TW201300960A - Light irradiation device and light irradiation method - Google Patents

Abstract

To provide a light irradiation device and a light irradiation method capable of forming a pattern faithful to the pattern of a mask and with high resolution. The light irradiation device includes: a light emission part having a light source element array in which a plurality of light source elements composed of a short arc type discharging lamp and a reflector reflecting light from the discharging lamp and arranged so as to surround the discharging lamp are arranged adjacent to one another in one direction; and a mask in which a lot of linear light shielding parts and a lot of translucent parts respectively extending in a direction perpendicular to the one direction are arranged so as to be alternately adjacent in the one direction. An irradiation object is irradiated, via the mask, with the light from the light emission part.

Description

Light irradiation device and light irradiation method

The present invention relates to a light irradiation device and a light irradiation method used for forming a line pattern, and more specifically, in the manufacturing process of, for example, a patterned phase difference film, in order to irradiate light to a photopolymerizable liquid crystal material or A light irradiation device and a light irradiation method to which the light alignment film is applied.

The 3D image display device is a three-dimensional image display device. As a 3D image display device, it has been developed for use in movie and television reproduction, and it is expected to be used in playground facilities, store displays, medical treatment, etc. in recent years. Come to be noticed.

FIG. 20 is an explanatory diagram showing a schematic configuration of an example of a 3D image display device. The 3D image display device is a liquid crystal display (LCD) 3D image transmitting unit 80 that is disposed by the right-eye image transmitting unit 81 and the left-eye image transmitting unit 82, and is provided in the 3D image transmitting unit 80. The front-eye image display unit 86 disposed in front of the right-eye image transmitting unit 81 and the left-eye image display unit disposed in front of the left-eye image transmitting unit 82. A thin film 85 for forming a 3D image display body composed of 87 and a light source 88 provided behind the 3D image transmitting unit 80 are formed. The 3D image display device transmits a right-eye image from the right-eye image transmitting unit 81, and transmits a left-eye image from the left-eye image transmitting unit 82. For example, the right-eye image is imported to the right eye. The image display unit 86 directly transmits the image to the observer, and the left-eye image is introduced to the left-eye image display unit 87, and is rotated to 90° in the vibration direction of the polarized light, and then transmitted to the observer. Then, the observer captures the vibration direction of the polarized light by using polarized glasses including a polarizing plate for the right eye that transmits only the image for the right eye and a lens for the left eye that transmits only the image for the left eye. The right-eye image and the left-eye image are different in the observer, and the composite image of the left-eye image and the right-eye image is recognized as one stereoscopic image. Such a 3D image display device is described, for example, in Patent Document 1.

Then, in the 3D image display device, the left-eye image and the right-eye image are recognized by the observer's left eye and right eye, respectively, and the stereoscopic image is recognized in the observer's brain, and the left-eye image and the right are distinguished. For ophthalmic imaging, a patterned retardation film is used.

Further, in a liquid crystal display device or the like, a patterned retardation film having a liquid crystal polymer layer is proposed as a means for improving the performance (see Patent Document 2).

As shown in FIG. 21(a), the patterned retardation film is formed on the film substrate 90 via the alignment film 91, and the light-shielding liquid crystal material layer 92 is formed by a plurality of light-shielding portions 96 and The plurality of light transmitting portions 97 are arranged side by side to form the mask 95 so as to illuminate the light, whereby the liquid crystal polymer layer 93 of the stripe pattern is formed as shown in FIG. 21(b), and then, by removing the remaining The photopolymerizable liquid crystal material layer 92 is obtained.

In the production of such a patterned retardation film, the mass energy is improved by irradiating the photopolymerizable liquid crystal material layer 92 with a wide range of active energy rays such as ultraviolet light, and generally, a light having a long arc discharge lamp is used. In the irradiation device, the mask 95 is disposed such that the direction in which the light shielding portion 96 and the light transmitting portion 97 extend (the direction perpendicular to the paper surface in FIG. 21) is orthogonal to the longitudinal direction of the long arc discharge lamp.

However, in such a light irradiation device, there are the following problems.

That is, since the long arc type discharge lamp is a line light source, the light emitted from the discharge lamp cannot be made parallel to the parallel light in the longitudinal direction of the discharge lamp by the optical system. To this end, as shown in Fig. 22, a portion of the light transmitted through the light transmitting portion 97 of the mask 95 is obliquely intersected in the plane direction and incident on the mask 95, thereby illuminating the light located as the object to be irradiated. The region immediately below the edge of the light-shielding portion 96 of the polymerizable liquid crystal material layer 92 is difficult to form the liquid crystal polymer layer 93 having a high-resolution pattern loyal to the pattern of the mask 95.

[Previous Technical Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2002-185983

[Patent Document 2] Japanese Patent Laid-Open Publication No. 2009-276664

The present invention has been made in view of the above circumstances, and an object thereof is to provide a light irradiation device and a light irradiation method capable of forming a pattern having a high resolution in a pattern loyal to a mask.

A light-emitting device according to the present invention is characterized in that the light-emitting portion is provided with a light-emitting portion, and is composed of a short-arc type discharge lamp and a reflector that surrounds the discharge lamp and reflects light from the discharge lamp. The light source elements are arranged in a plurality of direction in a plurality of directions, and the masks are arranged in a line with a plurality of linear light-shielding portions and a plurality of light-transmitting portions extending in a direction perpendicular to the one direction. The light is emitted from the light emitting portion through the mask to the object to be irradiated.

In the light irradiation device of the present invention, it is preferable that a polarizing element is disposed on the optical path between the light emitting portion and the mask.

Furthermore, it is preferable to condense light rays from the light-emitting portion into a linear shape extending in the one direction, and to illuminate the illuminating member through the mask.

Further, the reflector has a paraboloidal light reflecting surface centered on the optical axis thereof, and the concentrating member may be constituted by a cylindrical mirror having a parabolic light reflecting surface.

Further, the reflector has a paraboloidal light reflecting surface centered on the optical axis thereof, and the concentrating member may have a cylindrical convex lens.

Further, the reflector has a spheroidal light reflecting surface centered on the optical axis thereof, and the concentrating member is a cylindrical mirror having a light reflecting surface having an elliptical cross section, and The light source element of the light emitting portion may be formed by a plurality of cylindrical convex lenses arranged side by side in the one direction.

Further, the light emitting portion has at least two light source element rows extending in the same direction, and the light source element rows are connected to a center point between electrodes of the discharge lamp of the light source element associated with one light source element row, and The line closest to the light source element and the center point between the electrodes of the discharge lamp of the light source element associated with the other light source elements is preferably disposed obliquely to a line extending in the one direction.

Moreover, in the light irradiation device of the present invention, it is preferable to have a conveying means for conveying the object to be irradiated to the direction in which the light transmitting portion of the mask extends.

In the light irradiation device, the object to be irradiated is a film, and the conveying means is a roller that is conveyed by contacting the object to be irradiated, and it is preferable that the object to be irradiated is irradiated with light at a position where the object is irradiated.

Further, in the light irradiation device of the present invention, the reflector has a paraboloidal light reflecting surface centered on the optical axis thereof, and the light from the light emitting portion is arranged to extend as described above. A configuration of a plane mirror that reflects light in a direction and is directed toward the mask.

Further, in the light irradiation device of the present invention, the object to be irradiated is preferably a photopolymerizable liquid crystal material or an alignment film material for producing a retardation film.

In the light irradiation method of the present invention, the light emitted from the light emitting portion is irradiated to the object to be irradiated through the mask; the light emitting portion has a discharge lamp of a short arc type and surrounds the light Disposed in a manner of a discharge lamp, and a light source element formed by reflecting a plurality of light source elements of a reflector from the light of the discharge lamp and arranged in a direction; the mask is perpendicular to the aforementioned one A plurality of linear light-shielding portions and a plurality of light-transmitting portions extending in the direction of the direction are arranged side by side in the same direction.

In the light irradiation method of the present invention, the polarized light may be irradiated by the polarizing element disposed on the light path between the light emitting portion and the mask.

Further, in the light irradiation method of the present invention, the light from the light emitting portion is condensed by the condensing member into a line extending in the one direction, and the collected light is transmitted through the mask. It is preferable to irradiate the irradiated object.

Further, in the light irradiation method of the present invention, it is preferable that the object to be irradiated is irradiated with light when the object to be irradiated is conveyed in a direction in which the light-transmitting portion of the mask extends.

In the light irradiation method, the object to be irradiated is a film, and the object to be irradiated is conveyed by a conveying means having a roller that is conveyed by contacting the object to be irradiated, and the roller is contacted with the object to be irradiated It is better to illuminate the light.

Further, in the light irradiation method of the present invention, the object to be irradiated is preferably a photopolymerizable liquid crystal material or an alignment film material for producing a retardation film.

According to the present invention, as a discharge lamp constituting a light source element, a short arc type which is a point light source is used, and light is formed by arranging a plurality of light source elements having such a discharge lamp in a direction along one direction. Since the light-emitting portion is formed, the light emitted from the individual discharge lamps constituting the light source element row of the light source element row can be parallel light parallel to each other in one direction of the light source elements, thereby preventing or suppressing the light from being irradiated to be irradiated. The state of the area under the light-shielding portion of the mask of the object is such that a pattern of a high-resolution image that is loyal to the mask can be formed.

Hereinafter, embodiments of the present invention will be described in detail.

[First Embodiment]

Fig. 1 is a perspective view showing a schematic configuration of a light irradiation device according to a first embodiment, and Fig. 2 is a side cross-sectional view showing the light irradiation device shown in Fig. 1 taken along line AA, and Fig. 3 is a view showing a cut line taken along line BB. A top cross-sectional view of the light irradiation device shown in Fig. 1.

In the light irradiation device of the first embodiment, for example, in order to manufacture a patterned retardation film, the light emitting portion 10 having the light source element array 11 including a plurality of light source elements 12, for example, three or more The light from the light emitting portion 10 is condensed into a linear concentrating member 20 extending in one direction of the light source element 12, which will be described later, and the light ray from the concentrating member 20 is trimmed into a stripe-shaped mask 30. And a conveying means 40 for conveying the irradiated object W.

In the light source element row 11 constituting the light emitting portion 10, as shown in Fig. 4, the light source elements 12 are arranged side by side in one direction (the direction perpendicular to the paper surface in Fig. 2. Hereinafter, this direction is referred to as "x" Direction".) Configuration. The light source elements 12 of the light source element array 11 each have a short arc type discharge lamp 13 formed by arranging a pair of opposite electrodes (not shown) along the tube axis in the arc tube 14 and surrounding the light source element 12 The discharge lamp 13 is arranged in such a manner as to reflect the reflector 15 from the light of the discharge lamp 13.

As the discharge lamp 13, an ultrahigh pressure mercury lamp in which mercury, a rare gas, and a halogen are sealed in the arc tube 14 to emit ultraviolet light having a wavelength of, for example, 270 to 450 nm can be efficiently emitted. In the discharge lamp 13, the distance between the electrodes between the pair of electrodes is, for example, 0.5 to 2.0 mm, and the amount of mercury enclosed is, for example, 0.08 to 0.30 mg/mm ³ .

In the light irradiation device according to the first embodiment, the reflector 15 is constituted by a parabolic mirror having a paraboloidal light reflecting surface 16 centered on the optical axis C thereof, and the reflector 15 is based on its optical axis C. It is disposed on the tube axis of the arc tube 14 of the discharge lamp 13, and its focal point F is disposed at a bright spot between the electrodes of the discharge lamp 13, and is fixed to the discharge lamp 13 by the fixing member 18 in this state.

Further, in the light irradiation device according to the first embodiment, the light concentrating member 20 is constituted by a cylindrical parabolic mirror having a parabolic cross section of a light reflecting surface 21 perpendicular to the x direction and extending in the x direction. The concentrating member 20 is disposed in front of the light emitting surface 17 perpendicular to the optical axis C of each of the reflectors 15 of the light emitting portion 10, and the focal point f is disposed on the surface of the object W to be irradiated.

The concentrating member 20 may be applied by a cold mirror that transmits only ultraviolet light of a desired wavelength and transmits unnecessary visible light and infrared light.

The mask 30 is a rectangular plate shape in the x direction, and is disposed below the concentrating member 20 along a plane perpendicular to the optical axis L of the reflected light from the condensing member 20. The mask 30 is a plurality of linear light-shielding portions and a plurality of transparent portions extending in a direction perpendicular to the x direction (the horizontal direction in FIGS. 2 and 3, hereinafter referred to as "y direction"). The light parts are arranged side by side in the x direction.

Fig. 5 is an explanatory view showing an example of a specific structure of the mask 30, (a) is a plan view, and (b) is a side view. In the mask 30, for example, on one surface of the light-transmitting substrate 31 made of quartz glass, for example, a plurality of linear light-shielding films 32 made of chrome are arranged side by side between the required spaces, thereby forming a light-shielding In the region of the film 32, a linear light-shielding portion 35 is formed, and the light-transmitting portion 36 is formed by a region between the adjacent light-shielding films 32. The mask 30 is incident on the strip-shaped light extending in the x direction along the light-shielding portion 35 and the light-transmitting portion 36 as indicated by a broken line Lb in FIG. 5(a).

The object to be irradiated W is transported in the y direction by the transport means 40 to be described later, so that the mask 30 is provided for the object W to be separated from each other. The minimum interval G between the mask 30 and the object to be irradiated W is, for example, 50 to 1000 μm.

Further, the irradiated object W is transported in a state of being brought into contact with the drum 41 to be described later, and the interval between the mask 30 and the irradiated object W is changed as the irradiated object W is transported to the y direction. The effective irradiation width d from which the light from the concentrating member 20 of the mask 30 is incident is the allowable variation value of the interval between the mask 30 and the object to be irradiated W, the radius of the drum 41, and the reduction is possible. It is better inside. This is due to the following reasons. In other words, when the object to be irradiated W is transported and passes through the region directly under the mask 30, the interval between the object W and the mask 30 first becomes smaller as the object W moves in the y direction. When it reaches the center of the mask 30, it becomes larger as the object W moves in the y direction. However, as the minimum effective irradiation width d increases, the range of variation of the interval increases, so that it is impossible to form a loyalty to be described later. A pattern of masks 30 and a high resolution pattern.

Specifically, as shown in FIG. 6, when the allowable variation value of the interval between the mask 30 and the object to be irradiated W is a, and the radius of the drum 41 is r, the effective irradiation width d can be d. =√{r ² -(ra) ² }×2 to find. In this calculation formula, it is theoretically necessary to consider the thickness of the irradiated object W. However, since the thickness of the irradiated object W is extremely small compared to the radius of the drum 41, it can be ignored. In the specific example, when the allowable variation a of the interval between the mask 30 and the object to be irradiated W is 50 μm, and the radius r of the drum 41 is 300 mm, the effective irradiation width d is preferably about 11 mm or less. Therefore, the radiation of each of the short-arc-shaped discharge lamps 13 from the light-emitting portion 10 described above is condensed by the respective reflectors 15 and the condensing member 20 in a line extending in the x direction, contributing to the light. The light is concentrated in the range of the effective irradiation width d, and further, a pattern having a high resolution which is loyal to the pattern of the mask 30 is promoted.

The transport means 40 has a drum 41 that contacts the irradiated object W and transports the irradiated object W. Specifically, the drum 41 is disposed so as to be in a position immediately below the mask 30 in contact with the object W, and the rotation axis (not shown) of the drum 41 is disposed in a posture extending in the x direction, and the drum 41 is disposed by the drum 41. When rotated, the irradiated object W is transported to the y direction.

When the object to be irradiated is in the form of a film, the conveying means 40 has the drum 41 that contacts the object W and conveys the object W, and by reducing the eccentricity of the drum 41, the film of the mask 30 and the contact roller 41 can be used. The interval between the irradiated objects W is maintained constant.

Further, since the water cooling mechanism is provided by the drum 41, even if the irradiated object W is irradiated with ultraviolet light of high illuminance, the irradiated object W can be cooled by the roller 41 contacting the irradiated object W, so that the irradiated object W can be prevented from being irradiated. The deformation of the object W such as shrinkage.

In the above-described light irradiation device, as shown in FIG. 2, the light emitted from the light emitting portion 10 is irradiated to the object to be irradiated W that is transported in the y direction by the transport means 40 via the condensing member 20 and the mask 30. . Specifically, in the light emitting portion 10, the light emitted from the discharge lamp 13 of each of the light source elements 12 of the light source element array 11 is reflected by the light reflecting surface 16 of the reflector 15 of the light source element 12, thereby becoming The parallel light along the optical axis C of the reflector 15 is emitted from the light exit surface 17 toward the light collecting member 20. After that, the light rays that are the parallel light emitted from the light emitting portion 10 are reflected downward by the light reflecting surface 21 of the light collecting member 20, and are incident while being concentrated in a line extending in the x direction. Mask 30. At this time, the light incident on the mask 30 is parallel light parallel to each other in the x direction. Then, the light incident on the mask 30 is trimmed into a stripe shape by the light shielding portion 35 and the light transmitting portion 36 of the mask 30 shown in FIG. 5, and is irradiated onto the object W to be irradiated. The surface of the object W where the roller 41 is in contact forms a stripe-shaped light irradiation region corresponding to the pattern of the light-shielding portion 35 and the light-transmitting portion 36 of the mask 30, and the irradiated object W is transported in the y direction by the transport means 40. Thereby, the desired light irradiation treatment is achieved for the irradiated object W.

In such a light irradiation device, a photopolymerizable liquid crystal material is used, and a patterned retardation film can be produced as described below.

First, as shown in Fig. 7(a), a liquid material for an alignment film is applied to the film substrate 51 and dried or cured to form an alignment film material layer 52A, and the alignment film material layer is used. The polishing treatment is applied to 52A, whereby the alignment film 52 is formed on the film substrate 51 as shown in Fig. 7(b). Next, as shown in FIG. 7(c), a photopolymerizable liquid crystal material layer 53A is formed on the alignment film 52, and then, for the photopolymerizable liquid crystal material layer 53A, selective exposure processing is performed by the above-described light irradiation device. A part of the photopolymerizable liquid crystal material layer 53A is cured, whereby the liquid crystal polymer layer 53 patterned in a stripe shape is formed as shown in FIG. 7(d). Then, by removing the photopolymerizable liquid crystal material layer 53A on the alignment film 52, as shown in FIG. 7(e), the liquid crystal polymer layer 53 can be formed in a stripe shape on the film substrate 51 via the alignment film 52. A patterned retardation film is constructed.

According to the light-emitting device of the first embodiment, since the discharge lamp 13 constituting the light source element 12 is a short-arc type of a point light source, the discharge lamp 13 and the reflector 15 having the paraboloid-shaped light reflecting surface 16 are provided. Since the plurality of light source elements 12 are arranged such that the light source element rows 11 are arranged side by side in one direction (x direction) to constitute the light emitting portion 10, the light source elements 12 constituting the light source element array 11 are different from each other. The light emitted from the discharge lamp 13 is parallel light which is parallel to each other in the x direction in which the light source elements 12 are arranged by the respective reflectors 15 of the light source element 12, whereby the light from the light collecting member 20 is as shown in the figure. As shown in FIG. 8, the plane direction of the light transmitting portion 36 of the mask 30 is orthogonal or slightly orthogonal to the light transmitting portion 36 of the mask 30, and is transmitted through the light transmitting portion 36. Thereby, it is prevented or suppressed that the light irradiated to the area immediately below the light-shielding portion 35 of the mask 30 of the object to be irradiated is irradiated with light, and as a result, a pattern having a high resolution in the pattern of the mask 30 can be formed.

[Second Embodiment]

Fig. 9 is a side cross-sectional view showing the structure of a light irradiation device according to a second embodiment.

In the light irradiation device of the second embodiment, for example, in order to manufacture a patterned retardation film, the light emitting portion 10 having the light source element array 11 including a plurality of light source elements 12, for example, three or more The light from the light emitting portion 10 is condensed into a linear concentrating member 20 extending in one direction (x direction) in the direction in which the light source elements 12 are described later, and the light from the condensing member 20 is trimmed into stripes. The mask 30 and the transport means 40 for transporting the irradiated object W are constituted. Here, the mask 30 and the conveying means 40 have the same structure as the mask 30 and the conveying means 40 of the light irradiation device of the first embodiment.

In the light source element row 11 constituting the light emitting portion 10, the light source elements 12 are arranged side by side in the x direction (the direction perpendicular to the paper surface in Fig. 9) (see Fig. 4). The light source elements 12 of the light source element array 11 each have a short arc type discharge lamp 13 formed by arranging a pair of opposite electrodes (not shown) along the tube axis in the arc tube 14 and surrounding the light source element 12 The discharge lamp 13 is arranged in such a manner as to reflect the reflector 15 from the light of the discharge lamp 13. Here, the discharge lamp 13 has the same structure as the discharge lamp 13 of the light irradiation device of the first embodiment.

In the light irradiation device of the second embodiment, the reflector 15 is constituted by a parabolic mirror having a paraboloidal light reflecting surface 16 centered on the optical axis C thereof, and the reflector 15 is based on its optical axis C. It is disposed on the tube axis of the arc tube 14 of the discharge lamp 13, and its focal point F is disposed at a bright spot between the electrodes of the discharge lamp 13, and is fixed to the discharge lamp 13 by the fixing member 18 in this state.

Further, in the light irradiation device of the second embodiment, the light collecting member 20 is disposed to extend in the x direction, and condenses the light from the light irradiation mechanism 10 into a linear column extending in one direction. The convex lens 22 is composed of a plane mirror 23 that reflects the light from the cylindrical convex lens 22 toward the mask 30.

The cylindrical convex lens 22 of the condensing member 20 is disposed in front of the light emitting surface 17 perpendicular to the optical axis C of each of the reflectors 15 of the light emitting portion 10, and the convex surface thereof becomes the light emitting surface, and the focal point f is located. It is disposed in such a manner as to be projected on the surface of the object W to be irradiated by the plane mirror 23.

The plane mirror 23 of the condensing member 20 is disposed above the mask 30, and the light reflecting surface 24 of the plane mirror is disposed in a state of being inclined at an angle of 45° with respect to the optical axis C of the reflector 15, for example.

In the light irradiation device described above, the light emitted from the light emitting portion 10 is irradiated to the object W to be irradiated in the y direction by the transport means 40 via the condensing member 20 and the mask 30. Specifically, in the light emitting portion 10, the light emitted from the discharge lamp 13 of each of the light source elements 12 of the light source element array 11 is reflected by the light reflecting surface 16 of the reflector 15 of the light source element 12, thereby becoming The parallel light along the optical axis C of the reflector 15 is emitted from the light exit surface 17 toward the light collecting member 20. Then, the light beam which is the parallel light emitted from the light emitting portion 10 is condensed into a line extending in the x direction by the cylindrical convex lens 22 of the condensing member 20, and the light reflecting surface of the plane mirror 23 is used. The reflection 24 is directed downward, thereby entering the mask 30. At this time, the light incident on the mask 30 is parallel light parallel to each other in the x direction. Then, the light incident on the mask 30 is trimmed into a stripe shape by the light shielding portion 35 and the light transmitting portion 36 of the mask 30, and is irradiated onto the object W to be irradiated, whereby the roller 41 of the object W to be irradiated The surface of the contact portion forms a stripe-shaped light irradiation region corresponding to the pattern of the light shielding portion 35 and the light transmission portion 36 of the mask 30, and the irradiated object W is transported in the y direction by the transport means 40, whereby The irradiated object W is subjected to a desired light irradiation treatment.

According to the light-irradiating apparatus of the second embodiment, since the discharge lamp 13 constituting the light source element 12 is a short-arc type of a point light source, the discharge lamp 13 and the reflector 15 having the paraboloid-shaped light reflecting surface 16 are provided. Since the plurality of light source elements 12 are arranged such that the light source element rows 11 are arranged side by side in one direction (x direction) to constitute the light emitting portion 10, the light source elements 12 constituting the light source element array 11 are different from each other. The light emitted by the discharge lamp 13 is parallel light which is parallel to each other in one direction of the light source element 12 by the respective reflectors 15 of the light source element 12, thereby preventing or suppressing the shielding of the object W to be irradiated. The area immediately below the light shielding portion 35 of the cover 30 is irradiated with light, and as a result, a pattern having a high resolution in a pattern loyal to the mask 30 can be formed.

[Third embodiment]

Fig. 10 is a side cross-sectional view showing the structure of a light irradiation device according to a third embodiment.

In the light irradiation device of the third embodiment, for example, in order to manufacture a patterned retardation film, a light emitting portion 10 having a light source element array 11 composed of, for example, three or more light source elements 12 will be used. The light from the light emitting portion 10 is condensed into a linear concentrating member 20 extending in one direction (x direction) in the direction in which the light source elements 12 are described later, and the light from the condensing member 20 is trimmed into stripes. The mask 30 and the transport means 40 for transporting the irradiated object W are constituted. Here, the mask 30 and the conveying means 40 have the same structure as the mask 30 and the conveying means 40 of the light irradiation device of the first embodiment.

In the light source element row 11 constituting the light emitting portion 10, the light source elements 12 are arranged side by side in the x direction (the direction perpendicular to the paper surface in Fig. 10) (see Fig. 4). The light source elements 12 of the light source element array 11 each have a short arc type discharge lamp 13 formed by arranging a pair of opposite electrodes (not shown) along the tube axis in the arc tube 14 and surrounding the light source element 12 The discharge lamp 13 is arranged in such a manner as to reflect the reflector 19 from the light of the discharge lamp 13. Here, the discharge lamp 13 has the same structure as the discharge lamp 13 of the light irradiation device of the first embodiment.

In the light irradiation device according to the third embodiment, the reflector 19 is constituted by a parabolic mirror having a paraboloidal light reflecting surface 16 centered on the optical axis C thereof, and the reflector 19 is optical axis C thereof. It is located on the tube axis of the arc tube 14 of the discharge lamp 13, and its first focus F is located at a bright spot between the electrodes of the discharge lamp 13, and its second focus F2 is located between the light irradiation portion 10 and the light collecting member 20. In this state, the discharge lamp 13 is fixed by the fixing member 18.

Further, in the light irradiation device according to the third embodiment, the concentrating member 20 is a columnar elliptical mirror 25 extending in the x direction by a light reflecting surface 26 having an elliptical cross section perpendicular to the x direction, and The composite lens 27 is incident on the light reflected by the columnar elliptical mirror 25.

The columnar elliptical mirror 25 of the condensing member 20 is disposed in front of the light exit surface 17 of the optical axis C of each of the reflectors 19 of the light emitting portion 10, and the first focus f1 is located at the second focus F2 of the reflector 19. The second focus f2 is placed on the surface of the object W to be irradiated.

As shown in FIG. 11, the composite lens 27 of the condensing member 20 is configured such that the plurality of cylindrical convex lenses 28 corresponding to the light source elements 12 of the light emitting portion 10 are arranged side by side in the x direction (the horizontal direction in FIG. 11). Further, the cylindrical convex lens 28 of the composite lens 27 is disposed such that its convex surface is in the direction of the light incident surface, and the focal point is placed on the second focus F2 of the reflector 15 projected by the columnar elliptical mirror 25.

In the light irradiation device described above, the light emitted from the light emitting portion 10 is irradiated to the object W to be irradiated in the y direction by the transport means 40 via the condensing member 20 and the mask 30. Specifically, in the light emitting portion 10, the light emitted from the discharge lamp 13 of each of the light source elements 12 of the light source element array 11 is reflected by the light reflecting surface 16 of the reflector 19 of the light source element 12, whereby The light exit surface 17 is emitted toward the columnar elliptical mirror 25 of the light collecting member 20. After that, the light emitted from the light emitting portion 10 is reflected downward by the light reflecting surface 26 of the columnar elliptical mirror 25, and is condensed to form a line extending in the x direction, and is then passed through the composite lens 27 The shot is incident on the mask 30. At this time, the light incident on the mask 30 is formed by the cylindrical convex lenses 28 of the composite lens 27, and is parallel light parallel to each other in the x direction. Then, the light incident on the mask 30 is trimmed into a stripe shape by the light shielding portion 35 and the light transmitting portion 36 of the mask 30, and is irradiated onto the object W to be irradiated, whereby the roller 41 of the object W to be irradiated The surface of the contact portion forms a stripe-shaped light irradiation region corresponding to the pattern of the light shielding portion 35 and the light transmission portion 36 of the mask 30, and the irradiated object W is transported in the y direction by the transport means 40, whereby The irradiated object W is subjected to a desired light irradiation treatment.

According to the light irradiation device of the third embodiment, since the discharge lamp 13 constituting the light source element 12 is a short arc type of a point light source, the discharge lamp 13 and the reflector having the light reflecting surface 16 having a spheroidal shape are rotated. The plurality of light source elements 12 of the nineteen light source elements 12 are arranged side by side in the one direction (x direction) to form the light emitting element row 11, and thus are emitted from the light source element 12 constituting the light source element row 11. The light beam is formed by the cylindrical convex lens 28 of the composite lens 27 constituting the light collecting member 20, and is parallel light parallel to each other in one direction of the light source elements 12, thereby preventing or suppressing the mask located on the object W to be irradiated. The area immediately below the light-shielding portion 35 of 30 is irradiated with light, and as a result, a pattern having a high resolution in a pattern loyal to the mask 30 can be formed.

[Fourth embodiment]

Fig. 12 is a side cross-sectional view showing the structure of a light irradiation device according to a fourth embodiment.

In the light irradiation device of the fourth embodiment, for example, in order to manufacture a patterned retardation film, in addition to the arrangement of the polarizing element 45 in the optical path between the condensing member 20 and the mask 30, the first embodiment is implemented. The light irradiation device of the form has the same structure.

Fig. 13 is an explanatory view showing a structure of an example of a polarizing element, (a) is a perspective view, and (b) is a cross-sectional view taken along line A-A of (a). The polarizing element 45 is a wire grid polarizing element, for example, on one surface of a rectangular transparent substrate 46 made of glass or quartz glass, and a plurality of metal leads 47 are arranged at regular intervals in a direction parallel to one side of the transparent substrate 46. . The arrangement pitch of the metal wires 47 is set to be equal to or lower than the wavelength of the light from the light emitting portion 10. As the metal material constituting the metal lead 47, it is preferable to use a light reflectance higher, and specifically, aluminum, silver, or the like is preferably used.

In such a polarizing element (wire-gate polarizing element) 45, when the light of the metal lead 47 having a pitch of about twice or more is irradiated from the surface on which the metal lead 47 is disposed, the vibration component of the light is formed by reflection or absorption. The component vibrating in the direction in which the metal wire 47 extends is transmitted to the component vibrating in a direction perpendicular to the direction in which the metal wire 47 extends, and is used as linear polarized light.

In the light irradiation device described above, the light emitted from the light emitting portion 10 is irradiated to the object W to be transported in the y direction by the transport means 40 via the light collecting member 20, the polarizing element 45, and the mask 30. At this time, since the light from the condensing member 20 is linearly polarized by the polarizing element 45, the linearly polarized light is irradiated onto the irradiated object W.

In such a light irradiation device, a material for a light alignment film is used, and a patterned retardation film can be produced as described below.

First, as shown in FIG. 14(a), a liquid photo-alignment film material is applied to the film substrate 51, and dried or cured to form a photo-alignment film material layer 55A.

Next, the selective exposure treatment by the linear light beam is performed by the light irradiation device for the light alignment film material layer 55A, and the film substrate 51 is striped on the film substrate 51 as shown in FIG. 14(b). The patterned first photo-alignment film 55 is formed.

Further, by a more suitable light irradiation device, the full-exposure process is performed by linearly polarized light having a polarization direction different from that of the polarized light irradiated in the above-described FIG. 14(b) by 90°, thereby being as shown in FIG. 14(c). The second photo-alignment film 56 is formed between the adjacent first photo-alignment films 55.

Then, as shown in FIG. 14(d), the photopolymerizable liquid crystal material layer 57A is formed on the surfaces of the first photo-alignment film 55 and the second photo-alignment film 56, and then, for the photopolymerizable liquid crystal material layer 57A, The photopolymerizable liquid crystal material layer 57 is cured by a total exposure process by a suitable light irradiation device, whereby the first photo-alignment film 55 is formed as shown in FIG. 14(e). The liquid crystal polymer layer portion 57 and the liquid crystal polymer layer 59 which is formed by patterning the second liquid crystal polymer layer portion 58 different from the liquid crystal alignment layer portion of the first liquid crystal polymer layer portion 57, thereby obtaining a pattern Phase difference film.

According to such a light irradiation device, the same effect as the light irradiation device of the first embodiment can be obtained, and the linearly polarized light can be irradiated to the object W, which is very suitable as a material for using the light alignment film for patterning. A light irradiation device for a retardation film.

[Fifth Embodiment]

Fig. 15 is a front elevational view showing a light emitting portion of the light irradiation device according to the fifth embodiment. The light irradiation device of the fifth embodiment has the same structure as the light irradiation device of the first embodiment except for the light emitting portion.

The light emitting portion 10 of the light irradiation device is configured such that two light source element rows 11a and 11b extend in the same direction and are arranged side by side. Specifically, the light source element rows 11a and 11b are each arranged such that the plurality of light source elements 12 are arranged side by side in the one direction (x direction), and the light source elements 12 each have a short arc type discharge lamp 13 and surround the discharge. The lamp 13 is configured to reflect the reflector 15 from the light of the discharge lamp 13. The discharge lamp 13 and the reflector 15 have the same structure as the discharge lamp 13 and the reflector 15 of the light irradiation device of the first embodiment.

Then, the two light source element rows 11a, 11b are connected to the center point between the electrodes of the discharge lamp 13 of the light source element 12 associated with the light source element row 11a, and are closest to the light source element 12 and the other light source element array 11b. A straight line T of the center point between the electrodes of the discharge lamp 13 of the light source element 12 is disposed obliquely to a straight line X extending in the x direction.

FIG. 16 is a graph showing the illuminance distribution in the x direction of the light irradiation region when the light from the light emitting portion is collected by the light collecting member in the light irradiation device according to the fifth embodiment. In this figure, the vertical axis reveals the relative contrast, the horizontal axis reveals the relative position in the x direction, and the curve (1) is the illuminance distribution curve of the light irradiation region due to the light from one of the light source element columns, and the curve (2) is derived from The illuminance distribution curve of the light irradiation region by the light of the other light source element row, and the curve (3) is the illuminance distribution curve of the light irradiation region due to the light from the entire light exit portion.

As shown in FIG. 16, in the illuminance distribution caused by the light from one of the light source element rows and the other of the light source element rows, the light irradiation regions caused by the light rays from the light source elements of the light source element row are mutually Without overlapping and side by side, the difference between the peak value of illumination and the bottom value is extremely large. On the other hand, in the illuminance distribution due to the light from the entire light-emitting portion, light irradiation from the light source region of one of the light source element rows and light irradiation from the other light source element row can be understood. When the regions overlap, the peak position of the illuminance of the light-irradiated region due to the light from one of the light source element rows is different from the peak position of the illuminance of the light-irradiated region caused by the light from the other light source element row, so the illuminance is The difference between the peak value and the bottom value is extremely small, and a uniform illuminance distribution can be obtained.

According to the light irradiation device of the fifth embodiment, the same effect as that of the light irradiation device of the first embodiment can be obtained, and the light emitting portions are arranged in a specific positional relationship between the two light source element rows 11 extending in the same direction. According to this configuration, it is possible to provide light having a uniform illuminance distribution in the x direction.

[Sixth embodiment]

Fig. 17 is a perspective view showing a schematic configuration of a light irradiation device according to a sixth embodiment, and Fig. 18 is a side cross-sectional view showing the light irradiation device shown in Fig. 17 taken along line A-A.

In the light-emitting device of the sixth embodiment, for example, in order to form a linear pattern on the flat object to be irradiated W, a plane mirror 70 is disposed in front of the light-emitting direction of the light-emitting portion 10 instead of the light-collecting member. It has the same structure as the light irradiation device of the first embodiment.

The flat mirror 70 is formed on one surface of a flat substrate made of quartz glass, for example, and reflects only ultraviolet light of a target wavelength, and is covered with a cold light mirror that transmits unnecessary visible light and infrared rays to form a light reflecting surface 71.

The plane mirror 70 is a normal line of the light reflecting surface 71, and the optical axis C of the reflector 15 is inclined at an angle of, for example, 45° (the state in which the reflected light from the plane mirror 70 is incident from the normal direction to the mask 30) Configuration.

The object to be irradiated W is, for example, a substrate made of quartz glass and a polymer material for manufacturing a liquid crystal panel, and a striped liquid crystal polymer layer (53, 59) shown in Fig. 7 or Fig. 14 is formed on the surface.

The object to be irradiated W is transported to the light source element 12 by, for example, a transport means (not shown) including a platform that transports the object W in parallel with the light-transmissive substrate 31 of the mask 30 in the y direction. One direction (x direction) is orthogonal (y direction).

In the light irradiation device described above, the light emitted from the light emitting portion 10 is irradiated to the object W to be irradiated in the y direction by the transport means 40 via the plane mirror 70 and the mask 30. Specifically, in the light emitting portion 10, the light emitted from the discharge lamp 13 of each of the light source elements 12 of the light source element array 11 is reflected by the light reflecting surface 16 of the reflector 15 of the light source element 12, thereby becoming The parallel light along the optical axis C of the reflector 15 is emitted from the light exit surface 17 toward the plane mirror 70. Thereafter, the parallel light emitted from the light emitting portion 10 is reflected by the light reflecting surface 71 of the plane mirror 70 as a strip-shaped light beam extending in the x direction toward the mask 30. The strip-shaped light rays incident on the mask 30 are parallel light parallel to each other in the x direction. Then, the light incident on the mask 30 is trimmed into a stripe shape by the light shielding portion 35 and the light transmitting portion 36 of the mask 30, and is irradiated onto the object W to be irradiated. Thereby, a light-shielding portion 35 of the mask 30 and a stripe-shaped light irradiation region corresponding to the pattern of the light-transmitting portion 36 are formed on the surface of the object W, and the object W to be irradiated is transported to the y direction by the transport means. Thereby, the desired light irradiation process is achieved for the irradiated object W.

According to the light irradiation device of the sixth embodiment, the same effects as those of the light irradiation device of the first embodiment described above can be obtained.

Although the embodiments of the present invention have been described above, the present invention is not limited to the embodiments, and various modifications can be made.

For example, in the second embodiment, the third embodiment, and the sixth embodiment, the polarizing element may be disposed in the same manner as in the fourth embodiment.

Further, since the position at which the polarizing element is disposed is only required to be in the light path between the light emitting portion and the mask, it is not limited to the light path between the light collecting member and the mask, for example, in the light emitting portion and The light path between the concentrating members may also be.

In the light irradiation device of the sixth embodiment, it is also possible to apply a relatively large effective irradiation width d even when a linear pattern is formed on a film-form object to be processed.

Further, the light emitting portion extends from the light source element row of the three or more light source element rows in the x direction to connect the electrode center point of the discharge lamp of the light source element associated with one light source element row, and is related to the other light source element row closest to the light source element. The straight line of the electrode center point of the discharge lamp of the light source element may be arranged to be obliquely intersected with a straight line extending in the x direction.

For example, as a modification of the light irradiation device of the fifth embodiment, a light irradiation device having four light source element rows is disclosed in FIG. 19, and in the light emission device according to the modification, the light emission device is provided. A graph showing the illuminance distribution in the x direction of the light irradiation region when the light is collected by the condensing member. In this figure, the vertical axis reveals the relative illuminance, and the horizontal axis reveals the relative position in the x direction. The curve (1) is from the first The illuminance distribution curve of the light-irradiated area caused by the light of the light source element row of one column, and the curve (2) is the illuminance distribution curve of the light-irradiated area by the light of the light source element row of the second column, the curve (3) The illuminance distribution curve of the light-irradiated area caused by the light from the light source element row of the third column, and the curve (4) is the illuminance distribution curve of the light-irradiated area caused by the light of the light source element row of the fourth column, the curve (5) The illuminance distribution curve of the light irradiation region due to the light from the entire light exit portion.

As shown in FIG. 19, in the illuminance distribution caused by the light from any one of the light source element rows, the light irradiation regions caused by the light rays from the light source elements of the light source element row do not overlap each other and are arranged side by side, so that the illuminance is The difference between the peak value and the bottom value is extremely large. On the other hand, in the illuminance distribution due to the light from the entire light-emitting portion, it can be understood that the light-irradiating regions due to the light from the light source element rows of the first column or the fourth column overlap, and the light source elements are arranged from the respective light source element rows. Since the peak positions of the illuminances of the light-irradiated areas due to the light are different from each other, the difference between the peak value of the illuminance and the bottom value is smaller than that of the light-emitting device of the fifth embodiment, and a more uniform illuminance distribution can be obtained.

10. . . Light shot

11,11a,11b. . . Light source component column

12. . . Light source component

13. . . Discharge lamp

14. . . Luminous tube

15. . . reflector

16. . . Light reflecting surface

17. . . Light exit surface

18. . . Fixed member

19. . . reflector

20. . . Concentrating member

twenty one. . . Light reflecting surface

twenty two. . . Cylindrical lens

twenty three. . . Plane mirror

twenty four. . . Light reflecting surface

25. . . Cylindrical elliptical mirror

26. . . Light reflecting surface

27. . . Compound lens

28. . . Cylindrical lens

30. . . Mask

31. . . Light transmissive substrate

32. . . Sunscreen

35. . . Shading

36. . . Translucent part

40. . . Transport means

41. . . roller

45. . . Polarizing element

46. . . Transparent substrate

47. . . Metal lead

51. . . Film substrate

52. . . Orientation film

52A. . . Material layer for alignment film

53. . . Liquid crystal polymer layer

53A. . . Photopolymerizable liquid crystal material layer

55. . . First light alignment film

55A. . . Light alignment film material layer

56. . . Second light alignment film

57. . . Part 1 of the liquid crystal polymer layer

57A. . . Photopolymerizable liquid crystal material layer

58. . . Part 2 of the liquid crystal polymer layer

59. . . Liquid crystal polymer layer

70. . . Plane mirror

71. . . Light reflecting surface

80. . . 3D image messaging department

81. . . Right eye image transmission department

82. . . Left eye image transmission department

85. . . 3D image display film forming film

86. . . Right eye image display unit

87. . . Left eye image display unit

88. . . light source

90. . . Film substrate

91. . . Orientation film

92. . . Photopolymerizable liquid crystal material layer

93. . . Liquid crystal polymer layer

95. . . Mask

96. . . Shading

97. . . Translucent part

G. . . Minimum interval

Fig. 1 is a perspective view showing a schematic configuration of a light irradiation device according to a first embodiment.

Fig. 2 is a side cross-sectional view showing the light irradiation device shown in Fig. 1 cut along the line A-A.

Fig. 3 is a plan sectional view showing the light irradiation device shown in Fig. 1 cut along the line B-B.

Fig. 4 is a front elevational view showing a light emitting portion of the light irradiation device of the first embodiment.

Fig. 5 is an explanatory view showing an example of a specific structure of a mask, wherein (a) is a plan view and (b) is a side view.

Fig. 6 is an explanatory view showing the relationship between the effective irradiation width of light incident on the light collecting member from the mask, the allowable variation value of the interval between the mask and the object to be irradiated, and the radius of the drum.

Fig. 7 is an explanatory view showing an example of a manufacturing process of a patterned retardation film.

Fig. 8 is an explanatory view showing the orientation of light rays irradiated by the ultraviolet irradiation device of the present invention.

Fig. 9 is a side cross-sectional view showing a schematic structure of a light irradiation device according to a second embodiment.

Fig. 10 is a side cross-sectional view showing a schematic structure of a light irradiation device according to a third embodiment.

Fig. 11 is an explanatory view showing a structure of a composite lens of a light irradiation device according to a third embodiment.

Fig. 12 is a side cross-sectional view showing the structure of a light irradiation device according to a fourth embodiment.

FIG. 13 is an explanatory view showing a structure of an example of a polarizing element, (a) is a perspective view, and (b) is a cross-sectional view taken along line A-A of (a).

Fig. 14 is an explanatory view showing another example of the manufacturing process of the patterned retardation film.

Fig. 15 is a front elevational view showing a light emitting portion of the light irradiation device of the fifth embodiment.

[Fig. 16] A graph showing the illuminance distribution in the x direction of the light irradiation region when the light from the light emitting portion is condensed by the condensing member in the light irradiation device according to the fifth embodiment.

Fig. 17 is a perspective view showing a schematic configuration of a light irradiation device according to a sixth embodiment.

Fig. 18 is a side cross-sectional view showing the light irradiation device shown in Fig. 17 cut along the line A-A.

FIG. 19 is a graph showing an illuminance distribution in the x direction of a light irradiation region when light collected from a light emitting portion is collected by a light collecting member in a light irradiation device according to a modification.

FIG. 20 is an explanatory diagram showing a schematic configuration of an example of a 3D image display device.

Fig. 21 is an explanatory view showing a manufacturing process of a patterned retardation film.

Fig. 22 is an explanatory view showing the orientation of light rays irradiated by a conventional ultraviolet irradiation device.

10. . . Light shot

11. . . Light source component column

12. . . Light source component

20. . . Concentrating member

30. . . Mask

Claims (17)

A light-irradiating device comprising: a light-emitting portion having a short-arc type discharge lamp and a reflector disposed to surround the discharge lamp and reflecting light from the discharge lamp a plurality of light source elements arranged in a direction in which the light source elements are arranged in a plurality of directions; and the masks are arranged in a plurality of linear light-shielding portions and a plurality of light-transmitting portions extending in a direction perpendicular to the one direction, and are alternately arranged side by side. The light is emitted from the light emitting portion through the mask to the object to be irradiated. The light irradiation device according to the first aspect of the invention, wherein the polarizing element is disposed on a light path between the light emitting portion and the mask. The light-irradiating device according to the first or second aspect of the invention, further comprising: a condensing member that condenses light from the light-emitting portion into a line extending in the one direction, via The mask is irradiated to the object to be irradiated. The light irradiation device according to the third aspect of the invention, wherein the reflector has a paraboloidal light reflecting surface centered on an optical axis thereof; and the concentrating member has a parabolic shape The cylindrical mirror of the light reflecting surface is formed. The light-irradiating device according to the third aspect of the invention, wherein the reflector has a paraboloidal light reflecting surface centered on an optical axis thereof; and the concentrating member has a cylindrical convex lens. The light-irradiating device according to the third aspect of the invention, wherein the reflector has a spheroidal light reflecting surface centered on an optical axis thereof; and the concentrating member has an elliptical cross section. The cylindrical mirror of the light reflecting surface is formed by a plurality of cylindrical convex lenses arranged in such a manner that the light source elements corresponding to the light emitting portions are arranged in the same direction. The light-emitting device according to claim 1, wherein the light-emitting portion has at least two light source element rows extending in the same direction; and the light source element rows are connected to one light source element column. The center point between the electrodes of the discharge lamp of the related light source element, and the line closest to the center point between the electrodes of the discharge lamp of the light source element which is closest to the light source element and the other light source element row, and the straight line extending in the one direction Mode configuration. The light irradiation device according to the first aspect of the invention, wherein the light-emitting device has a conveying means for conveying the object to be irradiated to a direction in which the light-transmitting portion of the mask extends. The light irradiation device according to claim 8, wherein the object to be irradiated is a film shape, and the conveying means is a roller that is conveyed by contacting the object to be irradiated, and the object to be irradiated contacts the roller The light is illuminated. The light-irradiating device according to the first or second aspect of the invention, wherein the reflector has a parabolic light-reflecting surface centered on an optical axis thereof; and the light-emitting portion is disposed from the light-emitting portion The light beam is a plane mirror that is reflected toward the mask as light that extends in a strip shape in the one direction. The light-irradiating device according to the first aspect of the invention, wherein the object to be irradiated is a photopolymerizable liquid crystal material or an alignment film material for producing a retardation film. A light irradiation method, characterized in that a light emitted from a light emitting portion is irradiated to an object to be irradiated through a mask; the light emitting portion has a discharge lamp of a short arc type and surrounds the discharge lamp Arranged in a manner that the light source elements formed by the reflectors that reflect the light from the discharge lamp are arranged in a plurality of directions and arranged in a direction; the masks are respectively perpendicular to the one direction A plurality of linear light-shielding portions and a plurality of light-transmitting portions extending in the direction are arranged side by side in the same direction. The light irradiation method according to claim 12, wherein the polarized light is irradiated by a polarizing element disposed on a light path between the light emitting portion and the mask. The light irradiation method according to claim 12, wherein the light from the light emitting portion is condensed by a condensing member into a line extending in the one direction, and the light is applied thereto. The concentrated light is irradiated to the object to be irradiated through the mask. The light irradiation method according to claim 12, wherein the object to be irradiated is irradiated with light when the object to be irradiated is conveyed to a direction in which the light transmitting portion of the mask extends. The light-irradiating method according to claim 15, wherein the object to be irradiated is in the form of a film, and the object to be irradiated is transported by a transport means of a drum that is transported by contacting the object to be irradiated. Light is irradiated to the roller that is in contact with the object to be irradiated. The light irradiation method according to claim 12, wherein the object to be irradiated is a photopolymerizable liquid crystal material or an alignment film material for producing a retardation film.