TW201300581A - Electro copper plating additive and electro copper plating bath - Google Patents

Electro copper plating additive and electro copper plating bath Download PDF

Info

Publication number
TW201300581A
TW201300581A TW101110579A TW101110579A TW201300581A TW 201300581 A TW201300581 A TW 201300581A TW 101110579 A TW101110579 A TW 101110579A TW 101110579 A TW101110579 A TW 101110579A TW 201300581 A TW201300581 A TW 201300581A
Authority
TW
Taiwan
Prior art keywords
additive
copper plating
plating
current density
copper
Prior art date
Application number
TW101110579A
Other languages
Chinese (zh)
Other versions
TWI608130B (en
Inventor
Hiroki Uchida
Hironori Sugiura
Original Assignee
Uyemura C & Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Uyemura C & Co Ltd filed Critical Uyemura C & Co Ltd
Publication of TW201300581A publication Critical patent/TW201300581A/en
Application granted granted Critical
Publication of TWI608130B publication Critical patent/TWI608130B/en

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00Electroplating: Baths therefor
    • C25D3/02Electroplating: Baths therefor from solutions
    • C25D3/38Electroplating: Baths therefor from solutions of copper

Abstract

Provided is an electro copper plating additive which forms a uniform plating film from low current density parts to high current density parts, imparting a lustrous shine, and which is not depleted when the bath is not in use. Also provided is an electro copper plating bath containing the additive. The present invention involves adding an electric copper plating additive comprising a block polymer compound represented by general formula (1) below to an electro copper plating bath. (In the formula, R represents a straight-chain or branched-chain alkenyl group or alkyl group having 1 to 15 carbon atoms, m is an integer from 1 to 30, and n is an integer from 1 to 40.)

Description

銅電鍍用添加劑及銅電鍍浴 Copper plating additive and copper plating bath

本發明係關於銅電鍍用添加劑及銅電鍍浴,尤其關於適合作為硫酸銅電鍍浴的光澤劑之之銅電鍍用添加劑以及含有該添加劑之銅電鍍浴。 The present invention relates to an additive for copper plating and a copper plating bath, and more particularly to an additive for copper plating suitable as a brightener for a copper sulfate plating bath and a copper plating bath containing the additive.

本申請案係以於2011年3月28日在日本提出申請之日本專利申請號特願2011-070667為基礎來主張優先權,並藉由參考此等申請內容而援引至本申請案。 The present application claims priority on the basis of Japanese Patent Application No. 2011-070667, filed on Jan. 28, 2011, the entire disclosure of which is hereby incorporated by reference.

以往,係已進行一種將光澤劑添加於銅電鍍浴以賦予具有光澤之銅鍍覆膜之作法。該光澤劑,為人所知者例如有有機硫化合物、含氧的高分子有機化合物等(例如參考專利文獻1或2)。作為有機硫化合物者,廣泛使用NaO3SC3H6S-SC3H6SO3Na等之二硫化物系化合物,此外,作為含氧的高分子有機化合物,廣泛使用氧化烯聚合物、聚乙二醇、聚丙二醇等。 Conventionally, a method of adding a gloss agent to a copper plating bath to impart a glossy copper plating film has been carried out. The brightening agent is, for example, an organic sulfur compound, an oxygen-containing polymer organic compound, and the like (for example, refer to Patent Document 1 or 2). As the organic sulfur compound, a disulfide-based compound such as NaO 3 SC 3 H 6 S-SC 3 H 6 SO 3 Na or the like is widely used, and an oxyalkylene polymer and poly are widely used as an oxygen-containing polymer organic compound. Ethylene glycol, polypropylene glycol, and the like.

此外,上述化合物以外的光澤劑,可使用以下列一般式表示之使環氧乙烷加成於聚丙二醇之聚合物。該式中,EO表示氧乙烯基,PO表示氧丙烯基,n=a+b。 Further, as the gloss agent other than the above compound, a polymer obtained by adding ethylene oxide to polypropylene glycol represented by the following general formula can be used. In the formula, EO represents an oxyethylene group, PO represents an oxypropylene group, and n = a + b.

H-(EO)a-(PO)m-(EO)b-H H-(EO)a-(PO)m-(EO)b-H

然而,此等以往所使用之光澤劑,於銅鍍覆膜之低電流密度部中的光澤性和均鍍能力不足,而形成粗糙的覆膜。該原因可考量為:例如在以上述一般式表示之聚合物中 ,該疏水基的(PO)m係夾於兩側的(EO)n之間,使作為疏水基的效果弱化之故。其結果為,當將由該聚合物所構成之化合物用作為銅電鍍浴的光澤劑時,低電流密度部或高電流密度部上產生電流分布的紊亂,阻礙均勻的電沉積,而產生細微的凹坑或白化等之電鍍不良。 However, the gloss agent used in the past has insufficient glossiness and throwing power in the low current density portion of the copper plating film to form a rough film. The reason can be considered as: for example, in the polymer represented by the above general formula The (PO)m of the hydrophobic group is sandwiched between (EO) n on both sides, and the effect as a hydrophobic group is weakened. As a result, when a compound composed of the polymer is used as a brightening agent for a copper plating bath, a disorder of current distribution occurs at a low current density portion or a high current density portion, and uniform electrodeposition is inhibited, resulting in a fine concave. Poor plating due to pits or whitening.

此外,銅電鍍用的光澤劑,係要求容易管理且即使在不使用時亦不會消耗者。 In addition, the gloss agent for copper plating is required to be easy to manage and is not consumed even when not in use.

[先前技術文獻] [Previous Technical Literature] [專利文獻] [Patent Literature]

[專利文獻1]日本特開2005-194608號公報 [Patent Document 1] Japanese Patent Laid-Open Publication No. 2005-194608

[專利文獻2]日本特開2008-297221號公報 [Patent Document 2] Japanese Patent Laid-Open Publication No. 2008-297221

因此,本發明係鑒於上述以往的情形而創作出之發明,該目的在於提供一種可從低電流密度部至高電流密度部形成均勻的鍍覆膜而賦予良好的光澤性,且即使在不使用時亦不會消耗之銅電鍍用添加劑以及含有該添加劑之銅電鍍浴。 Accordingly, the present invention has been made in view of the above-described conventional circumstances, and an object of the invention is to provide a uniform plating film from a low current density portion to a high current density portion, thereby imparting good gloss, even when not in use. The copper plating additive and the copper plating bath containing the additive are also not consumed.

本發明者們係為了解決上述課題而進行精心探討,結果發現到藉由使用經提高疏水基的效果之嵌段聚合物化合 物作為添加劑,可從低電流密度部至高電流密度部形成均勻的鍍覆膜而賦予良好的光澤性,因而完成本發明。 The inventors of the present invention have intensively studied to solve the above problems, and as a result, found that a block polymer combination by using an effect of improving a hydrophobic group has been found. As an additive, a uniform plating film can be formed from a low current density portion to a high current density portion to impart good gloss, and thus the present invention has been completed.

亦即,本發明之銅電鍍用添加劑,其係由以下列一般式(1)表示之嵌段聚合物化合物所構成。 That is, the additive for copper plating of the present invention is composed of a block polymer compound represented by the following general formula (1).

(式中,R表示直鏈或分支鏈之碳數1~15的烷基或烯基,m為1~30,n為1~40的整數) (wherein R represents an alkyl or alkenyl group having 1 to 15 carbon atoms in a straight or branched chain, m is 1 to 30, and n is an integer of 1 to 40)

此外,本發明之銅電鍍浴,係含有由上述一般式(1)表示之嵌段聚合物化合物所構成之添加劑。 Further, the copper plating bath of the present invention contains an additive composed of the block polymer compound represented by the above general formula (1).

根據本發明,可從低電流密度部至高電流密度部形成均勻的鍍覆膜而賦予良好的光澤性,且即使在不使用時亦不會消耗,而能夠穩定地形成良好的鍍覆膜。 According to the present invention, a uniform plating film can be formed from the low current density portion to the high current density portion, and good gloss can be imparted, and even if it is not used, it is not consumed, and a favorable plating film can be stably formed.

以下係詳細地說明本實施形態之銅電鍍用添加劑以及含有該添加劑之銅電鍍浴。 Hereinafter, the additive for copper plating and the copper plating bath containing the additive of the present embodiment will be described in detail.

本實施形態之銅電鍍用添加劑,係由以下列一般式(1)表示之嵌段聚合物化合物所構成。 The additive for copper plating of the present embodiment is composed of a block polymer compound represented by the following general formula (1).

在此,一般式(1)中,R表示直鏈或分支鏈之碳數1~15的烷基或烯基,m為1~30,n為1~40的整數。 Here, in the general formula (1), R represents an alkyl group or an alkenyl group having 1 to 15 carbon atoms in a straight chain or a branched chain, m is 1 to 30, and n is an integer of 1 to 40.

作為直鏈或分支鏈之碳數1~15的烷基或烯基之R,例如可列舉出甲基、乙基、正丙基、烯丙基、正丁基、正戊基、正己基、1-甲基己基、2-乙基己基、正庚基、正辛基、正壬基、正癸基、正十一烷基、正十二烷基、正十三烷基、正十四烷基、正十五烷基等。 Examples of R of an alkyl group or an alkenyl group having 1 to 15 carbon atoms in a straight chain or a branched chain include a methyl group, an ethyl group, a n-propyl group, an allyl group, a n-butyl group, a n-pentyl group, and a n-hexyl group. 1-methylhexyl, 2-ethylhexyl, n-heptyl, n-octyl, n-decyl, n-decyl, n-undecyl, n-dodecyl, n-tridecyl, n-tetradecane Base, n-pentadecyl and the like.

此外,一般式(1)中的m及n,可因應上述R的種類來適當地設定。具體而言,隨著R之碳數的增加,疏水性提高,藉由因應該R的種類來調整m及n的莫耳比,可使鍍覆浴具備有適度的溶解性。此外,m及n,較佳係設定為使以一般式(1)所示之嵌段聚合物的分子量成為500~2000。 Further, m and n in the general formula (1) can be appropriately set in accordance with the type of the above R. Specifically, as the carbon number of R increases, the hydrophobicity increases, and by adjusting the molar ratio of m and n in accordance with the type of R, the plating bath can have appropriate solubility. Further, m and n are preferably set such that the molecular weight of the block polymer represented by the general formula (1) is 500 to 2,000.

如上述一般式(1)所示,該添加劑係成為以烷基或烯基來覆蓋氧丙烯基側的末端之結構。如此,藉由以烷基或烯基來覆蓋氧丙烯基的末端,可提高氧丙烯基之作為疏水基的效果。 As shown in the above general formula (1), the additive has a structure in which an end of the oxypropylene group side is covered with an alkyl group or an alkenyl group. Thus, by covering the terminal of the oxypropylene group with an alkyl group or an alkenyl group, the effect of the oxypropylene group as a hydrophobic group can be enhanced.

再者,上述一般式(1)所示之添加劑,氧丙烯基(PO)與氧乙烯基(EO)的順序為一定,且為經常由 R-O-(PO)m-(EO)n-H的結構所構成之嵌段聚合物。藉此,如上述般,藉由該末端以烷基或烯基所覆蓋之氧丙烯基((PO)m),於上述一般式(1)中,可使[R-O-(PO)m]的部分整體作用為疏水基,而具有高疏水性。 Further, in the above general formula (1), the order of the oxypropylene group (PO) and the oxyethylene group (EO) is constant, and is often A block polymer composed of a structure of R-O-(PO)m-(EO)n-H. Thereby, as described above, the oxypropylene group ((PO)m) which is covered with an alkyl group or an alkenyl group at the terminal can give [RO-(PO)m] in the above general formula (1). Part of the overall action is a hydrophobic group with high hydrophobicity.

從該內容所預測到之作用如下,一般而言,化合物的疏水基,由於從水中被壓擠至界面,所以當將被鍍物浸漬於水溶液時,被鍍物的鍍覆面成為界面,具有高疏水性之添加劑於鍍覆面上被濃縮,而提高添加劑的效果。其結果可涵蓋從低電流密度部至高電流密度部之全體而發揮添加劑的效果,所以可形成均勻的鍍覆膜而賦予良好的光澤性。 The effect predicted from this content is as follows. Generally, since the hydrophobic group of the compound is pressed from the water to the interface, when the object to be plated is immersed in the aqueous solution, the plated surface of the object to be plated becomes an interface and has a high The hydrophobic additive is concentrated on the plated surface to enhance the effect of the additive. As a result, the effect of the additive can be exhibited from the low current density portion to the high current density portion, so that a uniform plating film can be formed and a good gloss can be imparted.

再者,藉由此般嵌段聚合物,可藉由另一方之末端的氧乙烯基而具備有適度的溶解性,使聚合物化合物良好地溶解於銅電鍍浴,並且在鍍覆浴中穩定地維持,在不使用電解處理時,可抑制隨時間經過之消耗。 Further, by such a block polymer, it is possible to have a moderate solubility by the oxyethylene group at the other end, so that the polymer compound is well dissolved in the copper plating bath and stabilized in the plating bath. The ground is maintained, and when it is not used for electrolytic treatment, consumption over time can be suppressed.

上述一般式(1)所示之嵌段聚合物化合物,例如可藉由以下方法來製造。亦即,能夠在氮氣等之非活性氣體環境下,首先使環氧丙烷加成反應於碳數1~15的烷醇或烯醇。環氧丙烷的加成反應結束後,接著加入環氧乙烷來進行環氧乙烷的加成反應而得。 The block polymer compound represented by the above general formula (1) can be produced, for example, by the following method. That is, propylene oxide can be first reacted and reacted with an alkanol or an enol having 1 to 15 carbon atoms in an inert gas atmosphere such as nitrogen. After completion of the addition reaction of propylene oxide, ethylene oxide is added to carry out an addition reaction of ethylene oxide.

如此,嵌段聚合物化合物,係在使環氧丙烷加成反應於碳數1~15的烷醇或烯醇後,加入環氧乙烷進行加成反應而合成,藉此可構成為由(EO)n加成於以烷基或烯基所覆蓋之(PO)m的一定結構所構成之嵌段體。 In this manner, the block polymer compound is obtained by adding propylene oxide to an alkanol or an enol having 1 to 15 carbon atoms, and then adding an ethylene oxide to carry out an addition reaction, thereby synthesizing it. EO)n is a block formed by a certain structure of (PO)m covered with an alkyl group or an alkenyl group.

嵌段聚合物化合物的製造方法中之反應溫度並無特別限定,較佳為90~160℃。藉由將反應溫度設為90℃以上,可得到適度的反應速度而有效率地產生環氧丙烷及環氧乙烷的加成反應。此外,藉由將反應溫度設為160℃以下,可抑制副產物等的生成,而提高所生成之嵌段聚合物化合物的產率。在使環氧丙烷加成反應於烷醇後,使環氧乙烷進行加成時,較佳係在上述90~160℃中環氧丙烷進行加成反應後,先進行冷卻,然後在同樣的溫度條件下進行環氧乙烷的加成反應。 The reaction temperature in the method for producing the block polymer compound is not particularly limited, but is preferably 90 to 160 °C. By setting the reaction temperature to 90 ° C or higher, an appropriate reaction rate can be obtained, and an addition reaction of propylene oxide and ethylene oxide can be efficiently produced. Further, by setting the reaction temperature to 160 ° C or lower, the formation of by-products and the like can be suppressed, and the yield of the produced block polymer compound can be improved. When the addition reaction of the propylene oxide to the alkanol is carried out, it is preferred to carry out the addition reaction of the propylene oxide at the above-mentioned 90 to 160 ° C, and then to cool, and then in the same manner. The addition reaction of ethylene oxide is carried out under temperature conditions.

此外,反應時間並無特別限定,且亦因反應溫度而有所不同,在環氧丙烷及環氧乙烷的各加成反應中,較佳為15小時以內。藉由設定為15小時以內,可抑制副產物等的生成,而提高所生成之嵌段聚合物化合物的產率。 Further, the reaction time is not particularly limited and varies depending on the reaction temperature, and is preferably within 15 hours in each addition reaction of propylene oxide and ethylene oxide. By setting it to 15 hours or less, formation of a by-product etc. can be suppressed, and the yield of the block polymer compound produced can be improved.

再者,加成反應時,較佳係在加壓下進行,加成反應開始時的壓力,較佳係設為2~5 kg/cm2Further, in the case of the addition reaction, it is preferred to carry out the reaction under pressure, and the pressure at the start of the addition reaction is preferably 2 to 5 kg/cm 2 .

當將上述一般式(1)所示之嵌段聚合物化合物用作為銅電鍍浴的添加劑時,此時的添加濃度,較佳係設為0.05~1.0g/L。藉由將添加濃度設為0.05g/L以上,可形成具有充分的光澤性之鍍覆膜。此外,藉由將添加濃度設為1.0g/L以下,可防止能夠有效使用之電流密度範圍的縮小,而從低電流密度部至高電流密度部均勻地形成良好的鍍覆膜。 When the block polymer compound represented by the above general formula (1) is used as an additive for a copper plating bath, the concentration at this time is preferably 0.05 to 1.0 g/L. By setting the addition concentration to 0.05 g/L or more, a plating film having sufficient gloss can be formed. Further, by setting the addition concentration to 1.0 g/L or less, it is possible to prevent a reduction in the current density range which can be effectively used, and to form a favorable plating film uniformly from the low current density portion to the high current density portion.

接著說明添加有由上述一般式(1)所示之嵌段聚合物化合物所構成之添加劑的銅電鍍浴,以及使用該銅電鍍 浴之鍍覆處理。銅電鍍浴並無特別限定,特佳為硫酸銅電鍍浴。如此,藉由將上述嵌段聚合物化合物添加於硫酸銅電鍍浴,可在廣泛的電流密度範圍內,均勻地形成具有優異的光澤性之銅鍍覆膜,可較佳地使用作為裝飾用電鍍處理中所使用之電鍍浴。 Next, a copper plating bath to which an additive composed of the block polymer compound represented by the above general formula (1) is added, and copper plating using the same will be described. Bath plating treatment. The copper plating bath is not particularly limited, and is particularly preferably a copper sulfate plating bath. By adding the above-mentioned block polymer compound to the copper sulfate plating bath, it is possible to uniformly form a copper plating film having excellent gloss in a wide range of current densities, and it can be preferably used as a decorative plating. The plating bath used in the treatment.

具體而言,硫酸銅電鍍浴的組成,例如可形成為以硫酸銅(Cu2SO4.5H2O)50~250g/L、濃硫酸50~250g/L為基本組成之電鍍浴。硫酸銅電鍍浴中,通常含有微量(10~200mg/L左右)的氯化物離子。具體而言,例如可添加NaCl等之水溶性氯化物而含有氯化物離子。 Specifically, the composition of the copper sulfate plating bath can be, for example, an electroplating bath having a basic composition of copper sulfate (Cu 2 SO 4 .5H 2 O) 50 to 250 g/L and concentrated sulfuric acid 50 to 250 g/L. In the copper sulfate plating bath, a trace amount (about 10 to 200 mg/L) of chloride ions is usually contained. Specifically, for example, a water-soluble chloride such as NaCl may be added to contain chloride ions.

上述銅電鍍浴中,亦可藉由進一步添加已知的添加劑,進一步提升光澤性或平滑性。具體而言,例如可添加有機硫化合物和有機酸醯胺類、含氧的高分子有機化合物等。 In the above copper plating bath, gloss or smoothness can be further improved by further adding a known additive. Specifically, for example, an organic sulfur compound, an organic acid decylamine, an oxygen-containing polymer organic compound, or the like can be added.

使用上述銅電鍍浴之電鍍處理的條件,係設為pH為1以下。此外,較佳者,電鍍溫度設為20~50℃的範圍,陰極電流密度設為0.1~8A/dm2。此外,陽極可使用銅板、不溶性陽極。再者,為了形成具有更均勻的光澤性之鍍覆膜,較佳係充分地進行空氣攪拌、陰極搖動等攪拌。 The conditions of the plating treatment using the copper plating bath described above are such that the pH is 1 or less. Further, preferably, the plating temperature is in the range of 20 to 50 ° C, and the cathode current density is set to 0.1 to 8 A/dm 2 . Further, a copper plate or an insoluble anode can be used for the anode. Further, in order to form a plating film having more uniform gloss, it is preferred to sufficiently perform stirring such as air stirring or cathode shaking.

此外,施以上述鍍覆處理之被鍍覆處理物並無特別限制,例如以對塑膠等之被鍍覆處理物施以裝飾鍍覆者為目的,可較佳地使用添加有上述添加劑之銅電鍍浴。其他,亦能夠以具有貫通孔之印刷配線基板或電氣與電子零件等為對象施以電鍍處理。如此,添加有上述添加劑之銅電鍍 浴,從裝飾用途至功能目的均可廣泛地適用。 In addition, the object to be plated which is subjected to the above-mentioned plating treatment is not particularly limited. For example, for the purpose of applying decorative plating to a material to be plated such as plastic, it is preferable to use copper to which the above additive is added. Electroplating bath. In addition, it is also possible to apply a plating treatment to a printed wiring board having through holes or electrical and electronic parts. Thus, copper plating with the above additives added Baths are widely available from decorative to functional purposes.

[實施例] [Examples]

以下係說明本發明之具體的實施例。惟本發明並不限定於下列任一實施例。 The following describes specific embodiments of the invention. However, the invention is not limited to any of the following embodiments.

以下所說明之各實施例中,係合成第1表所示之嵌段聚合物(R-O-(PO)m-(EO)n-H),使用添加該嵌段聚合物化合物作為添加劑之銅電鍍浴來進行電鍍處理,並評估析出形成後的鍍覆膜。將空氣吹入於銅電鍍浴並充分地攪拌,尤其充分地攪拌陰極附近以使空氣接觸於被電鍍物。 In each of the examples described below, the block polymer (RO-(PO)m-(EO)nH) shown in Table 1 was synthesized, and a copper plating bath containing the block polymer compound as an additive was used. The plating treatment was performed, and the plating film after the formation of the precipitate was evaluated. Air is blown into the copper plating bath and thoroughly stirred, especially in the vicinity of the cathode to sufficiently bring the air into contact with the object to be plated.

<實施例1> <Example 1> (嵌段聚合物的合成) (Synthesis of block polymer)

將正丙醇600g(10莫耳)與氫氧化鉀5.6g(0.1莫耳)量取至氣密反應容器,在氮氣環境下,於90~130℃、2~5kg/cm2的加壓下使環氧丙烷870g(15莫耳)進行加成反應。環氧丙烷的加成反應結束後,冷卻反應容器,接 著加入環氧乙烷660g(15莫耳),在同樣的條件下進行加成反應。 600 g (10 mol) of n-propanol and 5.6 g (0.1 mol) of potassium hydroxide were taken into a gas-tight reaction vessel under a nitrogen atmosphere at a pressure of 90-130 ° C and 2-5 kg/cm 2 . 870 g (15 mol) of propylene oxide was subjected to an addition reaction. After completion of the addition reaction of propylene oxide, the reaction vessel was cooled, and then 660 g (15 mol) of ethylene oxide was added, and an addition reaction was carried out under the same conditions.

然後添加50g的合成吸附材(Kyowaad 600,協和化學工業股份有限公司製)於反應容器,在70℃下攪拌30分鐘後進行過濾,而得聚氧乙烯(15)聚氧丙烯(15)丙醚2070g。 Then, 50 g of a synthetic adsorbent (Kyowaad 600, manufactured by Kyowa Chemical Industry Co., Ltd.) was added to the reaction vessel, and the mixture was stirred at 70 ° C for 30 minutes, followed by filtration to obtain polyoxyethylene (15) polyoxypropylene (15) propyl ether. 2070g.

(鍍覆處理及鍍覆膜評估) (plating treatment and coating film evaluation)

將雙-(ω-磺丙基)-二硫化物二鈉鹽10mg/L、二乙基番紅的重氮化處理物50mg/L、及上述合成後的聚氧乙烯(15)聚氧丙烯(15)丙醚0.2g/L,作為添加劑添加於以下列組成:硫酸銅(Cu2SO4.5H2O)200g/L、濃硫酸50g/L、NaCl 115mg/L所構成之硫酸銅電鍍液而得電鍍浴,使用該電鍍浴,在總電流2A、時間10分鐘下,使用哈氏槽(Hullcell)試驗器來進行電鍍處理。將電鍍處理條件設為pH<1、溫度25℃、陰極電流密度0.15~4A/dm210 mg/L of bis-(ω-sulfopropyl)-disulfide disodium salt, 50 mg/L of diazotized product of diethyl fragrant, and polyoxyethylene (15) polyoxypropylene synthesized above (15) Propyl ether 0.2g / L, added as an additive to copper sulfate plating consisting of copper sulfate (Cu 2 SO 4 .5H 2 O) 200g / L, concentrated sulfuric acid 50g / L, NaCl 115mg / L A plating bath was obtained for the liquid, and the plating bath was used to carry out a plating treatment using a Hullcell tester at a total current of 2 A for 10 minutes. The plating treatment conditions were pH < 1, temperature 25 ° C, and cathode current density 0.15 to 4 A/dm 2 .

其結果可從低電流密度部至高電流密度部均勻地形成具有良好的光澤之析出物。 As a result, a precipitate having a good gloss can be uniformly formed from the low current density portion to the high current density portion.

此外,即使在將銅板放入於上述哈氏槽試驗器一晚後同樣地進行電鍍處理,亦與最初的電鍍處理相同,可均勻地形成具有良好的光澤之析出物。從該結果中,可得知添加劑即使在不使用時,於電鍍浴中亦不會消耗而能夠穩定地維持。 Further, even if the copper plate was placed in the above-described Hastelloy tester overnight, the plating treatment was performed in the same manner, and as in the initial plating treatment, precipitates having good gloss were uniformly formed. From the results, it was found that the additive can be stably maintained without being consumed in the plating bath even when it is not used.

<實施例2> <Example 2> (嵌段聚合物的合成) (Synthesis of block polymer)

將烯丙醇(2-丙烯-1-醇)580g(10莫耳)與氫氧化鉀5.6g(0.1莫耳)量取至氣密反應容器,在氮氣環境下,於90~130℃、2~5kg/cm2的加壓下使環氧丙烷870g(15莫耳)進行加成反應。環氧丙烷的加成反應結束後,冷卻反應容器,接著加入環氧乙烷660g(15莫耳),在同樣的條件下進行加成反應。 580 g (10 mol) of allyl alcohol (2-propen-1-ol) and 5.6 g (0.1 mol) of potassium hydroxide were taken into an airtight reaction vessel under a nitrogen atmosphere at 90-130 ° C, 2 870 g (15 mol) of propylene oxide was subjected to an addition reaction under a pressure of ~5 kg/cm 2 . After completion of the addition reaction of propylene oxide, the reaction vessel was cooled, and then 660 g (15 mol) of ethylene oxide was added, and an addition reaction was carried out under the same conditions.

然後添加50g的合成吸附材(Kyowaad 600,協和化學工業股份有限公司製)於反應容器,在70℃下攪拌30分鐘後進行過濾,而得聚氧乙烯(15)聚氧丙烯(15)烯丙醚2050g。 Then, 50 g of a synthetic adsorbent (Kyowaad 600, manufactured by Kyowa Chemical Industry Co., Ltd.) was added to the reaction vessel, and the mixture was stirred at 70 ° C for 30 minutes, followed by filtration to obtain polyoxyethylene (15) polyoxypropylene (15) allylate. Ether 2050 g.

(鍍覆處理及鍍覆膜評估) (plating treatment and coating film evaluation)

實施例2中,除了使用加入雙-(ω-磺丙基)-二硫化物二鈉鹽10mg/L、二乙基番紅的重氮化處理物50mg/L、及上述合成後的聚氧乙烯(15)聚氧丙烯(15)烯丙醚0.2g/L作為添加劑之硫酸銅電鍍浴之外,其他與實施例1相同,使用哈氏槽試驗器來進行電鍍處理。 In Example 2, except that 10 mg/L of bis-(ω-sulfopropyl)-disulfide disodium salt, 50 mg/L of diazotized treatment of diethyl russin, and polyoxygen after synthesis as described above were used. The electroplating treatment was carried out using a Hastelloy tester in the same manner as in Example 1 except that the ethylene (15) polyoxypropylene (15) allyl ether 0.2 g/L was used as an additive copper sulfate plating bath.

其結果可從低電流密度部至高電流密度部均勻地形成具有良好的光澤之析出物。此外,即使在將銅板放入於上述哈氏槽試驗器一晚後同樣地進行電鍍處理,亦與最初的電鍍處理相同,可均勻地形成具有良好的光澤之析出物。 As a result, a precipitate having a good gloss can be uniformly formed from the low current density portion to the high current density portion. Further, even if the copper plate was placed in the above-described Hastelloy tester overnight, the plating treatment was performed in the same manner, and as in the initial plating treatment, precipitates having good gloss were uniformly formed.

<實施例3> <Example 3> (嵌段聚合物的合成) (Synthesis of block polymer)

將正丁醇740g(10莫耳)與氫氧化鉀5.6g(0.1莫耳)量取至氣密反應容器,在氮氣環境下,於90~130℃、2~5kg/cm2的加壓下使環氧丙烷580g(10莫耳)進行加成反應。環氧丙烷的加成反應結束後,冷卻反應容器,接著加入環氧乙烷660g(15莫耳),在同樣的條件下進行加成反應。 740 g (10 mol) of n-butanol and 5.6 g (0.1 mol) of potassium hydroxide were taken into a gas-tight reaction vessel under a nitrogen atmosphere at a pressure of 90 to 130 ° C and 2 to 5 kg/cm 2 . 580 g (10 mol) of propylene oxide was subjected to an addition reaction. After completion of the addition reaction of propylene oxide, the reaction vessel was cooled, and then 660 g (15 mol) of ethylene oxide was added, and an addition reaction was carried out under the same conditions.

然後添加50g的合成吸附材(Kyowaad 600,協和化學工業股份有限公司製)於反應容器,在70℃下攪拌30分鐘後進行過濾,而得聚氧乙烯(15)聚氧丙烯(10)丁醚1920g。 Then, 50 g of a synthetic adsorbent (Kyowaad 600, manufactured by Kyowa Chemical Industry Co., Ltd.) was added to the reaction vessel, and the mixture was stirred at 70 ° C for 30 minutes, followed by filtration to obtain polyoxyethylene (15) polyoxypropylene (10) dibutyl ether. 1920g.

(鍍覆處理及鍍覆膜評估) (plating treatment and coating film evaluation)

實施例3中,除了使用加入雙-(ω-磺丙基)-二硫化物二鈉鹽10mg/L、二乙基番紅的重氮化處理物50mg/L、及上述合成後的聚氧乙烯(15)聚氧丙烯(10)丁醚0.2g/L作為添加劑之硫酸銅電鍍浴之外,其他與實施例1相同,使用哈氏槽試驗器來進行電鍍處理。 In Example 3, except that 10 mg/L of bis-(ω-sulfopropyl)-disulfide disodium salt, 50 mg/L of diazotized treatment of diethyl russin, and polyoxygen after synthesis as described above were used. The electroplating treatment was carried out using a Hastelloy tester in the same manner as in Example 1 except that ethylene (15) polyoxypropylene (10) butyl ether 0.2 g/L was used as an additive copper sulfate plating bath.

其結果可從低電流密度部至高電流密度部均勻地形成具有良好的光澤之析出物。此外,即使在將銅板放入於上述哈氏槽試驗器一晚後同樣地進行電鍍處理,亦與最初的電鍍處理相同,可均勻地形成具有良好的光澤之析出物。 As a result, a precipitate having a good gloss can be uniformly formed from the low current density portion to the high current density portion. Further, even if the copper plate was placed in the above-described Hastelloy tester overnight, the plating treatment was performed in the same manner, and as in the initial plating treatment, precipitates having good gloss were uniformly formed.

<實施例4> <Example 4> (嵌段聚合物的合成) (Synthesis of block polymer)

將正己醇1020g(10莫耳)與氫氧化鉀5.6g(0.1莫耳)量取至氣密反應容器,在氮氣環境下,於90~130℃、2~5kg/cm2的加壓下使環氧丙烷290g(5莫耳)進行加成反應。環氧丙烷的加成反應結束後,冷卻反應容器,接著加入環氧乙烷880g(20莫耳),在同樣的條件下進行加成反應。 1020 g (10 mol) of n-hexanol and 5.6 g (0.1 mol) of potassium hydroxide were weighed into an airtight reaction vessel, and under a nitrogen atmosphere, under a pressure of 90 to 130 ° C and 2 to 5 kg/cm 2 . 290 g (5 mol) of propylene oxide was subjected to an addition reaction. After completion of the addition reaction of propylene oxide, the reaction vessel was cooled, and then 880 g (20 mol) of ethylene oxide was added, and an addition reaction was carried out under the same conditions.

然後添加50g的合成吸附材(Kyowaad 600,協和化學工業股份有限公司製)於反應容器,在70℃下攪拌30分鐘後進行過濾,而得聚氧乙烯(20)聚氧丙烯(5)己醚2130g。 Then, 50 g of a synthetic adsorbent (Kyowaad 600, manufactured by Kyowa Chemical Industry Co., Ltd.) was added to the reaction vessel, and the mixture was stirred at 70 ° C for 30 minutes, followed by filtration to obtain polyoxyethylene (20) polyoxypropylene (5) hexyl ether. 2130g.

(鍍覆處理及鍍覆膜評估) (plating treatment and coating film evaluation)

實施例4中,除了使用加入雙-(ω-磺丙基)-二硫化物二鈉鹽10mg/L、二乙基番紅的重氮化處理物50mg/L、及上述合成後的聚氧乙烯(20)聚氧丙烯(5)己醚0.2g/L作為添加劑之硫酸銅電鍍浴之外,其他與實施例1相同,使用哈氏槽試驗器來進行電鍍處理。 In Example 4, except that 10 mg/L of bis-(ω-sulfopropyl)-disulfide disodium salt, 50 mg/L of diazotized product of diethyl russin, and polyoxygen after synthesis described above were used. The electroplating treatment was carried out using a Hastelloy tester in the same manner as in Example 1 except that ethylene (20) polyoxypropylene (5) hexyl ether 0.2 g/L was used as an additive copper sulfate plating bath.

其結果可從低電流密度部至高電流密度部均勻地形成具有良好的光澤之析出物。此外,即使在將銅板放入於上述哈氏槽試驗器一晚後同樣地進行電鍍處理,亦與最初的電鍍處理相同,可均勻地形成具有良好的光澤之析出物。 As a result, a precipitate having a good gloss can be uniformly formed from the low current density portion to the high current density portion. Further, even if the copper plate was placed in the above-described Hastelloy tester overnight, the plating treatment was performed in the same manner, and as in the initial plating treatment, precipitates having good gloss were uniformly formed.

<實施例5> <Example 5> (嵌段聚合物的合成) (Synthesis of block polymer)

將2-乙基己醇1300g(10莫耳)與氫氧化鉀5.6g(0.1莫耳)量取至氣密反應容器,在氮氣環境下,於90~130℃、2~5kg/cm2的加壓下使環氧丙烷174g(3莫耳)進行加成反應。環氧丙烷的加成反應結束後,冷卻反應容器,接著加入環氧乙烷1100g(25莫耳),在同樣的條件下進行加成反應。 1300 g (10 mol) of 2-ethylhexanol and 5.6 g (0.1 mol) of potassium hydroxide were taken into an airtight reaction vessel under a nitrogen atmosphere at 90-130 ° C and 2-5 kg/cm 2 . 174 g (3 mol) of propylene oxide was subjected to an addition reaction under pressure. After completion of the addition reaction of propylene oxide, the reaction vessel was cooled, and then 1,100 g (25 mol) of ethylene oxide was added, and an addition reaction was carried out under the same conditions.

然後添加50g的合成吸附材(Kyowaad 600,協和化學工業股份有限公司製)於反應容器,在70℃下攪拌30分鐘後進行過濾,而得聚氧乙烯(25)聚氧丙烯(3)2-乙基己醚2500g。 Then, 50 g of a synthetic adsorbent (Kyowaad 600, manufactured by Kyowa Chemical Industry Co., Ltd.) was added to the reaction vessel, and the mixture was stirred at 70 ° C for 30 minutes, followed by filtration to obtain polyoxyethylene (25) polyoxypropylene (3) 2 2,500 g of ethyl hexyl ether.

(鍍覆處理及鍍覆膜評估) (plating treatment and coating film evaluation)

實施例5中,除了使用加入雙-(ω-磺丙基)-二硫化物二鈉鹽10mg/L、二乙基番紅的重氮化處理物50mg/L、及上述合成後的聚氧乙烯(25)聚氧丙烯(3)2-乙基己醚0.2g/L作為添加劑之硫酸銅電鍍浴之外,其他與實施例1相同,使用哈氏槽試驗器來進行電鍍處理。 In Example 5, except that 10 mg/L of bis-(ω-sulfopropyl)-disulfide disodium salt, 50 mg/L of diazotized treatment of diethyl russin, and the above-mentioned polyoxygen after synthesis were used. A plating apparatus was carried out using a Hastelloy tester in the same manner as in Example 1 except that ethylene (25) polyoxypropylene (3) 2-ethylhexyl ether 0.2 g/L was used as an additive copper sulfate plating bath.

其結果可從低電流密度部至高電流密度部均勻地形成具有良好的光澤之析出物。此外,即使在將銅板放入於上述哈氏槽試驗器一晚後同樣地進行電鍍處理,亦與最初的電鍍處理相同,可均勻地形成具有良好的光澤之析出物。 As a result, a precipitate having a good gloss can be uniformly formed from the low current density portion to the high current density portion. Further, even if the copper plate was placed in the above-described Hastelloy tester overnight, the plating treatment was performed in the same manner, and as in the initial plating treatment, precipitates having good gloss were uniformly formed.

<實施例6> <Example 6> (嵌段聚合物的合成) (Synthesis of block polymer)

將1-十二烷醇1860g(10莫耳)與氫氧化鉀5.6g(0.1莫耳)量取至氣密反應容器,在氮氣環境下,於90~130℃、2~5kg/cm2的加壓下使環氧丙烷116g(2莫耳)進行加成反應。環氧丙烷的加成反應結束後,冷卻反應容器,接著加入環氧乙烷1320g(30莫耳),在同樣的條件下進行加成反應。 1860 g (10 mol) of 1-dodecanol and 5.6 g (0.1 mol) of potassium hydroxide were taken into a gas-tight reaction vessel under a nitrogen atmosphere at 90-130 ° C and 2-5 kg/cm 2 . 116 g (2 mol) of propylene oxide was subjected to an addition reaction under pressure. After completion of the addition reaction of propylene oxide, the reaction vessel was cooled, and then 1320 g (30 mol) of ethylene oxide was added, and an addition reaction was carried out under the same conditions.

然後添加50g的合成吸附材(Kyowaad 600,協和化學工業股份有限公司製)於反應容器,在70℃下攪拌30分鐘後進行過濾,而得聚氧乙烯(30)聚氧丙烯(2)十二烷醚3200g。 Then, 50 g of a synthetic adsorbent (Kyowaad 600, manufactured by Kyowa Chemical Industry Co., Ltd.) was added to the reaction vessel, and the mixture was stirred at 70 ° C for 30 minutes, followed by filtration to obtain polyoxyethylene (30) polyoxypropylene (2) twelve. Alkyl ether 3200g.

(鍍覆處理及鍍覆膜評估) (plating treatment and coating film evaluation)

實施例6中,除了使用加入雙-(ω-磺丙基)-二硫化物二鈉鹽10mg/L、二乙基番紅的重氮化處理物50mg/L、及上述合成後的聚氧乙烯(30)聚氧丙烯(2)十二烷醚0.2g/L作為添加劑之硫酸銅電鍍浴之外,其他與實施例1相同,使用哈氏槽試驗器來進行電鍍處理。 In Example 6, except that 10 mg/L of bis-(ω-sulfopropyl)-disulfide disodium salt, 50 mg/L of diazotized product of diethyl russin, and the above-mentioned polyoxygen after synthesis were used. The electroplating treatment was carried out using a Hastelloy tester in the same manner as in Example 1 except that the ethylene (30) polyoxypropylene (2) dodecane ether 0.2 g/L was used as an additive copper sulfate plating bath.

其結果可從低電流密度部至高電流密度部均勻地形成具有良好的光澤之析出物。此外,即使在將銅板放入於上述哈氏槽試驗器一晚後同樣地進行電鍍處理,亦與最初的電鍍處理相同,可均勻地形成具有良好的光澤之析出物。 As a result, a precipitate having a good gloss can be uniformly formed from the low current density portion to the high current density portion. Further, even if the copper plate was placed in the above-described Hastelloy tester overnight, the plating treatment was performed in the same manner, and as in the initial plating treatment, precipitates having good gloss were uniformly formed.

<比較例1> <Comparative Example 1> (鍍覆處理及鍍覆膜評估) (plating treatment and coating film evaluation)

比較例1中,除了使用加入雙-(ω-磺丙基)-二硫化物二鈉鹽10mg/L、二乙基番紅的重氮化處理物50mg/L、及聚乙二醇0.2g/L作為添加劑之硫酸銅電鍍浴之外,其他與實施例1相同,使用哈氏槽試驗器來進行電鍍處理,並評估析出形成後的鍍覆膜。該比較例1及下列比較例2及3中,亦將空氣吹入於銅電鍍浴並充分地攪拌。 In Comparative Example 1, except that bis-(ω-sulfopropyl)-disulfide disodium salt 10 mg/L, diammonium diazotized product 50 mg/L, and polyethylene glycol 0.2 g were used. The electroplating treatment was carried out using a Hastelloy tester in the same manner as in Example 1 except that the copper sulfate plating bath was used as an additive, and the deposited film after precipitation was evaluated. In Comparative Example 1 and Comparative Examples 2 and 3 below, air was also blown into the copper plating bath and sufficiently stirred.

其結果為該析出物雖具有良好的光澤,但產生細微的凹坑或白化,從低電流密度部至高電流密度部無法形成均勻的析出物,而成為外觀不良之鍍覆膜。 As a result, although the precipitate has a good luster, fine pits or whitening occur, and uniform precipitates cannot be formed from the low current density portion to the high current density portion, and the plating film is poor in appearance.

<比較例2> <Comparative Example 2> (鍍覆處理及鍍覆膜評估) (plating treatment and coating film evaluation)

比較例2中,除了使用加入雙-(ω-磺丙基)-二硫化物二鈉鹽10mg/L、二乙基番紅的重氮化處理物50mg/L、及聚丙二醇0.2g/L作為添加劑之硫酸銅電鍍浴之外,其他與實施例1相同,使用哈氏槽試驗器來進行電鍍處理,並評估析出形成後的鍍覆膜。 In Comparative Example 2, except that 10 mg/L of bis-(ω-sulfopropyl)-disulfide disodium salt, 50 mg/L of diazotized product of diethyl russin, and 0.2 g/L of polypropylene glycol were used. The plating treatment was carried out using a Hastelloy tester in the same manner as in Example 1 except that the copper sulfate plating bath was used as an additive, and the deposited film after precipitation was evaluated.

其結果為該析出物雖具有良好的光澤,但產生細微的凹坑或白化,從低電流密度部至高電流密度部無法形成均勻的析出物,而成為外觀不良之鍍覆膜。 As a result, although the precipitate has a good luster, fine pits or whitening occur, and uniform precipitates cannot be formed from the low current density portion to the high current density portion, and the plating film is poor in appearance.

<比較例3> <Comparative Example 3> (鍍覆處理及鍍覆膜評估) (plating treatment and coating film evaluation)

比較例3中,除了使用加入雙-(ω-磺丙基)-二硫化物二鈉鹽10mg/L、二乙基番紅的重氮化處理物50mg/L、及使環氧乙烷加成於聚丙二醇而得之嵌段聚合物(H-(EO)a-(PO)m-(EO)b-H,m=17,n=a+b=9)0.2g/L作為添加劑之硫酸銅電鍍浴之外,其他與實施例1相同,使用哈氏槽試驗器來進行電鍍處理,並評估析出形成後的鍍覆膜。 In Comparative Example 3, except that 10 mg/L of bis-(ω-sulfopropyl)-disulfide disodium salt, 50 mg/L of diazotized product of diethyl russin, and ethylene oxide were added. Block polymer obtained from polypropylene glycol (H-(EO)a-(PO)m-(EO)bH, m=17, n=a+b=9) 0.2 g/L copper sulfate as an additive The electroplating treatment was carried out using a Hastelloy tester in the same manner as in Example 1 except for the electroplating bath, and the deposited film after precipitation was evaluated.

其結果為該析出物雖具有良好的光澤,但產生細微的凹坑或白化,從低電流密度部至高電流密度部無法形成均勻的析出物,而成為外觀不良之鍍覆膜。 As a result, although the precipitate has a good luster, fine pits or whitening occur, and uniform precipitates cannot be formed from the low current density portion to the high current density portion, and the plating film is poor in appearance.

<比較例4> <Comparative Example 4> (鍍覆處理及鍍覆膜評估) (plating treatment and coating film evaluation)

比較例4中,除了使用加入雙-(ω-磺丙基)-二硫化物二鈉鹽10mg/L、二乙基番紅的重氮化處理物50mg/L、及同時使環氧乙烷與環氧丙烷加成於正丁醇而得之隨機聚合物0.2g/L作為添加劑之硫酸銅電鍍浴之外,其他與實施例1相同,使用哈氏槽試驗器來進行電鍍處理,並評估析出形成後的鍍覆膜。 In Comparative Example 4, except that bis-(ω-sulfopropyl)-disulfide disodium salt 10 mg/L, diazo sulphate diazotization treatment 50 mg/L, and ethylene oxide were simultaneously used. The same as in Example 1, except that the propylene oxide was added to n-butanol and the random polymer was 0.2 g/L of the copper sulfate plating bath as an additive, and the plating treatment was performed using a Hastelloy tester and evaluated. The formed plating film was deposited.

其結果為該析出物雖具有良好的光澤,但卻成為階梯狀地變化析出之階梯電鍍膜,低電流密度部上無法析出電鍍膜,而成為外觀不良之鍍覆膜。 As a result, the precipitate has a good luster, but the step plating film is changed in a stepwise manner, and the plating film is not deposited on the low current density portion, and the plating film is poor in appearance.

Claims (3)

一種銅電鍍用添加劑,其係由以下列一般式(1)表示之嵌段聚合物化合物所構成; (式中,R表示直鏈或分支鏈之碳數1~15的烷基或烯基,m為1~30,n為1~40的整數)。 An additive for copper plating, which is composed of a block polymer compound represented by the following general formula (1); (In the formula, R represents an alkyl group or an alkenyl group having 1 to 15 carbon atoms in a straight or branched chain, m is 1 to 30, and n is an integer of 1 to 40). 如申請專利範圍第1項之銅電鍍用添加劑,其中上述嵌段聚合物化合物,係在非活性氣體環境下使環氧丙烷加成反應於碳數1~15的烷醇或烯醇後,加入環氧乙烷進行加成反應而得。 The additive for copper plating according to claim 1, wherein the block polymer compound is added by reacting propylene oxide with an alkyl alcohol or an enol having 1 to 15 carbon atoms in an inert gas atmosphere. Ethylene oxide is obtained by addition reaction. 一種銅電鍍浴,其係含有上述如申請專利範圍第1項之銅電鍍用添加劑。 A copper electroplating bath comprising the above-mentioned additive for copper electroplating according to item 1 of the patent application.
TW101110579A 2011-03-28 2012-03-27 Copper Plating Additives and Copper Plating Baths TWI608130B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011070667A JP5363523B2 (en) 2011-03-28 2011-03-28 Additive for electrolytic copper plating and electrolytic copper plating bath

Publications (2)

Publication Number Publication Date
TW201300581A true TW201300581A (en) 2013-01-01
TWI608130B TWI608130B (en) 2017-12-11

Family

ID=46930947

Family Applications (1)

Application Number Title Priority Date Filing Date
TW101110579A TWI608130B (en) 2011-03-28 2012-03-27 Copper Plating Additives and Copper Plating Baths

Country Status (6)

Country Link
US (1) US20130341199A1 (en)
JP (1) JP5363523B2 (en)
KR (1) KR101940593B1 (en)
CN (1) CN103443334B (en)
TW (1) TWI608130B (en)
WO (1) WO2012133225A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3074552A1 (en) * 2013-11-25 2016-10-05 Enthone, Inc. Electrodeposition of copper
US9809891B2 (en) 2014-06-30 2017-11-07 Rohm And Haas Electronic Materials Llc Plating method
JP6733314B2 (en) * 2015-09-29 2020-07-29 三菱マテリアル株式会社 High-purity copper electrolytic refining additive and high-purity copper manufacturing method
US10988852B2 (en) * 2015-10-27 2021-04-27 Rohm And Haas Electronic Materials Llc Method of electroplating copper into a via on a substrate from an acid copper electroplating bath
CA3119028A1 (en) 2018-11-07 2020-05-14 Coventya, Inc. Satin copper bath and method of depositing a satin copper layer

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5730854A (en) * 1996-05-30 1998-03-24 Enthone-Omi, Inc. Alkoxylated dimercaptans as copper additives and de-polarizing additives
JPH1088186A (en) * 1996-09-17 1998-04-07 Dai Ichi Kogyo Seiyaku Co Ltd Nonionic surfactant and liquid detergent composition uisng the same
US6776893B1 (en) * 2000-11-20 2004-08-17 Enthone Inc. Electroplating chemistry for the CU filling of submicron features of VLSI/ULSI interconnect
SG144688A1 (en) * 2001-07-23 2008-08-28 Fujimi Inc Polishing composition and polishing method employing it
EP1422320A1 (en) * 2002-11-21 2004-05-26 Shipley Company, L.L.C. Copper electroplating bath
JP2005194608A (en) 2004-01-09 2005-07-21 Asahi Denka Kogyo Kk Additive for electrolytic copper plating, and electrolytic copper plating bath
WO2006018872A1 (en) * 2004-08-18 2006-02-23 Ebara-Udylite Co., Ltd. Additive for copper plating and process for producing electronic circuit substrate therewith
TW200632147A (en) * 2004-11-12 2006-09-16
US20070178697A1 (en) * 2006-02-02 2007-08-02 Enthone Inc. Copper electrodeposition in microelectronics
JP4813213B2 (en) * 2006-03-07 2011-11-09 花王株式会社 Wrinkle removal deodorant composition
JP2008222946A (en) * 2007-03-15 2008-09-25 Seiko Epson Corp Ink for inkjet recording
JP2008222944A (en) * 2007-03-15 2008-09-25 Seiko Epson Corp Ink for inkjet recording
JP2008297221A (en) 2007-05-29 2008-12-11 Shinko Electric Ind Co Ltd Method for producing brightener for plating
AU2009260327A1 (en) * 2008-06-18 2009-12-23 Dow Global Technologies Llc Cleaning compositions containing mid-range alkoxylates
EP2199315B1 (en) * 2008-12-19 2013-12-11 Basf Se Composition for metal electroplating comprising leveling agent
JP2010255078A (en) * 2009-04-28 2010-11-11 Adeka Corp Electrolytic copper plating bath and electrolytic copper plating method

Also Published As

Publication number Publication date
CN103443334A (en) 2013-12-11
WO2012133225A1 (en) 2012-10-04
US20130341199A1 (en) 2013-12-26
JP5363523B2 (en) 2013-12-11
CN103443334B (en) 2018-02-06
KR20140013021A (en) 2014-02-04
JP2012201976A (en) 2012-10-22
KR101940593B1 (en) 2019-01-21
TWI608130B (en) 2017-12-11

Similar Documents

Publication Publication Date Title
TWI608130B (en) Copper Plating Additives and Copper Plating Baths
JP4799887B2 (en) Electro copper plating bath and copper plating method
CN100480434C (en) Pyrophosphoric acid bath for use in copper-tin alloy plating
TWI268966B (en) Electrolytic copper plating method
ES2726013T3 (en) High purity sulfonic acid electrolytic solutions
JPS6220278B2 (en)
JP5366076B2 (en) Electroplating bath for porous plating film containing additive for forming porous plating film
JP2003113490A (en) Plating bath and method for depositing metal layer on substrate
JP3306438B2 (en) Alkoxylated dimercaptans as copper additives
JP5735415B2 (en) Pyrophosphate-containing bath for copper-tin alloy deposition without cyanide
CN101302632A (en) Metal plating compositions
JP2003147572A (en) Plating bath and method for depositing metallic layer on substrate
US11555252B2 (en) Satin copper bath and method of depositing a satin copper layer
US20150014177A1 (en) Method for producing matt copper deposits
CN101874128B (en) Copper-zinc alloy electroplating bath and plating method using the copper-zinc alloy electroplating bath
US20120003498A1 (en) Copper-zinc alloy electroplating bath and method of plating using same
JP2757749B2 (en) Additive for electrolytic copper plating and electrolytic copper plating bath
JPH0770052A (en) Organic thio compound
PL128142B1 (en) Cyanide bath for electrodeposition of bright silver coatings of increased hardness
PL181395B1 (en) Alkaline bath for producing glossy zinc coatings by electroplating
PL123411B1 (en) Cyanide bath for electrolytic deposition of bright silver coatings of improved hardness