TW201350857A - Height adjustable docking equipment - Google Patents

Abstract

A mechanical locking system interface of an electronic test head to a test handling equipment for an Integrated circuit (IC) device testing. The system includes an assembly to adjust the locking height between the Electronic Test Head surface and the Automated Test Handling equipment docking base surface. The system includes a chain driven leadscrews to set the locking height of the system. The System also includes a position indicator instrument to gauge the locking height.

Description

Synchronous adjustable docking height method

This invention relates to docking of test disposal equipment, and more particularly to docking systems that use height adjustment or locking height of a lead screw driven by a chain.

Docking systems between electronic test heads (also known as "testers") and test disposal equipment (handlers) have long been known and are widely used in integrated circuit (IC) manufacturing (more specifically, Used in IC test procedures). These docking systems are particularly useful for coupling testers to processors (testers and handlers are typically manufactured as two separate systems) to provide a seamless test procedure.

Various types of docking systems are commercially available. Such docking systems typically include a handler panel assembly having a fixed gusset thickness and a cam follower or fixed locking coupling mechanism for docking with the tester panel assembly, the tester panel assembly including A locking cam that is powered by one or more actuating devices that are actuated by the docking station. Some of these docking systems are exemplified in, for example, U.S. Patent Nos. 5,654,631, 5,744,974, 5,821,764, 5,982,182, and 6,104,202. Although such docking systems have achieved some commercial success, they still need to be continued whenever possible. Improvement.

As indicated above, the docking system has a fixed gusset or spacer that sets a specific locking distance between the test head and a defined plane of the handler, the plane and the three-dimensional Cartesian coordinates The XY plane of the system (Cartesian coordinate system) is parallel. The locking distance is perpendicular to the X-Y plane along the Z direction. The locking distance is represented by the stack height of the test socket interface and the socket board relative to the surface of the load board. This stack height is also referred to as the Z height.

The Z height often varies depending on the thickness of the test socket and the thickness of the socket plate. This change needs to be adapted to the appropriate gusset or spacer thickness, thereby increasing the cost of ownership of the docking system, not to mention the production downtime caused by the docking system on the handler.

As IC design and applications continue to advance, IC manufacturing processes must continue to evolve and adapt to the ever-changing development of ICs. The overall part of the hardware solution for IC manufacturing also faces the challenge of meeting the requirements of IC design and application during manufacturing. More specifically, for test socket design and capabilities, and for many test socket manufacturers in the market, the overall socket thickness design envelope will always vary from design to design.

While most individual IC component manufacturers have attempted to standardize socket thicknesses, continued advances in IC design and applications have made it difficult to maintain a standard socket thickness, so there is a continuing need to change the Z height of the docking system.

On the other hand, IC component contract manufacturers have a large number of customers, and these customers have different sets of test equipment hardware. Set up the device hardware (more specifically, The test head and the handler docking interface will always encounter various Z heights between different testers and the handler. In the case of conventional docking systems, constantly changing the height of the gusset or spacer to suit the desired Z height can result in a significant amount of time to perform, which translates into downtime on the manufacturing process. This adversely affects overall equipment or manufacturing efficiency.

In accordance with one aspect of the present invention, a height adjustable docking plate for mounting on a tester or handler device suitable for integrated circuit testing is provided. The docking plate includes: a linear actuator mounted on the docking plate, the linear actuator having a sprocket attached to the linear actuator; a plurality of gussets, via each gusset At least one lead screw is disposed along an edge of the docking plate, each lead screw is engaged with the sprocket; and a closed loop chain is used to conform to all of the sprockets along its length. The linear actuator operatively drives the closed loop chain to move through the sprocket attached to the linear actuator, which in turn drives all of the sprockets to rotate synchronously, thereby The docking plate raises the gussets synchronously at the Z height.

In one embodiment, the linear actuator is movably mounted to the docking plate whereby the linear actuator is moved away from the docking plate to provide tension to the roller chain assembly. The height adjustable docking plate further includes a plurality of sprockets mounted on the docking plate. The sprocket can be aligned along the length of the closed loop chain to act as a roller chain guide. The height adjustable docking plate may further comprise a meter attached to the linear actuator for metering a raised distance of the gusset.

In another embodiment, each gusset is connected to two lead screws.

In another aspect, an integrated circuit (IC) component test is provided The electronic test head is interfaced with the mechanical locking system of the test and disposal equipment. The system can include an assembly for adjusting a locking height between an electronic test head surface and an automated test treatment device docking base surface. The system includes a chain drive lead screw for setting a locking height of the system. The system also includes a position indicator instrument for metering the locking height.

100‧‧‧Dock board

101‧‧‧Roller chain assembly

102‧‧‧Actuator

103‧‧‧Sprocket

104‧‧‧ lead screw

105‧‧‧ gusset

106‧‧‧meter

Preferred embodiments in accordance with the present invention and the prior art will be described with reference to the accompanying drawings in which like reference numerals indicate

1 illustrates a perspective view of a docking plate 100 equipped with an adjustable elevator assembly in accordance with one embodiment of the present invention.

Figure 2 illustrates an enlarged view of the actuator of Figure 1.

Embodiments of the present invention will now be described in detail with reference to the drawings. It is to be understood that the scope of the present invention is not intended to be limited by the scope of the present invention.

In view of the above discussion, the present invention entails providing an adjustable Z-height mechanism to the docking plate for the tester and the handler.

Figure 1 illustrates an assembly with adjustable lift in accordance with one embodiment of the present invention A perspective view of the docking station 100 of the machine assembly. The docking plate 100 is used to dock the test head and the handler. In order to couple the test head to the handler/couple the test head to the handler, typically the docking plate is used to mount to the test head or handler and for use with another docking plate or component suitable for the other side Coupling. The docking plate 100 is typically a metal plate that is fabricated as a generally square frame with a square window through which IC test operations are performed. The docking plate 100 is equipped with an associated profile that is adapted to the corresponding handler or tester. Although the illustrative examples as presented herein provide only one particular docking plate that can be associated with a particular tester or handler, those skilled in the art will readily appreciate that the present invention is applicable to other manufacturers and Model tester or docker or system for the handler.

Referring back to FIG. 1, instead of a typical gusset or spacer as required for a conventional docking plate, for a handler or tester, the docking plate 100 is provided with an adjustable elevator assembly that is positionable relative to the docking plate 100. Adjust on height (or Z height). The adjustable elevator assembly includes a roller chain assembly 101, an actuator 102, a plurality of sprockets 103, a lead screw 104, and four gussets 105.

The roller chain assembly 101 includes a closed loop chain disposed on a surface of the docking plate 100 and erected on the surface along a frame of the docking plate around the window of the docking plate. The roller chain assembly 101 is engaged with the actuator 102 via a sprocket 103, a lead screw 104, and four gussets 105 such that all of these features are simultaneously actuated via the roller chain assembly. The actuator 102 is a linear actuator, preferably equipped with a meter indicating the distance or height adjusted via the actuator 102. An enlarged view of the actuator 102 is also illustrated in FIG. The actuator of Figure 2 is equipped with a knob handle to allow actuation via a rotary knob handle The actuator 102. The actuator 102 can be mounted anywhere along the outer edge of the docking plate. Preferably, the actuator 102 is mounted on a support that is movable relative to the docking plate 100. More preferably, the actuator 102 is movable along the X-Y plane. Movement of the actuator 102 assists in creating tension to tension the roller chain assembly 101. Once the desired tension is reached, the actuator 102 can be locked in place on the support.

Four gussets 105 are disposed on the frame of the docking plate 100 with a gusset on each side. The gusset 105 is supported on the docking plate 100 via a lead screw 104. Specifically, in FIG. 1, each gusset is equipped with two lead screws, wherein when the lead screw 104 rotates, the gusset rises and falls relative to the docking plate 100 at the Z height. As shown, the gusset 105 is further provided with a cam follower for engaging a coupling cam on the handler or tester to be mounted.

It is well known in the art that such docking plates for testers or handlers are equipped with alignment members such as sockets, pins and the like. This is typically located on a gusset or spacer for aligning the docking plate and associated equipment prior to fastening the associated equipment to the docking plate.

Still referring to FIG. 1, a plurality of sprockets 103 are disposed at various locations on the surface of the docking plate 100. The roller chain assembly 101 conforms to the sprocket 103 along a closed loop chain. Some of the sprocket 103 serve as a roller chain guide and some use a drive sprocket. In particular, a sprocket is directly coupled to the actuator 102 to drive the roller chain assembly 101. Each lead screw 104 also engages a drive sprocket that also conforms to the roller chain assembly 101. The remaining sprocket 103 acting as a roller chain guide is mounted in position to guide the closed loop chain around the frame of the docking plate 100 on the surface.

In operation, the user only needs to rotate the knob of the actuator 102 to drive The roller chain assembly 101, and the roller chain assembly 101, in turn, drives all of the drive sprocket to rotate simultaneously. The lead screw 104 is driven by a driver sprocket to drive the respective gussets 105 up/down in the Z height direction.

The meter can be used as a position indicator for metering the height of the gusset movement. The user is thus able to precisely control and adjust the distance or height relative to the gusset of the docking plate.

FIG. 2 illustrates a close-up view of a linear actuator 102 in accordance with one embodiment of the present invention. Meter 106 can be better seen in FIG.

In an alternative embodiment of the invention, the sprocket acting as a roller chain guide is movably mounted on the docking plate whereby movement relative to the roller chain creates tension on the roller chain to tension the roller chain assembly .

While the invention has been described and illustrated, it will be understood that

100‧‧‧Dock board

101‧‧‧Roller chain assembly

102‧‧‧Actuator

103‧‧‧Sprocket

104‧‧‧ lead screw

105‧‧‧ gusset

Claims (5)

A height adjustable docking plate for mounting on a tester or handler device for integrated circuit testing, the docking plate comprising: a linear actuator mounted on the docking plate, The linear actuator has a sprocket attached to the linear actuator; a plurality of gussets disposed along an edge of the docking plate via at least one lead screw on each gusset, each lead screw and chain a wheeled engagement; a closed loop chain for aligning with all of the sprocket along its length, wherein the linear actuator operatively drives the closed loop chain to move through attachment to the linear actuator The sprocket, which in turn drives all of the sprockets to rotate synchronously, thereby simultaneously raising the gusset at a Z height relative to the docking plate. The height adjustable docking plate of claim 1, wherein the linear actuator is movably mounted to the docking plate, thereby moving the linear actuator away from the dock A tab provides tension to the roller chain assembly. The height adjustable docking plate of claim 1, further comprising a plurality of sprockets mounted on the docking plate, wherein the sprockets are consistent along the length of the closed loop roller chain To act as a roller chain guide. The height adjustable docking plate of claim 1, further comprising a meter attached to the linear actuator for metering a raised distance of the gusset. The height adjustable docking board according to claim 1, wherein Each gusset is connected to two lead screws.