201234912 if 六、發明說明： 【發明所屬之技術領域】 ^本發明是有關於—種用於將導入至電爐内的被加熱 氣體加熱至高溫的氣體過熱器及過熱器連結體。 【先前技術】 、近年來，作為成為矽太陽電池原料的多晶矽的製造方 ί，利用金屬辞將四氯化矽還原而製造高純度多晶矽的鋅 還原法受到關注。 在鋅還原法中，成為原料的四氯化矽及鋅將被氣化、 加熱至900〜l，l〇(rc，來進行氣相還原反應。 四氯化石夕的沸點為聊，故可㈣容易地進行氣化， :其會與水產生劇烈反應’且亦具有腐錄，故而，對 的^ ==叱左右時，需要注意裝置内環境及裝置材質 順常一提 揭示-種氣體加號公報中1 加熱至言…；：藉直接通電而將金屬電阻元卡 接觸，由成為高溫的金屬電阻元件與氣體直去 供碉，而獲得高溫氣體。 金屬m加熱吨切之_雜性氣體時，會存4 疋件被腐蝕性氣體腐蝕等問題。 一種氣體ί日本專利2(Κ)Μ85353號公報中，揭f 熱部取出的ί丄山’包括具有螺旋狀的發熱部以及自此考 的方式插通至貫===，其中發熱體以位於爐_ 貝通爐内壁而配置的保護管内而成。 201234912 ^pif 而且，此氣體加熱裝置是將氣體或空氣導入至形成為 螺旋狀的發熱部進行加熱，且將加熱後的氣體或空氣釋放 至爐内。 上述之氣體加熱裝置是使發熱部在爐内壁貫通而構 成的構造，因此，發熱部之最大長度受到爐内壁之厚度限 制，其結果，存在難以充分控制加熱溫度的問題。 【發明内容】 士發明是為了解決用於將供給至反應器等的氣體加 熱至尚溫的氣體過熱器之先前的問題而研製，其目的在於 提供-種可將。具有腐钱性、反應性的氣體嚴格控制地加熱 至900〜l，l〇〇C的目標溫度為止的氣體過熱器及過熱器連 結體。 尤其，本發明的目的在於提供一種在製造高純度矽的 辞還原法中，可將原料四氯化石夕氣體嚴格控制地加熱至 900〜l，l〇〇C之目標溫度為止後供給至還原反應器的氣體 過熱器及過熱器連結體。 广用以達成上述目的之本發明的氣體過熱器是用於將 i體加高溫，氣體過熱器包括-外筒管以及多個發熱 S。外同f具有—氣體流人口以及-氣體流出σ。發熱管 配置於上述外靖管之長度方向上，且每一發熱管之内部有 容納一發熱體。 ，據此種氣體過熱^，由於發熱體不減體接觸，因 此不存在腐蝕之虞。 此處’較佳為’於上述外筒管之兩端部，配設有預先 4 201234912 . • 一 .w^lt201234912 if VI. Description of the Invention: [Technical Field of the Invention] The present invention relates to a gas superheater and a superheater connected body for heating a heated gas introduced into an electric furnace to a high temperature. [Prior Art] In recent years, as a method for producing polycrystalline germanium which is a raw material for a solar cell, a zinc reduction method for producing high-purity polycrystalline germanium by metal ruthenium reduction has been attracting attention. In the zinc reduction method, cerium tetrachloride and zinc which are raw materials are vaporized and heated to 900 liters and liters to carry out a gas phase reduction reaction. The boiling point of the chlorinated stone stalk is chat, so (four) It is easy to carry out gasification: it will react violently with water' and it also has a record of corrosion. Therefore, when the ^==叱 is right, it is necessary to pay attention to the environment and the material of the device. In the bulletin 1 heating to the words...;: by direct energization, the metal resistance element card is contacted, and the high-temperature gas is obtained by the metal resistance element which becomes a high temperature and the gas is supplied directly to the gas. When the metal m heats the ton of the impurity gas, There will be problems such as corrosion of corrosive gases in a case of 4 gases. A gas ί Japanese Patent No. 2(Κ)Μ85353, which discloses that the 丄 丄 mountain taken out from the hot part includes a spiral heat generating part and the method of testing from this Inserted into the through ===, wherein the heating element is formed in a protective tube disposed on the inner wall of the furnace_Beitong furnace. 201234912 ^pif Moreover, the gas heating device introduces gas or air into the heat generating portion formed into a spiral shape. Heated and will be heated The gas or air is released into the furnace. The gas heating device described above has a structure in which the heat generating portion is penetrated through the inner wall of the furnace. Therefore, the maximum length of the heat generating portion is limited by the thickness of the inner wall of the furnace, and as a result, it is difficult to sufficiently control the heating temperature. SUMMARY OF THE INVENTION The invention has been developed in order to solve the previous problem of heating a gas supplied to a reactor or the like to a gas superheater which is still warm, and the object of the invention is to provide a kind of rot, The gas superheater and the superheater connected body are heated to a target temperature of 900 Å to 100 Å under strict control. In particular, it is an object of the present invention to provide a method for producing high purity ruthenium. The gas superheater and the superheater connected body which are supplied to the reduction reactor after the raw material of the silicon tetrachloride gas is strictly controlled to be heated to 900 to 1, and the target temperature of l〇〇C is used. The gas superheater of the invention is used for adding high temperature to the body i, and the gas superheater comprises an outer tube and a plurality of heat generating S. The same f has a gas flow population And - gas outflow σ. The heat pipe is disposed in the length direction of the outer tube, and each of the heat pipes has a heating element inside. According to the gas superheating, since the heating body does not reduce the body contact, therefore, There is corrosion. Here, 'preferably' is at the two ends of the outer tube, and is equipped with the advance 4 201234912. • One.w^lt
形成有用於插入上述發熱管之孔洞的側板，且上 插入至上述孔洞中。 …、B 如此形成後，可實現加熱能量之有效利用，並 穩定姿勢保持發熱管。 、 進而’上述發熱管之長度亦可形成為大於上述外筒管 之全長，且上述外筒管的發熱管亦可自上述 部跨設至另一端部。 ^ 或者，上述發熱管之長度亦可小於或等於上述外筒管 之長度的-半，且上述發熱管亦可自上述外筒管之兩端部 插入至上述外筒管之中央附近為止。 由於如此叹。十欠更較為容易，故而可根據發熱管之長 度，選擇自一側插入或自兩側插入之任一情況。 而且本發明中，上述氣體過熱器更包括一外部加熱機 構，較佳為配置於上述外筒管之外周。 —如此來配置外部力口熱機構後，可於内側及外側進 行加熱’因此加熱效果良好。 進而’上述發熱體較佳為包含金屬或陶竟的電阻發敎 ^ ° ”、、 溫 右為此種構成，則不僅發熱效率良好而且容易$ 度調整。 ~ 進而本發明中，上述氣體過熱器更包括多個整流板， 較佳為’這些整流板彼此以—預歧離間隔地配設於上述 外4吕之内壁上’其令每—整流板的形狀實質上為半圓 狀，並且相鄰的上述整流板交替地配設於上述外筒管之内 pif 201234912 壁的一側及另一側。 、、⑼ί f此種構成，則可藉由流動於内部的加熱氣體與整 = 碰撞’流徑交替’而確保外筒管内的氣體之流徑 較長，從而可均勻地加熱整個氣體。 ㈣ίίβί發明中，較佳為，上述外筒管及上述發熱管 進而’本發明中，較佳為，上述加熱氣體為四氣化石夕。 而^’本發明更提供—種過熱器連結體，是上 述任一項之氣體過熱器連結而構成。 至反氣體過熱11及過熱器連結體，可將供給 至反應盗#之氣體祕控制地加熱至目標溫度為止。 :且，即便在加熱腐韻性氣體之情形時 的發熱體亦不會被氣H聽。 H線圈專 加熱f地設_部之長度，因此，容易控制 兴實S本上述特徵和優點能更明顯易懂，下文特 舉貫施例，並配合所附圖式作詳細說明如 又将 【實施方式】 =下’基於圖式，說明本發明之氣體過埶哭。 圖1是依照本發明之一實施彳 二°° 要部分的分解立㈣。円種氣體過熱器之主 之狀態下的剖：圖r是二之=級經組敦 圖。再者’在本實施例中’加熱氣體是用於 晶矽的四氣化矽。 表k呵純度多 6 201234912f -TUTVpli ★，實施例之氣體過熱器10包括一實質上為圓筒狀之 外筒管2以及多個（本實施例中為4個）發熱管4，其中 每一發熱官4的兩端部4a以及4b突出地配置於外筒管2 内’而且多個發熱體6 ’其等是分別容納於發熱管4之内 部。而且’外筒管2之兩端部在容納發熱管4之後，分別 由兩個侧板8、8進行密封。 於上述外筒管2之兩端部，分別形成有氣體流入口 2a 與氣體流出口 2b。 而且’配置於外筒管2之各端部的侧板8可為一塊側 板’但為了保持強度，亦可如圖3所示之側板8,，形成為 製成包含内側封閉板8a與外側封閉板奶的雙層構造，且 也可形成於内側封閉板8a與外側封閉板％之間安裝有陶 变纖維毯（ceramic fiberblanket)等隔熱材的構造。 上述外筒管2、上述發熱管4、及上述側板8 (8，）等 的材質可使用具有耐蝕性及耐熱性的石英、碳化矽、氮化 矽等。如本實施例所示，處理氣體為四氣化矽的情況下， 上述材質宜為石英。 容納於外筒管2内之發熱管4及發熱體6通常為2根 二10根，但其數量並無特別限定，根據所需之熱容量而適 當決定。圖示之例是將各個發熱管4大致均等地隔開進行 配置。 發熱官4具有貫通兩侧板8、8且兩端部4a、4b突出 至外部的長度，成為將發熱體6自該突出的兩端部4a、4b 之任一端部插入至發熱管4内進行收容的構造。 201234912. -Ti^-rupif ^，體6可使用康達合金(Καη_—y )、祕合金、 Γ、1等的電阻式加熱11。加熱11之形狀可適當使用線圈 7、職狀、_狀等。容财發熱管4之外筒管 水平设置，但亦可根據設置空間的情況而垂直或 ，1之氣體過熱^ 1G是將長度大於外筒管2的發熱 L丨，在外筒f 2内’但亦可取而代之地將分成2根之 为體配置成直線狀。 即:在發熱體6或發熱管4具有長度上的限制時，如 示’亦可形成如下構造：以2根為—組準備一端預 先密封之封底筒狀的發熱管Η，將該等發熱管14、14的 封閉側之封閉端部14a自外筒管2的兩側以大致直線狀地 外筒官2的内部’且使開放側之各開放端部14b自 外茼管2之兩側板8、8向外部突出。 成為上述1對發熱管14、14之封閉端部l4a、14a 於外筒管2財央部以—財距離間隔地相讀接的配 置。相互鄰接的發熱管14之封閉端部14a間之間隔距離並 無特別限疋，但確保1〜10 cm左右即可。A side plate for inserting a hole for inserting the above-mentioned heat generating tube is formed, and the upper side is inserted into the above hole. When ..., B is formed in this way, efficient use of heating energy can be achieved, and the heat pipe can be maintained in a stable posture. Further, the length of the heat pipe may be formed to be larger than the entire length of the outer tube, and the heat pipe of the outer tube may be spanned from the portion to the other end. Or, the length of the heat pipe may be less than or equal to - half of the length of the outer tube, and the heat pipe may be inserted from the both end portions of the outer tube to the vicinity of the center of the outer tube. Because of this sigh. Ten owes is easier, so depending on the length of the heating tube, you can choose either one of the insertion from one side or the insertion from both sides. Further, in the present invention, the gas superheater further includes an external heating mechanism, and is preferably disposed on the outer circumference of the outer tube. - After the external force heat mechanism is disposed in this way, heating can be performed on the inside and the outside side, so the heating effect is good. Further, the above-mentioned heat generating body preferably includes a metal or ceramic resistor, and the temperature is right. Therefore, not only the heat generation efficiency is good but also the degree of adjustment is easy. Further, in the present invention, the gas superheater is used. Further comprising a plurality of rectifying plates, preferably 'the rectifying plates are disposed on the inner wall of the outer 4 ruins at a pre-discriminating distance from each other'. The shape of each rectifying plate is substantially semi-circular and adjacent The above-mentioned rectifying plates are alternately disposed on one side and the other side of the wall of the pif 201234912 in the outer bobbin. The composition of the (9) ί f can be flowed by the heating gas flowing inside and colliding with the whole The electric field alternates to ensure that the gas flow path in the outer tube is long, so that the entire gas can be uniformly heated. (IV) In the invention, preferably, the outer tube and the heat tube are further, in the present invention, preferably, The heating gas is a four-gas fossil. However, the present invention further provides a superheater connecting body, which is configured by connecting the gas superheater of any of the above. The anti-gas superheating 11 and the superheater connecting body can be supplied.The gas to the reaction thief is controlled to be heated to the target temperature. Moreover, even in the case of heating the venous gas, the heating element is not heard by the gas H. The H coil is specially heated to the length of the _ portion. Therefore, it is easy to control the above-mentioned features and advantages of the present invention. The above-described features and advantages can be more clearly understood. The following is a detailed description of the embodiments, and the detailed description will be made in conjunction with the drawings. The gas of the present invention is crying. Fig. 1 is an exploded view of the main part of the enthalpy of the enthalpy according to one embodiment of the present invention. The cross section in the state of the main gas superheater: Fig. 2 is a two-stage group In the present embodiment, the 'heating gas is the four gasification enthalpy used for the crystal crucible. Table k is more pure 6 201234912f - TUTVpli ★, the gas superheater 10 of the embodiment includes a substantially cylinder The outer tube 2 and the plurality of (four in the present embodiment) heat pipes 4, wherein both end portions 4a and 4b of each of the heat generating members 4 are protrudedly disposed in the outer tube 2' and a plurality of heating elements 6 'These are respectively accommodated inside the heat pipe 4 and the ends of the outer tube 2 After accommodating the heat pipe 4, the two side plates 8 and 8 are respectively sealed. At both ends of the outer tube 2, a gas inflow port 2a and a gas outflow port 2b are formed, respectively. The side plates 8 at the ends of each of the two ends may be a side plate'. However, in order to maintain the strength, the side plates 8 as shown in FIG. 3 may be formed to form a two-layer structure including the inner side closing plate 8a and the outer side closing plate milk. Further, a structure in which a heat insulating material such as a ceramic fiber blanket is attached between the inner closing plate 8a and the outer closing plate % may be formed. The outer tube 2, the heat generating tube 4, and the side plate 8 (8) For the materials such as , for example, quartz, tantalum carbide, tantalum nitride, or the like having corrosion resistance and heat resistance can be used. As shown in the present embodiment, in the case where the processing gas is tetragassing, the material is preferably quartz. The number of the heat pipe 4 and the heat generating body 6 accommodated in the outer tube 2 is usually two or two, but the number thereof is not particularly limited, and is appropriately determined depending on the required heat capacity. In the illustrated example, the heat pipes 4 are arranged substantially equally apart. The heat generating member 4 has a length that penetrates the both side plates 8 and 8 and the both end portions 4a and 4b protrude to the outside, and the heat generating body 6 is inserted into the heat generating tube 4 from either end portion of the protruding end portions 4a and 4b. Containment structure. 201234912. -Ti^-rupif ^, body 6 can be heated by resistive heating of Coanda alloy (Καη_-y), secret alloy, niobium, and the like. The shape of the heating 11 can be suitably used for the coil 7, the job, the _ shape, and the like. The outer tube of the Rongcai heating tube 4 is horizontally set, but it can also be vertical according to the situation of the installation space. 1 The gas is overheated. 1 1G is the length larger than the heat of the outer tube 2, in the outer tube f 2 'but Alternatively, the two bodies may be arranged in a straight line. That is, when the heating element 6 or the heat-generating tube 4 has a limitation in length, as shown in the drawing, the following structure may be formed: a heat-generating tube having a closed-end cylindrical shape in which one end is sealed in advance is prepared in two groups, and the heat-generating tubes are sealed. The closed end portion 14a of the closed side of 14, 14 is substantially linear from both sides of the outer tube 2 and the open end 14b of the open side is from the side plates 8 of the outer tube 2 8 protrudes to the outside. The closed end portions 14a and 14a of the pair of heat-generating tubes 14 and 14 are arranged to be read at intervals in the fiscal center of the outer tube 2 at a distance. The distance between the closed end portions 14a of the heat-generating tubes 14 adjacent to each other is not particularly limited, but it is ensured to be about 1 to 10 cm.
另一方面，於外筒管2之内壁，如圖2A以及圖2B 所示’在垂直於外筒管2之軸的方向上配置有多個整流板 16 (實施例中為4個）。該等整流板16的形狀實質上為半 圓狀，且在設置有整流板16的外筒管2之剖面圖中，於整 流板16之一侧與相對的另一侧的空間形成大致半圓狀之 切口部16a。 8 201234912 , 再者，該切口部16a亦可為圓弧狀，且形狀由整流板 16之形狀決定。 發熱g 4為貫通各個整流板μ的構造，且貫通部之 發熱皆4與整流板16是利用焊接以多點固定方式而一體成 形。再者’氣體經由該切口部16a，通過外筒管2之内部。 ，互鄰接的整流板16之切口位置較佳為錯開 f。藉此，通過的氣體一面碰撞整流板16 一面改變流徑， 從而確保氣體在外筒管2⑽通過距離較長，藉此 進行熱交換。相互鄰㈣整流板間的距離較佳為1〇〜 整流板16之材質可使用石英、碳化矽、 在處理氣體為四氯切的情況下，上述材質宜為石英。 失二卜】周可由隔熱材料覆蓋，但為;減二損 失以及提尚熱效率，較佳為，如圖4所示之 〜”、、狽 管2之外周劃分成多個區域，且於該= :上分別配置外部加熱機構20’亦自外部朝向内忿= 由於可藉由以此方式設置外部加熱機構2〇， 將内部之發熱管4之加熱容量可設定為較小而相應= 技術相比，可使氣體過熱器變得更緊密小型。^與先前 構20之發熱體可使用康達合金，鎳鉻合金、0 °卩加熱機 阻式加熱器。 、反化發等的電 圖 外部加熱機構20之各區域之加熱容量， 所示的氣體流入口 2a側大於氣體流出口 2b侧。"、、使 201234912 在本實施例之氣體過熱器1〇中，將加熱對象之四 化石夕加熱氣體自氣體流人口 2a導人至外筒管2内，且再將 f熱體6藉㈣電而發熱至高溫之後，加熱氣體逐漸達 同溫’-面與整流板16產生碰撞—面於外筒管2之内 =端，祕達到_〜U〇〇t之溫度，自氣體流二 2b喷出至外部。 藉此，例如，若將氣體過熱器10容納配置於製造多 aB石夕之爐内等’貞彳可將加熱至規定溫度的四氯 給至該爐内。 販仏 =此種構成’則不會產生發熱體6被加熱氣體腐餘 。而且，並非如先前技術般使發熱部貫通爐内壁 之構k因此發熱部之長度不受爐内壁之厚度限制 而可自由設計長度。 、以上，對本發明之一實施例之氣體過熱器1〇進 說明’但本發日林受上述實施例任何限定。 ，如’如圖6所示’亦可將以上說明之氣體過熱器Μ ί、、、° 2個、3個或3個以上而構成。可藉由以此方式連結 ，體過熱$ 1G形成過熱器連結體3()，而進—步嚴格地控 制溫度，獲得高溫之氣體。 而且，可藉由採用過熱器連結體3〇而將例如具有腐 、反應性之氣體嚴格㈣地加熱至_〜丨，刚。C之目 皿度，止丨尤其’本發明在製造高純度敎辞還原法中， 可將原料四氣化錢體嚴格控制地加熱至 900〜Ί, 100。〇之 目標溫度為止後’供給至還原反應器。 201234912, ---pif 再者，該氣體過熱器10並不限於加熱四氣化矽氣體， 可用作各種氣體之過熱器。 [實施例1] 利用内部填充有陶瓷纖維毯之雙層石英側板8，，將外 徑308 mm、内徑300 mm、長度2,000 mm之石英管的兩 端密封。於以此方式形成的外筒管2之内部，準備4對（共 計8根）一端經密封之外徑80 mm、長度1，〇7〇 mm的石 英製的發熱管4。 另一方面’於外筒管2内，隔開200 mm之間隔，配 置4塊半圓形狀的整流板16。繼而，將4根發熱管4自— 側插入至外筒管2内，且使發熱管4貫通整流板16，且藉 由焊接而將發熱管4固著地安裝於整流板16之貫通部。9On the other hand, on the inner wall of the outer bobbin 2, as shown in Figs. 2A and 2B, a plurality of rectifying plates 16 (four in the embodiment) are disposed in a direction perpendicular to the axis of the outer bobbin 2. The shape of the rectifying plate 16 is substantially semicircular, and in the cross-sectional view of the outer bobbin 2 in which the rectifying plate 16 is provided, the space on one side of the rectifying plate 16 and the space on the opposite side are substantially semicircular. The cutout portion 16a. 8 201234912 Further, the cutout portion 16a may have an arc shape and the shape is determined by the shape of the rectifying plate 16. The heat generation g 4 is a structure penetrating through the respective rectifying plates μ, and the heat generation 4 of the penetration portion and the rectifying plate 16 are integrally formed by a multi-point fixing by welding. Further, the gas passes through the inside of the outer tube 2 through the slit portion 16a. The slit positions of the mutually adjacent rectifying plates 16 are preferably staggered f. Thereby, the passing gas changes the flow path while colliding with the rectifying plate 16, thereby ensuring that the gas passes through the outer bobbin 2 (10) for a long distance, thereby performing heat exchange. The distance between the adjacent (four) rectifying plates is preferably 1 〇. The material of the rectifying plate 16 may be quartz or tantalum carbide. When the processing gas is tetrachlorocene, the material is preferably quartz. The second week can be covered by the heat insulating material, but for the second loss and the heat efficiency, preferably, as shown in FIG. 4, the outer circumference of the manifold 2 is divided into a plurality of regions, and = : The external heating mechanism 20' is separately disposed from the outside to the inside. 由于 = Since the external heating mechanism 2〇 can be set in this way, the heating capacity of the internal heating tube 4 can be set to be small and corresponding = technical phase In comparison, the gas superheater can be made more compact and compact. ^The heating element of the prior structure 20 can be used with Coanda alloy, nickel-chromium alloy, 0 °卩 heating machine resistance heater, and external electrogram of reverberation. The heating capacity of each region of the heating mechanism 20 is larger on the side of the gas inflow port 2a than the side of the gas outflow port 2b. ", and 201234912 In the gas superheater 1〇 of the present embodiment, the four fossils of the heating object are to be heated. The heating gas is led from the gas flow population 2a to the outer tube 2, and after the f-heating body 6 is heated to a high temperature by the fourth heating, the heating gas gradually reaches the same temperature and the surface is collided with the rectifying plate 16 Inside the outer tube 2 = end, secret reaches _~U〇〇t The gas stream 2b is ejected to the outside. Thus, for example, if the gas superheater 10 is housed in a furnace for manufacturing a plurality of abs, etc., the tetrakilium chloride heated to a predetermined temperature can be supplied to the furnace. In the furnace, the seller 仏 = this configuration does not cause the heating element 6 to be rotted by the heated gas. Moreover, unlike the prior art, the heat generating portion is penetrated through the inner wall of the furnace so that the length of the heat generating portion is not affected by the thickness of the inner wall of the furnace. The length can be freely designed. In the above, the gas superheater 1 of one embodiment of the present invention is described in the following description, but the present invention is limited by the above embodiments. For example, as shown in FIG. The gas superheater Μ ί, , , ° is described as 2, 3 or more. By this way, the body overheats $1G to form the superheater connection body 3(), and the process is strictly The temperature is controlled to obtain a high-temperature gas. Further, by using a superheater connecting body 3, for example, a gas having rot and reactivity can be strictly (four) heated to _~丨, just the degree of C, especially 'The invention is used in the manufacture of high purity 敎 还原 reduction method The raw material four gasification body can be strictly controlled to be heated to 900~Ί, 100. After the target temperature of 〇, it is supplied to the reduction reactor. 201234912, ---pif Further, the gas superheater 10 is not limited to heating. The four-gas enthalpy gas can be used as a superheater for various gases. [Example 1] Using a double-layer quartz side plate 8 filled with a ceramic fiber blanket, the outer diameter is 308 mm, the inner diameter is 300 mm, and the length is 2,000 mm. The both ends of the quartz tube are sealed. In the inside of the outer tube 2 formed in this manner, four pairs (total of eight) of a heat-sealing tube made of quartz having an outer diameter of 80 mm and a length of 1, 〇7 〇 mm are prepared. 4. On the other hand, in the outer tube 2, four semicircular rectifying plates 16 are arranged at intervals of 200 mm. Then, the four heat-generating tubes 4 are inserted into the outer tube 2 from the side, and the heat-generating tube 4 is passed through the flow regulating plate 16, and the heat-generating tube 4 is fixedly attached to the penetration portion of the flow regulating plate 16 by welding. 9
如圖5所示，在自氣體流入口 2a側（請參考圖1)配 置有4根發熱管’且自氣體流出口 2b側（請參考圖〇配 置有4根發熱管的情況下（圖5中，由於每2根平行配置， 故而圖示4根中的2根）’以使該等發熱管14之封閉端部 14a侧配置於外筒管2之大致中間位置的方式，將該等發 熱管14插入。 X 繼之，自發熱管14之開放端部14b插入螺旋狀的康 達加熱器（發熱體6)。康達加熱器（發熱體6)之熱容量 是氣體流入口 2a側為6.5 kwx4根，氣體流出口沘側為1 kw><4 根。 而且，如圖4所示，於外筒管2之外周，設置有分成 上下兩部分而各部分包含4個單元的外部加熱器（外部加 11 201234912 熱機構20)。外部加熱器（外部加熱機構2〇)之☆旦θ # 體流入口側之兩區域為20·5 kw，氣體声山 、里疋氣 10kw〇 K體冰出口側之兩區域為 對以上述方式構成之氣體過熱器之各個加 電’並以600 kg/hr之流量將加熱至8〇。 择…、σ。通 自氣體流人口 2a側導人。四氯切氣之二氯化錢體 側的溫度經量測為970t。 μ體之乳體流出口 2b 藉由本發明之氣體過熱器10，不但 也可以嚴格的控制溫度以獲得高溫氣體。家讼的構成， 雖然本發明已以貫施例揭露如上，秋、 本發明，任何所屬技術領域中具有丄以其並非用於限定 本發明之精神和範圍内，當可作些吊知識者，在不脫離 發明之保護範圍當視後附之申试,更動與潤飾，故本 【圖式簡單說明】 月圍所界定者為準。 圖1是依照本發明之—實施 要部分的分解立體圖。 種氣體過熱器之主 =21之氣體過熱器經Μ。" 圖2B是圖2八之3七線方衮之狀態下的剖面圖。 圖 前視圖 圖5 剖面圖。 圖3緣示圖1之側板之另一 ^的°彳面圖。 4是依照本發明之，樣的立體圖。 。 —種氣體過熱器的 •種氣體過熱器的 ‘種氣體過熱器的 是依照本發明之另—實施例之 圖6是依照本發明之另-實施例之. 201234912f —r x jjll 剖面圖。 【主要元件符號說明】 2 :外筒管 2a :氣體流入口 2b :氣體流出口 4、14 :發熱管 4a、4b :端部 6 :發熱體 8、8':側板 8a :内側封閉板 8b :外側封閉板 10 :氣體過熱器 14a :封閉端部 14b :開放端部 16 :整流板 16a _切口部 20 :外部加熱機構 30 :過熱器連結體As shown in Fig. 5, four heat-generating tubes are disposed on the gas inlet 2a side (please refer to Fig. 1) and from the gas outlet port 2b side (please refer to Figure 〇 where four heat-generating tubes are arranged (Fig. 5). In the case where two of the four parallel arrangements are arranged, the heat is applied to the closed end portion 14a side of the heat pipe 14 so as to be disposed at a substantially intermediate position of the outer tube 2, and the heat is generated. The tube 14 is inserted. X Then, a spiral Kangda heater (heating element 6) is inserted from the open end portion 14b of the heat-generating tube 14. The heat capacity of the Kangda heater (heating element 6) is 6.5 kwx4 on the side of the gas inlet 2a. The root side of the gas outflow port is 1 kw><4. Further, as shown in Fig. 4, on the outer circumference of the outer tube 2, an external heater which is divided into upper and lower portions and each portion includes four units is provided ( External addition 11 201234912 Thermal mechanism 20). External heater (external heating mechanism 2〇) ☆ θ θ # The two areas on the inlet side of the body flow are 20·5 kw, gas sound mountain, Liqi gas 10kw〇K body ice outlet The two sides of the side are the respective power-ups of the gas superheater constructed in the above manner and are at 600 kg/hr. The amount will be heated to 8 〇. Select..., σ. From the gas flow population 2a side guide. The temperature of the dichloro chlorinated dichloride side is measured as 970t. The μ body of the milk outlet 2b The gas superheater 10 of the present invention can not only strictly control the temperature to obtain a high temperature gas. The constitution of the domestic lawsuit, although the present invention has been disclosed by the above examples, the autumn, the present invention, and any technical field thereof It is not intended to limit the spirit and scope of the present invention. When it is possible to make some knowledge, it will be modified and retouched without departing from the scope of protection of the invention. Therefore, this [simplified description] BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is an exploded perspective view of an embodiment of the invention in accordance with the present invention. The gas superheater of the main gas of the gas superheater is enthalpy. " Figure 2B is the 3rd and 7th lines of Fig. 2 Figure 3 is a cross-sectional view of the front side view of Fig. 1. Fig. 3 is a perspective view of another side of the side plate of Fig. 1. 4 is a perspective view of a sample according to the present invention. • A kind of gas superheater's kind of gas superheater is Figure 6 is a cross-sectional view of another embodiment of the present invention. 201234912f - rx jjll [Explanation of main component symbols] 2: outer bobbin 2a: gas inflow port 2b: gas outflow port 4, 14: heat pipe 4a, 4b: end 6: heat generating body 8, 8': side plate 8a: inner closing plate 8b: outer closing plate 10: gas superheater 14a: closed end portion 14b: open end portion 16: rectification Plate 16a_cut portion 20: external heating mechanism 30: superheater connection body