TW201118335A - Device and method for detecting object surface - Google Patents

Device and method for detecting object surface Download PDF

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Publication number
TW201118335A
TW201118335A TW98139670A TW98139670A TW201118335A TW 201118335 A TW201118335 A TW 201118335A TW 98139670 A TW98139670 A TW 98139670A TW 98139670 A TW98139670 A TW 98139670A TW 201118335 A TW201118335 A TW 201118335A
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Taiwan
Prior art keywords
light
mirror
frame
disposed
reflection mirror
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TW98139670A
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Chinese (zh)
Inventor
Hui-Hsiung Lee
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Jye Jiang Technology Co Ltd
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Priority to TW98139670A priority Critical patent/TW201118335A/en
Publication of TW201118335A publication Critical patent/TW201118335A/en

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Abstract

This invention relates to a device for detecting object surfaces, including a frame, at least a light source fixed to the frame, and at least a dark box. The dark box is installed on the frame, and each has a light entering port on the surface. Inside the dark box, an incident light reflection mirror, at least a transmission reflection mirror, a lens set, at least a terminal reflection mirror and a sensor are installed. The incident light reflection mirror is installed at a position facing the light entering port, and the positions of the incident light reflection mirror, the transmission reflection mirror, the lens set, the terminal reflection mirror and the sensor correspond to one another. This invention has few elements that can be easily assembled, and reflection and refraction can occur in a limited space without manually adjusting aperture and focal length; thus fast detection can be achieved and cost can also be reduced.

Description

201118335 六、發明說明: 【發明所屬之技術領域】 本發明係一種物體表面檢測裝置,尤其是一種利用多 次折射而放大擷取晝面,而達到快速檢測目的的物體表面 檢測裝置。 【先前技術】 一般而言,藉由檢測物體(如基材)的表面能夠判斷該 物體的品質,其係利用將該物體放置於一傳輸裝置上,再 φ 以設置於該傳輸裝置上、下的燈源照射於該物體的上、下 表面,並利用一線性電荷耦合元件攝影機(Line CCD camera)擷取物體表面的影像,再將該影像傳遞至一數位 處理器中進行分析而判斷該物體的品質,若該物體品質不 符合期望’製程人員也能夠依照不同的灰階程度了解該物 體所產生的瑕疵種類,而能迅速改善特定製程。 第四圖係示意既有的線性電荷耦合元件攝影機(60), 而更詳細之結構請參看本國新型專利證書第M285725號 鲁 以及第M285730號專利案’該線性電荷耦合元件攝影機(6〇) 包括一感光元件(61)、一延伸筒(62)以及一鏡頭(63),該延 伸筒(62)的一端係與該感光元件(61)相連,而該鏡頭(63)係 設置於該延伸筒(62)的另端’且該鏡頭(63)内包含光圈 (631)、對焦模組(632)以及複數凹、凸透鏡所組成之透鏡 組(633) ’藉由該攝影機之鏡頭(63)擷取從物體(5〇)所反射 之光線而成像於感光元件(61),再將影像傳遞至一主機(7〇) 内的數位處理器(71),如FPGA影像處理演算系統(fje|d_ programmable gate array),以處理攝影機所擷取的影像。 201118335 …、、而,既有的攝影機(60)與物體(50)之間必須保持一 定的距離以避免產生照射死角,所以整體檢測裝置的體積 龐大;而且在檢測時需要時常調整光圈和焦距導致檢測 過程中斷或者時間延遲;再者,該鏡頭(63)大多為球面鏡, 因此容易產生像差,導致檢測的準確度降低;另外,線性 電荷耦合元件攝影機(70)的價格昂貴,使得檢測裝置的成 本無法降低。 【發明内容】 本發明人有鑑於既有檢測裝置所用的CCD攝影機會產 生許多問題,且無法降低成本,因此經過不斷的研究以及 長期的試驗之後,終於發明出此物體表面檢測裝置。 本發明之目的係在於提供一種利用多次折射而放大擷 取晝面,而達到快速檢測目的的物體表面檢測裝置。 為達上述目的’本發明之物體表面檢測裝置,係包括: 一框架; 至少一燈源’其係固定於該框架; 至少一暗室箱,其係設置於框架上,各暗室箱的一表 面形成有一入光口,而於其内部設有一入光反射鏡、至少 一傳送反射鏡、一透鏡組、至少一終端反射鏡以及一感應 器,該入光反射鏡係設置於面對該入光口的位置,該傳送 反射鏡係設置於接收由該入光反射鏡所反射之光線的位 置’該透鏡組設置於接收由該傳送反射鏡所反射之光線的 位置,該終端反射鏡係接收由該透鏡組所折射之光線的位 置’該感應器係接收由該終端反射鏡所反射之光線的位 201118335 本發明尚有關於一種物體表面檢測方法,其係包括: 令一光源將光線照射於一物體表面; 使從該物體表面反射之光線至少經由複數次反射之後 轉換為物體表面影像訊號; " 分析該物體表面影像訊號,以完成物體表面的檢測。 較佳的是,從該物體表面反射的光線經由複數次反射 的過程中尚經過透射,其係包含以凸透鏡、凹透鏡或其組 合之透射。 • 其中,分析該物體表面影像訊號包括分析該物體表面 影像訊號的明暗、色彩以及圖形,以及與一標準的明暗、 色彩以及圖形進行比對,以顯示該物體表面之缺陷。 本發明的元件少、組裝容易,只要藉由該暗室箱的入 光口使照射於物體上的光線經由該入光口進入該暗室箱 内’並經由入光反射鏡、傳送反射鏡、透鏡組以及終端反 射鏡的反射和折射,而讓感應器接收,所以本發明能在有 限空間内進行的反射與折射,無須手動調整光圈和焦距, • 還可由電腦控制自動調整光圈和焦距,,故可達到快速檢測 的優點;而且不會產生球面像差的問題,且能縮短暗室箱 與物體之間的距離,並降低成本。 【實施方式】 請參看第一圖所示,本發明之物體表面檢測裴置其 係用於檢測一物體(50),例如但不限制於基板 '布料等 係包括一框架(10)、一輸送帶(2〇)、至少一燈源(3〇)以及至 少一暗室箱(40)。 該框架(10)係呈矩形,其具有兩端,並於其頂部以及 201118335 底部各設有一連接兩端的結合桿(11),而於圖式中僅示意 頂部的結合桿(11),各結合桿(11)具有複數螺孔; 該輸送帶(20)係固定於該框架(1〇)上,且設置於該框 架(10)之二結合桿(11)之間,其具有二相互平行的固定桿 (21 )、複數滾輪(22)以及供物體(5〇)放置的帶體(23),該等 固定桿(21)係固定於該框架(1〇)且與該結合桿(11)平行而 該等滾輪(22)係間隔設置於該固定桿(21)之間,該帶體(23) 係放置於該滾輪(22)上,且呈透明; • 請附加參看第三圖所示,各燈源(30)係固定於該框架 (10)上且面對該輸送帶(20); 請附加參看第二圖所示,各暗室箱(4〇)係間隔設置於 該框架(10)之結合桿(11)上,各暗室箱(40)包括一箱體(41) 以及一 L形鎖固片(42),該箱體(41)面對該輸送帶(2〇)的 一表面形成有一長條形的入光口(411),以使得燈源(3〇)照 射於該物體(50)表面而反射的光線能夠從入光口(411)進入 該箱體(41)内,而該箱體(41)内部設有一入光反射鏡 • (412)、三個傳送反射鏡(4-13)、一透鏡組(414)、至少一終 端反射鏡(415)以及一感應器(416); 該入光反射鏡(412)係設置於面對該入光口(411)的位 置,且呈斜向設置,以接收從入光口(411)進來的光線並進 一步將其反射; 該等傳送反射鏡(413)係與該入光反射鏡(412)對應, 且彼此相互對應’而呈斜向設置’以接收從入光反射鏡(々I?) 所反射的光線並進一步將其反射; 該透鏡組(414)係凹透鏡與凸透鏡的組合,其係與該傳 201118335 送反射鏡(413)對應’以接收從該傳送反射鏡(413)所反射 之光線並進一步將其折射; 該終端反射鏡(415)係與該透鏡組(414)對應,且呈斜 向設置’以接收由該透鏡組(414)所折射之光線並進一步將 其反射; 該感應器(416)對應於該終端反射鏡(415),以接收由 該終端反射鏡(415)所反射之光線; 該箱體(41)之側邊具有複數連接埠,該連接埠係連接 鲁 於該感應器(416),供導線插入以連接該感應器(416)以及 一主機; 該L形鎖固片(42)係從該箱體(41)之側邊延伸而出, 且其設有複數穿孔’以供螺釘(43)穿入後再螺合於該結合 桿(1 1)之螺孔内,以將該暗室箱(4〇)固定於該結合桿(1,) 上。 由於所屬技術領域中具有通常知識者在了解本發明之 技術後即能依需要而決定該傳送反射鏡(41 3)的數量,並能 調整上述入光反射鏡(41 2)、傳送反射鏡(41 3)、透鏡組 (414)、終端反射鏡(415>以及感應器(416)之間的位置,因 此本發明並未將該等元件設定在特定位置,只要光線能夠 依照本發明所示的路徑行進’而到達感應器(416),達成本 案之目的,則皆屬於本發明之範疇。 本發明藉由暗室箱(40)内的反射鏡與透鏡組(414)之組 合能夠將光線集中於感應器(416)中,所以無需手動調整光 圈和焦距,而且從物體(50)上反射的光線直接由入光口(411) 進入暗室箱(40)内’並不會產生如既有攝影機所產生的球 201118335 面差。 再者,本發明之元件簡單,容易製作,方便拆卸更換, 因此價格比線性CCD攝影機更為便宜,故能降低該物體表 面檢測裝置的成本。 本發明藉由上述裝置能實施一種物體表面檢測方法, 其係包括: 々一'光源將光線照射於一物體表面; 使從該物體表面反射之光線經由複數反射鏡,並利用 凸透鏡、凹透鏡或其組合進行複數次反射以及透射之後轉 換為物體表面影像訊號; 分析該物體表面影像訊號的明暗' 色彩以及圖形,以 及與一標準的明暗、色彩以及圖形進行比對,以顯示該物 體表面之缺陷’並且製作成一報表,以完成物體表面的檢 測0 由於既有攝影機中皆係使用透鏡的組合,並無使用反 射鏡,因此本發明利用反射鏡並搭配透鏡而完成物體表面 的檢測’無須擔心既有攝影機產生的缺點,故極具產業利 用價值。 【圖式簡單說明】 第一圖係本發明之立體圖。 第二圖係本發明之暗室箱的立體圖。 第二圖係本發明供光線行進之路線的示意圖。 第四圖係既有攝影機與主機之連接的示意方塊圖。 【主要元件符號說明】 201118335 (10)框架 (11)結合桿 (20)輸送帶 (21)固定桿 (22)滾輪 (23)帶體 (30)燈源 (40)暗室箱 (41)箱體 (411)入光口 (412)入光反射鏡 (413)傳送反射鏡 (414)透鏡組 (415)終端反射鏡 (416)感應器 (42) L形鎖固片 (43)螺釘 (50)物體 (60)線性電荷耦合元件攝影機 (61)感光元件 (62)延伸筒 (63)鏡頭 (631)光圈 (632)-對焦模組 (633)透鏡組 (70)主機 (71)數位處理器201118335 VI. Description of the Invention: [Technical Field] The present invention relates to an object surface detecting device, and more particularly to an object surface detecting device which utilizes multiple refractions to magnify a sucking surface to achieve rapid detection. [Prior Art] In general, by detecting the surface of an object (such as a substrate), the quality of the object can be judged by placing the object on a transport device, and then φ is placed on the transport device. The light source illuminates the upper and lower surfaces of the object, and uses a linear CCD camera to capture an image of the surface of the object, and then transmits the image to a digital processor for analysis to determine the object. The quality of the object, if the quality of the object does not meet the expectations, the process personnel can also understand the type of defects generated by the object according to the degree of gray scale, and can quickly improve the specific process. The fourth figure shows the existing linear charge coupled device camera (60). For a more detailed structure, please refer to the national new patent certificate No. M285725 and the No. M285730 patent. The linear charge coupled device camera (6〇) includes a photosensitive element (61), an extension cylinder (62) and a lens (63), one end of the extension cylinder (62) is connected to the photosensitive element (61), and the lens (63) is disposed on the extension cylinder (62) The other end 'and the lens (63) includes an aperture (631), a focus module (632), and a lens group (633) composed of a plurality of concave and convex lenses 'by the lens (63) of the camera The light reflected from the object (5〇) is imaged on the photosensitive element (61), and then the image is transmitted to a digital processor (71) in a host (7〇), such as an FPGA image processing algorithm (fje|d_) Programmable gate array) to process the image captured by the camera. 201118335 ..., and the existing camera (60) and the object (50) must maintain a certain distance to avoid the occurrence of illumination dead angle, so the overall detection device is bulky; and often need to adjust the aperture and focal length during the detection The detection process is interrupted or time delayed; furthermore, the lens (63) is mostly a spherical mirror, so that aberrations are easily generated, resulting in reduced accuracy of detection; in addition, the linear charge coupled device camera (70) is expensive, so that the detection device is The cost cannot be reduced. SUMMARY OF THE INVENTION The present inventors have invented the object surface detecting device after continuous research and long-term testing in view of the fact that the CCD camera used in the conventional detecting device has many problems and cannot be reduced in cost. SUMMARY OF THE INVENTION An object of the present invention is to provide an object surface detecting apparatus which uses a plurality of refractions to amplify a kneading surface to achieve rapid detection. In order to achieve the above object, the object surface detecting device of the present invention comprises: a frame; at least one light source ' is fixed to the frame; at least one dark room box is disposed on the frame, and a surface of each of the darkroom boxes is formed An entrance optical port is provided, and a light-introducing mirror, at least one transmitting mirror, a lens group, at least one terminal mirror and an inductor are disposed in the optical port, and the light-introducing mirror is disposed to face the light-in port a position at which the transmitting mirror is disposed at a position to receive the light reflected by the light incident mirror. The lens group is disposed at a position to receive the light reflected by the transmitting mirror, and the terminal mirror receives the light. Position of the light refracted by the lens group 'The sensor receives the light reflected by the terminal mirror 201118335 The present invention relates to a method for detecting the surface of an object, comprising: causing a light source to illuminate an object Surface; the light reflected from the surface of the object is converted into an object surface image signal after at least a plurality of reflections; " analyzing the surface image of the object Number to complete the detection of the object surface. Preferably, the light reflected from the surface of the object is transmitted through a plurality of reflections, including transmission by a convex lens, a concave lens or a combination thereof. • The analysis of the surface image signal of the object includes analyzing the light and darkness, color and graphics of the image signal on the surface of the object, and comparing with a standard light and dark, color and graphics to display defects on the surface of the object. The device of the invention has few components and is easy to assemble, as long as the light incident on the object enters the darkroom through the light entrance port through the light entrance of the darkroom box, and passes through the light-incident mirror, the transmission mirror, and the lens group. And the reflection and refraction of the terminal mirror, and let the sensor receive, so the invention can reflect and refract in a limited space without manual adjustment of the aperture and focal length, and can also automatically adjust the aperture and focal length by computer control, so Achieve the advantages of rapid detection; and it does not cause spherical aberration, and can shorten the distance between the darkroom and the object, and reduce the cost. [Embodiment] Referring to the first figure, the object surface detecting device of the present invention is used for detecting an object (50), such as but not limited to a substrate, a cloth, etc., including a frame (10), a conveying A belt (2 inches), at least one light source (3 turns), and at least one dark room box (40). The frame (10) is rectangular, has two ends, and has a connecting rod (11) connecting the two ends at the top and the bottom of 201118335, and only the top connecting rod (11) is illustrated in the drawing, each combination The rod (11) has a plurality of screw holes; the conveyor belt (20) is fixed on the frame (1), and is disposed between the two coupling rods (11) of the frame (10), which have two parallel lines a fixing rod (21), a plurality of rollers (22), and a belt body (23) for placing an object (5), the fixing rods (21) being fixed to the frame (1〇) and the coupling rod (11) Parallelly, the rollers (22) are spaced apart between the fixing rods (21), and the belt body (23) is placed on the roller (22) and is transparent; • Please refer to the third figure. Each light source (30) is fixed to the frame (10) and faces the conveyor belt (20); please refer to the second figure, the darkroom boxes (4〇) are spaced apart from the frame (10) The combination chamber (11) includes a box body (41) and an L-shaped locking piece (42), the box body (41) facing the conveyor belt (2〇) The surface is formed with a long strip-shaped light entrance opening (411), so that the light source (3〇) is irradiated on the surface of the object (50), and the reflected light can enter the box body (41) from the light entrance port (411). The housing (41) is internally provided with a light-in reflecting mirror (412), three transmitting mirrors (4-13), a lens group (414), at least one terminal mirror (415), and a sensor. (416); the light incident mirror (412) is disposed at a position facing the light entrance port (411), and is disposed obliquely to receive the light coming in from the light entrance port (411) and further reflect it The transmitting mirrors (413) correspond to the light-in reflecting mirrors (412) and correspond to each other 'and obliquely' to receive light reflected from the light-in reflecting mirror (々I?) and further Reflecting it; the lens group (414) is a combination of a concave lens and a convex lens, which corresponds to the transmission 201118335 mirror (413) to receive the light reflected from the transmitting mirror (413) and further refract it The terminal mirror (415) corresponds to the lens group (414) and is disposed obliquely to receive The light refracted by the lens group (414) and further reflected; the inductor (416) corresponding to the terminal mirror (415) to receive the light reflected by the terminal mirror (415); the housing ( 41) The side has a plurality of ports connected to the inductor (416) for wire insertion to connect the sensor (416) and a host; the L-shaped locking piece (42) is The side of the box body (41) extends out and is provided with a plurality of perforations for the screw (43) to penetrate and then screwed into the screw holes of the coupling rod (1 1) to (4〇) is fixed to the coupling rod (1,). Since the person having ordinary skill in the art can understand the number of the transmitting mirrors (41 3) as needed after understanding the technology of the present invention, the light-receiving mirror (41 2) and the transmitting mirror can be adjusted ( 41 3), the position between the lens group (414), the terminal mirror (415), and the sensor (416), so the present invention does not set the elements at a specific position as long as the light can be in accordance with the present invention. The path travels to the sensor (416), which is the object of the present invention, is within the scope of the present invention. The present invention can concentrate light by combining the mirror and the lens group (414) in the darkroom box (40). In the sensor (416), there is no need to manually adjust the aperture and focal length, and the light reflected from the object (50) enters the darkroom box (40) directly from the light entrance (411)' and does not produce the camera as it is. The resulting ball has a difference of 201118335. Furthermore, the component of the present invention is simple, easy to manufacture, and easy to disassemble and replace, so the price is cheaper than that of a linear CCD camera, so the cost of the surface detecting device of the object can be reduced. The invention can implement an object surface detecting method by the above device, which comprises: a 'light source illuminating a surface of an object; causing light reflected from the surface of the object to pass through a plurality of mirrors, and using a convex lens, a concave lens or a combination thereof Performing multiple reflections and transmissive conversion to object surface image signals; analyzing the light and dark 'colors and graphics of the image signal on the surface of the object, and comparing it with a standard shade, color, and graphics to show defects on the surface of the object' and Make a report to complete the detection of the surface of the object. 0 Since the combination of the lens is used in both the camera and the mirror is not used, the present invention uses the mirror and the lens to complete the detection of the surface of the object without worrying about the existing camera. The first aspect is a perspective view of the darkroom case of the present invention. The second figure is a route for the light to travel according to the present invention. The fourth picture shows the connection between the camera and the host. Block diagram. [Main component symbol description] 201118335 (10) Frame (11) Bonding rod (20) Conveyor belt (21) Fixing rod (22) Roller (23) Belt body (30) Light source (40) Dark room box (41 ) Box (411) light entrance (412) light-in mirror (413) transfer mirror (414) lens group (415) terminal mirror (416) sensor (42) L-shaped locking piece (43) screw (50) Object (60) Linear Charge Coupled Component Camera (61) Photosensitive Element (62) Extension Tube (63) Lens (631) Aperture (632) - Focus Module (633) Lens Group (70) Main Unit (71) Digital processor

Claims (1)

201118335 七、申請專利範圍: 1 · 一種物體表面檢測裝置,係包括: 一框架; 至少一燈源,其係固定於該框架; 至少一暗室箱’其係設置於框架上,各暗室箱的一表 面形成有一入光口,而於其内部設有一入光反射鏡'至少 一傳送反射鏡、一透鏡組、至少一終端反射鏡以及一感應 器’該入光反射鏡係設置於面對該入光口的位置,該傳送 ® 反射鏡係設置於接收由該入光反射鏡所反射之光線的位 置,該透鏡組設置於接收由該傳送反射鏡所反射之光線的 位置’該終端反射鏡係接收由該透鏡組所折射之光線的位 置’該感應器係接收由該終端反射鏡所反射之光線的位 2.如申請專利範圍第1項所述之物體表面檢測裝置, 其尚包括一輸送帶’其係固定於該框架上,且令該光源面 對該輸送帶,各暗室箱之入光口亦面對於該輸送帶。 ® 3.—種物體表面檢測方法,包括: 令一光源將光線照射於一物體表面; 使從該物體表面反射之光線至少經由複數次反射之後 轉換為物體表面影像訊號; 分析該物體表面影像訊號,以完成物體表面的檢測。 4·如申請專利範圍第3項所述之物體表面檢測方法, 其中從該物體表面反射的光線經由複數次反射的過程中尚 經過透射,其係包含以凸透鏡、凹透鏡或其組合之透射。 5·如申請專利範圍第3或4項所述之物體表面檢測 Γ 201118335 方法,其中分析該物體表面影像訊號包括分析該物體表面 . 影像訊號的明暗、色彩以及圖形,以及與一標準的明暗、 色彩以及圖形進行比對,以顯示該物體表面之缺陷。 八、圖式:(如次頁)201118335 VII. Patent application scope: 1 · An object surface detecting device comprises: a frame; at least one light source fixed to the frame; at least one dark room box is disposed on the frame, and one of the darkroom boxes The surface is formed with an entrance port, and a light-introducing mirror is disposed in the interior of the device: at least one transmitting mirror, a lens group, at least one terminal mirror, and an inductor. The light-introducing mirror is disposed to face the entrance. a position of the optical port, the transmission mirror is disposed at a position to receive the light reflected by the light incident mirror, the lens group being disposed at a position receiving the light reflected by the transmitting mirror 'the terminal mirror system Receiving a position of a light refracted by the lens group, the sensor receiving a position of the light reflected by the end mirror. 2. The object surface detecting device according to claim 1, which further comprises a conveying The belt is fixed to the frame, and the light source faces the conveyor belt, and the light entrance of each of the darkroom boxes is also facing the conveyor belt. ® 3. A method for detecting the surface of an object, comprising: causing a light source to illuminate a surface of an object; causing the light reflected from the surface of the object to be converted into an image signal of the surface of the object after at least a plurality of reflections; analyzing the surface image signal of the object To complete the detection of the surface of the object. 4. The method of detecting an object surface according to claim 3, wherein the light reflected from the surface of the object is transmitted through the plurality of reflections, and the transmission is performed by a convex lens, a concave lens or a combination thereof. 5. The surface inspection of an object as described in claim 3 or 4, wherein the analysis of the surface image signal of the object comprises analyzing the surface of the object, the brightness and color of the image signal, and the pattern, and a standard shading, Colors and graphics are compared to show defects on the surface of the object. Eight, schema: (such as the next page) 1111
TW98139670A 2009-11-23 2009-11-23 Device and method for detecting object surface TW201118335A (en)

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