TW201130075A - Substrate transferring apparatus, substrate processing apparatus and substrate processing method using the same - Google Patents

Substrate transferring apparatus, substrate processing apparatus and substrate processing method using the same

Info

Publication number
TW201130075A
TW201130075A TW100105259A TW100105259A TW201130075A TW 201130075 A TW201130075 A TW 201130075A TW 100105259 A TW100105259 A TW 100105259A TW 100105259 A TW100105259 A TW 100105259A TW 201130075 A TW201130075 A TW 201130075A
Authority
TW
Taiwan
Prior art keywords
substrate
substrate processing
rollers
same
roller
Prior art date
Application number
TW100105259A
Other languages
Chinese (zh)
Other versions
TWI438858B (en
Inventor
Jong-Bum Jung
Ik-Ki Choi
Byoung-Soo Hwang
Original Assignee
Avaco Co Ltd
Dae Myung Eng
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Avaco Co Ltd, Dae Myung Eng filed Critical Avaco Co Ltd
Publication of TW201130075A publication Critical patent/TW201130075A/en
Application granted granted Critical
Publication of TWI438858B publication Critical patent/TWI438858B/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67712—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrate being handled substantially vertically

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

Provided are a substrate transferring apparatus where a substrate is horizontally transferred along two directions within a chamber, a substrate processing apparatus with the same, and a substrate processing method using the same. The substrate transferring apparatus includes a plurality of rollers configured to support and horizontally transfer a substrate, a plurality of roller driving units configured to provide a rotation force to the plurality of rollers, a roller elevation unit configured to vertically operate the plurality of rollers, and a plurality of shaft connection members connected between driving shafts of the plurality of rollers and driving shafts of the roller driving units to transmit the rotation force, the plurality of shaft connection members maintaining a connection state between the driving shafts of the plurality of rollers and the driving shafts of the roller driving units, which are disposed at heights different from each other by the roller elevation unit.
TW100105259A 2010-02-18 2011-02-17 Substrate transferring apparatus, substrate processing apparatus and substrate processing method using the same TWI438858B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020100014682A KR101243743B1 (en) 2010-02-18 2010-02-18 Substrate transferring apparatus, substrate processing apparatus with it and substrate processing method using it

Publications (2)

Publication Number Publication Date
TW201130075A true TW201130075A (en) 2011-09-01
TWI438858B TWI438858B (en) 2014-05-21

Family

ID=44602562

Family Applications (1)

Application Number Title Priority Date Filing Date
TW100105259A TWI438858B (en) 2010-02-18 2011-02-17 Substrate transferring apparatus, substrate processing apparatus and substrate processing method using the same

Country Status (3)

Country Link
KR (1) KR101243743B1 (en)
CN (1) CN102194728B (en)
TW (1) TWI438858B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI733140B (en) * 2019-07-12 2021-07-11 萬潤科技股份有限公司 Thin object conveying device and equipment

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR200486353Y1 (en) * 2013-03-12 2018-05-09 어플라이드 머티어리얼스, 인코포레이티드 Window assembly for substrate processing system
KR101958715B1 (en) * 2016-07-26 2019-03-18 에이피시스템 주식회사 Apparatus for processing substrate
CN110168749A (en) * 2016-11-18 2019-08-23 应用材料公司 The replacement and overturning chamber design formed for heterojunction solar battery
WO2019037871A1 (en) * 2017-08-25 2019-02-28 Applied Materials, Inc. Apparatus for transportation of a carrier, system for vacuum processing of a substrate, and method for transportation of a carrier in a vacuum chamber
JP6766189B2 (en) * 2017-08-25 2020-10-07 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ An assembly for raising or lowering the carrier, a device for transporting the carrier in a vacuum chamber, and a method for raising or lowering the carrier.
KR102545664B1 (en) * 2018-05-24 2023-06-20 어플라이드 머티어리얼스, 인코포레이티드 Apparatus for transporting a carrier, processing system for vertically processing a substrate, and method for switching a transport path of a carrier
CN114981471A (en) * 2020-05-13 2022-08-30 应用材料公司 Carrier transport system, carrier for substrate, vacuum processing apparatus, and method for transporting carrier in vacuum chamber
DE102020114215B4 (en) * 2020-05-27 2022-10-27 Asm Assembly Systems Gmbh & Co. Kg Transport system for moving a substrate and functional device with a transport system
CN218089795U (en) * 2022-06-23 2022-12-20 拉普拉斯(无锡)半导体科技有限公司 Variable pitch structure of vacuum cavity

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0747408B2 (en) * 1989-09-05 1995-05-24 日本板硝子株式会社 Horizontal transport device for plate
KR101086191B1 (en) * 2004-03-24 2011-11-25 엘지디스플레이 주식회사 Apparatus for carring a glass
JP4711770B2 (en) * 2005-08-01 2011-06-29 株式会社アルバック Conveying apparatus, vacuum processing apparatus, and conveying method
EP1973154B1 (en) * 2007-03-13 2012-04-25 Applied Materials, Inc. Device for moving a carrier in a vacuum chamber
CN101952950B (en) * 2008-02-28 2012-08-01 株式会社爱发科 Transfer apparatus, vacuum processing apparatus and transfer method
KR20100044603A (en) * 2008-10-22 2010-04-30 주식회사 아이피에스 Substrate processing apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI733140B (en) * 2019-07-12 2021-07-11 萬潤科技股份有限公司 Thin object conveying device and equipment

Also Published As

Publication number Publication date
KR20110094941A (en) 2011-08-24
CN102194728B (en) 2014-01-01
CN102194728A (en) 2011-09-21
TWI438858B (en) 2014-05-21
KR101243743B1 (en) 2013-03-13

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