201250123 六、發明說明： 【發明所屬之技術領域】 本發明是關於一種可用來作為例如升壓鼓風機或升壓 幫浦的幫浦裝置。 【先則技術】 就用來使燃料氣體或氧氣等氣體上升至所希望之壓力 的機器而言，有一種稱為升壓鼓風機或升壓幫浦的幫浦裝 置已廣為人知。這種幫浦裝置是使用魯氏幫浦或隔膜幫浦 等’在例如以下專利文獻1中，記載有一種燃料電池系統 中被用來作為燃料氣體之升壓鼓風機的隔膜幫浦。 隔膜的材料一般是使用橡膠等彈性材料。因此，有時 隔膜容易彈性變化，以致裝置的特性改變。因此，專利文 獻2記載有一種為了使隔膜的特性穩定化而埋設有基布的 隔膜。 (先前技術文獻） (專利文獻） 專利文獻1 :日本特開2009-47084號公報 專利文獻2:日本特開平10-132077號公報 【發明内容】 (發明所欲解決之課題） 專利文獻2中，隔膜的外周部在藉由沖壓鉚接時會受 到夾壓而彈性變化，為了抑制過度的露出，埋設有基布。 然而，隔膜幫浦中，隔膜是進行以下的往返運動。也就是， 隔膜的周緣是支持在幫浦主體，但一部分是連接於驅動構 324037 4 201250123 件，該驅動構件會因為驅動機構而運動，因而隔膜會進行 伴隨伸展的一定的往返運動，使幫浦室的容積改變。亦即， 當隔膜幫浦長時間運轉時，在隔膜之容易伸長的特定部位 就會劣化、疲勞，並且可能發生局部性切斷的故障。 有鑑於如以上的情況，本發明之目的在於提供一種可 使隔膜之性能穩定的幫浦裝置。 (用以解決課題之手段） 為了達成上述目的，本發明之一形態的幫浦裝置具 有：主體、隔膜、及驅動部。 上述主體是形成用以將流體吸入、排出的幫浦室。 上述隔膜包含：基材、基布、及指標部。上述基材是 由彈性材料所形成，該彈性材料具有：與上述幫浦室在第 1轴方向相對向的第1面；上述第1面之相反側的第2面； 以及支持在上述主體的周緣區域。上述基布是埋設在上述 基材，並且至少具有朝向與上述第1軸方向正交之第2軸 方向延伸的第1纖維。上述指標部是設在上述基材，並且 標示上述第2軸方向。 上述驅動部包含：驅動機構、以及具有與上述第2面 連結之第1端部及與上述驅動機構連接之第2端部的驅動 構件，上述驅動機構是一面使上述驅動構件朝上述第2轴 方向搖動，一面使其在上述第1軸方向往返移動。 【實施方式】 本發明之一實施形態的幫浦裝置具備：主體、隔膜、 及驅動部。 324037 5 201250123 上述主體是形成用來將流體吸入、排出的幫浦室。 上述隔膜包含：基材、基布、及指標部。上述基材是 由彈性材料所形成，該彈性材料具有：與上述幫浦室在第 1軸方向相對向的第1面、上述第1面之相反側的第2面、 以及支持在上述主體的周緣區域。上述基布是埋設在上述 基材，並且至少具有朝向與上述第1轴方向正交之第2轴 方向延伸的第1纖維。上述指標部是設在上述基材，並且 標示上述第2軸方向。 上述驅動部包含：驅動機構、以及具有與上述第2面 連結之第1端部及與上述驅動機構連接之第2端部的驅動 構件，上述驅動機構是一面使上述驅動構件朝上述第2轴 方向搖動，一面使其在上述第1軸方向往返移動。 在上述幫浦裝置中，隔膜具有由彈性材料所形成的基 材*在基材埋設有基布（補強布）。隔膜是在將周緣區域支 持於主體的狀態下，藉由所連結的驅動構件而進行往復運 動。藉由該運動，隔膜會使幫浦室的容積產生週期性的變 化，並交互地進行流體之往幫浦室的吸入以及流體從幫浦 室的排出。 驅動構件的一端是連接於隔膜，另一端是連接於驅動 機構。驅動機構是例如作為驅動源的電動機、以及從其驅 動軸偏心的轴。驅動構件之驅動機構側的一端是藉由驅動 機構，反覆進行第1軸方向的往返運動以及第2軸方向的 搖動。與此連動，隔膜側的一端是在第1軸方向進行往返 運動。因此，隔膜在容易伸長的方向，例如進行搖動的第 324037 6 201250123 2軸方向會有容易劣化、切斷的問題。 上述幫浦裝置中，藉由將具有朝第2軸方向延伸之纖 維的基布埋設在隔膜，即可提高第2軸方向的強度，使耐 久性提升。而且’藉由將可管理第2轴方向之伸展的基布 埋設在隔膜，隔膜的性能會穩定，而且幫浦室的容積變動 也會穩定，因此可使幫浦的性能穩定。 而且’藉由設置用來標示第2轴方向的指標部，即可 判別埋設在隔膜内的基布之纖維的延伸方向，在組裝幫浦 裝置時’也較容易將上述隔膜以所希望的方向設置在幫浦 主體。 上述驅動構件亦可復具有固定具，該固定具包含：與 上述第1面相對向的支持面、以及形成在上述支持面，並 且貫穿上述基材而與上述第1端部結合的軸部。又，上述 指標部亦可形成在供上述轴部貫穿的開口部。 上述指標部亦可為形成上述開口部的一部分，並且相 對於上述第2軸方向垂直或平行的直線部。 上述指標部亦可為在相對於上述第2軸方向垂直或平 行的方向與上述開口部連接的缺口部。 由於隔膜的指標部是形成在上述開口部，因此要將隔 膜設置在幫浦主體時’可一面確認所希望的方向一面進行 作業。而且，指標部的形成亦可容易地進行。 以下，一面參照圖式，一面說明本發明之實施形態。 第1圖是本發明之一實施形態的幫浦裝置3之構造的 剖面圖。本實施形態的幫浦裝置3是由隔膜幫浦所構成。 324037 7 201250123 此外，第1圖中的Z軸（第1軸）係表示鉛直方向（重力方 向），X軸（第2軸）及Y軸係表示平面方向。 主體10具有：外殼11、幫浦壓頭12、以及幫浦壓頭 蓋板13。 幫浦壓頭12具有吸入口 101及送出口 102，並且配置 在環狀底座110的上表面。底座110是安裝在外殼11之上 部的開口端部，並且與幫浦壓頭12 —同夾住隔膜20的周 緣部。幫浦壓頭12是在與隔膜20之間形成幫浦室100。 幫浦壓頭12分別具有：用來聯絡吸入口 101與幫浦室 100之間的吸入通路T1 ;以及用來連絡幫浦室100與送出 口 102之間的送出通路T2。幫浦室100可經由吸入通路T1 及送出通路T2，分別與吸入口 101及送出口 102連通。在 吸入通路T1及送出通路T2分別安裝有吸入閥103及送出 閥 104。 幫浦壓頭蓋板13是安裝在幫浦壓頭12的上部。吸入 通路T1及送出通路T2是藉由將幫浦壓頭12及幫浦壓頭蓋 板13予以組合而分別形成。外殼11、幫浦壓頭12及幫浦 壓頭蓋板13是利用複數根螺絲構件B固定成一體。 外殼11是在主體10的内部形成用來收容連接桿32、 軸承33、及偏心凸輪34的動作空間105。 第2圖（A)是顯示隔膜20的要部之剖面圖。此外，第 2圖中也顯示出表示鉛直方向的Z軸、及表示水平方向的X 軸及Y軸。隔膜20具有：本身具有上表面201及下表面 203，並且由彈性材料所形成的基材200 ;以及埋設在基材 324037 8 201250123 200的補強布202。上表面201及下表面203的周緣部是被 夾在底座110與幫浦壓頭12之間。此外，第2圖（A)省略 了底座110及幫浦壓頭12。 上表面201及下表面203是分別由合成橡膠所形成， 例如可使用丁腈橡膠（NBR)、氫化丁腈橡膠（HNBR)、氟橡膠 (FKM)等，對於甲烷或丙烷等的碳化氫氣體具有耐性的橡膠 材料。補強布202是由例如尼龍（聚醯胺）等的合成纖維所 形成。又’補強布202與上表面201、下表面203是藉由 加硫接著等而一體化。 第2圖（B)是顯示隔膜20的要部之平面圖。此外，為 了說明，第2圖（B)是去除基材200的一部分，使補強布 202露出。補強布202包含與X軸平行的纖維群F1。再者， 如圖所示，亦可包含與纖維群F1交叉的纖維群F2。 此外，補強布202雖係形成在隔膜20的整面，但是並 不限定於此。補強布202的形狀並不限於圓形，亦可為例 如相對於通過隔膜20之中心的X轴對稱的形狀。纖維群 F1的長度也沒有特別的限定，只要是可使X軸方向之強度 充分提高的長度即可。 隔膜20具有用來標示X軸方向的指標Μ。典型的指標 Μ是可藉由視覺、觸覺等以人的五官來判別的樣態者，但 除此以外，只要是可利用電氣、光學等的手法來判別X軸 方向的樣態即可。又，設置有指標Μ的部位係只要是要將 隔膜20設置在主體1〇時，作業員可判別指標Μ的部位即 可，並無特別限定。在本實施形態的第2圖（Β)中’指標Μ 324037 9 201250123 是具有包含與X軸方向垂直之直線部L的「D」型形狀的開 口部204。亦即，本實施形態中，作業員會辨識出與直線 部L垂直的方向就是隔膜20的X軸方向。此外，並不限於 該例，直線部L亦可形成為與X軸方向平行。 驅動部30具有：固定具31、連接桿32、軸承33、偏 心凸輪34、及驅動源35。 連接桿32包含與隔膜20之下表面203相接的第1支 持面，並且固定在下表面203的中央部。另一方面，固定 具31具有：與上表面201相接的第2支持面、以及嵌合在 隔膜20之開口部204的凸部310。凸部310亦可具有對應 於開口部204之形狀的平面形狀。固定具31及連接桿32 是安裝成從上下夾住隔膜20，並且經由例如螺絲320而一 體化。藉此，固定具31、連接桿32便構成使隔膜20上下 驅動的驅動構件300。此外，固定具31亦可不具有凸部 310，而是使螺絲320嵌合在開口部204。 驅動源35是由具有沿著Y軸方向延伸的旋轉軸350的 電動機等所構成。旋轉軸350的前端部是安裝在偏心凸輪 34的旋轉中心。連接桿32之與第1支持面為相反側的端 部是經由軸承33與偏心凸輪34的周面連結。偏心凸輪34 是使其旋轉中心相對於軸承33的内環偏心地形成，其偏心 量就是隔膜20的往返移動量（衝程量）。 第3圖是從Y軸方向觀看的隔膜幫浦3的要部剖面 圖，且顯示驅動部30的典型動作。此外，此時的幫浦壓頭 12的詳細與實際情況有所差異，但是為了容易理解，幫浦 324037 10 201250123 壓頭12的構成是以與第1圖同樣的方式描繪。 當旋轉軸350藉由驅動源35而旋轉時，與偏心凸輪 34連結的驅動構件300的一端會進行伴隨朝X軸方向之搖 動的朝Z軸方向的往返運動。同時，與隔膜20連結的驅動 構件300的一端會在Z軸方向往返運動，因此隔膜20也會 在Z軸方向往返運動。 第3圖（A)是顯示旋轉軸350與偏心凸輪34的中心朝 Z軸方向並排成一行，且幫浦室100之容積為最小的例子 (排氣步驟）。第3圖（B)是顯示旋轉轴350與偏心凸輪34 的中心朝X軸方向並排成一行，且驅動構件300傾斜並且 朝Z軸方向下降的例子（吸氣步驟）。隔膜20也會與此連動 而朝Z軸方向下降，比起第3圖（A)，幫浦室100的容積會 變大。如此，隔膜20朝Z軸方向移動，幫浦室100的容積 就會改變。而且，如第3圖（B)所示，當幫浦室100的容積 變大時，吸入閥103會打開，同時送出閥104會關閉，藉 此進行氣體的抽吸。另一方面，如第3圖（A)所示，當幫浦 室100的容積變小時，吸入閥103會關閉，同時送出閥104 會打開，藉此進行氣體的壓縮運送。 隔膜20係在容易伴隨以上的往返運動而伸展的部 位，會產生疲勞或是劣化。第4圖（A)、（B)是分別對應於 第3圖（A)、（B)的隔膜20之形狀的示意圖。第4圖是將隔 膜20分成XI至X5之五個區域來說明。此外，XI、X5分 別是支持於主體10的區域，X2、X4是會伴隨彈性變形的 區域，X3是藉由驅動構件300之一端而支持的區域。區域 324037 11 201250123 XI、X5是屬於隔膜20上共通的環狀區域，區域X2、X4也 是屬於隔膜20上共通的環狀區域。 第4圖（A)中，X3相對於XI、X5是朝Z軸方向上升， 且X2、X4間會伸展。第4圖（B)中，X3相對於XI、X5是 朝Z軸方向下降，而且，X2、X4間會伸展，且在X2與X3 之間還發生歪斜。這是因為如第3圖（B)所示，由於驅動構 件300傾斜而施加有應力的緣故。如以上所述，隔膜20的 X軸方向容易因為第3圖所示的運動而伸展。因此，藉由 將包含朝X軸方向延伸之纖維群F1的補強布202埋設在隔 膜20，隔膜20的強度會提高，且可使耐久性提升。又， 藉由管理隔膜20的伸展，隔膜的性能就會穩定，而且幫浦 室100的容積變動也會穩定，因此也可使幫浦的性能穩定。 就與X轴平行之纖維群F1延伸的布的織法例而言，可 列舉第5圖所示的平織法。平織法是將直角方向的纖維群 f2相對於平行排列的一群纖維群fl交互組合者。藉由使 用這種平織的補強布202，X轴方向的強度會提高，且可使 耐久性提升。又，各纖維間的距離、也就是織目的疏密度 並沒有特別的限定，只要有充分的強度即可。 另一方面，典型的隔膜具有圓盤形狀，因此要將隔膜 20設置在主體10時，有可能無法判別所埋設的補強布202 之纖維的延伸方向。因此，藉由使用具有用來標示X轴方 向的指標Μ的隔膜20，即可判別埋設在隔膜20的補強布 20之纖維的延伸方向，而可容易地將隔膜20以所希望的 方向設置在主體10。例如，要將具有本實施形態所說明之 324037 12 201250123 直線部L之指標Μ的隔膜20設置在主體10時，只要將直 線部L設置成與旋轉軸350之延伸方向（第1圖的γ轴方向） 平行即可。再者，補強布202具有與纖維群F1正交的纖維 群F2的情況時，亦可將直線部置成與旋轉軸35〇的延 伸方向平行或垂直。 以上，已針對本發明之實施形態加以說明，但是本發 明並不僅限於以上的實施形態，當然可在不脫離本發明之 要旨的範圍内施加各種變更。 例如，以上之實施形態的指標M是具有與义軸方向垂 直之直線部L #「D」型形狀的開口部謝，但是亦可如第 6圖所示以形成有與X軸方向平行連接之缺口部尺的開 口部204作為指標M。缺口部R是只要可標示义轴方向， 則其形狀就沒有特別的關，例如亦可與χ轴方向垂直連 接。並且’㈣成的部位是只要在開口部⑽内即可。 又’本發明之實施形態的幫浦裝置所使用的流體並不 限於氣體，亦可為液體。 【圖式簡單說明】 第1圖是顯示本發明之一 的剖面圖。 實施形態的幫浦裝置之構成 第2圖 是平面圖。 是顯示隔膜的要部構成之圖，⑴是剖面圖，⑻ 第3圖是用來說明本發明 的要部剖面圖。 實施形態的隔膜幫浦之作用 第4圖是用來說明分別對 應於第3圖（A)、（Β)的隔膜 324037 201250123 之狀態的要部剖面圖。 第5圖是平織布之一例的說明圖。 第6圖是顯示本發明之其他實施形態所使用的指標部 之形狀的隔膜的平面圖。 【主要元件符號說明】 3 幫浦裝置 10 主體 11 外殼 12 幫浦壓頭 13 幫浦壓頭蓋板 20 隔膜 30 驅動部 31 固定具 32 連接桿· 33 軸承 34 偏心凸輪 35 驅動源 100 幫浦室 101 吸入口 102 送出口 103 吸入閥 104 送出閥 105 動作空間 110 底座 200 基材 201 上表面 202 補強布 203 下表面 204 開口部 300 驅動構件 310 凸部 320 螺絲 350 旋轉軸 B 螺絲構件 fl ' f2纖維群 F1 ' F2纖維群 L 直線部 Μ 指標 R 缺口部 Τ1 吸入通路 T2 送出通路 324037 14201250123 VI. Description of the Invention: [Technical Field] The present invention relates to a pump device that can be used as, for example, a booster blower or a booster pump. [Priority Technology] As a machine for raising a gas such as fuel gas or oxygen to a desired pressure, a pump device called a booster blower or a booster pump is widely known. In the above-mentioned Patent Document 1, for example, a diaphragm pump for a booster blower used as a fuel gas in a fuel cell system is described. The material of the diaphragm is generally an elastic material such as rubber. Therefore, sometimes the diaphragm is easily elastically changed so that the characteristics of the device are changed. Therefore, Patent Document 2 describes a separator in which a base fabric is embedded in order to stabilize the characteristics of the separator. (Patent Document) Patent Document 1: JP-A-2009-47084 (Patent Document 2) Japanese Patent Application Publication No. Hei 10-132077 The outer peripheral portion of the diaphragm is elastically changed by being pinched by press-staking, and a base fabric is buried in order to suppress excessive exposure. However, in the diaphragm pump, the diaphragm performs the following reciprocating motion. That is, the circumference of the diaphragm is supported by the pump body, but part of it is connected to the drive mechanism 324037 4 201250123. The drive member will move due to the drive mechanism, so the diaphragm will perform a certain reciprocating motion accompanying the extension, so that the pump The volume of the chamber changes. That is, when the diaphragm pump is operated for a long period of time, it is deteriorated and fatigued at a specific portion where the diaphragm is easily elongated, and a local cutting failure may occur. In view of the above circumstances, it is an object of the present invention to provide a pump device which can stabilize the performance of a diaphragm. (Means for Solving the Problem) In order to achieve the above object, a pump device according to an aspect of the present invention includes a main body, a diaphragm, and a driving unit. The main body is a pump chamber for sucking in and discharging fluid. The separator includes a substrate, a base fabric, and an indicator portion. The base material is formed of an elastic material having a first surface facing the first axial direction of the pump chamber, a second surface opposite to the first surface, and a support on the main body Peripheral area. The base fabric is embedded in the base material and has at least a first fiber extending in a second axial direction orthogonal to the first axial direction. The index portion is provided on the base material and indicates the second axial direction. The driving unit includes a driving mechanism and a driving member having a first end connected to the second surface and a second end connected to the driving mechanism, wherein the driving mechanism drives the driving member toward the second axis The direction is shaken while moving back and forth in the direction of the first axis. [Embodiment] A pump device according to an embodiment of the present invention includes a main body, a diaphragm, and a driving unit. 324037 5 201250123 The above body is a pump chamber for inhaling and discharging fluid. The separator includes a substrate, a base fabric, and an indicator portion. The base material is formed of an elastic material having a first surface facing the first axial direction of the pump chamber, a second surface opposite to the first surface, and a support for the main body Peripheral area. The base fabric is embedded in the base material and has at least a first fiber extending in a second axial direction orthogonal to the first axial direction. The index portion is provided on the base material and indicates the second axial direction. The driving unit includes a driving mechanism and a driving member having a first end connected to the second surface and a second end connected to the driving mechanism, wherein the driving mechanism drives the driving member toward the second axis The direction is shaken while moving back and forth in the direction of the first axis. In the above pump device, the separator has a substrate formed of an elastic material * a base cloth (reinforced cloth) is embedded in the substrate. The diaphragm is reciprocated by the connected drive member in a state where the peripheral portion is supported by the main body. With this movement, the diaphragm periodically changes the volume of the pump chamber and interactively draws fluid into the pump chamber and fluid discharge from the pump chamber. One end of the drive member is connected to the diaphragm and the other end is connected to the drive mechanism. The drive mechanism is, for example, an electric motor as a drive source and a shaft eccentric from the drive shaft. One end of the drive member on the drive mechanism side is repeatedly driven in the first axial direction and in the second axial direction by the drive mechanism. In conjunction with this, one end of the diaphragm side reciprocates in the first axial direction. Therefore, in the direction in which the separator is easily elongated, for example, the second axis direction of the 324037 6 201250123 which is shaken, there is a problem that the separator is easily deteriorated and cut. In the above-described pump device, by embedding the base fabric having the fiber extending in the second axial direction in the separator, the strength in the second axial direction can be improved, and the durability can be improved. Further, by embedding the base fabric capable of managing the extension in the second axial direction in the diaphragm, the performance of the diaphragm is stabilized, and the volume variation of the pump chamber is also stabilized, so that the performance of the pump can be stabilized. Further, by providing an index portion for indicating the direction of the second axis, it is possible to determine the direction in which the fibers of the base fabric embedded in the diaphragm extend, and it is easier to assemble the pump in a desired direction when assembling the pump device. Set in the main body of the pump. The driving member may further include a fixing member including a support surface facing the first surface, and a shaft portion formed on the support surface and joined to the first end portion through the base material. Further, the indicator portion may be formed in an opening through which the shaft portion is inserted. The index portion may be a straight portion that forms a part of the opening and is perpendicular or parallel to the second axial direction. The indicator portion may be a notch portion that is connected to the opening portion in a direction perpendicular or parallel to the second axial direction. Since the index portion of the diaphragm is formed in the opening portion, when the diaphragm is installed in the pump main body, the work can be performed while confirming the desired direction. Moreover, the formation of the indicator portion can be easily performed. Hereinafter, embodiments of the present invention will be described with reference to the drawings. Fig. 1 is a cross-sectional view showing the structure of a pump device 3 according to an embodiment of the present invention. The pump device 3 of the present embodiment is constituted by a diaphragm pump. 324037 7 201250123 In addition, the Z axis (first axis) in Fig. 1 indicates the vertical direction (gravity direction), and the X axis (second axis) and the Y axis indicate the plane direction. The main body 10 has a casing 11, a ram head 12, and a ram head cover 13. The pump ram 12 has a suction port 101 and a delivery port 102, and is disposed on the upper surface of the annular base 110. The base 110 is an open end that is mounted on the upper portion of the outer casing 11, and sandwiches the peripheral portion of the diaphragm 20 together with the pump ram 12. The pump head 12 is formed between the diaphragm 20 and the diaphragm 20. The pump indenter 12 has a suction passage T1 for contacting the suction port 101 and the pump chamber 100, and a delivery passage T2 for connecting the pump chamber 100 and the outlet port 102, respectively. The pump chamber 100 can communicate with the suction port 101 and the delivery port 102 via the suction passage T1 and the delivery passage T2, respectively. A suction valve 103 and a delivery valve 104 are attached to the suction passage T1 and the delivery passage T2, respectively. The pump head cover 13 is mounted on the upper portion of the pump head 12. The suction passage T1 and the delivery passage T2 are formed by combining the pump ram 12 and the ram head cover 13, respectively. The outer casing 11, the pump ram 12 and the pump ram cover 13 are integrally fixed by a plurality of screw members B. The casing 11 is formed in the inside of the main body 10 to accommodate the connecting rod 32, the bearing 33, and the eccentric cam 34. Fig. 2(A) is a cross-sectional view showing the main part of the diaphragm 20. Further, in Fig. 2, the Z axis indicating the vertical direction and the X axis and the Y axis indicating the horizontal direction are also displayed. The separator 20 has a substrate 200 having an upper surface 201 and a lower surface 203 and formed of an elastic material, and a reinforcing cloth 202 embedded in a substrate 324037 8 201250123 200. The peripheral portions of the upper surface 201 and the lower surface 203 are sandwiched between the base 110 and the ram head 12. Further, the base 110 and the pump ram 12 are omitted in Fig. 2(A). The upper surface 201 and the lower surface 203 are respectively formed of synthetic rubber, and for example, nitrile rubber (NBR), hydrogenated nitrile rubber (HNBR), fluororubber (FKM), or the like can be used, and hydrocarbon gas such as methane or propane has Resistant rubber material. The reinforcing cloth 202 is formed of a synthetic fiber such as nylon (polyamide). Further, the reinforcing fabric 202 is integrated with the upper surface 201 and the lower surface 203 by vulcanization or the like. Fig. 2(B) is a plan view showing the main part of the diaphragm 20. Further, in order to explain, Fig. 2(B) shows a part of the base material 200 removed, and the reinforcing cloth 202 is exposed. The reinforcing cloth 202 includes a fiber group F1 that is parallel to the X axis. Further, as shown in the figure, the fiber group F2 intersecting the fiber group F1 may be included. Further, the reinforcing cloth 202 is formed on the entire surface of the separator 20, but is not limited thereto. The shape of the reinforcing cloth 202 is not limited to a circular shape, and may be, for example, a shape symmetrical with respect to the X-axis passing through the center of the diaphragm 20. The length of the fiber group F1 is not particularly limited as long as it is sufficient to increase the strength in the X-axis direction. The diaphragm 20 has an index 用来 for indicating the X-axis direction. A typical indicator Μ is a person who can be judged by the facial features of the person by visual or tactile sensation. However, it is only necessary to determine the X-axis direction by means of electrical or optical means. Further, the portion in which the index 设置 is provided is not particularly limited as long as the diaphragm 20 is to be placed in the main body 1〇, and the operator can determine the position of the index Μ. In the second diagram (Β) of the present embodiment, the index Μ 324037 9 201250123 is an opening portion 204 having a "D" shape including a straight portion L perpendicular to the X-axis direction. That is, in the present embodiment, the operator recognizes that the direction perpendicular to the straight portion L is the X-axis direction of the diaphragm 20. Further, the present invention is not limited to this example, and the linear portion L may be formed to be parallel to the X-axis direction. The drive unit 30 has a fixture 31, a connecting rod 32, a bearing 33, an eccentric cam 34, and a drive source 35. The connecting rod 32 includes a first supporting surface that is in contact with the lower surface 203 of the diaphragm 20, and is fixed to a central portion of the lower surface 203. On the other hand, the fixture 31 has a second support surface that is in contact with the upper surface 201 and a convex portion 310 that is fitted to the opening 204 of the diaphragm 20. The convex portion 310 may also have a planar shape corresponding to the shape of the opening portion 204. The fixture 31 and the connecting rod 32 are mounted to sandwich the diaphragm 20 from above and below, and are integrated via, for example, a screw 320. Thereby, the fixture 31 and the connecting rod 32 constitute the driving member 300 for driving the diaphragm 20 up and down. Further, the fixture 31 may not have the convex portion 310, but the screw 320 may be fitted to the opening portion 204. The drive source 35 is constituted by a motor or the like having a rotary shaft 350 extending in the Y-axis direction. The front end portion of the rotary shaft 350 is mounted at the center of rotation of the eccentric cam 34. The end of the connecting rod 32 opposite to the first supporting surface is coupled to the circumferential surface of the eccentric cam 34 via a bearing 33. The eccentric cam 34 is formed such that its center of rotation is eccentric with respect to the inner ring of the bearing 33, and the amount of eccentricity is the amount of reciprocation of the diaphragm 20 (stroke amount). Fig. 3 is a cross-sectional view of an essential part of the diaphragm pump 3 viewed from the Y-axis direction, and shows a typical operation of the drive unit 30. Further, the details of the pump indenter 12 at this time are different from the actual conditions, but for easy understanding, the pump 324037 10 201250123 The configuration of the indenter 12 is depicted in the same manner as in the first drawing. When the rotary shaft 350 is rotated by the drive source 35, one end of the drive member 300 coupled to the eccentric cam 34 performs a reciprocating motion in the Z-axis direction with the rocking in the X-axis direction. At the same time, one end of the driving member 300 coupled to the diaphragm 20 reciprocates in the Z-axis direction, so that the diaphragm 20 also reciprocates in the Z-axis direction. Fig. 3(A) shows an example in which the center of the rotary shaft 350 and the eccentric cam 34 are arranged side by side in the Z-axis direction, and the volume of the pump chamber 100 is the smallest (exhaust step). Fig. 3(B) shows an example in which the center of the rotating shaft 350 and the eccentric cam 34 are arranged side by side in the X-axis direction, and the driving member 300 is inclined and descends in the Z-axis direction (suction step). The diaphragm 20 also moves in the Z-axis direction in conjunction with this, and the volume of the pump chamber 100 becomes larger than that of Fig. 3(A). Thus, the diaphragm 20 moves in the Z-axis direction, and the volume of the pump chamber 100 changes. Further, as shown in Fig. 3(B), when the volume of the pump chamber 100 becomes large, the suction valve 103 is opened, and the delivery valve 104 is closed, whereby the suction of the gas is performed. On the other hand, as shown in Fig. 3(A), when the volume of the pump chamber 100 becomes small, the suction valve 103 is closed, and the delivery valve 104 is opened, whereby the compressed supply of the gas is performed. The diaphragm 20 is fatigued or deteriorated in a portion that is easily stretched by the above-described reciprocating motion. Fig. 4 (A) and Fig. 4(B) are schematic views showing the shapes of the separators 20 corresponding to Figs. 3(A) and (B), respectively. Fig. 4 is a view in which the separator 20 is divided into five regions of XI to X5. Further, XI and X5 are regions supported by the main body 10, X2 and X4 are regions which are accompanied by elastic deformation, and X3 is a region supported by one end of the driving member 300. Region 324037 11 201250123 XI and X5 are annular regions common to the diaphragm 20, and the regions X2 and X4 are also annular regions common to the diaphragm 20. In Fig. 4(A), X3 rises in the Z-axis direction with respect to XI and X5, and extends between X2 and X4. In Fig. 4(B), X3 is lowered in the Z-axis direction with respect to XI and X5, and X2 and X4 are stretched, and skewing occurs between X2 and X3. This is because, as shown in Fig. 3(B), stress is applied due to the inclination of the driving member 300. As described above, the X-axis direction of the diaphragm 20 is easily stretched by the movement shown in Fig. 3. Therefore, by embedding the reinforcing cloth 202 including the fiber group F1 extending in the X-axis direction in the separator 20, the strength of the separator 20 is improved, and durability can be improved. Further, by managing the extension of the diaphragm 20, the performance of the diaphragm is stabilized, and the volume variation of the pump chamber 100 is also stabilized, so that the performance of the pump can be stabilized. The weave method of the cloth in which the fiber group F1 parallel to the X-axis extends is exemplified by the plain weave method shown in Fig. 5. The plain weave method is a combination of a group of fiber groups f2 in the right-angle direction with respect to a group of fiber groups fl arranged in parallel. By using such a plain woven reinforcing fabric 202, the strength in the X-axis direction is improved, and the durability can be improved. Further, the distance between the fibers, that is, the density of the woven fabric is not particularly limited as long as sufficient strength is sufficient. On the other hand, a typical diaphragm has a disk shape, and therefore, when the diaphragm 20 is placed on the main body 10, it may be impossible to discriminate the extending direction of the fibers of the embedded reinforcing cloth 202. Therefore, by using the diaphragm 20 having the index 用来 for indicating the X-axis direction, the extending direction of the fibers of the reinforcing cloth 20 embedded in the diaphragm 20 can be discriminated, and the diaphragm 20 can be easily placed in the desired direction. Body 10. For example, when the diaphragm 20 having the index 324 of the 324037 12 201250123 linear portion L described in the present embodiment is provided in the main body 10, the straight portion L is provided so as to extend in the direction of the rotation shaft 350 (the γ-axis of Fig. 1). Direction) Parallel. Further, when the reinforcing cloth 202 has the fiber group F2 orthogonal to the fiber group F1, the straight portion may be placed parallel or perpendicular to the extending direction of the rotating shaft 35A. The embodiments of the present invention have been described above, but the present invention is not limited to the above embodiments, and various modifications may be made without departing from the spirit and scope of the invention. For example, the index M of the above embodiment is an opening having a linear portion L #"D" shape perpendicular to the direction of the sense axis, but may be formed in parallel with the X-axis direction as shown in Fig. 6. The opening portion 204 of the notch portion serves as an index M. The notch portion R is not particularly closed as long as the direction of the sense axis can be indicated, and for example, it may be perpendicularly connected to the x-axis direction. Further, the portion where the (four) is formed may be in the opening portion (10). Further, the fluid used in the pump device according to the embodiment of the present invention is not limited to a gas, and may be a liquid. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a cross-sectional view showing one of the present inventions. The configuration of the pump device of the embodiment Fig. 2 is a plan view. It is a view showing the configuration of the main part of the diaphragm, (1) is a cross-sectional view, and (8) is a cross-sectional view of the principal part for explaining the present invention. The action of the diaphragm pump of the embodiment Fig. 4 is a cross-sectional view of the principal part for explaining the state of the diaphragm 324037 201250123 corresponding to Fig. 3(A) and Fig. 3, respectively. Fig. 5 is an explanatory view showing an example of a plain woven fabric. Fig. 6 is a plan view showing a diaphragm which is in the shape of an index portion used in another embodiment of the present invention. [Main component symbol description] 3 Pump device 10 Main body 11 Housing 12 Pump head 13 Pump head cover 20 Separator 30 Drive unit 31 Fixing device 32 Connecting rod · 33 Bearing 34 Eccentric cam 35 Drive source 100 Pump room 101 Suction port 102 Delivery port 103 Suction valve 104 Delivery valve 105 Operating space 110 Base 200 Substrate 201 Upper surface 202 Reinforcing cloth 203 Lower surface 204 Opening 300 Driving member 310 Projection 320 Screw 350 Rotary shaft B Screw member fl ' f2 fiber group F1 'F2 fiber group L straight line 指标 index R notch part Τ1 suction path T2 delivery path 324037 14