201250263 六、發明說明： 【發明所屬之技術領域】 本發明係關於一種用以測試一玻璃面板之陣列測試 裝置。 【先前技術】 就大眾所知，平面顯示器係一種輕薄型的影像顯示 器，它比傳統使用陰極射線管的顯示器更輕、更薄。平面 顯示器的種類繁多，目前已經被發展並使用的例如為液晶 顯示器、電漿顯示器、場發射顯示器、有機發光二極體顯 示器等。 其中，液晶顯示器具有複數液晶單元陣列設置，並依 據影像資料提供資料訊號至各液晶單元以調整各液晶單 元之光線穿透率進而顯示畫面。由於其薄型化、輕量化、 低耗電以及低操作電壓等優點，液晶顯示器已被廣泛的使 用。以下簡述一種習知液晶顯示面板的製造方法。 首先，於一上基板形成一彩色滤光層及一共同電極 層，並於一下基板形成複數薄膜電晶體及晝素電極。上基 板與下基板係相對設置。然後，於上基板與下基板各形成 一配向層。之後，在配向膜上磨擦以提供一預傾角及一配 向方向來配向液晶層之液晶分子。其中，液晶層將會形成 於兩基板之間。 此外，依據一預定圖案在兩基板之至少一基板上塗 膠，以形成框膠，藉以在兩基板之間形成一間隙，並避免 201250263 液晶泡漏到基板外。然後兩基板在維持—間隙的情況下封 合。之後，在兩基板之間形成液晶層，如此就製成液晶面 板。 在製造方法的過程令，需要有一檢測程序來檢驗下基 板（以下皆稱為玻璃面板，其上設置有薄獏電晶體及晝素 電極）是衫缺陷存在，例如設置於基板之t料線或掃描 線的電性連接是否良好、或是畫素單元之色彩的精確度。 -種習知陣列測試裝置係用以檢測玻璃面板，並包含 —光源、-調製器單元以及—攝像單元。調製器單元具有 1光材料層。在峨器單元靠近玻璃面板時，對調製器 單兀與玻璃面板施加一預設強度之電壓。若玻璃面板無缺 陷，則在調製器單元與玻璃面板之間會形成一電場；反 之’若玻璃面板有缺陷，則在兩者之間沒有電場產生、或 疋產生的電場強度相對較小。藉此，陣列測試裝置可藉由 量測調製器單元與玻璃面板之間的電場強度來判斷玻璃 面板是否具有缺陷。 在玻璃面板置放於支撐板上之後’才進行玻璃面板之 測試。為此，就需要複數吸氣孔形成於支撐板内並連接於 一負壓源。藉由吸氣孔之吸附氣體，玻璃面板係吸附並固 定於支撐板上。然而’在習知技術中’由於氣體係在同一 時間被吸入吸氣孔内，因此玻璃面板鄰近吸氣孔的區域係 可信賴地吸附並貼合於支撐板上’但是對玻璃面板其他非 鄰近吸氣孔的區域而言’由於在玻璃面板完全貼合於支撐 板上之前，氣體可能無法完全被吸入至吸氣孔内’因而會 201250263 在玻璃面板與支撐板的上表面形成不想要的空氣層。此空 氣層使得玻璃面板的上表面不等高，以致玻璃面板無法被 正確地測試。 【發明内容】 有鑒於上述課題，本發明之一目的在於提供一種陣列 測試裝置，當玻璃面板吸附於支撐板上時，可避免在玻璃 面板與支撐板之間形成一空氣層，因而玻璃面板可準確地 進行測試。 為達上述目的，本發明之一種陣列測試裝置包含一支 撐板，其具有一測試部，一玻璃面板之一目標區域係貼合 於測試部。複數吸氣孔形成於該支撐板並位於測試部之兩 邊。其中，複數吸槽形成於支撐板之測試部面對玻璃面板 之一表面，各吸槽係與至少一吸氣孔連通。 在本發明之陣列測試裝置中，與吸氣孔連通之吸槽係 形成於支撐板之一測試部，而玻璃面板之目標區域係貼合 於測試部。當玻璃面板被吸附至支撐板時，存在於玻璃面 板之目標區域與支撐板之測試部之間的空氣可經由吸槽 而排出至外面。因此’本發明可避免空氣層形成於玻璃面 板與支撐板之間’進而使玻璃面板之上表面維持平面狀。 如此就能夠準確地測試玻璃面板。 此外，在本發明之陣列測試裝置中，玻璃面板不僅可 被吸附至具有吸氣孔之一吸附部’而且可被吸附至具有吸 槽之測試部。因此，玻璃面板能夠更可靠地支樓於支撐板 201250263 上，使得玻璃面板能夠更準確地進行測試。 【實施方式】 以下將參照相關圖式，說明依據本發明較佳實施例之 一種陣列測試裝置，其中相同的元件將以相同的參照符號 加以說明。 如圖1所示，本發明第一實施例之一種陣列測試裝置 10包含一載入單元20、一測試單元30以及一卸載單元 40。載入單元20係將一玻璃面板P載入至裝置上，測試 單元30係測試由載入單元20所載入之玻璃面板P，卸載 單元40係從裝置上將由測試單元30測試完畢之玻璃面板 P卸載下來。 載入單元20包含複數第一支撐板22，該等第一支撐 板22相距一預設間距，並用以支撐待測試之玻璃面板P。 卸載單元40包含複數第二支撐板42，該等第二支撐板42 相距一預設間距並用以支撐已測試之玻璃面板P。吹氣孔 24、44分別形成於載入單元20之第一支撐板22以及卸載 單元40之第二支撐板42。氣體係由吹氣孔24或44排出 並吹向玻璃面板P之一下表面以使玻璃面板P懸浮。此 外，一玻璃面板輸送單元70設置於載入單元20與卸載單 元40。玻璃面板輸送單元70可利用吸力吸住玻璃面板P 的下表面並沿一直線方向移動以輸送玻璃面板P。 測試單元30係測試玻璃面板P是否具有電性缺陷。 測試單元30包含一支撐板31，一測試模組32以及一探針 201250263 組件33。由載入單元20所载入之址成 <坡璃面板P係設置於支 撐板31上，並由測試模組32進杆带ViL i 订電性缺陷之測試。探針 組件33可對置放於支撐板31上之站# t 〈破璃面板的電極施加電 性訊號，試模組32設置於1試模組移動單S60上， 測試模組移動單it 6G係位於切板31上並沿—χ轴方向 延伸-預設長度’使得測試模組32能夠沿著測試模組移 動單元60而在X軸方向上移動。在本實施例中複數測 試模組32係沿著測試模組移動單元6〇所延伸之方向（如 X轴方向）而排列。 測試模組32可分為如圖2所示之反光式以及圖3所 示之透光式。在本實施例中，反光式之測試模組32與透 光式之測試模組32皆可應用於測試單元％。 如圖2所示，測試模組32包含一光源32卜一第一偏 振板323、一半棱鏡322、一調製器單元12〇、一攝像單元 100以及一第二偏振版324。第一偏振板323係使光源321 所發出之光線產生偏振。半棱鏡322可控制被第一偏振板 323所偏振之光線，並使其朝向支撐板31。調製器單元12〇 係位於玻璃面板P上並面向玻璃面板P。攝像單元1〇〇可 對調製器單元120攝取一影像。第二偏振板324設置於調 製器單元120與攝像單元1〇〇之間，並可使穿出調製器單 元120之光線產生偏振。在本實施例中，支撐板之表 面上塗佈一反射材料。藉此，光源321發出光線，然後光 線被第一偏振板323所偏振並藉由半棱鏡322改變路徑。 接著’光線穿過調製器單元120與玻璃面板P，並被支標 201250263 板31所反射而再次穿過玻填面板P與調製器單元120。穿 出調製器單兀120之光線在進入攝像單元1〇〇之前，係被 第二偏振板324所偏振。 另外，如圖3所示，透光式之測試模組32包含一調 製器單兀120、一攝像單元1〇〇、一第一偏振板323以及 一第二偏振板324。調製器單元120位於玻璃面板P上並 面對玻璃面板P設置。光源321設置於支撐板31之下。 攝像單元100對調製器單元12〇攝取一影像。第一偏振板 323設置於支撐板31與光源321之間並使光源321所發出 之光線產生偏振。第二偏振板324設置於調製器單元12〇 與攝像單元100之間並使穿出調製器單元12〇之光線產生 偏振。在本態樣中’支撐板31係由透光材質製成。藉此， 光源321所發出之光線被第一偏振板323所偏振然後依序 穿過支禮板31、玻璃面板p以及調製器單元12〇。接著， 穿出調製器單元120之光線在進入攝像單元丨00之前，係 被第二偏振板324所偏振。 第一偏振板323與第二偏振板324之其中一功能係使 光線對準於一正確的方向，使得攝像單元100能夠有效地 攝取並分析從調製器單元120穿出之光線的影像。 調製器單元120包含一第一基板121、一第二基板 122、一電光材料層123、一第一配向膜124、一第二配向 膜125以及一調製電極層126。第一基板121與第二基板 122係由透光材料製成。電光材料層123位於第一基板121 與第二基板122之間。第一配向膜124與第二配向膜125201250263 VI. Description of the Invention: [Technical Field of the Invention] The present invention relates to an array test apparatus for testing a glass panel. [Prior Art] As far as the public is concerned, a flat panel display is a thin and light image display device which is lighter and thinner than a conventional display using a cathode ray tube. A wide variety of flat panel displays have been developed and used, for example, liquid crystal displays, plasma displays, field emission displays, organic light emitting diode displays, and the like. The liquid crystal display has a plurality of liquid crystal cell arrays, and provides data signals to the liquid crystal cells according to the image data to adjust the light transmittance of each liquid crystal cell to display the image. Liquid crystal displays have been widely used due to their advantages of thinness, light weight, low power consumption, and low operating voltage. A method of manufacturing a conventional liquid crystal display panel will be briefly described below. First, a color filter layer and a common electrode layer are formed on an upper substrate, and a plurality of thin film transistors and a halogen electrode are formed on the lower substrate. The upper substrate is disposed opposite to the lower substrate. Then, an alignment layer is formed on each of the upper substrate and the lower substrate. Thereafter, rubbing on the alignment film to provide a pretilt angle and an alignment direction to align liquid crystal molecules of the liquid crystal layer. Among them, the liquid crystal layer will be formed between the two substrates. In addition, a glue is applied to at least one of the substrates of the two substrates according to a predetermined pattern to form a sealant, thereby forming a gap between the two substrates, and avoiding leakage of the 201250263 liquid crystal bubbles outside the substrate. The two substrates are then sealed with a maintenance-gap. Thereafter, a liquid crystal layer was formed between the two substrates, thus forming a liquid crystal panel. In the process of the manufacturing method, a test procedure is required to inspect the lower substrate (hereinafter referred to as a glass panel on which a thin germanium transistor and a halogen electrode are disposed), which is a defect of the shirt, such as a t-line disposed on the substrate or Whether the electrical connection of the scan line is good or the color of the pixel unit is accurate. A conventional array test device is used to detect a glass panel and includes a light source, a modulator unit, and a camera unit. The modulator unit has a layer of light material. When the buffer unit is close to the glass panel, a voltage of a predetermined intensity is applied to the modulator unit and the glass panel. If the glass panel is free of defects, an electric field is formed between the modulator unit and the glass panel; if the glass panel is defective, no electric field is generated between the two, or the electric field generated by the crucible is relatively small. Thereby, the array test apparatus can judge whether or not the glass panel has a defect by measuring the electric field strength between the modulator unit and the glass panel. The glass panel was tested after the glass panel was placed on the support plate. To this end, a plurality of suction holes are required to be formed in the support plate and connected to a negative pressure source. The glass panel is adsorbed and fixed to the support plate by the adsorption gas of the suction holes. However, 'in the prior art', since the gas system is sucked into the suction hole at the same time, the area of the glass panel adjacent to the suction hole is reliably adsorbed and attached to the support plate' but other non-adjacent to the glass panel In the area of the suction hole, the gas may not be completely sucked into the suction hole before the glass panel is completely attached to the support plate. Thus, 201250263 forms an unwanted air on the upper surface of the glass panel and the support plate. Floor. This air layer makes the upper surface of the glass panel not so high that the glass panel cannot be properly tested. SUMMARY OF THE INVENTION In view of the above problems, an object of the present invention is to provide an array test device that avoids forming an air layer between a glass panel and a support plate when the glass panel is adsorbed on the support plate, so that the glass panel can be Test accurately. To achieve the above object, an array test apparatus of the present invention comprises a riser having a test portion to which a target area of a glass panel is attached. A plurality of suction holes are formed in the support plate and are located on both sides of the test portion. Wherein, the plurality of suction grooves are formed on the surface of one of the glass panels of the test portion of the support plate, and each of the suction grooves is in communication with at least one suction hole. In the array test apparatus of the present invention, the suction groove communicating with the suction hole is formed in one of the test portions of the support plate, and the target area of the glass panel is attached to the test portion. When the glass panel is adsorbed to the support plate, air existing between the target area of the glass panel and the test portion of the support plate can be discharged to the outside via the suction groove. Therefore, the present invention can prevent the air layer from being formed between the glass panel and the support plate, thereby maintaining the upper surface of the glass panel in a planar shape. This makes it possible to accurately test the glass panel. Further, in the array test apparatus of the present invention, the glass panel can be adsorbed not only to one of the suction holes of the suction holes but also to the test portion having the suction grooves. Therefore, the glass panel can be more reliably supported on the support plate 201250263, enabling the glass panel to be tested more accurately. [Embodiment] An array test apparatus according to a preferred embodiment of the present invention will be described with reference to the accompanying drawings, in which the same elements will be described with the same reference numerals. As shown in FIG. 1, an array testing apparatus 10 according to a first embodiment of the present invention includes a loading unit 20, a testing unit 30, and an unloading unit 40. The loading unit 20 loads a glass panel P onto the device, and the testing unit 30 tests the glass panel P loaded by the loading unit 20, and the unloading unit 40 is a glass panel that is tested by the testing unit 30 from the device. P unloaded. The loading unit 20 includes a plurality of first support plates 22 that are spaced apart from each other by a predetermined distance and are used to support the glass panel P to be tested. The unloading unit 40 includes a plurality of second support plates 42 spaced apart by a predetermined distance and used to support the tested glass panel P. The blow holes 24, 44 are formed in the first support plate 22 of the loading unit 20 and the second support plate 42 of the unloading unit 40, respectively. The gas system is discharged from the blow holes 24 or 44 and blown toward the lower surface of one of the glass panels P to suspend the glass panel P. In addition, a glass panel transport unit 70 is disposed in the loading unit 20 and the unloading unit 40. The glass panel conveying unit 70 can suction the lower surface of the glass panel P by suction and move in a straight line direction to convey the glass panel P. The test unit 30 tests whether the glass panel P has an electrical defect. The test unit 30 includes a support plate 31, a test module 32, and a probe 201250263 assembly 33. The address loaded by the loading unit 20 is set on the support plate 31, and the test module 32 is used to test the electrical defect of the ViL i. The probe assembly 33 can apply an electrical signal to the electrodes of the station #t<glass panel placed on the support plate 31, and the test module 32 is disposed on the single test module mobile single S60, and the test module moves the single IT 6G. It is located on the cutting plate 31 and extends in the -axis direction - the preset length ' enables the test module 32 to move in the X-axis direction along the test module moving unit 60. In the present embodiment, the plurality of test modules 32 are arranged along the direction in which the test module moving unit 6 is extended (e.g., the X-axis direction). The test module 32 can be divided into a reflective type as shown in Fig. 2 and a light transmitting type as shown in Fig. 3. In this embodiment, both the reflective test module 32 and the transmissive test module 32 can be applied to the test unit %. As shown in FIG. 2, the test module 32 includes a light source 32, a first polarization plate 323, a half prism 322, a modulator unit 12A, an image pickup unit 100, and a second polarization plate 324. The first polarizing plate 323 causes polarization of light emitted from the light source 321. The half prism 322 can control the light polarized by the first polarizing plate 323 and face it toward the support plate 31. The modulator unit 12 is attached to the glass panel P and faces the glass panel P. The camera unit 1 can take an image of the modulator unit 120. The second polarizing plate 324 is disposed between the modulator unit 120 and the image pickup unit 1A, and can polarize light passing through the modulator unit 120. In this embodiment, a reflective material is applied to the surface of the support plate. Thereby, the light source 321 emits light, and then the light is polarized by the first polarizing plate 323 and the path is changed by the half prism 322. The light then passes through the modulator unit 120 and the glass panel P and is reflected by the slab 201250263 plate 31 and passes through the glazing panel P and the modulator unit 120 again. The light that has passed through the modulator unit 120 is polarized by the second polarizing plate 324 before entering the image pickup unit 1A. In addition, as shown in FIG. 3, the light transmissive test module 32 includes a modulator unit 120, an imaging unit 1A, a first polarizing plate 323, and a second polarizing plate 324. The modulator unit 120 is located on the glass panel P and disposed facing the glass panel P. The light source 321 is disposed under the support plate 31. The imaging unit 100 takes an image of the modulator unit 12A. The first polarizing plate 323 is disposed between the support plate 31 and the light source 321 and polarizes light emitted from the light source 321. The second polarizing plate 324 is disposed between the modulator unit 12A and the image capturing unit 100 and polarizes light passing through the modulator unit 12A. In this aspect, the support plate 31 is made of a light transmissive material. Thereby, the light emitted from the light source 321 is polarized by the first polarizing plate 323 and then sequentially passes through the binding plate 31, the glass panel p, and the modulator unit 12A. Then, the light that has passed through the modulator unit 120 is polarized by the second polarizing plate 324 before entering the image pickup unit 丨00. One of the functions of the first polarizing plate 323 and the second polarizing plate 324 is to align the light in a correct direction, so that the image capturing unit 100 can efficiently take in and analyze the image of the light that is emitted from the modulator unit 120. The modulator unit 120 includes a first substrate 121, a second substrate 122, an electro-optic material layer 123, a first alignment film 124, a second alignment film 125, and a modulation electrode layer 126. The first substrate 121 and the second substrate 122 are made of a light transmissive material. The electro-optic material layer 123 is located between the first substrate 121 and the second substrate 122. First alignment film 124 and second alignment film 125
S 201250263 分別位於第一基板121與第二基板122之間，並且相對設 置。調製電極層126位於第一基板121上。 當電訊號施加給玻璃面板P之電極以及調製器單元 120之調製電極層126時，在玻璃面板p與調製器單元120 之間係產生一電場，而電光材料層123係特定物理特性會 隨著該電場強度的不同而有所改變。舉例而言，電光材料 層123可由液晶製成，而液晶之光線穿透率會依據電場強 度而變化。另外，電光材料層123可由高分子分散液晶 (polymer dispersed liquid crystal, PDLC)製成，其可依據 電場強度而變化轉動方向，因而可使入射光偏振至一需要 角度。 承上’當電訊號施加給玻璃面板P之電極以及調製器 單元120之調製電極層丨26時，在玻璃面板P與調製器單 元120之間係產生一電場。而電光材料層123之材料特性 會隨著電場強度不同而有所變化。這樣，穿透調製器單元 120之光線的量就會有所變化。在此狀況下，攝像單元1⑼ 對調製器單元120攝取一影像。然後，藉由所攝取之影像 來分析光量’即可判斷玻璃面板P與調製器單元12〇之門 的電場強度大小》假使玻璃面板P具有缺陷，則破壤面板 P與調製器單元120之間所形成的電場強度為零或較—& 狀況為小。如此，藉由量測電場強度值，即可列斷坡 板P是否具有缺陷》 面 層 第一配向膜124與第二配向膜125係用 123之電光材料朝一預設方向配向，其中 以使電光材料 ，電光材料例 201250263 如液晶分子或高分子材料。第一配向膜124與第二配向膜 125可具有一配向方向，例如第一配向膜124與第二配向 膜125之配向方向係與Y軸方向呈45度夾角，其中γ轴 方向為玻璃面板P載入至支撐板31的方向。 如圖4所示，支撐板31具有一測試部311以及複數 吸附部313。測試部311位於支撐板31之中央處。玻璃面 板P之待測试之一目標區域係貼合於測試部3 11。吸附部 313位於測試部311的二邊《複數吸氣孔312形成於各吸 附部313。玻璃面板p之吸附區域係形成於目標區域的兩 邊並由吸附部313所吸附。 測試部311係沿與玻璃面板p載入至支禮板3ι之方 向（如Y軸方向）水平垂直之一方向（如χ軸方向）而延 伸預5又長度。測試部3 Π較佳者係呈平面。吸附部313 位於測試部311的兩邊並沿測試部311所延伸之方向（如 X軸方向）而延伸一預設長度。吸氣孔312係與一吸附裝 置（圖未顯示）連接，吸附裝置作動時可吸氣，因而提供 負壓給吸氣孔312。 另外，圖5顯示另一態樣之支撐板31。如圖5所示， 複數吸氣導槽314可形成於吸氣孔312周圍。吸氣導槽314 與吸氣孔312相連通並朝向開孔。各吸氣導槽314具有一 長度與冑度對應吸附部313之區域。由於吸氣導槽 形成於支撐板31，因而增加玻璃面板ρ被負壓所吸附之面 積，使得玻璃面板Ρ能夠可靠地吸附於支撐板31上。 在本發明中，複數吸槽315形成於測試部31〗面向玻 201250263 璃面板P之一表面。各吸槽315與至少一吸氣孔312連通β 當玻璃面板Ρ之目標區域貼合於測試部311時，吸槽315 可作為通道’讓玻璃面板Ρ與測試部311之間的空氣被吸 入吸氣孔312内。 各吸槽315直線延伸一預設長度。如圖4所示，一些 吸槽315之兩端分別與對應的吸氣孔312連通，而其他的 吸槽315僅有一端與對應的吸氣孔312連通。如圖5所示， 在吸導槽314形成於吸氣孔312周圍的態樣中，吸槽315 係經由對應的吸氣導槽314而與對應的吸氣孔312連通。 此外，各吸槽315可為一直線形，並與玻璃面板ρ載 入至支撐板31之方向（Υ軸方向）夾一預設角度。換言之， 如圖4與圖5所示，吸槽315之延伸方向（Ε軸方向）與 玻璃面板Ρ載入至支撐板31之方向（γ軸方向）夾一預 設角度Α。 為避免支撐板31所反射之光線或從支撐板31穿出之 光線被吸槽315所影響而造成扭曲、變形等，吸槽315延 伸之方向（E軸方向）較佳者係與第一、第二配向膜124、 125之配向方向相同。換言之，較佳者為夾角a係與第一、 第二配向膜124、125之配向方向與玻璃面板p載入至支 撐板31之方向（Y軸方向）之夾角相同。舉例而言，夾角 A、與第-、第二配向膜124、125之配向方向與玻璃面板 P載入至支魏之方向（Y抽方㈤之夹角皆為45度。 此外，為最小化光線之偏振損失’較佳者係吸槽315 之延伸方向（E軸方向）盘第一值拓i 罘偏振板323與第二偏振板 201250263 324給予光線之偏振方向相同。於此，當吸槽315之延伸 方向（E軸方向）、第一、第二配向膜124、125之配向方 向、以及第一偏振板323與第二偏振板324給予光線之偏 振方向相同時，可避免光線由於吸槽315而造成扭曲、變 形，並且光線之偏振損失可降到最小。 如圖6所示，各吸槽315較佳者係具有一半圓形之橫 切面，且具有一預設曲率半徑以簡化吸槽315在支撐板31 之製程。此外，在本實施例中，吸槽315較佳者係具有一 寬度W為6mm，一深度D為0.15mm，以及一曲率半徑R 為30mm，藉此可避免在玻璃面板P與測試部311之間形 成一空氣層，並且可簡化吸槽315之製程。 另外，較佳者，吸槽315之曲率半徑R可介於20mm 至40mm之間。依據一測試結果，若曲率半徑R小於 20mm，則難以在支撐板31上形成吸槽315 ;若曲率半徑 R大於40mm，當玻璃面板P被吸附至支撐板31上時，玻 璃面板P可能會陷入吸槽315，而造成玻璃面板P的上表 面高度不均、或使玻璃面板P之下表面受到損壞。 此外，較佳者，吸槽315之深度D可為0· 1 mm以上。 依據一測試結果，若吸槽315之深度D介於0.1mm至 0.2mm之間，則有利於玻璃面板P與測試部311之間氣體 經由吸槽315排出。此外，若吸槽315之深度D小於 0.1mm，則吸槽315之排出氣體效果會下降。 藉此，在玻璃面板P置放於支撐板31上之後，當吸 附裝置作動而將負壓施加給吸氣孔312時，玻璃面板P之 12 201250263 吸附區域係被吸附至支撐板31之吸附部313上。這樣， 玻璃面板P之目標區域係貼合於支撐板31之測試部311。 在此狀況下，負壓亦施加給測試部311之吸槽315，使得 玻璃面板P之目標區域與測試部311之間的空氣被吸槽 315導引並且被吸入至吸氣孔312，因而避免玻璃面板P 之目標區域與測試部311之間形成一空氣層。如此，玻璃 面板P不僅可藉由施加負壓給吸氣孔312而被吸附至吸附 部313，而且可藉由施加負壓給吸槽315而被吸附至測試 部 311。 综上所述，在本發明之陣列測試裝置中，與吸氣孔312 連通之吸槽315係形成於測試部311，而玻璃面板P之目 標區域係貼合於測試部311。當玻璃面板P被吸附至支撐 板31時，存在於玻璃面板P之目標區域與支撐板31之測 試部311之間的空氣可經由吸槽315而排出至外面。因 此，本發明可避免空氣層形成於玻璃面板P與支撐板31 之間，進而使玻璃面板P之上表面維持平面狀。如此就能 夠準確地測試玻璃面板P。 此外，在本發明之陣列測試裝置中，玻璃面板P不僅 可被吸附至具有吸氣孔312之吸附部313，而且可被吸附 至具有吸槽315之測試部311。因此，玻璃面板P能夠更 可靠地支撐於支撐板31上，使得玻璃面板P能夠更可靠 並準確地進行測試。 本發明之所有實施例的技術特徵可單獨實施或合併 實施。 13 201250263 以上所述僅為舉例性，而非為限制性者。任何未脫離 本發明之精神與範疇，而對其進行之等效修改或變更，均 應包含於後附之申請專利範圍中。 【圖式簡單說明】 圖1為本發明較佳實施例之一種陣列測試裝置的立體 示意圖； 圖2為圖1所示之陣列測試裝置之一測試模組的示意 圖， 圖3為圖1所示之陣列測試裝置之測試模組另一態樣 的示意圖； 圖4為圖1所示之陣列測試裝置之一支撐板的立體示 意圖； 圖5為圖1所示之陣列測試裝置之另一態樣的支撐板 的立體不意圖，以及 圖6為圖1所示之陣列測試裝置之支撐板所形成之一 吸槽的剖面示意圖。 【主要元件符號說明】 1:陣列測試裝置 20 :載入單元 22 :第一支撐板 24、44 :吹氣孔 201250263 30 :測試單元 31 :支撐板 311 :測試部 312 :吸氣孔 313 :吸附部 314 :吸氣導槽 315 :吸槽 32 :測試模組 3 21 :光源 322 :半棱鏡 323 :第一偏振板 324 :第二偏振版 33 :探針組件 40 :卸載單元 42 :第二支撐板 60 :測試模組移動單元 70 :玻璃面板輸送單元 100 :攝像單元 120 :調製器單元 121 :第一基板 122 :第二基板 123 :電光材料層 124 ··第一配向膜 第二配向膜 125 201250263 126 :調製電極層 A:預設角度 D :深度 P.玻璃面板 R :曲率半徑 W :寬度S 201250263 is located between the first substrate 121 and the second substrate 122, respectively, and is oppositely disposed. The modulation electrode layer 126 is located on the first substrate 121. When an electrical signal is applied to the electrode of the glass panel P and the modulation electrode layer 126 of the modulator unit 120, an electric field is generated between the glass panel p and the modulator unit 120, and the electro-optic material layer 123 is subjected to specific physical properties. The electric field strength varies with the difference in electric field strength. For example, the electro-optic material layer 123 can be made of liquid crystal, and the light transmittance of the liquid crystal varies depending on the electric field strength. Further, the electro-optic material layer 123 may be made of a polymer dispersed liquid crystal (PDLC) which changes the direction of rotation depending on the electric field strength, thereby polarizing the incident light to a desired angle. When an electric signal is applied to the electrode of the glass panel P and the modulation electrode layer 26 of the modulator unit 120, an electric field is generated between the glass panel P and the modulator unit 120. The material properties of the electro-optic material layer 123 vary depending on the electric field strength. Thus, the amount of light that passes through the modulator unit 120 will vary. In this case, the image pickup unit 1 (9) takes an image of the modulator unit 120. Then, by analyzing the amount of light by the captured image, it is possible to determine the magnitude of the electric field strength of the glass panel P and the gate of the modulator unit 12". If the glass panel P has a defect, between the destructive panel P and the modulator unit 120 The resulting electric field strength is zero or less than the -& Thus, by measuring the electric field strength value, it is possible to determine whether the slope P has a defect. The first alignment film 124 and the second alignment film 125 are aligned with a predetermined direction of the electro-optical material of 123, wherein the electro-optical light is aligned. Materials, examples of electro-optic materials 201250263 such as liquid crystal molecules or polymer materials. The first alignment film 124 and the second alignment film 125 may have an alignment direction. For example, the alignment direction of the first alignment film 124 and the second alignment film 125 is at an angle of 45 degrees with respect to the Y-axis direction, wherein the γ-axis direction is the glass panel P. Loaded into the direction of the support plate 31. As shown in Fig. 4, the support plate 31 has a test portion 311 and a plurality of adsorption portions 313. The test portion 311 is located at the center of the support plate 31. One of the target areas of the glass panel P to be tested is attached to the test portion 31. The adsorption portion 313 is located on both sides of the test portion 311. The plurality of intake holes 312 are formed in the respective suction portions 313. The adsorption region of the glass panel p is formed on both sides of the target region and adsorbed by the adsorption portion 313. The test portion 311 extends in a direction perpendicular to one direction (e.g., the x-axis direction) in the direction in which the glass panel p is loaded into the board 3 (e.g., the Y-axis direction) to extend the length of the pre-5. The test unit 3 is preferably a flat surface. The adsorption portion 313 is located on both sides of the test portion 311 and extends in a direction in which the test portion 311 extends (e.g., in the X-axis direction) by a predetermined length. The suction hole 312 is connected to a suction device (not shown), and the suction device can inhale when it is actuated, thereby providing a negative pressure to the suction hole 312. In addition, FIG. 5 shows another aspect of the support plate 31. As shown in FIG. 5, a plurality of suction channels 314 may be formed around the suction holes 312. The suction guide groove 314 communicates with the suction hole 312 and faces the opening. Each of the intake ducts 314 has a region in which the length and the twist correspond to the adsorption portion 313. Since the suction guide groove is formed in the support plate 31, the area where the glass panel ρ is adsorbed by the negative pressure is increased, so that the glass panel Ρ can be reliably attracted to the support plate 31. In the present invention, the plurality of suction grooves 315 are formed on the surface of one of the glass panels P of the glass portion 201250 of the test portion 31. Each of the suction grooves 315 is in communication with at least one of the suction holes 312. When the target area of the glass panel is attached to the test portion 311, the suction groove 315 can serve as a passage for the air between the glass panel and the test portion 311 to be sucked in. Inside the air hole 312. Each of the suction grooves 315 extends linearly by a predetermined length. As shown in FIG. 4, both ends of some of the suction grooves 315 are respectively communicated with the corresponding suction holes 312, and only one of the other suction grooves 315 is in communication with the corresponding suction holes 312. As shown in FIG. 5, in a state in which the suction channel 314 is formed around the air intake hole 312, the suction groove 315 communicates with the corresponding air suction hole 312 via the corresponding air intake channel 314. Further, each of the suction grooves 315 may be in a straight line shape and sandwiched by a predetermined angle with the direction in which the glass panel ρ is loaded into the support plate 31 (the axis direction). In other words, as shown in Figs. 4 and 5, the extending direction of the suction groove 315 (the z-axis direction) is set to a predetermined angle Α with the direction in which the glass panel Ρ is loaded into the support plate 31 (the γ-axis direction). In order to prevent the light reflected by the support plate 31 or the light passing through the support plate 31 from being affected by the suction groove 315 to cause distortion, deformation, etc., the direction in which the suction groove 315 extends (the E-axis direction) is preferably the first, The alignment directions of the second alignment films 124 and 125 are the same. In other words, it is preferable that the angle between the angle a and the first and second alignment films 124 and 125 is the same as the direction in which the glass panel p is loaded into the support plate 31 (the Y-axis direction). For example, the angle between the angle A and the first and second alignment films 124 and 125 and the direction in which the glass panel P is loaded into the support (the angle between the Y and the (5) is 45 degrees. The polarization loss of the light is preferably the extension direction of the suction groove 315 (the E-axis direction). The first value of the disk is the same as the polarization direction of the light given by the second polarizing plate 201250263 324. Here, when the suction groove When the extending direction of the 315 (the E-axis direction), the alignment direction of the first and second alignment films 124 and 125, and the polarization directions of the light given by the first polarizing plate 323 and the second polarizing plate 324 are the same, the light can be prevented from being sucked. 315 causes distortion, deformation, and polarization loss of light can be minimized. As shown in Fig. 6, each of the suction grooves 315 preferably has a semi-circular cross section and has a predetermined radius of curvature to simplify the suction groove. 315 is in the process of the support plate 31. Further, in the embodiment, the suction groove 315 preferably has a width W of 6 mm, a depth D of 0.15 mm, and a radius of curvature R of 30 mm, thereby avoiding An air layer is formed between the glass panel P and the test portion 311 Moreover, the process of the suction groove 315 can be simplified. Further, preferably, the radius of curvature R of the suction groove 315 can be between 20 mm and 40 mm. According to a test result, if the radius of curvature R is less than 20 mm, it is difficult to support the plate 31. The suction groove 315 is formed on the upper surface; if the radius of curvature R is greater than 40 mm, when the glass panel P is adsorbed onto the support plate 31, the glass panel P may fall into the suction groove 315, causing unevenness of the upper surface of the glass panel P, or The lower surface of the glass panel P is damaged. Further, preferably, the depth D of the suction groove 315 may be 0.1 mm or more. According to a test result, if the depth D of the suction groove 315 is between 0.1 mm and 0.2 mm. The gas between the glass panel P and the test portion 311 is discharged through the suction groove 315. Further, if the depth D of the suction groove 315 is less than 0.1 mm, the effect of the exhaust gas of the suction groove 315 is lowered. After the P is placed on the support plate 31, when the suction device is actuated to apply a negative pressure to the suction holes 312, the 201250263 adsorption region of the glass panel P is adsorbed onto the adsorption portion 313 of the support plate 31. Thus, the glass The target area of the panel P is attached to the support The test portion 311 of the plate 31. In this case, the negative pressure is also applied to the suction groove 315 of the test portion 311, so that the air between the target region of the glass panel P and the test portion 311 is guided by the suction groove 315 and sucked into The air vent 312 is formed to prevent an air layer from being formed between the target area of the glass panel P and the test portion 311. Thus, the glass panel P can be adsorbed to the adsorption portion 313 not only by applying a negative pressure to the suction hole 312, but also It can be adsorbed to the test portion 311 by applying a negative pressure to the suction groove 315. In summary, in the array test device of the present invention, the suction groove 315 communicating with the suction hole 312 is formed in the test portion 311, and The target area of the glass panel P is attached to the test portion 311. When the glass panel P is adsorbed to the support plate 31, air existing between the target region of the glass panel P and the test portion 311 of the support plate 31 can be discharged to the outside via the suction groove 315. Therefore, the present invention can prevent the air layer from being formed between the glass panel P and the support plate 31, thereby maintaining the upper surface of the glass panel P in a planar shape. This makes it possible to test the glass panel P accurately. Further, in the array test apparatus of the present invention, the glass panel P can be adsorbed not only to the adsorption portion 313 having the suction holes 312 but also to the test portion 311 having the suction grooves 315. Therefore, the glass panel P can be more reliably supported on the support plate 31, so that the glass panel P can be tested more reliably and accurately. The technical features of all the embodiments of the present invention may be implemented separately or in combination. 13 201250263 The above description is for illustrative purposes only and not as a limitation. Any equivalent modifications or alterations to the spirit and scope of the present invention are intended to be included in the scope of the appended claims. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view of an array test apparatus according to a preferred embodiment of the present invention; FIG. 2 is a schematic diagram of a test module of the array test apparatus shown in FIG. 1, and FIG. FIG. 4 is a perspective view of a support plate of the array test device shown in FIG. 1; FIG. 5 is another aspect of the array test device shown in FIG. The three-dimensional schematic of the support plate, and FIG. 6 is a schematic cross-sectional view of one of the suction grooves formed by the support plate of the array test device shown in FIG. [Explanation of main component symbols] 1: Array test device 20: Loading unit 22: First support plate 24, 44: Blow hole 201250263 30: Test unit 31: Support plate 311: Test portion 312: Air suction hole 313: Adsorption portion 314: suction guide groove 315: suction groove 32: test module 3 21: light source 322: half prism 323: first polarization plate 324: second polarization plate 33: probe assembly 40: unloading unit 42: second support plate 60: test module moving unit 70: glass panel conveying unit 100: imaging unit 120: modulator unit 121: first substrate 122: second substrate 123: electro-optic material layer 124 · · first alignment film second alignment film 125 201250263 126: Modulation electrode layer A: preset angle D: depth P. glass panel R: radius of curvature W: width