TW201318500A - Methods of manufacturing printed circuit boards using parallel processes to interconnect with subassemblies - Google Patents

Methods of manufacturing printed circuit boards using parallel processes to interconnect with subassemblies Download PDF

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TW201318500A
TW201318500A TW100138494A TW100138494A TW201318500A TW 201318500 A TW201318500 A TW 201318500A TW 100138494 A TW100138494 A TW 100138494A TW 100138494 A TW100138494 A TW 100138494A TW 201318500 A TW201318500 A TW 201318500A
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metal layer
single metal
substrate
core
subassembly
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TW100138494A
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Chinese (zh)
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Rajesh Kumar
Monte P Dreyer
Michael J Taylor
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Ddi Global Corp
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Abstract

Methods of manufacturing printed circuit boards using parallel processes to interconnect with subassemblies are provided. In one embodiment, the invention relates to a method of manufacturing a printed circuit board including providing a core subassembly including at least one metal layer, providing a plurality of one-metal layer carriers after parallel processing each of the plurality of one-metal layer carriers, and attaching at least two of the plurality of one-metal layer carriers with each other and with the core subassembly.

Description

使用並行處理互連次組件之印刷電路板製造方法Printed circuit board manufacturing method using parallel processing interconnect sub-components 發明領域Field of invention

本發明一般係有關於印刷電路板及其製造方法,且更具體係在於有關使用並行處理互連次組件之印刷電路板製造方法。The present invention relates generally to printed circuit boards and methods of fabricating the same, and more particularly to a method of fabricating printed circuit boards using parallel processing interconnect sub-assemblies.

發明背景Background of the invention

大多數的電子系統包括具有高密度電子互連之印刷電路板。一印刷電路板(PCB)能夠包括一個或更多的電路芯材、基材或載體。在一種用於具有該一個或更多電路載體之印刷電路板的製造計畫中,電子電路(例如,墊片、電子互連等)係製造到一個別電路載體的相反兩側上,以形成一對電路層。電路板之這些電路層對接著能夠藉著製造一黏著劑(或是一預浸膠體或是一黏合聚合物),以壓按方式疊合該等電路層對以及黏著劑,固化所產生的電路板構造,鑽鑿出通孔,且接著以銅材料電鍍該等通孔,使該等電路層對互連,以實體或電子方式連接,而形成該印刷電路板。Most electronic systems include printed circuit boards with high density electronic interconnects. A printed circuit board (PCB) can include one or more circuit cores, substrates or carriers. In a manufacturing process for a printed circuit board having the one or more circuit carriers, electronic circuits (eg, pads, electronic interconnects, etc.) are fabricated on opposite sides of a separate circuit carrier to form A pair of circuit layers. The circuit layer pairs of the circuit board can then be laminated by pressing an adhesive (or a prepreg or a bonding polymer) to laminate the circuit layer pairs and the adhesive, and the resulting circuit is cured. The plate structure is formed by drilling through holes, and then the through holes are plated with a copper material, and the circuit layers are interconnected to be physically or electronically connected to form the printed circuit board.

固化程序係用以固化該黏著劑,以便提供電路板構造之永久性實體結合。然而,黏著劑在固化程序期間一般而言會顯著地收縮。此收縮加上稍後進行的通孔鑽鑿與電鍍程序會導致整體構造中產生可觀的應力,進而使電路層之間產生損壞或是不可靠的互連或結合。因此,業界對於能夠補償此收縮及能夠對於電路層對之間提供不受應力影響且可靠的電子連接之材料與相關程序具有需求。The curing process is used to cure the adhesive to provide a permanent physical bond to the board construction. However, the adhesive generally shrinks significantly during the curing process. This shrinkage, coupled with later through hole drilling and plating procedures, can result in considerable stresses in the overall construction, resulting in damage or unreliable interconnection or bonding between the circuit layers. Accordingly, there is a need in the industry for materials and related procedures that can compensate for this shrinkage and provide reliable electrical connections between pairs of circuit layers that are unaffected by stress.

此外,以銅材料進行之穿透孔或通孔電鍍需要額外、昂貴且耗時的加工程序,其無法以快速靈活之方式進行。第1圖係為用以製造一具有疊合通孔之印刷電路板的先後層壓程序,其包括昂貴且耗時之先後層壓與電鍍步驟。因此,業界對於一種能夠快速且容易製造,且/或能夠確保位於印刷電路板上之互連的對齊性,藉著降低關鍵程序的重複次數,從而降低製造時間與成本的印刷電路板及其製造方法具有需求。In addition, penetration or via plating with copper material requires an additional, expensive and time consuming process that cannot be performed in a fast and flexible manner. Figure 1 is a sequential lamination process for fabricating a printed circuit board having laminated vias that includes expensive and time consuming sequential lamination and plating steps. Thus, the industry is concerned with a printed circuit board that can be manufactured quickly and easily, and/or that can ensure the alignment of interconnects on a printed circuit board, by reducing the number of repetitions of critical processes, thereby reducing manufacturing time and cost. The method has requirements.

發明概要Summary of invention

本發明之實施例的觀點係有關且旨在於使用並行處理互連次組件的印刷電路板製造方法。本發明之一實施例提供一種印刷電路板的製造方法,該方法包括提供一至少包括一個金屬層載體之芯材總成,在並行處理多個單一金屬層載體中的各個單一金屬層載體之後提供多個單一金屬層載體,其中該等多個單一金屬層載體其中至少一者之並行處理包括使光阻劑成像到一基材之至少一部分上,該基材之該至少一部分具有形成於該基材之第一表面之至少一銅箔;蝕刻該基材具有至少一層銅箔之部分;去除至少一層光阻劑,以便暴露出該至少一層銅箔之至少一部分,藉以形成至少一銅箔襯墊;將一層壓黏著劑施加到該基材之第二表面;施加一保護薄膜到該層壓黏著劑;在該基材之第二表面中形成至少一個微通孔,以便暴露出該至少一個銅箔襯墊;將傳導漿充填到該至少一個微通孔中;以及去除該保護薄膜,以便露出位於基材上用以黏附的層壓黏著劑,以及將該等多個單一金屬層載體其中至少二者彼此黏附,且與該芯材次總成黏附。The views of embodiments of the present invention are related to and intended to use a printed circuit board manufacturing method that interconnects interconnected sub-assemblies. An embodiment of the present invention provides a method of fabricating a printed circuit board, the method comprising: providing a core material assembly including at least one metal layer carrier, after providing for processing each of the plurality of single metal layer carriers in parallel a plurality of single metal layer supports, wherein parallel processing of at least one of the plurality of single metal layer supports comprises imaging a photoresist onto at least a portion of a substrate, the at least a portion of the substrate having a base formed thereon At least one copper foil on the first surface of the material; etching the substrate to have at least one portion of the copper foil; removing at least one layer of photoresist to expose at least a portion of the at least one copper foil to form at least one copper foil liner Applying a laminating adhesive to the second surface of the substrate; applying a protective film to the laminating adhesive; forming at least one microvia in the second surface of the substrate to expose the at least one copper a foil liner; filling a conductive paste into the at least one microvia; and removing the protective film to expose a laminate adhesion on the substrate for adhesion , And the other a plurality of single carrier wherein the at least two metal layers adhere to each other, and secondary adhesion with the core assembly.

本發明之另一實施例提供一種印刷電路板的製造方法,該方法包括提供一至少包括一個金屬層載體之芯材總成,在並行處理多個單一金屬層載體中的各個單一金屬層載體之後提供多個單一金屬層載體,其中該等多個單一金屬層載體其中至少一者之並行處理包括使光阻劑成像到一基材之至少一部分上,該基材之該至少一部分具有形成輿該基材之第一表面上之至少一銅箔;蝕刻該基材具有至少一層銅箔之部分;去除至少一層光阻劑,以便暴露出該至少一層銅箔之至少一部分,藉以形成至少一銅箔襯墊;將一層壓黏著劑施加到該基材之第二表面;施加一保護薄膜到該層壓黏著劑;在該基材之第二表面中形成至少一個微通孔,以便暴露出該至少一個銅箔襯墊;將傳導漿充填到該至少一個微通孔中;以及去除該保護薄膜,以便露出位於基材上用以黏附的層壓黏著劑,將該等多個單一金屬層載體其中至少二者彼此黏附,且與該芯材總成之第一表面黏附;以及將該等多個單一金屬層載體其中至少二者彼此黏附,且與該芯材次總成黏附。Another embodiment of the present invention provides a method of fabricating a printed circuit board, the method comprising: providing a core material assembly including at least one metal layer carrier, after processing each of the plurality of single metal layer carriers in parallel Providing a plurality of single metal layer supports, wherein parallel processing of at least one of the plurality of single metal layer supports comprises imaging the photoresist onto at least a portion of a substrate, the at least a portion of the substrate having a formation At least one copper foil on the first surface of the substrate; etching the substrate to have at least one portion of the copper foil; removing at least one layer of photoresist to expose at least a portion of the at least one copper foil, thereby forming at least one copper foil a pad; applying a laminating adhesive to the second surface of the substrate; applying a protective film to the laminating adhesive; forming at least one microvia in the second surface of the substrate to expose the at least a copper foil liner; filling a conductive paste into the at least one microvia; and removing the protective film to expose a laminate on the substrate for adhesion And adhering at least two of the plurality of single metal layer carriers to each other and adhering to the first surface of the core material assembly; and adhering at least two of the plurality of single metal layer carriers to each other, and Adhered to the core sub-assembly.

本發明之又一實施例提供一種製造印刷電路板之方法,該方法包括提供一至少包括一個金屬層載體之芯材總成,在並行處理多個單一金屬層載體中的各個單一金屬層載體之後,將該等多個單一金屬層載體彼此黏附,以便形成一第一次總成,其中該等多個單一金屬層載體其中至少一者之並行處理包括使光阻劑成像到一基材之至少一部分上,該基材於該至少一部分具有形成於該基材之第一表面上之至少一銅箔;蝕刻該基材具有至少一層銅箔之部分;去除至少一層光阻劑,以便暴露出該至少一層銅箔之至少一部分,藉以形成至少一銅箔襯墊;將一層壓黏著劑施加到該基材之第二表面;施加一保護薄膜到該層壓黏著劑;在該基材之第二表面中形成至少一個微通孔,以便暴露出該至少一個銅箔襯墊;將傳導漿充填到該至少一個微通孔中;以及去除該保護薄膜,以便露出位於基材上用以黏附的層壓黏著劑,在並行處理多個單一金屬層載體其中各個單一金屬層載體之後,將該等多個單一金屬層載體彼此黏附,以形成一第二次總成,將該第一總成黏附到該芯材次總成之一第一表面,並且將該第二次總成黏附到該芯材次總成之第二表面。Yet another embodiment of the present invention provides a method of fabricating a printed circuit board, the method comprising providing a core material assembly including at least one metal layer carrier, after processing each of the plurality of single metal layer carriers in parallel And adhering the plurality of single metal layer carriers to each other to form a first subassembly, wherein parallel processing of at least one of the plurality of single metal layer carriers comprises imaging the photoresist to at least one substrate In one part, the substrate has at least one copper foil formed on the first surface of the substrate in the at least one portion; etching the substrate to have at least one portion of the copper foil; removing at least one layer of photoresist to expose the portion At least a portion of at least one layer of copper foil to form at least one copper foil liner; a laminating adhesive applied to the second surface of the substrate; a protective film applied to the laminating adhesive; and a second in the substrate Forming at least one microvia in the surface to expose the at least one copper foil liner; filling the conductive paste into the at least one microvia; and removing the protective film In order to expose the laminating adhesive on the substrate for adhesion, after processing the plurality of single metal layer carriers in each of the single metal layer carriers in parallel, the plurality of single metal layer carriers are adhered to each other to form a second time. The assembly, the first assembly is adhered to one of the first surfaces of the core sub-assembly, and the second sub-assembly is adhered to the second surface of the core sub-assembly.

圖式簡單說明Simple illustration

第1圖係為用以製造一具有層壓通孔之印刷電路板的一種順序層壓程序之流程圖,其包括順序層壓及電鍍步驟。Figure 1 is a flow diagram of a sequential lamination process for fabricating a printed circuit board having laminated vias including sequential lamination and plating steps.

第2圖係為根據本發明之一實施例的用以製造一具有層壓通孔之印刷電路板的一種順序層壓程序之流程圖,其包括一單獨層壓程序。2 is a flow diagram of a sequential lamination process for fabricating a printed circuit board having laminated vias, including a separate lamination process, in accordance with an embodiment of the present invention.

第3a~3g圖顯示根據本發明之一實施例的用以製造一單一金屬層基材的程序,該基材係用於具有堆疊(或交錯)微通孔的一單獨層壓循環或是處理程序中。Figures 3a-3g show a procedure for fabricating a single metal layer substrate for a separate lamination cycle or treatment with stacked (or staggered) microvias in accordance with an embodiment of the present invention. In the program.

第4a圖係為根據本發明之一實施例的一混合印刷電路板之一橫剖面分解圖,其包含四個第3a~3g圖之經蝕刻的單一金屬層基材以及兩個未經蝕刻的單一金屬層基材夾住一芯材次總成。4a is a cross-sectional exploded view of a hybrid printed circuit board including four etched single metal layer substrates of the 3a-3g pattern and two unetched layers, in accordance with an embodiment of the present invention. A single metal layer substrate sandwiches a core sub-assembly.

第4b圖係為根據本發明之一實施例的一混合印刷電路板之一橫剖面分解圖,其包含六個第3g圖中所示之經蝕刻單一金屬層基材夾住一芯材次總成。Figure 4b is a cross-sectional exploded view of a hybrid printed circuit board in accordance with an embodiment of the present invention, comprising six etched single metal layer substrates shown in Figure 3g, sandwiching a core material to make.

第4c圖係為根據本發明之一實施例的一混合印刷電路板之一橫剖面分解圖,其包含六個第3g圖中所示之採用預壓形式之單一金屬層基材夾住一芯材次總成。Figure 4c is a cross-sectional exploded view of a hybrid printed circuit board in accordance with an embodiment of the present invention, comprising a single metal layer substrate in the form of a pre-compression shown in Figures 3g, sandwiching a core Material sub-assembly.

第5圖係為第4b或4c圖之經完成的混合印刷電路板之一橫剖面圖。Figure 5 is a cross-sectional view of one of the completed hybrid printed circuit boards of Figure 4b or 4c.

第6圖係為根據本發明之一實施例的一混合印刷電路板之一橫剖面圖,其包括一外部混成層夾住兩個位於一個四層金屬層芯材次總成兩側上的單一金屬層基材。Figure 6 is a cross-sectional view of a hybrid printed circuit board including an external hybrid layer sandwiching two single sides on a side of a four-layer metal core sub-assembly, in accordance with an embodiment of the present invention. Metal layer substrate.

第7圖係為根據本發明之一實施例的一混合印刷電路板之一橫剖面圖,其包括一混成層黏附到兩個夾著一個四層金屬層芯材次總成之單一金屬層基材其中一者。Figure 7 is a cross-sectional view of a hybrid printed circuit board according to an embodiment of the present invention, comprising a hybrid layer adhered to two single metal layer bases sandwiching a four-layer metal core assembly One of the materials.

第8圖係為根據本發明之一實施例的一混合印刷電路板之一橫剖面圖,其包括六個第3g圖所示之該單一金屬層基材夾著一包括一主動裝置之芯材次總成。8 is a cross-sectional view of a hybrid printed circuit board including six core metal substrates shown in FIG. 3g sandwiching a core material including an active device, in accordance with an embodiment of the present invention. Sub-assembly.

第9圖係為根據本發明之一實施例的一混合印刷電路板之一橫剖面圖,其包括六個第3g圖所示之該單一金屬層基材夾著一包括一主動裝置之芯材次總成。Figure 9 is a cross-sectional view of a hybrid printed circuit board according to an embodiment of the present invention, comprising six single metal layer substrates shown in Figure 3g sandwiching a core material including an active device Sub-assembly.

第10圖係為根據本發明之一實施例的一混合印刷電路板之一橫剖面圖,其包括使該總成之撓性部分與堅硬區段分離之切除區域。Figure 10 is a cross-sectional view of a hybrid printed circuit board including a cut-away region separating the flexible portion of the assembly from the rigid portion, in accordance with an embodiment of the present invention.

較佳實施例之詳細說明Detailed description of the preferred embodiment

在以下的詳細說明中,將藉由圖式顯示且描述本發明之實施例。如同熟諳此技藝之人士所能得到的體認,所描述之示範性實施例能夠以各種不同方式進行修改,而不會脫離本發明之精神與範疇。因此,該等圖式與說明本質上係作為顯示用,而非作為本發明之限制。實施例中具有圖式中有顯示或未顯示之部件,於本說明書中並未加以討論,因為該等部件對於全面理解本發明而言並非必要。相同的參考數字代表相同的元件。In the following detailed description, embodiments of the invention are shown and described. The exemplified embodiments can be modified in various different ways without departing from the spirit and scope of the invention. Therefore, the drawings and description are to be regarded as illustrative rather than limiting. The presence or absence of a component in the figures, which is shown or not shown in the drawings, is not discussed in this specification as such components are not essential to a comprehensive understanding of the invention. The same reference numbers represent the same elements.

第2圖係為根據本發明之一實施例的一種用以製造具有堆疊通孔之一印刷電路板的程序之一流程圖,該程序包括一單次層壓程序。與第1圖之先前技術程序相較,第2圖之該單次層壓程序實質上包括較少的處理步驟。更具體而言,第2圖之該單次層壓程序消除了一些用以製造多層印刷電路板所需的順序層壓程序之層壓與電鍍處理步驟。用以製造電路板之單次層壓程序的觀點係進一步描述於美國專利第7,523,545號以及美國臨時專利申請案第61/189171號中,各個案件之完整內容係以參考方式併入本文之中。2 is a flow diagram of a procedure for fabricating a printed circuit board having one of stacked vias in accordance with an embodiment of the present invention, the program including a single lamination process. The single lamination procedure of Figure 2 essentially involves fewer processing steps than the prior art procedure of Figure 1. More specifically, the single lamination process of Figure 2 eliminates the lamination and plating process steps of the sequential lamination process required to fabricate a multilayer printed circuit board. </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt;

在第2圖中所示之流程圖中,該程序實施了一些有關於印刷電路板的處理步驟。在其他實施例中,能夠使用其他適用的印刷電路板技術,以取代圖式中所示者,包括傳統的印刷電路板製造技術。在某些實施例中,該程序並未實行所有的描述作業。在其他實施例中,該程序則實行了額外的作業。在一實施例中,該程序以不同於顯示之順序實行該等作業。在某些實施例中,該程序則同步地實行某些作業。在一實施例中,該程序直接從”積層與層壓”進行到”最終成品”。在一實施例中,”顯影、電鍍、剝除、蝕刻、剝除”係以”顯影、蝕刻、剝除”加以取代。In the flow chart shown in Figure 2, the program implements some processing steps relating to the printed circuit board. In other embodiments, other suitable printed circuit board technologies can be used in place of those shown in the drawings, including conventional printed circuit board fabrication techniques. In some embodiments, the program does not perform all of the described homework. In other embodiments, the program performs additional work. In an embodiment, the program performs the jobs in an order different from the display. In some embodiments, the program performs certain jobs simultaneously. In one embodiment, the program proceeds directly from "stacking and lamination" to "final finished product." In one embodiment, "developing, plating, stripping, etching, stripping" is replaced by "developing, etching, stripping".

第3a~3g圖顯示根據本發明之一實施例的用以製造一單一金屬層基材的程序,該基材係用於具有堆疊(或交錯)微通孔的一單獨層壓循環或是處理程序中。Figures 3a-3g show a procedure for fabricating a single metal layer substrate for a separate lamination cycle or treatment with stacked (or staggered) microvias in accordance with an embodiment of the present invention. In the program.

如第3a圖中所示,製備出一種雙面基材或是載體10。基材10包括一銅箔10a,其形成在該基材之相反側或表面上、以及一芯材10b,其係由金屬、陶瓷或絕緣材料(例如FR4、液晶聚合物(LCP)、熱黏著劑(Thermount)、雙亞醯胺-三氮雜苯(BT)、GPY,諸如鐵氟龍、熱傳導碳(stablecor)、不含鹵素之絕緣材料等)所製成,其中GPY係為一不屬於FR4種類之疊層,諸如聚醯胺、諸如Kapton聚醯胺薄膜、氮丙啶硬化環氧物、雙亞醯胺(bismalimide)、以及其他電級疊層。然而,本發明並非限定於如此。例如,在本發明之一實施例中係使用一單層芯材或基材,一銅箔(例如一單層薄膜)僅形成於該基材之一側上。在其他實施例中,則能夠使用其他適合的基材與傳導層材料。As shown in Figure 3a, a double-sided substrate or carrier 10 is prepared. The substrate 10 includes a copper foil 10a formed on the opposite side or surface of the substrate, and a core material 10b made of metal, ceramic or insulating material (for example, FR4, liquid crystal polymer (LCP), heat bonding. (Thermount), diiminamide-triazabenzene (BT), GPY, such as Teflon, heat conducting carbon (stablecor), halogen-free insulating materials, etc., of which GPY is a non- A laminate of the FR4 type, such as polyamine, a film such as Kapton polyamine, aziridine hardened epoxy, bismalimide, and other electrical grade laminates. However, the invention is not limited to this. For example, in one embodiment of the invention, a single layer of core material or substrate is used, and a copper foil (e.g., a single layer film) is formed only on one side of the substrate. In other embodiments, other suitable substrate and conductive layer materials can be used.

在第3a圖所顯示之實施例中,該基材具有之厚度範圍從3到4 mil(米爾,千分之一英吋)(或是約3到4 mil)。然而,在其他實施例中,該基材與其他組件能夠具有其他的適當尺寸。In the embodiment shown in Figure 3a, the substrate has a thickness ranging from 3 to 4 mils (mil, one thousandth of an inch) (or about 3 to 4 mils). However, in other embodiments, the substrate and other components can have other suitable dimensions.

在第3b圖中,兩層光阻劑20係成像到該基材10上。在本文中,所顯示之該兩層光阻劑係以雷射直接成像(或是列印)到該基材10之一側(亦即底側)上。然而,本發明並非限定於如此。例如,該兩層光阻劑能夠使用任何適當的印刷方式進行成像,諸如光學、絲網、偏移、噴墨以及類似方法。在一實施例中,能夠使多於或少於兩層之光阻劑成像到該基材上。In Figure 3b, two layers of photoresist 20 are imaged onto the substrate 10. Herein, the two-layer photoresist is shown directly imaged (or printed) by laser onto one side (ie, the bottom side) of the substrate 10. However, the invention is not limited to this. For example, the two layer photoresist can be imaged using any suitable printing method, such as optical, screen, offset, ink jet, and the like. In one embodiment, more or less than two layers of photoresist can be imaged onto the substrate.

在第3c圖中,除了銅箔10a藉由該兩層光阻劑20加以覆蓋的部份以外之該銅箔10a係從基材蝕刻去除,接著係剝除該覆蓋部分,以便露出對應的銅箔襯墊11。然而,本發明並非限定於如此。例如,在本發明之另一實施例中,一個或更多的單一金屬層載體(例如一個或更多的單側電路)係藉由製備一金屬板(例如一不鏽鋼板)而形成。In the 3c figure, the copper foil 10a is etched away from the substrate except for the portion of the copper foil 10a covered by the two layers of photoresist 20, and then the covered portion is stripped to expose the corresponding copper. Foil liner 11. However, the invention is not limited to this. For example, in another embodiment of the invention, one or more single metal layer carriers (e.g., one or more single side circuits) are formed by making a metal sheet, such as a stainless steel sheet.

在有關使用該金屬板之程序的更多細節方面,一銅薄鍍層係以銅快速電鍍方式薄電鍍到該金屬板之一側或更多側上。一層或更多層光阻劑係施加到該金屬板之一個或更多的薄鍍表面上。該等光阻劑接著係進行成像(例如負片成像),以便發展出一個或更多腔室。接著將銅電鍍到該等腔室中。接著剝除光阻劑,以便形成一個或更多用於一個或更多電路層的銅箔襯墊。此外,一個或更多的預浸膠體係施加到該等銅箔襯墊上,以便層壓該等預浸膠體以及金屬板。接著使該等預浸膠體硬化。該等預浸膠體從而與金屬層進行層壓及硬化,其間填有銅箔襯墊以及銅薄鍍層。該等銅箔襯墊與銅薄鍍層以及硬化的預浸膠體接著係由該金屬板剝除。接著係蝕刻去除該銅薄鍍層,以便露出位於該經過硬化之預浸膠體上的銅箔襯墊。In more detail regarding the procedure for using the metal sheet, a thin copper plating is thinly plated onto one or more sides of the metal sheet by copper rapid plating. One or more layers of photoresist are applied to one or more of the thin plated surfaces of the metal sheet. The photoresist is then imaged (e.g., negative imaged) to develop one or more chambers. Copper is then electroplated into the chambers. The photoresist is then stripped to form one or more copper foil pads for one or more circuit layers. In addition, one or more prepreg systems are applied to the copper foil liners to laminate the prepregs and the metal sheets. The prepregs are then hardened. The prepregs are thus laminated and hardened with the metal layer with a copper foil liner and a thin copper coating. The copper foil liner is then stripped from the copper thin layer and the hardened prepreg from the metal sheet. The copper thin coating is then etched away to expose the copper foil liner on the hardened prepreg.

以上所述包括該等銅箔襯墊之電路層(例如襯墊11或者是包括銅襯墊之電路層)一旦形成,第3d圖中所示之一保護薄膜(或是麥勒(Mylar)片)40係以層壓黏著劑(或是預浸膠體或未硬化預浸膠體)30填入該Mylar片40與芯材10b之間的方式附裝到該基材10(或是經過硬化之預浸膠體)的芯材10b。在第3d圖中,所顯示之該保護層或是Mylar片40係附裝到該基材具有兩個銅箔襯墊11側的另一側。然而,本發明並非限定於僅使用Mylar片之此案例,且其能夠由任何其他適當材料所製成,諸如聚酯、定向聚丙烯、聚氟乙烯、聚乙烯、高密度聚乙烯、聚2,6萘二甲酸乙二酯、pacothane、聚甲基戊烯或是其組合。The circuit layer including the copper foil pad described above (for example, the pad 11 or the circuit layer including the copper pad) is formed, and one of the protective films (or Mylar) shown in FIG. 3d is formed. 40 is attached to the substrate 10 by laminating the adhesive between the Mylar sheet 40 and the core material 10b (or a prepreg or an uncured prepreg) 30 (or a hardened pre-process) The core material 10b of the dip). In Fig. 3d, the protective layer or Mylar sheet 40 is attached to the other side of the substrate having two sides of the copper foil liner 11. However, the present invention is not limited to this case using only Mylar sheets, and it can be made of any other suitable material such as polyester, oriented polypropylene, polyvinyl fluoride, polyethylene, high density polyethylene, poly 2, 6 naphthalate, pacothane, polymethylpentene or a combination thereof.

在第3e圖中,通孔或微通孔50係形成在基材10(或是硬化預浸膠體)中。各個微通孔50係藉由雷射鑽孔(且/或機械鑽孔)在基材10(或是硬化預浸膠體)中鑽出一直徑範圍從4到10 mil(或是約4到10 mil)的孔所形成。在其他實施例中,能夠使用具有其他適當直徑之微通孔。在另一實施例中,該等通孔或微通孔能夠使用一光可成像介電程序、電漿程序、壓印程序,或是其他適當的通孔產生程序所產生。In Figure 3e, a via or microvia 50 is formed in the substrate 10 (or hardened prepreg). Each microvia 50 is drilled in the substrate 10 (or hardened prepreg) by a laser drilling (and/or mechanical drilling) to a diameter ranging from 4 to 10 mils (or about 4 to 10). The hole of mil) is formed. In other embodiments, microvias having other suitable diameters can be used. In another embodiment, the vias or microvias can be created using a photoimageable dielectric program, a plasma program, an imprint program, or other suitable via generation program.

在第3f圖中,一傳導漿(或墨水)60係填入各個形成於基材10(或硬化預浸膠體)中的微通孔50,且在第3g圖中,接著係剝除該Mylar片40,以形成一單一金屬層載體70,作為積層與層壓之用。In Fig. 3f, a conductive paste (or ink) 60 is filled into each of the microvias 50 formed in the substrate 10 (or hardened prepreg), and in the 3g diagram, the Mylar is subsequently stripped. Sheet 40 is formed to form a single metal layer carrier 70 for lamination and lamination.

在其他實施例中,該金屬層載體能夠包括額外的層或是組件。在一實施例中,例如該金屬層載體能夠包括使用特殊層或層壓加以實行之一埋入式電阻或是一埋入式電容。金屬層載體亦能夠包括表面處理,其包括但非限定於有機金屬、浸金、浸銀、浸錫、且/或在黏附之前施加外層銅。這些表面處理能夠改良電子與熱傳導性。In other embodiments, the metal layer carrier can include additional layers or components. In one embodiment, for example, the metal layer carrier can include a buried or a buried capacitor using a special layer or laminate. The metal layer carrier can also include a surface treatment including, but not limited to, organometallic, immersion gold, immersion silver, immersion tin, and/or application of outer layer copper prior to adhesion. These surface treatments can improve electron and thermal conductivity.

該等金屬層載體能夠使用各種不同的層壓機器進行層壓,包括但非限定於一切板層壓機、一層壓壓印機、一熱滾軋層壓機、一真空層壓機、一快速層壓壓印機,或者是其他適當的層壓機器。The metal layer supports can be laminated using a variety of different laminating machines including, but not limited to, all laminating presses, a laminating press, a hot rolling laminator, a vacuum laminator, a fast Laminating embossing machine, or other suitable laminating machine.

第4a圖係為根據本發明之一實施例的一混合印刷電路板100-1之一橫剖面分解圖,該印刷電路板包括第3a~3g圖中所示之四個單一金屬層基材70-1以及兩個未蝕刻單一金屬層基材70-2夾住一芯材次組件102。外部之單一金屬層基材或是未蝕刻基材70-2在其外表面上具有一未蝕刻銅層。Figure 4a is a cross-sectional exploded view of a hybrid printed circuit board 100-1 in accordance with an embodiment of the present invention, the printed circuit board including four single metal layer substrates 70 shown in Figures 3a-3g -1 and two unetched single metal layer substrates 70-2 sandwich a core subassembly 102. The outer single metal layer substrate or the unetched substrate 70-2 has an unetched copper layer on its outer surface.

芯材次組件102具有使用一層壓程序所形成之四個金屬層以及兩個電鍍或是充填穿透通孔104。在其他實施例中,芯材次組件102包括多於或少於兩個通孔,其包括穿透通孔且/或微通孔。該單一金屬層基材或載體(70-1,70-2)各包括多個微通孔150,其係以傳導漿加以充填,使每個組件形成兩個堆疊通孔。欲組合該混合印刷電路板100,能夠使該等單一金屬層基材(70-1,70-2)在芯材次組件102上方與下方對齊,並使用一個或更多的黏著層將其一併擠壓,以便夾住該次組件102。The core subassembly 102 has four metal layers formed using a lamination process and two plated or filled through vias 104. In other embodiments, the core sub-assembly 102 includes more or less than two through holes including through holes and/or micro vias. The single metal layer substrate or carrier (70-1, 70-2) each includes a plurality of microvias 150 that are filled with a conductive paste such that each component forms two stacked vias. To combine the hybrid printed circuit board 100, the single metal layer substrates (70-1, 70-2) can be aligned above and below the core material subassembly 102 and one or more adhesive layers can be used. And squeezing to clamp the secondary assembly 102.

在第4a圖中所示的實施例中,該芯材次組件具有四個金屬層載體。在其他實施例中,該芯材次組件能夠具有多於或少於四個金屬層載體。在此一案例中,該芯材次組件係使用一有關於僅利用單次層壓之程序進行組裝。在其他此等實施例中,該芯材次組件係使用一有關於無層壓(例如該芯材次組件不具通孔)程序進行組裝。在某些實施例中,該芯材次組件之諸層係在將該等單一金屬層載體層壓在一起之時進行層壓,以形成該PCB。在其他實施例中,該芯材次組件之諸層係在將該等單一金屬層載體層壓在一起之前進行層壓。In the embodiment shown in Figure 4a, the core subassembly has four metal layer carriers. In other embodiments, the core subassembly can have more or less than four metal layer carriers. In this case, the core subassembly is assembled using a procedure that utilizes only a single lamination. In other such embodiments, the core subassembly is assembled using a procedure for no lamination (e.g., the core subassembly has no through holes). In some embodiments, the layers of the core subassembly are laminated while the single metal layer carriers are laminated together to form the PCB. In other embodiments, the layers of the core subassembly are laminated prior to laminating the single metal layer carriers together.

在第4a圖中所示之實施例中,三個單一金屬層載體係配置在該芯材次組件上方,且三個單一金屬層載體係配置於其下方。在其他實施例中,該芯材次組件上方能夠配置多於或少於三個單一金屬層載體。同樣地,在其他實施例中,該芯材次組件下方能夠配置多於或少於三個單一金屬層載體。在一實施例中,一個或更多的芯材次組件係以一具有傳導漿微通孔之單一金屬層基材加以取代。在第4a圖中所示之實施例中,該混合PCB包括兩個堆疊通孔。在其他實施例中,該混合PCB能夠具有多於或少於兩個堆疊通孔。In the embodiment shown in Figure 4a, three single metal layer carriers are disposed over the core subassembly and three single metal layer carriers are disposed thereunder. In other embodiments, more or less than three single metal layer carriers can be disposed over the core subassembly. Likewise, in other embodiments, more or less than three single metal layer carriers can be disposed beneath the core subassembly. In one embodiment, one or more of the core sub-assemblies are replaced by a single metal layer substrate having conductive microvias. In the embodiment shown in Figure 4a, the hybrid PCB includes two stacked vias. In other embodiments, the hybrid PCB can have more or less than two stacked vias.

第4b圖係為根據本發明之一實施例的一混合印刷電路板的一橫剖面分解圖,其包括六個第3g圖中所示之經蝕刻單一金屬層基材夾住芯材次組件。除了外側單一金屬層載體係根據第3a~3g圖中所述之程序進行蝕刻,而非如第4a圖之未蝕刻以外,第4b圖大致上與第4a圖類似。在其他觀點中,第4b圖能夠以如同第4a圖中所示般實行。在第4b圖中,一疊微通孔151係與下方的穿透通孔104對齊,而其他的微通孔150則偏移該等穿透通孔104。Figure 4b is a cross-sectional exploded view of a hybrid printed circuit board including six etched single metal layer substrates shown in Figure 3g sandwiching the core subassembly. 4b is substantially similar to Figure 4a except that the outer single metal layer carrier is etched according to the procedure described in Figures 3a-3g, rather than being etched as in Figure 4a. Among other points of view, Figure 4b can be implemented as shown in Figure 4a. In Fig. 4b, a stack of microvias 151 are aligned with the underlying through vias 104, while other microvias 150 are offset from the through vias 104.

第4c圖係為根據本發明之一實施例的一混合印刷電路板100-3之一橫剖面分解圖,其包括六個如第3g圖所示處於擠壓前形式之單一金屬層基材70-1夾住一芯材次組件。該擠壓前形式包括一上方總成80-1,其包括該等六個單一金屬層基材70-1其中三者、以及一下方總成80-2,其包括該等六個單一金屬層基材70-1其中另外三者。除了第4b圖之該等單一金屬層基材初始處於一擠壓狀態以外,第4c圖之實施例係與第4b圖者類似。在其他觀點中,第4c圖能夠以如同第4b圖中所示般實行。Figure 4c is a cross-sectional exploded view of a hybrid printed circuit board 100-3 in accordance with an embodiment of the present invention comprising six single metal layer substrates 70 in a pre-extrusion form as shown in Figure 3g. -1 clamps a core material subassembly. The pre-extrusion form includes an upper assembly 80-1 comprising three of the six single metal layer substrates 70-1 and a lower assembly 80-2 including the six single metal layers The other three of the substrates 70-1. The embodiment of Figure 4c is similar to that of Figure 4b except that the single metal layer substrate of Figure 4b is initially in a squeezed state. Among other points of view, Figure 4c can be implemented as shown in Figure 4b.

第5圖係為根據第4b或4c圖之該等實施例的一完成混合印刷電路板100-4之一橫剖面圖。在許多實施例中,除了外部層包括未蝕刻銅以外,第4a圖中之一完成的混合印刷電路板外觀類似於第5圖。Figure 5 is a cross-sectional view of a completed hybrid printed circuit board 100-4 in accordance with the embodiments of Figure 4b or 4c. In many embodiments, the hybrid printed circuit board completed in one of Figures 4a is similar in appearance to Figure 5 except that the outer layer comprises unetched copper.

第6圖係為根據本發明之一實施例的一混合PCB 200之橫剖面圖,其包括一組合層270-2夾住兩個位於一個四層金屬層芯材次組件202之兩側上的單一金屬層基材270-1。在許多實施例中,該混合PCB 200包含順序層壓板製造程序以及單次層壓板製造程序之優點。例如,該混合PCB 200能夠提供大致上或確實平坦的外部表面。在某些實施例中,該等大致上或確實平坦之表面係為業界高度期望者。此外,混合PCB 200之製造程序能夠藉由去除許多不同的層壓與電鍍步驟而改良製造時間與成本。Figure 6 is a cross-sectional view of a hybrid PCB 200 in accordance with an embodiment of the present invention including a composite layer 270-2 sandwiching two of the two sides of a four-layer metal core sub-assembly 202. Single metal layer substrate 270-1. In many embodiments, the hybrid PCB 200 includes the advantages of a sequential laminate fabrication process as well as a single laminate fabrication process. For example, the hybrid PCB 200 can provide an outer surface that is substantially or indeed flat. In some embodiments, the substantially or indeed flat surfaces are highly desirable in the industry. In addition, the manufacturing process of the hybrid PCB 200 can improve manufacturing time and cost by removing many different lamination and plating steps.

該四個單一金屬層基材270-1包括多個堆疊微通孔250,且能夠使用上述任何程序加以形成。該四個金屬層芯材次組件202包括多個穿透通孔204,且能夠使用上述之順序層壓程序加以形成。在某些實施例中,該等穿透通孔係以銅或是傳導漿加以充填的微通孔進行取代。該兩個組合層270-2包括多個經電鍍或經充填之微通孔(例如,穿透通孔)284,且能夠以第1圖中所示之用以製造PCB的程序加以形成。The four single metal layer substrates 270-1 include a plurality of stacked microvias 250 and can be formed using any of the procedures described above. The four metal layer core sub-assemblies 202 include a plurality of through vias 204 and can be formed using the sequential lamination procedure described above. In some embodiments, the through vias are replaced by microvias filled with copper or a conductive paste. The two combined layers 270-2 include a plurality of plated or filled microvias (e.g., through vias) 284 and can be formed using the procedure for fabricating the PCB shown in FIG.

在第6圖中所示之實施例中,該PCB包括兩個單一金屬層基材位於該芯材次組件的上方與下方。在其他實施例中,該PCB能夠包括兩個以上的單一金屬層基材。在第6圖中所示的實施例中,一組合層270-2係配置於該等單一金屬層基材上方,且一組合層270-2係配置於該等單一金屬層基材下方。在其他實施例中,能夠將一個以上的組合層配置在該等單一金屬層基材上方,並將一個以上的組合層配置在該等單一金屬層基材下方。在一實施例中,一個或更多的組合層係以該等單一金屬層基材其中另一層加以取代,或者是一併去除。In the embodiment shown in Figure 6, the PCB includes two single metal layer substrates above and below the core subassembly. In other embodiments, the PCB can include more than two single metal layer substrates. In the embodiment shown in FIG. 6, a combined layer 270-2 is disposed over the single metal layer substrates, and a combined layer 270-2 is disposed under the single metal layer substrates. In other embodiments, more than one combined layer can be disposed over the single metal layer substrates, and more than one combined layer can be disposed beneath the single metal layer substrates. In one embodiment, one or more of the combined layers are replaced with one of the other single metal layer substrates, or are removed together.

在第6圖中所示之實施例中,一個四金屬層芯材次組件202係配置在混合PCB 200之中央。在其他實施例中,該芯材次組件能夠包括多於或少於四層。在第6圖中所示之該實施例中,該四金屬層芯材次組件包括兩個電鍍或充填之穿透通孔204。在其他實施例中,該芯材次組件能夠包括多於或少於兩個通孔。在一此實施例中,該芯材次組件能夠不具任何通孔。在第6圖中所示之該實施例中,該混合PCB包括兩個堆疊通孔。在其他實施例中,該混合PCB能夠包括多於或少於兩個堆疊通孔。In the embodiment shown in FIG. 6, a four metal core sub-assembly 202 is disposed in the center of the hybrid PCB 200. In other embodiments, the core sub-assembly can include more or less than four layers. In the embodiment shown in FIG. 6, the four metal core component subassembly includes two plated or filled through vias 204. In other embodiments, the core subassembly can include more or less than two through holes. In one such embodiment, the core subassembly can have no through holes. In the embodiment shown in Figure 6, the hybrid PCB includes two stacked vias. In other embodiments, the hybrid PCB can include more or less than two stacked vias.

在第5與6圖中,芯材次組件102與202各自包括兩個穿透通孔(104,204),其係與單一金屬層基材(70-1,270-1)之堆疊通孔150偏移。在其他實施例中,芯材次總成102及202能夠包括一個或更多的微通孔。在某些實施例中,該等微通孔係以傳導漿墨水或銅加以充填。在此一實施例中,該傳導性墨水微通孔具有一梯形橫剖面,其中微通孔之一較寬開口係最接近該芯材次組件之一中心線(參看例如第5圖中之微通孔150的方向)。在某些實施例中,次組件102及202之穿透通孔並未與該單一金屬層基材的堆疊通孔偏移。In Figures 5 and 6, the core sub-assemblies 102 and 202 each include two through vias (104, 204) that are offset from the stacked vias 150 of the single metal layer substrate (70-1, 270-1). In other embodiments, the core sub-assemblies 102 and 202 can include one or more micro-through holes. In some embodiments, the microvias are filled with conductive paste ink or copper. In this embodiment, the conductive ink microvia has a trapezoidal cross section, wherein one of the microvias has a wider opening closest to a centerline of the core subassembly (see, for example, the micrograph in FIG. 5) The direction of the through hole 150). In some embodiments, the through vias of the sub-assemblies 102 and 202 are not offset from the stacked vias of the single metal layer substrate.

第7圖係為根據本發明之一實施例的一混合PCB 300之一橫剖面圖,其包括一組合層270-2,該組合層黏附到該等四個單一金屬層基材其中夾住一個四金屬層芯材次組件202的二者。該混合PCB 300包括組合層270-2,其在芯材次組件202之一側上夾住兩個單一金屬層基材270-1。該混合PCB 300進一步包括兩個單一金屬層基材270-1,其在芯材次組件202之另一側上夾住該四金屬層芯材次組件202。除了去除外部組合層以外,第7圖中所示之實施例係與第6圖的實施例類似。在其他實施例中,該上方單一金屬層載體270-1其中一者或二者亦能夠加以去除。在許多實施例中,第7圖之混合PCB的構造能夠以類似於上述用於第6圖之該混合PCB的方式進行修改。Figure 7 is a cross-sectional view of a hybrid PCB 300 in accordance with an embodiment of the present invention, including a composite layer 270-2 adhered to the four single metal substrate substrates Both of the four metal layer core sub-assemblies 202. The hybrid PCB 300 includes a combination layer 270-2 that sandwiches two single metal layer substrates 270-1 on one side of the core material subassembly 202. The hybrid PCB 300 further includes two single metal layer substrates 270-1 that sandwich the four metal core material subassembly 202 on the other side of the core material subassembly 202. The embodiment shown in Fig. 7 is similar to the embodiment of Fig. 6, except that the outer combined layer is removed. In other embodiments, one or both of the upper single metal layer carriers 270-1 can also be removed. In many embodiments, the configuration of the hybrid PCB of Figure 7 can be modified in a manner similar to that described above for the hybrid PCB of Figure 6.

第8圖係為根據本發明之一實施例的一混合印刷電路板400之一橫剖面圖,其包括六個第3g圖之單一金屬層基材(470-1,470-2)夾住包括一主動裝置406的一芯材次組件402。除了該芯材次組件402包括實施例的主動裝置406、且上方單一金屬層基材470-2包括額外的微通孔450,其形成一堆疊通孔,用以連接到該主動裝置406以外,第8圖中所示之該混合PCB 400係與第5圖的實施例類似。該主動裝置406可為一電晶體、積體電路,或是其他普遍結合一印刷電路板使用之主動裝置。在第8圖中所示之該實施例中,該混合PCB 400包括一單獨主動裝置406。在其他實施例中,能夠使用額外的主動裝置以及額外的通孔,用以支撐各種不同的所需連接。在許多實施例中,第8圖之該混合PCB能夠以類似於上述用於第4a,4b,4c,5及6圖之該混合PCB的方式進行修改。在一實施例中,該主動裝置能夠位於該等單一金屬層基材其中一者之上或之內。在其他實施例中,主動裝置能夠位於單一金屬層基材與芯材次組件其中任何一者之上或之內。Figure 8 is a cross-sectional view of a hybrid printed circuit board 400 in accordance with an embodiment of the present invention, comprising a single metal layer substrate (470-1, 470-2) of six 3g views sandwiching an active A core subassembly 402 of device 406. In addition to the core subassembly 402 including the active device 406 of the embodiment, and the upper single metal layer substrate 470-2 includes additional micro vias 450 that form a stacked via for connection to the active device 406, The hybrid PCB 400 shown in Fig. 8 is similar to the embodiment of Fig. 5. The active device 406 can be a transistor, an integrated circuit, or other active device commonly used in conjunction with a printed circuit board. In the embodiment shown in FIG. 8, the hybrid PCB 400 includes a separate active device 406. In other embodiments, additional active devices and additional through holes can be used to support a variety of different desired connections. In many embodiments, the hybrid PCB of Figure 8 can be modified in a manner similar to that described above for the hybrid PCBs of Figures 4a, 4b, 4c, 5 and 6. In an embodiment, the active device can be located on or in one of the single metal layer substrates. In other embodiments, the active device can be located on or within any of the single metal layer substrate and the core material subassembly.

第9圖係為根據本發明之一實施例的一混合印刷電路板500之一橫剖面圖,其包括兩個第3g圖之單一金屬層基材(570-1,570-2)夾住包括一主動裝置506的一芯材次組件502。除了包括一額外的通孔584,用以連接主動裝置506,其係進一步實施在第8圖中之芯材次組件502內以外,第9圖中所示之該PCB係大致上與第8圖者類似。在其他觀點中,第9圖之該混合PCB的功能能夠如同第8圖之該混合PCB,亦能夠如其一般進行修改。Figure 9 is a cross-sectional view of a hybrid printed circuit board 500 in accordance with an embodiment of the present invention, comprising two single metal layer substrates (570-1, 570-2) of the 3g pattern sandwiched including an active A core subassembly 502 of device 506. In addition to including an additional via 584 for connecting the active device 506, which is further implemented within the core sub-assembly 502 of FIG. 8, the PCB shown in FIG. 9 is substantially identical to FIG. Similar. Among other points of view, the hybrid PCB of FIG. 9 can function as the hybrid PCB of FIG. 8, and can be modified as usual.

第10圖係為根據本發明之一實施例的一印刷電路板總成600之一橫剖面圖,其包括使該總成之撓性區域606與堅硬區段(602,604)分離之切除區域。通孔608能夠提供不同撓性、堅硬以及堅硬-撓性層之間的電子互連性。Figure 10 is a cross-sectional view of a printed circuit board assembly 600 in accordance with an embodiment of the present invention including a cut-away region separating the flexible region 606 of the assembly from the rigid segments (602, 604). The vias 608 are capable of providing electrical interconnection between different flexible, rigid, and hard-flex layers.

在許多實施例中,該電路板總成600能夠使用文中所描述之任何製造程序所形成,包括例如上述在第3a~3g,4a~4c圖中的單獨層壓程序。習用的層壓程序,包括順序層壓類程序,需要一相當大量的處理步驟,其可能會在製造程序期間損壞一撓性或堅硬-撓性基材。更具體而言,諸如電鍍、清潔、擦拭以及平面化之習用的處理步驟可能會損壞撓性或是堅硬-撓性基材,並導致產生些許定位公差的相關問題。根據文中所述之製造程序,能夠形成電路板總成600,同時避免或顯著減少許多習用程序普遍使用的重複步驟,包括例如侵入電鍍、清潔、擦拭,以及平面化處理步驟。In many embodiments, the board assembly 600 can be formed using any of the fabrication procedures described herein, including, for example, the separate lamination procedures described above in Figures 3a-3g, 4a-4c. Conventional lamination procedures, including sequential lamination procedures, require a significant amount of processing steps that can damage a flexible or rigid-flexible substrate during the manufacturing process. More specifically, conventional processing steps such as electroplating, cleaning, wiping, and planarization can damage flexible or rigid-flexible substrates and cause problems associated with some positioning tolerances. In accordance with the fabrication procedures described herein, the circuit board assembly 600 can be formed while avoiding or significantly reducing the repetitive steps commonly used in many conventional applications, including, for example, invasive plating, cleaning, wiping, and planarization processing steps.

儘管以上描述包含許多本發明之特定實施例,其不應視為本發明之限制,而應視為其特定實施例之範例。因此,本發明之範疇並非限定於所顯示之實施例,而係由所附申請專利範圍及其同等項目加以界定。Although the description above contains many specific embodiments of the invention, it should not be construed as a limitation of the invention. Therefore, the scope of the invention is not limited to the embodiments shown, but is defined by the scope of the appended claims and their equivalents.

例如,文中所述之製造程序能夠結合一些技術加以使用,包括但非限定於:覆晶、微機電系統(MEMS)電路、陶瓷封裝、有機封裝、高密度基材、球柵陣列(BGA)基材、堅硬基材、撓性基材,以及堅硬-撓性基材。For example, the fabrication procedures described herein can be used in conjunction with a number of techniques including, but not limited to, flip chip, microelectromechanical systems (MEMS) circuits, ceramic packages, organic packages, high density substrates, ball grid array (BGA) based Materials, rigid substrates, flexible substrates, and hard-flex substrates.

在某些實施例中,文中所述之該等微通孔可稱之為Z軸互連孔。In some embodiments, the microvias described herein may be referred to as Z-axis interconnects.

在上述實施例中,電路板總成係使用穿透通孔、通孔、微通孔、盲通孔或其他通孔所形成。在其他實施例中,這些通孔能夠交互更換使用,且/或能夠以業界熟知的其他適當通孔加以取代。In the above embodiments, the circuit board assembly is formed using through vias, vias, micro vias, blind vias or other vias. In other embodiments, the through holes can be interchangeably used and/or can be replaced with other suitable through holes well known in the art.

10...雙面基材10. . . Double-sided substrate

10a...銅箔10a. . . Copper foil

10b...芯材10b. . . Core

11...銅箔襯墊11. . . Copper foil liner

20...光阻劑20. . . Photoresist

30...層壓黏著劑30. . . Laminated adhesive

40...保護薄膜40. . . Protective film

50...通孔/微通孔50. . . Through hole / micro through hole

60...傳導漿60. . . Conductive pulp

70...單一金屬層載體70. . . Single metal layer carrier

70-1...單一金屬層基材70-1. . . Single metal layer substrate

70-2...單一金屬層基材70-2. . . Single metal layer substrate

80-1...上方總成80-1. . . Upper assembly

80-2...下方總成80-2. . . Lower assembly

100-1...混合印刷電路板100-1. . . Mixed printed circuit board

100-2...混合印刷電路板100-2. . . Mixed printed circuit board

100-3...混合印刷電路板100-3. . . Mixed printed circuit board

100-4...混合印刷電路板100-4. . . Mixed printed circuit board

102...芯材次組件102. . . Core subassembly

104...穿透通孔104. . . Through hole

150...微通孔150. . . Micro via

151...微通孔151. . . Micro via

200...混合印刷電路板200. . . Mixed printed circuit board

202...芯材次組件202. . . Core subassembly

204...穿透通孔204. . . Through hole

250...堆疊微通孔250. . . Stacked micro vias

270-1...單一金屬層基材270-1. . . Single metal layer substrate

270-2...組合層270-2. . . Combination layer

284...微通孔284. . . Micro via

300...混合印刷電路板300. . . Mixed printed circuit board

400...混合印刷電路板400. . . Mixed printed circuit board

402...芯材次組件402. . . Core subassembly

406...主動裝置406. . . Active device

450...微通孔450. . . Micro via

470-1...單一金屬層基材470-1. . . Single metal layer substrate

470-2...單一金屬層基材470-2. . . Single metal layer substrate

500...混合印刷電路板500. . . Mixed printed circuit board

502...芯材次組件502. . . Core subassembly

504...穿透通孔504. . . Through hole

506...主動裝置506. . . Active device

550...微通孔550. . . Micro via

570-1...單一金屬層基材570-1. . . Single metal layer substrate

570-2...單一金屬層基材570-2. . . Single metal layer substrate

584...通孔584. . . Through hole

600...印刷電路板總成600. . . Printed circuit board assembly

602...堅硬區段602. . . Hard section

604...堅硬區段604. . . Hard section

606...撓性區域606. . . Flexible area

608...通孔608. . . Through hole

第1圖係為用以製造一具有層壓通孔之印刷電路板的一種順序層壓程序之流程圖,其包括順序層壓及電鍍步驟。Figure 1 is a flow diagram of a sequential lamination process for fabricating a printed circuit board having laminated vias including sequential lamination and plating steps.

第2圖係為根據本發明之一實施例的用以製造一具有層壓通孔之印刷電路板的一種順序層壓程序之流程圖,其包括一單獨層壓程序。2 is a flow diagram of a sequential lamination process for fabricating a printed circuit board having laminated vias, including a separate lamination process, in accordance with an embodiment of the present invention.

第3a~3g圖顯示根據本發明之一實施例的用以製造一單一金屬層基材的程序,該基材係用於具有堆疊(或交錯)微通孔的一單獨層壓循環或是處理程序中。Figures 3a-3g show a procedure for fabricating a single metal layer substrate for a separate lamination cycle or treatment with stacked (or staggered) microvias in accordance with an embodiment of the present invention. In the program.

第4a圖係為根據本發明之一實施例的一混合印刷電路板之一橫剖面分解圖,其包含四個第3a~3g圖之經蝕刻的單一金屬層基材以及兩個未經蝕刻的單一金屬層基材夾住一芯材次總成。4a is a cross-sectional exploded view of a hybrid printed circuit board including four etched single metal layer substrates of the 3a-3g pattern and two unetched layers, in accordance with an embodiment of the present invention. A single metal layer substrate sandwiches a core sub-assembly.

第4b圖係為根據本發明之一實施例的一混合印刷電路板之一橫剖面分解圖,其包含六個第3g圖中所示之經蝕刻單一金屬層基材夾住一芯材次總成。Figure 4b is a cross-sectional exploded view of a hybrid printed circuit board in accordance with an embodiment of the present invention, comprising six etched single metal layer substrates shown in Figure 3g, sandwiching a core material to make.

第4c圖係為根據本發明之一實施例的一混合印刷電路板之一橫剖面分解圖,其包含六個第3g圖中所示之採用預壓形式之單一金屬層基材夾住一芯材次總成。Figure 4c is a cross-sectional exploded view of a hybrid printed circuit board in accordance with an embodiment of the present invention, comprising a single metal layer substrate in the form of a pre-compression shown in Figures 3g, sandwiching a core Material sub-assembly.

第5圖係為第4b或4c圖之經完成的混合印刷電路板之一橫剖面圖。Figure 5 is a cross-sectional view of one of the completed hybrid printed circuit boards of Figure 4b or 4c.

第6圖係為根據本發明之一實施例的一混合印刷電路板之一橫剖面圖,其包括一外部混成層夾住兩個位於一個四層金屬層芯材次總成兩側上的單一金屬層基材。Figure 6 is a cross-sectional view of a hybrid printed circuit board including an external hybrid layer sandwiching two single sides on a side of a four-layer metal core sub-assembly, in accordance with an embodiment of the present invention. Metal layer substrate.

第7圖係為根據本發明之一實施例的一混合印刷電路板之一橫剖面圖,其包括一混成層黏附到兩個夾著一個四層金屬層芯材次總成之單一金屬層基材其中一者。Figure 7 is a cross-sectional view of a hybrid printed circuit board according to an embodiment of the present invention, comprising a hybrid layer adhered to two single metal layer bases sandwiching a four-layer metal core assembly One of the materials.

第8圖係為根據本發明之一實施例的一混合印刷電路板之一橫剖面圖,其包括六個第3g圖所示之該單一金屬層基材夾著一包括一主動裝置之芯材次總成。8 is a cross-sectional view of a hybrid printed circuit board including six core metal substrates shown in FIG. 3g sandwiching a core material including an active device, in accordance with an embodiment of the present invention. Sub-assembly.

第9圖係為根據本發明之一實施例的一混合印刷電路板之一橫剖面圖,其包括六個第3g圖所示之該單一金屬層基材夾著一包括一主動裝置之芯材次總成。Figure 9 is a cross-sectional view of a hybrid printed circuit board according to an embodiment of the present invention, comprising six single metal layer substrates shown in Figure 3g sandwiching a core material including an active device Sub-assembly.

第10圖係為根據本發明之一實施例的一混合印刷電路板之一橫剖面圖,其包括使該總成之撓性部分與堅硬區段分離之切除區域。Figure 10 is a cross-sectional view of a hybrid printed circuit board including a cut-away region separating the flexible portion of the assembly from the rigid portion, in accordance with an embodiment of the present invention.

Claims (18)

一種用以製造印刷電路板之方法,其包含下列步驟:設置一芯材次組件,其包括至少一個單一金屬層載體;在並行處理該等多個單一金屬層載體其中各者之後,設置多個單一金屬層載體,其中該等多個單一金屬層載體其中至少一者之並行處理包含:使光阻劑成像到一基材之至少一部分上,該基材之該至少一部分具有形成於該基材之第一表面上之至少一銅箔;自基材蝕刻該至少一銅箔之部分;去除該至少一光阻劑,以便露出該至少一銅箔之至少一部分,藉以形成至少一銅箔襯墊;施加一層壓黏著劑到該基材之一第二表面;施加一保護薄膜到該層壓黏著劑;在該基材之第二表面中形成至少一微通孔,以便露出該至少一個銅箔襯墊;將傳導漿充填入該至少一個微通孔中;及去除該保護薄膜,以便露出位於基材上之用於黏附的黏著劑;及使該等多個單一金屬層載體其中至少二者彼此黏附,且與該芯材次組件黏附。A method for manufacturing a printed circuit board comprising the steps of: providing a core sub-assembly comprising at least one single metal layer carrier; after processing each of the plurality of single metal layer carriers in parallel, setting a plurality a single metal layer carrier, wherein parallel processing of at least one of the plurality of single metal layer carriers comprises: imaging a photoresist onto at least a portion of a substrate, the at least a portion of the substrate having a substrate formed on the substrate At least one copper foil on the first surface; etching at least one portion of the copper foil from the substrate; removing the at least one photoresist to expose at least a portion of the at least one copper foil, thereby forming at least one copper foil liner Applying a laminating adhesive to a second surface of the substrate; applying a protective film to the laminating adhesive; forming at least one micro via in the second surface of the substrate to expose the at least one copper foil a pad; filling the conductive paste into the at least one microvia; and removing the protective film to expose an adhesive for adhesion on the substrate; and making the plurality of single gold Wherein the at least two carrier layers adhere to each other, and the adhesion of the core sub-assembly. 如申請專利範圍第1項之方法,其中使該等多個單一金屬層載體其中至少二者彼此黏附且與該芯材次組件黏附之步驟包含:使該等多個單一金屬層載體其中至少二者彼此黏附,且與該芯材次組件的一第一表面黏附;及使該等多個單一金屬層載體其中至少二者彼此黏附且與該芯材次組件的一第二表面黏附。The method of claim 1, wherein the step of adhering at least two of the plurality of single metal layer carriers to each other and adhering to the core subassembly comprises: at least two of the plurality of single metal layer carriers Adhering to each other and adhering to a first surface of the core subassembly; and adhering at least two of the plurality of single metal layer carriers to each other and to a second surface of the core subassembly. 如申請專利範圍第1項之方法,其中使該等多個單一金屬層載體其中至少二者彼此黏附且與該芯材次組件黏附之步驟包含:使該等多個單一金屬層載體其中至少二者彼此黏附,以形成一第一單獨層壓次組件,且與該芯材次組件之第一表面黏附;將具有至少一個微通孔之一第一組合層黏著到該第一單獨層壓次組件的一表面。The method of claim 1, wherein the step of adhering at least two of the plurality of single metal layer carriers to each other and adhering to the core subassembly comprises: at least two of the plurality of single metal layer carriers Adhering to each other to form a first separate laminated subassembly and adhering to the first surface of the core subassembly; bonding a first composite layer having at least one micro via to the first separate lamination A surface of the component. 如申請專利範圍第1項之方法,其中使該等多個單一金屬層載體其中至少二者彼此黏附且與該芯材次組件黏附之步驟包含:使該等多個單一金屬層載體其中至少二者彼此黏附,以形成一第一單獨層壓次組件,且與該芯材次組件之一第一表面黏附;使該等多個單一金屬層載體其中至少二者彼此黏附,以形成一第二單獨層壓次組件,且與該芯材次組件之一第二表面黏附;將具有至少一個微通孔之一第一組合層黏著到該第一單獨層壓次組件的一表面;將具有至少一個微通孔之一第二組合層黏著到該第二單獨層壓次組件的一表面。The method of claim 1, wherein the step of adhering at least two of the plurality of single metal layer carriers to each other and adhering to the core subassembly comprises: at least two of the plurality of single metal layer carriers Adhering to each other to form a first individual laminated subassembly and adhering to one of the first surfaces of the core subassembly; causing at least two of the plurality of single metal layer carriers to adhere to each other to form a second Laminating the subassembly separately and adhering to a second surface of the one of the core subassemblies; bonding a first combination layer having at least one microvia to a surface of the first individual laminated subassembly; A second combination of one of the microvias is adhered to a surface of the second individual laminated subassembly. 如申請專利範圍第1項之方法,其中該芯材次組件包括至少一個微通孔。The method of claim 1, wherein the core subassembly comprises at least one micro via. 如申請專利範圍第1項之方法,其中該芯材次組件包括至少一個主動裝置。The method of claim 1, wherein the core subassembly comprises at least one active device. 如申請專利範圍第6項之方法,其中該至少一個主動裝置包含一個由一電晶體或是一積體電路所構成的群組中所選出的裝置。The method of claim 6, wherein the at least one active device comprises a device selected from the group consisting of a transistor or an integrated circuit. 如申請專利範圍第1項之方法,其進一步包含:在並行處理該單一金屬層載體之後,設置至少一第二單一金屬層載體,其中該第二單一金屬層載體之並行處理包含:施加一第二層壓黏著劑到一第二基材之一第二表面,該第二基材具有形成於該第二基材之一第一表面上之一銅箔;施加一第二保護薄膜到該第二層壓黏著劑;在該第二基材之第二表面中形成至少一個微通孔,以便暴露該銅箔之一部分;將傳導漿充填入該至少一個微通孔內;及去除該第二保護膜,以便露出位於該第二基材上之作為黏附之用的第二層壓黏著劑;其中使多個單一金屬層載體其中至少二者彼此黏附且與該芯材次組件之表面黏附包含:使該等多個單一金屬層載體其中至少二者彼此黏附,以便形成一第一單獨層壓次組件,且與該芯材次組件之一表面黏附:及將該至少一第二單一金屬層載體黏著到該第一單獨層壓次組件之一表面。The method of claim 1, further comprising: after processing the single metal layer carrier in parallel, providing at least one second single metal layer carrier, wherein the parallel processing of the second single metal layer carrier comprises: applying a a second adhesive layer to a second surface of a second substrate, the second substrate having a copper foil formed on one of the first surfaces of the second substrate; applying a second protective film to the first a second laminating adhesive; forming at least one microvia in the second surface of the second substrate to expose a portion of the copper foil; filling the conductive paste into the at least one microvia; and removing the second a protective film to expose a second laminating adhesive for adhesion on the second substrate; wherein at least two of the plurality of single metal layer carriers adhere to each other and adhere to a surface of the core sub-assembly Adhesively bonding at least two of the plurality of single metal layer carriers to each other to form a first separate laminated subassembly and adhering to a surface of the core subassembly: and the at least one second single metal layer The carrier is adhered to one of the surfaces of the first individual laminated subassembly. 如申請專利範圍第8項之方法,其進一步包含:使該等多個單一金屬層載體其中至少二者彼此黏附,以便形成一第二單獨層壓次組件,且與該芯材次組件之一第二表面黏附;及將至少一個第二單一金屬層載體其中一個第二單一金屬層載體黏著到該第二單獨層壓次組件之一表面。The method of claim 8, further comprising: adhering at least two of the plurality of single metal layer carriers to each other to form a second separate laminated subassembly, and one of the core subassemblies Adhesion of the second surface; and adhering one of the second single metal layer carriers of the at least one second single metal layer carrier to one surface of the second individual laminated subassembly. 如申請專利範圍第1項之方法:其中使該等多個單一金屬層載體至少其中二者彼此黏附且與該芯材次組件黏附包含使該等多個單一金屬層載體其中至少二者彼此黏附,以便形成一第一單獨層壓次組件,且與該芯材次組件的一表面黏附;其中該芯材次組件包括一通孔;其中該芯材次組件之通孔之一位置係與該第一單獨層壓次組件的微通孔之一位置相偏移。The method of claim 1, wherein the at least two of the plurality of single metal layer carriers are adhered to each other and to the core sub-assembly comprises adhering at least two of the plurality of single metal layer carriers to each other Forming a first separate laminated subassembly and adhering to a surface of the core subassembly; wherein the core subassembly comprises a through hole; wherein one of the through holes of the core subassembly is associated with the first One of the microvias of a single laminated subassembly is phase shifted. 如申請專利範圍第10項之方法,其中該芯材次組件之該通孔係為一電鍍穿透通孔。The method of claim 10, wherein the through hole of the core subassembly is a plated through hole. 如申請專利範圍第10項之方法,其中該芯材次組件之該通孔係為一微通孔。The method of claim 10, wherein the through hole of the core sub-assembly is a micro-via. 如申請專利範圍第10項之方法,其中該芯材次組件之該通孔係為以銅進行充填之微通孔。The method of claim 10, wherein the through hole of the core material sub-assembly is a micro-via hole filled with copper. 如申請專利範圍第10項之方法,其中該芯材次組件之該通孔係為以傳導漿進行充填之微通孔。The method of claim 10, wherein the through hole of the core material sub-assembly is a micro-via hole filled with a conductive paste. 如申請專利第1項之方法:其中將該等多個單一金屬層載體至少其中二者彼此黏附且與該芯材次組件黏附包含將該等多個單一金屬層載體至少其中二者彼此黏附,以便形成一第一單獨層壓次組件,且與該芯材次組件的一表面黏附;其中該芯材次組件包含一通孔;其中該芯材次組件之該通孔之一位置係大致上與該第一單獨層壓次組件的一位置相對齊。The method of claim 1, wherein the at least two of the plurality of single metal layer carriers are adhered to each other and the bonding to the core sub-assembly comprises adhering at least two of the plurality of single metal layer carriers to each other, Forming a first separate laminated subassembly and adhering to a surface of the core subassembly; wherein the core subassembly comprises a through hole; wherein a position of the through hole of the core subassembly is substantially A position of the first individual laminated subassembly is aligned. 如申請專利範圍第1項之方法,其中該基材包含由一撓性基材以及一堅硬-撓性基材所構成之群組所選出的一基材。The method of claim 1, wherein the substrate comprises a substrate selected from the group consisting of a flexible substrate and a rigid-flexible substrate. 一種製造印刷電路板之方法,其包含下列步驟:設置一包含至少一個單一金屬層載體之芯材次組件;在並行處理該等多個單一金屬層載體其中各者之後,設置多個單一金屬層載體,其中該等多個單一金屬層載體其中至少一者之並行處理包含:將光阻劑成像到一基材的至少一部分上,該基材具有形成於該基材之第一表面上之至少一銅箔;自基材蝕刻該至少一銅箔之部分;去除該至少一光阻劑,以便露出該至少一銅箔之至少一部分,藉以形成至少一銅箔襯墊;施加一層壓黏著劑到該基材之一第二表面;施加一保護薄膜到該層壓黏著劑;在該基材之第二表面中形成至少一微通孔,以便露出該至少一個銅箔襯墊;將傳導漿充填入該至少一個微通孔中;及去除該保護薄膜,以便露出位於基材上之用於黏附的黏著劑;及使該等多個單一金屬層載體其中至少二者彼此黏附,且與該芯材次組件之一第一表面黏附;使該等多個單一金屬層載體其中至少二者彼此黏附,且與該芯材次組件之一第二表面黏附。A method of manufacturing a printed circuit board comprising the steps of: providing a core subassembly comprising at least one single metal layer carrier; and after processing each of the plurality of single metal layer carriers in parallel, providing a plurality of single metal layers a carrier, wherein the parallel processing of at least one of the plurality of single metal layer carriers comprises: imaging a photoresist onto at least a portion of a substrate, the substrate having at least a first surface formed on the substrate a copper foil; etching the portion of the at least one copper foil from the substrate; removing the at least one photoresist to expose at least a portion of the at least one copper foil to form at least one copper foil liner; applying a laminating adhesive to a second surface of the substrate; applying a protective film to the laminating adhesive; forming at least one micro via hole in the second surface of the substrate to expose the at least one copper foil pad; filling the conductive paste Into the at least one microvia; and removing the protective film to expose an adhesive for adhesion on the substrate; and at least two of the plurality of single metal layer carriers This adhesion, and the adhesion to the surface of one sub-assembly of the first core member; such that the plurality of single carrier wherein the at least two metal layers adhere to each other, and the adhesion surface of one of the second sub-assembly of the core. 一種製造印刷電路板之方法,其包含下列步驟:設置一包含至少一個單一金屬層載體之芯材次組件;在並行處理多個單一金屬層載體其中各者之後,使該等多個單一金屬層載體彼此黏附,以便形成一第一次組件,其中該等多個單一金屬層載體其中至少一者之並行處理包含:將光阻劑成像到一基材的至少一部分上,該基材具有形成於該基材之第一表面上之至少一銅箔;自基材蝕刻該至少一銅箔之部分;去除該至少一光阻劑,以便露出該至少一銅箔之至少一部分,藉以形成至少一銅箔襯墊;施加一層壓黏著劑到該基材之一第二表面;施加一保護薄膜到該層壓黏著劑;在該基材之第二表面中形成至少一微通孔,以便露出該至少一個銅箔襯墊;將傳導漿充填入該至少一個微通孔中;及去除該保護薄膜,以便露出位於基材上之用於黏附的黏著劑;在並行處理多個單一金屬層載體其中各者之後,使該等多個單一金屬層載體彼此黏附,以便形成一第二次組件;將該第一次組件黏著到芯材次組件之一第一表面;及將該第二次組件黏著到芯材次組件的一第二表面。A method of manufacturing a printed circuit board comprising the steps of: providing a core subassembly comprising at least one single metal layer carrier; and after processing each of the plurality of single metal layer carriers in parallel, causing the plurality of single metal layers The carriers are adhered to each other to form a first subassembly, wherein the parallel processing of at least one of the plurality of single metal layer carriers comprises: imaging the photoresist onto at least a portion of a substrate having the At least one copper foil on the first surface of the substrate; etching at least one portion of the copper foil from the substrate; removing the at least one photoresist to expose at least a portion of the at least one copper foil to form at least one copper a foil liner; applying a lamination adhesive to a second surface of the substrate; applying a protective film to the lamination adhesive; forming at least one microvia in the second surface of the substrate to expose the at least a copper foil liner; filling a conductive paste into the at least one microvia; and removing the protective film to expose an adhesive for adhesion on the substrate; After each of the single metal layer carriers, the plurality of single metal layer carriers are adhered to each other to form a second sub-assembly; the first sub-assembly is adhered to the first surface of one of the core sub-assemblies; The second assembly is adhered to a second surface of the core subassembly.
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