201224225 六、發明說明： 【發明所屬之技術領域】 [0001] 本發明係有關於一種電化學加工， 降低製作成本、減少製作時間並提汽 電極及其製作方法。 尤其是指一種可 精度之電化學加工 [0002] 【先前技術】 按，轴承為一般常見之機械元件 ’其廣泛地運用於 〇 各種領域之產品。然而’由於傳統轴承會與轴接觸而產 生摩擦，所以使用壽命有限且會產生噪音。基於上述缺 點，近年來已發展出動壓轴承，其有效解決傳統軸承之 缺點。市面上運用動壓轴承之產品常見的有硬碟機馬達 、光碟機馬it、多面鏡馬達及電腦風扇馬達等產品，其 廣泛的運用在資訊儲存媒體、雷射印表機及電腦主機等 相關設備。現今伴隨著電腦資訊產業及數位家電的快速 〇 發展，主軸馬達所要求的精度日益增加，在高轉速、小 裘化、低噪音、長壽命與高精度的設計潮流下，動壓軸 承扮演著改良小型主馬達特性的重要角色之一。 目前的動壓軸承伴隨著流體不同，其所用的場合與 加工精度亦有所差異◊流體動壓轴承技術係利用軸旋轉 於軸承内，且軸承套之内周緣表面設有複數溝紋，另於 軸及軸承套之間隙注入潤滑流體，藉以利用軸旋轉時其 潤滑流體於軸與轴承間形成建壓油膜，因此避免輛接觸 柏承表面而產生振動及噪音，且可提高使用壽命。 初期於動壓軸承之表面形成溝紋之方式係大多藉由 傳疵之機械力或鑄造方式，但是利用傳統製程會導致溝 紋之邊緣形成凸起狀，如此會減低轴承之效能。因此， 099141820 表單編號A0101 第3頁/共26頁 〇992〇72675-〇 201224225 現今漸以電化學加工方式製作動壓軸承之溝紋，以解決 上述缺點。一般利用電化學加工方式製作動壓軸承之内 周緣表面的溝紋時，必須製作一加工電極，以進行電化 學加工，例如中華民國專利第1500834號所示，其電極表 面通常需加工製作圖紋以與軸承之内周緣表面的溝紋形 成互補狀。然而.，形成該加工電極表面圖紋之方法，一 般為利用機械力去除方式製作，使該加工電極之表面形 成與溝紋形狀相對之突出部，而無需進行電化學加工之 部分為凹部，並於該凹部填入絕緣體，以防止該凹部對 軸承表面進行電化學加工，據以利用該加工電極之表面 突出部對軸承之内周緣表面進行電化學加工，以在軸承 之内周緣表面形成具有與加工電極表面突出部相對應之 溝紋。 另外，如中華民國專利公開第97142494號，其為另 一種動壓軸承加工製程之加工電極，其製作方法為於電 極基材表面覆蓋一層絕緣層，再移除部份絕緣層，以在 該絕緣層上形成具有特定圖案之穿透部，再於露出之該 穿透部之電極基材表面上鍍製一導電層，如此以形成電 化學加工製程之加工電極，而據以利用該電極之導電層 圖紋對軸承之内周緣表面進行電化學加工。 上述製作電化學加工電極之方式，皆利用刀具以機 械力方式移除電極基材上不需要之材料以形成凹部，再 於凹部内填入絕緣材或導電材。然而，以機械力利用刀 具進行去除加工時，常需要精密之四軸加工機、微細刀 具及高轉速主軸，且製程壟長而須耗費許多加工時間， 因為利用上述之製程的技術層級較高，皆有基本加工費 099141820 表單編號A0101 第4頁/共26頁 0992072675-0 201224225 ，而热法有效降低電極加工費用，縱使只需製作簡單特 徵圖紋之電極時，其仍有加工成本、製程時間長、製程 彈性度低等缺點。另外，當軸承上之溝紋寬度尺寸微小 時，例如1毫米（_)以下，常會因為刀具主軸旋轉速度 不高或有磨損，而導致電極基材之加工表面形成毛邊， 如此利用此加工電極進行電化學加工所形成之軸承溝紋 的形狀即會有瑕疲’而以導致浪費加工成本與時間，且 降低軸承精度。 ◎ 个^即隹針對上述問題而提出一種電化學 力電極及其製作方法，不僅可改善上述習用缺點，又 可降低製作成本、減少製作相並提高加工電極之圖紋 精度’以解決上述問題。 【發明内容】 [0003] 本發θ目的之-，在於提供-種電化學加工電極及 ^作料，其藉㈣定至少—導線義極單元之絕緣 Ο ^需要對電，元進行去除加工，所以其結構 簡早且製作方式簡易， 製作時間並提高製造加^;相降低製作成本、減少 ,^ 电極之彈性度與精度之目的。 本發明目的之一，在# 於麸供一種電化學加工方法， 八藉由使用固定有導線之 線工電極進行電化學加工，導 線固疋於加工電極之絕緣 於導線固定於加工電極之方：亡外露於絕緣表面’由 此加工電極對加工件之料^單且精度高，因而運用 成於抽孔㈣緣表面之料的=化學加工’可提高形 099141820 本發明電化學加工電極 X 一導線，電極單元具有’其包含一電極單元與至少 表單編號A〇l01 第5 S/4t緣表面，而導線固定於絕緣 丹26頁 0992072675-0 201224225 表面上，且外露於絕緣表面。由於本發明電化學加工電 極之結構簡單，所以其製作方式容易，僅需固定導線於 絕緣表面，如此即可達到大幅降低製造成本、大幅縮短 製作時間、大幅降低電極之加工困難度之目的，並提高 製作電極之彈性度與精度。此外，本發明電化學加工電 極更包含一接合層，其附著於絕緣表面上，以固定導線 於絕緣表面。 本發明另外提供一種電化學加工方法，其先提供一 固定有至少一導線之加工電極，導線固定於加工電極之 一絕緣表面，且外露於絕緣表面；接著，將加工電極穿 入於一加工件之一軸孔，而讓導線相對於加工件之軸孔 的内周緣表面；之後，將一電解液充填於加工件與加工 電極之間；然後，將一電源單元之兩極分別連接導線與 加工件，如此即對加工件進行電化學加工，以在加工件 之軸孔的内周緣表面形成溝紋。 【實施方式】 [0004] 茲為使貴審查委員對本發明之技術特徵及所達成 之功效更有進一步之瞭解與認識，謹佐以較佳之實施例 圖及配合詳細之說明，說明如後： 首先，請參閱第一圖，其係本發明之第一較佳實施 例之電化學加工電極的示意圖。如圖所示，本發明之電 化學加工電極5包含一電極單元10與至少一導線11，電極 單元10具有一絕緣表面。此實施例之電極單元10包含一 導電基材15與一絕緣層14，導電基材15可為金屬導體。 絕緣層14之表面為絕緣表面，絕緣層14設置於導電基材 15之表面，以讓導電基材15之表面為絕緣，絕緣層14係 099141820 表單編號 A0101 第 6 頁/共 26 頁 0992072675-0 201224225 利用浸鍍方式固定於導電基材15之表面，其硬度及強度 較於黏著劑大。導線11設置於電極單元1 0之絕緣表面， 即設置於絕緣層14之表面，導線11設置於電極單元10之 絕緣表面的圖紋係依據欲形成於加工件之表面的溝紋所 決定，例如動壓軸承之内周緣表面的溝紋，導線11係與 . 加工件之表面之溝紋呈互補。此實施例之導線11係以環 • 繞型式固定於電極單元10之絕緣表面，以形成螺旋狀之 圖紋。此外，本發明電化學加工電極5更包含一接合層16 ，其附著於電極單元10之絕緣表面，即附著於絕緣層14 〇 之上方，而用以固定導線11於電極單元10之絕緣表面， 接合層16之一較佳實施例為一黏著劑。由於，本發明之 導線11可直接以環繞方式固定於電極單元10，所以本發 明並非一定要設置接合層16於絕緣表面。 本發明之加工電極5的結構簡單，所以其製造方式也 相對簡易。當欲於加工件之表面形成之溝紋的寬度小於1 毫米（mm )時，本發明可採用小於1 mm之導線11，例如銅 線、金線、鋁線等，並藉由使用2軸或2軸以上之加工裝 U 置固定導線11於電極單元10之絕緣表面，運用加工裝置 之其一轴旋轉電極單元10，而另一軸夾持導線11並移動 以使導線11環繞固設於電極單元10之絕緣表面，所以不 需要具有高轉速主軸之加工裝置帶動細微刀具對電極單 元10進行切削加工，因此大大減輕製作加工電極5所需之 昂貴裝置、尋找多軸加工裝置之時間及製作時間與成本 〇 由上述說明可知，本發明可大幅降低製作加工電極5 之特徵圖紋所需之加工成本與技術難度。由於本發明之 099141820 表單編號A0101 第7頁/共26頁 0992072675-0 201224225 加工電極5於製造上不需進行切削加工，所以特別於製作 微小特徵圖紋上將大幅降低其困難性，且可提高加工電 極5之製作彈性度。此外，因為製作本發明之加工電極5 不需進行切削加工，所以本發明之加工電極5並不會具有 切削毛邊之問題，因此運用本發明之加工電極5對加工件 進行電化學加工，將可降低形成於加工件之溝紋之加工 形貌的不良率而提高溝紋之成形精度，進而提高所生產 之加工件的精度。本發明之加工電極5不僅可運用於動壓 軸承，其亦可運用於其他類型之加工件。 請一併參閱第二A圖至第二D圖，其係本發明之一較 佳實施例製作電化學加工電極之方法的示意圖。本發明 之加工電極5的製作方法係先提供電極單元10，此步驟係 先如第二A圖所示，提供導電基材15 ;之後，如第二B圖 所示在導電基材15之表面設置絕緣層14，絕緣層14之表 面為絕緣表面，使電極單元10具有絕緣表面。接續，如 第二C圖所示，塗佈接合層16於電極單元10之絕緣表面， 即塗佈於絕緣層14之表面，以接續固定至少一導線11於 電極單元10之絕緣表面（請參閱第二D圖），導線11可利 用環固方式設置於電極單元10之絕緣表面。接合層16具 有固定導線11之功效，使導線11可牢固於絕緣表面上不 易脫落。本發明亦可不需設置接合層16於電極單元10之 絕緣表面，而直接將導線11設置於電極單元10之絕緣表 面，例如直接將導線11捲繞固定於電極單元10之絕緣表 面。 製作完成本發明之加工電極5時，即可利用此加工電 極5進行電化學加工製程，以於電化學加工製程中移除加 099141820 表單編號A0101 第8頁/共26頁 0992072675-0 201224225 面:部份金屬，而於加工件之表面形成特定之溝 工叙 發明之加工電極5特別適用於以電化學方式加 動屋軸承，以在動_承之内周緣表面形成特殊溝紋201224225 VI. Description of the Invention: [Technical Field of the Invention] [0001] The present invention relates to an electrochemical process, which reduces manufacturing costs, reduces fabrication time, and extracts an electrode and a method for fabricating the same. In particular, it refers to an electrochemical process with high precision [0002] [Prior Art] According to the bearing, the bearing is a common mechanical component, which is widely used in various fields of products. However, since conventional bearings generate friction in contact with the shaft, the service life is limited and noise is generated. Based on the above shortcomings, hydrodynamic bearings have been developed in recent years, which effectively solve the shortcomings of conventional bearings. The products that use dynamic pressure bearings on the market are commonly used in hard disk drive motors, optical disk drive horses, multi-face mirror motors and computer fan motors. They are widely used in information storage media, laser printers and computer mainframes. device. Nowadays, with the rapid development of the computer information industry and digital home appliances, the precision required by the spindle motor is increasing. Under the design trend of high speed, small volume, low noise, long life and high precision, the dynamic pressure bearing plays an improvement. One of the important roles of small main motor characteristics. At present, the dynamic pressure bearing is different from the fluid, and the occasion and the machining precision are also different. The fluid dynamic bearing technology uses the shaft to rotate in the bearing, and the inner peripheral surface of the bearing sleeve is provided with a plurality of grooves, and The lubricating fluid is injected into the gap between the shaft and the bearing sleeve, so that the lubricating fluid forms a pressure oil film between the shaft and the bearing when the shaft rotates, thereby avoiding vibration and noise caused by contact with the boring surface, and the service life can be improved. In the initial stage, the way of forming the groove on the surface of the dynamic pressure bearing is mostly by mechanical force or casting method, but the conventional process will cause the edge of the groove to form a convex shape, which will reduce the performance of the bearing. Therefore, 099141820 Form No. A0101 Page 3 of 26 〇992〇72675-〇 201224225 Nowadays, the groove of dynamic pressure bearing is made by electrochemical machining to solve the above shortcomings. When the groove of the inner peripheral surface of the dynamic pressure bearing is generally produced by electrochemical machining, a machining electrode must be fabricated for electrochemical processing. For example, as shown in the Republic of China Patent No. 1500834, the surface of the electrode is usually processed and patterned. It is complementary to the groove on the inner peripheral surface of the bearing. However, the method for forming the surface pattern of the processed electrode is generally formed by mechanical force removal, so that the surface of the processed electrode forms a protruding portion opposite to the groove shape, and the portion that does not need to be electrochemically processed is a concave portion, and The recess is filled with an insulator to prevent the recess from electrochemically machining the bearing surface, and the inner peripheral surface of the bearing is electrochemically processed by the surface protrusion of the machining electrode to form a surface on the inner peripheral surface of the bearing. The groove corresponding to the protrusion of the surface of the electrode is processed. In addition, as in the Republic of China Patent Publication No. 97142494, which is another processing electrode for the dynamic pressure bearing processing process, the electrode substrate is covered with an insulating layer on the surface of the electrode substrate, and then a part of the insulating layer is removed to be in the insulation. Forming a penetrating portion having a specific pattern on the layer, and plating a conductive layer on the surface of the electrode substrate on which the penetrating portion is exposed, thereby forming a processing electrode of the electrochemical processing process, and thereby utilizing the conductive layer of the electrode The layer pattern is electrochemically processed on the inner peripheral surface of the bearing. The above-described method of fabricating the electrochemically processed electrode is to mechanically remove the unnecessary material on the electrode substrate by using a cutter to form a concave portion, and then fill the concave portion with an insulating material or a conductive material. However, when machining with a mechanical force to remove a tool, a precision four-axis machine, a fine tool, and a high-speed spindle are often required, and the process length is long and a lot of processing time is required, because the above-described process has a higher technical level. There are basic processing costs 099141820 Form No. A0101 Page 4 / Total 26 pages 0992072675-0 201224225, and the thermal method effectively reduces the electrode processing cost, even if only the electrode of the simple characteristic pattern is needed, there is still processing cost and process time. Long, low process flexibility and other shortcomings. In addition, when the width of the groove on the bearing is small, for example, 1 mm (_) or less, the machining surface of the electrode substrate is often burred due to the low rotation speed or wear of the tool spindle, so that the machining electrode is used. The shape of the bearing groove formed by electrochemical machining is fatigued, resulting in wasted processing cost and time, and reduced bearing accuracy. ◎In view of the above problems, an electrochemical force electrode and a method for fabricating the same have been proposed, which not only can improve the above-mentioned conventional disadvantages, but also can reduce the manufacturing cost, reduce the production phase SUMMARY OF THE INVENTION [0003] The purpose of the present invention is to provide an electrochemical processing electrode and a material, which by (4) at least - the insulation of the wire anode unit ^ need to remove the electricity, the element, so The structure is simple and the production method is simple, the production time is increased, and the manufacturing cost is increased; the production cost is reduced, the elasticity and precision of the electrode are reduced. One of the objects of the present invention is to provide an electrochemical processing method for the bran, and to perform electrochemical processing by using a wire electrode fixed with a wire, the wire being fixed to the insulation of the processing electrode and the wire being fixed to the processing electrode: The exposed electrode is exposed on the insulating surface. Therefore, the processing electrode is made of a single piece and has high precision. Therefore, the chemical processing of the material of the hole (four) edge surface can be used to improve the shape of 099141820. The electrode unit has 'there is an electrode unit and at least the 5th S/4t edge surface of the form number A〇l01, and the wire is fixed on the surface of the insulating material 26 page 0992072675-0 201224225 and exposed on the insulating surface. Since the electrochemical processing electrode of the invention has a simple structure, the manufacturing method is easy, and only the fixing wire needs to be fixed on the insulating surface, so that the manufacturing cost can be greatly reduced, the manufacturing time can be greatly shortened, and the processing difficulty of the electrode can be greatly reduced, and Improve the elasticity and precision of the fabricated electrodes. Further, the electrochemical processing electrode of the present invention further comprises a bonding layer attached to the insulating surface to fix the wire to the insulating surface. The present invention further provides an electrochemical processing method, which first provides a processing electrode to which at least one wire is fixed, the wire is fixed on an insulating surface of the processing electrode, and exposed on the insulating surface; and then the processing electrode is penetrated into a workpiece One of the shaft holes, and the inner peripheral surface of the shaft relative to the shaft hole of the workpiece; after that, an electrolyte is filled between the workpiece and the processing electrode; then, the two poles of a power unit are respectively connected to the wire and the workpiece, Thus, the workpiece is electrochemically processed to form a groove on the inner peripheral surface of the shaft hole of the workpiece. [Embodiment] [0004] For a better understanding and understanding of the technical features of the present invention and the achievable effects of the present invention, please refer to the preferred embodiment and the detailed description, as follows: Please refer to the first drawing, which is a schematic diagram of an electrochemical processing electrode according to a first preferred embodiment of the present invention. As shown, the electrochemical processing electrode 5 of the present invention comprises an electrode unit 10 and at least one wire 11, and the electrode unit 10 has an insulating surface. The electrode unit 10 of this embodiment comprises a conductive substrate 15 and an insulating layer 14, and the conductive substrate 15 can be a metal conductor. The surface of the insulating layer 14 is an insulating surface, and the insulating layer 14 is disposed on the surface of the conductive substrate 15 to insulate the surface of the conductive substrate 15. The insulating layer 14 is 099141820. Form No. A0101 Page 6 of 26 0992072675-0 201224225 is fixed on the surface of the conductive substrate 15 by immersion plating, and its hardness and strength are larger than those of the adhesive. The wire 11 is disposed on the insulating surface of the electrode unit 10, that is, on the surface of the insulating layer 14, and the pattern of the wire 11 disposed on the insulating surface of the electrode unit 10 is determined according to the groove to be formed on the surface of the workpiece, for example, The groove on the inner peripheral surface of the pressure bearing, the wire 11 is complementary to the groove on the surface of the workpiece. The wire 11 of this embodiment is fixed to the insulating surface of the electrode unit 10 in a loop-like pattern to form a spiral pattern. In addition, the electrochemical processing electrode 5 of the present invention further includes a bonding layer 16 attached to the insulating surface of the electrode unit 10, that is, attached to the insulating layer 14 , for fixing the wire 11 to the insulating surface of the electrode unit 10, One preferred embodiment of the bonding layer 16 is an adhesive. Since the wire 11 of the present invention can be directly fixed to the electrode unit 10 in a circumferential manner, the present invention is not necessarily provided with the bonding layer 16 on the insulating surface. The processed electrode 5 of the present invention has a simple structure, and is therefore relatively easy to manufacture. When the width of the groove formed on the surface of the workpiece is less than 1 mm (mm), the present invention may use a wire 11 of less than 1 mm, such as a copper wire, a gold wire, an aluminum wire, etc., and by using a 2-axis or The processing device of the two or more axes fixes the wire 11 on the insulating surface of the electrode unit 10, and rotates the electrode unit 10 by one axis of the processing device, and the other wire holds the wire 11 and moves to fix the wire 11 around the electrode unit. The insulating surface of 10, so that the processing device with the high-speed spindle is not required to drive the fine tool to cut the electrode unit 10, thereby greatly reducing the expensive equipment required for manufacturing the processing electrode 5, the time for finding the multi-axis processing device, and the production time and Cost 〇 As apparent from the above description, the present invention can greatly reduce the processing cost and technical difficulty required to produce the feature pattern of the processed electrode 5. Since the 099141820 of the present invention has the form number A0101, page 7 / 26 pages 0992072675-0 201224225, the machining electrode 5 does not need to be cut in manufacturing, so that the difficulty in making the micro feature pattern is greatly reduced and can be improved. The degree of elasticity of the processing electrode 5 is made. In addition, since the processing electrode 5 of the present invention does not need to be subjected to cutting processing, the processing electrode 5 of the present invention does not have the problem of cutting burrs. Therefore, the machining electrode 5 of the present invention is used for electrochemical processing of the workpiece. The defect rate of the processed surface formed on the groove of the workpiece is reduced, and the forming precision of the groove is improved, thereby improving the precision of the produced workpiece. The processing electrode 5 of the present invention can be applied not only to dynamic pressure bearings, but also to other types of workpieces. Referring to Figures 2A through 2D, which are schematic views of a method of fabricating an electrochemically processed electrode in accordance with a preferred embodiment of the present invention. The manufacturing method of the processing electrode 5 of the present invention first provides the electrode unit 10. This step is first provided as shown in FIG. 2A to provide the conductive substrate 15; then, as shown in FIG. 2B, on the surface of the conductive substrate 15. The insulating layer 14 is provided, and the surface of the insulating layer 14 is an insulating surface, so that the electrode unit 10 has an insulating surface. Then, as shown in FIG. 2C, the bonding layer 16 is coated on the insulating surface of the electrode unit 10, that is, on the surface of the insulating layer 14, to successively fix at least one wire 11 to the insulating surface of the electrode unit 10 (see In the second D diagram), the wire 11 can be disposed on the insulating surface of the electrode unit 10 by means of a ring. The bonding layer 16 has the effect of fixing the wires 11, so that the wires 11 can be firmly attached to the insulating surface and are not easily peeled off. In the present invention, the bonding layer 16 may be disposed on the insulating surface of the electrode unit 10 without directly providing the bonding layer 16 on the insulating surface of the electrode unit 10. For example, the wire 11 is directly wound and fixed on the insulating surface of the electrode unit 10. When the processing electrode 5 of the present invention is completed, the processing electrode 5 can be used for the electrochemical processing process to remove the 099141820 in the electrochemical processing process. Form No. A0101 Page 8 / Total 26 Page 0992072675-0 201224225 Part of the metal, and forming a specific groove on the surface of the workpiece, the processing electrode 5 of the invention is particularly suitable for electrochemically moving the house bearing to form a special groove on the inner peripheral surface of the moving element.
風睛參閱第三圖’其係本發明之一較佳實施例之電化 子加工電極進行電化學加工的示意圖。此實_係以加 工電極5對Μ抽承18進行電化學加工為例進行說明，其 並不揭限本發明之加工電極5僅能料私㈣進行電化 學加工，其可運用於其他類型之加工件。運用本發明之 加工電極5對Μ軸承18進行電化學加卫時，係先提供設 置有導㈣之加工電極5，再將加工電極5設置有導線η 之端部穿人於_軸承18之轴孔，而料線川目對於動 壓轴承18之㈣緣表面，如此即可進行電化學加工，以 在動麼轴承18之内周緣表面形成溝紋。運用加工電極㈣ 動壓軸承18進行電化學加工時，係將€_ 充填於動壓軸承18與加：電極5之間，且將—電源單元（ 圖未示）之兩極分別連接導線11與動壓輪承18，其是將 負極連接導線1卜而正極連接4壓轴承18，以供應電源 至導線11與動壓軸承18，如此即對動壓轴承18進行電化 學加工，以形成特徵溝紋於動壓轴承18之内周緣表面。 此實施例為了便於進行電化學加工，係將動壓轴承 18放置於固持件19，以讓動壓軸承18於電化學加工過 程可予以固定，以便於加工電極5穿入於動壓軸承18之轴 孔。此外，電解液可經由固持件19之一電解液流入口 17 流入於動壓軸承18與加工電極5之間，以進行電化學加工 。運用加工電極5對動壓軸承18進行電化學加工，即可在 099141820 表單編號A0101 第9頁/共沈頁 0992072675-0 201224225 動壓軸承18之内周緣表面形成相同於導則之圖紋的溝 紋。由於此實施例之導線丨〗係以螺旋狀設置於電極基材 10之表面，所以使用此實施例之加工電極5對動壓軸承18 進行電化學加工後，即會如第四圖所示，動壓軸承18之 内周緣表面具有螺旋狀之溝紋1 81。 請參閱第五圖，其係本發明之第二較佳實施例之電 化學加工電極的示意圖。如圖所示，此實施例不同於上 實把例在於此實施例之電極單元1 〇不包含絕緣層1 4， 其包含導電基材15與接合層16，接合層16之表面為絕緣 表面，並附著於導電基材1 5之表面，使電極單元1 〇具有 絕緣表面，且用於固定導線U於絕錄表面，導線u外露 於絕緣表面。由於接合層16為絕緣材料，所以此實施例 可不需設置第一實施例之絕緣層14於導電基材15之表面 ，而利用接合層1 6作為絕緣表面並固定導線11。 凊參閱第六圖，其係本發明之第三較佳實施例之電 化學加工電極的示意圖。如圖所示，此實施例不同於先 前實施例在於此實施例之電極單元1〇包含一非導電基材 20，其不具導電特性，所以其表面即為絕緣表面而不需 設置有絕緣層14，而可直接將導線丨丨固定於非導電基材 20之絕緣表面。另外，為了提高導線11@定於非導電基 材20之絕緣表面的牢固性，非導電基材2〇之絕緣表面更 可進一步附著有第五圖所示之接合層16於非導電基材2〇 之絕緣表面，使導線11可牢固於非導電基材2〇之絕緣表 面上而不易脫落。 請參閱第七圖’其係本發明之第四較佳實施例之電 化學加工電極的示意圖。如圖所示，此實施例不同於第 099141820 表單編號A0101 第10頁/共26頁 0992 201224225 =圖實^在料賴環目㈣ 型二在；^件之表*上形成人字型之溝紋為人子 凊參閱第八圖，盆為 示意圖。如圖所示，本發C元10之絕緣〜 於電極單元1〇之絕緣表面，該之複數電極13 接電源單元之負極 ―、可直接延伸以連 件進行電化學加工，如* 即可在加工件之表面形成相同於該些電極此 數非連續溝紋。 圖、，文的複 1Referring to the third drawing, a schematic view of electrochemical processing of an electrochemical machining electrode according to a preferred embodiment of the present invention. This embodiment is described by taking the electrochemical processing of the tantalum pumping 18 by the processing electrode 5 as an example. It is not disclosed that the processing electrode 5 of the present invention can only be electrochemically processed (IV), and can be applied to other types. Machined parts. When the ytterbium bearing 18 is electrochemically reinforced by the processing electrode 5 of the present invention, the machining electrode 5 provided with the guide (4) is first provided, and the end portion of the machining electrode 5 provided with the wire η is pierced by the shaft of the _bearer 18 The hole, and the line of the line, for the (four) edge surface of the dynamic pressure bearing 18, can be electrochemically processed to form a groove on the inner peripheral surface of the movable bearing 18. When the machining electrode (4) is used for the electrochemical machining, the dynamic pressure bearing 18 is filled between the dynamic pressure bearing 18 and the addition electrode 5, and the two poles of the power supply unit (not shown) are respectively connected to the wire 11 and the moving The pressure wheel bearing 18 is configured to connect the negative electrode connecting wire 1 and the positive electrode to the 4 pressure bearing 18 to supply power to the wire 11 and the dynamic pressure bearing 18, so that the dynamic pressure bearing 18 is electrochemically processed to form a characteristic groove. On the inner peripheral surface of the dynamic pressure bearing 18. In order to facilitate the electrochemical processing, the dynamic pressure bearing 18 is placed on the holding member 19 to allow the dynamic pressure bearing 18 to be fixed during the electrochemical machining process, so that the machining electrode 5 penetrates the dynamic pressure bearing 18 Shaft hole. Further, the electrolyte may flow between the dynamic pressure bearing 18 and the machining electrode 5 via the electrolyte inflow port 17 of the holding member 19 for electrochemical processing. Electrochemical machining of the dynamic pressure bearing 18 by using the machining electrode 5 can form a groove similar to the pattern of the guide on the inner peripheral surface of the dynamic pressure bearing 18 at 099141820 Form No. A0101 Page 9 / Total Submerged Page 0992072675-0 201224225 Pattern. Since the lead wire of this embodiment is disposed on the surface of the electrode substrate 10 in a spiral shape, after the electrochemical processing of the dynamic pressure bearing 18 using the processing electrode 5 of this embodiment, as shown in the fourth figure, The inner peripheral surface of the dynamic pressure bearing 18 has a spiral groove 1 81. Referring to Figure 5, there is shown a schematic view of an electrochemical processing electrode of a second preferred embodiment of the present invention. As shown in the figure, this embodiment is different from the above embodiment. The electrode unit 1 in this embodiment does not include the insulating layer 14 which comprises the conductive substrate 15 and the bonding layer 16, and the surface of the bonding layer 16 is an insulating surface. And attached to the surface of the conductive substrate 15 to make the electrode unit 1 绝缘 have an insulating surface, and to fix the wire U on the absolute surface, the wire u is exposed on the insulating surface. Since the bonding layer 16 is an insulating material, this embodiment does not require the insulating layer 14 of the first embodiment to be provided on the surface of the conductive substrate 15, but the bonding layer 16 is used as the insulating surface and the wires 11 are fixed. Referring to Figure 6, there is shown a schematic view of an electrochemical processing electrode of a third preferred embodiment of the present invention. As shown in the figure, this embodiment differs from the previous embodiment in that the electrode unit 1A of this embodiment comprises a non-conductive substrate 20 which has no conductive property, so that its surface is an insulating surface without the need to provide an insulating layer 14. The wire defects can be directly fixed to the insulating surface of the non-conductive substrate 20. In addition, in order to improve the adhesion of the wire 11@ to the insulating surface of the non-conductive substrate 20, the insulating surface of the non-conductive substrate 2 can further adhere to the bonding layer 16 shown in FIG. 5 to the non-conductive substrate 2 The insulating surface of the crucible allows the wire 11 to be firmly adhered to the insulating surface of the non-conductive substrate 2 without being easily peeled off. Please refer to the seventh drawing, which is a schematic view of an electrochemical processing electrode according to a fourth preferred embodiment of the present invention. As shown in the figure, this embodiment is different from the 091441820 form number A0101 page 10 / total 26 page 0992 201224225 = Fig. 2 in the material ring (4) type 2 in the ^ piece table * form a herringbone groove See Figure 8 for the pattern of the human being. The basin is a schematic diagram. As shown in the figure, the insulation of the C element 10 of the present invention is applied to the insulating surface of the electrode unit 1〇, and the plurality of electrodes 13 are connected to the negative electrode of the power supply unit, and can be directly extended to be electrochemically processed by means of a piece, such as * The surface of the workpiece is formed into the same number of discontinuous grooves as the electrodes. Figure, the text of the complex 1
综上所述，本發明電化學加工電極包含 至少-導線’電極單元具有 兀與 極平兀之絕緣表面上方，且外露於絕緣表面 2 明之電化學加工電極之結構簡單，且製造方易2 需要利用機械力進行去昤 易而不 极發^ 所㈣製作生產上可降 ϋ作成本、減少生產時間並可提高製造加卫電 :度=二此使用本發明之加工電極進行電 工，可有效提高電化學加工 電化學加W其二::單= 緣表面，以固定導線於絕緣表面上。 、 故本發明實為—具有购性、進步性及可供產業上 利用者，應符合我國專利法專财請要件無疑，要依法 提出發明專利申請’祈鈞局早日賜准專利，至感為禱 准、所述者，僅為本發明一較佳實施例而已，並 非用來限定本發明實施之_ ’故舉凡依本發明申請專 利範圍所述之形狀、構造、特徵及精神料之均等變化 與修飾，均應包括於本發明之申請專利範圍内。 099141820 表單編號讓1 第11 !/共2δ 1 201224225 【圖式簡單說明】 [0005] 第一圖係本發明之第一較佳實施例之電化學加工電極的 示意圖； 第二A圖至第二D圖係本發明之一較佳實施例製作電化學 加工電極之方法的示意圖； 第三圖係本發明之一較佳實施例之電化學加工電極進行 電化學加工的示意圖； 第四圖係使用本發明之一較佳實施例之電化學加工電極 製作之動壓軸承的剖視圖； 第五圖係本發明之第二較佳實施例之電化學加工電極的 示意圖； 第六圖係本發明之第三較佳實施例之電化學加工電極的 示意圖； 第七圖係本發明之第四較佳實施例之電化學加工電極的 示意圖；以及 第八圖係本發明之又一較佳實施例之電化學加工電極之 導線配置的示意圖。 【主要元件符號說明】 [0006] 5 加工電極 10 電極單元 11 導線 12 導線 13 導線 14 絕緣層 15 導電基材 16 接合層 表單編號A0101 099141820 第12頁/共26頁 0992072675-0 201224225 17 電解液流入口 18 動壓轴承 181 溝紋 19 固持件 20 非導電基材 ❹ Ο 099141820 表單編號 Α0101 第13頁/共26頁 0992072675-0In summary, the electrochemical processing electrode of the present invention comprises at least a wire-electrode unit having an insulating surface on the surface of the crucible and the pole, and the structure of the electrochemically processed electrode exposed on the insulating surface is simple, and the manufacturing method requires Using mechanical force to carry out the smashing and not squeezing. (4) The production can be reduced in production cost, reducing the production time and improving the manufacturing and maintenance power: degree = two. Using the processing electrode of the present invention for electrician can effectively improve Electrochemical machining electrochemically plus W:: single = edge surface to fix the wire on the insulating surface. Therefore, the present invention is practically-purchasing, progressive, and available to the industry. It should be in accordance with the requirements of China's patent law. It is undoubtedly necessary to file an invention patent application in accordance with the law. The present invention is only a preferred embodiment of the present invention and is not intended to limit the implementation of the present invention. The equivalents of the shapes, structures, features, and spirits described in the patent application scope of the present invention vary. And modifications are intended to be included in the scope of the invention. 099141820 Form No. 1 1st!/Total 2δ 1 201224225 [Simplified Schematic] [0005] The first figure is a schematic diagram of an electrochemical processing electrode according to a first preferred embodiment of the present invention; BRIEF DESCRIPTION OF THE DRAWINGS FIG. 3 is a schematic view showing a method of fabricating an electrochemically processed electrode according to a preferred embodiment of the present invention; and FIG. 3 is a schematic view showing electrochemical processing of an electrochemically processed electrode according to a preferred embodiment of the present invention; A cross-sectional view of a dynamic pressure bearing fabricated by electrochemically machining an electrode according to a preferred embodiment of the present invention; FIG. 5 is a schematic view showing an electrochemically processed electrode of a second preferred embodiment of the present invention; BRIEF DESCRIPTION OF THE DRAWINGS FIG. 7 is a schematic view of an electrochemically processed electrode of a fourth preferred embodiment of the present invention; and FIG. 8 is an electrochemical diagram of still another preferred embodiment of the present invention. A schematic diagram of the wire configuration of the processed electrode. [Major component symbol description] [0006] 5 Processing electrode 10 Electrode unit 11 Conductor 12 Conductor 13 Conductor 14 Insulation 15 Conductive substrate 16 Bonding layer Form No. A0101 099141820 Page 12 of 26 0992072675-0 201224225 17 Electrolyte flow Entrance 18 Dynamic bearing 181 Groove 19 Holder 20 Non-conductive substrate ❹ 914 099141820 Form No. 1010101 Page 13 of 26 0992072675-0