201139218 六、發明說明： 【發明所屬之技術領域】 本發明是關於塡充液體用之液體容器，以及將液體從 該液體容器送出的送液裝置和液體之送出方法。 【先前技術】 於半導體及液晶領域中所使用的光阻劑或溶劑等的工 業用高純度藥液、醫療用高純度藥液及液態食品用材料等 的液體，必須於無異物混入而維持高純度的狀態下進行儲 存、搬運及使用。所以，用於儲存、搬運這些液體的液體 容器，或者直接安裝到送液裝置來使用的液體容器，最好 其成份溶出極少。如此之液體容器及液體之送出方法被揭 示於日本特開平11-290420號公報。 於上述文獻中所記載之液體容器，具有多層結構且以 高純度樹脂形成內層，於容器上部側突設排出口，且底部 形成平坦狀而使容器能站立。將高純度藥品液塡充到此容 器，如該文獻所圖示，在容器周圍用能耐氣壓的耐壓保護 容器或保護容器覆蓋而進行耐壓保護，利用氣體壓力送出 液體。 然而，上述文獻所記載之液體容器，於液體送出時， 很難排出殘留於平坦容器底部之液體，而有殘液量多的課 題。此外，欲保管複數個液體容器、或在送液裝置附近進 行準備時，必須將液體容器排成一列而需要寬廣的空間。 並且，將液體容器安裝於送液裝置時，必須用耐壓保護容 -5- 201139218 器覆蓋，所以送液裝置的零件數變多，變成大規模且高價 的裝置，又液體容器的安裝作業和交換作業繁雜。再者， 使用高壓氣壓送出液體時，於液體內將容易產生氣泡，所 以送液裝置必須設置用來去除液體中氣泡的過濾器。 【發明內容】 〔發明所欲解決之課題〕 本發明係爲了解決上述課題而開發完成的，其目的係 爲了提供一種可輸送的液體容器，其不僅能將所塡充之液 體維持高品質，且能省空間地進行液體之儲存，同時能儘 量減少送液時之殘液量。再者，其目的是爲了提供一種送 液裝置及送液方法，能簡便地進行該液體容器的安裝作業 和交換操作，且結構簡單又低成本，並能確實地減少液體 容器內之殘液量，且能安全地送出液體。 〔用以解決課題之手段〕 爲了達成前述目的之本發明之液體容器，係具備容器 主體及樹脂製的支承台： 該容器主體，係由彎曲彈性模數至少爲700MP a之熱可 塑性樹脂進行吹塑成形而製得，於大致呈圓筒狀之胴部形 成圓底及頂部，且在頂部具有與該胴部同心之排出口，能 容納液體且設有可在該排出口裝卸的栓蓋； 該支承台，是爲了使該容器主體站立而嵌合於該胴部 之該圓底側；其特徵在於： -6- 201139218 該容器主體’至少其內表面係由不會滲出既定基準値 以上之雜質微粒子到液體中的高純度熱可塑性樹脂所形成 » 在該支承台形成有貫通部及底部，於堆疊複數個該液 體容器時’該貫通部可收容堆在下層的該容器主體之附有 該栓蓋之該排出口，該底部可卡合於堆在下層的該容器主 體之頂部。 此液體容器的特徵爲，形成前述容器主體及/或前述 支承台之樹脂係可再生的樹脂。 一種送液裝置’係供安裝前述液體容器並將該液體容 器內的液體送出之送液裝置，其特徵在於，係具備台座、 送液接頭及按壓構件； 該台座，是供載置前述液體容器，其具有突起部，用 於嵌入前述支承台之前述貫通部並抵接於前述容器主體之 前述圓底； 該送液接頭，可替換前述栓蓋而在前述排出口裝卸以 密封該容器主體，其具有氣體供給口及送液管；該氣體供 給口，是連結壓力至多爲200kPa的加壓源而供應氣體到前 述容器主體內；該送液管，其末端接近該容器主體內之前 述圓底的最底部且前端朝該容器主體的外部導出； 該按壓構件，是可動作自如地設置於從該台座豎設的 支柱上’在抵接於嵌入該排出口的該送液接頭上部之位置 ’可固定其動作。 該送液裝置之特徵爲，在前述氣體供給口連結壓力爲 201139218 10k至50kPa之前述加壓源。 該送液裝置之特徵爲，前述氣體供給口可連接與前述 加壓源連結之加壓連接器；前述按壓構件具有制動件，在 其抵接於前述送液接頭上部之狀態而將該加壓連接器連接 於該氣體供給口時，該制動件碰觸該加壓連接器而將該按 壓構件的移動予以卡止。 該送液裝置之特徵爲，前述按壓構件與前述送液接頭 具有：互相嵌合而規定相對於該按壓構件之該前述氣體供 給口的位置之定位機構。 一種送液方法，其特徵爲，於前述液體容器塡充液體 ，將送液管的末端插入到圓底的最底部附近，將其前端朝 外部導出，夾住該液體容器的容器主體的上下，對該液體 容器內供給壓力至多爲200kPa的氣體，從該液體容器將液 體送出。 該送液方法之特徵爲，前述氣體壓力爲l〇k至50kPa。 〔發明效果〕 依據本發明之液體容器，其容器主體所使用的樹脂， 係從內表面不會滲出基準値以上之雜質微粒子到液體中的 高純度熱可塑性樹脂，且彎曲彈性模數至少爲7〇〇MP a之熱 可塑性樹脂，因此不僅可維持液體的高品質，同時還具有 優異的機械強度，可防止輸送時或保管時的容器發生破損 或變形。特別是於送液時，即使以壓力200kPa加壓也能防 止容器的大幅變形。此外，因其具有優異的機械強度，即 -8 - 201139218 使堆疊複數個塡充有液體的容器，堆在下層的液體容器也 不會發生破損。再者，當堆疊複數個液體容器時，因堆在 下層的液體容器之附有栓蓋的排出口收容於支承台的貫通 部’且在下層的頂部卡合支承台的底部，因此可進行穩定 地堆疊且省空間地進行保管。又，因容器主體呈圓底，可 減少送液時之液體殘量。 依據本發明之液體容器，是由可回收再生的樹脂所形 成’可作爲原料而進行再生循環使用，具有優良的環保性 〇 依據本發明之送液裝置及送液方法，藉由夾住容器主 體的上下兩側，可防止上下方向之變形。因此，送液管的 末端與圓底之間的距離不會變遠，所以送液時能將集中到 圓底的液體毫無浪費地以確實減少殘液量的方式送出。作 爲一例’其液體的殘液量可爲容器容量的0.5 %以下，較佳 爲0· 1 %以下。因此，可增加收容於液體容器中之液體的可 使用量，進而提高產率，且能減少液體容器的交換頻率而 具有優異的生產性。再者，因其使用具有優異的機械強度 之液體容器，不須用耐壓保護容器來覆蓋液體容器，不僅 液體容器的安裝作業和交換作業簡便，且裝置結構簡單而 變得低成本’又容易維修，而成爲經濟性優異的裝置。此 外’藉由以壓力至多爲200kPa的氣體進行加壓，液體容器 不會產生破損而非常安全，又因爲是低壓而能減少在液體 中產生之氣泡量。 依據本發明之送液裝置及送液方法，藉由使供給到液 -9 - 201139218 體容器內的氣體壓力爲l〇k〜50kPa， 中產生的氣泡S。 依據本發明之送液裝置，因按壓 連接器而將按壓構件的移動予以卡止 止：在連接著加壓連接器（亦即液體 的狀態下，不小心卸下用來固定送液 此可防止壓力造成送液接頭飛出，可 體容器。 依據本發明之送液裝置，按壓構 :規定相對於按壓構件之氣體供給口 藉此能使氣體供給口朝一定的方向， 器連接於氣體供給口，所以能迅速且 的安裝作業。再者，將連接於氣體供 制動器間的位置關係規定成一定的位 可確實地卡止按壓構件的移動。 【實施方式】 以下，對本發明之實施形態作詳 範圍並不限定於該等形態。 有關本發明之液體容器的較佳开 明。 第1圖顯示，堆疊例如兩個本發弓 保管台1 8上之狀態。液體容器1，係 會污染所塡充液體1 7之物，可用於液 可進一步減少在液體 構件具有可碰觸加壓 之制動器，所以可防 容器內殘留有壓力） 接頭的按壓構件，因 從裝置安全地卸下液 件及送液接配器具有 的位置之定位機構， 能簡便地將加壓連接 簡便地進行液體容器 給口的加壓連接器與 置關係，所以制動器 細說明，但本發明之 〖態，參照第1圖作說 g之液體容器1並置於 一種無成分溶出而不 體1 7的儲存、搬運， -10- 201139218 或將其直接安裝到送液裝置供使用。 此液體容器1，例如適用於要求潔淨液體品質的半導 體和液晶元件的製造領域、醫藥品領域及食品領域。作爲 液體1 7可舉例如：光阻液、酸、鹼、溶劑等在半導體和液 晶元件製造時所用的液體；消毒藥液、輸液、透析液等醫 藥用液體；香料、濃縮液、食品添加物等用於食品領域之 液體。以下說明，液體1 7爲半導體和液晶元件製造時所用 的光阻液的例子。 液體容器1如第1圖所示，係由容器主體2及支承台3所 構成。 容器主體2，其大致呈圓筒狀的胴部5之下部側（圖之 下側）爲圓底6，胴部5之上部側（圖之上側）被形成有排 出口 8之頂部7封閉。 排出口 8形成比胴部5直徑小的圓筒狀，與胴部5同心 ’從頂部7之中央部朝容器外側突設。在排出口 8的外周形 成公螺紋，可讓形成有母螺紋的栓蓋1 6進行裝卸。 頂部7 ’從排出口 8下端到胴部5可形成大致平坦狀， 但如第1圖所示’最好是形成從排出口 8到胴部5稍往下傾 斜的形狀，如此可增加容器的耐壓強度。此外，若頂部7 形成往下傾斜的形狀’於液體容器i使用後，將容器主體2 上下顛倒即可容易地排出微量殘留的殘液或洗淨水，從回 收再生的觀點是較佳的。此外，在頂部7上方堆疊支承台3 時’爲了避免支承台3左右移位，較佳爲讓頂部7的上部隆 起’而形成可嵌入後述的貫通部9之比貫通部9稍小徑的隆 201139218 起部7a。 於胴部5的圆底6側’形成供支承台3嵌入之環繞溝槽 11» 容器主體2形成能填充期望容量的液體〗7之大小，例 如1〜200L (公升）。關於容器主體2之直徑，若容量爲1L 例如形成直徑90mm ’若容量爲200L例如形成直徑600mm ，其直徑和容量可爲任意大小。 容器主體2係由彎曲彈性模數至少爲700MPa之熱可塑 性樹脂進行吹塑成形而製得，且至少其內表面係由高純度 熱可塑性樹脂所形成。例如，當容器主體2係由多層構造 的壁部所形成時，只要內表面層由高純度熱可塑性樹脂所 形成，其他任一暦可由彎曲彈性模數至少爲700MP a之熱可 塑性樹脂所形成即可，或由熱可塑性樹脂所形成之多層構 造的壁部整體形成具有彎曲彈性模數至少爲700MPa亦可。 此外，當容器主體2係由單層的壁部所形成時，則使用彈 性模數至少爲700MPa之高純度熱可塑性樹脂來形成即可。 不管哪一種情況，皆可使用公知的吹塑成型機進行成形。 在此，彎曲彈性模數的測定法係依照〗I S K 7 1 7 1。 對容器主體2供給至多爲壓力20 OkPa的氣體，藉由此 加壓來輸送液體1 7的情況，作爲防止容器的破損和大幅變 形所需的強度，容器樹脂之彎曲彈性模數至少爲700MP a。 若彎曲彈性模數未達700MPa，當加壓時容器的變形量大， 必需像習知容器那樣，例如用不鏽鋼耐壓容器等的耐壓保 護容器來覆蓋並保護容器主體2。 -12- 201139218 容器主體2的板厚’雖然增加板厚度能提高容器強度 ’但若過厚’不僅需要更多的原材料同時容器重量也會變 重，所以在彎曲彈性模數至少爲7 0 0 Μ P a且容易成型的範圍 內’板厚越薄越好。例如板厚爲1.5〜4mm左右時容易成形 ，是較佳的。 在此，高純度熱可塑性樹脂是指：不會滲出既定基準 値以上之雜質微粒子到液體1 7中的樹脂。具體而言，於容 器主體2中長時間儲存液體1 7的期間發生雜質微粒子的滲 出’作爲表示品質降低程度的指標稱爲潔淨度。潔淨度， 是將超純水或光阻液儲存於檢查容器中一定期間之後，算 出所儲存的內容液lmL中粒徑〇·2μηι以上的微粒子之存在 個數。具體而言是依下式（1)所定義。 【數1】 潔淨度（個/ mL) c(fg|) x a/2(mL) b(mL) x a{mL) …⑴ 式（1)中，a:檢查容器容量；b:從檢查容器所取 樣的內容液量。首先，用於測定初期潔淨度的取樣液之採 取步驟如下：於容量a(mL)的檢查容器中放入容量之半 量，亦即a/2 ( mL )的超純水或光阻液，振動1 5秒再靜置 24小時後進行採取。用於測定儲存後之潔淨度的取樣液之 採取步驟如下：在測過初期潔淨度的容器上安裝栓蓋放置 一定期間之後，爲避免產生氣泡而將容器旋轉3次後進行 採取。c :通過微粒子計數器計算取樣液全量中所含粒徑 -13- 201139218 〇. 2 μηι以上的微粒子個數。根據這些數値依式（1 )算出初 期及一定期間儲存後之潔淨度。潔淨度的數値越低顯示光 阻液的品質越好。當潔淨度爲未達1 00個/mL時，其不會降 低半導體、液晶顯示器（LCD )的品質及良率，可稔定地 儲存藥液。 因此，作爲高純度熱可塑性樹脂，將容器主體2作爲 檢查容器而測定其潔淨度時，是使用能滿足期望潔淨度的 樹脂。收容光阻液時，使用潔淨度爲未達100個/mL (既定 基準値之一例）的樹脂。換句話說，高純度熱可塑性樹脂 是指：不會滲出既定基準値以上之雜質微粒子到液體中的 樹脂。此外，亦可對應於所適用的規格而算出粒徑0.3 μιη 以上的微粒子個數。亦可對應於所適用的規格而使用潔淨 度未達200個/mL的樹脂。另外，栓蓋16亦可由高純度熱可 塑性樹脂所形成。 此外，除了潔淨度以外，亦可利用液體1 7的透明度惡 化程度（既定基準値之其他例）來規定雜質微粒子的滲出 程度。 形成容器主體2之樹脂較佳爲可回收再生的樹脂，可 舉例如：聚乙烯、聚丙烯等的聚烯烴：聚醯胺、聚乙烯醇 、乙烯·乙烯醇共聚物、聚酯、聚氧苯等。可將該等樹脂 單獨地使用而形成單層的壁部’亦可將該等樹脂使用複數 個而形成多層構造的壁部。 作爲具體例，容器主體2可採用下述結構：由皆爲聚 乙烯或乙烯· α-烯烴共聚物之聚合體（a)和聚合體（b -14- 201139218 )所構成。聚合體（a)之重量平均分子量爲20萬以上， 密度爲0.940〜0.970g/cm3，根據JIS K6760的熔融指數爲 0.09§/10分以下，且在總重量中占30〜95重量％，實質上覆 蓋外側表面；聚合體（b)之重量平均分子量爲3萬以上未 達20萬，密度爲0.930〜0.970g/cm3，根據JIS標準熔融指數 爲0.1〜1.0g/10分，且在總重量中占5~70重量％，實質上覆 蓋內側表面。在此情況，雜質微粒子朝所儲存藥品中的滲 出量極少，具優異的耐藥品性，並有充分的機械強度，可 作爲能充分滿足有關危險物藥品搬運容器之最新最嚴格國 際標準的容器主體2。 再者，作爲其他具體例，容器主體2可採用下述結構 :至少其內側表面係由密度爲〇.940~0.970g/cm3的聚乙烯 或乙烯· α-烯烴共聚物所構成。通過液相層析儀定量， 相對於樹脂總重量，此樹脂中所含的中和劑、抗氧化劑及 耐光安定劑的含量皆爲〇.〇1重量％以下；通過凝膠滲透層 析儀測定之此樹脂的重量平均分子量爲12〜26 xlO4，樹脂 中分子量lxl〇3以下的聚合體，相對於樹脂總重量未達2.5 重量％。其中，烯烴可選自丙烯、1-丁烯、4-甲基-1-戊 烯、1 _己烯、1 -辛烯中至少任一種。如此，可獲得具有優 異的機械強度，操作容易且雜質微粒子朝所保管儲存的溶 劑中之滲出量極少的容器主體2。此外，即使把下述液體 收容到此容器主體2中，仍可充分滿足日本藥典所制定的 品質標準：甲醇、乙醇、異丙醇、異丁醇、乙二醇、丙酮 、醋酸乙酯、甲苯、二甲基甲醯胺、乙二醇乙酸酯、甲氧 -15- 201139218 丙醇乙酸酯、丁基费路蘇等，及用於殺菌、消毒、製劑原 料等的醫藥用高純度溶劑，例如甲醇、乙醇、異丙醇等。 作爲其他的具體例，容器主體2可由樹脂組成物進行 成形而得，該樹脂組成物含有：凝膠滲透層析儀所測定之 重量平均分子量爲12〜26xl〇4，分子量ΐχΐ〇3以下之成分未 達5重量％，密度爲0.940〜0.970g/cm3的聚乙烯或乙烯· 〇：-烯烴共聚物的樹脂；通過液相層析儀定量之含童皆爲0.01 重量％以下之中和劑、抗氧化劑及耐光安定劑；選自氧化 鈦、碳黑、及氧化鐵紅的無機顏料，酞花青系、喹吖酮系 '及偶氮系的有機顏料中至少一種的遮光性顏料0.01〜5重 fi % ;數平均分子量爲2x1 03以上的烯烴系聚合體的分散劑 未達5重量％。在此情況，可獲得具優異的機械強度、操作 容易、雜質微粒子朝所儲存的藥品中之滲出fi極少、且可 防止遇光變質的容器主體2。所以，可廣泛適用於半導體 用藥液和上述醫藥用的溶劑等。 又，作爲其他具體例，容器主體2亦可爲包含內層、 中間層和外層之吹塑成形的容器。該內層，係由含有選自 乙烯、丙烯、1-丁烯、4-甲基-1-戊烯、1-己烯或1-辛烯的 烯烴聚合體，及乙烯與乙烯以外的烯烴之共聚物中的一種 ，且中和劑、抗氧化劑及耐光安定劑之各個含量至多爲 0.01重量％的高純度樹脂所構成；該中間層，係由含乙烯-乙烯醇共聚物的溶劑阻隔性樹脂所構成；該外層，係由含 遮光性物質的樹脂組成物所構成；通過分光光度計測定， 於波長400nm以下，容器全層的最低吸光度爲2.0以上，且 -16- 201139218 將容器全層的吸光度除以容器全層的厚度，於波長400nm 其吸光係數爲lJmnT1以上，於波長600nm其吸光係數爲 UmtiT1以下。在外層的樹脂組成物中可含有：由選自數 平均分子量爲2x1 03以上的聚乙烯及聚丙烯中至少一種的 烯烴系聚合體所構成之顏料分散劑未達5重量％ ;選自無機 顏料及有機顏料中至少一種之遮光性顏料0.01〜5重量％。 在外層的樹脂組成物中亦可含有未達2.5重量％的紫外線吸 收劑。在此情況，可獲得於保存及輸送中不會發生微粒子 和金屬離子的滲出而能維持高純度藥品液的品質，且不易 破損又輕量的容器主體2。 又亦可於該等具體例中所記載容器的外周設置彎曲彈 性模數爲700MP a以上之熱可塑性樹脂層而構成容器主體2 ，或者配合所設置的外層，使層構造之壁部整體之彎曲彈 性模數成爲700MPa以上亦可。 支承台3如圖所示，是將外側圓筒部1 3的下部和內側 圓筒部14的下部在底部15連結而形成雙層圓筒形。該外側 圓筒部13，具有可嵌合於容器主體2的環繞溝槽11之突起 部12，且與胴部5大致同徑。該內側圓筒部14踫觸圓底6的 下側而進行支承。藉由將支承台3嵌合於容器主體2 ’使圓 底6不會碰觸到平坦的保管台1 8，因此液體容器1成爲可穩 定地站立。 又支承台3如圖所示，當堆疊複數個液體容器1時’其 底部15之至少一部分抵接並卡合於堆在下層的容器主體2 之頂部7。再者，藉由支承台3之內側圓筒部1 4而形成於其 -17- 201139218 中央部的貫通部9，成爲可收容堆在下層之容器主體2之附 有栓蓋16的排出口 8之空間。因此，可穏定地堆疊複數個 液體容器1。此貫通部9 ’也作爲在將液體容器1安裝到後 述送液裝置20時之定位用。 此外，有關底部1 5的形狀，爲了容易穏定地載置在堆 在下層的頂部7上，可具有配合頂部7的傾斜的形狀，或讓 底部15的一部分隆起而具有抵接於頂部7的腳部。 支承台3較佳爲由前述可回收再生的熱可塑性樹脂所 形成。 若縮小容器主體2之圓底6之曲面半徑則液體17容易集 中到最底部，但必須加高支承台3的高度，所以必須調和 這些因素進行成形。例如，較佳爲以胴部5半徑之1〜30倍 的半徑來形成圆底6之曲面。此外，較佳爲以圓底6的最底 部到胴部下端具有3〜300mm、更佳爲具有5〜100mm的落差 的方式來形成回底6。 此外，於容器主體2之頂部7設置供搬運時握持用的把 手亦可。在此情況，於堆疊液體容器1時，設置成能收容 於支承台3之貫通部9中。且把手宜爲可倒式的。 在前述液體容器1塡充既定量的液體17後，在排出口 8 螺合栓蓋1 6，即可進行液體1 7的儲存和輸送。 其次，對本發明的液體之輸送裝置及送液方法，參照 第2、3、4圖作說明。 送液裝置20係供安裝液體容器1，而用來輸送出液體 17，如第2圖所示係具備：台座31、送液接頭21及按壓構 -18- 201139218 件34。 台座31係用於載置液體容器1，於金屬製板上具有圓 柱狀之突起部32，該突起部32恰好能嵌入液體容器1之貫 通部9，同時抵接於容器主體2之圓底6之至少最底部外壁 。突起部32之上面部（圖之上部）可如圖示般呈平坦狀， 亦可使其凹陷成圓底6恰好能嵌入的曲面。呈曲面凹陷之 形狀時，能面狀地支承容器主體2而較佳。從台座上部突 起之突起部32的高度，如圖所示，可爲液體容器1之底部 1 5懸空於台座3 1之高度，亦可爲底部1 5恰好接觸台座3 1之 高度。此外，從液體容器1的定位觀點來看，突起部32之 直徑宜爲恰好能嵌入貫通部9之徑，至少比貫通部9小即可 〇 如第2圖所示之按壓構件34，係透過附設有固定機構 的旋轉軸35而藉由豎設於台座31之支柱33可動作自如地支 承著。此按壓構件34，在抵接於嵌合在排出口 8的送液接 頭21上部之位置，旋轉軸35的固定機構可固定其動作。在 旋轉軸35設有固定解除按鈕（未圖示），操作此按鈕可讓 按壓構件34再度動作自如。作爲按壓構件34的固定機構可 使用各式公知的機構。 再者，按壓構件34如第2〜4圖所示具備制動器36，該 制動器36形成有讓後述的加壓連接器30通過之通口部36a 。制動器3 6之一例，係將金屬製的棒材彎曲’或經由焊接 等進行連接而形成，具有U字型形之通口部36a，且具有 從其各個端部延伸到按壓構件34的側面之支承棒材。此制 -19· 201139218 動器36被牢牢地固定於按壓構件34之側壁。該制動器36設 置成，當轉動按壓構件34時，其不會干涉送液接頭21，且 通口部36a會碰觸加壓連接器30而將按壓構件34的轉動予 以卡止。又通口部36a只要是能讓加壓連接器30通過的形 狀即可，可將棒材彎曲成環狀，亦可爲具有孔部的平板狀 。特別又以形成如圖所示之U字型形狀的情況，因其上部 側呈開口狀，能簡便地進行加壓連接器30的裝卸操作而較 佳。 此外，按壓構件34具有定位銷37。 送液接頭2 1如第3圖所示，形成有母螺紋，可密封液 體容器1的排出口 8。送液接頭2 1係具備：氣體供給口 2 5、 送液管23、壓力計26、安全閥27及手動閥28。 送液接頭21如第3、4圖所示，能嵌合於排出口 8之圓 筒狀的嵌合部21a、及支承管路（連結送液管23，氣體供 給口 25及壓力計等）之圓柱狀的管路支承部21b，兩者具 有氣密型，且管路支承部2 1 b以能繞其軸方向轉動自如的 方式結合於嵌合部21a。 此外，如第4圖所示，送液接頭21之管路支承部21b， 其上面形成平坦，同時，在其上面之一部分形成供按壓構 件3 4之定位銷37嵌入的定位溝槽24。作爲定位溝槽24之一 例，溝槽端開口於管路支承部2 1 b之圓柱側壁，沿著從圓 柱側壁朝圓柱中心軸的方向，形成定位銷37可嵌入的溝槽 寬度迄送液管23的前方位置爲止。 定位溝槽2 4及定位銷3 7是本發明之定位機構的一例， -20- 201139218 於按壓構件34抵接於送液接頭2 1上部之位置，當定位銷3 7 嵌合於定位溝槽24時，相對於按壓構件34之管路支承部 21b的方向可無歧異地決定，藉此規定相對於按壓構件34 之氣體供給口 25的位置。具體而言，當定位溝槽24與定位 銷37彼此嵌合時，是將按壓構件34和氣體供給口 25的位置 規定成：能在制動器36之通口部36a讓加壓連接器30通過 的狀態下連接加壓連接器3 0與氣體供給口 2 5。此外’亦可 取代定位溝槽24，於管路支承部2 1 b上形成可嵌合定位銷 3 7的孔部。 氣體供給口 25，可連接加壓連接器30 (通過耐壓軟管 連結於加壓源29 )，是對容器主體2內供應氣體之供氣口 。加壓連接器30附設有安全鎖定機構，其具有釋放閥，當 殘留有氣體壓力時不小心要從氣體供給口 25卸下的情況， 可將氣體釋放到外界。 加壓源29，其係由第3圖所示之儲氣鋼瓶、或未圖示 的氣體產生裝置、減壓調整器、儲氣槽等所構成的氣體供 給裝置，以至多爲壓力200kPa、較佳爲壓力l〇k〜200kPa、 更佳爲壓力1 0k~50kPa供給非活性氣體（例如氮氣）、或 除去微粒子後之空氣。 送液管23，其末端23a接近容器主體2內之圓底6之最 低位置的部分（最底部），前端23b朝容器主體2的外部導 出，而以此方式固定於送液接頭2 1。具體而言，送液管23 固定於與管路支承部21b的中心軸大致一致的位置。較佳 爲固定成使送液管23之末端23a與圓底6之最底部的距離儘 -21 - 201139218 量縮短，例如固定成距離爲1〜3mm。於送液管23之前端 23b附設有配管連接用的連接器39» 壓力計26 ’係用來監視容器主體2的內壓之測定器。 安全閥27，當容器主體2內的壓力高於規定値時，將氣體 釋放到外界。手動閥2 8通常是關閉的，按照需要經手動操 作將氣體釋放到外界。 其次，對送液裝置20的使用方法及動作，還有液體17 的送液方法作說明。 如第3圖所示’將裝有液體17之液體容器1，以貫通部 9嵌入台座31之突起部32的方式進行載置。如此，可簡便 地將液體容器1定位於台座31上。接著，如果液體容器1安 裝有栓蓋16的話則將其卸下，再將送液接頭21安裝於排出 □ 8。 如此，將送液接頭2 1之送液管2 3之末端2 3 a插入到圓 底6的最低部附近’且將送液管2 3之前端2 3 b朝容器外部導 出。 接著’將按壓構件34按壓固定於送液接頭21之上部。 此時，如第4圖所示，轉動管路支承部21b，讓按壓構件34 之定位銷37嵌合於送液接頭21之定位溝槽24。藉此如第3 圖所示，在簡便地讓按壓構件34和送液接頭2 1的方向呈無 歧異地一致之狀態下，藉由台座3 1之突起部32及按壓構件 34夾住容器主體2的上下。並且，制動器36隨著按壓構件 34的轉動而接近氣體供給口 25，使制動器36之通口部36a 位於能讓氣體供給口 2 5的軸線通過的位置。 -22- 201139218 接著，在氣體供給口 25安裝氣體供給停止中的加壓源 29之加壓連接器30。這時，由於氣體供給口 25已被定位， 加壓連接器30必然會通過制動器36之通口部36a而連接於 氣體供給口 2 5。 在送液管23之連接器39，透過耐壓軟管而連接例如光 阻液散布裝置5 0。光阻液散布裝置5 0係具備緩衝槽5 1、泵 浦52、過濾器53、三通閥54及吐出噴嘴55，用來對未圖示 之半導體晶圓吐出光阻液。 接著，若打開加壓源29的調節器而供給氣體，氣體將 流入容器主體2內而對液體17的液面施加壓力，液體17將 從送液管23送出而送到光阻液散布裝置50。此時，雖然藉 由氣壓而有膨脹方向的力量作用於容器主體2，但因容器 主體2係由彎曲彈性模數至少爲700MPa之樹脂所形成，並 不會發生破損等而相當安全。 此外，因氣壓至多爲200kPa，所以被輸送的液體17中 幾乎無氣泡產生。由於氣壓越低氣泡產生量越少，例如壓 力較佳爲l〇k〜50kPa。 容器主體2及送液接頭21，是藉由突起部32及按壓構 件34來規定其上下方向的位置，所以可防止朝上下方向的 變形。因此，送液管23之末端23a與圓底6之間的距離不會 變大而維持接近的狀態。所以，即使液體1 7的殘液量變少 ，集中於圓底6中央部之液體17幾乎都能進行送液。 最後，如第3圖中之右側圓框內所示，利用液體1 7的 表面張力及氣壓，積存在比末端23 a更下側的液體17也幾 -23- 201139218 乎都能進行送液，所以液體1 7的殘液量變的非常少。因此 液體17的殘液量成爲液體容器1的收容容量的0.5 %以下。 使用完畢之液體容器〗，藉由解除固定送液接頭21之 按壓構件34之固定而使其往上方轉動即可將其釋放，但若 在加壓狀態下進行釋放，殘留的壓力會使送液接頭2 1和液 體容器1 一起飛出，給操作者帶來危險。然而，藉由通過 制動器36之通口部36a來裝設加壓連接器30，即使想讓按 壓構件34往上方轉動，制動器36會碰觸加壓連接器30之下 部而卡止其轉動。因此，可確實地防止送液接頭21因殘壓 所造成的飛出，而構成極爲安全的裝置。活用附設於加壓 連接器30之安全鎖定機構，只要不解除該機構，就無法使 按壓構件34往上方彈跳，而無法取出使用完畢之液體容器 1 0 使用完畢之液體容器1可作爲塑膠原料進行回收再生 (再資源化）。支承台3洗淨後可直接再利用。此外，依 所塡充液體17之種類，容器主體2亦可洗淨再利用。 再者，如第5圖所示，當使用氣體供給口 25朝上方（ 圖之上方）安裝之送液接頭2 1時，於按壓構件34抵接送液 接頭2 1上部之狀態下，以讓U字型的通口部3 6a朝向讓氣 體供給口 25的軸線通過的方向之方式，將制動器36固定於 按壓構件34的側面。在此情況，如第5圖所示通口部36a形 成能讓加壓連接器30之連接部30a通過但無法讓主體部3 Ob 通過的大小。 此送液裝置2 0，如第5圖中之兩點鏈線的箭線所示， -24- 201139218 隨著按壓構件34的轉動，制動器36也一起轉動。於按壓構 件3 4抵接固定於送液接頭2 1的狀態下，使通口部3 6 a位於 氣體供給口 25附近而讓其軸線通過，且比氣體供給口 25稍 上側的位置。將加壓連接器30之連接部30 a通過通口部36 a 連接於氣體供給口 25。如此，使加壓連接器30之主體部 3 〇 b位於比通口部3 6 a更上側的位置。在此狀態下，即使欲 解除按壓構件34的固定而讓其往上方轉動，通口部36a會 碰觸加壓連接器30之主體部30b而卡止。因此，可防止在 安裝著加壓連接器30的狀態下讓按壓構件34往上方移動， 可避免因殘壓造成送液接頭21飛出，故相當安全。 在此，雖是說明在液體容器1的排出口 8形成公螺紋， 在栓蓋1 6及送液接頭2 1形成母螺紋，而利用螺紋結合的例 子，但並不限定於此，只要能密封成不致從排出口 8漏出 氣體即可。例如藉由嵌入而結合亦可。 〔實施例〕 試作運用本發明之液體容器1及送液裝置20。形成20L 的容器，容器主體2係由彎曲彈性模數92〇MPa之高密度聚 乙烯樹脂（密度〇.955 8/(^3’熔融指數〇.158/10分）所形 成，支承台3係由直鏈狀低密度聚乙烯樹脂（密度 0.93 8 g/cm3，熔融指數3.8g/10分）所形成。容器主體2之 平均板厚爲3mm，支承台3之板厚爲3mm。容器主體2之胴 部5半徑爲1 50mm，胴部5長度爲300mm ’圓底6係由半徑 2253mm的曲面所形成。以圓底6與送.液管23之末端23a的 -25- 201139218 距離爲5mm的方式，將外徑6mm之送液管23固定於送液接 頭21。塡充20L的水到液體容器1中，再安裝到送液裝置20 ，以20kP a的氣壓進行送液時，液體容器1中的殘留水量爲 1 0mL 〇 將塡充20L水之液體容器1堆疊3個。沒有任一個液體 容器1發生破損或變形，可穩定地堆疊。 試作另一個運用本發明之液體容器1及送液裝置20。 形成4L容器，容器主體2含有內層、中間層及外層；內層 原料爲彎曲彈性模數1 3 70MPa之高密度聚乙烯樹脂（密度 0.95 8g/cm3，熔融指數0.35g/l 0分），中間層原料爲密度 1.198/(^3、熔融指數1.68/10分、乙烯共聚比率32111〇1%的 乙烯-乙烯醇共聚樹脂；外層原料爲1 100MP a之高密度聚乙 烯樹脂（密度0.95 7 g/cm3，熔融指數0.04 g/10分）。支承 台3係由直鏈狀低密度聚乙烯樹脂（密度0.93 8 g/cm3，熔融 指數3.8g/10分）所形成。容器主體2之平均板厚爲3mm， 支承台3之板厚爲3mm。此時多層容器之彎曲彈性模數爲 1150MPa。容器主體2之胴部5半徑爲85mm，容器全高爲 3 1 Omm (胴部5之長度爲23 Omm )，圓底6係由半徑7 3 1 m m 的曲面所形成。以回底6與送液管23之末端23a之距離爲 3 mm的方式，將外徑6mm之送液管23固定於送液接頭21。 塡充4L的水到液體容器1中’再安裝於送液裝置20上’以BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid container for liquid filling, and a liquid feeding device for discharging liquid from the liquid container and a liquid discharging method. [Prior Art] Liquids such as industrial high-purity chemical solutions, medical high-purity chemical liquids, and liquid food materials used in semiconductors and liquid crystals must be kept high without foreign matter. Store, transport and use in a pure state. Therefore, a liquid container for storing and transporting these liquids, or a liquid container directly attached to the liquid supply device, preferably has a very small amount of dissolved components. A liquid container and a liquid delivery method are disclosed in Japanese Laid-Open Patent Publication No. Hei 11-290420. The liquid container described in the above document has a multilayer structure and is formed of an inner layer of high-purity resin, and a discharge port is protruded from the upper side of the container, and the bottom portion is formed in a flat shape to allow the container to stand. The high-purity chemical liquid is filled into the container, and as shown in the literature, pressure protection is performed around the container by a pressure-resistant protective container or a protective container which is resistant to air pressure, and the liquid is supplied by the gas pressure. However, in the liquid container described in the above document, it is difficult to discharge the liquid remaining in the bottom of the flat container when the liquid is sent out, and there is a problem that the amount of the residual liquid is large. Further, in order to store a plurality of liquid containers or to prepare them in the vicinity of the liquid supply device, it is necessary to arrange the liquid containers in a row and require a wide space. In addition, when the liquid container is attached to the liquid feeding device, it must be covered with a pressure-resistant protective device-5-201139218. Therefore, the number of parts of the liquid feeding device is increased, and the device becomes a large-scale and expensive device, and the liquid container is installed and operated. The exchange work is complicated. Further, when the liquid is sent out using the high-pressure air pressure, bubbles are likely to be generated in the liquid, so that the liquid supply device must be provided with a filter for removing bubbles in the liquid. SUMMARY OF THE INVENTION [Problems to be Solved by the Invention] The present invention has been made to solve the above problems, and an object thereof is to provide a liquid container that can be transported, which not only maintains high quality of the liquid to be filled, but also The space can be stored in a space, and the amount of residual liquid at the time of liquid feeding can be minimized. Furthermore, the object of the present invention is to provide a liquid supply device and a liquid supply method, which can easily perform the installation and exchange operations of the liquid container, and has a simple and low-cost structure, and can reliably reduce the amount of residual liquid in the liquid container. And can safely deliver liquid. [Means for Solving the Problem] The liquid container of the present invention for achieving the above object includes a container body and a resin support stand: the container body is blown by a thermoplastic resin having a bending elastic modulus of at least 700 MP a. Formed by plastic molding, forming a round bottom and a top portion in a substantially cylindrical shape, and having a discharge port concentric with the crotch portion at the top portion, capable of accommodating liquid and having a plug cover attachable to the discharge port; The support base is fitted to the round bottom side of the dam portion in order to stand the container body, and is characterized in that: -6- 201139218 the container body 'at least the inner surface thereof is not oozing out of a predetermined reference 値 or more a high-purity thermoplastic resin in which the fine particles are introduced into the liquid. » The through-hole portion and the bottom portion are formed in the support table. When the plurality of liquid containers are stacked, the through-hole portion can accommodate the container body of the lower layer. The discharge port of the cap is engageable with the top of the container body stacked on the lower layer. The liquid container is characterized by a resin-based recyclable resin forming the container body and/or the support table. A liquid supply device is a liquid supply device for mounting the liquid container and discharging the liquid in the liquid container, and is characterized in that it includes a pedestal, a liquid supply joint, and a pressing member; the pedestal is for mounting the liquid container And having a protrusion for inserting into the through hole of the support base and abutting against the round bottom of the container body; the liquid supply joint can be detachably attached to the discharge port to seal the container body, The utility model has a gas supply port and a liquid supply pipe; the gas supply port is a pressure source connecting the pressure up to 200 kPa to supply gas into the container body; the liquid supply pipe has an end close to the round bottom in the container body The bottommost portion and the front end are led out to the outside of the container body; the pressing member is movably disposed on a pillar erected from the pedestal 'in a position abutting on an upper portion of the liquid supply joint embedded in the discharge port' It can fix its movements. The liquid feeding device is characterized in that the pressure source is connected to the gas supply port at a pressure of 201139218 10k to 50 kPa. The liquid supply device is characterized in that the gas supply port is connectable to a pressurizing connector that is coupled to the pressurizing source, and the pressing member has a stopper that presses against a state of the upper portion of the liquid supply joint. When the connector is connected to the gas supply port, the brake member contacts the pressurizing connector to lock the movement of the pressing member. In the liquid feeding device, the pressing member and the liquid supply joint have a positioning mechanism that is fitted to each other to define a position of the gas supply port with respect to the pressing member. A liquid feeding method, wherein the liquid container is filled with liquid, the end of the liquid feeding tube is inserted near the bottom of the round bottom, and the front end thereof is led out to the outside, and the upper and lower sides of the container body of the liquid container are sandwiched. A gas having a pressure of at most 200 kPa is supplied to the liquid container, and the liquid is sent out from the liquid container. The liquid feeding method is characterized in that the gas pressure is from 10 50k to 50 kPa. [Effect of the Invention] According to the liquid container of the present invention, the resin used in the container body is a high-purity thermoplastic resin which does not bleed out the impurity particles of the reference enthalpy or more from the inner surface to the liquid, and has a bending elastic modulus of at least 7 Since 热MP a is a thermoplastic resin, it not only maintains high quality of liquid, but also has excellent mechanical strength, and can prevent damage or deformation of the container during transportation or storage. In particular, when the liquid is supplied, the container can be prevented from being largely deformed even when pressurized at a pressure of 200 kPa. In addition, because of its excellent mechanical strength, that is, -8 - 201139218, a plurality of containers filled with liquid are stacked, and the liquid container piled up in the lower layer is not damaged. Furthermore, when a plurality of liquid containers are stacked, the discharge port attached to the lower layer of the liquid container is received in the through portion of the support table and the bottom of the lower stage is engaged with the bottom of the support table, thereby stabilizing It is stacked and stored in a space-saving manner. Further, since the container body has a round bottom, the amount of liquid remaining during liquid feeding can be reduced. The liquid container according to the present invention is formed by recyclable resin and can be recycled as a raw material, and has excellent environmental friendliness. The liquid feeding device and the liquid feeding method according to the present invention are obtained by sandwiching the container body. The upper and lower sides prevent deformation in the up and down direction. Therefore, the distance between the end of the liquid supply pipe and the round bottom does not become far, so that the liquid concentrated to the round bottom can be sent out without any waste, without any waste, when the liquid is supplied. As an example, the amount of liquid residual liquid can be 0. 5 % or less, preferably 0·1 % or less. Therefore, the usable amount of the liquid contained in the liquid container can be increased, thereby improving the productivity, and the exchange frequency of the liquid container can be reduced to have excellent productivity. Furthermore, since it uses a liquid container having excellent mechanical strength, it is not necessary to cover the liquid container with a pressure-resistant protective container, and the liquid container is not only easy to install and exchange, but also has a simple structure and low cost. Maintenance, and become an economical device. Further, by pressurizing with a gas having a pressure of at most 200 kPa, the liquid container is not damaged and is very safe, and because of the low pressure, the amount of bubbles generated in the liquid can be reduced. According to the liquid feeding device and the liquid feeding method of the present invention, the bubble S generated in the gas supplied into the liquid container of the liquid -9 - 201139218 is from 10 k to 50 kPa. According to the liquid supply device of the present invention, the movement of the pressing member is locked by pressing the connector: in the state in which the pressure connector is connected (that is, in the state of liquid, carelessly removed for fixing the liquid supply can be prevented According to the liquid feeding device of the present invention, the liquid feeding device defines a gas supply port for the pressing member so that the gas supply port can be connected to the gas supply port in a certain direction. In addition, the positional relationship between the gas supply and the brake is set to a predetermined position, and the movement of the pressing member can be surely locked. [Embodiment] Hereinafter, embodiments of the present invention will be described in detail. The scope is not limited to the above-described forms. A preferred embodiment of the liquid container according to the present invention is shown in Fig. 1. Fig. 1 shows a state in which, for example, two of the hairpin storage stations 18 are stacked. The liquid container 1 is contaminated by the container. The liquid 17 can be used for the liquid to further reduce the pressure of the liquid member to be touched and pressurized, so that the pressure inside the container can be prevented. In order to safely remove the liquid material and the positioning mechanism of the liquid supply adapter from the device, the pressurizing connection can be easily performed by simply pressing the pressurizing connection to the pressurizing connector of the liquid container. However, in the state of the present invention, reference is made to the liquid container 1 of Fig. 1 and placed in a non-component dissolution and not stored, transported, -10-201139218 or directly mounted to the liquid supply device for use. . The liquid container 1 is, for example, suitable for use in the fields of manufacture of semiconductors and liquid crystal elements requiring clean liquid quality, the pharmaceutical field, and the food field. Examples of the liquid 1 7 include a liquid used in the production of a semiconductor and a liquid crystal element such as a photoresist, an acid, an alkali, and a solvent; a medical liquid such as a disinfectant liquid, an infusion solution, or a dialysate; and a fragrance, a concentrate, and a food additive. And other liquids used in the food field. Hereinafter, the liquid 17 is an example of a photoresist used in the manufacture of a semiconductor and a liquid crystal element. As shown in Fig. 1, the liquid container 1 is composed of a container body 2 and a support base 3. In the container body 2, the lower side of the crotch portion 5 (the lower side in the figure) of the substantially cylindrical shape is a round bottom 6, and the upper side (the upper side of the figure) of the crotch portion 5 is closed by the top portion 7 on which the discharge port 8 is formed. The discharge port 8 is formed in a cylindrical shape having a smaller diameter than the crotch portion 5, and is concentric with the crotch portion ‘ from the central portion of the top portion 7 toward the outside of the container. A male thread is formed on the outer circumference of the discharge port 8, and the cap 16 formed with the female thread can be attached and detached. The top portion 7' can be formed substantially flat from the lower end of the discharge port 8 to the crotch portion 5, but as shown in Fig. 1, it is preferable to form a shape which is slightly inclined downward from the discharge port 8 to the crotch portion 5, so that the container can be increased. Compressive strength. Further, when the top portion 7 is formed into a downwardly inclined shape, after the liquid container i is used, the container body 2 can be easily turned upside down to easily discharge a small amount of residual liquid or washing water, which is preferable from the viewpoint of recycling. Further, when the support table 3 is stacked above the top portion 7, in order to prevent the support table 3 from being displaced to the left and right, it is preferable to make the upper portion of the top portion 7 bulge to form a ridge that can be inserted into the through portion 9 to be described later by a slightly smaller diameter than the through portion 9. 201139218 starting from 7a. On the side of the round bottom 6 of the crotch portion 5, a surrounding groove 11 into which the support table 3 is fitted is formed. The container body 2 is formed to have a size of a liquid 7 which can fill a desired capacity, for example, 1 to 200 L (liter). Regarding the diameter of the container main body 2, if the capacity is 1 L, for example, a diameter of 90 mm is formed. If the capacity is 200 L, for example, a diameter of 600 mm is formed, the diameter and capacity thereof may be any size. The container body 2 is obtained by blow molding a thermoplastic resin having a bending elastic modulus of at least 700 MPa, and at least the inner surface thereof is formed of a high-purity thermoplastic resin. For example, when the container body 2 is formed of a wall portion of a multilayer structure, as long as the inner surface layer is formed of a high-purity thermoplastic resin, any other crucible may be formed of a thermoplastic resin having a bending elastic modulus of at least 700 MP a. Alternatively, the wall portion of the multilayer structure formed of the thermoplastic resin may be integrally formed to have a bending elastic modulus of at least 700 MPa. Further, when the container body 2 is formed of a single-walled wall portion, it may be formed using a high-purity thermoplastic resin having an elastic modulus of at least 700 MPa. In either case, it can be formed using a known blow molding machine. Here, the measurement method of the bending elastic modulus is in accordance with 〖I S K 7 1 7 1 . The container body 2 is supplied with a gas having a pressure of at most 20 OkPa, and the liquid 17 is transported by pressurization. As a strength required to prevent breakage and large deformation of the container, the bending elastic modulus of the container resin is at least 700 MP a. . If the flexural modulus is less than 700 MPa, the amount of deformation of the container is large when pressurized, and it is necessary to cover and protect the container body 2 like a conventional container, for example, a pressure-resistant container such as a stainless steel pressure-resistant container. -12- 201139218 The thickness of the container body 2 'Although increasing the thickness of the plate can increase the strength of the container 'but if it is too thick' not only requires more raw materials, but also the weight of the container will become heavier, so the bending elastic modulus is at least 7 0 0 Μ P a and easy to form in the range of 'thickness is as thin as possible. For example, the plate thickness is 1. It is easy to form when it is about 5 to 4 mm, which is preferable. Here, the high-purity thermoplastic resin means a resin which does not bleed out the impurity fine particles of a predetermined reference amount or more into the liquid 17 . Specifically, the leakage of the foreign fine particles during the long-term storage of the liquid 17 in the container main body 2 is referred to as the cleanliness as an index indicating the degree of deterioration in quality. The degree of cleanliness is the number of fine particles having a particle size of 〇·2μηι or more in 1 mL of the stored content liquid after the ultrapure water or the photoresist is stored in the inspection container for a certain period of time. Specifically, it is defined by the following formula (1). [Number 1] Cleanliness (units/mL) c(fg|) xa/2(mL) b(mL) xa{mL) (1) In the formula (1), a: check the container capacity; b: from the inspection container The amount of liquid sampled. First, the sampling liquid for measuring the initial cleanliness is as follows: a half of the capacity, that is, a/2 (mL) of ultrapure water or photoresist is placed in the inspection container of the capacity a (mL), and the vibration is performed. Take it after 15 seconds and then let it stand for 24 hours. The sampling liquid for measuring the cleanliness after storage is as follows: After the cap is placed on the container having the initial cleanliness for a certain period of time, the container is rotated 3 times to avoid the occurrence of air bubbles. c : Calculate the particle size contained in the total amount of the sample solution by the microparticle counter -13- 201139218 〇. The number of particles above 2 μηι. Based on these numbers, the cleanliness after storage in the initial period and in a certain period is calculated according to the formula (1). The lower the cleanliness, the better the quality of the photoresist. When the cleanliness is less than 100 /mL, it will not reduce the quality and yield of semiconductors and liquid crystal displays (LCDs), and can store the liquid in a stable manner. Therefore, when the container body 2 is used as an inspection container to measure the cleanliness of the high-purity thermoplastic resin, a resin which satisfies the desired cleanliness is used. When accommodating the photoresist, use a resin with a cleanliness of less than 100 cells/mL (one of the established benchmarks). In other words, the high-purity thermoplastic resin means a resin which does not exude an impurity fine particle of a predetermined reference enthalpy or more into a liquid. In addition, the particle size can be calculated according to the applicable specifications. The number of particles above 3 μιη. It is also possible to use a resin having a cleanliness of less than 200 cells/mL in accordance with the applicable specifications. Alternatively, the cap 16 may be formed of a high purity thermoplastic resin. Further, in addition to the degree of cleanliness, the degree of bleeding of the liquid particles (other examples of the predetermined standard 値) may be used to specify the degree of bleeding of the foreign particles. The resin forming the container body 2 is preferably a recyclable resin, and examples thereof include polyolefins such as polyethylene and polypropylene: polyamine, polyvinyl alcohol, ethylene/vinyl alcohol copolymer, polyester, and polyoxybenzene. Wait. These resins may be used singly to form a single wall portion. Alternatively, a plurality of such resins may be used to form a wall portion having a multilayer structure. As a specific example, the container main body 2 may have a structure in which a polymer (a) and a polymer (b-14-201139218) each of which is a polyethylene or an ethylene/α-olefin copolymer are used. The polymer (a) has a weight average molecular weight of 200,000 or more and a density of 0. 940~0. 970g/cm3, according to JIS K6760, the melt index is 0. 09 §/10 points or less, and 30 to 95% by weight of the total weight, substantially covering the outer surface; the weight average molecular weight of the polymer (b) is 30,000 or more and less than 200,000, and the density is 0. 930~0. 970g/cm3, according to JIS standard, the melt index is 0. 1~1. 0 g/10 minutes, and 5 to 70% by weight in total weight, substantially covering the inner side surface. In this case, the amount of exudation of the impurity particles into the stored drug is extremely small, has excellent chemical resistance, and has sufficient mechanical strength, and can be used as a container body capable of sufficiently satisfying the latest and most stringent international standards for the handling container of dangerous drugs. 2. Furthermore, as another specific example, the container body 2 may have the following structure: at least the inner side surface is made of a density of 〇. 940~0. It is composed of 970 g/cm3 of polyethylene or an ethylene·α-olefin copolymer. The content of neutralizing agent, antioxidant and light stabilizer in the resin is 〇 by the liquid chromatograph. 〇1% by weight or less; the weight average molecular weight of the resin measured by a gel permeation analyzer is 12 to 26 x 10 4 , and the polymer having a molecular weight of 1×10 3 or less in the resin is less than 2. 5 wt%. The olefin may be at least one selected from the group consisting of propylene, 1-butene, 4-methyl-1-pentene, 1-hexene and 1-octene. As a result, it is possible to obtain the container body 2 which has excellent mechanical strength, is easy to handle, and has extremely small amount of exudation of impurities particles into the stored and stored solvent. In addition, even if the following liquid is contained in the container body 2, the quality standards established by the Japanese Pharmacopoeia can be sufficiently satisfied: methanol, ethanol, isopropanol, isobutanol, ethylene glycol, acetone, ethyl acetate, toluene. , dimethylformamide, ethylene glycol acetate, methoxy-15-201139218 propanol acetate, butyl valeric, etc., and high-purity solvents for pharmaceutical use in sterilization, disinfection, preparation materials, etc. For example, methanol, ethanol, isopropanol, and the like. As another specific example, the container body 2 may be obtained by molding a resin composition containing a weight average molecular weight of 12 to 26 x 1 〇 4 and a molecular weight of ΐχΐ〇 3 or less as measured by a gel permeation chromatograph. Less than 5% by weight, the density is 0. 940~0. 970 g/cm3 of polyethylene or ethylene·〇:-olefin copolymer resin; quantified by liquid chromatography to contain zero children. 01% by weight or less of a neutralizing agent, an antioxidant, and a light stabilizer; an inorganic pigment selected from the group consisting of titanium oxide, carbon black, and iron oxide red, anthocyanine, quinacridone, and an azo organic pigment. At least one light-blocking pigment 0. 01 to 5 by weight fi %; the dispersant of the olefin-based polymer having a number average molecular weight of 2x1 03 or more is less than 5% by weight. In this case, it is possible to obtain the container body 2 which has excellent mechanical strength, is easy to handle, has little leakage of impurity particles into the stored medicine, and can prevent deterioration of light. Therefore, it can be widely applied to a semiconductor chemical solution, a solvent for the above medical use, and the like. Further, as another specific example, the container body 2 may be a blow molded container including an inner layer, an intermediate layer, and an outer layer. The inner layer is composed of an olefin polymer containing ethylene, propylene, 1-butene, 4-methyl-1-pentene, 1-hexene or 1-octene, and an olefin other than ethylene and ethylene. One of the copolymers, and the content of each of the neutralizing agent, the antioxidant, and the light stabilizer is at most 0. 01% by weight of a high-purity resin; the intermediate layer is composed of a solvent-barrier resin containing an ethylene-vinyl alcohol copolymer; and the outer layer is composed of a resin composition containing a light-shielding substance; According to the measurement, at a wavelength of 400 nm or less, the minimum absorbance of the whole layer of the container is 2. 0 or more, and -16-201139218 Divides the absorbance of the entire layer of the container by the thickness of the entire layer of the container, and has an absorption coefficient of lJmnT1 or more at a wavelength of 400 nm and an absorption coefficient of UmtiT1 or less at a wavelength of 600 nm. The resin composition of the outer layer may contain: less than 5% by weight of a pigment dispersant composed of an olefin-based polymer selected from at least one of polyethylene and polypropylene having a number average molecular weight of 2×10 3 or more; and an inorganic pigment selected from the group consisting of inorganic pigments And at least one of the organic pigments of the light-shielding pigment. 01 to 5 wt%. The resin composition of the outer layer may also contain less than 2. 5% by weight of UV absorber. In this case, it is possible to obtain the container body 2 which is capable of maintaining the quality of the high-purity chemical liquid without oozing out of fine particles and metal ions during storage and transportation, and which is less likely to be damaged and light. Further, the container body 2 may be formed by providing a thermoplastic resin layer having a bending elastic modulus of 700 MP a or more on the outer circumference of the container described in the specific examples, or the entire outer wall of the layer structure may be bent by the outer layer provided. The elastic modulus may be 700 MPa or more. As shown in the figure, the support base 3 is formed by connecting the lower portion of the outer cylindrical portion 13 and the lower portion of the inner cylindrical portion 14 to the bottom portion 15 to form a double-layered cylindrical shape. The outer cylindrical portion 13 has a projection portion 12 that is fitted into the container body 2 so as to surround the groove 11, and has substantially the same diameter as the crotch portion 5. The inner cylindrical portion 14 is supported by the lower side of the round bottom 6. By fitting the support table 3 to the container body 2' so that the round bottom 6 does not touch the flat storage table 1, the liquid container 1 stands stably. Further, as shown in the figure, when a plurality of liquid containers 1 are stacked, at least a portion of the bottom portion 15 abuts and is engaged with the top portion 7 of the container body 2 stacked on the lower layer. Further, the through portion 9 formed at the center portion of the -17-201139218 by the inner cylindrical portion 14 of the support base 3 serves as a discharge port 8 to which the cap 16 of the container body 2 stacked in the lower layer is attached. Space. Therefore, a plurality of liquid containers 1 can be stacked in a predetermined manner. This penetration portion 9' is also used for positioning when the liquid container 1 is attached to the liquid supply device 20 described later. Further, the shape of the bottom portion 15 may be placed on the top portion 7 of the lower layer for easy positioning, or may have an inclined shape matching the top portion 7, or a portion of the bottom portion 15 may be raised to have abutment to the top portion 7. Feet. The support table 3 is preferably formed of the aforementioned recyclable thermoplastic resin. If the radius of the curved surface of the round bottom 6 of the container body 2 is reduced, the liquid 17 is easily concentrated to the bottom, but the height of the support table 3 must be increased, so these factors must be adjusted to form. For example, it is preferable to form the curved surface of the round bottom 6 by a radius of 1 to 30 times the radius of the crotch portion 5. Further, it is preferable to form the bottom portion 6 so that the bottom portion of the round bottom portion 6 has a drop of 3 to 300 mm, more preferably 5 to 100 mm, at the lower end of the crotch portion. Further, a handle for gripping during transportation may be provided on the top portion 7 of the container body 2. In this case, when the liquid container 1 is stacked, it is provided so as to be housed in the penetration portion 9 of the support table 3. And the handle should be reversible. After the liquid container 1 is filled with a predetermined amount of liquid 17, the plug 17 is screwed into the discharge port 8 to store and transport the liquid 17. Next, the liquid conveying device and the liquid feeding method of the present invention will be described with reference to Figs. 2, 3 and 4. The liquid supply device 20 is for mounting the liquid container 1, and is for transporting the liquid. 17, as shown in Fig. 2, is provided with a pedestal 31, a liquid supply joint 21, and a press structure -18-201139218. The pedestal 31 is for placing the liquid container 1, and has a cylindrical projection 32 on the metal plate. The projection 32 can be inserted into the through portion 9 of the liquid container 1 while abutting against the round bottom 6 of the container body 2. At least the bottommost outer wall. The upper surface portion (upper portion in the figure) of the protrusion portion 32 may be flat as shown, or may be recessed into a curved surface on which the round bottom 6 can be embedded. When the shape of the curved surface is concave, it is preferable to support the container body 2 in a planar manner. The height of the projection 32 projecting from the upper portion of the pedestal, as shown, may be the height at which the bottom portion 15 of the liquid container 1 is suspended from the pedestal 31, or may be the height at which the bottom portion 15 just contacts the pedestal 31. Further, from the viewpoint of the positioning of the liquid container 1, the diameter of the projection 32 is preferably a diameter that can be fitted into the penetration portion 9, and at least smaller than the penetration portion 9, such as the pressing member 34 shown in Fig. 2, is transmitted through A rotating shaft 35 to which a fixing mechanism is attached is rotatably supported by a stay 33 that is erected on the pedestal 31. The pressing member 34 is fixed to the fixing mechanism of the rotary shaft 35 at a position abutting on the upper portion of the liquid supply joint 21 fitted to the discharge port 8, and the fixing mechanism can be fixed. A fixed release button (not shown) is provided on the rotary shaft 35, and the button is operated to allow the pressing member 34 to move again. As the fixing means of the pressing member 34, various well-known mechanisms can be used. Further, the pressing member 34 is provided with a stopper 36 as shown in Figs. 2 to 4, and the stopper 36 is formed with a port portion 36a through which the pressurizing connector 30, which will be described later, passes. One example of the brake 36 is formed by bending a metal bar or connecting by welding or the like, and has a U-shaped opening portion 36a and having a side surface extending from each end thereof to the pressing member 34. Support the bar. This system -19·201139218 actuator 36 is firmly fixed to the side wall of the pressing member 34. The brake 36 is disposed such that it does not interfere with the liquid supply joint 21 when the pressing member 34 is rotated, and the opening portion 36a contacts the pressure connector 30 to lock the rotation of the pressing member 34. Further, the port portion 36a may have a shape in which the pressurizing connector 30 can pass therethrough, and the bar member may be bent into a ring shape or may have a flat plate shape having a hole portion. In particular, in the case of forming a U-shaped shape as shown in the figure, since the upper side is open, the attachment and detachment operation of the pressurizing connector 30 can be easily performed. Further, the pressing member 34 has a positioning pin 37. As shown in Fig. 3, the liquid supply joint 2 1 is formed with a female thread to seal the discharge port 8 of the liquid container 1. The liquid supply connector 2 1 includes a gas supply port 25, a liquid supply pipe 23, a pressure gauge 26, a safety valve 27, and a manual valve 28. As shown in Figs. 3 and 4, the liquid supply joint 21 can be fitted into the cylindrical fitting portion 21a of the discharge port 8 and the support pipe (the liquid supply pipe 23, the gas supply port 25, the pressure gauge, etc.) The cylindrical pipe support portion 21b is airtight, and the pipe support portion 21b is coupled to the fitting portion 21a so as to be rotatable about its axial direction. Further, as shown in Fig. 4, the pipe support portion 21b of the liquid supply joint 21 is formed flat on the upper surface thereof, and a positioning groove 24 into which the positioning pin 37 of the pressing member 34 is fitted is formed in a portion of the upper portion thereof. As an example of the positioning groove 24, the groove end is open to the cylindrical side wall of the pipe support portion 2 1 b, along the direction from the cylindrical side wall toward the central axis of the cylinder, the groove width at which the positioning pin 37 can be inserted is as far as the liquid pipe is fed. 23 is in front of the position. The positioning groove 2 4 and the positioning pin 3 7 are an example of the positioning mechanism of the present invention, -20-201139218, when the pressing member 34 abuts against the upper portion of the liquid supply connector 2 1 , when the positioning pin 3 7 is fitted to the positioning groove At 24 o'clock, the direction of the pipe support portion 21b of the pressing member 34 can be determined without any difference, thereby defining the position of the gas supply port 25 with respect to the pressing member 34. Specifically, when the positioning groove 24 and the positioning pin 37 are fitted to each other, the position of the pressing member 34 and the gas supply port 25 is defined to allow the pressure connector 30 to pass through the opening portion 36a of the stopper 36. In the state, the pressurizing connector 30 and the gas supply port 25 are connected. Further, instead of the positioning groove 24, a hole portion into which the positioning pin 37 can be fitted is formed in the pipe support portion 2 1 b. The gas supply port 25 is connected to the pressurizing connector 30 (connected to the pressurizing source 29 via a pressure resistant hose), and is a gas supply port for supplying gas into the container main body 2. The pressurizing connector 30 is provided with a safety lock mechanism having a release valve that releases the gas to the outside when it is accidentally removed from the gas supply port 25 when the gas pressure remains. The pressurized source 29 is a gas supply device including a gas storage cylinder shown in Fig. 3 or a gas generating device (not shown), a pressure reducing regulator, an air reservoir, or the like, and has a pressure of at most 200 kPa. Preferably, the pressure is from 1 Torr to 200 kPa, more preferably from 10 to 50 kPa, and an inert gas (for example, nitrogen) or air after removing the fine particles. The liquid supply pipe 23 has its end 23a approaching the lowest position (bottommost portion) of the round bottom 6 in the container body 2, and the front end 23b is guided toward the outside of the container body 2, and is fixed to the liquid supply joint 21 in this manner. Specifically, the liquid supply pipe 23 is fixed at a position substantially coincident with the central axis of the pipe support portion 21b. It is preferably fixed so that the distance between the end 23a of the liquid supply pipe 23 and the bottommost portion of the round bottom 6 is shortened by, for example, a distance of 1 to 3 mm. A connector 39 for piping connection is attached to the front end 23b of the liquid supply pipe 23. The pressure gauge 26' is a measuring device for monitoring the internal pressure of the container body 2. The safety valve 27 releases the gas to the outside when the pressure in the container body 2 is higher than the prescribed enthalpy. The manual valve 28 is normally closed and is manually operated to release the gas to the outside as needed. Next, a method of using the liquid supply device 20 and an operation, and a liquid supply method of the liquid 17 will be described. As shown in Fig. 3, the liquid container 1 containing the liquid 17 is placed so that the penetration portion 9 is fitted into the projection 32 of the pedestal 31. Thus, the liquid container 1 can be easily positioned on the pedestal 31. Next, if the liquid container 1 is fitted with the cap 16, it is removed, and the liquid supply joint 21 is attached to the discharge port 8. Thus, the end 2 3 a of the liquid supply pipe 2 3 of the liquid supply joint 2 1 is inserted near the lowest portion of the round bottom 6 and the front end 2 3 b of the liquid supply pipe 2 3 is guided toward the outside of the container. Next, the pressing member 34 is press-fixed to the upper portion of the liquid supply joint 21. At this time, as shown in Fig. 4, the pipe support portion 21b is rotated, and the positioning pin 37 of the pressing member 34 is fitted to the positioning groove 24 of the liquid supply joint 21. As a result, as shown in FIG. 3, the container body is sandwiched by the projection 32 of the pedestal 31 and the pressing member 34 in a state where the direction of the pressing member 34 and the liquid supply joint 21 are easily and unambiguously aligned. 2 up and down. Further, the brake 36 approaches the gas supply port 25 as the pressing member 34 rotates, so that the opening portion 36a of the stopper 36 is positioned to allow the axis of the gas supply port 25 to pass. -22-201139218 Next, the pressurizing connector 30 of the pressurizing source 29 in which the gas supply is stopped is attached to the gas supply port 25. At this time, since the gas supply port 25 has been positioned, the pressurizing connector 30 is inevitably connected to the gas supply port 25 through the port portion 36a of the brake 36. The connector 39 of the liquid supply pipe 23 is connected to, for example, a resist liquid dispersing device 50 through a pressure-resistant hose. The resist liquid dispersing device 500 is provided with a buffer tank 51, a pump 52, a filter 53, a three-way valve 54, and a discharge nozzle 55 for discharging a photoresist liquid to a semiconductor wafer (not shown). Next, when the regulator of the pressure source 29 is turned on and the gas is supplied, the gas flows into the container body 2 to apply pressure to the liquid surface of the liquid 17, and the liquid 17 is sent out from the liquid supply pipe 23 to the photoresist liquid dispersing device 50. . At this time, although the force in the expansion direction is applied to the container body 2 by the air pressure, the container body 2 is formed of a resin having a bending elastic modulus of at least 700 MPa, and is relatively safe without being damaged or the like. Further, since the gas pressure is at most 200 kPa, almost no bubbles are generated in the liquid 17 to be transported. The lower the gas pressure, the smaller the amount of bubble generation, for example, the pressure is preferably from 10 k to 50 kPa. Since the container body 2 and the liquid supply joint 21 define the position in the vertical direction by the projection 32 and the pressing member 34, deformation in the vertical direction can be prevented. Therefore, the distance between the end 23a of the liquid supply pipe 23 and the round bottom 6 does not become large and maintains a close state. Therefore, even if the amount of the residual liquid of the liquid 17 is small, the liquid 17 concentrated in the central portion of the round bottom 6 can be almost always supplied with liquid. Finally, as shown in the right circular frame in Fig. 3, the liquid 17 which is deposited on the lower side than the end 23a by the surface tension and the air pressure of the liquid 17 can be liquid-feeded, -23-201139218. Therefore, the amount of residual liquid of the liquid 17 becomes very small. Therefore, the amount of the liquid remaining in the liquid 17 becomes 0. Less than 5%. The used liquid container can be released by releasing the pressing member 34 of the fixed liquid supply connector 21 and rotating it upward, but if released under pressure, the residual pressure causes the liquid to be supplied. The joint 2 1 and the liquid container 1 fly together, posing a danger to the operator. However, by installing the pressurizing connector 30 through the opening portion 36a of the stopper 36, even if the pressing member 34 is to be rotated upward, the stopper 36 comes into contact with the lower portion of the pressurizing connector 30 to lock its rotation. Therefore, it is possible to surely prevent the liquid supply joint 21 from flying out due to the residual pressure, thereby forming an extremely safe device. By using the safety lock mechanism attached to the pressurizing connector 30, the pressing member 34 cannot be bounced upward without removing the mechanism, and the used liquid container 10 cannot be taken out. The used liquid container 1 can be used as a plastic material. Recycling (recycling). After the support stand 3 is washed, it can be reused directly. Further, depending on the type of the liquid to be filled 17, the container body 2 can be washed and reused. Further, as shown in Fig. 5, when the liquid supply joint 2 is attached upward (above the figure) using the gas supply port 25, the pressing member 34 is brought into the upper portion of the liquid supply joint 2 1 to allow U The port portion 36 6a of the font is fixed to the side surface of the pressing member 34 so as to pass the direction in which the axis of the gas supply port 25 passes. In this case, as shown in Fig. 5, the opening portion 36a is formed to allow the connection portion 30a of the pressurizing connector 30 to pass but does not allow the main body portion 3 Ob to pass therethrough. The liquid supply device 20, as indicated by the arrow of the two-point chain line in Fig. 5, -24-201139218, as the pressing member 34 rotates, the brake 36 also rotates together. In a state where the pressing member 34 abuts and is fixed to the liquid supply joint 21, the opening portion 3 6 a is positioned near the gas supply port 25 so that its axis passes, and is slightly above the gas supply port 25. The connecting portion 30a of the pressurizing connector 30 is connected to the gas supply port 25 through the port portion 36a. Thus, the main body portion 3 〇 b of the pressurizing connector 30 is located above the port portion 366a. In this state, even if the pressing member 34 is to be released and rotated upward, the opening portion 36a comes into contact with the main body portion 30b of the pressurizing connector 30 to be locked. Therefore, it is possible to prevent the pressing member 34 from moving upward while the pressure connector 30 is attached, and it is possible to prevent the liquid supply joint 21 from flying out due to the residual pressure, which is quite safe. Here, an example in which a male screw is formed in the discharge port 8 of the liquid container 1 and a female screw is formed in the plug cap 16 and the liquid supply joint 2 1 is formed by screwing. However, the present invention is not limited thereto, as long as it can be sealed. It is not necessary to leak gas from the discharge port 8. For example, it can be combined by embedding. [Examples] The liquid container 1 and the liquid supply device 20 of the present invention were tried and used. A 20L container is formed, and the container body 2 is made of a high-density polyethylene resin having a flexural modulus of 92 MPa (density 〇. 955 8/(^3' melt index 〇. 158/10 points), the support table 3 is made of linear low-density polyethylene resin (density 0. 93 8 g/cm3, melt index 3. 8g/10 points) formed. The container body 2 has an average thickness of 3 mm, and the support table 3 has a plate thickness of 3 mm. The radius of the crotch portion 5 of the container body 2 is 1 50 mm, and the length of the crotch portion 5 is 300 mm. The round bottom 6 is formed by a curved surface having a radius of 2253 mm. With a round bottom 6 and send. The liquid supply tube 23 having an outer diameter of 6 mm is fixed to the liquid supply joint 21 so that the distance of the end 23a of the liquid tube 23 is -25-201139218. 20 L of water is poured into the liquid container 1, and then installed in the liquid supply device 20, and when the liquid is supplied at a pressure of 20 kP a, the residual water amount in the liquid container 1 is 10 mL. The liquid container 1 filled with 20 L of water is stacked. 3 None of the liquid containers 1 are broken or deformed and can be stably stacked. Another liquid container 1 and liquid supply device 20 to which the present invention is applied is tried. Forming a 4L container, the container body 2 comprises an inner layer, an intermediate layer and an outer layer; the inner layer of the material is a high-density polyethylene resin having a flexural modulus of 1 3 70 MPa (density 0. 95 8g/cm3, melt index 0. 35g / l 0 points), the middle layer of raw materials for density 1. 198/(^3, melt index 1. 68/10 parts, ethylene copolymerization resin having an ethylene copolymerization ratio of 32111 〇 1%; outer layer material is a high density polyethylene resin of 1 100 MP a (density 0. 95 7 g/cm3, melt index 0. 04 g/10 points). The support table 3 is made of a linear low-density polyethylene resin (density 0. 93 8 g/cm3, melting index 3. 8g/10 points) formed. The container body 2 has an average thickness of 3 mm, and the support table 3 has a thickness of 3 mm. At this time, the flexural modulus of the multilayered container was 1150 MPa. The radius of the crotch portion 5 of the container body 2 is 85 mm, the full height of the container is 3 1 Omm (the length of the crotch portion 5 is 23 Omm), and the round bottom 6 is formed by a curved surface having a radius of 7 3 1 m m. The liquid supply tube 23 having an outer diameter of 6 mm is fixed to the liquid supply joint 21 so that the distance between the bottom 6 and the end 23a of the liquid supply tube 23 is 3 mm. Fill 4L of water into the liquid container 1 and re-install on the liquid feeding device 20
2 OkP a的氣壓進行送液時，液體容器1中的殘留水量爲8 m L -26- 201139218 〔產業上之利用可能丨生] 無論係工業製造領域、醫藥品領域及食品領域，只要 是使用高品質液體的領域皆能使用本發明之液體容器及送 液裝置以及本發明之送液方法， 【圖式簡單說明】 第1圖顯示運用本發明之液體容器之保管狀態的局部 剖開前視圖。 第2圖顯示運用本發明之液體容器及送液裝置之使用 狀態的局部剖開側面圖。 第3圖顯示運用本發明之液體容器及送液裝置（正面 截面）之使用狀態的構造圖。 第4圖顯示運用本發明之送液裝置之使用狀態的局部 放大立體圖。 第5圖顯示運用本發明之其他送液裝置之使用狀態的 局部放大立體圖。 【主要元件符號說明】 1 :液體容器 2 :容器主體 3 :支承台 5 :胴部 6 :圓底 7 :頂部 -27- 201139218 7a :隆起部 8 :排出口 9 :貫通部 1 1 :環繞溝槽 12 :突起部 1 3 :外側圓筒部 1 4 :內側圓筒部 1 5 :底部 16 :栓蓋 1 7 :液體 18 :保管台 20 :送液裝置 2 1 :送液接頭 2 1 a :嵌合部 2 1 b :管路支承部 2 3 :送液管 23a :末端 23b :前端 24 :定位溝槽 2 5 :氣體供給口 2 6 :壓力計 2 7 :安全閥 28 :手動閥 2 9 :加壓源 -28 201139218 3 0 :加壓連接器 30a :連接部 3〇b :主體部 3 1 :台座 3 2 :突起部 3 3 :支柱 3 4 :按壓構件 3 5 :旋轉軸 3 6 :制動器 3 6a :通口部 3 7 :定位銷 3 9 :連接器 50 :光阻液散布裝置 5 1 :緩衝槽 52 :泵浦 5 3 :過濾器 54 :三通閥 5 5 :吐出噴嘴2 When the pressure of OkP a is supplied, the amount of residual water in the liquid container 1 is 8 m L -26- 201139218 [Industrial use may occur] Whether it is used in industrial manufacturing, pharmaceuticals or food, as long as it is used The liquid container and the liquid supply device of the present invention and the liquid supply method of the present invention can be used in the field of high-quality liquids. [Schematic description of the drawings] Fig. 1 is a partially cutaway front view showing the storage state of the liquid container to which the present invention is applied. . Fig. 2 is a partially cutaway side elevational view showing the state in which the liquid container and the liquid supply device of the present invention are used. Fig. 3 is a structural view showing the state of use of the liquid container and the liquid supply device (front cross section) to which the present invention is applied. Fig. 4 is a partially enlarged perspective view showing the state of use of the liquid feeding device to which the present invention is applied. Fig. 5 is a partially enlarged perspective view showing the state of use of the other liquid supply device to which the present invention is applied. [Description of main component symbols] 1 : Liquid container 2 : Container main body 3 : Support table 5 : Crotch portion 6 : Round bottom 7 : Top -27 - 201139218 7a : Rising portion 8 : Discharge port 9 : Penetration portion 1 1 : Surrounding groove Slot 12: protrusion 1 3 : outer cylindrical portion 1 4 : inner cylindrical portion 15 : bottom portion 16 : plug cover 1 7 : liquid 18 : storage table 20 : liquid supply device 2 1 : liquid supply connection 2 1 a : Fitting portion 2 1 b : Pipe support portion 2 3 : Liquid supply pipe 23 a : End 23 b : Front end 24 : Positioning groove 2 5 : Gas supply port 2 6 : Pressure gauge 2 7 : Safety valve 28 : Manual valve 2 9 : Pressurization source -28 201139218 3 0 : Pressurizing connector 30a : Connecting portion 3 〇 b : Main body portion 3 1 : Base 3 2 : Projection portion 3 3 : Strut 3 4 : Pressing member 3 5 : Rotating shaft 3 6 : Brake 3 6a : Port portion 3 7 : Locating pin 3 9 : Connector 50 : Photoresist liquid dispersing device 5 1 : Buffer tank 52 : Pump 5 3 : Filter 54 : Three-way valve 5 5 : Discharge nozzle