CN102455716B - Rapid cooling device and temperature control method thereof - Google Patents
Rapid cooling device and temperature control method thereof Download PDFInfo
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- CN102455716B CN102455716B CN 201010512648 CN201010512648A CN102455716B CN 102455716 B CN102455716 B CN 102455716B CN 201010512648 CN201010512648 CN 201010512648 CN 201010512648 A CN201010512648 A CN 201010512648A CN 102455716 B CN102455716 B CN 102455716B
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Abstract
The invention discloses a rapid cooling device and a temperature control method thereof. The device comprises a heating unit, a temperature detection unit, a control computer, an analog output unit, a pulse control and modulation module and a switch unit. By using a pulse width modulation method, the existing electric heating adjuster is replaced by the pulse control and modulation module which is integrated with a power supplier, a waveform conversion circuit and a comparator, the total volume of a system is reduced, group control is not required, the noise and interference are reduced, the heating of a chamber can be controlled more accurately, and the process quality of various rapidly heated targets such as wafers, solar cells, photoelectric chips and the like can be promoted.
Description
Technical field
The present invention relates to a kind of rapid cooling device and temperature-controlled process thereof, especially with pulse width modulation (Pulse Width Modulation), control heating and start and stop.
Background technology
Existing rapid temperature rise and drop process of photoelectrical semiconductor equipment, to adopt electric heating adjuster (Switching Capacitor Relay, SCR) as the controller of output power modulation, its characteristic is to control the alternating current-direct current signal mixed configuration of signal and power stage in same circuit, easily produce various noises and interference in use, and its influence degree can be followed usage quantity and obviously increase.
In addition, commercially available SCR is bulky, needs the dress heat radiator, therefore generally adopt packet mode to carry out power control, a SCR need control many group heating sources simultaneously, is unfavorable for trend and the demand of following heating and cooling equipment heating source unit control.
In the time of should having control mode now and be applied in rapid temperature rise and drop process of photoelectrical semiconductor equipment, owing between the control signal of alternating current-direct current and output power circuit, can producing noise.Add and adopt the subregion control mode, but the parameter of its modulation is less, although reduced the difficulty of adjustment, also relatively sacrificed the regional adjustability of part, make the homogeneity of reaction cavity relatively be restricted.
Summary of the invention
Fundamental purpose of the present invention is to provide a kind of rapid cooling device, this device comprises the unit of heating, temperature detecting unit, control computing machine, the simulation output unit, modulating module and switch element are controlled in pulse, the unit of heating comprises cavity and a plurality of heater matrix in order to the accommodating object of wanting to heat, this temperature detecting unit is connected with this unit of heating, in order to the heat temperature of cavity in unit of measurement, control computing machine and connect this temperature detecting unit, comprise a temperature control program, and will be in order to the temperature of cavity that temperature detecting unit is detected and a target temperature relatively, and in the temperature of cavity during lower than target temperature, send a simulation output signal.The simulation output unit is connected with this control computing machine, receive this simulation output signal, and this simulation output signal is converted to an output voltage, pulse is controlled modulating module and is comprised a power supply unit, a waveform changing circuit and a comparer, waveform changing circuit connects this power supply unit, the current conversion that this power supply unit is provided is a sawtooth wave or square wave, comparer connects this waveform changing circuit and simulation output unit, this sawtooth wave and the output voltage that produces of simulation output unit relatively and after modulation, are exported to a pulse width modulation ripple.Switch element controls modulating module with this pulse and the unit of heating is connected, and according to this pulse width modulation ripple, controls the unlatching of the described heater matrix in the unit of heating or closes, and namely starts heating or stops heating.
Further, rapid cooling device of the present invention comprises a current transformer, current transformer and this unit and control computing machine and be connected of heating, to detect the electric current of each well heater in described heater matrix, the target current that in described electric current and control computing machine, the temperature control program sets is compared, feedback as electric current and using, and revise the simulation output signal, with steady current.
The temperature-controlled process of rapid cooling device of the present invention comprises a temperature survey step, a temperature comparison step, a PM ripple produces step and a switch is controlled step.The temperature survey step is measured a temperature of heating cavity in unit with a temperature detecting unit, temperature comparison step is with a control computing machine relatively temperature and a target temperature of the measured cavity of this temperature detecting unit, in the temperature of this cavity during lower than this target temperature, this is controlled computing machine and produces a simulation output signal, the PM ripple produces step, by a simulation output unit, this simulation output signal is converted to a voltage, and with a comparer, this voltage and the sawtooth wave produced via a waveform changing circuit or square wave are compared, and modulation produces a pulse width modulation ripple, export again a switch element to.Switch is controlled step, and this switch element is controlled the unlatching of the heater matrix in the unit of heating or closes according to this pulse width modulation ripple, starts heating or stops heating.
The temperature-controlled process of rapid cooling device of the present invention, further comprise a back coupling and control step, detect the electric current of each well heater in described heater matrix with the current transformer be connected with this heat unit and this control computing machine, the target current that in described electric current and control computing machine, a temperature control program sets is compared, and revise this simulation output signal.
Characteristics of the present invention are to use the mode of pulse width modulation, and power supply unit, waveform changing circuit and comparer can be integrated, usually can be incorporated on a circuit board, thereby directly replace the existing mode of electric heating adjuster (SCR) as temperature controller of usining, thereby reduced significantly the volume of system, also do not needed grouping to control, and then reduced Noise and Interference, and it is more accurate to make cavity add heat control, promote various Fast Heating objects and make, as the processing procedure quality of wafer, solar cell, photoelectric chip etc.
The accompanying drawing explanation
The block schematic diagram that Fig. 1 is rapid cooling device of the present invention.
Fig. 2 is the thin section schematic diagram that modulating module is controlled in pulse of the present invention.
The process flow diagram of the temperature-controlled process that Fig. 3 is rapid cooling device of the present invention.
Embodiment
Those skilled in the art below coordinate Figure of description to do more detailed description to embodiments of the present invention, so that can implement according to this after studying this instructions carefully.
Consulting Fig. 1, is the block schematic diagram of rapid cooling device of the present invention.As shown in Figure 1, rapid cooling device 1 of the present invention comprises the unit 10 of heating, temperature detecting unit 20, control computing machine 30, simulation output unit 40, modulating module 50 and switch element 60 are controlled in pulse, the unit 10 of heating comprises cavity (not shown) and a plurality of heater matrix (not shown) in order to the accommodating object of wanting to heat, this temperature detecting unit 20 is connected with this unit 10 of heating, in order to the heat temperature of cavity in unit 10 of measurement, control computing machine 30 and connect this temperature detecting unit 20, comprise a temperature control program, and will be in order to the temperature of cavity that temperature detecting unit 20 is detected and a target temperature relatively, and in the temperature of cavity during lower than target temperature, send a simulation output signal.Simulation output unit 40 is connected with this control computing machine 30, and receive this simulation output signal, and this simulation output signal is converted to an output voltage, further with reference to Fig. 2, be the thin section schematic diagram of pulse control modulating module of the present invention.Pulse is controlled modulating module 50 and is comprised a power supply unit 51, a waveform changing circuit 53 and a comparer 55.
Further, rapid cooling device 1 of the present invention comprises a current transformer 70, current transformer 70 and this unit 10 and control computing machine 30 and be connected of heating, to detect the electric current of each well heater in described heater matrix, the target current that in described electric current and control computing machine 30, the temperature control program sets is compared, feedback as electric current and using, and revise the simulation output signal, with steady current.
The waveform changing circuit 53 that modulating module 50 is controlled in this pulse further comprises a string baud generator 81 and a sawtooth generator 83, the alternating current that this string baud generator 81 is exported power supply unit 51 is converted to a string ripple, sawtooth generator 83 is connected with this string baud generator 81, and it is a sawtooth wave or square wave that the string ripple that this string baud generator 81 is produced arranges.
In addition, switch element 60 can be used various lock stream devices (Thyristor), thyristor (Silicon Controlled Rectifier), three terminal bidirectional alternating-current switch (TRIAC), power transistor (Power BJT), power metal oxide semiconductor (Power MOSFET) etc., in the present invention, be preferably and use three terminal bidirectional alternating-current switch (TRIAC).And temperature detecting unit 20 can be electroheat pair (Thermal Couple), resistance-type thermometer, infrared temperature instrument etc.
Consulting Fig. 3, is the process flow diagram of the temperature-controlled process of rapid cooling device of the present invention.As shown in Figure 3, the temperature-controlled process S1 of rapid cooling device of the present invention comprises a temperature survey step S10, a temperature comparison step S20, a PM ripple produces step S30 and a switch is controlled step S40.Temperature survey step S10 measures a temperature of heating cavity in unit with a temperature detecting unit, temperature comparison step S20 makes with a control computing machine relatively temperature and a target temperature of the measured cavity of this temperature detecting unit, in the temperature of this cavity during lower than this target temperature, this is controlled computing machine and produces a simulation output signal, the PM ripple produces step S30, by a simulation output unit, this simulation output signal is converted to a voltage, and with a comparer, this voltage and the sawtooth wave produced via a waveform changing circuit or square wave are compared, and modulation produces a pulse width modulation ripple, export again a switch element to.Switch is controlled step S40, and this switch element is controlled the unlatching of the heater matrix in the unit of heating or closes according to this pulse width modulation ripple, starts heating or stops heating.
The temperature-controlled process of rapid cooling device of the present invention, further comprise a back coupling and control step S50, detect the electric current of each well heater in described heater matrix with the current transformer be connected with this heat unit and this control computing machine, the target current that in described electric current and control computing machine, a temperature control program sets is compared, and revise this simulation output signal.
Characteristics of the present invention are to use the mode of pulse width modulation, and power supply unit, waveform changing circuit and comparer can be integrated, usually can be incorporated on a circuit board, thereby directly replace the existing mode of electric heating adjuster (SCR) as temperature controller of usining, thereby reduced significantly the volume of system, also do not needed grouping to control, and then reduced Noise and Interference, and it is more accurate to make cavity add heat control, promote various Fast Heating objects and make, as the processing procedure quality of wafer, solar cell, photoelectric chip etc.
The foregoing is only to explain preferred embodiment of the present invention; not attempt is done any pro forma restriction to the present invention according to this; therefore, all have do relevant any modification of the present invention or change under identical creation spirit, all must be included in the category that the invention is intended to protection.
Claims (7)
1. a rapid cooling device, is characterized in that, comprises:
One unit of heating, comprise a cavity and a plurality of heater matrix in order to the accommodating object of wanting to heat;
One temperature detecting unit, be connected with this unit of heating, in order to measure the temperature of this cavity in this unit of heating;
One controls computing machine, connects this temperature detecting unit, comprises a temperature control program, and will be in order to the temperature and target temperature comparison of this cavity that this temperature detecting unit is detected, and during lower than target temperature, sends a simulation output signal in the temperature of this cavity;
One simulation output unit, be connected with this control computing machine, receives this simulation output signal, and this simulation output signal is converted to an output voltage;
Modulating module is controlled in one pulse, comprise a power supply unit, a waveform changing circuit and a comparer, this waveform changing circuit connects this power supply unit, the current conversion that this power supply unit is provided is a sawtooth wave or a square wave, this comparer connects this waveform changing circuit and this simulation output unit, this output voltage that this sawtooth wave or this square wave and this simulation output unit are produced relatively and after modulation, is exported a pulse width modulation ripple;
One switch element, control modulating module with this pulse and this unit of heating is connected, and according to this pulse width modulation ripple, controls the unlatching of the described heater matrix in this unit of heating or close; And
One current transformer, this current transformer is connected with this heat unit and this control computing machine, to detect the electric current of each well heater in described heater matrix, the target current that in described electric current and control computing machine, the temperature control program sets is compared, revise this simulation output signal as the electric current back coupling.
2. device as claimed in claim 1, it is characterized in that, this waveform changing circuit comprises a string baud generator and a sawtooth generator, the alternating current that this string baud generator is exported this power supply unit is converted to a string ripple, this sawtooth generator is connected with this string baud generator, and this string ripple that this string baud generator is produced arranges as this sawtooth wave or this square wave.
3. device as claimed in claim 1, is characterized in that, this switch element can comprise a lock stream device, a thyristor, a three terminal bidirectional alternating-current switch, a power transistor, a power metal oxide semiconductor at least one of them.
4. device as claimed in claim 1, is characterized in that, this temperature detecting unit is electroheat pair, resistance-type thermometer or infrared temperature instrument.
5. the temperature-controlled process of a rapid cooling device, is characterized in that, step comprises:
One temperature survey step, measure a temperature of heating cavity in unit with a temperature detecting unit;
One temperature comparison step, with a control computing machine relatively temperature and a target temperature of measured this cavity of this temperature detecting unit, and, control computing machine by this and produce a simulation output signal during lower than this target temperature in the temperature of this cavity;
One PM ripple produces step, by a simulation output unit, this simulation output signal is converted to a voltage, and with a comparer by this voltage and the sawtooth wave that produced via a waveform changing circuit or a square wave relatively and modulation produce a pulse width modulation ripple, then export a switch element to;
One switch is controlled step, with this switch element, according to this pulse width modulation ripple, controls the unlatching of a plurality of heater matrixs in this unit of heating or closes; And
Step is controlled in one back coupling, detect the electric current of each well heater in described heater matrix with the current transformer be connected with this heat unit and this control computing machine, the target current that in described electric current and control computing machine, a temperature control program sets is compared, and revise this simulation output signal.
6. method as claimed in claim 5, it is characterized in that, this waveform changing circuit comprises a string baud generator and a sawtooth generator, the alternating current that this string baud generator is exported this power supply unit is converted to a string ripple, this sawtooth generator is connected with this string baud generator, and this string ripple that this string baud generator is produced arranges as this sawtooth wave or this square wave.
7. method as claimed in claim 5, is characterized in that, this switch element comprise a lock stream device, a thyristor, a three terminal bidirectional alternating-current switch, a power transistor, a power metal oxide semiconductor at least one of them.
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| Application Number | Priority Date | Filing Date | Title |
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| CN 201010512648 CN102455716B (en) | 2010-10-20 | 2010-10-20 | Rapid cooling device and temperature control method thereof |
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| CN 201010512648 CN102455716B (en) | 2010-10-20 | 2010-10-20 | Rapid cooling device and temperature control method thereof |
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| CN102455716A CN102455716A (en) | 2012-05-16 |
| CN102455716B true CN102455716B (en) | 2013-12-18 |
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| CN103389752B (en) * | 2013-07-24 | 2015-12-09 | 北京七星华创电子股份有限公司 | For the temperature-controlled process of semiconductor heat treatment equipment |
Citations (6)
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| WO2003044610A1 (en) * | 2001-11-15 | 2003-05-30 | Synapse, Inc. | Controlling liquid temperature based on usage history |
| CN101025635A (en) * | 2007-03-07 | 2007-08-29 | 北京航空航天大学 | Full digital temperature control device suitable for optical fiber gyro inertial measurement combination |
| WO2007107732A1 (en) * | 2006-03-17 | 2007-09-27 | Ultra Electronics Limited | Ice protection system |
| CN201197114Y (en) * | 2008-01-31 | 2009-02-18 | 茂达电子股份有限公司 | Pulse width modulation structure with regulation work period |
| CN201464934U (en) * | 2009-05-08 | 2010-05-12 | 深圳市德泽能源科技有限公司 | Aging room temperature automatic control circuit |
| CN201569304U (en) * | 2009-11-06 | 2010-09-01 | 卧龙电气集团股份有限公司 | Monitoring device for preventing solidification kiln warming from being out of control |
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2010
- 2010-10-20 CN CN 201010512648 patent/CN102455716B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003044610A1 (en) * | 2001-11-15 | 2003-05-30 | Synapse, Inc. | Controlling liquid temperature based on usage history |
| WO2007107732A1 (en) * | 2006-03-17 | 2007-09-27 | Ultra Electronics Limited | Ice protection system |
| CN101025635A (en) * | 2007-03-07 | 2007-08-29 | 北京航空航天大学 | Full digital temperature control device suitable for optical fiber gyro inertial measurement combination |
| CN201197114Y (en) * | 2008-01-31 | 2009-02-18 | 茂达电子股份有限公司 | Pulse width modulation structure with regulation work period |
| CN201464934U (en) * | 2009-05-08 | 2010-05-12 | 深圳市德泽能源科技有限公司 | Aging room temperature automatic control circuit |
| CN201569304U (en) * | 2009-11-06 | 2010-09-01 | 卧龙电气集团股份有限公司 | Monitoring device for preventing solidification kiln warming from being out of control |
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