TW201318747A - Carbon-pollution-free laser processing device and method thereof - Google Patents

Abstract

This invention relates to a carbon-pollution-free laser processing device and method thereof. The device mainly uses a small sized workpiece isolation chamber, combined with a workpiece table, to constitute an airtight workpiece isolation chamber for the workpiece to be located and isolated therein. A laser transmitter is further disposed above the top outside of the workpiece isolation chamber. The small sized workpiece isolation chamber is performed with air extraction to form a substantial oxygen-free environment, capable of shortening the operation time to form the isolation chamber into a substantially oxygen-free environment and facilitating to achieve a high-quality oxygen-free environment quality. Furthermore, an optical plate at the top part of the workpiece isolation chamber is utilized for the laser light emitted by the laser transmitter from the outside of the workpiece isolation chamber penetrating through therein and being focused and projected on the workpiece to perform laser machining. Applying laser light to a workpiece in a substantially oxygen-free environment can avoid combustion reaction, not only the workpiece surface of the burning phenomenon will not happen, but also emits no carbon from the operation.

Description

Carbon-free pollution laser processing device and method

The invention relates to a laser processing method and device, in particular to a carbon-free pollution laser processing device and method which can make a processed object without laser black after laser processing.

In the early days, when cutting, scribing and drilling a soft circuit board, a hard circuit board, a ceramic substrate, an aluminum plate, a copper plate, etc. with a laser emitter, the laser emitter was mainly directly focused and projected onto the workpiece. In the process of laser processing, the processed object is in aerobic atmosphere, and the high temperature generated on the laser projecting material causes the surface of the processed object to burn to produce a blackening phenomenon, so that the processed object is contaminated by coke black carbon, which is disadvantageous to The quality of the processed product.

In order to prevent the blackening phenomenon of the processed object during the laser processing, the existing laser processing equipment is such that the working table carrying the processed object and the laser emitting device above it are disposed in the large openable cavity, and the cavity is firstly pumped. The vacuum is used to make the interior of the cavity reach a near-substantially oxygen-free environment, and then the laser beam is processed by the laser emitter inside the cavity to avoid the blackening phenomenon of the processed object due to laser processing.

However, the above-mentioned design of the laser transmitter above the workbench and the large-sized cavity that can be opened and closed can improve the problem of blackening caused by laser processing of the workpiece, but the cavity must be applied before the laser processing. The vacuum is first applied, because the volume of the cavity is too large, the vacuuming operation takes time, and it is difficult to achieve a better oxygen-free processing environment, so that there is a defect that the operation effect is not good.

The main object of the present invention is to provide a carbon-free pollution laser processing apparatus and method, which is designed to improve the existing laser processing process by using a large vacuum chamber to cover the workpiece and the laser emitter, and vacuuming The operation is time consuming and it is difficult to achieve the disadvantages of a better anaerobic processing environment.

In order to achieve the foregoing object, the carbon-free pollution laser processing apparatus of the present invention comprises: a workbench having a working surface for providing a positioning position of the workpiece; and a workpiece isolation cavity capable of opening and closing The cover is tightly closed on the working surface of the worktable, and can form a closed workpiece isolation chamber into which the workpiece is placed. The workpiece isolation cavity comprises an optical plate and a side plate disposed around the periphery of the optical plate, the sealing The workpiece isolation chamber is connected to a vacuum suction hole, and the vacuum suction hole is connected to the vacuum extraction device; and a laser emitter is disposed directly above the workbench and the workpiece isolation cavity, and the laser emitter can emit a lightning The optical plate that projects through the workpiece isolation cavity is then focused onto the workpiece in the workpiece isolation chamber.

The carbon-free pollution laser processing method of the present invention comprises the steps of: isolating the workpiece into a closed workpiece isolation chamber, and using a workbench to provide a workpiece positioning thereon, the workpiece isolation chamber The chamber is formed by using a workpiece isolation cavity cover having an optical plate on the top of a workbench; the vacuuming step is to evacuate the interior of the workpiece isolation chamber to achieve a substantially oxygen-free environment; laser processing and The pumping step is to cause the laser emitter to emit laser light from above the workpiece isolation cavity, the laser light penetrates the optical plate on the top of the workpiece isolation cavity, and then is focused and projected onto the workpiece for laser processing, and the workpiece isolation cavity is simultaneously The chamber continuously performs the pumping action to discharge the debris generated by the laser processing until the processing of the workpiece is completed; and the step of removing the workpiece is to release the pumping state of the workpiece isolation chamber, and the outside air is introduced into the workpiece. The inside of the chamber is isolated so that the workpiece isolation chamber can be opened and the workpiece can be taken out.

The carbon-free pollution laser processing device and method design is characterized in that a small workpiece isolation cavity is combined with the workpiece table to form a closed workpiece isolation chamber in which the processed object is isolated, without affecting the original laser processing. In a manner, when the workpiece isolation chamber is evacuated to form a substantially oxygen-free environment, the miniaturized workpiece isolation chamber can be utilized to shorten the operation time for forming a substantially oxygen-free environment for the isolation chamber to be evacuated, and can achieve good The anaerobic environment quality, and the use of the optical plate on the top of the workpiece isolation cavity provides the laser emitter to emit laser light from the outside of the workpiece isolation cavity, and then focus and project on the workpiece for laser processing, and the laser light is applied to the essence. There is no combustion reaction on the processed material in the anaerobic environment, so that the processed product has no blackening phenomenon and no carbon pollution, thereby ensuring the processing quality of the processed product.

The second object of the present invention is to provide a nitrogen gas injection hole in the workpiece isolation cavity for injecting nitrogen into the workpiece isolation chamber after the workpiece isolation chamber is evacuated, and the workpiece is placed in the subsequent laser processing step. The substantially anaerobic nitrogen atmosphere environment is more resistant to the burning effect of the processed laser processing.

Furthermore, the present invention can further perform the laser processing and evacuation in the environment of the substantially oxygen-free nitrogen atmosphere of the workpiece isolation chamber, and at the same time, the nitrogen barrier hole below the optical plate of the upper portion of the workpiece isolation chamber. Nitrogen is injected to block the optical material generated by the laser processing of the workpiece from being attached to the top of the workpiece isolation chamber, and then the dust is discharged by the pumping action to maintain the laser light transmittance of the optical sheet.

As shown in FIG. 1 , a preferred embodiment of the carbon-free pollution laser processing apparatus of the present invention is disclosed. Referring to FIG. 1 and FIG. 4 , the carbon-free pollution laser processing apparatus includes: a workbench 1 a workpiece isolation cavity 2 and a laser emitter 3, wherein: the workbench 1 comprises a work surface 10, and the work surface 10 is located at the top of the workbench 1 for providing the workpiece 4 to be laser processed Position it on it.

The workpiece isolation cavity 2 is an openable and closable cover that is tightly attached to the working surface 10 of the workbench 1, and can form a closed workpiece isolation chamber 20 into which the workpiece 4 is placed. The workpiece isolation cavity The size of the 2 is slightly larger than that of the workpiece only, and the height of the workpiece isolation cavity 2 is set according to the laser emitter to be used. The height of the workpiece isolation cavity 2 is preferably about 30 to 100 mm, and the workpiece isolation cavity is preferably used. 2 has an optical plate 21 at the top, and a plurality of side plates 22 are arranged around the optical plate 21 to form a cover body. The optical plate 21 is selected from the group consisting of high purity, colorless and impurity-free optics such as quartz glass, optical glass and optical acrylic. Any of the plates provides laser light penetration.

In the foregoing, as shown in FIG. 1, a vacuum suction hole 23 is disposed on the side plate 22 of the workpiece isolation cavity 2, or, as shown in FIG. 2, the table 1 is provided with a vacuum extending to the working surface 10. The air venting holes 11 and 23 communicate with the workpiece isolation chamber 20, and can be externally connected to the vacuum suction device for pumping the workpiece isolation chamber 20; and the side plate 22 of the workpiece isolation cavity 2 A nitrogen gas injection hole 24 is provided, and the nitrogen gas injection hole 24 is provided with an external nitrogen supply source. The side plate 22 of the workpiece isolation cavity 2 is provided with a plurality of spaced-apart nitrogen gas barrier holes 25 adjacent to the optical plate 21, the nitrogen gas barrier row. The hole 25 is provided with an external nitrogen supply source; the workpiece isolation chamber 2 can be provided with a gas-tight pad 26 on the bottom surface of the surrounding side plate 22, and the workpiece isolation cavity 2 is covered on the work table 1 to be intimately contacted by the airtight pad to the working surface 10 Hehe.

The laser emitter 3 is disposed directly above the workbench 1 and the workpiece isolation cavity 2. The laser emitter 3 can be a variety of laser emitters that can emit different wavelengths of laser light, such as a wavelength of 1064 nm. An IR laser emitter, a GREEN laser emitter with a wavelength of 532 nm or a UV laser emitter with a wavelength of 355 nm, etc., the laser emitter 3 can emit laser light 30 through the optical plate 21 of the workpiece isolation cavity 2 The focus is projected onto the workpiece 4 in the workpiece isolation chamber 20.

As shown in FIG. 3, a flow chart of a preferred embodiment of the carbon-free pollution laser processing method of the present invention is disclosed. Referring to FIG. 5, the carbon-free pollution laser processing method includes the following steps: processing The step of isolating the object 4 in the closed workpiece isolation chamber 20 is to place the workpiece 4 on the table 1, and then cover the workpiece isolation chamber 2 having the optical plate 21 on the outside of the workpiece 4, and the workpiece is isolated. The cavity 2 is slightly larger than the workpiece 4, so that the workpiece 4 is isolated in the sealed workpiece isolation chamber 20 formed by the workpiece isolation chamber 2 and the table 1 being tightly combined. The workpiece 4 is suitable for glass objects and softness. a circuit board, a hard circuit board, a ceramic substrate, an aluminum plate, a copper plate, etc.; a vacuuming step of pumping the inside of the workpiece isolation chamber 20 to isolate the workpiece from the inside of the workpiece 20 In a substantially anaerobic environment; the laser processing and pumping steps cause the laser emitter 3 to apply laser processing to the workpiece 4 in the workpiece isolation chamber 20 from above the workpiece isolation chamber 2, the lightning The shooting process can be cutting, scribing or drilling the workpiece 4, etc. The workpiece isolation chamber 20 is continuously subjected to suction to discharge the debris generated by the laser processing of the workpiece 4 until the processing of the workpiece 4 is completed, wherein the laser emitter 3 located above the workpiece isolation chamber 2 is disposed. The laser light 30 is emitted, and the laser light 30 penetrates the optical plate 21 at the top of the workpiece isolation cavity 2 and is then focused and projected onto the workpiece 4 for laser processing. The laser light 30 penetrates the optical plate 21 at the top of the workpiece isolation cavity 2. At the time, the focus is not focused, but the focus is projected on the workpiece 4, so that the laser light 30 penetrates the non-heat concentration point of the optical plate 21, and further, the workpiece isolation chamber 20 is substantially anaerobic, which is effective. The process 4 is prevented from being burned by laser processing to produce a blackening phenomenon to achieve the function of no carbon pollution; and the step of removing the processed object 4 is to release the pumping state of the workpiece isolation chamber 20, and the outside air is introduced into the workpiece isolation chamber. Inside the 20, the workpiece isolation chamber 2 can be opened and the workpiece 4 can be taken out.

As shown in FIG. 4 and FIG. 5, in the carbon-free pollution laser processing method, after the vacuuming step, a pair of workpiece isolation chambers 20 may further be filled with nitrogen gas, wherein the side plate of the cavity 2 can be isolated via the workpiece. The nitrogen gas injection hole 24 on the 22 is filled with nitrogen gas, so that the workpiece isolation chamber 20 reaches a substantially oxygen-free environment and has a nitrogen atmosphere environment for avoiding combustion function, and then the laser processing and pumping steps are performed to avoid the workpiece 4 being irradiated by the laser. The preferred carbon-free pollution effect of processing produces a blackening phenomenon.

In the carbon-free pollution laser processing method, when the workpiece 4 is subjected to a laser processing and pumping step in a substantially oxygen-free nitrogen atmosphere in the workpiece isolation chamber 20, the optical portion from the upper portion of the workpiece isolation chamber 20 is simultaneously The nitrogen barrier hole 25 under the plate 21 is filled with nitrogen gas to block the dust generated by the laser processing of the workpiece 4 from adhering to the optical plate 21 at the top of the workpiece isolation chamber 2, and then exhausting the dust with the pumping action to maintain The laser light transmittance of the optical sheet 21.

The above is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. Any one of ordinary skill in the art can use the present invention without departing from the technical features of the present invention. Equivalent embodiments of the local changes or modifications made by the disclosed technology are still within the scope of the technical features of the present invention.

1. . . Workbench

10. . . Working surface

11. . . Vacuum pumping hole

2. . . Workpiece isolation cavity

20. . . Workpiece isolation chamber

twenty one. . . Optical sheet

twenty two. . . Side panel

twenty three. . . Vacuum pumping hole

twenty four. . . Nitrogen gas jet

25. . . Nitrogen barrier hole

26. . . Airtight cushion

3. . . Laser transmitter

30. . . laser

4. . . Machining

BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a plan view showing a preferred embodiment of a carbon-free contamination laser processing apparatus of the present invention.

2 is a plan view showing a preferred embodiment of the carbon-free contamination laser processing apparatus of the present invention.

3 is a flow chart of a preferred embodiment of the carbon-free contamination laser processing method of the present invention.

4 is a flow chart of another preferred embodiment of the carbon-free contamination laser processing method of the present invention.

Fig. 5 is a reference view showing an implementation state of the carbon-free contamination laser processing method of the present invention.

1. . . Workbench

10. . . Working surface

2. . . Workpiece isolation cavity

20. . . Workpiece isolation chamber

twenty one. . . Optical sheet

twenty two. . . Side panel

twenty three. . . Vacuum pumping hole

twenty four. . . Nitrogen gas jet

25. . . Nitrogen barrier hole

26. . . Airtight cushion

3. . . Laser transmitter

30. . . laser

4. . . Machining

Claims (11)

A carbon-free pollution laser processing apparatus comprises: a workbench having a working surface for providing a positioning position of a workpiece; and a workpiece isolation cavity for opening and closing the cover surface of the worktable The upper surface is closed to form a closed workpiece isolation chamber into which the workpiece is placed. The workpiece isolation chamber includes an optical plate and a side plate disposed around the periphery of the optical plate. The sealed workpiece isolation chamber is connected to a vacuum suction hole. The vacuum pumping hole is provided with an external vacuum pumping device; and a laser emitter is disposed directly above the workbench and the workpiece isolation cavity, and the laser emitter can emit laser light through the workpiece isolation cavity. The sheet is refocused and projected onto the workpiece in the workpiece isolation chamber. The carbon-free pollution laser processing apparatus according to claim 1, wherein the vacuum suction hole is disposed on a side plate of the workpiece isolation cavity. The carbon-free contaminated laser processing apparatus of claim 1, wherein the vacuum suction hole is disposed on the table and extends to the working surface. The carbon-free contaminated laser processing apparatus according to any one of claims 1 to 3, wherein a nitrogen gas injection hole is provided on a side plate of the workpiece isolation cavity, and an external nitrogen supply source is used for the nitrogen gas injection hole. . The non-carbon-contaminated laser processing apparatus according to the fourth aspect of the invention, wherein the side plate of the workpiece isolation cavity is provided with a plurality of spaced-apart nitrogen gas barrier holes adjacent to the optical plate, the nitrogen barrier hole Use an external nitrogen supply. The carbon-free contamination laser processing apparatus according to any one of claims 1 to 3, wherein the optical sheet material is selected from the group consisting of quartz glass, optical glass, and optical acryl. The carbon-free contaminated laser processing apparatus according to claim 5, wherein the optical sheet is selected from the group consisting of quartz glass, optical glass, and optical acryl. The carbon-free pollution laser processing apparatus according to claim 7, wherein the workpiece isolation cavity has a height of about 30 to 100 mm. A carbon-free pollution laser processing method comprises the steps of: isolating a workpiece into a closed workpiece isolation chamber, using a workbench to provide a workpiece positioning thereon, wherein the workpiece isolation chamber is used The workpiece isolation cavity cover having an optical plate on the top is formed on a worktable; the vacuuming step is to evacuate the interior of the workpiece isolation chamber to achieve a substantially oxygen-free environment; the laser processing and pumping steps, The laser emitter emits laser light from above the workpiece isolation cavity, the laser light penetrates the optical plate on the top of the workpiece isolation cavity, and then is focused and projected onto the workpiece for laser processing, and the workpiece isolation chamber is continuously applied. Pumping out the debris generated by the laser processing until the processing of the workpiece is completed; and the step of removing the workpiece is to release the pumping state of the workpiece isolation chamber, and the outside air is introduced into the interior of the workpiece isolation chamber. The workpiece isolation cavity can be opened and the workpiece can be taken out. The non-carbon pollution laser processing method according to claim 9, wherein after the vacuuming step, the workpiece isolation chamber is filled with nitrogen gas, so that the workpiece isolation chamber reaches a substantially oxygen-free nitrogen atmosphere environment, and then Perform laser processing and pumping steps. The carbon-free pollution laser processing method according to claim 10, wherein the processing object is separated from the workpiece during the laser processing and pumping step in a substantially oxygen-free nitrogen atmosphere in the workpiece isolation chamber. The lower part of the optical plate of the upper chamber is filled with nitrogen gas, and the dust generated by the laser processing is blocked from being attached to the optical plate at the top of the workpiece isolation chamber, and then the dust is discharged by pumping.