TW201202758A - Partition repair method - Google Patents

Partition repair method Download PDF

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Publication number
TW201202758A
TW201202758A TW100112635A TW100112635A TW201202758A TW 201202758 A TW201202758 A TW 201202758A TW 100112635 A TW100112635 A TW 100112635A TW 100112635 A TW100112635 A TW 100112635A TW 201202758 A TW201202758 A TW 201202758A
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Taiwan
Prior art keywords
partition wall
ink
correction
defect
partition
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TW100112635A
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Chinese (zh)
Inventor
Kenji Ishizeki
Tatsuya Akiyama
Hideyuki Takahashi
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Asahi Glass Co Ltd
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Publication of TW201202758A publication Critical patent/TW201202758A/en

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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • H10K59/122Pixel-defining structures or layers, e.g. banks
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • G02B5/201Filters in the form of arrays
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • G02B5/22Absorbing filters
    • G02B5/223Absorbing filters containing organic substances, e.g. dyes, inks or pigments
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/861Repairing

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electroluminescent Light Sources (AREA)
  • Optical Filters (AREA)

Abstract

Disclosed is a partition repair method that is capable of repairing a missing part defect that arises in a partition that is formed to form a plurality of spaces upon a substrate, said partition being ink-repellent in the upper face thereof and ink-attracting in the lateral faces thereof, so as to impart the ink-repellency only to the face of the repair portion that corresponds to the upper portion of the partition thereof; and which is capable of preventing a lack of uniformity in a pixel film thickness in an inkjet for pixel forming after a repair. A method of repairing a defect that arises in partition that is formed to form a plurality of spaces upon a substrate, said partition being ink-repellent in the upper face thereof and ink-attracting in the lateral face thereof, includes the steps of detecting a defect; filling at least all defects when hardening a defect with a hardening repair fluid, said repair fluid being ink-repellent, and applying same in a coating that is approximately the same size as the surrounding partition; hardening the hardening repair fluid into the repair portion; and projecting laser light upon the faces of the repair portion that are contiguous with the lateral faces of the partition thereof.

Description

201202758 六、發明說明: C 明戶斤屬·=^ #支系餘々貝3 發明領域 本發明係有關於一種修正隔壁之缺損缺陷的方法,該 隔壁係將基板表面劃分成為複數區隔者。 c先前技術3 發明背景 近年來,作為彩色濾光片和有機EL(Electro -Luminescence ;電激發光)元件之製造方法,有提案揭示一 種利用喷墨法之低成本化的製程。 例如’在彩色濾光片的製造上,係在形成具有拒液性 的隔壁之後,使用噴墨法在被隔壁區隔的像素區域塗布 R(紅色)、G(綠色)、B(藍色)的油墨來形成具有著色層之像 素。 又,在有機EL顯示元件的製造上,係在形成具有拒、夜 性的隔壁之後,使用喷墨法在被隔壁區隔的像素區域塗布 電洞輸送材料及發光材料的溶液亦即油墨,來形成 洞輸送層、發光層等之像素。 在彩色濾光片之製造上,若在隔壁有缺損缺陷時,透 過缺陷而鄰接的點(d 〇 t)所塗布之不同顏色的油墨彼此間會 接觸等,有因而產生混色之情形。 在有機EL顯示元件之製造上,若於隔壁有缺損缺^ 時,在透過該缺陷而鄰接的點所塗布之不同發色的油黑之 間,有因接觸等而產生混色之情形。又,即便是只有將相 201202758 同油墨製膜的情況’控制油墨的厚度也會變困難。 修正如此在隔壁的缺損缺陷時,為了防止上述混色’ 一般認為必須使修正部分亦具有拒油墨性,且多半使用在 修補油墨添加拒油墨劑而成者。但是,在含有拒油墨劑的 修補油墨,塗布性等會有問題,致使難以精確度良好地修 正成為與隔壁同等的寬度和高度。 作為解決該問題而邊使修正部具有拒油墨性、邊精確 度良好地修正隔壁之方法,例如在專利文獻1,提案揭示一 種技術,其係針對隔壁的缺損缺陷,於修正處使底塗層形 成之後’使用含有拒油墨劑的修補油墨進行修正。 在專利文獻卜因為在使含有拒油墨劑的修補油墨熱硬 化之後未進行特別的處理’在所形成的皮膜表面係全面 成為拒油墨性。因此’在隔壁修正後’在修正部之相當於 隔壁側面部分的油墨之濕潤性低落,致使所形成的著色層 (像素)之膜厚度係在隔壁修正部的側 面比在像素中心部 薄、亦即有產生白點之問題。 先前技術文獻 專利文獻 [專利文獻1]日本專利特開2008_76725號公報 【明内笔^】 發明概要 發明欲解決之課題 本發明係為了解決上述先前技術所具有的問題而進行 者’且係將提供—種隔壁之修正方法作為目的,該隔壁係 201202758 上面_有拒油墨性且側面具有親油墨性,且係用以在基板 上形成複數區隔而職於錄板上。麵壁之修正方法係 以只有使修正部中相當㈣壁上部之表面具有拒油墨性之 方式’來修正在隔壁所發生的缺損_,在修正後所進行 之用以形成像素的印墨吐出時,能夠防止在修正部中相當 於側面之部分的濕麟低落,藉此能夠防止像素的膜 尽度不均勻化。 用以欲解決課題之手段 本發明係下[1]〜[12]之發明。 [1] -種上面具有拒油墨性且側自具有親油墨性之隔壁之 _缺陷祕正方法,雜正隔壁之缺損缺陷之方法,該 3 J係用以在基板上形成複數個區隔而配設在前述基板上 者,其上面具有拒油墨性且側面具有親油墨性丨該方法之 特徵在於具備下述步驟: 檢測步驟,其係檢測前述隔壁的缺損缺陷者; 塗布步驟,其對於前述缺損缺陷,係以下述方式進行 塗佈:使含有拒油墨劑的硬化性修正液於該修正液硬化時 至少填充前述缺損缺陷,且成為與周邊隔壁大致相同大小; 使前述硬化性修正液硬化而作成修正部之步驟;及 除去步驟,其對於前述修正部中與前述隔壁側面連續 的面照射雷射光,並除去在照射部位中之前述修正部的表 層。 [2] 如[1]之修正方法,其於將照射前述雷射光前之修正部 的膜厚度最大值設為hi,且將藉由雷射光照射而被除去之 201202758 表層的厚度設為h2時,h2/hl<0.5。 [3] 如[1]或[2]之修正方法,其中前述隔壁係藉由下述步驟 而製得者: 在基板上塗布含有拒油墨劑之感光性樹脂組成物,而 形成該感光性樹脂組成物的塗膜層, 隨後,透過對應於所需要的圖案之光罩,對前述塗膜 層照射光線,而使被照射光線的部分硬化, 隨後’進行顯像處理,並除去未被照射光線的部分而 製得隔壁。 [4] 如[3]之修正方法,其中前述感光性樹脂組成物更含有 光自由基聚合性的黏合劑樹脂及光聚合起始劑。 [5] 如[3]或[4]之修正方法,其中前述拒油墨劑係在側鏈具 有氟烷基及乙烯性雙鍵之聚合物。 [6] 如[1]至[5]項中任一項之修正方法,其中前述雷射光之 照射係從前述修正部的最外端朝向隔壁内側對2〜1〇μίη的 區域表面進行。 []如[1]至[6]項中任一項之修正方法,其中前述硬化性修 正液含有含氟拒油墨劑。 [8] 如[7]之修正方法,其中前述含氟拒油墨劑含有乙烯性 雙鍵。 [9] 如[7]或[8]之修正方法,其中前述硬化性修正液更含有 自由基交聯劑及光聚合起始劑。 ]如[1]至[9]項中任一項之修正方法,其中前述隔壁係具 有遮光性之隔壁。 201202758 [11] 如[1]至[10]項中任一項之修正方法,其中前述隔壁係 彩色濾光片用之隔壁。 [12] 如[1]至[11]項中任一項之修正方法,其中前述隔壁係 有機EL元件用之隔壁。 發明效果 依照本發明的隔壁之修正方法,係以只有使相當於隔 壁上部之修正部表面具有拒油墨性之方式,來修正以將基 板劃分成複數區隔的方式形成於基板上之隔壁所發生的缺 損缺陷,在修正後所進行之用以形成像素的印墨吐出中, 能夠防止在修正部之相當於隔壁側面部分的油墨之濕潤性 低落,因此能夠防止像素的膜厚度不均勻化。 圖式簡單說明 第l(a-d)圖係模式性顯示本發明的隔壁之修正方法的 一個例子之圖。 第2(a-b)圖係模式性顯示本發明的隔壁之修正方法的 一個例子中硬化步驟後的修正部之立體圖及剖面圖之圖。 第3圖係顯示藉由本發明的隔壁之修正方法的一個例 子而最後所得到的修正部剖面圖。 I:實施方式3 用以實施發明之形態 以下說明用以實施本發明之形態,但是本發明係不被 以下的實施形態限定。 又,在本說明書,只要未特別說明,%係表示質量%。 又,(曱基)丙烯醯基係使用作為意味著丙烯醯基及曱基丙烯 201202758 醯基兩者之_。(曱基)丙_@旨係使用作為意味著丙蛾酸 醋及甲基丙烯酸酯兩者之總稱。 、本發明的隔壁之修正方法係隔壁的缺損缺陷之修正方 法’該隔壁係用以在基板上形成複數區隔而配設在前述基 板上者’其上面具有拒油墨性且側面具有親油墨性,其特 徵為具有下述⑴〜(4)的步驟。以將⑴〜⑷的步驟依照該 順序進打為佳。又,在⑴〜⑷步驟前、步驟間及步驟後, 只要不對各步驟造成不良料,亦可進行其他步驟。 ⑴檢測前述隔壁的缺損缺陷之步驟(以下稱為「缺損缺 陷檢測步驟」), (2) 對於前述缺損缺陷,將含有拒油墨劑的硬化性修正 液進行塗布之步驟,其係以於該修正液硬化時至少填充前 述缺損缺陷且與周相壁大致相同大小的方式進行塗布 (以下稱為「塗布步驟」), (3) 使前述硬化性修正液硬“作為修正部之步驟(以 下稱為「硬化步驟」),及 ⑷對於前祕正部中與前述隔壁側面連續的面照射雷 射光,並料在照射部㈣之前述修正部的表層之步驟(以 下稱為「雷射光照射步驟」)。 亦即,本發明的 分成複數區隔的 之者,該物品係藉 複數像素’而配設在前述基板上之隔壁 修正方法作為對象之隔壁係以將基板上 狀態所形成’且係為了製造物品而使用 201202758 由油墨吐出法,在基板上的隔壁所劃分之區域(以下亦稱為 「點(dot)」)塗布油墨來形成由油墨皮膜獲致之像素而得到 者。因此,只要是使用此油墨吐出法來形成像素之物负用 隔壁,本發明的修正方法皆可應用而沒有特別限制。町適 s舉出構成顯示器的顯示畫面之光學構件用隔壁。又,此 時,通常係在隔壁構成成分調配黑色遮光構件,而使用構 成為兼具遮光層功能之隔壁。 时又,作為光學構件,具體上可例示構成彩色液晶顯杀 器的顯示晝面之彩色濾光片。此時,使用由油墨皮膜所構 成之像素,係由將透射光著色之著色層所構成,且該著色 層係上述每點具有不同色彩之複數顏色者。又,作為光學 構件,亦可例示有機電激發光元件。此時,由油墨皮膜所 構成之像素係構成有機發光材料層。又,係上述每點具有 不同色彩之複數顏色的有機發光材料層。 而且,除了該等以外,使用本發明之隔壁並藉由油墨 、去所製造之物品,亦可例示電路基板、薄膜電晶體、 镟透鏡、生物晶片(biochip)等。 作為能夠應用本發明的隔壁修正方法之上述隔壁的大 小、亦即高度及寬度,通常係只要是與使用作為藉由油墨 吐出法形成像素之物品用隔壁同樣大小,則沒有特別限 制。雖然亦取決於使用隔壁之物品,不過隔壁的線寬方面, 具體上其平均值以ΙΟΟμιη以下為佳,以40μιη以下為更佳, 以2 〇 μΠ1以下為特佳。隔壁的線寬之平均值係以10 μm以上為 佳。又’作為隔壁的高度,具體上’其平均值以0.05〜50μηι 201202758 為佳,以0.2〜1一為更佳,以〇5〜3卿為特佳。 又,作為能夠應用本發明的隔壁修正方法之隔壁的形 狀係沒有特別限制,倒錐形、矩形、順錐形的任-形狀均 可。隔壁的側壁與隔壁的底面所構成的錐角係以3〇。〜15〇。 為佳錐角太小 '錐角大大時,對比均有低落的可能性。 關於由應用本發明的隔壁修正方法之隔壁所區隔而成 之像素區域、亦即點的寬度和面積,通常只要是與藉由油 墨吐出法形成像素之物品的點同樣大小,則沒有特別限 制。雖f亦取決於應用隔壁之物品,不過被隔壁劃分而成 的點之寬度’具體上,其平均值以3_减下為佳,以1〇〇师 乂下為更佳。每個點的尺寸(面積)係以5,000μηα2〜 5〇’〇〇〇=為佳’以10,000卿2〜120,000μηι2為較佳,以 15’ΟΟΟμηι2〜⑽’咖μιη2為特佳。點的尺寸太小時藉由油 土口出法在所需要的點塗布油墨係有變為困難之虞。另— ^點的尺寸太大時’所塗布的油墨在點均勻地濕潤擴 展係有變為困難之虞。 $了成夠藉由此種油墨吐出法來製造上述物品, 係通常上部表面為拒油墨性’而上部除外之 的、.¾色具有親油紐之構造,藉此,㈣防止像素間 缺損t素膜厚度的不均勻化(白點)。因此,對將隔壁的 性。在、2以修正之修正部,亦被要求與上述同樣的特 化物來製‘二係使用含有拒油墨性的硬化性修正液的硬 修正部中與1缺陷加以修正之修正部,進—步對在該 、述搞壁側面連續的面照射雷射光來進行親油 10 201202758 墨化’藉此能夠使修正部亦具有與上述隔壁同樣的特性, 有上部表面為具有拒油墨性,側面係具有親油墨性。 而且’雖然由因照射雷射光而被除去的修正硬化物所 構成之修正部的表層部分 ,會成為親油墨性的飛珠而飛散 至周固,依照本發明的方法,飛沫的產生係少量且對修正 p附处的隔壁之拒油墨性造成的影響可以說是幾乎沒 有。 乂下,邊參照第1 (a)〜(d)圖(模式性顯示本發明的隔壁之 你正方法的一個例子之圖)、邊詳細地說明在本發明的隔壁 、損缺陷之修正方法中上述(1)〜(4)的各步驟。 第1 (a)圖係顯示以將基板上劃分成為複數點(^的)的方 式所形成之隔壁一部分及在隔壁所產生之缺損缺陷之圖。 第1〇3)圖係顯示在隔壁的缺損缺陷塗布硬化性修正液之(2) v驟之圖,弟i(c)圖係顯示使硬化性修正液硬化之(3) 、 圖。又,第1 (d)圖係顯示對與修正部的隔壁側面 連^的面(與在㈣邊界附近之表Φ)照射f射光之⑷雷射 係…射^驟之圖。在第1⑻〜⑷圖中’㈣、⑻)、(Cl)、⑷) '上面觀看之平面圖,(a2)、(b2)、(c2)、(d2)係在相當於 }〜(dl)的平面圖上χ-χ’ '線部分的剖面圖。 (1)缺損缺陷檢測步驟 X⑴缺知缺陷檢測步驟,係在以將基板!上劃分成為複 該進Hi方式所形成之隔壁2,檢測如第1⑷圖所表示之應 、❸缺損缺陷3之步驟。檢測在基板1上的隔壁2所 存在的缺損缺陷3 / <方法’係可使用通常從此種隔壁檢測缺 201202758 損缺陷所使用的方法而沒有特別限制。 作為上述檢測方法,具體上可舉出使用CCD.影機拍 攝隔壁2’藉由將其與預先準備的基準圖案比較來識別缺損 缺點3之方法;及使用CCD攝影機拍攝隔壁2,藉由比較已 輸入的信號與遲延了圖案間隔程度的信號,檢測出規則性 圖案以外之缺損缺陷特有的數據,將之作為缺損缺陷3而檢 測之方法等。就成本而言,以前者的方法為佳。 本發明的修正方法作為對象的隔壁,其形成方法係沒 有特別限定。又,用以形成隔壁之感光性樹脂組成物係可 以是負型感光性組成物,亦可以是正型感光性樹脂組成 物。負型感光性樹脂組成物時,係進而依照硬化種類而被 分類成若干類型’可舉出例如自由基硬化型、酸硬化型等 類型。正型感光性樹脂組成物的情況,係進而被分類成為 若干類型,可舉出例如含有鄰萘醌二疊氮的類型、含有被 封端化的酸性基之類型。以下,採用自由基硬化型負型感 光性树月曰組成物作為例子來進行說明,但是本發明係不 被該等限定。 使用負型感光性樹脂組成物之隔壁係通常藉由以下的 程序來形成。又,關於形成隔壁的程序,因為在 W02__G42474號公報等有詳細地記載各式各n _ # 的例子’故在本說明書係省略詳細的說明。 (a) 在基板上塗布含拒油墨劑的感光性樹脂組成物,來 形成該感光性樹脂組成物的塗膜層。 (b) 透過對應所需要的圖案之光罩,對前述塗膜層照射 12 201202758 紫外線等的光線’來使被光線照射的部分硬化。 (C)進行顯像處理’來除去未被照射光線之部分Q 在本發明,自由基硬化型感光性樹脂組成物係至少含 有光自由基♦合性的黏合劑樹脂、光聚合起始劑及拒油墨 劑,且按照必要含有交聯劑等其他成分者,可使用先前眾 所周知的負漤感光性樹脂組成物用作光學元件的隔壁形 成。作為此種負型感光性樹脂組成物的具體例,可舉出在 特開平8-278629號公報、特開2〇〇〇_1522號公報、特開 2002-40650號公報、特開2002-83688號公報及w〇 2008/133312號公報所揭示的負型感光性樹脂組成物。 作為上述光自由基聚合性的黏合劑樹脂,宜為於微影 術之曝光時,在光照射部分藉由光聚合起始劑的作用而進 '亍自由基聚p且被促進硬化,並且於繼曝光後進行顯像 在光卩分(未曝光部分)會溶解於顯像液之樹脂。 m Ζ的顯像液通常為驗性,故通常以制對驗性顯 合劑樹:::的樹脂(以下亦稱為驗可溶性樹脂)來作為黏 作為此種光白Λ w 樣,可舉出料^ ㈣合劑樹脂之—較佳態 稀性雙鍵,缝触性基讀脂。料前述乙 乙烯例如(甲基)丙稀酿基、烯丙基、乙烯基、 和=原::成r合性不飽和基、該等加成聚合性不飽 性基,具體上分或全部被烴基取代之基等,作為酸 在黏合劑樹脂中,λ基、酚性經基、魏基及磷酸基等。 对月曰係在前述乙烯性雙鍵部分進行自由 13 201202758 基聚合而形成隔壁。又,藉由前述酸性基,含有其之感光 性樹脂組成物的塗膜之未曝光部分,係能夠使用鹼性顯像 液來除去。 作為上述光自由基聚合性的黏合劑樹脂之較佳態樣, 更具體地,可舉出含有具有酸性基的側鏈及具有乙烯性雙 鍵的側鏈之聚合物,其係藉由將具有酸性基的乙烯性不飽 和單體和具有能夠與反應性基鍵結的官能基之乙烯性不飽 和單體等的共聚物之官能基改性而得到;及在環氧樹脂導 入乙烯性雙鍵及酸性基而成之樹脂等。 作為含有感光性樹脂組成物之光聚合起始劑,可舉出 <2-二酮類、醯偶姻(acyloin)類、醯偶姻醚類、9-氧硫《山嗤 (thioxanthone)類、苯乙酮類、苯醌類、二苯基酮類、胺基 苯甲酸類、函素化合物、醯基氧化膦類、過氧化物、肟酯 類等。在本發明中,在負型感光性樹脂組成物之上述光聚 合起始劑的調配比率係相對於上述光自由基聚合性的黏合 劑樹脂’以2〜40質量%為佳,以5〜20質量%為更佳。如此 範圍時,感光性組成物的硬化性及顯像性變為良好。 本發明之感光性樹脂組成物,在使用其形成隔壁時, 在隔壁的上部表面含有賦予拒油墨性之拒油墨劑。在此, 所謂拒油墨性,係指依照油墨的組成而具有拒水性或拒油 性、或是具有拒水性及拒油性雙方之性質。更具體地,係 指拒斥油墨中所使用的水和有機溶劑等溶劑之性質,通常 各自可利用水和適當的有機溶劑、例如1 -甲氧基-2-乙醯乳 基丙烷、丙二醇卜一曱基醚2-乙酸酯(PGMEA)等通常在喷 14 201202758 墨法所使用的油墨所含的有機溶劑之接觸角來評價。本發 明之拒油墨劑係如下述之化合物:當含有其之感光性樹脂 組成物形成隔壁時,可對隔壁的上部表面賦予所要求之拒 油墨性、亦即拒斥油墨中所使用的水和有機溶劑等溶劑的 性質之。 藉由調配此種感光性樹脂組成物來形成隔壁時,作為 對隔壁的上部表面賦予拒油墨性之拒油墨劑,可適合舉出 含氟化合物、含石夕化合物、同時具有氟原子與石夕原子之化 合物等。 作為上述拒油墨劑所使用的含氟化合物,係沒有特別 限制地可舉出先前眾所周知的拒油墨劑用含氟化合物、例 如氟烯烴系樹脂(參照特開2004-053897號公報(段落 0011))、在侧鏈具有IL烧基之聚合物(參照特開平7-35915號 公報、W02004/042474號公報、W02006/129800號公報、 W02007/069703號公報、特開平11-281815號公報(段落 0042、0062、0073 〜0075)、特開 2005-315984 號公報、特開 2005-036160號公報、特開2004-277493號公報、特開平 11 - 3 2 7131號公報(參照段落〇 〇 3 6)等。 又’作為上述拒油墨劑所使用的含矽化合物,係沒有 特別限制地可舉出先前眾所周知的拒油墨劑用含矽化合 物,例如具有二甲基矽氧烷基之聚合物(參照特開 2004-149699號公報、特開2005—134439號公報)等。 作為上述拒油墨劑所使用之同時具有氟原子與矽原子 之化合物’係沒有特別限制地可舉出先前眾所周知的拒油 15 201202758 墨劑用含氟含石夕化合物’例如含氟矽烷偶合劑(參照特開平 9-2〇3803號公報(段落0030〜〇〇34)、同時具有氟烷基及二曱 基矽氧烷基之化合物(參照特開昭61_275365號公報、特開 2003-82042號公報(段落〇〇7〇、〇〇72)、W02004/079454號公 報、特開2005-315983號公報、特開2005-300759號公報、 WO2008A23122號公報等。 此種拒油墨劑當中’含氟拒油墨劑因為賦予拒油墨性 的能力高而屬適宜’可舉出在側鏈具有氟烷基的聚合物作 為較佳態樣。 作為上述拒油墨劑的較佳態樣之一亦即在側鏈具有氟 烷基的聚合物之製造方法,可參照在特開2〇〇〇_1〇2727號公 報、特開2〇02-249706號公報等所揭示的方法。 作為拒油墨劑的較佳態樣,可舉出在側鏈具有氟烷基 與乙烯性雙鍵之聚合物。其理由係制該在側鏈具有氟炫 基與乙烯性雙鍵之聚合物作為拒油墨劑時,前述拒油墨劑 會與負型感光性樹脂組成物中的其他調配成分反應而在隔 壁上部表面被固定化。 此種在側鏈具有氟烷基與乙烯性雙鍵之聚合物之一較 佳態樣’可舉出含有下列聚合單元之聚合物:具有氮原子 的至v 1個、較佳是全部係被氟原子取代之碳數為2〇以下的 直鍵狀或分枝狀的絲(但是,絲係包含具_性的氧者) 之聚合單元;及具有(甲基)丙烯醯基、烯丙基、乙烯基、乙 烯醚基等的乙烯性雙鍵之聚合單元。 作為拒油墨劑所使用之上述聚合物的數量平均分子 16 201202758 量’係以500以上、, 小於100,000為佳,以1,000以上、小於201202758 VI. Description of the invention: C. The invention relates to a method for correcting a defect of a partition wall, which partitions the surface of the substrate into a plurality of compartments. C. Prior Art 3 Background of the Invention In recent years, as a method of manufacturing a color filter and an organic EL (Electro-Luminescence) element, there has been proposed a process for reducing the cost by the ink-jet method. For example, in the production of a color filter, after forming a partition having liquid repellency, R (red), G (green), and B (blue) are applied to the pixel region partitioned by the partition wall by an inkjet method. The ink is used to form a pixel having a colored layer. Further, in the production of an organic EL display device, after forming a partition having a refusal and nightness, an inkjet method is used to apply a solution of a hole transporting material and a luminescent material, that is, an ink, to a pixel region partitioned by a partition wall. A pixel such as a hole transport layer or a light-emitting layer is formed. In the manufacture of a color filter, when there is a defect in the partition wall, inks of different colors applied by dots (d 〇 t) which are adjacent to each other through the defect may come into contact with each other, and thus a color mixture may occur. In the manufacture of an organic EL display device, if there is a defect in the partition wall, color mixing may occur due to contact or the like between the oil-colored blacks of different colors applied at the adjacent dots passing through the defect. Further, even if only the phase 201202758 is formed with the ink, it is difficult to control the thickness of the ink. When the defect of the partition wall is corrected as described above, in order to prevent the above-mentioned color mixture, it is considered that the correction portion must also have ink repellency, and most of the ink is added to the repair ink to add the ink repellent agent. However, in the repair ink containing the ink repellent agent, there is a problem in coatability and the like, and it is difficult to accurately correct the width and height equivalent to the partition walls. As a method for correcting the problem, the correction portion has ink repellency and the partition wall is corrected with good precision. For example, Patent Document 1 proposes a technique for making a primer layer at a correction point for a defect of a partition wall. After the formation, the correction is performed using the repair ink containing the ink repellent. In the patent document, since the ink containing the ink repellent agent is hardened, no special treatment is performed, and the surface of the formed film is completely ink-repellent. Therefore, the 'wetness of the ink corresponding to the side wall portion of the correction portion after the correction of the partition wall is lowered, so that the film thickness of the formed color layer (pixel) is thinner on the side surface of the partition correction portion than at the center portion of the pixel. That is, there is a problem of white spots. CITATION LIST Patent Literature [Patent Document 1] Japanese Patent Laid-Open Publication No. Hei. No. 2008-76725 [Announcement of the Invention] Summary of the Invention The present invention has been made in order to solve the problems of the prior art described above. For the purpose of the method for correcting the partition wall, the partition wall system 201202758 has an ink repellency and a side ink-repellent property, and is used to form a plurality of partitions on the substrate to serve on the recording board. The method of correcting the face wall is to correct the defect occurring in the partition wall by merely making the surface of the upper portion of the correction portion (the upper portion of the wall) ink-repellent, and to perform the discharge of the ink for forming the pixel after the correction. It is possible to prevent the wet lining of the portion corresponding to the side surface in the correction portion from being lowered, whereby the film uniformity of the pixel can be prevented from being uneven. Means for Solving the Problems The present invention is the invention of [1] to [12]. [1] - a method of preventing ink defects on the side of a substrate having a ink-repellent property and a side-by-side ink-repellent property, and a method of forming a plurality of segments on a substrate Provided on the substrate, which has ink repellency on the upper side and ink repellency on the side surface, the method is characterized in that the method includes the following steps: a detecting step of detecting a defective defect of the partition wall; and a coating step for the aforementioned The defect defect is applied by causing the curable correction liquid containing the ink repellent agent to fill at least the defect defect when the correction liquid is cured, and to have substantially the same size as the peripheral partition wall; and curing the curable correction liquid a step of forming a correction unit; and a removing step of irradiating the surface of the correction portion that is continuous with the side surface of the partition wall with laser light, and removing a surface layer of the correction portion in the irradiation portion. [2] The correction method according to [1], wherein the maximum thickness of the film thickness of the correction portion before the irradiation of the laser light is hi, and the thickness of the 201202758 surface layer removed by the irradiation of the laser light is h2 , h2/hl<0.5. [3] The method of modifying [1] or [2], wherein the partition wall is obtained by the following steps: coating a photosensitive resin composition containing an ink repellent agent on a substrate to form the photosensitive resin The coating layer of the composition is then irradiated with light through the mask corresponding to the desired pattern to harden the portion of the irradiated light, and then 'developing the image and removing the unirradiated light The part is made next door. [4] The method according to [3], wherein the photosensitive resin composition further contains a photo-radical polymerizable binder resin and a photopolymerization initiator. [5] The method of modifying [3] or [4] wherein the ink repellent agent is a polymer having a fluoroalkyl group and an ethylenic double bond in a side chain. [6] The correction method according to any one of [1] to [5] wherein the irradiation of the laser light is performed from the outermost end of the correction portion toward the inner surface of the partition wall to the surface of the region of 2 to 1 〇μίη. The method of any one of [1] to [6] wherein the sclerosing correction liquid contains a fluorine-containing ink repellent. [8] The method according to [7], wherein the fluorine-containing ink repellent agent contains an ethylenic double bond. [9] The method of modifying [7] or [8], wherein the sclerosing correction liquid further contains a radical crosslinking agent and a photopolymerization initiator. The correction method according to any one of [1] to [9] wherein the partition wall has a partition wall having a light blocking property. [11] The method of any one of [1] to [10] wherein the partition wall is a partition wall for a color filter. [12] The method of any one of [1] to [11] wherein the partition wall is a partition wall for an organic EL element. Advantageous Effects of Invention According to the method for correcting a partition wall of the present invention, it is possible to correct the partition wall formed on the substrate so as to divide the substrate into a plurality of partitions so that the surface of the correction portion corresponding to the upper portion of the partition wall has ink repellency. In the ink discharge for forming a pixel after the correction, it is possible to prevent the wettability of the ink corresponding to the side surface portion of the partition portion of the correction portion from being lowered, and thus it is possible to prevent the film thickness of the pixel from being uneven. BRIEF DESCRIPTION OF THE DRAWINGS The first (a-d) diagram schematically shows an example of a method of correcting the partition wall of the present invention. The second (a-b) diagram schematically shows a perspective view and a cross-sectional view of the correction portion after the hardening step in an example of the method for correcting the partition wall of the present invention. Fig. 3 is a cross-sectional view showing the modified portion finally obtained by an example of the method for correcting the partition wall of the present invention. I. Embodiment 3 Mode for Carrying Out the Invention Hereinafter, the mode for carrying out the present invention will be described. However, the present invention is not limited by the following embodiments. In addition, in this specification, unless otherwise indicated, % shows the mass %. Further, the (mercapto) acrylonitrile group is used as both acryloyl group and fluorenyl propylene 201202758 fluorenyl group. (曱基)丙_@的系系系是是是指指的指指的指指。 The method for correcting the partition wall of the present invention is a method for correcting a defect of a partition wall. The partition wall is configured to form a plurality of partitions on a substrate and is disposed on the substrate. The ink jet on the substrate has ink repellency and the side has ink affinity. It is characterized by having the following steps (1) to (4). It is preferable to perform the steps of (1) to (4) in accordance with the order. Further, before (steps) and (steps) and after the steps, other steps may be performed as long as no defective material is caused in each step. (1) a step of detecting a defect of the partition wall (hereinafter referred to as a "defective defect detecting step"), and (2) a step of applying a curable correction liquid containing an ink repellent agent to the defect defect, which is based on the correction When the liquid is hardened, at least the defect defect is filled and applied to the circumferential wall in substantially the same size (hereinafter referred to as "coating step"), and (3) the hardening correction liquid is hard "as a step of correcting the portion (hereinafter referred to as "hardening") And (4) a step of irradiating the surface of the front secret portion with the side surface of the partition wall and irradiating the surface of the portion of the correction portion (hereinafter referred to as "the laser light irradiation step"). In other words, in the case of the present invention, the partitioning correction method of the object is a partition wall of the object to form a state on the substrate, and is for manufacturing an article. On the other hand, using 201202758, an ink is discharged from a region (hereinafter also referred to as "dot") which is partitioned by a partition wall on a substrate to form a pixel obtained by the ink film. Therefore, the correction method of the present invention can be applied without any particular limitation as long as it is a negative partition for forming a pixel using the ink discharge method. The town is the partition wall for the optical member which comprises the display screen of a display. Further, in this case, a black light-shielding member is usually placed in the partition wall constituent component, and a partition wall having a function as a light-shielding layer is used. Further, as the optical member, a color filter constituting the display pupil of the color liquid crystal display device can be specifically exemplified. At this time, a pixel composed of an ink film is used, which is composed of a coloring layer colored with transmitted light, and the colored layer is a plurality of colors having different colors for each dot described above. Further, as the optical member, an organic electroluminescence device can also be exemplified. At this time, the pixel composed of the ink film constitutes an organic light-emitting material layer. Further, it is a layer of an organic light-emitting material having a plurality of colors of different colors at each point described above. Further, in addition to these, a circuit board, a thin film transistor, a krypton lens, a biochip or the like can be exemplified by using the partition of the present invention and using the ink or the article to be manufactured. The size of the partition wall, that is, the height and the width of the partition wall to which the partition correction method of the present invention is applied is not particularly limited as long as it is the same size as the partition wall for an article which forms a pixel by the ink discharge method. Although it depends on the article using the partition wall, the average width of the partition wall is preferably ΙΟΟμιη or less, more preferably 40 μm or less, and particularly preferably 2 〇 μΠ1 or less. The average line width of the partition wall is preferably 10 μm or more. Further, as the height of the partition wall, the average value is preferably 0.05 to 50 μηι 201202758, more preferably 0.2 to 1 is preferred, and 5 to 3 is preferred. Further, the shape of the partition wall to which the partition correction method of the present invention can be applied is not particularly limited, and may be any shape of a reverse tapered shape, a rectangular shape, or a tapered shape. The taper angle formed by the side wall of the partition wall and the bottom surface of the partition wall is 3 inches. ~15〇. The angle of the cone is too small. When the cone angle is large, the contrast is low. The pixel region, that is, the width and the area of the dot, which are partitioned by the partition wall to which the partition correction method of the present invention is applied, are usually not particularly limited as long as they are the same size as the point at which the pixel is formed by the ink discharge method. . Although f also depends on the application of the next door, but the width of the point divided by the next wall 'specifically, the average value is preferably reduced by 3_, preferably 1 〇〇 division. The size (area) of each dot is preferably 5,000 μη α 2 5 〇 〇〇〇 ’ ’ ’ 10,000 10,000 10,000 10,000 10,000 10,000 10,000 10,000 10,000 10,000 10,000 10,000 10,000 10,000 10,000 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 When the size of the dots is too small, it is difficult to apply the ink at the desired point by the oily soil outlet method. On the other hand, when the size of the dot is too large, the applied ink becomes uniformly difficult to spread evenly at the point. It is enough to manufacture the above-mentioned articles by the ink discharge method, which is generally a structure in which the upper surface is ink-repellent and the upper portion is excluded, and the .3⁄4 color has a oleophilic structure, thereby (4) preventing inter-pixel defects. Unevenness of the thickness of the plain film (white spots). Therefore, the pair will be next to the sex. In the correction unit of the second aspect, the correction unit that corrects the one defect in the hard correction unit containing the ink-repellent curable correction liquid is also required to be manufactured in the same manner as described above. By irradiating the laser light to the surface continuous on the side surface of the wall and performing the oleophilic 10 201202758 inking, the correction portion can have the same characteristics as the partition wall, and the upper surface has ink repellency and the side surface has Ink-friendly. Further, the surface layer portion of the correction portion composed of the corrected cured material removed by the irradiation of the laser light becomes a ink-repellent flying bead and is scattered to the periphery. According to the method of the present invention, the generation of the droplet is small and It is said that there is almost no influence on the ink repellency of the partition wall of the correction p attachment. In the following, referring to the first (a) to (d) drawings (a diagram showing an example of the positive method of the partition wall of the present invention in a schematic manner), the method for correcting the partition wall and the damage defect of the present invention will be described in detail. Each of the above steps (1) to (4). Fig. 1(a) is a view showing a part of the partition wall formed by dividing the substrate into a plurality of points (^) and a defect defect generated in the partition wall. Fig. 1(3) shows the (2) v diagram of the defect defect coating liquid on the partition wall, and the figure i(c) shows the hardening correction liquid (3) and the figure. Further, the first (d) diagram shows a (4) laser system for irradiating the light to the surface of the partition wall of the correction portion (the surface Φ near the boundary of the (four)). In the plan view of '(4), (8)), (Cl), (4))' in the first (8) to (4), (a2), (b2), (c2), and (d2) are equivalent to }~(dl). A cross-sectional view of the line portion of the χ-χ' ' on the plan. (1) Defect defect detection step X (1) The defect defect detection step is performed by the substrate! The upper partition 2 is divided into the partition wall 2 formed by the Hi method, and the step of detecting the defective defect 3 as shown in Fig. 1 (4) is detected. The defect defect 3 / <detecting" which is present in the partition wall 2 on the substrate 1 is a method which is generally used for detecting a defect of the 201202758 defect from such a partition wall, and is not particularly limited. Specifically, as the detection method, a method of recognizing the defect defect 3 by comparing the reference wall 2' with a reference pattern prepared in advance by using a CCD camera is used, and the partition wall 2 is photographed by using a CCD camera. The input signal and the signal delayed by the pattern interval are detected, and data unique to the defect defect other than the regular pattern is detected, and the detection method is used as the defect defect 3. In terms of cost, the former method is better. The method for forming the partition wall to which the present invention is applied is not particularly limited. Further, the photosensitive resin composition for forming the partition walls may be a negative photosensitive composition or a positive photosensitive resin composition. In the case of the negative-type photosensitive resin composition, it is classified into several types depending on the type of curing, and examples thereof include a radical curing type and an acid curing type. The positive photosensitive resin composition is further classified into several types, and examples thereof include a type containing an ortho-naphthoquinone diazide and a type containing an acid group which is blocked. Hereinafter, the radically curable negative photosensitive tree composition will be described as an example, but the present invention is not limited thereto. The partition wall using the negative photosensitive resin composition is usually formed by the following procedure. In addition, the procedure for forming the partition wall is described in detail in the specification of WO 02__G42474, etc., and the detailed description of each of the examples is omitted. (a) A photosensitive resin composition containing an ink repellent agent is applied onto a substrate to form a coating layer of the photosensitive resin composition. (b) The coating layer is irradiated with light such as 12 201202758 ultraviolet rays through a mask corresponding to the desired pattern to harden the portion irradiated with the light. (C) performing a development process to remove a portion Q that is not irradiated with light. In the present invention, the radical-curable photosensitive resin composition contains at least a photo-radical compound adhesive resin, a photopolymerization initiator, and When the ink repellent agent is contained and other components such as a crosslinking agent are contained as necessary, a conventionally known negative ruthenium photosensitive resin composition can be used as a partition wall of the optical element. Specific examples of such a negative-type photosensitive resin composition include JP-A-H08-278629, JP-A No. 2-11-522, JP-A-2002-40650, and JP-A-2002-83688. The negative photosensitive resin composition disclosed in Japanese Laid-Open Patent Publication No. 2008-133312. As the photo-radical polymerizable binder resin, it is preferable to carry out the photo-polymerization initiator in the light-irradiated portion by the action of the photopolymerization initiator, and to promote the hardening of the p-resist and to be hardened, and After the exposure, the resin which is developed in the photorefractive (unexposed portion) is dissolved in the developing liquid. The m Ζ imaging solution is usually an inspective property, so it is usually used as a viscous resin as a viscous resin (hereinafter also referred to as a soluble resin). Material ^ (4) Mixture resin - preferred thin double bond, slit contact base read grease. The above-mentioned ethylene glycol such as (meth) propylene, allyl, vinyl, and = original:: a condensed unsaturated group, these addition polymerizable unsaturated groups, specifically upper or all The group substituted with a hydrocarbon group or the like is used as an acid in the binder resin, and a λ group, a phenolic group, a Wei group, a phosphate group or the like. The ruthenium system is subjected to polymerization in the above-mentioned ethylenic double bond portion to form a partition wall. Further, the unexposed portion of the coating film containing the photosensitive resin composition of the acidic group can be removed using an alkaline developing solution. More preferably, as a preferred aspect of the photo-radical polymerizable binder resin, a polymer containing a side chain having an acidic group and a side chain having an ethylenic double bond may be mentioned by a functional group of a copolymer of an acidic group-containing ethylenically unsaturated monomer and an ethylenically unsaturated monomer having a functional group capable of bonding with a reactive group; and an ethylenic double bond introduced into the epoxy resin A resin made of an acidic group. Examples of the photopolymerization initiator containing a photosensitive resin composition include <2-diketones, acyloins, oxime acetonides, and 9-oxo sulphur thioxanthone. , acetophenones, benzoquinones, diphenylketones, aminobenzoic acids, functional compounds, fluorenylphosphine oxides, peroxides, oxime esters, and the like. In the present invention, the blending ratio of the photopolymerization initiator in the negative photosensitive resin composition is preferably 2 to 40% by mass based on the photoradical polymerizable binder resin, and 5 to 20%. The mass % is better. In such a range, the curability and developability of the photosensitive composition become good. When the photosensitive resin composition of the present invention is used to form a partition wall, an ink repellent agent for imparting ink repellency is provided on the upper surface of the partition wall. Here, the ink repellency means that it has water repellency or oil repellency depending on the composition of the ink, or has both water repellency and oil repellency. More specifically, it refers to the property of repelling the solvent such as water and an organic solvent used in the ink, and usually each can utilize water and a suitable organic solvent, for example, 1-methoxy-2-ethylhydrazine-based propane, propylene glycol Monodecyl ether 2-acetate (PGMEA) or the like is usually evaluated by the contact angle of the organic solvent contained in the ink used in the ink jet method 201202758. The ink repellent agent of the present invention is a compound which, when the photosensitive resin composition containing the same forms a partition wall, imparts desired ink repellency to the upper surface of the partition wall, that is, water used for repelling the ink and The nature of solvents such as organic solvents. When the partition wall is formed by disposing such a photosensitive resin composition, the ink repellent agent which imparts ink repellency to the upper surface of the partition wall is preferably a fluorine-containing compound, a cerium-containing compound, and a fluorine atom and a stone eve. Atom compounds, etc. The fluorine-containing compound to be used as the above-mentioned ink repellent agent is not particularly limited, and a fluorine-containing compound for an ink repellent agent, for example, a fluoroolefin-based resin, which is known in the prior art (see JP-A-2004-053897 (paragraph 0011)) A polymer having an IL-based group in a side chain (refer to Japanese Laid-Open Patent Publication No. Hei 7-35915, No. WO2004/042474, WO2006/129800, WO2007/069703, and JP-A No. 11-281815 (paragraph 0942) 0062, 0, 007, and 007, pp., pp. pp. pp. pp. pp. pp. pp. Further, the ruthenium-containing compound to be used as the above-mentioned ink repellent agent is not particularly limited, and a conventionally known ruthenium-containing compound for an ink repellent agent, for example, a polymer having dimethyl sulfoxyalkyl group (see JP-A 2004) In the above-mentioned ink repellent agent, a compound having a fluorine atom and a ruthenium atom is not particularly limited, and it is known as a prior art. Oil repellency 15 201202758 A fluorine-containing fluorene-containing compound for inks, for example, a fluorine-containing decane coupling agent (refer to Japanese Laid-Open Patent Publication No. Hei 9-2 No. 3803 (paragraphs 0030 to 〇〇34), having both a fluoroalkyl group and a fluorenyl group The compound of the oxyalkyl group (refer to Japanese Laid-Open Patent Publication No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. -300759A, WO2008A23122, etc. Among the ink repellents, the "fluorine-containing ink repellent agent is suitable for imparting ink repellency and is suitable", and a polymer having a fluoroalkyl group in a side chain is preferred. As a method for producing a polymer having a fluoroalkyl group in a side chain, which is one of preferred embodiments of the ink repellent agent, reference is made to JP-A No. 2〇〇〇_1〇2727, JP-A No. 2 The method disclosed in Japanese Patent Publication No. 02-249706, etc. As a preferred embodiment of the ink repellent agent, a polymer having a fluoroalkyl group and an ethylenic double bond in a side chain is exemplified. When the polymer of fluoroxyl group and ethylenic double bond is used as an ink repellent agent, the above rejection The ink is reacted with other compounding components in the negative photosensitive resin composition to be immobilized on the upper surface of the partition wall. Such a polymer having a fluoroalkyl group and an ethylenic double bond in the side chain is preferable. The polymer containing the following polymerized unit: a linear or branched filament having a nitrogen atom to v 1 , preferably all having a carbon number of 2 Å or less substituted by a fluorine atom (however, silk) A polymerization unit comprising a siloxane having a hydrazine; and a polymerization unit having an ethylenic double bond such as a (meth) acrylonitrile group, an allyl group, a vinyl group or a vinyl ether group. The number average molecular weight of the above-mentioned polymer used as the ink repellent agent is more than 500, and more preferably less than 100,000, more than 1,000, less than 1,000.

量係以5 量係以5〜25質量%為佳, 的觀點而言,在該聚合物之貌含 以12〜20質量%為更佳。而且, « σ物在側鏈所具有的乙稀性雙鍵的數量’以3〜⑽個/ 刀子為佳’以6〜30個/分子為&佳。在該範圍日夺,顯像性 變為良好。 而且’上述聚合物係在側鏈能夠具有矽數為200以下程 度的石夕_(直鏈)。又’就拒油墨性及隔壁成形性的觀點, 在聚合物之矽含量係以〇5〜3〇質量%為佳,以〇5〜1〇質量 %為更佳。 在此’作為拒油墨劑所使用的上述聚合物,以具有酸 性基、例如選自由羧基、酚性羥基及磺酸基所組成群組之 至少1個酸性基為佳。其理由係藉由具有鹼可溶性,在被基 板上的隔壁劃分之區域内,拒油墨劑不容易殘留,且使用 喷墨法注入油墨時之油墨濕潤擴展性變為良好。從如此的 觀點’聚合物的酸值係以10〜400mgKOH/g為佳,以20〜 300mgKOH/g為更佳。 以上所說明之在側鏈具有氟烷基、乙烯性雙鍵及任意 之矽酮鏈、較佳是更具有酸性基之聚合物的製造方法,具 體上,係揭示在W02004/042474號公報、W02007/069703 號公報及WO2008/149776號公報。 拒油墨劑的含有比率係相對於感光性樹脂組成物的固 體成分總量,以0.01〜30質量%的範圍為佳,以0.05〜20質 17 201202758 里彳的範圍為更佳。其理由係因為所得到的隔壁之拒油墨 性良好且使用喷墨法注入的油墨在點(dot)内的濕潤擴展性 良好,而且所注入的油墨層之均勻性良好。 在本發明的製造方法所使用的感光性樹脂組成物,係 能夠按照必要而調配增大塗膜硬化物的交聯密度之自由基 父聯劑或、交聯劑、用以得到基材密著性之秒院偶合劑、 硬化促進劑、增黏劑、可塑劑、消泡劑、調平劑、防翹曲 劑、紫外線吸收劑等。 作為此種交聯劑,可舉出例如胺基樹脂、具有2個以上 的環氧基之化合物、具有2個以上的肼基之化合物、聚碳二 醯亞胺化合物、具有2個以上的噚唑啉基之化合物、具有2 個以上的。丫環丙烧基之化合物、多價金屬類、具有2個以上 的氫硫基之化合物、聚異氰_旨化合物等。該等可單獨使 用,亦可併用2種以上。The amount of the polymer is preferably 5 to 25% by mass in terms of the amount of 5, and more preferably 12 to 20% by mass in terms of the appearance of the polymer. Further, «the number of ethylene double bonds possessed by the σ substance in the side chain is preferably 3 to 10/piece, and preferably 6 to 30 molecules/molar. In this range, the imaging performance becomes good. Further, the above polymer is capable of having a number of turns of 200 or less in the side chain (straight chain). Further, from the viewpoint of ink repellency and barrier formability, the ruthenium content of the polymer is preferably 〇5 to 3 〇 mass%, more preferably 〇5 to 1 〇 mass%. The above polymer used as the ink repellent agent is preferably at least one acidic group having an acid group, for example, selected from the group consisting of a carboxyl group, a phenolic hydroxyl group and a sulfonic acid group. The reason for this is that the ink repellent agent does not easily remain in the region partitioned by the partition walls on the substrate by the alkali solubility, and the ink wettability when the ink is injected by the ink jet method becomes good. From such a viewpoint, the acid value of the polymer is preferably from 10 to 400 mgKOH/g, more preferably from 20 to 300 mgKOH/g. The method for producing a polymer having a fluoroalkyl group, an ethylenic double bond, and an optional fluorenone chain, preferably an acid group, as described above is specifically disclosed in WO2004/042474, WO2007 Japanese Patent Publication No. 069703 and WO2008/149776. The content ratio of the ink repellent agent is preferably in the range of 0.01 to 30% by mass based on the total amount of the solid content of the photosensitive resin composition, and more preferably 0.05 to 20 in the range of 201202758. The reason for this is that the ink repellency of the obtained partition walls is good, and the ink which is injected by the ink jet method has good wet spreadability in dots, and the uniformity of the ink layer to be injected is good. In the photosensitive resin composition used in the production method of the present invention, a radical parenting agent or a crosslinking agent which increases the crosslinking density of the cured film of the coating film can be blended as necessary to obtain a substrate adhesion. Sexual second coupling agent, hardening accelerator, tackifier, plasticizer, defoamer, leveling agent, anti-warping agent, UV absorber, etc. Examples of such a crosslinking agent include an amine-based resin, a compound having two or more epoxy groups, a compound having two or more sulfhydryl groups, a polycarbodiimide compound, and two or more ruthenium compounds. The compound of the oxazoline group has two or more. A compound of an anthranilyl group, a polyvalent metal, a compound having two or more hydrogenthio groups, a polyisocyanide compound or the like. These may be used singly or in combination of two or more.

樹脂組成物之夺獅亦,丨,姑UThe resin composition of the lion is also 丨, 丨, 姑U

V / -V (j- , ATM .V U AA I里隹;苻 u ,, M开另2调以上的環氧基之化合物為特佳。 ▲該等之中,在本發明的製造方法中作為添加於感光性 氰 在本發明的製造方法所使用的感光性樹脂組成物 述交聯_舰比率,_亦料於所❹的光學上 種類和用途,不過相對於感光性樹脂組成物總量 之 20質量%為更佳。在該範圍時, 30質量%為佳,以1玄... Λυ·5〜 之現像性變為良好。 ’以含有具有2個以上的乙歸性㈣ 到的感光性樹脂組成物^ 作為自由基交聯劑, 201202758 之自由基交聯劑為佳,藉此,能夠促進感光性樹脂組成物 的硬化。 作為自由基交聯劑的具體例,可舉出二伸乙甘醇二(甲 基)丙烯酸酯、四伸乙甘醇二(甲基)丙烯酸酯、三伸丙甘醇 二(曱基)丙烯酸酯、新戊二醇二(曱基)丙烯酸酯、1,9-壬二 醇二(甲基)丙稀酸酯、三羥甲基丙烷三(甲基)丙烯酸酯、新 戊四醇三(甲基)丙烯酸酯、新戊四醇四(曱基)丙烯酸酯、雙 三羥曱基丙烷四(甲基)丙烯酸酯、二新戊四醇六(甲基)丙烯 酸酯、胺甲酸酯丙稀酸酯、雙烯丙基納迪克醯亞胺(bisallyl nadiimide)等。該等可使用1種,亦可併用2種以上。 在感光性樹脂組成物的總固體成分之自由基交聯劑的 比率,係以10〜60質量%為佳,以15〜50質量%為更佳。在 該範圍時,感光性樹脂組成物的顯像性變為良好。 (遮光性粒子) 隔壁係例如黑色矩陣這種具有遮光性的隔壁的情況, 在本發明所使用的感光性樹脂組成物係以含有遮光性粒子 為佳。藉此,能夠對隔壁賦予遮光性。 作為上述遮光性粒子,可舉出例如碳黑、苯胺黑、蒽 醌系黑色顏料、茈(perylene)系黑色顏料,以碳黑為佳。又, 亦可使用樹脂等將碳黑進行表面處理。又,為了調整色調, 亦可在碳黑併用藍色顏料和紫色顏料。 從黑色矩陣等的遮光性隔壁的形狀之觀點,作為碳 黑,係以使用BET法之比表面積為5〇〜2〇〇m2/g為佳以⑼ 〜180m2/g為更佳。碳黑的比表面積為該範圍的下限值以上 19 201202758 時’黑色《等的遮光性隔壁之形狀係不容易劣化。該範 圍的上限值以下時,分散助劑不會過度地吸附在石炭黑,乃 是較佳。分散賴過度地錢在以、時,為了使各種物性 顯現,必須調配大量的分散助劑。 又,作為碳黑,就敏感度而言,係峨酸二丁醋的吸 油量為120cc/100g以下者為佳,以越少為越佳。 而且,碳黑的平均-次粒徑係以2〇〜5〇nm為佳,以25 〜45nm為更佳。礙黑的平均-次_為該範_下限值以 上時’容易使其高濃度地分散且容易得到經時安定性良好 的感光性树月曰組成物。§亥範圍的上限值以下時,不容易造 成黑色矩陣等的遮光性隔壁的形狀劣化。又,碳黑的平均 一次粒徑係能夠使用電子顯微鏡等以目視等來測定。 又,為了順利地進行塗布在基板,能夠按照必要在感 光性樹脂組成物添加對組成物成分和基板為無反應性的各 種溶劑作為稀釋劑。作為稀釋劑的具體例,可舉出醇類、 酮類、賽路蘇類、卡必醇類、酯類、醚類、鏈式烴、環式 飽和烴、芳香族烴等。該等可單獨使用,亦可併用2種以上。 作為上述稀釋劑的添加量,係相對於感光性樹脂組成 物的總量為50〜95質量%,從感光性樹脂組成物的塗裝性 而言,可適合舉出70〜90質量%之量作為較佳量。 (2)塗布步驟 對於在上述(1)所檢測的缺損缺陷,將含有拒油墨齊丨白勺 硬化性修正液以該修正液硬化時至少將缺損缺陷填充且與 周邊隔壁大致相同大小(高度及寬度)的方式進行塗布。 20 201202758 <含拒油墨劑的硬化性修正液> 在本發明所使用的硬化性修正液,係含有用以得到拒 油墨性之拒油墨劑。又,係具有在塗布後將硬化性修正液 硬化時,至少將缺損缺陷填充且與周邊隔壁大致相同大小 的方式進行塗布之塗布性能。 硬化性修正液係亦可以與用以形成上述隔壁本身之感 光性樹脂組成物相同,但是因為係藉由光和熱使其硬化, 故通常係負型的組成物。而且,在修正隔壁時係不進行顯 像步驟,因此以不含有鹼可溶性樹脂之組成物為佳。硬化 性修正液係以含有拒油墨劑、自由基交聯劑及光聚合起始 劑之組成物為佳。 (拒油墨劑) 作為拒油墨劑,係只要能夠對由硬化性修正液所得到 的硬化物之表面賦予拒油墨性,則沒有特別限制。能夠採 用與前述感光性樹脂組成物所含有的拒油墨劑同樣者,且 較佳態樣亦同樣。 在硬化性修正液的總固體成分之柜油墨劑的比率,係 以0.01〜30質量%為佳。該比率高時,將所形成的隔壁修正 部的表面張力降低之效果優良’能夠賦予隔壁修正部高拒 油墨性。另-方面,該比率太高時,與構成硬化性修正液 其他材料之相溶性會降低,塗膜外觀有變差之可能性。在 硬化性修正液的總固體成分之拒油墨劑的比率,下限係以 0.15質量%為更佳,上限係以20質量%為更佳。又,在本說 明書,所謂硬化性修正㈣總@體成分,係指將硬化性修 21 201202758 正液在150°C加熱,當重量變 留成分。 化為每1分鐘小於0.1 %時之殘 (自由基交聯劑) 在本發明所使用的硬化性修正液,係除了上述拒油墨 劑、較佳是含氟拒油墨劑以外,亦含有具有2個以上的乙稀 性雙鍵之自域交聯料佳。藉此,硬化性修正液的光硬 化性提升,㈣雜正後的㈣,賦核得起之後使用喷 墨法塗布像素形成用油墨的程序之充分㈣藥品性。 作為自由基交聯劑的具體例,可舉出與在前述感光性 樹脂組成物可含有的自由基交聯劑相同者,較佳態樣亦同。 硬化性修正液的總固體成分之自由基交聯劑的比率, 係以4〇〜崎量%為佳,⑽〜,量%為更佳。在該範圍 時’修正後的隔壁之耐藥品性係良好。 (光聚合起始劑) 在本發明所使用的硬化性修正液,以更含有光聚合起 始劑為佳。光聚合起始劑係以由利用光產生自由基的化合 物所構成為佳。作為光聚合起始劑,可舉出與在前述感^ 性樹脂組成物情含有的光聚合私㈣目同者,較佳 亦同 在硬化性修正液的總固體成分之光聚合起始劑的比 率,係以(U〜50質量%為佳,以0.5〜30質量%為更佳。在 S玄圍時,硬化性修正液的敏感度係良好。 (遮光性粒子) 當欲修正的隔壁係例如黑色矩陣之具有遮光性的隔壁 22 201202758 時,本發明所使用的硬化性修正液係以含有遮光性粒子為 佳。藉此,能夠對由硬化性修正液硬化後之修正硬化物所 構成之隔壁修正部賦予遮光性。作為遮光性粒子,可舉出 與在前述感光性樹脂组成物中含有的遮光性粒子同樣者, 較佳態樣亦同樣。 硬化性修正液係含有此種遮光性粒子時,在硬化性修 正液的總固體成分之遮光性粒子的比率,係以15〜5〇質量 %為佳,以20〜40質量%為更佳。遮光性粒子的比率為該範 圍的下限值以上時,能夠得到所需要的遮光性,該範圍的 上限值以下時,敏感度不容易低落。 (其他成分) 將提升耐久性和耐藥品性作為目的,硬化性修正液係 以含有熱硬化劑為佳。作為熱硬化劑,可舉出例如胺基樹 脂、具有2個以上的環氧基之化合物 '具有2個以上的拼基 之化〇物、聚碳二醯亞胺化合物、具有2個以上的哼唑啉基 匕。物具有2個以上的吖環丙院基之化合物、多價金屬 員具有2個以上的氫硫基之化合物、聚異氰酸酯化合物等。 硬化性修正液係按照必要將提升與基板的密著性設作 目的,以含有矽烷偶合劑為佳。 硬化性修正液係按照必要,為了提高硬化性修正液的 ” 疋性,以含有聚合抑制劑為佳。作為聚合抑制劑, 沈保存安疋性而言,以使用氫m合抑制劑為佳,以使 用甲基氫酿i為特佳。 聚合抑制劑的調配量,係以硬化性修正液的總固體成 23 201202758 分之_質量%〜3質量%為佳,以㈣1質量%〜丨質量%為 佳。 “、、更 硬化性修正液係按照必要亦可以含有硬化促進劑、掩 黏』、可塑劑、消泡劑、調平劑、防龜曲劑、紫外線 劑等。 在本發明之硬化性修正液,係以上述成分與稀釋劑混 合而成者為佳。作為稀釋劑,係以具有_以上的反應官能 基之單體或溶劑為佳。 作為具有上述反應性官能基之單體,可舉出具有乙稀 性讀合鍵、環氧基、十㈣基、環狀尿素基、環狀醋等 之單體。從奴性及反應性讀點,以具有乙雜不飽合 鍵或環氧基之單體為佳。X,具有反應性官能基之單體 係以單官能為佳。 作為上述溶劑,能夠使用醇系溶劑、賽路蘇系溶劑、 卡必醇系溶劑、酯系溶劑、酮系溶劑、乙酸赛路蘇系溶劑、 乙酸卡必醇酯系溶劑'醚系溶劑、非質子性醯胺溶劑、内 酯系溶劑、不飽和烴系溶劑、飽和烴系溶劑等的非水系有 機溶劑。具體上係以PGMEA(丙二醇一甲基醚乙酸酯、甲氧 基乙酸丙酯、CH3 OCH2 CH(CH3 )OCOCH3 )、MBA(3-甲氧 基乙酸 丁酯、CH3 CH(OCH3 )CH2 CH2 OCOCH3 )、DMDG(二 伸乙甘醇二甲基醚、H3COC2H4〇CH3)、BDGAC(二伸乙甘 醇一丁基醚乙酸酯)、或將該等混合而成者為特佳。 在本發明硬化性修正液之較佳組合係: 相對於硬化性修正液的總固體成分,〇.〇1〜3〇質量。/〇的 24 201202758 拒油墨劑, 相對於硬化性修正液的總固體成分,40〜80質量%的 自由基交聯劑, 相對於硬化性修正液的總固體成分,⑴丨〜刈質量%的 光聚合起始劑, 相對於硬化性修正液的總固體成分,15〜5〇質量%之 作為遮光性粒子的碳黑, 溶劑:相對於硬化性修正液的總量(100質量份),1〇〜 80質量份之MBA及/或BDGAC。 在上述硬化性修正液,不管是否含有稀釋劑,其黏度 係以10〜300mPa.sec為佳,以15〜i5〇mPa.sec為更佳,而 且以20〜90mPa*Sec為特佳。黏度為該範圍的下限值以上 時,塗布硬化性修正液時,塗布點滴不會滲透擴展,而能 夠容易地得到所需要的大小、形狀之塗布點滴。該範圍的 上限值以下時,所塗布的點滴之膜厚度不會變大、點滴上 面為平坦且不會產生突出。 由硬化性修正液所形成的硬化物,係對水的接觸角以 90度以上為佳,以95度以上為更佳。又,對二曱苯的接觸 角係35度以上為佳’以4〇度以上為更佳。 <塗布> 在本發明的隔壁修正方法,係調製含有上述各種成分 之硬化性修錢,並麟在上述⑴職測的缺損缺陷,以 該修正液硬化時至少可將前述缺損缺陷填充、且變得與周 邊隔壁大致相同大小(高度及寬度)的方式進行塗布。 25 201202758 為塗布方法,係只要能夠塗布成上述形態的方法, ^交有特別限疋,如第丨⑻圖所表示,以使用修正液供給手 段6來塗布硬化性修正液4之方法為佳。 具體上,如特開平8_182949號公報所揭示,使硬化性 修正液4黏附在針狀構件,隨後以成為上述形態的方式塗布 在隔壁2的缺損缺陷3的位置之方法;及如特開2007遍4 號公報所揭示,從内部已填充有硬化性修正液4之細長的針 管,使硬化性修正液4吐出並以成為上述形態的方式塗布在 隔壁2的__3的位置之方法,因為㈣對應微小的修 正點滴故而屬適宜。使用針狀構件時,亦可以重複塗布硬 化性修正液4直到得到所需要的膜厚度及寬度。 又,此時作為上述針狀構件,若是使用供硬化性修正 液4黏附該側的前端部被加工成平面狀的針狀構件,則能夠 防止前端部分的接觸引起隔壁2損傷1針狀構件的前端部 分徑變化時,能夠對應各式各樣大小之隔壁2的缺損缺陷。 (3)硬化步驟 在本發明的隔壁修正方法中,在上述(2)塗布步驟,對 於隔壁2的缺損缺陷3之位置’以祕正液硬化時至少將缺 損缺陷填充且變得與周邊隔壁域相同大小(高度及寬度) 的方式塗布後之硬化性修正液,係隨後藉由該(3)硬化步驟 進行硬化而成為修正部。而且,在該硬化前 而設置以下的乾燥步驟。 要 (乾燥) 將硬化性修正液4塗布後,若硬化性修正液4不含有溶 26 201202758 劑的情況,係不必進行乾燥。又,即便在硬化性修正液4含 有溶劑的情況,亦有溶劑自然地揮發之情形。進行乾燥時, 係進行風乾、加熱乾燥、真空乾燥即可。加熱乾燥時,以 使用烘箱、熱板等在50〜3〇(rc的範圍進行丨分鐘〜3小時為 佳。又,因為在修正隔壁2係局部且多半被要求在短時間乾 燥,所以使用紅外線點加熱器等,只有加熱修正處並乾燥 之方法亦適合使用。 (硬化) 上述按照必要而進行乾燥之後,使硬化性修正液4硬 化。作為硬化方法,係只要硬化性修正液4係充分地硬化之 方法,則沒有特別限定,以藉由照射紫外線來使其硬化之 方法為佳。第1(c)圖係模式性顯示藉由該照射紫外線8之硬 化步驟。可使用高壓水銀燈、超高壓水銀燈、水銀氙燈、 雷射光線#作為光源。為了提升發光照度,以使光線聚光 之超高壓水銀燈的水銀氙燈點光源為特佳。使用此種發射 务外線8光線之點光源(未圖示)時,因為其發光照度高,能 夠照射充分的能量來使修正液在短時間硬化,又,因為能 夠只有照射修正處,生產性高。 雖然亦取決於缺損缺陷3的大小、亦即被塗布而必須硬 化之硬化性修正液4的量,不過例如可舉出藉由使用5〇〇〜 5,000mW/cm2的光源來照射紫外線5〜3〇秒而得到之照射 500〜100,000mJ/cm2的紫外線之條件,來作為較佳條件。 如此進行,能夠得到將應修正的缺損缺陷填充且具有與周 邊隔壁同等高度及寬度之修正部5。 27 201202758 在第2圖,係顯示如此進行而得到的修正部5之立體圖 (a) 及在相當於該立體圖中A_A,線部分之剖面圖(b)。如第2 (b) 圖的剖面圖所表示,在修正部5的表面全體,藉由含有上 述所使用的拒油墨劑之硬化性修正液的特性,能夠形成拒 油墨性表面11。作為拒油墨性表面11的厚度,雖然亦取決 於所使用的硬化性修正液,惟大致以1〇〜5〇〇nm左右為佳, 以20〜200nm為更佳。 在此,修正硬化部5的高度(hl)及寬度(w)係以與周邊隔 壁的同度、寬度大約同等的方式形成。具體上,高度…係 相對於周邊隔壁的高度以7G〜15〇%左右形成為佳,以8〇〜 130%左右為更佳。同樣地寬度讀彳目對於周邊隔㈣寬以 80〜140%左右形成為佳,以90〜12〇%左右為更佳。 (4)雷射光照射步驟 在第1(d)圖模式性顯示(4)雷射光照射步驟,係對在上 述(3)步驟所得到修正部5之與隔壁側面連續的面(在與點7 ’並除去在該照射部位之 與隔壁的側面連續的面」 疋在對原來隔壁2本身的 的邊界附近之表面)照射雷射光9 修正部5的表層之步驟。所謂該「 係指例如在第2(a)圖加斜線的面, 側面21以大致在水平方向連續的狀態所形成的佟正部, 面’且是在後面的油墨吐出步驟會鱼油黑拖總 ’土设啁之面,其係 與從具有拒油墨性之隔壁上面以連續狀態形成之体 部的面有所區別。換言之’將在修正部上面伯有 — 面積 面係成為 之被認為拒油墨性為必要的面除外,修正部的I 「在隔壁的側面連續的面」。 28 201202758 作為雷射光源(未圖示),係以脈衝波的波長為5 3 2n m或 3 5 5 n m的光線為佳。照射所使用的雷射光的強度係如以下說 明’是在修正部5只有雷射光的照射部位亦即表層被除去之 強度’而且是以成為能夠藉由目視來確認雷射光照射部位 的強度,依此方式適當地調整。 參照第3圖來說明相對於修正部5之照射雷射光的位 置、寬度、除去之表層厚度等。第3圖係顯示藉由本發明之 隔壁的修正方法一例所得到的修正部的剖面圖。上述照射 雷射光’具體上係考慮使用喷墨法形成像素之物品的隔壁 之寬度’對從修正部5的最外端至隔壁的内側2〜1〇μηι的範 圍(在第3圖係相當於以X表示之距離)表面進行為佳,該範圍 係以5〜8μιη為更佳。在此,所謂修正部5的最外端,係指 修正部往點7的方向最突出之位置。 在從修正部的最外端往内側超過1〇μηι照射雷射光 時’亦即在第3圖之X的距離為超過1(^111時,無法充分地確 保隔壁修正部上部表面的拒油墨性,致使在對點(d〇t)吐出 油墨時有產生混色之可能性。雷射光照射範圍為從邊界到 内側小於2μηι範圍時,亦即在第3圖之X的距離為小於2μιη 時,無法充分地形成親油墨性部分,致使在對點7吐出油墨 時’有產生像素膜厚度不均勻化(白點)之情形。 在此,將照射雷射光前之修正部5的膜厚度最大值設為 hl,將因照射雷射光而被除去的表層之厚度設為h2時,以 h2/hl<〇.5為佳。以h2/hl<〇.3為更佳。h2/hl為0.5以上時, 來自因照射雷射光而產生的隔壁修正部之飛床量變多,有 29 201202758 =害周邊隔壁上部表面的拒油墨性之虞。這是因為修正部$ 、£油墨性表面11在被照射雷射光而切,分 切斷’且雜的狀態不顯示拒油墨性的緣故。而且 部量變多時,亦會擔心㈣後所形成的像素 又,具體上,h2係以20〜為佳,以3〇〜5〇 為更佳。 依照本發明的修正方法,能夠精確度良好且有效率地 修正喃壁的缺損缺陷,且在轉充缺損的方式所形成的拒 油墨性之修正部’在藉騎雷射光被除去表層之隔壁與側 壁連續的面’係具有親油墨性。因此,在為了使用喷墨法 來形成像素而進行油墨吐出塗布時,能夠防止鄰接的像素 間產生油墨混色,且能夠得到膜厚度均勻性高的像素。 ^又,藉由上述照射雷射光,係只有除去在修正部的端 部表層所存在的少量修正硬化物,所以能夠提供被除去的 修正硬化物之飛沫所引起之像素污染少的高性能油墨吐出 印刷物’例如彩色濾光片和有機EL元件。 實施例 以下,基於實施例來說明本發明,但是本發明不被节 等限定。例1、例3及例4係實施例,例2係比較例。又,在 各例作為化合物的調配量所使用的「份」係意味著「質量 份」。又,在以下的各例所使用的化合物之略號係如以下。 C6FMA : CH2=C(CH3)COOCH2CH2(CF2)6F、 MAA :曱基丙烯酸、 30 201202758 2-HEMA:甲基丙烯酸2-羥基乙酯、 MMA :甲基丙烯酸曱酯、 2-ME : 2-氫硫基乙醇、 V-70 : 2,2,-偶氮雙(4-曱氧基-2,4-二甲基戊腈)(和光純藥公 司製、商品名:V_7〇)、 MOI : 2-曱基丙烯醯氧基異氰酸乙酯、 DBTDL :二月桂酸二丁基錫、 BHT : 2,6-二-第三丁基-對曱酚、 ZCR1569H :聯苯型環氧丙烯酸酯(日本化藥公司製、商品 名:ZCR1569H、固體成分70質量°/〇)、 OXE02 : 1-[9·乙基-6-(2-曱基苯甲醯基)-9H_咔唑_3·基]-乙酮 -1-(0-乙醯肟 XCIBASPECIALTY CHEMICALS公司製、商 品名 OXE02)、 UX5002 :胺甲酸酯丙烯酸酯(日本化藥公司製、商品名: KAYARAD UX5002)、 157S65 :雙酚A酚醛清漆型環氧樹脂(JAPAN EPOXY RESINS公司製、商品名:EPICOAT 157S65)、 KBM403 : 3-環氧丙氧基丙基三甲氧基矽烷(信越化學工業 公司製、商品名:KBM-403)、 PGMEA :丙二醇一甲基醚乙酸酯、 CHON :環己酮、 MBA : 3-甲氧基乙酸丁酯、 BDGAC :二伸乙甘醇一丁基醚乙酸酯、 CB :碳黑(平均二次粒徑:120nm、丙二醇一甲基醚乙酸商旨 31 201202758 溶液、CB分20質量%、固體成分25質量。/〇)。 <聚合物(A1)的合成> [合成例1] 在具備攪拌機之内容積為1L的高壓爸,添加丙嗣 (556g)、C6FMA(96g)、MMA(4.8g)、2-HEMA(96g)、 MMA(43.2g)、鏈轉移劑2-ME (6.2g)及聚合起始劑 V-70(4.5g),在氮氣中邊攪拌邊在4〇°c使其聚合18小時,得 到聚合物(1)的溶液。在所得到的聚合物(1)的丙酮溶液中添 加水進行再沈澱純化,隨後’使用石油醚進行再沈澱純化, 並真空乾燥來得到237g的聚合物(1)。 在具備溫度計、授拌機、加熱裝置之内容量為500ml 的玻璃製燒瓶,添加聚合物(l)(100g)、MOI(47.7g)、 DBTDL(0_19g)、BHT(2.4g)及丙酮(100g),邊攪拌邊在30〇C 使其聚合18小時,得到聚合物(2)的溶液。在所得到的聚合 物(2)的丙酮溶液添加水進行再沈澱純化,隨後,使用石油 醚進行再沈澱純化,並真空乾燥來得到135g之具有作為拒 油墨劑功能之聚合物(A1)。重量平均分子量為8,800。 [隔壁形成用組成物] 將聚合物(Α1)(1·45份)、作為鹼可溶性感光性樹脂的分 散液之ZCR1569H(47.1份)、作為光聚合起始劑之〇ΧΕ02(8·7 份)、作為黑色著色劑之CB(232.0份)、作為自由基交聯劑之 UX5002(31.8份)、作為熱硬化劑之157S65(3.6份)、作為矽 烷偶合劑之KBM403(5 ·8份)及作為溶劑之PGMEA(570份) 及CHON(100份)混合,而得到隔壁形成用組成物的稀釋液。 32 201202758 [隔壁修正液] 將聚合物(Al)(0.21份)、作為自由基交聯劑之 UX5002(28份)、作為光聚合起始劑之OXE02(5.3份)、作為 黑色著色劑的分散液之CB(45份)及作為溶劑之ΜΒΑ(21·49 份)、BDGAC(20份),得到隔壁修正液。 [例1] 在無鹼玻璃基板上,使用狹缝塗布器塗布隔壁形成用 組成物的稀釋液後,在13〇Pa進行真空乾燥30秒,進而在!00 °C於熱板上乾燥2分鐘。在塗膜的上方,將形成有格子圖案 之光罩(線:20μπι、格子範圍:ιοομη^ΟΟμηι)以3〇gm的間 隙設置,並使用超高壓水銀燈照射100mJ/crn2。隨後,將基 板使用加界面活性劑之O.i質量%氫氧化四甲銨水溶液,在 25 C進行顯像處理40秒,並使用水洗淨且使其乾燥,來形 成遮光性隔壁。 對幵v成有遮光性隔壁之基板照射南素燈光且使用Ccd 攝影機拍攝遮光性隔壁,並且藉由將其與預先準備的圖案 比較來檢查時,在遮光性隔壁檢測出缺損缺陷。又,上述 裝置係搭載有檢測隔壁的缺損缺陷部之缺_壁觀察部^ 除去隔壁的缺損缺陷部之雷射、及缺損缺陷修正用=配 器0 I用在前端具有 太 ' 隹缺損缺陷部塗 述得到的隔壁修正液。將該步驟重複2次且以隔壁無 缺損的方式塗布隔壁修正液。隨後,在塗布有 ; 之區域照射紫外線而使其硬化來作為修正部。又^外^ 33 201202758 係使用將搭載於上述裝置之超高壓水銀燈設作光源之紫外 線點照射裝置’且以5,〇〇〇mj/cni2的曝光量進行照射。 在修正部’為了除去在與隔壁側面連續的面之拒油墨 性’係對修正部的面’在從修正部的最外端起5μηι寬度(相 當於第3圖X為5μηι)以20%的雷射輸出功率照射脈衝雷射 (波長為532nm)。使用光學顯微鏡測定膜厚度時,在雷射光 照射前的上述修正部之膜厚度最大值,被照射 脈衝雷射而削減的膜厚度(h2)為2〇〇nm,h2/hl為0.1。 在由具有上述所得到修正部的隔壁所區隔之1〇〇μηιχ 200μηι區域内’使用喷墨裝置而注入含有綠色顏料之固體 成分為25%的熱硬化型油墨(^(^“。於丨⑼它在熱板上乾燥 5分鐘。隨後,於2〇〇°C進行加熱處理3〇分鐘來形成像素。 油墨層之加熱硬化後的體積為4〇pL。 在隔壁周邊拒斥油墨之白點等的不良 具有上述修正部之隔壁,因為在其修正部的隔壁之上 部表面係具有拒油墨性,且在修正部中與隔壁側面連續的 面係具有親油墨性,所以不會產生油墨從Μ溢出混色和 ’而能夠高精細地形 成油墨層。 [例2] 在無驗玻璃基板上形成谪来料限后李V / -V (j- , ATM . VU AA I 隹 ; 苻 u , , M is another compound having an epoxy group of 2 or more. ▲ Among these, in the manufacturing method of the present invention The photosensitive resin composition to be added to the photosensitive cyanide in the production method of the present invention has a cross-linking ratio, which is also known in the optical type and use, but is relative to the total amount of the photosensitive resin composition. 20% by mass is more preferable. In this range, 30% by mass is preferable, and the image quality of 1 玄·5~ is improved. 'To have a sensitization having two or more quinces (four) The resin composition is preferably a radical crosslinking agent, and a radical crosslinking agent of 201202758 is preferred, whereby the curing of the photosensitive resin composition can be promoted. Specific examples of the radical crosslinking agent include two-stretching. Ethylene glycol di(meth)acrylate, tetraethylene glycol di(meth)acrylate, tripropylene glycol di(decyl)acrylate, neopentyl glycol di(decyl)acrylate, 1 , 9-nonanediol di(meth) acrylate, trimethylolpropane tri(meth) acrylate, new Tetraol tri(meth)acrylate, pentaerythritol tetrakis(meth)acrylate, bistrihydroxydecylpropane tetra(meth)acrylate, dipentaerythritol hexa(meth)acrylate, amine And the bisallyl nadiimide may be used alone or in combination of two or more kinds. The free radicals of the total solid content of the photosensitive resin composition may be used. The ratio of the crosslinking agent is preferably from 10 to 60% by mass, more preferably from 15 to 50% by mass, and in this range, the developability of the photosensitive resin composition is good. (Light-blocking particles) Next door In the case of a light-shielding partition wall such as a black matrix, the photosensitive resin composition used in the present invention preferably contains light-shielding particles. Thereby, light-shielding properties can be imparted to the partition walls. For example, carbon black, aniline black, anthraquinone black pigment, perylene black pigment, and carbon black are preferable, and carbon black may be surface-treated with a resin or the like. Also in carbon black with blue pigment and From the viewpoint of the shape of the light-shielding partition wall such as a black matrix, it is more preferable that the carbon black has a specific surface area of 5 〇 to 2 〇〇 m 2 /g by using the BET method, preferably (9) to 180 m 2 /g. The specific surface area of the carbon black is equal to or greater than the lower limit of the range. 19 201202758 The shape of the light-shielding partition wall such as 'black' is not easily deteriorated. When the upper limit of the range is less than or equal to the upper limit of the range, the dispersing aid is not excessively adsorbed on the charcoal. Black, is better. Disperse the excessive money in the time, in order to make various physical properties, it must be formulated with a large number of dispersing aids. Also, as carbon black, in terms of sensitivity, it is tannic acid dibutyl vinegar The oil absorption is preferably 120 cc/100 g or less, and the smaller the better. Further, the average-secondary particle diameter of carbon black is preferably 2 Å to 5 Å, and more preferably 25 to 45 nm. When the average value of the blackness is - such as when the upper limit is less than the lower limit value, it is easy to disperse at a high concentration, and it is easy to obtain a photosensitive dendritic composition having good stability over time. When the upper limit of the range of the sea is less than or equal to the upper limit of the range of the sea, it is not easy to cause the shape of the light-shielding partition wall such as a black matrix to deteriorate. Further, the average primary particle diameter of carbon black can be measured by visual observation or the like using an electron microscope or the like. In addition, in order to apply the coating to the substrate smoothly, various solvents which are not reactive with the composition component and the substrate can be added as a diluent to the photosensitive resin composition as necessary. Specific examples of the diluent include alcohols, ketones, serotons, carbitols, esters, ethers, chain hydrocarbons, cyclic saturated hydrocarbons, and aromatic hydrocarbons. These may be used alone or in combination of two or more. The amount of the above-mentioned diluent is 50 to 95% by mass based on the total amount of the photosensitive resin composition, and the coating property of the photosensitive resin composition is preferably 70 to 90% by mass. As a preferred amount. (2) Coating step For the defect defect detected in the above (1), when the curable correction liquid containing the ink-repellent ink is cured by the correction liquid, at least the defect defect is filled and substantially the same size as the peripheral partition wall (height and Coating in the manner of width). 20 201202758 <Sclerosing correction liquid containing ink repellent> The curable correction liquid used in the present invention contains an ink repellent agent for obtaining ink repellency. In addition, when the curable correction liquid is cured after application, the coating performance is applied such that at least the defect defect is filled and substantially the same size as the peripheral partition wall. The curable correction liquid may be the same as the photosensitive resin composition for forming the partition itself. However, since it is cured by light and heat, it is usually a negative composition. Further, since the development step is not performed when the partition wall is corrected, it is preferable to use a composition containing no alkali-soluble resin. The curable correction liquid is preferably a composition containing an ink repellent agent, a radical crosslinking agent, and a photopolymerization initiator. (Repellent agent) The ink repellent agent is not particularly limited as long as it can impart ink repellency to the surface of the cured product obtained from the curable correction liquid. The ink repellent agent contained in the photosensitive resin composition can be used in the same manner, and the preferred embodiment is also the same. The ratio of the ink of the total solid content of the curable correction liquid is preferably 0.01 to 30% by mass. When the ratio is high, the effect of lowering the surface tension of the formed partition correction portion is excellent, and the partition correction unit can be provided with high ink repellency. On the other hand, when the ratio is too high, the compatibility with other materials constituting the curable correction liquid may be lowered, and the appearance of the coating film may be deteriorated. The ratio of the ink repellent agent to the total solid content of the curable correction liquid is preferably 0.15 mass%, more preferably 20 mass%. Further, in the present specification, the term "hardening property correction" (four) total body composition means that the sclerosing property is heated at 150 ° C, and the weight is retained as a component. Residue (free radical crosslinking agent) when it is less than 0.1% per minute. The curable correction liquid used in the present invention contains 2, in addition to the above-mentioned ink repellent agent, preferably a fluorine-containing ink repellent agent. More than one ethylene double bond is preferred from the self-crosslinking material. As a result, the photohardenability of the curable correction liquid is improved, and (4) the chemical property of the procedure for applying the ink for forming the pixel by the ink jet method after the nucleation is satisfied. Specific examples of the radical crosslinking agent include the same as those of the radical crosslinking agent which can be contained in the photosensitive resin composition, and the preferred embodiment is also the same. The ratio of the radical crosslinking agent of the total solid content of the sclerosing correction liquid is preferably 4% to 5%, and more preferably 10% by weight. In this range, the chemical resistance of the corrected partition wall was good. (Photopolymerization initiator) The curable correction liquid used in the present invention preferably contains a photopolymerization initiator. The photopolymerization initiator is preferably composed of a compound which generates a radical by using light. The photopolymerization initiator may be the same as the photopolymerization initiator of the total solid content of the curable correction liquid, which is the same as the photopolymerization contained in the above-mentioned photosensitive resin composition. The ratio is preferably (U to 50% by mass, more preferably 0.5 to 30% by mass. In the case of S Xuanwei, the sensitivity of the curable correction liquid is good. (Light-shielding particles) When the wall is to be corrected For example, when the partition wall 22 of the black matrix has a light-shielding partition 22 201202758, the curable correction liquid used in the present invention preferably contains light-shielding particles, whereby the cured product can be cured by the curable correction liquid. The light-blocking property is the same as that of the light-shielding particles contained in the photosensitive resin composition, and the same is preferable. The curable correction liquid contains such light-shielding particles. The ratio of the light-blocking particles in the total solid content of the curable correction liquid is preferably 15 to 5 % by mass, more preferably 20 to 40% by mass. The ratio of the light-shielding particles is the lower limit of the range. Above the value, When the required light-shielding property is obtained, the sensitivity is not easily lowered when the upper limit of the range is less than or equal to the upper limit of the range. (Other components) For the purpose of improving durability and chemical resistance, it is preferable that the curable correction liquid contains a thermal curing agent. Examples of the thermosetting agent include an amine-based resin and a compound having two or more epoxy groups, a chemical composition having two or more bases, a polycarbodiimide compound, and two or more. An oxazoline group having two or more compounds of an anthracene group, a compound having a polyhydric metal member having two or more hydrogenthio groups, a polyisocyanate compound, etc. The curability correction liquid is upgraded as necessary For the purpose of the adhesion of the substrate, it is preferable to contain a decane coupling agent. The sclerosing correction liquid is preferably a polymerization inhibitor in order to improve the enthalpy of the sclerosing correction liquid. For the preservation of the ampoules, it is preferred to use a hydrogen-m-inhibitor, and it is particularly preferable to use methyl hydrogen. The amount of the polymerization inhibitor is determined by the total solidity of the curable correction liquid 23 201202758 _ mass% to 3 mass% is preferable, and (4) 1% by mass to 丨% by mass is preferable. ", a more curable correction liquid may contain a curing accelerator, a masking agent, a plasticizer, an antifoaming agent, if necessary. The leveling agent, the anti-cawel agent, the ultraviolet ray agent, etc. The curable correction liquid of the present invention is preferably a mixture of the above components and a diluent. The diluent is a reactive functional group having _ or more. The monomer or the solvent is preferred. Examples of the monomer having the above reactive functional group include a monomer having an ethylene read bond, an epoxy group, a decyl group, a cyclic urea group, and a cyclic vinegar. The nucleus and the reactive reading point are preferably a monomer having an ethylidene unsaturated bond or an epoxy group. X, a single system having a reactive functional group is preferably a monofunctional one. As the above solvent, an alcoholic solvent can be used. , Sailusu solvent, carbitol solvent, ester solvent, ketone solvent, ceramide acetate solvent, carbitol ester solvent, ether solvent, aprotic guanamine solvent, lactone system Solvent, unsaturated hydrocarbon solvent, saturated hydrocarbon solvent, etc. A non-aqueous organic solvent. Specifically, PGMEA (propylene glycol monomethyl ether acetate, methoxy propyl acetate, CH3 OCH2 CH(CH3 )OCOCH3 ), MBA (3-methoxyacetic acid butyl ester, CH3 CH(OCH3 )CH2 CH2 OCOCH3 ), DMDG (diethylene glycol dimethyl ether, H3COC2H4 〇CH3), BDGAC (diethylene glycol monobutyl ether acetate), or a mixture of these is particularly preferred. A preferred combination of the curable correction liquid of the present invention is a mass of 〇.〇1 to 3〇 with respect to the total solid content of the curable correction liquid. / 201224758 ink repellent agent, 40 to 80% by mass of the radical crosslinking agent based on the total solid content of the curability correction liquid, and (1) 丨 刈 刈 mass % of the total solid content of the sclerosing correction liquid The photopolymerization initiator is a carbon black as a light-shielding particle in an amount of 15 to 5% by mass based on the total solid content of the curable correction liquid, and a solvent: a total amount (100 parts by mass) of the curable correction liquid, 1 〇 ~ 80 mass parts of MBA and / or BDGAC. The curable correction liquid preferably has a viscosity of 10 to 300 mPa.sec, preferably 15 to i5 mPa.sec, and particularly preferably 20 to 90 mPa*Sec, irrespective of whether or not a diluent is contained. When the viscosity is at least the lower limit of the range, when the curable correction liquid is applied, the coating droplets do not permeate and spread, and the desired size and shape of the coating droplets can be easily obtained. When the upper limit of the range is less than or equal to the upper limit of the range, the film thickness of the applied droplets does not become large, and the upper surface of the droplets is flat and does not protrude. The cured product formed of the curable correction liquid preferably has a contact angle with water of 90 degrees or more, more preferably 95 degrees or more. Further, the contact angle of diphenylene is preferably 35 degrees or more, and more preferably 4 degrees or more. <Coating> In the method for correcting the partition wall of the present invention, the refractory repair containing the above-described various components is prepared, and the defect defect in the above (1) is measured, and at least the defect defect can be filled when the correction liquid is cured. The coating is applied in such a manner as to have substantially the same size (height and width) as the peripheral partition. 25 201202758 The coating method is preferably a method in which the curable correction liquid 4 is applied by using the correction liquid supply means 6 as long as it can be applied to the above-described method. Specifically, a method in which the curable correction liquid 4 is adhered to the needle-shaped member and then applied to the position of the defect defect 3 of the partition wall 2 in the above-described manner is disclosed in Japanese Laid-Open Patent Publication No. Hei 08-182949; In the method of the fourth embodiment, the method of applying the sclerosing correction fluid 4 to the position of __3 of the partition wall 2 in the form of the above-described configuration is described. It is appropriate to make minor corrections. When the needle member is used, the hardening correction liquid 4 can be repeatedly applied until the desired film thickness and width are obtained. In addition, when the needle-shaped member in which the tip end portion on the side where the curable correction liquid 4 is adhered is processed into a flat shape, the needle-shaped member can prevent the partition wall 2 from damaging the needle-like member. When the diameter of the tip end portion is changed, it is possible to correspond to the defect of the partition wall 2 of various sizes. (3) Hardening step In the method for correcting the partition wall of the present invention, in the above (2) coating step, at least the defect defect is filled and becomes a peripheral partition wall when the position of the defect defect 3 of the partition wall 2 is hardened by the secret solution. The hardening correction liquid after application of the same size (height and width) is subsequently cured by the (3) hardening step to become a correction portion. Further, the following drying step is provided before the hardening. (Dry) After the curable correction liquid 4 is applied, if the sclerosing correction liquid 4 does not contain the solute 26 201202758 agent, it is not necessary to dry. Further, even when the curable correction liquid 4 contains a solvent, the solvent may naturally volatilize. When drying, it may be air-dried, heated and dried, and vacuum dried. In the case of heating and drying, it is preferable to use an oven, a hot plate, etc. in the range of 50 to 3 Torr (the range of rc is preferably 丨 minute to 3 hours. Further, since the correction partition 2 is partially and mostly required to be dried in a short time, infrared rays are used. A method of heating the correction and drying is also suitable for use in a point heater or the like. (Curing) After drying as necessary, the curable correction liquid 4 is cured. As the curing method, the curable correction liquid 4 is sufficiently The method of hardening is not particularly limited, and it is preferably a method of hardening by irradiation with ultraviolet rays. Fig. 1(c) schematically shows a hardening step by the irradiation of ultraviolet rays 8. High-pressure mercury lamp, ultrahigh pressure can be used. Mercury lamps, mercury lamps, and laser rays are used as light sources. In order to enhance the illuminance of the illuminating light, the mercury illuminating point source of the ultra-high pressure mercury lamp for concentrating the light is particularly good. ), because of its high illuminance, it can illuminate sufficient energy to harden the correction fluid in a short time, and because it can only illuminate the correction, production Although it is also dependent on the size of the defect defect 3, that is, the amount of the curable correction liquid 4 which must be applied and hardened, for example, it is possible to irradiate ultraviolet rays by using a light source of 5 〇〇 to 5,000 mW/cm 2 . 5 to 3 sec., which is obtained by irradiating ultraviolet rays of 500 to 100,000 mJ/cm 2 as a preferable condition. In this way, it is possible to obtain a correction portion which fills the defect defect to be corrected and has the same height and width as the peripheral partition wall. 5. 201202758 In Fig. 2, a perspective view (a) of the correction unit 5 obtained in this manner and a cross-sectional view (b) corresponding to the line portion A_A in the perspective view are shown. Fig. 2(b) As shown in the cross-sectional view, the ink repellent surface 11 can be formed on the entire surface of the correction portion 5 by the properties of the curable correction liquid containing the above-described ink repellent agent. The thickness of the ink repellent surface 11 is also Depending on the curable correction liquid to be used, it is preferably about 1 〇 to 5 〇〇 nm, more preferably 20 to 200 nm. Here, the height (hl) and the width (w) of the cured portion 5 are corrected. Same degree and width as the neighboring wall Specifically, the height is formed in a height of about 7 G to 15% with respect to the height of the peripheral partition, and is preferably about 8 to 130%. Similarly, the width is read for the peripheral partition (four). The width is preferably about 80 to 140%, preferably about 90 to 12%. (4) The step of irradiating the laser light is schematically shown in the first (d) diagram (4) the step of irradiating the laser light, which is The surface of the correction portion 5 obtained in the above step (3) that is continuous with the side surface of the partition wall (the surface that is continuous with the side surface of the partition portion at the irradiation portion is removed from the point 7') is located near the boundary of the original partition wall 2 itself. The step of irradiating the surface of the laser beam 9 with the surface of the correction portion 5. The term "the surface" is formed by, for example, a surface of the second line (a) with a diagonal line, and the side surface 21 is formed in a state of being substantially continuous in the horizontal direction. In the subsequent ink discharge step, the fish oil black drags the total surface of the soil, which is different from the surface of the body formed in a continuous state from the partition wall having ink repellency. In other words, the surface of the correction portion is "the surface continuous on the side surface of the partition wall" except that the surface of the correction portion is considered to be necessary for the ink repellency. 28 201202758 As a laser light source (not shown), light having a pulse wave wavelength of 5 3 2n m or 3 5 5 n m is preferred. The intensity of the laser light to be used for the irradiation is as follows: "the intensity at which the surface layer is removed only in the portion where the laser beam is irradiated in the correction portion 5", and the intensity of the laser beam irradiation portion can be confirmed by visual observation. This mode is adjusted as appropriate. The position, the width, the thickness of the surface layer to be removed, and the like which are irradiated with respect to the laser light with respect to the correction portion 5 will be described with reference to Fig. 3 . Fig. 3 is a cross-sectional view showing a correction portion obtained by an example of a method for correcting a partition wall of the present invention. Specifically, the irradiation laser light 'specifically considers the width of the partition wall of the article in which the pixel is formed by the ink jet method' is from the outermost end of the correction portion 5 to the inner side of the partition wall 2 to 1 〇 μη (the equivalent of the third figure) It is preferable that the surface is carried out at a distance represented by X, and the range is preferably 5 to 8 μm. Here, the outermost end of the correction unit 5 refers to a position where the correction unit protrudes most in the direction of the point 7. When the laser beam is irradiated from the outermost end of the correction portion to the inside beyond 1 〇μηι, that is, when the distance of X in the third figure is more than 1 (^111, the ink repellency of the upper surface of the partition correction portion cannot be sufficiently ensured. , the possibility of color mixing occurs when the ink is ejected at the point (d〇t). When the laser light irradiation range is less than 2μηι from the boundary to the inner side, that is, when the distance of X in the third figure is less than 2μιη, The ink-repellent portion is sufficiently formed so that the film thickness is uneven (white point) when the ink is ejected to the dot 7. Here, the maximum film thickness of the correction portion 5 before the laser light is irradiated is set. In the case of hl, when the thickness of the surface layer removed by the irradiation of the laser light is h2, h2/hl < 〇.5 is preferable. It is more preferable to use h2/hl < 〇.3. When h2/hl is 0.5 or more The amount of flying bed from the partition correction unit due to the irradiation of the laser light is increased, and there is a problem of the ink repellency of the upper surface of the peripheral partition wall of 29 201202758. This is because the correction portion $ and the ink surface 11 are irradiated with lightning. The light is cut and cut, and the cut is 'and the miscellaneous state does not show oil repellency. For the sake of sex, and when the number of parts is increased, the pixels formed after (4) are also worried. Specifically, h2 is preferably 20~, and more preferably 3〇~5〇. According to the correction method of the present invention, The defect of the ink-repellent defect is improved accurately and efficiently, and the ink-repellent correction portion formed by the method of transferring the defect has a side that is continuous with the side wall of the surface layer by which the laser light is removed. Therefore, when ink ejection coating is performed in order to form a pixel by an inkjet method, it is possible to prevent ink color mixing between adjacent pixels, and it is possible to obtain a pixel having high film thickness uniformity. In the case of the light emission, only a small amount of the corrected hardened material existing on the surface layer of the end portion of the correction portion is removed, so that it is possible to provide a high-performance ink discharge printed matter such as a color filter and a small amount of pixel contamination caused by the droplet of the corrected hardened material to be removed. Organic EL device. EXAMPLES Hereinafter, the present invention will be described based on examples, but the present invention is not limited by the terms and the like. Examples 1, 3 and 4 are examples, and examples 2 are examples. In addition, the "parts" used as the compounding amount in each case means "parts by mass". Further, the compound numbers used in the following examples are as follows. C6FMA : CH2=C (CH3)COOCH2CH2(CF2)6F, MAA: mercaptoacrylic acid, 30 201202758 2-HEMA: 2-hydroxyethyl methacrylate, MMA: decyl methacrylate, 2-ME: 2-hydrothioethanol, V -70 : 2,2,-azobis(4-decyloxy-2,4-dimethylvaleronitrile) (manufactured by Wako Pure Chemical Industries, Ltd., trade name: V_7〇), MOI: 2-mercaptopropene oxime Ethyl oxyisocyanate, DBTDL: dibutyltin dilaurate, BHT: 2,6-di-t-butyl-p-nonylphenol, ZCR1569H: biphenyl type epoxy acrylate (manufactured by Nippon Kayaku Co., Ltd., commodity Name: ZCR1569H, solid content 70 mass ° / 〇), OXE02 : 1-[9·ethyl-6-(2-mercaptobenzylidene)-9H-carbazole _3·yl]-ethanone-1 - (0-acetonitrile XCIBASPECIALTY CHEMICALS, trade name OXE02), UX5002: urethane acrylate (manufactured by Nippon Kayaku Co., Ltd., trade name: KAYARAD UX5002), 157S65: bisphenol A novolac type epoxy resin (JAPAN EPOXY RESINS , trade name: EPICOAT 157S65), KBM403: 3-glycidoxypropyltrimethoxydecane (manufactured by Shin-Etsu Chemical Co., Ltd., trade name: KBM-403), PGMEA: propylene glycol monomethyl ether acetate, CHON : cyclohexanone, MBA: 3-methoxyacetic acid butyl ester, BDGAC: diethylene glycol monobutyl ether acetate, CB: carbon black (average secondary particle diameter: 120 nm, propylene glycol monomethyl ether acetate Business Purpose 31 201202758 Solution, CB 20% by mass, solid content 25 mass. /〇). <Synthesis of Polymer (A1)> [Synthesis Example 1] A high pressure dad having an internal volume of 1 L of a stirrer was added with propylene (556 g), C6FMA (96 g), MMA (4.8 g), and 2-HEMA ( 96 g), MMA (43.2 g), chain transfer agent 2-ME (6.2 g), and polymerization initiator V-70 (4.5 g) were stirred at 4 ° C for 18 hours while stirring under nitrogen. A solution of polymer (1). Water was added to the obtained acetone solution of the polymer (1) for reprecipitation purification, followed by reprecipitation purification using petroleum ether, and vacuum drying to obtain 237 g of the polymer (1). A glass flask containing 500 ml of a thermometer, a mixer, and a heating device was added with polymer (1) (100 g), MOI (47.7 g), DBTDL (0-19 g), BHT (2.4 g), and acetone (100 g). The mixture was polymerized at 30 ° C for 18 hours while stirring to obtain a solution of the polymer (2). Water was added to the obtained acetone solution of the polymer (2) for reprecipitation purification, followed by reprecipitation purification using petroleum ether, and vacuum drying to obtain 135 g of a polymer (A1) having a function as an ink repellent. The weight average molecular weight was 8,800. [Partition for forming a partition wall] ZCR1569H (47.1 parts) of a polymer (Α1) (1·45 parts), a dispersion of an alkali-soluble photosensitive resin, and 〇ΧΕ02 (8·7 parts) as a photopolymerization initiator CB (232.0 parts) as a black colorant, UX5002 (31.8 parts) as a radical crosslinking agent, 157S65 (3.6 parts) as a thermosetting agent, KBM403 (5·8 parts) as a decane coupling agent, and PGMEA (570 parts) and CHON (100 parts) as a solvent were mixed to obtain a diluent for forming a partition wall. 32 201202758 [Partition correction liquid] Polymer (Al) (0.21 parts), UX5002 (28 parts) as a radical crosslinking agent, OXE02 (5.3 parts) as a photopolymerization initiator, dispersion as a black colorant The liquid CB (45 parts), the solvent (21.49 parts), and the BDGAC (20 parts) were used to obtain a partition correction liquid. [Example 1] A diluted solution of a composition for forming a partition wall was applied onto an alkali-free glass substrate using a slit coater, and then vacuum-dried at 13 °Pa for 30 seconds, and further! Dry at 00 °C on a hot plate for 2 minutes. Above the coating film, a mask (line: 20 μm, grid range: ιοομη^ΟΟμηι) in which a lattice pattern was formed was set at a gap of 3 〇 gm, and 100 mJ/crn 2 was irradiated with an ultrahigh pressure mercury lamp. Subsequently, the substrate was subjected to development treatment at 25 C for 40 seconds using an O.i mass% aqueous solution of tetramethylammonium hydroxide added with a surfactant, and washed with water and dried to form a light-blocking partition wall. When the substrate having the light-shielding partition wall was irradiated with a light, and the light-shielding partition wall was photographed using a Ccd camera, and the film was inspected by comparison with a pattern prepared in advance, a defect defect was detected in the light-shielding partition wall. Further, in the above apparatus, the missing portion of the defective portion of the partition wall is mounted, the wall portion is removed, and the laser beam of the defect portion of the partition wall is removed, and the defect defect correction device is used for the front end portion. The obtained partition correction fluid. This step was repeated twice, and the partition correction liquid was applied so that the partition walls were not damaged. Subsequently, the region coated with the light is irradiated with ultraviolet rays to be cured as a correction portion. Further, the external lens 33 201202758 is an ultraviolet spot irradiation device that uses an ultrahigh pressure mercury lamp mounted on the above device as a light source, and is irradiated with an exposure amount of 5, 〇〇〇mj/cni2. In the correction portion 'to remove the ink repellency on the surface continuous with the side surface of the partition wall', the surface of the correction portion is 20 μm from the outermost end of the correction portion (corresponding to 3 μm in FIG. 3X) at 20%. The laser output power illuminates a pulsed laser (wavelength 532 nm). When the film thickness was measured by an optical microscope, the maximum film thickness of the correction portion before the laser light irradiation was reduced by a pulsed laser beam (h2) of 2 〇〇 nm and h2/hl was 0.1. In the region of 1 〇〇μηι 200 μηι which is partitioned by the partition wall having the correction portion obtained as described above, a thermosetting ink containing 25% of a solid content containing a green pigment was injected using an ink jet apparatus (^(^". (9) It was dried on a hot plate for 5 minutes, and then heat-treated at 2 ° C for 3 minutes to form a pixel. The volume of the ink layer after heat hardening was 4 〇 pL. The white point of the ink was repelled around the partition wall. If the defect has the partition wall of the correction portion, the surface of the upper portion of the partition portion of the correction portion has ink repellency, and the surface of the correction portion that is continuous with the side surface of the partition wall has ink affinity, so that no ink is generated. Overflow of color mixing and 'the ability to form an ink layer with high precision. [Example 2] After forming a defect on a non-glass substrate, Li

硬化後直接崎以Τ的像素形成。 與例1同樣地進行, 34 201202758 在由具有上述所得到修正部的隔壁所區隔之1〇叫 200μηι的區域内’使用噴墨裝置而注入含有綠色顏料之固 體成分為25%的熱硬化型油墨(18〇pL)(j;iiH〇(rc在熱板上乾 燥5为刼。隨後’於2〇〇 C進行加熱處理3〇分鐘來形成像素。 油墨層之加熱硬化後的體積為4〇1^。 具有上述修正部之隔壁,因為在其修正部中與隔壁側 面連續的面係具有拒油墨性,所以在該修正部側壁周邊係 拒斥油墨,致使產生白點。 [例3] 與例1同樣地進行,在無鹼玻璃基板上形成遮光性隔壁 後。對該隔壁與例1同樣地進行檢測缺陷時,檢測出缺損缺 陷。與例1同樣地進行,在缺損缺陷部塗布隔壁修正液並使 其硬化作為修正部。 在修正部’為了除去在與隔壁側面連續的面之拒油墨 性’係對修正部的該面’於從修正部的最外端起寬度(相 當於第3圖X為5μιη)以60%的雷射輸出功率照射脈衝雷射 (波長為532nm)。使用光學顯微鏡測定膜厚度時,在雷射光 照射前的上述修正部之膜厚度最大值(hl)為2.〇μηι,被照射 脈衝雷射而削減的膜厚度(h2)為0_8nm,h2/hl為0.4。 在由具有上述所得到修正部的隔壁所區隔之1 ΟΟμηιχ 200μιη的區域内,使用喷墨裝置而注入含有綠色顏料之固 體成分為25%的熱硬化型油墨(i80pL)。於100°C在熱板上乾 燥5分鐘。隨後,於2〇(Tc進行加熱處理30分鐘來形成像素。 油墨層之加熱硬化後的體積為4〇pL。 35 201202758 立 '有述奴正部之隔壁,因為在其修正部的隔壁之上 p表面係具有拒油墨性,且在修正部中與隔壁側面連續的 ㈣具有親m所以不會產生油墨從懸溢出混色和 、隔土周邊拒斥_墨之白點等的*良,而能夠高精細地形 成油墨層。 [例4] …與例\同樣地進行’在級玻璃錢上形《光性隔壁 後對趣壁與例1同樣地進行檢測缺陷時,檢測出缺損缺 ”例1同樣地進行,在缺損缺陷部塗布隔壁修正液並使 其硬化作為修正部。 在修正部’為了除去與隔壁側面連續的面之拒油墨 係對修正部的面’於從修正部的最外端起_寬度(相 田於第3圖X為5μηι)以1〇〇%的雷射輸出功率照射脈衝雷射 (波長為532nm)。使用光學顯微鏡測定膜厚度時,在雷射光 照射前的上述修正部之膜厚度最大值(hl)為2 ()哗,被照射 脈衝雷射而削減的膜厚度化幻為丨如爪,112/111為〇 6。 在由具有上述所得到修正部的隔壁所區隔之1〇〇μιηχ 200μηι的區域内,使用喷墨裝置而注入含有綠色顏料之固 體成分為25%的熱硬化型油墨(丨8〇pL)。於丨〇〇°c在熱板上乾 燥5分鐘。隨後,於2〇〇。(3進行加熱處理3〇分鐘來形成像素。 油墨層之加熱硬化後的體積為40pL。 具有上述修正部之隔壁,可能是因為來自隔壁修正部 的飛沫之量太多,致使隔壁上部表面的拒油墨性低落,油 墨躍上了隔壁上部。 36 201202758 確認h2 /h 1超過G. 5時’隔壁上部表面的拒油墨性係不充 分,h2/hl<0_5時’能夠顯現更良好的拒油墨性。 產業上之可利用性 依照本發明的隔壁之修正方法,係以只有使修正部中 相當於隔壁上部的表面具有拒油墨性之方式,來修正在以 劃分成為複數區_以形成於基板上、且在上面具有拒 油墨性而在側面具有_墨性之隔Μ發生的缺損缺陷, 在修正後所進行之用以形成像素的印墨吐出上,能夠防止 在隔壁修正部中與隔壁側面連續的面之濕潤性低落,藉此 能夠防止像素的膜厚度不均句化,能夠應用在彩色濾、光 片、有機EL兀件、電路基板、薄膜電晶體、微透鏡、生物 晶片等所使用的隔壁。 又,將2010年4月13日申請之日本特許出願 2〇10-〇92219觀明書、巾請專·圍、圖式及摘要的全部 内容引用於此’且併人作為本發明的說明書之揭示。 【圖式簡單說明】 第l(a-d)圖係模式性顯示本發明的隔壁之修正方法的 一個例子之圖。 第2(a-b)圖係模式性顯示本發明的隔壁之修正方法的 個例子中硬化步驟後的修正部之立體圖及剖面圖之圖。 第3圖係顯示藉由本發明的隔壁之修正方法的一個例 子而最後所得_修正部剖面圖。 【主要元件符號說明】 1.. .基板 2.. .隔壁 3.. .缺損缺陷 4.. .硬化性修正液 37 201202758 5.. .修正部 6.. .修正液供給手段 7…點 8.. .硬化用紫外線 9.. .修正液供給手段 11.. .拒油墨性表面 12.. .表層除去部 21.. .隔壁的側面 hi...修正部膜厚度最大值 h2...被除去的表層之厚度 w...修正部寬度 X...距離 38After hardening, it is formed directly by the pixels of Τ. In the same manner as in Example 1, 34 201202758 Injected into a region of 200 μm separated by a partition wall having the above-described obtained correction portion, a thermosetting type in which a solid content containing a green pigment was 25% was injected using an inkjet device. Ink (18 〇 pL) (j; iiH 〇 (rc is dried on a hot plate for 5 刼. Then 'heated at 2 〇〇 C for 3 来 to form a pixel. The volume of the ink layer after heat hardening is 4 〇 The partition wall having the correction portion has ink repellency on the surface continuous with the side surface of the partition wall in the correction portion, so that the ink is repelled around the side wall of the correction portion, thereby causing white spots. [Example 3] In the same manner as in Example 1, the light-shielding partition wall was formed on the alkali-free glass substrate, and when the defect was detected in the same manner as in Example 1, the defect was detected. In the same manner as in Example 1, the partition defect was applied to the defect defect portion. The liquid is hardened as a correction portion. The correction portion 'in order to remove the ink repellency on the surface continuous to the side surface of the partition wall' is the width of the outer surface from the outermost end of the correction portion (corresponding to the third Figure X is 5μιη) 60% of the laser output power is irradiated with a pulsed laser (wavelength of 532 nm). When the film thickness is measured by an optical microscope, the film thickness maximum (hl) of the correction portion before the laser light irradiation is 2. 〇μηι, irradiated The film thickness (h2) which was reduced by the pulse laser was 0_8 nm, and h2/hl was 0.4. In the region of 1 ΟΟμηιχ 200 μm which was partitioned by the partition having the correction portion obtained as described above, the green pigment was injected using an ink jet apparatus. The solid content was 25% of a thermosetting ink (i80 pL), which was dried on a hot plate at 100 ° C for 5 minutes, and then formed by heating at 30 ° C for 30 minutes. The ink layer was heat-hardened. The volume is 4 〇pL. 35 201202758 The partition wall of the syllabary is the ink-repellent property of the p-surface on the partition wall of the correction part, and the fourth side of the correction part is continuous with the side wall of the partition wall. The ink layer is formed in a high-definition manner, and the ink layer can be formed in a high-definition manner. Upper shape "lighting next door to the wall and (1) When the defect is detected in the same manner, the defect is detected in the same manner as in Example 1. The partition correction liquid is applied to the defect defect portion and cured as a correction portion. The correction portion 'in order to remove the ink that is continuous with the side surface of the partition wall The surface of the correction unit is irradiated with a pulsed laser (wavelength of 532 nm) at a laser output power of 1% by the width from the outermost end of the correction unit (the width of the field is 5 μm in Fig. 3X). When the film thickness is measured by a microscope, the film thickness maximum (hl) of the correction portion before the laser light irradiation is 2 () 哗, and the film thickness reduced by the irradiation pulse laser is illusory as a claw, and 112/111 is 〇 6. A thermosetting ink (丨8〇pL) containing 25% of a solid content of a green pigment was injected into the region of 1 μm χ 200 μm divided by the partition wall having the correction portion obtained as described above. Dry on a hot plate for 5 minutes at 丨〇〇°c. Subsequently, at 2 〇〇. (3) Heating is performed for 3 minutes to form a pixel. The volume of the ink layer after heat curing is 40 pL. The partition wall having the correction portion may be because the amount of the droplet from the partition correction portion is too large, resulting in rejection of the upper surface of the partition wall. When the ink is low, the ink leaps to the upper part of the partition. 36 201202758 When h2 / h 1 exceeds G. 5, the ink repellency of the upper surface of the partition is insufficient, and h2/hl < 0_5 can show better ink repellency. INDUSTRIAL APPLICABILITY According to the method for correcting a partition wall according to the present invention, the surface of the correction portion corresponding to the upper portion of the partition wall is modified so as to be divided into a plurality of regions to be formed on the substrate. Further, the defect having the ink repellency on the surface and the smear of the ink on the side surface is prevented from being formed on the side of the partition wall in the partition correction portion by the ink discharge for forming the pixel after the correction. The wettability of the surface is low, thereby preventing the film thickness of the pixel from being uneven, and can be applied to color filters, optical sheets, organic EL elements, circuit boards, and thin films. The partitions used for crystals, microlenses, and biochips. In addition, the contents of the Japanese Patent Application No. 2〇10-〇92219, and the contents of the drawings, drawings, and abstracts, which were filed on April 13, 2010, are included. The disclosure of the specification of the present invention is hereby incorporated by reference. FIG. 1 is a diagram showing an example of a method for correcting a partition wall of the present invention. FIG. 2(ab) A schematic view showing a perspective view and a cross-sectional view of the correction unit after the hardening step in the example of the method for correcting the partition wall of the present invention. Fig. 3 is a view showing an example of the correction method of the partition wall of the present invention. Sectional view. [Explanation of main component symbols] 1.. Substrate 2. Partition 3: Defective defect 4.. Hardening correction fluid 37 201202758 5.. Correction section 6.. Correction fluid supply means 7...Point 8.. Curing ultraviolet light 9.. Correction liquid supply means 11.. Repellent surface 12.. Surface removal part 21.. Side wall of the partition wall... Correction film thickness maximum H2... thickness of the surface layer removed... correction section width X... distance 38

Claims (1)

201202758 七、申請專利範圍: 1. 一種上面具有拒油墨性且側面具有親油墨性之隔壁之 缺損缺陷的修正方法,係修正隔壁之缺損缺陷之方法, 該隔壁係用以在基板上形成複數個區隔而配設在前述 基板上者,其上面具有拒油墨性且側面具有親油墨性; 該方法之特徵在於具備下述步驟: 檢測步驟,其係檢測前述隔壁的缺損缺陷者; 塗布步驟,其對於前述缺損缺陷,係以下述方式進 行塗佈:使含有拒油墨劑的硬化性修正液於該修正液硬 化時至少填充前述缺損缺陷,且成為與周邊隔壁大致相 同大小; 使前述硬化性修正液硬化而作成修正部之步驟;及 除去步驟,其對於前述修正部中與前述隔壁側面連 續的面照射雷射光,並除去在照射部位中之前述修正部 的表層。 2. 如申請專利範圍第1項之修正方法,其於將照射前述雷 射光前之修正部的膜厚度最大值設為hi,且將藉由雷射 光照射而被除去之表層的厚度設為h2時,h2/hl<0.5。 3. 如申請專利範圍第1或2項之修正方法,其中前述隔壁係 藉由下述步驟而製得者: 在基板上塗布含有拒油墨劑之感光性樹脂組成 物,而形成該感光性樹脂組成物的塗膜層, 隨後,透過對應於所需要的圖案之光罩,對前述塗 膜層照射光線,而使被照射光線的部分硬化, 39 201202758 隨後,進行顯像處理,並除去未被照射光線的部分 而製得隔壁。 4. 如申請專利範圍第3項之修正方法,其中前述感光性樹 脂組成物更含有光自由基聚合性的黏合劑樹脂及光聚 合起始劑。 5. 如申請專利範圍第1至4項中任一項之修正方法,其中前 述拒油墨劑係在側鏈具有氟烷基及乙烯性雙鍵之聚合物。 6. 如申請專利範圍第1至5項中任一項之修正方法,其中前 述雷射光之照射係從前述修正部的最外端朝向隔壁内 側對2〜10 μηι的區域表面進行。 7. 如申請專利範圍第1至6項中任一項之修正方法,其中前 述硬化性修正液含有含氟拒油墨劑。 8. 如申請專利範圍第7項之修正方法,其中前述含氟拒油 墨劑含有乙烯性雙鍵。 9. 如申請專利範圍第7或8項之修正方法,其中前述硬化性 修正液更含有自由基交聯劑及光聚合起始劑。 1〇_如申請專利範圍第1至9項中任一項之修正方法,其中前 述隔壁係具有遮光性之隔壁。 11. 如申請專利範圍第1至10項中任一項之修正方法,其中 前述隔壁係彩色濾光片用之隔壁。 12. 如申請專利範圍第1至11項中任一項之修正方法,其中 前述隔壁係有機EL元件用之隔壁。 40201202758 VII. Patent application scope: 1. A method for correcting a defect defect of a partition wall having ink repellency and side ink affinity, which is a method for correcting a defect defect of a partition wall, wherein the partition wall is used for forming a plurality of defects on a substrate The method is disposed on the substrate, and has an ink repellency on the upper surface and an ink repellency on the side surface; the method is characterized by the following steps: a detecting step of detecting a defective defect of the partition wall; a coating step, The defect defect is applied by causing the curable correction liquid containing the ink repellent agent to fill at least the defect defect when the correction liquid is cured, and to have substantially the same size as the peripheral partition wall; a step of forming a correction portion by liquid hardening; and a removing step of irradiating the surface of the correction portion that is continuous with the side surface of the partition wall with laser light, and removing the surface layer of the correction portion in the irradiation portion. 2. The method of claim 1, wherein the maximum thickness of the film before the irradiation of the laser light is set to hi, and the thickness of the surface layer removed by irradiation with the laser light is h2. When h2/hl<0.5. 3. The method of claim 1, wherein the partition wall is obtained by coating a photosensitive resin composition containing an ink repellent agent on a substrate to form the photosensitive resin. The coating layer of the composition is then irradiated with light through the mask corresponding to the desired pattern to harden the portion of the irradiated light, 39 201202758 Subsequently, the development process is performed, and the removal is not performed. The partition wall is made by irradiating a portion of the light. 4. The method of claim 3, wherein the photosensitive resin composition further comprises a photoradical polymerizable binder resin and a photopolymerization initiator. 5. The method of claim 1, wherein the ink repellent agent is a polymer having a fluoroalkyl group and an ethylenic double bond in a side chain. 6. The correction method according to any one of claims 1 to 5, wherein the irradiation of the laser light is performed on the surface of the region of 2 to 10 μm from the outermost end of the correction portion toward the inner side of the partition wall. 7. The method of claim 1, wherein the sclerosing correction fluid contains a fluorine-containing ink repellent. 8. The method of claim 7, wherein the fluorine-containing oil-repellent ink contains an ethylenic double bond. 9. The method of claim 7, wherein the sclerosing correction fluid further comprises a radical crosslinking agent and a photopolymerization initiator. The correction method according to any one of claims 1 to 9, wherein the partition wall has a partition wall having a light-shielding property. 11. The method of any one of claims 1 to 10, wherein the partition wall is a partition wall for a color filter. 12. The correction method according to any one of claims 1 to 11, wherein the partition wall is a partition wall for an organic EL element. 40
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