201205083 . 六、發明說明： 【發明所屬之技術領域】 -i本發明為一種探針的技術領域，尤其指-種微型探針的設 j可運用於同頻、*速的晶片測試裝置之巾，具備能被縱向屋 縮的彈性，維持測試過程中良好的接觸狀態。 【先技術】 探針卡主要驗裸__業，綱其上賴數探針與裸 晶接觸，配合相關的測試儀器與軟||控制，進行裸晶各項功能的 測試’騎出不良品，進行修補或報廢，之便再進行後續的封裝 作業，藉此使產品的良率提昇。 、 隨著频電路製簡缝，電關的職與舰日 探針也從謂自、橫_咐細 集的垂直式探針。垂直式探針也因製 更、心 械加工而成的彈簧式探針，或則 * ’可*為以機 探針，或以微機電製程來製作多〜；4來=多樣幾何截面之 f 2 財團法人工_研究院所獲 _發明第_9號之『垂直式探針測試頭之 多數垂直式探針卡所_的探針，都是在探針針』^ 式各樣的彈性緩衝·，使探針 減各 ㈣地η 士找 J〇式接觸時具有縱向的形變量 及彈性’為此本發日狀思考設計另—姆針結構。 【發明内容】 201205083 高速的晶片測試裝置之 “本發明之主要目的是提供-種垂直式彈性探針結構，為一種 微型振針的創新形狀設計，可運用於高頻 命。 要Γ探射間位絲上、下精稱式㈣性體設計， 使探攸力時彈性_應力分倾為均勻，叫續探針的使用壽201205083 . VI. Description of the invention: [Technical field to which the invention pertains] - i The present invention is a technical field of a probe, and particularly refers to a micro-probe that can be applied to a wafer test apparatus of the same frequency and speed. , with the flexibility to be longitudinally contracted, to maintain a good contact state during the test. [First technique] The probe card is mainly used for bare __ industry, and its probe is connected with the bare crystal, and the related test instruments and soft || control are used to test the bare crystal functions. After repairing or scrapping, the subsequent packaging operations are carried out, thereby increasing the yield of the product. With the simplification of the frequency circuit system, the position of the electric switch and the ship's day probe are also from the vertical probe of the self and the horizontal 咐. The vertical probe is also made of a spring-loaded probe that is machined or machined, or * ' can be used as a machine probe, or made by a micro-electromechanical process. 2 The group method artificial _ research institute obtained _ invention No. _9 "vertical probe test head of most vertical probe card _ probe, are in the probe needle" various elastic buffer · Make the probe reduce each of the four (4) η 士 to find the J 〇 type of contact with a longitudinal shape variable and elasticity 'for this day's thinking to design another - needle structure. SUMMARY OF THE INVENTION 201205083 High-speed wafer testing device "The main purpose of the present invention is to provide a vertical elastic probe structure, which is an innovative shape design of a miniature vibrating needle, which can be applied to high frequency life. The upper and lower fine-grained (four) physical design of the positional wire makes the elasticity _ stress split evenly, which is called the life of the continuous probe.
本發明之次要目的是提供—種定位精準的微型探針結構，該 探針為微編，梅心綱賴嚴格，本發 赂是將探針的單-綱方向設計成具有雙接觸件咖式，能在 安树讓探針精確定位，以滿足此類W職裝置的需求。 本發明再—目的是提供—麵直式彈性探針結構，該探針能 作為兩構件(如兩電路板)之間的電性連接之導電元件。 為達上述之目的，本發明之探針雜主要是由至少—第一接 觸件、-彈性體及至少—第二接觸件所構成，該雜體位於十間 位置n制件及帛二购件分獅成於轉性體周邊的 上、下不同位置處’該彈性體為似雙環相疊型體，且上、下環體 的形狀並不對稱’其中-職較另—環體寬大，藉此使該彈性體 受壓縮變形時應力分佈較為均勻。 兹配合下姻*、實施例之詳細制对請專·圍，將上 述及本發明之其他目的與優點詳述於後。 【實施方式】 如第-圖所不’為本發明之示意^本發明之探針i主要是 201205083 由第-接觸件11、彈性體12及第-接觸件13所構成，該彈性體 12位中間位置’似兩個環相疊而成的型體，且上、下環體的形狀 並不對稱，在本實施例中其中-環體呈似橫躺的_型體或圓型 體’另-環體呈直立式橢圓型體，為下寬上窄的設計。該彈性體 12此種形狀的設計能在受力被壓縮時，使應力均句分佈於彈性體 各處，避免應力針在單-環體處，以延續探針的使料命。在 本實施例中該第-接觸件U及第二接觸件13數目只有一個，並 呈上:相互對應設置於該彈性體12周圍外壁處，該第一接觸件 1卜第二接觸件13形狀呈細長的針狀，但此僅為本發明之一種實 施例，並不因此限制本發明之範圍。本發明之探針！是用導電性 佳的金屬材料所構成’由於形狀較為特殊，尺寸為鮮規格，生 產時是採用微影深蝕刻模造(UGA)技術製成。 如第二圖所示’為本發_第二種實施_。在本實施例中 2要是改良該第-接觸件11A及第三接觸件13a的形狀，在本實 ^例中铷針㈣$ _齡之_ 翻的導體元 此時該第-接觸件11A及第二接觸件13A的長度就不需要太 本實施例中第-接觸件11A及第二接觸件m的形狀則呈 ^弧曲面體，僅突出於該彈性體12的圓周外壁。由此可知，本發 =-接觸㈣：_件細職峨 欲Γ的物件(如電路板、待測晶片）配合即可，又如第三A圖所 讀二B _示，第—_件及第二接餐 端或雙尖端的形狀。 祕也7為穴 201205083 另外該第一接觸件及第二接觸件的數目也不限—個，如第四 圖所示’為本發明第三種實施例圖。在本實施例中該探針1β具有 一個第一接觸件11Β及二個第二接觸件13Β，該彈性體12Β形狀則 與上述貫施例相同。由於本發明為微型探針，其中二個第二接觸 件13Β的設計，目的為精準定位探針精度，能使探針不會左右搖 擺，發生夕角位移問題，同理第一接觸件11Β的數目也可數個。The secondary object of the present invention is to provide a micro-probe structure with precise positioning. The probe is micro-edited, and the plum heart is strict. The hairpin is designed to have a single-contact orientation of the probe. The model can be accurately positioned in Anshu to meet the needs of such W-devices. Still another object of the present invention is to provide a face straight elastic probe structure which can serve as a conductive member for electrical connection between two members (e.g., two circuit boards). For the above purposes, the probe of the present invention is mainly composed of at least a first contact member, an elastic body and at least a second contact member, and the hybrid body is located at ten positions n and a second piece. The lion is formed at different positions above and below the rotating body. 'The elastic body is like a double-ringed stack, and the shape of the upper and lower rings is asymmetrical. The middle-lower body is wider than the other. This makes the stress distribution of the elastic body more uniform when subjected to compression deformation. The above-mentioned and other objects and advantages of the present invention will be described in detail below. [Embodiment] As shown in Fig. 1, the probe i of the present invention is mainly 201205083, which is composed of a first contact member 11, an elastic body 12 and a first contact member 13, which is 12-position. The intermediate position is like a shape in which two rings are stacked, and the shapes of the upper and lower rings are asymmetrical. In this embodiment, the ring body is like a lie-shaped body or a round body. - The ring body is an upright elliptical body with a narrow width and a narrow design. The shape of the elastic body 12 is such that when the force is compressed, the stress uniformity is distributed throughout the elastic body, and the stress needle is prevented from being at the single-ring body to continue the life of the probe. In this embodiment, the number of the first contact member U and the second contact member 13 is only one, and is disposed on the outer wall of the elastic body 12 corresponding to each other. The shape of the first contact member 1 and the second contact member 13 It is in the form of an elongated needle, but this is only one embodiment of the invention and does not limit the scope of the invention. The probe of the present invention! It is made of a highly conductive metal material. Due to its special shape and large size, it is made by micro-lithography deep-etching (UGA) technology. As shown in the second figure, 'this is the second implementation_. In the present embodiment, in order to improve the shape of the first contact piece 11A and the third contact piece 13a, in the present embodiment, the pin (4) of the _ turn of the conductor element at this time is the first contact piece 11A and The length of the second contact member 13A does not need to be too large. The shape of the first contact member 11A and the second contact member m in the present embodiment is a curved curved body protruding only from the circumferential outer wall of the elastic body 12. It can be seen that this issue =-contact (four): _ pieces of fine-grained objects (such as the circuit board, the wafer to be tested) can be matched, as shown in Figure 3A, the second B _ shows, the first - And the shape of the second receiving end or double tip. The secret is 7 is a hole 201205083 The number of the first contact member and the second contact member is also not limited, as shown in the fourth figure, which is a third embodiment of the present invention. In the present embodiment, the probe 1β has a first contact member 11 Β and two second contact members 13 Β, and the shape of the elastic body 12 相同 is the same as that of the above-described embodiment. Since the present invention is a micro-probe, the design of the two second contact members 13Β is aimed at accurately positioning the probe precision, so that the probe does not swing left and right, and the angular displacement problem occurs. Similarly, the first contact member 11Β The number can also be several.
本發明之探針1能運用於許多產品之中，現僅就其中一種實例 範例作說明，但並不因此限制本發明的應用範圍。如第五圖所示， 為本發明運用於探針卡產品時之剖面示賴。雜針卡2包括有 電路板3、第-固定單元4、第二固定單元5以及複數探針i。該 第一固定單元4處形狀成有數容置槽41及貫穿該槽的孔42,而該 第二固定單元5處也形成有數容置槽51及貫穿該槽的孔52，組裝 時》亥第固疋單疋4及第二固定單元5呈上下相對接合，並使該 探針1被第-固定單元4及第二固定單元5所固定，其t該彈性 體12位於該容置槽41及容置所形成的空間内。該第-接觸 件11則經孔42處延伸出來與電路板3的線路相接，該第二接觸 ^ 13則_孔52延伸至外界，在本實施例中該第三接觸件^是盘 待測晶片6相接觸。該電路板3、第一固定單元4及第二固定單^ 5能螺絲或其他輔助固定裝置 於探針卡產品處使用。合在一起，藉此能將本發明運用 201205083 狀相互對應。但此類探針lc在受力時(如第六β Γ句分佈於探針各處，應力容_於_力端的顧、3 中之上環舰，在長時_反鶴作下，料雜針衫力集中 處斷裂。反觀本發明後來所設計的探針1Β，如第七圖所示，當第 -接觸件ΗΒ受力時，該彈性體12Β能均勻使力分佈於各處:不 會產生應力針某處的情形，故能有效延續探針的使用壽命。 以上所述者僅為用以解釋本發明之較佳實施例，並非企圖據以 對本發明做任何形式上之_，是以，凡有在相同之發明精神下 所作有關本發明之任何修飾或變更，皆仍應包括在本發明意圖保 護之範疇。 【圖式簡單說明】 第一圖為本發明第一種實施例之示意圖； 第二圖為本發明第二種實施例之示意圖； φ 第三Α圖為本發明該第一接觸件及第二接觸件的另一種形狀的示 意圖（一）； 第三B為本發明該第一接觸件及第二接觸件的另一種形狀的示意 圖（二）； 第四圖為本發明第三種實施例之示意圖； 第五圖為運用本發明所製成之探針卡的示意圖； 第六A圖為本發明最初設計之探針的示意圖； 第六B圖為本發明最初設計之探針受力狀態下之示意圖； 201205083 第七圖為本發明第三種實施例受力時之探針變形之示意圖。 【主要元件符號說明】 1 探針 11第一接觸件 12彈性體 13第二接觸件 1A探針 11A第一接觸件 13A第二接觸件 1B探針 11B第一接觸件 12B彈性體 13B第二接觸件 1C探針 12C彈性體 2探針卡 3電路板 4第一固定單元 41容置槽 201205083 42孔 5第二固定單元 51容置槽 52孔 6待測晶片The probe 1 of the present invention can be used in many products, and only one of the example examples is described, but does not limit the scope of application of the present invention. As shown in the fifth figure, it is a cross-sectional view of the present invention when applied to a probe card product. The needle card 2 includes a circuit board 3, a first-fixing unit 4, a second fixing unit 5, and a plurality of probes i. The first fixing unit 4 is shaped into a plurality of receiving slots 41 and a hole 42 extending through the slot, and the second fixing unit 5 is also formed with a plurality of receiving slots 51 and a hole 52 extending through the slot. The fixing unit 4 and the second fixing unit 5 are vertically connected to each other, and the probe 1 is fixed by the first fixing unit 4 and the second fixing unit 5, wherein the elastic body 12 is located in the receiving groove 41 and The space formed by the accommodation. The first contact member 11 extends through the hole 42 to connect with the circuit board 3, and the second contact hole 43 extends to the outside. In the embodiment, the third contact member is a disk. The wafers 6 are in contact. The circuit board 3, the first fixing unit 4 and the second fixing unit 5 screws or other auxiliary fixing means are used at the probe card product. Together, the present invention can be used to correspond to each other in the form of 201205083. However, such a probe lc is under stress (such as the sixth β haiku distributed throughout the probe, the stress capacity _ at the end of the _ force end, 3 above the ring ship, in the long-term _ anti-hewn, mixed The pinhole strength is broken. In contrast, the probe 1Β designed later in the present invention, as shown in the seventh figure, when the first contact member is stressed, the elastic body 12 can evenly distribute the force everywhere: The situation in which the stress pin is generated somewhere can effectively extend the service life of the probe. The above is only a preferred embodiment for explaining the present invention, and is not intended to be in any form to the present invention. Any modification or modification of the present invention made in the spirit of the same invention should be included in the scope of the present invention. [First description of the drawings] The first figure is a schematic diagram of the first embodiment of the present invention. The second figure is a schematic view of a second embodiment of the present invention; φ is a schematic view (1) of another shape of the first contact member and the second contact member of the present invention; Schematic representation of another shape of the first contact and the second contact The fourth figure is a schematic view of a third embodiment of the present invention; the fifth figure is a schematic view of a probe card manufactured by using the present invention; and the sixth drawing is a schematic view of the probe originally designed according to the present invention; 6B is a schematic diagram of the probe under initial force design of the present invention; 201205083 The seventh diagram is a schematic diagram of probe deformation under the force of the third embodiment of the present invention. [Main component symbol description] 1 Probe 11 First contact 12 elastomer 13 second contact 1A probe 11A first contact 13A second contact 1B probe 11B first contact 12B elastomer 13B second contact 1C probe 12C elastomer 2 probe Card 3 circuit board 4 first fixing unit 41 accommodating groove 201205083 42 hole 5 second fixing unit 51 accommodating groove 52 hole 6 wafer to be tested