TW201401348A - Micro bubble processing device - Google Patents

Abstract

The invention discloses a micro bubble processing device. The micro bubble processing device includes a processing chamber. Two overflow boxes are disposed at different sides of the processing chamber. The processing chamber stores liquid. At least a element to be processed is immersed in the liquid. Two movable flow guide plates and an aeration element are disposed in the processing chamber and immersed in the liquid. One of the movable flow guide plate is disposed between any of the overflow boxes and the element to be processed. The element to be processed is disposed between two movable flow guide plates. The aeration element is disposed below the element to be processed and configured to receive a power for generating uniform and upwardly moving micro bubbles moving along with a linear direction. The micro bubbles touch the surface of the element to be processed and removes the impurities from the surface of the element to be processed. In addition, the micro bubbles keep moving upwardly in the liquid and guided into the overflow box through the movable flow guide plates. The invention can achieve purpose of reducing the cost, improving the clean efficiency and increasing the production.

Description

Micro bubble processing device

The present invention relates to a processing apparatus, and more particularly to a microbubble processing apparatus.

A semiconductor device such as a microprocessor, a memory, a charge coupled device (CCD), or the like, or a manufacturing process of a flat panel display device such as a thin film transistor (TFT) liquid crystal, is used for tantalum or cerium oxide (SiO ₂ ), glass, or the like. The surface of the substrate is formed into a pattern or a thin film from a submicron to a submicron size of 0.1 μm, and it is extremely important to reduce the microscopic contamination on the surface of the substrate in each step of the manufacturing process.

In the pollution of the surface of the substrate, particle pollution, organic matter pollution and metal pollution must be reduced as much as possible. For the removal of such contamination, the surface of the substrate is generally washed with a cleaning solution. This kind of washing must achieve no side effects, short time, and low cost. However, in the prior art, as shown in FIG. 1, a water washing tank of a printed circuit board (PCB) process is exemplified, in which a plurality of air tubes 10 are mounted, and the surface has a plurality of perforations to release air. , generating air bubbles. When the water washing tank stores water, the substrate can be immersed in water, and the upward moving air bubbles can be used to wash the dirt on the surface of the object to be treated, but the air bubbles are not linear when moving. In addition, a flow equalization plate is also arranged at the bottom of the washing tank. Due to the large hole diameter of the plate, the disturbance is generated, and the washing effect is greatly reduced. Furthermore, if the substrate is to be thoroughly washed, for the above reasons, the number of washing tanks is not limited to one, and several washing tanks must be provided to increase the washing effect, but this will increase the length of the equipment and the environmental load, which is invisible. Increase costs.

Accordingly, the present invention has been made in view of the above problems, and a microbubble type processing apparatus has been proposed to solve the problems caused by the prior art.

The main object of the present invention is to provide a microbubble type treatment device which utilizes microbubbles which are continuously and uniformly raised to clean the object to be treated, thereby reducing the number of washing tanks and conveyors, shortening the length of the equipment, and reducing the amount of water used for washing. Reduce costs, improve cleaning efficiency, and increase production.

To achieve the above object, the present invention provides a microbubble type processing apparatus which processes at least one member to be processed, such as a metal plate or a semiconductor substrate. The microbubble processing device comprises a processing tank having an overflow box on each of the opposite sides, the processing tank storing a liquid such as a cleaning liquid or a plating solution. And at least one of the parts to be treated is immersed in the liquid. The movable trough is provided with two movable baffles and an aeration element, all of which are immersed in the liquid. And there is a movable baffle between each overflow box and the to-be-processed part, and the to-be-processed part is located between two movable baffles. The aeration element is located below the material to be treated and receives a power to generate a plurality of microbubbles which are uniformly and linearly traveling in the liquid to process the surface of the member to be treated, and the microbubbles carry impurities on the surface and are in the liquid The middle moves upwards and is guided by the movable baffle into the overflow box.

For a better understanding and understanding of the structural features and the achievable effects of the present invention, please refer to the preferred embodiment and the detailed description.

The first embodiment of the present invention will now be described, see Figs. 2 and 3. The first embodiment of the present invention processes at least one component 12 to be processed, such as a semiconductor substrate or a metal plate. The present invention includes a processing tank 14 having an overflow box 16 on each of the opposite sides, and the processing tank 14 stores a liquid. 18, as water or plating solution as a cleaning liquid, the member to be treated 12 is placed on a support frame 13 and simultaneously immersed in the liquid 18 at the same time. The two movable baffles 20 and the aeration box 24 as an aeration element 22 are disposed in the processing tank 14 and immersed in the liquid 18, wherein the aeration element 22 has a plurality of micropores 26, Each of the micropores 26 has a pore size of from 30 micrometers to 100 micrometers. There is a movable baffle 20 between each overflow box 16 and the to-be-processed member 12, and the to-be-processed member 12 is located between the two movable baffles 20. The aeration element 22 is located below the member to be treated 12, and the aeration element 22 receives a power to generate a plurality of microbubbles that are uniformly and linearly traveling upward from the micropores 26 in the liquid 18 to process the surface of the member 12 to be treated. The microbubbles are carried away from impurities on the surface, such as ions or dirt, and move upward in the liquid 18, and are guided by the two movable baffles 20 into the two overflow boxes 16.

The processing tank 14 further includes a receiving groove 28, and an outer overflow wall 16 is respectively provided with an overflow box 16, the receiving groove 28 and the two overflow box 16 store the liquid 18, and the two movable baffles 20 and The aeration element 22 is disposed in the accommodating groove 28. The aeration element 22 is coupled to an air duct 30 that is coupled to a blower 32 through a receiving slot 28 of the processing tank 14. When the air blower 32 generates an air flow, the air duct 30 receives the air flow to generate the above power.

When the to-be-processed member 12 and the support frame 13 are simultaneously immersed in the liquid 18, the air blower 32 generates an air flow which is sent to the aeration box 24 through the air duct 30, and the aeration box 24 receives the power generated by the air flow to The surface of the member to be treated 12 is treated by the micropores 26 to generate a plurality of microbubbles which are uniformly and linearly traveling upward. If the liquid 18 is a cleaning liquid, the impurities on the surface of the microbubbles are dirt at this time, and since the microbubbles have a linear rising property, the microbubbles and the cleaning liquid can uniformly pass through the surface of the member to be treated 12, so The conventional technique can improve the cleaning effect of the feathers attached to the surface of the member to be treated 12 in the tank to achieve a better uniform washing degree. If the liquid 18 is a plating solution, the impurities on the surface of the microbubbles are ions at this time, and since the microbubbles and the plating solution can uniformly pass through the surface of the member to be treated 12, the average liquid flow can make the plating film thick and surface. The temperature distribution is uniform and has an excellent plating effect. After the impurities are carried away, the microbubbles continue to move upward in the liquid 18, and are guided by the two movable baffles 20 into the two overflow boxes 16 to reduce the distance in the accommodating grooves 28. The sub-concentration is such that the liquid 18 in the accommodating tank 28 contains no impurities. In other words, since the impurities in the accommodating groove 28 are sent into the overflow box 16, it is not necessary to provide a plurality of water tanks to improve the cleaning effect, so that the length of the equipment can be shortened at the same time, and the number of the water tank and the transport machine can be reduced and used. The amount of water washed to reduce the environmental load. In addition, since the number of water tanks can be reduced, if the present invention is installed in a factory building, the existing equipment can be modified, and the additional space can be set to other processing equipment, thereby simultaneously saving space, shortening the processing time, and increasing the throughput. .

Referring to FIG. 4, the aeration box 24 is composed of an air box 34 and a microplate 36. The air box 34 has an opening and is connected to the air duct 30 to receive the power generated by the air flow. 36 has a plurality of micropores 26 and is located on the air box 34 to close the opening and generate microbubbles from the micropores 26 by the power.

The second embodiment of the present invention is described below. In the first embodiment, the aeration element 22 is exemplified by the aeration box 24, see FIGS. 5 and 6, and the aeration element 22 of the second embodiment is exposed. For example, the air tube 38 is disposed in the treatment tank 14 and immersed in the liquid 18, wherein the aeration tube 38 has a plurality of micropores 26, each of which has a pore diameter of 30 micrometers to 100 micrometers. The aeration tube 38 is located below the member to be treated 12, and the aeration tube 38 receives a power to generate a plurality of microbubbles that are uniformly and linearly traveling from the micropores 26 in the liquid 18 to process the surface of the member 12 to be treated. The microbubbles carry away impurities on the surface and move upward in the liquid 18 and are guided by the two movable baffles 20 into the two overflow boxes 16.

The second embodiment is identical in operation to the first embodiment, and thus will not be described again.

In summary, the present invention utilizes the microbubble technology to achieve the purpose of reducing cost, improving cleaning efficiency and throughput.

The above is only a preferred embodiment of the present invention and is not intended to limit the present invention. </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt;

10‧‧‧ air tube

12‧‧‧Spread parts

13‧‧‧Support frame

14‧‧‧Processing tank

16‧‧‧Overflow box

18‧‧‧Liquid

20‧‧‧Active deflector

22‧‧‧Aeration components

24‧‧‧Aeration box

26‧‧‧Micropores

28‧‧‧ accommodating slots

30‧‧‧air duct

32‧‧‧Blowers

34‧‧‧ air box

36‧‧‧Microplate

38‧‧‧Aeration tube

Figure 1 is a perspective view showing the structure of a prior art water washing device.

Fig. 2 is a perspective view showing the structure of the first embodiment of the present invention.

Figure 3 is an exploded view of the first embodiment of the present invention.

Fig. 4 is a perspective view showing the structure of an aeration tank of the present invention.

Fig. 5 is a perspective view showing the structure of a second embodiment of the present invention.

Figure 6 is an exploded view of the second embodiment of the present invention.

12‧‧‧Spread parts

13‧‧‧Support frame

14‧‧‧Processing tank

16‧‧‧Overflow box

18‧‧‧Liquid

20‧‧‧Active deflector

22‧‧‧Aeration components

24‧‧‧Aeration box

26‧‧‧Micropores

28‧‧‧ accommodating slots

30‧‧‧air duct

32‧‧‧Blowers

Claims (11)

A micro-bubble type processing device for processing at least one object to be processed, the micro-bubble processing device comprising: a processing tank having an overflow box on each of the opposite sides, the processing tank storing a liquid, the at least one waiting The processing member is immersed in the liquid; the movable baffle is disposed in the processing tank, and each of the overflow box and the at least one to-be-processed member has the movable baffle, the at least a to-be-processed part is located between the two movable baffles, the two movable baffles are immersed in the liquid; and an aeration element is disposed in the treatment tank and immersed in the liquid, and is located at the Under at least one of the to-be-processed components, the aeration element receives a power to generate a plurality of microbubbles that are uniformly and linearly traveling in the liquid to process the surface of the at least one to-be-processed component, the micro-bubbles being removed from the surface The upper impurity moves upward in the liquid and is guided by the two movable baffles into the two overflow boxes. The microbubble treatment device of claim 1, wherein the aeration element is an aeration tank or an aeration tube. The microbubble treatment device of claim 1, wherein the aeration element has a plurality of micropores, and the microbubbles are generated by the micropores. The microbubble treatment device according to claim 3, wherein each of the micropores has a pore diameter of 30 μm to 100 μm. The micro-bubble processing device of claim 1, further comprising: a blower to generate a gas flow; and an air duct connecting the aeration element and connecting the blower through the treatment tank, the guide The air duct receives the air flow to generate the power. The micro-bubble processing device of claim 1, wherein the processing tank further comprises a receiving groove, wherein the outer wall of each of the two sides is respectively provided with an overflow box, and the receiving groove and the overflow box are stored. The liquid is provided, and the two movable baffles and the aeration element are disposed in the accommodating groove. The microbubble treatment device of claim 1, wherein the at least one to-be-processed member is disposed on a support frame and simultaneously immersed in the liquid. The microbubble processing apparatus of claim 1, wherein the at least one object to be processed is a metal plate or a semiconductor substrate. The microbubble treatment device of claim 1, wherein the liquid is a cleaning liquid or a plating solution. The microbubble treatment device of claim 9, wherein the cleaning liquid is water. The microbubble treatment device of claim 1, wherein the impurity is an ion or a dirt.