TW201227021A - Optical waveguide and electronic machine - Google Patents

Abstract

An optical waveguide includes a core layer having both surfaces and cladding layers provided on the both surfaces of the core layer, respectively. Further, the core layer includes two core portions arranged side by side to each other and three side cladding portions arranged side by side to one another so that each of the core portions and each of the side cladding portions are alternately arranged therein. Further, the optical waveguide is configured such that when a light signal is entered to the one core portion CH1 at one end thereof, intensity of leaked light observed at the side cladding portion CL2 at the other end thereof, which is arranged so as to adjoin to the other core portion CH2 at the opposite side with respect to the core portion CH1, is higher than that observed at the core portion CH2 at the other end thereof. In other words, in this case, an intensity distribution of output light at the other end of the optical waveguide includes maximum values which are observed at the core portion CH1 and the side cladding portion CL2, respectively, and a minimum value which is observed at the core portion CH2.

Description

201227021 ^fuuiopif VI. Description of the Invention: [Technical Field of the Invention] The present invention relates to an optical waveguide and an electronic device. [Prior Art] In recent years, the spread of large-capacity lines (wideband) that can be used at high speed with large-capacity information and informationized waves is advancing. Further, the transmission device is a transmission device such as a router device or a Wavelength Division Multiplexing (WDM) device. In the above-mentioned transmission device, a signal processing substrate in which an arithmetic element such as a large-scale integrated circuit (LSI) or a memory element such as a hybrid is spliced is provided in each of the transmission devices. Connected to each other. In each signal processing board, a circuit in which an arithmetic element or a memory element is connected by a gas line is constructed. However, in recent years, as the amount of information to be processed is large, each substrate is required to transmit information with an extremely high throughput. . However, with the increase in the speed of information transmission, problems such as crosstalk or high frequency noise generation and deterioration of electrical signals are emerging. @This causes electrical wiring to become a bottleneck, and it becomes difficult to increase the throughput of the processing substrate. In addition, the same subject is appearing in the supercomputer or the large-scale (four). On the other hand, an optical communication technique for transferring data using an optical carrier has been developed. In recent years, a mechanism for guiding the optical carrier from one location to another f has been popularized. The optical waveguide has a linear core and a covering portion provided to cover the periphery thereof. The core is made of a material that is substantially transparent to the light of the optical carrier, and the covering portion is formed by the end of the core from the end of the core by the refractive index 4 201227021 40018 pif rate lower than the material of the core. The light is transported to the other end while being reflected by the boundary of the cover. A semiconductor bar light-emitting element is disposed on the incident side of the optical waveguide, and a light-transmitting TO element such as a photodiode is disposed on the emission side. The light incident from the light-emitting element propagates through the light guide tube, is received by the light-receiving member, and communicates based on the bright-out pattern of the received light or its strong and weak pattern. By replacing the electric wiring in the signal processing substrate with the optical waveguide as described above, the problem of the electric wiring as described above is eliminated, and further high processing quantization of the signal processing substrate is expected. In addition, the demand for increasing the capacity of optical waveguides has recently increased, and further multi-channelization and higher density have been sought. When the multi-channelization and the high-density are performed, the pitch of the channels (cores) becomes narrower, and along with this, the generation of crosstalk (leakage light from one channel interferes with adjacent channels) becomes a major problem. [Prior Art] [Patent Document 1] [Patent Document 1] Japanese Patent Application Laid-Open No. Hei. No. 2006-276735. SUMMARY OF THE INVENTION An object of the present invention is to provide an optical waveguide capable of suppressing interference (crosstalk) between adjacent channels, And an electronic machine including the optical waveguide. The above object is achieved by the present invention of the following (1). (1) An optical waveguide comprising: a plurality of core portions juxtaposed, and a covering portion adjacent to at least two side faces of the respective core portions; the optical waveguide is characterized in that: The i required in the core as the core cm will be with the heart. The 卩CH1 is adjacent to the core portion CH2, and the above-mentioned plurality of covering portions are located between the core portion CH1 and the core portion CH2 as a covering portion (1), and the above-mentioned covering portion located in the core portion CH2 When the opposite side of the CL1 is used as the covering portion CL2, the core portion of the optical waveguide tube emits a human light signal, and the optical signal leaking from the optical signal observed at the other end of the covering portion CL2 leaks light. The intensity becomes greater than the intensity of the above-mentioned leaked light observed by the core CH2. /2) The optical waveguide according to the above (1), wherein the observation is made in the end face of the other end of the optical waveguide The intensity of the emitted light at the position of the end surface has a maximum value in the above-mentioned surface portion CL2, and has a minimum value smaller than the maximum value in the core portion CH2. (3) The optical waveguide as described in the above (2) a tube in which the intensity difference between the maximum value in the above-mentioned cladding portion CL2 and the above-described minimum value in the core portion ch2 is 3 dB to 20 dB. (4) The optical waveguide as described in (2) or (3) above a tube in which the intensity of the above-mentioned optical signal observed in the above-described core portion CH1 is The above-mentioned maximum value in the above-mentioned covering portion CL2 is -60 dB to -20 dB. The optical waveguide according to any one of (2) to (4) above, wherein the above-mentioned covering portion CL2 is used The difference between the intensity of the maximum value and the minimum value in the core portion CH2 is gl, and the intensity of the optical signal observed by the 6 201227021.f -rwiuyil in the core portion CH1 is in the core portion CH2. When the intensity difference of the minimum value is set to g2, gl/g2 satisfies the relationship of 〇〇5 to 〇5. (6) The optical waveguide according to any one of (2) to (5) above, wherein The intensity distribution of the emitted light is continuously changed with respect to the position of the end surface. The optical waveguide according to any one of the above (1), wherein the width of each of the core portions is 2 〇 μιη (8) A light guide tube comprising: a first slope coating; a core layer disposed on the first cladding layer, wherein the first core portion cm is formed in the layer in the following order 1 a covering portion CL1, a second core portion CH2, and a second covering portion CL2; and a second slope coating layer provided on the core layer; the optical waveguide is characterized by When the light of the first core portion CH1 incident on one end of the optical waveguide is emitted as the outgoing light from the other end, the light is transmitted through the first core portion CH1 and the first cladding portion cu. In the intensity distribution of the emitted light obtained in the region of the second core portion CH2 and the second covering portion (1), the intensity of the emitted light in the second core portion CH2 becomes smaller than the second coating The intensity of the light emission in the portion CL2. (9) An electronic device comprising the optical waveguide according to any one of the above (1) to (8). [Effect of the Invention] 201227021 The optical invention of 4UU18pif obtains an electric light guide tube capable of suppressing interference (crosstalk) between adjacent channels. The optical waveguide is highly reliable as described above. [Embodiment] The preferred embodiment of the present invention will be described in detail with respect to the pilot t and the electronic device of the present invention. <Optical waveguide> First, the light guide α of the present invention is not shown in the figure: (the embodiment of the core of the partially cut optical waveguide is shown in Fig. 1 as an example). In the following, the intensity distribution of the reduction and decrease is "up", and the lower side is referred to as "lower" 1 'the upper side of 11 1 is referred to as (the vertical direction of each figure). The thickness direction of the technical layer is shown in FIG. The optical waveguide 1 transmits the optical wiring of the optical signal and sends each from the end to the other end. The line is detailed. The special/skin tube 1 is covered by the cladding in Figure 1. The layer is formed by laminating 12 in the following order. The day 13 and the cladding layer (the second cladding layer) are suppressed according to the optical waveguide described later, and interference between the adjacent channels (crosstalk) can be realized. The light guide tube 1 having the high light transmission characteristic 8 201227021 40018pif property (the first effect). The optical waveguide of the present embodiment is in the width direction (layer) The inner direction) has a refractive index distribution w as described later. The refractive index distribution w has a pole with a first maximum value interposed therebetween. Since the value is small, a large refractive index difference is formed between the core portion and the other portion, whereby light becomes difficult to leak from the core portion. In addition, the second largest portion smaller than the i-th maximum value is located in the coating portion. Therefore, even if the light leaks from the core portion, the leaked light is sealed to the second maximum value of the other portion. Thereby, the crosstalk of the core portion adjacent in the width direction is obtained, and the light guide of the present embodiment is additionally provided. The waveguide 1 also has a refractive index distribution τ as described later in the thickness direction (interlayer direction). In the refractive index distribution τ, a maximum value and a minimum value are intersected (four) columns, and the maximum Α value is the ith maximum value. And the distribution type eight cloth which is smaller than the second maximum value (four). If it is the cloth of this age, the effect of the light seal of the batch is superior to that of the step index (SI) type. The generation of the transmission loss is effectively suppressed, and the reason for the fact that the transmission loss is effective is not necessarily clear, but it is generally considered that the reason is that the leakage of light from the loyalty department is effectively suppressed by the w-type rate distribution. In the optical waveguide i of the embodiment, based on the w-type refractive s distribution T, it is covered. A fixed light-sealing effect is also obtained in the layer (the second effect, therefore, in the light-guide tube 1, the load can be leaked out in the direction of the side of the woman) and the light leaking in the thickness direction can be sealed as In the meantime, the crosstalk can be surely performed in both the width direction and the thickness direction. 201227021 . ~Γ\/ν/ 1 upif In addition, the design of the optical waveguide i of the present embodiment has a high degree of freedom ( Third effect. The optical waveguide 1 of the present embodiment is formed by laminating a film, for example, but the thickness of the cladding layer can be arbitrarily determined by the relationship with the thickness of the core layer and since the thickness can be strictly controlled. Therefore, the effect of reducing the optical coupling loss can be maximized. Further, when the optical waveguide tube is bent, a compressive force is applied to the inner side of the bent portion, and a tensile force is applied to the outer side, and accordingly, there is The case where the refractive index has changed as a last resort. In the optical waveguide tube, based on such bending, the design of the thickness of the other layer sandwiching the core layer can be easily made. (Core Layer) In the core layer 13, two core portions 14 which are juxtaposed in the width direction and three side surface covering portions 15 which are juxtaposed so as to sandwich the core portions 14 are formed. Further, the core portions 14 shown in FIG. 1 are marked with dense dots, and the side surface covering portions 15 are marked with sparse dots. More specifically, the two core portions 141 (the first core portion CH1) and the 142 (the second core portion CH2) which are arranged in parallel are alternately provided on the core layer 3 shown in FIG. Parts 151, 152 (first covering portion CL1) and 153 (second covering portion CL2). Thereby, each of the core portions 14 and 142 is surrounded by the respective side covering portions 151, 152, and 153 and the respective covering layers 11 and π. Here, since the refractive indices of the core portions 14 and 142 are higher than the refractive indices of the side cladding portions 151, 152, and 153 and the refractive indices of the respective cladding layers η and 12, the core portions hi and 142 may be formed. The reflection of light is generated at the interface with each of the side cladding portions 151, 152, 153 or the respective cladding layers Π, 12. 10 201227021 40018pif Further, light incident on one end portion of the core portion 14 is reflected while being reflected by the interface between the core portion 14 and the covering portion (the respective covering layers 11 and 12 and the respective side surface portions 15) The other end portion ' can be taken out from the other end of the core portion 14. In addition, the core portion 14 shown in FIG. 1 has a quadrangular shape (rectangular shape) such as a square or a rectangle, but the shape is not particularly limited, and may be, for example, a circle such as a true circle, an ellipse, or an oblong shape. Polygons such as triangles, pentagons, hexagons, etc. Further, the width and height of the core portion 14 (the thickness of the core layer 13) are not particularly limited, and are preferably about 20 μm to about 200 μm, more preferably about 25 μm to about 100 μm, and even more preferably 30 μm to 70 μm. about. Here, when one light is incident on one end portion of one of the plurality of core portions 141 and 142 of the optical waveguide 1 shown in FIG. 1, the intensity distribution of the outgoing light at the other end portion is obtained. At Ρ 1, the intensity distribution exhibits a characteristic distribution. Fig. 2 is a view showing the intensity distribution Ρ1 of the outgoing light when the light is incident on the core portion ι 41 of the optical waveguide 1 shown in Fig. 1 to indicate the width of the exit side end face of the core layer 13 on the horizontal axis. A diagram showing an example of the intensity distribution when the intensity of the light is extracted on the vertical axis at the position of the direction. When light is incident on the core portion 141 (CH1), the intensity of the emitted light becomes maximum at the center portion of the exit end of the core portion 141. Further, as the intensity of the emitted light becomes smaller as it is away from the central portion of the core portion 141, a small value is locally taken in the core portion 142 (CH2) adjacent to the core portion 141. That is, the intensity distribution Ρ1 of the emitted light at this time takes the maximum value Pml at the center 11 201227021 nuuiopif portion of the exit end of the core portion 141 (CH1), and takes the minimum value Ps1 at the core portion 142 (CH2). According to the optical waveguide tube having the intensity distribution of the emitted light, it is impossible to prevent the total light leakage in the core portion 141 from leaking, but the leakage light is prevented from being concentrated on the core portion 142', so that the leakage light can be surely suppressed from interfering with the core portion. 142 "crosstalk". As a result, the optical waveguide 1 can surely prevent the occurrence of crosstalk by multi-channelization and high density. Further, in the former optical waveguide, in the core portion adjacent to the core portion into which the light is incident, the intensity distribution P1 of the emitted light does not take a minimum value but takes a maximum value. This maximum value is the crosstalk in which the crosstalk optical signal interferes with the optical signal originally propagating in the core. The interference of such an optical signal causes a problem that the optical communication quality in the optical waveguide is significantly lowered. On the other hand, in the optical waveguide of the present invention, since the intensity distribution P1 of the light emitted from the adjacent core portion 142 (CH2) as described above takes a minimum value Ps1, the crosstalk as described above is suppressed. As a result, an optical waveguide i capable of achieving high-quality optical communication is obtained in accordance with the present invention. Further, the optical waveguide 1 which exhibits the intensity distribution ρ of the outgoing light as described above has the advantage of suppressing the propagation loss and the retardation of the pulse signal, in addition to the suppression of the crosstalk as described above. Further, in the intensity distribution P1 of the emitted light, it is preferable to reflect a distribution in which the leaked light of the core portion 141 (CH1) is not concentrated on the core portion 142 (CH2) but concentrated on the core portion 142. The side surface portion 153 (CL2) is located on the side opposite to the core portion 142. That is, the intensity distribution P1 of the outgoing light is preferably a minimum value Ps1 in the core portion 142 (CH2) as described above, and a maximum value Pm2 12 201227021 40018pif is taken as the cloth in the side cladding portion 153 (CL2). The optical waveguide i having the intensity distribution pi of such emitted light is prevented from being concentrated on the side surface portion 153' by the leakage light from the core portion 141 which is not completely prevented, so that the concentration of the leaked light of the core portion 142 can be prevented. As a result, the optical waveguide 1 which can suppress crosstalk more surely is obtained. Further, in this case, when the maximum value Pml in the above-described core portion 141 (cm) is used as the reference, the maximum value Pm2 in the side surface covering portion 153 (CL2) and the minimum value Psi in the core portion 142 (CH2) The intensity difference is preferably about 3 dB to 20 dB, more preferably about 5 dB to 15 dB. If the intensity difference between the maximum value pm2 and the minimum value Psl is within the above range, the occurrence of crosstalk in the core portion 142 is surely prevented, so that the optical waveguide 1 becomes an optical waveguide capable of performing higher quality optical communication. Further, the maximum value pm2 in the side surface portion 153 (CL2) with respect to the maximum value Pm in the core portion 141 is preferably about _6 〇 dB to -20 dB, more preferably about -50 dB to -30 dB. If the intensity of the maximum value pm2 is within the above range, the intensity of the minimum value Psl is optimized according to the intensity of the maximum value pm2, and the generation of crosstalk in the core portion 142 is more surely prevented. In addition, when the intensity of the maximum value Pm2 is smaller than the lower limit value described above, the above-described action of concentrating the leaked light on the side surface covering portion 153 is insufficient, and there is a concern that the crosstalk cannot be sufficiently suppressed. On the other hand, the maximum value is When the intensity of pm2 is higher than the above upper limit value, the excessive leakage light is concentrated on the side surface portion 153, and there is a concern that the end portion on the emission side interferes with the normal light coupling between the core portions 141 and 142 and the light receiving element. Further, when the difference between the maximum value Pm2 in the side cladding portion 153 (CL2) and the minimum value Ps1 in the core portion 142 (CH2) is gl, and 13 201227021 40018pif is observed in the core portion 141 (CHI) When the intensity difference between the intensity of the obtained optical signal and the minimum value Psl in the core portion 142 (CH2) is set to g2, gl/g2 preferably satisfies the relationship of 0.05 to 0.5, and more preferably satisfies the relationship of 0.1 to 0.4. This makes it possible to more reliably balance the reduction in transmission loss, the decrease in the delay of the pulse signal, and the suppression of crosstalk. Further, when gl/g2 is lower than the lower limit value, since the height of the maximum value Pm2 is too low, there is a concern that crosstalk cannot be sufficiently suppressed. On the other hand, when gl/g2 is higher than the above upper limit value, excessive leakage light is concentrated on the side cladding portion 153, and there is a concern that the end portion on the emission side interferes with the normal light coupling of the core portions 141 and 142 and the light receiving element. . Further, the intensity distribution P1 of the emitted light may be a shape that changes discontinuously, and is preferably a shape that changes continuously. If the intensity distribution P1 of the outgoing light is such a shape, the occurrence of crosstalk can be more surely prevented. Further, as described above, the width of the core portion 14 is preferably about 2 μm to 2 μm, and the leakage light is concentrated on the side surface portion 153 by setting the width of the core portion 14 to the above range. The effect becomes necessary and sufficient, and the generation of crosstalk can be suppressed more surely. Further, the intensity distribution ρι of the outgoing light as described above can be obtained as follows. Fig. 3 is a view for explaining a method of measuring the intensity distribution of the outgoing light in the exit side end surface of the optical waveguide. In the method shown in Fig. 3, first, the incident side optical fiber 21 having a diameter of 5 〇 μΠΐ is disposed so as to face the core portion 14 of the incident side end surface la of the optical waveguide tube to be measured. The incident side optical fiber 21 is connected to a light-emitting element (not shown) that emits light to the optical waveguide 1 by using 14 201227021 40018pif, and is disposed so as to coincide with the optical axis of the core portion 14. On the other hand, on the other hand, on the other hand, the exit side optical fiber 22 having a diameter of 62.5 μm is disposed so as to face the end face of the light guide tube i. The out-side optical fiber 22 is connected to a light-receiving element (not shown) for receiving the emission from the optical waveguide, and its optical axis coincides with the center line of the thickness of the core layer of the optical waveguide =. Further, the exit-side optical fiber 22 is configured to maintain a constant distance from the exit pupil side surface = lb, and to scan the incident light including the center line from the incident side optical fiber 21 to the core portion. The exit side fiber 22 is scanned. Further, the intensity distribution P1 of the position of the outgoing light on the exit-side end face lb can be obtained by the intensity of the outgoing light measured by the phase-receiving light of the exit-side optical fiber 22. Here, the optical phase exhibiting the intensity distribution ρι of the outgoing light as described above is formed by forming a region including the refractive index eight and a lower region in the width direction of the core layer 13 and continuously changing the refractive index. The refractive index ^ W is obtained. That is, the intensity distribution pj of the above-mentioned outgoing light can be observed in the 'optical waveguide having the shape of the refractive index distribution w'. Hereinafter, an example of the refractive index distribution w will be described. Table factory = 4 (a) is a cross-sectional view taken along the line x_x shown in Fig. 1, and Fig. 4 is a cross-sectional view taken on the line XX, the center of the thickness of the core layer on the horizontal axis, the position on C1, and the longitudinal direction The refractive index of the refractive index on the axis is divided into a graph of an example. The core layer 13 has in its width direction as shown in FIG. 4(b) including * 15 201227021. *tuuiopif minimum values Wsl, Ws2, Ws3, Ws4 and 5 maxima Wml, Wm3 'Wm4, Wm5 Refractive index distribution W. In addition, among the five maximum values, there are relatively large maximum values of the refractive index (first maximum value) Wm2, Wm4, and relatively small maximum values of the refractive index (second maximum value)

Wml, Wm3, Wm5. Wherein 'the relatively large maximum value Wm2 and Wm4' between the minimum value Wsl and the minimum value Ws2 and between the minimum value Ws3 and the minimum value Ws4, respectively, the maximum values Wmh wm3 and Wm5 are refractive indices, respectively. Relatively small maximum. Further, the minimum value Ws1 is located on the boundary line between the side surface portion 151 and the core portion 141, and the minimum value Ws2 is located on the boundary line between the core portion 141 and the side surface portion 152, and the minimum value Ws3 is located on the side surface portion 152 and the core portion. The boundary line 142 of 142 and the minimum value Ws4 are located on the boundary line between the core portion 142 and the side cladding portion 153. Further, the maximum values Wm2 and Wm4 are preferably located at the center portions of the core portions 141 and 142. On the other hand, the maximum values Wml, Wm3, and Wm5 are preferably located at the center portions of the side cladding portions 151, 152, and 153. That is, the refractive index distribution W may have at least a region in which the second maximum value, the minimum value, the first maximum value, the minimum value, and the second maximum value are arranged in this order. In addition, the area is repeatedly provided according to the number of cores. As shown in the present embodiment, the number of the core portions 14 is two, and the refractive index distribution w may be any shape as long as the second maximum Value, minimum value, first maximum value, minimum value, second maximum value, minimum value, first maximum value, minimum value, second maximum value, the maximum value and the minimum value are alternately arranged, 201227021 HWlOpif and about the maximum value It is the ith maximum and the second maximum are alternately arranged. Further, the plurality of minimum values, the plurality of first maximum values, and the plurality of second maximum values are preferably substantially the same value, but only the small value is smaller than the first maximum value or the second maximum value, and The relationship between the second maximum value and the small maximum value may be mutually different. Preferably, the amount of deviation is (4) within 10% of the plurality of minimum _ average values 1 '. In addition, the optical waveguide 1 is formed in an elongated strip shape, and the above-described irradiance distribution W is in the storage direction of the optical guide wire i (4) distributed. Eight double phases Here, the average refractive index WA in the side cladding portion 15 of the four minimum values, Ws2, Ws3, and Ws4. Thereby, a region where the average refractive index WA of the refractive index-face coating portion is smaller between each of the j 14 and each of the side surface portions 15 is present. The result is that each minimum value _,

A more steep gradient of the refractive index is formed in the vicinity of Ws3 and Ws4, whereby the light is suppressed from the steam leak in each of the anger portions 14, and the small amount of the wave tube generated in the width direction (4) is transmitted (6). The refractive index distribution W is proportional to the refractive index of the money: the sealing =?: compared to the optical waveguide of the radiance-type refractive index distribution, 'first sealed into the heart. The side of the 卩14 towel is more enhanced, the step is reduced, and (4) the resulting step-by-step suppression is further improved. According to the not only the minimum values of gamma, hair, =, Ws4' as described above, but also the refractive index is continuous. When the variation (10) of the irradiance distribution w is made, it is difficult to cause a difference in the propagation time of the optical path length in the region closer to the central portion of 414. Because of this, U can suppress the sluggishness of the pulse signal (expansion of the pulse signal) even if the transmitted light contains the pulse 17 201227021 40018pif brother. And 4 is 'to obtain an optical waveguide i that can improve the quality of the new letter. Further, the refractive index continuously changes in the refractive index distribution w of the enthalpy, which means that the curve of the refractive index distribution W has _ in each portion, and this state. Further, in the refractive index distribution, the maximum value |1112"1114 is located in the core portions 141, 142 as shown in Fig. 4, and is preferably located at the center portion of the width of the core portions 141, 142. In the core portion 142, the probability that the transmitted light concentrates on the center portion of the width of the core portion 142 is increased, and the probability of leaking to the side slope portion 15 152, 153 is relatively lowered. As a result, it can be further reduced. The transmission loss of the core portion 14 142 can further suppress the crosstalk. Further, the center portion of the width of the core portion 141 means the width from the midpoint of the minimum value Ws1 and the minimum value ws2 to both sides, and the width of the core portion 141. Further, the positions of the maximum values Wm2 and Wm4 are preferably located at the center of the width of the core portions 141, 142 as much as possible, but may not necessarily be the center portion as long as they are located at the edges of the core portions 141, 142. The vicinity of the portion (near the interface between the respective side surface portions 151, 152, and 153) may be referred to as "the vicinity of the edge portion of the core portion 141", which means that the width of the core portion 141 is 5% from the edge portion toward the inner side. The area of the distance. On the other hand, the refractive index distribution is extremely large. Wml, Wm3, and Wm5 are located in the side cladding portions I51, 152, and 153 as shown in Fig. 4(b), but are particularly preferably located near the edge portions of the side cladding portions 151, 152, and 153 (with the core portion 142). In addition, the maximum values Wm2, Wm4 in the core portion 14 142 18 201227021 40018pif and the maximum values Wml, Wm3, Wm5 in the side surface portions 151, 152, 153 are sufficiently alienated from each other, The probability that the transmitted light in the core portions 141, 142 leaks into the side slope portions 151, 152, 153 can be sufficiently reduced. As a result, the transmission loss of the core portions ι 41, 142 can be reduced, and crosstalk can be further suppressed. The vicinity of the edge portion of the bright side surface portions 151, 152, and 153 means a region having a distance of 5% of the width of the side surface covering portions 151, 152, and 153 from the edge portion to the inner side. The values Wml, Wm3, and Wm5 are located at the central portion of the width of the side cladding portions 151, 152, and 153, and are directed toward the adjacent minimum values Wu, Ws2, and Ws3 from the maximum values Wml, Wm3, and Wm5.

Ws4, the refractive index continuously decreases. Thereby, the maximum distance Wm2, Wm4 in the core portions 141, 142 and the maximum values Wml, Wm3, Wm5 in the side cladding portions 15 152, 153 are maximized, and the maximum values Wml, Wm3 can be obtained. Since light is reliably enclosed in the vicinity of Wm5, leakage of the above-mentioned transmitted light from the core portions 141, 142 can be more reliably suppressed. Further, since the maximum value Wm Bu Wm3 and Wm5 are smaller than the maximum values Wm2 and Wm4 located in the core portion 142, the refractive index is small, and therefore does not have high-light transmission such as the core portions 141 and 142. Sexuality, but higher refractive index than the surrounding, so it has a little light transmission. As a result, the side covering portions 15 152 and 153 function to prevent the other core portions from being transmitted by enclosing the transmitted light leaked from the core portions 141 and 142. That is, by having the maximum values Wml, Wm3, Wm5, crosstalk can be more reliably suppressed. 19 201227021 Further, the minimum values Wsl, Ws2, Ws3, and Ws4 are smaller than the average refractive index WA of the adjacent side surface portions 15 as described above, and the difference is desirably within a predetermined range. Specifically, the difference between the minimum values Ws1, Ws2, Ws3, and Ws4 and the average refractive index WA of the side surface portion 15 is preferably a minimum value.

The maximum value Wm2 in Wsl, Ws2, Ws3, Ws4 and cores 141, 142

The difference of Wm4 is about 3% to 80%, and it is preferably about 5% to 5%, and particularly preferably about 7% to 20%. Thereby, the side cladding portion 15 has sufficient light transmission property necessary for suppressing crosstalk. Further, when the difference between the minimum values Ws1, Ws2, Ws3, and Ws4 and the average refractive index WA of the side cladding portion 15 is lower than the above lower limit value, the light transmittance in the side surface portion 15 is too small, and it is not sufficiently suppressed. The crosstalk is higher than the above upper limit value, and the light transmission property in the side surface portion 15 is excessively large, which may adversely affect the optical transmission property of the core portion 142. Further, the difference between the minimum values Wsb, Ws2, Ws3, and Ws4 and the maximum values Wml, Wm3, and Wm5 is preferably about 6% to 90% of the difference between the minimum values Wu, Ws2, Ws3, and Ws4 and the maximum values Wm2 and Wm4. It is about 1%~70%, especially about 14%~40°/◦. Thereby, the balance between the height of the refractive index in the side cladding portion 15 and the height of the refractive index in the core portion 14 is optimized, and the optical waveguide 1 not only has particularly excellent light transmission property but also can be more reliably suppressed. Crosstalk. Further, the refractive index difference between the minimum values Wsb Ws2, Ws3, Ws4 and the maximum values Wm2, Wm4 in the core portion 14 142 is preferably as large as possible, preferably about 0.005 to 0.07'. More preferably 〇·007~ 〇〇 5 or so, especially good ^ 0.01 ~ 0.03 or so. Thereby, the above refractive index difference is used to seal the light into the core 20 201227021 40018pif

141, 142 is necessary and sufficient Q. Further, the refractive index distribution w in the core portion 142 is as shown in FIG. 4(b), when the cross-section of the core layer 13 is taken on the horizontal axis, and When the refractive index is taken on the vertical axis, if the refractive index continuously changes in the vicinity of the maximum value Wm2 and in the vicinity of the maximum value Wm4, it is possible to form an upwardly convex substantially V-shape (a substantially linear shape other than the maximum value), and it is preferable. To form an upwardly convex substantially u-shaped shape (with a circular shape as a whole in the vicinity of the maximum value). When the refractive index distribution w is formed into the shape as described above, the encapsulation of light in the core portions 141, 142 becomes more remarkable. Further, as shown in FIG. 4(b), the refractive index distribution w is a downwardly convex shape if the shape of the refractive material continuously changes in the vicinity of the minimum value Ws1, the vicinity of the minimum value Ws2, the vicinity of the minimum value Ws3, and the minimum value Ws4. It is substantially V-shaped (substantially linear except for the maximum value), and is preferably formed in a substantially U-shape that is convex downward (the whole of the maximum value is rounded in addition to the refractive index distribution % shown in Fig. 4 (8). When the average refractive index of the side covering portion 15 is WA, the width of the portion where the maximum value is continuous in the vicinity of (10) and Wm4 and the average refractive index wa or more is a-, the minimum value of the county is small. The width of the portion in which the refractive index is continuous and less than the average refractive index is set. In this case, b is preferably 0 to 1.2a, and more preferably 〇 咖 〜 〜 〜 〜 〜 〇.la~G8a. By this, the minimum value _, Ws2, WS3, and Ws4 widths are sufficient for the above-mentioned side and effect. # ' When b is lower than the lower limit value, the minimum value view , Ws2, Ws3, Ws4 real y width solution, so there will be light 21 201227021 = into the core 14 In the case of b 冋 = the above upper limit value, the substantial widths of the minimum values Wsl, Ws2, and W are too wide 'so the width or spacing of the cores (4), 142 is limited. There is a concern that the transfer efficiency is lowered or the multi-channelization and the high density are hindered. Further, the average refractive index WA in the side cladding portion 15 can be approximated at the midpoint of the maximum value Wml and the minimum value Wsl. , Wm2, Wm3, respectively, may be upwardly convex A-shaped as described above, or may be attached at the top

The flat portion including the substantially (four) folding material is included. Even if the folding distribution W forms such a shape in the vicinity of the top of each maximum value, the present invention exerts the above-described effects and effects. Here, the flat portion where the refractive index does not change means a region in which the refractive index fluctuates less than α-deleted, and is a region in which the refractive index continuously decreases on both sides. The length of the flat portion is not particularly limited, but is preferably 100 μm or less, more preferably 20 μm or less, and particularly preferably 1 or less. Further, in the present embodiment, the optical waveguide 1 including the laminate η, the core layer 13, and the laminate 12 is laminated, but these may be integrally formed. In the present embodiment, the case where the core layer 13 has the two core portions 14 has been described. However, the number of the core portions 14 is not particularly limited to three or more. In addition, in the case where the number of the cores 14 is increased to 3, 4, 5, ..., the number of minimum values of the refractive index distribution w is increased by 22 201227021 HUUiopif force to 6, 8, 10 ...just. The constituent material (main material) of the core layer 13 as described above is not particularly limited as long as it is a material that causes the above-described refractive index difference, and specifically, except for, for example, an acrylic resin, a methacrylic resin, or a polycarbonate ( Polycarbonate, polyphenylene (p〇iyStyrene), epoxy (ep〇Xy) resin, or oxetane resin, etc., cyclic ether resin, polyamide, poly Polyimide, polybenzoxazole, p〇iySiiane, polysilazane, silicone resin, fluorine resin, polystone, Other than various resin materials such as polyfluorenyl phthalate (P〇lyUrethane) and benzocyclobutene-based resin or norbornene (n〇rb〇rnene) resin 荨 ring-shaped rare 糸 resin A glass material such as quartz glass or borosilicate glass can be used. Further, the resin material may be a composite material in which resins of different compositions are combined, and may also contain unpolymerized monomers. Further, among these materials, a norbornene-based resin is particularly preferred. Norbornene The olefinic polymer can be, for example, subjected to ring opening metathesis polymerization (Ring_〇pening)

Metathesis Polymerization (ROMP), a combination of ROMP and hydrogenation reaction, polymerization using a radical or a cation, polymerization using a cationic initiator, and polymerization initiators other than the polymerization initiator (for example, nickel or other transition metal) It is obtained by all known polymerization methods such as polymerization of the initiator. Λ (Cover Layer) The cladding layer 11 and the cladding layer 12 respectively constitute a covering portion located at a lower portion of the core layer 23 201227021 40018pif and an upper portion. The average thickness of the cladding layers 11 and 12 is preferably about 1 to 15 times, more preferably about 0.2 to 1.25 times, the average thickness of the core layer 13 (the average height of each core portion 14), more specifically, about 0.2 to 1.25 times. The average degree of the coating layers 丨1 and 12 is not particularly limited, and is usually preferably about 丨μηη~3〇〇, more preferably about 5μηη to 200μιη, and even more preferably about 10μιη to about 1〇〇μιη. Thereby, the optical waveguide 1 is prevented from being excessively enlarged (thickness), and the function as a covering portion is appropriately exhibited. Further, as the constituent material of the coating layer 11 and the coating layer 12, for example, the same material as that of the core layer 13 may be used, but a norbornene-based polymer is particularly preferable. Further, in the case of selecting the constituent material of the core layer 13 and the constituent materials of the cladding layers u and 12, the material may be selected in consideration of the difference in refractive index between the two. Specifically, in order to reliably reflect light at the boundary between the core portion 14 and the cladding layers η and 12, the material may be a material having a large refractive index of the constituent material of the core portion 14. Thereby, a sufficient refractive index difference is obtained in the thickness direction of the photoconductive tube i =, and light leakage from the respective core portions 至 to the cladding layers 11 and 12 can be suppressed. In addition, from the viewpoint of suppressing the attenuation of light, it is also important that the material of the parent layer is adhered to the constituent material of the coating layer 1 (the other is a coating layer 1 12 bodies, depending on the need) The arrangement may be omitted, and in both cases, the surface of the core layer 13 is exposed in the slab (work rolling), but since the refractive index of the air is sufficiently low, the air 24 201227021 can replace the coating layers 11 and 12. Function (support film) On the lower surface of the light guide tube 1, a support film 2 such as a laminate may be laminated as needed. The surface of the pure light waveguide 1 of the film 2 is protected and reinforced. The reliability and mechanical properties of the optical waveguide! / 乍 is the constituent material of the support film 2, for example, except for polyethylene terephthalate (PΕlyethylene terephthalate, ρΕτ), polyglycol Examples of the various types of resin materials, such as a polythene hydrocarbon, a polyimine, and a polyamine, may be metal materials such as copper, indium, and silver. Further, in the case where the metal material is inclined, it is preferable to use a metal foil as the support film 2 〃 ' The average thickness of the film 2 is not Not limited, preferably > film 2 ^ 'better than 1 〇 〜 ~ 100 called around. By this, support 膑 八 has a moderate rigidity 'then politely support the light guide wave tube to be difficult to block the light guide 丨In addition, the support film 2 and the optical waveguide tube are adhered to each other = the heat is used, the adhesive or the adhesive is used, and the adhesive is added, and the modified hydrocarbon system is used. Wait. In addition, it is preferred to use: polyimine amide, styrene amine amide, phthalimide _ thermoplastic Weiimine amide, and the second layer containing the material is more flexible: special = The shape change of the light guide 1 can also freely follow the change. As a result, 25 201227021 40018pif is 'definitely, and the peeling accompanying the shape change is stopped. The average thickness of such an adhesive layer is limited to about 100 μm, and it is better that the rabbit ς μ μ lives at about 5 μm to 6 μm. (Cover film) On the other hand, the cover film 3 as shown in Fig. 1 is placed on the upper surface of the optical waveguide 1 as needed. "The cover film 2 protects the wave tube from the top to support the narrowing of the light guide wave." Measures the protection of the light guide 1 from dirt or scratches, etc., and the reliability and mechanical characteristics of the Nanguang waveguide *1. The constituent material of the cover film 3 is the constituent material of the support film 2, for example, except for the polystyrene brewing such as poly(p-phenylene terephthalate), polyethylene, and wu. Various resin materials such as imine and polyamine are metal materials such as copper, sulphur, and silver. Further, a gold core is used as the cover film 3 in the metallic material white. Further, in the case of the intermediate mechanical lens of the optical film, since the light penetrates the cover film 3, the constituent material of the film 3 is preferably substantially transparent. Further, the flat membrane of the cover film 3 is preferably a mosquito of about 3, preferably about 3 to about 30 μΠ1. The cover film 3 has a sufficient rigidity in optical communication by making the well covering the port within the above range. ...the more it is sufficient to protect the optical waveguide 1 sufficiently 2, the connection between the Wei 3 and the light guide is _joined or bonded to the hot dust, the adhesion by an adhesive or an adhesive, etc., T, The agent can be used as described above. 26 201227021 4UU18plf (Second Embodiment) Next, a second embodiment of the optical waveguide of the present invention will be described. Fig. 5 is a perspective view showing a second embodiment (partially cut and penetrated) of the optical waveguide according to the present invention, and Fig. 6 is a view showing one injection of the core of the optical waveguide shown in Fig. 5. A diagram showing an example of the intensity distribution of the emitted light at the time of light. In the following description, the upper side in Fig. 5 is referred to as "upper" and the lower side is referred to as "lower". In addition, Fig. 5 is an exaggerated drawing in the thickness direction of the layer (the vertical direction of each drawing). In the following, the second embodiment of the optical waveguide will be described. However, the differences from the first embodiment will be mainly described, and the description of the same matters will be omitted. In the same manner as in the first embodiment, the same components as those in the first embodiment are denoted by the same reference numerals, and the detailed description thereof will be omitted. The second embodiment is the same as the first embodiment except that it has the two layers of the core layer 13 which are laminated. That is, the optical waveguide 1 shown in Fig. 5 is formed by stacking five layers of the cladding layer 11, the core layer 13, the cladding layer 121, the core layer 13, and the cladding layer 122 in this order from the lower side. In the core layer 13 of the two layers, as in the first embodiment, two core portions 14 which are juxtaposed in the width direction and three side slope portions which are juxtaposed so as to sandwich the core portions 14 are formed. 15. More specifically, in the two-layer core layer 13 shown in FIG. 5, two core portions 141 and 142 which are juxtaposed and three side surface covering portions 151, 152, and 153 which are juxtaposed are alternately provided on the lower layer 131. . Further, each of the core portions 14 and 142 is surrounded by the respective side surface covering portions 151, 152, and 153 and the respective cladding 27 201227021 40018 pif layers 11 and 121. On the other hand, two core portions 143 and 144 which are juxtaposed and three side surface covering portions 154, 155 and 156 which are juxtaposed are alternately arranged on the upper core layer 132. Thereby, each of the core portions 143 and 144 is in a state of being surrounded by the respective side surface covering portions 154, 155, and 156 and the respective cladding layers 121 and 122. Further, the core portions 141 and 143 on the left side of each of the core layers π and 132 in Fig. 5 are disposed at the same position in the width direction of the optical waveguide tube. Similarly, the core portions 142 and 144 located on the right side of each of the core layers 13 and 132 are disposed at the same position in the width direction of the optical waveguide tube 1, respectively. Here, 'the light is incident on the end of one of the plurality of core portions 141, 142' 143, 144 of the optical waveguide 1 shown in FIG. 5 to obtain the light emitted from the other end portion. When the intensity distribution P2, the intensity distribution shows a characteristic distribution. 6 is a view showing the intensity distribution p2 of the outgoing light in the end face on the exit side when the light is incident on the core portion 141 of the optical waveguide 1 shown in FIG. 5, and is the intensity of the incident light taken out on the horizontal axis. A diagram showing an example of the intensity distribution when the position of the end surface of the injection side is taken out. When the right-hand core 14i (CH1) emits light, the intensity of the emitted light becomes maximum at the center of the exit end of the core F 141. Further, the intensity of the emitted light becomes smaller as it goes away from the middle Q portion of the core portion mi, but a small value is locally adopted in the core portion 143 (CH2) adjacent to the thickness direction of the core portion 141. That is, the intensity distribution P2 of the outgoing light at this time takes a maximum value Pml' at the center of the exit end of the core portion hi (CH1) and takes a minimum value ps1 in the core portion 143 (CH2). According to the optical waveguide 28 having the intensity distribution of the emitted light, the leakage of the light propagating through the core portion 141 cannot be prevented, but the leakage light is suppressed from being concentrated on the core portion 143, so that the leaked light can be surely suppressed. Dry, "crosstalk" of the core 143. As a result, even if the optical waveguide 1 is multi-channelized and densified not only in the width direction but also in the thickness direction, crosstalk can be surely prevented. Further, according to the optical waveguide 1 which exhibits the intensity distribution p2 of the outgoing light as described above, in addition to the suppression of the crosstalk as described above, there is an advantage that the propagation loss and the retardation of the pulse signal are suppressed. Further, in the intensity distribution P2 of the emitted light, it is preferable to be a distribution reflecting the lower case: the leaked light of the core portion 141 (CH1) is not concentrated on the core portion 143 (CH2), but is concentrated on the core portion 143. The cladding layer 122 is adjacent and located on the opposite side of the core 141. That is, it is preferable that the intensity distribution p2 of the outgoing light adopts a minimum value Ps1 in the core portion 143 (CH2) as described above, and takes a distribution of the maximum value pm2 in the cladding layer 122 (CL2) (see Fig. 6). The light guide tube 具有 having the intensity distribution P2 of such emitted light can prevent the concentration of the leaked light in the core portion 143 by collecting the leaked light from the core portion 141 which is not completely prevented by π from the cover layer 122'. As a result, the optical waveguide i which can suppress the crosstalk more reliably in the thickness direction is obtained. Further, in this case, when the maximum value Pml in the above-described core portion 141 (CH1) is used as a reference, the intensity difference between the maximum value pm2 in the cladding layer 122 (CL2) and the minimum value Psi in the core portion 143 (CH2) Preferably, 3 commits ~20 dB, more preferably 5 dB~15 dB. When the intensity difference between the maximum value pm2 and the minimum value Psl is within the above range, the occurrence of crosstalk in the core portion 143 is surely prevented, so that the optical waveguide 1 becomes an optical waveguide capable of performing higher quality 29 201227021 optical communication. Further, with respect to the maximum value Pmi in the core portion 141, the maximum value Pm2 in the cladding layer 122 (CL2) is preferably about _6 〇 dB 〜 2 〇 左右 左右 左右 左右 左右 左右 左右 左右 左右 左右 左右 左右 左右 左右 左右 左右 左右 左右 左右 左右 左右 左右If the intensity of the maximum value Pm2 is within the above range, the intensity of the minimum value psi is optimized according to the intensity of the maximum value pm2, and the generation of crosstalk in the core portion 143 is more surely prevented. Further, when the intensity of the maximum value Pm2 is less than the above lower limit value, the above-described action of concentrating the leaked light on the cladding layer 122 is insufficient, and there is a concern that the crosstalk cannot be sufficiently suppressed. On the other hand, at the maximum value pm2 When the intensity is higher than the above upper limit value, excessive leakage light is concentrated on the cladding layer 122, and there is a concern that the core portions 141 and 143 and the normal light of the light receiving element are prevented from being bonded at the exit side end portion. Further, when the intensity difference between the maximum value pm2 in the cladding layer 122 (CL2) and the minimum value Psl in the core portion 143 (CH2) is set to g3, and the optical signal observed in the core portion 141 (CH1) is used When the intensity of the intensity and the minimum value Psl in the core portion 143 (CH2;) is set to g4, g3/g4 preferably satisfies the relationship of 〇.〇5 to 〇5, which is better for satisfying 〇1 to 〇4. relationship. Thereby, the reduction in transmission loss and the decrease in the sluggishness of the pulse signal can be more reliably coexisted with the suppression of crosstalk. Further, when g3/g4 is lower than the above lower limit value, the height of the maximum value Pm2 is too low, and there is a concern that crosstalk cannot be sufficiently suppressed. On the other hand, when g3/g4 is higher than the above upper limit value, excessive leakage light is concentrated on the cladding layer 122, and there is a concern that the normal light coupling between the core portions 141 and 143 and the light receiving element is hindered in the emission side end portion. . Further, the intensity distribution P2 of the emitted light may be a shape that does not continuously change, and 201227021 40018pif is preferably a shape that continuously changes. If the intensity distribution p2 of the outgoing light is such a shape, the generation of crosstalk can be more surely prevented. Further, as described above, the height of the core portion 14 is preferably about 20 μm to 2 μm μm, and the height of the core portion 14 is set to the above range, and the leaked light is concentrated on the coating layer 122. It is necessary and sufficient to suppress the occurrence of crosstalk more reliably. Further, the intensity distribution Ρ2 of the outgoing light as described above can be obtained by the same method as the intensity distribution P1 of the above-described outgoing light. Here, the optical waveguide 1 exhibiting the intensity distribution P2 of the outgoing light as described above is formed by forming a region including a relatively high refractive index and a lower region in the thickness direction of the optical waveguide i, and refracting Obtained by a continuously varying refractive index profile T. In other words, in the optical waveguide 1 having the shape of the refractive index distribution τ, the intensity distribution Ρ2 of the emitted light can be observed. Hereinafter, an example of the refractive index distribution τ will be described. Fig. 7 (a) is a view in which a part of the γ_γ line cross-sectional view shown in Fig. 5 is cut out, and Fig. 7 (b) shows the center and line of the center of the core portion in the width direction of the cross section of the γ_γ line. FIG. 7(b) is a view schematically showing a refractive distribution when a refractive index is taken on the horizontal axis and a position in the thickness direction of the core portion having a cross section on the vertical axis is taken. A picture of an example. The optical waveguide f 1 has four minimum values as shown in Fig. 7 (b)

Tsl, Ts2, Ts3, Ts4 and 5 maxima Tml, Tm2, Tm3, Tm4,

The refractive index distribution T of Tm5. Further, the five maximum value towels have relatively large maximum values (first maximum values) Tm2 and Tm4 of the refractive index and 31 201227021 of the refractive index are relatively small maximum values (second maximum values) Tml, Tm3, and Tm5. Wherein, between the minimum value Ts 1 and the minimum value Ts2 and between the minimum value Ts3 and the minimum value Ts4, there are respectively relatively large maximum values Tm2 and Tm4 of the refractive index, and the other maximum values Tml, Tm3 and Tm5 are respectively refracted. The relatively small maximum of the rate. Further, the minimum value Ts1 is located on the boundary line between the cladding layer 11 and the core portion 141. The minimum value TS2 is located on the boundary line between the core portion 141 and the cladding layer 121. The minimum value Ts3 is located at the boundary between the cladding layer 121 and the core portion 143. The line 'and the minimum value Ts4 is located on the boundary line between the core 143 and the cladding layer 122. Further, the 'maximum values Tm2 and Tm4 are preferably located at the center of the core portions 141 and 143. On the other hand, the maximum values Tml, Tm3, and Tm5 are preferably located at the center portions of the cladding layers 11, 121, and 122. That is, the refractive index distribution T may have at least a region in which the second maximum value, the minimum value, the first maximum value, the minimum value, and the second maximum value are arranged in this order. Further, this region is repeatedly provided in accordance with the number of layers of the core layer. When the number of layers of the core layer 13 is two as shown in the present embodiment, the refractive index distribution may be as follows: The second maximum value, the minimum value, the first maximum value, the minimum value, the second maximum value, the minimum value, the first maximum value, and the second maximum value, the maximum value and the minimum value are alternately arranged, and the maximum value is It is the third largest value and the second maximum value are alternately arranged. Further, each of the plurality of minimum values, the plurality of first maximum values, and the plurality of second maximum values is preferably substantially the same value, but the minimum value is kept smaller than the first maximum value or the second maximum value, and If the second maximum value is smaller than the maximum value of the 32nd 201227021 40018pif 1 , the mutual value difference may be used. In this case, the amount of deviation is preferably suppressed within the average value of the plurality of minimum values. Further, the waveguide 1 is formed in an elongated strip shape, and the rate of the cloth T as described above is substantially the same distribution in the longitudinal direction of the material wave f i . =, the four minimum values Tsl, Ts2, Ts3, Ts4 are smaller than the average refractive index TA in the adjacent cladding layers u, 121, 122, respectively. Thereby, a region having a refractive index smaller than the average refractive index TA of each of the cladding layers 11, 121, 122 exists between the respective core layers n, 12 and 122. = value one, the vicinity of Ts3, Ts4 is formed more urgently: the fruit is folded to emit light, and the light leakage from the core portion 14 is suppressed, so that the light guide wave which is small in consumption and suppresses the perturbation in the thickness direction In addition, the refractive index distribution 连续 continuously changes in refractive index as a whole. Thereby, the light ray ΓΛ is enhanced as compared with the optical waveguide having the order eigenvalue type refractive index distribution, thereby achieving further suppression of the simplification and further generation of crosstalk. Further, according to the above, each having a minimum value Tsb Ts2, Ts3,

Ts4, and the refractive index distribution τ whose refractive index continuously changes, the region closer to the center portion of the core portion M collectively transmits the transmitted light, so that it is difficult to make a difference every light. Therefore, even in the case where the transmitted light contains a pulse signal, the retardation of the pulse signal (diffusion of the pulse signal) can be suppressed. As a result, the optical waveguide i which can improve the optical product f is obtained. 33 201227021 In addition, the refractive index continuously changes in the refractive index distribution τ of the stomach, which means that the curve of the fabric has a circle in each part, and the curve is in a state of differentiable. A further 'refractive index distribution Τ +, the maximum values Tm2, Tm4 are not located in the core portion 14 143 as shown in Fig. 7, but are also located at the center portion of the thickness in the core portion 143. As a result, in each of the core portions 143, the probability that the transmitted light concentrates on the center portion of the thickness of the core portion 143 is improved, and the probability of leaking to the respective cladding layers 11, 121, and 122 is relatively lowered. As a result, the transmission loss of the core portion 143 can be further reduced' and crosstalk can be further suppressed. Further, the center portion of the thickness of the stomach core portion 141 is a region which is a distance of 3〇% of the thickness of the core portion ι41 from the midpoint of the minimum value Ts1 and the minimum value Ts2 to both sides. Further, the positions of the 'maximum values Tm2 and Tm4 are preferably as close as possible to the center. The center portion of the fullness of p 141 and 143 may not necessarily be the center portion, and may be located in the vicinity of the edge portions of the core portions 141 and 143 (near the interface between the respective cladding layers 1 and 121 and 122). Further, the vicinity of the edge portion of the core portion 141 means a region having a distance of 5% of the thickness of the core portion 141 from the edge portion toward the inside. On the other hand, in the refractive index distribution τ, the maximum values Tud, Tm3, and Tm5 are located in the respective cladding layers 11, 121, and 122 as shown in Fig. 7(b), but particularly preferably located at each of the slope layers 11, 121, The vicinity of the edge portion of 122 (near the interface with the core portion 14 143) is outside. Thereby, the maximum values Tm2, Tm4 in the core portions 141, 143 and the maximum values Tml, Tm3, and Tm5 in the respective cladding layers 11, 121, 122 are sufficiently isolated from each other, so that the core portions 141, 34 201227021 can be sufficiently reduced. The probability that the transmitted light in the 40018pif 143 leaks into the respective cladding layers 11, 丨 21, 122. As a result, the transmission loss of the core portions 141, 143 can be reduced, and crosstalk can be further suppressed. Further, the vicinity of the edge portion of each of the cladding layers 11 and 12 122 refers to a region having a distance of 5% of the thickness of each of the cladding layers 11 and 12 from the edge portion toward the inside. Further, the 'maximum values Tml, Tm3, and Tm5 are located at the central portion of the thickness of each of the cladding layers 121, 122, and the maximum values Tml, Tm3, and Tm5 are adjacent to the adjacent minimum values Tsl, Ts2, Ts3, and Ts4, preferably The refractive index decreases continuously. Thereby, the distance between the maximum values Tm2 and Tm4 in the core portions 141 and 143 and the maximum values Tml, Tm3, and Tm5 in the respective cladding layers 11 and 12 122 is maximized, and the maximum values Tml and Tm3 can be obtained. Since light is reliably enclosed in the vicinity of Tm5, leakage of the above-mentioned transmitted light from the core portions 141, 143 can be more reliably suppressed. Further, since the maximum values Tml, Tm3, and Tm5 are smaller than the maximum values Tm2 and Tm4 located in the core portions 141 and 143, the refractive index is small, and thus does not have high light transmission properties such as the core portions 141 and 143. However, the refractive index is higher than that of the surroundings, and therefore has a little light transmission property. As a result, each of the cladding layers 11, 121, and 122 has a function of preventing the other core portions from being transmitted by enclosing the transmitted light leaked from the core portion 143. That is, crosstalk can be more reliably suppressed by the presence of maximum values Tml, Tm3, and Tm5. Further, the minimum values Tsl, Ts2, Ts3, and Ts4 are smaller than the average refractive index TA of each of the cladding layers 11, 121, 122 as described above, but the difference is desirably within a predetermined range. Specifically, the difference between the minimum refractive values Tsl, Ts2, Ts3, Ts4 and 35 11 11201227021 of the average refractive indices τα of the cladding layers 11, 121, 122 is preferably a minimum value Ts, Ts2, Ts3, Ts4, and a core portion. The difference between the maximum values Tm2 and Tm4 in 143 is about 3% to 80%, more preferably about 5% to 50%, and particularly preferably about 7 to 30%. Thereby, each of the cladding layers u, 丨 21, 122 has sufficient light transmission properties necessary for suppressing crosstalk. Further, in the case where the difference between the minimum value Ts, Ts2, Ts3, and Ts4 and the average refractive index τα of each of the cladding layers η and 丨21 and 122 is lower than the above lower limit value, the respective cladding layers η, 121, and 122 When the optical transmission property is too small, there is a concern that crosstalk cannot be sufficiently suppressed. When the optical transmittance is higher than the above upper limit value, the optical transmission property in each of the cladding layers 11 and 12 is too large, and the optical transmission property to the core portion 143 is present. Concerns about adverse effects. Further, the difference between the minimum values Ts1, Ts2, Ts3, and Ts4 and the maximum values ΤιϊΠ, Tm3, and Tm5 is preferably about 6% to 90% of the difference between the minimum value Ts, Ts2, Ts3, and Ts4 and the maximum values Tm2 and Tm4. More preferably, i〇%~7〇% or so, especially preferably 14%~40%. Thereby, the balance of the height of the refractive index in the cladding layer and the height of the refractive index of the core is optimized, and the optical waveguide 1 not only has particularly excellent light transmission property&apos; but can more reliably suppress crosstalk. Further, the difference in refractive index between the minimum values Ts, Ts2, Ts3, and Ts4 and the maximum values Tm2 and Tm4 in the core portion 143 is preferably as large as possible, preferably about 0.005 to 0.07, more preferably 〇.007~ 〇〇 5 or so, especially good for 〇〇 1 ~ 0.05 or so. Thereby, the above-mentioned refractive index difference is necessary and sufficient for sealing light into the core portions 41 and 143. Further, the refractive index distribution τ in the core portions 141 and 143 is a position on the horizontal axis taken at the center line C2, and when the refractive index is taken on the vertical axis (when FIG. 7 is rotated by 36 反 in the counterclockwise direction of 2012 201221) When the refractive index continuously changes in the vicinity of the maximum value Tm2 and the maximum value Tm4, a substantially V-shape which is convex upward can be formed (a substantially linear shape other than the maximum value), and it is preferable to form an upward convex shape. U-shaped (with a circle around the maximum value). When the refractive index distribution T forms such a shape, the encapsulation of light in the core portions 141, 143 becomes more remarkable. Further, as shown in FIG. 7(b), the refractive index distribution T can be formed downward in the vicinity of the minimum value Ts1 near the minimum value tS2, in the vicinity of the minimum value ts3, and in the vicinity of the minimum value Ts4. The convex shape is substantially V-shaped (substantially linear except for the maximum value), and it is preferably formed in a substantially U-shape that is convex downward (the entire shape is rounded in the vicinity of the maximum value). Further, in the refractive index distribution τ shown in Fig. 7(b), when the average refractive index in each of the cladding layers η and 12b is ΤΑ, the maximum value = 11^ and the refractive index in the vicinity of Tm4 are continuous. The width of the portion having the average refractive index ΤΑ or more is not abm], and the width of the portion in which the refractive index in the vicinity of the minimum values Ts1, Ts2, Ts3, and Ts4 is continuous and smaller than the average (four) rate TA is Μμηη]. At this time, b is preferably about the heart of the mountain, more preferably two to la, especially preferably 〇 la ~ 〇 8a. Therefore, the substantial widths of the minimum values ^, Ts2, Ts3, and Ts4 are necessary and sufficient for exerting the above-described actions and effects. In other words, in the case where (4) is at the lower limit value described above, since the minimum width Ts, Ts2, Ts3, and TS4 have a substantially narrow width, the effect of enclosing the light in the public portion 143 is lowered. On the other hand, in the case where b is higher than the upper limit value, the minimum values Tsb Ts2, Ts3, and Ts4 g are too wide, so the thickness or pitch of the core portion 143 is limited, and there is a decrease in the efficiency of the delivery of the system. Or the concern of multi-channelization and high density. Further, the average refractive index TA in the cladding layer 11 can be approximated at the midpoint of the maximum value Tml and the minimum value Tsl. Further, each of the maximum values TnU, Tm2, Tm3, Tm4, and Tm5 may be substantially U-shaped in the upward direction, and may include a flat portion whose refractive index does not substantially change in the vicinity of the top portion. Even if the refractive index distribution T forms such a miscellaneous near the respective maximum values, the optical waveguide of the present invention also exerts the action and effect as described above. Here, the flat portion ′ in which the refractive index is substantially invariable refers to a region in which the refractive index fluctuates to be smaller than G.GG1, and the refractive index continuously decreases on both sides thereof. The length of the flat portion is not particularly limited, but is preferably 1 〇〇 μηη or less, more preferably 20 or less, and particularly preferably 10 μm or less. <Method of Manufacturing Optical Waveguide> Next, an example of a method of manufacturing the optical waveguide 1 will be described. (First Manufacturing Method) First, the first aspect (the first manufacturing method) of the first embodiment of the optical waveguide of the present invention will be described. 1 to 8 are diagrams for explaining the |= method (first manufacturing method) of the optical waveguide 1 shown in Fig. 1 . In addition, hereinafter, the upper side in FIGS. 8 to 12 is referred to as "upper", and the lower side is referred to as "lower". The optical waveguide 1 is prepared by separately preparing the cladding layer 11, the core layer 13, and | The cover 12 is produced by laminating these layers. In the first manufacturing method of the illuminating light-wave tube 1, the liquid crystal film is formed on the support substrate 95 and the core layer forming composition 9 后, and then the substrate 951 is placed in the position of 38 201227021 The liquid film is flattened on the levei table and the solvent is evaporated (desolvent). Thereby, the layer 910 is obtained. [2] Then, by irradiating a part of the layer 910 with active radiation to produce a refractive index difference, the core layer 13 in which the core portion 14 and the side cladding portion 15 are formed is obtained. [3] Then, the optical waveguide j is obtained by coating the two layers of the core layer 13 with layers η, 12'. Hereinafter, each step will be described in order. [1] First, the core layer forming composition 900 is prepared. The core layer forming composition 900 includes a polymer 915 and an additive 920 (in this embodiment, at least a monomer). The core layer-forming composition 9 is a material which causes a reaction of at least a monomer in the polymer 915 by irradiation with actinic radiation, and causes a change in the refractive index distribution. In other words, the core layer-forming composition 900 changes the refractive index distribution by the deviation of the ratio of the presence of the polymer 915 and the monomer. As a result, the core portion 14 and the side cladding portion 15 can be formed in the core layer 13. s material. Then, the core layer forming composition 9 is coated on the cross-plate 951 to form a liquid film (see FIG. 8(a))'. Then, the support substrate 951 is placed on the level gauge to cause green-physicalization. And dissolve the hair (desolvent). Thereby, the layer 910 is obtained (refer to FIG. 8(b). In the support substrate state, for example, a time substrate, a dioxy-cut substrate, a glass substrate, a polyethylene terephthalate (PET) film, etc. The cloth method is, for example, a method of a blade method, a circular coating method, a spray method, an applicator method, an inexpensive coating method, a die coating method, etc. 915 is substantially equal to the obtained layer 910, a polymer (Matrix) 39 201227021 40018pif The kicker is present, the additive 92Q is substantially uniformly and randomly dispersed in the compound 915. In this case, the additive 920 is substantially uniformly and randomly dispersed in the layer 91. The average of the layer (10) The thickness is not particularly limited as long as it is set depending on the thickness of the core or the layer n to be formed, and is preferably about 5 μm to 3 μm to about 10 μm to about 200 μm. (Polymer) Polymer 9i5 It is a polymer which becomes a base polymer of the core layer 13. It is suitable to use a polymer having a sufficiently high transparency (colorless and transparent) and = compatibility in the compound 915, and further, it is suitable to use, for example, a reversible body reaction ( Polymerization anti-(four) cross-linking reaction), and The polymer is also provided with a polymer having sufficient transparency. The so-called "compatibility" means that the fresh body is at least mixed and does not phase-separate from the polymer 915 in the composition or the layer 9ω. Examples of the polymer 915 include a cyclic olefinic resin such as a norbornene thin resin or a benzoxanthene resin, an acrylic resin, a methyl propylene resin, a polycarbonate, a polystyrene, and a ring. Oxygen resin, polyamine, diimine, polystyrene, lion, fluororesin, etc.; one or more of the polymer towels can be combined (polymer blending, combination) The blends (mixtures, copolymers, etc.) are used. Among these polymers, it is particularly preferred to be a polymerization of a cyclic olefinic tobacco. The straw is a polymer 915 using a cyclic olefin resin. Obtaining a light guide tube with excellent light transmission or heat resistance 201227021 • VV i V/b t ' can also be a resin whose cyclic olefinic resin can be replaced by an unsubstituted resin Examples of the cyclic olefin resin include norbornene-based resins and butylene-based resins. Among them, a norbornene-based resin is preferably used from the viewpoints of heat resistance, transparency, etc. Further, since the norbornene-based resin has high hydrophobicity, a light guide which is less likely to cause dimensional change due to water absorption can be obtained. The norbornene resin may be any one of a resin having a single repeating unit (a homogeneous material) and a resin (copolymer) having two or more rare repeating units of a norbornene. Examples of the olefinic resin include (1) an addition (co)polymer of a norbornene-type monomer obtained by addition (co)polymerization of a norbornene-type monomer; (2) a norbornene-type single Addition copolymer of a body with ethylene or an α-olefin; ' (3) Addition polymerization such as an addition copolymer of a norbornene-type monomer and a non-conjugated diene, and optionally other monomers (4) a ring-opening (co)polymer of a norbornene-type monomer, and a resin obtained by hydrogenating the (co)polymer as needed; (5) a norbornene-type monomer and ethylene or α_ Ring opening (co) of olefins, and (co)polymerization as needed a resin obtained by hydrogenating a substance; (6) a ring-opening copolymer of a norbornene-type monomer and a non-conjugated diene or another monomer, and a polymer obtained by hydrogenating the copolymer as needed 201220121 a class of open-loop polymers. Examples of the polymer include a random copolymer, a block copolymer, an alternating copolymer and the like. The norbornene-based resin can be, for example, a ring-opening metathesis polymerization (ROMP), a combination of ROMP and a hydrogenation reaction, a polymerization using a radical or a cation, a polymerization using a cationic palladium polymerization initiator, or a polymerization other than the polymerization. All polymerization methods such as polymerization of a starter (for example, a polymerization initiator of nickel or another transition metal) are obtained. Among these polymers, the norbornene-based resin is preferably a polymer having at least one repeating unit represented by the following formula B, that is, an addition (co)polymer. This is because the addition (co)polymer is transparent, heat-resistant, and flexible. Therefore, for example, after forming an optical waveguide, an electric component or the like may be attached to the optical waveguide 1 via solder. In this case, the optical waveguide 1 can also be imparted with high heat resistance, that is, reflow resistance. [Chemical 1]

The constitutive ice m compound is appropriately synthesized by, for example, a norbornene rare monomer (a norbornene-based monomer or a crosslinkable norbornene-based monomer represented by the structural formula c described later). . Further, when the wave tube 1 is incorporated into various products, for example, the product is used in an environment of about 80 C. In this case, it is also preferable to add (co)polymer from the viewpoint of ensuring heat resistance of 42 201227021 HUUlepxf. The norbornene-based resin is preferably a repeating unit containing an ice-reducing (tetra) having a substituent containing a polymerizable group or a repeating unit having a norbornne having a substituent containing an aryl group. The repeating unit of norbornene having a substituent having a polymerizable group is preferably a repeating unit of norbornene having an epoxy group-containing substituent, and a norbornene having a substituent containing a (meth)acryl group. The repeating unit and the repeating unit of norbornene having a substituent containing an alkoxyalkyl group are one less than two. The polymerizable group is preferred because it has high reactivity in each of the hiding sheets. Further, when a lion' comprising a repeating unit of two or more kinds of the polymerizable group-containing norbornene is used, flexibility and resistance can be achieved. On the other hand, by repeating a monoterpene containing norbornene having a substituent having an aryl group, the extremely high hydrophobicity from the aryl group can be utilized to more reliably prevent dimensional changes and the like caused by water absorption. Further, the norbornene-based resin is preferably a repeating sheet containing an alkyl norbornene. Further, the alkyl group may be any of a linear or branched form. By the repeating unit containing an alkyl norbornene, the norbornene-based resin can impart high flexibility due to an increase in flexibility. Further, the norbornene-based tree ruthenium containing a repeating unit of an alkyl norbornene is also preferable because it has excellent light transmittance to a specific wavelength region (particularly, a wavelength region in the vicinity of 850 nm). Specific examples of the norbornene-based resin containing the repeating unit of the above norbornene include a homopolymer of hexylnorbornene, a homopolymer of phenylethylnorbornazole 43 201227021, and a benzyl norbornene. A homopolymer, a copolymer of hexylnorbornene and ethylnorbornene, a copolymer of hexylnorbornene and benzylnorbornone 1, and the like. w 9 For the above reasons, the norbornene-based resin is preferably a resin represented by the following formula (4) or formula (8) to formula (1). [Chemical 2]

(1) In the formula (1), Ri represents an integer (10) of 1 to 3 of the alkane A having a carbon number of 1 to 10, and 2: 降: a repeating unit of the formula: The icing tablet of the Nin oxy group is polymerized by dissolving the norbornene flakes with &amp; in a stupid manner. _ Get the formula (1) ^ (A) with the phase medium to f = 3J) Resin. 44 201227021 40018pif

(A) Further, the method for producing norbornene having an epoxy group in the side chain is as described in (i) and (ii), for example. (i) Synthesis of norbornene sterol (NB-CH2-OH) to produce cyclopentadiene (CPD) and alpha-dilute hydrocarbon (CH2) by cleavage of dicyclopentadiene (DCPD) =CH-CH2-OH) reacts at high temperature and pressure. [Chemical 4]

Δ 〇

x= o^oh (ii) Synthesis of epoxy-oxynorbornene It is formed by the reaction of norbornne with epichyl alcohol (epichl〇ro hydrin). [Chemical 5]

45 201227021 -----rit In addition, in the case of the formula (1, the methylene group of the moral alcohol is ^ when the b is 2 or 3, the compound containing the formula B, the propyl group, etc. is used. ^, A compound having a butyl norbornene disk group of 1, respectively, in terms of flexibility and heat resistance, for example, a methyl ether borneol copolymer, a fluorenyl norbornene copolymer, and a copolymer of lanyl ether norbornene. 6]

. (In the formula (2), R2 represents an alkyl group having a carbon number of 1 to 10, R3 represents a hydrogen ', a sub or a mercapto group 'e represents an integer of Q 3 and 3, and a ring 2 is 2 G or less.) A repeat containing the formula (2) The norbornene-based resin of the unit can be used for the medium by dissolving the norbornene of the ruler, the ruler 2, and the acrylic acid and the methacrylic acid: norbornene in the side chain in the toluene. In addition, in the norbornene-based resin containing a repeating unit represented by the formula (2), it is particularly preferable to use 46 201227021 HUUIOpif R2 from the viewpoint of coexistence of flexibility and heat resistance. Is a carbon number of 4 to 10 alkyl groups and borneol is dilute with acrylic acid 2 (5 - ice-free W1 compound 'such as · butyl borneol thin and acrylic 2 ice-free = base) copolymer, hexyl norbornene and Acrylic acid 2_(5-ice-removing), a copolymer of hydrazine vinegar, a fluorenyl group, and a copolymer of an oxime ester.

In the formula (3), the core represents a carbon group having a carbon number of 1 to 10, and each of the ruthenium 3 represents a group having a carbon number of 1 to 3, and d represents an integer of 10 to 3 (2) ❺ 2 〇 or less.) The resin of the repeating unit of 3) can be solution-polymerized by using the above-mentioned Ni compound (4) for a catalyst by dissolving a norbornene having &amp; = olefin and a fluorenyl thiol group in the side chain. And a few. Further, in the norbornene-based polymer represented by the formula (3), a compound having a carbon number of 4 to 10, a d of 1 or 2, and a fluorenyl group or a acetophenone, for example, a butyl group, is particularly preferable. Copolymer of norbornene with norbornene ethyl triterpene &amp; decane, copolymer of hexylnorbornene with norbornene ethyltrimethoxy decane, fluorenyl norbornene and norbornene Ethyltrimethoxy 201227021 ^uuiopif copolymer of base stone court, copolymer of butyl norbornene and triethoxydecyl norbornene, copolymer of hexyl norbornene and triethoxynonylnorbornene a copolymer of fluorenyl norbornene with triethoxynonylnorbornene, a copolymer of butyl norbornene and trimethoxydecylnorbornene, a hexyl norbornene and a tridecyloxydecyl group. a copolymer of norbornene, a copolymer of fluorenyl norbornene and a trimethoxydecylnorbornene, and the like. [化8]

(In the formula (4), 'wind 5' represents an alkyl group having 1 to 1 carbon atoms, and the substituents independently represent the substituents represented by the following formulas (5) to (7), but they are not simultaneously the same Further, P4/(q4 + r) is 2 Å or less.) The resin containing the repeating unit of the formula (4) can be obtained by causing a norbornene having a heart and having a Α!* on the side chain. The borneol is dissolved in a ruthenium, and the Ni compound (A) is used for a solution polymerization to obtain a solution. [化 9] ^

48 201227021 (In the formula (5), 'e denotes an integer of 〇~3.), f denotes 1~3 of the whole [10] jCHji)g °v° 6 r6 hydrogen atom or methyl group, g represents 0~3 (Integer represented by '116 in the formula (6).) (Chemical Formula 11) (CH2)hr 1&gt;, (7) χ4 \ χ4 χ4 (7) towel ' Χ 4 points of the base of the carbon number 1 to 3, η is not 0 An integer of ~3. Further, the drop of the repeating unit represented by the formula (4) is as follows: butyl pentane thin, hexyl _ or = ene, any 2-(5-norbornyl) decyl acrylate, and Ice 49 201227021 Α η :: Triethoxy Weiyl norborner 埽 or - methyl lactyl-based borneol _ any one of the ternary borneol, hexyl norbornene or fluorenyl norbornene ,:: Acid 2-(5-norbornyl and methylepoxy-propanoid borneol bis-norbornene or sulfhydryl-norborn dimethyloxy-=== s-triylnorbornene Any one of the ternary copolymers, etc.

Atom, U di, methylene, X2 represents a carbon atom or; an early radical, x main 1 represents an oxygen atom or j represents an integer of 1 to 3, 晌 5 is 20 or less:), an integer not 0 to 3, Dissolved in a stupid, (d) compound used for contact. )=== 201227021 40018pif. Further, in the norbornene-based resin containing the repeating unit represented by the formula (8), it is preferable that X1 is an oxygen atom, χ2 is a cerium atom, and &amp; is a phenyl resin. Further, from the viewpoints of flexibility, heat resistance, and refractive index control, it is particularly preferable that R7 is a carbon number of 4 to 1 G, a Χι ride atom, &amp; is a Shi Xi atom, a ruthenium is a phenyl group, and R8 is a fluorenyl group. a compound wherein i is 1 and j is 2, for example, a copolymer of butyl norbornene and diphenyl f-norbornene methoxy wei, hexyl norborne (tetra) and diphenylmethyl norborn (tetra) methoxy Copolymer of kewei, copolymer of fluorenyl norbornene and diphenylmethylnorbornene methoxy fluorene, and the like. Specifically, it is preferred to use a norbornene-based resin as described below. [Chem. 13]

(R7, p5, q5, and i in the formula (9) are the same as those in the formula (8).) In terms of flexibility, heat resistance, and refractive index control, 'R? in the formula (8) is An alkyl group having 4 to 1 Å carbon atoms, a methylene group of X2, a carbon atom of X2, a phenyl group, a hydrogen atom, and a hydrogen atom, and i is 〇, and f is a compound of 2012 201221 21 40018 pif, for example, a butyl group. Copolymerization of borneol with stupidyl ethyl norbornene, copolymer of hexyl norbornene with phenylethyl norbornne, copolymer of fluorenyl/tablene with stupidyl ethyl norbornene, and the like. Further, as the norbornene-based resin, the following resins can be used. [Chem. 14]

(10) ^ (In the formula (10), R10 represents an alkyl group having 1 to 10 carbon atoms, Ru represents an aryl group 'k is 〇 or more, 4 or less; and p6/q6 is 20 or less.) Further 'Pi/qrp^qs Further, p5/q5, p6/q6 or p4/(q4 + r) may be 20 or less, preferably 15 or less, more preferably 0.1 to 10. Thereby, the effect of the repeating unit containing a plurality of norbornenes is sufficiently exerted. On the other hand, as described above, the polymer 915 may be an acrylic resin, a methacrylic resin, an epoxy resin, a polyimide, an anthrone resin, a gas resin, a polydecane, or a polyamino phthalate. Wait. Examples of the 'acrylic resin and the mercapto acrylic resin include poly(methyl acrylate), poly(decyl methacrylate), poly(epoxy acrylate), poly(epoxy acrylate), and poly (Amino acrylate), poly(amino methacrylate), polyacrylic acid, polyacrylic acid, poly(isocyanato acrylate), poly(isocyanate thiol acrylate), poly(cyanic acid) Ester 52 201227021 4UUJ8pif propyl acrylate), poly(cyanate methyl sulphuric acid vinegar), poly(thio epoxymethyl propyl acrylate) (10) M, poly(methyl acetoacetate 埽 酉Purpose), , (Cicheng dilute propylene (methyl methacrylate and its; acicular acrylate copolymer - epoxy acrylate copolymer; two: two = polymer), benzene, two or more composite materials For example, one type of smog and oxygen of smog and agglomerate: alicyclic epoxy resin, bismuth, bismuth bisphenol F type epoxy resin, biphenyl type epoxy having benzene skeleton Resin, containing naphthalene ring |

Dipentane-epoxy resin of Si-diene skeleton: Phenol: heart-coating oxygen resin, age-old acid-type ring-filled bismuth, A-resin, material (4) Chi epoxy (four), one or the other, The imine is not particularly limited as long as it is obtained by ring-sealing and curing the t-proline which is a precursor of the polyacrylonitrile resin. The h polyproline can be obtained, for example, by reacting tetrahydrofuran anhydride with a diamine in an equimolar ratio in N,N-dimercaptoacetamide. Among them, examples of the tetracarboxylic dianhydride include pyromellitic dianhydride, 3,3',4,4'-biphenyltetracarboxylic dianhydride, and 2,2_bis (2,3-dicarboxyl stupid). 1,1,1,1,3,3,3-hexafluoropropane dianhydride, 2,2-bis(3,4-dicarboxyphenyl)_1,1,1,3,3,3-hexafluoro Propylene dianhydride, 3,3',4,4,-diphenylfluorene with tetradecanoic acid dixanthine, bis(3,4-dicarboxyphenyl)ether dianhydride, bis(3,4-dicarboxybenzene Base) continued acid 53 201227021 40018pif dianhydride and the like. On the other hand, the diamine may, for example, be an exo-phenylenediamine, a p-diamine diamine, a 3,4'-diaminodiphenyl ether, or a 4,4,-diaminodiphenyl group. 4 4,_Aminodiphenyl, diaminodiphenyl, 2,2-bis(4-amine phenoxyphenyl)propane, 2,2-bis(4-aminobenzene) Oxyphenyl) hexafluoropropane, hydrazine, 3_bis(4-aminophenyloxy)benzene, 1,4-bis(4-aminophenoxy)benzene, 2,4-diaminocarbyl, 2,6-monoaminotoluene, diaminodiphenylmethane, 4,4'-diamino 2 2 ·dimercaptobiphenyl, 2,2-bis(trimethylene)-4,4 ·-Diamine-based stupid and the like. Further, examples of the anthrone-based resin include an anthrone rubber and an anthrone elastomer. These anthrone-based resins are obtained by reacting an anthrone rubber monomer or a curing agent. For example, a compound containing a methyl oxalate group, an ethyl oxalate group, and a styryl group can be mentioned. The soil is additionally used as a compound for cutting and exposing the sputum, and Μ ft' is preferably a compound obtained by conducting an epoxy group, an ethylene group, or a acetophenanyl group. Soil; a polymer obtained by adding two or more polymerizable unsaturated bodies to a free-filament-single-single compound, a fluorine-containing system, &gt; early body, and t s. Dioxo &amp; exemplification: perfluoro(2,2·dimethyl-u-yl·1,3-dioxolane) (etc. earth., _-miltosan), perfluoro (4-methoxy other fluorine-containing monomer may, for example, be perfluoro(allyl vinyl ether), 54 201227021 -TUUl opif perfluoro(butenyl vinyl ether), etc. H, a self-polymerizable monomer such as Fluorine, perfluoro(fluorenyl vinyl ether), etc. It can be: if the main chain contains only the &amp; atomic polymer, it is linear or branched. Moreover, 1 atom in 1 In addition to the &amp; atom, an organic substituent such as a hydrogen atom, a hydrocarbon group or an alkoxy group is bonded to the group. For example, a ruthenium group having a carbon number of 1 to 10 which can be substituted by a self-supplement, a stone inverse number ^ Aromatic group of 4 or the like. Specific examples of the aliphatic hydrocarbon group include a bond such as a methyl group, an ethyl group, a propyl group, a dihexyl group, a fluorenyl group 1 1-2 propyl group, and a ninth hexyl group. Soil, methylcyclohexyl _ alicyclic hydrocarbon group, etc. Specific examples of the base, γί 烟 base: phenyl, p-tolyl, biphenyl ethane Ϊ ί: Γ carbon number 1 ~ 8 'specific The methoxy group, the ethoxy group, the present oxy group, Oxygen, etc. ^, the polyurethane may be any polymer as long as it is a polymer containing an amino formate urethane bond (--0-ΝΗ-) on the primary bond. Further, an amine may be contained in the main chain. a urethane bond and a urea bond (_nh_c〇_nh_, =H-caN=, or a urethane of a shed (αΝ&lt;), a brain copolymer, etc. Further, the refractive index of each portion of the core layer 13 is based on Since the refractive index of the polymer 915 of each part is determined by the relative magnitude relationship between the refractive index of the monomer and the refractive index of the monomer, the refractive index of the poly 55 201227021 40018pif compound 915 can be appropriately adjusted depending on the type of the monomer to be used. In order to obtain a polymer 915' having a relatively high refractive index, a molecule is selected to catalyze a monomer having an aromatic ring (aromatic group), a gas atom, a handle or a gas atom to synthesize (polymerize) the polymer 915. In the aspect of the invention, a polymer 915 having a relatively low refractive index is obtained, and a polymer 915 having an alkyl group having an alkyl group or an atomic structure or an ethereal structure (ether group) in the knive structure is synthesized. The high refractive index of the norbornene rare resin preferably contains aryl = lower Sheet _ repeating single-resin resin. The norbornene-based resin has a particularly high refractive index. The aromatic filaments of the repeating unit of the aromatic-based norbornene (for example, aryl-based exemplified by: styrene, phenylethyl, Phenylpropyl, phenylbutyl, bis-yl, naphthylpropyl, g-ethyl, propylpropyl, etc., particularly preferably a di-n-ethyl group. A norbornene-based resin having the repeating unit In addition, the polymer 915 as described above preferably has an autonomous chain split, and at least a part of the molecular structure of the molecular structure is separated by irradiation of actinic radiation. Detachable base (pendam fup). Namely, by the detachment of the detachment group, the refractive index of the polymer 915 is low, so that the polymer 915 can have a helmet (four) radiance difference depending on the irradiation of the active radiation. Further, such a polymer 915 having a debonding group may, for example, be a polymer having at least one of a molecular structure, a 〇-structure, a -Si-aryl structure, and a -Ο-Si- structure. The detachable group is relatively easy to remove by the action of a cation. The detachment property of the resin is reduced by the detachment, and the detachment property of the resin is preferably _Si_diphenyl structure and至少|At least one of the diphenyl structures, the polymer 915 having a leaving group on the side chain, for example, a cyclohexene, a cyclooctene ketone monomer polymer, a norbornene thinner, norbornadiene (n〇rb〇rnadiene), dicyclopentadiene, dihydrodicyclopentadiene, tetracyclotetradecyl, tricyclopentadiene, dihydrotricyclopentadiene, tetracyclic indenyl dihydrotetracyclopentane A cyclic olefin resin such as a polymer of a polycyclic monomer such as a diene. Among these polymers, one or more cyclic olefin resins selected from the group consisting of polycyclic monomer monomers are preferably used. Thereby, the heat resistance of the resin can be improved. Further, a known form such as random polymerization or block polymerization can be applied to the polymerization form. For example, as a specific example of polymerization of a norbornene-type monomer, a copolymer of a (co)polymer of a norbornene-type monomer, a norbornene-type monomer, and a copolymer of a monomer such as a heart olefin, and the like, and The hydride or the like of the copolymers is in accordance with a specific example. The cyclic olefin resin can be produced by a known polymerization method. In the polymerization method, an addition polymerization method and a ring-opening polymerization method are used. Among the above, a cyclic olefin resin obtained by an addition polymerization method is preferred ( In particular, a norbornene-based resin) (that is, an addition polymer of a norbornene-based compound). Thereby, transparency, heat resistance, and flexibility are excellent. Further, the norbornene-based resin having a cleavable group in the side chain is, for example, a resin of the norbornene-based resin represented by the formula (8), wherein X1 is an oxygen atom, X2 is a halogen atom, and Ar is a phenyl group. 201227021 40018pif Further, in the formula (3), a portion of the si_0_X3 of the alkoxyalkyl group is removed. In the case of using a norbornene-based resin of the formula (9), it is presumed that the reaction is carried out in the following manner using an acid generated by a photoacid generator (described as PAG (Photo Acid Generator)). Here, only the portion of the detachment group is shown here. In addition, the case of i = 1 is explained. [化15]

Further, in addition to the structure of the formula (9), a norbornene-based resin having an epoxy group in a side chain may be used. By using such a norbornene-based resin coating, it has an effect of forming a layer 13 excellent in adhesion to the coating layers II, 12 or the substrate. a Specific examples include the following examples. [化16] 58 201227021 Huuiopif

(In the formula (31), p7/(q7 + r2) is 2 Å or less.) The compound represented by the formula (31) can be, for example, diphenylmethylnorbornene methoxy erythrene, -CHrO- The norbornene of SKCHsXPh)2 and the compound containing = in toluene are used for the catalyst; the line; == another aspect, other debonding groups are, for example, terminal = ^taphe_e). The detachment-based radical is relatively easy to detach. (3) The content of the de-hybrid group is not particularly determined, and 1 G weight% to 8 gf 2 of the polymer 915 having a release group is preferably 20% by weight to 60% by weight. If the content is above &gt; two flexibility and the refractive index read Wei (the refractive index difference is particularly excellent in the tactile properties. g sub-storage = for example, by increasing the content of the dissociative group, the width of the fold can be made. 59 201227021 40018pif Additive 920 contains a monomer and a polymerization initiator. ((Monomer)) The monomer is a compound which reacts in the irradiation region of the actinic radiation to form a reactant by irradiation of active radiation described later. At the same time, the monomer diffuses and moves, whereby a refractive index difference can be generated between the irradiated region and the unirradiated region in the layer 910. The monomer reactant can be exemplified by a polymer formed by polymerizing a monomer in the polymer 915 (polymer) And a crosslinked structure in which the monomers crosslink the polymers 915 with each other, and at least one of the branched structures in which the monomers are polymerized in the polymer 915 and branched from the polymer 915. However, the irradiated region is not irradiated. The difference in refractive index generated between the regions is generated based on the difference between the refractive index of the polymer 915 and the refractive index of the monomer, since the monomer contained in the two additive 920 is considered to have a relationship with the refractive index of the polymer 915. Come to choose Specifically, in the layer 910, when the refractive index of the desired irradiation region is increased, the polymer 915 having a relatively low refractive index is used in combination with the monomer having a high refractive index relative to the polymer 915. On the other hand, in the case where the refractive index of the irradiation region is desired to be lowered, the polymer 915 having a relatively high refractive index is used in combination with a monomer having a refractive index with respect to the polymer 915. The refractive index "high" or "low" does not refer to the absolute value of the refractive index, but refers to the relative relationship between a certain material. Moreover, in the reaction of the monomer (reaction of the reactant), the layer 91 is irradiated In the case where the refractive index of the region is lowered, the portion forms a refractive index distribution 201227021 '40018pif::::: cloth = the refractive index of the domain rises. This portion constitutes a small flat basket k which is preferably a polymer having a polymer 915 The refractive index difference of 0.01 or more is a single 2-phase gluten, and it is not particularly comparable to the monomer 妓 and 妓 _ _ _ _ _ _ _ _ _ _ _ _ _ _ Body, epoxy monomer, oxygen system A styrene-based monomer or the like may be used alone or in combination of two or more kinds. The slings are preferably used as a monomer or a condensed polymer. Or a norbornene system, by using a ring-shaped monomer or a wire ring to ring the ring, thereby obtaining a monomer that can react quickly. In addition, by using ice-removing &gt; Further, a core layer 13 (optical waveguide 1) excellent in light transmission performance and excellent in resistance and flexibility is obtained. Among them, the molecular weight (weight average molecular weight) of the monomer having a cyclic ether group or the molecular weight of the oligomer ( The weight average molecular weight) is preferably 100 or more and 400 or less, respectively. The monomer having an oxetanyl group and the oligomer having an oxetanyl group are preferably compounds selected from the group consisting of the following formulas (11) to (20). By using these compounds, it is excellent in transparency at a wavelength of around 850 nm, and it is advantageous in that flexibility and heat resistance can coexist. Further, these compounds may be used singly or in combination. [Chem. 17] 61 (11) 201227021 40018pif c2h

[化18] c2hs

(12) [Chem. 19] ◊ T (13) [Chem. 20] C2H5^-〇 (H) [Chem. 21]

62 (16 ) 201227021 [化 22] [Chem. 23] c2h5 PC2H5 〇 , 〇 c2h5 (17 ) 0 [Chem. 24]

(18) (In the formula (18), n is 0 or more and 3 or less.) [Chem. 25]

63 (20) (20)201227021 [Chem. 26]

In the monomer and the oligomer as described above, from the viewpoint of ensuring a difference in refractive index from the polymer 915, it is preferred to use the formula (13), the formula (I) 5), the formula (16), the formula (17), A compound represented by the formula (2〇). Further, in consideration of the difference in refractive index of the resin of the polymer 915, the fact that the molecular weight is small and the mobility of the monomer is high, and the monomer is not easily volatilized, it is particularly preferable to use the formula (2〇). A compound represented by the formula (15). Further, as the compound having an oxetanyl group, the compounds represented by the following formulas (32) and (33) can be used. The compound represented by the formula (32) may be a trade name of TES0X manufactured by Toagosei Co., Ltd., and the compound represented by the formula (33) may be a trade name of 东亚x_Sq manufactured by Toagosei Co., Ltd., or the like. [化27] 〇Et

[化 28] 64 (33) 201227021 40018pif

Ο

(In the formula (33), or 2.) The monomer of the oxy group or the oligomer having an epoxy group is, for example, a compound of 5::. The epoxy group-containing monomer or oligomer is polymerized by ring opening in the presence of an acid. As the monomer having an epoxy group or the oligomer having an epoxy group, the compounds represented by the following two (34) to (39) can be used. Among them, the alicyclic epoxy monomer represented by the formula (36) to the formula 09) is preferred from the viewpoint of having a large strain energy of the epoxy ring and excellent reactivity. Further, the compound represented by 'S (34) is a thin epoxy group, and such a compound can be, for example, a tablet manufactured by PlOmerus. The compound represented by the formula (35) is γ-glycidoxypropyltrimethoxysulfonium. As the compound, for example, Z-6040 of D〇w Corning Toray Silicone Co., Ltd. can be used. Further, the compound represented by the formula (36) is 2-(3,4-% oxygen%:hexyl)ethyltrimethoxylate. For the compound, for example, E0327 manufactured by Tokyo Chemical Industry Co., Ltd. can be used. Further, the compound represented by the formula (37) is 3,4-epoxycyclohexanecarboxylic acid_3',4'-epoxycyclohexenylcarboxylate. For the compound, for example, Celloxide 2021P manufactured by Daicd Chemical Co., Ltd. can be used. Further, the compound represented by the formula (38) is 1,2-epoxy-4-vinylcyclohexane, and for the compound, for example, Celloxide 2〇00 manufactured by Daicel Chemical Co., Ltd. can be used. 65 201227021 Further, the compound represented by the formula (39) is 1,2:8,9-diepoxycyclohexane, and the compound can be, for example, Celloxide 3000 (Daicel Chemical Co., Ltd.). [化29]

[化32] 66 201227021

ο [化33]

The butyl monomer, the oxirane, and the epoxy group-containing oligomer can be used as a monomer having an oxetanyl group and an epoxy group. Although the oligobutyl-containing oligomers of the chlorinated oligo-butyl group start the 卩(4)-reverse of L, the growth of the epoxy group is relatively simple, but should be fast, but the raw: anti; The starting point of the polymerization starts, and the oxirane having a monoepoxy group having an oxetanyl group and a monomer having a Wei group and a refractive index difference having an unirradiated portion are surely produced. . "..., shot lazy 67, 227021, ~~Hit body", the monomer represented by H'j^^(2G) as "the first single is the first single _ AH /! 4 "the second monomer" , the weight of the two monomers is /Ul; ^#\, when the ratio is used in combination (about ～1, more =~0,), ^, ·6 or so. When the combined ratio is in the above range = high, the balance between the reactivity of the precursor and the balance of the tube 1 _ heat is expressed in the monomer of the second monomer, and the oxirane of the formula (20) is exemplified. In the monomer of the group or having a monomer, it is preferred to use an epoxy compound (particularly: a mouthwash) and a bifunctional oxocyclic compound (and a monomer having an oxetanyl group) At least the old ones. By using these fourth brackets, the reactivity of the first precursor with the polymer 915 can be improved, whereby the gas permeability can be maintained and the heat conductivity of the waveguide can be improved. Specific examples of such a second monomer include a compound of the formula (15), a compound of the formula (12), a compound of the above formula (8), a compound of the above "(), a compound of the above formula (19), and the above formula. (34) The compound of the formula (39). The term "norborn norbornene monomer" is a generic term for a monomer containing at least i of the norbornene skeleton represented by the following structural formula A, and examples thereof include hydrazine. The compound represented by the structural formula C. [Chem. 35] 68 201227021 4UUI»pif Ο [Chem. 36]

A &amp; [wherein, a represents a single bond or a double bond, and Rn~Ris each independently represents a hydrogen atom, a toroidal or unsubstituted hydrocarbon group, or a functional substituent, and an integer of 〇5 is exemplified; In the case of &amp; double key, any of ~ and any of Han and Heart 5 does not exist. Examples of the unsubstituted hydrocarbyl group include a linear 1-branched carbon number of 1 to 1 and a straight bond == carbon number of 2 to 1 G (C2 to Ci). Alkynyl group, carbon number 4~12

Cc 1 Ll2) decyl, carbon number 6~12 C312, etc. Two f V green 7~24 (C7~C24) aryl group (aryl r~If~c, &Ri3'Ri4 and heart can also be respectively It is an alkylene group having a carbon number of 10 (Cl to Cio). 69 201227021 40018pif In addition to the above-mentioned precursors, for example, acrylic acid (mercaptopropionic acid), monomers may be exemplified by acrylic acid, methacrylic acid, and acrylate. As the mercapto acrylate, decyl acrylate, decyl decyl amide, acrylonitrile, or the like, one type of these monomers or a combination of two or more types may be used. Specific examples thereof include (mercapto)acrylic acid 2 -ethylhexyl ester, (fluorenyl) cyclohexyl acrylate, 2-butoxyethyl (meth) acrylate, etc. Further, examples of the vinyl ether monomer include mercapto vinyl ether and ethyl ethyl sulphate. N-propyl vinyl mystery, isopropyl vinyl ether, n-butyl ethyl ether, t-ethyl thorn, tributyl acetyl, n-pentyl vinyl fluorene, n-hexyl vinyl ether, n-octyl vinyl ether, positive Dodecylethylene _, 孓 ethyl hexyl ethene hexagram, hexyl ethane yl group, acetyl group, or carbyl group, may be used in these monomers or 2 In addition, the stupid vinyl monomer may, for example, be styrene or divinyl stray, and the above-mentioned monomers may be used in combination or in combination of two or more. The combination of the substances 915 is not particularly limited and may be any combination. In addition, at least a part of the monomer may form an oligomer as described above. The amount of the monomers added is 1 part by weight relative to the weight of the polymer. It is preferably 1 part by weight or more and 5 parts by weight or less, more preferably 2 parts by weight or more and 2 parts by weight or less. By virtue of the fact that the core layer/layer layer _ refractive index can coexist with flexibility and heat resistance. ((Polymerization Initiator)) The polymerization initiator is acted upon by irradiation with active radiation to promote the reaction of the monomer, which is added as needed in consideration of the single-anti-ship. 201227021

The initiator is based on the polymerization or cross-linking of the monomers. For example, it is preferred that the acrylic acid (methacrylic acid) L body mainly uses a radical polymerization starting, an oxetane monomer, and a vinyl ether monomer. Examples of the agent include benzophenone and acetophenone.

In the case where a monomer having a ring-shaped shunt is used as a monomer, a cationic polymerization initiator (photoacid generator) as described below is used. For example, diphenyl-trifluoromethyl acid salt, tris(4_t-butylphenyl) tri-sodium citrate, etc., for heterophenyl diazonium six gas tank acid '&quot; salt, etc. Diazo rust salts, ammonium salts, scale salts, diphenylsulfonium trifluoromethanesulfonate, (diisopropylphenyl)phosphonium-tetrakis(pentafluorophenyl)borate and the like, bismuth salts Azide diazide, bis(phenylsulfonyl) diazomethane, etc. '1-phenyl-1-(4-methylphenyl) quinone oxybenzoic acid Sulfonic acid esters such as methane, N-hydroxynaphthylimine-trifluoromethanesulfonate, disulfones such as diphenyldiazine, and tris(2,4,6-trichloromethyl)- A compound such as a triazine or a triazine such as 2-(3.4-methylenedioxyphenyl)-4,6-bis(trichloromethyl)-s-triazine is used as a photoacid generator. Further, the photoacid generators may be used singly or in combination of plural kinds. 71 201227021 The content of the polymerization initiator is preferably from 0.01 part by weight to 0.3 parts by weight, more preferably from 0.02 part by weight to 0.2 part by weight, based on 100 parts by weight of the polymer. Thereby, there is an effect of improving reactivity. Further, in the case where the reactivity of the monomer is remarkably high, the addition of the polymerization initiator can be omitted. Further, the additive 920 may contain a sensitizer or the like in addition to a monomer or a polymerization initiator. Wherein the 'sensitizer' has a function of increasing the sensitivity of the polymerization initiator to light, reducing the time or energy required for activation (reaction or decomposition) of the polymerization initiator, or changing the wavelength of light to be suitable for polymerization. The function of the wavelength of activation of the initiator. The sensitizer 适当 is appropriately selected depending on the sensitivity of the initiator or the peak wavelength of the absorption of the sensitizer, and is not particularly limited, and examples thereof include, for example, 9,10-dibutoxy fluorene (CAS number). Classes such as xanthones, anthraquin〇nes, phenanthrenes, Chrysenes, and benz pyrenes (No. 76275-14-4) ), flu〇ranthenes, rubrenes, pyrenes, indanthrene (), thioxanthen-9-ones Alternatively, the condominants may be used alone or as a mixture. &quot; Specific examples of the sensitizer include, for example, 2_isopropyl_9H_thioxan-9, a 4-isopropyl-5HH9-one, a fine base made of a gas ice propoxy group, and a phenylene. Phenothiazine or a mixture thereof. The content of the sensitizer is preferably 9 72 201227021 W Λ jt 0.01% by weight or more, more preferably 5% by weight or more, even more preferably 5% by weight or more. Further, the upper limit is preferably 5% by weight or less. In addition, the additive 920 may further comprise: a catalyst precursor, a blue medium, an anti-A chemical agent, an ultraviolet light absorption (IV) a light stabilizer, a Wei coupling agent, a coating surface modifier, a thermal polymerization inhibitor, and a leveling agent. , surfactant, colorant, storage stabilizer, plasticizer, lubricant, filler, inorganic particles, anti-aging agent, wettability improver, antistatic agent, and the like. The layer 910 comprising the polymer 915 and the additive 920 as described above has a predetermined refractive index by the action of the additive 92 均 uniformly dispersed in the polymer 915. ~ [2] Next, a mask (shield) 935 having an opening (window) 9351 is prepared, and the layer 910 is irradiated with active radiation 930 via the mask 935 (refer to Fig. 9). Hereinafter, a case where a person having a refractive index lower than that of the polymer 915 is used as a single body will be described as an example. That is, in the example shown here, the irradiation region 925 of the actinic radiation 930 mainly becomes the side cladding portion 15. Therefore, in the example shown here, an opening (window) 9351 corresponding to the pattern of the side surface portion 15 to be formed is mainly formed on the mask 935. The opening 9351 forms a penetration portion through which the irradiated active radiation 930 penetrates. Further, the pattern of the core portion 14 or the side surface portion 15 is determined based on the refractive index distribution W formed by the irradiation of the active radiation 930, and therefore the pattern of the opening 9351 does not completely coincide with the pattern of the side surface portion 15. There are cases where the above two patterns are slightly deviated. 73 201227021 The 40018pif mask 935 may be a pre-formed (additionally formed) mask (e.g., a plate-shaped mask)' or a mask formed on the layer 9iG by, for example, a vapor phase film formation method. Preferred examples of the soil as the mask 935 include a photomask made of a quartz glass PET substrate, a template mask, and a metal thin film formed by a vapor phase deposition method (evaporation, sputtering, etc.). Some of these masks are particularly useful for use, masks or stencils. The system is not only capable of forming a fine pattern with high precision, but also being easy to handle, and improving productivity. In addition, in Fig. 9, the opening of the masking milk (the window is the active radiation of the surface #, the irradiation area of the line 930 925 _ In the case where the cover is partially removed, the use of the quartz glass or the PET substrate or the like may be used as the shield of the actinic radiation 93G in which the masking material of the metal material is provided. The portion other than the middle portion of the mask serves as the window (the active radiation 93 used in the penetrating portion is a chemical reaction (change) in the polymerization, and the detachable group contained in the polymer 915 can be detached. For example, in addition to identifiable, ultraviolet light, red laser light, electron beam or xenon ray may be used. The active radiation radiant trees are selected according to the surface of the polymerization initiator or the detachable group (four). The case where the lie is contained is appropriately selected according to the sensitization type (four), and is not limited to, and has an active radiation having a peak wavelength in the range of wavelengths of 200 nm to 45 〇 nm. The initiator is activated and the detachable group is relatively easily detached. 201227021 40018pif 2 In addition, the irradiation dose of the active radiation 93 较佳 is preferably about /J/cm 2 to 9 j/cm or more preferably 0·2 J/cm 2 . ～6 J/cm2 or so, particularly preferably about 0.2 J/cm2 to 3 J/cm2. The right side of the layer 91〇 is irradiated with the active radiation 930 through the mask 935, and the polymerization initiator is in the sensible region, 925. By activation, the monomer is polymerized in the irradiation region 925. If the monomer is polymerized, the monomer in the radiation region 925 is decremented by 4', so that the monomer in the unirradiated region _ diffuses and moves to the irradiation. The region 925. As described above, the polymer 915 and the monomer are rotated by the phase difference, so that a refractive index difference is generated between the irradiation region 925 and the non-irradiation region 94〇 as the single coffee diffuses. Fig. 13 is a view for explaining a case where the refractive index difference between the irradiated region milk and the non-irradiated region_ is 2, and the position of the layer 910 is taken as the horizontal axis, and the refractive index of the cross section is taken. The graph of the refractive index distribution when it is the vertical axis. ^The real shot, because the use of the binder is less than the polymerizer, The diffusion shifts the 'folding rate of the unirradiated area _, and the refractive index of the illuminating area 925 decreases (the concentration gradient of the monomer formed with reference to FIG. 13 causes a single; hair: corresponding = 940 overall monomer is not aligned toward the domain = moving to the outer monomer to the opposite side = - as shown in Fig. 13 (4), the high refractive index portion is formed on the side of the unirradiated region 94 on the side of the non-irradiated region 94 at the boundary between the irradiated region 925 and the uncovered 75 201227021 = region 940 The low refractive index portion L is formed on the 925 side. The high portion and the low refractive index portion [formed by the monomer expansion as described above] are formed in a smooth curve. Specifically, for example, a substantially U-shaped convex upward, low fold: rate. P L is formed in a substantially U-shape, for example, convex downward. Further, the polymer obtained by polymerizing the monomer as described above has a refractive index of substantially the same as the monomer before polymerization (the refractive index difference is about (10) (1) or so). Therefore, in the irradiation region, the polymerization proceeds with the monomer. The monomer amount and the amount of the substance derived from the monomer are continuously lowered. Therefore, the shape of the refractive index distribution w can be controlled by appropriately adjusting the amount of the monomer relative to the polymer or the amount of the polymerization initiator. On the other hand, in the irradiation region 940, the polymerization initiator is not activated, so the monomer is not polymerized. In addition, in the irradiation region 925, as the polymerization of the monomer proceeds, the diffusion of the monomer is easy. Thereby, the closer to the unirradiated region 940 in the irradiation region 925, the higher the concentration of the monomer naturally increases, and the smaller the refractive index decreases. As a result, the low refractive index formed in the irradiation region 925 is obtained. The distribution shape of the portion L tends to be asymmetrical to the left and right, and the gradient on the side of the non-irradiated region 940 becomes more severe. Thereby, the refractive index distribution W of the optical waveguide of the present invention is formed. Further, the polymer 915 is preferably used. The detachment group has a detachment group as described above, and the detachment group is desorbed by the irradiation of the active radiation 930, thereby lowering the refractive index of the polymer 915. Therefore, if the irradiation region 925 is irradiated with the active radiation 76 201227021 40018 pif 'dissociative radical self-polymerization The irradiation is lowered before the irradiation (the reference 930' is detached from the compound 915 at which the diffusion movement of the monomer starts, and the irradiation region 925 is shown in Fig. 13(b)). Since the year is low, the irradiation region 925 is generated integrally. Therefore, the "riding the car and the rate of the shots." As a result, the refractive index distribution W which is obtained by expanding the ice sheet nr is obtained as shown in Fig. 13 (8). Further, the change in the refractive index and the change in the map in Fig. 13 (a) occur substantially simultaneously. As this difference progresses further. Due to such a change in refractive index, the refractive index additionally modulates the amount of active radiation 930 _ irradiation, and can control the shape of the difference and the shape of the refractive index distribution, for example, by increasing the two-two, large refractive index difference. Alternatively, the active radiation 930 == 910 may be dried, or the shape of the refractive index distribution may be adjusted by adjusting the degree of drying at this time. For example, by increasing the degree of drying, the amount of diffusion of the monomer can be suppressed. Then, the layer 910 is subjected to a heat treatment. In this heat treatment, the monomer in the irradiated region 925 irradiated with light is further polymerized. On the other hand, in the heating step, the monomer in the unridized area 94 is volatilized. Thereby, the non-irradiation, the domain_in, the single-step-down is reduced, and the refractive index is increased to become close to the refractive index of the polymer 915. The heating temperature in the heat treatment is not particularly limited, but is preferably about 3 〇 t to 180 ° C, more preferably about 4 (TC to 16 Torr. Further, the heating time is preferably a monomer in the irradiation region 925. The polymerization reaction is set in a substantially complete manner, and specifically, it is preferably 〇 小时 〜 〜 2 2 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' The core layer 13 having the refractive index distribution W (refer to FIG. 10) is obtained by the principle as described above. The refractive index distribution W has a minimum value Ws, Ws2, Ws3, Ws4 converted by the low refractive index portion L ( Referring to Fig. 4 (b)), the minimum values are located at the interface of the core portion 14 and the side cladding portion 15. Further, the refractive index distribution w is related to the structural agronomic tool (4) from the monomer in the core layer 13. Therefore, the refractive index distribution W of the discharge waveguide 1 can be indirectly specified by measuring the concentration of the structure from the monomer. The concentration of the structure can be measured, for example, by using a Fourier transform infrared spectrometer (Fourier Transform- Infrared Spectroscopy, FT-I R), line analysis, surface analysis, etc. of Time of Flight-Secondary Ion Mass spectrometry (T0F_SIMS). In addition, due to the intensity distribution P of the light emitted from the optical waveguide 1 Since the refractive index distribution W has a fixed phase relationship, the refractive index distribution w can be indirectly specified by utilizing the correlation. In addition, for example, the following method can be used for direct measurement: (1) using dry, ',, member a mirror (duaibeam interference microscope) for observing interference fringes depending on the refractive index, a method for calculating a refractive index distribution based on the interference fringes; and (2) a refractive near field method (RNF) Among them, the refracting near-field method can be used for privately, for example, the measurement of 78 201227021 wuiopif described in Japanese Patent Application No. 5,332, and the interference microscope can easily measure the refractive index distribution. It is preferably used. Hereinafter, an example of the measurement order of the refractive index distribution using an interference microscope will be described. First, 'in the cross-sectional direction (width direction) The tube is sliced to obtain an optical waveguide segment, for example, sliced in such a manner that the length of the optical waveguide becomes 200 μm to 300. Then, it is filled with oil having a refractive index of L536 in a space surrounded by 2 slides. The chamber is filled with a light guide segment in the space inside the chamber to prepare a measurement sample = ', and a blank sample portion to which the optical waveguide segment is not placed. Then, the interference microscope ‘the light is divided into two, respectively, after irradiating the measurement sample portion and the product portion, and the transmitted light is combined to obtain an interference fringe photograph. The =^ step stripe is the image of the interference fringe of the light obtained by the light distribution of the segment (her distribution), and the image distribution of the 7b guided wave g in the width direction is obtained. In addition, the refractive index distribution material, by continuation of the multiple stripes = as long as the interference microscope (10) 稜鏡 moves, so that the light = = the same, so that the interval of the interference fringes or the portion 2 where the interference fringes can be formed, such as 2, Set the resolution point by the interval of 5 μη. The use of a refractive index higher than the refractive index of the polymer 915 as a single ground is the opposite of the 'radial rate', and as the monomer moves, the purpose of the movement is 'as long as it corresponds to the setting of the illumination region 925 and not" In addition, when the light having high directivity such as laser light is used as the active radiation 930, the use of the mask 935 may be omitted. [3] Then in the core layer 13 The two-layer layer is coated with a layer I, I]. Thereby, the optical waveguide tube 1 is obtained. a wherein, first, a cover layer 11 (12) is formed on the support substrate 952 (moth moxibustion Fig. 11). ^ The cover layer 11 (12) The method of forming the method may be any one of the following methods: a method of applying a varnish (a composition for forming a coating layer) containing a coating material to harden (curing), and coating a monomer having a hardenability. a method of hardening (curing) the material, etc. Then, the core layer π is peeled off from the support substrate 951, and the core layer 13 is formed to cover each other; the support substrate 952 of I 11 and the support layer 12 are formed. The substrate 952 is clamped (refer to Fig. 12 (a)). Moreover, as shown in Fig. 12 (a) As indicated by the arrow, the upper surface side of the support substrate 952 on which the cladding layer 12 is formed is pressed, and the cladding layers π and 12 are pressed against the core layer 13. 借此 Thereby, the cladding layers 11, 12 and the core layer are bonded. 13 bonding and integration (see Fig. 12 (b)). Then, the support substrate 952 is peeled off and removed from the cladding layers 11 and 12, respectively, thereby obtaining the optical waveguide 1. Thereafter, as needed, the light guide The lower surface area layer of the waveguide tube supports the film 2, and the upper surface layer covers the film 3. Further, the 'core layer 13 may not be formed on the support substrate 951, but may be formed on the cover layer 11. Further, the slope The coating layer 12 may not be attached to the core 201227021 4UU18pif layer 13, and &amp; θ is formed by coating a material on the core layer 13. In the above, the core layer 13 has been irradiated with active radiation 930 11^2 After the core portion 14 and the side cladding portion 15 are formed, the core layer 13 and the cladding layer 2 are described. However, when the active radiation 930 is irradiated, the core layer 13 and the cladding layers 11 and 12 may be laminated, and then The active radiation 930 is irradiated, and the outer core layer 13 can be laminated with a plurality of layers via the coating layer. In this case, By irradiating the active radiation 930' before the irradiation of the active radiation 930, the active radiation 930' can be irradiated, and the core portion 14 and the side cladding portion is can be collectively formed in a plurality of layers, so that the manufacturing process can be simplified. The positional deviation of the core portion 14 between the plurality of core layers 13 is substantially not generated. Therefore, the size is obtained as compared with the case where the core portion 14 and the side surface portion 15 are respectively formed on the respective core layers 13 and then laminated. The optical waveguide having an extremely high precision 1. This optical waveguide has a particularly high optical coupling efficiency when coupled with light such as a light-emitting element. (Second manufacturing method) Next, a first method (second manufacturing method) of the jth embodiment of the optical waveguide of the present invention will be described. In the same manner, the following description will be omitted. The description will be focused on the differences from the above-described first manufacturing method, and the composition of the core layer forming composition 9〇0 is different. The first manufacturing method is the same. In the second manufacturing method of the optical waveguide &amp; 1 (1), the liquid crystal film is formed by coating the core layer forming composition 900 on the support substrate 951 81 201227021 40018 pif, and then the support substrate 951 is placed on the level gauge to make the support substrate 951 The liquid film is flattened and the solution is dissolved (desolvent). Thereby, the layer 91 is obtained. [2] Then, a part of the layer 91A is irradiated with active radiation, and then the layer 91 is subjected to heat treatment, whereby a refractive index difference is generated, and the core portion 14 and the side cladding portion 15 are formed. [3] Then, the optical waveguide 1 is obtained by coating the two layers of the core layer 13 with the layer u. Hereinafter, each step will be described in order. [1] First, the core layer forming composition 900 is prepared. The core layer-forming composition 9 for use in the second production method contains a media precursor and a co-catalyst instead of the polymerization initiator. The catalyst precursor is a substance which starts the reaction of the monomer (polymerization reaction, cross-linking, etc.), and is a substance which changes in activation temperature due to the action of the activation of the light by the irradiation of light. Due to the deuteration of the activation temperature, a difference in the temperature at which the reaction starts is caused between the light irradiation region 925 and the non-irradiation region 940, and as a result, the monomer can be made only in the photo field 925. reaction. In the case of a catalyst, the main catalyst: pr〇Catalyst, any compound may be used as long as it is a change in activation temperature (increased or lowered) by irradiation with an active ray, but it is particularly preferably accompanied by irradiation with active radiation. The activation temperature is lowered. Thereby, the core layer 13 (optical waveguide 1) can be formed by relatively low-temperature heat treatment, and heat unnecessary for the other layers can be applied, and the characteristics (light transmission performance) of the optical waveguide 1 can be lowered. As the catalyst precursor, at least one (mainly) catalyst precursor containing a compound represented by the following formula (Ia) and formula (here) 82 201227021 40018 pif is suitably used. • (la) (E (R) 3) 2 pd (q) 2 [(E (R) 3) .Pd (Q) (Lb) b] p [WCA] [Formula 1a, Ib , respectively, E(R)3 indicates that the neutral electron donor ligand of the 15th group 'E indicates an element selected from the 15th order of the periodic table of the 'R table does not contain a hydrogen atom (or its isotope) 1) or a hydrocarbon moiety 'Q' represents an anionic ligand selected from the group consisting of a carboxylate, a thiocarboxylate, and a thiocarboxylate; in addition, in Formula Ib, LB represents a Lewis base, WCA means weakly coordinating anion 'a denotes an integer of 1 to 3, b denotes an integer of 0 to 2, a total of a and b is 1 to 3, and p and r represent an anion cation and a weakly coordinating anion. The number of charge balances. The typical catalyst precursors according to formula la can be enumerated:

Pd(OAc)2(P(i-Pr)3)2, Pd(OAc)2(P(Cy)3)2,

Pd(02CCMe3)2(P(Cy)3)2, Pd(OAc)2(P(Cp)3)2,

Pd(02CCF3)2(P(Cy)3)2, Pd(02CC6H5)3(P(Cy)3)2, but not limited to the catalyst precursors. Here, Cp represents a cycloCl〇pentyl group, and Cy represents a cyclohexyl group. Further, the catalyst precursor represented by the formula Ib is preferably a compound in which p and r are each selected from the integers of 1 and 2. A typical catalyst precursor according to formula Ib can be exemplified by Pd(OAc)2(P(Cy)3)2. Here, ' Cy is not cyclohexyl, and Ac is B. 83 201227021 40018pif. These catalyst precursors allow the monomer to be efficiently reacted (in the case of a norbornene-based monomer, a polymerization reaction or a crosslinking reaction is efficiently carried out by an addition polymerization reaction). Further, in a state where the activation temperature is lowered (active potential state), the catalyst precursor preferably has an activation temperature lower by about 10 ° C to 80 ° C than the original activation temperature (preferably 10 ° c 〜 About 50 °c). Thereby, the refractive index difference between the core portion 14 and the side cladding portion 15 can be surely produced. The catalyst precursor preferably contains at least one of Pd(OAc)2(P(i-Pr)3)2 and Pd(OAc)2(P(Cy)3)2 (mainly). The promoter is activated by irradiation with actinic radiation, and the activation temperature (the temperature at which the monomer reacts) of the above-mentioned catalyst precursor (main catalyst) can be changed. In the case of a compound which is activated by irradiation of actinic radiation, which is a change in molecular structure (reaction or decomposition), any one may be used, and irradiation with active radiation having a specific wavelength may be suitably used. The catalyst is decomposed to generate a cation such as a proton or another cation, and a compound (photoinitiator) (mainly) which can be substituted with a weakly coordinated anion (WCA) of a debonding group of a catalyst precursor. Examples of the weakly coordinating anion include tetrakis(pentafluorophenyl)borate ion (FABA·) and hexafluoroantimonate ion (SbF6·). Examples of the cocatalyst (photoacid generator or photoinitiator) include, for example, tetrakis(pentafluorophenyl)borate or hexafluoroantimonate represented by the following formula: tetrakis(pentafluorobenzene) Base) gallate, aluminate, silicate, 84 201227021 40018pif other folic acid salts, grafted acid salts, carborane, halocarborane, etc. [化38]

FABA&quot;

H3c—0·

SbFe~ Commercial products of such a catalyst may, for example, be "RHODORSIL (registered trademark, the same below) PHOTOINITIATOR 2074 available from RhodiaUSA Co., Cranbury, New Jersey (CAS No. 178233-72) "No. 2)", "TAG-372R ((di(2-(2-naphthyl)-2-yloxyethyl)) ruthenium (pentafluoride) available from Toyo Ink Manufacturing Co., Ltd., Tokyo, Japan "Phenyl) borate · CAS number is 193957-54-9)), "M-103" (CAS No. 87709-41-9) available from Midori Kagaku Co., Ltd., Tokyo, Japan, 85 201227021 "TAG-371 (CAS No. 193957-53-8)" available from Toyo Ink Manufacturing Co., Ltd., Tokyo, Japan, "TTBPS - available from Toyo Seiki Co., Ltd., Tokyo, Japan. TPFPB (tris(4-t-butylphenyl)phosphonium tetrakis(pentafluorophenyl)borate), available from Midori Kagaku Industrial Co., Ltd., Tokyo, Japan, "NAI-105 (CAS number is 85342-62-7) and so on. In the case where RHODORSIL PHOTOINITIATOR 2074 is used as the auxiliary catalyst, ultraviolet rays (UV light) are preferably used for the active radiation (actinic rays), and mercury lamps (high-pressure mercury lamps) are preferably used for the ultraviolet irradiation. Thereby, a sufficient amount of ultraviolet rays (active radiation) of less than 300 nm can be supplied to the layer 910, and the RHODORSIL PHOTOINITIATOR 2074 can be efficiently decomposed to generate the above-described cation and WCA. [2] [2-1] Then, in the same manner as in the first manufacturing method, the layer 910 is irradiated with the active radiation 930 via the mask 935. In the irradiation region 925, the cocatalyst reacts (bonds) or decomposes by the action of the active radiation 930, and cations (protons or other cations) and weakly complex anions (WCA) are released (produced). Moreover, the cationic or weakly coordinating anions change (decompose) the molecular structure of the catalyst precursor present in the irradiated region 925, causing it to change to an active latent state (latent active state). Here, the 2020 s gastric activity potential state (or potential active state) of the 86 201227021 40018pif catalyst such as the flooding agent is the same as the original activation temperature, the activation temperature is lowered, but the temperature does not rise right, #, at a room temperature level, is a catalyst precursor in a state in which no monomer reaction occurs in the irradiation region 925. # Therefore, after irradiation with the active radiation 93G, for example, if it is _4 〇. (: The left and right storage layer 91G does not cause a reaction of the monomer, and the state can be maintained. Therefore, the layer 91 〇 after the irradiation of the plurality of active radiation 93 准备 is prepared, and the heat treatment described later is performed on the layers. Thereby, the core layer 13 can be obtained, and the convenience is further. In addition to the change in the molecular structure of the catalyst precursor as described above, the release group is detached from the polymer 915 as in the first production method. A refractive index difference is generated between the irradiation region 925 of the layer 910 and the non-irradiation region 940. [j-2] Then, the layer 91 is subjected to heat treatment (first heat treatment), thereby being active in the irradiation region 925. The catalyst precursor in a latent state is activated (in an active state) to generate a monomer reaction (polymerization reverse crosslinking reaction). Further, if the reaction of the monomer proceeds, the temperature in the irradiation region 925 is slow and lowered. By this, there is a difference in 'single wealth' between the illuminating area 925 and the unirradiated area _ in order to eliminate the difference, the monomer is from the unirradiated area 9 4 (H widely moves | in the irradiation area 925. The result is 'formed on layer 910 and the first manufacturer The same refractive index distribution as in the heating process is not particularly limited, but is preferably about 80 ° C, more preferably about 40 to 6 〇. 87 201227021 4UUl «pif In addition, the heating time is better The L is set so that the reaction of the monomer in the irradiation region 925 is substantially completed, preferably G. 1 hour to 2 hours, more preferably 1 hour to 1 hour. In the second heat treatment, the catalyst precursor remaining in the unirradiated region 940 and/or the irradiation region 925 is activated (in a mixed state) directly or in response to activation of the promoter. The monomer in each of the regions 925 and 940 is reacted, for example, by stabilizing the obtained core portion 14 and the side surface portion 15 by the monomer remaining in each of the regions 925 and 94. The heating temperature in the second heat treatment is not particularly limited as long as it can activate the catalyst precursor or the cocatalyst, and is preferably about 70 C to 100 C, more preferably 8 Torr. 〇.〇左右. In addition, the heating time is preferably 0.5 The time is about 2 hours, and the range is about 0.5 hour to about 1 hour. Then, the third heat treatment is performed on the layer 910. Thereby, the reduction of the internal stress generated in the obtained core layer 13 or the core portion 14 and the side surface can be achieved. Further, the coating portion 15 is further stabilized. The heating temperature in the third heating treatment is preferably set to be higher than the heating temperature in the second heating treatment, and (4) is preferably about 178 ° C. More preferably, it is 12 (Γ(:~16〇£5(:&amp;々. In addition, the heating time is preferably 0.5 hours to 2 hours, more preferably 0.5 hours to about 丨 hours. More 4 after the above steps, Core layer 13. 88 201227021 40018pif In addition, in the state before the second heat treatment or the third heat treatment, for example, a sufficient refractive index difference is obtained in the core portion 14 and the side slope portion 15, and the second heating can be omitted. After the treatment, the third heat treatment. [3], Μ, and in the same manner as in the first manufacturing method, the layers 11 and 12 are coated on the two-layer layer of the layer. Thereby, the optical waveguide i is obtained. (Third Manufacturing Method) / = The method of the second embodiment (the third manufacturing method) for producing the optical waveguide of the present invention will be described. / J Γ is a diagram for explaining the manufacturing method of the optical waveguide 1 shown in Fig. 5, respectively. In the following description, the upper side in Fig. 14 is referred to as "upper" and the lower side is referred to as "lower". The third manufacturing method will be described below, but the difference from the above-described third manufacturing method is the same, and the same matters are omitted. The first method is the same as the first production method except that the method of forming the layer carrier including the polymer crucible 5, the addition force agent 920, and the like is different. The third manufacturing method is: (1) In the state of the supporting substrate, the seed wave forming composition 90 902 (the first composition and the second composition) is extrusion-molded into a layer to obtain a layer 910. [2] Then, after the 'f layer 91 (four)-partially irradiates the active radiation, the layer 910 is subjected to addition' to thereby generate a refractive index difference, and the core layer 13 on which the side surface 15 of the core portion 14 is formed is obtained, and a light guide is obtained. Hereinafter, each step will be described in detail. 89 201227021 wuiopif [1] First, prepare the components for forming the optical waveguide tube 9〇1, 9〇2. Each of the optical waveguide forming compositions 901 and 902 includes a polymer 915 and an additive 920 (in the present embodiment, at least a monomer), but the composition thereof is different. In the two compositions, the optical waveguide forming composition 9〇1 is a material for forming the layer 13 mainly, and is the same material as the core layer forming composition _. On the other hand, the optical waveguide forming composition 9〇2 is a material for mainly forming the respective cladding layers 11, 121 and 122, and includes a material having a refractive index lower than that of the optical waveguide forming composition 901. The refractive index difference between the optical waveguide forming composition 901 and the optical waveguide forming composition 902 can be set by setting the composition of the polymer 915, the composition of the monomer, the ratio of the presence of the polymer 915 and the monomer, and the like. To make appropriate adjustments. For example, when the refractive index of the monomer is lower than that of the polymer 915, the content of the monomer in the composition is higher than that of the optical waveguide forming composition 901 because the composition for forming the optical waveguide tube 9〇2. On the other hand, in the case where the refractive index of the monomer is souther than the polymer 915, the content of the monomer in the composition is higher than that of the optical waveguide forming composition 902. In other words, the composition of the polymer 915 and the additive 920 in each of the optical waveguide forming compositions 901 and 902 is appropriately selected depending on the respective refractive indices of the polymer 915 or the monomer. In the optical waveguide forming composition 901 and the optical waveguide forming composition 902, it is preferable to set the composition in such a manner that the content ratio of the monomers is substantially the same as 201227021. The difference in the content ratio of the composition of the composition 9G1 and the optical waveguide forming composition 902 is small, and thus the monomer=suppression caused thereby. The diffusion movement of the monomer is used for the refraction as described above, but there are cases where it is unavoidable to move in an undesired direction. Further, the refractive index distribution of the thickness 91 of the layer 91G can be formed by the (4) color extrusion domain method described later. Therefore, it is preferable that the diffusion of the monomer is at least in the thickness direction, but it is preferable that the thickness direction is not observed. The diffusion of the monomer moves to suppression. The optical waveguide having the target refractive index distribution Τ can be reliably produced by suppressing the ship movement of the uncoated monomer. Further, when the content ratio of the monomers is substantially equal, the composition for forming the optical waveguide is required. Between the object 901 and the optical waveguide forming composition 9〇2, the conditions of the polymer 915 or the monomer may be different. Specifically, the composition of the optical waveguide forming composition 9G1 and the optical waveguide forming composition 902 is the same as the composition of the polymer 915 to be used, and the molecular weight or degree of polymerization is different. can. By using the composition of the same composition, the mutual compatibility is improved, so that the components become easy to mix with each other. Thereby, the continuity of the refractive index distribution Τ can be improved. Further, in the case of using polymers having different compositions, the basic composition of the polymer 915 is the same, but the presence or absence of the leaving group (reaction medium) can also be changed. For example, the polymer 915 contained in the optical waveguide forming composition 901 preferably contains a detachable group, and the polymer 915 contained in the optical waveguide forming composition 902 does not contain a detachable group. Thereby, only 201227021 produces a detachment of the detachment group in the core layer 13, a refractive index difference is formed in the layer, and detachment of the detachment group is not generated in the cladding layers u, 12, 122, and thus the refractive index in the layer · Does not change, the refractive index of the cladding layers 11, 12 122 can be made relatively uniform. Further, in this case, the addition of the additive 920 (monomer, polymerization initiator, etc.) may be omitted in both of the optical waveguide forming composition 901 and the waveguide forming composition 9〇2. On the other hand, in the case where at least the additive 920 in the optical waveguide forming composition 9〇1 contains a monomer, the polymer 915 contained in each of the optical waveguide forming compositions 901 and 902 may not necessarily contain a debonding group. . Further, the monomers included in the optical waveguide forming composition 901 and the optical waveguide forming composition 902 may have the same composition or different compositions. Further, by using the composition of the composition, the diffusion movement of the mutual monomers is surely generated, so that the refractive index distribution τ can be made more clarified. As a result, it is possible to obtain an optical waveguide i having excellent characteristics. Further, the optical waveguide forming composition 901 may contain a monomer, and the optical waveguide forming composition may not contain a monomer. In the case of the 'coating layers U, 12', the diffusion of the monomers in the layer does not occur. Therefore, the refractive index in the layers of the core (2) of each of the cladding layers (1) can be made uniform. In addition, the composition of the monomer to be used, that is, the refractive index is as described above, is such that the content of the monomer is substantially equal in the composition for forming the light-wave-wave tube forming composition 9〇1 ^, and One = the expansion of the monomer, the - edge can form a refractive index difference between the two. Further, 'the additive in the composition for forming the optical waveguide tube 9〇1·containing the polymerization initiator, and the other aspect, the composition for forming the optical waveguide tube 902 92 201227021 - the additive 920 in the tuuiopif does not contain the polymerization initiator . In this case, only in the core layer 13, the polymerization reaction of the monomers in the layer is promoted, and the t-coupling reaction of the monomers in the slope coating layers 11, 122 is not promoted. Therefore, the change in the refractive index in the cladding layers I] and 12 122 is suppressed, and the refractive index in the layer can be made uniform. In addition, the addition of the polymerization initiator is not limited to the above, and the polymerization initiator may be contained in both the optical waveguide forming composition 9〇1 and the optical waveguide forming fine 902. In this case, it is preferable that the polymerization reaction of the monomer is suppressed as much as possible in the cladding layers 11 and 12, so that the optical waveguide forming composition 9〇1 and the optical waveguide forming composition 902 are provided. The type or amount of the polymerization initiator contained in the polymerization initiator may be different. Specifically, for example, a polymerization initiator having high reactivity with respect to the wavelength of the active radiation 93 作为 is used as the polymerization initiator contained in the optical waveguide forming composition 901, and the active radiation 93 is used. The polymerization initiator having a low reactivity at the wavelength may be a polymerization initiator contained in the optical waveguide forming group 902. In addition, when the same type of t-initiator is used, the amount of addition to the optical waveguide forming composition 902 may be reduced as compared with the optical waveguide forming composition 9〇1. Further, a photoacid generator can be used as the polymerization initiator contained in the optical waveguide forming composition 901, and a thermal acid generator can be used as the polymerization initiator contained in the optical waveguide forming composition 902. . Thereby, the polymerization reaction of the monomer is promoted mainly in the layer of the core layer 13 along with the A? and the emission of the active radiation 930, and the refractive index distribution W is formed. On the other hand, the coating layers u, 121, 122 are single. The polymerization of the body is not promoted. The refractive index is formed 93 201227021 40018pif After the cloth W, the polymerization of the monomer in the slope coatings η, 12ι, 122 is promoted by heating the layer 910. As a result, in the layer 91, the refractive index distribution T in the thickness direction is fixed. The thermal acid generator may, for example, be a salt-type compound such as triphenylsulfonium trifluorosulfonate or trisylsulfonate, such as diphenylphosphonium trisulfonate or diphenyl. A sulfonium salt type compound such as quinone fluorobutanesulfonic acid, such as a scaly salt type compound such as pentaerythritol difluorodecanoic acid or pentaphenyl scale hexafluorobutyl sulfonate. Then, on the support substrate 951, the optical waveguide forming compositions 901 and 902 are formed into a layer shape by a multicolor extrusion molding method. In the multi-color extrusion molding method, the optical waveguide forming composition 902 is extruded between the respective layers while the five-layer optical waveguide forming composition 901 is extruded, and the laminated layer 9 is collectively formed. A multi-color molded body 914 made of a layer. Specifically, in the multicolor molded body 914, the optical waveguide forming compositions 901, 902, 901, 902, 901, 902, 901, 902, and 901 are respectively extruded into a layer shape in this order from the bottom, and thus At the boundary between the compositions, the optical waveguide forming composition 9〇1 and the optical waveguide forming composition 902 are slightly turbid. Therefore, in the vicinity of the boundary between the compositions, a part of the optical waveguide forming composition 901 is mixed with a part of the optical waveguide forming composition 902, and a region in which the mixing ratio continuously changes is formed along the thickness direction. As a result, the polychromatic molded body 914 has a high refractive index at a position where the optical waveguide forming composition 901 is extruded, and has a low refractive index at a position where the optical waveguide forming composition 902 is extruded. A layer of refractive index that varies continuously between the locations. 94 201227021 • y-f\y Λ. , = : ^ The shape of the refractive index distribution T in the thickness direction of the layer 910 can be freely adjusted by making each of the Sasaki (10) light pipe-shaped compositions different from the lungs I:!. And two ^吏. The solvent in the obtained multicolor molded body 914 was evaporated (dissolved back 1), and the layer 910 was obtained (see Fig. 14 (b)). The layer 910 of the layer 910 is a laminate having a cladding layer, a core layer m, a cladding layer m, a core layer 132, and a cladding layer 122 in the following order, and has a refractive index distribution τ in the thickness direction. The resulting layer 9U) +, the polymer (matrix) 915 is substantially homogeneous and randomly present. The additive (4) is substantially dispersed in the polymer 915. Thereby, layer 91 is substantially uniform and is accompanied by additive 920. The average thickness of the layer 910 is appropriately set depending on the thickness of the optical waveguide ι to be formed, and is not particularly limited, and is preferably about 1 μm to about 5 μm, more preferably about 20 μηη to 300 μηι. However, the multicolor molded body 914 for obtaining such a layer 910 is manufactured by using a die coater (multicolor extrusion molding apparatus) as described below. Further, in order to avoid the 'complexity', the following description will be simplified in a simplified manner in which the number of layers to be extruded is reduced. Fig. 15 is a perspective view showing a die coater for obtaining a multicolor molded body 914. Fig. 16 is a longitudinal cross-sectional view showing a portion of the die coater in an enlarged manner. As shown in Fig. 15, the die coater 800 has a die 81A including an upper die lip and a lower die lip 812 disposed therebelow. The upper die lip 81! and the lower die lip 812 are respectively formed in a long block-like body 95 201227021 40018pif and overlap each other. A manifold (4) having a cavity is formed in the interface. The width of the manifold 82G is continuously expanded by the mode of the die (10). On the other hand, the thickness of the manifold 820 is continuously reduced in such a manner as to become smaller toward the right side of the die 81 。. Further, at the right end of the manifold 820, the width of the cavity is maximized and the thickness is the largest, and the slit 821 is formed. The die 810 can extrude the optical waveguide forming composition 9 supplied from the left side of the difference f 82 Π (the Π and 902 - are extruded from the slit 821 to the right side, that is, depending on the shape of the slit 821. The width and thickness of the multi-color molded body 914. A mixing unit 83 is disposed on the left side of the die 810. The mixing unit 83 is used to supply the optical waveguide forming composition 9 to the die 810, respectively. The illuminating tube forming group, the ith supply pipe 831 for supplying the object 901 to the die 81 、, and the optical waveguide forming component 902 to the die 81 〇 are provided. The second supply tube 832. The optical waveguide forming components 9〇1 and 9〇2 supplied from the first supply tube 831 and the second supply tube 832 are in the connection portion 835 that is connected to the die 810. The second supply pipe 832 is branched into the upper and lower portions of the connection portion 835, and is connected to the upper portion and the lower portion of the connection portion 835. The tube 831 is connected to the middle portion of the connecting portion 835. That is, the connecting portion will be included in the light guide 5 The ruthenium layer flow of the composition for forming the waveguide 12 〇1 is merged so as to sandwich the upper and lower layers of the optical waveguide forming composition 902. That is, the die coater 800 can form a laminated optical waveguide from below. A multi-color molded body 914 is formed by forming three layers of the compositions 902, 901, and 902. 96 201227021 The 9-pole external [mixing unit] has a plurality of mixing units provided at the junction of the first supply pipe and the first pipe 832. Pins 836. The pins 836 = = are arranged such that their axes are substantially orthogonal to the direction in which the first supply tube 831 and the second supply tube 832 extend. Further, in Fig. 16, the pins are gamuted to the upper portion of the connection portion 835 and There are three between the middle portions and between the lower portions and the middle reeds. The number of the pins 836 is not particularly limited, and is preferably two or more, and more preferably three. In addition, the pin 836 may be such that a turbulent flow between the optical waveguide forming compositions 9〇1 and 9〇2 may be generated by other structures (for example, mesh, punching metal (punching) Instead of being attached to the right side of the die 810, a multicolor molded body 914 which is conveyed by multicolor extrusion molding is provided. The conveyance unit 84A has a roller 841 and a conveyance film 842 that moves along the roller 841. The conveyance film 842 is conveyed from the lower side of FIG. 15 to the right side by the rotation of the roller 841, but at this time, The multi-color molded body 914 is laminated on the roll 841. Thereby, the shape of the multi-color molded body 914 can be maintained and conveyed to the right side. Next, the operation of the die coater 800 will be described. The optical waveguide forming composition 9 (U, 902') is formed into a laminar flow of three layers in the connecting portion 835. When the optical waveguide is formed in the connection portion 835 and the products 901 and 902 are joined together, the light waveguide forming composition 9 (the flow of the Π, 902) is caused by the action of the plurality of pins 836 provided in the merging portion. This disorder causes the boundary between the laminar flows to be unclear, and a region where the optical waveguide forming composition 901 and the optical waveguide forming composition 902 are mixed at the boundary is formed. 97 201227021 40018pif The laminar flow formed in the above manner is The manifold 82 of the die 81 is expanded in the width direction and compressed in the thickness direction. As a result, the multicolor molded body 914 as described above is formed. Then, by using such a multicolor molded body In 914, the optical waveguide 1 having the refractive index distribution τ in the thickness direction is finally obtained. Further, the multi-color molded body 914 is formed on the transport film 842, and the transport film 842 may be directly used as the support substrate 951.

Further, the die coater 8A shown in Fig. 15 can form the layer 910' including the i-layer core layer 13 in the case where the multilayer core layer 13 is provided, and the structure of the mixing unit 830 can be changed according to the same. Specifically, the first supply pipe 831 is branched according to the number of layers of the core layer 13, and the layers of the optical waveguide forming composition 9〇1 extruded from the respective i-th supply members 831 are interposed. The number of branches of the second supply pipe 832 may be sufficient. As described above, the above-mentioned diaphragm (4) 2 real surface state can be manufactured. IJT FIG. 17A is a cross-sectional view showing another configuration example of the mixing unit 830. In addition, in FIG. 17, in order to avoid complexity, the tube axis of the first supply pipe 831 and the second supply pipe 832 is schematically indicated by a line, and the starting point of each component is injected into each of the supply pipes 831 and 832. Expressed by the φ mark. In addition, the flow of the optical waveguide forming composition 901 is indicated by a solid arrow, and the flow of the optical waveguide forming composition 9〇2 is indicated by a broken line arrow, and the optical waveguide forming composition is used. The flow of the mixture of 9〇1 and the optical waveguide forming composition 902 is indicated by an arrow of a dotted line. The first supply pipe 831 shown in Fig. 17 is branched into three from the starting point 83u, and the central branch pipe 8311 extends straight toward the die 81. 98 201227021 40018pif On the other hand, above the central branch pipe 8311, the branch official 8312 branched from the starting point 831a extends obliquely, and below the central branch pipe 8311, the branch pipe 8313 branched from the starting point 831a extends obliquely. The second supply pipe 832 is provided at a position slightly away from the center for the branch pipe 8311 to be upward. The starting point _, the branching member 8321 which is branched from the i-th starting point extends upward, and the branched branch pipe 8322 extends downward. The branch f 8322, which extends downward, merges into the central branch pipe 8311 at the junction point:1. Further, the branch pipe 8321 extending upward is configured to merge with the branch f 8312 at the mixing point M1. In the front of the mixing point M1, the branch pipe 8321 and the branch pipe 8312 are collected in the collecting pipe 8331. The collecting pipe 8331 merges with the center at the joining point J2 located on the side (front end side) of the die 81 from the branch pipe 8322. Branch tube μ 11 in. On the other hand, the second starting point 832b of the second supply pipe 832 is provided at a position slightly away from the center branch pipe 8311, and the branch pipe 8323 branched from the second starting point 832b extends upward. The branch pipe 8324 of the branch extends downward. The branch pipe 8323, which extends upward, merges into the central branch pipe 8311 at the junction. Further, the branch pipe 8324 extending downward is configured to merge with the branch pipe 8313 at the mixing point M2. The front branch pipe 8323 and the branch pipe 8324 at the mixing point M2 are collected in the collecting pipe 8332, and the collecting pipe 833 is located at the joining point 99 (201227021 40018pif J2) on the side of the die 81 (front end side) of the branching member 8323. Confluence in the central branch pipe 8311. Further, the pin 836 (not shown) is provided at each of the mixing points M1 and M2 and the merging points J1 and J2. In addition, at the respective mixing points M1 and M2, the arrangement and the number of pins 836 are set such that the optical waveguide forming composition 901 and the optical waveguide forming component 902 are completely mixed. On the other hand, at each of the junctions j1 and J2, the arrangement and the number of pins 836 are set such that the optical waveguide forming composition 901 is partially mixed with the mixture. Here, the optical waveguide forming composition 901 is injected into the starting point 831a of the first supply pipe 831, and the optical waveguide forming composition is injected into the first starting point 832a and the second starting point 832b of the second supply pipe 832. 902. The optical waveguide forming composition 901 constitutes a layer in the center of the multicolor molded body 914 via the center branch pipe 8311. On the other hand, the optical waveguide forming composition 9〇2 is joined to the branch pipe 8323 via the branch pipe 8322 so as to sandwich the center layer. Furthermore, the mixture of the optical waveguide forming composition 901 and the optical waveguide forming composition 902 is joined by the second supply tube 832 so as to sandwich the layer including the optical waveguide forming composition 902. The multicolor molded body 914 is formed in the above manner. By using such a mixing unit 830, for example, when the refractive index of the optical waveguide forming composition 901 is larger than the refractive index of the optical waveguide forming composition 902, the second embodiment capable of manufacturing the optical waveguide can be formed. Multicolor shaped body 914. 100 201227021 40018pif In addition, by appropriately setting the supply condition of the composition for forming the second supply pipe 83, for example, the second supply pipe is called the second supply pipe 832, the merge angle, and the = position. The supply amount, the supply pressure, the reduction, the temperature, and the like, the supply line of the composition for forming the optical waveguide of the second gas 2nd f 832, for example, the inner diameter of the supply unit 832, and the second supply tube (four) relative to the The merging angle of the supply member 831, the supply amount per unit time, the supply pressure, the viscosity 'temperature, and the like, the occupancy ratio of each plant in the more color molded body 914 can be changed. The secret can change the shape of the refractive index distribution T of the tube 1 freely. Further, the above-described multicolor extrusion molding method and die coater are examples of a method and an apparatus for producing a multicolor molded body 914, and as long as it is a multicolor forming method and a multicolor forming apparatus capable of causing turbidity of a composition between layers, Various methods (devices) such as an injection molding method (apparatus) can also be used. [2] Hereinafter, the active radiation 930 is irradiated in the same manner as in the first production method. Thereby, the refractive index distribution w is formed in the core layer π. Further, an optical waveguide 1 having a refractive index distribution w in the width direction and a refractive index distribution T in the thickness direction is obtained. Further, the layer 910 obtained by the multi-color molded body 914 includes core layers 131, 132. Therefore, when the layer 910 is irradiated with the actinic radiation 930, the core portion 14 and the side surface portion 15 can be collectively formed on the plurality of core layers 131 and 132 by one irradiation. Therefore, the optical waveguide 1 having a plurality of core layers 131, 132 can be manufactured in fewer steps. Further, in this case, the positional deviation of the core portion 14 is substantially not generated between the plurality of core layers 131, 132. Since 101 201227021 n has a very high dimensional accuracy, the light guide rate = the light guiding light of the present invention as described above =:, the machine heart == product language /, the game machine, the router action t are required: for example - A large-capacity data is transmitted between the arithmetic unit and the memory device such as the memory (Random AeCess MemGry 'RAM). Therefore, such an electronic device includes the light-emitting waveguide, and noise, signal degradation, and the like which are peculiar to the electric wiring are eliminated, and the performance can be expected to be greatly improved. Month / Further, in the light guide tube portion, the amount of execution is greatly reduced compared with the electric wiring. Therefore, the power required for cooling can be reduced, and the power consumption of the entire electronic machine can be reduced. In addition, the transmission loss of the optical waveguide of the present invention and the delayed purity of the pulse signal are small, and it is difficult to cause interference even in the case of multi-channelization and high density. Therefore, a highly reliable optical waveguide is obtained even in a high-density and small-area area, and the reliability and miniaturization of the electronic device can be achieved by mounting the optical waveguide. In the above, the optical waveguide and the electronic device of the present invention have been described. 102 201227021 40018pif, the present invention is not limited thereto, and for example, an arbitrary structure may be added to the optical waveguide. Further, the method for producing the optical waveguide of the present invention is not limited to the above method, and for example, a method of cutting a molecular bond by irradiation of actinic radiation to change a refractive index (photobleaching method) may be used; A method in which a composition for forming a core layer contains a photocrosslinkable polymer having an unsaturated bond capable of photoisomerization or photodimerization, which irradiates active radiation to change a molecular structure, and changes a refractive index ( Photoisomerization method, photodimerization method, and the like. In these methods, the amount of change in the refractive index can be adjusted according to the amount of irradiation of the active radiation. Therefore, the amount of irradiation of the active radiation irradiated to each portion of the layer can be different depending on the shape of the target refractive index distribution W. A core layer having a refractive index distribution W. [Examples] Hereinafter, examples of the invention will be described. 1. Manufacture of optical waveguide (Example 1) U) Synthesis of norbornene-based resin having a debonding group. In a glove box filled with moisture and oxygen concentration of 1 ppm or less and filled with dry nitrogen, the amount of hexyl was measured. 7.2 g (40.1 mmol) of norbornene (HxNB), diphenyl fluorenyl norbornene oxime sulphide upg (40.1 mmol) in a 5 〇〇mL vial, dehydrated hydrazine 6 〇g and acetic acid 11 g of ethyl vinegar, wrapped with a sealing agent to seal the upper part. Then, in a 100 mL vial, weighed 1.56 g (3.2 mmo 丨) of Ni catalyst and 0.1 〇 mL of dehydrated τ benzene represented by the following formula (A) 103 201227021 40018 pif, put it into the stirrer and stuff it tightly. , will touch the silk to make it completely dissolved. 1 mL of the Ni catalyst solution represented by the following chemical formula (Α) was accurately taken in a syringe, and quantitatively injected into the small glass bottle of the above two kinds of norbornene, 'at room temperature _ 丨 hours, the result Make sure the apparent viscosity rises. At this time, the stopper was removed, and tetrahydrogenated (thf) 6 〇 g was added and stirred to obtain a reaction solution. To the 100 rainbow beaker, 9.5 g of acetic anhydride, 18 g of hydrogen peroxide water (concentration: 30%), and ion-exchanged water % g were added and stirred, and an aqueous acetic acid solution was prepared on the spot. Then, it was added to the above reaction solution by the amount of water (4), and the mixture was stirred for 12 hours to carry out a reduction treatment. Then, the treated reaction solution was transferred to a separatory funnel, and after removing the lower aqueous layer, the addition of 3% of water to the isopropanol ride was severely disturbed. After standing, the whole ride is divided into two layers to remove the water layer. After the water washing process was recombined three times, the oil layer was dropped into a large amount of excess C-class, and the resulting polymer was again allowed to be re-applied, and the product was subjected to a vacuum dryer set to 60 C for 12 hours. Heating and drying, thereby obtaining polymer enthalpy. By gel permeation chromatography (5) Μ

Chr_tography, GPC) Zhejiang polymer &amp; molecular weight distribution is MW = 100,000, Mn = 40,000. In addition, by the identification of nuclear magnetic resonance (NMR), the molar ratio of each structural unit in the polymer #1 is: hexyl norbornyl _ structural unit is % diphenylmethyl norbornene oxime The Wei structural unit is %%. [化39] 104 201227021 40018pif

Ph Ph

HxUP/%/ /°6ρδ λΝΪ

Ph v5 (A) [Chem. 40]

(2) Manufacture of core layer forming composition: 10 g of the purified polymer #1 was added to a 100 mL glass container to add 1,3,5-mesitylene 40 g, and the like. Oxidizing agent Irganox 1076 (manufactured by Ciba Geigy Co., Ltd.) 0.01 g, cyclohexyloxyxanthene monomer (monomer of formula (20), CHOX manufactured by East Asia Synthetic, CAS#483303-25-9, molecular weight 186, boiling point 125 ° C / 1.33 kPa) 2 g, polymerization initiator (photoacid generator) Rh〇d〇rsil

Photoinitiator 2074 (manufactured by Rhodia, CAS#178233-72-2) (2.5E-2 g, ethyl acetate 0·1 mL)' After being uniformly dissolved, it was filtered using a 0.2 μηη PTFE filter to obtain a clean The core layer is formed by 105 201227021. -TV/Vl composition. (3) Manufacture of optical waveguides (production of the lower side cladding layer) On the enamel wafer, the gravitational blade is used to uniformly apply the photosensitive norbornene to the moon 曰 composition (Ava as manufactured by Promerus). After 1 2(8)(10) varnish), pour into the 55 c dryer for 10 minutes. After completely removing the solvent, the entire surface to be coated was irradiated with ultraviolet rays of 8 μm, and heated in a dryer at 12 (rc for 1 hour to harden the coating film to form a lower coating layer. The formed lower cladding layer was formed. The thickness is 20 μm, and it is colorless and transparent. (Production of the core layer) The composition for forming a core layer is uniformly applied to the lower cladding layer by a doctor blade, and then placed in 55. After 1 minute of complete removal, the solvent was completely removed, and the mask was crimped to selectively irradiate ultraviolet rays at 1300 mJ/cm2. The mask was removed and heated in a dryer at 15 Torr for 5 hours. A very clear waveguide pattern is formed, and it is confirmed that the core portion and the side surface portion are formed. Further, the formed optical waveguide tube is formed with eight core portions. Further, the width of the core portion is 5 〇 μηι. The width of the side cladding portion is 80 μm, and the thickness of the core layer is 5 μm. (Preparation of the upper cladding layer) Avatrel 2000 is laminated on the poly- (PES) film in advance in a dry thickness of 2 〇. The dry film is applied to the above core layer and set to 140°. The thermocompression bonding was carried out in a vacuum laminator of C. Thereafter, ultraviolet light was irradiated to 100 mJ in total, and Avatrel 2000P was hardened in a dryer at 12 (rc heating/hour to form an upper side cladding layer to obtain an optical waveguide tube. 201227021 40018pif = pipe cut length - one. The cross section of the core layer in the direction, along its thickness maximum value, has a number of minimum values and

On the other hand, when the > VL of the optical waveguide is read by the center of the width of the core, the refractive index distribution in the thickness direction in the vertical direction is obtained by using an interference microscope to obtain a so-called step-change refractive index ( SI) type ^ is 'refractive index distribution T becomes (example 2) * The actual irradiation amount is increased to 1500 ― 2, and the material is obtained in the manner related to the example 1 (example 3) except that the ultraviolet ray is irradiated | Each structural unit t, 2G (K) side m, and the structural unit is 40 mol%: the molar ratio is changed to hexyl norbornene structural unit is 60 _% and 'made == borneol oxime oxy Wei knot The way to obtain the optical waveguide as a self-contained compound, in addition to the case of Example 1 (Example 4), except that the irradiation amount of the ultraviolet ray was used to make each structure of the polymer #1 thin by 5 UUm and use the structural unit to be 45 财 _ The photo-wave is obtained in the same manner as the example [phase 107 20122702 lf -rv/v/i υ|^1Ι], except that the hexyl norbornene structural unit is 55 and the norbornene-oxyl-Wei-knot is used as the polymer. tube. (Example 5) In addition to the use of the structural unit of the polymer #1, the molar ratio of the hexyl norbornene structural unit was 3 〇 m〇i 〇 / 0, diphenylmethyl norborn dioxetane structural unit An optical waveguide tube was obtained in the same manner as in Example 1 except that 70 m〇l% was used as the polymer. (Example 6) In addition to reducing the irradiation amount of ultraviolet rays to 3 〇〇mJ/cm 2 and changing the molar ratio of each structural unit of the polymer #1 to a hexyl norbornene knot, the unit was 4 G mol%, diphenyl The base f-norbornene methoxy residue structure is 60 mol% as a polymer, as in the case of the polymer! The optical waveguide is obtained in the same way. (Example 7) In addition to reducing the irradiation amount of ultraviolet rays to 5 〇〇mJ/cm 2 , and changing the molar ratio of each structural unit of the poly-J material #1 to hexyl norbornene thin 3 single ^ 3 coffee 1% The diphenyl fluorenyl norbornene methoxy oxime structure was 7 G mol% in the early 7C. The optical waveguide tube was obtained in the same manner as the example. (Example 8) In addition to reducing the amount of ultraviolet radiation to IGGmlW, and changing the molar ratio of each M unit of month t 2 to hexyl norbornene 2, 2, 2, 2, 2, 2, 2, 2, 2, 2, 2 An oxygen waveguide tube was obtained in the same manner as in Example 1 except that the compound was used as a polymer. 108 201227021 -τυν/χ (Example 9) In addition to increasing the irradiation dose of ultraviolet rays to 15 00 mJ/cm2, and changing the molar ratio of each structural unit of the poly-material #1 to hexyl norbornene thinning, single το An optical waveguide tube was obtained in the same manner as in Example i except that 10 mol% of the diphenylmethylnorborneneoxy group was 90 mol%. (Example 10) The irradiation amount of each external line was increased to 3 〇〇〇mJ/cm 2 , and the molar ratio of each structural unit of the polymer #1 was changed to 5 mol% of the hexyl norbornene structural unit. An optical waveguide tube was obtained in the same manner as in Example except that the structural unit of phenylmercaptonorbornene methoxy decane was 95 mol%. (Example 11) An optical waveguide tube was obtained in the same manner as in Example 除了 except that the composition produced by the method shown below was used as a composition for forming a core layer. Weighing 100 g of the above-mentioned purified polymer #1 in a 100 mL &amp; glass container, 'toluene 40 g, antioxidant jrgan〇 x IQ% (manufactured by Ciba Geigy Co., Ltd.) 0·01 g, bifunctional oxygen Cyclobutane monomer (monomer shown by formula (15), manufactured by East Asia Synthetic, d〇x, CAS#18934-00-4, molecular weight 214 'boiling point ii9〇C/0.67kPa) 2 g, photoacid The reagent Rhodorsil Photo initiator 2074 (manufactured by Rhodia Co., Ltd., CAS #178233-72-2) (2.5E-2 g, ethyl acetate in oj mL) was uniformly dissolved, and then subjected to a 0.2 μm PTFE filter. 201227021 40018pif Filtration to obtain a clean core layer forming composition. (Example 12) An optical waveguide tube was obtained in the same manner as in Example 1 except that the composition produced by the method shown below was used as a composition for forming a core layer. Weigh 10 g of the purified polymer #1 in a 100 mL glass container to which '1,3,5-triphenylbenzene 40 g, an antioxidant; [rganox ίο% (manufactured by Ciba Geigy) 0.01 g, Alicyclic epoxy monomer (monomer shown by formula (37)' manufactured by Daicel Chemical, Celloxide 2021P, CAS#2386-87-0 'Molecular weight 252 'Boiling point i88 ° C / 4 hPa) 2 g, light Acid generator Rhodorsil Photoinitiator 2〇74 ("CAS#178233-72-2" manufactured by Rhodia) (2.5E-2 g 'ethyl acetate 〇·ι mL), which is uniformly dissolved and filtered with 0.2 μηη PTFE The device was subjected to ruthenium to obtain a clean core layer forming composition. (Example 13) An optical waveguide tube was obtained in the same manner as in Example 1 except that the composition produced by the method shown below was used as the composition for forming a core layer. Weigh 1〇g of the purified polymer #1 in a glass container of 1〇() 11^', add 1,3,5-diguanidine 40 g, antioxidant jrgan〇x 1〇76 (CibaGeigy) Manufactured by the company) 0_01g, cyclohexyl oxetane monomer (monomer represented by formula (20), CH〇x manufactured by East Asia Synthetic) ig, alicyclic % gas monomer (manufactured by Daicel Chemical, Celloxide 2021P) 1 g, photoacid generator Rhodorsil Photoinitiator 2074 (manufactured by Rhodia, 110 201227021 CAS#178233-72-2) (2.5E-2 g, ethyl acetate 〇] mL), after it is uniformly dissolved, use 0.2 μm The PTFE filter was subjected to the process of 'cleaning the core layer forming composition. ^ ^ (Example 14) An optical waveguide tube was obtained in the same manner as in Example 1 except that the synthesizer was used as a polymer by the method shown below. First, except that instead of diphenylmethylnorbornene methoxy sulphide 12 9 g (40.1 mmol), phenyldimethylnorbornene methoxy decane 4 g (40.1 mmol) was used, in addition to Example i In the same way, combine 1 and 2. The structural unit of the t compound to be added is shown in the following formula (). By GPC, the molecular weight of the polymer is Mw = 11 million and Mn = 50,000. In addition, the molar ratio of each structural unit was determined by NMR: hexyl norbornene thin structural unit was 5G mGl%, and phenyl dimethyl norbornene was 50 mol% structural unit. Earth ^ [40]

(Example 15) 111 (103) 201227021 40018pif In addition to the drying conditions of the lower cladding layer and the core layer before ultraviolet irradiation, the composition is made of 6G〇1 G minutes' and the composition manufactured by the method shown below is used as An optical waveguide tube was obtained in the same manner as in Example i except for the composition for forming a core layer. Weighing ίο g The purified polymer #1 was added to a 1 〇〇mL glass container to add 1,3,5-trimethylbenzene 4 〇g, antioxidant ^(10)(10)1〇76 (manufactured by CibaGdgy Co., Ltd.) 〇.〇lg, cyclohexyl oxetane monomer (monomer not in formula (20), CH〇x manufactured by East Asia Synthetic) 2 g, photoacid generator Rhodorsil Photoinitiator 2074 (manufactured by Rhodia, CAS#) 178233-72-2) (2.72E-2 g, acetic acid ethyl acetate mL mL), after it is uniformly dissolved, the 〇 〇 2 μιη # PTFE transition device is filtered to obtain a clean core layer forming composition. . (Example 16) - An optical waveguide tube was obtained in the same manner as in Example 15 except that the irradiation amount of ultraviolet rays was reduced to 500 mj/cm2. (Comparative Example 1) An optical waveguide was obtained in the same manner as in Example 1 except that it was as described below. First, after the lower cladding layer is formed, a composition for forming a core layer obtained by omitting a cyclohexyloxyxanthene monomer from the polymer #1 is applied thereon, and exposure and heating are carried out to obtain a core layer. Thereafter, an upper side cladding layer is formed, whereby an optical waveguide tube is obtained. Further, in the obtained optical waveguide, the refractive index of the core portion is substantially fixed'. The refractive index of the side cladding portion is also substantially constant. Namely, the refractive index distribution 诹 of the step-index type layer of the core 112 201227021 40018pif of the obtained optical waveguide became 咐 (Comparative Example 2). In addition to the reticle which continuously changed during exposure, the optical waveguide was obtained. In order to continuously change the exposure amount and use the transmittance to perform the exposure, it is fixed in the same manner as in the comparative example: Γ2, so that the refractive index of the side covering portion is substantially lowered. In other words, the obtained gradient from the central portion to the periphery is a gradient index (the core layer (10) luminosity distribution W is the same as that of the optical waveguide obtained in each comparative example. The parameter of the refractive index of the core layer (IV) is shown as 113 201227021 JU8100 inch [1&lt;] refractive index distribution thickness direction SI type &lt; - &lt; - &lt; - &lt; - - i - &lt; - &lt;&lt;- i- &lt;- &lt;- &lt;- &lt;- &lt;- &lt;- SI type SI type width direction W type i-i- &lt;- &lt;- &lt;&lt;-&lt;-&lt;;-&lt;-&lt;&lt;-&lt;-&lt;-&lt;- SI type GI type exposure (mJ/cm2) 1300 1500 2000 500 1300 300 500 ο 1500 3000 1300 &lt;- &lt;- &lt;- 1300 500 1300 Gradient exposure consists of Avatrel &lt;- &lt;- &lt;- &lt;- &lt;- &lt;- &lt;- &lt;- &lt;- &lt;- &lt;- &lt;- &lt;- &lt;;—&lt;- Avatrel i? Acid generator (phr) Rhodorsil 0.25 &lt;- &lt;- &lt;- &lt;- &lt;- &lt;- &lt;- &lt;- &lt;- &lt;- &lt;- — &lt;— Rhodorsil 0.272 &lt;— Rhodorsil 0 .25 &lt;- monomer (phr) CHOX 20 i- &lt;- &lt;- &lt;- &lt;~· &lt;- &lt;- &lt;- &lt;- DOX 20 Celloxide2021 20 :CHOX 10+2021 10 CHOX 20 CHOX 20 &lt;- Repeating unit monoPh in the polymer ο ο ο oo ο ο ο ο ο ο ο ο ο 〇〇〇 P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P 〇\ 〇Hx (Mount) ο ο ο ^Τ) Instance 1 Instance 2 Instance 3 丨 Instance 4 | Example 5 丨 Instance 6 1 Instance 7 1 Instance 8 1 Instance 9 1 Instance ί 1 1 1 Instance 11 | 1 Instance 12 1 Example 13 | Example 14 1 Example 15 | Example 16 I | Comparative Example 1 | Comparative Example 2. Domain ^^^&-Pack 31: «^砩BM 砩ί4^^£0§ε 砩 ® ® ---w^-IJI^B-^i4ulir^llfep - Hair ^:^^砩^羿^^! !※ 201227021 J-aooIOO Inch (N&lt;) Parameter I of the refractive index distribution w in the width direction 0.42a I 1 0.31a | I 0.50a II 0.64a I 1 0.33a | l〇.32a I | 0.43a I 0.20 a I 0.09a I 1 0.05a 1 0.44a 0.34a 0.26a 0.25a 0.62a 0.55a StD refractive index distribution W is a gradient refractive index type a [μπι] 3 oo vo 5 9 a; Ι7Ϊ 5 5 ΓΛ 0 Wm2- Wsl 0.008 0.012 0.016 j | 0.009 I 1 0.018 | 0.008 1 | o.oio | ! 0.007 I 1 0.024 0.031 0.009 0.013 0.015 0.013 0.014 0.010 (Wml-Wsl)/( Wm2-Wsl)x 100 25.0 33.3 18.8 i 22.2 22.2 12.5 30.0 42.9 12.5 Bu ON Bu 13.3 15.4 21.4 40.0 (WA-Wsl) / ( Wm2-Wsl) xlOO 12.5 16.7 inch 〇 \ FH CSJ &lt; 5 15.0 21.4 vd 00 v〇00 rn Bu 〇 1 10.7 20.0 Average refractive index WA 1.5500 1.5460 1.5465 1.5540 ! | 1.5620 I | 1.5525 I | 1.5665 I ! 1.5415 ; 1.5785 1.5755 1.5465 1.5485 1.5480 1.5450 1.5415 1.5450 Wm5 1.551 | 1.548 | 1.548 I | 1.555 I 1.564 | 1.553 | | 1.568 I ! 1.543 | 1.580 1.577 1.547 1.549 1.549 1.546 1.543 1.547 Ws4 1.549 1.544 i | 1.545 I | 1.553 I | 1.560 | | 1.552 | | 1.565 | | 1.540 | 1.577J 1 1.574 1 1.546 1.548 1.547 1.544 1.540 1.543 Wm4 1.557 1.556 1.561 | 1.562 | I 1.578 | 1.560 1 | 1.575 I | 1.547 I 1 1.601 1 j 1.605 1 1.555 1.561 1.562 1.557 1.554 1.553 Ws3 1.549 1.544 | 1.545 | 1.553 I | 1.560 1 | 1.552 1 | 1.565 | | 1.540 | 1 1.577 1 1.574 1.546 1.548 1.547 1.544 1.540 1.543 Wm3 1.551 1.548 1.548 ; | 1.555 i | 1.564 | | 1.553 1 | 1.568 | | 1.543 | 1 1.580 1 1.577 1 1.547 1.549 1.549 1.546 1.543 1.547 Ws2 1.549 1.544 1.545 | 1.553 | | 1.560 | | 1.552 I | 1.565 | | 1.540 I 1.577 1.574 I 1.546 1.548 1.547 1.544 1.540 1.543 Wm2 1.557 1.556 1.561 1.562 | 1.578 I | 1.560 | | 1.575 | | 1.547 I 1.601 I 1.605 1.555 1.561 1.562 1.557 1.554 1.553 Wsl 1.549 1.544 1.545 | 1.553 i | 1.560 I | 1.552 I | 1.565 | I 1.577 I 1.574 II 1.546 1.548 1.547 1.544 1.540 1.543 Wml , 1.551 1.548 1.548 1.555 1.564 | | 1.553 1 | 1.568 | 1.543 I 1 1.580 .1.577 1.547 1. 549 1.549 1.546 1.543 1.547 Example 1 Instance 2 Instance 3 Instance 4 丨 Instance 5 | | Instance 6 | Instance 7 丨 Instance 8 1 1 Instance 9 I 丨 Instance 10 | Instance 11 Instance 12 1 Instance 13 1 Instance 14 1 Instance 15 1 Instance 16 Comparative Example 1 Comparative Example 2 201227021 40018pif (example Π)

(1) Production of optical waveguide forming composition (first composition) 10 g of the above-prepared polymer #1 in Example 1 was placed in a 100 mL glass container, and 1,3,5- was added thereto. 3 〇g of trimethylbenzene, antioxidant Irganox 1076 (manufactured by Ciba Geigy Co., Ltd.) 〇.1 g, cyclohexyl oxetane monomer (monomer represented by formula (20), cHOX manufactured by East Asia Synthetic, CAS# 483303-25-9 'Molecular weight 186, boiling point 125. 〇 / 1.33 kPa) 2 g, polymerization initiator (photoacid generator) Rhodorsil Photoinitiator 2074 (Manufactured by Rhodia Company 'CAS#178233-72-2) (2.5 E-2 g, ethyl acetate (0.1 mL) was uniformly dissolved, and then filtered using a pTFE filter of 〇2 μηη to obtain a clean optical waveguide forming composition. (2) Production of Optical Wave Tube Forming Composition (Second Composition) The molar ratio of each structure 7L of the above polymer #1 purified in Example 1 was changed to hexyl norbornene. The structural unit 8〇m〇1/〇, a monophenylmethylnorbornene decyloxydecane structural unit 20 mol% of the composition 'to replace the above polymer #1 m Bu, in the same manner as the 丨 composition A composition for forming a light guide tube was obtained. (3) Production of optical waveguide First, the configuration of the mixing unit shown in Fig. 16 was changed, and it was prepared to increase the first supply pipe and the second supply (four) branch-mixing means. Then, using the die coater, a light-wave tube manufactured was used to form a poly- (PES) film for multi-color extrusion molding. It is understood that the first composition is the first layer, the third layer, the fifth layer, the seventh layer, and the ninth layer, and the second composition is the second layer, the fourth layer, and the sixth 116 201227021 40018 pif layer and First. 8-layer multicolor molded body. The multicolor molded body was placed in a 55 (10) dryer for 1 G minutes, and the solvent was completely removed to obtain a ruthenium for forming an optical waveguide having a refractive index distribution T as shown in Fig. 7 . Then, the photo-shield was opened on the film, and the mask was pressure-bonded to selectively irradiate ultraviolet rays at 2 〇〇〇 mj/cm2. The mask was removed and heated in a dryer at 15 Torr for 5 hours. After heating, a clear waveguide pattern was observed, and it was confirmed that the core portion and the side cladding portion were formed. Thereafter, a length of 10 cm was cut out from the obtained optical waveguide. Further, the formed optical waveguide tube comprises two core layers, and each of the core layers is formed with eight core portions in parallel. Further, the width of the core portion is % μηι, the width of the side slope portion is 8 〇μπι, and the thickness of the optical waveguide tube is μπι 〇 (evaluation of the refractive index distribution). Then, the cross section of the core layer of the obtained optical waveguide tube The refractive index distribution W in the width direction is obtained by an interference microscope along the center line ' of the thickness direction thereof. As a result, the refractive index distribution w has a plurality of minimum values and maximum values, and the refractive index continuously changes. On the other hand, the cross section of the optical waveguide is obtained by interfering with the microscope to obtain the refractive index distribution T in the thickness direction along the center line of the center of the t-degree of the core portion in the vertical direction. As a result, the refractive index distribution τ blood refractive index distribution W has a plurality of minimum values and maximum values, and the folding rate continuously changes. (Example 18) An optical waveguide tube was obtained in the same manner as in Example 17, except that the irradiation amount of the external air line was increased to 2,500 mJ/cm2. 117 201227021 4UUI«pif (Example 19) In addition to increasing the irradiation dose of ultraviolet rays to 2 〇〇〇 mJ/cm 2 , and changing the molar ratio of each structural unit of the poly #1 to the hexyl icing structure το The composition is 40 m〇l%, and the diphenylfluorenyl norbornene decyloxydecane copolymer unit is 6 G mol%. phase. The optical waveguide is obtained in the same way. (Example 20) In addition to reducing the irradiation amount of ultraviolet rays to j 〇〇〇 mJ/cm 2 , and changing the molar ratio of each structural unit of polymer #1 to hexyl norbornene thin

= single = 45 mol%, diphenylmethylnorbornene methoxy sinter calendering early enthalpy is 55 mGl% (four) as a polymer, in a manner to obtain an optical waveguide. U (Example 21) Except that the molar ratio of each structural unit of the polymerization_ was changed to 3 G md% of the hexyl norbornene structural unit and 7 〇 of the diphenyl ρ Μ structural unit was used as the polymer. The optical waveguide was obtained in the same manner as the example. (Example 22) (4) Reduce the irradiation dose of ultraviolet rays to the m2' and use the structural unit of each structural unit of the polyδ#1 as 4〇m〇1%, a dull==, more hexyl norbornene The photo-wave tube was obtained in the same manner as the π-n-methyl-norbornene methoxy decane. In addition to the substance, in the case of the case of Example 17 (Example 23) 118 201227021 40018pif In addition to reducing the amount of ultraviolet light irradiation to 1 〇〇〇 mJ/cm 2 , and using the molar ratio of each structural unit of the polymer #1 The light guide tube is obtained in the same manner as the sample port except that the unit is 30 mol%, the unit is 30 mol%, and the structural unit of diphenylfluorenyl norbornene decyloxydecane is 70 mol%. . (Example 24) In addition to reducing the irradiation amount of ultraviolet rays to 3 〇〇 mJ/cm 2 , and changing the molar ratio of each structure of the polymer #1 to hexyl norbornene thin = monofu 60-%, diphenyl The methyl group-freezing (4) oxime-wei structure is 7G in the early 7L, and the optical waveguide is obtained in the same manner as the polymer. Rushing (Example 25) In addition to increasing the irradiation dose of ultraviolet rays to 25 〇〇m T/cm 2 , and changing the molar ratio of each structural unit of the substance I1 to hexyl norbornene, the second is ^ K) m 〇 1% The light-waveguide tube is obtained by the same method as the polymerization of the di-kilo-based fluorenyl-formed methoxy-propionic structure. (Example 26) In addition to increasing the irradiation amount of ultraviolet rays to the side mJ/cm2, and changing the molar ratio of the structural unit to hexyl-free ί: : ==5, diphenylmethylnorbornene methoxy Wei structure

An optical waveguide tube was obtained in the same manner as in Example 17 except that the polymer was used as a polymer. U (Example 27) 119 201227021 40018pif, a composition produced by the method described below is used as a composition for forming a light guide wave formation (first composition), and an optical waveguide is obtained in the same manner as in Example 17. tube. . Weigh 10 g of the above-mentioned polymer #1 in a glass container of 100 mL: 〇中中8,3,5-diphenylbenzene 4〇g, antioxidant irgan〇x 1〇76 (CibaGeigy Manufactured by the company) 〇〇1 g, bifunctional oxetane monomer (monomer represented by formula (15)' manufactured by East Asia, D〇x, CAS#18934-00-4, molecular weight 214, boiling point ^9^/0.67 kPa) 2 g, photoacid generator Rhodorsil Photoinitiator 2074 (Manufactured by Rhodia Company 'CAS#178233-72-2) (2.5E-2 g, ethyl acetate (in H mL) to dissolve evenly Thereafter, the mixture was filtered with a PTFE filter of 〇·2 μηι to obtain a composition for forming a clean optical waveguide. (Example 28) A composition produced by the method described below was used as a composition for forming an optical waveguide. The optical waveguide tube was obtained in the same manner as in Example 17 except that the material (the first composition) was weighed. 10 g of the purified polymer #1 was weighed in a 1 〇〇mL glass container, and 1,3 was added thereto. 5-diphenylbenzene 40 g, antioxidant irganox 1〇76 (manufactured by Ciba Geigy Co., Ltd.) 0.01 g, alicyclic epoxy monomer (monomer represented by formula (37) Made by Daicel Chemical, Celloxide 2021P, CAS#2386-87-0, molecular weight 252, boiling point 188 °C / 4 hPa) 2 g, photoacid generator Rhodorsil Photoinitiator 2074 (manufactured by Rhodia, 0 8 8 #178233-72 -2) (2.5 ug-2 §, ethyl acetate 〇.1111): medium), after it is uniformly dissolved, it is filtered by a PTFE filter of 〇·2 μιη, 120 201227021 40018pif for the formation of a clean optical waveguide (Example 29) An optical waveguide tube was obtained in the same manner as in Example 17 except that the composition produced by the method described below was used as the optical waveguide forming composition (first composition). 10 g of the purified polymer #1 was added to a 100 mL glass container to add 1,3,5-trimethylbenzene 40 g, and an antioxidant Irgan〇x 1〇76 (manufactured by Ciba Geigy Co., Ltd.). g, cyclohexyl oxetane monomer (CHOX represented by Formula 20, CHOX manufactured by Toagosei Co., Ltd.) 1 g, alicyclic epoxy monomer (Daicel Chemical Co., Ltd. 'Celloxide 2021P) 1 g, photoacid production Rhodorsil Photoinitiator 2074 (Manufactured by Rhodia, CAS#178233-7 2-2) (2.5E-2g, ethyl acetate (in u mL) was uniformly dissolved, and then filtered through a 0.2 μm FTFE filter to obtain a clean optical waveguide forming composition. (Example 30) An optical waveguide tube was obtained in the same manner as in Example 17, except that the synthesizer was used as a polymer by the method shown below. First, in addition to the diphenyl fluorenyl norbornene decyloxy decane 129 g (40.1 mmol) using phenyldifluorenylnorbornene decyloxy decane 1 〇 4 g (40.1 mmol), The polymer was synthesized in the same manner. The structural unit of the ruthenium polymer is shown by the following formula (1〇3). The polymer had a molecular weight of 110,000 and Mn = 50,000 as measured by GPC. In addition, by the identification of NMR, the molar ratio of each structural unit is: hexyl norbornene structural unit is 50 m〇l〇/0, phenyl dimercapto norbornazole rare iron &amp; 121 201227021 40018pif basestone smoldering structure The unit is 5 〇 mol%. [化42]

(103) (Example 31) - In addition to the composition for forming an optical waveguide (the second composition), the composition for forming an optical waveguide tube synthesized by the method of 3 έ or less) The optical waveguide θ(1)^heterocyclobutane-based resin was synthesized in the same manner as the example I. The % hexyl oxetane body (j helmet shown by the above formula (2G), manufactured by East Asia Synthetic C: HOX, CAS#483303-25-9, Molecular i Method 18: '4 points is 125 ° c / l. 33 kPa) 50 g In 300 mL, 5 flasks can be separated, add human such as trimethylbenzene, and plug tightly. Then, in the glove box where the moisture and oxygen concentrations are both controlled below 1 ppm and filled with the dry text U, the 玻 L L L 化学 化学 化学 化学 化学 化学 化学 化学 化学 化学 化学 化学 化学 L L L Medium 0.40 g (0.5 mmol) and acetic acid; ^曰2〇mL 'put into the mix and plug tightly, the catalyst is fully ": mix and finish, 122 201227021 dissolved. In a catalyst flask represented by the following chemical formula (9), in a catalyst flask represented by the following chemical formula (9), the machine was mixed: the solution was raised to obtain an anti-listening liquid. +Yes, the viscosity of the fruit is obvious [Chem. 43]

(D) The reaction solution and the ion exchange resin (manufactured by Organo Co., Ltd., EG-290-HG) were added to 50 g of the mixture for 3 minutes, and the mixture was filtered to remove the catalyst to obtain a polymer solution. (7) Production of a light-wave-wave tube-forming composition (third composition) A composition for forming an optical waveguide tube was obtained in the same manner as the first composition except that 3 g of the obtained polymer solution was added (third composition) ()). (Example 32) An optical waveguide tube was obtained in the same manner as in Example 31 except that the irradiation amount of the % external line was reduced to 1 〇〇〇 mJ/cm 2 . (Reference Example 1) 123 201227021 40018pif An optical waveguide was obtained in the same manner as in Example 17, except that its setting was changed in the mixing unit used in Example 17. Further, in the obtained optical waveguide, the refractive index distribution T in the thickness direction is a so-called gradient refractive index type. (Reference Example 2) An optical waveguide was obtained in the same manner as in Example 17, except that the mixing pin was omitted in the mixing unit used in the example. Further, in the obtained optical waveguide, the refractive index distribution T in the thickness direction is a so-called step-change refractive index type. With respect to the above examples and the optical waveguide obtained in each of the reference examples, the manufacturing conditions are shown in Table 3, and the parameters of the refractive index distribution T of the core layer are shown in Table 4. 124 201227021 J'aooloo inch [£&lt;]

The refractive index distribution thickness direction W type &lt; - &lt; - &lt; - &lt; - &lt; - &lt; - &lt; - &lt; - &lt; - &lt; - &lt; - &lt; - &lt; - &lt; - &lt;;- GI type SI type width direction W type &lt; - i - &lt; - &lt; - &lt; - &lt; - &lt; - &lt; - &lt; - &lt; - &lt; - &lt; - &lt; - &lt;&gt;- W type&lt;- Exposure amount (mJ/cm2) 2000 2500 2000 1000 2000 700 1000 300 2500 4000 2000 &lt;- &lt;- &lt;- 2000 1000 2000 &lt;- 2nd and 3rd composition 2nd composition物&lt;- &lt;- &lt;- &lt;- &lt;- &lt;- &lt;*- &lt;- &lt;- &lt;- &lt;- &lt;- 3rd composition&lt;- 2nd composition &lt;;- 1st composition acid generator (phr) Rhodorsil 0.25 &lt;- &lt;- i- &lt;- &lt;- &lt;- &lt;- &lt;- &lt;- &lt;- &lt;- &lt;- &lt;;- Rhodorsil 0.25 &lt;- Monomer (phr) CHOX 20 i &lt;- &lt;- &lt;- &lt;- &lt;- &lt;- &lt;- &lt;- &lt;- DOX 20 Celloxide2021 20 CHOX 10+2021 10 CHOX 20 CHOX 20 &lt;- CHOX 20 &lt;- £ flavor monoPh (mole) ο 〇〇〇〇 〇〇〇〇〇〇〇〇〇ο 〇llftlll ηβη s prepared diPh (mole) S 〇δ 〇〇〇Hy (mole) 〇JO 〇S 〇exampleΠ Example 18 丨Example 19 Example 20 丨Example 21 I 丨 Example 22 | Example 23 丨 Example 24 | 丨 Example 25 I | Example 26 | | Example 27 I 1 Example 28 I Example 29 | Example 30 1 1 Example 31 I Example 32 I Reference Example 1 | | Reference Example 2 I. Pity makes Zhu Weixu "皙一一sft«s#^K§l&gt;¥«&lt;N hide,! H, «, back ¥锶 1 hide,! H, «, iHY!! ecs姝 3^&lt;33羿呶 "Theatrical" «+ pity 跻 跻 跻 ※ ※. ^^砩忒&amp;-装=1: 关鱼砩望4砩械羿^£|&lt;^^硝^&amp;-«:¥«鱼硪»-砩埏-^羿咖£^-教| ^关金^(0羿^^^ 201227021

Juooloo Inch 1 The parameter of the refractive index distribution T in the thickness direction is 0.69a 0.42a 1 0.48a 1 0.24a 0.29a 0.30a I 0.32a I 1.02a | | 0.09a I | 0.03a I | 0.40a I | 0.33a 1 | 0.25a I 1 0.45a | | 0.62a I | 0.55a 1 The refractive index distribution τ is the step-varying refractive index type a [μιη] 00 (N (N 〇\ (N 5 CN (N in oo P; mo Tm2-Tsl | 0.017 0.014 0.021 1 0.024 0.040 0.020 0.033 : 0.011 | 0.061 1 | 0.060 I | 0.018 1 | 0.024 I | 0.025 I | 0.020 I [0.018 1 | 0.017 1 (Tml-Tsl)/(T m2-Tsl) x!00 : 64.7 35.7 23.8 1 41.7 30.0 25.0 21.2 54.5 ΓΟ 11.7 72.2 25.0 ! 20.0 , 60.0 38.9 64.7 (TA-Tsl)/(Tm 2-Tsl)xl00 32.4 17.9 ON 20.8 15.0 12.5 | 10.6 27.3 VO 00 12.5 10.0 i 30.0 19.4 32.4 Average refractive index ΤΑ | 1.5455 ; 1.5445 j 1.5425 1 1_ _ 1.5430 1.5440 11-5425" 1.5455 1.5390 1.5440 1.5485 1.5435 1.5400 1.5395 1.5430 1.5395 1.5415 Tm5 1 1.551 1.547 I [1.545 I | 1.548 I | 1.550 I | 1.545 I | 1.549 I | 1.542 I | 1.548 | | 1.552 | | 1.550 | | 1.543 | | 1.542 | | 1.549 | | 1.543 | | 1.547 | Η Pity Ts4 1.540 1.542 j 1.5 40 1.538 1.538 1.540 | | 1.542 i | 1.536 | | 1.540 | 1-^5 | | 1.537 I 1.537 1.537 , 1.537 ! 1.536 | 1.536 Tm4 | 1.557 I | 1.556 | | 1.561 I | 1.562 I | 1.578 I | 1.560 | 1.575 | | 1.601 | | 1.605 I | 1.555 | ! 1.561 | 1.562 , 1.257 | | 1.554 | | 1.553 | | 1.540 1 | 1.542 | 丨1.540 | 1.538 : 1.538 : 1.540 | 1.542 I | 1.536 | | 1.540 I 1.545 I | 1.537 | 1.537 | | 1.537 | ;1.537 | | 1.536 | | 1.536 1 1 Tm3 | 1.551 1 丨1.547 | 1.545 | 1.548 : WO | 1.545 I | 1.549 I | 1.542 | | 1.548 I | 1.552 I | I | 1.543 I | 1.542 I | 1.549 | 1-543 1 1_547 1 (N | 1.540 I | 1.542 I | 1.540 | 1.538 ; 1.538 : | 1.540 I | 1.542 I | 1.536 | | 1.540 II· | [1.537 | | 1.537 | | 1.537 I | 1.537 | [1.536 I | 1.536 1 Tm2 | 1.557 | | 1.556 | 1.561 | 1.562 1.578 | 1.560 | | 1.575 | | 1.547 | | 1.601 | | 1.605 I | 1.555 | | 1.561 | ! 1.562 | | 1.557 | | 1.554 I 1_553 | | 1.540 | | 1.542 | | 1.540 | 1.538 | 1.538 | 1.540 | | 1.542 | | 1.536 | | 1.540 I | 1.545 I | 1.537 | | 1.537 1 | 1.537 I U-5371 Li!” 1.536] Tml | 1.551 1 | 1.547 | | 1.545 | | 1.548 | | 1.550 i | 1.545 I | 1.549 | | 1.542 | | 1.548 | | 1.552 | | 1.550 I | 1.543 | 1.542 | | 1.549 1 | 1.543 I 11.547 I 1 instance π | Example 18 1 | Example 19 实例 Example 20 I Example 21 1 | Example 22 | Example 23 | Example 24 | | Example 25 | Example 26 | Example 27 | Example 29 1 I Example 30 1 I Example 31 1 | Example 32 | I Reference Example 1 | | Reference Example 2 1 9-201227021 40018 pif 2. Evaluation (Example 1 to Example 16 and Comparative Example 1, Comparative Example 2) 2.1 Light Guide The intensity distribution of the light emitted from the waveguide is measured on the exit side end surface of the obtained optical waveguide, and the intensity distribution of the emitted light when one of the eight cores is incident on the light is measured. Further, the measurement of the intensity distribution of the emitted light was carried out by the method shown in Fig. 3. Further, the intensity distribution of the emitted light obtained is shown in FIG. Further, in Fig. 18, the intensity distributions of the emitted light measured in the optical waveguide obtained in Example 1, Comparative Example 1, and Comparative Example 2 are shown as representative. Further, when the intensity distribution of the emitted light is obtained, light is incident on the core portion 14 (CH1) at the center of Fig. 18, and the emitted light at this time is observed. As is apparent from Fig. 18, in the optical waveguide obtained in the example, the crosstalk in the width direction was sufficiently suppressed. Further, it has been confirmed that, in the optical waveguide obtained in the example, the intensity of the outgoing light in the core portion 14 (CH2) adjacent to the width direction of the core portion 14 (CH1) into which the light is incident is smaller than that adjacent to the core portion. 14 is located at the intensity of the outgoing light in the side surface portion 15 (CL2) on the side opposite to the core portion 14 (CH1) on which the light is incident, and has a minimum value of the intensity of the emitted light in CH2. Therefore, it is understood that the interference between the channels can be prevented in the optical waveguide obtained in the example. Further, it was confirmed that in the optical waveguide obtained in Example 1, a part of the emitted light was concentrated on the side cladding portion 15, and the maximum intensity of the emitted light was present in CL2. Further, in general, the light-receiving element connected to the optical waveguide is connected to the side surface of each of the core portions 14 and is not connected to the side surface portion 15. Therefore, even if the light is concentrated on the side cladding portion 15, the 127 201227021 opif becomes a crosstalk. Further, in the intensity distribution of the emitted light, the core portion 14 (CH1) at the center of Fig. 18 and the core portion 14 (CH2) adjacent to the core portion 14 (CH1) in the first layer are located at the core portions. Table 5 shows the maximum value and the minimum value of the side surface covering portion 15 (CL1) and the side surface covering portion 15 (CL2) on the side opposite to CH1 of CH2. Further, regarding the intensity distribution of the emitted light, the intensity difference between the extreme value in CL2 and the minimum value in CH2 and the intensity ratio in the maximum value in CL2 with respect to the maximum value in CH1 were measured and shown in Table 5. 128 201227021 J-aooIOO inch G&lt;] Evaluation result gl/g2 0.083 I 0.1HI 0.184 0.321 I 0.234 I 0.259 1 丨0.348丨1 0.417 I 0.365 0.045 0.208 0.114 0.324 0.213 0.250 0.341 1 1 璁ffi ΐ; « 2, Κ λ ( rj U CN CN 1 1 ON 1 I ο t 1 00 η 1 1 !〇1 VO 1 m 1 〇 〇 \ (N 1 1 (maximum value of CL2) - (minimum value of CH2) TdBl CN cn 〇 〇 σ \ FH 00 〇 inch ι«-Η 1 1 Pulse width &lt;] 〇◎ 〇&lt;] 〇&lt;1 〇&lt;! 〇&lt;3 Ο 〇◎ 〇1 &lt;! Transmission loss [dB/cm] 0.07 0.05 0.04 0.06 | 0.02 1 1 0.08 1 | 0.05 I 0.09 0.06 0.08 0.04 0.09 0.08 0.04 0.03 0.05 0.21 0.12 Intensity distribution of the outgoing light in the thickness direction Side ϊ 覆 CL2 Maximum value Maximum value Maximum value Maximum value I Maximum value i 1 Value I | Maximal Value | Maximal Value | Maximal Value | Maximal Value | Maximal Maxima Maximal Maxima Maxima Maxima Minimal Core CH2 Minimum Small Minimum Small Minimum Small Minimum Il Minimum Value | Minimum Value | Minimum value | Minimum value Minimum value Minimum value Minimum value Minimum value Minimum value Small value minimum value maximum value maximum value side cladding portion CL1 1 I 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 core CH1 maximum value maximum value maximum value l maximum value 1 maximum value | Maxima | Maxima | Maxima | Maxima Maxima Maxima Maxima Maxima Maxima Maxima Instance 1 Instance 2 Instance 3 Instance 4 Instance 5 | Example 6 Instance 7 I Instance 8 I 丨 Example 9 | Example 10 Example 11 | Example 12 | Example 13 Example 14 Example 15 Example 16 Comparative Example 1 Comparative Example 2 6-201227021 40018pif As shown in Table 5, it was confirmed that the optical waveguide obtained in the other examples was also obtained in the same manner as in Example 1. It is understood that the intensity distribution of the outgoing light in the optical waveguide obtained in each example takes a maximum value in CH1 and CL2, and takes a minimum value in CH2. Therefore, in the optical waveguide obtained in each example, crosstalk is suppressed and interference between channels is prevented. On the other hand, it was confirmed that the optical waveguide obtained in Comparative Example 1 and Comparative Example 2 was placed on the core portion 14 (CH2) adjacent to the core portion 14 (CH1) into which light was incident as shown in FIG. There is a maximum value of the intensity distribution of the emitted light. That is, crosstalk occurs in the optical waveguides. 2.2 Refractive index distribution of the optical waveguide The refractive index distribution was measured by an interference microscope on the cross section of the core layer of the obtained optical waveguide along the center line in the thickness direction thereof. Further, since the obtained refractive index distribution repeats the same refractive index distribution pattern for each core portion, a part of the obtained refractive index distribution is cut out as a refractive index distribution W. The shape of the refractive index distribution w is a shape in which four minimum values and five maximum values are alternately arranged as shown in Fig. 4 . Further, each of the minimum values Wsb, Ws3, Ws4, and each of the maximum values WnU, 2, and 3 are obtained from the obtained refractive index distribution w.

Wm4, Wm5' and the average refractive index WA of the cladding portion is obtained. In addition, the refractive index distribution W towel measures the width a[_ of the portion of the refractive index near the maximum value Wm2 and Wm4 of the core having an average refractive index WA or more, and each of the minimum values _, leaks, and A portion of the refractive index near Ws4 having a value smaller than the value of the average refractive index emblem 2012 201221 21 « V / Vf A. V / | &gt; α Χ width b 〇 m] respectively ===: refractive index distribution of the tube

W core: The refractive index distribution rate distribution W of the optical waveguide obtained in the same order is, for example, the gradient of the optical waveguide obtained in Comparative Example 2 as a gradient refractive index type. 2.3 Transmission loss of the optical waveguide The light emitted by the nmVCSEL (surface-emitting laser) is introduced into the obtained optical waveguide via the % optical fiber, and the intensity of the light is measured by the optical fiber that is hired. In addition, the reverse method was used for the measurement. Take, the length direction of the waveguide is the horizontal axis, and the insertion loss is taken as the vertical axis, and the measured value of the measured value is arranged on a straight line. Therefore, the transmission loss is calculated from the slope of the straight line. 2.4 Waveform Retention of Pulse Signal The obtained optical waveguide was injected into a pulse signal having a pulse width of 1 ns by a laser pulse source, and the pulse width of the emitted light was measured. Then, the relative value when the measured value of the optical waveguide (the step-refractive-index optical waveguide) obtained in Comparative Example 1 is set to 1 is calculated for the pulse width of the measured outgoing light, and is calculated based on the following. Evaluation criteria to evaluate. <Evaluation Criteria for Pulse Width> ◎: The relative value of the pulse width is less than 0.5. 〇 : The relative value of the pulse width is 0.5 or more and less than 0.8. △: The relative value of the pulse width is 0.8 or more and less than 1. 131 201227021 40018pif x The relative value of the pulse width is 1 or more. The evaluation results of 2.4 and 2.4 are shown in Table 5. The retardation is suppressed separately. 1 寻 彳 彳 以及 以及 以及 脉冲 脉冲 脉冲 ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( The intensity distribution of the emitted light when one of the ends is incident on the light is performed on the six cores, and the intensity of the light is set in the two core layers, which is performed by the method shown in FIG. Further, m I is performed by observing the emitted light at this time by irradiating the core portion 14 (cm) of the center of the first layer core layer. In the intensity distribution of the emitted light, the core portion 14H1) that enters the light, the core portion (CH2) adjacent to the anger portion M (CHi) in the thickness direction, and the coating layer between the core portions The maximum value and the minimum value of 121 (CL1) and the coating layer 122 (CL2) on the opposite side to CH1 of CH2 are shown in Table 6. Further, regarding the intensity distribution of the emitted light, the intensity difference between the extreme value in CL2 and the minimum value in CH2 and the intensity ratio in the maximum value in CL2 with respect to the maximum value in CH1 were measured and shown in Table 6. 132 201227021 J-aooIOO Inch 9&lt;] Evaluation result g3/g4 0.125 0.139 0.158 0.290 0.224 0.302 0.358 0.154 0.247 | 0.221 I 0.310 0.256 0.372 0.267 0.180 0.179 1 1 ffi 埏琏+NV 璁X s U CS 1 Γν| CN CN 1 00 1 1 1 (Ν &lt; § 1 1 ON (N 1 1 m rn CN ΓΟ 1 1 (maximum value of CL2) - (minimum value of CH2) 冈m ν〇〇\ σ\ inch 00 卜 0\ 〇 CN 卜1 1 Pulse width &lt; ◎ ◎ &lt; 〇〇〇 &lt;1 &lt;] &lt;] 〇〇 ◎ ◎ 〇 &lt;&lt; Transmission loss [dB/cm] 0.06 0.03 0.02 0.05 0.03 0.06 0.05 0.08 0.07 ! 0.09 0.06 0.04 0.05 0.03 0.03 0.04 0.12 0.23 Intensity distribution of outgoing light in the thickness direction Side cladding CL2 Maximum value Maxima maximum Maxima maxima | Maxima | | Maxima | Maxima maxima maxima Maximum value maximum value Maximum value Maximum value Minimum value Minimum value Core CH2 Minimum value Minimum value Minimum value Minimum value 丨|minimum value 1 minimum value|minimum value 1 minimum value|minimum value minimum value minimum value minimum value minimum value minimum value minimum value Minimum value The maximum value side is covered by ^ CL1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 Core CH1 4&lt; maxima maxima | maxima 1 max | max 1 ί max max 1 Maxima Maxima Maxima Maxima Maxima Maxima Maxima Example 17 Example 18 Example 19 Example 20 Example 21 丨 Example 22 | Example 23 1 丨 Example 24 I | Example 25 I | Example 26 I | 27 IL Instance 28 I | Example 29 I | Example 30 I | Example 31 1 | Example 32 I | Reference Example 1 | | Reference Example 2 | 201227021 ^uui»pif As shown in Table 6, 'Understanding, the results obtained in each example The intensity distribution of the outgoing light in the optical waveguide is taken to be the maximum value in CH1 and CL2 and takes a minimum value in CH2. Therefore, in the optical waveguide obtained in each of the examples, crosstalk is suppressed and interference between channels is prevented. On the other hand, in the optical waveguide tube obtained in Reference Example 1 and Reference Example 2, light is emitted from the core portion 14 (CH2) adjacent to the thickness direction of the incident optical core portion 14 (CH1). The maximum value of the intensity distribution. That is, crosstalk occurs in the optical waveguides. 3.2 Refractive index distribution of the optical waveguide The cross section of the core layer of the obtained optical waveguide, along the center line of its thickness direction, is measured by the interference mirror. Further, the obtained refractive index distribution is cut out from the obtained refractive index distribution by repeating the same refractive index profile for each core, and this is taken as the refractive index distribution T. The shape of the refractive index distribution T is a shape in which four minimum values and five maximum values are alternately arranged as shown in Fig. 7 . Then, based on the obtained refractive index distribution τ, each of the minimum values Ts, Ts2, Ts3, and Ts4 and the respective maximum values Tml, μ, Μ, w, and μ are obtained, and the average refractive index ΤΑ in the coating layer is obtained. Γ 1 ^ 1 A, respectively, measured in the core of the 4, Tm4 near the refractive index has an average refraction # Μ above the width of the heart knife a [_ ' and each minimum value Ts TS2, Ts3,, near, The refractive index has a value smaller than the average refractive index ta [μιη] °. As a result, the refractive index distribution of the waveguide is 各 134 201227021 40018pif The change in the refractive index of the entire cutter is continuous. τ is the refractive index distribution of the other wire as follows:: step change = refractive index distribution of the obtained optical waveguide - 3.3 transmission loss of the optical waveguide will be light emitted by 850 nm VCSEL (surface-emitting laser) The intensity of the light was measured by introducing the optical waveguide into the obtained optical waveguide via 5 〇. In addition, the reverse method was used for the measurement. Take the axis of the ϋ s in the longitudinal direction, and take the insertion loss as the vertical axis, and measure the second; the measured value of the figure is arranged on a straight line. Therefore, the transmission loss is calculated from the slope of the straight line. 3.4 Waveform Retention of Pulse Signal For the obtained optical waveguide, a pulse signal having a pulse width of 1 ns was incident from a laser pulse source, and the pulse width of the emitted light was measured. Then, the relative value when the measured value of the optical waveguide (the step-refractive-index type optical waveguide) obtained in the reference example is set to 1 is calculated for the pulse width of the measured outgoing light, and the following is calculated based on the following Evaluation criteria to evaluate. <Evaluation Criteria for Pulse Width> ◎: The relative value of the pulse width is smaller than 〇 5. 〇 • The relative value of the pulse width is 0 5 or more and less than 〇 8. △. The relative value of the pulse width is 〇 8 or more and less than 1. x : The relative value of the pulse width is 丨 or more. The evaluation results of the above 3.3 and 3.4 are shown in Table 6. 135 201227021 *tuuiopif Jiuhui 1 Table 6 shows 7F 'confirmed, in the optical waveguide obtained in each example, compared with the optical waveguide obtained in the test case, the hiccup loss and the pulse purity are respectively obtained. In addition, the optical waveguide manufactured by changing the conditions of the example 1 in the following manner did not obtain a private characteristic. • Irradiation amount of ultraviolet rays in the production of the lower cladding layer: 100 mJ • Irradiation amount of ultraviolet rays in the production of the core layer: per mJ/cm2 • Lower cladding layer and (4) Drying conditions before violet irradiation: 45〇 Addition amount of polymerization initiator in the core layer for 15 minutes:] 36e 2 g 4. Other examples 4.1 Manufacturing of optical waveguide (Example A) (1) Manufacture of coating solution 20 g of Daicel chemical industry Cdl〇xide 2〇81 manufactured by (share), 0.6 g of Adeka 〇pt〇mer sp no manufactured by ADEKA Co., and 80 g of methyl isobutyl ketone were stirred and mixed, and pTFE with a pore size of 〇2 μηη The filter is filtered to obtain a clean, colorless and transparent coating. 1 〇 (2) Production of photosensitive resin composition 20 g of YP_5〇s, 5 g manufactured by Nippon Steel Chemical Co., Ltd.

Cen〇xide 2021P manufactured by Daicel Chemical Industry Co., Ltd., and Adeka Optomer SP-170 manufactured by 0.2 g of ADEKA were put into 80 g of methyl isobutyl ketone, stirred and dissolved, and PTFE was passed through a pore size of 0.2 μm. 136 201227021 The reactor was subjected to 遽 'A clean and colorless transparent photosensitive resin composition F1 〇 (3) The undercoat layer was formed on a polyimide film with a thickness of 25 μm. After the above solution Ε1, it was put into 50 of its dryer for 1 minute. After the solvent was completely removed, the entire surface was irradiated with ultraviolet rays to be 5 GG nJ/em2' by a uv exposure machine to form a lower layer of the colorless thorn. The resulting coating layer had a thickness of 10 μm. (4) The formation of the core layer, the pattern of the core region and the cladding region are patterned on the lower cladding layer, and the photosensitive resin composition F1 is uniformly applied by a doctor blade, and then the amount is 5 (n: money) Towels iq minutes. Finish = After removing the solvent, the crimping is fully provided with a mask of 5G, the space is %哗 pattern, and the parallel exposure machine is used to irradiate the ultraviolet rays with the irradiation amount of 500 mJ/cm. After removing the mask and putting it into (9)^box ^min' and then taking out, it is confirmed that a clear waveguide pattern is formed. The thickness of the core layer is 50 μm. (5) The upper cladding layer is formed on the above four layers. In the above, the above phase _= is used as the upper coating layer. The obtained acrylonitrile bottle of the upper coating layer is added with methacrylic acid methyl ketone 20. 〇g, methyl group and then methyl isobutyl ketone. 450 (four) mixed with milk to obtain an early body solution. On the other hand, 0.25 g of azobisiso 137 201227021 40018 pif butyronitrile was dissolved as a polymerization initiator in methyl isobutyl ketone (7), and the initiator solution was obtained by replacement with an atmosphere. Thereafter, the monomer j liquid-side win-side is heated to 8 (TC, and the above creping solution is added to the monomer solution towel using a syringe. 4 is grounded at _lower heating age and then cooled to obtain a polymer. After the solution, prepare 5 L of isopropanol in the beaker, and the side (4) machine wins, and the above polymer solution is dripped. After the dripping is completed, the mixture is further mixed for 3 G minutes, and then the precipitated polymer is removed. The machine was dried at 60 ° C for 8 hours under reduced pressure to obtain the production of the aggregates α 1 and 2 u). The aqueous solution of 20 g of the aqueous chemical system of the conjugated chemical industry (shares) -180, 20 g of isopropyl alcohol, and 〇4 g of Nisshin Spun Chemical Co., Ltd. Carb〇dilite V-02_L2 _ mixed with 〇2 (four) hole = PTFE filter for filtration', to obtain a clean and colorless transparent Cover solution B1. (3) Production of photosensitive resin composition = Polymer obtained by the method of (1). A = Cyclohexyl Acrylic Acid, and g 2 g of BASF Japan (stock) 65 ^ was put into methyl isobutyl ketone 8 〇 g, sandalwood dissolved and dissolved by 〇 2 _ hole over the charm, A photosensitive resin composition C1 which is clean and colorless and transparent is obtained. (4) Preparation of the underlying coating layer on the 25 μιη polyimine film, the coating solution B1 was applied by a doctor blade, and then placed in a dryer of 80 t for 1 minute 138 201227021 opif clock . After the solvent was completely removed, it was further poured into an oven of 150 〇c for 10 minutes to be hardened to form a colorless and transparent lower cladding layer. The resulting coating layer had a thickness of 10 μm. (5) The formation of the layer, the core region, and the cladding region are patterned on the lower cladding layer, and the photosensitive resin composition C1 is uniformly applied by a doctor blade, and then applied to a 5 Gt drying towel 10 minute. After removing the solvent from the king, the photo-shield with a straight line pattern of 5 inches in space was drawn by crimping, and the exposure machine was irradiated with ultraviolet rays by an exposure amount of 500 mJ^cm. Thereafter, the mask was removed and placed in a 15 鼠 mouse drying towel for 3 minutes, and then taken out, and a clear waveguide pattern was observed. The resulting core layer had a thickness of 50 μm. (6) The upper coating layer is formed on the above-mentioned core layer, and the above-mentioned coating solution is used to form the upper layer (4) under the same conditions as the lower coating layer. The resulting upper blister (four) thickness is η (example C), first, obtained in addition to paving? As the silk material (4), a polymer Α2 of the same formula as (1) of the example β was used except for methyl propylhexyl)ethyl sl. The optical waveguide was obtained in the same manner as in Example Β except that the polymer Α1 was used instead of the polymer Α1. 4·2 evaluation (transmission loss of optical waveguide) Diameter =; 2 = ^ Optical waveguide obtained from ear C 139 201227021 4UU18pif The optical fiber of the book is light-receiving and the intensity of light is measured. Moreover, 4ί will insert the loss map into the right-handed guide wave and the long axis as the horizontal axis, and the slope can calculate the two-value arrangement of each light-guide tube. According to the other, the example Α~ every f-secret is 〇·05 guilt/gale . In the same way as the example of 1·, ^" changes the parameters of the distribution of the distribution. ° X transmission /, 2 · and 3 · Evaluation of the same tendency (retention of the waveform of the pulse signal) For the example A ~ example士化 [Industrial Applicability] According to the present invention, it is possible to obtain an electronic device capable of high-quality domain material reliability and high production. Therefore, the present invention has a simple description of the drawing. The cut-off Γ is a perspective view of the first embodiment of the optical waveguide according to the invention (--part, and penetration and not shown). Into the whole field, one shot of the core of the optical waveguide of FIG. A diagram showing an example of the intensity distribution of the emitted light. 140 201227021 40018pif A method for explaining the intensity distribution of the emitted light in the exit side end surface of the optical waveguide. The chisels (a) and 4 (1) are schematic. FIG. 5 is a view showing an example of the refractive index distribution w when the refractive index distribution is taken on the vertical axis on the -X line sectional view 'the position on the center line of the thickness of the core layer on the horizontal axis. It is shown that the second embodiment of the optical waveguide of the present invention is not shown and penetrated. Fig. 6 is a diagram showing the bribe distribution of (4) light when the material of _5 (4) is first. The shot γγ and Fig. 7 (b) are schematic representations of the production shown in Fig. 5. An example of the refractive index distribution T when the refractive index is taken on the horizontal axis and the position on the center line of the width of the core portion is taken on the vertical axis. The width of the light guide tube shown in Fig. 1 is the first manufacturing method of the optical waveguide shown in Fig. 1. (4) For the optical waveguide shown in Fig. 1! The manufacturing method is said to be = the figure is used for the first wave of the pilot wave shown in Figure 1! The manufacturing method is shown in Fig. 12(a) and Fig. 12(b). The first manufacturing branch is said to be the optical waveguide region: 141 201227021 The cross-section of the HUUIOpif layer (four) is the horizontal axis and the face is taken. Refraction (IV) A map of the refractive index profile. Figs. 14(a) and 14(b) are views for explaining a method of manufacturing an optical waveguide (third manufacturing method) shown in Fig. 5. Fig. 5 is a perspective view showing a die coater for obtaining a multicolor molded body. Fig. 6 is a longitudinal cross-sectional view showing a part of the die coater shown in Fig. 15 in an enlarged manner. Fig. 7 is a cross-sectional view showing another configuration example of the mixing unit. Fig. 18 is a view showing the intensity distribution of the outgoing light in the exit side end surface of the optical waveguide obtained in Comparative Example 1 and Comparative Example 2. [Explanation of main component symbols] 1 : Optical waveguide la: incident side end face lb: exit side end face 2: support film 3: cover film 1 12, 121, 122: cover layer 13, 131, 132: core layer 14 core Part 15 side cover portion 21 incident side optical fiber 22 exit side optical fibers 141, 142, 143, 144: core portions 151, 152, 153, 154, 155, 156: side cladding portion 142 201227021 OjJlf 800 : die coater ( Multicolor Extrusion Forming Apparatus) 810: Die 811: Upper Die Lip 812: Lower Die Lip 820: Manifold 821: Slit 830: Mixing Unit 831: First Supply Pipe 831a: Starting Point 832: Second Supply Pipe 832a: first starting point 832b: second starting point 835: connecting portion 836: pin 840: conveying unit 841: roller 842: conveying film 900: core layer forming composition 901, 902: optical waveguide forming component 910: layer 914: Multicolor molded body 915: Polymer 920: Additive 925: Irradiation area 143 201227021 4UUI8pif 930: Active radiation 935: Mask (shield) 940: Unirradiated areas 951, 952: Supporting substrates 8311, 8312, 8313: Branch pipe 8321, 8322, 8323, 8324: branch pipes 8331, 8332: manifolds 9351: openings (windows) C C2: center line CH1: CH2 first core portion: CLl second core portions: a first portion overlying each other CL2 is: [eta] a second portion overlying each other: high refractive index portion

Jl, J2: Confluence point L: Low refractive index portion Mb: Mixing point PI, Ρ2: Intensity distribution of emitted light

Pml, Pm2: maxima

Psl : minimum value T: refractive index distribution TA : average refractive index in the coating layer TA : average refractive index

Tm, Tml ' Tm2, Tm3, Tm4, Tm5 : maxima 144 201227021 ^tuwioplf

Tsl, Ts2, Ts3, Ts4: minimum value W: refractive index distribution WA: average refractive index of the cladding

Wml, Wm2, Wm3, Wm4, Wm5: maxima

Wsl, Ws2, Ws3, Ws4: minimum value 145

Claims (1)

201227021 X VII. Patent application scope: 1. - A kind of optical waveguide f, comprising: a plurality of covering portions of at least two sides of each of the core portions juxtaposed; (10) connecting to the optical waveguide tube is characterized by: One of the plurality of core portions is required to be a core portion cm, and a member adjacent to the core portion CH1 is referred to as a core portion CH2, and the plurality of other portions are located between the core portion and the CH2 When the upper cover portion is the cover portion (1) and the portion of the upper portion CH2 ▲ opposite to the above-mentioned cover portion cu is used as the cover portion (1), the core portion CH1 of the optical waveguide 1 is shot. The strong light leaking from the light signal of the above-mentioned cover portion CL2 at the other end is configured to be larger than the intensity of the leaked light observed by the core portion CH2. 2: The optical waveguide according to claim i, wherein the intensity of the emitted light with respect to the position of the end face at the other end of the optical waveguide is in the above-mentioned other The portion CL2 has a maximum value 'and has a minimum value smaller than the maximum value in the core portion CH2. 3. The optical waveguide according to claim 2, wherein the intensity difference between the maximum value in the covering portion CL2 and the minimum value in the core portion cH2 is 3 dB to 20 dB. 4. The optical waveguide according to claim 2, wherein the maximum value in the covering portion CL2 is _6 with respect to the intensity of the optical signal observed in the above C Η1. 〇dB~_2〇dB. 5. The light 146 201227021 4UUI8pif waveguide tube of any one of claims 2 to 4, wherein the above-mentioned maximum value in the above-mentioned covering portion CL2 is the same as that in the above-described core portion CH2 When the intensity difference of the minimum value is gl, and the intensity difference between the intensity of the optical signal observed in the core portion CH1 and the minimum value in the core portion ch2 is set to g2, gl/g2 satisfies 0.05 to 0.5. Relationship. The optical waveguide tube according to any one of the items 2 to 5 wherein the intensity distribution of the emitted light is a position with respect to the end surface, and the intensity continuously changes. 7. The optical waveguide according to any one of claims 1 to 3, wherein each of the core portions has a width of 2 〇 gm 〜 2 〇〇 pm. A light guide tube comprising: a first cladding layer; a core layer disposed on the second cladding layer, wherein the first core portion cm and the first cladding portion cu are sequentially formed in the layer The second core portion CH2 and the second cladding portion CL2 and the second cladding layer are disposed on the core layer. The optical waveguide is characterized in that it is incident on one end of the optical waveguide. When the light of the first core portion (f) is emitted as the outgoing light from the other end, the light passes through the first core portion CH1, the first covering portion (1), the second core 33 (10), and the second covering portion CL2. In the above-described emission and intensity distribution obtained in the region, the intensity of the emitted light in the second core portion CH2 is smaller than the intensity of the emitted light in the second cladding portion CL2. 147 201227021^ An electronic machine comprising the optical waveguide according to any one of claims 1 to 8. 148