GB2513170B - Bolometric detection system with reflecting cavity - Google Patents

Bolometric detection system with reflecting cavity Download PDF

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Publication number
GB2513170B
GB2513170B GB1307052.9A GB201307052A GB2513170B GB 2513170 B GB2513170 B GB 2513170B GB 201307052 A GB201307052 A GB 201307052A GB 2513170 B GB2513170 B GB 2513170B
Authority
GB
United Kingdom
Prior art keywords
detection system
reflecting cavity
bolometric detection
bolometric
reflecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
GB1307052.9A
Other versions
GB201307052D0 (en
GB2513170A (en
Inventor
Macek Marijan
Trontelj Janez
Sesek Aleksander
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Of Ljubljana, University of
Univerza v Ljubljani
Original Assignee
Of Ljubljana, University of
Univerza v Ljubljani
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Of Ljubljana, University of, Univerza v Ljubljani filed Critical Of Ljubljana, University of
Priority to GB1307052.9A priority Critical patent/GB2513170B/en
Publication of GB201307052D0 publication Critical patent/GB201307052D0/en
Publication of GB2513170A publication Critical patent/GB2513170A/en
Application granted granted Critical
Publication of GB2513170B publication Critical patent/GB2513170B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/0225—Shape of the cavity itself or of elements contained in or suspended over the cavity
    • G01J5/024—Special manufacturing steps or sacrificial layers or layer structures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0837—Microantennas, e.g. bow-tie

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Radiation Pyrometers (AREA)
GB1307052.9A 2013-04-18 2013-04-18 Bolometric detection system with reflecting cavity Active GB2513170B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB1307052.9A GB2513170B (en) 2013-04-18 2013-04-18 Bolometric detection system with reflecting cavity

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1307052.9A GB2513170B (en) 2013-04-18 2013-04-18 Bolometric detection system with reflecting cavity

Publications (3)

Publication Number Publication Date
GB201307052D0 GB201307052D0 (en) 2013-05-29
GB2513170A GB2513170A (en) 2014-10-22
GB2513170B true GB2513170B (en) 2020-07-08

Family

ID=48537452

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1307052.9A Active GB2513170B (en) 2013-04-18 2013-04-18 Bolometric detection system with reflecting cavity

Country Status (1)

Country Link
GB (1) GB2513170B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107478343B (en) * 2016-06-07 2018-09-11 上海新微技术研发中心有限公司 Radiometer and method for manufacturing the same

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20010010360A1 (en) * 2000-01-31 2001-08-02 Naoki Oda Thermal infrared detector provided with shield for high fill factor
US20060231761A1 (en) * 2005-04-18 2006-10-19 Commissariat A L'energie Atomique Bolometric detector, device for detecting submillimetric and millimetric electromagnetic waves that uses such a detector
US20080237467A1 (en) * 2007-03-27 2008-10-02 Nec Corporation Bolometer-type thz-wave detector
WO2011142191A1 (en) * 2010-05-12 2011-11-17 浜松ホトニクス株式会社 Terahertz wave detector, and process for production thereof

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20010010360A1 (en) * 2000-01-31 2001-08-02 Naoki Oda Thermal infrared detector provided with shield for high fill factor
US20060231761A1 (en) * 2005-04-18 2006-10-19 Commissariat A L'energie Atomique Bolometric detector, device for detecting submillimetric and millimetric electromagnetic waves that uses such a detector
US20080237467A1 (en) * 2007-03-27 2008-10-02 Nec Corporation Bolometer-type thz-wave detector
WO2011142191A1 (en) * 2010-05-12 2011-11-17 浜松ホトニクス株式会社 Terahertz wave detector, and process for production thereof

Also Published As

Publication number Publication date
GB201307052D0 (en) 2013-05-29
GB2513170A (en) 2014-10-22

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