201233932 六、發明說明： 【电明所屬之技術領域】 本發明係關於在配管等處 套加熱器之加熱方法，更夾套加熱器、及使用夾 的散敎、提-力妖！玄 關於抑制從炎套加熱器 “加熱效率俾達省電化的方法。 【先前技術】 自習t起，為對各種裝置或設備、其所連接的配管等被加 熱體施行加熱’係利用具 - 氘〖生之爽套加熱器包圍配管。 樣的ri献的側面等曲面進行保溫或加熱時’亦是裝設同 …γ °”，』。另外，此種夾套加熱器亦稱為「加熱套 (mantle heater)」。 ;此種夹套加熱器已知有如圖1()所示之加熱套心本案申 «月人亦在專利文獻丨中提案：在由氟系樹脂片構成的内層材 〇〇 η外層材200之間，使在無機纖維製薄片則上安裝有 發熱線(未圖示）的發熱體3⑻、與絕熱材侧重疊而構成積 層狀的加熱套10。發熱線係電熱線，連接於内層材100與 外層材200之連通於外部的電力線3〇6，並將插頭3〇7連接 於外部電源（未圖示）而供電。且，當將該加熱套1〇裝設於 直管狀配管20時，使長邊方向的二周緣部1〇3、1〇4相突接， 並利用端面所附設的子母扣帶1〇5、1〇6相結合。 此種加熱套10係具有可撓性，且起塵亦少，因而具有能 在無塵室等處使用等優點。 100144794 3 201233932 [先行技術文獻] [專利文獻] 號公報 [專利文獻1]曰本專利特開2002·295783 【發明内容】 (發明所欲解決之問題）201233932 VI. Description of the invention: [Technical field to which the electric power belongs] The present invention relates to a heating method for a heater in a pipe or the like, a jacketed heater, and a diverging and lifting force for using a clip!玄 关于 关于 关于 抑制 抑制 抑制 关于 关于 关于 关于 抑制 抑制 关于 炎 炎 炎 炎 炎 炎 炎 炎 炎 炎 炎 炎 炎 炎 炎 炎 炎 炎 炎 炎 炎 炎 炎 炎 炎 炎 炎 炎 炎 炎 炎 炎 炎 炎 炎 炎 炎 炎 炎 炎 炎〖Life's cool set of heaters surround the piping. When the surface of the ri offering is insulated or heated, it is also equipped with the same ... γ °". In addition, such jacket heaters are also referred to as "mantle heaters". Such a jacketed heater is known as a heating sleeve as shown in Fig. 1 (). The present invention is also proposed in the patent document: in the inner layer of the fluorine-based resin sheet, the outer layer of the outer layer 200 In the inorganic fiber sheet, a heating element 3 (8) having a heating wire (not shown) attached thereto is placed on the side of the heat insulating material to form a laminated heating jacket 10. The heating wire heating wire is connected to the external power line 3〇6 of the inner layer 100 and the outer layer 200, and the plug 3〇7 is connected to an external power source (not shown) to supply power. When the heating jacket 1 is mounted on the straight tubular pipe 20, the two peripheral portions 1〇3 and 1〇4 in the longitudinal direction are protruded, and the sub-fitting tape 1〇5 attached to the end surface is used. , 1 〇 6 combined. Such a heating jacket 10 has flexibility and has less dust generation, and thus has advantages such as being usable in a clean room or the like. 100144794 3 201233932 [Prior Art Document] [Patent Document] No. [Patent Document 1] Japanese Patent Laid-Open No. 2002-295783 [Disclosure] (Problems to be Solved by the Invention)
然而’力=套Η)在裝設狀態下，外層材2G 態，即便内建絕熱枒4〇〇,但仍無 路出狀However, in the installed state, the outer layer 2G state, even if the built-in insulation is 4〇〇, there is no road-like appearance.
^ ^ 透過外層材20C 進灯政熱。故，本發明之目驗在於抑财絲加熱器的散 熱。 (解決問題之手段） 為達成上述目的，本發明係提供下述失套加熱器、及使用 夾套加熱器之加熱方法。 ⑴一種夾套加熱器’係具備有内層材、外層材、及由上 與上述外層材所包圍的發熱體，且 體與上 述内層材相接觸之方式裝餅被加熱體上者，盆中， 在上返外層材的外周面形成金屬層。 金述⑴戟_編机上述金屬屠係 金屬蒸鍍:⑴所°"載的夹套加熱器，其，，上述金属層係 金：上述⑴所記载的夾套加熱器，其中，上述金屑層係 100144794 201233932 (5) —種使用 材、外層材、及由上述法’係使用具備有内層 體，且依被加熱體與上述_材^外層材所包圍的發熱 體上的爽套加熱器之加熱方之蝴設於被加熱 將夾套加熱器裝設於被加埶許 層材的步驟。 4上之後’利用金射I包圍外 ⑹如上述(5)所記载的使用失套加熱器之純方法，盆 中，在湘金制包圍上述外層材的步驟中，上述金屬㈣ 至少其中—面上設有複數突起的金射I，且依突起靠外層材 側之方式利用上述金屬箱包圍外層材。 (7) 如上述（5)所記載的使用失奢加熱器之加熱方法，其 中，在利用金屬箔包圍上述外層材的步驟中，上述金屬箔係 至少其中一面上形成連續氣泡構造發泡層的金屬箔，且依發 泡層靠外層材側的方式利用上述金屬箔包圍外層材。 (8) —種使用夾套加熱器之加熱方法，係使用具備有内層 材、外層材、及由上述内層材與上述外層材所包圍的發熱 體’且依被加熱體與上述内層材相接觸之方式裝設於被加熱 體上的夹套加熱器之加熱方法，0括： 將爽套加熱器裝設於被加熱體之後，於外層材的外周面上 塗佈含有金屬粉末的塗料，並施行乾燥的步驟。 (發明效果） 根據本發明’因為夾套加熱器的外層材外周面係被金屬層 100144794 201233932 所包圍’因而從外層材釋放出的熱線(heatray)會被金屬層反 射並射入於夾套加熱器中。所以，可大幅降低從夹套加熱器 的散熱而達到省電。又’因為表面係金屬層，因而可防止產 生逸氣’適驗半導體製造裝置料求無塵環境的配管加 熱。 【實施方式】 以下，針對本發日轉照圖式進行詳細說明。 圖1係顯示本發明夾套加熱器之一例的立體圖，圖2係圖 1的AA剖視圖。夾套加_丨㈣整體構造雜圖所示 相同’在作為包圍體的内層材1〇〇與外層材2〇〇之間，積層 著已在無機纖維製薄片3〇3上安裝發熱線（電熱線)迎的發 熱體300與絕熱材彻|，但本發明係更進一步在外層材 200的外周面上形成金屬層！。金屬層i係可例如:金屬络、 金屬蒸賴、金屬塗膜。料各構件的#¥並無限制，可使 用例如下述者。 内層材100與外層材200係可使用例如：由PTFE(聚四氟 乙稀）、PFA(讀乙烯·全氟絲基乙料聚物）、卿(四氣 乙稀-六氟丙稀共$W、PCTFE(聚氟三氣乙稀）'etfe(四乳 乙烯-乙烯共聚物）、ECTFE(氟三氣乙烯_乙烯共聚物）、 PVDF(聚偏二氟乙;¢)等氟系樹脂所構成的_脂製薄片； 或將上述氟系樹脂的纖維施行編織而成的氟_旨纖㈣布 (織布）；或由玻璃纖維、二氧切纖維、氧化_維、二氧 100144794 6 201233932 化矽氧化鋁纖維等無機纖維構成的無機纖維製布（織布）；或 種…、機纖維製布上施行上述氟系樹脂塗佈處理的氟樹 脂塗佈無機纖維製布。 再者’作為該内層材100與外層材200，除上述氟系樹脂 卜亦了使用聚酿胺、聚碳酸醋、聚縮駿、聚對苯二曱酸 -文貝聚本醚、聚苯硫剩1、聚石風、聚醚石風、聚芳@旨、 聚__、聚㈣胺、聚醯亞胺、聚騎亞胺、聚曱基戊烯 等具有耐熱性，但熔點低於氟系樹脂的樹脂。 此種包圍體的厚度係在能獲得本發明效果之前提下，其餘 並無特別限制，較佳係、更佳係Q卜5_ ' 係 0.1 〜2mm。 發熱體3〇0亦可設有利用通電而發熱的鎳鉻合金線、或不 :鋼線之類的電熱線搬。此種電熱線迎較佳係電氣性絕 緣。此種絕緣係藉由被覆由朗纖維、二氧切纖維 氧了氧化㈣料無機纖維所構叙無機纖維 j同301、或塗佈樹脂而實施。亦可取代電熱線3〇2，改 為使用韻發鐘或陶隸發熱體。又，錢線地 於電力線306 ’並將插頭307連接 ’、 行供電。 ⑨料。卩電㈣未®示）而進 此種電熱線搬亦可依所需圖案利用缝線3〇4縫人 趙（無機纖維製薄片）303上。此種支樓體（無機纖维^ 卿係可使用由例如玻璃纖維、二氧化錢維、氧= 100144794 7 201233932 纖維、二氧化矽氧化鋁纖維等無機纖維構成的無機纖維製 布。 絕熱材400係可使用將玻璃纖維、陶瓷纖維、二氧化矽纖 維等施行集束，再經施行針織加工的無機纖維網。又，亦可 利用膠體二氧化矽、氧化鋁溶膠、矽酸鈉等無機質黏結劑、 或澱粉等有機質黏結劑成形為網狀。或者，亦可形成芳醯 胺、聚醯胺、聚醯亞胺等具有耐熱性的有機樹脂製多孔質成 形體。此種絕熱材的厚度較佳係5〜lOOrnm、更佳係 5〜50mm、再佳係8〜30mm。另外，本發明的夾套加熱器中’ 絕熱材並非屬必要，亦可省略。 除上述材料之外，絕熱材尚可使用經填充氣凝朦的纖維體 (氣凝膠纖維體）。此種氣凝膠纖維體係在纖維基材中填充^ 凝膠的絕熱材。 ' ' 構成氣凝膠纖維體的纖維基材係可使用由例如聚對笨二 曱酸乙二S旨(PET)纖維等有機纖維；碳纖維、玻璃纖維、石夕 酉夂紹,截’准—氧化;^纖維、⑧銘紅柱石纖維、氧化纟呂纖維等 無機纖維構成的纖絲材，餘係❹由耐熱性優異的無機 纖維構成之纖維基材。 即，纖維基材較佳係可使用無機纖維的織布或不織布。此 處〜不，哉布係可使用例如：將無機纖維利用抄紙機進行抄紙 而獲传的紙狀物、或將經集束之無機纖維施行針織加工而成 形為網狀的毛歸、或在無機纖維中添加有機黏结劑而成形 100144794 201233932 為網狀的毛財網。纖維基材係藉由㈣無機纖維呈無規配 向的不織布’便可在該纖維基材的無機纖維間有效地保持氣 凝膠。 再者，作為構成纖維基材的無機纖維，例如當本發明夹套 加熱器在未滿·。c、且未如此要求耐錄㈣境下使用 時’較佳係使用能對氣凝膠纖維體料優異柔軟性的ρΕτ 纖維等有機纖維。X ’例如當本發明夾套加熱器係在 100〜250 C、且要求某程度耐熱性的環境下使料，較佳係 使用廉價的玻璃纖維。又，例如本發明夾套加熱器係在超過 2贼的要求高_性環境下使㈣，較佳係使用高耐熱性 的石夕酸紹纖維、二氧化销維、高㉝紅柱石纖維、氧化紹纖 維等陶瓷纖維。 g耽/旋膠係可使用例如由無機材料構成的氣凝膠（無機氣凝 膠）或由有機材料構成的氣凝膠(有機氣凝膠），較佳係可使 用财熱性優異的無機氣凝膠。無機氣凝膠係可使用例如：二 氧化石夕氣_、氧化絲凝膠。特別係藉由使用二氧化石夕氣 凝膠，便可有效地提高氣凝膠纖維體的絕熱性。 所以，氣凝膠纖維體較佳係可使用在無機纖維的不織布中 填充入無機氣凝膠者。具體而言，較佳係可使用例如：在陶 瓷纖維的不織布中填充入二氧化矽氣凝膠的氣凝膠纖維 體、或在玻璃纖維網中填充入二氧化矽氣凝膠的氣凝膠纖維 肢·此種氣凝膠纖維體係由例如Aspen Aerogels Inc.製的 100144794 9 201233932 「SPACELOFT2200」、「SPACELOFT2250」、「Pyrogel6650」、 「PyrogelXT」等產品取得。 氣凝膠纖維體中所含有氣凝膠與纖維基材的比率，係配合 該氣凝膠纖維體所應具備的特性(例如絕熱性、耐熱性、低 起塵性、可撓性）而適當設定。氣凝膠纖維體的密度係可設 定為例如20〜500kg/m3範圍、較佳係丨〇〇〜3〇〇kg/m3範圍。 此種氣凝膠纖維體係利用埋藏纖維間空隙的氣凝膠内之 微細孔’而可有效地防止該氣凝膠纖維體内的空氣對流，故 具有優異絕熱性。 具體而言’氣凝膠纖維體的25°C導熱率係例如可設為 0.024W/m · K以下、較佳係設為〇 〇2〇w/m · κ以下、更佳 係設為0.018W/m · K以下。 再者’氣凝膠纖維體的80〇c導熱率係例如可設為 0.035W/m · K以下、較佳係設為〇 〇27w/m · κ以下、更佳 係設為0.025W/m · K以下。 依此’因為氣凝膠纖維體係具有優異絕熱性，因而可在維 持充分絕熱性的情況下進行薄型化。具體而言，氣凝膠纖維 體的厚度係例如可設為範圍、較佳係設為丨〜25111111 範圍、更佳係設為1〜15mm範圍。藉由減少絕熱材的厚度， 除可提升本發明夾套加熱器的可撓性之外，尚能減少夾套加 熱器厚度’對省空間化具有貢獻。 金屬層1較佳係金屬箔、金屬蒸鍍膜、或金屬塗膜。 100144794 201233932 形成金屬層1的金屬箔就從廉價的觀點而言，較德係使用 鋁箔，但亦可使用銅'不鏽鋼等其他金屬。在與外層讨 間進行接合時，只要使用能接著金屬的接著劑、或施行熱熔 •接便可。在會因逸氣產生所導致外部污染而構成問題之用迷 •中，較佳係使用熱熔接。 再者，當形成金屬蒸鍍膜時，只要將與形成金屬箔時同樣 的金屬施行蒸鍍便可。在形成金屬重膜時，只要將含有與开y 成金屬箔時同樣的金屬粉末之一般金屬塗料使用刺毛戒喷 霧器施行塗佈，再經乾燥便可。 另外，金屬層1的厚度若過薄則會有斷裂的可能性，若匕 - 厚則會損及可撓性且亦會造成成本增加’所以較彳圭係 - 20μπι〜5mm、更佳係30〜ΙΟΟμιη、特佳係4〇〜7〇μιη。 在將上述夾套加熱器ίο被覆於西己管20上之時’與％夫同 樣地，擴張二周緣部103、104的間隔而裝設配管2〇後使 二周緣部103、104相抵接，再經由例如端面的孑母扣Τ 105、106便可固定。亦可取代子母扣帶、10ό，改為採 用鉤、帶扣等器具、或皮帶類等公知固定手段。 根據本發明的夾套加熱器，因為利用金屬層1，夾套加熱 . 器10從外層材2〇〇散熱的熱線會被金屬層}反射並射入於 炎套加熱器1G中，因而可大幅降低從夾套加熱器㈣散軌。 再者’爽套加熱器1〇除設計成圓筒狀以裝設於直管狀配 管2〇上之外’尚可使整體形成彎曲或L狀以裝設於曲管、 100】44794 11 201233932 L狀管上，當被加熱體係呈四角箱狀的情況，亦可形成箱 狀、板狀。 上述係例示在外層材200上形成金屬層1的爽套加熱器 10，但如圖3所示，即便無設置金屬層1，而是使用現有夾 套加熱器10裝設於配管20之後，再利用金屬箔30等金屬 層包圍外層材200的外周面，亦同樣可獲得散熱抑制效果。 利用金屬箔30進行的包圍方法，就從長度不同的各種夾 套加熱器10亦能輕易因應、且屬簡便的觀點，較佳係將金 屬箔30捲繞於夾套加熱器10上的方法。又，捲繞金屬箔 30時，係依外層材200不會露出的方式，使相鄰金屬箔的 端緣30a彼此間相重疊地捲繞。 金屬箔30係與上述同樣地可舉例如鋁箔、銅箔、不鏽鋼 箔，其厚度亦可與上述相同。 再者，當捲繞金屬箔30時，亦會有在與外層材200之間 自然形成微小間隙的情況，因為微小間隙係屬於空氣層，因 而亦附加有絕熱、保溫效果。但，依照金屬箔30的捲繞方 法，會有因金屬箔30與外層材200的部分性接觸而出現沒 有形成微小間隙的部分。此處如圖4所示，較佳係在金屬箔 30靠外層材側之面上散點存在突起31。又，突起31的高度 與間距（突起間隔）等並無限制，較佳係高度為0.5〜2.0mm、 間距為5〜20mm。利用突起31，便可確實形成金屬箔30與 外層材200間之微小間隙。即，較佳係在將夾套加熱器裝設 100144794 12 201233932 於配管等被加熱體上之後，將該夾套加熱 器的外層材，利用 至少其中一面上設有複數突起的金屬箔’依突起成為靠外層 材側的方式包圍。 . 為能確實形成金屬箔30與外層材200間之微小間隙，亦 •可如圖5所示，在金屬箔3〇靠外層材側之面，接合著連續 氣泡構造的發泡層35。發泡體係除氣泡呈連續的連續氣泡 構造發泡體之外，尚有各個氣泡散點存在的獨立氣泡構造發 泡體、以及連續氣泡與獨立氣泡混雜的發泡體，為能使來自 外層材200的熱線可直接到達金屬箔30，較佳係形成屬於 連續氣泡構造發泡體的發泡層35。即，較佳係在將夾套加 - 熱器裝設於配管等被加熱體上之後’將該失套加熱器的外層 • 材，利用至少其中一面上形成連續氣泡構造發泡層的金屬 猪’依發泡層成為靠外層材側的方式包圍。 再者，發泡層35係氣泡容積越多，則利用空氣層產生的 絕熱、保溫效果越高，又為能使來自外層材2〇〇的熱線能容 易到達金屬箔30’氣孔率較佳係達6〇%以上、更佳係達肋％ 以上。 發泡詹35的材質並無限制，特別係就從亦不用要求财軌 性的觀點，可使用各種樹脂製，就從廉價的觀點，較佳係胺 基甲酸紐泡體。又，發泡層35的厚度較佳係0,5〜2 0mm。 再者，當將金屬落30與發泡層35予以接合的情況，只要 使用能接著金屬的接著劑、或施行_接便可。在會因逸氣 100144794 13 201233932 產生所導致外部污染而構成問題之㈣巾，較㈣使用熱溶 接。 上述金屬落30、或具備有發泡層35的金屬落3〇、與夾套 加熱器10 Μ之接合，係在將金屬帛3〇、或具備發泡層35 的金屬们G繞接於夾套加熱器1G之後，再使用纟帶等固定 手段便可維持裝設狀態。又，亦可預先在金屬们〇或發泡 層35的背面（靠外層材側之一面）形成黏著層，再黏著於外 層材200的外周面。或者，亦可使用雙面黏貼帶，在外層材 200的外周面上’黏著金屬領3〇、或設有發泡層％的金屬 箔30。 再者，亦可取代金屬箔3〇，改為將現有夾套加熱器裝 設於配管20等被加熱體上之後，再於其外層材2〇〇的外表 面上塗佈金屬塗料，經乾燥而形成金屬塗膜。 本發明的夾套加熱器係可依省電方式施行加熱，此項省電 性特別係如後述實施例所示，在1〇〇。(3以上、較佳係15〇(3c 以上的高溫施行加熱時，效果更顯著。又，因為表面係金屬 層1’因而可防止逸氣產生，適用於半導體製造裝置等要求 無塵境的配管等被加熱體之加熱。 [實施例] 以下’針對本發明列舉實施例與比較例進一步說明，惟本 發明並不受該等的任何限制。 [試驗η 100144794 14 201233932 (實施例1) 作為絕熱材，係準備厚度3mm的日本AEROSIL公司製 「Pyrogel」’在其中一面上利用接著劑黏著厚度〇.2mm鋁謂 而製作保溫材A。 (實施例2) 作為絕熱材，係準備厚度3mm的曰本AEROSIL公司製 「Pyrogei」’在其中一面上利用接著劑黏著厚度〇 j mm不鏽 鋼箔而製作保溫材B。 (比較例1) 製作僅由厚度3mm絕熱材（日本AEROSIL公司製 「Pyrogel」構成的保溫材c。 (比較例2) 衣作僅由厚度6mm絕熱材（日本AEROSIL公司製 「Pyrogel」）構成的保溫材d。 然後，蜮作夾套加熱器，如圖ό所示，將實施例1、實施 例2、比較例丨或比較例2的保溫材a〜d，載置於加熱板上 (但’針對實施例1、2，係依絕熱材接觸到加熱板的方式载 置），測定將加熱板維持於5〇。〇、1〇〇〇c、15〇〇c、2〇〇(>c或 250 CB寸所需要的投入電力，並從該測定值、與預先計算出 的電力校正式，計算出理論電量。又，實際上，除為加熱保 服材而技入的電力之外，尚存在有其他熱量（熱損失Ql)，如 圖不，因為相較於加熱板表面積，絕熱材表面積較狹窄，因 100144794 15 201233932 而來自加熱板的熱量除傳熱於保溫材之外，尚有散熱於空氣 中的熱量（Qloss)、穿透保溫材的熱量（qt)、以及從保溫材反 射的熱量（Qr)。所以，實際的投入電力Qs係用於加熱保溫 材的熱量Qw與熱損失ql之合計。此處，從下述所示電力 校正式計算出理論電量。^ ^ Through the outer layer 20C into the light of the government. Therefore, the subject of the present invention is the heat dissipation of the fuse. (Means for Solving the Problem) In order to achieve the above object, the present invention provides the following lost sleeve heater and a heating method using the jacket heater. (1) A jacket heater' is provided with an inner layer material, an outer layer material, and a heat generating body surrounded by the upper layer material, and the body is placed in contact with the inner layer material to be heated on the body, in the basin, A metal layer is formed on the outer peripheral surface of the upper outer layer. (1) 戟 _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ Gold chip layer system 100144794 201233932 (5) A material used for the use of a material, an outer layer material, and a heat-generating body which is provided with an inner layer body and which is surrounded by the heat-generating body and the above-mentioned material layer and the outer layer material. The heating of the heater is provided on the step of heating the jacketed heater to the coated layer. 4 after the 'external use of gold shot I (6) as described in (5) above, the pure method of using a lost heater, in the pot, in the step of surrounding the outer layer of the gold alloy, the above metal (four) at least - A plurality of raised gold rays I are provided on the surface, and the outer layer is surrounded by the metal case so that the protrusions are on the outer layer side. (7) The method for heating a lost-luxury heater according to the above (5), wherein, in the step of surrounding the outer layer material with a metal foil, the metal foil is formed on at least one of the foam layers of the continuous-cell structure foam layer. The metal foil is surrounded by the above-mentioned metal foil so that the foam layer is on the outer layer side. (8) A heating method using a jacket heater, wherein an inner layer material, an outer layer material, and a heat generating body surrounded by the inner layer material and the outer layer material are used, and the heated body is in contact with the inner layer material The heating method of the jacket heater installed on the object to be heated, 0: after the heater is installed in the object to be heated, coating the coating material containing the metal powder on the outer peripheral surface of the outer layer material, and Perform the drying step. (Effect of the Invention) According to the present invention, 'because the outer peripheral surface of the outer layer of the jacket heater is surrounded by the metal layer 100144794 201233932', the heat rays released from the outer layer are reflected by the metal layer and are incident on the jacket heating. In the device. Therefore, the heat dissipation from the jacket heater can be greatly reduced to save power. Further, since the surface is made of a metal layer, it is possible to prevent the occurrence of outgassing. The semiconductor manufacturing equipment is required to heat the piping in a dust-free environment. [Embodiment] Hereinafter, the present day transfer mode will be described in detail. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing an example of a jacket heater of the present invention, and Fig. 2 is a cross-sectional view taken along line AA of Fig. 1. Jacket _ 丨 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四The heating element 300 and the heat insulating material are welcoming, but the present invention further forms a metal layer on the outer peripheral surface of the outer layer material 200! . The metal layer i can be, for example, a metal layer, a metal vapor, or a metal coating film. The #¥ of each member is not limited, and for example, the following may be used. The inner layer 100 and the outer layer 200 can be used, for example, from PTFE (polytetrafluoroethylene), PFA (read ethylene·perfluorosilyl-based polymer), and clear (tetraethylene-hexafluoropropene) W, PCTFE (polyfluoroethylene triethylene ether) 'etfe (tetramilk ethylene-ethylene copolymer), ECTFE (fluorinated three ethylene ethylene copolymer), PVDF (polyvinylidene fluoride; fluorene) _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ An inorganic fiber fabric (woven fabric) composed of inorganic fibers such as cerium oxide alumina fibers, or a fluororesin-coated inorganic fiber fabric coated with the above-mentioned fluorine-based resin coating treatment on a machine fiber fabric. The inner layer material 100 and the outer layer material 200, in addition to the above-mentioned fluorine-based resin, are also made of polystyrene, polycarbonate, polycondensation, poly-terephthalic acid-riben polyether, polyphenylene sulfide, and poly Stone wind, polyether stone, polyfang@, poly__, poly(tetra)amine, polyimine, polyamide, polydecylene, etc. have heat resistance, The resin having a melting point lower than that of the fluorine-based resin. The thickness of the surrounding body is raised before the effect of the present invention can be obtained, and the rest is not particularly limited, and more preferably, it is preferably a layer of 0.1 to 2 mm. 3〇0 can also be provided with a nickel-chromium alloy wire that generates heat by energization, or a heating wire such as a steel wire. Such a heating wire welcomes electrical insulation. This insulation is coated by lang fiber. Oxygen cut fiber oxygen oxidation (four) material inorganic fiber is composed of inorganic fiber j with 301, or coated with resin. It can also replace the heating wire 3〇2, instead use the rhyme clock or the ceramic heating element. The money line is on the power line 306 'and the plug 307 is connected', and the power is supplied. 9 materials. The electricity (4) is not shown) and the electric heating wire can be moved according to the desired pattern. (Inorganic fiber sheet) 303. Such a building body (inorganic fiber type) may be made of an inorganic fiber made of inorganic fibers such as glass fiber, dioxide dioxide, oxygen = 100144794 7 201233932 fiber, cerium oxide alumina fiber, etc. Insulation material 400 An inorganic fiber web which is bundled with glass fiber, ceramic fiber, cerium oxide fiber, or the like, and subjected to knitting processing, may also be used, and an inorganic binder such as colloidal cerium oxide, alumina sol or sodium citrate may be used. Or an organic binder such as starch is formed into a mesh shape, or a porous molded body made of a heat-resistant organic resin such as linaloamine, polyamine or polyimine may be formed. The thickness of the heat insulating material is preferably 5 to 100 nm, more preferably 5 to 50 mm, and more preferably 8 to 30 mm. In addition, the heat insulating material of the jacket heater of the present invention is not essential or may be omitted. In addition to the above materials, the heat insulating material may be used. a gas-filled fibrous body (aerogel fibrous body). The aerogel fiber system is filled with a gelled fibrous material in a fibrous substrate. ' ' The fibrous substrate constituting the aerogel fibrous body can be use For example, organic fibers such as poly(p-benzoic acid) ethylene dioxide (PET) fiber; carbon fiber, glass fiber, Shi Xiyu Shao, cut-quasi-oxidation; ^ fiber, 8 Ming andalusite fiber, ruthenium ruthenium fiber, etc. The fiber material composed of the inorganic fiber is the fiber base material composed of the inorganic fiber having excellent heat resistance. That is, the fiber base material is preferably a woven fabric or a non-woven fabric using inorganic fibers. For example, a paper material obtained by paper-bonding an inorganic fiber by a paper machine, or a knitted fabric obtained by subjecting a bundled inorganic fiber to a knitting process, or an organic binder added to an inorganic fiber may be used. 100144794 201233932 is a mesh-like hair net. The fiber substrate can effectively maintain the aerogel between the inorganic fibers of the fiber substrate by the (4) non-woven fabric in which the inorganic fibers are randomly aligned. The inorganic fiber of the substrate, for example, when the jacket heater of the present invention is used under the condition that it is not required to be used in the case of (4), it is preferred to use ρΕτ which is excellent in softness to the aerogel fiber body. Fiber For example, when the jacket heater of the present invention is used in an environment of 100 to 250 C and requires a certain degree of heat resistance, it is preferred to use inexpensive glass fibers. Further, for example, the jacket heating of the present invention. In the case of more than 2 thieves, it is preferable to use (4), preferably high-heat-resistance ceramic fibers such as sulphuric acid, oxidized bismuth, high 33 andalusite, and oxidized fiber. An aerogel (inorganic aerogel) composed of an inorganic material or an aerogel (organic aerogel) composed of an organic material, for example, an inorganic aerogel excellent in heat retention can be used. For the inorganic aerogel system, for example, a silica dioxide gas or a oxidized silk gel can be used. In particular, by using a silica aerogel, the adiabatic properties of the aerogel fiber can be effectively improved. Therefore, the aerogel fiber body is preferably one which can be filled with an inorganic aerogel in a non-woven fabric of inorganic fibers. Specifically, for example, an aerogel fiber body in which a cerium oxide aerogel is filled in a non-woven fabric of ceramic fibers, or an aerogel in which a cerium oxide aerogel is filled in a glass fiber mesh can be preferably used. Fibrous limbs. Such aerogel fiber systems are obtained, for example, from products such as 100144794 9 201233932 "SPACELOFT2200", "SPACELOFT2250", "Pyrogel6650", and "PyrogelXT" manufactured by Aspen Aerogels Inc. The ratio of the aerogel to the fibrous substrate contained in the aerogel fiber body is appropriately selected in accordance with characteristics (for example, heat insulating property, heat resistance, low dusting property, and flexibility) of the aerogel fiber body. set up. The density of the aerogel fiber body can be set, for example, in the range of 20 to 500 kg/m3, preferably in the range of 丨〇〇3 to kg/m3. Such an aerogel fiber system can effectively prevent air convection in the aerogel fiber by utilizing the fine pores in the aerogel in which the interfiber spaces are buried, so that it has excellent heat insulating properties. Specifically, the 25° C. thermal conductivity of the aerogel fiber body can be, for example, 0.024 W/m·K or less, preferably 〇〇2〇w/m·κ or less, and more preferably 0.018. W/m · K or less. Further, the 80 〇c thermal conductivity of the aerogel fiber body can be, for example, 0.035 W/m·K or less, preferably 〇〇27 w/m·κ or less, and more preferably 0.025 W/m. · K below. According to this, since the aerogel fiber system has excellent heat insulation properties, it can be made thinner while maintaining sufficient heat insulation. Specifically, the thickness of the aerogel fiber can be, for example, in the range of 丨 25111111, and more preferably in the range of 1 to 15 mm. By reducing the thickness of the heat insulating material, in addition to improving the flexibility of the jacket heater of the present invention, the thickness of the jacket heater can be reduced to contribute to space saving. The metal layer 1 is preferably a metal foil, a metal deposition film, or a metal coating film. 100144794 201233932 The metal foil forming the metal layer 1 is made of aluminum foil from the viewpoint of inexpensiveness, but other metals such as copper 'stainless steel may be used. When bonding to the outer layer, it is sufficient to use an adhesive which can be followed by a metal or to perform hot melt bonding. In the case of the problem that constitutes a problem due to external pollution caused by outgassing, it is preferable to use heat fusion. Further, when a metal deposition film is formed, the same metal as that used for forming the metal foil may be subjected to vapor deposition. In the case of forming a heavy metal film, a general metal paint containing the same metal powder as when the metal foil is opened is applied by a bristles or a sprayer, and then dried. In addition, if the thickness of the metal layer 1 is too thin, there is a possibility of breakage. If the thickness of the metal layer 1 is thick, the flexibility will be impaired and the cost will increase. Therefore, it is more than 20 μm to 5 mm, and more preferably 30. ~ ΙΟΟμιη, especially good 4〇~7〇μιη. When the jacket heater ίο is applied to the hexagram tube 20, the second peripheral portion 103, 104 is abutted by the arrangement of the pipe 2 扩张 after the interval between the two peripheral portions 103 and 104 is expanded in the same manner as the squirrel. Further, it can be fixed via, for example, the female snaps 105, 106 of the end faces. It is also possible to replace the sub-fitting belt and the 10 ό, and to use a known fixing means such as a hook, a buckle, or the like. According to the jacket heater of the present invention, since the metal layer 1 is used, the heat of the jacket 10 from the outer layer 2 is reflected by the metal layer and is incident on the sleeve heater 1G, so that it can be greatly Lower the loose rail from the jacketed heater (four). In addition, the 'cooler heater 1' is designed to be cylindrically mounted on the straight tubular pipe 2〇. The whole can be bent or L-shaped to be mounted on the curved pipe, 100】44794 11 201233932 L On the tube, when the heated system is in the shape of a box, it may be formed in a box shape or a plate shape. The above-described embodiment exemplifies the refresher heater 10 in which the metal layer 1 is formed on the outer layer member 200. However, as shown in FIG. 3, even if the metal layer 1 is not provided, the conventional jacket heater 10 is attached to the pipe 20, and then When the outer peripheral surface of the outer layer material 200 is surrounded by a metal layer such as the metal foil 30, the heat radiation suppressing effect can be obtained in the same manner. The method of enclosing by the metal foil 30 is preferably a method of winding the metal foil 30 around the jacket heater 10 from the viewpoint that the various jacket heaters 10 having different lengths can be easily handled and is simple. Further, when the metal foil 30 is wound, the end edges 30a of the adjacent metal foils are wound so as to overlap each other so that the outer layer members 200 are not exposed. The metal foil 30 may be, for example, an aluminum foil, a copper foil or a stainless steel foil, and may have the same thickness as described above. Further, when the metal foil 30 is wound, there is a case where a small gap is naturally formed between the outer layer and the outer layer 200. Since the minute gap belongs to the air layer, a heat insulating and heat insulating effect is also added. However, depending on the winding method of the metal foil 30, there is a portion where the metal foil 30 and the outer layer member 200 are in partial contact, and no minute gap is formed. Here, as shown in Fig. 4, it is preferable that the projections 31 are scattered on the surface of the metal foil 30 on the side of the outer layer. Further, the height and the pitch (protrusion interval) of the projections 31 are not limited, and the height is preferably 0.5 to 2.0 mm and the pitch is 5 to 20 mm. With the projections 31, a slight gap between the metal foil 30 and the outer layer member 200 can be surely formed. That is, it is preferable that after the jacket heater is installed with a heating body such as a pipe, the outer layer of the jacket heater is raised by a metal foil having a plurality of protrusions on at least one of the jackets. It is surrounded by the side of the outer layer. In order to reliably form a minute gap between the metal foil 30 and the outer layer material 200, as shown in Fig. 5, the foam layer 35 of the continuous cell structure may be joined to the surface of the metal foil 3 on the side of the outer layer material. In addition to the bubbles in which the bubbles are continuous continuous bubble structure foams, there are separate bubble structure foams in which individual bubble spots exist, and foams in which continuous bubbles and closed cells are mixed, in order to enable the outer layer material to be The hot wire of 200 can directly reach the metal foil 30, and is preferably formed into a foamed layer 35 which is a foam of the continuous cell structure. In other words, it is preferable that the outer layer of the lost heater is used after the jacket heater is mounted on the object to be heated such as a pipe, and the metal pig having the foam layer formed by at least one of the ones is formed. 'The foam layer is surrounded by the outer layer side. Furthermore, the more the bubble volume of the foam layer 35 is, the higher the heat insulation and heat insulation effect by the air layer, and the better the porosity of the metal foil 30' can be easily obtained by the heat ray from the outer layer 2 Up to 6〇% or more, and more preferably more than 7%. The material of the foaming J35 is not limited, and in particular, it is possible to use various resins from the viewpoint of not requiring financial property. From the viewpoint of inexpensiveness, it is preferred to use a carboxylic acid formic acid foam. Further, the thickness of the foamed layer 35 is preferably 0, 5 to 20 mm. Further, in the case where the metal drop 30 and the foamed layer 35 are joined, it is sufficient to use an adhesive which can be followed by a metal or to perform a connection. (4) The towel that poses a problem due to the external pollution caused by the escape air 100144794 13 201233932, is more thermally soluble than (4). The metal drop 30 or the metal having the foam layer 35 is joined to the jacket heater 10, and the metal 帛3〇 or the metal G having the foam layer 35 is wound around the clip. After the heater is set to 1G, the mounting state can be maintained by using a fixing means such as an ankle strap. Further, an adhesive layer may be formed on the back surface of the metal or the foam layer 35 (on one side of the outer layer side), and then adhered to the outer peripheral surface of the outer layer 200. Alternatively, a double-sided adhesive tape may be used, and a metal collar 3 or a metal foil 30 having a foamed layer % may be adhered to the outer peripheral surface of the outer layer member 200. Further, instead of the metal foil 3〇, the conventional jacket heater may be mounted on the heated body such as the pipe 20, and then the outer surface of the outer layer 2〇〇 may be coated with a metal paint and dried. A metal coating film is formed. The jacket heater of the present invention can be heated in a power-saving manner, and this power-saving property is particularly as shown in the later-described embodiment. (3 or more, preferably 15 〇 (when the heating is performed at a high temperature of 3 c or more, the effect is more remarkable. Further, since the surface-based metal layer 1' can prevent outgas generation, it is suitable for use in a dust-free piping such as a semiconductor manufacturing apparatus. The heating of the object to be heated is carried out. [Examples] Hereinafter, the present invention will be further described by way of examples and comparative examples, but the present invention is not limited thereto. [Experiment η 100144794 14 201233932 (Example 1) As a heat insulation For the material, a "Pyrogel" manufactured by AEROSIL Co., Ltd. of Japan, having a thickness of 3 mm, was prepared, and a heat insulating material A was prepared by using an adhesive adhesion thickness of 22 mm on one side. (Example 2) As a heat insulating material, a crucible having a thickness of 3 mm was prepared. "Pyrogei" manufactured by AEROSIL Co., Ltd. made a heat-insulating material B by adhering a thickness of 〇j mm stainless steel foil to one side of the AEROSIL company. (Comparative Example 1) A composite material made of only 3 mm thick (Pyrogel manufactured by AEROSIL, Japan) was produced. Insulation material c. (Comparative Example 2) A heat insulating material d composed of only a 6 mm thick heat insulating material ("Pyrogel" manufactured by AEROSIL Co., Ltd., Japan) was used as a jacket. It is shown that the heat insulating materials a to d of the first embodiment, the second embodiment, the comparative example or the comparative example 2 are placed on a hot plate (but 'for the first and second embodiments, the heat insulating material is in contact with the heating plate. The method is to measure the input power required to maintain the heating plate at 5 〇, 1〇〇〇c, 15〇〇c, 2〇〇 (>c or 250 CB inch, and from the measured value, Calculate the theoretical power with the pre-calculated power correction formula. In addition, in fact, in addition to the power that is used to heat the service material, there is still other heat (heat loss Ql), as shown in Fig. Compared with the surface area of the heating plate, the surface area of the heat insulating material is relatively narrow. Because of the heat transfer from the heating plate in addition to heat transfer to the heat insulating material, there is heat released from the air (Qloss) and heat passing through the heat insulating material (100448794 15 201233932). Qt) and the amount of heat (Qr) reflected from the heat insulating material. Therefore, the actual input power Qs is the sum of the heat quantity Qw for heating the heat insulating material and the heat loss ql. Here, it is calculated from the power correction formula shown below. Theoretical power.
Qs=Qw+QlQs=Qw+Ql
Qw=[(TVTi)/DxX><S]-QlQw=[(TVTi)/DxX><S]-Ql
Ql=Qi〇ss+Qt+Qr 式中，To:加熱板的表面溫度（t：); Τι :保溫材之與加熱板 相反之側之表面溫度fc) ; D :保溫材的厚度(m) ; λ :保溫 材的導熱率(W/m2 · Κ) ; S :保溫材之與加熱板接觸之側的 面之面積(mV又’設為qt=Qr=g，s係〇。另外， 溫度係配置熱電偶進行敎，配置點係設為四肖落附近及中 央合計5個地方，並將其平均值設為測定值。 理論電量的計算結果係如圖7所示，得知實施例i的保溫 材A、與實施例2的保溫材B，係利用與絕熱材厚度倍增為 6mm的比較例2之保溫材D大致同等的投入電力便可。換 言之，依照本發由接著金射或不鏽，便可 將絕熱材厚度料成本亦可減半4種效果係在 100°C以上之高溫中的加熱時較為明顯。 [試驗2] 來自絕熱材表面的耗散熱量Q係因對流所造成的表面熱 100144794 16 201233932 、〜、口輻射所造成的表面熱傳遞之合計，可從下式求取。 Q~ac(Ta'T-)+tXr(Ta-T00) a 丁00)係因對流所造成的表面熱傳遞量；〜(丁^) 係因幸田射所造成的表面熱傳遞量，分別依下式表示。 ac Ax3-26x(Ta-Too)0-25x{(w+〇 348)/(0.348)}0 5 〜=Αχεχσχ(τ，τ〇〇4)/(ΤΛ) 式中，Α係表面積㈨2) ; Ta係保溫材之與加熱板相反之側之 表面溫度(K); T〇o係室溫(κ); α。係因對流所造成的表面熱傳 遞率(W/m · Κ) ’ ar係因輻射所造成的表面熱傳遞率(w/m2 · Κ)，ε係輻射率；w係風速(m/s) ; σ係斯蒂芬-波滋曼常數 ⑼efan_Boltzmann constant)(5.67xl〇-8W/m2 · Κ)。又，關於 ' 上述，可參照例如JIS A 9501 : 2006。 此處，將實施例1的保溫材A、或比較例2的保溫材c(表 面積A皆為〇.〇289m2)如圖8所示載置於加熱板上，並將加 熱板加熱維持於 5CTC、100。(：、15(TC、200°C、或 250〇C， 測疋於各溫度的保溫材與加熱板間之界面溫度、及保溫材之 與加熱板相反之側之表面溫度。界面與表面的溫度係配置熱 ， 電偶進行測定，配置點係設為四角落附近及中央合計5個地 • 方’並將其平均值設為測定值。又，保溫材表面的輻射率係 利用輕射溫度計進行測定。然後，從上式計算出因對流所造 成的表面熱傳遞量、與因輻射所造成的表面熱傳遞量。 耗散熱量的計算結果係如圖9所示，藉由黏著銘箔，雖因 100144794 201233932 輪射所造成的表面熱傳遞量會減少，而因對流所造成的表面 $傳遞量會增加’但因輻射所造成的表面熱傳遞量之減少份 I ’係大於因對流所造成的表面熱傳遞f之增加份量，因而 整體而㈣投人電量變少。此種效果係在⑽t以上之高溫 中的加熱時較為明顯。 雖針對本發明詳細參照特定實施態樣進行說明，惟在不背 離本發明精神與齡之前提下，可追加各種修正與變更，此 係熟習此項技術者可輕易思及。 2申請案係根據2010年12月6日所提出中請的日本專利 申請案2010-271611為基礎，參照並爰引其内容於本案中。 又，亦參照並爰引說明書中所記載之文獻的全部内容。 【圖式簡單說明】 圖1係顯示本發明失套加熱器之一實施形態的立體圖。 圖2係圖1的aa剖視圖。 圖3係顯示本發明夾套加熱器之施工方法的立體圖。 圖4係顯示本發_使用之金屬之—例的剖視圖。 圖5係顯示金屬箔之另一例的剖視圖。 圖6係說明試驗1的試驗方法的示意圖。 圖7係顯示試驗1的結果的圖表。 圖8係說明試驗2的試驗方法的示意圖。 圖9係顯示試驗2的結果的圖表。 圖係顯示習知夹套加熱器的立體圖。 100144794 201233932 【主要元件符號說明】 1 金屬層 10 夾套加熱器（加熱套) 20 配管 30 金屬箔 30a 金屬箱的端緣 31 突起 35 發泡層 100 内層材 103 、 104 周緣部 105 、 106 子母扣帶 200 外層材 300 發熱體 301 無機纖維製套筒 302 發熱線（電熱線） 303 無機纖維製薄片 304 縫線 306 電力線 307 插頭 400 絕熱材 100144794 19Ql=Qi〇ss+Qt+Qr where To: the surface temperature of the heating plate (t:); Τι: the surface temperature of the opposite side of the insulating material from the heating plate fc); D: the thickness of the insulating material (m) ; λ : thermal conductivity of the thermal insulation material (W/m2 · Κ); S : area of the surface of the thermal insulation material on the side in contact with the heating plate (mV is also set to qt = Qr = g, s system 〇. In addition, temperature The thermocouple is arranged for 敎, and the arrangement point is set to five places near the four sag and the center, and the average value is set as the measured value. The calculation result of the theoretical electric quantity is as shown in Fig. 7, and the example i is known. The heat insulating material A and the heat insulating material B of the second embodiment can be used with substantially the same input power as the heat insulating material D of Comparative Example 2 in which the thickness of the heat insulating material is increased to 6 mm. In other words, according to the present invention, the gold is irradiated or not. Rust can reduce the thickness of the insulation material by half. The effect is more obvious when heating at a temperature higher than 100 ° C. [Test 2] The heat dissipation Q from the surface of the insulation is caused by convection. Surface heat 100144794 16 201233932 , ~, the total surface heat transfer caused by mouth radiation, can be obtained from the following formula. Q~ac(Ta'T- ) +tXr(Ta-T00) a 00) is the amount of surface heat transfer due to convection; ~(丁^) is the amount of surface heat transfer caused by Koda Shot, which is expressed by the following equation. Ac Ax3-26x(Ta-Too)0-25x{(w+〇348)/(0.348)}0 5 〜Αχεχσχ(τ,τ〇〇4)/(ΤΛ) where Α is the surface area (9) 2) ; Ta The surface temperature (K) of the side opposite to the heating plate of the insulating material; T〇o is room temperature (κ); α. Surface heat transfer rate due to convection (W/m · Κ) ' ar is the surface heat transfer rate due to radiation (w/m2 · Κ), ε-type radiance; w-wind speed (m/s) ; σ system Stephen-Bochmann constant (9) efan_Boltzmann constant) (5.67xl 〇 -8W/m2 · Κ). Further, regarding the above, for example, JIS A 9501: 2006 can be referred to. Here, the heat insulating material A of the first embodiment or the heat insulating material c of the comparative example 2 (the surface area A is 〇.〇289m2) is placed on the hot plate as shown in FIG. 8, and the heating plate is heated and maintained at 5 CTC. , 100. (:, 15 (TC, 200 ° C, or 250 ° C, measuring the interface temperature between the insulation material and the heating plate at each temperature, and the surface temperature of the opposite side of the insulation material from the heating plate. Interface and surface The temperature system is configured with heat, and the galvanic couple is measured. The arrangement point is set to be near the four corners and the center is equal to five squares and the average value is set to the measured value. Moreover, the radiance of the surface of the heat insulating material is measured by a light-emitting thermometer. The measurement is performed. Then, the surface heat transfer amount due to convection and the surface heat transfer amount due to the radiation are calculated from the above formula. The calculation result of the heat dissipation amount is as shown in Fig. 9, by adhering the foil, Although the surface heat transfer caused by the 100144794 201233932 round shot will be reduced, the surface surface transfer due to convection will increase 'but the decrease in surface heat transfer due to radiation is greater than that caused by convection. The surface heat transfer f increases the amount of the component, so that the overall (4) input power is reduced. This effect is more pronounced when heating at a temperature higher than (10) t. Although the present invention is described in detail with reference to specific embodiments. However, it is possible to add various amendments and changes without departing from the spirit and age of the present invention, which can be easily considered by those skilled in the art. 2 The application is based on the Japanese request made on December 6, 2010. Based on the patent application No. 2010-271611, the contents of which are incorporated herein by reference. Fig. 2 is a perspective view showing a construction method of the jacket heater of the present invention. Fig. 4 is a cross-sectional view showing an example of the metal used in the present invention. Fig. 5 is a cross-sectional view showing another example of the metal foil. Fig. 6 is a schematic view showing the test method of Test 1. Fig. 7 is a graph showing the results of Test 1. Fig. 8 is a schematic view showing the test method of Test 2. A graph showing the results of Experiment 2. The figure shows a perspective view of a conventional jacket heater. 100144794 201233932 [Signature description of main components] 1 Metal layer 10 Jacket heater (heating sleeve) 20 Pipe 30 Gold Foil 30a End edge 31 of metal box Protrusion 35 Foam layer 100 Inner layer 103, 104 Peripheral portion 105, 106 Sub-buckle tape 200 Outer layer material 300 Heating element 301 Inorganic fiber sleeve 302 Heating wire (heating wire) 303 Inorganic fiber Sheet 304 Suture 306 Power line 307 Plug 400 Insulation material 100144794 19