201114506 7、發明說明： 【發明所屬之技術領域】 存二高濃度(溶 ;=聲:學所產生的過氧化氫 進 ;=!，有/崎導體製品·金屬加工品·編^ 艮為寻物品之洗淨·殺菌。 【先前技術】 被、作為枝，以針對浸潰在洗淨水中的 所知rll·品’從複數個不同方向照射超音波的方法最為人 郝0』考特開平5侧〇67 !虎公報、實開昭56-20684號公 ^門f露細號公報、特開麟]應號公報、 能㈣將超音波照在整 5 得到均勾的洗淨效果。不過，特開平 號公報、她自5㈣684號錢姻雇·35139 2二卜特開2〇09-125645號公報、特開平6-262148號公 =栽的祕’其料雜^的鋪御情洗淨槽所 ==子的洗淨水仙’或使該生超音波振動後，將該 至歸水，因此’麻分子的超音波振動較弱， 又 淨槽的水面會形成定波’水分子的隨機超音波振動 =更弱。這些導致超音波振動作闕化，洗淨力 V再者，洗淨水為純水、自來水，無法充分將氧及氮 4子’幾乎不會產生聲化學反應，㈣效果也不佳。 動、、^外’在以高漢度溶存氧及氮的洗淨水給予超音波振 / /尹的方法也是為人所知（參照特開平9_194887號公 報、特開聰-4⑽號公報）。該方法能讓洗淨水中產生大 4/18 201114506201114506 7. Description of the invention: [Technical field to which the invention belongs] High concentration of deposits (dissolved; = sound: hydrogen peroxide produced by the school; =!, with /Saki conductor products, metal processed products, edited) [Previous technique] The method of irradiating ultrasonic waves from a plurality of different directions to the known rll·products that are impregnated in the washing water is the most popular method. Side 〇 67 ! 公报 公报 虎 虎 虎 虎 -20 -20 -20 -20 -20 -20 -20 -20 -20 -20 -20 -20 -20 -20 -20 -20 -20 -20 -20 -20 -20 -20 -20 -20 -20 -20 -20 -20 -20 -20 -20 -20 -20 -20 -20 -20 -20 -20 -20 -20 -20 -20 -20 -20 -20 The special opening bulletin, she is from 5 (four) 684 money marriage, 35139 2 two bund open 2〇 09-125645 bulletin, special Kaiping 6-262148 public = planted secret 'its material miscellaneous ^ pavilion cleansing trough If the submerged wave is vibrated, the ultrasonic wave will be returned to the water, so the ultrasonic vibration of the hemp molecule is weak, and the water surface of the clean groove will form a random wave of the constant wave 'water molecule. Sound wave vibration = weaker. These cause the ultrasonic vibration to be deuterated, and the washing power V, the washing water is pure water, tap water, no The oxygen and nitrogen 4's are almost incapable of producing sonochemical reactions, and (4) the effect is not good. The method of giving ultrasonic vibration / / Yin to the washing water which dissolves oxygen and nitrogen in high temperature It is also known (refer to JP-A-9-194887, JP-A-4(10)). This method can make the washing water big 4/18 201114506
量的Hex過氧化氣）、H 效果。不過，特特 物~，嫩跑單一方 此’超音波無法均勾照在整個被洗淨物 呈㈣Γ主1 &囷效果不均，且氧及氮是利用導入管等工 招〜 i超音波洗淨裝置的高成本成為問題。 ^ θ ’Π振^絲在洗淨槽，111前述原因，超音波 =及=，洗淨水中溶存之氧及氮分解後，所產生 •聲化學反應不完全，以致有洗淨·殺菌效 :蔔：：二立此外’以不更換水槽内的洗淨水，或不吹 …二二S波振動所進行的批次洗淨㈣，會將洗淨 水中的减氮在短時間内分解龍，喪失洗淨殺菌效果。 另方面將洗净水與空氣接觸循環，自然吸取空氣中的 氮’以進行溶存的方法亦是眾所皆知(參考特開2_-91546 ：!^}； 5 2008-91546 π將洗淨水的水面魅氣接觸，因此_吸取量不完全， 為補八不（&另行配置洗淨水流量調整裝置及溫度調整 裝置，故依舊存有超音波洗淨裝置高成本的問題。且因從 早-方向照射超音波之故，與特開平9_194887號公報、特 開雇-45159號公報記載的技術相同，洗淨殺菌效果不 再者，因為超音波振㈣安Μ洗淨槽，因此，基於 月]述原因纟超音波無㈣力輸出，即不能充分洗淨。 再者，本發明者等早先所開發之特開平4-Π㈣號公 報的連續超音波洗淨裝置，麵I下—對超音波㈣ 為’使被洗淨物通過其間，但該洗淨方法將超音波振遭器 上下相對加強超3波振動以有效洗淨被洗淨物。不過， 5/18 201114506 〇亥洗/爭方法不被視為聲化學反應(s〇n〇chemiStry)，且洗淨水 是以快速且相當比例在超音波振盪器間流動的水流，因 此，即使產生聲化學反應，該反應產生的過氧化氫、亞硝 酸因快速流出之故，也無法充分將被洗淨物洗淨。此外， /谷存於洗淨水的氧•氮在循環過程中被消耗，以致溶存濃度 大幅降低後，聲化學反應變差，目此，以聲化學反應連續 穩定的殺菌•洗淨效果不佳。 、 【發明内容】 本勒明欲解決的棘在於提供—種超音波洗淨方法每 決以往這些問題，高洗淨力及高«效果，將附聋 於物品表面的指紋、油脂都去除，^以低輸出的超音波和 得南洗淨殺g效果。再者，本案發明之其他課題在於，拐 仏種洗淨方法，月匕將洗淨水循環使用，且穩定且連續網 淨㈣，則隨的設備及運轉成本進行連續洗淨翻 本發明用以解決相關課題的結構在於， υ-種使用超音波之物品洗淨方法，其特徵在於： 將複數_音波振㈣之發振面浸潰在洗淨水的水面 二彼二對的形式配置在洗淨槽内，該洗淨 =有啸紅赫減氮財巾，錢触連續供 ;=，！：高濃度溶存之氧及氮於水中，以每分鐘 同：!將被洗淨物置於上述狹窄區域： 動，將洗淨水對之超音波顯11的超音波振 進行被洗淨物的洗淨解’產生過氧化氫及石肖酸， 6/18 201114506 同日士，/Ί'辰度/谷存氧及氮的洗淨水連續供給至洗淨槽内， 二：入Γ共給之洗淨水的一部份流通過狹柳或後，將 卩洗淨水連續從洗淨槽排出，排出的洗淨水被送 '、曲及氣的溶解部，在該溶解部提高溶存濃度，以高 =:::子乳及氮後，利用幫浦將洗淨水供給至洗淨槽，作 趾=使用，同時將供給至洗淨槽内的洗淨水之中，通過 率乍=之流量與未通過狹窄區域之排水流量的分流比 上升lit，部的洗淨水中’其溶存之氧或氣的各滚度 古，曲卜Γ父低者运低’將供給至洗淨槽之洗淨水經常以 存乳及氮，使連續洗淨成為可能，再者，分別於 過置開口，並設置輪送帶’使被洗淨物透 ^/爭槽内的水中移動，通過洗淨水面下的 以輸送，並在槽内側的左右開口附近，將供 槽内的洗淨水從左右開口大1= 綦巾制 里排水，再者，噴出的部份洗 域左丄====:-邊被誘導從狹窄區 "_L且將洗甲水將以水膜或水脈狀 中的氧^氣二洛ΐί氣中’在落下過程中將接觸到空氣 的接㈣’：此讀體溶存至洗淨水，彻洗淨槽下方 SC ;:的洗淨水，將所回收的洗淨水以幫浦送 :::形Γ部乃由洗淨槽的開口及配置於該開口下方 本發明將超音波振盪器的 中在相對的狹窄區域，針料日波振動集 且隨機給抑讀勘，《有效 空洞狀態取料㈣ 201114506 水流入换·迷關，將以高漠度溶存氧及氮的洗淨 生，L同’ M維持高濃度過氧化氫及硝酸連續產 狹窄區Ml生之魏化氫及俩快速紐流出，確保 持長空洞狀態，使物品保 、、、3稳疋且有效的洗淨及殺菌效果。 對本式及本㈣合之實峨的記載，可 【實施方式】 第一實施形態 2明的洗㈣除水槽結構外，亦可採用洗淨水流入 後’被洗淨物被置於該水流中的水路結構。 大氣於/淨:”的氧及氮之「高漠度」意指， 70^二。二〜:存'辰度或該濃度上下、飽和溶存濃度 大氣下的氣體溶存濃度以溶解絲示，每1 ^的容積單位⑽3,氧在室溫下為⑼3W/水lec，氮在 至溫^約為^016cm3/水以，其加壓後較飽和溶存濃度高， 此抑也㉟蓋其巾。此外，洗淨水亦可在純水、自來 水中加入洗淨劑。 本發明的溶解部是以高濃度將氧及氣溶存於洗淨水中 的結構部’此溶解部用來溶存氧讀的方法，是將洗淨水 在大氣中以水職、水脈狀、讀狀或淋浴狀落下或喷出， 使其與大氣中的氧及氮接觸後再溶存。 流入本發明之狹窄區域，且以高濃度溶存氧及氮的洗 淨水’其流速(流速變動時’其平均流速)為15〜職爪/分， 最好為如〜6〇em/分。由於流速慢，狹f區_之洗淨水所 ’奋存的氧及氮，-旦進人該狹窄區域，即受超音波振動影 8/ 18 201114506 響而分解消耗，因此，若$右 窄區域内的氧及氮絕的洗淨水流^，狹 酸。再產生的過氧化氫及硝酸的生新的過氧化鼠及硝 流出而變低，喪失洗=的π因化學反應!散、 . m节仅囷刀另—方面，產生的空洞狀 心也“出二因此’需源源不絕的新的洗淨水。 μ合/速快’產生的過氧化氫及硝酸與空洞 狀態會k到狹―域外，導致洗淨殺菌力降低。 W抓速在15 lGGem/分|&圍’可調和麵者以提高洗淨殺 囷力’該流速最好在2〇〜6〇cm/分。 、本，明所供給洗淨槽之洗淨水全流量之中流入狹窄區 域的流量比率’係低於該溶存濃度在溶解部上升的比率， 如此來’當洗淨水通過狹窄區域所分解失去的氧及氮， 將可在溶解部恢復，並能被連續彳_使帛，敎洗淨殺菌 處理，且長時間維持其洗淨殺菌力。 本發明將狹窄區域内洗淨水的流速設為v、流入狹窄區 域的流入面積設為S、給予狹窄區域超音波振動之相對的超 曰波振盈益總電力W t只要滿足下列不等式1，最好是不等 式2,即可在短時間内去除被洗淨物表面指紋、油脂等難以 去除的附著物。單位為cm、秒、瓦。因此可知(Wt/(v*s)) 的值，其流速V越快越小、越慢(小)越大，上述流速範圍及 超音波總電力將在適當值’下列不等式1、2也在適當值。 (公式1) " 不等式 l:0.67<(Wt/(v*S))<13.3 不等式 2:l.l<(Wt/(v*S))<10.0 此外，在上述不等式中亦可將（Wt/(v*S))的値設為 (Wt/q2)。v、s的值不清楚或難以測量，而通過流量七可輕 9/18 201114506 易測量或容易計算的情況下’可將(Wt/(v*s))換成(wt/q2)。 再者’將分流比率k設在k^/h+q^WQ，則因q2=k*Q， 故亦可將(Wt/(v*S))換成(Wt/(k*QX)。不等式工、2可換成下 列公式2。 、 (公式2) 不等式 3:0.67<(Wt/(k*Q))<13.3 不等式 4:l.l<(Wt/(k*Q))<l〇.〇 k=q2/Q=分流比率 此外，將以高濃度溶存氧及氮，再供給至洗淨槽的洗 淨水，其流量視為Q、將通過狹窄區域之洗淨水的流量視 為qz、未通過狹窄區域而直接排放的流量視為， 在;谷解部之氧及氮，其遭度上升較低之比率值視為丫，則自 開口落下前的濃度β，因通過狹窄區域之氧及氮幾乎已分解 消耗而形成o^qAqfq2)，故溶解部的比率值γ將上升，且 比率值γ大於流入狹窄區域之洗淨水的流量與未流入之洗 淨水的流量，其兩者的分流比率(七/中），因此，經過溶解部 之洗淨水，其濃度δ為(β+γβ)，濃度上升的比率值丫气&⑴小 大於分流比率(qs/qO的值，如下列公式，濃度δ將大於供給 時的遭度(X。 (公式3) q2/qi<Y · δ=β+γ(3=β( 1 +γ)=α * q, * (i +y)/(q! +q2) δ>α * q! * (1 +q2/q i )/(q, +q2)=a 6>a 如此一來’因溶解部之濃度上升的比率值γ較分流比 率大（或將分流比率設成較溶解部之濃度上升的比率值γ 10/18 201114506 小），故可將供給至洗淨槽之洗淨水的氧及氮，其濃度維持 在一定濃度之上，且進行連續且長時間洗淨殺菌。此外， 初期設定這些濃度時，將使超音波振盪器在不運轉下反覆 循環，故能達到一定濃度。 以下將根據實施例及圖式具體說明本發明。圖]係用 於實施例之超音波洗淨裝置T的說明圖。圖2至圖4係表 示實施例之該洗淨水的流動、其溶存氧及氮的濃度及流量 的說明圖。 圖中，1為接水槽、1 a為該接水槽上方左右側開口之 輸送帶3的通過口、2為洗淨槽、2a為洗淨槽左右側開口 形成的排水口。2b為從細長裂縫以水膜狀噴出洗淨水的噴 出部、2c為洗淨水的暫時儲水部、3為使用擱板輸送機(slat Conveyor)讓水上下通過的輸送帶、4為距離1〇cm間隔之上 下—對各lOOOwatt(瓦)的超音波振盪器、如為其振動面、5 為幫浦、6為洗淨水的供給管、7為在超音波振盈器4相對 之振動面内的狹窄區域，具高1〇cm、左右長4〇咖、寬3〇咖 :空間、8為上下-對擋板，其控制流人水量及流入速度， ^部份的水流以水膜狀從喷出部2b沿著槽内側開口 ^ ^ ’避免流人狹窄區域7、9為接水槽〗之洗淨水在進入 2 5前賴之雜物去除部。A 洗淨物半導體基板、W 马洗淨水、Wa為水幕。 枰1 例之超音波洗淨裝置如圖丨，在上面開放之接水 ^ 口内部配置洗淨槽2,將接水槽]及洗淨槽2之前後側面 送帶h'開口 23 ’該前後通過Π la、開口 2a與輸 開口 2二通在接7J1 槽1儲存洗淨水w。*洗淨槽2左右 、上方位置絲科部2b，其具備可向下且稱微向 11/18 201114506 =喷,出之長6〇cm、寬5mm的裂縫，以將洗淨水w的水幕 ::者開口仏的槽内側成形。在洗淨槽2内以距離1〇咖 置超音波缝器4，使該發振面在水面下彼此相對， 。又浦5及供給管6，而幫浦5將接水槽丨洗淨水w供 給至噴出部2b。 、接水槽1的儲水量為100〜300公升、洗淨槽2的容積 為30 60公升、幫浦4的給水能力為300〜1000公升/分。各 超音波振盪器4為1〇〇〇瓦，頻率以25kHz.4〇kHz.12〇kHz 更換。 本實施例中，幫浦5 -旦運作，儲存於接水槽i且以 乾和/谷存’辰度;谷存氧及氣之洗淨水w，將透過供給管6輸 送至洗淨槽2。 洗淨槽2中，由供給管6輸送的洗淨水在暫時儲水部 2c儲存後，裂縫狀的喷出口將從寬5mm、長6〇cm的喷出 部2b，以母分鐘50m的高速喷出水幕狀。喷出部2b的水 幕Wa，如同封閉洗淨槽2的開口 2a，抑制洗淨槽2内的洗 淨水從開口 2a大量排出，而該水面高於該開口 2a，以維持 水面高度。 水幕Wa的水流因上下一對擋板8，大部分(約9〇0/〇)將 滯留在擔板8及槽内面之間後，從開口 2a排出。 水幕Wa中，約10%的水將從上下擋板8的空隙以左右 兩側呈現相對的形式，流入超音波振盪器4間的狹窄區域 7。該流入速度以每分鐘50cm的程度大幅降低。狹窄區域 為高10cm、寬30cm、長(左右長)約為40cm，該領域的容 積L為12公升。以水幕狀噴出，且以高濃度溶存氧及氮之 部份洗淨水，將以左右相對的形式進入該狹窄區域7，再從 12/18 201114506 該區„出。該狀態如圖3所示。 立、/爪入，乍區域7之洗淨水的氧及氮因狹窄區域上下超 ρ皮捃蓋ϋ 4之強力超音波振動而分解，立刻變成過氧^ f及硝，。另—方面’從狹⑽域7流出之洗淨水的氧及 鼠’其濃度接近〇。流出的洗淨水與未流人(通過)狹窄區域 之洗淨Jc(、，勺％/〇)合、流，從開口 2a向槽外排出，洗淨水 從該開口 2a以水膜•水脈狀落至下方，由接水槽】回收、 儲存。^水以水膜•水脈狀落下時，與大氣中的氧及氣接 觸’此㈣體將溶解在洗淨水巾，以提高濃度。如此_來， 在實施例下，本發明之溶解部乃由洗淨槽關口 &及配置 於该開口下㈣接水槽丨之簡單結構形成。接著，此等氣 體的溶存濃度落下-次，可提料15%的濃度。溶解部濃 度上升的比率值γ約〇 15。 從左右噴出部2b之洗淨水的供給量，每分鐘約3〇〇公 升’且流^狹窄區域7的洗淨水量，為以每分鐘約30公升 供給之洗淨水的10%。 因此發現’流入狹窄區域7的洗淨水，受距離10cm之 各0喊(瓦)的上下超音波振盈器4，在該區域產生之^ 機強力超音波油影響，其料於水巾的氧及氮將以下^ 公式分解’產生過氧化氫及㈣酸等’以出現包括高 去油力及空洞狀態的高洗淨力。 【化1】 η2ο—η·+οη· Ν2-^2Ν· 02—20· 0·+Η20·—Η2〇2 13/18 201114506The amount of Hex peroxidation gas), H effect. However, the special thing ~, tender running single side of this 'supersonic can not be traced in the entire washed object (4) Γ main 1 & 囷 effect is uneven, and oxygen and nitrogen are using the introduction of the tube and other work ~ i super The high cost of the sonic cleaning device becomes a problem. ^ θ 'Π振^丝 in the washing tank, 111 the above reasons, ultrasonic = and =, after the decomposition of oxygen and nitrogen dissolved in the washing water, the resulting sonochemical reaction is not complete, resulting in cleaning and sterilization effect: Bu:: Erli In addition, the batch is washed (4) without replacing the washing water in the water tank, or not blowing... the two-six-wave vibration will decompose the nitrogen in the washing water in a short time. Loss of cleaning and sterilization effect. On the other hand, it is well known that the washing water is in contact with the air, and the nitrogen in the air is naturally taken up for dissolution (refer to Special Opening 2_-91546:!^}; 5 2008-91546 π will be washed water The water surface is in contact with the enchantment, so the amount of _ absorption is not complete, and it is not necessary to supplement the water flow adjustment device and the temperature adjustment device. Therefore, there is still a problem of high cost of the ultrasonic cleaning device. In the same way as the technique described in JP-A-9-194887 and JP-A-45159, the cleaning and sterilization effect is no longer the case, because the ultrasonic vibration (four) is used to clean the tank, so based on The reason for the 纟 纟 纟 纟 ( 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四The sound wave (4) is 'to make the washed matter pass between them, but the cleaning method will strengthen the ultrasonic vibration device up and down by 3 waves to effectively wash the washed matter. However, 5/18 201114506 〇海洗/争Method is not considered as a sonochemical reaction (s〇n〇chemiSt Ry), and the washing water is a water flow that flows between the ultrasonic oscillators at a rapid and proportional ratio. Therefore, even if an acoustic chemical reaction occurs, hydrogen peroxide and nitrous acid generated by the reaction may not be sufficient due to rapid outflow. The washed matter is washed. In addition, the oxygen and nitrogen stored in the washing water are consumed during the cycle, so that the sonochemical reaction is deteriorated after the concentration of the solution is greatly lowered, thereby achieving continuous stabilization by the sonochemical reaction. The sterilization and washing effect is not good. [Inventive content] The thorn of Benleming is to provide a method of ultrasonic cleaning. The fingerprints and grease on the surface are removed, and the ultrasonic output with low output and the effect of washing the south are used. In addition, the other problem of the invention of the present invention is that the washing method is used for recycling the water, and the water is recycled. Stable and continuous net cleaning (4), the equipment and operating costs are continuously washed and turned over. The structure of the invention to solve the related problems lies in the method for cleaning the articles using ultrasonic waves, which are characterized by: The vibration surface of the number _ sound wave vibration (four) is immersed in the water surface of the washing water in the form of two pairs of pairs in the washing tank, the washing = there is a whistling red hexagram, the money is continuously supplied; =, !: The oxygen and nitrogen dissolved in a high concentration are in the water, and the same thing is used every minute:! The object to be washed is placed in the above-mentioned narrow area: The ultrasonic wave of the supersonic wave of the washing water is washed by the washing water. Washing solution 'produces hydrogen peroxide and tartaric acid, 6/18 201114506 The same day, / Ί 'Chenduo / Valley oxygen and nitrogen washing water is continuously supplied to the washing tank, two: into the Γ A part of the washing water flows through the narrow willow or the rear, and the washing water is continuously discharged from the washing tank, and the discharged washing water is sent to the dissolved portion of the ', Qu and gas, and the dissolved concentration is increased in the dissolved portion. After the high =::: milk and nitrogen, the washing water is supplied to the washing tank by the pump, and the toe = use, and is supplied to the washing water in the washing tank, and the passing rate is 之 = The flow rate is different from the flow rate of the drainage flow that does not pass through the narrow area. The washing water in the part is 'the oxygen volume of the dissolved oxygen or the gas, and the lower one is lower.' The washing water supplied to the washing tank is often made to store milk and nitrogen, so that continuous washing is possible. Further, the opening is provided separately, and the belt is provided to make the object to be washed through the tank. Move in the water, transport it under the surface of the washing water, and in the vicinity of the left and right openings on the inside of the tank, drain the washing water in the tank from the left and right openings 1 = 綦 towel system, and then, the part of the washing area Left 丄 ====: - The side is induced from the stenosis area "_L and the nail water will be in the water film or water veins in the oxygen gas 二 二 ΐ ΐ ' 在 在 在 在 在 在(4) ': This reading body is dissolved in the washing water, and the washing water below the SC is cleaned, and the recovered washing water is sent to the pump::: The shape of the bowl is the opening of the washing tank and Disposed under the opening, the present invention places the ultrasonic wave oscillator in a relatively narrow region, and the needle wave vibration wave is collected and randomly observed, "effective cavity state reclaiming (4) 201114506 water inflow and change, will be Highly insoluble oxygen and nitrogen in the washing, L and 'M maintain high concentration of hydrogen peroxide and nitric acid continuous production of narrow areas Ml Shengwei Hydrogen and two New Zealand fast flowing, ensuring long holding state of the cavity, the article retention ,,, 3 Cloth stable and effective cleaning and sterilizing effect. The description of the present embodiment and the fourth embodiment can be described in the first embodiment (2). In addition to the water tank structure, the washing water can be placed in the water stream after the washing water flows in. Waterway structure. Atmospheric/net: "Highly inferiority" of oxygen and nitrogen means 70^2. 2~: The 'deuterium degree or the concentration of the gas in the atmosphere above and below the saturated solution concentration is shown by the dissolved filaments. For every 1 ^ volume unit (10) 3, the oxygen is (9) 3 W / water lec at room temperature, and the nitrogen is at the temperature ^ It is about ^016cm3/water, and it has a higher concentration of saturated solution after being pressurized, and this also covers the towel. In addition, the washing water may be added to the detergent in pure water or tap water. The dissolving portion of the present invention is a method for dissolving oxygen and gas in the washing water at a high concentration. The dissolving portion is used for dissolving oxygen reading, and the washing water is in the atmosphere, water, water, and reading. It may be dropped or sprayed in a shower, and then dissolved in contact with oxygen and nitrogen in the atmosphere. The flow rate (the average flow rate at which the flow rate fluctuates) of the washing water flowing into the narrow region of the present invention and having a high concentration of dissolved oxygen and nitrogen is 15 to 6 cm/min, preferably -6 cm/min. Due to the slow flow rate, the oxygen and nitrogen in the narrow water zone _ the washing water are in the narrow area, which is decomposed and consumed by the ultrasonic vibration image 8/ 18 201114506, so if the $right narrow The clean water flow of oxygen and nitrogen in the area is narrow and acidic. The regenerated hydrogen peroxide and nitric acid produce new peroxidized mice and the nitrates flow out and become low, losing the π-chemical reaction of washing = scatter, m-section only the other side, the resulting hollow heart is also " Therefore, the new washing water that needs to be continuously sourced. The hydrogen peroxide and nitric acid and the void state generated by the μ-combination/speed-speed will be narrow to the outside of the domain, resulting in a decrease in the cleaning and sterilizing power. lGGem / min | & surrounding 'adjustable face to improve washing and killing power' The flow rate is preferably 2 〇 ~ 6 〇 cm / min., Ben, Ming supply wash tank full wash water The flow rate ratio into the narrow region is lower than the ratio at which the dissolved concentration rises in the dissolved portion, so that when the washed water decomposes the lost oxygen and nitrogen through the narrow region, it can be recovered in the dissolved portion and can be continuously彳 帛 帛 帛 敎 敎 敎 敎 敎 敎 敎 敎 敎 敎 敎 敎 敎 敎 敎 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 The relative super-wave vibration gain and power of the sonic vibration is as long as the following Formula 1, preferably inequality 2, removes the hard-to-remove deposits such as fingerprints and grease on the surface of the object to be washed in a short time. The unit is cm, sec, watt. Therefore, it is known (Wt/(v*s)) The value of the flow rate V is as small as possible, the slower (small) is, the above the flow rate range and the total ultrasonic power will be at the appropriate value 'The following inequalities 1, 2 are also appropriate values. (Formula 1) " Inequality l : 0.67 < (Wt / (v * S)) <13.3 Inequality 2: l.l < (Wt / (v * S)) <10.0 In addition, in the above inequality, (Wt / (v *) The 値 of S)) is set to (Wt/q2). The values of v and s are unclear or difficult to measure, and the flow rate can be lightly 9/18 201114506. It is easy to measure or easy to calculate. 'Wt/(v *s)) Change to (wt/q2). In addition, 'set the split ratio k to k^/h+q^WQ, then q2=k*Q, so you can also (Wt/(v*S) ) (Wt / (k * QX). Inequality, 2 can be replaced by the following formula 2. (Formula 2) Inequality 3: 0.67 < (Wt / (k * Q)) <13.3 Inequality 4: l .l<(Wt/(k*Q))<l〇.〇k=q2/Q=Split ratio Further, the flow rate of oxygen and nitrogen dissolved in a high concentration is supplied to the washing water in the washing tank. Regarded as Q, will pass The flow rate of the washing water in the narrow area is regarded as qz, and the flow rate that is not directly discharged through the narrow area is regarded as the ratio of the oxygen and nitrogen in the valley solution, and the ratio of the lower rise is regarded as 丫, then The concentration β before the opening falls is formed by the decomposition of oxygen and nitrogen in the narrow region to form o^qAqfq2), so the ratio value γ of the dissolved portion will rise, and the ratio value γ is larger than the flow rate of the washing water flowing into the narrow region. The flow rate of the washing water that does not flow in, the split ratio of the two (seven/medium), therefore, the concentration δ of the washing water passing through the dissolved portion is (β + γβ), and the ratio of the concentration rise is the value of helium & (1) Smaller than the split ratio (qs/qO value, as the following formula, the concentration δ will be greater than the degree of supply (X. (Formula 3) q2/qi<Y · δ=β+γ(3=β( 1 +γ)=α * q, * (i +y)/(q! +q2) δ>α * q! * ( 1 +q2/qi )/(q, +q2)=a 6>a Thus, the ratio value γ due to the increase in the concentration of the dissolved portion is larger than the split ratio (or the split ratio is increased to the concentration of the dissolved portion) Since the ratio value γ 10/18 201114506 is small, the concentration of oxygen and nitrogen supplied to the washing water in the washing tank can be maintained at a constant concentration, and continuous sterilization can be carried out for a long period of time. At these concentrations, the ultrasonic oscillator will be repeatedly circulated without being operated, so that a certain concentration can be achieved. The present invention will be specifically described based on the embodiments and the drawings. Fig. 7 is used for the ultrasonic cleaning device T of the embodiment. 2 to 4 are explanatory views showing the flow of the washing water, the concentration of dissolved oxygen and nitrogen, and the flow rate in the embodiment. In the figure, 1 is a water tank, and 1 a is a top left and right of the water tank. The through port of the side opening conveyor belt 3, 2 is a washing tank, and 2a is a drain port formed by opening the left and right sides of the washing tank. 2b is a discharge portion that ejects washing water from a slender crack in a water film shape, 2c is the temporary water storage part of the washing water, 3 is a conveyor belt that passes the water under the slat Conveyor, 4 is a distance above 1 〇cm interval - ultrasonic oscillation for each lOO watt (watt) The device is a vibrating surface, 5 is a pump, 6 is a supply pipe for washing water, and 7 is a narrow region in a vibrating surface opposite to the ultrasonic vibrator 4, and has a height of 1 〇 cm and a length of about 4 〇. Coffee, width 3 〇 coffee: space, 8 is the upper and lower - opposite baffle, which controls the flow of water and the inflow speed, ^ part of the water flow in the water film from the ejection portion 2b along the inside of the groove opening ^ ^ 'avoid flow In the narrow areas 7 and 9 of the human water, the washing water of the water tank is removed from the debris removal unit before entering the water supply. A. The semiconductor substrate of the washing material, the W horse washing water, and Wa are water curtains. 超 1 case of ultrasonic waves As shown in the figure, the cleaning device is equipped with a cleaning tank 2 inside the water inlet opening, and the water supply tank 2 and the front side of the washing tank 2 are provided with a h' opening 23' before and after passing through the Π la, the opening 2a and The water supply opening 2 is connected to the 7J1 tank 1 to store the washing water w. * The cleaning tank 2 is about 2, and the upper position is the silk department 2b, which has a downward direction and is called a micro direction 11/18 201114506. = spray, the crack of 6 〇cm long and 5 mm wide, to form the water curtain of the washing water w: the inside of the groove of the open 。 。. In the washing tank 2, the ultrasonic stitcher is placed at a distance of 1 〇 4. The vibrating surface is opposed to each other under the water surface, and the pump 5 and the supply tube 6 are supplied, and the pump 5 supplies the sink water to the spout portion 2b. The water storage capacity of the water tank 1 is 100~ The volume of 300 liters, the cleaning tank 2 is 30 60 liters, and the water supply capacity of the pump 4 is 300 to 1000 liters/minute. Each of the ultrasonic oscillators 4 is 1 watt, and the frequency is replaced at 25 kHz. 4 kHz. 12 kHz. In this embodiment, the pump is operated in the water tank i, and stored in the water tank i and dried and/or stored in the 'degree of time; the valley oxygen and gas washing water w will be transported through the supply pipe 6 to the washing tank 2 . In the cleaning tank 2, after the washing water conveyed by the supply pipe 6 is stored in the temporary water storage unit 2c, the slit-shaped discharge port will have a high speed of 5 mm and a discharge speed of 6 cm. Squirting water curtain. The water curtain Wa of the discharge portion 2b is like the opening 2a of the cleaning tank 2, and the washing water in the washing tank 2 is prevented from being discharged in a large amount from the opening 2a, and the water surface is higher than the opening 2a to maintain the water surface height. The water flow of the water curtain Wa is discharged from the opening 2a by the upper and lower pair of baffles 8, and most of them (about 9 〇 0 / 〇) are retained between the support plate 8 and the inner surface of the groove. In the water curtain Wa, about 10% of the water will flow in a relative form from the gaps of the upper and lower baffles 8 to the left and right sides, and flow into the narrow region 7 between the ultrasonic oscillators 4. This inflow speed is drastically reduced by 50 cm per minute. The narrow area is 10 cm high, 30 cm wide, and long (left and right) about 40 cm, and the volume L in this field is 12 liters. It is sprayed in the form of a water curtain, and a part of the washing water which dissolves oxygen and nitrogen at a high concentration enters the narrow area 7 in a left-right relative form, and then exits from the area of 12/18 201114506. This state is shown in Fig. 3. The vertical and/or clawed in, the oxygen and nitrogen in the washing water of the sputum area 7 are decomposed by the strong ultrasonic vibration of the upper and lower super ρ skin cover ϋ 4, and immediately become the oxygen peroxide and the nitrate. In terms of 'the oxygen and the mouse' of the washing water flowing out of the narrow (10) domain 7, the concentration is close to that of 〇. The washing water that flows out is combined with the washing Jc (, spoon %/〇) in the narrow area of the unflowed person. The flow is discharged from the opening 2a to the outside of the tank, and the washing water is dropped from the opening 2a to the lower side by the water film and the water vein, and is collected and stored by the water tank. When the water falls in the water film or the water vein, it is in the atmosphere. Oxygen and gas contact 'this (four) body will be dissolved in the washing water towel to increase the concentration. Thus, in the embodiment, the dissolved portion of the present invention is closed by the cleaning tank & and disposed under the opening (four) The simple structure of the water tank is formed. Then, the dissolved concentration of these gases falls-time, and the concentration of 15% can be extracted. The ratio γ of the concentration increase is about 。15. The supply amount of the washing water from the left and right discharge portions 2b is about 3 liters per minute' and the amount of washing water in the narrow region 7 is about 30 liters per minute. 10% of the washing water. Therefore, it was found that the washing water flowing into the narrow area 7 is subjected to the upper and lower ultrasonic vibrators 4 of the shouting (watts) of 10 cm each, and the powerful supersonic oil generated in the area is generated. The effect is that the oxygen and nitrogen of the water towel are decomposed by the following formula to produce hydrogen peroxide and (tetra) acid, etc. to exhibit high detergency including high deoiling and voiding state. [Chemical 1] η2ο-η· +οη· Ν2-^2Ν· 02—20· 0·+Η20·—Η2〇2 13/18 201114506
Ν·+0·—>NO Ν0+0·—Ν02 οη·+νο2^ην〇3 本實施例中，通過(流入)狭窄區域7之流量及未通過(未 流入)之流量的分流比率(q2/qi)約0.1，狹窄區域7的容積L 為12公升，來自左右之狹窄區域7的洗淨水，其流入面積 S約30cmxl0cmx2=600cm2，流入速度為50cm/分，超音波 振盡器的總輸出為2000watt(瓦）’因此’（Wt/(v*S))的值為 4.0，且(Wt/q2)、（Wt/(k*Q))皆為 4.0。 狹窄區域7之洗淨水的流入速度，以每分鐘15〜l〇〇cm 為貫用’以每分鐘20〜60cm最佳。一旦低於下限值，則以 尚濃度溶存氧及氮之洗淨水的流入量就會不足、過氧化氯 及硝酸的產生量少，導致洗淨殺菌力變差。一旦高於上限 值，產生的過氧化氫及硝酸、空洞狀態就會流出消失，最 後導致洗淨殺菌效果變差。 此外，亦會影響超音波振盪器的總電力Wt，已知 (Wt/(v*S))的值在〇.67〜13.3的範圍最實用，以u〜1〇 〇的 範圍最佳。 戈口此一采，在狹窄區域 度王难刀荦化學反應的狀 下，使輸送帶3運作，輸送帶3藉由接水槽1將被洗淨彩 通過洗淨槽2的開σ 2a ’送至洗淨槽2 _洗淨水中， -定速度通過狹窄區域7。這樣就能利㈣水集中於狹窄 ，產生之強力超音波振動、空洞狀g及過氧化氫水、硝 导，將被洗淨物A強力洗淨殺菌。 將洗淨水混人LuminGl發歧，狹窄區域將因Ν·+0·->NO Ν0+0·-Ν02 οη·+νο2^ην〇3 In the present embodiment, the flow rate through (inflow) in the narrow region 7 and the flow rate in which the flow rate does not pass (not flowed in) Q2/qi) about 0.1, the volume L of the narrow region 7 is 12 liters, and the washing water from the narrow region 7 on the left and right sides has an inflow area S of about 30 cm x 10 cm x 2 = 600 cm 2 and an inflow velocity of 50 cm / min. The total output is 2000 watts (watts) 'so the value of 'Wt/(v*S)) is 4.0, and (Wt/q2) and (Wt/(k*Q)) are both 4.0. The inflow velocity of the washing water in the narrow region 7 is preferably 15 to 1 cm per minute, and is preferably 20 to 60 cm per minute. When it is less than the lower limit, the inflow amount of the washing water in which oxygen and nitrogen are dissolved at a sufficient concentration is insufficient, and the amount of generation of chlorine peroxide and nitric acid is small, resulting in deterioration of the washing and sterilizing power. When it is higher than the upper limit, the generated hydrogen peroxide, nitric acid, and void state will disappear and eventually cause the cleaning and sterilization effect to deteriorate. In addition, it also affects the total power Wt of the ultrasonic oscillator. It is known that the value of (Wt/(v*S)) is most practical in the range of 67.67 to 13.3, and the range of u~1〇 最佳 is the best. In this case, in the narrow area, under the condition of the chemical reaction of the king, the conveyor belt 3 is operated, and the conveyor belt 3 is washed by the water tank 1 through the opening σ 2a of the washing tank 2 To the washing tank 2 _ washing water, - the constant speed passes through the narrow area 7. In this way, the water can be concentrated in the narrowness, and the strong ultrasonic vibration, the hollow shape g, the hydrogen peroxide water, and the nitrate guide are generated, and the washed object A is strongly washed and sterilized. The washing water is mixed with LuminGl, and the narrow area will be
Lumii 14/18 201114506 生藍白光，藉此目測觀察狹窄區域產生的 強力琴化子巧。本實施例中’可目測到整個狹窄區域皆 出現強大的監白光’―旦上方的超音波振盪器運作停止， =情況就只剩超音波振助下㈣在運作的部份，且會 丹有 既右立 曰中儲存洗淨水，給予超音波振動之 ^有批w超4洗淨器，及本實施例巾 置，清洗蓋子或塗有牛血之醫療用顯示裝置時，既有= iff!器需90〜12”，方能將血潰等污垢完全洗 醫療用顯示裝置完全洗淨。 』竹 產業上使用可能 本發:的技術可用於⑯電子零件•機械加工品•醫療器 、3、硬帶•假牙等附著之污垢、油潰等洗淨殺菌。此 ，y將起g波振盪器左右相對配置，將房間的空氣形 、彳政氣心彳文下方送到該振盪器之間，作為洗淨殺菌的 空氣清淨用。 有關本發明係根據特定的實施形態記載，然業者亦可 不跳脫本發明申請專利範圍及思維之範㈣，進行各種 變更、修正。 【圖式簡單說明】 圖1係貫施例超音波洗淨裝置的說明圖。 圖2係表不實施例供給之洗淨水分流狀態的說明圖。 圖3係表不實施例之洗淨水於狹窄區域的流入及流出 狀態說明圖。 圖4係表示洗淨水中溶存氧•氮的濃度變動說明圖。 201114506 【主要元件符號說明】 1.. .接水槽 la...通過口 2.. .洗淨槽 2a...開口 2b...喷出部 2c...暫時儲水部 3.. .輸送帶 4.. .超音波振盪器 5.. .幫浦 6.. .供給管 7.. .狹窄區域 8.. .擋板 9.. .雜物去除部 A...被洗淨物 W...洗淨水 Wa...水幕 16/18Lumii 14/18 201114506 produces blue and white light, which is used to visually observe the powerful violinization produced in the narrow area. In this embodiment, 'a strong white light can be visually detected in the entire narrow area'. The ultrasonic oscillator above the operation stops, and the situation is only the ultrasonic vibration (4) in the operation part, and there will be When the washing water is stored in the right vertical sill, the ultrasonic vibration is given, and the medical device display device of the present embodiment is cleaned or covered with bovine blood, both = iff It takes 90~12" to completely clean the medical display device, such as blood ulcers. The bamboo industry can use the technology: 16 electronic parts, mechanical products, medical devices, 3 , hard belts, dentures, etc., such as dirt, oil, etc., which are cleaned and sterilized. This, y will be placed from the left and right sides of the g-wave oscillator, and the air shape of the room will be sent to the oscillator. The present invention is described in terms of a specific embodiment, and the present invention may be modified or modified without departing from the scope of the invention and the scope of the invention (4). Figure 1 is a consistent example Fig. 2 is an explanatory view showing a state of the flow of the washed water supplied in the embodiment. Fig. 3 is an explanatory view showing the state of the inflow and outflow of the washing water in the narrow region of the embodiment. This is a diagram showing the change in the concentration of dissolved oxygen and nitrogen in the washing water. 201114506 [Explanation of main component symbols] 1.. Sink sink... Passing port 2.. Cleaning tank 2a... Opening 2b... Discharge unit 2c... temporary water storage unit 3.. conveyor belt 4... ultrasonic oscillator 5... pump 6.. supply tube 7.. narrow area 8.. .. .Milk removal part A...Washed material W...Washing water Wa...Water curtain 16/18