201243339 六、發明說明： 【發明所屬之技術領域】 ^發明涉及半導體技缺t子部件技術，尤其涉及用 於^查平板顯示敦置的照明板及通過批量技術製造平板顯 示裝置檢查用照明板的方法。 【先前技術】 一般而言’在製造平板顯示裝置的過程中，在產品組 裝或出廠之前，需檢查錯誤運行與否。 _對平板顯示製置的檢查方法，有外觀檢查和向平板顯 示#置化加外部仏破，以檢查可否從輸出端獲得與外部信 號一致的信號值。 在後者的檢查中，因在直接產品化之前想平板顯示器 案件的電極片把加電信號進行檢查，需要可想極微細的平 板顯示裝置施加電信號的探針。 用於判定平板顯示裝置的不良與否的檢錢探針，現 有技術中有只通過手工作業製作而成的針型（Ν⑶d丨e Τ外e) 和同時利用新技術和手工作業製作而成的刀型（201243339 VI. Description of the invention: [Technical field to which the invention pertains] The invention relates to a semiconductor technology lacking t sub-component technology, and more particularly to a lighting panel for checking a flat panel display and a lighting panel for manufacturing a flat panel display device by mass production technology method. [Prior Art] In general, in the process of manufacturing a flat panel display device, it is necessary to check whether the operation is erroneous or not before the product is assembled or shipped. _ For the inspection method of the flat panel display, there is a visual inspection and display to the flat panel #置化 plus external smash to check whether the signal value corresponding to the external signal can be obtained from the output. In the latter inspection, since the electrode sheet of the flat panel display case is inspected before the direct productization, the probe for applying an electric signal to the extremely thin flat panel display device is required. A money detecting probe for determining whether a flat display device is defective or not, in the prior art, a needle type (Ν(3)d丨e Τ outer e) which is only manufactured by hand, and which is manufactured by using new technology and manual work at the same time. Knife type
Type)等。 現有技術的針型疋將直線的鶴製作針型探針之後，利 用黏接劑黏貼在陶究強化板上。在陶兗上黏貼針型探針之 後通過手工作業對用於檢查的電極片位置和探針後端的 與電信號移動部分接觸的部分進行位置矯正。在此，因生 產性的降低和變得越來越細的信號片，難以將其應用於| 品中。 ^另外，現有技術的刃型在大量製作探針之後，需根據 需要檢查的電極片位置和電信號移送部分餘刻強化板以製 201243339Type) and so on. The needle-type cymbal of the prior art uses a straight-line crane to make a needle probe, and then adheres it to the ceramic reinforced plate with an adhesive. After the needle probe is attached to the pottery, the position of the electrode sheet for inspection and the portion of the rear end of the probe which is in contact with the moving portion of the electric signal are corrected by hand. Here, it is difficult to apply it to a product because of a decrease in productivity and a thinner signal sheet. In addition, the prior art blade type needs to transfer a part of the reinforcing plate according to the position of the electrode piece and the electric signal to be inspected after the probe is prepared in a large amount to make 201243339
篆描入刀，因此，較之針型 ’從而可提高生產性，但因 生產性的提高也受到限制。 t材料的強化板，因此，難 Μ E M S型的探針是在絕緣性材料㈣化板上製作導 性物質的檢錢探針的方式，_半導體減處理技術。 MEM型的探針的製作，因使用固體的強化板，因此， =然製作容易，可祕形成在玻璃上的平板顯示裝置的檢 ―，但難以應用在柔韌的平板顯示裝置。 因高製作成本產品的競爭力弱 【發明内容】 另外，因變得越來越細的電信號片的間隔和驅動頻率 的上升，在完成檢查時出現信號扭曲㈣音的問題，而且， 本發明的目的在於克服現有技術之不足而提供一種平 板顯示裝置檢錢酬板及其製造方法，其在電氣特性好 的聚醯胺材料上，通過批量技術製造平板顯示裝置檢查用 照明板，以更簡便地檢查與探針尖端連接的平板顯示打 的連接狀態，從而根本上解決檢查不良產品的問 本發明的另-目的在於，向與以3至4圖=間£巨露 出凹凸圖案的探針正交連接的金屬導線選擇性的施加rgb 信號，從而在檢查平板顯示裝置時，可通過已具備的測試 儀直接確認平板顯示裝置的連接狀態，以在產品出廠前更 準確地檢查錯誤運行，提高優秀的量產產品的可靠性及生 4/ 16 201243339 本發明的目的是這樣實現的： 積於置檢查用照明板，以用紹材料沉 積於上1, 6分離層為基礎沉積聚_層，並姓刻沉 之後，在部=成探針!案 :::探針的上面形成探針尖端;塗:感 探針尖端之後，只在上述前面和後面的上 的产斜貫施光刻技術’以去_成在存在於上述前面 端和存在於後_探針上部的感歧區域，從而 出已形成於上述探針尖端和上述探針尖端對面的 a木針兩，而上述探針圖案使沉積上述探針的種子層 和相同種子層之間具備預設的間距，而且，上述聚醯胺層 的全部面積，因㈣上述沉積的種子層的—部分而大於上 述沉積的種子層的面積。 土另外，本發明實施例的平板顯示裝置檢查用照明板製 造方法是通過批量技術製造祕檢查平板顯示裝置的照明 板的方法，包括如下步驟：祕切晶圓上面沉積分離層； 在上述分離層上面沉積聚酿胺層；在上述聚酿胺層上面沉 ，導電體種子層，在上述種子層上面塗佈第—感光液並實 施例第一光刻技術，以形成上述種子層的一部分以一定間 距蝕刻的第一探針圖案；在上述第一探針圖案上實施第一 電鍍技術，以在上述種子層的另外一部分上面形成探針； 塗佈第二感光液以覆蓋上述探針上面並實施第二光刻技 術，以形成露出上述探針的一部分上面的第一尖端圖案； 在上述第一尖端圖案上實施第二電鍍技術，以在上述露出 的捸針的一部分上面形成探針尖端；給上述探針尖端罩上 5/16 201243339The knives are drawn into the knives, so that the productivity can be improved compared to the needle type, but the productivity is also limited. The reinforcing plate of the material t is therefore difficult. The probe of the E M S type is a method of producing a detecting probe for a conductive material on an insulating material (four) plate, and a semiconductor subtractive treatment technique. Since the MEM type probe is produced by using a solid reinforced plate, it is easy to manufacture, and it is possible to detect the flat panel display device formed on the glass, but it is difficult to apply it to a flexible flat panel display device. The competitiveness of the product is high due to the high production cost. [Invention] In addition, the problem of signal distortion (four) sound occurs when the inspection is completed due to the increase in the interval of the electric signal sheet and the increase in the driving frequency, and the present invention The purpose of the invention is to overcome the deficiencies of the prior art and provide a flat panel display device check-in board and a manufacturing method thereof, which are simpler to manufacture a flat panel display device inspection lighting panel on a polyamine material having good electrical properties. The inspection of the connection state with the probe tip shows the connection state of the probe, thereby fundamentally solving the problem of inspecting the defective product. Another object of the present invention is to positively expose the probe with the concave-convex pattern from 3 to 4 The cross-connected metal wire selectively applies the rgb signal, so that when the flat panel display device is inspected, the connection state of the flat panel display device can be directly confirmed by the already equipped tester, so that the wrong operation can be more accurately checked before the product leaves the factory, and the excellent performance is improved. Reliability and production of mass-produced products 4/16 201243339 The object of the present invention is achieved as follows: The plate is deposited on the upper 1, 6 separation layer by using the material, and after the surname is buried, the probe tip is formed on the part of the probe: the probe::: probe; After the probe tip, only the above-mentioned front and back slanting lithography techniques are used to form the inductive region present at the front end and the upper portion of the post probe. The probe tip is opposite to the a wooden needle opposite to the probe tip, and the probe pattern has a predetermined spacing between the seed layer depositing the probe and the same seed layer, and all of the polyamine layer The area is larger than the area of the deposited seed layer due to (4) the portion of the seed layer deposited as described above. In addition, the method for manufacturing a lighting panel for inspecting a flat panel display device according to an embodiment of the present invention is a method for manufacturing a lighting panel for inspecting a flat panel display device by a batch technique, comprising the steps of: depositing a separation layer on a wafer; Depositing a polyamine layer thereon; depositing a conductive seed layer on the polyamine layer, applying a first photosensitive liquid on the seed layer and performing a first photolithography technique to form a part of the seed layer to be certain a first probe pattern etched by a pitch; a first plating technique is performed on the first probe pattern to form a probe on another portion of the seed layer; and a second photosensitive liquid is coated to cover the probe and is implemented a second photolithography technique to form a first tip pattern overlying a portion of the probe; performing a second plating technique on the first tip pattern to form a probe tip over a portion of the exposed pin; Above the probe tip cover 5/16 201243339
St後，在_存在於上述探針—的上述第二感 -側部和上述第二感光液的另一側部的同時，敍刻 上述第二感光液的-側部下端的上述探針的—側部 二二广上述第二感光液的另一側部下端的上述探針的另 =探，端下部的上述種子層的-側部和上述;= ’及塗佈第二感統以覆蓋上述種子層、探針及 端之後，實施第三光刻技術以露出已形成於上述探 ，·义端兩端和上述探針尖端兩端對面的上述探針兩端。 g本發明在電氣特性好的聚醯胺材料上，通過批量技術 製造平板顯轉f檢錢照痛，以更簡便地檢查盘探針 尖端連接的平板顯科置的連接狀態，從雜本上解決檢 查不良產品的問題。 另外，本發明向與以3至4圖案的間距露出凹凸圖案 的k針正交連接的金屬導線選擇性的施加RGB信號，從而 在檢查平板顯示裝置時，可通過已具備的測試儀直接確認 平板顯示裝置的連接狀態，以在產品出廠前更準確地檢查 錯誤運行，提高優秀的量產產品的可靠性及生產性。 【實施方式】 [實施例] 下面，結合附圖對本發明實施例進行詳細說明。 圖丨至圖9為根據批量技術表示本發明實施例平板顯 不裂置檢查用照明板製造各步驟的側面圖，而圖1〇至圖2 為表示平板顯示裝置檢查用照明板製造技術過程的立體 圖0 6/16 201243339 本發明的平板顯示裝置檢查用照明板製造方法是通過 批量技術製造用於檢查平板顯示裝置的照明板的方法，而 在下面對其進行詳細說明。 如圖1所示’製造照明板的技術首先利用鋁在石夕晶圓 一面100沉積分離層200。 即’因作為導電物質的鋁沉積於矽晶圓一面1〇〇，因 此’在石夕晶圓層一面100上部起到分離層2〇〇的作用。 之後’在分離層一面200上部，沉積絕緣體中的一種 的聚S&胺層300並在聚驢胺層一面300上部，沉積作為導 電層的種子層400 ’因此’如圖2所示，在種子層一面4〇〇 上部塗佈第一感光液500之後，通過利用光掩膜6〇〇的第 一光刻技術形成第一探針圖案。 如圖3所示，第一探針圖案是以通過第一光刻技術形 成的PR (感光液）圖案作為掩膜，加工作為下部膜的種子 層400的一部分而形成的’在去除伙的叹去除技術之後， 通過選擇去除未形成PR的種子層4〇〇的一部分的触刻技術 生成。 第一光刻技術分DRF (乾式--般感光膠片，即受 光即進行反應）和PR (濕式一一液態感光液），在PCB (Printed Circuit Board)或蝕刻（etching)技術中通常利用 DFR，而在比較精密的技術中利用液態感光液。 第一感光液500是受光即進行反應，是塗佈於種子層 一面400上部，在其上罩住光掩膜（黑色）進行曝光（照 相機）攝影，則根據黑色部位的位置識別圖案的感光物質。 201243339 在此，聚醯胺300的沉積是在分離層一面2〇〇上部， 選擇將聚賴製作成㈣形式的利型聚_及將聚 醯月女製作成液悲的聚酿胺溶液中的一種進行沉積。 接著，如圖4所示，通過第一電鍍技術在存在第一探 針圖案的種子層的-部分400上部形成探針·，而探針 7〇〇由鎳或鎳合金材料中的一種製作而成。 探針700通過在形成種子層·的金屬上部表面電鑛 貼緊金屬被覆以起到顧、耐磨或裝飾作㈣第—電鍛技 ，形成於第-電鐘圖案之間，而這通過使金、銀、銅、錄 等其他金屬的電解’自動沉積於種子層一部分彻上部。 在此，形成沉積於種子層一部分4〇〇上部的探針7〇〇 的金、銀、銅、錄等巾的—種，@大體上離子化傾向少， 反應性低，從而是穩定的導電體。 —之後，如圖5所示，製造本發明實施例的照明板的下 步技術’塗佈第二感光液_以覆蓋探針並利用特 製的探針尖端沉積用光掩膜_實施第二光刻技術，從而 形成露出探針一端700的第一尖端圖案。 ,第二感光液800被塗佈於探針7〇〇的一部分上部之 後，向探針尖端沉積用光掩膜_上照射光線（紫外線、χ 口 ί電·？線）m除探針尖端沉積用光掩膜之 形，於探針700上部的部分第二感光液8〇〇被曝光。 只曝光於探針的一部分上部的第二感光液8⑽通 中ί二光刻技術顯影’而如圖6所示，通過對經顯影 第j，的—部分上部的部分實施第二麵技術，形成 一尖端圖案之間的探針尖端900沉積於探針7〇〇上部〜 面的第一尖端圖案。 σ〜 8/16 201243339 此時，探針尖端900由鎳及鎳合金中選擇的—種製造 而成。 之所以通過第二光刻技術在探針700的一部分上部形 成探針尖端900 ’是為了向檢查平板顯示裝置的漏水或短路 與否的照明板順利施加RGB信號，從而檢查供應至平板顯 示裂置的功率效率，更有效檢查平板顯示裝置的產品異常 與否。 ” 接著’製造照明板的下一步技術，給探針尖端9〇〇和 探針700罩上掩膜（Mask)之後，同時蝕刻已形成於探針 尖端900和探針700兩端的第二感光液800和存在於第_ 感光液下部的探針，從而如圖7所示，形成去除第—探針 圖案及第一探針尖端圖案的層疊結構。 另外，如圖8所示’給探針尖端900罩上掩膜並餘刻 至第一探針圖案之間的種子層400之後，如圖9所示，在 前面塗佈第三感光液1000以覆蓋探針7〇〇及探針尖端9〇〇。 此時，不在塗佈於探針尖端900上部的第三感光液的 一部分1000放置光掩膜600，而在其餘的第三感光液區域 1000放置光掩膜600之後，實施光刻技術，並如圖丨〇所示， 顯影探針尖端900、探針或種子層400的兩端，以露出以p 針头端900為上部的彳采針的一部分700和種子層的—部八 400。 ^ 換言之，在除形成探針尖端900的區域之外的所有區 域放置光掩膜600並照射光線（紫外線、X射線、電子線）， 以只顯β層積於形成I采針尖端900的部分區域的第二戌光 液1000，從而露出以探針尖端900為上部的探針700的兩 端。 9/16 201243339 沖!Ϊ為另—實施例’在實施第三光刻技術時，在從形成 j衣十尖端900下端的探針700中選擇的一部分區域，形 以3至4間隔露出的凹凸圖案丨1 〇〇。 即，如圖1丨所示，為了露出存在於探針尖端900下部 Μ衣針7〇〇，放置另外製作的凹凸圖案用光掩膜之後，向凹 ®案用光掩膜上部照射光，從而形成包括凹凸圖案】100 的照明板。 之後，如圖12所示，通過凹凸圖案丨】00層積至少一 條與露出的探針正交的金料線⑽，並將存在於作 ^基板的♦晶圓上的照明板财晶圓分離（去除）， 製作完成照明板。 向形成金屬導線】200的照明板的探針7〇〇施加RgbAfter St, while the second sensing side portion of the probe is present and the other side of the second photosensitive liquid, the probe of the lower end of the second photosensitive liquid is engraved - a side portion of the second photosensitive liquid at the lower end of the probe, the other side of the probe, the lower side of the seed layer - the side portion and the above; = ' and coating a second sense to cover the seed After the layer, the probe, and the end, a third photolithography technique is performed to expose both ends of the probe that have been formed on both ends of the probe end and opposite ends of the probe tip. g The present invention is used to manufacture a flat panel display on a polyamine material having good electrical properties, and to more easily check the connection state of the flat panel display connected to the tip end of the disc probe, from the miscellaneous Solve problems with poor products. In addition, the present invention selectively applies an RGB signal to a metal wire orthogonally connected to a k-pin that exposes a concave-convex pattern at a pitch of 3 to 4, so that when the flat display device is inspected, the tablet can be directly confirmed by an already equipped tester. The connection status of the display device is used to more accurately check the wrong operation before the product leaves the factory, and improve the reliability and productivity of excellent mass production products. [Embodiment] [Embodiment] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. FIG. 9 is a side view showing the steps of manufacturing the illumination panel for flat panel display without cracking according to the batch technology, and FIG. 1 to FIG. 2 are diagrams showing the manufacturing process of the illumination panel for inspection of the flat panel display device. Stereogram 0 6/16 201243339 The method for manufacturing a illuminating panel for inspection of a flat panel display device of the present invention is a method for manufacturing a illuminating panel for inspecting a flat panel display device by a batch technique, which will be described in detail below. As shown in Fig. 1, the technique of manufacturing a lighting panel first utilizes aluminum to deposit a separation layer 200 on one side of a stone wafer 100. That is, since aluminum as a conductive material is deposited on one side of the germanium wafer, it acts as a separation layer 2 on the upper side of the silicon wafer layer 100. Then 'on the upper side 200 of the separation layer, a poly-S& amine layer 300 of one of the insulators is deposited and a seed layer 400 as a conductive layer is deposited on the upper side of one side 300 of the polyimide layer. Thus, as shown in Fig. 2, in the seed After the first photosensitive liquid 500 is coated on the upper side of the layer, the first probe pattern is formed by a first photolithography technique using a photomask. As shown in FIG. 3, the first probe pattern is formed by processing a PR (photosensitive liquid) pattern formed by a first photolithography technique as a mask to process a portion of the seed layer 400 as a lower film. After the removal technique, it is generated by a etch technique that selects a portion of the seed layer 4 that is not formed of PR. The first lithography technology is divided into DRF (dry-type photographic film, that is, light-receiving reaction) and PR (wet-one liquid photographic liquid), and DFR is usually used in PCB (Printed Circuit Board) or etching (etching) technology. And the use of liquid photosensitive liquid in more sophisticated technology. The first photosensitive liquid 500 is reacted by light, and is applied to the upper portion of the seed layer 400, and the photomask (black) is placed thereon to perform exposure (camera) photography, and the photosensitive material is identified according to the position of the black portion. . 201243339 Here, the deposition of polyamine 300 is on the upper side of the separation layer, and the selection of the poly-poly-form in the form of (4) and the preparation of the poly-anthracene into a solution One is to perform deposition. Next, as shown in FIG. 4, a probe is formed on the upper portion of the portion 400 of the seed layer in which the first probe pattern is present by the first plating technique, and the probe 7 is made of one of nickel or a nickel alloy material. to make. The probe 700 is formed between the first electric clock pattern by the metal coating of the upper surface of the metal forming the seed layer to be coated with the metal to be worn, wear-resistant or decorative (four)-electrical forging technique, and this is formed by The electrolysis of gold, silver, copper, and other metals is automatically deposited on the seed layer. Here, the type of gold, silver, copper, recording, etc. of the probe 7〇〇 deposited on the upper portion of the fourth layer of the seed layer is formed, and @ generally has less ionization tendency and low reactivity, thereby being stable and electrically conductive. body. - Thereafter, as shown in FIG. 5, the next step of manufacturing the illumination panel of the embodiment of the present invention 'coating the second photosensitive liquid_ to cover the probe and using the special probe tip deposition photomask_implementing the second light The technique is engraved to form a first tip pattern that exposes one end 700 of the probe. After the second photosensitive liquid 800 is applied to a part of the upper portion of the probe 7 ,, a photomask is deposited on the probe tip _ the upper surface is irradiated with light (ultraviolet rays, ί ί 电 ) ) ) m m m 除 除 探针 探针 探针 探针 探针A portion of the second photosensitive liquid 8 于 on the upper portion of the probe 700 is exposed by a photomask. The second photosensitive liquid 8 (10) exposed only to a portion of the upper portion of the probe is developed by a photolithography technique, and as shown in FIG. 6, a second surface technique is formed by applying a portion of the upper portion of the developed portion. A probe tip 900 between a tip pattern is deposited on the first tip pattern of the upper portion of the probe 7. σ~ 8/16 201243339 At this time, the probe tip 900 is made of a selected one of nickel and a nickel alloy. The reason why the probe tip 900' is formed on a portion of the probe 700 by the second photolithography technique is to smoothly apply the RGB signal to the illumination board for checking whether the flat panel display device is leaking or short-circuited, thereby checking the supply to the flat panel display. The power efficiency is more effective in checking whether the product of the flat panel display device is abnormal or not. Next, the next step in the manufacture of the illuminating panel, after masking the probe tip 9 〇〇 and the probe 700, simultaneously etches the second photographic liquid that has been formed at both ends of the probe tip 900 and the probe 700. 800 and a probe present in the lower portion of the first photosensitive liquid to form a laminated structure for removing the first probe pattern and the first probe tip pattern as shown in Fig. 7. In addition, as shown in Fig. 8, the probe tip is given After the mask is covered by 900 and left to the seed layer 400 between the first probe patterns, as shown in FIG. 9, the third photosensitive liquid 1000 is applied to cover the probe 7 and the probe tip 9〇. At this time, the photomask 600 is not placed on a portion 1000 of the third photosensitive liquid applied to the upper portion of the probe tip 900, and after the photomask 600 is placed in the remaining third photosensitive liquid region 1000, photolithography is performed. And as shown in FIG. 5, both ends of the probe tip 900, probe or seed layer 400 are developed to expose a portion 700 of the pick-up needle with the p-needle end 900 as the upper portion and a portion 800 of the seed layer. ^ In other words, a light mask is placed in all areas except the area where the probe tip 900 is formed. The film 600 is irradiated with light (ultraviolet rays, X-rays, electron lines) to display only the second calendering liquid 1000 which is formed in a portion of the I needle tip 900, thereby exposing the probe tip 900 to the upper portion. Both ends of the needle 700. 9/16 201243339 冲!Ϊ为其他-实施例' In the implementation of the third lithography technique, a portion of the region selected from the probes 700 forming the lower end of the j-tip tip 900 is shaped as 3 The concavo-convex pattern 丨1 露出 is exposed to the gap of 4, that is, as shown in FIG. 1A, in order to expose the coating pin 7 存在 which is present in the lower portion of the probe tip 900, a separately prepared photomask for the concavo-convex pattern is placed. The concave film is irradiated with light from the upper portion of the photomask to form an illumination plate including the concave-convex pattern 100. Thereafter, as shown in FIG. 12, at least one gold material orthogonal to the exposed probe is laminated by the concave-convex pattern 0000 The wire (10) is separated (removed) from the illuminating wafer on the ♦ wafer on which the substrate is formed, and the illuminating plate is completed. Rgb is applied to the probe 7 of the illuminating plate forming the metal wire 200
Red、心⑽、Blue)，以檢查上述金屬導線1200的導電 與否。 換言之，製作完成通過凹凸圖案丨1〇〇連接已形成的探 =700和至少一條金屬導線〗2〇〇，並在向照明板施加 信號時通過金屬導線副進行檢查的照明板。 π，過照明板不僅可以隨時通過已具備關試儀檢查與 抓針大^ _連接的平板顯示裝置的漏水現象或短路與 否，而且，可更有效地檢查平板顯示裝置的連接狀態，從 而根本上預防不良平板顯示裝置的出廠。 1外，照明板可在產品出廠之前事先檢查平板顯示裝 置的錯誤運行，從而可提高優質平板顯示裝置的量產可靠 性及生產性。 下面，結合圖10至圖丨2對本發明實施例平板顯示裝 置檢查用照明板進行更詳細的說明。 10/ 16 201243339 本發明的平板顯示裝置檢查用照明板， :=°:上面的分離層2。〇為基礎沉積聚酿: ，亚侧沉積於聚酿胺層300上面的種子層400的—% /刀以形成棟針圖案之後，在種子層·的另外 沉積探針700並在前面的探針漏的上 ς _ ;塗佈感光液以覆蓋種子層備、探針、= 900之後，只在前面和後面的上部防止掩膜實施光刻技術， 成,在於前面的探針尖端900和存在於後面的 铋，斗00上4的感光液區域，從而向外部露出已形成於探 針尖端刪和探針尖端_對面的探針兩端。另外，探針 圖案使沉積探針700的種子層和相同種子層彻之間 具備預設的間距，而且’聚_層的全部面積，因触 刻沉積的種子層_的—部分而大於沉積_子層400的 面積。 另外，平板顯不裝置檢查用照明板通過以一定間距露 出存在;Μ衣針太端900和已形成於探針尖端9⑻對面的探 針700之間的部分區域形成多個凹凸圖案测，而凹凸圖 案110可使至）一條金屬導線丨2⑻與露出的探針7⑻層積。 在此，向棟針700及探針尖端900的金屬導線丨200施 加RGB (Red、Green、Blue)信號，從而利用已具備的測 試儀檢查金屬導線UOO的導電與否。 ^在此，聚醯胺300的沉積是選擇將聚醯胺300製作成 膠片形式⑽型聚_紐將聚醯胺製賴液態的聚酿胺 溶液中的一種進行沉積。Red, heart (10), Blue) to check whether the above-mentioned metal wire 1200 is electrically conductive or not. In other words, the illuminating panel which is formed by the embossing pattern 丨1 〇〇 connecting the formed probe 700 and at least one metal wire 〇〇 2 〇〇 and inspecting it by the metal wire pair when applying a signal to the lighting panel is completed. π, the over-illumination board can not only pass the water leakage phenomenon or short-circuit of the flat panel display device which has been connected with the gripping instrument and has a large gap, and can more effectively check the connection state of the flat panel display device, thereby fundamentally The factory for the prevention of defective flat panel display devices. In addition, the lighting panel can check the wrong operation of the flat panel display device before the product leaves the factory, which can improve the mass production reliability and productivity of the high quality flat panel display device. Next, a lighting panel for flat panel display device inspection according to an embodiment of the present invention will be described in more detail with reference to Figs. 10 to 2 . 10/16 201243339 The illumination panel for flat panel display device inspection of the present invention, :=°: the upper separation layer 2. 〇Based deposition: After the sub-side is deposited on the polyamine layer 300, the seed layer 400 is -%/knife to form the pin pattern, and the seed layer is additionally deposited with the probe 700 and the probe in the front Leaked upper ς _ ; coating the photographic liquid to cover the seed layer preparation, probe, = 900, only in the front and back of the upper part to prevent the mask from performing lithography, in the front of the probe tip 900 and present in The back 铋, the photoreceptor area on the 00 of the 00, exposes the probe to the outside and is formed at both ends of the probe opposite to the tip of the probe. In addition, the probe pattern has a predetermined spacing between the seed layer of the deposition probe 700 and the same seed layer, and the entire area of the 'poly layer' is larger than the deposition due to the portion of the seed layer deposited by the etch. The area of the sub-layer 400. In addition, the illuminating panel for the flat panel display device is exposed by a certain interval; a plurality of concave and convex patterns are formed in a partial region between the nipple end 900 and the probe 700 formed on the opposite side of the probe tip 9 (8), and the embossing is performed. The pattern 110 allows a metal wire 丨 2 (8) to be laminated with the exposed probe 7 (8). Here, an RGB (Red, Green, Blue) signal is applied to the metal wire 丨 200 of the pin 700 and the probe tip 900, thereby checking whether the metal wire UOO is electrically conductive or not by using a tester already provided. Here, the deposition of the polyamine 300 is carried out by selectively depositing the polyamine 300 into a film form (10) type poly-n-polyamide which is deposited in a liquid polyamine solution.
上述貰關僅用以說明本發明而非限制，本領域的普 通技術人員應當理解，可骑本發明進行糾、變形成I 11/16 201243339 等同替換，而不脫離本發明的精神和範圍，其均應涵蓋在 本發明的權利要求範圍當中。 【圖式簡單說明】 圖1為表示本發明實施例平板顯示裝置檢查用照明板 製造技術過程的第一側面圖； 圖2為表示本發明實施例平板顯示裝置檢查用照明板 製造技術過程的第二側面圖； 圖3為表示本發明實施例平板顯示裝置檢查用照明板 製造技術過程的第三側面圖； 圖4為表示本發明實施例平板顯示裝置檢查用照明面 板製造技術過程的第四侧面圖； 圖5為表示本發明實施例平板顯示裝置檢查用照明板 製造技術過程的第五側面圖及立體圖； 圖6為表示本發明實施例平板顯示裝置檢查用照明面 板製造技術過程的第六側面圖； 圖7為表示本發明實施例平板顯示裝置檢查用照明面 板製造技術過程的第七側面圖； 圖8為表示本發明實施例平板顯示裝置檢查用照明面 板製造技術過程的第八側面圖； 圖9為表示本發明實施例平板顯示裝置檢查用照明面 板製造技術過程的第九側面圖； 圖10為表示本發明實施例平板顯示裝置檢查用照明板 製造技術過程的立體圖； 圖Π為表示本發明實施例平板顯示裝置檢查用照明板 製造技術過程的另一立體圖； 圖12為表示本發明實施例平板顯示裝置檢查用照明板 12/ 16 201243339 製造技術過程的又一立體圖。 【主要元件符號說明】 100 矽晶圓 200 分離層 300 聚醯胺層 400 種子層 500 第一感光液 600 光掩膜 700 探針 800 第二感光液 900 探針尖端 1000 第三感光液 1100 凹凸圖案 1200 金屬導線 13/16The above description is only for the purpose of illustrating the invention, and is not to be construed as limiting the scope of the present invention, without departing from the spirit and scope of the invention. All should be covered by the scope of the claims of the invention. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a first side view showing a manufacturing process of a lighting panel for inspecting a flat panel display device according to an embodiment of the present invention; FIG. 2 is a view showing a manufacturing process of a lighting panel for inspecting a flat panel display device according to an embodiment of the present invention; FIG. 3 is a third side view showing a manufacturing process of a lighting panel for inspecting a flat panel display device according to an embodiment of the present invention; FIG. 4 is a fourth side view showing a manufacturing process of a lighting panel for inspecting a flat panel display device according to an embodiment of the present invention; Figure 5 is a fifth side view and a perspective view showing a manufacturing process of a lighting panel for inspecting a flat panel display device according to an embodiment of the present invention; and Figure 6 is a sixth side view showing a manufacturing process of a lighting panel for inspecting a flat panel display device according to an embodiment of the present invention; Figure 7 is a seventh side view showing a manufacturing process of a lighting panel for inspecting a flat panel display device according to an embodiment of the present invention; and Figure 8 is an eighth side view showing a manufacturing process of a lighting panel for inspecting a flat panel display device according to an embodiment of the present invention; 9 is a view showing a manufacturing technique of a lighting panel for inspection of a flat panel display device according to an embodiment of the present invention; FIG. 10 is a perspective view showing a manufacturing process of a lighting panel for inspecting a flat panel display device according to an embodiment of the present invention; and FIG. 10 is another perspective view showing a manufacturing process of a lighting panel for inspecting a flat panel display device according to an embodiment of the present invention; Fig. 12 is another perspective view showing the manufacturing process of the illumination panel 12/16 201243339 for the flat panel display device according to the embodiment of the present invention. [Main component symbol description] 100 矽 wafer 200 separation layer 300 polyamine layer 400 seed layer 500 first photosensitive liquid 600 photomask 700 probe 800 second photosensitive liquid 900 probe tip 1000 third photosensitive liquid 1100 concave and convex pattern 1200 metal wire 13/16