TW201144778A - Terahertz wave detector, and process for production thereof - Google Patents
Terahertz wave detector, and process for production thereofInfo
- Publication number
- TW201144778A TW201144778A TW100112678A TW100112678A TW201144778A TW 201144778 A TW201144778 A TW 201144778A TW 100112678 A TW100112678 A TW 100112678A TW 100112678 A TW100112678 A TW 100112678A TW 201144778 A TW201144778 A TW 201144778A
- Authority
- TW
- Taiwan
- Prior art keywords
- substrate
- terahertz wave
- film
- main body
- antenna main
- Prior art date
Links
- 239000000758 substrate Substances 0.000 abstract 6
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
- G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/04—Casings
- G01J5/041—Mountings in enclosures or in a particular environment
- G01J5/045—Sealings; Vacuum enclosures; Encapsulated packages; Wafer bonding structures; Getter arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/08—Optical arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/08—Optical arrangements
- G01J5/0837—Microantennas, e.g. bow-tie
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010109961A JP2011237312A (ja) | 2010-05-12 | 2010-05-12 | テラヘルツ波検出器及びその製造方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
TW201144778A true TW201144778A (en) | 2011-12-16 |
Family
ID=44914247
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW100112678A TW201144778A (en) | 2010-05-12 | 2011-04-12 | Terahertz wave detector, and process for production thereof |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP2011237312A (zh) |
TW (1) | TW201144778A (zh) |
WO (1) | WO2011142191A1 (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI671508B (zh) * | 2015-01-14 | 2019-09-11 | 日商濱松赫德尼古斯股份有限公司 | 熱測量器型THz檢測器 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2513170B (en) * | 2013-04-18 | 2020-07-08 | Univ Of Ljubljana | Bolometric detection system with reflecting cavity |
CN110006534A (zh) * | 2019-04-11 | 2019-07-12 | 南京大学 | 一种用于太赫兹检测的微纳测辐射热计的制备方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6329655B1 (en) * | 1998-10-07 | 2001-12-11 | Raytheon Company | Architecture and method of coupling electromagnetic energy to thermal detectors |
US6292140B1 (en) * | 1999-11-03 | 2001-09-18 | Hypres, Inc. | Antenna for millimeter-wave imaging and bolometer employing the antenna |
FR2884608B1 (fr) * | 2005-04-18 | 2007-05-25 | Commissariat Energie Atomique | Detecteur bolometrique, dispositif de detection d'ondes electromagnetiques submillimetriques et millimetriques mettant en oeuvre un tel detecteur |
JP4221424B2 (ja) * | 2006-08-09 | 2009-02-12 | 株式会社東芝 | 固体撮像素子及びその製造方法並びに撮像装置 |
-
2010
- 2010-05-12 JP JP2010109961A patent/JP2011237312A/ja active Pending
-
2011
- 2011-04-01 WO PCT/JP2011/058453 patent/WO2011142191A1/ja active Application Filing
- 2011-04-12 TW TW100112678A patent/TW201144778A/zh unknown
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI671508B (zh) * | 2015-01-14 | 2019-09-11 | 日商濱松赫德尼古斯股份有限公司 | 熱測量器型THz檢測器 |
Also Published As
Publication number | Publication date |
---|---|
WO2011142191A1 (ja) | 2011-11-17 |
JP2011237312A (ja) | 2011-11-24 |
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