201111056 六、發明說明： 【發明所屬之技術領域】 本發明係關於用於塗佈機之顆粒移除裝置。 【先前技術】 液晶是結晶固體與等向性液體間的中間相，並結合了晶 體結構與變形流體的某些特性。液晶顯示器(lcd)利用液晶 的流體性與結晶特性相關的非等向性。液晶顯示器應用於手 鲁機、可攜式電腦、桌上型監視器、以及LCD電視。 液晶顯示器& TFT陣列基板、彩色濾光片車列基板、 以及液晶層所構成。TFT陣列基板及彩色渡W陣列基板以 膠圖案彼此附接，而液晶層夾設於TFT陣列基板及彩色濾 光片陣列基板之間。藉由控制施加於各像素之液晶層的 壓，可容許不同量的光通過，藉此產生影像。 液晶顯不器的製造簡要說明如下。複數TFT陣列形成 • 於一個基板上。複數彩色渡光片陣列形成於另-基板上。膠 圖案形成於這兩個基板任一者上。膠圖案具有四條直線及四 個90度轉角。液晶以液滴形式排到基板上膠圖案所界定的 區域。這兩個基板結合成母基板。此時，膠圖案作為黏著劑。 母基板切割成離散的LCD面板。 密封劑塗佈機塗佈膠，以形成預定圖案於基板上。液晶 (L C)塗佈機以液滴形式塗佈液晶於基板上由預定圖案所界 定的區域。 201111056 圖1為液晶塗佈機之透視圖。此塗佈機包含框架100、 平台200、一對第一導引單元300、塗佈頭單元支撐框4〇〇、 第一驅動單元500、第二導引單元6〇〇、塗佈頭單元7〇〇、 以及第二驅動單元800。 平台200提供於框架1〇〇上。平台2〇〇可以能直線移動 的方式，提供於框架100上。於此狀況下，驅動平台2〇〇之 驅動單元(未顯示)提供於框架1〇〇上。 兩個第一導引單元300以可使平台2〇〇定位於這兩個第 一導引單元300之間的方式，提供於框架1〇〇上。 塗佈頭單元支撐框400包含兩個垂直部41〇以及水平部 420。兩個垂直部410彼此定位成相距預定距離，而水平部 420連接於垂直部410的兩個上部之間。垂直部41〇的 分別連接到第一導引單元300。 ° 第一驅動單元500移動塗佈頭單元支撐框4〇〇。塗佈碩 單元支撐框400沿第一導引單元300直線移動。 第二導引單元600提供於塗佈頭單元支撐框4〇〇之水 部420之—側。 塗佈頭單元700連接到第二導引單元6〇〇。 201111056 第二驅動單元800驅動，佈頭單元700。塗伟頭單元700 沿第二導引單元600直線移動。 塗佈頭單元支撐框4〇〇移動於γ方向，而塗佈頭單元 700移動於X方向。塗佈頭單元7〇〇包含喷嘴(未顯示）。 現在描述液晶塗佈機的操作。 機械手臂（未顯示)提升、移動基板G，並將基板〇放下 到平台200上。基板g被吸在平台2〇〇之上側。 控制單το(未顯示)控制第一驅動單元5〇〇及第二驅動單 元800的，動。在液晶塗佈機操作前，第一驅動單元5〇〇及 第-驅動單元_要遵躺路徑資料，輸人於控制單元。當 移動時頭單7GG透過喷嘴，以液滴形式塗佈液晶於 基板G上。 …當驅，塗佈頭單元700時，可能自第一驅動單元5〇〇及201111056 VI. Description of the Invention: [Technical Field to Which the Invention Is Ascribed] The present invention relates to a particle removing device for a coater. [Prior Art] Liquid crystal is an intermediate phase between a crystalline solid and an isotropic liquid, and combines some characteristics of a crystal structure and a deformed fluid. Liquid crystal displays (lcd) utilize the anisotropy associated with the fluidity and crystallization characteristics of liquid crystals. LCD monitors are used in hand-held computers, portable computers, desktop monitors, and LCD TVs. The liquid crystal display & TFT array substrate, color filter train substrate, and liquid crystal layer are comprised. The TFT array substrate and the color W array substrate are attached to each other in a glue pattern, and the liquid crystal layer is interposed between the TFT array substrate and the color filter array substrate. By controlling the pressure applied to the liquid crystal layer of each pixel, a different amount of light can be allowed to pass, thereby generating an image. A brief description of the manufacture of the liquid crystal display is as follows. A plurality of TFT arrays are formed on one substrate. A plurality of color aperture arrays are formed on the other substrate. A glue pattern is formed on either of the two substrates. The glue pattern has four straight lines and four 90 degree corners. The liquid crystal is discharged in the form of droplets to the area defined by the substrate sizing pattern. The two substrates are combined into a mother substrate. At this time, the glue pattern acts as an adhesive. The mother substrate is cut into discrete LCD panels. The sealant coater coats the glue to form a predetermined pattern on the substrate. The liquid crystal (L C) coater coats the liquid crystal on the substrate in a region defined by a predetermined pattern on the substrate. 201111056 Figure 1 is a perspective view of a liquid crystal coater. The coater comprises a frame 100, a platform 200, a pair of first guiding units 300, a coating head unit support frame 4, a first driving unit 500, a second guiding unit 6A, and a coating head unit 7. And a second driving unit 800. The platform 200 is provided on the frame 1〇〇. The platform 2〇〇 can be provided on the frame 100 in a linear manner. In this case, a drive unit (not shown) of the drive platform 2 is provided on the frame 1A. The two first guiding units 300 are provided on the frame 1 in such a manner that the platform 2 is positioned between the two first guiding units 300. The coating head unit support frame 400 includes two vertical portions 41A and a horizontal portion 420. The two vertical portions 410 are positioned at a predetermined distance from each other, and the horizontal portion 420 is coupled between the two upper portions of the vertical portion 410. The vertical portions 41A are connected to the first guiding unit 300, respectively. ° The first driving unit 500 moves the coating head unit support frame 4A. The coated unit support frame 400 moves linearly along the first guiding unit 300. The second guiding unit 600 is provided on the side of the water portion 420 of the coating head unit support frame 4''. The coating head unit 700 is connected to the second guiding unit 6A. 201111056 The second drive unit 800 drives the cloth head unit 700. The Tuwei head unit 700 moves linearly along the second guiding unit 600. The coating head unit support frame 4 is moved in the γ direction, and the coating head unit 700 is moved in the X direction. The coating head unit 7A includes a nozzle (not shown). The operation of the liquid crystal coater will now be described. A robot arm (not shown) lifts, moves, and lowers the substrate G onto the platform 200. The substrate g is sucked on the upper side of the stage 2〇〇. The control unit το (not shown) controls the movement of the first drive unit 5 〇〇 and the second drive unit 800. Before the liquid crystal coating machine is operated, the first driving unit 5 and the first driving unit _ are to follow the path data and input to the control unit. When moving, the head sheet 7GG passes through the nozzle to apply liquid crystal on the substrate G in the form of droplets. When the head unit 700 is coated, it may be from the first driving unit 5
第二驅動單元_產生獅。祕落到平台及基板G 上’以及在平#雇周圍崎。齡可能造成製造的lcd 面板有缺陷。 【發明内容】 因此，本發明目的在於移除在塗佈機平台上及裝設於平 台之基板上的顆粒。 本發明之另一目 的在於移除在塗佈機平台周圍漂浮的 201111056 顆粒 裝二用於塗佈機之顆粒移除 及磁體構件趣:二於以 根據本發明另一方面，提供一 裝置，包含提供於塗麵單元讀框上之料單 引單元之齡；提供於基件上之顧支 接 =用以吸引顆粒之磁體構件;以及上/下移= 根據本發明又-方面’提供—觀於塗佈機 裝置’包含提供於塗佈頭單元支撐框上之導引單元丨遠示 引單兀之餅；提供於基件上之兩個磁體支托構件 導 引顆粒之磁體構件，其兩端分別連接兩個磁體支托 '吸 ^移動基件之驅動單元；以及自磁麟件清除顆粒之清= 清潔單Tt可包含㈣單元，提供於基件；清潔構件 接導引單元，用以覆蓋磁體構件；以及清潔構件驅 用以移動清潔構件。 70 ’ 下 清潔構件可更包含顆粒收集構件，顆粒自清潔構件茨 到其上。 ° 201111056 本發明前述及其他目的、特徵、觀點、以及優點，參考 以下詳細並配合伴隨賦，將更加清楚了解。- 【實施方式】 ,參考伴隨圖式，詳細說明本發明顆粒移除裝置之實施 圖2、為裝配有本發明第一實施例之顆粒移除裝置之塗 佈機之透棚。圖3為第-實施例之顆粒移除裝置之前視 圖。圖4為第—實施例之顆粒移除裝置之側視圖。 參考圖2、圖3、及圖4，現將說明根據本發明第一實 施例之顆粒移除裝置。 平台200提供於框架100上。兩個第一導引單元3〇〇以 :使平台200定位於這兩個第一導引單元3〇〇之間的方式， 提供於框架100上。第一導引單元3〇〇包含導軌31〇及滑塊 _ 320’滑塊320以能沿著導軌31〇滑動的方式連接導軌31〇。 導執310及框架100可具有相同的長度。平台2〇〇定位於兩 個第一導引單元300之間。 。第一導引單元3〇〇連接塗佈頭單元支撐框4〇〇。塗佈頭 單元支撐框400包含兩個垂直部41〇以及水平部42〇。兩個 垂直部410彼此定位成相距預定距離，而水平部42〇連接於 垂直部410的兩個上部之間。垂直部41〇的端部分別連接到 第—導引單元300之滑塊320。當從上觀之，塗佈頭單元支 201111056 撐框400之水平部420橫越平台200及第一導引單元3〇〇之 導轨310上方。 · - 叫第一驅動單元500_移動塗佈頭單元支撐框4〇〇。第一驅 動單元5〇〇可為線性馬達。線性馬達包含定子及移動部。線 ί馬Ϊ之定子安裝於框架議，而線性馬達之移動部連接塗 佈頭早70支撐框400或第一導引單元300之滑塊32〇。The second drive unit _ produces a lion. The secret falls on the platform and the substrate G. Age may cause defects in the manufactured LCD panel. SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to remove particles on a coater platform and on a substrate mounted on a platform. Another object of the present invention is to remove the 201111056 particle package floating around the coater platform for particle removal and magnet assembly for the coater: in order to provide a device according to another aspect of the present invention, The age of the billing unit provided on the reading unit of the coating unit; the support provided on the base member = the magnet member for attracting the particles; and the up/down shift = according to the invention The coating machine device comprises: a guiding unit provided on the support frame of the coating head unit; the cake of the remote guiding unit; the two magnet supporting members provided on the base member guide the magnetic member of the particle, two of The ends are respectively connected to the two magnet holders to drive the driving unit of the moving base member; and the clearing of the particles from the magnetic lining member = the cleaning single Tt may comprise (4) units provided to the base member; the cleaning member is connected to the guiding unit for Covering the magnet member; and the cleaning member is driven to move the cleaning member. The 70' lower cleaning member may further comprise a particle collecting member onto which the particles are self-cleaning. The above and other objects, features, aspects and advantages of the present invention will become more apparent from [Embodiment] The embodiment of the particle removing device of the present invention will be described in detail with reference to the accompanying drawings. Fig. 2 is a perspective view of a coating machine equipped with the particle removing device of the first embodiment of the present invention. Fig. 3 is a front view of the particle removing device of the first embodiment. Figure 4 is a side elevational view of the particle removal apparatus of the first embodiment. Referring to Figures 2, 3, and 4, a particle removal apparatus according to a first embodiment of the present invention will now be described. The platform 200 is provided on the frame 100. The two first guiding units 3 are provided on the frame 100 in such a manner that the platform 200 is positioned between the two first guiding units 3A. The first guiding unit 3 includes a guide rail 31 and a slider _ 320' slider 320 to connect the rail 31 方式 so as to be slidable along the rail 31 . The guide 310 and the frame 100 can have the same length. The platform 2 is positioned between the two first guiding units 300. . The first guiding unit 3 is connected to the coating head unit support frame 4A. The coating head unit support frame 400 includes two vertical portions 41A and a horizontal portion 42A. The two vertical portions 410 are positioned at a predetermined distance from each other, and the horizontal portion 42 is coupled between the two upper portions of the vertical portion 410. The ends of the vertical portions 41A are respectively connected to the sliders 320 of the first guiding unit 300. When viewed from above, the horizontal portion 420 of the coating head unit branch 201111056 struts 400 traverses the platform 200 and the guide rail 310 of the first guiding unit 3A. - Call the first drive unit 500_ to move the coating head unit support frame 4〇〇. The first drive unit 5A can be a linear motor. The linear motor includes a stator and a moving portion. The stator of the line ί horse is mounted on the frame, and the moving portion of the linear motor is connected to the coating head 400 or the slider 32 of the first guiding unit 300.
第-驅動單70 500可包含馬達及滾珠螺桿組件。 部J =單元_提供於塗佈頭單元地之水平 一 疋·雜到第二導引單元_。塗佈頭 ίί- 80:t噴嘴(未顯示)。移動塗佈頭單元700之第-驅 ^早凡_，提供於塗佈頭單元支擇框400之水平部^^ 第一驅動單疋800可為線性馬達。 7〇〇移動框彻移動於Υ方向’而塗佈頭單元 支撐實關之顆粒移除打提供於塗佈頭單元 支牙杧400的—側。第—實施例 、早凡 元分顺崎崎姆塗佈頭單 貝％例之顆粒移除裝置包含兩個磁體支托構件9川 201111056 以及用以吸引顆粒的磁體構件92〇。 兩個磁體支粍構件910固定於塗佈頭單元支撐框4〇〇， •使兩個磁體支托構件91〇定位成彼此相距預定距離。-個磁 ，支托構件910固定地連接塗佈頭單元支撐框働之一垂直 ^ 410的側。另一個磁體支托構件91〇固定地連接塗佈頭 單元支樓框400之另一個垂直部41〇的一側。兩個磁體支托 構件可提供於塗佈頭單元支撐框楊之水平部42〇上。 構件?2::: 920具有預定長度以及一致的截面形狀。磁體 SI :!面為圓形。磁體構件920的截面可為四邊形、 月^ ^角形。磁體構件920的戴面不限於這些形狀。 ㈣構件92G的—端連接—個磁體支托構件910，而磁 體構件㈣的另-端連接另-個磁體支托構 —端體f托構件910於表面具有穿孔。磁體構件92。沾 一碥插入一個磁體支托構 〇 霉牛920的 :::插入另一個磁體支托構件91。的穿孔。各=20的 磁體的-端可插 丹丨的凹槽’而磁 ,L, 另一個磁體支托構件910的凹槽。20的另1可插入 磁體支托構件910可為一個「 9】0可為三個(3)。 者，磁體支托構件 201111056 磁體支托構件910及磁體構件92〇 托構件9K)及麵構件㈣彼此連接的方^ 的組態，可以磁體支 變化 _構件920間最短的距離可為3删至 A根據本發0$ $二實施例之顆 圖。圖6為第二實施例之顆粒移除裂置之側視^置The first drive unit 70 500 can include a motor and a ball screw assembly. The part J = unit_ is provided at the level of the coating head unit, and is mixed with the second guiding unit _. Coating head ίί- 80:t nozzle (not shown). The first drive unit 800 of the coating head unit selection frame 400 can be a linear motor. 7〇〇 The moving frame is moved completely in the Υ direction ′ while the coating head unit supports the solid granule removal provided on the side of the coating head unit gingival 400. The first embodiment, the particle removal device of the example of the first embodiment of the present invention comprises two magnet support members 911011056 and a magnet member 92〇 for attracting particles. Two magnet support members 910 are fixed to the coating head unit support frame 4, and the two magnet support members 91 are positioned at a predetermined distance from each other. A magnetic, support member 910 is fixedly coupled to one of the sides of the coating head unit support frame 垂直 vertical ^ 410. Another magnet holder member 91 is fixedly coupled to one side of the other vertical portion 41 of the coat head unit frame 400. Two magnet holder members may be provided on the horizontal portion 42 of the coating head unit support frame. The members ?2::: 920 have a predetermined length and a uniform cross-sectional shape. The magnet SI :! face is round. The cross section of the magnet member 920 may be a quadrangle or a moon. The wearing surface of the magnet member 920 is not limited to these shapes. (4) The end of the member 92G is connected to the magnet supporting member 910, and the other end of the magnetic member (4) is connected to the other magnet supporting member. The end portion f of the member 910 has perforations on the surface. Magnet member 92. Inserting a magnet holder 〇 Mold 920 ::: Inserting another magnet holder member 91. Perforation. The end of each magnet of = 20 can be inserted into the groove of the tantalum and magnetically, L, the groove of the other magnet supporting member 910. The other one of the insertable magnet supporting members 910 of 20 may be one "9" 0 may be three (3). The magnet supporting member 201111056 the magnet supporting member 910 and the magnet member 92 supporting member 9K) and the surface member (4) The configuration of the squares connected to each other can be changed by the magnet branch. The shortest distance between the members 920 can be 3 to A. According to the embodiment of the present invention, the particle is shifted according to the embodiment of the present invention. Side view
徂於^圖5及圖6所不’類似於第—實施例，第二實施例提 供於塗佈頭單元支撐框400之一側。 驶士第二實施例包含垂直方向導引單元930、基件940、墙 支托構件910、磁體920、以及驅動單元95〇。 垂直方向V引單元930提供於塗佈頭單元支撐框4⑻的 :側:垂直方向導引單元930可為兩個(2)。這兩個垂直方向 導引f元930以彼此定位成相距預定距離的方式，提供於塗 佈頭單凡支撐框400。垂直方向導引單元93〇包含導軌931 及β塊932 ’滑塊932以能沿著導軌931滑動的方式連接導 執931。導轨931以直立位置連接塗佈頭單元支撐框4〇〇的 一側。 基件940連接垂直方向導引單元93(^基件940可為板 件形式。基件940可具有一致的厚度。基件94〇連接垂直方 向導引單元930的滑塊932。 201111056 磁體支托構件9i〇可a雨個门、、丄 . 9丨_地提供於基件二為=)體件 且右箱構件920吸引顆粒。磁體構件920 八有預疋長度與—絲面形狀。磁 形。磁體構件920的截面可為四心的截面為圓 磁體構㈣的截面截不:=、。_形、以及六心5 and 6 are similar to the first embodiment, and the second embodiment is provided on one side of the coating head unit support frame 400. The second embodiment of the driver includes a vertical direction guiding unit 930, a base member 940, a wall bracket member 910, a magnet 920, and a driving unit 95A. The vertical direction V lead unit 930 is provided on the coating head unit support frame 4 (8): side: the vertical direction guiding unit 930 may be two (2). The two vertical guiding guide elements 930 are provided to the coating head single support frame 400 in such a manner as to be positioned at a predetermined distance from each other. The vertical direction guiding unit 93A includes a guide rail 931 and a beta block 932' slider 932 to connect the guide 931 so as to be slidable along the guide rail 931. The guide rail 931 is connected to one side of the coating head unit support frame 4'' in an upright position. The base member 940 is connected to the vertical direction guiding unit 93. The base member 940 may be in the form of a plate. The base member 940 may have a uniform thickness. The base member 94 is connected to the slider 932 of the vertical direction guiding unit 930. 201111056 Magnet support The member 9i can be rained, the door is provided on the base member 2 as the body member and the right box member 920 attracts the particles. The magnet member 920 has a pre-twisted length and a silk-face shape. Magnetic shape. The cross section of the magnet member 920 may be a quadruple cross section of the circular magnet structure (4). _ shape, and six hearts
μ 910 * ^ π乃鳊連接另一個磁體支托構件910。 -端=體ii構件910於表面具有穿孔。磁體構件920的 另一_ 體支托構件910的穿孔，而磁體構件920的 件個磁體支托構件910的穿孔。各磁體支托構 磁轉*/可具有凹槽。磁體構件920的一端可插入一個 另910的凹槽，而磁體構件920的另一端可插人 另一個磁體支托構件910的凹槽。 紅槐^體支域件91G及磁體構件92G的組態，可以磁體支 托構件91G及磁體構件92()彼此連接的方式變化。 爸#驅^單元95G上/下移動基件940。驅動單元950提供於 單元支撐框_的—侧。驅動單元連接基件940。 °單元95〇可為氣動缸(Pneumatic cylinder)、滾珠螺桿組 件、或線性馬達。 201111056 圖7為根據本發明第三實施例之顆粒移除裝置之前視 圖。圖8為第三實施例之顆粒移除裝置之側視圖。〜· 如圖7及圖8所示，類似於第一實施例，第三實施例提 供於塗佈頭單元支撐框4〇〇之一側。 第二實施例包含垂直方向導引單元93〇、基件94〇、磁 體支托構件910、磁體920、驅動單元950、以及清潔單元。 第實細*例具有與第二實施例相同的垂直方向導引單 元930、基件940、磁體支托構件91〇、磁體92〇、驅動單元 950。因此，不再詳細說明垂直方向導引單元93〇、基件94〇、 磁體支托構件910、磁體920、驅動單元950。 清潔單元自磁體構件920清除顆粒。清潔單元包含水平 方向導引單元960、清潔構件970、以及清潔構件驅動單元 980 〇 水平方向導引單元960包含導軌961以及可滑動地連接 導執961之滑塊962。導執961水平地結合基件94〇，而使 導執961可定位於基件94〇之上部。 /月办單元970覆蓋磁體構件920。清潔構件970連接水 平方向導引單元960之滑塊962。舉例而言，清潔構件97〇 可包含覆盍磁體構件920之清潔部971，以及連接於清潔部 971與水平導引單元960之間的連接部972。清潔部97丨為 201111056 圓筒形。清潔部971於外表面在長度方向具有縱向開口。縱 向開口沿長度具有通用的寬度。清潔部971的内徑為一致 的。清潔部971的内徑可與磁體構件92〇的外徑相^ 产如 部971的内徑可以不是通用的。如圖9所示，清潔部= 中間區具有相同的内徑，但是清潔部971的各端部區具有不 同的内徑。亦即，清潔部971的端部區的内表面是漸細 所以清潔部971的端部區的内部空間是漏斗形狀。 清潔構件970之連接部972自清潔部97丨之外表面 預定距離。連接部972連接水平方向導引單元_ : 962。 〜/月巩 清動單元980提供於基件94〇上。清潔構件驅 動早疋姻水平直線移動清潔構件謂。清潔構件驅動 980包含固定塊98卜轉動馬達982、以及滾珠螺桿。固 =981目定地連接基件94〇的一側，轉動馬達982提供於 基件940的另一側，而滾珠螺桿983連接轉動馬達％ 達軸與固视98卜清潔構件靖或水平方向導引單元_ 之滑塊962具有螺紋孔。滾珠螺桿983鎖入螺紋孔中。 清潔單元更可包含顆粒收集構件_。當清料 自磁體構件920清除顆粒時，顆粒落到顆粒收集構件2上。 結合=戶件990包含蓋件部，以及 皿件99丨復盍清潔構件97〇的清 5部992自蓋件部州延伸並與連接部972結合。顆粒收^ 201111056 構件，可以可拆卸地附接到清潔構件970。 _ 根據本發明之顆粒移除裝置安裝於塗佈機，其中塗 佈頭單it支撐框刪可移動，而平台細為固定的。根據本 發明之顆_料置可安裝於塗佈頭單元支撐框 400及平 台200皆為可移動的塗佈機。 再假设根據本發明之顆粒移除裝置安裝於液晶塗佈 機根據本發明之顆粒移除裝置可安裝於密封劑塗佈機。 現說明第一實施例之顆粒移除裝置。 機械手臂(未顯示)提升、移動基板G，並將基板G放下 到平台200上。基板G被吸在平台2〇〇之上侧。 第一驅動單元500於γ方向前/後移動塗佈頭單元支撐 框400。塗佈頭單元支撐框400沿第一導引單元300直線移 動。結果提供於塗佈頭單元支撐框働之磁體構件92〇移動 於平台200上方’用以吸引在基板G與平台2〇〇上的顆粒。 一控制單元(未顯示)控制第一驅動單元500及第二驅動單 ，8〇〇的移動。在液晶塗佈機操作前，第一驅動單元5〇〇及 第二驅動單元800要遵循的路徑資料，輸入於控制單元。當 移動時’塗剌單A 7GGit射嘴，以液滴形式塗佈液晶於 基板G上《當第一驅動單元5〇〇及第二驅動單元8〇〇分別 移動塗佈頭單元支撐框40〇及塗佈頭單元700時，產生顆 201111056 所以顆#黏到磁體構件 粒。磁體構件920吸引這些顆粒 920 〇 於根擄本發明第二實施例之顆粒移除装置中， 920與塗佈頭單元支撑框4〇〇 —起移動。磁體構件㈣上/ 下移動。亦即，驅動單元95〇沿垂直方向導引單元93〇 了，基件94〇。當基件_上或下移動’磁體構件92〇亦 上或下銘番f。μ 910 * ^ π is connected to another magnet holder member 910. The end = body ii member 910 has perforations on the surface. The other one of the magnet members 920 is perforated, and the magnet members 920 are perforated by the magnet holder members 910. Each of the magnet holders has a magnetic rotation*/ which may have a groove. One end of the magnet member 920 can be inserted into a groove of the other 910, and the other end of the magnet member 920 can be inserted into the groove of the other magnet holder member 910. The configuration of the red ridge body member 91G and the magnet member 92G may be changed in such a manner that the magnet supporting member 91G and the magnet member 92 () are connected to each other. The dad # drive unit 95G moves the base member 940 up/down. The driving unit 950 is provided on the side of the unit support frame_. The drive unit is coupled to the base member 940. The unit 95〇 can be a pneumatic cylinder, a ball screw assembly, or a linear motor. 201111056 Figure 7 is a front elevational view of a particle removal device in accordance with a third embodiment of the present invention. Figure 8 is a side view of the particle removing device of the third embodiment. As shown in Figs. 7 and 8, similar to the first embodiment, the third embodiment is provided on one side of the coating head unit support frame 4''. The second embodiment includes a vertical direction guiding unit 93, a base member 94, a magnet holder member 910, a magnet 920, a driving unit 950, and a cleaning unit. The first embodiment has the same vertical direction guiding unit 930 as the second embodiment, the base member 940, the magnet supporting member 91, the magnet 92, and the driving unit 950. Therefore, the vertical direction guiding unit 93A, the base member 94A, the magnet supporting member 910, the magnet 920, and the driving unit 950 will not be described in detail. The cleaning unit removes particles from the magnet member 920. The cleaning unit includes a horizontal direction guiding unit 960, a cleaning member 970, and a cleaning member driving unit 980. The horizontal direction guiding unit 960 includes a guide rail 961 and a slider 962 that slidably connects the guide 961. The guide 961 horizontally engages the base member 94A such that the guide 961 can be positioned above the base member 94b. The monthly unit 970 covers the magnet member 920. The cleaning member 970 is coupled to the slider 962 of the horizontal direction guiding unit 960. For example, the cleaning member 97A may include a cleaning portion 971 covering the magnet member 920, and a connection portion 972 connected between the cleaning portion 971 and the horizontal guiding unit 960. The cleaning unit 97 is a 201111056 cylindrical shape. The cleaning portion 971 has a longitudinal opening in the longitudinal direction on the outer surface. The longitudinal opening has a common width along the length. The inner diameter of the cleaning portion 971 is uniform. The inner diameter of the cleaning portion 971 may be the same as the outer diameter of the magnet member 92's, such as the inner diameter of the portion 971. As shown in Fig. 9, the cleaning portion = the intermediate portion has the same inner diameter, but each end portion of the cleaning portion 971 has a different inner diameter. That is, the inner surface of the end portion of the cleaning portion 971 is tapered so that the inner space of the end portion of the cleaning portion 971 is a funnel shape. The connecting portion 972 of the cleaning member 970 is a predetermined distance from the outer surface of the cleaning portion 97. The connecting portion 972 is connected to the horizontal guiding unit _: 962. The tarpaulin cleaning unit 980 is provided on the base member 94. The cleaning member drives the early marriage level to move the cleaning member. The cleaning member drive 980 includes a fixed block 98, a rotary motor 982, and a ball screw. Solid = 981 is fixedly connected to one side of the base member 94, the rotary motor 982 is provided on the other side of the base member 940, and the ball screw 983 is connected to the rotary motor % to the shaft and the fixed view 98 cleaning member or horizontal direction guide The slider 962 of the lead unit has a threaded hole. The ball screw 983 is locked into the threaded hole. The cleaning unit may further comprise a particle collecting member _. When the cleaning material removes particles from the magnet member 920, the particles fall onto the particle collecting member 2. The bonding = housing 990 includes a cover portion, and the clearing portion 99 of the tray member 丨 盍 cleaning member 97 延伸 extends from the cover portion and is coupled to the connecting portion 972. The granules can be detachably attached to the cleaning member 970. The particle removing device according to the present invention is mounted on a coater in which the single head support frame of the coating head is movable and the platform is finely fixed. According to the present invention, the material can be mounted on the coating head unit support frame 400 and the platform 200 is a movable coater. Further, it is assumed that the particle removing device according to the present invention is mounted on a liquid crystal coater. The particle removing device according to the present invention can be mounted to a sealant coater. The particle removing device of the first embodiment will now be described. A robot arm (not shown) lifts, moves the substrate G, and lowers the substrate G onto the platform 200. The substrate G is attracted to the upper side of the stage 2〇〇. The first driving unit 500 moves the coating head unit support frame 400 in front/back in the γ direction. The coating head unit support frame 400 is linearly moved along the first guiding unit 300. As a result, the magnet member 92 provided on the coating head unit support frame 〇 moves above the platform 200 to attract particles on the substrate G and the stage 2 。. A control unit (not shown) controls the movement of the first drive unit 500 and the second drive unit, 8〇〇. Before the operation of the liquid crystal coater, the path information to be followed by the first driving unit 5 and the second driving unit 800 is input to the control unit. When moving, 'coating a single A 7GGit nozzle, coating the liquid crystal on the substrate G in the form of droplets." When the first driving unit 5〇〇 and the second driving unit 8〇〇 respectively move the coating head unit support frame 40〇 When the head unit 700 is coated, a 201111056 is produced, so that the particles are adhered to the magnet member particles. The magnet member 920 attracts the particles 920 to the particle removing device of the second embodiment of the present invention, and the 920 moves together with the coating head unit support frame 4. The magnet member (4) moves up/down. That is, the driving unit 95 is guided in the vertical direction by the unit 93, and the base member 94 is turned. When the base member _ moves up or down the 'magnet member 92' is also on or under the f.
於根據本發明第三實施例之顆粒移除裝 _與塗佈頭單元迦-起終磁體;件=2 下移動。同時，自磁體構件清除顆粒 9:沿垂直方向導引單元上或下移動基件940=: 或下移動清潔單元及磁體構件920。 元 潔 清潔構件軸單沿水衫 960直線移動清潔構件97〇。當清潔構件97〇移動時，清 粒 構件970之清潔部971亦移動，以自磁體構件㈣清除 〇 及第二鶴單元800操 作時產生_粒，會落到平台及基板G，並漂浮在平台 2淨〇1周圍。雛包含金屬轉金屬_。根據本發明提供二 塗佈頭單元支撐框之難移除裝置，藉由 顆 ，而獅在料絲板上的祕1轉除料台 200周圍的顆粒。 201111056 磁體構件920可上/下移動。如此使平台2〇〇與磁體'構 件920間的距離為可調整的。 清潔單元自動地自磁體構件920清除顆粒〇吉果磁體構 件920更有效地吸引顆粒。The particle removing device according to the third embodiment of the present invention is moved with the coating head unit and the final magnet; At the same time, the particles are removed from the magnet member 9: the base member 940 is moved up or down in the vertical direction to move the unit 940 =: or the cleaning unit and the magnet member 920 are moved downward. Yuan Jie Cleaning member shaft single along the water jacket 960 linear movement cleaning member 97 〇. When the cleaning member 97 is moved, the cleaning portion 971 of the cleaning member 970 also moves to remove the crucible from the magnet member (4) and the second crane unit 800 generates the particles, which will fall to the platform and the substrate G, and float on the platform. 2 net 〇 1 around. The chick contains metal to metal _. According to the present invention, it is provided that the two coating head unit support frame is difficult to remove, by means of a lion, and the lion on the wire board turns the particles around the table 200. 201111056 The magnet member 920 can be moved up/down. The distance between the platform 2's and the magnet's member 920 is thus adjustable. The cleaning unit automatically removes the particles from the magnet member 920. The agglomerate magnet member 920 attracts the particles more effectively.
雖然本發明可以許多型式實施而不•障離其精神及重要 特徵，亦應了解除非有特別指明不然上述實施例不受限制於 前述說^的任何細節，而應在所附中請專利範圍之精神盘範 嚀下做廣義的_’因此所有落在不轉 圍界定之精神與料下或落在此類衫料或精 勿内之變化及修改’均意欲涵蓋在_帽專利範圍。： 【圖式簡單說明】 包含所關式提供對本發_進—步了解並結合 釋;=:f來顯示本發明實施例，且與詳細說明用以解 於圖式中·· 圖1為液晶塗佈機之透視圖； 圖2紐配有本發明第—實施例之雛 佈機之透視圖； 、歧置之塗 圖3為第一實施例之顆粒移除裝置之前視圖； 圖4為第-實施例之顆粒移除裝置之側視圖； 圖；圖5為根據本發明第二實施例之顆粒移除裝置之前視 201111056 =心顆=-之側視圖，· 圖； 月弟二貫_之顆㈣除裝置之前視 圖圖I為 轉除裝置之侧視圖; 圖；以及知列之顆粒移除裝置之清潔構件之戴面 圖 圖10為第三實施例之顆粒移除裝置之清潔單元之截面 【主要元件符號說明】 100框架 300第一導引單元 320滑塊 410垂直部 500第一驅動單元 700塗佈頭單元 910磁體支托構件 930垂直方向導引單元 932滑塊 950驅動單元 961導執 970清潔構件 972連接部 981固定塊 983滚珠螺桿 991蓋件部 G 基板 200平台 310導軌 400塗佈頭單元支撐框 420水平部 600第二導引單元 800第二驅動單元 920磁體構件 931導轨 940基件 960水平方向導引單元 962滑塊 971清潔部 980清潔構件驅動單元 982轉動馬達 990顆粒收集構件 992結合部While the present invention may be embodied in many forms without departing from the spirit and essential characteristics thereof, it should be understood that the invention is not limited to the details of the foregoing description unless otherwise specified.盘 咛 做 做 做 做 因此 因此 因此 因此 因此 因此 因此 因此 因此 因此 因此 因此 因此 因此 因此 因此 因此 因此 因此 因此 因此 因此 因此 因此 因此 因此 因此 因此 因此 因此 因此 因此 因此 因此 因此 因此 因此 因此 因此 因此 因此 因此[Complete description of the drawings] The present invention is provided to provide an embodiment of the present invention, and the detailed description is used to solve the problem in the drawings. FIG. 2 is a perspective view of a fabric machine of the first embodiment of the present invention; FIG. 3 is a front view of the particle removal device of the first embodiment; FIG. - Side view of the particle removing device of the embodiment; Fig. 5 is a side view of the particle removing device according to the second embodiment of the present invention, 201111056 = heart ==, Fig. 5; Figure 4 is a side view of the removal device; Figure; and a wearer of the cleaning member of the known particle removal device. Figure 10 is a cross section of the cleaning unit of the particle removal device of the third embodiment. [Main component symbol description] 100 frame 300 first guiding unit 320 slider 410 vertical portion 500 first driving unit 700 coating head unit 910 magnet supporting member 930 vertical direction guiding unit 932 slider 950 driving unit 961 guiding 970 cleaning member 972 connecting portion 981 fixing block 983 ball Screw 991 Cover part G Substrate 200 Platform 310 Guide 400 Coating head unit Support frame 420 Horizontal portion 600 Second guiding unit 800 Second driving unit 920 Magnet member 931 Guide rail 940 Base member 960 Horizontal direction guiding unit 962 Slider 971 cleaning portion 980 cleaning member driving unit 982 rotating motor 990 particle collecting member 992 joint portion