TW201346402A - Device for inspecting liquid crystal dispensing state and liquid crystal dispenser having the same - Google Patents

Device for inspecting liquid crystal dispensing state and liquid crystal dispenser having the same Download PDF

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TW201346402A
TW201346402A TW101125745A TW101125745A TW201346402A TW 201346402 A TW201346402 A TW 201346402A TW 101125745 A TW101125745 A TW 101125745A TW 101125745 A TW101125745 A TW 101125745A TW 201346402 A TW201346402 A TW 201346402A
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liquid crystal
polarizing plate
substrate
light
light source
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TW101125745A
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Chinese (zh)
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TWI560505B (en
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Seon-Pil Yun
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Top Eng Co Ltd
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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1313Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells specially adapted for a particular application
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1341Filling or closing of cells
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2203/00Function characteristic
    • G02F2203/69Arrangements or methods for testing or calibrating a device

Abstract

Disclosed herein are a device for inspecting a liquid crystal dispensing state of a substrate on which a liquid crystal is dispensed, and a liquid crystal dispenser having the device. The dispensing-state inspecting device includes a light source having a first polarizing plate, and an inspection camera having a second polarizing plate. Light emitted from the light source passes through the first polarizing plate to be radiated to the substrate on which a liquid crystal is dispensed, and light reflected or refracted by the substrate or liquid crystal is incident on the inspection camera through the second polarizing plate.

Description

檢查液晶塗佈狀態的裝置及有此裝置的液晶塗佈機 Device for checking liquid crystal coating state and liquid crystal coating machine having the same

本發明一般係關於檢查液晶塗佈狀態的裝置及有此裝置的液晶塗佈機。更具體而言,本發明係關於檢查塗有液晶之基板的液晶塗佈狀態的裝置及有此裝置的液晶塗佈機。 The present invention generally relates to an apparatus for inspecting a liquid crystal coating state and a liquid crystal coater having the same. More specifically, the present invention relates to an apparatus for inspecting a liquid crystal coating state of a substrate coated with a liquid crystal, and a liquid crystal coater having the same.

液晶顯示器(LCD)為一種使用液晶之光調變性質的顯示器。一般而言,LCD的製造係藉由放置液晶層在具有彩色濾光層的基板與設置驅動裝置的基板之間,接著將兩個基板彼此接合。 A liquid crystal display (LCD) is a display that uses the light modulation properties of liquid crystals. In general, an LCD is manufactured by placing a liquid crystal layer between a substrate having a color filter layer and a substrate on which a driving device is disposed, and then bonding the two substrates to each other.

液晶塗佈機為一種在LCD製造程序中將液晶塗佈於基板上的裝置。液晶塗佈機組態為以液滴或細微顆粒形式將液晶塗佈於基板上。 A liquid crystal coater is a device that applies liquid crystal on a substrate in an LCD manufacturing process. The liquid crystal coater is configured to apply liquid crystal on the substrate in the form of droplets or fine particles.

液晶塗佈機塗佈在基板上的液晶量必須盡可能精確地控制在預設的誤差範圍內。為達此目的,韓國專利964949號提出一種精確控制液晶滴數目的方法。根據上述專利,可以相當可靠的方式計算液晶滴的數目。 The amount of liquid crystal coated on the substrate by the liquid crystal coater must be controlled as accurately as possible within a preset error range. To this end, Korean Patent No. 964949 proposes a method of precisely controlling the number of liquid crystal droplets. According to the above patent, the number of liquid crystal droplets can be calculated in a fairly reliable manner.

同時,本發明的發明人發現需要檢查基板的液晶塗佈狀態。此乃需要偵測液晶並非精確塗佈的狀況,例如在液晶塗佈程序期間某些液晶滴並未正常排出的狀況,或是液晶並未依據預定液晶塗佈圖案進行塗佈的狀況。 Meanwhile, the inventors of the present invention found that it is necessary to inspect the liquid crystal coating state of the substrate. This is a condition in which it is necessary to detect that the liquid crystal is not precisely coated, for example, a condition in which some liquid crystal droplets are not normally discharged during the liquid crystal coating process, or a state in which the liquid crystal is not coated according to a predetermined liquid crystal coating pattern.

因此,本發明有鑒於先前技術所發生的問題,本發明之一目的在於提供一種檢查液晶塗佈狀態的裝置,其藉由取得塗佈有液晶之基板的影像。 Accordingly, the present invention has been made in view of the problems occurring in the prior art, and an object of the present invention is to provide an apparatus for inspecting a liquid crystal coating state by obtaining an image of a substrate coated with a liquid crystal.

本發明之另一目的在於提供一種液晶塗佈機,其具有檢查液晶塗佈狀態的裝置。 Another object of the present invention is to provide a liquid crystal coater having means for inspecting a liquid crystal coating state.

為了達成上述目的,本發明提供一種檢查液晶塗佈狀態的裝置,包含:光源,用於發射光、第一偏光板,係提供在光源及基板之間,液晶係塗佈於基板上,第一偏光板選擇性地讓自光源發射的光通過、第二偏光板,係選擇性地讓通過第一偏光板後被基板或液晶所反射或折射的光通過、以及檢查攝像機,係接收已通過第二偏光板的光並將光轉換成電訊號。 In order to achieve the above object, the present invention provides an apparatus for inspecting a liquid crystal coating state, comprising: a light source for emitting light, a first polarizing plate, being provided between the light source and the substrate, and the liquid crystal system being coated on the substrate, first The polarizing plate selectively passes the light emitted from the light source through the second polarizing plate, selectively passes the light reflected or refracted by the substrate or the liquid crystal after passing through the first polarizing plate, and inspects the camera, and receives the passed The light of the two polarizers converts the light into electrical signals.

根據本發明之塗佈狀態檢查裝置可更包含:主框架、托台,係提供在主框架上部之預定位置以支撐基板、以及支撐框架,提供於主框架上部之預定位置,其中光源及檢查攝像機裝設至支撐框架。 The coating state inspection device according to the present invention may further include: a main frame, a pallet, a predetermined position at an upper portion of the main frame to support the substrate, and a support frame provided at a predetermined position on the upper portion of the main frame, wherein the light source and the inspection camera Installed to the support frame.

根據一實施例,塗佈狀態檢查裝置可更包含旋轉裝置,用於調整第一偏光板或提供於檢查攝像機上之第二偏光板之偏極方向。 According to an embodiment, the coating state inspection device may further include a rotation device for adjusting a polarization direction of the first polarizing plate or the second polarizing plate provided on the inspection camera.

此裝置可更包含控制單元,其分析得自檢查攝像機的影像,並藉由旋轉裝置控制第一偏光板或第二偏光板的旋轉角。 The apparatus may further include a control unit that analyzes an image obtained from the inspection camera and controls a rotation angle of the first polarizing plate or the second polarizing plate by the rotating device.

再者,提供於光源上的第一偏光板的偏極方向可平行於在基板上處理的摩擦方向。 Furthermore, the polarization direction of the first polarizing plate provided on the light source may be parallel to the rubbing direction processed on the substrate.

根據一實施例,光源可沿著支撐框架側向提供,且檢查攝像機可為線掃描攝像機或區域掃描攝像機。 According to an embodiment, the light source may be provided laterally along the support frame, and the inspection camera may be a line scan camera or an area scan camera.

為了達成上述目的,本發明提供一種液晶塗佈機,用於塗佈液晶至基板,其包含:主框架、托台,係提供在主框架上部之預定位置以支撐基板、支撐框架,係提供於主框架上部之預定位置、塗佈頭單元,係提供於支撐框架之預定位置以塗佈液晶、光源,係提供於支撐框架之預定位置,其中第一偏光板提供於光源之光輸出埠上、以及檢查攝像機,係提供於支撐框架之預定位置,其中第二偏光板提供於其光入射面上。 In order to achieve the above object, the present invention provides a liquid crystal coating machine for coating liquid crystal to a substrate, comprising: a main frame and a pallet, which are provided at predetermined positions on the upper portion of the main frame to support the substrate and the support frame, and are provided in a predetermined position of the upper part of the main frame, the coating head unit is provided at a predetermined position of the supporting frame to apply the liquid crystal and the light source, and is provided at a predetermined position of the supporting frame, wherein the first polarizing plate is provided on the light output port of the light source, And the inspection camera is provided at a predetermined position of the support frame, wherein the second polarizing plate is provided on the light incident surface thereof.

根據一實施例,塗佈頭單元及檢查攝像機可提供在支撐框架的兩側上。 According to an embodiment, the coating head unit and the inspection camera may be provided on both sides of the support frame.

再者,液晶塗佈機可提供在支撐框架上。支撐框架可包含外力裝置,以施加外力至塗佈在基板上的液晶。外力裝置可包含超音波產生器、電離器、電漿產生器以及電場產生器中的任一者。 Further, a liquid crystal coater can be provided on the support frame. The support frame may include an external force device to apply an external force to the liquid crystal coated on the substrate. The external force device may include any of an ultrasonic generator, an ionizer, a plasma generator, and an electric field generator.

再者,若根據分析得自檢查攝像機之影像的結果認為塗佈在基板上之液晶的狀態為缺陷的,則可執行控制操作以藉由塗佈頭單元額外塗佈液晶。 Further, if the state of the liquid crystal coated on the substrate is considered to be defective based on the result of analyzing the image obtained from the inspection camera, a control operation can be performed to additionally coat the liquid crystal by the coating head unit.

於後,將參考伴隨圖式詳細說明本發明較佳實施例。應注意,不同圖式中相同或類似的元件會具有相同的參考符號。再者,為了加強說明清晰性,會省略與本發明有關的熟悉功能及架構。再者,於下說明本發明較佳實施例,但是熟此技藝者應瞭解本發明的技術概念不受限於較佳實施例,而可有各種其他形式。 Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. It should be noted that the same or similar elements in the different drawings will have the same reference numerals. Furthermore, in order to enhance the clarity of the description, the familiar functions and architectures related to the present invention will be omitted. Furthermore, the preferred embodiments of the present invention are described below, but those skilled in the art should understand that the technical concept of the present invention is not limited to the preferred embodiments, and various other forms are possible.

圖1為顯示本發明較佳實施例之檢查液晶塗佈狀態的裝置之透視圖,而圖2為顯示本發明較佳實施例之檢查液晶塗佈狀態的裝置之示意圖。 BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing an apparatus for inspecting a liquid crystal coating state according to a preferred embodiment of the present invention, and Fig. 2 is a schematic view showing an apparatus for inspecting a liquid crystal coating state according to a preferred embodiment of the present invention.

根據本發明較佳實施例之檢查液晶塗佈狀態的裝置1包含具有第一偏光板22的光源20以及具有第二偏光板32的檢查攝像機30。塗佈狀態檢查裝置1亦可包含裝設光源20及檢查攝像機30的支撐框架16、支撐基板12的托台14以及裝設支撐框架16及托台14的主框架10。支撐框架16可組態為相對於基板12進行線性移動。為達此目的,可提供支撐框架驅動單元18。根據一實施例,支撐框架驅動單元18可為線性馬達。圖2的參考符號13,表示塗佈在基板12上的液晶13。再者,根據本發明較佳實施例之塗佈狀態檢查裝置1可包含控制單元40,其處理得自檢查攝像機30的影像,且包含輸出所得影像的顯示單元42。 The apparatus 1 for inspecting a liquid crystal coating state according to a preferred embodiment of the present invention includes a light source 20 having a first polarizing plate 22 and an inspection camera 30 having a second polarizing plate 32. The coating state inspection apparatus 1 may include a support frame 16 on which the light source 20 and the inspection camera 30 are mounted, a pallet 14 that supports the substrate 12, and a main frame 10 on which the support frame 16 and the pallet 14 are attached. The support frame 16 can be configured to move linearly relative to the substrate 12. To this end, a support frame drive unit 18 can be provided. According to an embodiment, the support frame drive unit 18 can be a linear motor. Reference numeral 13 of Fig. 2 denotes a liquid crystal 13 coated on a substrate 12. Furthermore, the coating state inspection apparatus 1 according to the preferred embodiment of the present invention may include a control unit 40 that processes images obtained from the inspection camera 30 and includes a display unit 42 that outputs the resulting image.

光源20發射例如藍光、紅光或可見光等光。根據一實施例,光源20沿支撐框架16長度方向設置而橫越基板12。自光源20發射的光於水平方向(假設支撐框架16的移動方向為垂直方向)照到基板12。光源20的光輸出埠具 有第一偏光板22。第一偏光板22將光源20發射的光偏極於特定方向,且僅經第一偏光板22偏極化的光會照到基板12。於此,光源20的照射方向可設定為檢查攝像機30取得影像的區域。 The light source 20 emits light such as blue light, red light, or visible light. According to an embodiment, the light source 20 is disposed across the substrate 12 along the length of the support frame 16. The light emitted from the light source 20 is incident on the substrate 12 in the horizontal direction (assuming that the moving direction of the support frame 16 is the vertical direction). Light output cooker for light source 20 There is a first polarizing plate 22. The first polarizing plate 22 deflects the light emitted from the light source 20 in a specific direction, and only the light polarized by the first polarizing plate 22 illuminates the substrate 12. Here, the irradiation direction of the light source 20 can be set as an area in which the inspection camera 30 acquires an image.

檢查攝像機30取得基板12的影像。根據一實施例,檢查攝像機30可為區域掃描攝像機或線掃瞄攝像機。區域掃描攝像機一次僅可掃瞄及傳輸一個圖框。區域掃描攝像機使用具有複數水平畫素及複數垂直畫素的影像感測器。線掃描攝像機使用僅具有單一列水平畫素的影像感測器,因而取得線的影像。在使用區域掃描攝像機或線掃描攝像機作為檢查攝像機30的案例中,檢查攝像機30所得的影像必須是捕捉到光源20發射的光照到基板12之區域而獲得的影像。 The inspection camera 30 acquires an image of the substrate 12. According to an embodiment, the inspection camera 30 can be an area scan camera or a line scan camera. The area scan camera can only scan and transmit one frame at a time. The area scan camera uses an image sensor with a plurality of horizontal pixels and a plurality of vertical pixels. The line scan camera uses an image sensor with only a single column of horizontal pixels, thus taking an image of the line. In the case of using the area scanning camera or the line scanning camera as the inspection camera 30, the image obtained by the inspection camera 30 must be an image obtained by capturing the light emitted from the light source 20 to the area of the substrate 12.

第二偏光板32提供在檢查攝像機30的前端上。因此,檢查攝像機30僅識別在特並方向偏極化的光。 The second polarizing plate 32 is provided on the front end of the inspection camera 30. Therefore, the inspection camera 30 recognizes only light polarized in the specific direction.

根據一實施例,控制單元40將檢查攝像機30所得的影像輸出至顯示單元42。再者,控制單元40作用為分析自檢查攝像機30所得的影像,因而判斷是否正常塗佈液晶。判斷是否正常塗佈液晶的範例包含可計算實際塗佈的液晶數量或配置,並與正常塗佈的液晶數量或配置進行比較。 According to an embodiment, the control unit 40 outputs the image obtained by the inspection camera 30 to the display unit 42. Furthermore, the control unit 40 functions to analyze the image obtained from the inspection camera 30, and thus determines whether or not the liquid crystal is normally applied. An example of determining whether a liquid crystal is normally applied includes calculating the amount or configuration of the actual applied liquid crystal and comparing it to the amount or configuration of the normally coated liquid crystal.

此種控制單元40可基於自檢查攝像機30所得的影像執行以下至少一種功能:計算塗在基板12上的液晶數量的功能、將預設液晶塗佈圖案與實際塗佈的液晶圖案進行 比較的功能、計算塗佈的液晶數量並計算塗在基板上之液晶總量(單位液晶的重量x塗佈的液晶數量)的功能或比較所塗液晶的尺寸與以正常狀態塗佈的液晶尺寸並因此判斷所塗液晶是否適當的功能。 Such a control unit 40 can perform at least one of the following functions based on the image obtained from the inspection camera 30: a function of calculating the amount of liquid crystal coated on the substrate 12, and performing a preset liquid crystal coating pattern with the actually applied liquid crystal pattern. Compare functions, calculate the number of coated liquid crystals, and calculate the function of the total amount of liquid crystal (weight of unit liquid crystal x number of coated liquid crystals) coated on the substrate or compare the size of the coated liquid crystal with the size of the liquid crystal coated in a normal state. Therefore, it is judged whether or not the liquid crystal to be coated is appropriate.

圖3A及圖3B為顯示本發明較佳實施例之檢查液晶塗佈狀態的裝置中偏光板的配置圖。 3A and 3B are configuration diagrams showing a polarizing plate in an apparatus for inspecting a liquid crystal coating state according to a preferred embodiment of the present invention.

如圖3A所示,第一偏光板22及第二偏光板32可配置為使其偏極方向彼此相同。選替地,第一偏光板22及第二偏光板32可配置為使其偏極方向彼此垂直,如圖3B所示。然而,根據本發明之一實施例,第一偏光板22的偏極方向與第二偏光板32的偏極方向之間的角度不限於圖3A或圖3B所示的角度,而是只要能改善塗到基板12之液晶的影像品質就可以在0°至90°的範圍調整。 As shown in FIG. 3A, the first polarizing plate 22 and the second polarizing plate 32 may be disposed such that their polarization directions are identical to each other. Alternatively, the first polarizing plate 22 and the second polarizing plate 32 may be configured such that their polarization directions are perpendicular to each other as shown in FIG. 3B. However, according to an embodiment of the present invention, the angle between the polarization direction of the first polarizing plate 22 and the polarization direction of the second polarizing plate 32 is not limited to the angle shown in FIG. 3A or FIG. 3B, but may be improved. The image quality of the liquid crystal applied to the substrate 12 can be adjusted in the range of 0° to 90°.

於本發明中,第一偏光板22提供在光源20之光輸出埠上而第二偏光板32提供在檢查攝像機30前端的原因如下:液晶的狀態為具有液體與晶體間之性質的物質狀態,且亦稱為準晶體或異向性液體。液晶為液體時具有晶體的光學性質。若施加電場至液晶,則會改變分子配置的方向性。LCD在使用施加電壓至液晶分子時將液晶分子配向在相同方向的性質時,藉由控制光的穿透性來顯示影像。 In the present invention, the reason why the first polarizing plate 22 is provided on the light output port of the light source 20 and the second polarizing plate 32 is provided on the front end of the inspection camera 30 is as follows: the state of the liquid crystal is a state of matter having a property between liquid and crystal, Also known as quasicrystal or anisotropic liquid. When the liquid crystal is a liquid, it has the optical properties of a crystal. If an electric field is applied to the liquid crystal, the directivity of the molecular arrangement is changed. The LCD displays an image by controlling the transmittance of light when the liquid crystal molecules are aligned in the same direction when a voltage is applied to the liquid crystal molecules.

在LCD中最常使用的是向列型液晶(nematic liquid crystal)。在向列型液晶中,條狀液晶分子幾乎配向在一致的方向,並且沒有層疊結構。大部分的液晶分子具有硬條狀。液晶具有光學異向性質,其在與分子軸平行的方向及垂直的方向具有不同的折射率。這些性質使得偏極化的光在通過液晶時改變了偏極方向。在LCD中,施加電場至液晶而將液晶配置成所欲形式,因而控制光的穿透性。 The most commonly used in LCD is nematic liquid crystal (nematic liquid) Crystal). In the nematic liquid crystal, the strip liquid crystal molecules are almost aligned in a uniform direction, and there is no laminated structure. Most of the liquid crystal molecules have a hard strip shape. Liquid crystals have optically anisotropic properties that have different refractive indices in directions parallel to the molecular axis and in the direction perpendicular. These properties cause the polarized light to change the direction of the polarization when passing through the liquid crystal. In the LCD, an electric field is applied to the liquid crystal to configure the liquid crystal in a desired form, thereby controlling the penetration of light.

在液晶塗佈於基板12上的實例中,液晶配置成即使在未施加電場時仍具有某程度的方向性。舉例而言,當液晶塗佈於歷經摩擦程序的基板12上,極可能使液晶的位向與摩擦方向一致。當檢查已歷經摩擦程序之基板12的液晶塗佈狀態時,第一偏光板22的偏極方向可設定為對應於基板12的摩擦方向。此乃因為液晶的位向極可能與摩擦方向一致。 In the example in which the liquid crystal is coated on the substrate 12, the liquid crystal is configured to have a certain degree of directivity even when an electric field is not applied. For example, when liquid crystal is applied to the substrate 12 that has been subjected to the rubbing process, it is highly likely that the orientation of the liquid crystal coincides with the rubbing direction. When the liquid crystal coating state of the substrate 12 that has passed through the rubbing process is inspected, the polarization direction of the first polarizing plate 22 can be set to correspond to the rubbing direction of the substrate 12. This is because the orientation of the liquid crystal is likely to coincide with the rubbing direction.

將考慮光源20發射的光被第一偏光板22偏極化然後照到基板12的案例。若是水滴而非液晶滴落在基板12上,被第一偏光板22偏極化的光會被水滴折射及反射,但是不會改變偏極方向。然而,若是液晶落在基板12上,被第一偏光板22偏極化的光會因為液晶而改變偏極方向,且偏極方向改變的光會入射至檢查攝像機30。於此,被液晶所改變的偏極方向可具有許多各種方向。 A case in which light emitted from the light source 20 is polarized by the first polarizing plate 22 and then irradiated to the substrate 12 will be considered. If water droplets, rather than liquid crystals, drips on the substrate 12, the light polarized by the first polarizing plate 22 is refracted and reflected by the water droplets, but does not change the direction of the polarization. However, if the liquid crystal falls on the substrate 12, the light polarized by the first polarizing plate 22 changes the direction of the polarization due to the liquid crystal, and the light whose direction of the polarization changes is incident on the inspection camera 30. Here, the direction of the polarization which is changed by the liquid crystal can have many various directions.

當第一偏光板22及第二偏光板32具有如圖3A所示的偏極方向時,基板12所反射的光會以光的偏極方向並未改變的方式入射至檢查攝像機30。因此,檢查攝像機30捕捉到之基板12之區域的影像會是明亮的。相對地,液晶所反射或折射的光會以光的偏極方向改變的方式入 射至檢查攝像機30,使得某些光不會通過第二偏光板32。因此,具有液晶的部分會比基板12的區域還暗。同時,當第一偏光板22及第二偏光板32具有如圖3B所示的偏極方向時,基板12所反射的光以偏極方向並未改變的方式入射至檢查攝像機30。因此,光被第二偏光板32擋住,使得檢查攝像機30捕捉到之基板12之區域的影像會是暗的。相對地,液晶所反射或折射的光會以偏極方向改變的方式入射至檢查攝像機30。因此,某些光會通過第二偏光板32,造成具有液晶的部分會比基板12的區域還亮。此種原理使檢查攝像機30能更清楚識別塗佈於基板12上的液晶13。 When the first polarizing plate 22 and the second polarizing plate 32 have the polarization direction as shown in FIG. 3A, the light reflected by the substrate 12 is incident on the inspection camera 30 in such a manner that the polarization direction of the light does not change. Therefore, the image of the area of the substrate 12 captured by the inspection camera 30 will be bright. In contrast, the light reflected or refracted by the liquid crystal enters in such a way that the polarization direction of the light changes. The camera 30 is fired such that some of the light does not pass through the second polarizer 32. Therefore, the portion having the liquid crystal may be darker than the region of the substrate 12. Meanwhile, when the first polarizing plate 22 and the second polarizing plate 32 have the polarization direction as shown in FIG. 3B, the light reflected by the substrate 12 is incident on the inspection camera 30 in such a manner that the polarization direction does not change. Therefore, the light is blocked by the second polarizing plate 32, so that the image of the area of the substrate 12 captured by the inspection camera 30 may be dark. In contrast, the light reflected or refracted by the liquid crystal is incident on the inspection camera 30 in such a manner that the direction of the polarization is changed. Therefore, some of the light passes through the second polarizing plate 32, causing the portion having the liquid crystal to be brighter than the area of the substrate 12. This principle enables the inspection camera 30 to more clearly identify the liquid crystal 13 applied to the substrate 12.

圖4為顯示本發明較佳實施例之檢查液晶塗佈狀態的裝置之檢查攝像機所捕捉的影像範例圖。 Fig. 4 is a view showing an example of an image captured by an inspection camera of a device for inspecting a liquid crystal coating state according to a preferred embodiment of the present invention.

於圖4中,第一偏光板22及第二偏光板32的偏極方向採用圖3A的方向,且使用區域掃描攝像機作為檢查攝像機30。檢查攝像機30所捕捉之影像中以亮區顯示基板12的區域,而以暗區顯示液晶13。因此,即使不額外處理影像,也可清楚得到液晶塗佈狀態。 In FIG. 4, the polarization directions of the first polarizing plate 22 and the second polarizing plate 32 are in the direction of FIG. 3A, and the area scanning camera is used as the inspection camera 30. The area of the substrate 12 is displayed in a bright area in the image captured by the camera 30, and the liquid crystal 13 is displayed in a dark area. Therefore, even if the image is not additionally processed, the liquid crystal coating state can be clearly obtained.

圖5為顯示本發明較佳實施例之檢查液晶塗佈狀態的裝置中用於控制影像取得裝置之偏光板的組態方塊圖。 Fig. 5 is a block diagram showing the configuration of a polarizing plate for controlling an image obtaining device in an apparatus for inspecting a liquid crystal coating state according to a preferred embodiment of the present invention.

得到塗佈於基板12之液晶13影像時,液晶13中的分子依據狀況可為各種位向。因此,為了得到較清晰的影像,需要調整第一偏光板22及第二偏光板32的偏極方向。第一偏光板22提供在光源20的光輸出埠上,因此可 能不易調整第一偏光板22。同時,第二偏光板32係附接至檢查攝像機30的前端,因此可藉由手動或自動轉動第二偏光板32而輕易調整偏極方向。根據本發明之一實施例,第一偏光板22可為可轉動的而不是第二偏光板32,或者第一偏光板22及第二偏光板32兩者皆可為自然轉動的。 When the image of the liquid crystal 13 applied to the substrate 12 is obtained, the molecules in the liquid crystal 13 can be in various orientations depending on the situation. Therefore, in order to obtain a clear image, it is necessary to adjust the polarization directions of the first polarizing plate 22 and the second polarizing plate 32. The first polarizing plate 22 is provided on the light output of the light source 20, and thus The first polarizing plate 22 can be easily adjusted. At the same time, the second polarizing plate 32 is attached to the front end of the inspection camera 30, so that the polarization direction can be easily adjusted by manually or automatically rotating the second polarizing plate 32. According to an embodiment of the present invention, the first polarizing plate 22 may be rotatable instead of the second polarizing plate 32, or both the first polarizing plate 22 and the second polarizing plate 32 may be naturally rotated.

在圖5中,提供旋轉裝置44以轉動第二偏光板32,且控制單元40控制旋轉裝置44的轉動。於旋轉裝置44的範例中,旋轉裝置44可組態為包含馬達(未顯示)以及連接馬達的驅動齒輪,且齒輪齒係形成於第二偏光板32的外周以藉由馬達轉動第二偏光板32。控制單元40驅動旋轉裝置44以轉動第二偏光板32,因而自檢查攝像機30取得影像。控制單元40分析所得影像並設定第二偏光板32的角度,以使液晶部分與基板部分產生清晰對比。控制單元40所執行的影像分析範例中,可實行影像的直方圖分析。若影像對比很高,則表示影像的基板部分與液晶部分彼此有清晰的對比。於此狀況中,影像的直方圖分布於寬區域。 In FIG. 5, a rotating device 44 is provided to rotate the second polarizing plate 32, and the control unit 40 controls the rotation of the rotating device 44. In the example of the rotating device 44, the rotating device 44 can be configured to include a motor (not shown) and a driving gear coupled to the motor, and the gear teeth are formed on the outer circumference of the second polarizing plate 32 to rotate the second polarizing plate by the motor. 32. The control unit 40 drives the rotating device 44 to rotate the second polarizing plate 32, thereby acquiring an image from the inspection camera 30. The control unit 40 analyzes the resulting image and sets the angle of the second polarizing plate 32 to provide a clear contrast between the liquid crystal portion and the substrate portion. In the image analysis example executed by the control unit 40, histogram analysis of the image can be performed. If the image contrast is high, it means that the substrate portion and the liquid crystal portion of the image have a clear contrast with each other. In this case, the histogram of the image is distributed over a wide area.

圖6為顯示本發明另一較佳實施例之檢查液晶塗佈狀態的裝置之透視圖。 Figure 6 is a perspective view showing an apparatus for inspecting a liquid crystal coating state according to another preferred embodiment of the present invention.

圖6之檢查液晶塗佈狀態的裝置1之一般組態保持與圖1的相同。然而,與圖1的裝置不同的是圖6的裝置1具有複數檢查攝像機30。在圖6中,檢查攝像機30可為區域掃描攝像機。複數區域掃描攝像機捕捉由寬基板12劃分的個別區域。 The general configuration of the apparatus 1 for inspecting the liquid crystal coating state of Fig. 6 remains the same as that of Fig. 1. However, unlike the apparatus of FIG. 1, the apparatus 1 of FIG. 6 has a plurality of inspection cameras 30. In Figure 6, inspection camera 30 can be an area scan camera. The plurality of area scanning cameras capture individual areas divided by the wide substrate 12.

圖7為顯示本發明較佳實施例具有檢查液晶塗佈狀態的裝置之液晶塗佈機的透視圖。 Figure 7 is a perspective view showing a liquid crystal coater having a device for inspecting a liquid crystal coating state in accordance with a preferred embodiment of the present invention.

液晶塗佈機100包含主框架10、托台14,係裝設於主框架10的上表面以支撐基板12、支撐框架16,係可移動地裝設於主框架10、以及塗佈頭單元50係可移動地耦接支撐框架16,並在相對於基板12移動時經由個別噴嘴塗佈液晶至基板12。液晶塗佈機100亦包含具有第一偏光板22的光源20以及具有第二偏光板32的檢查攝像機30。光源20及檢查攝像機30裝設於支撐框架16上。 The liquid crystal coater 100 includes a main frame 10 and a pallet 14 which are attached to the upper surface of the main frame 10 to support the substrate 12 and the support frame 16, and are movably mounted to the main frame 10 and the coating head unit 50. The support frame 16 is movably coupled and coated with liquid crystal to the substrate 12 via individual nozzles as it moves relative to the substrate 12. The liquid crystal coater 100 also includes a light source 20 having a first polarizing plate 22 and an inspection camera 30 having a second polarizing plate 32. The light source 20 and the inspection camera 30 are mounted on the support frame 16.

參考圖7,塗佈頭單元50提供在支撐框架16的一個表面上,而光源20及檢查攝像機30提供在支撐框架16的另一個表面上。藉由此種組態,自塗佈頭單元50排出液晶並於支撐框架16移動時塗佈到基板12上時,檢查攝像機30可得到塗有液晶之基板12的影像。根據狀況,在所有液晶塗佈到基板12上後,驅動支撐框架16時可得到整個基板12的影像,因而可進行液晶塗佈狀態的檢查。 Referring to FIG. 7, the coating head unit 50 is provided on one surface of the support frame 16, and the light source 20 and the inspection camera 30 are provided on the other surface of the support frame 16. With this configuration, when the liquid crystal is discharged from the coating head unit 50 and applied to the substrate 12 while the support frame 16 is moved, the inspection camera 30 can obtain an image of the substrate 12 coated with the liquid crystal. According to the situation, after all the liquid crystals are applied onto the substrate 12, the image of the entire substrate 12 can be obtained when the support frame 16 is driven, so that the liquid crystal coating state can be inspected.

根據本發明一實施例,若基於檢查攝像機30所得影像發現液晶塗佈是有缺陷的,則可執行控制操作而使支撐框架16移動至所欲區域,並由塗佈頭單元50額外排出液晶。 According to an embodiment of the present invention, if the liquid crystal coating is found to be defective based on the image obtained by the inspection camera 30, a control operation can be performed to move the support frame 16 to a desired area, and the liquid crystal is additionally discharged by the coating head unit 50.

於下將進一步說明上述控制單元40與塗佈頭單元50之控制相關的功能。 The functions of the above control unit 40 related to the control of the coating head unit 50 will be further explained below.

根據本發明,可得到更清晰且更明確之液晶塗佈狀態 的影像。 According to the present invention, a clearer and more clear liquid crystal coating state can be obtained. Image.

控制單元40比較基板之液晶預設座標值與液晶實際塗到基板的狀態,因而判斷所塗液晶的位置或圖案是否適當,或者是否有液晶塗佈漏掉的部分。 The control unit 40 compares the liquid crystal preset coordinate value of the substrate with the state in which the liquid crystal is actually applied to the substrate, thereby judging whether the position or pattern of the applied liquid crystal is appropriate, or whether there is a portion where the liquid crystal coating is missing.

控制單元40可使用所塗液晶的數量及液晶所塗到的區域來計算塗在基板上之液晶量。藉此,控制單元40判斷實際所塗的液晶量是否未達到或超過每單位面板要塗佈的液晶總量。 The control unit 40 can calculate the amount of liquid crystal applied on the substrate using the number of liquid crystals applied and the area to which the liquid crystal is applied. Thereby, the control unit 40 determines whether the actually applied amount of liquid crystal does not reach or exceed the total amount of liquid crystal to be applied per unit panel.

控制單元40可基於所得影像計算各個所塗液晶的區域來判斷各液晶滴的尺寸是否適當。 The control unit 40 can calculate the area of each of the coated liquid crystals based on the obtained image to determine whether the size of each liquid crystal droplet is appropriate.

再者,在綜合檢查上述狀況後,控制單元40可判斷實際所塗之液晶圖案或液晶量是否在誤差容許範圍內。 Furthermore, after comprehensively checking the above conditions, the control unit 40 can determine whether the actually applied liquid crystal pattern or liquid crystal amount is within the error tolerance range.

當控制單元40判定液晶塗佈狀態不佳時,控制塗佈頭單元50以額外塗佈液晶至特定的忽略位置或額外塗佈液晶,而藉此增補缺少的液晶量。 When the control unit 40 determines that the liquid crystal coating state is not good, the coating head unit 50 is controlled to additionally coat the liquid crystal to a specific neglected position or additionally coat the liquid crystal, thereby supplementing the missing liquid crystal amount.

圖8為顯示本發明另一較佳實施例具有檢查液晶塗佈狀態的裝置之液晶塗佈機的側視圖。 Figure 8 is a side view showing a liquid crystal coater having a device for inspecting a liquid crystal coating state according to another preferred embodiment of the present invention.

參考圖8,液晶塗佈機100更包含外力裝置60,以施加外力至塗佈於基板12之液晶13。根據一實施例,外力裝置60係提供在支撐框架16的下端,但可位在塗佈頭單元50的後端。外力裝置60施加外力到液晶上,以使液晶 中的分子配置在特定方向。當光源20發射的光照射通過第一偏光板22至基板12,且基板12及液晶所反射或折射的光通過第二偏光板32照到檢查攝像機30時,此係用於提供液晶的清晰影像。超音波產生器、電離器、電漿產生器或電場產生器可用作為外力裝置60。若施加外力至所塗佈的液晶而使液晶的分子配置更規則,則輸入至檢查攝像機30的影像可變得更清晰。 Referring to FIG. 8, the liquid crystal coater 100 further includes an external force device 60 to apply an external force to the liquid crystal 13 applied to the substrate 12. According to an embodiment, the external force device 60 is provided at the lower end of the support frame 16, but may be positioned at the rear end of the coating head unit 50. The external force device 60 applies an external force to the liquid crystal to make the liquid crystal The molecules in the configuration are in a specific direction. When the light emitted by the light source 20 is irradiated through the first polarizing plate 22 to the substrate 12, and the light reflected or refracted by the substrate 12 and the liquid crystal is irradiated to the inspection camera 30 through the second polarizing plate 32, this is used to provide a clear image of the liquid crystal. . An ultrasonic generator, an ionizer, a plasma generator or an electric field generator can be used as the external force device 60. If an external force is applied to the applied liquid crystal to make the molecular arrangement of the liquid crystal more regular, the image input to the inspection camera 30 can be made clearer.

如上所述,本發明可得到塗佈在基板上之液晶狀態的清晰影像。再者,本發明基於塗佈在基板的液晶影像無須額外的影像處理或僅需極少的影像處理,就可清楚得到液晶塗佈狀態。 As described above, the present invention can provide a clear image of the liquid crystal state coated on the substrate. Furthermore, the present invention can clearly understand the liquid crystal coating state based on the liquid crystal image applied to the substrate without additional image processing or with minimal image processing.

再者,本發明藉由調整偏光板的偏極方向,就可使影像的液晶部分變得更清晰。根據本發明,可藉由調整施加至液晶的外力來調整液晶的位向,而使影像的液晶部分變得更清晰。 Furthermore, the present invention can make the liquid crystal portion of the image clearer by adjusting the polarization direction of the polarizing plate. According to the present invention, the liquid crystal portion of the image can be made sharper by adjusting the orientation of the liquid crystal by adjusting the external force applied to the liquid crystal.

再者,本發明將檢查液晶塗佈狀態的裝置整合至液晶塗佈機,使得在塗佈液晶的當下或塗佈液晶後可輕易地檢查液晶塗佈狀態。此外,若液晶塗佈狀態有缺陷,則執行控制操作,以額外塗佈液晶,而解決有缺陷之液晶塗佈狀態所造成的問題。 Furthermore, the present invention integrates the apparatus for inspecting the liquid crystal coating state into the liquid crystal coater so that the liquid crystal coating state can be easily checked immediately after the liquid crystal is applied or after the liquid crystal is applied. Further, if the liquid crystal coating state is defective, a control operation is performed to additionally coat the liquid crystal, thereby solving the problem caused by the defective liquid crystal coating state.

雖然已針對說明目的揭露本發明較佳實施例,但是熟此技藝者當知在不悖離所附申請專利範圍所揭露的範疇及精神下可有各種的修改、添加及替代。因此,本發明所揭露的實施例及伴隨圖式非為限制性而是例示性,且本發 明的技術範疇不限於這些實施例及伴隨圖式。本發明的範疇應由申請專利範圍解釋,且應了解申請專利範圍的所有技術概念係落入於本發明範圍內。 While the invention has been described with respect to the preferred embodiments of the present invention, it is understood that various modifications, additions and substitutions may be made without departing from the scope and spirit of the invention. Therefore, the embodiments and accompanying drawings disclosed herein are not limiting but illustrative, and The technical scope of the present invention is not limited to these embodiments and accompanying drawings. The scope of the invention should be construed as the scope of the claims, and all technical concepts of the scope of the claims are intended to fall within the scope of the invention.

1‧‧‧檢查液晶塗佈狀態的裝置 1‧‧‧Device for checking the state of liquid crystal coating

10‧‧‧主框架 10‧‧‧ main frame

12‧‧‧支撐基板 12‧‧‧Support substrate

13‧‧‧液晶 13‧‧‧LCD

14‧‧‧托台 14‧‧‧托台

16‧‧‧支撐框架 16‧‧‧Support frame

18‧‧‧支撐框架驅動單元 18‧‧‧Support frame drive unit

20‧‧‧光源 20‧‧‧Light source

22‧‧‧第一偏光板 22‧‧‧First polarizer

30‧‧‧檢查攝像機 30‧‧‧Check camera

32‧‧‧第二偏光板 32‧‧‧Second polarizer

40‧‧‧控制單元 40‧‧‧Control unit

42‧‧‧顯示單元 42‧‧‧Display unit

44‧‧‧旋轉裝置 44‧‧‧Rotating device

50‧‧‧塗佈頭單元 50‧‧‧ Coating head unit

60‧‧‧外力裝置 60‧‧‧External force device

100‧‧‧液晶塗佈機 100‧‧‧LCD coating machine

本發明之上述及其他目的、特徵及優點結合伴隨圖式與詳細說明將更清楚了解,其中:圖1為顯示本發明較佳實施例之檢查液晶塗佈狀態的裝置之透視圖;圖2為顯示本發明較佳實施例之檢查液晶塗佈狀態的裝置之示意圖;圖3A及圖3B為顯示本發明較佳實施例之檢查液晶塗佈狀態的裝置中偏光板的配置圖;圖4為顯示本發明較佳實施例之檢查液晶塗佈狀態的裝置之檢查攝像機所捕捉的影像範例圖;圖5為顯示本發明較佳實施例之檢查液晶塗佈狀態的裝置中用於控制影像取得裝置之偏光板的組態方塊圖;圖6為顯示本發明另一較佳實施例之檢查液晶塗佈狀態的裝置之透視圖;圖7為顯示本發明較佳實施例具有檢查液晶塗佈狀態的裝置之液晶塗佈機的透視圖;以及圖8為顯示本發明另一較佳實施例具有檢查液晶塗佈狀態的裝置之液晶塗佈機的側視圖。 The above and other objects, features, and advantages of the present invention will become more <RTIgt; FIG. 3A and FIG. 3B are diagrams showing a configuration of a polarizing plate in a device for inspecting a liquid crystal coating state according to a preferred embodiment of the present invention; FIG. 4 is a view showing a device for inspecting a liquid crystal coating state according to a preferred embodiment of the present invention; FIG. 5 is a view showing an image captured by an inspection camera of a device for inspecting a liquid crystal coating state according to a preferred embodiment of the present invention; FIG. 5 is a view showing a device for controlling an image capturing device in a device for inspecting a liquid crystal coating state according to a preferred embodiment of the present invention; FIG. 6 is a perspective view showing a device for inspecting a liquid crystal coating state according to another preferred embodiment of the present invention; FIG. 7 is a view showing a device for inspecting a liquid crystal coating state according to a preferred embodiment of the present invention; A perspective view of a liquid crystal coater; and Fig. 8 is a side view showing a liquid crystal coater having a device for inspecting a liquid crystal coating state according to another preferred embodiment of the present invention.

12‧‧‧支撐基板 12‧‧‧Support substrate

13‧‧‧液晶 13‧‧‧LCD

20‧‧‧光源 20‧‧‧Light source

22‧‧‧第一偏光板 22‧‧‧First polarizer

30‧‧‧檢查攝像機 30‧‧‧Check camera

32‧‧‧第二偏光板 32‧‧‧Second polarizer

40‧‧‧控制單元 40‧‧‧Control unit

42‧‧‧顯示單元 42‧‧‧Display unit

Claims (11)

一種檢查一液晶塗佈狀態的裝置,包含:一光源,發射光;一第一偏光板,提供在該光源及一基板之間,一液晶塗佈於該基板上,該第一偏光板選擇性地讓該光源發射的光通過;一第二偏光板,選擇性地讓通過該第一偏光板後被該基板或該液晶所反射或折射的光通過;以及一檢查攝像機,接收已通過該第二偏光板的光並將該光轉換成一電訊號。 The device for inspecting a liquid crystal coating state comprises: a light source emitting light; a first polarizing plate provided between the light source and a substrate, a liquid crystal coated on the substrate, the first polarizing plate being selectively Passing light emitted by the light source; a second polarizing plate selectively passing light reflected or refracted by the substrate or the liquid crystal through the first polarizing plate; and an inspection camera, the receiving has passed the first The light of the two polarizers converts the light into an electrical signal. 如申請專利範圍第1項所述之裝置,更包含:一旋轉裝置,調整該第一偏光板或該第二偏光板之一偏極方向。 The device of claim 1, further comprising: a rotating device for adjusting a polarization direction of the first polarizing plate or the second polarizing plate. 如申請專利範圍第2項所述之裝置,更包含:一控制單元,分析得自該檢查攝像機的一影像,並藉由該旋轉裝置控制該第一偏光板或該第二偏光板的一旋轉角。 The device of claim 2, further comprising: a control unit that analyzes an image obtained from the inspection camera, and controls a rotation of the first polarizing plate or the second polarizing plate by the rotating device angle. 如申請專利範圍第1項所述之裝置,其中提供於該光源上的該第一偏光板的該偏極方向係平行於在該基板處理的一摩擦方向。 The device of claim 1, wherein the polarization direction of the first polarizing plate provided on the light source is parallel to a rubbing direction of the substrate processing. 如申請專利範圍第1項所述之裝置,其中該檢查攝像機為一線掃描攝像機或一區域掃描攝像機。 The device of claim 1, wherein the inspection camera is a line scan camera or an area scan camera. 如申請專利範圍第1項所述之裝置,更包含: 一控制單元,基於得自該檢查攝像機的該影像,判斷該液晶的塗佈是否適當。 For example, the device described in claim 1 further includes: A control unit determines whether the coating of the liquid crystal is appropriate based on the image obtained from the inspection camera. 一種液晶塗佈機,用於塗佈一液晶至一基板,包含:一主框架;一托台,提供在該主框架之一上部,以支撐該基板;一支撐框架,提供於該主框架之該上部;一塗佈頭單元,提供於該支撐框架,以塗佈該液晶;一光源,提供於該支撐框架,其中一第一偏光板提供於該光源之一光輸出埠上;以及一檢查攝像機,提供於該支撐框架,其中一第二偏光板提供於其一光入射面上。 A liquid crystal coating machine for coating a liquid crystal to a substrate, comprising: a main frame; a tray provided on an upper portion of the main frame to support the substrate; and a support frame provided on the main frame The upper portion; a coating head unit is provided on the support frame to coat the liquid crystal; a light source is provided on the support frame, wherein a first polarizing plate is provided on one of the light output ports of the light source; and an inspection A camera is provided on the support frame, wherein a second polarizer is provided on a light incident surface thereof. 如申請專利範圍第7項所述之液晶塗佈機,其中該塗佈頭單元及該檢查攝像機提供在該支撐框架的兩側上。 The liquid crystal coater of claim 7, wherein the coating head unit and the inspection camera are provided on both sides of the support frame. 如申請專利範圍第7項所述之液晶塗佈機,其中該支撐框架包含一外力裝置,以施加一外力至塗佈在該基板上的該液晶。 The liquid crystal coater of claim 7, wherein the support frame comprises an external force device for applying an external force to the liquid crystal coated on the substrate. 如申請專利範圍第9項所述之液晶塗佈機,其中該外力裝置包含一超音波產生器、一電離器、一電漿產生器以及一電場產生器中的任一者。 The liquid crystal coating machine of claim 9, wherein the external force device comprises any one of an ultrasonic generator, an ionizer, a plasma generator, and an electric field generator. 如申請專利範圍第7至10項任一項所述之液晶塗佈機,其中若根據分析得自該檢查攝像機之一影像的結果認為塗佈在該基板上之該液晶的狀態為缺陷的,則執行一控制操作以藉由該塗佈頭單元額外塗佈液晶。 The liquid crystal coating machine according to any one of claims 7 to 10, wherein if the state of the liquid crystal coated on the substrate is considered to be defective based on a result of analyzing an image obtained from the inspection camera, A control operation is then performed to additionally coat the liquid crystal by the coating head unit.
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