201200066 六、發明說明： 【發明所屬之技術領域】 本發明係關於用於清理之可賴力_子或墊子。 【先前技術】 清潔的製程在其可以開始前會要求極度 染物最終中=附的微輸 :類水性或親水性，而且可多 起咖r*相氧化表層，表面粗糙’例如可能由先前研磨作掌引 的=以與隆起；由於研磨作業而附著在工件上 f而更加穩定且更難在處理前移除。於是 ΐ Hi i1微粒或汙染物從卫件上移除之製程。_，清C :理則已移除實質上所有此類微粒或汙染物之卫件。、 卢裡fib，亟需用於清理工件的改良技術，例如有問題且需要左 質上所有此類微粒或汗染物從工件上移除 的設備ίίϊί技術錢要能盡快完紅件清舰減知於清理 本發明實施例係呈現於内文脈絡t。 【發明内容】 麻ίί"7言，本發日績施機由提侧財效清獻件(特別是 磁碟機製，基板)的方法缝置來滿足鱗需求。疋 降妨在n巾’提供—種清理卫件關子。測子包括一哪 此固定的第—與第二部分。該剛性核心具有^ 核心的旋轉軸而定義的一孔洞。一流體通道係定義於$ i部分的相對表ί之間。該流體通道從定義該孔祠的表 輪射狀延伸。第-與第二薄顧固定在該第—與第二部分的 201200066 ΐίΐϋΐ:與第二薄膜的動作係透過流經該流體通道 =f，]。在一實施例中，該薄膜為多孔式，且該流體為清 理流體，為了清理而接觸該工件(例如磁碟片或半導體基板 在另-實補巾H種清社件岐縣置。該裝 圓柱形核心，其具有含數個開口的表面。___ 軸旋轉，而—流體充滿部狀義於侧柱形核心的 内壁中。刷子係分隔開且從該數個開口的每一個向外 刷t具有和對應開口連通的-内管。該内管*刷毛材料圍繞。以 ϋίΐΐ ’該内管依照從該流體充滿部流人的流體所提供之壓 =而張開，^。在另-實施例中，_彈性薄膜係繞著該内管配 而带ΐΐϋ'ϊ巧依照從該流體充滿部流人的流體所提供之壓力 版隨義由張開與 下詳明本發明之其他態樣與優點將隨以 【實施方式】 下述實施例侧於-種清理轉㈣置。在-實 iil用的磁碟片。當知該等實施例不限於清ΐ ，片此處所述减例可用於清難何半導體電路元件、 二 =2或=基1。此處所用的詞彙「工件」可表示任何待 彙「磁碟片」_)與「碟片」㈣ 系父替使用且亦可意扣任何此類的基板或工件。 該等^_提供-種輕叫㈣鮮錄子。 力，Γ或收縮以修正由刷子/墊子表面施加在工 件表面上，力1。除此之外，透過τ述實關，不同 件係可同時清理。詞彙「刷子」與「墊子」係交 兮 用於牛純理包括麵4的轉體基板。 圖1為簡化示意圖，_本發明一實施例，圖示一種清理工 201200066 ίί 包括用以支撐數個磁翻應的支撐結構i〇0。 it ί f著柱子82a與82b垂直調動。支撐結構100 :一患丨二下的氣缸92驅動。支稽結構100可支標碟片106。 則2 U撐結構100係用以從集中處(nest)90移除與歸還 後將更詳細說明，變動壓力塾13G提供磁碟片廳 詈ί由=2照Σ實施例，變動壓力塾130係繞著轉軸120配 ⑽依…本發明一實施例之支撐結構應的示範圖。支撐 二框f 1G4a與框架獅’以及佈置於框架购與腿 m面之間的滾輪組搬a、搬b與腿 l〇2a^l〇2b^ 1〇2〇^^ 而在—實施财’可料雜件械械螺絲， 奢碟片 滾輪組職則水平支撐磁碟片觸。在若干 例中，可移式第四滾輪組(未呈現)係用以在清理作業 tr6上件m喊輪_能純在轉▲與 ί ί ίΐ; 與102b的特徵促成能容納大直 仏碟片的支雜中處，而其他配置則能容納較 ^ 注思圖2A所示支撐結構1〇〇的相對尺寸並 、:0月 結po能夠為了容納更多或更少碟片而= 細即可於關專利中請案第12/359,173號中尋得，兹^^ 内容以供參考。 寸忖鉍此併入該案 圖2B為簡化示意圖，依照本發明一實 個可變壓力刷/墊的清理震置。在一實施例中 係可結合圖2Β的清理裝置一起使用。在—實施例中的圖支2=| 201200066 置，螺旋洗蘇¥，藉由移除殘餘的微粒物質處201200066 VI. Description of the Invention: TECHNICAL FIELD OF THE INVENTION The present invention relates to a reliant _ sub or mat for cleaning. [Prior Art] The cleaning process requires extreme dyes before it can start. The micro-transports are attached: water-based or hydrophilic, and can be oxidized on the surface. The surface is rough. For example, it may be The palm of the hand = with the bulge; due to the grinding operation attached to the workpiece f is more stable and more difficult to remove before processing. Then ΐ Hi i1 particles or contaminants are removed from the process. _, Qing C: The rule has removed virtually all such particles or contaminants. , Luli fib, there is no need for improved techniques for cleaning the workpiece, such as equipment that has problems and requires all such particles or sweat stains on the left to be removed from the workpiece. ίίίί technical money should be able to redeem the ship as soon as possible The cleaning of the embodiments of the present invention is presented in the context of the context t. [Summary of the Invention] Ma ί ί 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7降 降 在 n n n n n n n n n n n n n n n The tester includes a fixed first and second part. The rigid core has a hole defined by the axis of rotation of the core. A fluid channel is defined between the relative tables of the $i portion. The fluid passage extends from the crown defining the bore. The first-and second-thickness is fixed in the first-and second-part 201200066 ΐϋΐίΐϋΐ: the action with the second film is transmitted through the fluid passage =f,]. In one embodiment, the film is porous, and the fluid is a cleaning fluid, and the workpiece is contacted for cleaning (for example, a magnetic disk or a semiconductor substrate is used in another type of cleaning device). a cylindrical core having a surface having a plurality of openings. The ___ shaft rotates, and the fluid is filled in the inner wall of the side cylindrical core. The brushes are separated and brushed outwardly from each of the plurality of openings Having an inner tube in communication with the corresponding opening. The inner tube* is surrounded by the bristle material. The inner tube is opened according to the pressure provided by the fluid flowing from the fluid-filled portion, and is further implemented. In an example, the _elastic film is disposed around the inner tube with a ΐΐϋ'. The pressure plate provided by the fluid flowing from the fluid-filled portion is succinctly opened and the other aspects and advantages of the present invention are detailed. [Embodiment] The following embodiments are used in the case of a cleaning disk (four). The magnetic disk used in the real iil. It is known that the embodiments are not limited to the cleaning. Clear semiconductor circuit components, two = 2 or = base 1. The term used here is " Member "may represent any exchange be" floppy "_) and (iv) based parent" discs "and may also use intended for the fastening of any such substrate or workpiece. These ^_ provide - kind of screaming (four) fresh recording. Force, twist or contract to correct the force applied by the brush/mat surface to the workpiece surface. In addition, through the τ description, different parts can be cleaned at the same time. The vocabulary "brush" and "mat" are used for the transfer of substrates including the face 4 of the cattle. 1 is a simplified schematic view of an embodiment of the present invention, illustrating a cleaning worker 201200066 ίί comprising a support structure i 〇 0 for supporting a plurality of magnetic doublings. It ί f vertically moves the columns 82a and 82b. The support structure 100 is driven by a cylinder 92 that is under the pressure. The support structure 100 can support the disc 106. Then, the 2 U-support structure 100 is used to remove and return from the center 90. The variable pressure 塾 13G provides the disk chamber 詈 由 = = = 由 = = = = = = Σ Σ Σ , , , , An exemplary diagram of a support structure according to an embodiment of the present invention is disposed (10) around the rotating shaft 120. Supporting the two frames f 1G4a and the frame lion 'and the roller set arranged between the frame purchase and the leg m side, moving a, moving b and legs l〇2a^l〇2b^1〇2〇^^ Miscellaneous pieces of mechanical and mechanical screws can be used, and the luxury disc wheel set is horizontally supported by the disk. In several cases, the movable fourth roller set (not shown) is used to clear the wheel _ in the cleaning operation tr6 _ can be purely ▲ and ί ί ΐ; and the characteristics of 102b enable to accommodate the big straight 仏The other parts of the film can accommodate the relative size of the support structure 1〇〇 shown in Fig. 2A, and the 0 month can be used to accommodate more or fewer discs. It can be found in the patent application No. 12/359,173, which is for reference. This is incorporated herein by reference. Figure 2B is a simplified schematic view of a compact pressure brush/pad cleaning in accordance with the present invention. In one embodiment, it can be used in conjunction with the cleaning device of Figure 2A. In the embodiment, Figure 2 = | 201200066, spiral wash, by removing residual particulate matter
二貫施例中，刷子/墊子13G脉置於雜⑽上_ U 壓力而。當知可能會包括圖=== n物，以便控制刷子/墊子於轉轴上的固定區域内。如下 核心’彈性薄膜與刷毛材料係配置於 造的壓力，而從該核心張開以及收二面 .〇1貝以列，關於此處所述之可變壓力刷/墊130(配合螺旋洗 參閱美國專利申請案第11/862，17〇號，以得知^ ^先^』'、，。構以及輸送流體至可變壓力刷/塾的轉軸之更田、 即。入美國專利申請案第U/862，170號的内容以供參考: 轉，ϋ 支撐結構觸的滾輪組102讓碟片能夠旋 轉使付碟片的整個表面皆能接觸到清理裝置。此外 节 5槽促成碟片的間隔相等且使和碟片廳的接觸最少: ΐίίίΐί係ΐ透過機器人而移到處理機具的適當位置上，以' ^接u甜祕最少。侧的刷子/奸射如下述分 論刷子’墊子是否有分區，皆可定義溝槽101在 ^ 1〇1 ；^面^ °當知在刷子/墊子130有分區的情況下， 孱槽101可和分區或區段之間的空間一致。 /墊示照本發明一實施例，圖示可變壓力刷 在—3G為娜刷’其中數個個別的刷子136a至136f 的分區上。刷子130包括定義中央孔洞134的剛性 二、/赭，照:貫施例，孔、洞134係安展成在轉轴上可滑動。如 八軸可提供流體至多個流體通道132。流體將分送至各個 5 I姓a至^36f以改變空隙，並因而改變對應的刷子130之間的 $技術者當知雖然在刷子/塾子上係繪有六個分區 而在另一貫施例中可包含更多或更少的分區。 力刷圖f外贫ft發明一實施例，圖示一種可變壓 刀刷八外滑已從刷子的一部分甲移除。為了圖示說日月，刷子/塾 201200066 子13〇已將刷子13〇用外層lss從刷 移除。在外層135材料(可為如〜〜塾子30表面的—部份中 彈性薄膜·在-實料)底下為 ::在彈 的相對表面上。由於彈性壤膊1/1Λ y剛性核心138的相對表面，所以剛性核心138 132 ’以使流體能流人經由彈性薄膜⑽ 中”張開或收縮。彈性薄膜材料包括橡膠T J Jolyvmyl chloride, PVC) > ^^^^^^^(ethylene 〇p ^ EPDM)與絲歧⑽(high_density 圖3C為簡化示意圖’錢本發明—實麵，圖示移除 ^刀與-底下彈性薄膜，以圖示該刷子_性核心。刷子13〇包 ，剛性核心138。剛性核心138具有凸起的延伸部154，朝著剛性 亥〜138的外框156呈輻射狀向外延伸。剛性核心138中有數個 開口 152 ^ 一個岡ij性核心]^8卩背對背的方式組合時，流體通道 132輸送流體至定義於彈性薄膜與剛性核心138表面之間的空隙 中。開口 152使得壓力在組合剛性核心138的相 ' ^ 一實施财，幌細138包括二彳_分，的 责對背配置形式而嚅合在一起。在一實施例中，嚅合在一起的二 個部分定義流體通道132。亦即一個部分的流體通道係定義於每個 嚆合部分的剛性核心138中。 圖4為簡化示意圖，依照本發明一實施例，圖示剛性核心的 橫剖面圖。依照本發明一實施例，剛性核心138係繪成能和另一 個部分嚅合的一個部分。亦即圖4所示部分的鏡像係固定在所示 201200066 =上以定義完整_性核心。孔洞134係定義於剛性核心 、央。卩分。流體通道132係定義於剛性核心138的每個部分中， 且能輸送流體至定義於剛性核心中的分區内。透過 152 ”薄膜上_力均等。在圖4的圖示中，六個分區係二義 =延伸部154、内框155、與外框156之間，然而，此並非限制。 示此之外，雖然定義了六個分區，但在分區 區之間不需有-對一的相互對應。亦即在剛性核心f3=: 形成數個分區’但彈性薄膜可為一連續件(或是其他配置形式），^ 不具有和剛性核心一致的分區。 圖5Α為簡化示意圖，依照本發明一實施例，圖示可變壓力刷 /墊用之另一種剛性核心配置形式。剛性核心138由二個部分組 成，其以背對背的配置形式嚆合在一起並具有孔洞（中央開 口）134’其中流體通道132係定義於定義孔洞134的結構之内表面 上。延伸部154與外框156以及内框155定義分區16〇。在此實施 例中，彈性薄膜係配置在剛性核心138上，且可黏在内框155、延 卩154與外框156上以封住各個分區160。精於此技術者當知藉 由流過流體通道132的流體所控制之各個分區的壓力係可獨立控 制、。亦即透過具有數個流體輸送管路(其中每個輸送管路透過各自 的μ體通道132和對應的分區連通)的轉軸’就可獨立改變每個分 區160的張開與收縮。 圖5B為簡化示意圖，圖示圖5A中背對背配置形式的剛性核 心之一個部分。在一實施例中，圖5B所示的剛性核心部分15〇係 和鏡像部分結合以形成完整的剛性核心。流體輸送通道132由孔 洞134延伸到空腔(分區)160(定義於延伸部154、外框156與内框 ^55之間）。因此，當流體從流體通道132流進空腔(分區)日寺，彈性 薄膜將會張開以減少相鄰的刷子/墊子之間的空隙，以提供清理裝 置用的可變壓力。當知此處所述的剛性核心可由任何能和流體與 清理作業相容的剛性材料組成，例如塑膠、金屬或複合材料等等。 圖6A為簡化示意圖，依照本發明一實施例，圖示一種單一碟 片用清理系統。碟片1〇6係置於刷子130a與130b之間。設置終In the second embodiment, the brush/mat 13G pulse is placed on the impurity (10) _ U pressure. It is known that the figure === n object may be included in order to control the brush/mat in the fixed area on the shaft. The following core 'elastic film and bristle material are placed at the pressure of the build, and from the core open and close the two sides. 〇 1 shell, with regard to the variable pressure brush / pad 130 described here (with spiral wash see U.S. Patent Application Serial No. 11/862,17, the entire disclosure of which is incorporated herein by reference to the entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire content The contents of U/862, 170 are for reference: Turn, 滚轮 The roller set 102 of the support structure allows the disc to rotate so that the entire surface of the disc can be contacted with the cleaning device. In addition, the 5 slots promote the spacing of the discs. Equivalent and minimize contact with the disc office: ΐίίίΐί The system moves to the appropriate position of the processing tool through the robot, with ' ^ u u sweetest least. Side brush / rape shot as the following brush 'mat is there For the partition, the groove 101 can be defined as ^1〇1;^面^° When it is known that the brush/mat 130 has a partition, the groove 101 can be consistent with the space between the partition or the section. According to an embodiment of the invention, the variable pressure brush is illustrated in a number of -3G On the partition of the other brushes 136a to 136f, the brush 130 includes a rigidity defining a central hole 134, and the hole 134 is slidable on the rotating shaft. Fluid to the plurality of fluid passages 132. The fluid will be distributed to each of the first names a to ^36f to change the gap, and thus the $ between the corresponding brushes 130 is known, although the brush/tweezers are drawn with six The partition may include more or fewer partitions in another embodiment. The force brush diagram f is an embodiment of the invention, illustrating that a variable pressure knife brush has been removed from a portion of the brush In order to illustrate the sun and the moon, the brush / 塾 201200066 child 13 〇 has removed the brush 13 外层 from the brush with the outer layer lss. In the outer layer 135 material (can be such as ~ ~ 塾 30 surface - part of the elastic film Underneath the material is: on the opposite surface of the bomb. Due to the opposite surface of the elastic core 138, the rigid core 138 132 'so that the fluid can flow through the elastic film (10) Open or shrink. Elastomeric film material includes rubber TJ Jolyvmyl chloride, PVC) > ^^^^^ ^^(ethylene 〇p ^ EPDM) and silk fissure (10) (high_density Figure 3C is a simplified schematic diagram of the present invention - a solid surface, showing the removal of the knife and the underlying elastic film to illustrate the brush _ sex core. Brush 13A bag, rigid core 138. The rigid core 138 has a raised extension 154 that extends radially outwardly toward the outer frame 156 of the rigid sea 138. The rigid core 138 has a plurality of openings 152 ^ a core When combined in a back-to-back manner, fluid channel 132 delivers fluid to a space defined between the elastic film and the surface of rigid core 138. The opening 152 causes the pressure to be combined in the phase of the combined rigid core 138, which is the same as the back-to-back configuration. In one embodiment, the two portions that are twisted together define a fluid passage 132. That is, a portion of the fluid passageway is defined in the rigid core 138 of each of the twisted portions. 4 is a simplified schematic view showing a cross-sectional view of a rigid core in accordance with an embodiment of the present invention. In accordance with an embodiment of the invention, the rigid core 138 is depicted as a portion that can be joined to another portion. That is, the mirror image of the portion shown in Fig. 4 is fixed on the shown 201200066 = to define the complete _ sex core. Hole 134 is defined in the rigid core and central. Score. Fluid channel 132 is defined in each portion of rigid core 138 and is capable of transporting fluid into a zone defined in the rigid core. Through the 152" film, the force is equal. In the illustration of Fig. 4, the six partitions are ambiguous = the extension portion 154, the inner frame 155, and the outer frame 156, however, this is not a limitation. Although six partitions are defined, there is no need for a one-to-one correspondence between the partitions. That is, in the rigid core f3=: several partitions are formed' but the elastic film can be a continuous piece (or other configuration) There is no partition that is consistent with the rigid core. Figure 5A is a simplified schematic diagram showing another rigid core configuration for a variable pressure brush/pad in accordance with an embodiment of the invention. The rigid core 138 is composed of two parts It is folded back in a back-to-back configuration and has a hole (central opening) 134' in which the fluid channel 132 is defined on the inner surface of the structure defining the hole 134. The extension 154 defines a partition with the outer frame 156 and the inner frame 155. In this embodiment, the elastic film is disposed on the rigid core 138 and can be adhered to the inner frame 155, the extension 154 and the outer frame 156 to seal the respective sections 160. Flow by fluid passage 132 The pressure of each zone controlled by the body can be independently controlled, that is, through a shaft having a plurality of fluid delivery lines (each of which is connected through a respective μ body channel 132 and a corresponding zone) The opening and contraction of each partition 160 is varied. Figure 5B is a simplified schematic diagram showing a portion of the rigid core in the back-to-back configuration of Figure 5A. In one embodiment, the rigid core portion 15 shown in Figure 5B is The mirrored portions combine to form a complete rigid core. The fluid delivery channel 132 extends from the aperture 134 to a cavity (division) 160 (defined between the extension 154, the outer frame 156 and the inner frame ^55). Thus, when the fluid is from the fluid Channel 132 flows into the cavity (partition) Risho, and the elastic film will open to reduce the gap between adjacent brushes/mats to provide variable pressure for the cleaning device. Know the rigid core described here. It can be composed of any rigid material that can be compatible with fluid and cleaning operations, such as plastic, metal or composite materials, etc. Figure 6A is a simplified schematic diagram showing a single disc for cleaning in accordance with an embodiment of the present invention. System. 1〇6 disc disposed between the brush lines 130a and 130b. Final setting
8 S 201200066 端支撐物160a與160b以控制刷子130a與130b的張開程度。精 於此技術者當知終端支撐物16〇a與160b可在轉軸的長度上包含 數個刷子130。終端支撐物160a與160b係固定在各自的位置上以 緊固可變壓力刷並控制刷子向外張開的程度。在一實施例中，圖 6A中刷子i3〇a與130b具有配置於個別剛性核心單侧上的彈性薄 膜。 、圖6B為簡化示意圖，圖示圖6A中單一碟片用清理系統的侧 視圖。終端支撐物160a與160b控制配置於轉軸12〇上的刷子13〇a 與^30b。碟片106係置於刷子i3〇a與130b之間。透過此處所述 的實施例，經由轉軸120流入刷子130a與13〇b剛性核心中的流 體會使刷子130a與130b張開以提供可變壓力，針對清理梦晉备 個開槽位置中的碟片廳表面進行清理。因此，透過此處 施例’就可在單-機具中同時清理不同形减尺寸的碟片。除此 之外，透過此處所述實施例，就可隨所需而施加實質上 等的壓力至同一組碟片中。 一 圖7A為簡化示意圖’圖示可變壓力刷/塾清理系統的另 施例。清理刷子200a與200b具有數個刷子延伸部2〇4，分別從圓 ，形核心施與202b延伸。制腿與腿鱗於刷子2〇〇a 200b，間。刷子延伸部2〇4係固定在各自的圓柱形核心2〇2g m 申部2〇4的薄膜能夠透過流經圓柱形核心2〇2a 202b je接者入刷子延伸部2〇4之流體而收縮或張開。刷子 2f0a與鳩的旋轉可為相反方向或相同方向。舉例而言，在 施例中，刷子200a與200b可同為順時針旋轉。 ,圖7A中可變壓力刷/墊清理系統的橫 ^心202a與腿躲成具有數個 =柱該 等開口係沿著平行列放置。在—實施财，雜入口 = 讓流體進人延伸f職糊π #許21()。f ^ 核心延伸至刷子2G4的流體通道。 于&供由圓柱形 圖8為簡化示意圖，依照本發明一實施例，圖. 圓柱形核心與已將刷子移除的圓柱形核心。為了清楚說明， 201200066 形核心202a係繪成已將刷子移除。數個洞口或 ，一長度定義。在此圖中，數個以二^ 實：上平行的列而定義。此配置形式為示範性而非意圖作 =制丄精於本技術者當知任何合適的洞口佈置皆可設於此處所 ^義^貫施例中。刷^ 2_鱗成具有從圓柱形核心延伸的刷子 錄’官子21G延伸穿過圓柱形核心的壁面以達圓柱 由心?1二因5 ’輸送至圓柱形核心内部核心區域的流體 六fG而达至個別的刷子上。流進刷子2G4的流麵 ϋίί 刷子薄膜的張開量，以控制碟片随或腿所 子。圖’依照本發曰月一實施例，圖示一張開的刷 1 ^子204具有沿者刷子長度延伸的管子21〇。如圖8所示 ί ί ίΐ：：2140 w 214 ίΐ!ΐίίί f ° ^ ^ 216 #, /〇者刷子214的長度定義。當在清理碟片或工株眛，、、番錨 得微粒能經由溝槽移除。在一實施例中， 然而，其形狀並非限於V型溝枰，而3ff 216,，狀為V型’ 處所述實關。 r^任何_龍皆適用於此 圖9B為簡化示意圖，依柙本發一每 4面圖。管子210沿著刷子綱的長^延伸 1 子=== 數個延伸穿過管子壁面的門π f官于21〇的壁面疋義 配置。在-實=^=2=^材料叫係繞著㈣0 中，管子21〇為剛性材;^在組成。在另一實施例 子214可包括彈性薄膜，其 為剛性材料的情況下’刷 彈性薄膜(配置於刷毛材料214^^=21^由，，送至 力量而收縮與張開。因此，彈性薄 卜表面之間)之流體的壓 雖然為使理解清楚，已二開將使得刷子張開。 201200066 範圍的範疇與均等物中進行 文所提細節，而是可在隨附申請專利 修正。 【圖式簡單說明】 最佳ΐί明及狀多優料勤參践上描述搭配隨 附·圖式而致 件用=為簡化示意圖，健本發明—實施例，圖示—種清理工 :3 ίΐ照本發明—實施例之支撐結構的示範圖。 圖2Β為簡化不意圖，依昭太發明每—γ丨^ 個可變刷子/塾子的清理妓「、本^月—^例’ ®示—種具有數 力刷/塾。^化不,_，依照本發明—實施例，圖示-種可變壓 的-圖，依照本發明—實施例，圖稀外層移除 分與】^=^朗，賴本發明—實酬，_除刷子部 _生溥臈，以圖示該刷子的剛性核心。 橫剖;圖為抓不思圖，依照本發明—實施例’圖示剛性核心的 _圖的依照本發明一實施例，圖示可變壓力刷 ® 示ί圖’圖示圖5八中剛性核心的橫剖面圖。 片用I里^間化不思圖，依照本發明一實施例，圖示-種單-碟 視圖圖6B為簡化示意圖，圖示圖6A中單一碟片用清理系統的側 施例圖7A為簡化示意圖，圖示可變壓力刷/墊清理系統的另-實 為圖7A中可變壓力刷/塾清理系統的横剖面圖。 圃8為ft化示意圖，依照本發明一實施例，圖示已移除刷子 201200066 的' —種圓柱形核心。 圖9A為簡化示意圖，依照本發明一實施例，圖示一張開的刷 子。 圖9B為簡化示意圖，圖示圖9A中刷子的橫剖面圖。 【主要元件符號說明】8 S 201200066 End supports 160a and 160b to control the extent of opening of brushes 130a and 130b. It is known to those skilled in the art that the terminal supports 16A and 160b can include a plurality of brushes 130 over the length of the shaft. Terminal supports 160a and 160b are secured in respective positions to secure the variable pressure brush and control the extent to which the brush is flared outward. In one embodiment, the brushes i3a and 130b of Figure 6A have an elastic film disposed on one side of an individual rigid core. Figure 6B is a simplified schematic view showing a side view of the cleaning system for a single disc of Figure 6A. The terminal supports 160a and 160b control the brushes 13A and 30b disposed on the rotating shaft 12A. The disc 106 is placed between the brushes i3〇a and 130b. Through the embodiments described herein, the fluid flowing into the rigid cores of the brushes 130a and 13〇b via the rotating shaft 120 causes the brushes 130a and 130b to open to provide a variable pressure for cleaning the dish in a slotted position. The surface of the chamber is cleaned. Therefore, it is possible to simultaneously clean the differently sized discs in the single-tool by the embodiment here. In addition to this, with the embodiments described herein, substantially equal pressure can be applied to the same set of discs as desired. Figure 7A is a simplified schematic view of another embodiment of a variable pressure brush/twist cleaning system. The cleaning brushes 200a and 200b have a plurality of brush extensions 2〇4 extending from the circle-shaped core application 202b, respectively. The legs and legs are scaled to the brush 2〇〇a 200b, between. The brush extensions 2〇4 are fixed to the respective cylindrical cores 2〇2g m. The film of the application portion 2〇4 can be shrunk by the fluid flowing through the cylindrical core 2〇2a 202b je into the brush extension 2〇4. Or open. The rotation of the brush 2f0a and 鸠 can be in the opposite direction or in the same direction. For example, in the embodiment, the brushes 200a and 200b can rotate in the same clockwise direction. The transverse core 202a of the variable pressure brush/pad cleaning system of Figure 7A is nested with legs having a plurality of columns which are placed along parallel rows. In the implementation of the fiscal, miscellaneous entrance = let the fluid into the extension of the job π #许21 (). f ^ The core extends to the fluid passage of the brush 2G4. Figure 8 is a simplified schematic view of a cylindrical core with a cylindrical core from which the brush has been removed, in accordance with an embodiment of the present invention. For clarity, the 201200066 shaped core 202a is depicted as having removed the brush. Several holes or , a length definition. In this figure, several are defined by two parallel: upper parallel columns. This configuration is exemplary and not intended to be used by the skilled artisan to know that any suitable opening arrangement can be provided herein. Brush 2 2_ scales with a brush extending from the cylindrical core, the official 21G extends through the wall of the cylindrical core to reach the cylinder by the heart? 1 2 due to 5 'transport to the core core inner core of the fluid six fG And reach the individual brushes. Flow into the brush 2G4 ϋίί The amount of opening of the brush film to control the disc or the leg. In accordance with an embodiment of the present invention, an open brush 1 ^ 204 has a tube 21 延伸 extending along the length of the brush. As shown in Figure 8, ί ίΐ::2140 w 214 ίΐ!ΐίίί f ° ^ ^ 216 #, / The length of the brush 214 is defined. When the disc or the sputum is cleaned, the particles can be removed through the groove. In one embodiment, however, the shape is not limited to the V-groove, and 3ff 216, the shape is the V-'. r^ Any _ dragon is applicable to this Figure 9B is a simplified schematic diagram, according to the present invention, each of the four sides. The tube 210 extends along the length of the brush. 1 sub === A number of doors extending through the wall of the tube are disposed on the wall of the 21 疋. In the - real = ^ = 2 = ^ material called around (four) 0, the tube 21 is a rigid material; ^ in the composition. In another embodiment 214, the elastic film may be included, which is a rigid material in the case of a rigid material (configured on the bristle material 214 ^ ^ ^ 21 ^, sent to the force to shrink and open. Therefore, the elastic thin cloth Although the pressure of the fluid between the surfaces is clear for understanding, the second opening will cause the brush to open. 201200066 The scope and scope of the scope are described in detail, but may be amended in the accompanying patent application. [Simple description of the diagram] The best ΐ 明 及 及 及 及 料 料 料 上 上 上 上 上 上 上 上 上 = = = = = = = = = = = = = = = = = = = = = = = = = = = An exemplary diagram of a support structure in accordance with the present invention - an embodiment. Figure 2Β is for the sake of simplicity. According to Zhao Zhaotai, every γ丨^ variable brush/tweezer is cleaned up, “this month ^^^”® shows that the species has several force brushes/塾. _, in accordance with the present invention - an embodiment, a variable pressure - map, in accordance with the present invention - an embodiment, the thin outer layer removes the points and ^ ^ ^ ^ Lang, Lai this invention - the real reward, _ brush _ 溥臈 溥臈 溥臈 溥臈 溥臈 溥臈 溥臈 溥臈 溥臈 溥臈 溥臈 图示 图示 图示 ; ; ; ; ; ; 。 。 。 。 。 。 刚性 刚性 刚性 刚性 刚性 刚性 刚性 刚性 刚性 刚性 刚性 刚性 刚性 刚性 刚性 刚性 刚性 刚性 刚性 刚性 刚性The variable pressure brush is shown in the cross-sectional view of the rigid core in Fig. 5. The slice is in the middle of the drawing. According to an embodiment of the present invention, the illustrated single-disc view is shown in Fig. 6B. Simplified Schematic, which illustrates a side embodiment of a single disc cleaning system of FIG. 6A. FIG. 7A is a simplified schematic diagram showing the variable pressure brush/pad cleaning system in addition to the variable pressure brush/塾 cleaning system of FIG. 7A. A cross-sectional view of Fig. 8 is a schematic view of the ft, and in accordance with an embodiment of the invention, the cylindrical core of the brush 201200066 has been removed. Figure 9A is a simplified cross-sectional view. A schematic view, in accordance with an embodiment of the present invention, illustrating an open brush. FIG. 9B is a simplified schematic drawing illustrating a cross-sectional brush Fig. 9A. The main element REFERENCE NUMERALS
S 80 系統 82a、 82b 柱子 90 集中處 92 氣缸 100 支撐結構 101 溝槽 102、 102a〜102c 滾輪組 104a 、104b 框架 106、 106a > 106b 碟片 120 轉軸 130、 130a、130b 刷子/墊子 132 通道 134 孔洞 135 外層 136a〜136f 分區 138 剛性核心 140 彈性薄膜 142 洞口 150 剛性核心部分 152 開口 154 延伸部 155 内框 156 外框 160 分區 201200066 160a、160b 終端支撐物 200a、200b 刷子 202a' 202b 圓柱形核心 204 刷子 210 管子 212 開口 216 溝槽 220 開口S 80 System 82a, 82b Column 90 Concentration 92 Cylinder 100 Support Structure 101 Grooves 102, 102a-102c Roller Set 104a, 104b Frame 106, 106a > 106b Disc 120 Spindle 130, 130a, 130b Brush/mat 132 Channel 134 Hole 135 Outer layer 136a~136f Partition 138 Rigid core 140 Elastic film 142 Hole 150 Rigid core portion 152 Opening 154 Extension 155 Inner frame 156 Outer frame 160 Partition 201200066 160a, 160b Terminal support 200a, 200b Brush 202a' 202b Cylindrical core 204 Brush 210 tube 212 opening 216 groove 220 opening