CN102455716A - Rapid cooling device and temperature control method thereof - Google Patents
Rapid cooling device and temperature control method thereof Download PDFInfo
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- CN102455716A CN102455716A CN2010105126489A CN201010512648A CN102455716A CN 102455716 A CN102455716 A CN 102455716A CN 2010105126489 A CN2010105126489 A CN 2010105126489A CN 201010512648 A CN201010512648 A CN 201010512648A CN 102455716 A CN102455716 A CN 102455716A
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Abstract
The invention discloses a rapid cooling device and a temperature control method thereof. The device comprises a heating unit, a temperature detection unit, a control computer, an analog output unit, a pulse control and modulation module and a switch unit. By using a pulse width modulation method, the existing electric heating adjuster is replaced by the pulse control and modulation module which is integrated with a power supplier, a waveform conversion circuit and a comparator, the total volume of a system is reduced, group control is not required, the noise and interference are reduced, the heating of a chamber can be controlled more accurately, and the process quality of various rapidly heated targets such as wafers, solar cells, photoelectric chips and the like can be promoted.
Description
Technical field
The present invention relates to a kind of rapid temperature rise and drop device and temperature-controlled process thereof, especially begin and stop with pulse width modulation (Pulse Width Modulation) control heating.
Background technology
Existing rapid temperature rise and drop process of photoelectrical semiconductor equipment; Be to adopt electric heating adjuster (Switching Capacitor Relay; SCR) as the controller of output power modulation; Its characteristic be alternating current-direct current signal mixed configuration with the output of controlling signal and power in same circuit, be prone to uses in produce various noises and interference, and its influence degree can be followed usage quantity and obvious increase.
In addition, commercially available SCR is bulky, needs the dress heat radiator, so the general packet mode that adopts carries out power control, promptly a SCR needs the many groups of control heating source simultaneously, is unfavorable for the trend and the demand of the indivedual controls of following heating and cooling equipment heating source.
In the time of should having control mode now and be applied in rapid temperature rise and drop process of photoelectrical semiconductor equipment, owing to can produce noise between the controlling signal of alternating current-direct current and output power circuit.Add and adopt the subregion control mode, but the parameter of its modulation is less,, also sacrificed partly regional adjustability relatively, make the homogeneity of reaction cavity be restricted relatively though reduced the difficulty of adjustment.
Summary of the invention
Fundamental purpose of the present invention provides a kind of rapid temperature rise and drop device; This device comprises the unit of heating, temperature detecting unit, control computer, simulation output unit, pulse control modulating module and switch element, and the unit of heating comprises in order to the cavity of the ccontaining object of desiring to heat and a plurality of heater matrix, and this temperature detecting unit is connected with this unit of heating; In order to the heat temperature of cavity in the unit of measurement; Control computer connects this temperature detecting unit, comprises a temperature control program, and will be in order to the temperature and target temperature comparison of cavity that temperature detecting unit is detected; And when the temperature of cavity is lower than target temperature, send a simulation output signal.The simulation output unit is connected with this control computer; Receive and to simulate output signal; And should simulate output signal and convert an output voltage into, pulse control modulating module comprises a power supply unit, a waveform changing circuit and a comparer, and waveform changing circuit connects this power supply unit; With the current conversion that this power supply unit provided is a sawtooth wave or square wave; Comparer connects this waveform changing circuit and simulation output unit, and this sawtooth wave and the simulation output voltage that output unit produced relatively and behind the modulation, are exported a pulse width modulation ripple.Switch element is connected with this pulse control modulating module and heating unit, and according to this pulse width modulation ripple, the unlatching of the said heater matrix in the control heating unit or close just begins heating or stops to heat.
Further; Rapid temperature rise and drop device of the present invention comprises a current transformer, and current transformer is connected with this control heating unit and control computer, to detect the electric current of each well heater in the said heater matrix; The target current that temperature control program in said electric current and the control computer is set compares; And, simulate output signal and revise to feedback as electric current, with steady current.
The temperature-controlled process of rapid temperature rise and drop device of the present invention comprises a temperature survey step, a temperature comparison step, PM ripple generation step and a switch controlled step.The temperature survey step with a temperature detecting unit measure one heat cavity in the unit temperature; Temperature comparison step is with a control computer relatively temperature and a target temperature of the measured cavity of this temperature detecting unit; When the temperature of this cavity was lower than this target temperature, this control computer produced a simulation output signal, and the PM ripple produces step; Should simulate output signal by a simulation output unit and convert a voltage into; And with a comparer with this voltage and the sawtooth wave that is produced via a waveform changing circuit or square wave relatively, and modulation produces a pulse width modulation ripple, exports a switch element again to.The switch controlled step, this switch element is controlled the unlatching of the heater matrix in the heating unit according to this pulse width modulation ripple or is closed, and promptly begins heating or stops heating.
The temperature-controlled process of rapid temperature rise and drop device of the present invention; Further comprise a back coupling controlled step; Detect the electric current of each well heater in the said heater matrix with a current transformer that is connected with this control heating unit and this control computer; The target current that a temperature control program in said electric current and the control computer is set compares, should the simulation output signal and revise.
Characteristics of the present invention are to use the mode of pulse width modulation; And can power supply unit, waveform changing circuit and comparer be integrated; Usually can be incorporated on the circuit board, thus directly replace existing with the mode of electric heating adjuster (SCR) as temperature controller, thereby reduced significantly the volume of system, also need not divide into groups control; And then noise and interference have been reduced; And it is more accurate to make cavity add heat control, and the various Fast Heating objects of feasible lifting, like the processing procedure quality of wafer, solar cell, photoelectric chip etc.
Description of drawings
Fig. 1 is the block schematic diagram of rapid temperature rise and drop device of the present invention.
Fig. 2 is the thin portion synoptic diagram of pulse control modulating module of the present invention.
Fig. 3 is the process flow diagram of the temperature-controlled process of rapid temperature rise and drop device of the present invention.
Embodiment
Those skilled in the art below cooperate Figure of description that embodiment of the present invention is done more detailed explanation, so that can implement after studying this instructions carefully according to this.
Consult Fig. 1, be the block schematic diagram of rapid temperature rise and drop device of the present invention.As shown in Figure 1; Rapid temperature rise and drop device 1 of the present invention comprises the unit 10 of heating, temperature detecting unit 20, control computer 30, simulation output unit 40, pulse control modulating module 50 and switch element 60; The unit 10 of heating comprises cavity (not shown) and a plurality of heater matrix (not shown) in order to the ccontaining object of desiring to heat; This temperature detecting unit 20 is connected with this unit 10 of heating, and in order to the heat temperature of cavity in the unit 10 of measurement, control computer 30 connects these temperature detecting units 20; Comprise a temperature control program; And will be relatively, and when the temperature of cavity is lower than target temperature, send a simulation output signal in order to the temperature of cavity that temperature detecting unit 20 is detected and a target temperature.Simulation output unit 40 is connected with this control computer 30, and receive to simulate output signal, and should simulate output signal and convert an output voltage into, further with reference to Fig. 2, be the thin portion synoptic diagram that modulating module is controlled in pulse of the present invention.Pulse control modulating module 50 comprises a power supply unit 51, a waveform changing circuit 53 and a comparer 55.
Further; Rapid temperature rise and drop device 1 of the present invention comprises a current transformer 70, and current transformer 70 is connected with this control heating unit 10 and control computer 30, to detect the electric current of each well heater in the said heater matrix; The target current that temperature control program in said electric current and the control computer 30 is set compares; And, simulate output signal and revise to feedback as electric current, with steady current.
The waveform changing circuit 53 of this pulse control modulating module 50 further comprises a string baud generator 81 and a sawtooth generator 83; The alternating current that this string baud generator 81 is exported power supply unit 51 converts a string ripple into; Sawtooth generator 83 is connected with this string baud generator 81, and the string ripple arrangement that this string baud generator 81 is produced is a sawtooth wave or square wave.
In addition; Switch element 60 can use various lock stream devices (Thyristor), thyristor (SiliconControlled Rectifier), three terminal bidirectional alternating-current switch (TRIAC), power transistor (PowerBJT), power metal oxide semiconductor (Power MOSFET) etc.; In the present invention, be preferably use three terminal bidirectional alternating-current switch (TRIAC).And temperature detecting unit 20 can be electroheat pair (ThermalCouple), resistance-type thermometer, infrared temperature instrument etc.
Consult Fig. 3, be the process flow diagram of the temperature-controlled process of rapid temperature rise and drop device of the present invention.As shown in Figure 3, the temperature-controlled process S1 of rapid temperature rise and drop device of the present invention comprises a temperature survey step S10, a temperature comparison step S20, PM ripple generation step S30 and a switch controlled step S40.Temperature survey step S10 be with a temperature detecting unit measure one heat cavity in the unit temperature; Temperature comparison step S20 makes with a control computer relatively temperature and a target temperature of the measured cavity of this temperature detecting unit; When the temperature of this cavity was lower than this target temperature, this control computer produced a simulation output signal, and the PM ripple produces step S30; Should simulate output signal by a simulation output unit and convert a voltage into; And with a comparer with this voltage and the sawtooth wave that is produced via a waveform changing circuit or square wave relatively, and modulation produces a pulse width modulation ripple, exports a switch element again to.Switch controlled step S40, this switch element is controlled the unlatching of the heater matrix in the heating unit according to this pulse width modulation ripple or is closed, and promptly begins heating or stops heating.
The temperature-controlled process of rapid temperature rise and drop device of the present invention; Further comprise a back coupling controlled step S50; Detect the electric current of each well heater in the said heater matrix with a current transformer that is connected with this control heating unit and this control computer; The target current that a temperature control program in said electric current and the control computer is set compares, should the simulation output signal and revise.
Characteristics of the present invention are to use the mode of pulse width modulation; And can power supply unit, waveform changing circuit and comparer be integrated; Usually can be incorporated on the circuit board, thus directly replace existing with the mode of electric heating adjuster (SCR) as temperature controller, thereby reduced significantly the volume of system, also need not divide into groups control; And then noise and interference have been reduced; And it is more accurate to make cavity add heat control, and the various Fast Heating objects of feasible lifting, like the processing procedure quality of wafer, solar cell, photoelectric chip etc.
The above is merely in order to explain preferred embodiment of the present invention; Be not that attempt is done any pro forma restriction to the present invention according to this; Therefore, all have in that identical creation spirit is following do relevant any modification of the present invention or change, all must be included in the category that the invention is intended to protect.
Claims (9)
1. a rapid temperature rise and drop device is characterized in that, comprises:
One unit of heating comprises a cavity and a plurality of heater matrix in order to the ccontaining object of desiring to heat;
One temperature detecting unit is connected with this unit of heating, in order to measure the temperature of this cavity in this unit of heating;
One control computer connects this temperature detecting unit, comprises a temperature control program, and will be in order to the temperature of this cavity that this temperature detecting unit is detected and a target temperature relatively, and when the temperature of this cavity is lower than target temperature, sends a simulation output signal;
One simulation output unit is connected with this control computer, receives this and simulates output signal, and should simulate output signal and convert an output voltage into;
One pulse control modulating module; Comprise a power supply unit, a waveform changing circuit and a comparer; This waveform changing circuit connects this power supply unit, is a sawtooth wave or a square wave with the current conversion that this power supply unit provided, and this comparer connects this waveform changing circuit and should simulate output unit; This output voltage that this sawtooth wave or this square wave and this simulation output unit are produced is exported a pulse width modulation ripple relatively and behind the modulation; And
One switch element is connected with this pulse control modulating module and this heating unit, according to this pulse width modulation ripple, controls the unlatching of the said heater matrix in this heating unit or closes.
2. device as claimed in claim 1; It is characterized in that; Further comprise a current transformer, this current transformer is connected with this control heating unit and this control computer, to detect the electric current of each well heater in the said heater matrix; The target current that temperature control program in said electric current and the control computer is set compares, and feedbacking and revise as electric current should the simulation output signal.
3. device as claimed in claim 1; It is characterized in that; This waveform changing circuit comprises a string baud generator and a sawtooth generator; The alternating current that this string baud generator is exported this power supply unit converts a string ripple into, and this sawtooth generator is connected with this string baud generator, and this string ripple arrangement that this string baud generator produced is this sawtooth wave or this square wave.
4. device as claimed in claim 1 is characterized in that, this switch element can comprise lock stream device, a thyristor, a three terminal bidirectional alternating-current switch, a power transistor, a power metal oxide semiconductor at least one of them.
5. device as claimed in claim 1 is characterized in that, this temperature detecting unit is electroheat pair, resistance-type thermometer or infrared temperature instrument.
6. the temperature-controlled process of a rapid temperature rise and drop device is characterized in that, step comprises:
One temperature survey step, with a temperature detecting unit measure one heat cavity in the unit temperature;
One temperature comparison step with a control computer relatively temperature and a target temperature of measured this cavity of this temperature detecting unit, and when the temperature of this cavity is lower than this target temperature, produces a simulation output signal by this control computer;
One PM ripple produces step; Should simulate output signal by a simulation output unit and convert a voltage into; And this voltage and a sawtooth wave that is produced via a waveform changing circuit or a square wave comparison and modulation are produced a pulse width modulation ripple with a comparer, export a switch element again to;
One switch controlled step is controlled the unlatching of a plurality of heater matrixs in the heating unit according to this pulse width modulation ripple or is closed with this switch element.
7. method as claimed in claim 6; It is characterized in that; This waveform changing circuit comprises a string baud generator and a sawtooth generator; The alternating current that this string baud generator is exported this power supply unit converts a string ripple into, and this sawtooth generator is connected with this string baud generator, and this string ripple arrangement that this string baud generator produced is this sawtooth wave or this square wave.
8. method as claimed in claim 6 is characterized in that, this switch element comprise lock stream device, a thyristor, a three terminal bidirectional alternating-current switch, a power transistor, a power metal oxide semiconductor at least one of them.
9. method as claimed in claim 6; It is characterized in that; Further comprise a back coupling controlled step; Detect the electric current of each well heater in the said heater matrix with a current transformer that is connected with this control heating unit and this control computer, the target current that a temperature control program in said electric current and the control computer is set relatively should simulation output signal and revise.
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| Application Number | Priority Date | Filing Date | Title |
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| CN 201010512648 CN102455716B (en) | 2010-10-20 | 2010-10-20 | Rapid cooling device and temperature control method thereof |
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| CN 201010512648 CN102455716B (en) | 2010-10-20 | 2010-10-20 | Rapid cooling device and temperature control method thereof |
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| CN102455716A true CN102455716A (en) | 2012-05-16 |
| CN102455716B CN102455716B (en) | 2013-12-18 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103389752A (en) * | 2013-07-24 | 2013-11-13 | 北京七星华创电子股份有限公司 | Temperature control method for semiconductor heat treatment equipment |
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| CN101025635A (en) * | 2007-03-07 | 2007-08-29 | 北京航空航天大学 | Full digital temperature control device suitable for optical fiber gyro inertial measurement combination |
| WO2007107732A1 (en) * | 2006-03-17 | 2007-09-27 | Ultra Electronics Limited | Ice protection system |
| CN201197114Y (en) * | 2008-01-31 | 2009-02-18 | 茂达电子股份有限公司 | Pulse width modulation structure with regulation work period |
| CN201464934U (en) * | 2009-05-08 | 2010-05-12 | 深圳市德泽能源科技有限公司 | Aging room temperature automatic control circuit |
| CN201569304U (en) * | 2009-11-06 | 2010-09-01 | 卧龙电气集团股份有限公司 | Monitoring device for preventing solidification kiln warming from being out of control |
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2010
- 2010-10-20 CN CN 201010512648 patent/CN102455716B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003044610A1 (en) * | 2001-11-15 | 2003-05-30 | Synapse, Inc. | Controlling liquid temperature based on usage history |
| WO2007107732A1 (en) * | 2006-03-17 | 2007-09-27 | Ultra Electronics Limited | Ice protection system |
| CN101025635A (en) * | 2007-03-07 | 2007-08-29 | 北京航空航天大学 | Full digital temperature control device suitable for optical fiber gyro inertial measurement combination |
| CN201197114Y (en) * | 2008-01-31 | 2009-02-18 | 茂达电子股份有限公司 | Pulse width modulation structure with regulation work period |
| CN201464934U (en) * | 2009-05-08 | 2010-05-12 | 深圳市德泽能源科技有限公司 | Aging room temperature automatic control circuit |
| CN201569304U (en) * | 2009-11-06 | 2010-09-01 | 卧龙电气集团股份有限公司 | Monitoring device for preventing solidification kiln warming from being out of control |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103389752A (en) * | 2013-07-24 | 2013-11-13 | 北京七星华创电子股份有限公司 | Temperature control method for semiconductor heat treatment equipment |
| CN103389752B (en) * | 2013-07-24 | 2015-12-09 | 北京七星华创电子股份有限公司 | For the temperature-controlled process of semiconductor heat treatment equipment |
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| CN102455716B (en) | 2013-12-18 |
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