ψ201213216 ' 六、發明說明： - 【發明所屬之技術領域】 本發明涉及-種對超薄板進行化學力σ工處理製程巾，薄板上 的線路完全不會被接觸的輸送方法與裝置。 【先前技術】 印刷電路板或其他佈設有電路的板件製程必須經過多道化學 #處理程序。早期的板件由於厚度較大，因此在化學處理製程中均 採用水平方式進行輸送。隨著技_不斷演軸及電子產品薄型 化與輕巧化的要求，若干印刷電路板或相關板件的厚度已愈來愈 涛（約25«〜75卵），且線路愈來愈細（約15_〜5〇㈣以致 於板件已成為超細嫩板，因此，若_傳_水平方式來輸 运軟性板，板材將會因為自身的柔性與重力作用導致板件變形， 容易在輸送触造針板，板件㈣此損毁，甚至造成停機，或 • ®線路與滾輪接觸產生摩擦而造成斷線，產品不良率相當高。 【發明内容】 化學^^#解__触_水平触方式進行 、王，4在輸it财造成卡板，祕触，甚 成停機，或吻伽觸線⑻卿獅下的問題Γ 、^發明的特徵，係利用橫移輸送機將薄板夹持與輸送，使薄 、狀久、、准持在盛裝化學液體的沉浸槽内水平方向輸送；薄 v201213216 面、^ ^ 轉侧時，提供化學液體在峨槽的内侧表 Γ辟祕用液體做為薄板與沉浸槽内壁面的隔離介質，以防止 接觸而可能擦傷或刮斷線路，甚至造成卡板的問題。 本發月的另—特徵，係在沉浸槽⑽姆_對板件提供由 ，斬進式作用力的化學液體’以及在沉浸槽内的底部產生往 下的吸引力’使上方被夾持於橫移輸送機的薄板件在沉浸槽内得 以維持穩定的豎立狀態輸送行進。Ψ201213216 ' VI. Description of the invention: - Technical field to which the invention pertains The present invention relates to a method and apparatus for chemically processing a process towel for an ultra-thin plate, the line on the sheet being completely untouched. [Prior Art] A printed circuit board or other board-provided board process must pass multiple chemical #processing procedures. Due to the large thickness of the early plates, they were transported horizontally in the chemical processing process. With the continual performance of the axis and the thinning and lightening requirements of electronic products, the thickness of several printed circuit boards or related boards has become more and more turbulent (about 25 «~75 eggs), and the lines are getting finer 15_~5〇(4), so that the plate has become a super-fine plate, therefore, if the _ _ _ horizontal way to transport the soft board, the board will be deformed due to its own flexibility and gravity, easy to convey the needle The board and the plate (4) are damaged or even cause downtime, or the contact between the line and the roller causes friction and the product defect rate is quite high. [Invention] The chemical ^^# solution __touch_horizontal touch mode, Wang, 4 in the loss of the money caused by the card board, secret touch, very stop, or kiss gamma (8) under the lion's problem ^, ^ invented features, the use of traverse conveyor to clamp and transport the thin plate, make thin Long-term, long-term, and in the horizontal direction of the immersion tank containing chemical liquid; thin v201213216 surface, ^ ^ turn side, provide chemical liquid on the inside of the gutter to create a secret liquid as a thin plate and immersion tank Wall insulation to prevent contact Can scratch or scrape the line, and even cause problems with the card board. Another feature of this month is that the immersion tank (10) provides a chemical liquid that is driven by the force of the immersion tank and the immersion tank. The bottom portion creates a downward attraction "the thin plate member that is clamped to the traverse conveyor above is maintained in a stable upright state in the immersion tank.
、本發明的再—特徵，係在沉浸槽_提供往不對稱方向分別 噴冲的化學液體’使化學液體能以高錢率通過板件的孔壁。 本發明的技術手段，係提供—内部寬度僅為1〜2αη的沉浸 t沉浸槽_相對_分顺置用雜流出化學㈣的複數渴 流官與複數献板’騎管的軸向與水平面之間傾斜—夹角，使 >勇流官的上端比下端接近被輸送而來的板件，藉时散薄板件瞬 間接觸_管喷流的沖擊力，流管設有複數第—雜孔，沉浸 槽相對兩側之触管的第—賊孔係不互相對應，藉以在不對稱 方向噴沖出化學液體，使化學液體能以高交換率通過板件的孔 壁’沉浸槽每一側的湧流板設於兩湧流管之間；沉浸槽底面設有 複數沿著沉浸槽長度方向佈設的回流孔，回流孔用以排出沉浸槽 内的化學液體進行過濾’再經由泵浦驅動配送至湧流管與湧流板 心IL出’其排出液體時可在沉浸槽内產生向下的吸引力。本發明利 用橫移輸送機夾持板件上端，使板件以豎立狀態在沉浸槽内朝水 平方向被輸送’從湧流管與湧流板湧流而出的化學液體提供板件 201213216 與沉浸槽内壁面之間的隔離介質；從湧流管喷沖而出的化學液體 作用於板件兩侧時，其作用力可以由上往下逐漸地分散，避免板 件承受過大作用力而變形或晃動，再配合回流孔排出化學液體時 產生的吸引力，可以使板件獲得往下拉伸的力量，以維持超薄板 件平穩的輸送。再者，利用沉浸槽兩側的湧流管分別往不對稱方 向s別喷沖化學液體，則能使化學液體以高交換率通過沖洗板件 的孔壁。 做為一種的選擇，本發明傾斜設置的湧流管，其軸向與水平 面之間的最佳夾角為70。〜80。。 做為-種的選擇，本發明設於誠板_流孔’係分佈有複 數排，每一排係平行於所述湧流管的軸向傾斜角度。 另較佳的選擇’本發明從渴流管與演流板渴流而出的液體 流速為0. 5〜lm/sec。 藉由前述本發_方法與裝置，對於薄板•立狀態在沉浸 3内X平輸G時’利用化學液體在沉浸槽的内側表面流動做為薄 板與沉浸_壁__竹，可以避免薄板和沉韻内壁面接 觸、及利用倾斜一夹角潘流而出的液體配合沉浸槽底面之回 流孔排出化學液體產生的往下則力，得以縣超薄板件兩側受 到過度集*的化學液體相力，從㈣免板件在沉浸_的輸送 4交减絲’防止超薄板件因撓曲與沉浸槽内壁面干涉造成 卡板，得以大幅提昇產品良率。 201213216 【實施方式】 以下配合圖式及元件符麟本發明的實施方式做更詳細的說 明，俾使熟習該項技藝者在研讀本說明書後能據以實施。 第一圖、第-A圖、第二圖及第二a圖係顯示本發明薄板處 理製程輸送裝置之示賴。其岭有—沉浸槽1，沉浸槽丨相對兩 讎之關成时錄化學液_沉浸區1Q，沉浸區ig之間的最 佳寬度W範圍為^cm。沉浸槽i的上方設置包含昇降取板機的 • 橫移輸送機5，以及可沿著橫移輸送機5移動的夾持器5卜夾持 裔51係用來夾持薄形板件6 ’再藉由橫移輸送機5輸送板件6在 沉浸區10内水平移動；板件6在沉浸區1〇的始端與末端時，則 藉由昇降取板機輸送分別將板件浸入或取出沉浸區。其中，沉浸 區10的始端上方兩側設有傾斜的導板12(如第二圖及第五圖所 不），以輔助板件6順利地放入狹窄的沉浸槽内；沉浸槽的底面則 设有複數沿著沉浸槽之長度方向分佈的回流孔^，其中，沉浸區 籲始端對應板件放入區域的回流孔u分佈較其他區域密集，回流孔 11則連通至一各器（圖中未顯示），該容器再以管路連接至一過濾 設備與泵浦（圖中未顯示）。 沉浸槽1内的相對兩側分別傾斜地設置複數湧流管2與複數 >勇流板3;汤流管2設有沿著汤流管之軸向排成至少一排的複數第 一湧流孔21 ;湧流板3的一側面設有複數第二湧流孔31 ;湧流管 2與邊流板3分別連通第一輸送管4與第二輸送管41，第一輪送 官4與第二輸送管41貝連接至前述的泵浦，化學液體7藉由泵浦 201213216 經由第-輪送f4被輸送至 ^ n 及經由第二輸送管41被 輸运I板3,進而由第一消流孔21 + 一弟一/勇/瓜孔31流入沉浸 ，泵浦同時將沉浸區内的化學液體姑 + ηβ π ^ 、壶轉、态Λ 子戍體經由回流孔11排出進入過 濾汉備4雜f後再循··辭 Μ-、、〈弟S流孔21及消流板3 “孔31流出；回流孔11在排出化學液體7時，會因為 流體的騎岐沉浸區㈣產生往下的糾力。所述化學液體7 的最佳麵細為G. 5〜lm/seG，_免對_娜域過高作用 力而變形或晃動。誠管2 _斜肢，係其轴向與水平面之間 形成-夹角Θ，該夾角θ的最佳範圍為7〇。〜8〇。，藉由該夹角 Θ ’使付傾斜的辦官2上端比下端接近被輸送而來的板件6。沉 浸槽1相對_之誠管2所設㈣1流孔21麟設在對稱位 置’而是相互錯開一適當距離(參第三圖、第三A圖、第四圖及第 四A圖所示）。赫板3上的第二漠流孔31係分佈為複數排，其 較佳實施儀使每-㈣二献孔31平行㈣流管2的轴向傾斜 角度；沉浸槽1内每一側的湧流板3係設於兩湧流管2之間。 利用前述的輸送方法與裝置，本發明藉以進行薄板處理製程 時’係在薄板暨立地進入沉浸槽1内之前，即從沉浸槽丄兩側的 消流管2各第一湧流孔12與湧流板3的各第二湧流孔31持續渴 出化學液體7流入沉浸區10 ;藉由化學液體在沉浸槽1相對兩内 側表面的流動而形成一層介質’然後由橫移輸送機5上的失持器 51夾持板件6進入沉浸槽1，在板件6進入沉浸槽1時，藉由傾 斜的導板12予以導引，並配合回流孔11排放化學液體7產生的 Γ ,201213216 吸引力可以雜件6侧地進人沉浸區1()内，然後由橫移輸送 機5驅動沿著水平方向輸送’在輸送過財，板件6相對兩側受 到化子液體7的支承翻而與沉浸槽丨的⑽面產生隔離，避免 超薄板件6和剛性的内壁面接觸，從而防止可能造成的擦傷板面 及卡板等問題。此外，本發明利㈣流管2呈傾斜-夾角θ的設 計’可以在板件6水平輸送通過㈣流管2時，讓板件6兩側由上 而下漸進地承受從第—雜孔21喷沖而出的㈣作用力，並配合 眷 K孔11排出化學液體產生的㈣力，得以避免超薄板件6受到 過度集中的侧力而變形或晃動’進關撓曲與沉浸槽内壁面干 涉造成卡板，得以大幅提昇產品良率。 以上所述者僅為用以解釋本發明之較佳實施例，並非企圖具 以對本發明做任何形式上之限制，是以，凡有在相同之發明精神 下所作有關本發明之任何修飾或變更，皆仍應包括在本發明意圖 保護之範轉。 S} 8 201213216 【圖式簡單說明】 第一圖為顯示本發明薄板處理製程輸送裝置之前視示意圖。 第一 A圖為第一圖之丨人區域的放大圖。 第二圖為顯示本發明薄板處理製程輸送裝置之側視示意圖。 第二A圖為第二圖之2A區域的放大圖。 第三圖為顯示本發明之湧流管與湧流板組合成沉浸槽之實施例局 部立體圖。 第三A圖為第三圖之3A區域的放大圖。 第四圖為顯示本發明之湧流管與湧流板組合成沉浸槽之單側結構 之實施例局部立體圖。 第四A圖為第四圖之4A區域的放大圖。 第五圖為顯示本發明之沉浸槽放板區域結構之實施例局部立體 圖。 【主要元件符號說明】 1······沉浸槽 ......沉浸區 U......回流孔 12......導板 2 ......湧流管 21......第一汤流孔 3 ......湧流板 201213216 31……第二湧流孔 4 ......第一輸送管 41……第二輸送管 5 ......橫移輸送機 51……夾持器 6……板件 7……液體 W……沉浸槽寬度A further feature of the present invention is that the immersion tank provides a chemical liquid that is separately sprayed in an asymmetrical direction to allow the chemical liquid to pass through the pore walls of the panel at a high rate of money. The technical means of the present invention provides an immersion t immersion tank with an internal width of only 1~2αη _ relative _ sub-distribution with a heterogeneous effluent chemistry (four) of a plurality of stagnation officials and a plurality of slabs of the axial and horizontal planes of the riding tube Between the inclination and the angle, the upper end of the yongliuguan is closer to the plate that is conveyed than the lower end. When the thin plate member is in contact with the impact force of the tube jet, the flow tube is provided with a plurality of first-holes. The first thief hole system of the contact pipe on the opposite sides of the immersion tank does not correspond to each other, so that the chemical liquid is sprayed out in an asymmetric direction, so that the chemical liquid can pass through the hole wall of the plate member at each side of the immersion groove at a high exchange rate. The surge plate is disposed between the two surge tubes; the bottom surface of the immersion tank is provided with a plurality of return holes arranged along the length of the immersion tank, and the return holes are used to discharge the chemical liquid in the immersion tank for filtration, and then distributed to the surge tube via the pump drive. The downward attraction is generated in the immersion tank when it discharges liquid with the surge core IL. The invention utilizes a traverse conveyor to clamp the upper end of the plate member, so that the plate member is conveyed in an upright state in the horizontal direction in the immersion tank. The chemical liquid provided from the surge pipe and the surge plate provides the plate member 201213216 and the inner wall surface of the immersion tank. The separation medium between the two; when the chemical liquid sprayed from the surge tube acts on both sides of the plate, the force can be gradually dispersed from top to bottom, avoiding the plate being subjected to excessive force and deforming or shaking, and then cooperate The attractive force generated when the return hole discharges the chemical liquid allows the plate to obtain the force of stretching downward to maintain the smooth conveyance of the ultra-thin plate. Furthermore, by using the surge tubes on both sides of the immersion tank to spray the chemical liquid into the asymmetric direction, the chemical liquid can be passed through the hole wall of the plate member at a high exchange rate. As an alternative, the obliquely arranged surge tube of the present invention has an optimum angle of 70 between the axial and horizontal planes. ~80. . As an alternative, the present invention is arranged in a plurality of rows of orifice plates, each of which is parallel to the axial inclination angle of the surge tube. 5〜lm/sec。 The flow rate of the liquid flow rate of 0. 5~lm / sec. By the foregoing method and device, when the thin plate and the vertical state are in the immersion 3, when the X is flat, the flow of the chemical liquid on the inner side surface of the immersion tank is used as the thin plate and the immersion_wall__ bamboo, and the thin plate and the bamboo can be avoided. The inner wall surface contact of Shen Yun and the liquid flowing out from the inclined angle of the inclined angle and the back hole of the bottom surface of the immersion tank discharge the chemical liquid to generate the downward force, so that the chemical liquid of the county ultra-thin plate is excessively collected* Phase force, from the (four) free plate in the immersion _ transport 4 minus silk 'to prevent the ultra-thin plate due to deflection and interference with the inner wall surface of the immersion groove caused by the card board, can greatly improve the product yield. 201213216 [Embodiment] Hereinafter, embodiments of the present invention will be described in more detail with reference to the drawings and the elements of the present invention, which can be implemented by those skilled in the art after studying this specification. The first drawing, the -A drawing, the second drawing and the second a drawing show the illustration of the thin plate processing process conveying device of the present invention. The ridge has an immersion tank 1, and the immersion tank is recorded with a chemical liquid _ immersion area 1Q, and the optimum width W between the immersion areas ig is ^cm. Above the immersion tank i, a traverse conveyor 5 including a lifting and lowering machine, and a gripper 5 movably movable along the traverse conveyor 5 are provided for gripping the thin plate member 6' Then, the conveying member 6 is horizontally moved in the immersion area 10 by the traverse conveyor 5; when the slab 6 is at the beginning and the end of the immersion area, the slab is immersed or taken out by the lifting and lowering machine respectively. Area. Wherein, the inclined cover 12 is provided on both sides of the upper end of the immersion area 10 (as shown in the second figure and the fifth figure), so that the auxiliary board 6 is smoothly placed in the narrow immersion tank; the bottom surface of the immersion tank is There are a plurality of return holes ^ distributed along the length direction of the immersion tank, wherein the distribution of the return holes u corresponding to the plate-in area of the immersion area is denser than that of other areas, and the return hole 11 is connected to a device (in the figure) Not shown), the container is connected in a pipeline to a filtration device and pump (not shown). The opposite sides of the immersion tank 1 are respectively provided with a plurality of surge tubes 2 and a plurality of swells 3; the soup tube 2 is provided with a plurality of first surge holes 21 arranged in at least one row along the axial direction of the soup tube. One side of the surge plate 3 is provided with a plurality of second surge holes 31; the surge tube 2 and the side flow plate 3 respectively communicate with the first transfer pipe 4 and the second transfer pipe 41, and the first transfer 4 and the second transfer pipe 41 The beak is connected to the aforementioned pump, and the chemical liquid 7 is transported to the n through the first wheel f4 by the pump 201213216 and transported to the I plate 3 via the second transfer pipe 41, thereby being passed by the first choke hole 21 + One brother one / Yong / melon hole 31 into the immersion, pumping the chemical liquid in the immersion area 姑 ηβ π ^, pot turn, state Λ 戍 排出 经由 经由 经由 经由 经由 经由 经由 经由 经由 经由 经由 经由 经由 经由 经由 经由 经由循环············ 弟 流 、 、 及 及 及 “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ The optimal surface of the chemical liquid 7 is G. 5~lm/seG, _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ Forming an angle Θ between the faces, the optimum range of the angle θ is 7〇.~8〇., by the angle Θ 'the upper end of the inclined officer 2 is closer to the plate than the lower end 6. The immersion tank 1 is opposite to the _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ The second inflow hole 31 on the Hertz plate 3 is distributed in a plurality of rows, and the preferred embodiment is such that each (four) two holes 31 are parallel (four) axially inclined angle of the flow tube 2; each of the immersion grooves 1 The side surge plate 3 is disposed between the two surge tubes 2. With the above-described conveying method and device, the present invention is used to perform the thin plate processing process before the thin plate and the ground enter the immersion tank 1, that is, two from the immersion tank. Each of the first surge holes 12 of the side of the flow tube 2 and the second surge holes 31 of the surge plate 3 continue to thir the chemical liquid 7 into the immersion area 10; the chemical liquid is formed on the opposite inner side surfaces of the immersion tank 1 A layer of medium 'then grips the plate member 6 into the immersion tank 1 by the detentor 51 on the traverse conveyor 5, and enters the immersion tank 1 at the plate member 6. At the same time, guided by the inclined guide plate 12, and the sputum generated by the chemical liquid 7 is discharged in conjunction with the return hole 11, the attractiveness of the 201213216 can be entered into the immersion area 1() by the side of the miscellaneous piece 6, and then the traverse conveyor 5 The drive is conveyed along the horizontal direction. In the transportation, the support of the chemical liquid 7 on the opposite sides of the plate 6 is turned over to isolate the (10) face of the immersion groove, so as to avoid contact between the ultra-thin plate 6 and the rigid inner wall surface. Therefore, the problem of scratching the board surface and the card board may be prevented. In addition, the design of the flow tube 2 of the present invention has a tilt-angle θ design. When the board member 6 is horizontally transported through the (four) flow tube 2, the board member 6 is allowed to be The two sides are progressively subjected to the (four) force which is sprayed from the first-hole 21 from the top to the bottom, and the (four) force generated by the discharge of the chemical liquid by the 眷K hole 11 is obtained to avoid the excessively concentrated side of the ultra-thin plate member 6. The force is deformed or shaken. The opening and closing deflection and the interference of the inner wall surface of the immersion tank cause the card to be greatly improved. The above is only a preferred embodiment for explaining the present invention, and is not intended to limit the invention in any way, so that any modifications or changes relating to the invention may be made in the spirit of the same invention. All should still be included in the intended protection of the present invention. S} 8 201213216 [Simple description of the drawings] The first figure is a front view showing the thin plate processing process conveying device of the present invention. The first A picture is an enlarged view of the area of the first figure. The second figure is a side view showing the thin plate processing process conveying device of the present invention. The second A is an enlarged view of the 2A area of the second figure. The third figure is a partial perspective view showing an embodiment in which the surge tube and the surge plate of the present invention are combined into an immersion tank. The third A is an enlarged view of the 3A area of the third figure. The fourth figure is a partial perspective view showing an embodiment in which the surge tube and the surge plate of the present invention are combined into a single-sided structure of the immersion tank. The fourth A is an enlarged view of the 4A area of the fourth figure. Fig. 5 is a partial perspective view showing an embodiment of the structure of the immersion tank plate of the present invention. [Explanation of main component symbols] 1······ Immersion tank... Immersion zone U...Reflow hole 12... Guide plate 2... Surge tube 21...first soup orifice 3...surge plate 201213216 31...second surge hole 4...first delivery tube 41...second delivery tube 5 .. .... traverse conveyor 51 ... gripper 6 ... plate 7 ... liquid W ... immersion groove width