201214074 六、發明說明： 【發明所屬之技術領域】 本發明涉及一種快速升降溫裝置及其溫度控制方法，尤其 是以脈衝寬度調變(Pulse Width Modulation)控制加熱開始及^亭 止。 【先前技術】 習知之光電半導體快速升降溫製程設備，係採用電埶調整 ^(Switching Capacitor Relay，SCR)做為輸出功率調變=控制 益’其特性係將控制訊號與功率輸出之交直流訊號混合配置於 同電路’使用上易產生各種雜訊與干擾，且其影塑程度合伴 隨使用數量而明顯增加。 曰 另外、，市售SCR ϋ積龐大，需裝散熱片，故一般採用分 組方式來進行功率控制’即—顆SCR需同時控制多組加熱源， 不利於未來升降溫設備加熱源個別控制之趨勢盘需求。 將該巧控翁式_在光電半導體快速升降溫製程設 時’由於交直流的控制訊號及輸出功率電路間會產生雜訊 擾:力:上採用分區控制方式，其可調變的參數較少，雖然^ 二撕父的難度，但亦相對犧牲了部份區域可雛 腔 體的均雜相贼爿關。 〈歧應腔 【發明内容】 h 岐提供—懸速升降溫裝置，該裝置包 關早疋，加溫單元包含用以容置欲加溫之 ，件=體以及複y個加熱器矩陣，該溫度_單元與該加溫 用U加溫單元中腔體的溫度’控制電腦連接： _之腔體的▲度與—目標溫度比較’並在雜的溫度低於目 201214074 ΪΪ度f，發出一類比輸出訊號。類比輸出單元與該控制電腦 山#接收該類比輸出訊?虎’並將該类員比輸出訊號轉換為-輪 出電壓’脈衝控綱麵組包含—電源供應器一波形轉 一味器，波形轉觀料接該電源供應11，將該電源 if斋所提供的電流轉換為-鑛齒;皮或方波，比較器連接該波 形轉換電路以及類比輸出單元’將該顯波與無輸出單元所 $生的輸出電壓比較並調變後，輪出—脈衝寬度調變波。開關 早兀與舰_侧麵減加鮮域接，依_脈衝寬度 ，變波，控制加熱單元中之該等加熱器矩陣的開啟或關閉，也 就是開始加熱或停止加熱。201214074 VI. Description of the Invention: [Technical Field] The present invention relates to a rapid temperature rise and fall device and a temperature control method thereof, particularly for controlling the start of heating and the pavilion by Pulse Width Modulation. [Prior Art] The conventional photoelectric semiconductor rapid temperature rise and fall process equipment adopts Switching Capacitor Relay (SCR) as the output power modulation = control benefit. Its characteristic is to control the signal and the power output. Hybrid configuration in the same circuit 'use is easy to generate a variety of noise and interference, and its degree of shadowing is accompanied by a significant increase in the number of uses.曰In addition, the commercially available SCR is huge and needs to be equipped with heat sinks. Therefore, the grouping method is generally used for power control. That is, the SCR needs to control multiple sets of heating sources at the same time, which is not conducive to the trend of individual control of the heating and cooling equipment in the future. Disk demand. The smart control type _ in the photoelectric semiconductor rapid rise and fall process set time due to AC and DC control signals and output power circuit will generate noise interference: force: the use of partition control, its adjustable parameters are less Although the difficulty of tearing the father is not the same, it is also relatively sacrificed in some areas. <Dissipation cavity 【Inventive content】 h 岐 provides—suspension speed rise and fall device, the device is enclosed early, and the heating unit includes a heater matrix for accommodating the heating, the component body and the complex y heater matrix. The temperature_unit is connected to the temperature of the cavity in the heating U-heating unit's control computer: _the ▲ degree of the cavity is compared with the target temperature' and the miscellaneous temperature is lower than the target 201214074 f degree f, one is issued Analog output signal. The analog output unit and the control computer mountain # receive the analog output signal? Tiger 'and convert the output signal to the - turn-out voltage' pulse control surface group includes - power supply a waveform to a odorizer, the waveform is turned The power supply 11 is connected to the power supply, and the current supplied by the power supply is converted into a - mineral tooth; a skin or square wave, and the comparator is connected to the waveform conversion circuit and the analog output unit 'the display wave and the output unit are not $ After the raw output voltage is compared and modulated, the wheel-pulse width modulation wave is rotated. The switch is connected to the ship _ side minus the fresh field, and according to the _pulse width, the wave is changed, the heater matrix in the heating unit is controlled to be turned on or off, that is, heating is started or stopped.
進一步地’本發明快速升降溫裝置包含一比流器，比流器 與該控制加熱單元及控制電腦連接，以偵測該等加熱器矩陣中 每一加熱器的電流’將該等電流與控制電腦中控溫程式所設定 的目標電流比較’而以作為電流回授，而修正類比輸出訊號， 以穩定電流。 本發明快速升降溫裝置之溫度控制方法包含一溫度測量 步驟、一溫度比較步驟、一脈衝調變波產生步驟以及一開關控 制步驟。溫度測量步驟係以一溫度偵測單元測量一加溫單元中 腔體的溫度’溫度比較步驟係以一控制電腦比較該溫度偵測單 兀戶f測量之腔體的溫度與一目標溫度，在該腔體的溫度低於該 目標溫度時，該控制電腦產生一類比輸出訊號，脈衝調變波產 生步驟，由一類比輸出單元將該類比輸出訊號轉換為一電壓， 並以一比較器將該電壓與經由一波形轉換電路所產生的鋸齒 波，方波比較’並調變產生一脈衝寬度調變波，再輸出至一開 關單元。卩j關控制步驟，該開關單元根據該脈衝寬度調變波而 控制加熱單元中之加熱器矩陣的開啟或關閉，即開始加熱或停 止加熱。 ^本發明快速升降溫裝置之溫度控制方法’進一步包含一回 =控制步驟，以與該控制加熱單元及該控制電腦連接的一比流 器债測該等加熱器矩陣十每一加熱器的電流，將該等電流與控 201214074 控溫程式所設定的—目標比較，而修正該類比 ί於使舰概度機㈣式爾將電源 、丨杨轉換電路以及比較器整合，通常可以整合在一電 接地喊制以電熱縦邮cr)作為溫度控 從而大幅地減少了系統種積、也不需分組控 減少了雜訊和干擾’而能夠使腔體加熱鋪更精確， Η Ϊ得Ϊ升各種快速加熱物件，如晶圓、太陽能電池'光電晶 月等的製程品質。 實施方式】 上以下配合圖式及元件符麟本發明之實财歧更詳細 的况明’俾使熟習該項技藝者在研讀本說明書後能據以實施。 參閱第-圖’本發明快速升降溫裝置的方塊示意圖。如第 一圖所示，本發明快速升降溫裝置丨包含加溫單元1〇、溫度 偵測單元20、控制電腦30、類比輸出單元4〇、脈衝控制調變 模組50以及開關單元60，加溫單元1〇包含用以容置欲加溫 之物件的腔體(未顯示)以及複數個加熱器矩陣(未顯示），該溫 度偵測單元20與該加溫單元1〇連接，用以測量加溫單元1〇 鲁 中腔體的溫度，控制電腦30連接該溫度偵測單元2〇，包含一 控溫程式，並將用以將溫度偵測單元2〇所偵測之腔體的溫度 與一目標溫度比較，並在腔體的溫度低於目標溫度時，發出一 類比輸出訊號。類比輸出單元40與該控制電腦3〇連接，接收 該類比輸出訊號’並將該類比輸出訊號轉換為一輸出電壓，更 進一步參照第二圖，本發明之脈衝控制調變模組的細部示意 圖。脈衝控制調變模組50包含一電源供應器51、一波形轉換 電路53以及一比較器55。 、 波形轉換電路53連接該電源供應器’將該電源供應器51 所提供的電流轉換為一鋸齒波或方波，比較器55連接該波形 轉換電路53以及類比輸出單元40 ’將該鋸齒波或該方波與類 、[ 201214074 4G，生的輸出電壓比較並調變後，輸出一脈衝 」Γη°了波。開關單70 6〇與該脈衝控制調麵·组50及加数單 ^接’依據該脈衝寬度調變波，控制加熱單元1〇中之該 益矩陣(未顯示)的開啟或賴，也就是開始加熱或停止 Μ* 一步地，本發明快速升降溫裝置1包含一比流器70， 7〇與該控制加熱單元1〇及控制電腦3〇連接，以偵測 ^加熱H矩陣中每-加熱H的電流，將該等電流與控制電腦 中控溫程式所設定的目標電流比較，而以作為電流回授， 而修正類比輸出訊號，以穩定電流。 、3亥脈衝控制調變模組50的波形轉換電路53進一步包含一 =波產生态81以及一鋸齒波產生器83，該弦波產生器81將 電源，應器51所輸出的交流電轉換為一弦波，鋸齒波產生器 83與該弦波產生器81連接，將該弦波產生器81所產生的弦 波整理為一鑛齒波或方波。 另外，開關單元60可使用各種閘流器(Thyristor)、矽控整 ，益(Silicon Controlled Rectifier)、三極體流開關(TRIAC)、功 ，電晶體(Power BJT)、功率金氧半電晶體（power M0SFET) 等’ f本發明中，較佳為使用三極體流開關(TRIAC)。而溫度 债測單元20可以為電熱偶(Thermai Couple)、電阻式溫度儀、 紅外線溫度儀等。 參閱第三圖，本發明快速升降溫裝置之溫度控制方法的流 程圖。如第三圖所示’本發明快速升降溫裝置之溫度控制方法 S1包含一溫度測量步驟si〇、一溫度比較步驟S2〇、一脈衝調 變波產生步驟S30以及一開關控制步驟S40。溫度測量步驟 S10係以一溫度偵測單元測量一加溫單元中腔體的溫度，溫度 比較步驟S20係以一控制電腦比較該溫度偵測單元所測量之 腔體的溫度與一目標溫度’在該腔體的溫度低於該目標溫度 時，該控制電腦產生一類比輸出訊號，脈衝調變波產生步驟 S30，由一類比輸出單元將該類比輸出訊號轉換為一電壓，並 6 201214074 以一比較态释該電壓與經由一波形轉換電路所產生的鋸齒波 ，方波比較，並調變產生一脈衝寬度調變波，再輸出至一開關 單兀。開關控制步驟S40，該開關單元根據該脈衝寬度調變波 =控制加熱單元中之加熱器矩陣的開啟或關閉，即開始加熱或 停止加熱。 ‘ ^本發明快速升降溫裝置之溫度控制方法，進一步包含一回 授巧步驟S5。，稍該控制加鮮元及該㈣t腦連接的一 比流器偵義等加熱器矩陣巾每-加熱器的電流，將該等電流Further, the fast temperature rise and fall device of the present invention comprises a current comparator connected to the control heating unit and the control computer to detect the current of each heater in the heater matrix. The target current comparison set by the temperature control program in the computer is used as a current feedback, and the analog output signal is corrected to stabilize the current. The temperature control method of the rapid temperature rise and fall device of the present invention comprises a temperature measuring step, a temperature comparing step, a pulse modulated wave generating step and a switch controlling step. The temperature measuring step measures the temperature of the cavity in a heating unit by a temperature detecting unit. The temperature comparison step is performed by a control computer to compare the temperature of the cavity measured by the single-unit f with a target temperature. When the temperature of the cavity is lower than the target temperature, the control computer generates an analog output signal, and the pulse modulation wave generating step converts the analog output signal into a voltage by an analog output unit, and uses a comparator to The voltage is compared with the sawtooth wave generated by a waveform conversion circuit, and the square wave is compared and modulated to generate a pulse width modulated wave, which is then output to a switching unit. In the control step, the switching unit controls the opening or closing of the heater matrix in the heating unit according to the pulse width modulation wave, that is, starts heating or stops heating. The temperature control method for the rapid temperature rise and fall device of the present invention further includes a back control step for measuring the current of each heater of the heater matrix with a comparator connected to the control heating unit and the control computer. The current is compared with the target set by the 201214074 temperature control program, and the analogy is corrected. The ship is integrated with the power supply, the 丨YANG conversion circuit and the comparator, and can usually be integrated into one Grounding shouting with electric heating, cr) as a temperature control, which greatly reduces the system's seeding, and does not require group control to reduce noise and interference, and can make the cavity heating and paving more precise, Η Ϊ Ϊ 各种 各种 各种 各种Heating the processing quality of objects such as wafers and solar cells. BEST MODE FOR CARRYING OUT THE INVENTION The following is a more detailed description of the present invention in conjunction with the drawings and the components of the present invention, which can be implemented by those skilled in the art after studying this specification. Referring to the drawings, a block diagram of the rapid temperature rise and fall device of the present invention is shown. As shown in the first figure, the rapid temperature rise and fall device of the present invention includes a heating unit 1 , a temperature detecting unit 20 , a control computer 30 , an analog output unit 4 , a pulse control modulation module 50 , and a switch unit 60 . The temperature unit 1〇 includes a cavity (not shown) for accommodating the object to be warmed and a plurality of heater matrices (not shown), and the temperature detecting unit 20 is connected to the warming unit 1〇 for measuring The temperature of the heating unit 1 is connected to the temperature detecting unit 2, and the temperature control unit 2 is connected to the temperature detecting unit 2, and includes a temperature control program, and the temperature of the cavity detected by the temperature detecting unit 2〇 is A target temperature is compared and an analog output signal is emitted when the temperature of the cavity is below the target temperature. The analog output unit 40 is connected to the control computer 3A, receives the analog output signal and converts the analog output signal into an output voltage, and further refers to the second figure, a detailed schematic diagram of the pulse control modulation module of the present invention. The pulse control modulation module 50 includes a power supply 51, a waveform conversion circuit 53, and a comparator 55. The waveform conversion circuit 53 is connected to the power supply unit 'converts the current supplied by the power supply 51 into a sawtooth wave or a square wave, and the comparator 55 is connected to the waveform conversion circuit 53 and the analog output unit 40' to the sawtooth wave or The square wave is compared with the class, [201214074 4G, the output voltage is compared and modulated, and a pulse is output" Γη° wave. The switch unit 70 6〇 and the pulse control adjustment surface group 50 and the addendum unit are connected according to the pulse width modulation wave, and control the opening or reliance of the benefit matrix (not shown) in the heating unit 1〇, that is, Starting to heat or stop Μ* In one step, the rapid temperature rise and fall device 1 of the present invention comprises a flow comparator 70, 7〇 connected to the control heating unit 1〇 and the control computer 3〇 to detect each heating in the heating H matrix. The current of H is compared with the target current set by the temperature control program in the control computer, and is used as current feedback to correct the analog output signal to stabilize the current. The waveform conversion circuit 53 of the 3H pulse control modulation module 50 further includes a = wave generation state 81 and a sawtooth generator 83. The sine wave generator 81 converts the alternating current output from the power source 51 into one. The sine wave, sawtooth generator 83 is connected to the sine wave generator 81, and the sine wave generated by the sine wave generator 81 is collated into a spur wave or a square wave. In addition, the switching unit 60 can use various Thyristors, Silicon Controlled Rectifiers, Triac Flow Switch (TRIAC), Power, Power BJT, Power Metal Oxygen Semiconductors. (power M0SFET), etc. In the present invention, a triode flow switch (TRIAC) is preferably used. The temperature debt measuring unit 20 may be a thermocouple (Thermai Couple), a resistive temperature meter, an infrared temperature meter, or the like. Referring to the third figure, a flow chart of the temperature control method of the rapid temperature rise and fall device of the present invention. As shown in the third figure, the temperature control method S1 of the rapid temperature rise and fall device of the present invention comprises a temperature measuring step si, a temperature comparing step S2, a pulse adjusting wave generating step S30, and a switch controlling step S40. The temperature measuring step S10 measures the temperature of the cavity in a warming unit by a temperature detecting unit, and the temperature comparing step S20 compares the temperature of the cavity measured by the temperature detecting unit with a target temperature by a control computer. When the temperature of the cavity is lower than the target temperature, the control computer generates an analog output signal, the pulse modulated wave generating step S30, the analog output signal is converted into a voltage by an analog output unit, and 6 201214074 is compared. The state discharges the voltage and the sawtooth wave generated by a waveform conversion circuit, the square wave is compared, and is modulated to generate a pulse width modulated wave, and then output to a switch unit. The switch control step S40, the switching unit controls the opening or closing of the heater matrix in the heating unit according to the pulse width modulation wave = starting heating or stopping heating. ‘ ^ The temperature control method of the rapid temperature rise and fall device of the present invention further includes an instructive step S5. a little control of the addition of fresh elements and the (four) t-brain connection of a heater damper and other heater matrix towel per-heater current, the current
與控制電腦巾-控溫程式所設定的—目標t流錄，而修正該 類比輸出訊號。 今發明的特點在於使用脈衝寬度調變的方式，而能將電源 供應器、波A形轉換電路以及比較器整合，通常可以整合在一電 上，從而直接地取代習用以電熱調整器(SCR)作為溫度控 =器Ϊ方式，從而大幅地減少了系統的體積、也不需分組i 二二，而減少了雜訊和干擾，而能夠使腔體加熱控制更精確， =得提升各種快速加熱物件，如晶圓、 片等的製程品質。 电日日 以上所述者僅為用以解釋本發明之較佳實施例，並非 本發徽任何形式上之關，是以，减在相同之發^ 3 ΐ I所作㈣本發明'‘之任何修飾或變更，*仍應包括在本發 明意圖保護之範疇。 他个赞 【圖式簡單說明】 ==圖為本發明快速升降溫裝置的方塊示意圖。 一圖為本發明之脈衝控制調變模組的細部示意圖。 弟三圖為本發顿速鱗溫裝置之溫度控财法的流程圖 【主要元件符號說明】 1快'速升降溫裝置· 川加溫單元 ' 201214074 20溫度偵測單元 30控制電腦 40類比輸出單元 50脈衝控制調變模組 51電源供應器 53波形轉換電路 55比較器 60開關單元 70 比流器 81弦波產生器 83鋸齒波產生器 S1快速升降溫裝置之溫度控制方法 S10、S20、S30、S40、S50 步驟And control the computer towel-temperature control program set-target t-stream record, and correct the analog output signal. The invention is characterized by the use of pulse width modulation, which can integrate the power supply, the wave A-shaped conversion circuit and the comparator, and can usually be integrated into one electricity, thereby directly replacing the conventional electric heating regulator (SCR). As a temperature control device, it greatly reduces the size of the system, does not need to be grouped, and reduces noise and interference, and can make the cavity heating control more precise. Process quality such as wafers, wafers, etc. The above description of the present invention is only for explaining the preferred embodiment of the present invention, and is not in any form of the present invention, and is based on any of the same inventions. Modifications or alterations, * should still be included in the scope of the invention as intended. He likes it [Simplified illustration] == Figure is a block diagram of the fast lifting device of the invention. One figure is a detailed diagram of the pulse control modulation module of the present invention. The younger brother's three-character flow chart of the temperature control method of the fast-speed scaly temperature device [main component symbol description] 1 fast 'speed lifting temperature device · Sichuan heating unit' 201214074 20 temperature detection unit 30 control computer 40 analog output Unit 50 pulse control modulation module 51 power supply 53 waveform conversion circuit 55 comparator 60 switching unit 70 current transformer 81 sine wave generator 83 sawtooth wave generator S1 rapid temperature rise and control device temperature control method S10, S20, S30 , S40, S50 steps