN junction. Therefore, the passivation layer can avoid the problem that the surface of the semiconductor substrate is highly concentrated. The buffer layer can also serve as an interface layer between the dopant and the substrate. The coating of the hybrid layer provides adhesion as well as surface preparation.

Next, the substrate 10 is placed in a doping coating process 15 whereby a doped layer 11 is formed on the substrate 10. The doped layer 11 is preferably a solid doped source comprising suitable dopants for forming the PN junction of the semiconductor substrate 10. The doped layer 11 can be formed by contacting the surface of the fluid, whereby a liquid coating is produced on the substrate, followed by drying in a high temperature environment. The coating process includes doped precursors such as phosphorus-containing chemicals (phosphoric acid, phosphine), boron-containing chemicals, or arsenic-containing chemicals. The doped precursor can flow in a liquid or semi-liquid form, with or without a solvent or carrier gas. Other sources of doping in liquid form, including solutions and mixtures, may also be employed.

In some embodiments, phosphorus is used as a dopant material, such as a phosphoric acid solution. For example, a phosphoric acid solution is placed in the core portion of the drum body to cause the roller body to form a phosphoric acid coating when the substrate is rolled. In addition, any of the phosphoric acid that is not attached to the substrate can be captured using an exhaust device, a cover, and a capture box.

Next, the substrate may be dried 11* and annealed 16 in a diffusion furnace, or the substrate may be directly annealed without a drying step. The annealing temperature may be approximately 800 to 900 ° C, causing phosphorus to enter the substrate to form doped layer 12.

In some embodiments, the present invention discloses a system for coating a substrate comprising a rotating drum body that provides fluid through the inner core to wet the outer surface. In some embodiments, the system of the present invention comprises a plurality of rotating flexible porous drum bodies for deposition of a liquid medium wherein the drum system is wetted by a liquid medium provided at one end of the drum body. Rotary soft porous drum body can be used simultaneously The substrate is transported, for example, by an on-line handling mechanism.

Advantages of the present invention include the ability to combine substrate handling in an in-line process that includes a deposition process. The substrate is fed through a continuous rotary drum body via a single wire or a plurality of parallel wire systems, wherein the roller body can be disposed on the top and/or bottom of the substrate. When the substrate is rotated, the substrate is simultaneously driven to move linearly from the input end of the on-line process system toward the output end. A liquid medium is provided to one end of the drum body and wets the outer surface through the internal passage of the drum body. Thus, as the substrate moves through the device, an ultra-thin liquid layer will be placed onto the substrate.

2A and 2B are conceptual schematic diagrams of the basic apparatus for a rolling coating apparatus and method according to a preferred embodiment of the present invention. A medium 24 is provided to the container 25. The drum bodies 21 and 22 are provided with a soft porous layer and are in contact with the medium 24, whereby uniform wetting is obtained via their material properties. The distribution of the medium on the substrate 26 can be controlled by the contact pressure generated by the difference in the spacing between the top drum body 21 and the bottom drum body 22, whereby a uniform film is deposited on the top and bottom surfaces of the substrate 26. Of course, it is also possible to have only the drum body 22 and coat only the bottom surface of the substrate 26. When the drum bodies 21 and 22 are rotated, in addition to obtaining a liquid coating from the wetted surface of the drum body, the substrate can be simultaneously transported from one end of the apparatus to the other end.

In some embodiments, the porous drum system includes a rigid core and is coated with a layer of porous material, such as a sponge material. The deposition of the rigid core across the substrate preferably has sufficient stiffness and horizontal flatness to ensure uniform deposition of the coating. The core material can be metal, alloy, carbon, glass, ceramic or plastic such as PVC, PP or carbon Fluorine compound.

The porous material may be a polymer or polymer foam or sponge, such as PVA, polyurethane, and polyolefin, or may be any porous material to allow passage of the liquid medium. In addition, the porous material may be a soft material to loosen the horizontal flatness requirements for the rigid core.

In some embodiments, the system includes one or more temperature control devices, such as heaters or coolers, to provide substrate or chemical thermal energy. Some chemicals may require higher temperatures (eg, above room temperature) to successfully coat the coating, so the chemical can be heated through the heater to the desired temperature. Some chemicals may require lower temperatures (eg, below room temperature) to coat or preserve their chemical properties so that the chemistry can be cooled through the chiller to the desired temperature. For example, the heater/cooler can be placed in a chemical storage, on a liquid transfer line, or on a drum body to directly heat or cool the chemical. In addition, it is also possible to arrange the heater/cooler at or adjacent to the drum body to heat/cool the surface of the drum body to heat or cool their surfaces as they reach the surface of the drum body.

It is also possible to directly heat or cool the substrate. For example, it is used for the deposition of solid salt to form an absorption layer similar to cadmium sulfide and zinc sulfide in the manufacture of thin film solar cells. The deposited chemical can accelerate the chemical reaction, dry the liquid chemical, or anneal through heating. Cloth layer. The heater may be disposed on or adjacent to the substrate to heat the surface of the substrate, including disposing the IR or UV lamp on top of the substrate and/or The bottom, or between the drum bodies. In addition, heaters and coolers can be used simultaneously. For example, in the deposition of the absorber layer, the chemical is preferably cooled, for example, by a cooler disposed at a chemical storage or transport line or adjacent to maintain a temperature below or about room temperature to maintain the chemical. Life cycle. The chemical is then heated, for example, after deposition onto the substrate to form an absorber layer, followed by IR heating of the substrate.

In some embodiments, the present invention discloses methods and systems for coating substrates with high sensitivity chemicals, such as: exposure to chemicals that decay at elevated temperatures, such as crystallization. In some embodiments, the chemical will be cooled to a low temperature, such as below 15 °C, but preferably below 10 °C, such as about 7 °C. The temperature of the cooling depends on the chemical. A cooling device 27, such as a refrigeration device, is disposed in the liquid medium 24 to provide a low temperature at which the medium 24 is fixed. Alternatively, a stirring mechanism, such as paddle 28, may be added to thereby average the temperature within the liquid container 25 to prevent hot spots from occurring.

In some embodiments, the application of the media 24 is performed at elevated temperatures. The heater 29A can be used to heat the substrate 26. On the other hand, thermal energy can be directed to the substrate 26 by the addition of the shield 23 to prevent thermal energy from entering the liquid medium 24. Other heaters 29B may also be added for subsequent processes such as drying or annealing. The heater may be disposed adjacent to the drum body and direct thermal energy to the substrate via the shield, thereby heating the substrate. The heater may also be disposed between successive drum bodies and disposed at the top of the substrate, at the bottom of the substrate, or on both sides.

3A-3B are diagrams of a device and a method for rolling coating according to a preferred embodiment of the present invention Schematic diagram of various heater configurations for the coating system. Figure 3A shows a schematic view of the roller body 32 contacting the fluid medium 34, the fluid medium being distributed to the outer surface of the drum body. When contacting substrate 36, the fluid medium will transfer to the surface of the contact and form a liquid layer. Rotating the drum body will make it easier to distribute the fluid to the surface of the substrate. Cooling device 37 is used to maintain medium 34 to the desired temperature, preferably at a temperature that prevents media 34 from decaying.

One or more heaters 39A may be disposed in front of the drum body 32 to heat the coated surface of the substrate 36. Shield 33 can be used to help liquid medium 34 avoid thermal energy. Additionally, one or more heaters 39C may be included to heat the substrate 36, for example, from the back. A sensor 30 for sensing the substrate may also be included to activate the heater 39C when the substrate enters. This prevents the heater 39C from heating the liquid medium when there is no substrate. In addition, a heater 39B may also be included for adjustment after coating.

As shown in FIG. 3B, one or more heaters 39E may be included to heat the junction between the substrate 36 and the drum body 32. Heater 39E can provide thermal energy at the point of operation, i.e., where thermal energy is required for coating. The heater can be a light heater. Alternatively, a resistive heater, such as heater 39D, can be used and disposed along the back side of substrate 36, and inductor 33 can be used to activate heater 39D as substrate 36 enters.

4A-4C are schematic diagrams showing the configuration of a temperature control device for a rolling coating apparatus and method according to a preferred embodiment of the present invention. Figure 4A shows a drum body 77 that is coated with a foam material or cured foam material 71 over a substantial portion of the exterior surface. Such as a heater or cold The temperature control device of the damper 82 can be disposed around the chemical delivery line, such as around the pipeline, to heat/cool the chemistry to the desired temperature. The heater/cooler 81 may be disposed at the periphery of the outer surface of the drum body, such as at the exposed end of the drum body, or under the foam layer 71 along the drum body 77. The heater/cooler 83 may also be disposed inside the drum body 77 to heat/cool the drum body or to heat/cool the chemicals that reach the drum body. Any combination of heater and cooler can be used.

Fig. 4B shows a heater/cooler 84 disposed inside the drum body 77, such as mounted on the inner surface of the hollow drum body. Figure 4C shows a heater/cooler 85 disposed intermediate the drum body 77 to heat/cool the chemicals in the drum body and chemical bag 86.

5A-5C are schematic views of a coating process for a roll coating apparatus and method according to a preferred embodiment of the present invention. FIG. 5A shows the drum body 61 that takes the liquid medium 64 and distributes it to the porous layer 65. During direct contact with the substrate 66, the liquid medium is transferred to the surface of the substrate and a layer 64* is formed. The drum body 61 provides a uniform coating via rotation and simultaneously urges the substrate to move forward. Figures 5B and 5C show the drum body 61 that contacts the substrate 66 in an indirect manner, assisted by the centered drum bodies 62, 62A and 62B.

The uniformity of the coating can be controlled by adjusting the liquid medium on the surface of the drum body. In general, a liquid medium uniformly distributed along the length of the drum body can produce a uniform coating on the substrate perpendicular to the direction of the path of travel. Use multiple drum bodies It will further improve the uniformity of the direction of travel along the path.

6A-6D are schematic views of a drum body for uniform deposition of the apparatus and method for roll coating according to a preferred embodiment of the present invention. Figure 6A shows a drum body 71A having perforations 73 evenly distributed along the length of the drum body. When the liquid medium 74 enters one end of the drum body 71A (for example, the end, or near the end), the uniformly distributed perforations can promote uniform distribution of the liquid medium on the surface of the substrate. The perforations shown are also evenly distributed along the circumference of the drum body, and other configurations can also achieve the same effect, such as multiple perforated tubes. Fig. 6B shows a roller body 71B including a porous layer 77 which is uniformly distributed in a pore size or a pore density 78 along its length. The porous layer 77 can be a foam or sponge material, the pores 78 of which are characterized by pore size or pore density. The porous layer 77 may be a liquid permeable layer whose permeability is evenly distributed along the length of the drum body. Through the evenly distributed liquid medium, the coating 70 on the large substrate 76 can be evenly distributed over the entire width of the substrate (Fig. 6C), or the coating 70* can be evenly distributed over the plurality of substrates 76*, and also along The length of the drum body is configured.

7A-7I are schematic views of a drum body for non-uniform deposition of the apparatus and method for roll coating according to a preferred embodiment of the present invention. Figure 7A shows a drum body 71C having perforations 72 and 73A/73B distributed along the length of the drum body. More liquid can be transferred to the edge of the substrate via the larger holes 73A/73B at the edge of the drum body than the smaller hole 72 in the middle portion, thereby forming a thicker coating at the edges. In fact, any desired coating thickness distribution can be perforated via proper distribution Realized by 72/73A/73B. In another configuration, FIG. 7B shows the drum body 71D including the porous layer 77D, and the pore size or pore density 79/78A/78B along the length of the porous layer 77D is non-uniformly distributed. Likewise, the holes 77D can produce any desired coating thickness profile, such as the distribution 75 on the substrate 76 (Fig. 7C), or at the outer edge compared to the thinner coating 75* on the inner substrate 76*. The substrate 76** has a thicker coating 75** (Fig. 7D).

7E-7I are schematic diagrams showing the setting of the drum body for the rolling coating apparatus and method of the preferred embodiment of the present invention. In FIG. 7E, the drum body includes a cylindrical core 161A and a porous layer 167A covering the outer surface of the core 161A. The core 161A and the porous layer 167A have a basic arrangement of uniform distribution, for example, the core 161A is a straight cylinder, and the porous layer 167A has an equal thickness. The distribution of the liquid can be set via the perforation distribution in the core 161A or along the pore density of the barrel body length porous layer 167A.

In Fig. 7F, the drum body includes a cylindrical core 161B having a concave surface, and a corresponding porous layer 167B having a thickness intermediate to the end portion. The complete structure of the drum body (e.g., including core 171B and porous layer 176B) preferably forms a straight cylindrical surface to facilitate rolling contact with the substrate. Such a configuration will cause the coating thickness to vary along the length of the drum body. For example, in the case of high compression, the ends will be squeezed to a greater extent than the intermediate portion, causing more liquid to be applied to the ends. In the case of low compression, more fluid will be stored in the middle (due to the thicker porous layer), causing more fluid to be in the middle. In FIG. 7G, the drum body includes A cylindrical core 161C having a concave (or convex) surface, and a corresponding porous layer 167C having a thinner intermediate portion than the end portion.

In Fig. 7H, the drum body includes a cylindrical core 161D having a straight surface, and a concave porous layer 167D having a thinner intermediate portion than the end portion. With such a configuration, in the case of a planar substrate, the ends will be more squeezed than the intermediate portions, causing more fluid to be applied to the ends. In Fig. 7I, the drum body includes a cylindrical core 161E having a straight surface, and a concave porous layer 167E having an intermediate thickness thicker than the end portion. These structural configurations are all exemplary. Of course, other structural configurations can be used to achieve the desired (uniform or non-uniform) coating thickness setting along the length of the drum body. For example, the diameter of the drum body may vary.

In some embodiments, the design across the doped non-uniform thickness setting is used to compensate for non-uniformities in subsequent processes. The doping diffusion process is an example. After the doped layer is applied to the substrate, the substrate will be annealed in a furnace to drive the dopant into the substrate. For the in-line process, after doping is applied, the substrate will enter the in-line furnace in the same arrangement (horizontal) as when doping. It is necessary to pay a high price in order to make the temperature in the furnace completely uniform in the direction perpendicular to the traveling path of the substrate. For example, the temperature at the edge will be lower than the center portion due to boundary heat loss. Such temperature differences may result in substrates having different locations within the furnace having different qualities, for example, more dopants will diffuse to the substrate at the center of the furnace than at the edges.

The roller body proposed in the present case has a core design of various perforation types, and the uneven temperature coating on the substrate can compensate for this temperature difference phenomenon, thereby after the fire Produce consistent quality. For example, more chemicals can be applied at the edge of the substrate doping to provide a thicker coating than the substrate doping center position. Thicker coatings contain more doping and can be used to compensate for lower temperatures in the annealing furnace. Thus, regardless of the temperature setting in the annealing furnace, the substrates at the edges and at the center of the in-line transport device (which is used to transport the substrate from one location to another) can have similar doping concentrations. In addition, the coating can be removed after the annealing process to promote a uniform surface topology of the substrate.

In some embodiments, the present invention discloses an in-line deposition system that includes a drum body that contacts a cold liquid and distributes the liquid to an exterior surface. The deposition applied through the drum body can be applied to both sides of the substrate or to only one of the sides. Of course, other types of coatings can also be included. The substrate can be transported to the liquid drum body for coating through an in-line transport device, such as any type of transport device or ceramic drum body, and then transported via an outlet end line to a subsequent process, such as an annealing furnace. Other functional components can also be added, such as: exhaust and isolation to prevent harmful gases from leaking out; temperature isolation to provide a safe wall; carrier gas and curtain gas to isolate and purify the atmosphere; substrate conditioning before removal in the process chamber Such as dry environments and spray cleaning systems for system cleaning.

8A-8C are schematic diagrams showing the liquid coating configuration of the apparatus and method for rolling coating according to a preferred embodiment of the present invention. Fig. 8A shows the substrate 96 sandwiched between the two roller bodies 91A and 91B. The drum body receives the liquid medium, for example, provided by the reservoir 99 and distributed to the surface of the drum body. Foam or cured foam layers 95A and 95B The outer surface of the drum body is wrapped and the liquid medium to be transferred to the substrate 96 is received from the surface of the drum body. Providing a roller body at the top and bottom of the substrate will simultaneously coat the front and back sides of the substrate. Further, the drum body can move the substrate to advance as a conveying roller.

The liquid medium flowing through the drum bodies 91A/91B can be controlled to achieve the desired coating operation on the substrate 96 in a manner that minimizes excessive waste. In addition, proper contact pressure can be applied to the substrate 96 by controlling the spacing between the drum bodies, thereby minimizing waste of liquid. For example, a spring can be disposed on the top drum body 91A to provide the desired pressure to the substrate 96. Multiple independent control mechanisms can be used to eliminate or minimize excess fluid on the substrate surface, such as providing a uniform coating without any droplets. The periphery of the rotation axis of the bottom drum body 91B can be fixed and coated to rotate the bottom surface of the substrate while causing the substrate to move forward.

Figure 8B shows the roller body 91A disposed on top of the substrate 96, whereby a coating is deposited on the top surface. The bottom surface may be uncoated or may be applied via other coating process 97A. Other coating processes may be liquid spraying, including nozzles that transfer chemical media in the form of a gas gel or liquid, with or without carrier gas or solvent, or a sponge drum body that soaks the liquid chemical medium. Further, the bottom surface may be supported by the drum body 97B, and may serve as a conveying roller or a non-liquid supply drum body. The drum body 97B can be used to transport the substrate forward or to apply a contact pressure between the liquid supply roller body 91A and the substrate 96.

Figure 8C shows the drum body 91B disposed at the bottom of the substrate 96, whereby the bottom table is shown. A coating is deposited on the surface. The top surface may be uncoated or otherwise applied via a coating process 98A. The liquid roller body 91A at the bottom can serve as a conveying roller for moving the substrate. Further, the drum body 98B may be disposed at the top of the substrate, and may be a non-liquid supply drum body, and may provide a contact pressure between the liquid supply drum body 91B and the substrate 96.

In some embodiments, all of the drum bodies can receive the same liquid medium from a single reservoir. Alternatively, different drum bodies can accept different liquid media via different reservoirs. Different chemicals can be deposited on the top and bottom surfaces. Different chemicals can also be deposited on the same surface to form a coating mixture. The filled drum body, for example, a drum body that cannot accept liquid flow, can be used for other purposes, such as enhancing the distribution of the medium. All liquid media can be dispensed from a single reservoir or can be provided individually from multiple reservoirs. Flow distribution mechanisms may be included, for example, applied to storage locations such as pumping mechanisms, pressure controllers, flow controllers, and distribution manifolds. Recycling mechanisms as well as automatic refill mechanisms can also be included.

In some embodiments, the present invention discloses a method of maintaining a fluid medium for coating a substrate at a low temperature, such as below room temperature, preferably below 10 °C, such as about 7 °C. The specific temperature depends on the fluid medium to avoid rapid decay as a major design consideration. For example, when cadmium sulfide is applied, the substrate is coated with a liquid medium containing cadmium and possibly sulfur at a high temperature. At temperatures above room temperature and above, the liquid medium may recrystallize rapidly, causing the media to decay and requiring cleaning and replacement of the media. The low temperature can be formed by a cooling device disposed at the liquid medium storage, thereby The quality is maintained at a low temperature until it reaches the drum body.

In some embodiments, the present invention discloses a manner in which a temperature barrier or gradient for a liquid medium surrounding a drum body is established. When away from the drum body, the liquid medium will be maintained at a low temperature to avoid degradation. When close to the drum body, the liquid medium will be maintained at a temperature suitable for the process, such as high temperature (close to the coating temperature, or the temperature of the substrate) to help the coating process; or moderate temperature (between the substrate and the high temperature A temperature transition between the low temperature and the high temperature is provided away from a certain temperature between the low temperatures of the liquid medium at the drum body. The temperature gradient region is preferably small, such as less than 10 cm, preferably less than 5 cm, or less than 1 to 2 cm. The temperature gradient zone can be established by a temperature device such as a cooling device disposed adjacent the drum body to ensure that the liquid leaving the drum body can be maintained at a low temperature. The temperature device may also include a heater disposed adjacent the drum body to ensure that liquid entering the drum body can be maintained at a desired temperature, such as a high or medium temperature. It is also possible to use Peltiers devices to provide a cooling side for the liquid container and a heating side for the surface of the drum body. Additional cooling or heating units can be added individually if there is more cooling or heating requirements.

In some embodiments, the temperature gradient region includes an energy barrier that allows the fluid medium to move freely across the boundary. When the fluid enters the temperature gradient region near the drum body, it will provide heating energy to reach a high or medium temperature. When the fluid leaves the temperature gradient zone, it will provide cooling energy (eg, a heat sink) to return it to the low temperature of the liquid reservoir. In some embodiments, the temperature gradient region comprises a local physical barrier, For example: a local physical barrier established by a temperature control device.

In some embodiments, the present invention discloses a manner of establishing a small container space around the drum body, for example, by limiting exposure of a smaller volume liquid medium to a high or medium temperature environment. The liquid in the small container can be maintained at a high or medium temperature to accommodate the coating process and the remainder of the container will be kept at a low temperature to hold the media. The small container can be immersed in the surface of the water around the drum body and is less than 10 cm, more preferably less than 5 cm, and most preferably less than 1 or 2 cm. The fluid flow between the small container and the liquid reservoir can be increased, for example, by maintaining a temperature gradient. For example, a one-way inlet can be added to a small volume container. Alternatively, an energy barrier can be established at the inlet to ensure a temperature gradient. Alternatively, the membrane can be applied to the flow between the fluid and the small volume container.

In some embodiments, the temperature of the liquid medium in the reservoir will be equalized, for example, by removing any hot spots that may degrade the chemical. The temperature homogenizer may include an agitator, such as a paddle wheel coupled to the drum body rotation mechanism, and thereby co-rotating with the drum body to achieve the effect of agitating the liquid medium in the reservoir. Other agitation devices, such as magnetically coupled agitators, can be used to agitate the liquid. On the other hand, a liquid circulation function can be provided to establish a liquid flow to promote temperature mixing. The liquid circulation function may also include a filter to filter particles, such as particles recrystallized from a liquid medium.

9A-9C are schematic diagrams showing the temperature barrier arrangement of the apparatus and method for rolling coating according to a preferred embodiment of the present invention. The barrier 208 is disposed around the drum body 201, particularly in the vicinity of the porous layer 202, for example, to maintain a distance from the drum body surface. The temperature gradient between the liquid medium and the liquid medium in the immediate vicinity of the surface of the drum body. Barrier 208 can be a temperature barrier, such as a barrier that allows liquid to pass freely. For example, the barrier 208 can include a grid or array of curved tubes surrounding the drum body 201. The barrier 208 can be combined with a temperature control device, such as a heating/cooling device 207, to maintain a low temperature barrier around the drum body.

As shown in FIG. 9A, the liquid medium 204 is disposed in a reservoir or container 205 and supplies liquid to the drum body 201 via the porous layer 202. Next, the roller body 201 contacts the substrate 206 and applies a dielectric coating to the surface of the substrate. The barrier 208 is coupled to a temperature control device 207, such as a cooling device, to maintain a low temperature barrier around the drum body. For example, the cooling device 207 can be a refrigeration device and provide a barrier 208 coolant. Alternatively, the temperature control device 207 can be a heating device whereby a high or medium temperature barrier is maintained around the drum body. In this case, an additional cooling device (not shown) may be provided to maintain the remainder of the liquid medium at a low temperature. Barrier 208 is preferably a space that allows liquid to enter and exit the surface of the drum body, for example, by creating a grid or array of tubes. The spacing of the tube meshes allows the liquid to be easily circulated while being controlled by the energy of the mesh or tube, for example, by controlling the temperature of the liquid entering or leaving the area via a grid or tube. A stirring mechanism, such as magnetic stirring system 209, can cooperate with the liquid to form a flow that effectively homogenizes the temperature within reservoir 205.

In some embodiments, the substrate 206 is heated to a process temperature that causes the coating to be formed on the contact surface when the roller body 201 contacts the substrate 206. In some embodiments, the heat medium is preferably a contact surface between the substrate 206 and the drum body, such as: The heat medium will be absorbed by the porous layer 202 of the drum body 201. In some cases, prolonged exposure to high temperatures can adversely affect the media. For example, cadmium sulfide film solvents may recrystallize at elevated temperatures, reducing their effectiveness during the coating process. Accordingly, the present invention provides a cooling device 207 in the body region of the media that effectively assists the media in maintaining a temperature that preserves their life cycle and performance. Moreover, in some embodiments, the present invention further discloses a temperature barrier 208 that is used to reduce the high temperature portion of the medium, thereby limiting the potential for potential damage to the medium.

In some embodiments, the liquid medium within the temperature barrier will be maintained at a temperature suitable for the coating process. The temperature barrier can be at a process temperature, such as the temperature of the substrate 206. Thus, a high temperature gradient will build up at the barrier 208, thereby converting the medium from a high process temperature adjacent the surface of the drum body to a cooling temperature away from the barrier energy storage medium. Barrier 208 is preferably disposed adjacent the surface of the drum body to limit the volume of media exposed to high process temperatures. The high temperature can be obtained by heating the drum body 201, for example, heating the end of the core of the drum body or the center of the hollow. The high temperature can be obtained by heating the medium immediately adjacent the outer surface of the drum body.

In some embodiments, the temperature barrier can be an intermediate temperature below the process temperature, such as a temperature between the process temperature and room temperature, or a temperature between the process temperature and the low media storage temperature of most of the media. . For example, the medium contained within the temperature barrier can be maintained at room temperature, above or below room temperature. By maintaining the medium of the porous layer 202 of the drum body at an intermediate temperature, not only the coating process can maintain its effectiveness, but also greatly improve the preservation of the life cycle of the medium. Similarly, The intermediate temperature is provided by heating the drum body or heating the space medium adjacent to the outer surface of the drum body, or the intermediate temperature may be heated by the heater to heat the substrate 206 or the drum body 201 contacts the hot substrate 206 to conduct residual heat energy to the liquid medium. Provided.

In Fig. 9B, the temperature control device 210 is mounted on the temperature barrier. The temperature control device 210 can be a cooling device that provides a media cooling barrier away from the vicinity of the drum body, ensuring that most of the media is maintained at a low media storage temperature. The medium located near the surface of the drum body can be heated by the drum body, or heated by the heater to heat the substrate 206 or by the residual heat energy transmitted to the liquid medium through the roller body 201 contacting the hot substrate 206. The temperature control device 210 can be a heating device and heat the medium provided to the drum body layer 202. In some embodiments, additional cooling devices (not shown) may be provided to cool most of the media. A temperature homogenizing device, such as a media circulator or recirculator, can be used, including a media tank and pump, and pumping the medium to the inlet 211 while flowing back to the outlet 212 before returning it to the tank. The filter can be placed on the flow path.

In Fig. 9C, the temperature control devices 225A to 225C are Peltiers devices installed in the temperature barrier. The Peltier device can be cold on one side of the hot side. The hot side can face the drum body and the cold side faces the body medium. The Peltier device can act as a heater to heat the surrounding area proximate the surface of the drum body and can also act as a cooling device to cool the liquid medium body remote from the drum body. Peltier can be packaged to protect it from the media environment. Paddle 228 can be used for equalization The mass temperature, for example, causes the liquid within the container 205 to move.

A heater or cooler can be added to or around the Peltier device to control heating or cooling energy. For example, if more cooling energy is needed, an additional cooler (element 225A) can be added. Additional heaters (element 225B) can be added if more thermal energy is required. A similar hot and cold side function can also be used (element 225C).

10A-10B are schematic diagrams showing the physical barrier configuration of the apparatus and method for rolling coating according to a preferred embodiment of the present invention. As shown in FIG. 10A, a physical barrier 308 is disposed around the drum body 201 and forms an isolated space for the medium 204A. In addition, a limited opening 301 can be provided. For example, media 204 can be allowed to enter diaphragm 301 of barrier 308. The diaphragm 308 can restrict the communication of the liquid medium and allow for a temperature gradient between the medium 204A and the medium body 204 near the surface of the drum body. A cooling device such as device 207 may be added. Other temperature control devices can also be added to assist the physical barrier 308 in establishing a temperature gradient. A temperature equalizing device 209 can also be added.

As shown in FIG. 10B, a narrow gap 402 can be used to control media exchange across the barrier 308. The limited opening 403 may employ a structure that faces the body medium 204 at one end and is smaller toward the end of the drum body. In addition, a controllable opening 401 can be used and the opening size can be changed statically or dynamically.

11A-11B are schematic diagrams showing other physical barrier configurations of the apparatus and method for roll coating according to a preferred embodiment of the present invention. Temperature control devices 304 and 306 can be coupled to barrier 308 to control the temperature gradient. For example, the Peltier device 304 is coupled to the barrier 308. Additional heaters or coolers can be combined with the Peltier device to ensure Maintain the required temperature gradient. For example, if you need more heat or more cold energy at each end of the barrier, you can add a heater or cooler. Additionally, the temperature control device can be combined with a barrier 308, such as a Peltier device 306 embedded within the wall of the barrier 308.

Figure 12 is a schematic view showing the distribution of a liquid medium in an in-line deposition system for a roll coating apparatus and method according to a preferred embodiment of the present invention. The substrate 103 is moved by the rolling conveyance roller 101. The bottom liquid drum body 106 can continue to move the substrate forward instead of the transport roller 101 while providing liquid paint to the bottom surface. The drum body disposed at the top has appropriate pressure to deposit the top coating in a manner that minimizes excess residue.

The liquid medium can be provided to the drum body via one or more reservoirs. For example, a reservoir 104A containing a chemical liquid can provide a liquid medium to pump 104B to push the liquid medium to the container via a pump. A fluid controller 104D can be added to regulate the pressure and flow to the vessel. Heating or cooling of the liquid medium and/or substrate can also be controlled by temperature controller 104F.

The top and bottom drum bodies can accept different liquid media to obtain different coating materials. The top and bottom drum bodies can be rotated at the same speed or at different speeds. For example, with the same liquid medium on the top and bottom drum bodies, the top and bottom drum bodies can be rotated at the same speed to deposit the same coating on the top and bottom surfaces of the substrate. For different liquid media, the top and bottom drum bodies can be rotated at the appropriate speed, either at the same or different speeds.

Additional drum bodies can be added. For example: one or more drying rolls can be provided Cylinder for better liquid media distribution. The drying drum body can be arranged to replace the liquid drum body or can be placed in a selected position. The drying drum body may be a drum body without any moist liquid, a drum body that cannot receive liquid from the inside, or a drum body having a vacuum suction (instead of liquid flow) for drying the porous layer, or a brush drum body.

In some embodiments, the present invention discloses a deposition process using a liquid medium coating. 13A-13C are schematic views showing a deposition process of the apparatus and method for roll coating according to a preferred embodiment of the present invention. In FIG. 13A, the substrate 110 is coated with a 110 liquid coating through a coating cylinder body, and then the layer conditioning process 111 is selectively performed. The layer adjustment process is not necessary, meaning that it is used to adjust the deposited layer only when needed. For example, some processes require a liquid layer for deposition, so there is no need to adjust the process. The conditioning process can be a drying process, for example, via a heater or a drying drum body. The drying process is not necessary, meaning that an active drying process is not necessary, for example, the deposition process may be drying in air, or the drying process may be embedded in a subsequent process, for example, in a subsequent annealing process. The conditioning can be an annealing process that promotes the coating's ability to modify the properties of the coating by being affected by inactive or around the active area. For example, annealing around sulfur can promote the bonding of sulfur to the coating to form a cadmium sulfide film.

Figure 13B shows an embodiment of a separate coating and drying structure characterized by comprising a separate coating station with a liquid drum body 116, and an conditioning/drying station comprising a heater 114. When the transport roller transports the substrate 103 to the coating station, the liquid roller body 116 deposits a liquid coating on the substrate. As shown in the figure, the liquid roller system is simultaneously deposited and coated. The layers are on the top and bottom, and of course, similarly similar drum bodies can be used in other configurations. Upon completion of the coating, the substrate will be transported through the same bottom liquid drum body 116 to the drying station and dried by the thermal energy provided by the heater 114. As shown, the heater 114 includes an infrared heater disposed parallel to the drum body to heat the substrate as the substrate passes. Of course, other heating configurations may be employed, such as heaters of different orientations or different types. .

Figure 13C shows an embodiment of a structural arrangement for integrated deposition and drying. The coating station and the drying station are integrated into the deposition station, wherein the heater 114 and the liquid drum body 116 are disposed next to each other, so that the liquid coating from each of the drum bodies 116 will be immediately heated by the next one. The device 114 is heated and dried. Other structural configurations may be used, such as having a plurality of heaters 114 behind a liquid drum body 116 or having a heater 114 behind the plurality of liquid drum bodies 116.

14A-14C are schematic views showing another deposition process of the apparatus and method for roll coating according to a preferred embodiment of the present invention. In FIG. 14A, the substrate is coated with a 120 doped liquid layer through a coating cylinder, dried 121 to form a solid layer, and then annealed in a furnace to drive dopants under the surface of the substrate. The drying process can be omitted or can be embedded in the annealing process. Figure 14B shows a configuration example of coating, drying, and annealing, including a separate coating station with a coated drum body 126 and a drying station with a heater 124. When the transport roller 127 transports the substrate 103 to the coating station, the coating cylinder body 126 will deposit a liquid coating on the substrate. After the coating is completed, the substrate will be transferred to the drying station through the same bottom coating drum body 126 and passed through the heat provided by the heater 124. Can be dried. Subsequently, the substrate will be transferred to an annealing furnace using a heater 125.

Figure 14C shows an embodiment of an integrated coating and dry structural configuration. The coating station and the drying station are integrated into the deposition station, wherein the heater 124 and the coating drum body 126 are disposed next to each other, so that the liquid coating from each of the drum bodies 126 will be immediately next The heater 124 is heated and dried. After drying, the substrate is annealed by a heater 125. The drying step is optional, can be skipped, or can be combined with an annealing process. For example, a pre-annealing step can be added prior to the main annealing step of the annealing process, and the drying process can be included in the pre-annealing step.

In some embodiments, the present invention discloses a method for depositing a liquid on a substrate comprising using a cylinder body that receives a cold liquid medium provided from a container and transferring the liquid to an exterior surface of the substrate to form a contact coating. The liquid medium is kept at a low temperature below room temperature, preferably below 15 to 10 ° C, such as 7 ° C. Additionally, a temperature homogenizer can be added to prevent hot spots from occurring. A temperature barrier or physical barrier can also be added to limit the chance of exposure of the liquid medium to a high temperature environment.

Figure 15 is a flow chart showing the liquid deposition of the apparatus and method for roll coating in accordance with a preferred embodiment of the present invention. Operation 130 provides one or more substrates to the mobile platform, such as a large planar substrate or a plurality of semiconductor substrates arranged in a row. The mobile platform can be an in-line conveyor, including a tool such as a drum body for moving substrates from one processing station to another. The mobile platform can be an input station for the on-line coating station, accepting the substrate and transferring the substrate to the coating zone. The substrate can be prepared before entering the coating station, for example: removing impurities by surface cleaning process or The particles are either formed through an oxidation process to form an oxide layer. In some cases, the native oxide layer on the substrate may not be optimal, so HF solvent cleaning may be performed to clean the surface. In addition, the substrate can be transported into a housing, such as through a substrate moving mechanism, or the substrate can be moved through the housing in succession, for example, through an in-line transport mechanism.

In operation 131, the substrate is heated to a desired temperature, such as a temperature at which the rate of chemical deposition reaction can be accelerated, thereby evaporating the liquid carrier in the chemical or annealing the deposited layer. In operation 132, the substrate is fed into a coating zone having a plurality of coating drum bodies, and a portion of the roller body will simultaneously serve as a conveying roller for moving the substrate. The liquid medium is transferred to the outer surface of the drum body. Non-essential foam covering the drum body can be used to improve the coating process, such as reducing substrate damage and promoting the distribution of liquid media on the substrate. The liquid medium is cooled to a temperature below room temperature, preferably below the temperature at which the liquid medium retains its life cycle. For example, the liquid layer can be an absorbent layer in a solar cell device structure, a chemical having an absorber, including a small spherical suspension of absorber elements in a liquid medium. The sorbent chemicals can be stored and transferred at room temperature or at room temperature to prevent reaction and extend the life cycle of the chemical. The cooled chemical will then deposit on the hot substrate and trigger the reaction through thermal energy to form a thin film layer on the substrate.

In operation 133, the liquid medium is caused to be applied from the surface of the drum body to the surface of the substrate via contact by rotating the drum body. In addition, the rotating conveyor roller system can simultaneously move the substrate to the end of the coating zone. On the other hand, it can include improvements A tool for coating a layer, for example, to obtain a better distribution of the medium, a drying drum body can be provided after the liquid cylinder body.

In operation 135, a coating having a uniform or non-uniform thickness setting is applied to the substrate. For example, a coating with a non-uniform thickness setting on the surface of the substrate is used to compensate for non-uniformities in subsequent processes, such as non-uniform temperature settings in subsequent annealing furnaces. In an optional operation step 136, the coating is dried by conditioning, for example, by thermal energy generated by the energy of the liquid coating, such as an infrared lamp or other means, or by one or more drying drum bodies. dry. The drying zone can be placed after the coating zone, for example by placing the infrared heater behind the liquid roller body. Alternatively, the drying zone can be integrated with the coating zone, for example by interlacing the infrared heater with the liquid roller body.

Subsequent processing of the substrate in operation 137 has a coating thickness setting of uniform uniformity. For example, the substrate is fed into a diffusion furnace to drive dopants into the substrate. The furnace may include a plurality of heaters to heat the coating to a very high temperature, such as between 600 and 1000 °C. The furnace may include a preheating zone for forming a temperature transition zone between the hot furnace zone and the room temperature environment. The preheating zone can simultaneously serve as a drying zone for the dry liquid coating. The temperature in the annealing furnace can be non-uniform, and the thickness of the substrate can be used to compensate for this non-uniformity, so that a uniform doping profile can be achieved.

In some embodiments, the present invention discloses an improvement in the roll coating process using a coating drum body. For example, the liquid medium is kept at a low temperature to preserve its reaction characteristics. In addition, a temperature barrier or physical barrier can be used to limit exposure of the liquid medium In high temperature environment.

16A-16B are flow diagrams showing the liquid deposition control of the apparatus and method for roll coating according to a preferred embodiment of the present invention. In Figure 16A, the liquid medium delivered to the substrate is controlled to achieve the desired goal of avoiding rapid decay while optimizing coating optimization and minimizing operating costs. Operation 140 provides one or more coating drum bodies for contacting the fluid medium in the container. In operation 141, the liquid medium is cooled to a temperature below room temperature, preferably below 10 °C, such as 7 °C. In operation 142, the temperature of the liquid medium in the container is homogenized to prevent hot spots from occurring while further preventing exposure to high temperatures.

In Figure 16B, a temperature gradient is established adjacent the coating drum body to limit exposure of the liquid medium to high temperatures. Operation 144 provides one or more coating drum bodies for contacting the fluid medium in the container. Operation 144 establishes a temperature gradient around the drum body that is in contact with the fluid. Operation 145 homogenizes the temperature of the fluid in the vessel away from the temperature gradient.

In some embodiments, the present invention discloses different process control modes for achieving desired liquid media optimization. Figure 17 is a flow chart showing the different liquid deposition control processes for the roll coating apparatus and method of the preferred embodiment of the present invention. Exposure of the liquid medium to a high temperature environment can be achieved by establishing a physical barrier around the drum body. Operation 150 provides one or more coating drum bodies for contacting the fluid medium in the container. Operation step 151 isolates an area around the contact area between the drum body and the fluid, effectively establishing a physical screen between the two portions of the liquid medium in the container. barrier. Limitations can be provided by the interaction between the two parts. Operation 152 heats the fluid medium located in this portion, for example, to a moderate temperature between the process temperature and the low temperature of the liquid medium. The medium temperature can be room temperature. Operation 153 cools the fluid outside of this portion, for example, to the life cycle storage temperature of the liquid medium. In addition, a temperature homogenizer can be selectively added to prevent hot spots from being generated. Operation 154 limits the flow of fluid between the two parts. For example, a minimum fluid flow is provided between the two portions to prevent exposure of the outer portion to the internal high temperature.

18A-18B are schematic diagrams showing the basic device concept of the apparatus and method for rolling coating according to a preferred embodiment of the present invention. The medium is provided 1024 through the inner core of the flexible porous drum bodies 1021 and 1022, and the flexible porous drum system is uniformly wetted based on its own material properties. The distribution of the medium on the substrate 1026 is independently controlled by the flow of liquid and the concentration of the liquid and the contact pressure generated by the spacing between the top drum body 1021 and the bottom drum body 1022, thereby minimizing excess medium at the top of the substrate 1026 and A uniform film is deposited on the bottom surface. When the drum bodies 1021 and 1022 are rotated, the substrate can be transported from one end of the apparatus to the other end of the apparatus, and a liquid coating can be obtained from the wetted surface of the drum body.

In some embodiments, the porous drum body comprises a rigid hollow core and is covered by a layer of porous material, such as a sponge material. The rigid core preferably has sufficient stiffness and horizontal flatness across the substrate deposition site to ensure uniform deposition of the coating. The core material can be metal, alloy, carbon, glass, ceramic or plastic such as PVC, PP or fluorocarbon.

The porous material may be a polymer or polymer foam or sponge, such as PVA, polyurethane, and polyolefin, or may be any porous material to allow passage of the liquid medium. In addition, the porous material can be a soft material, thereby loosening the horizontal flatness requirement for the rigid core.

19A-19E are various schematic views of the configuration of a drum body for a roll coating apparatus and method in accordance with a preferred embodiment of the present invention. Figure 19A shows a drum body 1031 having an inlet 1034 at one end to receive a fluid medium that will distribute 1035 to the outer surface of the drum body. When contacting substrate 1036, the fluid medium will transfer to the surface of the contact and form a liquid layer 1034*. The fluid can be more easily distributed to the surface of the substrate by rotating the drum body 1031. Coupler 1039 can be coupled between rotating drum body 1031 (or inlet 1034) and stationary fluid inlet 1038. Additionally, the coupler 1039 can include a rotatable seal or a twistable connector for use in rotating the drum body.

The drum body 1031B may include a soft porous layer 1035B on the outer surface of the drum body to facilitate transfer of fluid between the drum body and the substrate (Fig. 19B). The solid layer 1035C may be covered on the outer surface of the drum body 1031C, but is preferably a soft layer to enhance contact tolerance. Then, the fluid can be transferred through the surface contacting the substrate (Fig. 19C), and a layer is formed on the outer surface of the drum body.

19D-19E show various configurations of a rotatable coupler between a rotating drum body and a stationary liquid transport line. In Fig. 19D, an O-ring or liquid bearing 1039D is provided at the end of the drum body 1031D, and the rotating drum body 1031D is coupled to the fixed wire 1038D. In Fig. 19E, the O-ring or the liquid bearing 1039E is provided. The cylindrical surface is placed close to the end of the drum body 1031E, and the rotating drum body 1031E is coupled to the fixed wire 1038E. Other rotatable couplers can be used to connect the rotating drum body to a fixed liquid delivery line.

20A-20D are schematic views showing other types of drum body configurations for the apparatus and method for roll coating according to a preferred embodiment of the present invention. Figure 20A shows a drum body 1041 that includes a porous layer 1045 that encloses a solid core having a groove 1042 that can accommodate a small diameter pipe (PFA, PVDF, PP) 1043. The liquid medium 1044 enters the small tube 1043 and is transferred to the porous layer 1045 via perforations in the tube 1043. The uniformity and media flow can be optimized by varying the diameter and spacing of the perforations of the tube 1043 and the pore density of the porous layer 1045. Figure 20B shows the drum body 1041 possessing a cover layer 1046 with a groove 1047. After entering the trench 1047, the liquid medium 1044 is transported through the perforations in the trench 1047 to the porous layer 1045. Figure 20C shows a hollow cylinder body 1041 having an inner layer 1048 with grooves 1049. The liquid medium 1044 enters the trench 1049 and is transported through the perforations in the trench 1049 to the porous layer 1045. Figure 20D shows a hollow cylinder body 1041 having perforations 1051 on the drum body wall surface 1051. The liquid medium 1044 enters the hollow cylinder body and is transported through the perforations 1052 to the porous layer 1045.

21A-21C are schematic views of a coating process for an apparatus and method for roll coating according to a preferred embodiment of the present invention. Figure 21A shows roller body 1061 receiving liquid medium 1064 and distributed to porous layer 1065. Upon direct contact with the substrate 1066, the liquid medium will be transferred to the surface of the substrate to form a layer 1064*. The drum body 1061 is rotated to provide a uniform coating while moving the substrate forward. Figures 21B and 21C show The drum body 1061 indirectly contacts the substrate 1066 through the centered drum bodies 1062, 1062A and 1062B.

The uniformity of the coating layer can be controlled by adjusting the liquid medium at the surface of the drum body. In general, a liquid medium uniformly distributed along the length of the drum body can produce a uniform coating on the substrate perpendicular to the direction of the path of travel. The use of multiple drum bodies will further improve the uniformity of the forward travel direction.

In some embodiments, the system includes one or more temperature control devices, such as heaters or coolers, to provide substrate or chemical thermal energy. Some chemicals may require higher temperatures (eg, above room temperature) to successfully coat the coating, so the chemical can be heated through the heater to the desired temperature. Some chemicals may require lower temperatures (eg, below room temperature) to coat or preserve chemical characteristics so that the chemistry can be cooled through the chiller to the desired temperature. For example, the heater/cooler can be placed in a chemical storage, liquid delivery line, or on a drum body to directly heat or cool the chemical. In addition, it is also possible to arrange the heater/cooler at or adjacent to the drum body to heat/cool the surface of the drum body to heat or cool the surfaces of the drum body as it reaches the surface of the drum body.

Of course, it is also possible to directly heat or cool the substrate. For example, it is used for the deposition of solid salt to form an absorption layer similar to cadmium sulfide and zinc sulfide in the manufacture of thin film solar cells. The deposited chemical can accelerate the chemical reaction, dry the liquid chemical, or anneal through heating. Cloth layer. The heater can be placed on the substrate or adjacent Wherein, the surface of the substrate is heated, including placing the IR or UV lamps on the top and/or bottom of the substrate, or between the drum bodies. In addition, heaters and coolers can be used simultaneously. For example, in the deposition of the absorber layer, the chemical is preferably cooled, for example, by a cooler disposed at a chemical storage or transport line or adjacent to maintain a temperature below or about room temperature to maintain the chemical. Life cycle. The chemical is then heated, for example, after deposition onto the substrate to form an absorber layer, and the substrate is heated by IR.

22A-22D are schematic diagrams showing the configuration of a temperature control device for a rolling coating apparatus and method according to a preferred embodiment of the present invention. Figure 22A shows a drum body 1077 that is coated with a foam or cured foam material 1071 over a substantial portion of the exterior surface. The liquid medium 1074 is transferred to the inside of the drum body 1077 to be transferred to the foam material 1071. A temperature control device such as a heater or cooler 1082 can be placed around the chemical delivery line, such as around the line, to heat/cool the chemical to the desired temperature. The heater/cooler 1081 may be disposed at the periphery of the outer surface of the drum body, such as at the exposed end of the drum body, or under the foam layer 1071 along the drum body 1077. The heater/cooler 1083 may also be disposed inside the drum body 1077 to heat/cool the drum body or to heat/cool the chemicals that reach the drum body. Of course, any combination of heater and cooler can be used.

Figure 22B shows a heater/cooler 1084 disposed inside the drum body 1077, such as mounted on the interior surface of the hollow drum body. Figure 22C shows a heater/cooler 1085 disposed in the middle of the drum body 1077 for heating/cooling the drum body and Learn the chemicals in the material bag 1086. 22D shows the heater 1087 disposed adjacent the drum body and directing thermal energy to the substrate 1096 via the shield 1088, thereby heating the substrate 1096. The heater 1087 may be disposed between successive roller bodies and disposed at the top of the substrate, at the bottom of the substrate, or on both sides.

In some embodiments, the present invention discloses an in-line deposition system comprising a drum body that receives a flow of liquid to the interior of the drum body and distributes the liquid to the exterior surface. The liquid medium is protected by the transfer line and the only liquid that is exposed to the environment is the liquid that adheres to the surface of the drum body. Minimizing exposure opportunities can effectively increase the safety of deposition systems, especially for hazardous liquids such as phosphorous acid or boron trifluoride.

The deposition by the coated roller body coating can be performed on both sides of the substrate or only on one side. In addition, other types of coatings may also be included. The substrate can be transported to the liquid drum body for coating through an in-line transport device, such as any type of transport device or ceramic drum body, and then transported via an outlet end line to a subsequent process, such as an annealing furnace. Other functional components can also be added, such as exhaust and isolation to prevent harmful gases from leaking out; temperature isolation to provide a safety wall; carrier gas and curtain gas to isolate and purify the atmosphere; and removal of the substrate before processing in the process chamber Adjustments such as dry environments and spray cleaning systems for system cleaning.

23A-23C are schematic views showing the liquid coating configuration of the apparatus and method for roll coating according to a preferred embodiment of the present invention. Figure 23A shows a substrate 1096 sandwiched between two roller bodies 1091A and 1091B. The drum body receives the liquid medium 1094A and 1094B, And from one end into the drum body, distributed to the surface of the drum body. Foam or cured foam layers 1095A and 1095B overlie the outer surface of the drum body and receive a liquid medium that will be transferred to substrate 1096 from the drum body surface. The drum body is disposed on the top and bottom of the substrate to simultaneously coat the front and back surfaces of the substrate. Further, the drum body can move the substrate to advance as a conveying roller.

The liquid medium flowing through the drum bodies 1091A/1091B can be controlled to achieve the desired coating operation on the substrate 1096 in a manner that minimizes excessive waste. In addition, proper contact pressure can be applied to the substrate 1096 by controlling the spacing between the drum bodies, thereby minimizing waste of liquid. For example, a spring can be disposed on the top roller body 1091A to provide the desired pressure to the substrate 1096. Multiple independent control mechanisms can be used to eliminate or minimize excess fluid on the substrate surface, such as providing a uniform coating without any droplets. The periphery of the rotation axis of the bottom drum body 1091B can be fixed and coated to rotate the bottom surface of the substrate while causing the substrate to move forward. Additionally, the basin 1099 can be selectively utilized to capture residual liquid.

Figure 23B shows the roller body 1091A disposed on top of the substrate 1096, whereby a coating is deposited on the top surface. The bottom surface may be uncoated or may be coated via another coating process 1097A. Other coating processes can be liquid spray, including nozzles that transfer chemical media in the form of a gas gel or liquid, with or without carrier gas or solvent, or a sponge drum body that soaks the liquid chemical medium. Further, the bottom surface may be supported by the drum body 1097B, which may serve as a conveying roller or a non-liquid supply drum body. The drum body 1097B can be used to transport the substrate forward, or in the liquid supply A contact pressure is applied between the drum body 1091A and the substrate 1096.

Figure 23C shows the roller body 1091B disposed at the bottom of the substrate 1096, whereby a coating is deposited on the bottom surface. The top surface may be uncoated or otherwise coated by another coating process 1098A. The liquid drum body 1091A at the bottom can serve as a conveying roller for moving the substrate. Further, the drum body 1098B may be disposed at the top of the substrate, and may be a non-liquid supply type drum body, and may apply an application contact pressure between the liquid supply type drum body 1091B and the substrate 1096.

In some embodiments, all of the drum bodies can receive the same liquid medium from a single storage and pumping system. Alternatively, different drum bodies can accept different liquid media via different reservoirs. Different chemicals can be deposited on the top and bottom surfaces. Different chemicals can also be deposited on the same surface to form a coating mixture. The filled drum body, for example, a drum body that cannot accept liquid flow, can be used for other purposes, such as enhancing the distribution of the medium. All liquid media can be dispensed from a single reservoir or can be provided individually from multiple reservoirs. In addition, flow distribution mechanisms such as pumping mechanisms, pressure controllers, flow controllers, and distribution manifolds can be included. Recycling mechanisms as well as automatic refill mechanisms can also be included.

24A-24C are schematic diagrams showing the distribution of liquid medium in an in-line deposition system for a roll coating apparatus and method in accordance with a preferred embodiment of the present invention. FIG. 24A shows that the substrate 10103 is moved by rotating the conveying roller 10101. The bottom liquid drum body 10106 can continue to move the substrate forward instead of the transport roller 10101 while providing liquid paint to the bottom surface. The drum body placed at the top has appropriate pressure, Thereby the top coating is deposited in a manner that minimizes excess residue.

The liquid medium can be supplied to the drum body via one or more reservoirs. For example, a reservoir 10104A containing a chemical liquid can provide a liquid medium to the pump 10104B to push the liquid medium to the drum body 10106 via a pump. A pressure controller 10104C and a fluid controller 10104D may be added to regulate the pressure and flow to the drum body. Manifold 10104E is used to distribute the liquid medium to the drum body. Temperature controller 10104F can heat or cool the liquid medium and/or substrate. For the sake of brevity, the manifold shown is assigned the same liquid medium to the bottom drum body 10106 at the same pressure and flow, although the invention is not so limited. Of course, different configurations can be used, such as dispensing a liquid medium to the manifold of all drum bodies, or adding different delivery systems, and delivering different chemicals to different drum bodies at different pressures and different flows.

The flow and pressure controller can adjust the liquid medium supplied to the surface of the substrate to optimize the coating process, such as minimizing excess liquid applied to the substrate, or adjusting the liquid medium applied to the substrate to have desired Characteristics such as higher or lower viscosity with the substrate, or higher or lower reaction rates. The liquid delivery system of the present invention can further prevent reactions in the transfer line, such as in the drum body or in a liquid source. For example, for a solar cell device, the liquid roller body of the present invention can be used to deposit an absorbing layer and crystallize on the surface of the substrate instead of the surface of the drum body. Multiple independent flow rates, flow pressures, roller pressures, chemical temperatures, and substrate temperature controllers can provide optimized coatings on the substrate surface, for example: no Drops of droplets or excess liquid, or a uniform coating that minimizes the waste of droplets or excess liquid.

The top and bottom drum bodies can accept different liquid media to obtain different coating materials. Figure 24B shows the top drum body 10106 receiving the chemical solution and the bottom drum body 10102 receiving another chemical solution. The top and bottom drum bodies can be rotated at the same speed or at different speeds. For example, with the same liquid medium on the top and bottom drum bodies, the top and bottom drum bodies can be rotated at the same speed to deposit the same coating on the top and bottom surfaces of the substrate. For different liquid media, the top and bottom drum bodies can be rotated at the appropriate speed, either at the same or different speeds.

Additional drum bodies can be added. For example, one or more drying drum bodies can be provided for better liquid media distribution. The drying drum body can be arranged to replace the liquid drum body or can be placed in a selected position. The drying drum body may be a drum body without any moist liquid, a drum body that cannot receive liquid from the inside, or a drum body having a vacuum suction (instead of liquid flow) for drying the porous layer, or a brush drum body.

Different drum bodies can be used for the same surface. Figure 24C shows the drum body 10108 alternately spaced from the top drum body 10106 and the drum body 10109 alternately spaced from the bottom drum body 10102. The alternately spaced drum bodies can provide different chemical liquids to form a hybrid coating. Further, the alternately spaced drum bodies can be dry drum bodies.

In one embodiment, the present invention discloses a sink using a continuous liquid medium supply Process. 25A-25C are schematic views showing a deposition process of the apparatus and method for roll coating according to a preferred embodiment of the present invention. In FIG. 25A, the substrate 10110 is coated with a 10110 liquid coating through a liquid cylinder body, and then a layer conditioning process 10111 is selectively performed. The layer adjustment process is not necessary, meaning that it is used to adjust the deposited layer only when needed. For example, some processes require a liquid layer for deposition, so there is no need to adjust the process. The conditioning process can be a drying process, for example, via a heater or a drying drum body. The drying process is not necessary, meaning that an active drying process is not necessary, for example, the deposition process may be drying in air, or the drying process may be embedded in a subsequent process, for example, in a subsequent annealing process.

Figure 25B shows an embodiment of a separate coated and dried structure comprising a separate coating station having a liquid cylinder body 10116 and an conditioning/drying station comprising a heater 10114. When the transport roller transports the substrate 10103 to the coating station, the liquid roller body 10116 deposits a liquid coating on the substrate. As shown, the liquid cylinder body simultaneously deposits a coating on the top and bottom. Of course, similarly similar drum bodies can be used in other configurations. After the coating is completed, the substrate will be transported through the same bottom liquid drum body 10116 to the drying station and dried by the thermal energy provided by the heater 10114. As shown, the heater 10114 includes an infrared heater disposed parallel to the drum body to heat the substrate as the substrate passes. Of course, other heating configurations may be employed, such as different orientations or different types of heaters. .

Figure 25C shows an embodiment of a structural arrangement for integrated deposition and drying. The coating station and the drying station are integrated into the deposition station, in which the heater 10114 and the liquid roller The bodies 10116 are disposed next to each other so that the liquid coating from each of the drum bodies 10116 will be immediately dried by the next heater 10114. Other structural configurations may be used, such as having a plurality of heaters 10114 behind a liquid drum body 10116 or having a heater 10114 behind the plurality of liquid drum bodies 10116.

26A-26C are schematic views showing a deposition process of the apparatus and method for roll coating according to a preferred embodiment of the present invention. In FIG. 26A, the substrate is coated with a 10120 doped liquid layer through a liquid cylinder body, dried 10121 to form a solid layer, and then annealed in a furnace to drive dopants under the surface of the substrate. The drying process can be omitted or can be embedded in the annealing process. Figure 26B shows a configuration example of coating, drying, and annealing, including a separate coating station with a liquid drum body 10126 and a drying station with a heater 10124. When the transport roller 10127 transports the substrate 10103 to the coating station, the liquid roller 6 cylinder 10126 will deposit a liquid coating on the substrate. After the coating is completed, the substrate will be transferred to the drying station through the same bottom liquid drum body 10126 and dried by the thermal energy provided by the heater 10124. Subsequently, the substrate will be transferred to an annealing furnace employing a heater 10125.

Figure 26C shows an embodiment of a structural arrangement of integrated coating and drying. The coating station and the drying station are integrated into the deposition station, wherein the heater 10124 and the liquid drum body 10126 are disposed next to each other, so that the liquid coating from each of the drum bodies 10126 will be immediately heated by the next one. The device 10124 is heated and dried. After drying, the substrate is annealed by a heater 10125. The drying step is optional and can be omitted Over, or combined with the annealing process. For example, a pre-annealing step can be added prior to the main annealing step of the annealing process, and the drying process can be included in the pre-annealing step.

In one embodiment, the present invention discloses a method for depositing a liquid on a substrate comprising using a cylinder body that receives the liquid medium at least one end and migrating the liquid to an exterior surface for contact coating. The end of the drum body receiving the liquid medium may be an end, such as an end surface of a cylindrical drum body, or may be near the end, such as where the outer surface of the drum body is near the end surface. The drum body has a passage for carrying the liquid medium to the outer surface of the drum body, such as the circumferential surface of the cylindrical drum body.

27A-27B are flow diagrams of liquid deposition for apparatus and methods for roll coating in accordance with a preferred embodiment of the present invention. In FIG. 27A, operation 10130 provides one or more substrates to a mobile platform, such as a large planar substrate or a plurality of semiconductor substrates arranged in a row. The mobile platform can be an in-line conveyor, including a tool such as a drum body for moving substrates from one processing station to another. The mobile platform can be an input station for the on-line coating station, accepting the substrate and transferring the substrate to the coating zone. The substrate can be prepared before entering the coating station, for example, removing impurities or particles through a surface cleaning process, or forming an oxide layer through an oxidation process. In some cases, the native oxide layer on the substrate may not be optimal, so HF solvent cleaning may be performed to clean the surface. The substrate can be transported into a housing, for example, through a substrate moving mechanism, or the substrate can be moved through the housing in succession, for example, through an in-line transport mechanism.

In operation 10131, the substrate is fed into a coating having a plurality of coating drum bodies. In the area, part of the roller system acts as a transfer roller for moving the substrate. In another aspect, the liquid medium flows at least to one end of the liquid drum body where the liquid medium will transfer to the outer surface of the drum body. Non-essential foam covering the drum body can be used to improve the coating process, such as reducing substrate damage and promoting the distribution of liquid media on the substrate. Further, the drum body may have a passage, such as a hollow cylindrical tube, or a groove extending along the length of the drum body to guide the liquid medium.

In operation 10132, the rotating drum system can cause the liquid medium to be applied from the surface of the drum body to the surface of the substrate via contact. In addition, the rotating conveyor roller system can move the substrate to the end of the coating zone. Tools for improving the coating may also be included, for example, to obtain a better media distribution, a drying drum body may be provided after the liquid cylinder body.

In an optional operation step 136, the coating is dried by conditioning, for example, by thermal energy generated by the energy of the liquid coating, such as an infrared lamp or other means, or by one or more drying drum bodies. dry. The drying zone can be placed after the coating zone, for example by placing the infrared heater behind the liquid roller body. Alternatively, the drying zone can be integrated with the coating zone, for example by interlacing the infrared heater with the liquid roller body.

Additional components can be used during the deposition process. For example, for a deposition process that requires a thermal chemistry, the heater can be used to heat the liquid supply source prior to delivery to the substrate. For deposition processes that require a high temperature substrate to activate a chemical reaction, a heater can be used to heat the substrate. In addition, temperature control devices can be used to keep chemicals in place The temperature, such as cooling or heating.

Figure 27B shows a process embodiment for depositing a coating. Operation 10130 provides one or more substrates to the mobile platform. In operation 10135, the substrate is heated to a desired temperature, such as a temperature at which the chemical deposition reaction rate can be accelerated, thereby evaporating the liquid carrier in the chemical or annealing the deposited layer. In operation 10136, the heated substrate is subjected to roll-to-roll deposition of the liquid layer through a plurality of roller bodies, wherein the roller body receives the liquid medium from at least one end of the roller body. For example, the liquid layer can be an absorbent layer in a solar cell device structure, a chemical having an absorber, including a small spherical suspension of absorber elements in a liquid medium. The sorbent chemicals can be stored and transferred at room temperature or at room temperature to prevent reaction and extend the life cycle of the chemical. Then, the cooled chemical will be deposited on the hot substrate and the reaction will be triggered by thermal energy to form a thin film layer on the substrate.

Figure 27C shows a process embodiment for depositing a doped layer. Operation 10130 provides one or more substrates to the mobile platform. In operation 10137, the substrate is subjected to roll coating deposition of a doped coating through a plurality of liquid cylinder bodies, wherein the roller bodies each receive a liquid medium from at least one end of the drum body. The doped layer contains a doping element that reacts with the substrate to form a PN junction.

In operation 10138, the substrate is fed into a diffusion furnace to drive dopants into the substrate. The furnace may include a plurality of heaters to heat the coating to a very high temperature, such as between 600 and 1000 °C. The furnace may include a preheating zone for A temperature conversion zone is formed between the hot furnace zone and the room temperature environment. The preheating zone can simultaneously serve as a drying zone for the dry liquid coating.

In one embodiment, the present invention discloses an improvement in the roll coating process using a liquid supply roller body. For example, a pressure mechanism can be added to apply the desired pressure to the liquid cylinder body and wet coating can be performed on the substrate in a manner that does or does not minimize excess liquid. The active medium, such as a pump and controller, can be used to condition the liquid medium to compensate for the properties of the different liquids, such as viscosity, evaporation characteristics, density, or reactivity.

28A-28B are flow diagrams of liquid deposition control for apparatus and methods for roll coating in accordance with a preferred embodiment of the present invention. In Figure 28A, the liquid medium delivered to the substrate is controlled to achieve the desired objectives, such as to promote coating optimization and minimize operating costs. Operation 10140 provides one or more substrates to the mobile platform. In operation 10141, the liquid medium flows to at least one end of the liquid cylinder body, wherein the liquid medium is transferred to the outer surface of the drum body, whereby the substrate is coated through the rotating drum body and a uniform coating is formed on the surface of the substrate.

In operation 10142, at least one of liquid temperature, liquid flow rate, fluid concentration, fluid temperature, and liquid pressure is adjusted to achieve the desired coating on the surface of the substrate. In addition, in the case of top and bottom drum body coating, the contact pressure between the top and bottom drum bodies can be controlled to achieve optimum coating conditions, such as obtaining the desired coating and minimizing waste of excess fluid. Or compensate for differences in the properties of the liquid medium. Multiple control mechanisms can provide significant advantages, such as: The deposition process has no or minimal droplets or excess fluid medium, allowing for reduced chemical consumption of the uniform coating. Fluid consistency and other fluid characteristics, such as concentration or temperature, can be controlled to ensure consistency and desired deposition performance.

In Fig. 28B, the coating system on the surface of the control substrate can compensate for the non-uniformity of the subsequent process. Operation 10140 provides one or more substrates to the mobile platform. The substrate is in contact with a plurality of liquid supply roller bodies to deposit a coating on the surface of the substrate. Operation 10145 controls the uniformity of the coating thickness on the substrate to achieve a non-uniform thickness setting. The coating may include a doped layer that is about to undergo a subsequent annealing process. Non-uniform thickness settings can be used to compensate for non-uniformities in subsequent processes, such as non-uniform temperature distribution in subsequent annealing furnaces. In operation 10146, the non-uniform substrate can compensate for non-uniformities in subsequent processes via non-uniform thicknesses. For example, the temperature in the annealing furnace can be non-uniform, and the thickness of the substrate can be used to compensate for this non-uniformity, so that a uniform doping profile can be achieved.

In one embodiment, the present invention discloses different process conditions for achieving a desired coating through a liquid cylinder body. For example, the top and bottom drum bodies can accept different liquid media to coat different layers on the top and bottom of the substrate. Different liquid media can be applied to the alternately spaced drum bodies to form a mixed layer or laminate layers.

29A-29B are flow diagrams of different liquid deposition processes for apparatus and methods for roll coating in accordance with a preferred embodiment of the present invention. In Figure 29A, different coatings can be applied on the top and bottom surfaces of the substrate. Operation 10150 will be one or more The substrates are provided to the mobile platform. In operation 10151, a first liquid medium is applied to the top drum body and a second liquid medium is applied to the bottom drum body. In operation 10152, the drum body is deposited by rotation to deposit different coatings on the top and bottom of the substrate.

In Figure 29B, a hybrid or laminate coating can be applied to the substrate. Operation 10150 provides one or more substrates to the mobile platform. In operation 10155, the first and second liquid media are applied to the alternately spaced drum bodies. In addition, the top and bottom drum bodies can accept similar or different liquid media. In operation 10156, the roller system deposits a coating on the substrate by rotation.

The technology disclosed in this case can be implemented by a person familiar with the technology, and its unprecedented practice is also patentable, and the application for patent is filed according to law. However, the above embodiments are not sufficient to cover the scope of patents to be protected in this case. Therefore, the scope of the patent application is attached.

10‧‧‧Substrate

101‧‧‧Transport roller

10101‧‧‧Transport roller

10102‧‧‧Drum body

10103‧‧‧Substrate

10104A‧‧‧Storage containing chemical liquids

10104B‧‧‧ pump

10104C‧‧‧ Pressure Controller

10104D‧‧‧ Fluid Controller

10104E‧‧‧Management

10104F‧‧‧ Temperature Controller

10106‧‧‧Drum body

10108‧‧‧Drum body

10109‧‧‧Drum body

10110‧‧‧Coating coating

10111‧‧‧Unnecessary coating adjustment

10114‧‧‧heater

10116‧‧‧Drum body

10120‧‧‧Doping coating

10121‧‧‧Drying

10122‧‧‧Diffusion annealing

10124‧‧‧heater

10125‧‧‧heater

10126‧‧‧The drum body

10127‧‧‧Transport roller

1021‧‧‧Drum body

1022‧‧‧Drum body

1024‧‧‧Media

1026‧‧‧Substrate

103‧‧‧Substrate

1031‧‧‧Drum body

1031B‧‧‧Drum body

1031C‧‧‧Drum body

1031D‧‧‧Drum body

1031E‧‧‧Drum body

1034‧‧‧ Entrance

1034*‧‧‧Liquid layer

1035‧‧‧Distributed to the external surface

1035B‧‧‧Porous layer

1035C‧‧‧Solid layer

1036‧‧‧Substrate

1038‧‧‧ Entrance

1038D‧‧‧ fixed line

1038E‧‧‧ fixed line

1039‧‧‧ Coupler

1039D‧‧‧O-ring or liquid bearing

1039E‧‧‧O-ring or liquid bearing

1041‧‧‧Drum body

1042‧‧‧ trench

1043‧‧‧ tube

1044‧‧‧Liquid medium

1045‧‧‧Porous layer

1046‧‧‧ outer cover

1047‧‧‧ trench

1048‧‧‧ inner layer

1049‧‧‧ trench

104A‧‧‧Storage

104B‧‧‧ pump

104D‧‧‧ fluid controller

104F‧‧‧temperature controller

1051‧‧‧Perforation

1052‧‧‧Perforation

106‧‧‧Drum body

1061‧‧‧Drum body

1062‧‧‧The drum body

1062A‧‧‧Drum body

1062B‧‧‧Drum body

1064‧‧‧Liquid medium

1064*‧‧‧ coating

1065‧‧‧Porous layer

1066‧‧‧Substrate

1067‧‧‧Porous layer

1071‧‧‧ foam

1074‧‧‧Liquid medium

1077‧‧‧Drum body

1081‧‧‧heater/cooler

1082‧‧‧heater/cooler

1083‧‧‧heater/cooler

1084‧‧‧heater/cooler

1085‧‧‧heater/cooler

1086‧‧‧chemical bag

1087‧‧‧heater/cooler

1088‧‧‧Shield

1091A‧‧‧Drum body

1091B‧‧‧Drum body

1094A‧‧‧Liquid medium

1094B‧‧‧Liquid medium

1095A‧‧‧Foam layer

1095B‧‧‧Foam layer

1096‧‧‧Substrate

1097A‧‧‧ Coating Process

1097B‧‧‧Drum body

1098A‧‧‧ Coating Process

1098B‧‧‧Drum body

1099‧‧‧ basin

11‧‧‧Liquid coating

11*‧‧‧Drying

110‧‧‧Coating coating

111‧‧‧Unnecessary coating adjustment

114‧‧‧heater

116‧‧‧Drum body

12‧‧‧Doped layer

120‧‧‧Doped coating

121‧‧‧Drying

122‧‧‧Diffusion annealing

124‧‧‧heater

125‧‧‧heater

126‧‧‧The drum body

127‧‧‧ conveying roller

14‧‧‧ Annealing

15‧‧‧Liquid coating process

16‧‧‧ Annealing

161A‧‧‧ core

161B‧‧‧ core

161C‧‧‧ core

161D‧‧‧ core

161E‧‧‧ core

167A‧‧‧Porous layer

167B‧‧‧Porous layer

167C‧‧‧Porous layer

167D‧‧‧Porous layer

167E‧‧‧Porous layer

17‧‧‧ Coating

18A‧‧‧ coating

18B‧‧‧ coating

19‧‧‧Composite coating

201‧‧‧Drum body

202‧‧‧Porous layer

204‧‧‧Liquid medium

204A‧‧‧Media

205‧‧‧ container

206‧‧‧Substrate

207‧‧‧heating/cooling unit

208‧‧‧ barrier

209‧‧‧ Temperature homogenization device

21‧‧‧The drum body

210‧‧‧ Temperature control device

211‧‧‧ entrance

212‧‧‧Export

22‧‧‧Drum body

225A‧‧‧ components

225B‧‧‧ components

225C‧‧‧ components

228‧‧‧Oars

23‧‧‧Shield

24‧‧‧Media

25‧‧‧ Container

26‧‧‧Substrate

27‧‧‧Cooling device

28‧‧‧Oars

29A‧‧‧heater

29B‧‧‧heater

30‧‧‧ sensor

301‧‧‧ openings

304‧‧‧temperature control device

306‧‧‧ Temperature control device

308‧‧‧ barrier

32‧‧‧Drum body

33‧‧‧Shield

34‧‧‧ Fluid media

36‧‧‧Substrate

37‧‧‧Cooling device

39A‧‧‧heater

39B‧‧‧heater

39C‧‧‧heater

39D‧‧‧heater

39E‧‧‧heater

401‧‧‧Controllable opening

402‧‧‧ gap

403‧‧‧ openings

61‧‧‧The drum body

62‧‧‧Drum body

62A‧‧‧Drum body

62B‧‧‧Drum body

64‧‧‧Liquid medium

64*‧‧‧ coating

65‧‧‧Porous layer

66‧‧‧Substrate

67‧‧‧Porous layer

70‧‧‧ coating

71‧‧‧Foam layer

71A‧‧‧Drum body

71B‧‧‧Drum body

71C‧‧‧Drum body

71D‧‧‧Drum body

72‧‧‧Perforation

73‧‧‧Perforation

73A‧‧‧Perforation

73B‧‧‧Perforation

74‧‧‧Liquid medium

75‧‧‧Coating

75*‧‧‧ coating

75**‧‧‧Coating

76‧‧‧Substrate

76*‧‧‧Substrate

76**‧‧‧Substrate

77‧‧‧Drum body

77D‧‧‧Porous layer

78‧‧‧ hole

78A‧‧‧ Hole

78B‧‧‧ Hole

79‧‧‧ hole

81‧‧‧heater/cooler

83‧‧‧heater/cooler

84‧‧‧heater/cooler

85‧‧‧heater/cooler

91A‧‧‧Drum body

91B‧‧‧Drum body

95A‧‧‧Foam layer

95B‧‧‧Foam layer

96‧‧‧Substrate

97A‧‧‧ Coating Process

97B‧‧‧Drum body

98A‧‧‧ Coating Process

98B‧‧‧Drum body

99‧‧‧ Storage

1A-1B are schematic diagrams showing a process flow of a device and method for rolling coating according to a preferred embodiment of the present invention; and FIGS. 2A-2B are basic coatings for a roll coating apparatus and method according to a preferred embodiment of the present invention; FIG. 3A to FIG. 3B are schematic diagrams showing various heater configurations of a coating system for a roll coating apparatus and method according to a preferred embodiment of the present invention; FIGS. 4A to 4C are diagrams of a preferred embodiment of the present invention; FIG. 5A to FIG. 5C are schematic diagrams showing a coating process for a rolling coating apparatus and method according to a preferred embodiment of the present invention; FIG. 6A to FIG. Schematic diagram of a roller body for uniform deposition of a device and method for roll coating according to a preferred embodiment; FIGS. 7A to 7I are used for non-uniformity of a device and method for roll coating according to a preferred embodiment of the present invention. FIG. 8A to FIG. 8C are schematic diagrams showing the liquid coating configuration of the apparatus and method for rolling coating according to a preferred embodiment of the present invention; and FIGS. 9A to 9C are used for rolling coating of the preferred embodiment of the present invention. Temperature barrier for equipment and methods A schematic diagram; FIG. 10A ~ 10B is the case of the preferred embodiment of a physical barrier for the rolling apparatus and method of coating a schematic view of the configuration; 11A-11B are schematic views showing other physical barrier configurations of the apparatus and method for roll coating according to a preferred embodiment of the present invention; and FIG. 12 is a line deposition of the apparatus and method for rolling coating according to a preferred embodiment of the present invention. FIG. 13A to FIG. 13C are schematic diagrams showing a deposition process of a device and method for roll coating according to a preferred embodiment of the present invention; and FIGS. 14A to 14C are used for rolling coating according to a preferred embodiment of the present invention; A schematic diagram of another deposition process of the apparatus and method of the present invention; FIG. 15 is a flow chart of liquid deposition of the apparatus and method for rolling coating of the preferred embodiment of the present invention; FIGS. 16A-16B are used for the preferred embodiment of the present invention Flow chart of liquid deposition control of apparatus and method for rolling coating; Fig. 17 is a flow chart of liquid deposition control process for different apparatus and method for rolling coating according to a preferred embodiment of the present invention; Figs. 18A to 18B are A schematic diagram of a basic coating method and apparatus for a roll coating apparatus and method of the preferred embodiment; FIGS. 19A-19E illustrate a drum body for a roll coating apparatus and method according to a preferred embodiment of the present invention FIG. 20A to FIG. 20D are schematic diagrams showing other types of drum bodies for the apparatus and method for rolling coating according to a preferred embodiment of the present invention; and FIGS. 21A to 21C are used for rolling coating according to a preferred embodiment of the present invention. Cloth equipment and FIG. 22A to FIG. 22D are schematic diagrams showing the arrangement of heaters for the apparatus and method for rolling coating according to a preferred embodiment of the present invention; FIGS. 23A to 23C are diagrams for rolling coating of the preferred embodiment of the present invention; FIG. 24A to FIG. 24C are schematic diagrams showing the distribution of liquid medium in an in-line deposition system for a roll coating apparatus and method according to a preferred embodiment of the present invention; FIGS. 25A-25C are diagrams A schematic diagram of a coating process for a roll coating apparatus and a preferred embodiment of the present invention; and FIGS. 26A to 26C are schematic diagrams of a doping process for a roll coating apparatus and method according to a preferred embodiment of the present invention; 27A-27C is a liquid deposition flow chart of a device and method for rolling coating according to a preferred embodiment of the present invention; and FIGS. 28A-28B are liquid deposition of an apparatus and method for roll coating according to a preferred embodiment of the present invention; Control Flowchart; Figures 29A-29B are flow diagrams of different liquid deposition processes for apparatus and methods for roll coating in accordance with a preferred embodiment of the present invention.

37‧‧‧Cooling device

61‧‧‧The drum body

64‧‧‧Liquid medium

64*‧‧‧ coating

65‧‧‧Porous layer

66‧‧‧Substrate

Claims (67)

A fluid supply drum body comprising: an elongated rod comprising a coupler for receiving a fluid on one end of the elongated rod; the elongated rod configured to transfer the fluid from the end of the elongated rod to the A portion of the elongate outer surface of the elongate shaft; a porous layer covering a portion of the elongate outer surface of the elongate shaft for receiving the fluid from an outer surface of the elongate shaft. The fluid supply drum body of claim 1, wherein the fluid supply drum body is configured to deliver a uniform amount of fluid in an elongated direction. The fluid supply drum body of claim 1, wherein the fluid supply drum body is configured to deliver a non-uniform amount of fluid in the elongate direction. The fluid supply type drum body of claim 1, wherein the elongated rod comprises a hollow cylindrical shape and has a perforation on a portion of the cylindrical surface. The fluid supply type drum body of claim 1, further comprising one or more tubular members, the fittings being perforated, the tubular members being embedded in the elongated rod along an elongated direction of the elongated rod. . The fluid supply type drum body of claim 1, wherein the coupler is disposed on an end surface of the elongated rod. The fluid supply type drum body of claim 1, wherein the coupler is disposed on an outer surface adjacent the end surface of the elongated rod. . The fluid supply type drum body of claim 1, wherein the coupler is rotatably coupled to the elongated rod to cause a rotating rod to be coupled to a stationary fluid transmission line. The fluid supply type drum body of claim 1, wherein the porous layer has a pore size or a pore density uniformly distributed along an elongated direction of the elongated rod. The fluid supply type drum body of claim 1, wherein the porous layer has a pore size or a pore density that is non-uniformly distributed along an elongated direction of the elongated rod. The fluid supply type drum body of claim 1, wherein the elongated rod or the porous layer is concave along the elongated direction. A deposition system for depositing a coating on a substrate, comprising: a plurality of fluid supply roller bodies, each roller system comprising an elongated rod, the elongated rod comprising a coupler for receiving on one end of the elongated rod a fluid; the elongate shaft configured to transfer the fluid from the end of the elongate shaft to a portion of the elongate outer surface of the elongate shaft; a porous layer covering a portion of the elongate outer surface of the elongate shaft The porous layer receives the fluid on an outer surface of the elongated rod; a fluid delivery system whereby the fluid is delivered to the drum body. A deposition system for depositing a coating on a substrate, comprising: a plurality of rotatable fluid supply roller bodies, each roller system comprising an elongated rod, the elongated rod comprising a coupler, whereby the elongated rod Receiving a fluid on one end; the elongate shaft is configured to transfer the fluid from the end of the elongate shaft to a portion of the elongate outer surface of the elongate shaft; a porous layer covering one of the elongated outer surfaces of the elongate shaft a portion of the porous layer receiving the fluid on an outer surface of the elongated rod; a stationary fluid delivery line coupled to the coupler for delivering the fluid to the drum body; wherein the coupler is A rotatable element is included to couple the rotatable drum body to the stationary fluid transfer line; a rotating device for rotating the fluid supply drum body. A deposition system for depositing a coating on a substrate as described in claim 13 wherein the rotating device comprises a motor. A deposition system for depositing a coating on a substrate as described in claim 13 wherein the plurality of roller systems rotate at the same rate. A deposition system for depositing a coating on a substrate as described in claim 13 wherein the plurality of roller systems rotate at different rates. A deposition system for depositing a coating on a substrate as described in claim 13 wherein each of the plurality of roller bodies individually adjusts the rate of rotation. A deposition system for depositing a coating on a substrate as described in claim 13 wherein the plurality of fluid supply roller systems are disposed at the top and bottom of the substrate. A deposition system for depositing a coating on a substrate as described in claim 18, wherein the stationary fluid delivery line delivers the same fluid to the top and bottom fluid supply drum bodies. A deposition system for depositing a coating on a substrate as described in claim 18, wherein the fixed fluid delivery line transports different fluids to the top and bottom fluid supply drum bodies. A deposition system for depositing a coating on a substrate as described in claim 13 wherein the plurality of fluid supply roller systems are disposed at the bottom of the substrate and simultaneously transport the substrate as a transfer roller. A deposition system for depositing a coating on a substrate as described in claim 13 wherein the plurality of fluid supply roller systems are disposed on top of the substrate. A deposition system for depositing a coating on a substrate as described in claim 13 wherein the fixed fluid delivery line delivers different fluids to the alternately spaced fluid supply drum bodies. A deposition system for depositing a coating on a substrate according to claim 13 wherein the fixed fluid delivery line is coupled to a fluid system, the fluid system comprising at least a reservoir, a pump, a pressure One of a controller, a flow controller, and a temperature controller. Deposition for depositing a coating on a substrate as described in claim 13 The system further includes one or a plurality of non-fluid supply drum bodies disposed in parallel with the plurality of fluid supply drum bodies. The deposition system for depositing a coating on a substrate according to claim 13 , further comprising one or more heaters disposed adjacent to the plurality of fluid supply roller bodies to adjust deposition coating Floor. A deposition system for depositing a coating on a substrate as described in claim 13 further comprising means for adjusting and controlling the contact pressure between the fluid supply roller body and the substrate. A method for depositing a coating on a substrate, comprising the steps of: causing a fluid to flow to one end of one or more fluid supply drum bodies, wherein the flow system is transferred to a portion of an exterior surface of the drum body; The roller body is caused to contact the surface of the substrate; the roller body is rotated to form a coating on the surface of the substrate. A method for depositing a coating on a substrate as described in claim 28, wherein the fluid supply roller body is more capable of transporting the substrate to advance. The method for depositing a coating on a substrate as described in claim 28 of the patent application. The method further includes the step of rotating one or more of the transport roller bodies disposed under the substrate to move the substrate forward. A method for depositing a coating on a substrate as described in claim 28, wherein the substrate is sandwiched between the top and bottom fluid supply drum bodies. The method for depositing a coating on a substrate according to claim 31, further comprising the steps of: causing different fluids to flow to the top and bottom fluid supply drum bodies; The method for depositing a coating on a substrate, wherein the substrate is sandwiched between a fluid supply roller body and a non-fluid supply roller body. A method for depositing a coating on a substrate as described in claim 28, further comprising the step of causing different fluids to flow to the alternately spaced fluid supply drum bodies. A method for depositing a coating on a substrate as described in claim 28, further comprising the step of: adjusting the coating. The method for depositing a coating on a substrate according to claim 28, further comprising the step of drying the coating through at least one drying drum body or an infrared lamp heater. A method for depositing a coating on a substrate as described in claim 28, further comprising the step of: heating the substrate through an infrared lamp heater. A method for depositing a coating on a substrate as described in claim 28, further comprising the step of controlling a flow rate of the fluid flowing to the fluid supply drum body and a fluid pressure. The method for depositing a coating on a substrate according to claim 28, further comprising the step of controlling a contact pressure between the fluid supply roller body and the substrate, thereby minimizing excessive waste. The method for depositing a coating on a substrate according to claim 28, further comprising the steps of: controlling a flow rate, a fluid concentration, a fluid temperature, a fluid pressure, and a fluid supply roller body and a substrate At least one of the contact pressures between them to minimize droplets on the substrate. The method for depositing a coating on a substrate as described in claim 28 of the patent application. The method wherein the coating has a uniform thickness. A method for depositing a coating on a substrate as described in claim 28, wherein the coating has a non-uniform thickness, wherein the non-uniformity of the thickness is used for compensation of subsequent processes. A method for depositing a doped layer on a substrate, comprising the steps of: causing a fluid of one of the dopant-containing chemicals to flow to one or more of the fluid supply drum bodies, wherein the flow system is transferred to a portion of the outer surface of the roller body; providing the substrate to the fluid supply roller body; causing the roller body to contact the surface of the substrate; rotating the roller body to form a coating on the surface of the substrate. A method for depositing a doped layer on a substrate as described in claim 43 further comprising the step of annealing the substrate to drive the dopant into the substrate. A method for depositing a doped layer on a substrate as described in claim 43 wherein the coating has a non-uniform thickness, wherein the non-uniformity of the thickness is used for compensation of a subsequent annealing process. A method for depositing a coating on a substrate, comprising the steps of: causing a flow of imitation fluid to flow to one end of one or more fluid supply drum bodies, wherein the flow stream system is transferred to a portion of the drum body Surface; heating the substrate; causing the roller body to contact the surface of the substrate; rotating the roller body to form a coating on the surface of the substrate. A method for depositing a doped layer on a substrate as described in claim 46, wherein the flow-through system is maintained at a temperature equal to or less than room temperature. A deposition system for coating a substrate, comprising: a heating device for heating the substrate; one or a plurality of coating roller bodies, each coating roller system comprising a porous layer for receiving and retaining a liquid The liquid system is transferred to the substrate by rolling contact; a temperature control device is coupled to the liquid to control the temperature of the liquid below room temperature. The deposition system for coating a substrate according to claim 48, further comprising: a liquid storage portion for supplying the liquid to the coating drum body; wherein the coating roller system is Contacting the liquid reservoir to obtain the liquid; The temperature control device is coupled to the liquid in the liquid reservoir. The deposition system for coating a substrate according to claim 49, further comprising a stirring mechanism for uniformly heating the temperature of the liquid in the liquid storage. A deposition system for coating a substrate as described in claim 49, wherein the heating device is isolated from the liquid reservoir. A deposition system for coating a substrate as described in claim 49, wherein the temperature of the liquid is less than 10 °C. The deposition system for coating a substrate according to claim 49, further comprising a physical barrier disposed around the coating drum body, the physical barrier comprising two isolated by the physical barrier Limited fluid circulation between parts. A deposition system for coating a substrate according to claim 49, further comprising a temperature control device coupled to the physical barrier to establish a temperature gradient between the two portions. a deposition system for coating a substrate as described in claim 49 of the patent application, There is further included a temperature barrier disposed around the coating drum body, the temperature barrier establishing a temperature gradient between the two regions separated by the temperature barrier. An in-line deposition system for coating a substrate, comprising: one or a plurality of transfer roller bodies for transporting the substrate along the line deposition system; a substrate heater for heating the substrate; and a liquid storage portion comprising a liquid; a cooling device coupled to the liquid reservoir to thereby cool the liquid to a temperature below room temperature; one or a plurality of coating drum bodies, each coating drum system comprising a porous layer, the porous layer The liquid is contacted from the liquid reservoir and transferred to the substrate by rolling contact. An on-line deposition system for coating a substrate as described in claim 56, further comprising an agitation mechanism for equalizing the temperature of the liquid in the liquid reservoir. An in-line deposition system for coating a substrate as described in claim 56, further comprising a circulation system for filtering the liquid circulating the liquid reservoir. An in-line deposition system for coating a substrate according to claim 56, wherein the cooling device is disposed around the one or more coating drum bodies to limit exposure of the liquid to the liquid reservoir. high temperature. An on-line deposition system for coating a substrate according to claim 56, wherein the cooling device comprises a Peltiers device, the hot zone of the Peltier device facing the coating roller The body, the cold zone is the liquid facing the liquid reservoir. An in-line deposition system for coating a substrate as described in claim 56, wherein the heating device is isolated from the liquid reservoir. An on-line deposition system for coating a substrate as described in claim 56, wherein the liquid system comprises a chemical having a decaying property in an environment above room temperature. An on-line deposition system for coating a substrate according to claim 56, further comprising a physical barrier disposed around the coating drum body, the physical barrier comprising two isolated by the physical barrier Limited liquid circulation between parts. An in-line deposition system for coating a substrate according to claim 56, further comprising a temperature control device coupled to the physical barrier to establish a temperature gradient between the two portions. An on-line deposition system for coating a substrate according to claim 56, further comprising a temperature barrier disposed around the coating drum body, the temperature barrier being separated by the temperature barrier A temperature gradient is established between the partial regions. A method comprising the steps of: providing a plurality of rotating drum bodies having a porous layer on a surface thereof; providing a container for holding a fluid, the plurality of rotating drum systems contacting the fluid to transfer the fluid to the porous layer Separating an isolation region around the contact area between the drum body and the fluid; heating the fluid in the isolation zone to a temperature above room temperature or above; cooling the fluid outside the isolation zone to a temperature below room temperature ; restrict the flow of fluid into the isolation zone. The method of claim 66, further comprising the steps of: agitating the fluid outside the isolation zone to a uniform temperature; and circulating the fluid at the liquid reservoir.