TW201302317A - Paste application head, paste application apparatus, and paste application method - Google Patents

Abstract

For large glass substrate, high-precision application of the sealing material can be proceeded by highly fine pattern. The paste application head is disposed with a main paste-containing cylinder (23) with large-capacity and a secondary paste containing cylinder (24) with small capacity. The main paste-containing cylinder (23) contains a large amount of paste. The paste contained in the secondary paste containing cylinder (24) is sprayed from the nozzle (22) when the paste pattern is drawn on the glass substrate. When the quantity of paste contained in the secondary paste containing cylinder (24) becomes less, the shut-off valve (30) is opened to make the main paste cylinder (23) communicated with the secondary paste containing cylinder (24) through the paste-terminal flow path (27), so that the paste in the main paste containing cylinder (23) is replenished to the secondary paste containing cylinder (24). For large glass substrate, high-precision application of the sealing material can be proceeded by highly fine pattern. The paste application head is disposed with a main paste-containing cylinder (23) with large-capacity and a secondary paste containing cylinder (24) with small capacity. The main paste-containing cylinder (23) contains a large amount of paste. The paste contained in the secondary paste containing cylinder (24) is sprayed from the nozzle (22) when the paste pattern is drawn on the glass substrate. When the quantity of paste contained in the secondary paste containing cylinder (24) becomes less, the shut-off valve (30) is opened to make the main paste cylinder (23) communicated with the secondary paste containing cylinder (24) through the paste-terminal flow path (27), so that the paste in the main paste containing cylinder (23) is replenished to the secondary paste containing cylinder (24).

Description

Electric paste coating head, electric paste coating device and electric paste coating method

The present invention relates to an apparatus and method for quantitatively coating an electric paste on a substrate, and more particularly to an electric paste coating head for applying a sealing material used in a manufacturing process such as a liquid crystal display panel, that is, an electric paste to a glass substrate with good precision. Paste coating device and electric paste coating method.

In order to reduce the manufacturing cost, a liquid crystal display panel is used to reduce the manufacturing cost, and a substrate surface of the glass substrate is divided into a plurality of regions, and an electric paste pattern of the same shape is drawn in an individual region, and is divided into individual regions. Each of the divided regions may form a liquid crystal display panel. As a result, the size of the glass substrate to be used is increased, and the number of cuts is increased, and a plurality of liquid crystal display panels can be obtained from one glass substrate.

As a countermeasure against this, the life of the applied electric paste sealing material is improved, and the capacity of the electric paste storage tube in which the sealing material discharged onto the glass substrate is accommodated is replaced with the larger one. In this way, the filling amount of the sealing material of the electric paste storage tube can be increased. However, when a specific pattern is drawn on a glass substrate and the sealing material accommodated in the electric paste storage tube is ejected from the nozzle onto the glass substrate, air pressure (air pressure) is applied to the electric paste storage tube, and the electric paste is stored. When the capacity of the cylinder is increased, the sealing material is ejected from the electric paste storage tube, and the vacant capacity (the space in which the air is present) of the electric paste storage tube is increased, and the sealing material in the electric paste storage tube is changed even if the air pressure is changed. When the amount of pressure is applied for adjustment, the pressure is transmitted to the air within the vacant capacity to The surface of the sealing material causes a time delay in the adjustment of the pressing force of the sealing material. Therefore, in order to perform good precision drawing of the fine electric paste pattern, it is necessary to frequently perform drawing conditions, particularly the adjustment of the pressure-reduction of the sealing material in the electric paste storage tube, which makes control difficult.

In addition, when the amount of the electric paste applied is reduced, when the sealing material is applied in a frame-like pattern at the position of the glass substrate corresponding to the peripheral portion of the glass plate of the liquid crystal display panel, the amount of the sealing material applied tends to be small. High precision and stable sealing material coating is required. Therefore, it is difficult to increase the size of the glass substrate in accordance with the fine pressure-reduction adjustment of the sealing material.

In view of this, a spiral type electric paste applying apparatus which can finely adjust the amount of discharge of the sealing material is proposed (for example, refer to Patent Document 1).

In the electric paste application device described in Patent Document 1, two or more spiral convex portions are provided in a cylindrical space inside the cylindrical container in which the nozzle is formed in the holding portion, and a spiral having a rod shape is provided. In the configuration, the spiral is rotated by the servo motor, and the sealing material stored in the storage container is supplied into the inner space of the cylindrical container via the hose, so that the supplied sealing material is rotated by the convex portion of the spiral And the nozzle is pushed out. Here, in this technique, the discharge amount can be controlled corresponding to the rotation angle of the spiral, and thus, the error of the discharge amount of the sealing material can be reduced.

[Advanced technical literature] [Patent Literature]

[Patent Document 1] JP-A-2007-136397

However, in the spiral type electric paste coating apparatus, the components of the spiral itself or the drive source of the motor, the control circuit of the motor, and the control software are increased. Further, the constituent elements which are filled in the electric paste storage tube and which are in contact with the sealing material need to be periodically washed, and the processing of the separation of the spiral portion, the outer circumference of the spiral when the assembly is formed, and the inner wall surface of the inner container of the cylindrical container are changed. It is cumbersome and requires more time.

Further, when foreign matter is mixed in the outside, the constituent elements are complicated, and it is doubtful whether or not the foreign matter can be reliably removed during the decomposition, and the maintenance at the time of washing cannot be maintained. Further, when the spiral is rotated, foreign matter due to abrasion at the driving portion may occur.

Based on the above, there are problems such as the time required for washing and the risk of foreign matter being mixed.

An object of the present invention is to solve the problem and to provide an electric paste coating head, an electric paste applying apparatus, and an electric paste coating method which can apply a high-definition sealing material to a large-sized glass substrate.

In order to achieve the above object, an electric paste coating head according to the present invention is characterized in that a coating material storage cylinder for accommodating a coating material is a main electric paste storage cylinder that houses the filled coating material, and the coating material The sub-electric paste storage tube is temporarily stored; the main electric charge storage tube and the sub-electric paste storage tube are provided with air pressure applying means for applying air pressure; and the main electric paste receiving tube is provided. The flow path of the coating material from which the coating material is taken out is connected to a gate valve, and the flow path of the coating material from the shutoff valve is connected to the sub-electric paste storage cylinder; and the sub-electric paste storage cylinder The flow path of the coating material is connected to a nozzle that ejects the coating material onto the substrate, and a coating material storage amount detecting means is provided on the upper portion of the sub-electric paste storage tube for detecting the amount of the coating material stored.

Further, in the electric paste application head of the present invention, the air pressure applying means of the main electric paste storage cylinder opens the shutoff valve while the main electric paste storage cylinder replenishes the coating material to the sub electric paste storage cylinder. The air pressure is applied to the main electric charge storage cylinder, and the air pressure applying means of the sub-electric paste storage cylinder applies a gas pressure to the sub-electrode storage cylinder while closing the shut-off valve when the coating material is discharged from the nozzle.

Further, in the electric paste application head of the present invention, the coating material storage amount detecting means of the sub-electric paste storage tube is a sensor that receives the optically reflected light of the liquid surface of the coating material and detects the amount of the coating material stored.

Moreover, in the electric paste coating head of the present invention, the volume of the sub-electric paste storage cylinder is extremely smaller than the volume of the main electric paste storage cylinder.

In order to achieve the above object, the electric paste applying apparatus of the present invention is provided with a gantry having one or a plurality of coating heads movably disposed on one or a plurality of gantry stages, and the gantry is placed on the substrate provided on the gantry. When the substrate mounted on the platform moves, the coating head moves to the gantry, and the coating head moves to the substrate, and the coating material is ejected onto the substrate by the nozzle discharge port, and the coating head is provided with a coating material filled with the coating material. a container discharge nozzle and a nozzle discharge port for discharging the coating material of the coating material storage tube; The coating material storage cylinder of the coating material of the coating head is composed of a main electric paste storage cylinder in which the filled coating material is housed, and a sub-electric paste storage cylinder in which the coating material is temporarily stored; the main electric paste storage cylinder and the sub-electric paste The storage tube is provided with means for applying air pressure, and the flow path of the coating material from the outlet of the main electric paste storage tube for taking out the application material is connected to the shutoff valve, and the flow path of the coating material from the shutoff valve The sub-electrode storage tube is connected to the sub-electrode storage tube; the flow path of the coating material from the sub-electrode storage tube is connected to the nozzle that ejects the coating material to the substrate; and the storage material storage amount is detected on the upper portion of the sub-electric paste storage tube. Means for detecting the amount of the coating material stored.

Further, in the electric paste application device of the present invention, when the main electric paste storage tube replenishes the sub-electrode storage tube by the main electric paste storage tube, the air pressure applying means opens the shut-off valve and simultaneously The air pressure is applied to the main electric charge storage cylinder, and the air pressure applying means of the sub-electric paste storage cylinder applies a gas pressure to the sub-electrode storage cylinder while closing the shut-off valve when the coating material is discharged from the nozzle.

In the electric paste application device of the present invention, the coating material storage amount detecting means of the sub-electric paste storage tube is a sensor that receives the optically reflected light of the liquid surface of the coating material and detects the amount of the coating material stored.

Moreover, in the electric paste applying apparatus of the present invention, the volume of the sub-electric paste storage cylinder is extremely smaller than the volume of the main electric paste storage cylinder.

In order to achieve the above object, the electric paste coating method of the present invention is to mount a gantry having one or a plurality of coating heads movably on one or a plurality of gantry stages, and to mount the gantry on the substrate provided on the gantry. The substrate carried by the platform is moved, and the coating head is moved to the gantry, so that the coating head is paired The plate is moved by an electric paste coating method in which a coating material is ejected onto a substrate by a nozzle discharge port, and the coating head is a nozzle discharge container including a coating material storage tube filled with a coating material and a coating material for discharging the coating material storage tube. The coating material storage cylinder for accommodating the coating material of the coating head is composed of a main electric paste storage cylinder in which the filled coating material is housed, and a sub-electric paste storage cylinder in which the coating material is temporarily stored; The electric paste storage tube and the sub-electric paste storage tube are capable of applying air pressure; and the flow path of the coating material from the outlet of the main electric paste storage tube for taking out the coating material is connected to the shut-off valve, and is applied from the shut-off valve. The material flow path is connected to the sub-electric paste storage tube; the flow path of the application material from the sub-electric paste storage tube is connected to a nozzle that ejects the application material to the substrate; and the upper portion of the sub-electric paste storage tube is detected. The amount of the coating material stored is adjusted by the main electric paste storage tube to be periodically replenished in accordance with the decrease in the coating material in the sub-electrode storage tube, and the application of the coating material is performed on the substrate.

Further, in the electric paste application method of the present invention, when the main electric paste storage tube is supplied with the application material to the sub-electric paste storage tube, the gas flow is applied to the main electric paste storage tube while the shut-off valve is opened; When the coating material is discharged, the shutoff valve is closed, and air pressure is applied to the secondary electric storage container.

Moreover, in the electric paste application apparatus method of the present invention, the amount of the coating material stored in the sub-electric paste storage tube is detected by receiving the optically reflected light from the liquid surface of the coating material in the sub-electrode storage tube.

Moreover, in the electric paste application method of the present invention, the volume of the sub-electric paste storage cylinder is extremely smaller than the volume of the main electric paste storage cylinder.

The main electric paste storage tube having a large storage capacity of the electric paste and the sub-electric paste storage tube having a small storage capacity are used, and the electric paste of the sub-electric paste storage tube is ejected from the nozzle, and the main electric paste storage tube is used to perform the sub-electrode storage tube. The electric paste is replenished, so that the adjustment of the electric paste of the sub-battery storage tube can be performed with good precision, the coating material of the electric paste can be reduced, and the fine coated electric paste pattern can be formed with high precision, which can be easily performed. The electric paste storage tube is reinforced by the electric paste.

Hereinafter, embodiments of the present invention will be described using the drawings.

Fig. 1 is a perspective view showing an embodiment of an electric paste applying apparatus according to the present invention, wherein 1 is a gantry, 2A and 2B are frames, 3A and 3B are fixed portions, 4A to 4D are movable portions, and 5A to 5D are coating heads, 6 For the substrate holding tray, 7 is a θ-axis rotating platform, 8 is a glass substrate, 9 is a main control unit, 10 is a sub-control unit, 11 is a monitor, and 12 is a keyboard.

In the figure, the gantry 1 is provided with two fixed portions 3A and 3B along the two sides in the X-axis direction of the gantry 1, and two movable portions 4A and 4C are provided in one of the fixed portions 3A. One of the fixed portions 3B is provided with two movable portions 4B and 4D. The frame 2A is provided along the Y-axis direction from one of the movable portions 4A and 4B disposed opposite to each other, and the frame 2B is provided along the Y-axis direction from one of the movable portions 4C and 4D disposed opposite to each other. The fixed portions 3A and 3B, the movable portions 4A to 4D, and the frames 2A and 2B constitute an X-axis driving mechanism of the coating heads 5A to 5D.

In frame 2A, two coating heads 5A, 5B are attached to the length of the frame 2A The side direction (that is, the Y direction) is movably provided, and in the frame 2B, the two coating heads 5C, 5D are movably arranged in the longitudinal direction of the frame 2B (ie, the Y direction). . The driving mechanism for the movement is provided in the frames 2A and 2B and the coating heads 5A to 5D. Hereinafter, the driving mechanism is also referred to as a Y-axis driving mechanism.

The substrate holding tray 6 is disposed between the fixing portions 3A and 3B of the X-axis driving mechanism on the gantry 1, and the θ-axis rotating platform 7 is provided to rotate the θ-axis in order to rotate the substrate holding tray 6 in the θ-axis direction. A substrate holding tray 6 is provided on the stage 7. The glass substrate 8 is adsorbed and held on the substrate holding tray 6. Further, a monitor 11 or a keyboard 12 is provided on the gantry 1, and a main control unit 9, a sub-control unit 10, and the like are built in.

Fig. 2 is a perspective view showing a schematic configuration of an embodiment of the coating heads 5A to 5D of Fig. 1, 13 is a base, 14 is a detecting portion, 15 is a Z-axis servo motor, 16 is a Z-axis guiding portion, and 17 is a The Z-axis platform, 18 is an image recognition camera, 19 is an optical distance meter, 20 is an electric paste storage/discharging portion, 21 is a nozzle holder, and 22 is a nozzle.

Further, since the configuration and operation of the coating heads 5A to 5D are the same, they are collectively referred to as the coating head 5.

In the figure, the base 13 of the coating head 5 is attached to the frames 2A and 2B so as to be movable in the Y-axis direction. Therefore, the coating head 5 can be detected by the detecting portion 14 of the gantry 13 The position on 2A, 2B, that is, the position of the substrate holding disk 6 (Fig. 1) in the Y-axis direction.

A Z-axis servo motor 15 is disposed on the base 13 and a Z-axis guide 16 is mounted, and the Z-axis guide 16 is used to guide the Z-axis platform 17 relative to the Z-axis. The lead portion 16 is mounted in such a manner as to be movable in the Z-axis direction (up and down direction). Further, an optical distance meter 19 and an image recognition camera 18 are provided on the Z-axis stage 17, and an electric paste storage/discharging portion 20 is provided in the optical distance meter 19.

The Z-axis servo motor 15 is based on the detection result of the optical distance meter 19 provided on the Z-axis stage 17, and is controlled by the sub-control unit 10 (FIG. 1) along the Z-axis guide unit 16 for the electric paste. The discharge unit 20, the optical distance meter 19, and the image recognition camera 18 drive in the Z-axis direction.

A nozzle holder 21 is provided at a lower end of the paste receiving/discharging portion 20, and a nozzle 22 provided with an electric paste discharge port toward the glass substrate 8 (Fig. 1) is attached to the tip end portion. The electric paste storage/discharging portion 20 and the nozzle 22 are connected by the nozzle holder 21, and the position of the electric paste discharge port of the nozzle 22 is measured on the upper surface of the glass substrate 8 by the distance of the optical optical distance meter 19. The point of reflection of light is offset, but very close. Since the offset amount is not affected by the unevenness of the surface of the glass substrate 8, the Z-axis servo motor 15 is controlled according to the measurement result of the optical distance meter 19, and the unevenness of the surface of the glass substrate 8 can be matched. The tip end portion of the nozzle 22 is moved up and down, and the vertical distance (interval) of the surface (upper surface) of the glass substrate 8 is always maintained constant.

Fig. 3 is a perspective view showing a specific example of the electric paste storage/discharge unit 20 of the coating head 5 shown in Fig. 2, 23 is a main electric paste storage cylinder (main syringe), and 24 is a sub-electric paste storage cylinder (sub In the syringe, 25 is a cylindrical container for a shut-off valve, and 26 is a flow path block, and the same reference numerals are given to the corresponding portions in FIG. 2, and the overlapping description will be omitted.

In the figure, the electric paste storage/discharging unit 20 has two functions of storing and ejecting the electric paste, and the main electric paste storage tube 23 for performing the storage function of the electric paste and the sub-electrode storage for performing the electric paste discharge function. The point at which the barrel 24 is constructed is a major feature. The main electric paste storage tube 23 is an electric paste storage tube having a function of accommodating a replenished coating material (here, an electric paste as a sealing material), and the sub-electric paste storage tube 24 has a coating pressure which is substantially constant. An electric paste storage tube that ejects the electric paste from the nozzle 22 to perform the function of drawing.

In this embodiment, the main electric paste storage cylinder 23 is a standard injection cylinder having a conventional capacity of 120 cc, and the electric paste is filled, and a special jig is used, and the electric paste is supplied from the upper portion of the main electric paste storage cylinder 23 get on. The main electric paste storage tube 23 can be a commercially available filled electric paste storage tube, and in this case, it is only necessary to change it to a spiral luer taper specification. Further, since the pressurization for the electric paste coating is not performed, a plastic syringe can also be used.

The electric paste discharged from the nozzle 22 for drawing is stored in the sub-battery accommodating cylinder 24, and the sub-electrode accommodating cylinder is filled with the electric paste stored in the main electric-powder accommodating cylinder 23. The volume of the sub-battery accommodating cylinder 24 is about 0.5 cc, and is a ratio of about 1/250 times the volume (120 cc) of the main accommodating cylinder 23, but usually 1/10 times to 1/100 times. The volume of the electric paste storage cylinder.

In the flow rate block 26, the electric paste discharge flow path from the sub-electrode storage tube 24 to the nozzle holder 21 and the electric paste filling in which the sub-electric paste storage tube 23 is electrically filled with the electric paste storage tube 23 are provided. Flow path. The cylinder container 25 for the shut-off valve is configured to be the main electric charge storage cylinder 23 to the sub-electric paste storage cylinder 24 The electric paste fills the flow path to open and close the shut-off valve.

Fig. 4 is a more detailed view of each part of Fig. 3, 27 is an electric paste filling flow path on the side of the main electric paste storage tube 23, 28 is an electric paste discharge flow path, 29 is a valve chamber, 30 is a shutoff valve, and 31 is The application of the pressure-applying hose, 32 is a fiber-optic sensor, and 33 is an air-pipe hose. The parts corresponding to those in FIG. 3 are denoted by the same reference numerals and the description thereof will not be repeated.

In the figure, the main electric paste storage tube 23 is connected to one end of the electric paste filling flow path 27 at the lower end portion thereof, and the other end portion of the electric paste filling flow path 27 is connected and housed. The valve chamber 29 of the shutoff valve 30. This is the electric paste filling flow path 27 on the side of the main paste storage tube 23 side. Further, although not shown, the electric paste filling flow path that is connected to the electric paste discharge flow path 28 by the valve chamber 29, that is, the electric paste filling flow path on the side of the sub-electric paste storage tube 24 is connected.

Normally, the shutoff valve 30 is pressed by the operation lever (not shown) by the operation of the cylinder valve 25 for the shutoff valve, and the electric paste filling flow path 27 on the side of the main electric charge storage tube 23 is closed. The entire electric charge filling flow path is maintained in the closed state by the shutoff valve 30. However, when the electric paste to be stored in the main electric charge storage tube 23 is filled in the sub electric charge storage tube 24, the shutoff valve cylindrical container 25 is used. The action will cause the operating lever to pull open the shutoff valve 30. At this time, the electric paste filling flow path 27 on the main electric charge storage tube 23 side is filled with the electric paste from the main electric paste storage tube 23, but the shutoff valve 30 is pulled apart by the operation lever, and the main The paste filling flow path 27 on the side of the electric paste housing tube 23 is opened. In this way, the entire electric paste filling flow path is in an open state. At this time, the air pressure pipe 33 of the air pressure applying means applies air pressure to the main electric paste housing tube 23, and thus the electric paste is filled in the main electric paste storage tube 23 via the electric paste filling flow path 27. It is pressure-fed to the sub-battery accommodating cylinder 24 and is filled in the sub-battery accommodating cylinder 24.

Here, the pressure of the electric paste generated when the electric paste is fed by the electric paste filling flow path 27 is also applied to the nozzle 22 side via the electric paste discharge flow path 28 of the sub-electric paste storage cylinder 24, but the nozzle is used. In the hole diameter of 22, the inner diameter of the sub-battery accommodating cylinder 24 is extremely large, and almost all of the electric paste is pressure-fed to the side of the sub-battery accommodating cylinder 24. Further, the electrical paste may leak from the nozzle 22 due to the physical properties of the electric paste. At this time, the cleaning operation is performed by the cleaning operation of the nozzle 22 (the discharge processing of the electric paste is performed at a position different from the original drawing position). The electric paste attached to the nozzle 22, which is useless, can be removed.

In the sub-battery accommodating cylinder 24, the position of the liquid surface of the electric paste in the sub-battery accommodating cylinder 24 is detected by the optical fiber sensor 32 provided on the upper side, and the sub-electrode accommodating cylinder 24 can be constantly monitored. When the filling amount of the electric paste filled in the sub-electrode storage tube 24 by the main paste storage tube 23 and the electric paste filling flow path 27 reaches the predetermined first threshold value, the filling amount of the electric paste is completed. Then, the shutoff valve is operated by the cylindrical container 25, and the operation lever is pressed, so that the shutoff valve 30 closes the electric paste filling flow path 27. At the same time, the application of the air pressure by the air pipe hose 33 to the main electric charge storage drum 23 is completed. Further, the first limit value at this time may be, for example, about 0.5 cc as described above, but is not limited thereto.

In addition, when the secondary paste storage cylinder 24 is electrically paste-filled by the main electric paste storage cylinder 23, air pressure is applied to the main electric paste storage cylinder 23 by the air piping hose 33, but it is only necessary to borrow When the operating lever is pressed, the shutoff valve 30 can be closed to the electric paste filling flow path 27, and then the main electric paste receiving cylinder 23 is inside. It is also possible to apply air pressure from the air piping hose 33 at all times.

In addition, in the sub-battery accommodating cylinder 24, the electric paste which is stored based on the drawing operation is reduced, and for example, the storage amount is reduced to the second threshold which is insufficient for drawing the electric paste pattern on the set glass substrate 8. At the time of the value, the fiber sensor 32 detects this and sets it to OFF. In addition, when the storage amount of the main paste storage cylinder 23 in the electric paste filling of the sub-electrode storage cylinder 24 is equal to or greater than the first threshold value described above, the optical fiber sensor 32 detects that the optical fiber sensor 32 is turned ON.

In the automatic operation, when the drawing of the electric paste pattern causes the storage amount of the electric paste in the sub-electrode storage tube 24 to be equal to or less than the second threshold value described above, the drawing operation of the glass substrate is completed at this time, and the optical fiber sensor 32 is completed. Set to OFF. Then, the loading/unloading operation of the glass substrate 8 is performed, and the time zone (the time zone of the non-drawing operation) of the operation automatically starts the above-described electric paste filling from the main electric paste storage cylinder 23 to the sub-electric paste storage cylinder 24. action. When the storage amount of the electric paste of the sub-bubble receiving cylinder 24 is equal to or greater than the first threshold value described above, the optical fiber sensor 32 is turned ON, and the filling operation of the sub-electrode storage cylinder 24 is completed. In this way, the newly mounted second glass substrate 8 can be subjected to the drawing operation of the electric paste pattern.

When the drawing operation of the electric paste pattern is performed, the shutoff valve 30 is in a closed state, and even when the application pressure (air pressure) is applied to the sub-electric paste storage tube 24 by the application pressure applying hose 31 of the air pressure applying means, The electric paste is prevented from flowing backward toward the side of the main electric charge storage tube 24. In the backflow prevention state, only a slight air pressure is applied to the sub-electrode storage cylinder 24 via the coating pressure applying hose 31 by the electro-pneumatic regulator (not shown), and the pressurized electric power is applied by the nozzle 22. The paste is applied to the discharge glass substrate 8 (Fig. 1).

Therefore, in the sub-battery accommodating cylinder 24, at the position where the optical fiber sensor 32 is at the threshold of ON-OFF, the amount of the electric paste is largely stabilized in a constant state, and the vacancy of the sub-electric accommodating cylinder 24 can be reduced. Changes in capacity. By the ON and OFF of the optical fiber sensor 31, the filling operation and the coating operation of the sub-electrode storage tube 24 are repeated, and the sub-electrode storage tube 24 does not become empty, and the variation of the coating pressure can be suppressed. .

In addition, when the electric paste storage tube having a large volume such as the main electric charge storage tube 23 is managed, the air is a compressive fluid, and the pressure is increased or decreased as the volume of the electric paste is increased. In the adjustment, first, after the change in the pressure is transmitted to the air, it is transmitted to the electric paste, and the pressure adjustment of the electric paste causes a time delay, which causes the electric discharge operation of the nozzle to fluctuate and the drawing process to be unstable. In the present invention, the main electric paste storage tube 23 is also provided with a sub-electrode storage tube 24 having a small volume, and is configured to eject the electric paste for drawing from the sub-electric paste storage tube. Similarly to the main electric paste storage cylinder 23, the cylinder is also applied with air pressure. However, since the volume is small, the fluctuation of the empty volume can be reduced by the monitoring of the optical fiber sensor 31, and the pressure applied can be increased. The control of the electro-pneumatic regulator (not shown) of the adjustment means is improved in the followability, and the discharge amount is stabilized. In other words, the supply of the sealing material 27 to the sub-electrode storage tube 24 is maintained in a short period of time, and the capacity of the electric paste in the sub-electrode storage tube 24 can be kept substantially constant, and stable drawing processing can be performed.

In this embodiment, the volume of the sub-electric paste receiving cylinder 24 is about 0.5 cc, which is a ratio of about 1/250 times the volume of the main electric paste storage cylinder 23, but it is usually also possible to use 1/10 to 1/1 100 times the volume of the volume of electricity paste Na cylinder.

Moreover, based on the problem of the stability of the line width after the application of the electric paste, it is also necessary to perform delicate management on the coating pressure at the beginning and the terminal or the corner, and according to this embodiment, the time delay of the electric paste can be performed. The management of the coating pressure can also stabilize the drawing of the end or corner of the pattern.

In the main electric charge storage tube 23, air pressure is applied from the air pipe hose 33 only when the sub-electrode storage tube 24 is subjected to the electric paste press-fitting, and the sub-electric paste storage tube 24 is only in the pair. When the glass substrate 8 is electrically drawn, the application of the air pressure by the application pressure applying hose 31 is performed. When the air pressure is applied, the main electric paste storage cylinder 23 and the sub-electric paste storage cylinder 24 are simultaneously opened to the atmospheric pressure.

As is apparent from the above description and the conventional mechanical syringe method using a spiral type electric paste storage tube, as described above, the mechanical syringe method is constituted by a complicated constituent means, and the gap adjustment is difficult, and the cleaning is performed. Poor maintenance. In addition, the cleaning using the sub-electric paste storage tube of the embodiment is limited to the main electric charge storage tube 23, the sub-electric paste storage tube 24, the shutoff valve 30, or the flow including the electric paste filling flow path 27. The road block 26, the nozzle 22, and the plug or gasket attached to the flow path block 26. The drive source of the shutoff valve 30, that is, the cylinder container 25 for the shutoff valve, is not in contact with the electric paste, and can be fixed to the apparatus main body side, and is not intended to be cleaned. Therefore, compared with the washing of the rotary wing of the above-mentioned spiral coating head or its peripheral components, the number of objects to be cleaned is also reduced, and the complicated shape is not complicated, and the time required for decomposition or reorganization can be greatly shortened. . Moreover, the accuracy adjustment time after assembly can be shortened, and the maintenance property is greatly improved.

Fig. 5 is a perspective view showing a specific example of the configuration of the flow path block 26 of Figs. 3 and 4, wherein 23a and 24a are electric paste storage tube mounting portions, 27a is an electric paste filling flow path, and 29a is a front wall surface. Reference numeral 34 denotes a suction port, and 35 denotes a discharge port. Parts corresponding to those in the above-mentioned drawings are denoted by the same reference numerals and the description thereof will not be repeated.

In the figure, the suction port 34 and the discharge port 35 are provided in the wall surface 29a before the valve chamber 29, so that the suction port 34 and the discharge port 35 are opened/closed, and the valve 30 (Fig. 4) is attached to the valve 30 (Fig. 4). The front wall surface 29a is separated from or separated by the front wall surface 29a.

The paste filling flow path 27 on the side of the main paste storage tube 23 is used to connect the main paste storage tube 23 attached to the mounting portion 23a to the suction port 34 of the valve chamber 29, and the row of the valve chamber 29 The outlet 35 is connected to the electric paste discharge flow path 28 of the sub-electrode storage tube 24 attached to the mounting portion 24a by the electric paste filling flow path 27a on the side of the sub-electrode storage tube 24.

When the electric paste is applied to the glass substrate 8 (FIG. 1), the suction port 34 and the discharge port are opened by the shutoff valve 30 in the valve chamber 29 by the action of the cylinder container 25 for the shutoff valve (FIG. 4). 35 is plugged, and the electric paste filling path 27 is in an interrupted state. In this manner, the electric paste in the sub-electrode storage tube 23 is sent to the nozzle 22 via the electric paste discharge flow path 28. When the secondary paste storage cylinder 23 is filled with the electric paste, the shutoff valve 30 is separated from the front wall surface 29a of the valve chamber 29 by the action of the shutoff valve cylindrical container 25 in the valve chamber 29. When the suction port 34 and the discharge port 35 are in an open state, the main electric charge storage tube 23 and the sub-electrode storage tube 24 are filled in via the electric paste filling flow paths 27 and 27a. As described above, as described above, the electric paste is filled in the sub-electric paste storage tube 24 from the main electric paste storage tube 23 .

Fig. 6 is a view showing a specific example of an electric paste pattern applied to the glass substrate 8 by the embodiment, in which PTa to PTd are electric paste patterns, and Sa to Sd are application start positions of the electric paste patterns PTa to PTd.

In this figure, in the specific example, four paste patterns PTa to PTd are applied onto the substrate 8 by the four coating heads 5A to 5D shown in FIG. The electric paste patterns PTa to PTd have the same shape, and are provided with two-dimensional path data from the coating start position Sa~Sd to the final position.

Here, the application start position Sa of the electric paste pattern PTa is set to the coordinates (X1, Y1) at the center 0 of the glass substrate 8, and the application start position Sb of the electric paste pattern PTb is similarly The position is set at the coordinates (X2, Y2), and the application start position Sc of the electric paste pattern PTc is also set at the coordinates (X3, Y3), and the application start position Sd of the electric paste pattern PTd is also set at the coordinates. (X4, Y4).

Fig. 7 is a flow chart showing a specific example of the coating drawing operation of the electric paste pattern shown in Fig. 6 in the above embodiment.

In the figure, first, a power source is input (step 100), and a step (200) of initial setting of the apparatus is performed.

In the initial setting, in FIG. 1, the servo motor is driven to rotate the θ-axis rotating stage 7, and the substrate holding tray 6 is moved to the θ-axis direction to be positioned at a specific reference angle by the movable portions 4A, 4B and the coating head 5A. The ~5D linear motor is driven to move the coating heads 5A to 5D and set the nozzles of the nozzles of the nozzles to a predetermined specific origin position, and to the electric paste patterns PTa~PTd. The coating start position is over The two-dimensional path data, the positioning mark data, the electric paste coating height (the distance from the surface of each of the coating heads 5A to 5D to the electric paste discharge port of the tip end of the nozzle 22), and the like are set.

The input of these data can be performed by the keyboard 12 (Fig. 1), and the input data is stored in the components of the main control unit 9 (Fig. 1), that is, the microcomputer, or the components of the sub-control unit 10 (Fig. 1), That is, the RAM built in the microcomputer is stored in a memory medium such as a hard disk of an external device of the control unit 9, 10 of the control unit.

After the end of the above initial setting (step 200), the glass substrate 8 is placed and held on the substrate holding tray 6 (step 300).

Next, positioning of the glass substrate 8 is performed (step 400). In this process, any image recognition camera 18 that has been initially set in step 200 in the image recognition camera 18 (FIG. 3) of the coating heads 5A to 5D is positioned on the glass substrate on which the substrate holding tray 6 can be placed. The positioning of 8 is performed by marking the position of the photographing, and the photographing of the positioning mark is performed. The axis rotation platform 7 is driven by the servo motor θ according to the detection result of the position of the center of gravity of the positioning mark for photographing, and the inclination of the glass substrate 8 in the θ-axis direction is corrected.

After the positioning of the glass substrate 8 in step 400 is completed, the coating operation of the electric paste is performed (step 500). Explain the details of the coating action.

First, it is confirmed whether or not there is an uncoated pattern on the glass substrate 8, that is, whether there is a pattern that needs to be applied but is not coated. At the start of coating, the coating heads 5A to 5D are moved to the next coating start point based on the fact that all of the patterns to be applied are not applied.

It is confirmed whether or not the pattern to be drawn (here, four patterns) has the same shape, and if it is the same pattern, it is confirmed whether or not it is a pattern that can be applied at the same time.

Next, it is confirmed whether or not the respective nozzles 22 at the application start position are in a range of mutual interference, and the movement processing of the application start point is performed. When interfering, stop and wait for standby operation.

After the end of the application of the coating start point, the gap setting process of the nozzles 22 of the coating heads 5A to 5D is performed. The gap refers to the height from the coated surface of the glass substrate 8 to the tip end of the nozzle 22. In this process, the Z-axis servo motor 15 (Fig. 2) is driven by the coating heads 5A to 5D to make the Z-axis platform. 17 (Fig. 2) is moved in the Z-axis direction, and the position of the electric paste discharge port of the tip end of each nozzle 22 (the distance from the upper surface of the glass substrate 8) is set to apply the paste pattern PTa~PTd (Fig. 6). Coating height.

Therefore, first, for each of the coating heads 5A to 5D, the nozzles 22 are lowered by the initial movement distance data according to the preset initial movement distance data of the nozzles 22, and the distance meters are separately set (ie, The optical distance meter 19 (Fig. 3) is used to measure the height of the surface of the glass substrate 8. Next, for each of the coating heads 5A to 5D, it is confirmed whether or not the tip end of each nozzle 22 is set to a height at which the electric paste pattern is drawn, and when the tip end of each nozzle 22 is set to the drawing height of the electric paste pattern, the gap is ended. The setting works.

Further, when the tip end of the nozzle 22 is not set to the height for drawing the electric paste pattern, the nozzle is lowered by a small distance, and the distance from the glass substrate 8 to the paste-coated surface is measured by the optical distance meter 19, and the process is repeated. The distance The measurement is a small distance from the nozzle 22, and the process is repeated until the tip end of all the nozzles 22 is set to the height of the electric paste pattern.

After the processing of the gap setting described above is completed, the electric paste coating moving process is performed. When the electric paste discharge port at the tip end of the nozzles 22 of the respective coating heads 5A to 5D and the glass substrate 8 are opposed to each other, the coating heads 5A to 5D are moved in the X and Y axis directions in accordance with the electric paste pattern data. The sub-electrode storage tube 24 (Fig. 3, Fig. 4) of the coating heads 5A to 5D is applied with a slight air pressure, and the electric paste discharge port at the tip end of each nozzle 22 starts ejecting the electric paste. The electric paste coating process is performed in this manner (step 500).

After the completion of the electric paste coating process (step 500), the glass substrate 6 on which the electric paste has been applied is released by the substrate holding tray 6 (FIG. 1), and the glass substrate 8 is discharged to the outside of the apparatus (step 600). When the plurality of glass substrates 6 are formed into the same pattern of the paste pattern ("No" in step 700), the substrate 6 on which the new paste pattern is applied is again subjected to the above-described operation in step 300. Thereafter, when all of the glass substrates 6 have finished the series of paste pattern drawing processes ("Yes" in step 700), the job is terminated (step 800).

As described above, according to the embodiment, by providing the sub-electric paste housing tube 24 (Fig. 3, Fig. 4), the application pressure of the electric paste in the sub-electrode storage tube 24 can be kept stable at all times, and therefore even coated. The coating start positions Sa to Sd or the respective ends of the electric paste patterns PTa to PTd or the corner portions may be applied in the same manner as the straight portions.

Here, in the processing of forming the electric paste pattern by the same pattern on the plurality of glass substrates 6 (repetition of steps 300 to 700), the glass substrate 6 is attached to the glass substrate 6. Each time the drawing operation of the electric paste pattern is completed, the loading and unloading operation of the glass substrate 6 is performed, and the time zone in which the coating operation is not performed may be utilized, and if necessary, the main electric paste storage tube 24 side may be placed in the sub-electrode paste. The filling process of the paste of the canister 24 or the drawing process is omitted. In this way, the refill (fill) of the electric paste of the sub-battery storage tube 24 can be carried in one piece of the glass substrate 8. Each time you move out, it is executed.

Fig. 8 is a view showing a configuration of another embodiment of the coating head of the present invention, and 36 is an ultrasonic sensor, and the same portions as those in Fig. 4 are denoted by the same reference numerals, and the description thereof will not be repeated.

In the figure, in this embodiment, as a means for detecting the level of the electric paste in the sub-electrode storage tube 24 of the coating head 5, instead of the optical fiber sensor 32 of Fig. 4, the ultrasonic sensor is used instead. 36. The distance from the liquid level of the electric paste is detected by the time from the transmission of the ultrasonic wave to the reception, and this point is different from the coating head 5 having the configuration shown in Fig. 4, and the other configurations and operations are the same as those of the coating head shown in Fig. 4. 5 the same.

The liquid level level detecting means is for detecting the amount of the electric paste in the sub-battery accommodating cylinder 24, and therefore, instead of using ultrasonic waves, the sub-electrode accommodating cylinder 24 may be replaced by an outer wall surface. Optical transmission through the sensor or monitoring method used as a mass meter.

As described above, in the embodiment, the initial stable drawing can be realized in a state where the set value of the coating pressure set by the initial condition can be maintained without being affected by the residual capacity of the electric paste in the main electric paste storage tube 23.

Moreover, it is possible to greatly reduce the number of processing operations, maintenance such as washing, and the risk of contamination of foreign matter can be reduced.

Further, not only the usual application, but also the application pressure management time of the sack back can be reduced, and the drawing of the end portion of the start point or the end point can be stabilized.

1‧‧‧Rack

2A, 2B‧‧‧ framework

3A, 3B‧‧‧ Fixed Department

4A~4D‧‧‧movable department

5A~5D‧‧‧ coating head

6‧‧‧Substrate retention plate

7‧‧‧θ-axis rotating platform

8‧‧‧ glass substrate

13‧‧‧Abutment

14‧‧‧Detection Department

15‧‧‧Z-axis servo motor

16‧‧‧Z-axis guide

17‧‧‧Z-axis platform

18‧‧‧Portrait Identification Camera

19‧‧‧Optical distance meter

20‧‧‧Electric paste storage/discharge department

21‧‧‧Nozzle support

22‧‧‧Nozzles

23‧‧‧Main electric paste storage tube (main syringe)

24‧‧‧Sub-battery storage cylinder (secondary syringe)

23A, 24a‧‧‧Electronic paste storage tube mounting part

25‧‧‧Cylinder container for shut-off valve

26‧‧‧Stream block

27,27a‧‧‧Electric paste filling flow path

28‧‧‧Electric paste spouting flow path

29‧‧‧Valve room

29a‧‧‧Front wall

30‧‧‧Return valve

31‧‧‧Applicating pressure-adding hose

32‧‧‧Fiber optic sensor

33‧‧‧Air piping hose

34‧‧‧Inhalation

35‧‧‧Export

36‧‧‧Ultrasonic Sensor

Fig. 1 is a perspective view showing an embodiment of an electric paste applying device of the present invention.

Fig. 2 is a perspective view showing a schematic configuration of an embodiment of the coating head of Fig. 1.

Fig. 3 is a perspective view showing a specific example of the electric paste receiving/discharging portion 20 of the coating head shown in Fig. 2 .

Fig. 4 is a more detailed representation of each part of Fig. 3.

[Fig. 5] Fig. 3 is a perspective view showing a specific example of the configuration in the flow path block of Fig. 4.

Fig. 6 is a view showing a specific example of an electric paste pattern applied to a glass substrate in the embodiment shown in Fig. 1.

Fig. 7 is a flow chart showing a specific example of the coating drawing operation of the electric paste pattern shown in Fig. 5 of the embodiment shown in Fig. 1.

Fig. 8 is a view showing the configuration of another embodiment of the coating head of the present invention.

20‧‧‧Electric paste storage/discharge department

21‧‧‧Nozzle support

22‧‧‧Nozzles

23‧‧‧Main electric paste storage tube (main syringe)

24‧‧‧Sub-battery storage cylinder (secondary syringe)

25‧‧‧Cylinder container for shut-off valve

26‧‧‧Stream block

27‧‧‧Electric paste filling flow path

28‧‧‧Electric paste spouting flow path

29‧‧‧Valve room

30‧‧‧Return valve

31‧‧‧Applicating pressure-adding hose

32‧‧‧Fiber optic sensor

33‧‧‧Air piping hose

Claims (12)

An electric paste coating head characterized in that a coating material storage cylinder for accommodating a coating material is a main electric paste storage cylinder in which the filled coating material is housed, and a sub-electric paste containing the coating material temporarily stored The main electric paste storage tube and the sub-electric paste storage tube are provided with a gas pressure applying means for applying a gas pressure, and the flow of the coating material from the main electric paste storage tube for taking out the outlet of the coating material. a bypass valve is connected to the shutoff valve, and the flow path of the coating material from the shutoff valve is connected to the secondary paste storage cylinder; and the flow path of the coating material from the secondary paste storage cylinder is connected The coating material is ejected to the nozzle of the substrate, and a coating material storage amount detecting means is provided on the upper portion of the sub-electric paste storage tube for detecting the amount of the coating material stored. The electric paste application head according to the first aspect of the invention, wherein the air pressure application means of the main electric paste storage tube is supplied to the sub-electric paste storage tube by the main electric paste storage tube. When the shutoff valve is opened, air pressure is applied to the main electric charge storage cylinder; and the air pressure applying means of the sub-electrode storage cylinder closes the shutoff valve when the coating material is ejected from the nozzle. Air pressure is applied to the secondary electric discharge storage cylinder. The electric paste coating head according to claim 1 or 2, wherein the coating material storage amount detecting means of the sub-electrode storage tube is A sensor that receives the optically reflected light of the liquid surface of the coating material and detects the amount of the coating material stored. The electric paste coating head according to any one of claims 1 to 3, wherein the volume of the sub-electrode storage tube is extremely smaller than the volume of the main paste storage tube. An electric paste coating device is provided with a gantry having one or a plurality of coating heads movably disposed on one or a plurality of gantry stages, and the gantry is mounted on a substrate mounted on the substrate mounting platform on the gantry Moving, the coating head moves the gantry, and the coating head moves the substrate, and the coating material is ejected onto the substrate by the nozzle discharge port, and the coating head is filled with a coating material. a coating material storage cylinder and a nozzle discharge port for discharging the coating material of the coating material storage cylinder; wherein the coating material storage cylinder for storing the coating material of the coating head is made of the coated material to be filled a main electric paste storage tube that is housed, and a sub-electric paste storage tube that temporarily stores the coated material; the main electric paste storage tube and the sub-electric paste storage tube are provided with means for applying air pressure; The flow path of the coating material for taking out the outlet of the coating material is connected to the shutoff valve, and the flow path of the coating material from the shutoff valve is connected to the secondary electric charge storage tube; The secondary paste storage tube The coating material passage ilk, the discharge line is connected to the coating material to the nozzle substrate; Further, in the upper portion of the sub-paste storage tube comprising a coating material electrically detecting an amount of stored A measuring means for detecting the amount of the coating material stored. The electric paste application head according to the fifth aspect of the invention, wherein the air pressure applying means of the main electric paste storage cylinder is supplied to the sub-electric paste storage cylinder by the main electric paste storage cylinder. When the shutoff valve is opened, air pressure is applied to the main electric charge storage cylinder; and the air pressure applying means of the sub-electrode storage cylinder closes the shutoff valve when the coating material is ejected from the nozzle. Air pressure is applied to the secondary electric discharge storage cylinder. The electric paste application device according to claim 5, wherein the coating material storage amount detecting means of the sub-electrode storage tube receives the optically reflected light of the liquid surface of the coating material to detect the preservation of the coating material. A quantity of sensors. The electric paste application device according to any one of claims 5 to 7, wherein the volume of the sub-electric paste storage tube is extremely smaller than the volume of the main electric paste storage tube. A method for coating an electric paste by disposing a gantry having one or a plurality of coating heads movably on one or a plurality of gantry stages, and causing the gantry to mount the substrate on the substrate mounting platform provided on the gantry And moving the coating head to move the gantry, thereby moving the coating head to the substrate, and ejecting the coating material onto the substrate by the nozzle discharge port, wherein the coating head is provided a coating material storage cylinder filled with a coating material and a nozzle discharge port for discharging the coating material of the coating material storage cylinder; The coating material storage cylinder for accommodating the coating material of the coating head is composed of a main electric paste storage cylinder in which the filled coating material is housed, and a sub-electric paste storage cylinder in which the coating material is temporarily stored. The main electric paste storage cylinder and the sub-electric paste storage cylinder are capable of applying air pressure; and the flow path of the coating material from the main electric paste storage cylinder for taking out the outlet of the coating material is connected to the shut-off valve The flow path of the coating material from the shutoff valve is connected to the sub-battery storage tube; and the flow path of the coating material from the sub-electrode storage tube is connected to a nozzle that ejects the coating material to the substrate Further, the amount of the coating material stored in the upper portion of the sub-battery storage tube is detected, and the coating material is periodically replenished by the main electric paste storage tube in accordance with the decrease in the coating material in the sub-electrode storage tube. At the same time, the coating of the coating material is performed on the substrate. The method of applying the electric paste according to the ninth aspect of the invention, wherein the main electric paste storage cylinder is supplied with the coating material to the sub-battery storage cylinder, and the main electric paste is opened while the shut-off valve is opened. Air pressure is applied to the accommodating cylinder; when the coating material is ejected from the nozzle, air pressure is applied to the sub-electrode storage cylinder while the shut-off valve is closed. The method for coating an electric paste according to claim 9 or 10, wherein the amount of the coating material stored in the sub-electrode storage tube is obtained by The optically reflected light of the liquid surface of the coating material in the sub-pad storage cylinder is collected and detected. The electric paste application method according to claim 9, 10 or 12, wherein the volume of the sub-electric paste storage cylinder is extremely smaller than the volume of the main electric paste storage cylinder.