TW201141793A - Waste water recycle processing system and processing method thereof - Google Patents

Abstract

The present invention provides a waste water recycle processing system and a processing method thereof, including an alkaline waste water recycle processing system, an acidic waste water recycle processing system and an application thereof. This invention can effectively process ammonium ion and hydrogen peroxide-containing waste water during semiconductor process. Wherein the alkaline waste water recycle processing system adjusts the processed waste water to have strong basicity so that the ammonium ions in the waste water are converted into ammonia molecules and then flows in an air stream to perform a stripping operation for said ammonia molecule-containing waste water so as to remove the ammonia molecules in the waste water. The acidic waste water recycle processing system adjusts the processed waste water to have strong basicity and then uses an activated carbon decomposition device to decompose hydrogen peroxide in the waste water to be harmless oxygen. After the processed waste water is treated by this waste water recycle processing system, it can be reused as water source provided for semiconductor process.

Description

201141793 VI. Description of the invention: [Technical field to which the invention pertains] System and method for treating the same, the ammonium recovery treatment system contained in the wastewater treatment and the invention provide a waste water recovery treatment system, especially one that can discharge the semiconductor process Waste water treatment method for acid, ion and hydrogen peroxide as effective recovery treatment. [Prior Art]

In semiconductor manufacturing, the most common process step is wafer cleaning. The purpose of wafer cleaning is to remove contaminants such as organic compounds, metal impurities, or particles attached to the surface of the wafer. These contaminants can have a significant impact on the subsequent process of the product. Therefore, in the wafer cleaning process, it is necessary to effectively remove organic compounds, metal impurities, and particles attached to the surface of the wafer. To prevent these contaminants adhering to the wafer surface from affecting the yield of the product, wafer cleaning is performed before or after each process step to remove contaminants from the wafer. The commonly used method for wafer cleaning is the RCA cleaning process, which uses a sulfuric acid-hydrogen peroxide mixture (SPM), ammonia-peroxidation. A mixture of hydrogen (amm〇nium_hydr〇gen mixture, APM) and a mixture of hydrogen peroxide-hydrogen peroxide (HPM). The above cleaning liquids are composed of various chemical components. The APM cleaning liquid system consists of ammonia water, hydrogen peroxide and water. The SPM cleaning liquid includes sulfuric acid 'hydrogen peroxide and water. 3 201141793 ' and the HPM cleaning liquid system, including hydrochloric acid. , hydrogen peroxide and water. After the wafer finishes the process of cleaning process, the above-mentioned chemical cleaning liquid must be collected and sent to the factory end of the factory for recycling and treatment before being discharged to avoid serious environmental pollution caused by direct discharge. . The factory side of the semiconductor factory usually has a reclaim system to recover and treat the process wastewater. In general, it can be further classified into an acid wastewater recovery system.

Waste reclaim system , AWR

"SyStem)" and "caustic waste reclaim system 'CWR system"; however, if the acid-alkaline treatment for acid and wastewater is only simple, the treatment method is to send the wastewater to the neutralization tank. After the agent adjusts its pH to neutral, it can be discharged, but the chemical substances in the acid and alkali wastewater components cannot be removed. Among them, the main chemical substances of acidic wastewater include sulfate ions, phosphate ions and high concentrations. Hydrogen peroxide and

The ammonium ion is still in concentration, and the alkaline wastewater includes various organic solvents, hydrogen peroxide in the south concentration, and ammonium ion in the high concentration. The wastewater recycling treatment system first collects acidic wastewater or alkaline wastewater into a buffer tank, and continuously detects the conductivity, pH value and total amount of the wastewater in the tank. The concentration of organic carbon (TOC), if the water quality of the detected wastewater meets the set value of the treatable value, the acid-base wastewater is further purified to meet the water quality that can be used in the semiconductor process. After the wastewater is treated and regenerated, it can be recycled. In addition, if the process wastewater needs to be purified to the degree of ultrapure water that can be used in the semiconductor process, the treatment method includes ion exchange method and activated carbon. The method of filtering (activatecJ carb〇n filtration) and ultraviolet irradiation (Uv radiaii〇n). In general, 201141793 waste water recycling treatment system in semiconductor waste usually uses a variety of treatment methods as described above to purify the recovered wastewater. The operating equipment usually includes activated carbon filtration unit and weak alkaline anion exchange. The unit, the strong acid cation exchange unit, and the reverse osmosis unit, etc., after the high-purification and regeneration of the wastewater by the above-mentioned equipment, continue to be recycled at the process end of the plant. However, the reverse osmosis membrane (RO membrane) used in the reverse osmosis unit is easily decomposed by the peroxidation of the waste water due to its inability to resist strong oxidants, which causes the filtration capacity of the reverse osmosis unit to be lost and must be replaced. A new semi-permeable membrane continues to operate, causing the cost of wastewater treatment to be increased. Furthermore, the high concentration of ammonium ions in the wastewater cannot be effectively removed by reverse osmosis semipermeable membrane or anion or cation exchange resin, which may also cause 赓Water treatment load and environmental pollution. The above two points are all areas where the known wastewater reclamation treatment system is not ideal. It can be seen that the existing wastewater reclamation system has yet to be further reviewed and a viable solution is sought. SUMMARY OF THE INVENTION In view of the above, an object of the present invention is to provide a waste water recovery system, a sputum system, and a treatment method thereof, which can be applied to wastewater treatment with a recording ion doped hydrogen in a semiconductor process, which is to be treated. The high concentration of cesium in the wastewater and the reduction of hydrogen peroxide are removed to obtain a waste water recovery system that does not contain (iv) and peroxidize to achieve the above purpose. The wastewater recovery treatment system of the present invention includes a rational system and An acid waste water recycling system, 苴201141793: The water-repellent wastewater treatment system is an alkaline wastewater buffer tank with a sequential connection of your peach aphid, a first pH adjustment and an ammonia The wastewater treatment unit 兀 其中 该 该 该 该 ^ ^ ^ ^ ^ ^ ^ ^ ^ 氨 氨 氨 氨 氨 氨 氨 氨 氨 氨 氨 氨 氨 氨 氨 氨 氨 氨 氨 氨 氨 氨 氨 氨 氨 氨 氨 氨 氨 氨 氨 氨 氨 氨a fan and a sulfuric acid absorption tank;

The acidic wastewater treatment system includes an acidic wastewater buffer tank, a second acid value adjustment tank, a hydrogen peroxide treatment unit, a reverse osmosis permeation device, an ultraviolet sterilization device, and a final inspection (four). ^ The hydrogen processing unit is connected to the acidic wastewater buffer tank through the H-th value adjustment tank, and includes an activated carbon decomposition unit 'an activated carbon regeneration unit and a third pH adjustment tank. In another aspect, the present invention also provides a wastewater recycling treatment method, which comprises an alkaline wastewater recovery treatment and an acidic wastewater recovery treatment: ', the alkaline wastewater recovery treatment comprises: firstly, an alkaline wastewater containing ammonium ions The pH value is adjusted to be strongly alkaline, so that the ammonium ions in the wastewater are easily converted into the form of ammonia molecules, and an alkaline wastewater containing ammonia molecules is obtained; and the alkaline wastewater containing the ammonia molecules is further Performing a stripping operation on the ammonia-containing wastewater to obtain an ammonia-free alkaline waste water and air mixed with ammonia gas molecules; and the acid waste water recovery treatment comprises: first adjusting the pH value of a wastewater containing argon peroxide To be strongly 'to obtain a strong alkaline wastewater containing hydrogen peroxide; then the strong alkaline wastewater containing hydrogen peroxide is decomposed into oxygen molecules by peroxidation 201141793 by adsorption operation to obtain _I t$ μ pu & J No 3 strong alkaline wastewater with hydrogen peroxide; then adjust the pH value of the strong alkaline wastewater containing no hydrogen peroxide to neutral, and obtain neutral wastewater;The neutral wastewater is subjected to impurity filtration and ultraviolet sterilization by reverse osmosis method, and the water quality is detected. If the ammonia concentration, degree, pH value and total organic carbon concentration value are obtained, a recyclable process can be finally obtained. Pure water used again. [Embodiment] The present invention provides a wastewater recovery treatment system, and a preferred embodiment of the wastewater recovery treatment system, as shown in the figure, firstly sends the granulated wastewater to the alkaline wastewater recovery. The treatment system performs wastewater treatment, and the alkaline wastewater recovery treatment system includes an alkaline wastewater buffer tank 10, a first pH adjustment tank 2, and an ammonia-containing wastewater treatment unit 30', which is first collected by the process end. The discharged experimental wastewater is sent to the alkaline wastewater buffer tank, and the alkaline wastewater buffer tank 10 is continuously detected to determine the conductivity (c〇nductivity) and acid value (ρΗ μ丨) of the wastewater. This) and the total organic carbon (TOC) concentration value (t〇C mg/1) 'If the detected alkaline wastewater has a water quality that meets the set value range, an ammonium ion is obtained. The alkaline waste water is sent to the first pH adjustment tank 2, and the alkaline sodium hydroxide solution (45%) or the acidic sulfuric acid solution is appropriately added (5). 〇%) to pre-empt the wastewater Rational 'making the wastewater to be strongly alkaline and having a pH of at least 9.0 or more' to facilitate the conversion of ammonium ions in the wastewater into ammonia molecules. The 201141793 form exists to obtain an alkaline wastewater containing ammonia molecules. The alkaline wastewater of the ammonia molecule can be sent to a treatment unit 3 containing ammonia wastewater for treatment. The ammonia-containing wastewater treatment unit 3 includes an ammonia stripping device 3 1 .

A blower 32 and a sulfuric acid absorption tank 33, when the ammonia-containing wastewater treatment unit 30 treats the alkaline wastewater containing ammonia molecules, first sends the test wastewater containing the ammonia molecules to the stripping tower 311 of the ammonia stripping device 31. Performing a stripping operation, the flow of air generated by the blower 32 is introduced into the stripping tower 311' of the ammonia stripping device 31 to allow ammonia molecules to escape from the wastewater into the air, thereby obtaining an ammonia-free alkaline wastewater and The air mixed with the ammonia gas molecules can discharge the air mixed with the ammonia gas molecules to the absorption tower 312 connected to the sulfuric acid absorption tank 33 for treatment. The sulfuric acid solution from the sulfuric acid absorption tank 33 can be continuously and repeatedly The absorption of ammonia molecules can remove the ammonia molecules that are introduced into the air, and can be used to absorb the sulfuric acid in the absorption tower 3 12 , and when the liquid level of the absorption 3 12 reaches the liquid level 'The sulfuric acid in the absorption tower 3 12 is automatically pumped to the ammonium sulfate storage tank 34 for storage, and the ammonia-free alkaline wastewater can be directly discharged to an acidic wastewater recovery treatment system for a second treatment. Referring to FIG. 2, the acidic waste water discharged from the process end and the ammonia-free alkaline waste water treated by the ammonia stripping device 31 of the above-mentioned tentative wastewater recovery and treatment system can be sent to the acidic wastewater recycling treatment. System: Line treatment 'The acidic wastewater treatment system includes an acidic wastewater buffer tank 40, a second pH adjustment tank 50, a hydrogen peroxide treatment unit, a reverse osmosis filtration device 80, and an ultraviolet sterilization device. And the final detection tank 100; firstly, the acidic waste water discharged from the process end and the ammonia stripping device 31 processed by the alkaline waste water recovery and treatment system are used to collect the alkaline wastewater obtained by the non-ammonia component, and then separately sent To the acidic wastewater buffered birch 201141793 40, and continuously detecting the conductivity, pH value and total organic carbon concentration value (TOC < 5 mg / 〗) in the buffer tank of the alkaline wastewater, if the detected wastewater When the water quality is within the range of the settable values that can be treated, a wastewater containing hydrogen peroxide can be obtained, and the wastewater containing hydrogen peroxide is sent to the second pH adjustment tank 50 by appropriate addition of alkali. The sodium hydroxide solution or the acidic sulfuric acid solution (50%) is used to pretreat the wastewater, so that the wastewater is adjusted to be strongly alkaline and the pH value is at least more than 8_5, so that the hydrogen peroxide in the wastewater is in a weak base. The state of the state is such that a weakly alkaline wastewater containing hydrogen peroxide is obtained, so that the weakly alkaline wastewater containing hydrogen peroxide molecules can be sent to the hydrogen peroxide treatment unit 60 for wastewater treatment. The hydrogen peroxide treatment unit 60 includes an activated carbon decomposition unit 61, an activated carbon regeneration unit 62, and a third pH adjustment tank 7〇. When the hydrogen peroxide treatment unit 60 is used for a strong base containing hydrogen peroxide. In the treatment of the wastewater, the strong alkaline wastewater containing hydrogen peroxide is first sent to the activated carbon decomposition device 61 for contact, and the adsorption of the hydrogen peroxide by the plurality of micropores formed by the activated carbon decomposition device 61 itself is also caused by the strong alkali. It is more advantageous to decompose hydrogen peroxide into harmless oxygen molecules in a sexual state to obtain a strong alkaline wastewater containing no hydrogen peroxide; when the activated carbon of the activated carbon decomposition device 61 and the fine particles in the wastewater are in a wastewater concentration When the equilibrium is reached, the activated carbon decomposition apparatus is in an exhausted state. At this time, the activated carbon decomposition apparatus 62 is subjected to a backwashing process to wash off the fine particles blocking the minute voids of the activated carbon. , the activated carbon decomposition device and the activated carbon regeneration device are continuously treated to treat the strong alkaline wastewater containing nitrogen peroxide, in the strong alkaline wastewater. When the hydrogen peroxide concentration is combined with the set discharge wastewater standard, the short-lived 201141793 wastewater containing no peroxygen gas is sent to the third acid value adjustment tank 70' by appropriate addition of alkaline sodium hydroxide solution or acidity. The sulfuric acid solution (5〇%) is used to adjust the acidity and alkalinity of the weak alkaline wastewater containing no hydrogen peroxide, thereby obtaining a wastewater having a pH of 7〇 neutral and further neutralizing the neutral wastewater. It is sent to the reverse osmosis filtration device 80 for impurity filtration. The reverse osmosis filtration device 80 can filter the neutral waste water containing a lot of pollutants, and the pollutants in the neutral waste water are blocked by the reverse osmosis membrane by the pressure greater than the natural osmotic pressure difference. To achieve the purpose of purifying the water, a reverse osmosis filtered water is obtained, and the reverse osmosis filtered water is sent to the ultraviolet sterilizing device 9 for sterilization treatment. The ultraviolet light sterilizing device is a physical treatment, and the water after the reverse osmosis filtration can be directly sterilized without adding a chemical agent. After the bacteria are irradiated by the ultraviolet ray sterilizing device 90, the ultraviolet light will penetrate the bacteria. And the ultraviolet light wave can inhibit the proliferation of bacteria, thus achieving the disinfection effect, and obtaining a pure water, and finally sending the pure water to the final detection tank 1 连续, and continuously detecting the concentration of ammonia molecules in the final detection tank. (ΜΗ〆1〇〇ppb), conductivity ((:〇1^.<300 //8/(^), pH value (yang: 6~8) and total organic carbon concentration value (TOC< 1 mg /i), when the water of the final detection tank meets the set recycled water standard, the purified water which has been purified and processed in accordance with the semiconductor process can be recycled to the process end for reuse. Further, the wastewater of the present invention is used. The recycling treatment system and method can be used to store the solid ammonium sulfate in the tank 34 by ammonium sulfate, and can remove the ammonia molecules which are introduced into the air, and the obtained ammonium sulfate can be used as a fertilizer for agriculture, especially in the case of sulfur deficiency. Available on soil Fig. 1 is a flow chart showing a preferred embodiment of the present invention. Fig. 2 is a flow chart showing a preferred embodiment of the present invention. Fig. 2 is a flow chart showing a preferred embodiment of the present invention. .

[Main component symbol description] 1 0 alkaline wastewater buffer tank 30 containing ammonia wastewater treatment single 311 stripping tower 32 blower 34 ammonium sulfate storage tank 50 second pH adjustment tank 6-1 activated carbon decomposition device 70 third Acid-base adjusting tank 90 ultraviolet sterilizing device 20 first acid-base adjusting tank 31 ammonia stripping device 3 1 2 absorption tower 33 sulfuric acid absorption tank 40 acid waste water buffer tank 60 hydrogen peroxide treatment unit 62 activated carbon regeneration device 80 reverse osmosis filtration device 100 final detection tank

11

Claims (1)

201141793 VII. Patent application scope: / 1·- kinds of wastewater recycling treatment system, including an alkaline wastewater recycling treatment system and an acid wastewater recycling treatment system, wherein: i test f wastewater recycling treatment system, including sequential An experimental wastewater buffer tank connected, a flute gas-pH adjustment tank, and an ammonia-containing wastewater treatment unit 2 2 water treatment unit include a - and a - acid test value adjustment device and the ammonia a blower connected to the gas stripping device and a sulfuric acid absorption tank; the acidic wastewater treatment system is transferred to the crucible, the first system includes an acidic wastewater buffer tank, a second pH adjustment tank, and a < a unit, a reverse osmosis filter device, an ultraviolet sterilization nightmare- & + βο device and a final detection tank, wherein the ruthenium peroxide treatment early element passes through the 坌__^, the first osmium value adjustment groove The acidic wastewater buffer tank is connected and includes a ν stone injection decomposition device, an activated carbon regeneration device and a third pH adjustment tank. 2. In the wastewater recycling treatment system described in the scope of application of the patent, the _"end system of the _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ , an absorption tower, a sulfuric acid and a trough and an ammonium sulfate storage tank, ^, the lactating tower is connected with the first pH adjustment tank, and the stripping tower is respectively separated by a remote fan and absorbed The tower, and the absorption end of the absorption system is connected to the sulfuric acid absorption AlU Β1 Λ ^ Λ sigh, and the outlet enthalpy of the absorption tower is connected to the ammonium sulfate storage tank. 3. As claimed in the patent scope 1 j. , _ Λ χ 嚷 之 之 之 废水 其中 其中 其中 其中 其中 其中 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该Lack of recognition, gentleman, and an outlet of the tongue carbon decomposition device is connected to the second Sk value adjustment groove, and the outlet end of the calibration value adjustment groove is connected with 12.201141793. The reverse osmosis filter device is connected to the light sterilization. When the devices are connected, the purple final detecting tank is connected. The transporting and the reverse osmosis filtering device The UV germicidal ultraviolet light with the outlet end of a device or system and the wastewater of the item 3 at the uppermost item recovered 4. If the patent scope system is applied, the first acid-base 搐 4 Treatment and treatment of an acidic wastewater: The laboratory wastewater treatment includes: first adjusting the pH value of an alkaline wastewater containing ammonium ions to be strongly alkaline, thereby facilitating the conversion of ammonium ions in the wastewater into ammonia molecules. The form exists, and an alkaline wastewater containing gas molecules is obtained; and the alkaline wastewater containing ammonia molecules is subjected to a gas stripping operation on the ammonia-containing wastewater, thereby obtaining an ammonia-free inorganic test wastewater and ammonia gas mixed therein. Molecular air; and, the acid waste water recovery treatment comprises: first adjusting a pH value of a wastewater containing hydrogen peroxide to be strongly alkaline to obtain a strong alkaline wastewater containing hydrogen peroxide; wastewater; The strong alkaline wastewater containing hydrogen peroxide decomposes hydrogen peroxide into oxygen molecules by an adsorption operation, thereby obtaining a pH value of the hydrogen peroxide-free strong alkaline wastewater containing no hydrogen peroxide. Adjusted to neutrality to obtain a neutral wastewater; the neutral wastewater is filtered by reverse osmosis method and UV 13 201141793 light sterilization' and its water quality is private, Bt Measured for bismuth, ammonia molecules if the concentration, conductivity, total organic carbon concentration of the acid value and the base value, [theta] reached a final shell J recycled to the process again measured using pure water side. For example, in the wastewater recycling treatment method described in item 5 of the patent scope, the acidity test value of the experimentally effluent sent by the three rich ions is adjusted to a strong step including the acidity of the test water containing the money ion. The test value is adjusted to a pH of at least 9.0. 7. The wastewater recovery treatment method according to claim 5, wherein the step of adjusting the acid value of the wastewater containing hydrogen peroxide to a positive step comprises the pH value of the wastewater containing hydrogen peroxide Adjust to a pH of at least 8.5. Wastewater recovery treatment 8. As described in the scope of claim 6 or 7, the adsorption operation uses activated carbon as its medium. 8. Pattern: (eg next page)