TW201230660A - Linear motor control apparatus - Google Patents

Abstract

Provided is a linear motor control apparatus, wherein a vector control type current controlling means (13) is equipped therein. Also equipped is an induced voltage compensating means (31) for adding a voltage compensation value, obtained from a detected velocity value (x DEG ) of a mover and an induced voltage constant (f), to a q-axis voltage command value (Vq') outputted by a thrust current control unit (18). Also equipped is a position-change inductance compensating means (32) for calculating a q-axis voltage compensation value and a d-axis voltage compensation value, using a detected position value (x), the detected velocity value (x DEG ), a detected q-axis current value (iq), and a detected d-axis current value (id), and compensating the q-axis voltage command value (Vq') and a d-axis voltage command value (Vd').

Description

201230660 VI. INSTRUCTIONS: RELATED APPLICATIONS This application is the priority of Japanese Patent Application No. 201 0-239602 filed on Oct. 26, 2010, which is incorporated herein by reference in its entirety. [Technical Field] The present invention relates to a linear motor control of a synchronous primary ground-displacement linear motor that is applied to a transport device for a work machine or an industrial machine, and other synchronous type drives that are used for driving various devices. Device. [Prior Art] A linear motor is widely used in a traveling vehicle or the like of a distribution device (for example, Patent Document 1). Linear motors are: Linear Induction Motors (LIMs), Linear Synchronous Motors (LSMs), and Linear DC Motors, but are primarily used as long-distance travel systems with linear induction motors. The linear synchronous motor accounts for the majority of the way in which the magnet is placed on the ground side to move the coil side. Further, in the linear synchronous motor, there is an example in which the primary coil is partially disposed on the ground side (for example, Patent Document 2), but the linear synchronous motor is an auxiliary use of a curved path or a path end, and basically uses linearity. Induction motor. Further, Non-Patent Document 1 relates to a ground-type intermittent arrangement (discrete arrangement) linear synchronous motor in which a stator is disposed only at an acceleration/deceleration, and is described in terms of a pattern. -5-201230660 [Prior Art Document] [Patent Document] Patent Document 1: JP-A-63-114887 (Patent Document 2) JP-A-2007-82307 (Non-Patent Document) Non-Patent Document 1: Suzuki Kenji, "Jin Rong Zai, Hundred-eyed Ghost Heroes" "Modeling of Intermittent Stator Allocation Intervals for Permanent Magnet-Type Linear Synchronous Motors", Electrical Society Linear Drives Research Society, LD-07-3 5,200 7 October, ppl7-pp22 [Invention Contents] (The problem to be solved by the invention) The linear induction motor has low thrust and it is difficult to improve the running performance. Therefore, in the application of a conveying device or the like of a loader that is a working machine, a linear synchronous motor has been tried. In the conventional linear synchronous motor, the magnet is disposed on the ground side to move the coil side. However, in order to move the coil side, it is necessary to supply power to the movable member, and it is impossible to travel on the endless path due to the wiring to the movable member, so the traveling path is limited or the power feeding system is complicated. Therefore, in the linear synchronous motor, it is attempted to have a full length across the path and a primary coil on the ground side. However, when the primary coil is placed on the ground side, the coil is continuously disposed over the entire length of the movement path like the conventional linear motor, and the amount of use of the coil is increased, and the cost is increased. As a synchronous linear motor that solves such a problem, a linear synchronous motor that is discretely arranged can be considered, which is in the moving direction of the movable body and crosses the road.

-6- 201230660 The total length of the diameter is divided into a plurality of individual motors consisting of armatures that can function as armatures of the primary side of a separate linear motor. According to this configuration, since the individual motors are discretely arranged, the amount of use of the coil can be reduced, and the cost can be reduced. However, the problem with discretely configured linear motors is that the inductance or induced voltage will vary depending on the position of the individual motor and the interference at the end of the individual motor (e.g., the torque). These have become a major disturbance in controlling the motor. Although this problem has been touched in Non-Patent Document 1, the control regarding the influence is not proposed. SUMMARY OF THE INVENTION An object of the present invention is to provide a linear motor control device which is capable of performing a change corresponding to an induced voltage (relative to a movable one) while adopting a discrete configuration on the ground which facilitates the reduction in the amount of use of the coil or the individual motors in the power supply mode. Sleek movement control of the position of the individual motor. (Means for Solving the Problem) The linear motor control device of the present invention will be described with reference to the symbols used in the embodiments. In addition, in this manual, the symbol "X." indicating the speed detection , is attached to the upper side of the character of "X" in an easy-to-understand manner, but "in the specification" is based on the use. On the restriction of the text, "." is attached to the upper right of the text of "X" and "X." is displayed. The linear motor control device of the present invention is a device for controlling a synchronous linear motor (1). The synchronous linear motor is arranged along the moving path of the movable member (4) 201230660 to be a three-phase phase. The coils are arranged in a plurality of individual motors (3) of the armature of the primary side of one linear motor (1) in the linear direction, and the movable body (4) is configured by permanent magnets, and is provided to control each of the above The individual motor control means (6) of the plurality of individual motors (3) and the overall control means (7) for assigning position commands to the respective motors (3) in accordance with the input position command. Each of the motor control means (6) includes: a position/speed control means (1 7) for performing both position control and speed control, or a position control, and a current control means (13) for performing current control, and Each of the motor control means (6) is provided with a current detecting means (14) for detecting a current component of each phase of the individual motor (3), and detecting a position and a speed of the movable member (4), respectively. The position detecting means (15) and the speed detecting means (16). The current control means (14) is of a vector control type and has: a thrust current control unit (18) for the q-axis current command given by the thrust current command given from the position/speed control means (17)値iq*, output q-axis voltage command 値Vq' controlled by the q-axis current detection 値iq of the individual motor (3) which can be obtained from the detection of the current detecting means (14); magnetic flux current The control unit (1 9 ) outputs a d-axis electric current 値 id * of the set magnetic flux current command ,, and outputs a d-axis controlled so that the d-axis current detection 个别 id of the individual motor (3 ) can follow Voltage command 値Vd'; coordinate conversion unit (20), which converts the q-axis voltage command 値Vq' and -8-201230660 d-axis voltage command 値V/ into the coordinates of each phase of the individual motor (3) The command 値; and the power conversion unit (2 1 ) convert the output of the coordinate conversion unit (20) into a drive current of the individual motor (3). In this configuration, an induced voltage compensation means (31) for adding a voltage compensation to the q-axis voltage command 値V input to the coordinate conversion unit (20) by the thrust current control unit (18) is provided.电压φχ· , the voltage compensation 値Φχ is obtained by detecting the speed of the movable member (4) detected by the speed detecting means (16) and the predetermined induced voltage constant φ. Vector control is the technique of grasping the current or the flux of the motor as the instantaneous 値 of the vector, controlling the vectors with instantaneous ,, so that the instantaneous thrust of the motor follows the command, because it can be an efficient control, so It is widely used in the control of rotary motors. In the present invention, a vector is formed by the thrust current control unit, the magnetic flux current control unit, and the coordinate conversion unit. However, in the discrete arrangement linear motor (1) in which the individual motors (3) of the armatures on the primary side are spaced apart from each other on the ground side, the inductance varies depending on the position of the movable motor (4) to the individual motor (3), and the induced voltage Will change. The control of these changes is that only normal vector control cannot be properly performed. In this case, according to the above configuration, the q-axis voltage command 値Vq' input to the coordinate conversion unit (20) outputted by the thrust current control unit (18) is added to calculate the energy at the speed detecting means. (1) The voltage compensation 取得 obtained by detecting the velocity of the movable member (4) and the determined induced voltage constant Φ (Ds induced voltage compensation means 201230660 (31), The inductance change and the induced voltage change caused by the position of the movable member (4) can appropriately compensate the q-axis voltage command 値Vq' to obtain a smooth operation of the movable member (4). Further, the linear motor to be controlled (1) The individual motors (3) composed of the armatures on the primary side are discretely arranged as the fixed side. Therefore, it is possible to obtain a discretely arranged linear motor in which the amount of use of the coil is small and the power supply system can be simplified compared to when the power is supplied to the mobile side. Advantages of (1) In the present invention, it is preferable to provide a second position change inductance compensation means (3 2 ). The position change inductance compensation means (3 2 ) is based on the above position detecting means (15) The position detection 値X of the detected movable member (4), the speed detection 値s of the movable member (4) detected by the speed detecting means (16), and the current detecting means (1) The detected current 値 is converted into q-axis and d-axis current 値 and obtained by the q-axis current detection 値 and the d-axis current detection 値 id, and the q-axis voltage compensation 运算 is calculated according to the predetermined arithmetic expression. The d-axis voltage compensation 値 adds the q-axis voltage compensation 对于 to the q-axis voltage command 値Vq' input to the coordinate conversion unit (20) by the thrust current control unit (18), and for the magnetic The d-axis voltage command 値V〆 outputted to the coordinate conversion unit (20) by the current-current control unit (19) adds the d-axis voltage compensation 値. By calculating the q-axis voltage compensation 値 and the d-axis voltage compensation値, and compensate q-axis voltage command 値Vq' and d-axis voltage command 値V, can properly compensate q-axis voltage command 値Vq' and d-axis voltage for inductance change caused by the position of the mover (4) Command 値V/, and get the more round of the movable (4)-10-20 1230660 Sliding action. In the present invention, it is preferable to set: for the thrust current command given by the above position and speed control means (17), the offset compensation power is set to [Κι値ie()gging ' As the above-mentioned q-axis current command 値iq* input to the above-described thrust current control unit (18), the compensation means (33) can be appropriately revoked and reduced by the compensation current 値ie (Jgging is dependent on the mover (4) The position can be determined in advance by a test or the like. Under the compensation of the obtained enthalpy, the tumbling caused by the discrete arrangement of the individual motors (3) can be alleviated. In the present invention, the induced voltage constant Φ used in the induced voltage compensating means (31) may be set to a constant value in the intermediate portion of the movable direction of the individual motor, and may be provided at both ends. It gradually becomes smaller toward the end side. For example, the induced voltage constant Φ may be set to 値 which is changed into a trapezoidal shape. Thereby, even with a processing device having a relatively low arithmetic processing capability, smooth movement control corresponding to a change in the induced voltage due to the position of the movable member (4) can be realized with simple control. In the present invention, the q-axis voltage compensation 値d-axis voltage compensation 加 added by the position change inductance compensation means (32) is 値 according to the following formula (5q), (5d). -11 - 201230660 [Math 1] (5 q) (5 d) ^ r -

-L I 2kqq x 2τ

Ρ Ρ : the distance L1 of the 1 pole pair of the mover: LM Lq : LM L: own inductance of each phase Μ : mutual inductance between the phases, even with a processing device with relatively low computational processing capability, simple control A smooth movement control corresponding to a change in inductance caused by the position of the movable member (4) is achieved. Combinations of at least two configurations disclosed in the scope of the claims and/or the description and/or drawings are included in the present invention. In particular, two or more combinations of the claims of the patent application are included in the present invention. [Embodiment] Figs. 1 to 13 collectively explain an embodiment of the present invention. Fig. i is a linear motor system formed by the linear motor 1 and the linear motor control device 2 to be controlled. The linear motor 1 is a linear synchronous motor (LSM), and is formed by an armature in which the movement direction of the movable member 4 is spaced apart by an armature functioning as a primary side of a separate independent line -12-201230660 motor. The individual motors 3 of the plurality of ground sides. The individual motors 3 are all arranged in the range of movement of the movable member 4. Each of the individual motors 3 is a frame 5 that is provided in common with a track (not shown) having a movable member 4. On the frame 5, there is provided a sensor 15 as a position detector which detects the position of the movable member 4 by the respective motors 3. In addition, the sensor 15 is displayed between the individual motors 3 in FIG. 1 based on the convenience of the illustration, but is actually used in the movable direction of movement (X direction) in the same position as the individual motor 3, The position of the line sensor 15 can be detected in a range longer than the individual motor 3. The movable member 4 is a magnetic pole of N, S which is formed by arranging a plurality of permanent magnets in the moving direction of the movable base unit 4a, and is guided by the rail (not shown) provided in the frame 5. The movable member 4 is a length that is formed between the plurality of individual motors 3. The respective motors 3 are arranged as shown in Figs. 2(A) and (B), for example, in a plurality of coils 3a and 3b which are magnetic poles of the respective layers. In the above moving direction X. Each of the cores 3b is formed by a portion that protrudes from the common body portion into a comb shape. In this example, the three-phase alternating current is driven, and the armature of the primary side of the three poles of one magnetic pole is provided for each phase (U, V, W phase). Further, the individual motors 3 may be provided with a plurality of magnetic poles as the armatures of the magnetic poles having an integral multiple of the number of phases in each phase (U, V, W phase). The control system is illustrated in FIG. The control device 2 is provided with: a plurality of individual motor control means 6' which respectively control each of the other horses - 13 - 201230660 up to 3; and an integrated control means 7 for giving the plurality of individual motor control means 6 positions instruction. The overall control means 7 is constituted by a weak electrical circuit component, a computer, and a part of the program. The overall control means 7 stores the range of the movement range in which the entire motor is divided by the respective motors 3, and converts the command position of the position command input from the upper control means (not shown) to the respective motors 3. The location command is given. The position command corresponding to each of the motors 3 is an instruction to convert the coordinates into the coordinates of their individual motors 3. Each of the individual motor control means 6 is formed by a motor drive circuit that causes a motor current to flow to a strong electric system of the individual motor, and a control unit (not shown) that controls the weak electric system of the motor drive circuit, and the control unit of the weak electric system is borrowed. The feedback control shown in FIG. 3 is performed by a microcomputer, a program thereof, and a circuit component. In FIG. 3, the individual motor control means 6 is a position control means 1 1 having a position, speed, and current feedback control, a speed control means 12, and a current control means 13 for performing a position loop and a speed loop. And feedback control of the series control of the current loop. The position control means 1 1 performs feedback control of the position loop gain determined in accordance with the deviation of the detection 上述 of the sensor 15 and the command command of the position command with respect to the current position of the movable member 4 with respect to the current position of the individual motor 3. . The position control means 1 1 is an output speed command 値 as its output. The speed control means 1 2 performs feedback control of the determined speed loop gain in accordance with the deviation between the speed detection 値 and the speed command 2012 of the 201230660 movable member 4 obtained by the speed detecting means 16. The speed control means 12 is an output current command 値 as its output. In this example, the speed detecting means 16 is constituted by a differential means for determining the speed from the position detecting of the sensor 15, but it may be different from the sensor 15 to directly set the speed. Further, the means for combining the position control means 1 1 and the speed control means 1 2 is referred to as a position/speed control means 17. In the present embodiment, the position control and the speed control are performed, but the position/speed control means 17 may not perform the speed control' only for the position control. The current control unit 13 detects a drive current applied to the individual motor 3 by a current detecting means 14 such as a current detector, and generates a deviation between the current detection 値 and the current command 利用 by using the predetermined current loop gain. The current command 値 controls the motor drive current. The current detecting means 14 is a component which detects the components of the respective phases of the drive current, and has phase current detecting sections 14a, 14b (Fig. 4) for detecting two phases among the three phases. When the detection of the two-phase is performed, the current component of the remaining one phase is obtained by calculation. Fig. 4 is a view showing details of the current control means 13 of Fig. 3. The current control means 13 is a control means for performing vector control, and has various compensation means which are characteristic of the embodiment of the present invention. For the sake of simplification of the description, first, each compensation means 31 is omitted from FIG. 4 by using FIG. The basic structure of vector control of 33. The basic configuration of the current control means 13 includes a thrust current control unit 18, a magnetic flux current control unit 19, a coordinate conversion unit 20, and a power conversion unit 21. The thrust current control unit 18 is a q-axis current command 値iq* for the thrust current command 给予 given by the speed control means 1 2 of the position/speed control means -15-201230660 17 , and is controlled to be converted via the detection coordinate αβ. The q-axis current detection 値iq of the individual motor 3 obtained by the unit 22 and the detection coordinate dq conversion unit 23 can output the q-axis voltage command 値V from the means 値 following the detection of the current detecting means 14 as an output. The thrust current control unit 18 is composed of a calculation unit 18b that reduces the q-axis current detection 的 and the reduction unit 18a and the output of the control subtraction unit 18a. The magnetic flux current control unit 19 is a d-axis current 値 id* of the magnetic flux current command 値 set by the magnetic flux current command 値 setting means 29, and is controlled to pass the detection coordinate αβ conversion unit 22 and the detection coordinate dq conversion unit 23 . The obtained d-axis current detection 値id of the individual motor 3 can be outputted from the means of the detection of the current detecting means 14 and the d-axis voltage command 値Vd' is output. The magnetic flux current command setting means 29 is appropriately set in accordance with the motor characteristics of the individual motor 3, etc., but usually the d-axis electric current 値 id* is set to "0". The magnetic flux current control unit 19 is composed of a subtraction unit 19a that reduces the d-axis current detection 値id and a calculation unit 19b that controls the output of the subtraction unit 19a. The detection coordinate αβ conversion unit 22 converts the detection 値 of the U-phase, V-phase, and W-phase currents ia, ib, ic flowing in the individual motor 3 into a real current of the stationary orthogonal two-phase coordinate component (on the α-axis). The means of detecting 値ia, i β for real current and real current on the β axis. The detection coordinate d q conversion unit 23 converts the detection of the real current of the stationary orthogonal two-phase coordinate component 値 ia ίβ into the detection 値iq, id on the q' d-axis based on the phase of the movable member 4. The q-axis is the axis of the direction in which the linear motor travels, and the d-axis is the axis in the direction orthogonal to the q-axis. The movable sub-phase input to the detection coordinate dq conversion unit 23 is a detection 値 of the phase obtained by the magnetic field table 24 and the sin/cos conversion unit 25 to convert the output of the sensor 15 of the position detector 201230660. The magnetic pole table 24 is a table that converts the detected 値 of the linear position obtained by the sensor 15 into an electrical angle Θ. The sin/cos conversion unit 25 is a means for converting the electrical angle 输出 outputted from the magnetic pole table 24 between cos and sin. The calculation units 18b and 19b of the thrust current control unit 18 and the magnetic flux current control unit 19 perform PID control (proportional integral derivative control) by, for example, a predetermined arithmetic expression. For example, the subtype is used as the expression. [Math 2] ^ = Kp{i;~ id)+ f {i; - id)dt^ Kd±{i;- id) K = ^Pii: - f (/; - Kd - iq) In addition, Kp It is the gain of the proportional control, Ki is the gain of the integral control, and Kd is the gain of the differential control. The coordinate conversion unit 20 is composed of an αβ conversion unit 20a and an abc conversion unit 20b. The αβ conversion unit 20a is a means for converting the q-axis voltage command 値Vq& d-axis voltage command 値Vd into the command 値Va, νβ of the real voltage of the fixed two-layer coordinate component based on the movable sub-phase. The movable sub-phase is obtained from the position detection of the sensor 15 via the magnetic pole table 24 and the sin/cos conversion unit 25. The abc conversion unit 20b converts the command 値V<x, νβ of the real voltage of the output of the αβ conversion unit 20a into a U-phase, V-phase, and W-phase voltage command 値Va, Vb, Vc of the individual motor 3. The power conversion unit 21 is a means for converting the output of the coordinate conversion unit 20 into a drive current of the individual motor 3, and is an inverter (Inverter) 2 1 a and a control -17-201230660. The output control unit of the inverter 2 1 a 2 1 b constitutes. The output control unit 2 1 b is only required to control the electric power output according to the inverter 21a, and the control form is not particularly limited, and may be, for example, a means for performing pulse width modulation (p W Μ ). The current control means 13 of the embodiment shown in FIG. 4 is the same as the vector control described above with reference to FIG. 5, and is provided with an induced voltage compensation means 31, a position change inductance compensation means 32, and a turn compensation means 3 . The induced voltage compensation means 31 is a movable element 4 that is detected by the speed detecting means 16 by adding the energy to the q-axis voltage command 値Vq' input to the coordinate conversion unit 20 by the thrust current control unit 18. The speed is detected by 値X. and the determined induced voltage constant Φ is used to obtain the voltage compensation 値. This induced voltage compensation 値 is set as the product of the velocity detection 可x of the movable member and the induced voltage constant Φ, Φχ·. The induced voltage compensating means 31 is composed of a calculating unit 3 1 a for calculating the voltage compensation 及 Φ χ and an adding unit 3 lb for adding the calculated voltage compensation 値 φ χ . The position change inductance compensation means 32 is composed of a calculation unit 32a and two addition units 32b' 32c. The calculation unit 32a detects the position detection 値X of the movable member 4 detected by the sensor 15 of the position detecting means and the speed detection 値X of the movable member detected by the speed detecting means 16. And the q-axis current detection 値 and the d-axis current detection 値 id obtained by converting the current 値 detected by the current detecting means 14 into a q-axis and a d-axis current 値, according to the predetermined expression To calculate q-axis voltage compensation 値 and d-axis voltage compensation 値. The addition unit 32b adds the q-axis voltage compensation 被 calculated by the arithmetic unit 32a to the q-axis voltage command 値vq' input to the coordinate conversion unit 20 by the thrust current control unit 18, which is output -18-201230660. The addition unit 32c adds the d-axis voltage command 値V〆 input to the coordinate conversion unit 20 to the coordinate conversion unit 20, and the d-axis voltage compensation calculated by the calculation unit 32a. The calculation unit 32a of the compensation means 32 performs calculations of the following equations (5q) and (5d), for example. [Math 3] ^ τ . -L ι2τ, qq (5 q)

P

X 2tp

Ljcl (5 d) τΡ is the spacing of the 1 pole pair of the mover. LC^L-M, Lq is L-M, L is the inductance of each phase, and Μ is the mutual inductance between the phases. The on-off compensation means 33 is the on-off compensation current 値iugging which is determined by the thrust current command 値 reduction given by the position/speed control means 17, as the q-axis current command 値iq input to the above-described thrust current control unit 18. * means. That is, the current compensation 値iec)gging arbitrarily set only in consideration of the interference of the end portions of the individual motors 3 is subtracted from the q-axis current command 。. As a result, the transition of the movable member 4 when it protrudes or protrudes from the individual motor 3 is alleviated. The switching compensation means 33 is constituted by a current compensation amount setting unit 33a that sets the current compensation 値 "^^ and the subtraction unit 33b that performs the above-described subtraction. Next, the reason why each of the compensation means 31 to 33 is necessary is explained. 201230660 and the functions of the compensation means 3 1 to 3 3. First, the problem of discretely arranging the linear motor is solved. (Problem 1) As shown in Fig. 6, the movable body 4 composed of permanent magnets is paired with the individual motor 3. In the case of protrusion or protrusion, the coil inductance or the flux linkage will change in position. (Problem 2) For example, this change is shown in Fig. 6. When the movable member 4 protrudes into the individual motor 3 or protrudes, U-V is used. The order of the phase-W phase changes, and the reverse phase changes in the order of the W phase - the V phase - the U phase. In addition, Lu, Lv, 1^ are the coil inductances of the respective phases. 4 , Φ fw is the movable body 4 and The interlinkage magnetic flux in the range in which the respective phases of the individual motors 3 oppose each other. The trapezoidal change is taken as an example in Fig. 6. The same figure shows the change after the different phases are considered. , 2 compensators, but the introduction of these compensators, according to the composition The performance of the servo amplifier of the individual motor control means 6 (the processing speed of the CPU or the memory capacity) may be difficult to introduce. Therefore, in the next Table 1, the four cases of the respective cases are shown. In the cases (1) and (2), the compensators (compensation means 31 to 33) are introduced. The four cases (1) to (4) in the table are compensators whose theoretical accuracy is improved. ) (2) is a compensator that can be imported even if the performance of the servo amplifier is low. -20- 201230660 [Table i] Inductance compensation (1) About induced voltage compensation (2) (1) • Regardless of the difference of each phase • Do not consider the lion in the motor In the case of change (2) • Do not consider the difference of each phase. Consider the change of the lion's participation in the sacred (3) • Consider the difference of each phase • Do not consider the situation where the parameters of the motor will change (4) _ Consider the phases Different • Consider the case where the parameters of the end of the motor change. The so-called motor end means that in the field of the stator (individual motor), the condition of the magnet (movable) and the stator is not completely opposite. The difference is that the compensator is introduced as a parameter change as shown in Fig. 8(A). When the difference of the phases is not considered, the parameters of the end of the individual motor 3 change as shown in the figure. It is a change considering each phase, and is displayed for comparison. If the difference of each phase is considered, the intermediate parameter of the individual motor 3 also changes as shown in the figure. Further, <Df is the movable member 4 and the individual The interlinkage magnetic flux on the side of the individual motor 3 in the direction in which the motor 3 is facing. Fig. 7 is a diagram showing the relationship between the load and the accuracy of the memory or the CPU in the above four cases (1) to (4). The compensator of case (4) is ideal in calculation. However, cases (3) and (4) are burdensome to the memory or CPU. Therefore, in the present embodiment, the load on the servo amplifier such as the memory or the CPU is considered, and the compensation in the cases (1) and (2) is performed. The parameters of the induced voltage compensation are explained together with FIG. In the same figure, τρ is the length of each pole of the magnet of the individual motor 3, which is the same as the pitch of one magnetic pole pair. In addition, the magnetic poles are set to be equally spaced. In the figure, the speed of the movable body 4 is set to be the speed of the movable body 4, and the speed of the movable body 4 is set to a traveling body such as a trolley. "~" is the interlinkage flux per 1 pole pair. The pitch of the electrodes of the respective phases of the individual motors 3 is set to be equal. When the individual motor 3 is patterned, the flux linkage Φ ί and the voltage Vq 〃 are similar to those shown in the figure, forming a sub-type. Further, η is the number of interlinkage magnetic fluxes of the portion where the individual motor 3 and the movable member 4 oppose each other. The interlinkage magnetic flux of the magnetic poles located at both end portions of the individual motor 3 is calculated as the Φίηχ opposing area ratio. [Math 4]

Patterning

By performing the mode as described above, the interlinkage magnetic flux Φ is changed in the form as shown in Fig. 10 . Further, since the induced voltage constant Φ is proportional to the interlinkage magnetic flux, it is also expressed in the form of FIG. In addition, the same figure is the speed 为·, and the difference of each phase is not considered. The induced voltage compensation will be described. Since it is difficult to directly measure the flux linkage, for example, when the individual motor 3 and the movable member 4 are completely opposed, the induced voltage constant Φ is caused by the movement of the movable member 4 at the speed x. [m/sec]. The voltage is taken. Further, at this time, the movable member 4 is pulled uncontrolled by a different driving source (not shown). In this way, the induced voltage constant Φ is set to the second order. In this way, the estimation of the induced voltage compensation means 31 obtained by the experiment is utilized in the calculation of the induced voltage compensation means 31 of Fig. 4. Further, a method of experimentally obtaining the above-described induced voltage constant Φ is taken as an example. -22- 201230660 [Math 5]

3 Φί 2 2τ ρ Induced voltage constant φ If the enthalpy of the induced voltage constant Φ is obtained, the end swims according to the opposing area, so the stomach can be written in the form of the above-described Fig. 10 . The induced voltage constant φ used in the induced voltage compensating means 31 of Fig. 4 can also be set to be variable at such a position, i.e., gradually smaller at both ends of the individual motor 3. The data of the position at which the variable induced voltage constant Φ is used can be obtained from the position detection 値X. The performance side is used to explain the ideal induced voltage compensation. In order to use the more accurate induced voltage compensator, the next mode is required, which is shown together with Figure 11. [Math 6] Φ Φ induced voltage constant Φ =

-23- 'φ: φν Λ_ 201230660 Φλ«, Φίν, (Kw is the maximum of the interlinkage flux when the motors of the respective phases are fully matched, and the end of the motor is 按照 according to the area ratio. According to this case, the induced voltage compensation means 31 of FIG. 4 is calculated by the induced voltage coefficient Φ, as shown in FIG. 11, at the end portion of the individual motor 3, and the area ratio of the area is changed, and the phases are different. It is also considered to change the parameters of the inductance compensation as shown in Fig. 12. In the same figure, Φ is the magnetic flux that occurs when the currents of the respective phases flow. In this case, mutual inductance is entered as an item of mutual influence. U, Φ V ' Φ W is expressed in order. The coil resistance R is, for example, set which phase is the same as Ru = Rv = Rw = R. [Math 7] 4 Muv u phase self-inductance v-phase self-inductance Mutual inductance between W-phase self-inductance UV I: Mutual inductance between mutual inductance WU between VW

A, K: The change of phase is the 値 1,Φ V of the pair, and the release. In the present embodiment, the inductance compensation by the positional variation inductance compensation means 32 is 値 which is determined by the following equation. [Math 8]

X 2τ

L (5 q ) x 2τ

Ldid (5d) In addition, the inductance compensation of the above equation is an item surrounded by the line on the right side equivalent to the relationship of the subtype. This inductance compensation is considered as compensation without considering the change of the inductance, and the calculated load is small, and the ability of the servo amplifier constituting the servo amplifier of the individual motor control means 6 or the CPU can be used. [Math 9]

Describe the ideal inductance variation compensation for accuracy. In order to use a more accurate inductance change compensator, a sub-mode is required. -25- 201230660 [Math 10]

R 0 0 R 2 i 3 2r„ la d dt \ _^7 _ 2tp Inductance change 0

^ .K)sin2~(K)c〇s4}+ Bu-go<-to-multiple/J sin$c〇W ~(^/. +\^L +\ΦΗ sin2^"|^/. + ^/.)°°820~^(^ -^/Jsin^cos6> For the part of the inductance change, if the expansion is performed, the sub-form is formed [Math 11] d_ ~dt d , dt [Ls la _ - j\ h -lq\ Λα], 丨M _L7 X l5 l6 .-^7 0 Λ: 2r. 0 x 2τ,

Ls ls Lt L% id 2r,

Lsid + L6iq Lnid + L%iq d ~dt 2t,

-26- 201230660 In the equation of the same figure, the portion surrounded by the solid line is the portion involving the reverse-axis current compensation. The portion surrounded by the dotted line is the portion involving the position/time variation compensation of L. These portions are used in the position change inductance compensation means 32 of Fig. 4 . In addition, the portion enclosed by the 1-point lock line is an item relating to the time constant of the control. Explain the compensation for the turnaround. As shown in Fig. 13, when the movable member 4 protrudes or protrudes from the individual motor 3, a pulling force is generated between the movable member 4 and the individual motor 3 as interference influence control. This interference can be predicted in advance to be modeled, and the current command is sent in consideration of the interference of this portion, thereby suppressing the interference caused by the pull-in force. The tumbling compensation means 33 of Fig. 4 is a current compensation 値ie() ggingS q-axis current command 任意 which is arbitrarily set only in consideration of the disturbance. Thereby, the rotation of the movable member 4 when it protrudes or protrudes from the individual motor 3 is alleviated. In order to clarify the mode, compensation, and the like of the above-described motor, the motor circuit equation, the induced voltage, the inductance, and the like are re-arranged. When the relationship between the voltage and the current of the three-phase synchronous linear motor of the present embodiment is written, the second expression is obtained. -27- 201230660 [Math 12] X 0 0 " V d —Φ: Vv — 0 Κ 0 κ + — dt Φν Λ_ 0 0 Κ_ L_ Λ_ ^sinW-—7i: i Resistance π is the resistance of each line ' Φ: Φν Λ_ κν Μ..... 2τ i 2τ. X 2r„ sin^ 2 'Φf sin Ιθ ~ι—τι

A ••(A)

Lw

In order to simply perform the control of the alternating current as a direct current, if the three-phase rotational equation is coordinate-converted into two phases, the secondary equation is obtained. [Math. 13] Coordinate transformation ranks

dqcaP = COS0 sin^ -sin^ COS0 cos^ cosW-2;rl cos 2 Θ ^--711 αβ r ^uvw_ ^αβ sin(9 sin {θ-—π\ sm\6 +—π\ (8) If coordinates are performed The transformation is performed by the qd coordinate system, and the second formula is formed. -28- 201230660 [Math 14]

Γ i: Ί d , A] *· one 〇, 卜 4] 乂 1 it L 1 ^ 0 2tp J-Ί _

| sin0cos0 ~{~Φ/. +Φ/.)ύηΙΘ+(φ/. -^/.)005^1+^ Λφ; +^Λ +^/-jsin20~^/. +(i/.)cos ^-J|(^. -(iA)sin^cos0 -* Item 1 of the weaving voltage - In order to clarify a part of the above formula, the expansion is as shown next [Math 15] 4 Original 'in discrete linear The end portion of the motor and the interlinking magnetic flux of each of the opposed movable members 4 of the individual motor 3 are proportional to the opposing area. If this is considered, an induced voltage compensator having higher accuracy can be formed. For the performance of the amplifier, it is necessary to simplify the mathematical formula. Here, when the individual motor 3 and the movable member 4 are completely opposed, the interlinkage magnetic flux of each phase becomes φγ φπ Φγ Φί , and the term relating to the induced voltage is the second formula. Consolidation -29 - 201230660 [Math 16] (-Φ,, + )sin^ + )cos2 θ}+ sinθcosθ +^ι: 5'η2^_4^Λ -^r,)sin^cos6> £1 ( D)

JC φ] 2 2ΪΤ Generally, in a linear motor or a rotary motor in which the primary side armature and the permanent magnet are completely opposed, even if φρ Φίν = 0fw = <i»f, the error is extremely small. In order to clarify a part of the above formula, the expansion is as shown next 〇 [Math 17]

VJ 4 (Ά + 畋) sin 2 θ+(K )cos 2 Θ } Φ^~2Φ^~2Φ/^5Ϊηθ〇〇8θ /cos θ ^ί^/„ ~Φίν )sin Θ cos Θ For the inductance row (L5~L8) Write it out, then it can be merged into the first half of the equation. Also, if the inductance (-30-201230660 L!~L4) contained in (L5~L8) is written, it will be the second. The latter half of the formula. [Math 18]

Ls = Lx cos2 Θ + L4 sin +j(l2 + L3)sin 2Θ Z/6 = ·Ζ/2 cos 2 Θ + B 3 sin 2 Θ + — (L4 — Lj )sin 2Θ 厶7 = - L2 sin 2 Θ + cos 2 Θ + 7(14 -厶丨)sin 2Θ = -L, sin 2 0 + L4 cos 20 - go (L2 + B 3) sin 2 (9

Ll=J \u +\Lv + \Lw ~ MM 2 I V3 . V3 r V3 [j = — I — L· + ~ * · L --ΛίΓ 2 3 I 4 v 4 w 2 uv 21 sr vj r vj T, — — — L +·-L h-- 3 3 4 ^4^2 2(3. 3 . 3" f =: — I — L· + — L· _ —

La 3\4v 4 w 2 ' Above, L5 to L8 are obtained from the respective inductances (Lu, Lv, Lw) and mutual inductances (Muv, Mvw' Mwu) of the respective coils. That is to say, with respect to this stone, it is possible to form a compensator with higher precision by appropriately patterning. Set the self inductance of each phase to (LU = LV = LW), and the mutual inductance = Λ ^ , Λ / ί 'is set to (L = LU = LV = LW) ' (set to (Muv Λ, Λ, =Nlwu) When 'M·· M = MU v = Mvw

Ls = L-M^Ld ' L6 = 〇 ' L7 = 〇 ' -31 - 201230660 L g= L - M = L q Can be written in the following formula. [Math 19] ~Rid~ d ~Ldid~ _v Riq Η-- dt _v,_

LJd

••(E) 2r, in the case where the part surrounded by the line is voltage-compensated in this equation, it becomes a simple one-time delay system, and control becomes easy. [Math 20] v/ 'Rid~ d + one dt ~Ldi; 4. Λ. 1

• (E) Next, a processing system composed of the conveying device 4 1 and the working machine 42 to which the above-described linear motor 1 and linear motor control device are applied will be described with reference to Figs. As shown in Fig. 14, the working machine 42 is constituted by a lathe, and the bed 51 is provided with a spindle table 53 composed of a main shaft for supporting the workpiece supporting means 52, and a corner of the processing means. The turret transporting device 41 of the tower type (Turret) is provided with the traveling body 4 3 of the object W to be transported as a material to be processed, and is provided on the rail 44' and is provided with the linear-32-201230660 motor 1 as a The motor "driving drive" of the traveling body 43 carries out the conveyance of the workpiece W to the workpiece supporting means 52 of the working machine 42. The rail 44 is provided along the longitudinal direction on the horizontal frame 45 which is erected by the support 45a. As shown in Fig. 15, the traveling body 43 is a guide roller 62 having a traveling wheel 6 1 guided by the rail 44 and a side surface which is transferred to the side surface of the rail 44 to regulate the width direction of the traveling body 43. The linear motor 1 is composed of a plurality of individual motors 3 provided in the frame 46 and a movable member 4 provided on the traveling body 43. The traveling body 43 is mounted with a forward and backward direction orthogonal to the traveling direction (X direction) ( The front and rear moving table 46 in the Z direction) is provided with a workpiece holding head 48 at the lower end of the rod-shaped lifting body 47 which is provided in the front and rear moving table 46. The workpiece holding head 48 is provided with a plurality of chucks 49 to be carried by the object holding means. The front and rear moving table 46 is moved forward and backward by a driving source (not shown) provided in a motor or the like of the traveling body 3, and the elevating body 47 is driven up and down by a driving source of a motor or the like provided on the front and rear moving table 46. The chuck 49 is a chuck claw (not shown) that is driven to open and close by a drive source such as a cylinder device or a solenoid to hold the object W to be transported. By applying the above-described discretely arranged synchronous linear motor 1 to the transporting device 41 for the working machine 42 as described above, it is possible to effectively exhibit the effect of reducing the amount of the turns and the power supply form. Further, by applying the linear motor control device to the control of the linear motor 1, it is possible to effectively exert the effect of the smooth movement control corresponding to the change in the induced voltage or the change in the inductance. As described above, the preferred embodiment of the present invention is described with reference to the drawings, but various modifications, alterations, and deletions are possible without departing from the spirit and scope of the invention. Accordingly, these are also intended to be within the scope of the invention. BRIEF DESCRIPTION OF THE DRAWINGS The invention can be understood by the following description of the preferred embodiments with reference to the accompanying drawings. However, the embodiments and the drawings are intended to be illustrative and illustrative, and are not intended to limit the scope of the invention. The scope of the invention is determined by the scope of the appended claims. In the drawings, the same part number of the plural drawing is the same part. Fig. 1 is a block diagram showing the overall configuration of a linear motor control device according to an embodiment of the present invention. Figure 2 (A) is a plan view of an individual motor of the same linear motor, and (b) is a cross-sectional view. Fig. 3 is a block diagram of an individual motor control means of the same linear motor control device. Fig. 4 is a detailed block diagram showing a current control means of the same linear motor control device. Fig. 5 is a block diagram showing the basic configuration of the compensation means omitted from the same current control means. Figure ό is an explanatory diagram showing changes in inductance and interlinkage flux of a discretely arranged linear motor. Fig. 7 is a view showing the relationship between the degree of compensation and the burden of the control means. Figure 8 (A) shows changes in inductance and flux linkage, regardless of phase

(S) is an explanatory diagram in which the different phases are different. FIG. 9 is an explanatory diagram of the induced voltage compensation parameters. Fig. 10 is an explanatory diagram of the induced voltage constant. Fig. 11 is an explanatory diagram of the induced voltage compensation which is ideal in accuracy. Fig. 12 is an explanatory diagram of an inductance compensation parameter. Fig. 13 is an explanatory diagram of the tumbling compensation. Fig. 14 is a front elevational view showing a processing system including a linear motor control device of the same embodiment and a conveying device using the linear motor. Figure 15 is a cutaway plan view of the same conveying device. f Main component symbol description] 1 : Linear motor 2 : Linear motor control device 3 : Individual motor 4 : Movable 5 : Frame 6 : Individual motor control means 7 : Integrated control means 1 1 : Position control means 1 2 : Speed control means 1 3 : Current control means 1 4 : Current detecting means 1 5 : Sensor (position detecting means) -35 - 201230660 1 6 : Speed detecting means 1 7 : Position and speed control means 1 8 : Thrust current control part 1 9 : magnetic flux current control unit 20 : coordinate conversion unit 21 : power conversion unit 3 1 : induced voltage compensation means 3 2 : position change inductance compensation means 3 3 : tumbling compensation means - 36-

Claims (1)

201230660 VII. Patent application scope: 1. A linear motor control device is a device for controlling a synchronous linear motor. The synchronous linear motor is arranged along the moving path of the movable member to be a phase of three phases. The coils are arranged in a plurality of individual motors of the primary side armature of one linear motor in the linear direction, and the movable magnets are configured by permanent magnets, and each of the plurality of individual motor control means for controlling the respective motors is provided. And a general control means for allocating position commands to the respective motors in accordance with the input position command, wherein each of the motor control means includes: position control and speed control, or position/speed control only for position control. And a current control means for detecting a current of each of the individual motors, and a position detecting means and a speed detecting means for detecting a position and a speed of the movable member, respectively The above current control means is a vector control form, There is a thrust current control unit that outputs a q-axis current command 値iq* from the thrust current command 给予 given by the position/speed control means, and outputs an individual motor Q that can be obtained from the detection 値 of the current detecting means. Axis current detection 値 "q-axis voltage command 値Vq' that can be controlled in a follow-up manner; flux current control unit for the d-axis electric current 値id * of the set magnetic flux current command ,, output to individual motor The d-axis current detection 値 id can control the d-axis voltage command 値V, and the coordinate transformation unit, which is the q-axis voltage command 値Vq' and the d-axis electric-37-201230660 pressure command 値vd' a command for converting the coordinates of each phase of the individual motor; and a power conversion unit that converts the output of the coordinate conversion unit into a drive current of the individual motor, and an induced voltage compensation means for the thrust current The q-axis voltage command 値V/additional voltage compensation 値Φχ input to the coordinate conversion unit by the control unit is outputted, and the voltage compensation 値φχ is used in the speed detecting means The detected speed of the movable element is detected by 値X. and the determined induced voltage constant Φ. 2. The linear motor control device of claim 1 of the patent scope, wherein 'setting and position Μ inductance compensation a means for detecting a position of the movable member detected by the position detecting means, and detecting a speed of the movable body detected by the speed detecting means, and detecting the current detecting means The detected current 値 is converted into q-axis and d-axis current 値 and the q-axis current detection 値... and d-axis current detection 値 id, and the q-axis voltage compensation 运算 is calculated according to the predetermined arithmetic expression. The d-axis voltage compensation 値 is added to the q-axis voltage command 値V input to the coordinate conversion unit by the thrust current control unit, and the q-axis voltage compensation 値' is added to the magnetic flux current control unit. The d-axis voltage command 値V input to the coordinate conversion unit is added to the d-axis voltage compensation 値. 3-. The linear motor control device of claim 2, wherein the setting: the tumbling compensation means is a tumbling compensation current determined by the thrust current command 値 given by the position/speed control means値hogging is the q-axis current command 値iq* input to the thrust current control unit. The linear motor control device according to any one of claims 1 to 3, wherein the induced voltage constant Φ used in the induced voltage compensation means is set to an individual motor The intermediate portion of the moving direction of the movable member is constant, and the both end portions are gradually smaller toward the end side. 5. The linear motor control device according to any one of claims 1 to 3, wherein the q-axis voltage compensation 値d-axis voltage compensation method added by the position change inductance compensation means is based on a sub-type ( 5q), (5 d ) 値 [Math 1] (5 q) χ (5 d) 2τ τΡ : the spacing of the 1 pole pair of the movable element Ld : LM Lq : LM L: the inductance of each phaseΜ : mutual inductance between phases. -39-