TW201144778A - Terahertz wave detector, and process for production thereof - Google Patents

Terahertz wave detector, and process for production thereof

Info

Publication number
TW201144778A
TW201144778A TW100112678A TW100112678A TW201144778A TW 201144778 A TW201144778 A TW 201144778A TW 100112678 A TW100112678 A TW 100112678A TW 100112678 A TW100112678 A TW 100112678A TW 201144778 A TW201144778 A TW 201144778A
Authority
TW
Taiwan
Prior art keywords
substrate
terahertz wave
film
main body
antenna main
Prior art date
Application number
TW100112678A
Other languages
English (en)
Inventor
Jun Suzuki
Masatoshi Ishihara
Fumikazu Ojima
Ryusuke Kitaura
Masahiro Yamazaki
Original Assignee
Hamamatsu Photonics Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hamamatsu Photonics Kk filed Critical Hamamatsu Photonics Kk
Publication of TW201144778A publication Critical patent/TW201144778A/zh

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/42Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • G01J5/04Casings
    • G01J5/041Mountings in enclosures or in a particular environment
    • G01J5/045Sealings; Vacuum enclosures; Encapsulated packages; Wafer bonding structures; Getter arrangements
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • G01J5/08Optical arrangements
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • G01J5/08Optical arrangements
    • G01J5/0837Microantennas, e.g. bow-tie

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
TW100112678A 2010-05-12 2011-04-12 Terahertz wave detector, and process for production thereof TW201144778A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010109961A JP2011237312A (ja) 2010-05-12 2010-05-12 テラヘルツ波検出器及びその製造方法

Publications (1)

Publication Number Publication Date
TW201144778A true TW201144778A (en) 2011-12-16

Family

ID=44914247

Family Applications (1)

Application Number Title Priority Date Filing Date
TW100112678A TW201144778A (en) 2010-05-12 2011-04-12 Terahertz wave detector, and process for production thereof

Country Status (3)

Country Link
JP (1) JP2011237312A (zh)
TW (1) TW201144778A (zh)
WO (1) WO2011142191A1 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI671508B (zh) * 2015-01-14 2019-09-11 日商濱松赫德尼古斯股份有限公司 熱測量器型THz檢測器

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2513170B (en) * 2013-04-18 2020-07-08 Univ Of Ljubljana Bolometric detection system with reflecting cavity
CN110006534A (zh) * 2019-04-11 2019-07-12 南京大学 一种用于太赫兹检测的微纳测辐射热计的制备方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6329655B1 (en) * 1998-10-07 2001-12-11 Raytheon Company Architecture and method of coupling electromagnetic energy to thermal detectors
US6292140B1 (en) * 1999-11-03 2001-09-18 Hypres, Inc. Antenna for millimeter-wave imaging and bolometer employing the antenna
FR2884608B1 (fr) * 2005-04-18 2007-05-25 Commissariat Energie Atomique Detecteur bolometrique, dispositif de detection d'ondes electromagnetiques submillimetriques et millimetriques mettant en oeuvre un tel detecteur
JP4221424B2 (ja) * 2006-08-09 2009-02-12 株式会社東芝 固体撮像素子及びその製造方法並びに撮像装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI671508B (zh) * 2015-01-14 2019-09-11 日商濱松赫德尼古斯股份有限公司 熱測量器型THz檢測器

Also Published As

Publication number Publication date
WO2011142191A1 (ja) 2011-11-17
JP2011237312A (ja) 2011-11-24

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