TW201341995A - Baking system - Google Patents

Baking system Download PDF

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Publication number
TW201341995A
TW201341995A TW101112516A TW101112516A TW201341995A TW 201341995 A TW201341995 A TW 201341995A TW 101112516 A TW101112516 A TW 101112516A TW 101112516 A TW101112516 A TW 101112516A TW 201341995 A TW201341995 A TW 201341995A
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Taiwan
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temperature
data
baking
oven
control unit
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TW101112516A
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Chinese (zh)
Inventor
Jen-Hao Yang
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Chipmos Technologies Inc
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Priority to TW101112516A priority Critical patent/TW201341995A/en
Priority to CN201210144106XA priority patent/CN103365313A/en
Publication of TW201341995A publication Critical patent/TW201341995A/en

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Abstract

A baking system is disclosed. The baking system includes a client, a server, a temperature sensor, a signal transducer and a baking device. The baking device includes a temperature controller and an oven. The temperature sensor connects to the oven, and detects the temperature data of the oven and transfers the temperature data to the server. The client reads the temperature data from the server to obtain an actual temperature of the oven. The client sends a signal to and receives a signal from the signal transducer via the server and therefore controls the temperature controller of the baking device to set the oven or to obtain the setting condition of the oven. The baking system thus can automatically monitor the device and report abnormal conditions and any human negligence could be prevented.

Description

烘烤系統Baking system

本發明關於一種運用在半導體製程的烘烤系統,尤其是指一種提供自動控制及異常警告的烘烤系統。The present invention relates to a baking system for use in a semiconductor process, and more particularly to a baking system that provides automatic control and abnormal warning.

烘烤固化是半導體製程不可或缺的步驟之一,目前烘烤固化設備的參數設定必須由人工設定,操作人員必須以人工比對的方式,依照工作清單指定的參數設定於烘烤固化設備上,容易有設定錯誤的風險。Baking curing is one of the indispensable steps in the semiconductor process. At present, the parameter setting of the baking curing equipment must be manually set. The operator must manually set the parameters according to the parameters specified in the work list on the baking curing equipment. It is easy to have the risk of setting errors.

且設備產生的數據必須另外搭配繪製設備使用,如烘烤溫度必須透過圖表繪製機進行紙本記錄,但此圖表繪製機產出紙本備存不易,一旦客戶或操作人員需要尋找資料時,只能從堆疊如山的紙本資料以人力方式找尋,即使花費時間去找尋也不一定找得到資料。The data generated by the device must be used in conjunction with the drawing device. For example, the baking temperature must be recorded by the chart plotter. However, the output of the charting machine is not easy. Once the customer or operator needs to find the data, only the customer or the operator needs to find the data. It can be searched by human resources from a stack of paper materials, even if it takes time to find it.

目前雖已發展出烤箱控制系統用來解決上述問題,但一般是將多個烤箱連接至一控制伺服器,控制伺服器針對連接之烤箱設置嵌入式硬體裝置,而以此控制伺服器控制烤箱進行烘烤固化作業,然而控制伺服器與烤箱因連線距離的限制,必須設置在一定的距離內,再者,如需增加新功能時,嵌入式硬體裝置有擴充不易及維修困難的問題,且其採用集中式管理,一旦嵌入式硬體發生異常,等於全部都無法使用。At present, oven control systems have been developed to solve the above problems, but generally a plurality of ovens are connected to a control server, and the control server is provided with an embedded hardware device for the connected oven, thereby controlling the server to control the oven. The baking and curing operation is carried out. However, the control server and the oven must be set within a certain distance due to the limitation of the connection distance. Moreover, if a new function needs to be added, the embedded hardware device has difficulty in expansion and difficulty in maintenance. And it uses centralized management, once the embedded hardware is abnormal, it is all unusable.

有鑑於此,如何針對上述習知的缺點進行研發改良,降低人為疏失、提供自動設備監控暨自動異常回報,實為相關業界所需努力研發之目標。In view of this, how to develop and improve the above-mentioned shortcomings, reduce human error, provide automatic equipment monitoring and automatic abnormal return, is the goal of the relevant industry to develop.

為解決上述先前技術不盡理想之處,本發明提供一種烘烤系統,其包含控制端、控制伺服器、溫度偵測器、訊號轉換器及烘烤裝置,其中,烘烤裝置包含溫控單元及烤箱。溫度偵測器連接至烤箱,並偵測烤箱中的溫度資料,將烤箱中之溫度資料傳遞至控制伺服器,控制端讀取溫度偵測器傳遞至控制伺服器的溫度資料,進而得知烤箱的實際溫度,控制端藉由控制伺服器傳遞訊號至訊號轉換器,進而控制烘烤裝置的溫控單元設定烤箱,控制端藉由控制伺服器接收訊號轉換器的訊號,進而控制烘烤裝置的溫控單元得知烤箱的設定狀態。In order to solve the above-mentioned prior art, the present invention provides a baking system including a control terminal, a control server, a temperature detector, a signal converter and a baking device, wherein the baking device includes a temperature control unit. And an oven. The temperature detector is connected to the oven, detects the temperature data in the oven, transmits the temperature data in the oven to the control server, and the control terminal reads the temperature data transmitted from the temperature detector to the control server, thereby learning the oven. The actual temperature, the control end controls the servo to transmit the signal to the signal converter, and then controls the temperature control unit of the baking device to set the oven. The control terminal controls the signal of the signal converter by controlling the servo, thereby controlling the baking device. The temperature control unit knows the setting state of the oven.

因此,本發明之其一目的係提供一種烘烤系統,其能自動設定參數,避免人工設定錯誤的風險發生。Accordingly, it is an object of the present invention to provide a baking system that automatically sets parameters to avoid the risk of manual setting errors.

本發明之其二目的係提供一種烘烤系統,其採用自動控制,經由控制伺服器統一控管。A second object of the present invention is to provide a baking system that employs automatic control to collectively control the tubes via a control server.

本發明之其三目的係提供一種烘烤系統,其係以電子圖表取代紙本製圖。A three object of the present invention is to provide a baking system that replaces a paper drawing with an electronic chart.

本發明之其四目的係提供一種烘烤系統,其具有設備異常自動警告,發生重大異常時能自動停止。A four object of the present invention is to provide a baking system having an abnormal automatic warning of equipment that can be automatically stopped when a major abnormality occurs.

本發明之其五目的係提供一種烘烤系統,其使用的控制伺服器,能使各設備獨立運作,且能分散在各處易於維修。The fifth object of the present invention is to provide a baking system using a control server that enables each device to operate independently and can be dispersed throughout for easy maintenance.

本發明之其六目的係提供一種烘烤系統,其使用的控制伺服器,能視需求內建不同的功能單元,接收各設備回傳的資料。The sixth object of the present invention is to provide a baking system using a control server capable of building different functional units as needed to receive data returned by each device.

本發明之再一目的係提供一種烘烤系統,其使用的控制伺服器為分散獨立式,此種硬體架構因異常而需替換的成本低於嵌入式的硬體架構。Still another object of the present invention is to provide a baking system that uses a control server that is discretely self-contained, and that the cost of replacement of such a hardware architecture due to an abnormality is lower than that of an embedded hardware architecture.

本發明係揭露一種烘烤系統,其中所利用之烘烤原理,已為相關技術領域具有通常知識者所能明瞭,故以下文中之說明,不再作完整描述。同時,以下文中所對照之圖式,係表達與本發明特徵有關之結構示意,並未根據實際尺寸完整繪製,合先敘明。The present invention discloses a baking system in which the baking principle utilized is well known to those skilled in the relevant art, and therefore, the description below will not be fully described. At the same time, the drawings referred to in the following texts express the structural schematics related to the features of the present invention, and are not completely drawn according to the actual dimensions, which are described first.

首先請參考圖1,圖1為烘烤系統架構圖。從圖中可看出本實施例所要揭露的烘烤系統包含控制端10、控制伺服器20、溫度偵測器30、訊號轉換器40、烘烤裝置50、集線器60、生產管理系統70及數據儲存器80。其中,集線器60於本實施例中採用數量為2個,為了方便說明區分為第一集線器60a與第二集線器60b。烘烤裝置50包含彼此相互連接的溫控單元51與烤箱52。以下就針對前述各元件進行細部說明:First, please refer to FIG. 1. FIG. 1 is a structural diagram of a baking system. It can be seen from the figure that the baking system to be disclosed in the embodiment includes a control terminal 10, a control server 20, a temperature detector 30, a signal converter 40, a baking device 50, a hub 60, a production management system 70, and data. The storage 80. The number of the hubs 60 is two in this embodiment, and is divided into a first hub 60a and a second hub 60b for convenience of description. The baking device 50 includes a temperature control unit 51 and an oven 52 that are connected to each other. The following is a detailed description of each of the above components:

控制端10採用至少一台內建有自動烘烤應用程式102的電腦101供操作人員使用,且控制端10的電腦101藉由第二集線器60b連線至控制伺服器20,當控制端10採用二台(含)以上的電腦101時,可由不同的操作人員操作配置於不同位置的電腦101,操作人員藉由電腦101進入自動烘烤應用程式102進行各種功能單元的作業。The control terminal 10 uses at least one computer 101 with an automatic baking application 102 built therein for the operator to use, and the computer 101 of the control terminal 10 is connected to the control server 20 via the second hub 60b, and is used by the control terminal 10. When two or more computers 101 are installed, the computer 101 disposed at different positions can be operated by different operators, and the operator enters the automatic baking application 102 by the computer 101 to perform various functional units.

烘烤裝置50視需求可為複數個,各個烘烤裝置50的烤箱52連接至一溫度偵測器30,且各個烘烤裝置50的溫控單元51連接至一訊號轉換器40,且各個烘烤裝置50的溫控單元51與烤箱52彼此也是連結的,前述溫度偵測器30與訊號轉換器40分別藉由第一集線器60a連線至控制伺服器20。The baking device 50 can be plural in number, the oven 52 of each baking device 50 is connected to a temperature detector 30, and the temperature control unit 51 of each baking device 50 is connected to a signal converter 40, and each baking The temperature control unit 51 and the oven 52 of the grilling device 50 are also connected to each other, and the temperature detector 30 and the signal converter 40 are respectively connected to the control server 20 by the first hub 60a.

溫度偵測器30係以熱電耦31設置於烤箱52中,用以偵測烤箱52中的溫度資料,將烤箱52中之溫度資料傳遞至控制伺服器20,當控制端10連線至控制伺服器20即可讀取溫度偵測器30傳遞至控制伺服器20的溫度資料,進而得知烤箱52的實際溫度。控制伺服器20與溫度偵測器30互以邏輯訊號與封包訊號進行轉換。The temperature detector 30 is disposed in the oven 52 with a thermocouple 31 for detecting temperature data in the oven 52, and transmitting the temperature data in the oven 52 to the control server 20, and connecting the control terminal 10 to the control servo. The device 20 can read the temperature data transmitted from the temperature detector 30 to the control server 20, and then know the actual temperature of the oven 52. The control server 20 and the temperature detector 30 convert the logic signal and the packet signal.

控制端10並藉由控制伺服器20傳遞訊號至訊號轉換器40,此訊號轉換器40可將控制伺服器20傳遞來的封包訊號進行通訊協定轉換成串列式訊號傳遞至控制烘烤裝置50的溫控單元51,本實施例是將傳輸控制協定(Transmission Control Protocol,TCP)封包訊號轉換成RS-485/RS-422/RS232串列式訊號,前述僅是其中一種實施態樣,並不限於前述訊號轉換方式。接受串列式訊號後的溫控單元51用以調整烤箱52中的溫度及相關設定。控制伺服器20可接收從溫控單元51回傳的串列式訊號、並經由訊號轉換器40轉換成的封包訊號,控制端10即可藉由控制伺服器20得知烤箱52的溫度及相關設定等狀態。The control terminal 10 transmits a signal to the signal converter 40 by the control server 20, and the signal converter 40 converts the packet signal transmitted from the control server 20 into a serial communication signal to the control baking device 50. The temperature control unit 51, in this embodiment, converts the Transmission Control Protocol (TCP) packet signal into an RS-485/RS-422/RS232 serial signal. The foregoing is only one of the implementation aspects, and Limited to the aforementioned signal conversion method. The temperature control unit 51 after receiving the serial signal is used to adjust the temperature and related settings in the oven 52. The control server 20 can receive the serial signal transmitted from the temperature control unit 51 and convert the packet signal into the signal converter 40. The control terminal 10 can learn the temperature and related of the oven 52 by controlling the server 20. Set the status.

控制端10的電腦101與控制伺服器20可連線至生產管理系統70及數據儲存器80。生產管理系統70含括作業工單系統(Run Card System)、設備網管系統(WSM)、過帳系統、企業資源規劃(Enterprise Resources Planning,ERP)系統等,實際使用不限於前述揭露的系統,系統的選用可以視需求改變。數據儲存器80可內建多個不同之資料庫,其中一資料庫可用於儲存各個烘烤固化的操作資料(例如:實際溫度資料、烘烤方案的設定條件、烘烤固化相關參數及紀錄、烤箱裝置50識別碼等)。The computer 101 of the control terminal 10 and the control server 20 can be connected to the production management system 70 and the data storage 80. The production management system 70 includes a Run Card System, a Device Network Management System (WSM), a posting system, an Enterprise Resource Planning (ERP) system, etc., and the actual use is not limited to the foregoing disclosed system, the system The choice can be changed according to needs. The data storage 80 can be built with a plurality of different databases, one of which can be used to store the operating data of each baking curing (for example: actual temperature data, setting conditions of the baking scheme, parameters and records related to baking curing, The oven device 50 identifies the code, etc.).

操作人員於控制端10可連線至生產管理系統70,並透過生產管理系統70自數據儲存器80中之相應資料庫取得烘烤固化所需的操作資料,前述相關資料可為烘烤方案的設定條件,此設定條件可為烘烤溫度曲線、烘烤時間、烘烤狀態等。且生產管理系統70及數據儲存器80可與控制伺服器20交換訊號,控制伺服器20亦可自數據儲存器80讀出或存入烘烤裝置50的溫度資料,詳言之,溫控單元51回傳的烤箱52的設定狀況及烤箱52中之實際烘烤溫度曲線等資料,藉由控制伺服器20計算傳遞並儲存至數據儲存器80中。本實施例無需另外搭配繪製設備產出紙本進行記錄,不僅資料備存容易,也縮短客戶與操作人員尋找資料的時間。The operator can connect to the production management system 70 at the control terminal 10, and obtain the operation data required for baking and curing from the corresponding database in the data storage 80 through the production management system 70, and the related information can be a baking scheme. The setting conditions may be a baking temperature profile, a baking time, a baking state, and the like. The production management system 70 and the data storage 80 can exchange signals with the control server 20. The control server 20 can also read or store the temperature data of the baking device 50 from the data storage 80. In detail, the temperature control unit The data of the setback condition of the oven 52 and the actual baking temperature profile in the oven 52 are calculated and transferred by the control server 20 and stored in the data storage 80. This embodiment does not need to be accompanied by a drawing device to produce a paper for recording, which not only makes the data easy to store, but also shortens the time for the customer and the operator to find the data.

再者,控制端10可連接識別器90,用以識別批識別碼及檢索批資料。識別器90可為條碼掃描器、射頻(RF)標籤掃描器。操作人員可於控制端10,先以識別器90掃描待作業產品之識別標籤或對應之作業工單(Run Card)上的識別碼,儲存於數據儲存器80中的該項產品之資料將被讀出,並可透過生產管理系統70輸入控制端10之自動烘烤應用程式102中的對應欄位,以進行該項產品之烘烤固化作業。Furthermore, the control terminal 10 can be connected to the identifier 90 for identifying the batch identification code and retrieving the batch data. The identifier 90 can be a barcode scanner, a radio frequency (RF) tag scanner. The operator can scan the identification label of the product to be worked or the identification code on the corresponding work card at the control end 10, and the data of the product stored in the data storage 80 will be Readout, and the corresponding field in the automatic baking application 102 of the control terminal 10 can be input through the production management system 70 to perform the baking and solidifying operation of the product.

控制端10的自動烘烤應用程式102具備多種功能將於以下一一說明,請同時參考圖2A,圖2A為控制端10之自動烘烤應用程式102的功能單元示意圖。The automatic baking application 102 of the control terminal 10 has various functions, which will be described below. Please refer to FIG. 2A at the same time. FIG. 2A is a functional unit diagram of the automatic baking application 102 of the control terminal 10.

前面提到的控制端10的自動烘烤應用程式102依照功能單元包含排程條件管制單元11、遠端上機功能單元12、遠端下機功能單元13、溫度校正功能單元14、異常記錄查詢單元15、圖表記錄查詢單元16、設備參數管理單元17、權限管理功能單元18及監控狀態功能單元19,以上各功能單元動作流程如下:The automatic baking application 102 of the control terminal 10 mentioned above includes a scheduling condition control unit 11, a remote upper computer function unit 12, a remote offline function unit 13, a temperature correction function unit 14, and an abnormal record query according to the functional unit. The unit 15, the chart record query unit 16, the device parameter management unit 17, the rights management function unit 18, and the monitoring status function unit 19, the operation flow of each of the above functional units is as follows:

請參考圖2B,圖2B為控制端10之自動烘烤應用程式102的排程條件管制單元11流程圖。排程條件管制單元11用於檢查設備狀態並選定設備,且確認生產管理系統70是否進場取得設定條件及資料,並驗證設定條件及資料,檢查重複排程並儲存排程資料至數據儲存器80。簡言之,排程條件管制單元11係用於檢查設備狀態以選定適當之烤箱裝置50,並根據輸入之待烘烤固化作業批號,驗證由生產管理系統70取得之設定條件是否相符,以完成設備排程作業。實際的排程條件管制單元11執行如下步驟:Please refer to FIG. 2B. FIG. 2B is a flowchart of the scheduling condition control unit 11 of the automatic baking application 102 of the control terminal 10. The scheduling condition control unit 11 is configured to check the device status and select the device, and confirm whether the production management system 70 enters the field to obtain the setting conditions and materials, and verify the setting conditions and data, check the repetitive scheduling and store the scheduling data to the data storage device. 80. In short, the scheduling condition control unit 11 is for checking the state of the device to select an appropriate oven device 50, and verifying whether the setting conditions obtained by the production management system 70 match according to the input curing batch number to be baked to complete Equipment scheduling work. The actual scheduling condition control unit 11 performs the following steps:

步驟一:首先進行設備排程。Step 1: First, schedule the equipment.

步驟二:特定的烤箱裝置50被選擇後,系統將進行設備狀態檢查。當該烤箱裝置50狀態為開機的話,即產生錯誤警告,並重回到設備排程;當該烤箱裝置50狀態為待機的話,則完成設備選定。Step 2: After the specific oven unit 50 is selected, the system will perform a device status check. When the oven unit 50 is in the state of being turned on, an error warning is generated and returned to the equipment schedule; when the oven unit 50 is in the standby state, the device selection is completed.

步驟三:作業批號輸入。作業批號可由操作人員以識別器90(例如:條碼掃描器或射頻標籤掃描器)掃描待作業產品之識別標籤輸入作業批號,或以手動輸入作業批號。Step 3: Enter the job batch number. The job batch number can be input by the operator to the identification label of the product to be processed by the identifier 90 (for example, a barcode scanner or a radio frequency label scanner), or manually input the job batch number.

步驟四:當作業批號輸入後,系統將確認生產管理系統70進場狀態。當生產管理系統70進場狀態為否的話,即產生錯誤警告,並重新回到步驟三;當生產管理系統70進場狀態為是的話,則繼續執行步驟五。Step 4: After the job batch number is entered, the system will confirm the production management system 70 entry status. When the production management system 70 enters the state of NO, an error warning is generated, and the process returns to step 3; when the production management system 70 enters the state of YES, the process proceeds to step 5.

步驟五:生產管理系統70進場後,將至數據儲存器80中取得該項作業批號之設定條件及資料,系統將進行設定條件取得及驗證之確認,若設定條件尚未取得及驗證,即產生錯誤警告,並重新回到步驟三。若設定條件已經取得及驗證,則繼續執行步驟六。Step 5: After the production management system 70 enters the field, the data storage unit 80 will obtain the setting conditions and data of the job batch number, and the system will confirm the setting conditions and verify the verification. If the setting conditions have not been obtained and verified, the system will generate Error warning and go back to step three. If the set conditions have been obtained and verified, proceed to step 6.

步驟六:檢查是否重複排程,是的話,即產生錯誤警告,並重新回到步驟三。否的話,則繼續執行步驟七。Step 6: Check if the schedule is repeated. If so, an error warning is generated and you return to step 3. Otherwise, proceed to step 7.

步驟七:排程資料存檔至數據儲存器80。Step 7: The schedule data is archived to the data store 80.

請參考圖2C,圖2C為控制端10之自動烘烤應用程式102的遠端上機功能單元12流程圖。遠端上機功能單元12用於確認設備狀態是否為已排程並選定設備,且傳遞訊號至溫控單元51以設定烤箱52之溫度資料,並接收溫度偵測器30所收集之烤箱52溫度資料,再啟動設備昇溫並變更設備狀態為開機。簡言之,遠端上機功能單元12係用於在遠端啟動已排程之烘烤裝置50昇溫進行烘烤固化作業。實際的遠端上機功能單元12執行步驟如下:Please refer to FIG. 2C. FIG. 2C is a flow chart of the remote upper functional unit 12 of the automatic baking application 102 of the control terminal 10. The remote upper function unit 12 is configured to confirm whether the device status is scheduled and selected, and transmit a signal to the temperature control unit 51 to set the temperature data of the oven 52, and receive the temperature of the oven 52 collected by the temperature detector 30. Data, restart the device and change the device status to boot. In short, the remote upper functional unit 12 is used to activate the scheduled baking device 50 at a remote end to perform a baking curing operation. The actual remote upper computer function unit 12 performs the following steps:

步驟一:進行設備上機。Step 1: Perform the device on the machine.

步驟二:確認設備狀態是否為已排程,確認為否的話,將產生錯誤警告,且重回步驟一。確認為是的話,則繼續執行步驟三。Step 2: Confirm that the device status is scheduled. If the confirmation is no, an error warning will be generated and return to step 1. If yes, continue with step 3.

步驟三:完成設備選定。Step 3: Complete the device selection.

步驟四:開始上機,且發送封包訊號至控制伺服器20。此封包訊號可為傳輸控制協定(transmission control protocol,TCP)封包訊號。Step 4: Start the machine and send the packet signal to the control server 20. The packet signal can be a transmission control protocol (TCP) packet signal.

步驟五:確認控制伺服器20是否接收封包訊號,確認為否的話,將產生錯誤警告,且回傳封包訊號至步驟四。確認為是的話,則繼續執行步驟六。Step 5: Confirm whether the control server 20 receives the packet signal. If the confirmation is no, an error warning will be generated and the packet signal will be sent back to step 4. If yes, continue with step 6.

步驟六:檢查數據儲存器80內的排程資料,若未檢查排程資料,將產生錯誤警告,且回傳封包訊號至步驟四。若已檢查排程資料,則繼續執行步驟七。Step 6: Check the schedule data in the data storage 80. If the schedule data is not checked, an error warning will be generated, and the packet signal is sent back to step 4. If the schedule data has been checked, proceed to step 7.

步驟七:使用溫控單元51設定溫度資料,若溫度未被設定,將產生錯誤警告,且回傳封包訊號至步驟四。若溫度已被設定,則繼續執行步驟八。其中溫控單元51是接收透過訊號轉換器40轉換由控制伺服器20傳送來之封包訊號成串列式訊號,而開始執行溫度資料設定。Step 7: Use the temperature control unit 51 to set the temperature data. If the temperature is not set, an error warning will be generated and the packet signal will be returned to step 4. If the temperature has been set, proceed to step eight. The temperature control unit 51 receives the packet signal transmitted by the control server 20 through the signal converter 40 to form a serial signal, and starts to perform temperature data setting.

步驟八:啟動溫度偵測器30收集溫度資料,若烤箱52之實際溫度資料未被收集,將產生錯誤警告,且回傳封包訊號至步驟四。若烤箱52之實際溫度資料已被收集,則繼續執行步驟九。Step 8: Start the temperature detector 30 to collect the temperature data. If the actual temperature data of the oven 52 is not collected, an error warning will be generated, and the packet signal will be returned to the fourth step. If the actual temperature data of the oven 52 has been collected, proceed to step IX.

步驟九:啟動設備開始昇溫,若烤箱52未昇溫,產生錯誤警告,且回傳封包訊號至步驟四。若烤箱52已開始昇溫,則繼續執行步驟十。Step 9: The starting device starts to heat up. If the oven 52 is not warmed up, an error warning is generated, and the packet signal is sent back to step 4. If the oven 52 has started to heat up, proceed to step ten.

步驟十:變更設備狀態為開機。Step 10: Change the device status to boot.

遠端上機功能單元12執行步驟五~步驟十時,皆是透過控制伺服器20進行訊號之傳遞。When the remote computer function unit 12 performs step 5 to step 10, the signal is transmitted through the control server 20.

請參考圖2D,圖2D為控制端10之自動烘烤應用程式102的遠端下機功能單元13流程圖。遠端下機功能單元13用於確認設備狀態是否為開機並選定設備,且傳遞訊號至溫控單元51以設定溫度資料,並停止溫度偵測器30收集烤箱52之溫度資料,再停止設備運作並變更設備狀態為待機。簡言之,遠端下機功能單元13係用於在遠端停止已完成或欲終止烘烤固化作業之烘烤裝置50。實際的遠端下機功能單元13執行步驟如下:Please refer to FIG. 2D. FIG. 2D is a flowchart of the remote down function unit 13 of the automatic baking application 102 of the control terminal 10. The remote offline function unit 13 is configured to confirm whether the device status is powered on and select the device, and transmit a signal to the temperature control unit 51 to set the temperature data, and stop the temperature detector 30 to collect the temperature data of the oven 52, and then stop the device operation. And change the device status to standby. In short, the remote lower functional unit 13 is used to stop the baking device 50 that has completed or is about to terminate the baking curing operation at the distal end. The actual remote offline function unit 13 performs the following steps:

步驟一:進行設備下機。Step 1: Take the device off.

步驟二:確認設備狀態是否為開機,確認為否的話,將產生錯誤警告,且重回步驟一。確認為是的話,則繼續執行步驟三。Step 2: Confirm that the device status is powered on. If the confirmation is no, an error warning will be generated and return to step 1. If yes, continue with step 3.

步驟三:完成設備選定。Step 3: Complete the device selection.

步驟四:開始下機,且發送封包訊號至控制伺服器20,此封包訊號可為傳輸控制協定(TCP)封包訊號。Step 4: Start down the machine and send a packet signal to the control server 20. The packet signal may be a Transmission Control Protocol (TCP) packet signal.

步驟五:確認控制伺服器20是否接收封包訊號,確認為否的話,將產生錯誤警告,且回傳封包訊號至步驟四。確認為是的話,則繼續執行步驟六。Step 5: Confirm whether the control server 20 receives the packet signal. If the confirmation is no, an error warning will be generated and the packet signal will be sent back to step 4. If yes, continue with step 6.

步驟六:使用溫控單元51設定溫度資料,若溫度資料未被設定,將產生錯誤警告,且回傳封包訊號至步驟四。若溫度資料已被設定,則繼續執行步驟七。其中溫控單元51是接收透過訊號轉換器40轉換由控制伺服器20傳送來之封包訊號成串列式訊號,而開始執行溫度資料設定。Step 6: Use the temperature control unit 51 to set the temperature data. If the temperature data is not set, an error warning will be generated, and the packet signal will be returned to step 4. If the temperature data has been set, proceed to step 7. The temperature control unit 51 receives the packet signal transmitted by the control server 20 through the signal converter 40 to form a serial signal, and starts to perform temperature data setting.

步驟七:停止溫度偵測器30收集溫度資料,若未停止收集烤箱52之溫度資料,將產生錯誤警告,且回傳封包訊號至步驟四。若已停止收集烤箱52之溫度資料,則繼續執行步驟八。Step 7: Stop the temperature detector 30 to collect the temperature data. If the temperature data of the oven 52 is not stopped, an error warning will be generated and the packet signal will be returned to step 4. If the temperature data of the oven 52 has been stopped, proceed to step eight.

步驟八:確認設備是否停止,確認為否的話,將產生錯誤警告,且回傳封包訊號至步驟四。確認為是的話,則繼續執行步驟九。Step 8: Confirm whether the device is stopped. If the confirmation is no, an error warning will be generated and the packet signal will be sent back to step 4. If yes, continue with step 9.

步驟九:變更設備狀態為待機。Step 9: Change the device status to standby.

遠端下機功能單元13執行步驟五~步驟九時,皆是透過控制伺服器20進行訊號之傳遞。When the remote offline function unit 13 performs step 5 to step 9, the signal is transmitted through the control server 20.

請參考圖2E,圖2E為控制端10之自動烘烤應用程式102的溫度校正功能單元14流程圖。溫度校正功能單元14用於確認設備狀態是否為待機並選定設備,且傳遞訊號以啟動溫度偵測器30收集烤箱52之溫度資料,再設定補償值並儲存補償值至數據儲存器80。簡言之,溫度校正功能單元14係用於校正溫度資料,使溫度偵測器30收集到之烤箱52的實際溫度資料與溫控單元51所設定之溫度資料為一致。實際的溫度校正功能單元14執行步驟如下:Please refer to FIG. 2E. FIG. 2E is a flow chart of the temperature correction function unit 14 of the automatic baking application 102 of the control terminal 10. The temperature correction function unit 14 is configured to confirm whether the device status is standby and select the device, and transmit a signal to activate the temperature detector 30 to collect the temperature data of the oven 52, set the compensation value, and store the compensation value to the data storage 80. In short, the temperature correction function unit 14 is used to correct the temperature data, so that the actual temperature data of the oven 52 collected by the temperature detector 30 is consistent with the temperature data set by the temperature control unit 51. The actual temperature correction function unit 14 performs the following steps:

步驟一:開始設備溫度校正。Step 1: Start the device temperature calibration.

步驟二:確認設備狀態是否為待機,確認為否的話,將產生錯誤警告,且重回步驟一。確認為是的話,則繼續執行步驟三。Step 2: Confirm whether the device status is standby. If the confirmation is no, an error warning will be generated and return to step 1. If yes, continue with step 3.

步驟三:完成設備選定。Step 3: Complete the device selection.

步驟四:開始校正並變更設備狀態為校正中,且發送封包訊號至控制伺服器20,此封包訊號可為傳輸控制協定(TCP)封包訊號。Step 4: Start calibration and change the device status to the calibration, and send the packet signal to the control server 20. The packet signal may be a Transmission Control Protocol (TCP) packet signal.

步驟五:確認控制伺服器20是否接收封包訊號,確認為否的話,將產生錯誤警告,且回傳封包訊號至步驟四。確認為是的話,則繼續執行步驟六。Step 5: Confirm whether the control server 20 receives the packet signal. If the confirmation is no, an error warning will be generated and the packet signal will be sent back to step 4. If yes, continue with step 6.

步驟六:啟動溫度偵測器30收集溫度資料,若烤箱52之實際溫度資料未被收集,將產生錯誤警告,且回傳封包訊號至步驟四。若烤箱52之實際溫度資料已被收集,則繼續執行步驟七。Step 6: Start the temperature detector 30 to collect the temperature data. If the actual temperature data of the oven 52 is not collected, an error warning will be generated, and the packet signal will be returned to the fourth step. If the actual temperature data of the oven 52 has been collected, proceed to step 7.

步驟七:設定補償值。操作人員可依據溫度偵測器30所收集到之烤箱52的實際溫度資料與溫控單元51所設定之溫度資料之間產生的差異,進行補償值之設定,使兩者為一致。設定之補償值將被儲存至數據儲存器80,並繼續執行步驟八。Step 7: Set the compensation value. The operator can set the compensation value according to the difference between the actual temperature data of the oven 52 collected by the temperature detector 30 and the temperature data set by the temperature control unit 51, so that the two are consistent. The set compensation value will be stored in data store 80 and proceed to step eight.

步驟八:停止溫度偵測器30收集溫度資料,若未停止收集溫度資料,將產生錯誤警告,且回傳封包訊號至步驟四。若已停止收集溫度資料,則結束校正並變更設備狀態為待機。Step 8: Stop the temperature detector 30 to collect the temperature data. If the temperature data is not stopped, an error warning will be generated and the packet signal will be returned to step 4. If the temperature data has been stopped, the calibration is terminated and the device status is changed to standby.

請參考圖2F,圖2F為控制端10之自動烘烤應用程式102的異常記錄查詢單元15流程圖。異常記錄查詢單元15用於選擇欲查詢異常記錄資料之日期區間,且搜尋數據儲存器80,並顯示異常記錄資料之查詢結果。實際的異常記錄查詢單元15執行步驟如下:Please refer to FIG. 2F. FIG. 2F is a flowchart of the abnormal record query unit 15 of the automatic baking application 102 of the control terminal 10. The abnormal record query unit 15 is configured to select a date range in which the abnormal record data is to be queried, search the data store 80, and display the query result of the abnormal record data. The actual abnormal record query unit 15 performs the following steps:

步驟一:選擇欲查詢日期區間。Step 1: Select the date range you want to query.

步驟二:搜尋數據儲存器80,若未進行異常記錄資料搜尋,將產生錯誤警告,且重回步驟一。若已進行異常記錄資料搜尋,則繼續執行步驟三。Step 2: Search the data storage 80. If the abnormal record data search is not performed, an error warning will be generated and the process returns to step 1. If the abnormal record data search has been performed, proceed to step 3.

步驟三:顯示異常記錄資料之查詢結果。Step 3: Display the query result of the abnormal record data.

請參考圖2G,圖2G為控制端10之自動烘烤應用程式102的圖表記錄查詢單元16流程圖。圖表記錄查詢單元16用於選擇欲查詢圖表記錄資料之日期區間,且搜尋數據儲存器80,並轉換數據資料成圖表,再顯示圖表記錄資料之查詢結果。實際的圖表記錄查詢單元16執行步驟如下:Please refer to FIG. 2G. FIG. 2G is a flowchart of the chart record query unit 16 of the automatic baking application 102 of the control terminal 10. The chart record query unit 16 is configured to select a date range for which the chart record data is to be queried, and search the data store 80, and convert the data data into a chart, and then display the query result of the chart record data. The actual chart record query unit 16 performs the following steps:

步驟一:選擇欲查詢日期區間。Step 1: Select the date range you want to query.

步驟二:搜尋數據儲存器80,若未進行資料搜尋,將產生錯誤警告,且重回步驟一。若已進行資料搜尋,則繼續執行步驟三。Step 2: Search the data storage 80. If no data search is performed, an error warning will be generated and the process returns to step 1. If the data search has been performed, proceed to step 3.

步驟三:轉換數據資料成電子圖表,若未轉換,將產生錯誤警告,且重回步驟一。若已轉換,則繼續執行步驟四。Step 3: Convert the data into an electronic chart. If it is not converted, an error warning will be generated and return to step 1. If it has been converted, proceed to step four.

步驟四:顯示電子圖表記錄之查詢結果。Step 4: Display the query result of the electronic chart record.

請參考圖2H,圖2H為控制端10之自動烘烤應用程式102的設備參數管理單元17流程圖。設備參數管理單元17用於設定溫度偵測器30及訊號轉換器40之參數資料。實際的設備參數管理單元17執行步驟如下:Please refer to FIG. 2H. FIG. 2H is a flowchart of the device parameter management unit 17 of the automatic baking application 102 of the control terminal 10. The device parameter management unit 17 is configured to set parameter data of the temperature detector 30 and the signal converter 40. The actual device parameter management unit 17 performs the following steps:

步驟一:開始設定設備參數。Step 1: Start setting device parameters.

步驟二:設定溫度偵測器30之參數資料,相關參數資料例如是網際網路通訊協定(IP)位址、設備名稱或模組名稱等。若未設定,將產生錯誤警告。若完成設定,則繼續執行步驟三。Step 2: Set the parameter data of the temperature detector 30, and the related parameter data is, for example, an Internet Protocol (IP) address, a device name, or a module name. If not set, an error warning will be generated. If the setting is completed, proceed to step three.

步驟三:設定訊號轉換器40之參數資料,相關參數資料例如是網際網路通訊協定(IP)位址、設備名稱或模組名稱等。若未設定,將產生錯誤警告。若完成設定,則繼續執行步驟四。Step 3: Set the parameter data of the signal converter 40, and the related parameter data is, for example, an Internet Protocol (IP) address, a device name, or a module name. If not set, an error warning will be generated. If the setting is completed, proceed to step four.

步驟四:儲存參數資料至數據儲存器80。Step 4: Store the parameter data to the data storage 80.

請參考圖2I,圖2I為控制端10之自動烘烤應用程式102的權限管理功能單元18流程圖。權限管理功能單元18用於設定操作人員之功能權限,及驗證資料是否正確、重覆或權限允許,並儲存權限設定資料至數據儲存器80。實際的權限管理功能單元18執行步驟如下:Please refer to FIG. 2I. FIG. 2I is a flowchart of the rights management function unit 18 of the automatic baking application 102 of the control terminal 10. The rights management function unit 18 is configured to set the function authority of the operator, and verify whether the data is correct, repeated or permission permitted, and store the rights setting data to the data storage 80. The actual rights management function unit 18 performs the following steps:

步驟一:開始設定功能權限資料。Step 1: Start setting the function permission data.

步驟二:操作人員之功能權限資料設定。功能權限資料包含操作人員相關資料及權限管理項目。Step 2: Set the function permission data of the operator. The function permission data includes operator related information and rights management items.

步驟三:驗證資料是否正確、重覆或權限允許,若未驗證,將會產生錯誤警告。若完成驗證,則繼續執行步驟四。Step 3: Verify that the data is correct, repeat or permission allowed. If not verified, an error warning will be generated. If the verification is complete, proceed to step four.

步驟四:儲存功能權限資料至數據儲存器80。Step 4: Store the function authority data to the data storage 80.

請參考圖2J,圖2J為控制端10之自動烘烤應用程式102的監控狀態功能單元19流程圖。監控狀態功能單元19用於驗證各設備之狀態資料為正常或異常,且顯示設備狀態之匯整結果,讓操作人員可根據設備狀態預先準備作業或通知設備人員進行維修,以隨時監控及立即反應異常狀況。實際的監控狀態功能單元19執行步驟如下:Please refer to FIG. 2J. FIG. 2J is a flowchart of the monitoring status function unit 19 of the automatic baking application 102 of the control terminal 10. The monitoring status function unit 19 is configured to verify that the status data of each device is normal or abnormal, and display the result of the device status, so that the operator can prepare the operation according to the device status or notify the equipment personnel to perform maintenance, so as to monitor and react immediately. Abnormal condition. The actual monitoring status function unit 19 performs the following steps:

步驟一:連接數據儲存器80。Step 1: Connect the data storage 80.

步驟二:取得各設備之狀態資料。Step 2: Obtain status data of each device.

步驟三:驗證資料為正常或異常,確認為正常的話,則顯示設備狀態,正常之設備狀態包括開機、昇溫、降溫或校正中。確認為異常的話,亦顯示設備狀態,異常之設備狀態包括超溫、超時、當機、溫度異常或其他,前述所列舉的異常並以警示機制提醒,警示機制例如:顯眼顏色或特殊符號等。本實施例不限於前述所列舉之正常與異常設備狀態,設備狀態的顯示可以視需求改變的。Step 3: Verify that the data is normal or abnormal. If it is confirmed to be normal, the device status is displayed. The normal device status includes power on, warming up, cooling, or calibration. If it is confirmed to be abnormal, the device status is also displayed. The abnormal device status includes over temperature, timeout, crash, temperature abnormality or other. The above mentioned abnormalities are reminded by the warning mechanism, such as conspicuous color or special symbol. . This embodiment is not limited to the normal and abnormal device states listed above, and the display of the device state may be changed as needed.

步驟四:顯示設備狀態之匯整結果。Step 4: Display the result of the device status.

以下係說明控制伺服器20的各種功能,請參考圖3A,圖3A為控制伺服器20的功能單元示意圖。前面所提到的控制伺服器20依照功能包含溫度收集時機控制單元21、溫度條件設定控制單元22及作業時間管制單元23,以上各單元動作流程如下:The following describes various functions of the control server 20. Referring to FIG. 3A, FIG. 3A is a functional unit diagram of the control server 20. The control server 20 mentioned above includes a temperature collection timing control unit 21, a temperature condition setting control unit 22, and a work time control unit 23 according to functions. The above unit operation flow is as follows:

請參考圖3B,圖3B為控制伺服器20之溫度收集時機控制單元21流程圖。溫度收集時機控制單元21用於接收控制端10傳遞之上機或下機指令,且根據上機或下機指令,確認是否啟動或停止溫度偵測器30收集烤箱52之溫度資料。簡言之,溫度收集時機控制單元21係用於控制溫度偵測器30收集烤箱52之溫度資料的時機。實際的溫度收集時機控制單元21執行步驟如下:Please refer to FIG. 3B. FIG. 3B is a flowchart of the temperature collection timing control unit 21 of the control server 20. The temperature collection timing control unit 21 is configured to receive the upper or lower machine command from the control terminal 10, and confirm whether to start or stop the temperature detector 30 to collect the temperature data of the oven 52 according to the upper or lower machine command. In short, the temperature collection timing control unit 21 is for controlling the timing at which the temperature detector 30 collects the temperature data of the oven 52. The actual temperature collection timing control unit 21 performs the following steps:

步驟一:控制伺服器20接收控制端10傳遞之上機或下機指令。Step 1: The control server 20 receives the control terminal 10 to transmit the upper machine or the lower machine command.

步驟二:控制伺服器20依據指令(上機或下機)進行封包訊號傳遞至溫度偵測器30。Step 2: The control server 20 transmits the packet signal to the temperature detector 30 according to the instruction (upper or lower).

步驟三:若為上機指令時,確認溫度偵測器30是否接收啟動收集烤箱52溫度資料之訊號,若為下機指令時,則確認溫度偵測器30是否接收停止收集烤箱52溫度資料之訊號。確認為否的話,將會產生錯誤警告。確認為是的話,則繼續執行步驟四。Step 3: If it is the command of the machine, confirm whether the temperature detector 30 receives the signal for starting the temperature data of the collecting oven 52. If it is the command of the lower machine, it is confirmed whether the temperature detector 30 receives the temperature data of the collecting oven 52. Signal. If the confirmation is no, an error warning will be generated. If yes, continue with step four.

步驟四:啟動或停止溫度偵測器30,待溫度偵測器30之溫度資料回饋之後,此溫度資料將被收集至數據儲存器80。Step 4: Start or stop the temperature detector 30. After the temperature data of the temperature detector 30 is fed back, the temperature data will be collected to the data storage 80.

請參考圖3C,圖3C為控制伺服器20之溫度條件設定控制單元22流程圖。溫度條件設定控制單元22用於接收控制端10傳遞之上機或下機指令,且依據指令至數據儲存器80取得設定條件及變更設備狀態,並設定溫度資料,再經由訊號轉換器40轉換訊號格式,將溫度資料輸入溫控單元51,最後將溫度資料回饋傳回控制端10及儲存至數據儲存器80。實際的溫度條件設定控制單元22執行步驟如下:Please refer to FIG. 3C. FIG. 3C is a flowchart of the temperature condition setting control unit 22 of the control server 20. The temperature condition setting control unit 22 is configured to receive the upper machine or the lower machine command from the control terminal 10, and obtain the setting condition and the device status according to the instruction to the data storage 80, and set the temperature data, and then convert the signal through the signal converter 40. The format enters the temperature data into the temperature control unit 51, and finally returns the temperature data feedback to the control terminal 10 and stores it to the data storage 80. The actual temperature condition setting control unit 22 performs the following steps:

步驟一:控制伺服器20接收控制端10傳遞之上機或下機指令。Step 1: The control server 20 receives the control terminal 10 to transmit the upper machine or the lower machine command.

步驟二:控制伺服器20依據指令至數據儲存器80取得設定條件及變更設備狀態。Step 2: The control server 20 acquires the setting conditions and changes the device state according to the instruction to the data storage 80.

步驟三:設定溫度資料,若未設定,將產生錯誤警告,且重回步驟二。若完成設定,將發送封包訊號至訊號轉換器40。Step 3: Set the temperature data. If not set, an error warning will be generated and return to step 2. If the setting is completed, the packet signal will be sent to the signal converter 40.

步驟四:訊號轉換器40轉換訊號格式,將溫度資料輸入溫控單元51,且將溫度資料回饋傳回訊號轉換器40。Step 4: The signal converter 40 converts the signal format, inputs the temperature data into the temperature control unit 51, and returns the temperature data feedback to the signal converter 40.

步驟五:溫控單元51將溫度資料回饋傳至訊號轉換器40,透過訊號轉換器40轉換訊號格式回傳至控制伺服器20,再分別呈現於控制端10及儲存至數據儲存器80。Step 5: The temperature control unit 51 transmits the temperature data feedback to the signal converter 40, and the converted signal format is transmitted back to the control server 20 through the signal converter 40, and then presented to the control terminal 10 and stored to the data storage 80, respectively.

請參考圖3D,圖3D為控制伺服器20之作業時間管制單元23流程圖。作業時間管制單元23用於進行輪巡檢查確認是否滿足作業需求,且執行溫度收集時機控制單元21之步驟及溫度條件設定控制單元22之步驟,並至數據儲存器80變更設備狀態。實際的作業時間管制單元23執行步驟如下:Please refer to FIG. 3D. FIG. 3D is a flowchart of the work time control unit 23 of the control server 20. The work time control unit 23 is configured to perform a round check to confirm whether the job demand is satisfied, and to execute the steps of the temperature collection timing control unit 21 and the temperature condition setting control unit 22, and to the data storage 80 to change the equipment state. The actual work time control unit 23 performs the following steps:

步驟一:控制伺服器20輪巡檢查。Step 1: Control the server 20 round inspection.

步驟二:確認是否滿足作業需求,確認為否的話,將產生錯誤警告。確認為是的話,則繼續執行步驟三。Step 2: Confirm that the job requirements are met. If the confirmation is no, an error warning will be generated. If yes, continue with step 3.

步驟三:確認是否執行溫度收集時機控制單元21之步驟,若未執行,將產生錯誤警告。若執行完成,則繼續執行步驟四。Step 3: Confirm whether the step of the temperature collection timing control unit 21 is executed. If not, an error warning will be generated. If the execution is complete, proceed to step four.

步驟四:確認是否執行溫度條件設定控制單元22之步驟,若未執行,將產生錯誤警告。若執行完成,則繼續執行步驟五。Step 4: Confirm whether the step of the temperature condition setting control unit 22 is executed. If not, an error warning will be generated. If the execution is complete, proceed to step 5.

步驟五:至數據儲存器80變更設備狀態。Step 5: Change the device status to the data storage 80.

綜上,本發明的烘烤系統能達到功效如下:In summary, the baking system of the present invention can achieve the following effects:

本發明的烘烤系統能自動設定參數,避免人工設定錯誤的風險發生,確保產品正常生產。The baking system of the invention can automatically set parameters, avoid the risk of manual setting errors, and ensure the normal production of the product.

本發明烘烤系統採用自動控制設計,所有元件統一經由控制伺服器控管,使烘烤系統能監控龐大的烤箱數量。The baking system of the invention adopts an automatic control design, and all components are controlled by the control server in a unified manner, so that the baking system can monitor the huge number of ovens.

本發明的烘烤系統係以電子圖表取代紙本製圖,隨時都能查詢記錄資料,並減少紙張的使用。The baking system of the present invention replaces the paper drawing with an electronic chart, and can inquire the recorded data at any time and reduce the use of the paper.

本發明的烘烤系統具有設備異常自動警告,發生重大異常時能自動停止,避免下一批產品持續烘烤固化影響。The baking system of the invention has an abnormal automatic warning of equipment, and can automatically stop when a major abnormality occurs, thereby avoiding the influence of the continuous baking and solidification of the next batch of products.

本發明的烘烤系統的控制伺服器,能使各設備獨立運作,且能分散在各處易於維修。The control server of the baking system of the present invention enables each device to operate independently and can be dispersed throughout for easy maintenance.

本發明的烘烤系統的控制伺服器,能視需求內建不同的功能單元,接收各設備回傳的資料。The control server of the baking system of the invention can build different functional units according to requirements, and receive the data returned by each device.

本發明的烘烤系統的控制伺服器為分散獨立式,此種硬體架構因異常而需替換的成本低於嵌入式的硬體架構。The control server of the baking system of the present invention is distributed and independent, and the cost of replacing such a hardware structure due to an abnormality is lower than that of an embedded hardware architecture.

以上所述僅為本發明之較佳實施例,並非用以限定本發明之申請專利權利;同時以上的描述,對於熟知本技術領域之專門人士應可明瞭及實施,因此其他未脫離本發明所揭示之精神下所完成的等效改變或修飾,均應包含在申請專利範圍中。The above description is only the preferred embodiment of the present invention, and is not intended to limit the patent application rights of the present invention. The above description should be understood and implemented by those skilled in the art, so that the other embodiments are not deviated from the present invention. Equivalent changes or modifications made in the spirit of the disclosure should be included in the scope of the patent application.

10...控制端10. . . Control terminal

101...電腦101. . . computer

102...自動烘烤應用程式102. . . Automatic baking application

11...排程條件管制單元11. . . Scheduling condition control unit

12...遠端上機功能單元12. . . Remote computer functional unit

13...遠端下機功能單元13. . . Remote down function unit

14...溫度校正功能單元14. . . Temperature correction function unit

15...異常記錄查詢單元15. . . Exception record query unit

16...圖表記錄查詢單元16. . . Chart record query unit

17...設備參數管理單元17. . . Equipment parameter management unit

18...權限管理功能單元18. . . Rights management function unit

19...監控狀態功能單元19. . . Monitoring status function unit

20...控制伺服器20. . . Control server

21...溫度收集時機控制單元twenty one. . . Temperature collection timing control unit

22...溫度條件設定控制單元twenty two. . . Temperature condition setting control unit

23...作業時間管制單元twenty three. . . Working time control unit

30...溫度偵測器30. . . Temperature detector

31...熱電耦31. . . Thermocouple

40...訊號轉換器40. . . Signal converter

50...烘烤裝置50. . . Baking device

51...溫控單元51. . . Temperature control unit

52...烤箱52. . . oven

60...集線器60. . . Hub

60a...第一集線器60a. . . First hub

60b...第二集線器60b. . . Second hub

70...生產管理系統70. . . Production management system

80...數據儲存器80. . . Data storage

90...識別器90. . . Recognizer

圖1,為本發明實施例所提出的烘烤系統架構圖。FIG. 1 is a structural diagram of a baking system according to an embodiment of the present invention.

圖2A,為本發明實施例所提出控制端之自動烘烤應用程式的功能單元示意圖。2A is a schematic diagram of functional units of an automatic baking application program of a control terminal according to an embodiment of the present invention.

圖2B,為本發明實施例所提出控制端之自動烘烤應用程式的排程條件管制單元流程圖。2B is a flow chart of a scheduling condition control unit of an automatic baking application of a control end according to an embodiment of the present invention.

圖2C,為本發明實施例所提出控制端之自動烘烤應用程式的遠端上機功能單元流程圖。FIG. 2C is a flow chart of the function unit of the remote upper machine of the automatic baking application of the control end according to the embodiment of the present invention.

圖2D,為本發明實施例所提出控制端之自動烘烤應用程式的遠端下機功能單元流程圖。FIG. 2D is a flow chart of the remote function unit of the remote baking application of the control terminal according to the embodiment of the present invention.

圖2E,為本發明實施例所提出控制端之自動烘烤應用程式的溫度校正功能單元流程圖。2E is a flow chart of a temperature correction function unit of an automatic baking application of the control terminal according to an embodiment of the present invention.

圖2F,為本發明實施例所提出控制端之自動烘烤應用程式的異常記錄查詢單元流程圖。FIG. 2F is a flowchart of an abnormal record query unit of an automatic baking application of a control end according to an embodiment of the present invention.

圖2G,為本發明實施例所提出控制端之自動烘烤應用程式的圖表記錄查詢單元流程圖。2G is a flow chart of a chart record query unit of the automatic baking application of the control end according to the embodiment of the present invention.

圖2H,為本發明實施例所提出控制端之自動烘烤應用程式的設備參數管理單元流程圖。2H is a flow chart of a device parameter management unit of an automatic baking application of a control terminal according to an embodiment of the present invention.

圖2I,為本發明實施例所提出控制端之自動烘烤應用程式的權限管理功能單元流程圖。FIG. 2I is a flow chart of the rights management function unit of the automatic baking application of the control end according to the embodiment of the present invention.

圖2J,為本發明實施例所提出控制端之自動烘烤應用程式的監控狀態功能單元流程圖。FIG. 2J is a flow chart of the monitoring state function unit of the automatic baking application of the control end according to the embodiment of the present invention.

圖3A,為本發明實施例所提出的控制伺服器的功能單元示意圖。FIG. 3A is a schematic diagram of functional units of a control server according to an embodiment of the present invention.

圖3B,為本發明實施例所提出控制伺服器的溫度收集時機控制單元流程圖。FIG. 3B is a flowchart of a temperature collection timing control unit for controlling a server according to an embodiment of the present invention.

圖3C,為本發明實施例所提出控制伺服器之溫度條件設定控制單元流程圖。FIG. 3C is a flowchart of a temperature condition setting control unit for controlling a server according to an embodiment of the present invention.

圖3D,為本發明實施例所提出控制伺服器的作業時間管制單元流程圖。FIG. 3D is a flowchart of a working time control unit for controlling a server according to an embodiment of the present invention.

10...控制端10. . . Control terminal

101...電腦101. . . computer

102...自動烘烤應用程式102. . . Automatic baking application

20...控制伺服器20. . . Control server

30...溫度偵測器30. . . Temperature detector

31...熱電耦31. . . Thermocouple

40...訊號轉換器40. . . Signal converter

50...烘烤裝置50. . . Baking device

51...溫控單元51. . . Temperature control unit

52...烤箱52. . . oven

60...集線器60. . . Hub

60a...第一集線器60a. . . First hub

60b...第二集線器60b. . . Second hub

70...生產管理系統70. . . Production management system

80...數據儲存器80. . . Data storage

90...識別器90. . . Recognizer

Claims (10)

一種烘烤系統,包含:一控制端(10)、一控制伺服器(20)、一溫度偵測器(30)、一訊號轉換器(40)及至少一烘烤裝置(50),該烘烤裝置(50)包含一溫控單元(51)及一烤箱(52),其特徵在於:
該溫度偵測器(30)連接至該烤箱(52),並偵測該烤箱(52)中的溫度資料,將該烤箱(52)中之溫度資料傳遞至該控制伺服器(20);以及
該控制端(10)讀取該溫度偵測器(30)傳遞至該控制伺服器(20)的溫度資料,進而得知該烤箱(52)的實際溫度,該控制端(10)藉由該控制伺服器(20)傳遞訊號至該訊號轉換器(40),進而控制該烘烤裝置(50)的該溫控單元(51)設定該烤箱(52),該控制端(10)藉由該控制伺服器(20)接收該訊號轉換器(40)的訊號,進而控制該烘烤裝置(50)的該溫控單元(51)得知該烤箱(52)的設定狀態。
A baking system comprising: a control end (10), a control server (20), a temperature detector (30), a signal converter (40) and at least one baking device (50), the baking The baking device (50) comprises a temperature control unit (51) and an oven (52), characterized in that:
The temperature detector (30) is coupled to the oven (52) and detects temperature data in the oven (52) to transfer temperature data in the oven (52) to the control server (20); The control terminal (10) reads the temperature data transmitted by the temperature detector (30) to the control server (20), and further knows the actual temperature of the oven (52), and the control terminal (10) The control server (20) transmits a signal to the signal converter (40), and the temperature control unit (51) that controls the baking device (50) sets the oven (52), and the control terminal (10) The control server (20) receives the signal of the signal converter (40), and further controls the temperature control unit (51) of the baking device (50) to know the setting state of the oven (52).
根據申請專利範圍第1項所述的烘烤系統,其中,該溫度偵測器(30)與該訊號轉換器(40)藉由一第一集線器(60a)連線至該控制伺服器(20)。The baking system according to claim 1, wherein the temperature detector (30) and the signal converter (40) are connected to the control server by a first hub (60a). ). 根據申請專利範圍第2項所述的烘烤系統,其中,該烘烤裝置(50)為複數個,且分別透過該第一集線器(60a)連線至該控制伺服器(20)。The baking system according to claim 2, wherein the baking device (50) is plural and is connected to the control server (20) through the first hub (60a). 根據申請專利範圍第1項所述的烘烤系統,其中,該控制伺服器(20)與該控制端(10)進一步連線至一生產管理系統(70)與一數據儲存器(80),且該生產管理系統(70)及該數據儲存器(80)分別與該控制伺服器(20)交換訊號。The baking system according to claim 1, wherein the control server (20) and the control terminal (10) are further connected to a production management system (70) and a data storage device (80). And the production management system (70) and the data storage (80) exchange signals with the control server (20), respectively. 根據申請專利範圍第4項所述的烘烤系統,其中,該控制伺服器(20)自該數據儲存器(80)存取該烘烤裝置(50)的溫度資料。The baking system of claim 4, wherein the control server (20) accesses temperature data of the baking device (50) from the data storage (80). 根據申請專利範圍第1項所述的烘烤系統,其中,該控制端(10)與該控制伺服器(20)藉由一第二集線器(60b)連線。The baking system according to claim 1, wherein the control terminal (10) and the control server (20) are connected by a second hub (60b). 根據申請專利範圍第1項所述的烘烤系統,其中,該溫度偵測器(30)係以一熱電耦(31)偵測該烤箱(52)的溫度資料。The baking system according to claim 1, wherein the temperature detector (30) detects the temperature data of the oven (52) by a thermocouple (31). 根據申請專利範圍第1項所述的烘烤系統,其中,該訊號轉換器(40)分別接收來自該溫控單元(51)及該控制伺服器(20)之訊號,並將該些訊號進行通訊協定轉換成串列式訊號或封包訊號,分別傳遞至該溫控單元(51)及該控制伺服器(20)。According to the baking system of claim 1, wherein the signal converter (40) receives signals from the temperature control unit (51) and the control server (20), respectively, and performs the signals. The communication protocol is converted into a serial signal or a packet signal, which is respectively transmitted to the temperature control unit (51) and the control server (20). 根據申請專利範圍第4項所述的烘烤系統,其中,該控制端(10)包含一具有自動烘烤應用程式(102)的電腦(101),該電腦(101)連線至該生產管理系統(70)及該數據儲存器(80),且該自動烘烤應用程式(102)依照功能單元包含:
一排程條件管制單元(11),其用於檢查設備狀態並選定設備,且確認生產管理系統(70)是否進場取得設定條件及資料,並驗證設定條件及資料,檢查重複排程並儲存排程資料至數據儲存器(80);
一遠端上機功能單元(12),其用於確認設備狀態是否為已排程並選定設備,且傳遞訊號至溫控單元(51)以設定烤箱(52)之溫度資料,並接收溫度偵測器(30)所收集之烤箱(52)溫度資料,再啟動設備昇溫並變更設備狀態為開機;
一遠端下機功能單元(13),其用於確認設備狀態是否為開機並選定設備,且傳遞訊號至溫控單元(51)以設定溫度資料,並停止溫度偵測器(30)收集烤箱(52)之溫度資料,再停止設備運作並變更設備狀態為待機;
一溫度校正功能單元(14),其用於確認設備狀態是否為待機並選定設備,且傳遞訊號以啟動溫度偵測器(30)收集烤箱(52)之溫度資料,再設定補償值並儲存補償值至數據儲存器(80);
一異常記錄查詢單元(15),其用於選擇欲查詢異常記錄資料之日期區間,且搜尋數據儲存器80,並顯示異常記錄資料之查詢結果;
一圖表記錄查詢單元(16),其用於選擇欲查詢圖表記錄資料之日期區間,且搜尋數據儲存器(80),並轉換數據資料成圖表,再顯示圖表記錄資料之查詢結果;
一設備參數管理單元(17),其用於設定溫度偵測器(30)及訊號轉換器(40)之參數資料;
一權限管理功能單元(18),其用於設定操作人員之功能權限,及驗證資料是否正確、重覆或權限允許,並儲存權限設定資料至數據儲存器(80);以及
一監控狀態功能單元(19),其用於驗證各設備之狀態資料為正常或異常,且顯示設備狀態之匯整結果,讓操作人員可根據設備狀態預先準備作業或通知設備人員進行維修,以隨時監控及立即反應異常狀況。
The baking system according to claim 4, wherein the control terminal (10) comprises a computer (101) having an automatic baking application (102), the computer (101) being connected to the production management The system (70) and the data storage (80), and the automatic baking application (102) according to the functional unit comprises:
A scheduling condition control unit (11) for checking equipment status and selecting equipment, and confirming whether the production management system (70) enters the field to obtain setting conditions and materials, and verifying setting conditions and materials, checking repeated schedules and storing Scheduling data to the data storage (80);
a remote upper functional unit (12) for confirming whether the device status is scheduled and selecting the device, and transmitting a signal to the temperature control unit (51) to set the temperature data of the oven (52) and receiving the temperature detection The temperature information of the oven (52) collected by the detector (30), and then the device is warmed up and the state of the device is changed to be turned on;
a remote lower function unit (13) for confirming whether the device status is powered on and selecting the device, and transmitting a signal to the temperature control unit (51) to set the temperature data, and stopping the temperature detector (30) to collect the oven (52) Temperature data, then stop the equipment operation and change the equipment status to standby;
a temperature correction function unit (14) for confirming whether the device status is standby and selecting the device, and transmitting a signal to activate the temperature detector (30) to collect the temperature data of the oven (52), then setting the compensation value and storing the compensation Value to data storage (80);
An abnormal record query unit (15) for selecting a date range in which the abnormal record data is to be queried, searching the data storage 80, and displaying the query result of the abnormal record data;
a chart record query unit (16) for selecting a date range for which the chart record data is to be queried, and searching the data store (80), and converting the data data into a chart, and then displaying the query result of the chart record data;
a device parameter management unit (17) for setting parameter data of the temperature detector (30) and the signal converter (40);
a rights management function unit (18) for setting the function authority of the operator, and verifying whether the data is correct, repeated or permission permitted, and storing the authority setting data to the data storage (80); and a monitoring status function unit (19), which is used to verify that the status data of each device is normal or abnormal, and displays the result of the collection of the device status, so that the operator can prepare the operation according to the state of the device or notify the equipment personnel to perform maintenance, so as to monitor and react immediately. Abnormal condition.
根據申請專利範圍第4項所述的烘烤系統,其中,該控制伺服器(20)依照功能包含:
一溫度收集時機控制單元(21),其用於接收控制端(10)傳遞之上機或下機指令,且根據上機或下機指令,確認是否啟動或停止溫度偵測器(30)收集烤箱(52)之溫度資料;
一溫度條件設定控制單元(22),其用於接收控制端(10)傳遞之上機或下機指令,且依據指令至數據儲存器(80)取得設定條件及變更設備狀態,並設定溫度資料,再經由訊號轉換器(40)轉換訊號格式,將溫度資料輸入溫控單元(51),最後將溫度資料回饋傳回控制端(10)及儲存至數據儲存器(80);以及
一作業時間管制單元(23),其用於進行輪巡檢查確認是否滿足作業需求,且執行溫度收集時機控制單元(21)及溫度條件設定控制單元(22),並至數據儲存器(80)變更設備狀態。
The baking system according to claim 4, wherein the control server (20) according to the function comprises:
a temperature collection timing control unit (21) for receiving the control terminal (10) to transmit the upper or lower machine command, and confirming whether to start or stop the temperature detector (30) according to the upper or lower machine command Temperature data of the oven (52);
a temperature condition setting control unit (22) for receiving the control terminal (10) to transmit the upper machine or the lower machine command, and obtaining the setting condition and changing the device status according to the instruction to the data storage device (80), and setting the temperature data Then, the signal format is converted by the signal converter (40), the temperature data is input to the temperature control unit (51), and finally the temperature data feedback is sent back to the control terminal (10) and stored to the data storage (80); and a working time a control unit (23) for performing a round check to confirm whether the job requirement is satisfied, and executing a temperature collection timing control unit (21) and a temperature condition setting control unit (22), and changing the device status to the data storage (80) .
TW101112516A 2012-04-09 2012-04-09 Baking system TW201341995A (en)

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CN106531660A (en) * 2015-10-22 2017-03-22 安徽超元半导体有限公司 Device for baking wafer
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US6140619A (en) * 1999-05-28 2000-10-31 The Garland Group Temperature control apparatus, method and memory medium for an oven
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