TW201228509A - Circuit board and manufacturing method thereof - Google Patents

Circuit board and manufacturing method thereof Download PDF

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Publication number
TW201228509A
TW201228509A TW99146764A TW99146764A TW201228509A TW 201228509 A TW201228509 A TW 201228509A TW 99146764 A TW99146764 A TW 99146764A TW 99146764 A TW99146764 A TW 99146764A TW 201228509 A TW201228509 A TW 201228509A
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Taiwan
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layer
conductive
conductive layer
pillar
patterned
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TW99146764A
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Chinese (zh)
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TWI406621B (en
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Chung-Wen Ho
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Subtron Technology Co Ltd
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Priority to TW99146764A priority Critical patent/TWI406621B/en
Priority to CN2011101002068A priority patent/CN102548250A/en
Publication of TW201228509A publication Critical patent/TW201228509A/en
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Publication of TWI406621B publication Critical patent/TWI406621B/en

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Abstract

A method of fabricating a circuit board is provided. A carrier is provided. A first conductive layer and a second conductive layer are formed on the two corresponding surfaces of the carrier, respectively. At least a first conductive pillar and at least a second conductive pillar are formed on the first conductive layer and the second conductive layer, respectively. A first laminated structure and a second laminated structure are laminated on the first conductive layer and the second conductive layer, respectively. A portion of the first laminated structure and a portion of the second laminated structure are removed to expose the first conductive pillar and the second pillar, respectively. A third conductive layer is formed on the residual first laminated structure and the first conductive pillar, and a fourth conductive layer is formed on the residual second laminated structure and the second conductive pillar. The carrier is removed.

Description

201228509u- 六、發明說明: 【發明所屬之技術領域j 本發明是有關於—種線路板 (circuit board )及其製 程’且特別是有關於一種具有較佳可靠度的線路板及其製 程。 【先前技術】 目前在半導體製程中’晶片封裝載板是經常使用的封 裝元件之一。晶片封裝載板例如為一多層線路板,其主要 是由多層線路層以及多層介電層交替疊合所構成,其中介 電層配置於任兩相鄰之線路層之間,而線路層可藉由貫穿 介電層之導通孔(Plating Through H〇le,pTH)或導電孔 (via)而彼此電性連接。由於晶片封裝載板具有佈線細 捃、組裝緊湊以及性能良好等優點,已成為晶片封裝結構 (chip package structure )之主流。 一般而言’多層線路板的線路結構大多採用積層 (buildup)方式或是壓合(iaminated)方式來製作,因此 具有高線路密度與縮小線路間距的特性。超薄的基板由於 剛性不足,因此必須先提供一個載板來作為一支撐載體。 接著’依序形成離形層與形成多層線路層以及與線路層交 替排列的多層介電層於載板的相對兩侧表面上。最後,在 離形層與其上之線路層間的介面,將線路板和載板分離, 而形成相互分離的二個多層線路板。此外,若欲形成導通 孔或導電孔,則可於形成一層介電層後,經由例如是雷射 201228509201228509u- VI. Description of the Invention: [Technical Field of the Invention] The present invention relates to a circuit board and a process thereof, and in particular to a circuit board having a better reliability and a process thereof. [Prior Art] Currently, a wafer package carrier is one of the frequently used package components in a semiconductor process. The chip package carrier is, for example, a multilayer circuit board, which is mainly composed of a plurality of circuit layers and a plurality of dielectric layers alternately stacked, wherein the dielectric layer is disposed between any two adjacent circuit layers, and the circuit layer can be The electrodes are electrically connected to each other through a via hole (pTH) or a via hole penetrating through the dielectric layer. Since the chip package carrier has the advantages of fine wiring, compact assembly, and good performance, it has become the mainstream of the chip package structure. In general, the wiring structure of a multilayer wiring board is mostly manufactured by a buildup method or an iaminated method, and thus has a high line density and a reduced line pitch. Ultra-thin substrates must be provided with a carrier as a support carrier due to insufficient rigidity. Next, the release layer is sequentially formed on the opposite side surfaces of the carrier with the plurality of dielectric layers forming the multilayer wiring layer and alternately arranged with the wiring layer. Finally, the interface between the release layer and the circuit layer thereon is separated from the carrier and the two multilayer boards are separated from each other. In addition, if a via hole or a conductive hole is to be formed, after forming a dielectric layer, for example, by laser, 201228509

jj / /ytwi.doc/I 鑽孔法來形成盲孔, 後,再藉由電鍍的方带,此;|電層下方之線路層。之 而形成另-線路層與^通^鋼層於盲孔内與此介電層上, 然而’進行電鍍製 孔内無介電層,兩由於雷射鑽孔法所形成的盲 免盲孔上方之鋼式填人鋼材來塞孔。為了避 需要先進行增加錄銅厚品制題,現有的製程步驟 驟而達到平整产頻埝驟之後,再加上減銅厚的步 率,以增加鍍二夺間:J而::殊鍍銅藥水來減緩鍍銅速 由雷射咖I 成本較高且製程倾也㈣。此外, 的製程和叫^成之f孔經由電㈣孔的方式形成導通孔 壯m^限於其盲孔的密度不易提高,且盲孔的形 利於作成線狀或綠之凸塊,因此上狀製程不易達 、南頻線路所需之訊號干擾隔離以及高功率晶片所需 熱功能。 狀 籲 【發明内容】 本發明提供一種線路板及其製作方法,其可提高製程 良率與減少製作成本,進而增加產品的可靠度。 本發明提供一種線路板的製作方法,其中製作方法包 括下述步驟。提供一承載板。承載板包括一第一離形層、 一第二離形層以及一配置於第一離形層與第二離形層之間 的核心層。分別形成一第一導電層以及一第二導電層於承 載板的第一離形層與第二離形層上。分別形成至少—第—Jj / /ytwi.doc/I Drilling method to form a blind hole, and then by plating the square tape, this; | circuit layer below the electrical layer. Forming another line layer and a ^ steel layer in the blind hole and the dielectric layer, but 'there is no dielectric layer in the electroplating hole, and the blind blind hole formed by the laser drilling method The upper steel is filled with steel to plug the hole. In order to avoid the need to first increase the number of copper thick products, the existing process steps to achieve a flat frequency after the step, plus the step of reducing the thickness of the copper to increase the plating between the two: J and:: Copper syrup to slow the copper plating speed is higher by the laser coffee I and the process is also inclined (four). In addition, the process and the hole formed by the electric hole are formed by the electric (four) hole, and the density of the blind hole is not easily improved, and the shape of the blind hole is favorable for forming a linear or green bump, so the upper shape The process is not easy to reach, the signal interference isolation required for the south frequency line and the thermal function required for the high power chip. SUMMARY OF THE INVENTION The present invention provides a circuit board and a method of fabricating the same, which can improve process yield and reduce manufacturing cost, thereby increasing product reliability. The present invention provides a method of fabricating a wiring board, wherein the manufacturing method comprises the following steps. A carrier board is provided. The carrier plate includes a first release layer, a second release layer, and a core layer disposed between the first release layer and the second release layer. A first conductive layer and a second conductive layer are respectively formed on the first release layer and the second release layer of the carrier. Form at least - first

201228509 t ▼▼ a.doc/I 導電柱以及至少一第二導電柱於第一導電層上與第二導電 層上。第一導電柱與第一導電層之間具有一第一介面,而 第二導電柱與第二導電層之間具有一第二介面。分別壓合 一第一疊層結構以及一第二疊層結構於第一導電層上與第 二導電層上。第一疊層結構覆蓋第一導電柱與部分第一導 電層,而第二疊層結構覆蓋第二導電柱與部分第二導電 層。分別移除部分第一疊層結構以及部分第二疊層結構, 至暴露出第一導電柱與第二導電柱。分別形成一第三導電 層以及一第四導電層於剩餘的第一疊層結構與第一導電柱 上以及於剩餘的第二疊層結構與第二導電柱上。第三導電 層與第一導電柱之間具有一第三介面,而第四導電層與第 二導電柱之間具有一第四介面。藉由一剝離力道以分離第 一導電層與第一離形層之間的介面以及第二導電層與第二 離形層之間的介面,而移除承載板。 在本發明之一實施例中,上述之第一疊層結構包括一 第一絕緣層、一第一薄金屬層以及一第一厚金屬層。第一 薄金屬層位於第一絕緣層與第一厚金屬之間,且第一絕緣 層覆蓋第一導電柱與部分第一導電層。第二疊層結構包括 一第二絕緣層、一第二薄金屬層以及一第二厚金屬層。第 二薄金屬層位於第二絕緣層與第二厚金屬之間,且第二絕 緣層覆蓋第二導電柱與部分第二導電層。 在本發明之一實施例中,上述之移除部分第一疊層結 構以及部分第二疊層結構的步驟,包括下述步驟。移除第 一厚金屬層以及第二厚金屬層,以暴露出第一薄金屬層以201228509 t ▼▼ a.doc/I The conductive pillar and the at least one second conductive pillar are on the first conductive layer and the second conductive layer. The first conductive pillar and the first conductive layer have a first interface, and the second conductive pillar and the second conductive layer have a second interface. A first laminate structure and a second laminate structure are respectively laminated on the first conductive layer and the second conductive layer. The first laminate structure covers the first conductive pillar and a portion of the first conductive layer, and the second laminate structure covers the second conductive pillar and a portion of the second conductive layer. A portion of the first laminate structure and a portion of the second laminate structure are separately removed to expose the first conductive pillar and the second conductive pillar. A third conductive layer and a fourth conductive layer are respectively formed on the remaining first stacked structure and the first conductive pillar and on the remaining second laminated structure and the second conductive pillar. The third conductive layer and the first conductive pillar have a third interface, and the fourth conductive layer and the second conductive pillar have a fourth interface. The carrier plate is removed by a stripping force to separate the interface between the first conductive layer and the first release layer and the interface between the second conductive layer and the second release layer. In an embodiment of the invention, the first laminate structure comprises a first insulating layer, a first thin metal layer and a first thick metal layer. The first thin metal layer is between the first insulating layer and the first thick metal, and the first insulating layer covers the first conductive pillar and a portion of the first conductive layer. The second laminate structure includes a second insulating layer, a second thin metal layer, and a second thick metal layer. The second thin metal layer is between the second insulating layer and the second thick metal, and the second insulating layer covers the second conductive pillar and a portion of the second conductive layer. In one embodiment of the invention, the step of removing a portion of the first laminate structure and a portion of the second laminate structure includes the following steps. Removing the first thick metal layer and the second thick metal layer to expose the first thin metal layer

aoc/I 201228509 及第二薄金屬層。移除部分第一薄金屬層與部分第二薄金 屬層至暴露出第一導電柱與第二導電柱,以分別形成環繞 第一導電柱與第二導電柱的一第一環狀導電層以及一第二 環狀導電層。 在本發明之一實施例中,上述之移除第一厚金屬層以 及第二厚金屬層的方法包括剝離法。 在本發明之一實施例中,上述之部分第一薄金屬層與 部分第二薄金屬層的方法包括研磨法。 在本發明之一實施例中,上述之形成第一導電柱與第 二導電柱的方法包括電鍍法。 在本發明之一實施例中,上述之第一疊層結構包括一 第一絕緣層以及一第一薄金屬層。第一薄金屬層位於第一 絕緣層上,且第一絕緣層覆蓋第一導電柱與部分第一導電 層。第二疊層結構包括一第二絕緣層以及一第二薄金屬 層。第二薄金屬層位於第二絕緣層上,且第二絕緣層覆蓋 第二導電柱與部分第二導電層。 在本發明之一實施例中,上述之移除部分第一疊層結 構以及部分第二疊層結構的步驟,包括··移除部分第一薄 金屬層與部分第二薄金屬層至暴露出第一導電柱與第二導 電柱,以分別形成環繞第一導電柱與第二導電柱的一第一 環狀導電層以及一第二環狀導電層。 在本發明之一實施例中,上述之部分第一薄金屬層與 部分第二薄金屬層的方法包括研磨法。 在本發明之一實施例中,上述之第一離形層與第二離Aoc/I 201228509 and second thin metal layer. Removing a portion of the first thin metal layer and a portion of the second thin metal layer to expose the first conductive pillar and the second conductive pillar to respectively form a first annular conductive layer surrounding the first conductive pillar and the second conductive pillar; a second annular conductive layer. In one embodiment of the invention, the above method of removing the first thick metal layer and the second thick metal layer includes a lift-off method. In one embodiment of the invention, the method of forming a portion of the first thin metal layer and a portion of the second thin metal layer comprises a grinding process. In one embodiment of the invention, the method of forming the first conductive pillar and the second conductive pillar includes electroplating. In an embodiment of the invention, the first laminate structure includes a first insulating layer and a first thin metal layer. The first thin metal layer is on the first insulating layer, and the first insulating layer covers the first conductive pillar and a portion of the first conductive layer. The second laminate structure includes a second insulating layer and a second thin metal layer. The second thin metal layer is on the second insulating layer, and the second insulating layer covers the second conductive pillar and a portion of the second conductive layer. In an embodiment of the invention, the step of removing a portion of the first laminate structure and a portion of the second laminate structure includes removing a portion of the first thin metal layer and a portion of the second thin metal layer to expose The first conductive pillar and the second conductive pillar respectively form a first annular conductive layer and a second annular conductive layer surrounding the first conductive pillar and the second conductive pillar. In one embodiment of the invention, the method of forming a portion of the first thin metal layer and a portion of the second thin metal layer comprises a grinding process. In an embodiment of the invention, the first release layer and the second separation

•doc/I 201228509 形層的材質為含料導電膠或切的非導電膠。 在本發明之-實施例中,上述之第一離形層與第二離 形層的材質為錄,=核心層的材質為銅或不鎮鋼。 在本發明之只施例中,上述之線路板的製作方法, 更包括於移除承載板之前,分細彡成—增層祕層於 疊層結構上以及第二疊層結構上。 + 在本發明之中,上述之線路㈣製作方法, 上述之形成於承载=第〜離形層與第二離形層上的第— 導電層與第二導ϋ別為〜㈣化導電層,且於藉由剝 離力道以分離第一導電層與第一離形層之間的介面以及第 二導電層與第二離形層之間的介面,而移除承載板之前, 圖案化第三導電層以及第四導電層,以形成一第三圖案化 導電層及一第四圖案化導電層。 在本發明之/實施例中’上述之線路板的製作方法, 更包括藉由剝離力道以分離第—導電層與第一離形層之間 的介面以及第二導電層與第二離形層之間的介面,而移除 承载板之後,圖案化第一導電層、第二導電層、第三導電 層及第四導電層,以形成—第一圖案化導電層、一第二圖 案化導電層、一第彡圖案化導電層及一第四圖案化導電層。 本發明提出〆種線路板,其包括一第一圖案化導電 層、一導電柱、〆絕緣層以及一第二圖案化導電層。導電 桎配置於第一圖案化導電層上,其中導電柱與第一圖案化 導電層之間具有一第一介面。絕緣層配置於第一圖案化導 電層上,且包園導電柱的側面。第二圖案化導電層配置於• doc/I 201228509 The shape of the layer is made of conductive paste or cut non-conductive glue. In the embodiment of the present invention, the material of the first release layer and the second release layer is recorded, and the material of the core layer is copper or stainless steel. In the embodiment of the present invention, the method for fabricating the above-mentioned circuit board further comprises: prior to removing the carrier plate, the fine layer is formed on the laminated structure and the second laminated structure. In the present invention, in the above method (4), the first conductive layer and the second conductive layer formed on the carrier-the first release layer and the second release layer are a (four) conductive layer. And patterning the third conductive layer before separating the carrier plate by separating the force channel to separate the interface between the first conductive layer and the first release layer and the interface between the second conductive layer and the second release layer And a fourth conductive layer to form a third patterned conductive layer and a fourth patterned conductive layer. In the present invention, the method for fabricating the above-mentioned circuit board further includes separating the interface between the first conductive layer and the first release layer and the second conductive layer and the second release layer by peeling the force path After the interface is removed, the first conductive layer, the second conductive layer, the third conductive layer and the fourth conductive layer are patterned to form a first patterned conductive layer and a second patterned conductive layer. a layer, a second patterned conductive layer and a fourth patterned conductive layer. The present invention provides a circuit board comprising a first patterned conductive layer, a conductive pillar, a tantalum insulating layer and a second patterned conductive layer. The conductive iridium is disposed on the first patterned conductive layer, wherein the conductive pillar and the first patterned conductive layer have a first interface. The insulating layer is disposed on the first patterned conductive layer and encloses the side of the conductive pillar. The second patterned conductive layer is disposed on

a〇c/I 201228509 導電柱與絕緣層上,其中第二圖案化導電層與導電才主 具有一第二介面,且第二圖案化導電層透過導電桎與曰 圖案化導電層電性連接。 ^ — 在本發明之一實施例中,上述之線路板更包括—产 導電層’環繞導電柱設置且位於絕緣層與第一圖案“ 層之間。 〃導電 基於上述,本發明之線路板是直接於導電層上電㉘4 成導電柱,接著再壓合疊層結構且移除部份疊;結 路出導電柱,之後再透過電鑛的方式來形成另—導電層、 相較於習知先於介電層中形成盲孔,而後再透過電鍍的方 式於盲孔中形成導通孔以及於介電層上形成線路層而今, 本發明之線路板的製作方法可提高導電層與導電二的&浐 良率並減少製作成本,進而增加產品的可靠度。再者广 發明能將導電柱作成線狀或塊狀凸塊,以利於高頻率及高 功率之晶片所需的訊號隔離及散熱功能。 回 為讓本發明之上述特徵和優點能更明顯易懂,下文特 舉實施例,並配合所附圖式作詳細說明如下。 ’ 【實施方式】 ,1為本發明之一實施例之一種線路板的剖面示音、 圖。請參考圖1,在本實施例中,線路板100包括一第二 圖案化導電層11G、—導電柱12〇、—絕緣層13()以及—第 一圖案化導電層14〇。詳細來說,導電柱12〇配置於第— 圖案化導電層1U)上,其中導電柱12Q與第—圖案化導電 層110之間具有一第一介面S1。絕緣層13〇配置於第一圖 案化導電層110上,且包圍導電柱12〇的侧面。第二圖案 化導電層140配置於導電柱12〇與絕緣層130上,其中第 二圖案化導電層140與導電柱12〇之間具有一第二介面 S2 ’且第二圖案化導電層M〇透過導電柱12〇與第一圖案 化導電層110電性連接。此外,本實施例之線路板1〇〇更 包括一環狀導電層150 ’其中環狀導電層15〇環繞導電柱 120設置,且位於絕緣層13〇與第一圖案化導電層11〇之 間。 以下將配合圖2A至圖21來詳細說明線路板100的製 作方法。在此必須說明的是,本實施例沿用前述實施例的 凡件標旎與部分内容,其中採用相同的標號來表示相同或 近似的元件。 圖2A至圖21以剖面綠示本發明之一實施例之〆種線 路板的製作方法。請參考圖2A,首先,提供一承載板1〇, 其中承載板10包括一第一離形層12、—第二離形層14以 及-配置於第-離形層12與第二離形層14之間的核心層 16。在本實施例中,帛一離形層12與第二離形廣14的材 質例如是為切的導電膠或含料非導電膠;或者是’第 -離形層12與第二離形層14的材質例如是鎳,而核心層 16的材二例如是採用鋼或不義,在此並不加以限制。 接著,請參考圖2B,分別形成一第一導電層110a以 及-第二導電層於承載板1G的㈣面0上,其中 第-導電層110a覆蓋第一離形層12,而第二導電廣u〇b 201228509A〇c/I 201228509 The conductive pillar and the insulating layer, wherein the second patterned conductive layer and the conductive main body have a second interface, and the second patterned conductive layer is electrically connected to the 图案 patterned conductive layer through the conductive 桎. In an embodiment of the invention, the circuit board further includes a conductive layer disposed around the conductive pillar and located between the insulating layer and the first pattern “layer. The conductive layer is based on the above, the circuit board of the present invention is The conductive layer is electrically connected to the conductive layer 284, and then the laminated structure is further pressed and the partial stack is removed; the conductive pillar is formed, and then the conductive layer is formed by means of electric ore, which is earlier than the prior art. A blind via is formed in the dielectric layer, and then a via hole is formed in the blind via and a wiring layer is formed on the dielectric layer. The method for fabricating the wiring board of the present invention can improve the conductive layer and the conductive layer. The yield is reduced and the production cost is reduced, thereby increasing the reliability of the product. In addition, the invention can form the conductive pillar as a linear or block bump to facilitate the signal isolation and heat dissipation functions of the high frequency and high power wafer. The above features and advantages of the present invention will become more apparent from the following detailed description of the embodiments of the invention. Referring to FIG. 1 , in the embodiment, the circuit board 100 includes a second patterned conductive layer 11G, a conductive pillar 12 〇, an insulating layer 13 ( ), and a first The conductive layer 14 is patterned. In detail, the conductive pillar 12 is disposed on the first patterned conductive layer 1U, wherein the conductive pillar 12Q and the first patterned conductive layer 110 have a first interface S1. 13〇 is disposed on the first patterned conductive layer 110 and surrounds the side of the conductive pillar 12〇. The second patterned conductive layer 140 is disposed on the conductive pillar 12〇 and the insulating layer 130, wherein the second patterned conductive layer 140 is A second interface S2 ′ is disposed between the conductive pillars 12 且 and the second patterned conductive layer M 〇 is electrically connected to the first patterned conductive layer 110 through the conductive pillars 12 。. In addition, the circuit board of the embodiment 1 〇〇 Furthermore, an annular conductive layer 150 ′ is disposed, wherein the annular conductive layer 15 is disposed around the conductive pillar 120 and located between the insulating layer 13 〇 and the first patterned conductive layer 11 。. Details will be described below with reference to FIGS. 2A to 21 . The method of manufacturing the circuit board 100 will be described. In this embodiment, the same reference numerals are used to refer to the same or similar elements. FIG. 2A to FIG. 21 show the circuit board of one embodiment of the present invention in cross section. Referring to FIG. 2A, firstly, a carrier board 1 is provided, wherein the carrier board 10 includes a first release layer 12, a second release layer 14 and a first-destructive layer 12 and a first The core layer 16 between the two release layers 14. In this embodiment, the material of the first release layer 12 and the second release layer 14 is, for example, a cut conductive paste or a non-conductive paste containing material; or The material of the first and the release layer 12 and the second release layer 14 is, for example, nickel, and the material of the core layer 16 is, for example, steel or non-sense, which is not limited herein. Next, referring to FIG. 2B, a first conductive layer 110a and a second conductive layer are respectively formed on the (four) plane 0 of the carrier board 1G, wherein the first conductive layer 110a covers the first release layer 12, and the second conductive layer is wide. U〇b 201228509

/ /yiwi.doc/I 覆蓋第二離形層14。在本實施例中,形成第一導電層u〇a 與第二導電層l10b的方法例如是電鍍法。 在此必須說明的是,本發明並不限定第一導電層ll〇a 與第二導電層U〇b的結構形態,雖然此處所提及的第一導 電層110a與第二導電層11〇b具體化為完全覆蓋第一離形 層12與第案離形層14。但於其他未繪示的實施例中,第 導電層110a與第二導電層11 〇b亦可僅局部覆蓋第一離 •形層12與第案離形層14。也就是說,第-導電ϋΞ 第二導電層110b分別為一圖案化導電層。因此,圖2Β所 繪示之第一導電層U0a與第二導電層110b的結構型態僅 為舉例說明’並不以此為限。 接著’請參考圖2C,分別形成至少一第一導電柱12〇a (圖2C中僅示意地會是一個)以及至少一第二導電柱 120b (圖2C中僅示意地會是一個)於第一導電層1丨此上 與第二導電層11〇b上。特別是,在本實施例中,第一導電 ,12〇a與第一導電層n〇a之間具有一第一介面si,,而 第二導電柱120b與第二導電層110b之間具有一第二介面 =。此外,在本實施例中,形成第一導電柱12〇&與第二 V電柱120b的步驟包括先透過曝光顯影的方式形成圖案 化光阻層(未繪示),而後在透過電鍍法來電鍍一導電層 /未繪示)於第一導電層ll〇a與第二導電層ii〇b上,之 再移除圖案化光阻層,而完成第一導電柱12〇a與第二 V電柱12〇b的製作。特別是,本實施例並不限定第一導電 柱120a與第二導電柱懸的形狀,可例如是線狀或塊狀 11/ / yiwi.doc / I covers the second release layer 14 . In the present embodiment, the method of forming the first conductive layer u〇a and the second conductive layer 10b is, for example, an electroplating method. It should be noted that the present invention does not limit the structural form of the first conductive layer 11a and the second conductive layer U〇b, although the first conductive layer 110a and the second conductive layer 11 mentioned herein are b is embodied to completely cover the first release layer 12 and the first release layer 14. However, in other embodiments not shown, the first conductive layer 110a and the second conductive layer 11B may only partially cover the first and second release layers 12 and 14. That is, the first conductive ϋΞ second conductive layer 110b is a patterned conductive layer, respectively. Therefore, the structural forms of the first conductive layer U0a and the second conductive layer 110b illustrated in FIG. 2A are merely illustrative and are not limited thereto. Next, please refer to FIG. 2C, respectively forming at least one first conductive pillar 12〇a (only one schematically in FIG. 2C) and at least one second conductive pillar 120b (only one schematically in FIG. 2C). A conductive layer 1 is on the upper and second conductive layers 11b. In particular, in the embodiment, the first conductive layer 12a has a first interface si between the first conductive layer n〇a, and the second conductive pillar 120b and the second conductive layer 110b have a first interface Second interface =. In addition, in the embodiment, the step of forming the first conductive pillars 12 amp & and the second voltaic pillars 120 b includes forming a patterned photoresist layer (not shown) by exposure and development, and then performing the electroplating method. Electroplating a conductive layer / not shown on the first conductive layer 11a and the second conductive layer ii 〇 b, and then removing the patterned photoresist layer to complete the first conductive pillar 12 〇 a and the second V Production of electric column 12〇b. In particular, the embodiment does not limit the shape of the first conductive pillar 120a and the second conductive pillar, and may be, for example, a line or a block.

aoc/I 201228509 =能有利於1^頻率及高功率之晶片所需的減隔離及散 接,’請參考圖2D,提供一第一疊層結構 130a以及 二二豐層結構13Gb於第—導電層_上與第二導電層 洋細來說,第一疊層結構130a包括一第一絕緣 二:—#第—薄金屬層134a以及—第一厚金屬層136a’ Z /金屬層13如位於第一絕緣層132a與第一厚金 3之間。第二疊層結構13Gb包括-第二絕緣層 第一薄金屬層134b以及一第二厚金屬声^3615, 二薄金屬層⑽位於第二絕緣層132b/第二厚金 好绝田之間。在本實施例中’由於第—4層結構13〇a以 ΐΐίΐ結構13Gb分別具有第一厚金屬層咖以及第 展^ 13邰,因此可提供第一絕緣層132a、第二絕緣 ^上薄金屬層⑽以及第二薄金屬層⑽足夠 的支撐力。 %展H請參相2E,魏麵合的方式,分別將第一 登層4咖以及第二疊層結構⑽壓合於第一導電層 ^上—導電層UGb上其中第—疊層結構13如覆 =導電柱施與部分第一導電層u〇a,而第二疊層 ΐ直科Γ覆盘第二導電柱12%與部分第二導電層u〇b。 3體t說,第-絕緣層132a覆蓋第一導電桂論與部 分第-導電層l1Ga,而第二絕緣 2 1施與部分第二導電層⑽。第一薄金屬層^ 厚金屬層136a共形地配置於第一絕緣層咖上,而第二 12 201228509 JJ I /^iwi.doc/l 薄金屬層134b與第二厚金屬層136b共形地配置於第二絕 緣層132b上。Aoc/I 201228509 = can reduce the isolation and interconnection required for 1^ frequency and high power wafers, 'please refer to FIG. 2D to provide a first stacked structure 130a and a second and second layer structure 13Gb at the first conductive In the layer_upper and second conductive layers, the first stacked structure 130a includes a first insulating layer: a first thin metal layer 134a and a first thick metal layer 136a' Z / a metal layer 13 The first insulating layer 132a is between the first thick gold 3. The second stacked structure 13Gb includes a second insulating layer, a first thin metal layer 134b, and a second thick metal layer (36), and the second thin metal layer (10) is located between the second insulating layer 132b/the second thick metal layer. In the present embodiment, the first insulating layer 132a and the second insulating thin metal can be provided because the first four-layer structure 13Aa has the first thick metal layer and the third metal layer 13Gb respectively. The layer (10) and the second thin metal layer (10) have sufficient supporting force. % exhibition H please participate in the phase 2E, the way of the Wei face combination, respectively press the first layer 4 coffee and the second layer structure (10) on the first conductive layer ^ - the conductive layer UGb, wherein the first layer structure 13 For example, the conductive pillar is applied to a portion of the first conductive layer u〇a, and the second laminate is covered with a second conductive pillar 12% and a portion of the second conductive layer u〇b. The body 3 says that the first insulating layer 132a covers the first conductive layer and the portion of the first conductive layer l1Ga, and the second insulating layer 21 applies a portion of the second conductive layer (10). The first thin metal layer ^ thick metal layer 136a is conformally disposed on the first insulating layer, and the second 12 201228509 JJ I /^iwi.doc / l thin metal layer 134b is conformally formed with the second thick metal layer 136b It is disposed on the second insulating layer 132b.

在此必須說明的是’本發明並不限定第一疊層結構 130a以及一第二疊層結構130b的結構形態,於其他未繪 示的實施例中,第一疊層結構13〇a以及一第二疊層結構 130b亦可皆不具有第一厚金屬層i36a與第二厚金屬層 136b。也就是說,第一疊層結構13〇a亦可僅包括第一絕緣 層132a以及第一薄金屬層134a,其中第一薄金屬層134a 位於第一絕緣層132a上,且第一絕緣層132a覆蓋第一導 電柱120a與部分第一導電層11〇a。第二疊層結構13〇b亦 可僅包括第二絕緣層132b以及第二薄金屬層13仆,其中 第二薄金屬層134b位於第二絕緣層1321)上,且第二絕緣 f 132b覆蓋第二導電柱腿與部分第二導電層隱。簡 =之’圖2D與圖2E所繪示之第一疊層結構⑽以及一 j二疊層結構13Gb的結構形態僅鱗例朗,並不以此為 ’請同時參考圖2E與圖2F ’分別移除部分第一 且層、、,。構130a以及部分第二疊層結構13% ::電f12〇a與第二導電柱-…來說,= 笛的步驟,首先,透過例如是剝離法(lift-off)來^ 第一厚金屬層136a以及第二厚金屬層136b,以暴露出第 :薄金屬層134a以及第二薄金屬層mb。接著',、透^ 磨法(例如是刷磨法)來移除部分第_薄金制134a與部 13 201228509』 分第二薄金屬層134b至暴露出第一導電柱120a與第二導 電柱120b,以分別形成環繞第一導電柱u〇a與第二導電 柱120b的一第—環狀導電層15〇a以及一第二環狀導電層 150b。 接著,請參考圖20,透過電鍍的方式,形成一第三 導電層140a於剩餘的第一疊層結構13〇a (意即第一絕緣 層132a以及第—環狀導電層15〇a)與第一導電柱12〇&上, 以及形成一第四導電層14〇b於第二疊層結構13〇b (意即 第一絶緣層132b以及第二環狀導電層15〇b)與第二導電 柱12〇b上。特別是,在本實施例中,第三導電層140a與 第-導電柱120a之間具有一第三介面S3,而第四導電層 140b與第二導電柱12%之間具有—第四介面§4。 接著,凊參考圖2H,藉由一剝離力道以分離第一導 電層llGa與第—離形層12之間的介面以及第二導電層 l)〇b與第—離㈣14之間的介面,而移除承載板^,而 形成相互分離的—第一線路板單元l〇〇a以及-第二線路 ΐ單元祕’其中移除承載板後所形成之第-線路板 早π 100a與第二線路板單元嶋為相對稱之結構。更且 體來說,第一線路板單元l〇〇a依序包括第-導電層110a、 第導電柱120a、包圍第一導電柱12〇a側面的 ^32。位於第—絕緣層⑽上且環繞第—導電柱;施 、第^狀導電層15Ga以及位於第-環狀導電層15〇a上 =第二導電層140a。第二線路板單元1_依序包括第二 導電層11Gb、第二導電柱腿、包圍第二導電柱隱側 201228509It should be noted that the present invention does not limit the configuration of the first laminate structure 130a and the second laminate structure 130b. In other embodiments not shown, the first laminate structure 13A and The second stacked structure 130b may also not have the first thick metal layer i36a and the second thick metal layer 136b. That is, the first stacked structure 13A may also include only the first insulating layer 132a and the first thin metal layer 134a, wherein the first thin metal layer 134a is located on the first insulating layer 132a, and the first insulating layer 132a The first conductive pillar 120a and a portion of the first conductive layer 11〇a are covered. The second laminated structure 13b may also include only the second insulating layer 132b and the second thin metal layer 13, wherein the second thin metal layer 134b is located on the second insulating layer 1321), and the second insulating layer 132b covers the second The two conductive pillar legs are partially hidden from the second conductive layer. The structure of the first laminated structure (10) and the one-two laminated structure 13Gb shown in FIG. 2D and FIG. 2E is only a scale, and is not referred to as 'Please refer to FIG. 2E and FIG. 2F at the same time. Remove part of the first and layer, respectively,. The structure 130a and a part of the second laminated structure 13%::electric f12〇a and the second conductive column-..., the step of the flute, firstly, by, for example, lift-off, the first thick metal The layer 136a and the second thick metal layer 136b expose the first thin metal layer 134a and the second thin metal layer mb. Then, a part of the first thin metal layer 134b is removed to expose the first conductive pillar 120a and the second conductive pillar by a grinding method (for example, a brushing method) to remove a portion of the thin metal 134a and the portion 13 201228509 120b, to respectively form a first annular conductive layer 15Aa and a second annular conductive layer 150b surrounding the first conductive pillars u〇a and the second conductive pillars 120b. Next, referring to FIG. 20, a third conductive layer 140a is formed by electroplating on the remaining first stacked structures 13A (that is, the first insulating layer 132a and the first-shaped conductive layer 15A). a first conductive pillar 12 〇 & and a fourth conductive layer 14 〇 b formed on the second stacked structure 13 〇 b (that is, the first insulating layer 132 b and the second annular conductive layer 15 〇 b) Two conductive columns 12〇b. In particular, in the present embodiment, the third conductive layer 140a and the first conductive pillar 120a have a third interface S3, and the fourth conductive layer 140b and the second conductive pillar 12% have a fourth interface. 4. Next, referring to FIG. 2H, a peeling force is used to separate the interface between the first conductive layer 11Ga and the first-away layer 12 and the interface between the second conductive layer 1) 〇b and the first-to-four (four) 14. Removing the carrier board ^ to form mutually separated ones - the first circuit board unit 10a and the second circuit board unit secrets - wherein the first circuit board formed after removing the carrier board is π 100a and the second line The board unit is a symmetrical structure. More specifically, the first circuit board unit 10a sequentially includes a first conductive layer 110a, a first conductive pillar 120a, and a ^32 surrounding the side of the first conductive pillar 12A. It is located on the first insulating layer (10) and surrounds the first conductive pillar; the applied conductive layer 15Ga and the first annular conductive layer 15〇a = the second conductive layer 140a. The second circuit board unit 1_ sequentially includes a second conductive layer 11Gb, a second conductive pillar, and a second conductive pillar hidden side 201228509

IIP iwx.doc/I 面的第二絕緣層132b、位於第二絕緣層132b上且環繞第 一導電桂120b的苐一環狀導電層15〇b以及位於第二環狀 導電層150b上的第四導電層140b。 接著,請參考圖21,圖案化第一導電層丨1〇a、第二導 電層110b、第二導電層14〇a、第四導電層i4〇b、第一環 狀導電層150a以及第二環狀導電層15%,以形成一第一 圖案化導電層l10a,、一第二圖案化導電層u〇b,、一第三 圖案化導電層140a’、一第四圖案化導電層yob,、第一 圖案化環狀導電層15〇a,以及第二圖案化環狀導電層 50b 至此,以元成一個線路板l〇〇a’、i〇〇b,的製作。a second insulating layer 132b on the IIP iwx.doc/I surface, a first annular conductive layer 15〇b on the second insulating layer 132b and surrounding the first conductive surface 120b, and a second on the second annular conductive layer 150b Four conductive layers 140b. Next, referring to FIG. 21, the first conductive layer 丨1〇a, the second conductive layer 110b, the second conductive layer 14A, the fourth conductive layer i4〇b, the first annular conductive layer 150a, and the second are patterned. The annular conductive layer is 15% to form a first patterned conductive layer 110a, a second patterned conductive layer u〇b, a third patterned conductive layer 140a', and a fourth patterned conductive layer yob. The first patterned annular conductive layer 15A, and the second patterned annular conductive layer 50b are hereby formed into a circuit board 10a', i〇〇b.

、/值得一提的是,本發明並不限定圖案化導電層的步驟 必須於移除承載板10之後’於其他未繪示的實施例中,亦 於移除承載板1G之前,紉第三導電層14Qa以及第四導 電層140b進行圖案化製程,來形成第三圖案化導電層 140a’與第四圖案化導電層14%,。當然,亦可於移除承載 板1〇之前,更於第三導電層140a與第四導電層14〇b上進 =增層線路層的製作。也就是說’上述所述之實施例僅為 舉例說明’並不以此為限。 當然,於其他未繪示的實施例中,使用者亦可自行選 用於如上述實施例所提及之方式,來增加導電層與導電柱 的數量,本領域的技術人S當可參照上述實施例的說明, 依據實際S求’搭配翻前述所述之構件,以制所需的 技術效果。 综上所述,本發明之線路板是直接於導電層上電鍍形 15It is worth mentioning that the present invention does not limit the step of patterning the conductive layer after the carrier board 10 is removed. In other embodiments not shown, before the carrier board 1G is removed, the third is The conductive layer 14Qa and the fourth conductive layer 140b are patterned to form a third patterned conductive layer 140a' and a fourth patterned conductive layer 14%. Of course, before the carrier board 1 is removed, the fabrication of the build-up wiring layer is further performed on the third conductive layer 140a and the fourth conductive layer 14B. That is to say, the above-mentioned embodiments are merely illustrative and are not limited thereto. Of course, in other embodiments not shown, the user may also choose to increase the number of conductive layers and conductive pillars as mentioned in the above embodiments, and those skilled in the art can refer to the above implementation. For the description of the example, according to the actual S, the component is turned over to make the required technical effect. In summary, the circuit board of the present invention is plated directly on the conductive layer.

201228509 〜i.doc/I 過電二 ::::::板r方法:減少柱 -稃定進而降低產°σ的成本。此外,本發明利用 板ΐΐΐ 在單—製程中製作出兩個薄板的線路 L ΪΙ線路板在製作薄板時由於承載板不穩定而造 成良率損失之製作成本。 雖然本發明已以實施例揭露如上,然其並非用以限定 本發明,任何所屬技術領域中具有通常知識者,在不脫離 本發明之精神和範圍内,當可作些許之更動與潤飾,故本 發明之保護範圍當視後附之申請專利範圍所界定者為準。 【圖式簡單說明】 圖1為本發明之一實施例之一種線路板的剖面示意 圖。 圖2Α至圖21以剖面繪示本發明之一實施例之一種線 路板的製作方法。 【主要元件符號說明】 10 .承載板 12 .第一離形層 14 :第二離形層 201228509201228509 ~i.doc/I Over-current 2:::::Board r method: reduce the column - determine and reduce the cost of production σ. In addition, the present invention utilizes the board to produce two thin-plate lines in a single-process process. The L ΪΙ circuit board causes a yield loss due to the instability of the carrier board when the thin board is fabricated. Although the present invention has been disclosed in the above embodiments, it is not intended to limit the invention, and any one of ordinary skill in the art can make some modifications and refinements without departing from the spirit and scope of the invention. The scope of the invention is defined by the scope of the appended claims. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic cross-sectional view showing a wiring board according to an embodiment of the present invention. 2A to 21 are cross-sectional views showing a method of fabricating a circuit board according to an embodiment of the present invention. [Description of main component symbols] 10. Carrier plate 12. First release layer 14: Second release layer 201228509

jj i /^iwi.doc/I 16 :核心層 100、100a’、100b’ :線路板 100a ··線路板單元 100b :線路板單元 110 :第一圖案化導電層 110a :第一導電層 110a’ :第一圖案化導電層 110b :第二導電層 — 110b’ :第二圖案化導電層 120 :導電柱 120a :第一導電柱 120b :第二導電柱 130 :絕緣層 130a :第一疊層結構 130b :第二疊層結構 132a :第一絕緣層 • 132b:第二絕緣層 134a ··第一薄金屬層 134b :第二薄金屬層 136a:第一厚金屬層 136b :第二厚金屬層 140 :第二圖案化導電層 140a :第三導電層 140a’ :第三圖案化導電層 17 201228509Jj i /^iwi.doc/I 16 : core layer 100, 100a', 100b': circuit board 100a · circuit board unit 100b: circuit board unit 110: first patterned conductive layer 110a: first conductive layer 110a' The first patterned conductive layer 110b: the second conductive layer - 110b': the second patterned conductive layer 120: the conductive pillar 120a: the first conductive pillar 120b: the second conductive pillar 130: the insulating layer 130a: the first laminated structure 130b: second stacked structure 132a: first insulating layer • 132b: second insulating layer 134a • first thin metal layer 134b: second thin metal layer 136a: first thick metal layer 136b: second thick metal layer 140 : second patterned conductive layer 140a : third conductive layer 140 a ′ : third patterned conductive layer 17 201228509

/ /yiwi.doc/I 140b :第四導電層 140b’ :第四圖案化導電層 150 :環狀導電層 150a :第一環狀導電層 150b :第二環狀導電層 150a’ :第一圖案化環狀導電層 150b’ :第二圖案化環狀導電層 51、 S1’ :第一介面 52、 S2’ :第二介面 53 :第三介面 54 :第四介面/ / yiwi.doc / I 140b: fourth conductive layer 140b': fourth patterned conductive layer 150: annular conductive layer 150a: first annular conductive layer 150b: second annular conductive layer 150a': first pattern The annular conductive layer 150b': the second patterned annular conductive layer 51, S1': the first interface 52, S2': the second interface 53: the third interface 54: the fourth interface

1818

Claims (1)

.oc/1 201228509 七、申請專利範圍: 1. 一種線路板的製作方法,包括: 鮮f供—承載板’該錢板包括—第―轉層、-第-从—配置於糾—離形層與該第二離形層之^ 分別形成一第一導電;一势_道 板的該第-離形層與該第二;^層電層於該承载 分別形成至少-第-導電柱以及至少—第 一導電層上與該第二導電層上,其―: =第—導電層之間具有1—介面,而該第二導it 5亥第二導電層之間具有一第二介面; 柱,、 第-^^合二第―疊層結構以及—第二疊層結構於該 一 曰上與遠第二導電層上,其中該第—疊層费 ίΐ二導=:分該第一導電層,而該“ 3~jna-〇A ^一導電柱與部分該第二導電層; 分別移除部分該第-疊層結構以及部分該第二 '、、。構’至暴露㈣第-導妹與該第二導電柱;^ 分別形成一第三導電層以及一第四導電層於剩餘 邊苐-疊層結構與該第-導電柱上餘 層結構與該第二導電柱上,其中該第三導== 電柱之間具有_第三介面’而該第四導電層與該第 柱之間具有一第四介面;以及 藉由一剝離力道以分離該第一導電層與該第— 曰之間的介面以及該第二導電層與該第二離形層之間的^ 19 201228509 / / ^VWJL, d〇c/I 面’而移除該承載板。 2·如申請專利範圍第1項所述之線路板的製作方 法,其中該第一疊層結構包括一第一絕緣層、一第一薄金 屬層以及一第一厚金屬層,該第一薄金屬層位於該第一絕 緣層與該第一厚金屬之間,且該第一絕緣層覆蓋該第一導 電柱與部分該第一導電層,該第二疊層結構包括一第二絕 緣層、一第二薄金屬層以及一第二厚金屬層,該第二薄金 屬層位於該第二絕緣層與該第二厚金屬之間,且該第二絕 緣層覆蓋該第二導電柱與部分該第二導電層。 、3·如申請專利範圍第2項所述之線路板的製作方 法,其中移除部分該第—疊層結構以及部分該第二疊層結 構的步驟,包括: 10 該第—厚金屬層以及該第二厚金制,以暴露出 该第—溥金屬層以及該第二薄金屬層;以及 第-導電柱導餘,时卿成環燒該 二環狀導電層電柱的—第—環狀導電層以及一第 4. 如申請專利範圍第3 法,其中移除該第一厚金屬層 包括剝離法。 5. 如申請專利範圍第3 法’其中部分該第-薄金屬層 法包括研磨法。 項所述之線路板的製作方 以及該第二厚金屬層的方法 項所述之線路板的製作方 與部分該第二薄金屬層的方 201228509 / / ^iwi.d〇c/I 口申凊專利範圍第1項所述之線路板的製作方 =:中形成該第-導餘與該第二導電柱的方法包括電 7甘如申請專利範圍帛"員所述之線路板的製作方 感Z、中該第一疊層結構包括一第一絕緣層以及一第一薄 金屬層,該第-薄金屬層位於該第一絕緣層上,且二 絕緣層覆蓋該第—導電柱與部分該第.oc/1 201228509 VII. Scope of application for patents: 1. A method for fabricating a circuit board, comprising: a fresh f-bearing board' the money board includes - a "transfer layer", a - a - slave - configuration in the correction - off-shape The layer and the second release layer respectively form a first conductive; the first-de-shaped layer of the potential-channel plate and the second layer of the electrical layer respectively form at least a first-conductive pillar and At least—the first conductive layer and the second conductive layer have a 1-interface between the “:=first conductive layer, and a second interface between the second conductive layer and the second conductive layer; a pillar, a first-two-layer-stacked structure, and a second stacked structure on the top and the far second conductive layer, wherein the first stacking cost = two points =: the first a conductive layer, and the "3~jna-〇A^-a conductive pillar and a portion of the second conductive layer; respectively removing a portion of the first-stacked structure and a portion of the second ', 'construction' to the exposed (four)- And a second conductive layer and a fourth conductive layer respectively formed on the remaining side-layer structure and the first conductive pillar And a structure of the second conductive pillar, wherein the third conductive layer has a third interface between the fourth conductive layer and the fourth conductive layer and the fourth conductive layer; and a peeling force is used Separating the interface between the first conductive layer and the first conductive layer and the surface of the second conductive layer and the second conductive layer between the second conductive layer and the second conductive layer The method of manufacturing the circuit board according to the first aspect of the invention, wherein the first laminated structure comprises a first insulating layer, a first thin metal layer and a first thick metal layer, a first thin metal layer is disposed between the first insulating layer and the first thick metal, and the first insulating layer covers the first conductive pillar and a portion of the first conductive layer, and the second stacked structure includes a second An insulating layer, a second thin metal layer, and a second thick metal layer, the second thin metal layer is between the second insulating layer and the second thick metal, and the second insulating layer covers the second conductive pillar And a portion of the second conductive layer. 3. The circuit board according to claim 2 The manufacturing method, wherein the step of removing a portion of the first laminate structure and a portion of the second laminate structure comprises: 10 the first thick metal layer and the second thick metal layer to expose the first germanium metal layer And the second thin metal layer; and the first conductive pillar of the first conductive pillar, and the second annular conductive layer of the second annular conductive layer, and the fourth method, wherein Removing the first thick metal layer includes a lift-off method. 5. The method according to claim 3, wherein the portion of the first-thin metal layer method comprises a grinding method, the maker of the circuit board described in the item, and the second thick metal The manufacturer of the circuit board described in the method of the layer and the side of the second thin metal layer 201228509 / / ^iwi.d〇c / I port of the patent application described in the first paragraph of the patent range = The method of forming the first-conductor and the second conductive pillar includes: a method 7 of applying a circuit as described in the patent application, and the first laminated structure includes a first An insulating layer and a first thin metal layer, the first thin metal layer is located A first insulating layer, and a second insulating layer covering the first - and the portion of the first conductive pillar 包括:第二絕緣層以及-第二薄金屬層,該匕 道带2位於该第二絕緣層上,且該第二絕緣層覆蓋該第二 導電柱與部分該第二導電層。 、8.如申請專利範圍第7項所述之線路板的製作方 法’其中移除部分該第—疊層結構以及部分該第二疊層結 構的步驟,包括: I移除,分該第—薄金屬層與部分該第二薄金屬層至 ,路出β第—導電检與該第二導電柱,以分別形成環繞該 V電柱與該第二導電柱的一第一環狀導電層以及一第 二環狀導電層。 、9.如申請專利範圍第8項所述之線路板的製作方 /去其中部分該第一薄金屬層與部分該第二薄金屬層的方 法包括研磨法。 、10.如申請專利範圍第1項所述之線路板的製作方 去’其中s亥第一離形層與該第二離形層的材質為含矽的導 電膠或含矽的非導電膠。 如申請專利範圍第1項所述之線路板的製作方 21 u〇c/I 201228509 法,其中該第一離形層與該第二離形層的材質為鎳,而該 核心層的材質為銅或不鎮鋼。 12. 如申請專利範圍第1項所述之線路板的製作方 法,更包括: 於移除該承載板之前,分別形成一增層線路層於該第 一疊層結構上以及該第二疊層結構上。 13. 如申請專利範圍第1項所述之線路板的製作方 法,其中形成於該承載板之該第一離形層與該第二離形層 上的該第一導電層與該第二導電層分別為一圖案化導電 層,且於藉由該剝離力道以分離該第一導電層與該第一離 形層之間的介面以及該第二導電層與該第二離形層之間的 介面,而移除該承載板之前,圖案化該第三導電層及該第 四導電層,以形成一第三圖案化導電層及一第四圖案化導 電層。 14. 如申請專利範圍第1項所述之線路板的製作方 法,更包括: 藉由該剝離力道以分離該第一導電層與該第一離形 層之間的介面以及該第二導電層與該第二離形層之間的介 面,而移除該承載板之後,圖案化該第一導電層、該第二 導電層、該第三導電層及該第四導電層,以形成一第一圖 案化導電層、一第二圖案化導電層、一第三圖案化導電層 及一第四圖案化導電層。 15. —種線路板,包括: 一第一圖案化導電層; 22 201228509" w * I / 如 ” t.doc/I 一導電柱,配置於該第一圖案化導電層上,其中該導 電柱與該第一圖案化導電層之間具有一第一介面; 一絕緣層,配置於該第一圖案化導電層上,且包圍該 導電柱的側面;以及 一第二圖案化導電層,配置於該導電柱與該絕緣層 上,其中該第二圖案化導電層與該導電柱之間具有一第二 介面,且該第二圖案化導電層透過該導電柱與該第一圖案 化導電層電性連接。 16.如申請專利範圍第15項所述之線路板,更包括一 環狀導電層,環繞該導電柱設置且位於該絕緣層與該第一 圖案化導電層之間。 23The second insulating layer and the second thin metal layer are disposed on the second insulating layer, and the second insulating layer covers the second conductive pillar and a portion of the second conductive layer. 8. The method of fabricating a circuit board according to claim 7, wherein the step of removing a portion of the first laminate structure and a portion of the second laminate structure comprises: Forming a thin metal layer and a portion of the second thin metal layer to detect the second conductive pillar to form a first annular conductive layer surrounding the V-electrode and the second conductive pillar, and a A second annular conductive layer. 9. The method of fabricating a circuit board as described in claim 8 of the invention or the method of removing a portion of the first thin metal layer and a portion of the second thin metal layer comprises a grinding method. 10. The manufacturer of the circuit board according to item 1 of the patent application scope is characterized in that the first release layer and the second release layer are made of a conductive paste containing bismuth or a non-conductive paste containing bismuth. . The method for manufacturing a circuit board according to claim 1, wherein the first release layer and the second release layer are made of nickel, and the core layer is made of nickel. Copper or not steel. 12. The method of fabricating the circuit board of claim 1, further comprising: forming a build-up wiring layer on the first laminate structure and the second laminate before removing the carrier plate Structurally. 13. The method of fabricating a circuit board according to claim 1, wherein the first conductive layer and the second conductive layer formed on the first release layer and the second release layer of the carrier plate The layers are respectively a patterned conductive layer, and the separation between the first conductive layer and the first release layer and the second conductive layer and the second release layer are separated by the stripping force The third conductive layer and the fourth conductive layer are patterned to form a third patterned conductive layer and a fourth patterned conductive layer before the carrier is removed. 14. The method of fabricating a circuit board according to claim 1, further comprising: separating the interface between the first conductive layer and the first release layer and the second conductive layer by the peeling force After the interface between the second release layer and the second release layer is removed, the first conductive layer, the second conductive layer, the third conductive layer and the fourth conductive layer are patterned to form a first a patterned conductive layer, a second patterned conductive layer, a third patterned conductive layer and a fourth patterned conductive layer. 15. A circuit board comprising: a first patterned conductive layer; 22 201228509 " w * I / such as t.doc/I a conductive pillar disposed on the first patterned conductive layer, wherein the conductive pillar Between the first patterned conductive layer and a first interface; an insulating layer disposed on the first patterned conductive layer and surrounding the side of the conductive pillar; and a second patterned conductive layer disposed on The conductive pillar and the insulating layer, wherein the second patterned conductive layer and the conductive pillar have a second interface, and the second patterned conductive layer is electrically transmitted through the conductive pillar and the first patterned conductive layer The circuit board of claim 15, further comprising an annular conductive layer disposed around the conductive pillar and located between the insulating layer and the first patterned conductive layer.
TW99146764A 2010-12-30 2010-12-30 Circuit board and manufacturing method thereof TWI406621B (en)

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CN105451471A (en) * 2014-06-19 2016-03-30 健鼎(无锡)电子有限公司 Multilayer circuit board manufacturing method

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JP3682500B2 (en) * 2001-04-16 2005-08-10 日本重化学工業株式会社 Printed wiring board and method for manufacturing printed wiring board
CN100334929C (en) * 2002-05-21 2007-08-29 株式会社大和工业 Interlayer connection structure and its building method
JP4247880B2 (en) * 2002-12-24 2009-04-02 Tdk株式会社 Manufacturing method of electronic parts
KR100674319B1 (en) * 2004-12-02 2007-01-24 삼성전기주식회사 Manufacturing method of printed circuit board having thin core layer
TWI311035B (en) * 2005-12-29 2009-06-11 Subtron Technology Co Ltd Process and structure of printed wiring board

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105451471A (en) * 2014-06-19 2016-03-30 健鼎(无锡)电子有限公司 Multilayer circuit board manufacturing method
CN105451471B (en) * 2014-06-19 2018-03-27 健鼎(无锡)电子有限公司 The preparation method of multilayer circuit board

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