201204624 六、發明說明： 【發明所屬之技術領域】 本發明有關於一種頂升裝置，特別是指一種應用於真 空設備中，可提供大行程、高扭力及高推力的的頂升裝置。 【先前技術】 習知的真空鍍膜設備，通常會分成一高真空腔體及一 缓衝腔體。工件會先送入缓衝腔體中，待緩衝腔體内真空 度到達一定值時，再傳送進入高真空腔體進行鍍膜製程， 就可減少因抽真空所花費的大量時間。 在真空設備中，為了承載及傳輸工件，可能會使用到 頂升裝置。目前市面上針對真空設備所設計的頂升裝置如 圖1剖面示意圖所示，習知的頂升裝置1包括一本體10、 一凸輪執11、一圓柱形凸輪12及一頂升柱13。頂升柱 13 —端連接於圓柱型凸輪12,另一端則用來頂升托盤 14。由圖中可看出，習知頂升裝置1的動作原理是藉由圓 柱型凸輪12在凸輪執11中滑動產生垂直高度的變化，來 使頂升柱13產生升降。 然而，若要利用此種頂升裝置1具有下列缺點：首先 是頂升的行程會受到頂升裝置1本身體積的限制。也就是 說，需要加大頂升的行程時，勢必也要加大頂升裝置1的 體積，來延伸凸輪執11的長度，才能提供更大的行程。 第二是所能提供的頂升推力不足。在真空設備中，為 了使承載傳輸設備能夠一次運送大量的工件，需要較大的 201204624 托盤。然而’在緩衝腔體破真空之後，由於緩衝腔體和高 真空腔體之間有一大氣壓的壓力差’托盤的面積越大，緩 衝腔體的大氣壓力對托盤作用力越大。再加上托盤本身的 重量’致使頂升裝置需要較大的推力才能頂住托盤及大氣 壓力的重量。 除此之外，目前仍待開發使用於真空設備中，可以在 升降同時複合5疋轉動作的頂升震置。因此，如何使頂升I 置縮小體積後還能輸出很大的推力，同時又能夠複合旋轉 • 動作，提供產業上更多方面的應用，為現今工業上仍致力 於發展的課題。 【發明内容】 有鑒於上述課題，本發明之目的在於提供一種複合升降及 旋轉動作的頂升裝置’且體積小不佔空間，又可提供較大 的頂升行程。 頂升裝置用以配合一外套筒内的一導旋銷，對一物件提 # 供旋轉及升降之複合作用力，頂升裝置包括：一螺桿；一 伺服馬達，伺服馬達的輸出軸軸向連接於螺桿，以帶動螺 桿旋轉；一螺帽，螺合於螺桿；一軸套，軸套一端軸接於 一軸承，另一端連接於螺帽；及一活動柱，活動柱一端與 軸承軸接，外套筒套設於活動柱；及一導旋槽，導旋槽設 於活動柱侧表面，其中導旋銷經由外套筒之一通孔插二導 旋槽中’導旋槽提供導引活動柱上升或下降同時，旋轉一 預定角度。 本發明之另一目的是提供一種真空傳輸頂升設備，配 合前述的頂升裝置，用以將多個工件從一緩衝腔體傳送至 201204624 一高真空腔體中進行鍍膜製程。本發明真空傳輸頂升設備 包括一托盤，托盤用以在緩衝腔體破真空後承載工件，托 盤底部並設有一預定開‘口；及一頂升裝置，頂升裝置帶動 托盤上升，以托盤隔絕缓衝腔體及高真空腔體，並在緩 衝腔體的真空度達到一預定值時，使托盤下降，將工件傳 送至高真空腔體進行鍍膜製程，頂升裝置包括：一螺桿； 一伺服馬達，伺服馬達的輸出軸軸向連接於螺桿，以帶動 螺桿旋轉；一螺帽，螺合於螺桿；一軸套，軸套一端軸接 於一軸承，另一端連接於螺帽；及一活動柱，活動柱一端 ® 與軸承軸接，另一端則設有一蝴蝶扣；一導旋槽，設於活 動柱侧表面；一外套筒，固定於高真空腔體底部，並套於 活動柱；及一導旋銷，導旋銷經由外套筒之一通孔插入導 旋槽中，當伺服馬達帶動螺桿旋轉使活動柱升降時，蝴蝶 扣伸入托盤底部之預定形狀開口，導旋銷配合導旋槽導引 活動柱旋轉一預定角度後，活動柱與托盤即以蝴蝶扣相結 合。 本發明相較於先前技術所產生的功效是在縮小頂升裝 Φ 置的體積的情況下，又可提供較大的頂升行程及頂升推 力。同時，在頂升過程中複合旋轉的動作，具有更廣的應 用層面。 【實施方式】 為使本發明之上述目的、特徵和優點能更明顯易 懂，下文依本發明複合旋轉高頂升出力裝置及真空傳輸 頂升設備，特舉較佳實施例，並配合所附相關圖式，作 詳細說明如下，其中相同的元件將以相同的元件符號加 201204624 以說明。 明參照圖2’為本發明所提供之複合旋轉動作的頂升 裝置示意圖。本發明之頂升裝置2包括一驅動組件2〇 及一活動柱21。 驅動組件20用以帶動活動柱21，以提供物件升 降。為了縮減頂升裝置2的體積，本發明實施例中驅動 組件20採用伺服馬達帶動螺桿的方式來帶動活動柱 21。因此，驅動組件2〇包括一螺桿2〇〇、一伺服馬達 • 201、一螺帽202、一軸承2〇3及一軸套204。 由圖中可看出，伺服馬達2〇1的輸出軸軸向連接於 螺桿200，螺帽202則螺合於螺桿2〇〇。軸套2〇4另一 端連接於螺帽202 ;另一端以軸承203和活動柱21 一 端相連接，使活動柱21能夠獨立於螺桿2〇〇轉動。也 就是說，當伺服馬達201帶動螺桿200順時針或逆時針 方向旋轉，螺帽202會往前或後退使活動柱24產生升 降。在本發明實施例中’所使用的螺桿200為一球螺桿。 如圖2所示’為了在活動柱21頂升物件時/可^ # 合旋轉的動作’因此’活動柱21側表面設一道導旋二 210。每一道導旋槽210可分成三段，第_段21〇1 ^ 第三段2103平行活動柱210軸向設置，第二段21〇2 環繞活動柱210的側表面，連接於第一段2101及第= 段2103設置。當導旋銷23於第二段202轨道滑動時^ 即可帶動活動柱21旋轉’因此，第二段21〇2長度即 決定活動柱210的旋轉角度。 又 本發明之頂升裝置並配合套設於活動桎21的一外 套筒22及一導旋銷23來產生旋轉。導旋銷23經由外 201204624 套筒22之一通孔220插入導旋槽210中，當伺服馬達 201帶動螺桿2〇〇旋轉，使螺帽202往前或後退以使活 動柱21升降同時，導旋銷23順著導旋槽210軌道滑 動’配合導旋槽210導引活動柱21旋轉一預定角度。 為了防止導旋銷23在活動柱21升降時出轨，因 此’導旋槽210的深度需至少大約2至20 mm，而導旋 銷23長度大約7至30 mm為佳。 在本發明一較佳實施例中，如圖3A至3C之局部 立體圖所示’為了使活動柱21頂升過程中能夠順利的 轉動’本發明之活動柱21側表面設有四道導旋槽21〇, 並有四支導旋銷23插入導旋槽210内，以提高活動检 21轉動的扭力，實質上依據不同需求，導旋槽及導旋 銷的數量也會有所變更。為了方便了解旋轉的作動原理 及外套同22内部結構，因此，外套筒22並未顯示於 圖3A至圖3C。 而本發明實施例中，活動枉21末端並可依據需求 設有一蝴蝶扣24，且配合前述的旋轉動作來使活動柱 21以蝴蝶扣24和物件結合。如圖3B，當導旋銷23 進入導旋槽210的第二段2102，迫使活動柱21旋轉 時’蝴蝶扣24也跟著旋轉’直至導旋銷23要進入導 旋槽的第三段2103時，旋轉的角度正好讓蝴蝶扣24 卡住物件，此時’再繼續將物件往上頂升至預定位置， 活動柱旋轉的角度範圍大約10〜180度。 圖4A及圖4B為本發明之真空傳輸頂升設備的剖面 示意流程圖’前述的頂升裝置作為真空傳輪頂升設備的 一部分’用以在緩衝腔體及高真空腔體之間進行工件的 201204624 傳輸。真空鍍膜系統4包括一缓衝腔體4〇、一高真空腔 體4'以及一真空傳輸頂升設備犯。 緩衝腔體40是工件的進出口，工件先送入緩衝腔 體4〇J待緩衝腔體40内真空度到達一定值時，再傳送 進入间真空腔體41。高真空腔體41内，具有一鍍膜設 ，410’用^對工件進行鍍膜製程，高真空腔體41内並 $，持10 3至1〇-6t〇r「的真空度。其中，緩衝腔體4〇 和高真空腔體41之間具有一通道口 43，以傳送工件。 • 真空傳輸頂升設備42包括一轉盤420、一托盤 421a(或421b)、一頂升裝置2及一外套筒22。轉盤42〇 利用間歇式旋轉的方式，將工件由通道口 43，傳送至鍍 膜設備410下方來進行鍍膜製程，並同時將完成鍍膜製 矛王的工件傳送至通道口 43，以將工件取出。 轉盤420上正對於通道口 43及鍍膜設備410的位 置’分別設有一凹槽4202a及4202b，在每一凹槽中心 並具有一通孔4200。托盤421 a、421b正好可放置於轉 盤420上的凹槽4202a及4202b中，並用來承載工件。 • 頂升裝置2的結構請參照圖2，通過通孔4200將 托盤421a頂升至緩衝腔體4〇來放置欲鍍的工件，與此 同時’托盤421a必需封住通道口 43，以免當缓衝腔體 40破真空載入工件時，影響高真空腔體41的真空度。 為了使托盤421a順利進入通道口 43，在缓衝腔體40 内壁靠近通道口 43的部份會設有導柱401來作引導。 外套筒22固定於高真空腔體41的底部，用以配合 頂升裝置22’使頂升裝置22的活動柱21上升的同時’ 複合旋轉的動作，以和托盤421a結合被頂升。 201204624 在本發明實施例中，頂升裝置會應用於高真空腔體 與緩衝腔體之間的傳輸’但由於活動柱21表面的導旋 槽210具有一溝槽珠度，可能會形成一漏氣途經，進而 影響尚真空腔體的真空度，因此，外套筒22内盥高真 空腔體41接合的部份’更包括一X型環25(父-心9；)， 套設於活動柱21，以增加氣密效果。在本發明實施例 中’為了付到敢佳氣密效果，使用了兩個X型環25。 本發明實施例中’真空傳輸頂升設備42傳送工件 的流程如圖4A至圖4B所示。圖4A中，兩托盤421 a 及421b分別放置於凹槽4202a及4202b中。技盤421a 承載已完成鍍膜製程之工件4211a ;托盤421b承載即 將進行鍍膜的工件4211b。為了將已完成鍍膜製程之工 件4211a取出，並載入另一工件，頂升裝置422自轉盤 420的通孔4200將托盤421a往上頂升至缓衝腔體4〇。 如圖4B所示，頂升過程中並複合旋轉的動作（假設 是順時針旋轉），使頂升裝置2的活動柱21與托盤421a 以蝴蝶扣24扣緊，使托盤421a不至於鬆脫’直至托盤 421a完全被頂升至緩衝腔體4〇，並將通道口 43封住， 以隔絕緩衝腔體40及高真空腔體41。 睛參照圖5A及圖5B，為本發明實施例托盤的仰視 圖。托盤421底部如圖5A所示，相對應於蝴蝶扣24 形狀设置一預定形狀開口 421 〇，蝴蝶扣24旋轉一預定 角度Θ後，即可使蝴蝶扣24與托盤421卡合，如圖5B。 此時，缓衝腔體40破真空，將工件4211a取出， 再放入另一待鍍工件4211a’。將緩衝腔體40抽至一預 定真空度，與此同時’位於高真空腔體41的鍍膜設備 201204624 410對工件4211b進行鍍膜製程。 待緩衝腔體40的真空度達到預定值，且高直空腔體 Μ内的鍍膜製程也完成後，頂升裂置似將托盤42ia 如前所述，由於本發明實施例的頂升裝置導旋 ^一個^成三段2101〜2103，請配合圖2。下降過程包 份’導旋銷23在第三段導旋槽謂中移動， 421a合1不產生旋轉’蝴蝶扣24未鬆開，因此，托盤 腔體下拉時’可確保托盤421a不會被卡在緩衝 桎24在導旋槽210第二段2102移動時，活動 蝶扣，且=旋轉動作(逆時針侧，這時才鬆開蝴 jr ^ 皿421a下降到轉盤42〇上後，托盤421a 止好和頂升裝置422脫離。 導旋銷24在導旋槽21〇第一段21〇1中移動時，頂 ^置422下降到原來的位置，回到如圖4A的狀態。 轉盤420間歇性旋轉—次，使方才完成鍍膜製程 工件4211b被旋轉傳送至通道口 43下方待鍍工件 42”巧鐘膜設備41Q下方，重複先前的動作。 如前所述，在習知的技術中，是將工件放入緩衝腔 體中，抽至預定真空度後，再傳送到高真空腔體進行鍍 膜製程’必須等候每-抵工件完成所有流程纟’才能對 ^批工件進行相同流程。但利用本發明真空傳輸頂升 戍備4的好處是，緩衝腔體4〇抽真空以及對另一工件 進行鍍膜製程是同時進行，節省了在鍍膜製程之前，等 候抽真空所花費的時間。 其中，當頂升裝置2要將托盤421頂升至緩衝腔體 201204624 40時，基於公式F = 其中，F(牛頓；N)為頂升推力；L(公尺，m)為頂升的 節距，即球螺桿旋轉一圈，活動柱前進的距離；T (牛頓 X米；Nxm)為伺服馬達輸出扭力。201204624 VI. Description of the Invention: [Technical Field] The present invention relates to a jacking device, and more particularly to a jacking device which is applied to a vacuum apparatus and which can provide a large stroke, a high torque and a high thrust. [Prior Art] A conventional vacuum coating apparatus is generally divided into a high vacuum chamber and a buffer chamber. The workpiece is first sent into the buffer cavity. When the vacuum in the buffer cavity reaches a certain value, it is transferred into the high vacuum cavity for coating process, which can reduce the time spent by vacuuming. In vacuum equipment, a lifting device may be used to carry and transport the workpiece. The jacking device currently designed for vacuum equipment is shown in the cross-sectional view of FIG. 1. The conventional jacking device 1 includes a body 10, a cam stop 11, a cylindrical cam 12 and a jacking column 13. The jack 13 is connected to the cylindrical cam 12 at the other end and the tray 14 is lifted at the other end. As can be seen from the figure, the principle of operation of the conventional jacking device 1 is to cause the jacking column 13 to move up and down by sliding the cylindrical cam 12 in the cam lever 11 to produce a vertical height change. However, the use of such a jacking device 1 has the following disadvantages: firstly, the stroke of the jacking is limited by the volume of the jacking device 1 itself. That is to say, when it is necessary to increase the stroke of the jacking, it is necessary to increase the volume of the jacking device 1 to extend the length of the cam holder 11 to provide a larger stroke. The second is that the jacking thrust that can be provided is insufficient. In vacuum equipment, a larger 201204624 pallet is required in order to enable the carrier transport equipment to transport a large number of workpieces at a time. However, after the vacuum is broken in the buffer chamber, there is a pressure difference of one atmosphere between the buffer chamber and the high vacuum chamber. The larger the area of the tray, the greater the atmospheric pressure of the buffer chamber on the tray. Together with the weight of the pallet itself, the jacking device requires a large thrust to withstand the weight of the pallet and atmospheric pressure. In addition to this, it is still to be developed and used in vacuum equipment, and it can be combined with the top lift of the 5 疋 turn action. Therefore, how to make the jacking I reduce the volume can also output a large thrust, and at the same time, it can be combined with the rotary motion to provide more applications in the industry, and is still a subject of development in the industry today. SUMMARY OF THE INVENTION In view of the above problems, an object of the present invention is to provide a jacking device for a compound lifting and rotating operation, which is small in size and does not occupy a space, and can provide a large jacking stroke. The jacking device is configured to cooperate with a guide pin in an outer sleeve to provide a combined force for rotation and lifting of an object. The jacking device comprises: a screw; a servo motor, an output shaft axial direction of the servo motor Connected to the screw to drive the screw to rotate; a nut is screwed to the screw; a sleeve, one end of the sleeve is connected to a bearing, and the other end is connected to the nut; and a movable column, one end of the movable column is connected with the bearing, The outer sleeve is sleeved on the movable column; and a guide groove is arranged on the side surface of the movable column, wherein the guide pin provides a guiding activity through the through hole of the outer sleeve and the guide groove in the second guide groove The column is rotated or lowered while rotating a predetermined angle. Another object of the present invention is to provide a vacuum transfer jacking apparatus in combination with the aforementioned jacking apparatus for transferring a plurality of workpieces from a buffer chamber to a high vacuum chamber of 201204624 for a coating process. The vacuum transmission lifting device of the present invention comprises a tray for carrying the workpiece after the buffer cavity is vacuumed, and the bottom of the tray is provided with a predetermined opening; and a lifting device, the lifting device drives the tray to rise, and the tray is insulated Buffering cavity and high vacuum cavity, and when the vacuum degree of the buffer cavity reaches a predetermined value, the tray is lowered, and the workpiece is transferred to the high vacuum cavity for coating process, and the lifting device comprises: a screw; a servo motor The output shaft of the servo motor is axially connected to the screw to drive the screw to rotate; a nut is screwed to the screw; a sleeve, one end of the sleeve is connected to a bearing, the other end is connected to the nut; and a movable column, One end of the movable column is connected to the bearing shaft, and the other end is provided with a butterfly buckle; a guide groove is arranged on the side surface of the movable column; an outer sleeve is fixed on the bottom of the high vacuum cavity and is sleeved on the movable column; The guide pin and the guide pin are inserted into the guide groove through a through hole of the outer sleeve. When the servo motor drives the screw to rotate and lift the movable column, the butterfly buckle extends into the predetermined shape at the bottom of the tray to open the guide. Pin-fitted guide groove guide After the movable column is rotated by a predetermined angle, the movable column and the tray are combined with a butterfly buckle. The effect of the present invention over the prior art is that it provides a larger jacking stroke and jacking thrust in the case of reducing the volume of the jacking Φ. At the same time, the action of compound rotation during the jacking process has a wider application level. [Embodiment] In order to make the above objects, features and advantages of the present invention more comprehensible, the composite rotating high-rise lifting device and the vacuum transmission lifting device according to the present invention are exemplified, and the preferred embodiment is provided with The related drawings are described in detail below, in which the same elements will be denoted by the same component symbols and 201204624. 2 is a schematic view of a jacking device for a compound rotary motion provided by the present invention. The jacking device 2 of the present invention includes a drive assembly 2A and a movable column 21. The drive assembly 20 is used to drive the movable column 21 to provide an item lift. In order to reduce the volume of the jacking device 2, the driving assembly 20 in the embodiment of the present invention drives the movable column 21 by means of a servo motor to drive the screw. Therefore, the drive assembly 2 includes a screw 2, a servo motor 201, a nut 202, a bearing 2〇3, and a sleeve 204. As can be seen from the figure, the output shaft of the servo motor 2〇1 is axially coupled to the screw 200, and the nut 202 is screwed to the screw 2〇〇. The other end of the sleeve 2〇4 is connected to the nut 202; the other end is connected at one end by a bearing 203 and a movable column 21, so that the movable column 21 can be rotated independently of the screw 2〇〇. That is, when the servo motor 201 drives the screw 200 to rotate clockwise or counterclockwise, the nut 202 will move forward or backward to cause the movable column 24 to rise and fall. The screw 200 used in the embodiment of the present invention is a ball screw. As shown in Fig. 2, in order to raise the object when the movable column 21 is lifted up, a side of the movable column 21 is provided with a guide wire 210. Each of the guide grooves 210 can be divided into three segments, a first segment 21〇1 ^ a third segment 2103 parallel to the movable column 210 axially disposed, and a second segment 21〇2 surrounding the side surface of the movable column 210, connected to the first segment 2101 And the = paragraph 2103 setting. When the guide pin 23 slides on the track of the second segment 202, the movable column 21 can be rotated. Thus, the length of the second segment 21〇2 determines the angle of rotation of the movable column 210. Further, the jacking device of the present invention cooperates with an outer sleeve 22 and a guide pin 23 which are sleeved on the movable jaw 21 to generate rotation. The guide pin 23 is inserted into the guide groove 210 through the through hole 220 of the outer sleeve 2062424. When the servo motor 201 drives the screw 2 to rotate, the nut 202 is moved forward or backward to lift and lower the movable column 21, and the guide wheel is rotated. The pin 23 slides along the track of the guide groove 210 to cooperate with the guide groove 210 to guide the movable column 21 to rotate by a predetermined angle. In order to prevent the guide pin 23 from being derailed when the movable column 21 is raised and lowered, the depth of the guide groove 210 is required to be at least about 2 to 20 mm, and the length of the guide pin 23 is preferably about 7 to 30 mm. In a preferred embodiment of the present invention, as shown in the partial perspective view of FIGS. 3A to 3C, in order to enable smooth rotation during the lifting of the movable column 21, the side surface of the movable column 21 of the present invention is provided with four guide grooves. 21〇, and four guide pins 23 are inserted into the guide groove 210 to improve the torque of the motion detection 21 rotation, and the number of the guide groove and the guide pin may also be changed according to different requirements. In order to facilitate the understanding of the principle of operation of the rotation and the inner structure of the outer casing 22, the outer sleeve 22 is not shown in Figs. 3A to 3C. In the embodiment of the present invention, the end of the movable jaw 21 can be provided with a butterfly buckle 24 according to requirements, and the movable column 21 is combined with the butterfly buckle 24 and the object in accordance with the aforementioned rotating motion. As shown in FIG. 3B, when the guide pin 23 enters the second section 2102 of the guide groove 210, forcing the movable column 21 to rotate, the 'butterfly clasp 24 is also rotated' until the guide pin 23 enters the third segment 2103 of the guide groove. The angle of rotation just allows the butterfly buckle 24 to get stuck in the object. At this time, 'the object continues to be lifted up to the predetermined position, and the angle of rotation of the movable column is about 10 to 180 degrees. 4A and 4B are schematic cross-sectional views showing a vacuum transfer jacking apparatus of the present invention. The foregoing jacking device is used as a part of a vacuum transfer jacking device for performing workpiece between the buffer chamber and the high vacuum chamber. 201204624 transmission. The vacuum coating system 4 includes a buffer chamber 4, a high vacuum chamber 4', and a vacuum transfer jacking device. The buffer chamber 40 is the inlet and outlet of the workpiece, and the workpiece is first sent into the buffer chamber 4〇J. When the degree of vacuum in the buffer chamber 40 reaches a certain value, it is transferred into the inter-vacuum chamber 41. In the high vacuum chamber 41, there is a coating device, 410' is used for coating the workpiece, and the vacuum chamber is held in the high vacuum chamber 41, holding a vacuum of 10 3 to 1 〇 6 t〇r. There is a passage port 43 between the body 4 and the high vacuum chamber 41 for conveying the workpiece. • The vacuum transmission jacking device 42 includes a turntable 420, a tray 421a (or 421b), a jacking device 2 and a jacket. The cylinder 22 is rotated by means of intermittent rotation to transfer the workpiece from the passage opening 43 to the lower side of the coating device 410 for coating process, and at the same time, the workpiece of the coated spear is transferred to the passage port 43 to The turntable 420 is provided with a groove 4202a and 4202b for the position of the passage opening 43 and the coating device 410, respectively, and has a through hole 4200 at the center of each groove. The trays 421a, 421b can be placed on the turntable 420. The grooves 4202a and 4202b are used to carry the workpiece. • The structure of the jacking device 2 is as shown in Fig. 2. The tray 421a is lifted up to the buffer chamber 4 through the through hole 4200 to place the workpiece to be plated. 'Tray 421a must seal the passage port 43 In order to prevent the vacuum of the high vacuum chamber 41 from being affected when the buffer chamber 40 is vacuum-loaded into the workpiece. In order for the tray 421a to smoothly enter the passage opening 43, the inner wall of the buffer chamber 40 is close to the passage opening 43. A guide post 401 is provided for guiding. The outer sleeve 22 is fixed to the bottom of the high vacuum chamber 41 for engaging the jacking device 22' to raise the movable column 21 of the jacking device 22 while the compound rotating action In combination with the tray 421a, it is lifted. 201204624 In the embodiment of the present invention, the jacking device is applied to the transmission between the high vacuum chamber and the buffer chamber 'but because the guide groove 210 on the surface of the movable column 21 has a groove The beading may form a leak path, which in turn affects the vacuum of the vacuum chamber. Therefore, the portion of the outer sleeve 22 where the high vacuum chamber 41 is joined includes an X-ring 25 (parent-heart) 9;), sleeved on the movable column 21 to increase the airtight effect. In the embodiment of the present invention, in order to pay for the airtight effect, two X-rings 25 are used. In the embodiment of the present invention, 'vacuum transmission The flow of the lifting device 42 to transfer the workpiece is as shown in Figs. 4A to 4B. In 4A, two trays 421a and 421b are respectively placed in the grooves 4202a and 4202b. The technical disk 421a carries the workpiece 4211a which has been subjected to the coating process; the tray 421b carries the workpiece 4211b which is to be coated. In order to process the workpiece 4211a which has been completed. After taking out and loading another workpiece, the jacking device 422 lifts the tray 421a upward from the through hole 4200 of the turntable 420 to the buffer cavity 4〇. As shown in FIG. 4B, the compound rotation is performed during the jacking process. (assuming clockwise rotation), the movable column 21 of the jacking device 2 and the tray 421a are fastened with the butterfly clasp 24 so that the tray 421a is not loosened until the tray 421a is completely lifted up to the buffer cavity 4〇, and The passage opening 43 is sealed to isolate the buffer chamber 40 and the high vacuum chamber 41. Referring to Figures 5A and 5B, a bottom view of a tray in accordance with an embodiment of the present invention is shown. As shown in FIG. 5A, the bottom of the tray 421 is provided with a predetermined shape opening 421 相对 corresponding to the shape of the butterfly buckle 24. After the butterfly buckle 24 is rotated by a predetermined angle, the butterfly buckle 24 is engaged with the tray 421, as shown in FIG. 5B. At this time, the buffer chamber 40 is broken, the workpiece 4211a is taken out, and another workpiece 4211a' to be plated is placed. The buffer chamber 40 is evacuated to a predetermined degree of vacuum, and at the same time, the coating device 201204624 410 located in the high vacuum chamber 41 performs a coating process on the workpiece 4211b. After the degree of vacuum of the buffer chamber 40 reaches a predetermined value, and the coating process in the high straight cavity is completed, the jacking is similar to the tray 42ia as described above, due to the jacking device of the embodiment of the present invention. Rotate ^^ into three segments 2101~2103, please cooperate with Figure 2. The descending process package 'the guide pin 23 moves in the third-stage guide groove, and the 421a-in-1 does not rotate. 'The butterfly buckle 24 is not released, so when the tray cavity is pulled down', it can ensure that the tray 421a will not be stuck. When the buffer cymbal 24 moves in the second section 2102 of the guide groove 210, the butterfly button is moved, and the rotation action (counterclockwise side, when the butterfly jr ^ 421a is released to the turntable 42 ,, the tray 421a is stopped. Disengaged from the jacking device 422. When the guide pin 24 moves in the first section 21〇1 of the guide groove 21〇, the top set 422 is lowered to the original position, returning to the state as shown in Fig. 4A. Once, the coating process workpiece 4211b is rotated and transferred to the workpiece 42 below the channel opening 43 to be plated under the film membrane device 41Q, repeating the previous action. As mentioned above, in the prior art, the workpiece is Put it into the buffer cavity, pump it to the predetermined vacuum degree, and then transfer it to the high vacuum cavity for the coating process 'must wait for every process to complete the process, 才能' to complete the same process for the batch workpiece. But use the vacuum of the invention The advantage of transmitting the jack 4 is that the buffer The evacuation of the chamber 4〇 and the coating process for the other workpiece are performed simultaneously, saving the time it takes to wait for the vacuum before the coating process. Wherein, when the jacking device 2 is to lift the tray 421 to the buffer chamber 201204624 40 hrs, based on the formula F = where F (Newton; N) is the lifting thrust; L (meter, m) is the pitch of the jacking, that is, the distance the ball screw rotates, the distance the movable column advances; T ( Newton X meters; Nxm) is the torque output of the servo motor.
在本發明實施例中，假設頂升的節距為0.005 m， 伺服馬達輸出的扭力只要1〇(Nxm)，就可以產生 12560(N)的頂升推力，足以承受大氣壓力及托盤的重 量。相較於習知的頂升裝置而言，同樣的扭力（T)輸出， 本發明所產生的頂升推力（F)是習知技術的16至17倍。 再者，以習知的頂升裝置來說’頂升的行程最大只 到50 mm，體積大小約48〇0〇立方公分。本發明所提供 的頂升裝置提供物件1〇 mm至200 mm的垂直高度變 化，但頂升裝置的體積只需要大約4000至16000立方 公分’相較於習知技藝而言，縮小3至10倍，運用在 真空設備中時更能節省空間。 此外，本發明頂升裝置馬達的能源轉換效率高，伺 服馬達只需要輸出約450瓦（W)的功率’就可以產生1〇 牛頓X米（Νχηη)的扭力，以提供Ί2560(Ν)的頂升推力， 足X 了頁升本發明實施例中的托盤至緩衝腔體。除此之 卜本發明之頂升裝置在升降過程中，複合旋轉的動 目乂於習知技術而言，具有更廣的應用層面。 本發明較佳實例_如上，《並非用以限定 實體僅止於上述實_ 同的功J解並利用其它元件或方式來產生相 之修改^ J二ί不脫離本發明之精神與範嘴内所作 句應l3在下述之申請專利範圍内。 201204624 【圖式簡單說明】 圖1習知的頂升裝置； 圖2本發明之複合旋轉的頂升裝置示意圖； 圖3A至圖3C本發明實施例之複合旋轉頂升裝置頂升 流程圖；及 圖4A及圖4B結合本發明之複合旋轉頂升裝置的真空 傳輸頂升設備傳輸工件的流程示意圖；及 圖5A及圖5B本發明實施例托盤仰視示意圖。In the embodiment of the present invention, assuming that the pitch of the jacking is 0.005 m, the torque output from the servo motor is only 1 〇 (Nxm), and the jacking thrust of 12560 (N) can be generated to withstand the atmospheric pressure and the weight of the pallet. Compared to the conventional jacking device, the same torsion (T) output, the jacking thrust (F) produced by the present invention is 16 to 17 times that of the prior art. Furthermore, in the case of the conventional jacking device, the maximum lifting stroke is only 50 mm and the volume is about 48 〇 0 〇 cm. The jacking device provided by the present invention provides a vertical height variation of the object from 1 mm to 200 mm, but the volume of the jacking device only needs about 4,000 to 16,000 cubic centimeters, which is 3 to 10 times smaller than conventional techniques. It saves space when used in vacuum equipment. In addition, the energy conversion efficiency of the motor of the jacking device of the present invention is high, and the servo motor only needs to output a power of about 450 watts (W) to generate a torque of 1 Newton X m (Νχηη) to provide a top of Ί 2560 (Ν). The lifting thrust, the foot X, is raised to the tray in the embodiment of the invention to the buffer cavity. In addition to the above, the jacking device of the present invention has a wider application level in the process of lifting and lowering, and the motion of the compound rotation is in the conventional technology. BEST MODE FOR CARRYING OUT THE INVENTION As above, "not to limit the entity only to the above-mentioned work and to use other elements or means to produce phase modifications" does not deviate from the spirit and scope of the present invention. The sentence should be within the scope of the following patent application. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic view of a conventional lifting top lifting device; FIG. 3A to FIG. 3C are schematic diagrams showing a lifting operation of a composite rotating jacking device according to an embodiment of the present invention; 4A and FIG. 4B are schematic diagrams showing the flow of a workpiece transmitted by a vacuum transfer jacking device of the composite rotary jacking device of the present invention; and FIGS. 5A and 5B are schematic views of the tray of the embodiment of the present invention.
m 13 201204624 【主要元件符號說明】 1 :習知的頂升裝置 10 :本體 11 :凸輪執 12 :圓柱型凸輪 13 :頂升柱 14 :托盤 2:複合旋轉頂升裝置 20 :驅動組件 200 :球螺桿 201 :伺服^馬達 202 :螺帽 203 :軸承 204 :轴套 21 :活動柱 210 :導旋槽 2101 :第一段導旋槽 2102 :第二段導旋槽 2103 :第三段導旋槽 22 :外套筒 23 :導旋銷 220 :通孔 25 : X型環 24 :蝴蝶扣 4:真空鍍膜系統 40 :緩衝腔體 401 ··導枉 41 ··高真空腔體 42 :高真空傳輸頂升設備 420 :轉盤 4200 :通孔 4202a、4202b :凹槽 421、421a、421b :托盤 4210 :預定形狀開口 4211a、4211a，、4211b :工件 43 :通道口 m 14m 13 201204624 [Description of main components] 1 : Conventional lifting device 10: Main body 11: Cam holding 12: Cylindrical cam 13: Lifting column 14: Pallet 2: Compound rotary jacking device 20: Drive assembly 200: Ball screw 201: Servo^Motor 202: Nut 203: Bearing 204: Bushing 21: Moving column 210: Guide groove 2101: First stage guide groove 2102: Second stage guide groove 2103: Third stage guide Slot 22: Outer sleeve 23: Guide pin 220: Through hole 25: X-ring 24: Butterfly clasp 4: Vacuum coating system 40: Buffer chamber 401 · · Guide 41 · High vacuum chamber 42: High vacuum Transmission jacking device 420: turntable 4200: through holes 4202a, 4202b: recesses 421, 421a, 421b: tray 4210: predetermined shape openings 4211a, 4211a, 4211b: workpiece 43: passage port m 14