201206716 六、發明說明： 【發明所屬之技術領域】 本發明係關於一種對於平滑的構件之利用噴墨方式的 材料塗布，尤其是關於一種穩定進行具有紫外線硬化（以 下，也稱爲UV硬化）作用的材料之塗布之噴墨塗布裝置 及方法。 0 【先前技術】 就噴墨方式而言，其係爲從作爲塗布頭之利用氣泡或 壓電元件之噴墨塗布頭高精密吐出少量的墨滴之方式。將 根據該墨滴的高精密吐出而在成爲對象之構件塗布墨滴的 處理裝置化者係爲噴墨塗布裝置。就可以實現墨水的高精 密塗布之裝置而言近年來備受注目，不限於對於紙張的印 刷，在所有的產業領域探索其適用的可能性，並且也有已 經實用化者。 Q 針對噴嘴真空吸引手段而言，提出藉由覆蓋塗布頭， 並利用抽吸手段將塗布頭的內部設定爲適當的負壓，除去 塗布頭內部的氣泡’達到墨水可以穩定吐出的狀態之技術 (例如，參照專利文獻1 )。 就對於具有UV硬化作用之墨液種類（UV硬化型塗 布材料之墨液。以下稱爲UV硬化型塗布材）的對應而言 ，爲了使墨液在射到前不會硬化，並且在射到後迅速硬化 ，具備安裝在朝主掃描方向移動的載置架之塗布頭、UV 光源、及被覆各UV光源之蓋板的技術爲眾所悉知（例如 201206716 ，參照專利文獻2 )。 該蓋板的側面係比塗布頭的下面更進一步 伸並配置在塗布頭與UV光源之間’在該蓋板 中係設置朝向彈道延伸之凸緣。 當根據該構成時，利用蓋板的側面遮蔽來 的紫外線，藉此，使紫外線不會到達塗布頭及 出之U V硬化型塗布材的墨滴的軌道’又將利 反射的紫外線在凸緣予以遮蔽，使該反射的紫 達頭部及彈道者。 藉此，因爲可以利用遮蔽構件減低對於自 吐出至射到記錄媒體爲止之UV硬化型塗布材 道之活性光線的射入，因此可以減輕從塗布頭 在射到記錄媒體前，被曝露在活性光線而硬化 以記錄高畫質的影像者。 又由於設置這樣的遮蔽構件，可以將活性 一步設置在靠近塗布頭，UV硬化型塗布材的 在射到後迅速曝露在從活性光線源所發出之活 此該墨滴係在射到記錄媒體後迅速硬化。爲此 墨滴成爲不會在記錄媒體上擴散到必要以上， 透者。 又由於利用遮蔽構件可以防止從活性光線 性光源射入到UV硬化型塗布材的墨滴的彈道 可以抑制存在於塗布頭的墨水吐出口之UV硬 的墨滴增黏，或者硬化，可以防止經過長期之 朝向下方延 的側面下端 自UV光源 從塗布頭吐 用記錄媒體 外線不會到 利用塗布頭 的墨滴的彈 吐出之墨滴 的疑慮，可 光線源更進 墨滴係可以 性光線，因 ，可以使該 而且不會滲 源發出的活 基點，因此 化型塗布材 該墨滴的吐 -6 - 201206716 出不良者。 (先前技術文獻） [專利文獻1]日本特開2008-272996號公報 [專利文獻2]日本特開2004-3 1 4304號公報 【發明內容】 0 (發明槪要） (發明所欲解決之課題） 直至目前，在用於噴墨塗布之UV硬化型塗布材之塗 布中，作爲考量硬化可否的狀態，舉例有囤積在塗布頭內 之吐出前階段、自塗布頭吐出至到達對象基板前之吐出中 階段（相當於在上述專利文獻2中之順著「彈道」移動的 階段）、及被吐出的UV硬化型塗布材到達對象基板後之 階段的3個階段。在前者的2個階段中，使UV硬化型塗 Q 布材不要硬化者爲佳，在最後的uv硬化型塗布材的液滴 到達基板之階段中，以立即硬化者爲佳。 然而，期望UV硬化型塗布材不要硬化方面，不只是 塗布頭內部與從塗布頭的吐出中。在塗布頭內部中，雖然 塡充UV硬化型塗布材，但是因爲藉由連續反覆塗布，隨 著時間經過，會造成逐漸在塗布頭內部混入氣泡的問題， 因此對於該問題的對應也要解決。 當一旦在塗布頭內部產生氣泡時，爲了吐出UV硬化 型塗布材，雖然打算在各噴嘴內利用壓電等擠出該UV硬 201206716 化型塗布材，但是形成只壓縮氣泡。在用以防止無法進行 UV硬化型塗布材的穩定吐出方面，必須從塗布頭內的氣 泡除去。又在完全消耗塗布頭內的UV硬化型塗布材之情 況，或是在由於段落更換等必須將塗布頭內更換成不同的 塗布材之情況，也都必須一邊不讓氣泡混入，一邊塡充塗 布材。 在除去已經混入的氣泡時，或是一邊抑制氣泡的混入 ，一邊對於塗布頭內塡充塗布材時，採用藉由使用噴嘴真 空吸引手段進行真空抽吸，從噴嘴吐出口予以抽吸的手法 〇 在該抽吸作業中，通常會使UV硬化型塗布材的一部 份飛散，而附著在噴嘴之真空吸引手段的內部壁面或真空 配管內。一方面，在塗布頭中，具備UV光源，其UV光 會使附著在該內部壁面或真空配管內的UV硬化型塗布材 硬化。再者，爲了防止噴嘴之真空吸引手段、塗布處理時 間的降低，當將其配置在靠近固定成爲塗布對象的薄膜等 之平台的位置時，在每次U V光源爲照射狀態下通過附近 ，而UV光會使附著在噴嘴之真空吸引手段的內部壁面或 真空配管內之UV硬化型塗布材硬化。因此，在噴嘴之真 空吸引手段的配管產生堵塞，發生對於UV硬化型塗布材 的塗布頭之抽吸不良。接著，導致對於塗布頭內之氣泡混 入’造成根據吐出不良的發生而使製造的製品品質降低之 問題。 本發明的目的係爲了解決該問題，其係提供一種不會 -8- 201206716 降低塗布處理時間，並且可以達到藉由從噴墨塗布頭 嘴孔確實射出（塗布）UV硬化型塗布材，提高對於 對象的塗布品質之噴墨塗布裝置及方法。 (用以解決課題之手段） 爲了達成上述目的，本發明係爲由：捲出滾筒狀 膜並予以搬送之上流側導引滾筒；吸附保持被捲出的 0 之吸附台；在吸附保持於吸附台之薄膜表面塗布液 UV硬化型塗布材之塗布頭；可以在薄膜的上方位置 XY軸的平面內移動塗布頭之支架構造體；可進行塗 的上下移動之Z軸驅動手段；及與塗布頭一體可 XYZ軸方向移動之紫外線光源構成的噴墨塗布裝置 特徵爲具備：位於搬送薄膜的範圍外側之位置，並具 移動到該位置之塗布頭下降而接觸之吸入口，從吸入 吸塗布頭的噴嘴之真空吸引手段；及從紫外線光源遮 Q 於真空吸引手段內部之紫外線光的射入之遮光手段， 構成爲可以選擇在真空吸引手段之紫外線光的遮蔽與 的解除。 又本發明係爲利用上流側導引滾筒捲出滾筒狀的 並予以搬送，利用吸附台吸附保持被捲出的薄膜，利 布頭在吸附保持於吸附台之薄膜表面塗布液狀的UV 型塗布材，藉由支架構造體可以在薄膜的上方位置且 軸的平面內移動塗布頭，藉由z軸驅動手段可以進行 頭的上下移動，紫外線光源係與塗布頭一體可以在 的噴 塗布201206716 VI. Description of the Invention: [Technical Field] The present invention relates to a material coating using a liquid-jet method for a smooth member, and more particularly to a stable ultraviolet curing (hereinafter, also referred to as UV hardening) effect. An inkjet coating device and method for coating a material. [Prior Art] In the ink jet method, it is a method of discharging a small amount of ink droplets with high precision from an inkjet coating head using a bubble or a piezoelectric element as a coating head. An apparatus for applying an ink droplet to a target member based on the high-precision discharge of the ink droplet is an inkjet coating device. In recent years, the device for achieving high-precision coating of ink has been attracting attention, and it is not limited to the printing of paper, and the possibility of application is explored in all industrial fields, and it has been put to practical use. In the nozzle vacuum suction means, it is proposed to cover the inside of the coating head by a coating means and to remove the bubble inside the coating head by the suction means to achieve a state in which the ink can be stably discharged. For example, refer to Patent Document 1). For the correspondence of the type of the ink having the UV hardening effect (the ink of the UV curable coating material, hereinafter referred to as the UV curable coating material), in order to prevent the ink from hardening before it is shot, and to be irradiated It is known that a coating head, a UV light source, and a cover plate covering each of the UV light sources that are attached to the mounting frame that moves in the main scanning direction are known (for example, 201206716, see Patent Document 2). The side of the cover is extended further than the underside of the coating head and disposed between the coating head and the UV source. A flange extending toward the ballistic is provided in the cover. According to this configuration, the ultraviolet rays are shielded by the side surface of the cover, whereby the ultraviolet rays do not reach the track of the ink droplets of the coating head and the UV-curable coating material, and the ultraviolet rays that are reflected are applied to the flange. Shade to make the reflection of the purple head and ballistics. Thereby, since the incident light of the UV-curable coating material path from the discharge to the recording medium can be reduced by the shielding member, it is possible to reduce the exposure to the active light from the coating head before it is incident on the recording medium. And hardened to record high-quality images. Moreover, since such a shielding member is provided, the activity can be set in a step closer to the coating head, and the UV-curable coating material is quickly exposed to the active light source after being incident, and the ink droplet is attached to the recording medium after being incident on the recording medium. Quickly harden. To this end, the ink droplets become not necessary to spread over the recording medium. Further, since the shield member can prevent the ballistics of the ink droplets which are incident from the linear light source of the active light to the UV-curable coating material, the UV hard ink droplets present in the ink discharge port of the coating head can be suppressed from sticking or hardening, and the passage can be prevented. The long side of the lower side of the lower side from the UV light source from the coating head spouting the recording medium outside the line does not go to the use of the ink droplets of the coating head to eject the ink droplets, the light source can be more ink droplets can be light, because It is possible to make the active base point which does not bleed out, and therefore the discharge of the ink droplets of the chemical-coated material is poor. (Prior Art Document) [Patent Document 1] JP-A-2008-272996 [Patent Document 2] JP-A-2004-3 1 4304 SUMMARY OF THE INVENTION [Inventive Summary] (Problems to be Solved by the Invention) In the application of the UV-curable coating material for inkjet coating, as a state in which the hardening can be considered, the discharge before the discharge in the coating head and the discharge from the coating head to the target substrate are exemplified. The intermediate stage (corresponding to the stage of moving along the "ballistics" in the above-mentioned Patent Document 2) and the three stages of the stage after the discharged UV-curable coating material reaches the target substrate. In the two stages of the former, it is preferable that the UV-curable coating material is not hardened, and in the stage where the droplets of the final uv-curable coating material reach the substrate, it is preferable to immediately harden. However, it is desirable that the UV-curable coating material does not harden, not only the inside of the coating head but also the discharge from the coating head. In the inside of the coating head, although the UV-curing coating material is filled, since it is continuously applied by repeated coating, the problem of gradually mixing bubbles inside the coating head occurs as time passes, and therefore the corresponding problem is also solved. When a bubble is generated inside the coating head, in order to discharge the UV-curable coating material, it is intended to extrude the UV hard 201206716-type coating material by piezoelectric or the like in each nozzle, but to form only compressed air bubbles. In order to prevent stable discharge of the UV curable coating material, it is necessary to remove it from the bubble in the coating head. In the case where the UV-curable coating material in the coating head is completely consumed, or in the case where it is necessary to replace the coating head with a different coating material due to the replacement of the paragraph, it is necessary to perform the coating while not allowing the bubbles to be mixed. material. When the air bubbles that have been mixed are removed, or when the coating material is filled in the coating head while suppressing the incorporation of the air bubbles, the vacuum suction is performed by using the nozzle vacuum suction means, and the suction is performed from the nozzle discharge port. In the suction operation, a part of the UV-curable coating material is usually scattered and adhered to the inner wall surface of the vacuum suction means of the nozzle or the vacuum piping. On the other hand, in the coating head, a UV light source is provided, and the UV light hardens the UV-curable coating material adhering to the inner wall surface or the vacuum piping. In addition, in order to prevent the vacuum suction means of the nozzle and the coating processing time from being lowered, when it is placed close to the stage of the film or the like to be coated, the UV light source passes through the vicinity in the irradiation state, and UV The light hardens the UV-curable coating material adhering to the inner wall surface of the vacuum suction means of the nozzle or the vacuum piping. Therefore, clogging occurs in the piping of the vacuum suction means of the nozzle, and suction failure of the coating head of the UV-curable coating material occurs. Then, there is a problem that the quality of the manufactured product is lowered due to the occurrence of the discharge failure in the bubble in the coating head. SUMMARY OF THE INVENTION An object of the present invention is to solve the problem by providing a coating treatment time which does not decrease from 8 to 201206716, and can be improved by actually ejecting (coating) a UV-curable coating material from an inkjet coating nozzle hole. An inkjet coating apparatus and method for coating quality of a subject. (Means for Solving the Problem) In order to achieve the above object, the present invention is characterized in that: the roll-like film is taken up and conveyed to the upstream side guide roller; the adsorption stage that adsorbs and holds the rolled-out 0; a coating head of a UV-curable coating material for a film surface coating liquid; a stent structure capable of moving a coating head in a plane of an XY axis at a position above the film; a Z-axis driving means capable of moving up and down of the coating; and a coating head An inkjet coating apparatus comprising an ultraviolet light source that is movable in the XYZ-axis direction is characterized in that it is provided at a position outside the range of the conveyed film, and the suction head that is moved to the position and lowered by the coating head is in contact with the suction port of the suction suction head. The vacuum suction means of the nozzle; and the light-shielding means for blocking the entrance of the ultraviolet light inside the vacuum suction means from the ultraviolet light source, and the shielding of the ultraviolet light by the vacuum suction means can be selected. Further, in the present invention, the upper side guide roller is taken up and transported in a roll shape, and the film which is taken up by the suction stage is sucked and held, and the liquid cloth is coated with a liquid type UV coating on the surface of the film which is adsorbed and held on the adsorption stage. The material can be moved by the stent structure in the upper position of the film and in the plane of the shaft, and the z-axis driving means can be used to move the head up and down, and the ultraviolet light source and the coating head can be sprayed on the coating cloth.
的薄 薄膜 狀的 且在 布頭 以在 ，其 有使 口抽 蔽對 並且 遮蔽 薄膜 用塗 硬化 XY 塗布 XYZ 201206716 軸方向移動之噴墨塗布方法，其特徵爲：真空吸引手段係 配置在搬送薄膜的範圍外側之位置，並藉由將移動到該位 置的塗布頭下降而使其與抽吸口接觸，從塗布頭的噴嘴進 行抽吸，遮光手段係從紫外線光源遮蔽對於真空吸引手段 內部之紫外線光的射入，並且可以選擇紫外線光的遮蔽與 遮蔽的解除。 (發明之效果） 根據本發明，可以防止附著在噴嘴之真空吸引手段內 部的UV硬化型塗布材之硬化，達到從噴嘴之UV硬化型 塗布材的穩定真空抽吸，提升塗布品質。 【實施方式】 (用以實施發明之形態） 以下針對本發明之實施形態使用圖面加以說明。 又，在以下所說明之實施形態中，就塗布對象的一例 而言’藉由在施予非矽系半導體材料（例如CIGS薄膜） 之太陽電池薄膜上利用噴墨方式的塗布頭塗布電極材或絕 緣材’進行電極或絕緣膜等的膜形成者。又CIGS薄膜係 爲由Cu (銅）、In (銦）、Ga (鎵）、Se (硒）構成之 半導體材料薄膜’ 「CIGS」係爲配列此等素材之第丨個 字母者。 在絕緣膜的膜形成中，將UV硬化樹脂的液體（UV 硬化型塗布材）作爲塗布材料塡充到塗布頭內，並吐出 -10- 201206716 其進行塗布。一般而言，UV硬化樹脂係爲單體或低聚體 ’利用光硬化開始劑與添加劑予以構成。當接受UV光的 照射時，根據光聚合反應，使該光硬化開始劑在短時間從 單體（液體）狀態轉換成聚合體（固體）狀態。 第1圖係爲顯示在根據本發明之噴墨塗布裝置及方法 的第1實施形態之槪略構成的立體圖。1爲太陽電池用層 疊薄膜（以下簡稱爲薄膜），2爲捲出側薄膜滾筒，3爲 Q 捲取側薄膜滾筒、4、5爲導引滾筒，6、7爲昇降導引滾 筒’ 8、9爲吸附桿，10爲吸附台，11爲捲出側軸馬軸， 12爲捲取側軸馬達，13、14爲薄膜按壓桿，15爲塗布頭 ，16爲捲出部，17爲塗布部，18爲捲取部，19爲拍攝照 相機’ 20爲UV光源，21爲真空吸引部，22爲UV光閘 ，23爲氣缸。 在同圖中，將順著薄膜1的長度方向（移動方向）的 X軸方向空間區分爲捲出部16、塗布部17、及捲取部18 〇 ，在捲出部16中，將利用捲出側軸馬達11予以旋轉驅動 之捲出側薄膜滾筒2或上流測導引滾筒4、昇降導引滾筒 6、吸附桿8依序配列設置在X軸方向，在捲取部18中 ’將下流側吸附桿9或昇降導引滾筒7、導引滾筒5、捲 取側薄膜滾筒3依序配列設置在X軸方向。又在塗布部 17中’設有吸附台10或塗布頭15、薄膜按壓桿13、14 。在吸附桿8、9或吸附台10中，雖然未圖示，但是將真 空泵作爲真空源，利用真空閥進行薄膜1的吸附固定或是 固定解除。 -11 - 201206716 材 〇 部 將 方 定 的 段 或 驅 15 的 〇 其 設 光 在 使 該 在捲出部16中，將在塗布部17成爲電極材或絕緣 的塗布對象之薄膜1呈滾筒狀捲繞在捲出側薄膜滾筒2 又該薄膜1係從該捲出側薄膜滾筒2被捲出通過塗布 17，在捲取部18被捲繞在捲取側薄膜滾筒3。其中， 薄膜1的長度方向（移動方向）爲X軸方向，其寬幅 向爲Y軸方向，與其面垂直的方向爲Z軸方向。 在塗布部1 7中，薄膜1係利用真空吸附被位置固 在吸附台10上。又設置複數個（在此爲4個）噴墨式 塗布頭15。各個塗布頭15係利用未圖示之Z軸驅動手 可以個別變更其高度。又塗布頭1 5係與拍攝照相機1 9 UV光源20 —體構成，並成爲可以利用未圖示的X軸 動手段在X軸方向移動。 又與拍攝照相機19或UV光源20 —體之塗布頭 係在此爲設置4個，但是即使是1個亦可。又4個以外 複數個亦可。其理由係爲了提升處理速度而設置複數個 在平台1 〇的外側中，對於每個塗布頭1 5設置抽吸 噴嘴內之真空吸引部21。又在各個真空吸引部21中， 置利用氣缸23可自由往返移動（滑動）之UV光閘22 該UV光閘22係成爲真空吸引部21的抽吸口之蓋狀者 在真空抽吸塗布頭15的噴嘴內時，利用氣缸23使UV 閘22從真空吸引部2 1的抽吸口分開而開放該抽吸口’ 不進行真空抽吸塗布頭15的噴嘴內時，利用氣缸23 UV光閘22移動而被覆真空吸引部21的抽吸口，關閉 抽吸口。 -12- 201206716 第2圖係爲顯示第1圖所示之第1實施形態的槪略構 成之上面圖。24爲X軸驅動手段，25爲Z軸驅動手段， 26爲Y軸驅動手段，27爲支架，28a、28b爲Y軸平台， 29爲真空泵，30爲真空閥，31爲加壓氣體源，32爲閥單 元，33爲真空配管，34爲配管，在與第1圖對應的部份 係附予同一符號而省略重複的說明。 在同圖中，4個塗布頭15係順著X軸方向，也就是 0 薄膜1的長度方向予以配列，在挾持此等塗布頭15的整 體配列，而且跨越薄膜1的狀態下，將2個Y軸平台28a 、28b相互平行地設置在Y軸方向。跨過此等Y軸平台 28a、28b間並與X軸平行地設置支架27。在該支架27之 其長度方向的側面安裝4個塗布頭15。支架27係利用根 據伺服馬達或線性馬達等未圖示的驅動手段，可以在Y 軸平台28a、28b上朝Y軸方向移動。藉此，此等Y軸平 台28a、28b與支架27係成爲塗布頭15在Y軸方向移動 之Y軸驅動手段26。 又，在各塗布頭15中，設置使其順著支架27朝X 軸方向移動之X軸驅動手段24、以及順著支架27之上述 側面朝上下方向（與紙面垂直之Z軸方向）之Z軸驅動 手段25。 如此一來，各塗布頭15係利用X軸驅動手段24與γ 軸驅動手段26在與薄膜1的面平行之X、Y軸方向移動 ，利用Ζ軸驅動手段25在與薄1的面垂直之Ζ軸方向移 動。 -13- 201206716 各真空吸引部21係連接真空配管33，此等真空配管 33係介由真空閥30與真空泵29連接。當使真空泵29動 作，並在該狀態下打開真空閥3 0時，利用各真空吸引部 2 1進行抽吸。 又在各氣缸23中連接配管34，此等配管34係介由 閥單元32與作爲氣缸驅動部之加壓氣體源31連接。通常 ’ UV光閘22係利用彈簧等以阻塞該真空吸引部2 1的抽 吸口之方式，位於真空吸引部21上。在抽吸塗布頭15的 噴嘴內部時’使加壓氣體源31動作的同時而且打開閥單 元32。藉此使氣缸23動作而移動UV光閘22與真空吸引 部21分開。再者，該真空吸引部21的抽吸口係予以開放 。與此同時’使真空泵29動作而打開真空閥30，利用真 空吸引部21進行抽吸。當該抽吸結束，關閉閥單元32停 止加壓氣體源31的動作時，也停止氣缸23的動作，利用 彈簧等的作用將UV光閘22移動到真空吸引部2 1上，關 閉真空吸引部21的抽吸口。 如以上所示’利用X軸驅動手段2 4或Y軸驅動手段 26在薄膜1上的X、Y軸方向移動噴墨式的塗布頭15, 並藉由從設置在該頭部15的噴嘴吐出電極材或絕緣材等 (以下，將此等統稱爲「塗布材」），使塗布材被塗布在 薄膜1上而形成電極或絕緣膜。 在該實施形態中，採用UV硬化型的塗布材，也就是 UV硬化型塗布材作爲塗布材者，其次，針對UV硬化型 的塗布材之處理加以說明。 -14- 201206716 在第1、2圖中’當利用塗布部17結束在薄膜1之特 定的塗布對象區域之塗布材的塗布時，從捲出側薄膜滾筒 2捲出薄膜1。又將該薄膜1捲繞在捲取側薄膜滾筒3, 利用塗布部17在連續不斷的薄膜1反覆進行塗布材的塗 布。以該薄膜1之下個塗布對象區域位於能夠利用塗布部 17進行塗布材的塗布之位置的方式，將薄膜1從捲出側 薄膜滾筒2側搬送到捲取側薄膜滾筒3側。此時，在捲出 0 部1 6中，從利用捲出側軸馬達1 1予以旋轉驅動之捲出側 薄膜滾筒2捲出的薄膜1係利用導引滾筒4與昇降導引滾 筒6加以支撐。昇降導引滾筒6係上昇到比吸附台1 〇的 吸附面更高的位置，又在捲出部18中，薄膜1係利用昇 降導引滾筒7與導引滾筒5予以支撐並捲繞到捲取側薄膜 滾筒3。此時，昇降導引滾筒7係上昇到比吸附台1 〇之 吸附面更高的位置。藉此，在塗布部17中，薄膜1係被 提起，在不與吸附桿8、9或吸附台10接觸狀態下於X Q 軸方向移動。 如此一來，在從捲出部16將薄膜1移送到捲取部18 時，利用昇降導引滾筒6、7提起薄膜1。薄膜1係因爲 在不接觸吸附台1 〇的狀態下被搬送，因此可以防止在薄 膜1內面造成擦傷。 如此一來，當在利用昇降導引滾筒6、7而不與吸附 桿8、9或吸附台10接觸的狀態下搬送薄膜1，並且使薄 膜1的下個塗布對象區域到達塗布部1 7時，結束薄膜1 的搬送。進行該塗布對象區域之塗布部17的X軸方向定 -15- 201206716 位（該定位係首先監視捲取側薄膜滾筒3的取捲量予以進 行），粗略進行位置調整。 此時，在捲取側軸馬達12產生制動力，使薄膜1之 捲取部1 8側成爲固定的狀態。與此同時，將捲出側軸馬 達11成爲在與薄膜1捲出的旋轉方向相反旋轉方向負荷 轉矩的狀態，並且形成對薄膜1施予一定張力的狀態。 藉此，即使結束薄膜1的搬送，該薄膜1係保持在於 其長度方向（也就是搬送其之X軸方向）產生張力的狀 態，而不會在薄膜1發生鬆弛的情況。在該狀態下，在塗 布部1 7中，利用吸附保持薄膜1下面的吸附桿8、9，使 薄膜1被吸附保持在吸附台10。 第3圖係爲擴大顯示在第1、2圖之1個塗布頭15的 部份之立體圖，35爲UV硬化型塗布材，36爲UV光，在 與第1、2圖對應的部份係附予同一符號而省略重複的說 明。 在同圖中，在塗布頭15的下面，設置250個左右朝 向薄膜1的噴嘴孔（未圖示）。在各噴嘴孔內利用壓電驅 動使塗布材3 5的液滴予以擠出並呈點狀射出到薄膜丨上 。在塗布頭15的前後（Y軸方向）中，設置UV光源20 ，從各個UV光源20的下面在薄膜丨上照射UV光36。 塗布頭1 5係與拍攝照相機丨9及紫外線的光源之UV 光源2 0 —起’形成能夠利用Z軸驅動手段2 5進行Z軸 方向（高度方向）的移動動作。可進行Z軸方向的移動動 作之構成手段整體係安裝在X軸驅動手段24。再者，在 -16- 201206716 構成共通的支架構造體之Y軸驅動手段26的支架27安 裝複數個X軸驅動手段24。在ΧΥ軸平面中’可以移動 全部的塗布頭15。藉此，如第2圖也已說明所示’藉由 將塗布頭15的噴嘴在ΧΥ軸平面內移動，再者進行Ζ軸 方向的移動動作，並且各自射出塗布材35’可以在薄膜1 的塗布面利用所有的圖案精密地塗布塗布材35。 其中，因爲當對於塗布頭15內部混入氣泡時，會使 0 塗布材料的射出塗布不佳，造成很大的問題。爲此，必須 極力避免對於塗布頭15內部之氣泡混入。就對於塗布頭 15內部有混入氣泡的可能性之現象而言，大致上有2種 現象。首先第1種爲由於塗布材料的消耗而在對於塗布頭 15重新塡充UV硬化型塗布材的情況。第2種係爲由於長 時間的連續塗布在塗布頭15內部產生微小氣泡的情況。 爲了防止對於該塗布頭15內部之氣泡混入，從噴嘴 側真空抽吸塗布頭15內爲有效的。爲了在短時間進行真 〇 空抽吸，各塗布頭15之配置也與相當的真空吸引部21之 配置配合，利用X軸驅動手段24、Υ軸驅動手段26 (第 2圖）將各個塗布頭15同時移動到使該噴嘴位於相當的 真空吸引部21之上部。其次，利用Ζ軸驅動手段25將各 個塗布頭15下降，使該噴嘴的前端進入真空吸引部21的 抽吸口內。在該狀態下，於真空吸引部21中從噴嘴的吐 出口同時進行各個塗布頭15的真空抽吸。 當利用塗布部17結束在薄膜1之特定對象區域的塗 布材35之塗布時，進行從捲出側薄膜滾筒2(第1、2圖 -17- 201206716 )的薄膜1捲出、及捲取側薄膜滾筒3(第1、2圖）的 薄膜1捲取，對於連續不斷的薄膜1而言，利用塗布頭 15，並藉由塗布部17反覆進行塗布動作。 在利用真空吸引部21進行從塗布頭15的噴嘴之塗布In the thin film form and in the cloth head, there is an inkjet coating method in which the masking pair is applied and the masking film is moved in the axial direction of the hardened XY coating XYZ 201206716, wherein the vacuum suction means is disposed on the conveying film. The position outside the range, and by sucking the coating head moved to the position to make contact with the suction port, and sucking from the nozzle of the coating head, the light shielding means shields the ultraviolet light inside the vacuum suction means from the ultraviolet light source The light is incident, and the shielding of the ultraviolet light and the release of the shadow can be selected. (Effect of the Invention) According to the present invention, it is possible to prevent the curing of the UV-curable coating material adhering to the inside of the vacuum suction means of the nozzle, and to achieve stable vacuum suction from the UV-curable coating material of the nozzle, thereby improving the coating quality. [Embodiment] (Embodiment for Carrying Out the Invention) Hereinafter, embodiments of the present invention will be described with reference to the drawings. Further, in the embodiment described below, an example of the application target is to apply an electrode material by an inkjet coating head on a solar cell film to which a non-antimony semiconductor material (for example, a CIGS film) is applied. The insulating material 'is formed by a film such as an electrode or an insulating film. Further, the CIGS film is a thin film of a semiconductor material composed of Cu (copper), In (indium), Ga (gallium), and Se (selenium), and "CIGS" is the first letter of the material. In the film formation of the insulating film, a liquid (UV curable coating material) of a UV curable resin is applied as a coating material into the coating head, and discharged to -10-201206716 for coating. In general, a UV curable resin is a monomer or oligomer, which is composed of a photocuring initiator and an additive. When irradiated with UV light, the photohardening starter is converted from a monomer (liquid) state to a polymer (solid) state in a short time according to photopolymerization. Fig. 1 is a perspective view showing a schematic configuration of a first embodiment of an inkjet coating apparatus and method according to the present invention. 1 is a laminated film for a solar cell (hereinafter simply referred to as a film), 2 is a roll-out side film roll, 3 is a Q take-up side film roll, 4, 5 are guide rolls, and 6, 7 are lift guide rolls '8, 9 is an adsorption rod, 10 is an adsorption stage, 11 is a roll-out side shaft, 12 is a take-up side shaft motor, 13 and 14 are film pressing rods, 15 is a coating head, 16 is a coiling portion, and 17 is a coating portion. 18 is a take-up portion, 19 is a photographing camera '20 is a UV light source, 21 is a vacuum suction portion, 22 is a UV shutter, and 23 is a cylinder. In the same figure, the space in the X-axis direction along the longitudinal direction (moving direction) of the film 1 is divided into the winding portion 16, the coating portion 17, and the winding portion 18, and in the winding portion 16, the volume is utilized. The take-up side film roll 2 or the upper flow guide roll 4, the lift guide roll 6, and the suction rod 8 which are rotationally driven by the output side shaft motor 11 are arranged in the X-axis direction in the same order, and will be downstream in the take-up portion 18. The side suction rod 9 or the elevation guide roller 7, the guide roller 5, and the take-up side film roll 3 are arranged in the X-axis direction in this order. Further, in the coating portion 17, a suction stage 10, a coating head 15, and film pressing levers 13, 14 are provided. In the adsorption rods 8, 9 or the adsorption stage 10, although not shown, the vacuum pump is used as a vacuum source, and the film 1 is suction-fixed or fixed by a vacuum valve. -11 - 201206716 The material section is provided with a predetermined section or a disk of the drive 15 in a roll-like roll in which the film 1 to be applied to the coating portion 17 as an electrode material or insulation is applied to the winding portion 16 The film roll 1 is wound around the take-up side film roll 2, and the film 1 is taken up from the roll-out side film roll 2 by the coating 17, and the take-up portion 18 is wound around the take-up side film roll 3. Here, the longitudinal direction (moving direction) of the film 1 is the X-axis direction, the width direction thereof is the Y-axis direction, and the direction perpendicular to the surface is the Z-axis direction. In the coating portion 17, the film 1 is fixed to the adsorption stage 10 by vacuum suction. Further, a plurality of (here, four) ink jet coating heads 15 are provided. Each of the coating heads 15 can be individually changed in height by a Z-axis driving hand (not shown). Further, the coating head 15 is integrally formed with the imaging camera 19 UV light source 20, and is movable in the X-axis direction by an X-axis means (not shown). Further, the number of coating heads of the photographing camera 19 or the UV light source 20 is four, but it may be one. It is also possible to use a plurality of other than four. The reason for this is to provide a plurality of vacuum suction portions 21 in the suction nozzles for each of the coating heads 15 in order to increase the processing speed. Further, in each of the vacuum suction portions 21, a UV shutter 22 that can freely reciprocate (slide) by the air cylinder 23 is provided. The UV shutter 22 is a cover of the suction port of the vacuum suction portion 21 in a vacuum suction coating head. When the inside of the nozzle of 15, the UV brake 22 is separated from the suction port of the vacuum suction portion 21 by the air cylinder 23, and the suction port is opened. When the nozzle of the vacuum suction coating head 15 is not performed, the UV shutter of the cylinder 23 is utilized. 22 is moved to cover the suction port of the vacuum suction portion 21, and the suction port is closed. -12-201206716 Fig. 2 is a top view showing the schematic configuration of the first embodiment shown in Fig. 1. 24 is the X-axis driving means, 25 is the Z-axis driving means, 26 is the Y-axis driving means, 27 is the bracket, 28a, 28b is the Y-axis platform, 29 is the vacuum pump, 30 is the vacuum valve, 31 is the pressurized gas source, 32 In the valve unit, reference numeral 33 denotes a vacuum piping, and reference numeral 34 denotes a piping. The same reference numerals are attached to the same portions as those in the first embodiment, and the overlapping description will be omitted. In the same figure, the four coating heads 15 are arranged along the X-axis direction, that is, the length direction of the 0 film 1, and the entire arrangement of the coating heads 15 is held, and in the state of crossing the film 1, two The Y-axis stages 28a, 28b are disposed in parallel with each other in the Y-axis direction. A bracket 27 is disposed across the Y-axis platforms 28a, 28b and parallel to the X-axis. Four coating heads 15 are attached to the side surface of the holder 27 in the longitudinal direction. The bracket 27 is movable in the Y-axis direction on the Y-axis stages 28a and 28b by a driving means (not shown) such as a servo motor or a linear motor. Thereby, the Y-axis stages 28a and 28b and the holder 27 are the Y-axis driving means 26 in which the coating head 15 moves in the Y-axis direction. Further, each of the coating heads 15 is provided with an X-axis driving means 24 that moves in the X-axis direction along the holder 27, and a Z along the side surface of the holder 27 in the vertical direction (Z-axis direction perpendicular to the paper surface). The shaft drive means 25. In this manner, each of the coating heads 15 is moved in the X and Y-axis directions parallel to the surface of the film 1 by the X-axis driving means 24 and the γ-axis driving means 26, and is perpendicular to the surface of the thin 1 by the z-axis driving means 25. Move in the direction of the x-axis. -13-201206716 Each of the vacuum suction portions 21 is connected to a vacuum pipe 33, and the vacuum pipes 33 are connected to the vacuum pump 29 via a vacuum valve 30. When the vacuum pump 29 is operated and the vacuum valve 30 is opened in this state, suction is performed by each of the vacuum suction portions 21. Further, a pipe 34 is connected to each of the cylinders 23, and these pipes 34 are connected to a pressurized gas source 31 as a cylinder drive unit via a valve unit 32. Usually, the 'UV shutter 22 is placed on the vacuum suction portion 21 by means of a spring or the like to block the suction opening of the vacuum suction portion 2 1 . When the inside of the nozzle of the coating head 15 is sucked, the pressurized gas source 31 is operated while the valve unit 32 is opened. Thereby, the cylinder 23 is operated to move the UV shutter 22 apart from the vacuum suction portion 21. Further, the suction port of the vacuum suction portion 21 is opened. At the same time, the vacuum pump 29 is operated to open the vacuum valve 30, and suction is performed by the vacuum suction unit 21. When the suction is completed and the valve unit 32 is stopped to stop the operation of the pressurized gas source 31, the operation of the cylinder 23 is also stopped, and the UV shutter 22 is moved to the vacuum suction portion 21 by the action of a spring or the like, and the vacuum suction portion is closed. 21 suction port. As described above, the ink jet type coating head 15 is moved in the X and Y axis directions on the film 1 by the X-axis driving means 24 or the Y-axis driving means 26, and is discharged from the nozzle provided in the head portion 15. An electrode material, an insulating material, or the like (hereinafter collectively referred to as "coating material") is applied to the film 1 to form an electrode or an insulating film. In this embodiment, a UV-curable coating material, that is, a UV-curable coating material is used as the coating material, and the treatment of the UV-curing coating material will be described. -14-201206716 In the first and second drawings, when the application of the coating material in the coating target region of the film 1 is completed by the application portion 17, the film 1 is taken up from the winding-out film roll 2. Further, the film 1 is wound around the take-up film roll 3, and the coating material is repeatedly applied to the continuous film 1 by the coating portion 17. The film 1 is conveyed from the side of the winding-out film roll 2 to the side of the take-up film roll 3 so that the coating target region of the film 1 is located at a position where the coating portion can be applied by the coating portion 17. At this time, in the unwinding portion 106, the film 1 unwound from the take-up side film roll 2 that is rotationally driven by the take-up side shaft motor 1 1 is supported by the guide roller 4 and the lift guide roller 6. . The lifting guide roller 6 is raised to a position higher than the suction surface of the suction table 1 , and in the winding portion 18, the film 1 is supported by the lifting guide roller 7 and the guiding roller 5 and wound up to the roll. The side film roll 3 is taken. At this time, the elevation guide roller 7 is raised to a position higher than the adsorption surface of the adsorption stage 1 。. Thereby, in the coating unit 17, the film 1 is lifted up, and is moved in the X Q axis direction without being in contact with the adsorption bars 8 and 9 or the adsorption stage 10. In this manner, when the film 1 is transferred from the take-up portion 16 to the take-up portion 18, the film 1 is lifted by the lift guide rollers 6, 7. Since the film 1 is conveyed without being in contact with the suction table 1 , it is possible to prevent scratches on the inner surface of the film 1 . In this manner, when the film 1 is conveyed in a state where the lifting guide rolls 6, 7 are not in contact with the adsorption rods 8, 9 or the adsorption stage 10, and the next application target area of the film 1 reaches the coating portion 17 The film 1 is conveyed. The X-axis direction of the application portion 17 in the application target region is set to -15 - 201206716 (this positioning system first monitors the take-up amount of the take-up side film roll 3), and the position is roughly adjusted. At this time, a braking force is generated in the winding side shaft motor 12, and the winding portion 18 side of the film 1 is in a fixed state. At the same time, the unwinding side shaft motor 11 is in a state in which the load torque is reversed in the direction of rotation of the film 1 and the film 1 is subjected to a certain tension. Thereby, even if the conveyance of the film 1 is completed, the film 1 maintains a state in which tension occurs in the longitudinal direction (i.e., the X-axis direction in which it is conveyed), and the film 1 does not become slack. In this state, the film 1 is adsorbed and held by the adsorption stage 10 by the adsorption rods 8 and 9 on the lower surface of the adsorption holding film 1 in the coating portion 17. Fig. 3 is a perspective view showing a portion of the coating head 15 shown in Figs. 1 and 2, 35 is a UV-curable coating material, 36 is UV light, and the portions corresponding to the first and second figures are The same symbols are attached and overlapping descriptions are omitted. In the same figure, 250 nozzle holes (not shown) facing the film 1 are provided on the lower surface of the coating head 15. The droplets of the coating material 35 were extruded by piezoelectric driving in each nozzle hole and ejected in a dot shape onto the film stack. In the front and rear (Y-axis direction) of the coating head 15, a UV light source 20 is provided, and UV light 36 is irradiated onto the film stack from the lower surface of each UV light source 20. The coating head 15 is formed so as to be movable in the Z-axis direction (height direction) by the Z-axis driving means 25 together with the UV light source 20 that photographs the camera 丨9 and the ultraviolet light source. The constituent means for performing the movement operation in the Z-axis direction is integrally attached to the X-axis driving means 24. Further, a plurality of X-axis driving means 24 are mounted on the holder 27 of the Y-axis driving means 26 constituting the common bracket structure in -16 to 201206716. All of the coating heads 15 can be moved in the plane of the yaw axis. Therefore, as shown in FIG. 2, the movement of the nozzle of the coating head 15 in the plane of the yaw axis is further performed, and the movement of the coating material 35' can be performed on the film 1 again. The coated surface is precisely coated with the coating material 35 using all the patterns. Among them, when bubbles are mixed into the inside of the coating head 15, the coating of the coating material of 0 is poor, which causes a big problem. For this reason, it is necessary to avoid the incorporation of air bubbles inside the coating head 15 as much as possible. There are roughly two phenomena in the phenomenon that there is a possibility that air bubbles are mixed inside the coating head 15. First, the first type is a case where the UV-curable coating material is refilled with the coating head 15 due to the consumption of the coating material. The second type is a case where fine bubbles are generated inside the coating head 15 due to continuous application for a long period of time. In order to prevent the incorporation of air bubbles inside the coating head 15, it is effective to evacuate the inside of the coating head 15 from the nozzle side. In order to perform the true hollow suction in a short time, the arrangement of the respective coating heads 15 is also matched with the arrangement of the corresponding vacuum suction portions 21, and the respective coating heads are used by the X-axis driving means 24 and the x-axis driving means 26 (Fig. 2). 15 is simultaneously moved to position the nozzle above the corresponding vacuum suction portion 21. Next, each of the coating heads 15 is lowered by the spindle driving means 25 so that the tip end of the nozzle enters the suction port of the vacuum suction portion 21. In this state, vacuum suction of each of the coating heads 15 is simultaneously performed from the discharge port of the nozzle in the vacuum suction portion 21. When the application of the coating material 35 in the specific target region of the film 1 is completed by the application portion 17, the film 1 is unwound from the winding-out film roll 2 (1, 2, -17 to 201206716), and the winding side is taken up. The film 1 of the film roll 3 (Figs. 1 and 2) is taken up, and for the continuous film 1, the coating head 15 is used, and the coating operation is repeated by the coating portion 17. Coating from the nozzle of the coating head 15 by the vacuum suction portion 21
頭15的真空抽吸之情況下’會造成塗布頭15內部之UV 硬化型塗布材的一部份飛散的情況，在真空吸引部2 1的 內壁面或是真空配管3 3的內面慢慢使u V硬化型塗布材 的附著物變多。一方面’在通常的塗布後，因爲在塗布頭 15的旁邊從UV光源20照射UV光36，在該狀態中，使 附著在真空吸引部2 1內的UV硬化型塗布材開始硬化。 爲此’會發生阻塞真空配管33等真空抽吸的通路之問題 〇 就該對策而言，雖然過去曾提出將真空吸引部設置在 遠離UV光源的位置之手法’但是因爲耗費很多塗布頭之 到達真空吸引部的移動時間，導致處理節奏低下之另外的 問題。又，雖然也提出不是真空抽吸，而是在塗布頭的材 料供給系統追加加壓系統之加壓塡充法作爲其他的提案， 但是在此情況必須要有多餘的空間，而且因爲會發生根據 更換閥門的壓力變動’對於要求精密度的射出狀態產生不 良影響而難以達到高品質的塗布。 爲了解決上述的問題點，該第1實施形態係以防止由 於塗布材3 5的硬化造成之真空抽吸機能減低爲目的，在 真空吸引部21附加UV光閘22者。 換Η之’在第3圖中，被搬送的薄膜1雖然利用吸附 -18- 201206716 台ι〇予以定位固定，但是在吸附台i〇的附近’而且是與 搬送方向呈直角方向的外側位置設置真空吸引部21。在 真空吸引部21的上面中，經由與真空泵29連結之真空配 管33真空抽吸薄膜1。利用光閘驅動用的氣缸23，在該 可開放的真空吸引部21的上面，且從比真空吸引部21更 爲外側朝向與薄膜1的搬送方向呈直角方向予以驅動而使 UV光閘22可以滑行移動。其中，雖然是以氣缸作爲UV 0 光閘22的驅動源，但是也可以形成根據其他的馬達或螺 線管等直線運動之移動。 第4圖係爲顯示第1圖中具有真空吸引部21的UV 遮光機能之噴墨塗布的控制部之構成的方塊圖，24hx爲 X軸驅動器，24hy爲Y軸驅動器，24hz爲Z軸驅動器， 37爲控制單元，37a爲微電腦，37b爲外部介面，37c爲 塗布頭控制器，37d爲影像處理控制器，37e爲馬達控制 器，37f爲資料通訊匯流排，38爲USB記億體，39爲硬 Q 碟，40爲螢幕，41爲鍵盤，42爲穩壓器。 在同圖中，控制單元37係由微電腦37a、介由資料 通訊匯流排37f與其連接之外部介面37b、塗布頭控制器 37c、影像處理控制器37d、及馬達控制器37e構成。該 控制單元3 7的各構成品係以微電腦3 7a的控制爲根基予 以控制。又作爲微電腦3 7a的外部記億體之USB記憶體 38或硬碟39、作爲資料輸出部之螢幕40、作爲操作部之 鍵盤41係與外部介面37b連接。 又，外部介面37b係連接氣缸23等氣體驅動機器、 201206716 捲出側馬達1 1或捲取側馬達1 2 '其他滾筒用馬達、及微 電腦3 7a，以微電腦3 7a的控制爲根基驅動控制此等，並 且連接在利用吸附桿8、9或吸附台10真空吸附薄膜1時 之成爲真空源的真空泵29或進行之後的切換之真空閥部 3 0，以微電腦3 7a的控制爲根基，驅動控制此等。又對於 加壓氣體源31或閥單元32的開/關，穩壓器42、UV光 源20照射的開/關，同樣也是以微電腦37a的控制爲根基 ，控制此等。 以微電腦3 7a的控制爲根基，塗布頭控制器3 7c係控 制從塗布頭15的各噴嘴射出口之塗布材35 (第3圖）吐 出有無或時間點。 影像處理控制器37d係爲以微電腦37a的控制爲根基 ’拍攝施予在薄膜1之分割或定位標記並利用影像處理算 出拍攝照相機1 9的視野內位置者。 馬達控制器3 7e係以微電腦3 7a的控制爲根基，驅動 控制已安裝塗布頭15之驅動X軸驅動手段24 (第2圖） 的X軸驅動馬達之X軸驅動器24hx、或是驅動Z軸驅動 手段25 (第2圖）的Z軸驅動馬達之Z軸驅動器2 5 hz。 又驅動控制用以驅動Y軸驅動手段26的線性馬達或是驅 動馬達之Y軸驅動器26hy。 與UV光源20 —體移動之塗布頭15的XY軸方向的 移動控制，介由馬達控制器3 7e利用微電腦3 7a予以進行 ’掌握UV光源20之現在位置及下個移動處位置。再者 ’從動作程序的管理，在微電腦37a中也可以掌握UV光 -20- 201206716 源20的照射、非照射之時間點。 又在該實施形態中，滑動的UV光閘22及成爲其驅 動源之光閘驅動用的氣缸23雖然在每個塗布頭15個別設 置，但是在複數個塗布頭15共同設置一組UV光閘22及 光閘驅動用的氣缸23亦可。 •根據利用真空吸引部21對於塗布頭15之真空抽吸爲 稀少、或是頻繁之實行頻率，使得動作的方法有所不同。 0 在利用真空吸引部21稀少性地真空抽吸塗布頭1 5之使用 方法中，通常是UV光閘22爲覆蓋真空吸引部21的上部 而對於真空吸引部21的內部予以遮光，並且只在必要的 時間點打開UV光閘22使真空吸引部2 1的抽吸口呈開放 狀態。以下，利用第5圖所示之流程圖說明該真空抽吸的 動作之一具體例。 在全部的塗布區域之塗布未結束的情況（步驟110、 1 2 0 )，必須打開UV光閘2 2進行塗布頭1 5的真空抽吸 Q 之時間點有3種類。第1爲各個UV硬化型塗布材等之對 於塗布頭15的材料塡充時（步驟130之“Y”）。第2爲在 相同的位置已停止之時間成爲設定的時間以上時（步驟 140之“Y”）。第3爲利用手動動作真空抽吸塗布頭15時 (步驟1 5 0之“ Y”）。在非此等的任一個時點時，重覆步 驟 110、120 的 “N”、130 的 “N”、140 的 “N”、及 150 的 “N”之動作進行UV硬化型塗布材的塗布，而且不進行塗 布頭15的真空抽吸。 在該3種的任一個條件爲成立的情況下，首先，移動 -21 - 201206716 UV光閘22開放真空吸引部21的抽吸口（步驟160 ) ’ 在真空吸引部2 1的抽吸口上方呈現沒有任何光學性遮蔽 物的狀態。其次，根據X軸驅動手段24或Y軸驅動手段 26 (第2圖）將塗布頭15移動到真空吸引部21的上方位 置，在確認真空吸引部2 1的抽吸口之開放完結之後’根 據Z軸驅動手段25 (第2圖）下降塗布頭15(步驟170 )。再者其次，驅動真空泵29(第2圖），將與該真空 吸引部21上面的抽吸口推壓之塗布頭15從其噴嘴的吐出 口進行真空抽吸，進行塗布頭15內的脫泡（步驟180) 。當結束脫泡時，根據Z軸驅動手段25(第2圖）上昇 塗布頭1 5，並將塗布頭1 5朝向吸附台1 〇側之下個動作 目標位置移動（步驟1 90 )。最後，在確認塗布頭15的 上昇之後’以利用UV光閘22關閉真空吸引部21的抽吸 口而使UV光3 6不會照射到真空吸引部2 1內部之方式， 光學性遮蔽真空吸引部2 1的抽吸口（步驟2 0 0 )。 一方面’在利用真空吸引部2 1頻繁性地真空抽吸塗 布頭15的使用方法中，在與uv光源20 —體的塗布頭15 從真空吸引部21進入到一定範圍內l的話，滑行移動 UV光閘22關閉真空吸引部21的抽吸口，對於真空吸引 部21內部進行光學性遮光。反之，在塗布頭15從真空吸 引部2 1成爲一定範圍外的話，使uv光閘22進行打開動 作。雖然第5圖之步驟16〇與步驟2〇〇之uv光閘22的 開/關時間點有所不同，但是其他個別的動作係與第5圖 相同。 -22- 201206716 第6圖係爲顯示根據本發明之噴墨塗布裝置及方法的 第2實施形態之要部槪略構成的立體圖。43爲真空吸引 部’ 44真空吸引部驅動用之氣缸，45爲UV遮光板，與 第3圖對應的部份係附予相同符號而省略重複的說明。 該第2實施形態亦同，其係爲防止爲了除去塗布頭 15內部的氣泡，藉由塗布頭15內部的抽吸而使飛散到真 空吸引部43之UV硬化型塗布材曝露在UV光者。 Q 第2實施形態係如第6圖所示，真空吸引部43係利 用真空吸引部驅動用的氣缸44而成爲可以在薄膜1的寬 幅方向，也就是Y軸方向往返移動（滑動）。又，從吸 附台10在Y軸方向隔著特定間隔使UV遮光板45爲設置 在固定的位置者。除了此等之外的構成係與第3圖所示之 第1實施形態相同。 在該構成中，真空吸引部43係在通常不被使用時， 位於UV遮光板45的下側，其抽吸口呈現利用UV遮光板 〇 45予以阻塞的狀態。在塗布頭1 5的抽吸必須進行之情況 ，利用氣缸44將真空吸引部43從UV遮光板45下側的 位置滑動而朝薄腠1側推出。藉此，使真空吸引部43上 面的抽吸口成爲開放狀態，藉由將塗布頭1 5往該真空吸 引部43移動而推壓到該抽吸□，可以進行塗布頭15內的 真空抽吸。當結束該抽吸時，利用吸引部驅動用的氣缸 44將真空吸引部43朝向與吸附台1〇分離的方向滑動而 被拉進，並使其進入到UV遮光板52a的下側。藉此，真 空吸引部43係可以呈現來自UV光36的遮光狀態。 -23- 201206716 如此一來’在該第2實施形態中，也與第1實施形 相同，可以抑制根據對真空吸引部43的UV光3 6照射 造成之抽吸到真空吸引部43內之UV硬化型塗布材的 化’使塗布頭1 5可以在良好的狀態下進行對於薄膜1 該材料的塗布。 其中，利用真空吸引部驅動用的氣缸44，真空吸 部43係爲可以在UV遮光板52a下側之第1位置、及 此更靠近吸附台10側之可進行塗布頭15的真空抽吸之 2位置之間往返移動者。再者，因應必要（例如根據操 者之操作）也可以使其從UV遮光板45下側的位置朝 與吸附台10更爲分離之第3位置移動。在該第3位置 ，真空吸引部43係與UV遮光板45分離，真空吸引部 的抽吸口係呈現開放的狀態。但是，因爲充分離開與塗 頭15 —起設置的UV光源20，因此不會從該UV光源 使UV光36照射到真空吸引部43的抽吸口。如此一來 藉由將真空吸引部43位於在第3位置，使UV光36的 光爲少，在塗布作業中的工作狀態下可以進行真空吸引 2 1的清潔作業，可以實現不會降低製造節奏進行穩定 塗布。 如以上所示，在上述各實施形態中，除去塗布UV 化型塗布材之塗布頭15內部的氣泡方面，雖然是利用 空吸引部21抽吸噴嘴，但是在不抽吸時藉由使用遮光 段，使根據過去的抽吸而飛散的uv硬化型塗布材曝露 UV光3 6的情況變得極少，而使真空吸引部2 1內不會 態 所 硬 之 引 比 第 作 向 中 43 布 20 > 受 部 的 硬 真 手 在 被 -24- 201206716 阻塞，可以維持穩定的塗布動作。 【圖式簡單說明】 第1圖係爲顯示根據本發明之噴墨塗布裝置及方法的 第1實施形態之槪略構成的立體圖。 第2圖係爲顯示第1圖所示之第1實施形態的槪略構 成之上面圖。 第3圖係爲擴大顯不在第1、2圖之1個塗布頭的部 份之立體圖。 第4圖係爲顯示第1圖中具有真空吸引部之UV遮光 機能的噴墨塗布之控制部的構成之方塊圖。 第5圖係爲第3圖所示之真空吸引部的真空抽吸動作 之一具體例的流程圖。 第6圖係爲顯示根據本發明之噴墨塗布裝置及方法的 第2實施形態之要部槪略構成的立體圖。 【主要元件符號說明】 1:太陽電池用層疊薄膜（薄膜） 2 :捲出側薄膜滾筒 3 :捲取側薄膜滾筒 4、5 :導引滾筒 6、7:昇降導引滾筒 8、9 :吸附桿 1 〇 :吸附台 -25- 201206716 1 1 :捲出側軸馬達 1 2 :捲取側軸馬達 13、14 :薄膜按壓桿 1 5 :塗布頭 16 :捲出部 1 7 :塗布部 1 8 :捲取部 1 9 :拍攝照相機 20 : UV光源 21 :真空吸引部 22 : UV光閥 23 :氣缸 24 : X軸驅動手段 25 : Z軸驅動手段 26: Y軸驅動手段 27 :支架 28a、28b: Y軸平台 29 :真空泵 3 0 :真空閥 3 1 :加壓氣體源 32 :閥單元 33 :真空配管 3 4 :配管 35 : UV硬化型塗布材 201206716 3 6 ·· UV 光 43 :真空吸引部 44 :真空吸引部驅動用之氣缸 45 : UV遮光板In the case of vacuum suction of the head 15, the portion of the UV-curable coating material inside the coating head 15 may be scattered, and the inner wall surface of the vacuum suction portion 21 or the inner surface of the vacuum pipe 3 3 is slowly formed. The deposit of the u V hard coater is increased. On the other hand, after the usual coating, since the UV light 36 is irradiated from the UV light source 20 beside the coating head 15, in this state, the UV-curable coating material adhering to the vacuum suction portion 21 is hardened. For this reason, there is a problem that the vacuum suction passage such as the vacuum piping 33 is blocked. In view of this countermeasure, although the method of setting the vacuum suction portion at a position away from the UV light source has been proposed in the past, it is because a lot of coating heads are reached. The movement time of the vacuum suction portion causes an additional problem of low processing rhythm. Further, although it is proposed that the pressurization charging method of adding a pressurizing system to the material supply system of the coating head is not a vacuum suction, other proposals are made, but in this case, there is a need for extra space, and since The pressure variation of the replacement valve 'has an adverse effect on the injection state requiring precision, and it is difficult to achieve high-quality coating. In order to solve the above-mentioned problems, the first embodiment is intended to prevent the vacuum suction function of the coating material 35 from being reduced, and the UV shutter 22 is attached to the vacuum suction unit 21. In the third figure, the film 1 to be conveyed is positioned and fixed by the adsorption -18-201206716, but it is placed in the vicinity of the adsorption stage i〇 and is positioned at the outer side in the direction perpendicular to the conveyance direction. Vacuum suction unit 21. The film 1 is vacuum-sucked through the vacuum piping 33 connected to the vacuum pump 29 on the upper surface of the vacuum suction unit 21. The air cylinder 23 for driving the shutter is driven on the upper surface of the openable vacuum suction portion 21 from the outer side of the vacuum suction portion 21 in a direction perpendicular to the direction in which the film 1 is conveyed, so that the UV shutter 22 can be Glide movement. Here, although the cylinder is used as the driving source of the UV 0 shutter 22, the movement of the linear motion according to another motor or a solenoid may be formed. Fig. 4 is a block diagram showing the configuration of a control unit for inkjet coating of a UV shading function having a vacuum suction portion 21 in Fig. 1, 24hx is an X-axis driver, 24hy is a Y-axis driver, and 24hz is a Z-axis driver. 37 is the control unit, 37a is the microcomputer, 37b is the external interface, 37c is the coating head controller, 37d is the image processing controller, 37e is the motor controller, 37f is the data communication bus, 38 is the USB recording body, 39 is Hard Q disc, 40 for the screen, 41 for the keyboard, 42 for the regulator. In the same figure, the control unit 37 is constituted by a microcomputer 37a, an external interface 37b connected thereto via a data communication bus 37f, a coating head controller 37c, an image processing controller 37d, and a motor controller 37e. Each component of the control unit 37 is controlled based on the control of the microcomputer 37a. Further, as the external memory of the microcomputer 3 7a, the USB memory 38 or the hard disk 39, the screen 40 as the data output unit, and the keyboard 41 as the operation unit are connected to the external interface 37b. Further, the external interface 37b is connected to a gas driving device such as the air cylinder 23, a 201206716 winding-out motor 1 1 or a winding-side motor 1 2 'the other roller motor, and the microcomputer 37a, and is driven by the control of the microcomputer 37a. And the vacuum pump 29 which is a vacuum source when the vacuum adsorption film 1 is vacuum-adsorbed by the adsorption rods 8, 9 or the adsorption stage 10, or the vacuum valve unit 30 which is switched after, is controlled by the control of the microcomputer 37a, and is driven and controlled. This is the case. Further, the on/off of the irradiation of the pressurized gas source 31 or the valve unit 32 by the regulator 42 and the UV light source 20 is also controlled based on the control of the microcomputer 37a. Based on the control of the microcomputer 37a, the coating head controller 37c controls the presence or absence or the time of discharge from the coating material 35 (Fig. 3) of each nozzle discharge port of the coating head 15. The image processing controller 37d photographs the position in the field of view of the photographing camera 19 by photographing the division or positioning mark applied to the film 1 based on the control of the microcomputer 37a. The motor controller 3 7e is based on the control of the microcomputer 37a, and drives and controls the X-axis driver 24hx of the X-axis drive motor of the drive X-axis drive means 24 (Fig. 2) on which the coating head 15 is mounted, or drives the Z-axis. The drive mechanism 25 (Fig. 2) Z-axis drive motor Z-axis drive 2 5 hz. Further, a linear motor for driving the Y-axis driving means 26 or a Y-axis driver 26hy for driving the motor is driven. The movement control of the coating head 15 that moves integrally with the UV light source 20 in the XY-axis direction is performed by the motor controller 37a using the microcomputer 37a to grasp the current position and the next movement position of the UV light source 20. Furthermore, from the management of the operation program, the time of irradiation and non-irradiation of the source 20 of the UV light -20-201206716 can be grasped in the microcomputer 37a. Further, in this embodiment, the sliding UV shutter 22 and the cylinder 23 for driving the shutter as the driving source are separately provided in each of the coating heads 15, but a plurality of UV shutters are collectively provided in the plurality of coating heads 15. 22 and the cylinder 23 for driving the shutter can also be used. • The vacuum suction of the coating head 15 by the vacuum suction unit 21 is rare or frequently performed, so that the method of operation differs. In the method of using the vacuum suction portion 21 to evacuate the coating head 15 by the vacuum suction portion 21, the UV shutter 22 is usually covered with the upper portion of the vacuum suction portion 21 to shield the inside of the vacuum suction portion 21, and only When necessary, the UV shutter 22 is opened to open the suction port of the vacuum suction portion 2 1 . Hereinafter, a specific example of the operation of the vacuum suction will be described using a flowchart shown in Fig. 5. In the case where the coating of all the application regions is not completed (steps 110 and 120), there are three types of time points at which the UV shutter 2 must be opened to perform vacuum suction Q of the coating head 15. The first step is when the material of the coating head 15 is filled for each of the UV curable coating materials ("Y" in the step 130). The second is when the time at which the same position has been stopped is equal to or longer than the set time ("Y" in step 140). The third is to vacuum the coating head 15 by manual operation ("Y" in step 150). When it is not at any of these points, the operation of the UV curing type coating material is performed by repeating the operations of "N" of 130 and 120, "N" of 130, "N" of 140, and "N" of 150. Moreover, vacuum suction of the coating head 15 is not performed. In the case where any of the three conditions is satisfied, first, the -21,067,067 UV shutter 22 is moved to open the suction port of the vacuum suction portion 21 (step 160)' above the suction port of the vacuum suction portion 2 1 Presents a state without any optical shielding. Next, the coating head 15 is moved to the upper position of the vacuum suction portion 21 by the X-axis driving means 24 or the Y-axis driving means 26 (second drawing), and after confirming the opening of the suction opening of the vacuum suction portion 21, "according to The Z-axis driving means 25 (Fig. 2) lowers the coating head 15 (step 170). Further, the vacuum pump 29 (second drawing) is driven, and the coating head 15 that is pressed against the suction port on the upper surface of the vacuum suction portion 21 is vacuum-sucked from the discharge port of the nozzle to perform defoaming in the coating head 15. (Step 180). When the defoaming is completed, the coating head 15 is raised in accordance with the Z-axis driving means 25 (Fig. 2), and the coating head 15 is moved toward the lower movement target position on the side of the suction stage 1 (step 1 90). Finally, after confirming the rise of the coating head 15, the optical suction vacuum attraction is optically shielded so that the UV light 36 does not illuminate the inside of the vacuum suction portion 21 by closing the suction port of the vacuum suction portion 21 by the UV shutter 22. The suction port of the portion 2 1 (step 2 0 0 ). On the other hand, in the method of using the vacuum suction portion 21 to evacuate the coating head 15 frequently, in the case where the coating head 15 which is the body of the uv light source 20 enters a certain range from the vacuum suction portion 21, the sliding movement is performed. The UV shutter 22 closes the suction port of the vacuum suction portion 21, and optically blocks the inside of the vacuum suction portion 21. On the other hand, when the coating head 15 is out of the vacuum suction portion 21 to a certain extent, the uv shutter 22 is opened. Although step 16 of Fig. 5 differs from the on/off time of the uv shutter 22 of step 2, the other individual actions are the same as those of Fig. 5. -22-201206716 Fig. 6 is a perspective view showing a schematic configuration of a main part of a second embodiment of the inkjet coating apparatus and method according to the present invention. Reference numeral 43 denotes a vacuum suction portion 44, and a cylinder for driving the vacuum suction portion, and 45 denotes a UV light shielding plate. Parts corresponding to those in Fig. 3 are denoted by the same reference numerals, and overlapping description will be omitted. In the second embodiment, the UV curable coating material scattered to the vacuum suction portion 43 is exposed to UV light by suction inside the coating head 15 in order to remove air bubbles inside the coating head 15. In the second embodiment, as shown in Fig. 6, the vacuum suction portion 43 is reciprocally movable (sliding) in the width direction of the film 1, that is, in the Y-axis direction, by the cylinder 44 for driving the vacuum suction portion. Further, the UV visor 45 is placed at a fixed position from the suction stage 10 at a predetermined interval in the Y-axis direction. The configuration other than these is the same as that of the first embodiment shown in Fig. 3. In this configuration, the vacuum suction portion 43 is located on the lower side of the UV shutter 45 when it is not normally used, and the suction port is in a state of being blocked by the UV shutter 45. When the suction of the coating head 15 is necessary, the vacuum suction portion 43 is slid from the lower side of the UV visor 45 by the air cylinder 44, and is pushed out toward the thin raft 1 side. Thereby, the suction port on the upper surface of the vacuum suction portion 43 is opened, and the vacuum suction in the coating head 15 can be performed by moving the coating head 15 to the vacuum suction portion 43 and pushing it to the suction port □. . When the suction is completed, the vacuum suction portion 43 is slid in the direction in which it is separated from the suction table 1A by the air cylinder 44 for driving the suction portion, and is pulled in and placed on the lower side of the UV shutter 52a. Thereby, the vacuum suction portion 43 can exhibit a light blocking state from the UV light 36. In the second embodiment, as in the first embodiment, it is possible to suppress the UV suction into the vacuum suction portion 43 by the irradiation of the UV light 36 to the vacuum suction portion 43. The formation of the hardened coating material allows the coating head 15 to perform coating of the material for the film 1 in a good condition. In the cylinder 44 for driving the vacuum suction portion, the vacuum suction portion 43 can be vacuum-sucked by the coating head 15 at the first position on the lower side of the UV shutter 52a and closer to the suction stage 10 side. 2 people move back and forth between positions. Further, it is also necessary to move from the position on the lower side of the UV visor 45 to the third position which is more separated from the adsorption stage 10, as necessary (e.g., according to the operation of the operator). At the third position, the vacuum suction portion 43 is separated from the UV shutter 45, and the suction port of the vacuum suction portion is opened. However, since the UV light source 20 provided with the coating head 15 is sufficiently separated, the UV light 36 is not irradiated from the UV light source to the suction port of the vacuum suction portion 43. In this way, by placing the vacuum suction portion 43 at the third position, the light of the UV light 36 is made small, and the vacuum suction 21 can be cleaned in the working state during the coating operation, so that the manufacturing rhythm can be reduced. Stable coating is carried out. As described above, in the above-described respective embodiments, the bubble is sucked by the empty suction portion 21 in terms of removing the air bubbles inside the coating head 15 to which the UV-type coating material is applied, but the light-shielding portion is used when not sucking. In the case where the UV-curable coating material scattered according to the past suction is exposed to the UV light 3 6 is extremely small, and the vacuum suction portion 2 1 is not harder than the first one. The hard hand of the department is blocked by -24-201206716, which can maintain a stable coating action. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing a schematic configuration of a first embodiment of an inkjet coating apparatus and method according to the present invention. Fig. 2 is a top view showing a schematic configuration of the first embodiment shown in Fig. 1. Fig. 3 is a perspective view showing an enlarged portion of a coating head which is not shown in Figs. 1 and 2. Fig. 4 is a block diagram showing the configuration of a control unit for inkjet coating of a UV light-shielding function having a vacuum suction portion in Fig. 1. Fig. 5 is a flow chart showing a specific example of the vacuum suction operation of the vacuum suction portion shown in Fig. 3. Fig. 6 is a perspective view showing a schematic configuration of a main part of a second embodiment of the ink jet coating apparatus and method according to the present invention. [Description of main component symbols] 1: Laminated film (film) for solar cells 2: Winding-side film roll 3: Winding side film roll 4, 5: Guide rolls 6, 7: Lifting guide rolls 8, 9: Adsorption Rod 1 〇: adsorption stage-25-201206716 1 1 : winding side shaft motor 1 2 : winding side shaft motor 13, 14 : film pressing lever 1 5 : coating head 16 : winding portion 1 7 : coating portion 1 8 : Winding unit 1 9 : Photographing camera 20 : UV light source 21 : Vacuum suction unit 22 : UV light valve 23 : Cylinder 24 : X-axis drive means 25 : Z-axis drive means 26 : Y-axis drive means 27 : Brackets 28a, 28b : Y-axis table 29 : Vacuum pump 3 0 : Vacuum valve 3 1 : Pressurized gas source 32 : Valve unit 33 : Vacuum piping 3 4 : Piping 35 : UV hardening type coating material 201206716 3 6 · UV light 43 : Vacuum suction part 44: Cylinder 45 for vacuum suction drive: UV visor
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