TW201104914A - Optoelectronic system - Google Patents

Optoelectronic system Download PDF

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Publication number
TW201104914A
TW201104914A TW98146171A TW98146171A TW201104914A TW 201104914 A TW201104914 A TW 201104914A TW 98146171 A TW98146171 A TW 98146171A TW 98146171 A TW98146171 A TW 98146171A TW 201104914 A TW201104914 A TW 201104914A
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TW
Taiwan
Prior art keywords
substrate
photovoltaic structure
level
layer
level photovoltaic
Prior art date
Application number
TW98146171A
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Chinese (zh)
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TWI474503B (en
Inventor
Min-Hsun Hsieh
Cheng-Nan Han
Meng-Yuan Hong
Hsin-Mao Liu
Tsung-Xian Lee
Original Assignee
Epistar Corp
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Priority to TW98146171A priority Critical patent/TWI474503B/en
Application filed by Epistar Corp filed Critical Epistar Corp
Priority to US12/840,848 priority patent/US8999736B2/en
Publication of TW201104914A publication Critical patent/TW201104914A/en
Priority to US13/205,987 priority patent/US9000461B2/en
Priority to US13/886,083 priority patent/US9142740B2/en
Application granted granted Critical
Publication of TWI474503B publication Critical patent/TWI474503B/en
Priority to US14/657,975 priority patent/US9748449B2/en
Priority to US14/679,066 priority patent/US20150214449A1/en
Priority to US14/858,477 priority patent/US9893244B2/en
Priority to US15/657,399 priority patent/US20170324009A1/en
Priority to US15/678,885 priority patent/US10529898B2/en
Priority to US15/973,091 priority patent/US10686106B2/en
Priority to US16/900,557 priority patent/US11482651B2/en
Priority to US17/220,343 priority patent/US20210226101A1/en

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Abstract

The application relates to a system scale optoelectronics structure and its manufacture method thereof including providing a temporary substrate, a plurality of un-packaged optoelectronics element connected to the temporary substrate and formed a plurality of intervals. An adhesive material is filled in the intervals and covers the un-packaged optoelectronics element. A permanent substrate is bonded to the un-packaged optoelectronics element by the adhesive material, and the temporary substrate is removed.

Description

201104914 六、發明說明: 【發明所屬之技術領域】 本發明係關於一種光電系統,尤關於一種具有整合性之發 光系統。 【先前技術】 光電元件如發光二極體之封裝結構主要係產自於繁複之 單晶片封裝流程。未封裝之光電元件經封裝後,再結合其他電201104914 VI. Description of the Invention: TECHNICAL FIELD OF THE INVENTION The present invention relates to an optoelectronic system, and more particularly to an integrated illuminating system. [Prior Art] The package structure of a photovoltaic element such as a light-emitting diode is mainly produced by a complicated single-chip package process. Unpackaged optoelectronic components are packaged and then combined with other

子元件’如電容、電感等’及/或非電子元件,可以形成一光 電糸統。 然而,在電子消費產品小型化與輕薄化的發展趨勢下,光 電元件的開發也朝向更小的封裝尺寸。其中,晶片級封裝 (Chip-LevelPackage ; CLP)係為半導體以及光電元件封裝設 計的期待方式之一。 【發明内容】 依據本發明一實施例,係提供一系統級光電結構及苴製作 =,其製作方法步驟至少包含:提供一暫時基板;提;共複數 裝光電讀連接於基板之上,並形成複數個走道區;提 賴填滿走道區域蓋光電元件;提供—永久基板藉 膠材鍵合複數歧元件;以及移除暫時基板。 實施方式】 系統ιοί之製=’._本發明之—實施例之光電 配置於-載具10 利::料巧初步 系統單元糊之連接^離,叹依需求建立 擇並不限於此,使用^ n述各步驟之執行順序或選 用者田可依錄製造環境或條件安排之。 201104914 詳言之,依據本發明之實施例之光電系統100係包括二或 多個系統單元30以形成一光能與電能之傳輸、轉換網絡 (network)。系統單元30係位於網絡中,並提供光或電機能 至少其一。舉例而言,光電系統1〇〇係可接收訊號、電能以輸 出光,或接收光以輸出電能、訊號。於應用上,光電系統100 可以用於照明、影像顯示、影像辨識、影像重製、電力輸出、 資料儲存、機械加工等。 具體而言,光電系統1〇〇係為發光二極體(LED)、光電 一極體(photodiode )、光敏電阻(ph〇t〇resister )、雷射(laser )、 ,外線發射體(infrared emitter)、及太陽能電池(solar cell) 等具光電機能之系統單元30中至少其一之集成(integrati〇n)、 ,合、堆疊。此外’光電系統100尚可選擇性地容納電阻、電 谷、電感、二極體、積體電路等非光電機能之系統單元30。 載具10係為系統單元30提供一成長、承載基礎。候選材料 其一係包含但不Pf遗鍺(Ge)、坤化鎵(GaAS)、姻匕墙(Inp)、 藍寶石(Sapphire)、碳化矽(SiC)、矽(Si)、鋁酸链(LiA1〇2)、 ,化鋅(ZnO)、氮化鎵(GaN)、氮化鋁(A1N)、金屬、玻璃、 複合材料(Composite)、鑽石、CVD鑽石、與類鑽碳 (Diamond-Like Carbon ; DLC )等。 於本發明之-實施例中’-或二個以上之系統單元3()之完整 結構係S成於載具1G之上。具體而言,載具10係作為此 30之構建基礎。例如,一或二她上之系統單元係 ' 4m'm m (self-assembly) ^形成於健10之上。此外,除上職造紋外,_、研磨、 中微影、侧、熱處_亦可選擇贱翻於完成系統單元 依據本發明之一實施例之系統單元3〇係一光電 1 形成方式鋪綠晶絲錢半導體層於—作為 ^ 鄰系統單7L3G間可藉由形成溝槽或絕_以達電性^物理分離。 201104914 ^系3間之電性佈局(eleetrieal layGUt)尚可利用内部連 灣專利者達成。相關文獻可參見本案申請人之台 灣專目號及第1249148號,其並被援引為本案之一部分。 :、體而f ’系統單元3〇最少包含一第一電性層、一轉換 第二電性層。第—電性層及第二電性層係彼此中至 ί 2、極性或摻雜物相異、或者係分別用以提供 ,子與電狀半導體材料單層或多層(「多層」係指二層或二 層ΐ上i以下同。),其電性選擇可以為ρ型、η型、及i型中 至^任意二者之組合。轉換部係位於第一電性層及第二電性層 ^ ^為電能與光能可能發生轉換或觀發轉換之區域。電能 或誘5光能者係如發光二極體、液晶顯示器、有機發光二 才-體,光能轉變或誘發電能者係如太陽能電池、光電二極體。 雜發明之另一實施例之系統單元30係一發光二極 體’二發^頻譜可以藉由改變半導體單層或多層之物理或化學 J素進行τ»周整。^*用之材料係如磷化鎵銦(AiGainp)系列、 ,化紹鎵銦(AlGaInN)系列、氧化鋅(Zn〇)系列等。轉換 ^之、纟cr構係如.單異質結構(singleheter〇structure ; SH)、雙異質 ,構(doubleheterostructure ; DH)、雙侧雙異質結構(d〇uble side doublehetostructure; DDH)、或多層量子井(multi_quantum —; MQW)。再者,調整量子井之對數亦可以改變發光波長。 —於本發%—實施例中’-或二伽上之祕單元3G係完成於 ίο上之前’脚’載具1G及紐單元3G於建立關聯 前本係彼此獨立分離。具體而言,載具1(M系作為此系統單元3〇 之支撐^例如,一或二個以上之系統單元3〇係藉由膠、金屬、壓 力、鮮連接+段固定於載具1〇之上。相目文獻可參見本案申請 六之台灣專利第311287號、第456058號、第474034號、及第493286 號’其並被扱引為本案之一部分。此外,於建立關連之過程中, 可採機^或人工方式將系統單元30放置於載具1〇之上。 如第3圖所示,完成或半完成之光電系統1〇〇可以選擇性地 進一步與一外部體相接。此外部體係可以連接至光電系統1〇〇之 201104914 =-單側或兩側。於數個實施例中,光電系統湖係以 ,接60之外側與外部體1〇a相接;光電系統勘係以相對於 =60之外侧與外部體1〇b相接;或者光電系統1〇〇係以具| (,接60之外側及其相對侧二者與外部體1〇a、1%相接 電系,100與外部體之相接並不限於以上態樣,光電系統卿^ ° 5 擇之任〜aA Y u裝置、H —結構、—組成、或上述選 -電路秘縣Hi電綠絲讀、—_元件、 -声例# ’純單元3G鋪具ig間尚形成有 部錢單元3g與載具ig之用。在此,「短期一」 2「ϋΓ光電系統100之製造、送達、或解封完成之 完於雜謂之製造、送達、或解封 為ί要且體單元3〇與載具1〇間並不以相分離 金屬禎屏此層或結構20係如膠體、膠帶、金屬單層、 s θ σ金、半導體、夾具、或上述選擇之任意組合。此外, #士構20 Φ ^人旱、應力抒緩、導熱、隔熱等功能。例如,層 中介;於反射面與載具10間之下中介層。上t介層及下 如‘I同時或分別具有除反射功能外之上述其他功能,且體 如連接、擴散阻障等功能。 1、他刀此具體 次載實施财,祕單元3G及材料4G更可以與一 汸圖中此接合可實施於第2A圖〜第 欠栽’如第2Β圖、第2C圖、或第20圖之步驟之 H !係於第2B圖之步驟後即與系統單元30及材料40 、°以為賴餘提供-她為可靠之巾間結構。次載具 201104914 ^ ^ rL#i! 5〇a ^ 匕抗反射、電、机阻障、擴散阻障、應 功能之達成並不以藉由附二要= ;周1-人载^ 5〇本身之成分、幾何形狀、加工方 t ° ^ ^ m ^ i 二 旱直遮蔽結構。此出光面係如與系統單元30 :射ϋ4°ί接之面:與環境細目接之面。具體而言,反t、 凸面;折射蔽結構係如鏡面、規則凹凸面、不規則凹 =冋折,差異介面、光子晶體、凹透鏡、凸透鏡、菲 透镜(Fresnellens)、不透光面中至少其一。 ^圖係例示依據本發明一實施例之光電系统1〇〇中至 〇之電連接態樣。於此,系統單元%係具有二個 向冋方向之電極301 ’此結構之具體系統單元3〇係如 、一玉體,更具體言之,係一形成於一絕緣體,例如藍寶石, 光極體。圖(〇 + ’二系統單元%間储由導線 正負極形成電性串聯;圖(b)中,二系統單元30間 ,糟由導線60a連接正極形成電性連接;圖(〇中,二系統 早元30間係藉由導線6〇a連接負極形成電性連接。 ,1、 ,7圖係例示依據本發明另一實施例之光電系統1〇()中至 >、二〔系統單元30之電連接態樣。具體之實施方式可參考第6 圖之說明。惟於本實施例中,系統單元3〇間之電連接係藉由 於系統單元30上形成内部連接60b達成。内部連接60b之一 種形成方式係於系統單元30之設定區域上形成隔離區6〇b, 後沈積金屬材料。 ,、,8圖係例示依據本發明又一實施例之光電系統100中至 系統單元30之電連接態樣。圖(a)及圖(b)中,系統 單元30之電極3〇1係調整或接續至大致相同之位置,如接近 201104914 於或恰於材料4〇表面之位 係藉由電性連接6〇,例如線a =系統單元30間 負極形成電性串聯;圖⑻t it ’連接正 連接60,例如:導繞6〇a七& A二系、、先早兀30間係藉由電性 圖左中三種等效電路0所或内。卩連接6% ’連接電極3〇1形成 留- μ ,政電路圖所不之電性連接之一。〔c)中,_备Μ 早疋3〇係連接至一電路載體 ^中:J、,先 如第9Α〜第Qn 兩電網絡之一部分。 電系統100之製造方法簡^ ^依據本發明之另一實施例之光 步配置於-載具1G上並;^ ·統料3〇係初 具1〇相分離,·以及於系統單$二關,二使糸統單元3〇與載 惟上述各步驟之執行順序 形成電性連接60。 際觀環境或氕限於此,使用者當可依實 之實施„ 或位置僅為例示而非用以限制本發明 =實她方式’使时當可依照祕 明 或使用之。 °兒月了為本實施例所參考 少- 麻錄本㈣—魏歉光衫統⑽中至 二;ί 〇之電連接態樣。圖(a)中,-李统單开ί 聯,惟反向配置之系统單元3〇 連接正極和負極形成並 局形成並聯;圖電性連接⑼之適當佈 接正負極形成反向並聯,惟同向配置之^單 Ϊ 巧紐連接6G之適當佈局形成反向並聯。圖t) 之-^ ◦係連接至一電賴體咖而成為—電網絡 ,於本發明一實施例中,被限制於材 “ ^組可^步被劃分為數量相等林等之子群組糸f早;^ 以限制本伽之實施方式,本申請案中其他實== 201104914 ϊίΐίϊίίΐ相衝突下皆可為本實施例採納之。此外,子 f單元3G間之電連接方式可參照本發明其他才t 组人1用化群組之手段可選擇化學式、物理式、或其 統單^ 30 ίΐίΐ切、熱劈裂、超音波震動等。相鄰系 差。 Β材料4G之寬度較佳地係大於劃分手段之加工公 圖所ΐ據實施例之子群組之電性連接架構係如第12 施3 Γΐ統單元之型態僅為例示,非用以限制本發 j之,施方式,本巾請案中其他實施例中 於不相衝突下皆可為本實施例採納之。圖(a) _係跨過隔離區60b,_於^iτ雜連接 40之h 条系統早疋3〇之電極301及材料 單元叩^i )中,€性連接_之—端係電性連接至系統 t ί 〇1 ’另一端係_架設於材料40之上。圖⑷ ί古連接6%係未經電極301即與系統單元30電性連接, 料4〇之上。圖⑷中’電性連接_係未經 單71 3_賴’並跨獅離_,後架 4紅如f ?圖所7’於本發明一實施例中’光電系統100係 ^括一或夕個以錄度方式組立之子群組。各個子群組中系統 早凡之數量及連接方式分別可以相同或相異。例如,子群组 l〇〇a及l00c係與子群组腿上下堆疊,其中,子群組隐 中包括四個系統單元3G;子群組腿中包括—個系統單元 3〇,子群組l〇OC中包括二個系統單元3〇。子群組間可以使用 焊料、銀膠、或其他適用之導電材料達成電性相連。然而,子 ^组間非以形成電性連接為必要,單純結構上之組立關係也可 成立於其間。惟圖式中系統單元30之型態或數量僅為例示, 非,以限制本發明之實施方式,本申請案中其他實施例中揭示 之系統單元型態與連接方式於不顯相衝突下皆可為本實施例 採納之。 ’ 201104914 -邊,顯示一子群組及其中單-系統單元30同 地邊。=α=0 0 6<Υ<Π7 Λ ο ~ ~ -Χ-0·4' °·4<Χ<0.5 > 0.5<Χ<0.6 > 1^2:260/600、3〇·9、及/ 或 Ο.9%。具體而言, 實施例之ϋ /1000。第14⑻圖係顯示依據本發明一 面系^-梯形。梯形各個 =;:Γ置如圖所示'惟其相對於:二统界= 可任思移動之,亦即,系站罝;直你 觸到或者超過材料40之邊界。例 觸、f f材料40之上緣*及/或下^ 了接近、接 組、“二發明一實施例中,發光系統、子群 換材料相整合Λ體源)係可與—波長轉 而言’_〇a係為4=〇:f:之? 塊體、-有機膠體、或二=塊體、一陶兗 螢光粉體可祕材料4〇私;;者相1 &。例如’ 上,或纽錄师财綠线單元3〇之 方式形成於系鮮元、網版㈣、沈積等 或材料40a及40b係配置^材料4〇a、材料40b、 覆蓋於光源上。圖⑻中^:m光方向上,較佳地,係 .二材二及; 40b係配置於光源之—出光方a材料40b、或材料4〇a及 佳地,係與材料40相^方向上,但部未與其直接接觸,較 如第16圖所示,私决么从 實施例中統稱為光源);以色 201104914 料。波長轉換材料之相關實施方式可參考前述第15圖之說 ^ (a)中,波長轉換材料係可發射綠色光或黃色光。圖 (b)中,波長轉換材料係可發射紅色光及黃色光。圖(c)尹, 矣材料係發射黃色光,另一區域之波長轉換材 圖⑷中,—區域之波長轉^ =糸,射汽色光’另-區域之波長轉換材料係發射紅色光,且 粉體或螢狄魅H色絲發魅生。&捕、_應之螢先 示,發光系統或子群組中之部分或數個 射; 大於紅色光系統單元之功率,例如幾 ⑻明所示,發光 =、2=、中1·5/ι/。如第17 光,且材料40中係混雜右έ系統單几30係發射藍色 二⑦擇性採用之。 例之紅色及黃色螢光如=中係混雜有適當比 子群组中之有效或作動系統單 201104914 混雜有黃色螢光粉體,材料働中係混雜有紅色螢光粉體。 印一如第19 (a)圖所示,發光系統或子群組中之一部 早^係發射藍色光,-部分之系統單元係發射綠色光,一部分 元係發射紅色,。如第19 (b)圖所示,發光系統或 一巧、、且中之一部分系統單元係發射藍色光,另一部分之 兀係發射紅色光,材料40b係配置於此二部分系統單元之上, 有綠色螢光粉體。如第19⑷圖所示,發光系統或子 群、、且中之-部分系統單元係發射藍色光,另一部分之 係發射紅色光,材料4〇b係配置於藍色光系統單元之'上、,並、θ η色螢光粉體。如第19⑷圖所示,發光系統或子群 單70係發射藍色光,另—部分之系統單元係發 ^色先,材料40b係配置於部分或局部之藍色光系統 上,並混雜有綠色螢光粉體。 ^ 如第20 (a)〜20 (c)圖所示,發光系統或 效或作動系統單元係發射藍色光。圖(a)中: i0b==光tr另一區域之材料4_= ^圖⑻中,-區域之材料働係混雜有綠色 另=域之材料4〇b係混雜有紅色螢光粉體,且此二區域係 3豐地,短波長發光區域係較長波長發光區域^近^ 士m材料佩係混雜有紅色及黃色螢光粉ΐ 單元係發射人目嶋感知之概,例如:=統 綠色、及紅色螢光粉體之材料40b係、分別配置於系 之 i °、面狱何觸爾絲體之效率、衰退特 制夕ϊΓΐ或ί續諸實施例中’應用上’藍色光搭配適當之比 ΐί色ί可產生冷白光;藍色光搭配適當之比例之黃ίΐϊ 、、工色光可產生暖自光。藍光與紅光功率比約為2 :丨〜5 : 如.2.5 :卜3 :卜3.5 :卜4 :卜4.5 : i。綠光與黃光之功 201104914 =^.,4非;^=月中=4()及4%之大小比例及配置區 調整、交換之H月,—實施方式’使用者當可依情況 統單元亦可喂粉雜置於其㈣路徑上之系A sub-element such as a capacitor, an inductor or the like and/or a non-electronic component can form a photo-electric system. However, under the trend of miniaturization and thinning of electronic consumer products, the development of photovoltaic components has also moved toward smaller package sizes. Among them, Chip-Level Package (CLP) is one of the expected ways of designing semiconductors and optoelectronic components. SUMMARY OF THE INVENTION According to an embodiment of the present invention, a system-level photovoltaic structure and a fabrication method are provided. The method of fabricating the method includes at least: providing a temporary substrate; and providing a plurality of optical readings on the substrate and forming a plurality of walkway areas; the fill-up fills the walkway area to cover the photovoltaic elements; provides a permanent substrate to bond the plurality of components by the glue; and removes the temporary substrate. Embodiments of the system ιοί==. _ The present invention - the embodiment of the photoelectric configuration in the carrier 10 Lee:: The initial system unit paste connection ^, the sigh according to the needs of the establishment is not limited to this, use ^ The sequence of execution of each step or the choice of the field can be arranged according to the manufacturing environment or conditions. 201104914 In detail, a photovoltaic system 100 in accordance with an embodiment of the present invention includes two or more system units 30 to form a transmission, conversion network of light energy and electrical energy. System unit 30 is located in the network and provides at least one of light or motor capability. For example, the photovoltaic system 1 can receive signals, power to output light, or receive light to output electrical energy and signals. In application, the photoelectric system 100 can be used for illumination, image display, image recognition, image reproduction, power output, data storage, machining, and the like. Specifically, the photovoltaic system 1 is a light emitting diode (LED), a photodiode, a photoresistor (ph〇t〇resister), a laser (laser), and an outside emitter (infrared emitter). And at least one of the system units 30 having photovoltaic power, such as a solar cell, is integrated, integrated, and stacked. Further, the photovoltaic system 100 can selectively accommodate the non-photovoltaic system unit 30 such as a resistor, a valley, an inductor, a diode, or an integrated circuit. The carrier 10 provides a growth and bearing basis for the system unit 30. The candidate materials include but not Pf testament (Ge), gallium arsenide (GaAS), indigo wall (Inp), sapphire (Sapphire), tantalum carbide (SiC), bismuth (Si), and aluminate chain (LiA1). 〇 2), zinc (ZnO), gallium nitride (GaN), aluminum nitride (A1N), metal, glass, composite, diamond, CVD diamond, and diamond-like carbon (Diamond-Like Carbon; DLC) and so on. In the embodiment of the invention - or more than two or more system elements 3 () are formed on top of the carrier 1G. Specifically, the carrier 10 is the basis for the construction of this 30. For example, one or two of her system units '4m'm m (self-assembly) ^ are formed above Jian 10 . In addition, in addition to the upper-level embossing, _, grinding, lithography, side, heat _ can also be selected to complete the system unit according to an embodiment of the invention, the system unit 3 The green crystal wire semiconductor layer can be separated from the single 7L3G by the formation of a trench or by a dielectric. 201104914 ^The electrical layout of the three rooms (eleetrieal layGUt) can still be achieved by using the internal patents of the company. For related literature, please refer to the Taiwanese target number of the applicant and No. 1249148, which is cited as part of this case. The body unit 3 〇 includes at least a first electrical layer and a second electrical layer. The first electrical layer and the second electrical layer are different from each other, or are different in polarity or dopant, or are respectively provided for providing a single layer or a plurality of layers of electrical and semiconducting materials ("multilayer" refers to The layer or the second layer is the same as the following.), and the electrical selection may be a combination of p-type, n-type, and i-type to any combination. The conversion portion is located in the first electrical layer and the second electrical layer ^ ^ is a region where electrical energy and light energy may be converted or transferred. Electrical energy or light-emitting energy is such as a light-emitting diode, a liquid crystal display, an organic light-emitting diode, a light energy conversion or an electric energy-generating system such as a solar cell or a photodiode. The system unit 30 of another embodiment of the invention is a light-emitting diode. The spectrum can be τ»rounded by changing the physical or chemical properties of the semiconductor single layer or layers. The materials used for ^* are such as AiGainp series, AlGaInN series, and Zinc oxide series. Converting the structure of the 纟cr, such as a single heterostructure (Singleheter〇 structure; SH), double heterostructure, doubleheterostructure (DH), double-sided double heterostructure (DDH), or multi-layer quantum wells (multi_quantum —; MQW). Furthermore, adjusting the logarithm of the quantum well can also change the wavelength of the illumination. - In the %-embodiment of the present invention, the secret unit 3G on the '- or the two-gauge is completed on the ίο. The 'foot' carrier 1G and the button unit 3G are separated from each other independently before the association is established. Specifically, the carrier 1 (M system serves as a support for the system unit 3). For example, one or more system units 3 are fixed to the carrier by glue, metal, pressure, fresh connection + segment. For more information, please refer to Taiwan Patent Nos. 311287, 456058, 474034, and 493286 of the application No. 6 of this application, which are also cited as part of this case. In addition, in the process of establishing the relationship, The system unit 30 can be placed on the carrier 1〇 or manually. As shown in Fig. 3, the completed or semi-finished photovoltaic system 1 can be selectively further connected to an external body. The system can be connected to the photovoltaic system 1〇〇201104914=-one side or both sides. In several embodiments, the photovoltaic system lake system is connected to the external body 1〇a on the outer side of the junction 60; Connected to the external body 1〇b with respect to the outer side of =60; or the photoelectric system 1 is connected to the external body 1〇a, 1% by the external side and the opposite side of the photoelectric system 1 Department, 100 and the external body are not limited to the above aspects, photoelectric system Qing ^ ° 5 choose any ~ aA Y u device, H - structure, - composition, or the above-mentioned selection - circuit Mixian Hi electric green wire read, -_ component, - sound example # 'pure unit 3G shop ig is still formed with a money unit 3g and For the purpose of ig. Here, "short-term one" 2 "The manufacture, delivery, or unsealing of the ϋΓ 光电 光电 光电 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 This layer or structure 20 is not separated by a phase separation metal such as a gel, tape, metal monolayer, s θ σ gold, semiconductor, fixture, or any combination of the above. In addition, #士构20 Φ ^People drought, stress relief, heat conduction, heat insulation, etc. For example, layer mediation; interposer between the reflective surface and the carrier 10. The upper t-layer and the lower layer have the function of de-reflection. The above other functions, such as the connection, diffusion barrier and other functions. 1, he knife this specific secondary load implementation, the secret unit 3G and material 4G can be combined with a map can be implemented in Figure 2A ~ Under the process of the second diagram, the 2C diagram, or the 20th step, the H is tied to the system list after the step of Figure 2B. 30 and material 40, ° for the sake of Lai Yu - she is a reliable towel structure. Sub-carrier 201104914 ^ ^ rL#i! 5〇a ^ 匕 anti-reflection, electricity, machine barrier, diffusion barrier, function should be The achievement is not based on the attachment of the second to =; the circumference of the human - 5 ^ itself, the composition of the geometry, the processing of the t ° ^ ^ m ^ i two straight shield structure. This light surface is like the system unit 30 : ϋ 4° 接 contact: Close to the environment. Specifically, anti-t, convex; refractive mask structure such as mirror surface, regular concave surface, irregular concave = fold, differential interface, photonic crystal, concave lens At least one of a convex lens, a phenanthrene lens, and an opaque surface. The figure illustrates an electrical connection pattern of the photovoltaic system 1 to 〇 according to an embodiment of the present invention. Here, the system unit % has two electrodes 301 in the direction of the 冋 '. The specific system unit 3 of the structure is a jade body, and more specifically, is formed in an insulator such as sapphire, an optical body. . Figure (〇+ 'The storage of the two system units is electrically connected in series by the positive and negative wires of the wire; in Figure (b), between the two system units 30, the wire is connected to the positive electrode to form an electrical connection; Figure (〇中,二系统In the early 30th, the electrical connection is formed by connecting the negative electrode with the wire 6〇a. 1, 7, and 7 illustrate the photovoltaic system 1〇() to >, 2 [system unit 30] according to another embodiment of the present invention. For the specific embodiment, refer to the description of Fig. 6. However, in the present embodiment, the electrical connection between the system unit 3 is achieved by forming the internal connection 60b on the system unit 30. The internal connection 60b A forming method is formed on the set region of the system unit 30 to form an isolation region 6〇b, and a metal material is deposited later. 8 shows an electrical connection from the photovoltaic system 100 to the system unit 30 according to still another embodiment of the present invention. In the figures (a) and (b), the electrodes 3〇1 of the system unit 30 are adjusted or connected to substantially the same position, such as near 201104914 or just below the surface of the material 4 by electrical properties. Connect 6〇, for example line a = negative between system unit 30 The electrical connection is formed; the figure (8) t it 'connects the positive connection 60, for example: the winding around 6〇a7 & A second, and the first 30 are connected by the three equivalent circuits 0 in the left diagram of the electrical diagram卩Connect 6% 'connecting electrode 3〇1 to form a retention-μ, one of the electrical connections not in the political circuit diagram. [c), _ Μ 疋 疋 疋 〇 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 : : : : : : : : : First, as part of the 9th to the 2th two electric networks. The manufacturing method of the electric system 100 is simple according to another embodiment of the present invention, and the light step is disposed on the carrier 1G; Initially separated by 1 phase, and in the system single $2, the second unit 3 is connected to the sequence of execution of the above steps to form an electrical connection 60. The environment or the environment is limited to this, the user can实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施Wei yue light shirt system (10) medium to two; ί 〇 electrical connection state. In Figure (a), - Li Tong single open ί, but the reverse configuration of the system unit 3 〇 connection The pole and the negative pole are formed in parallel and form a parallel connection; the appropriate connection between the positive and negative poles of the electrical connection (9) forms an anti-parallel connection, but the proper arrangement of the coaxial arrangement of the 6G of the same configuration forms an anti-parallel connection. Figure t) - ^ ◦ 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接 连接Restricting the implementation of this gamma, other implementations in this application == 201104914 ϊ ΐ ΐ ΐ ϊ 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 In addition, the electrical connection between the sub-funits 3G can be referred to the other embodiments of the present invention. The chemical group, the physical formula, or the system thereof can be selected to be chemically, physically, or in any way. Wait. Adjacent to the difference. The width of the Β material 4G is preferably greater than the processing of the division means. The electrical connection architecture of the sub-group according to the embodiment is as exemplified, and is not intended to limit the present. The method of applying j, the method of applying, and the other embodiments of the present invention can be adopted in this embodiment without conflict. Figure (a) _ is connected across the isolation zone 60b, _ in the ^iτ miscellaneous connection 40 of the system 301 and the material element 叩^i) To the system t ί 〇 1 'the other end _ is mounted on the material 40. Fig. 4 shows that the 6% connection is not electrically connected to the system unit 30 by the electrode 301, and is above the material. In Fig. 4, the 'electrical connection _ is not a single 71 3 _ 赖 ' and cross lion _, the rear frame 4 red as f 图 7 ′ in an embodiment of the invention 'optoelectronic system 100 is included or A subgroup grouped by recording. The number of systems and the connection methods in each subgroup can be the same or different. For example, the subgroups l〇〇a and l00c are stacked on top of the subgroup leg, wherein the subgroup implicitly includes four system units 3G; the subgroup legs include one system unit 3〇, the subgroup l〇OC includes two system units 3〇. Sub-groups can be electrically connected using solder, silver paste, or other suitable conductive materials. However, it is necessary to form an electrical connection between subgroups, and a simple structural relationship may also be established therebetween. However, the type or the number of the system unit 30 in the drawings are merely exemplary, and not to limit the embodiments of the present invention, and the system unit types and connection modes disclosed in other embodiments in the present application are not in conflict. It can be adopted for this embodiment. ’ 201104914 - Edge, showing a subgroup and its mid-system unit 30 on the same side. =α=0 0 6<Υ<Π7 Λ ο ~ ~ -Χ-0·4' °·4<Χ<0.5 >0.5<Χ<0.6> 1^2:260/600, 3〇·9 And/or Ο.9%. Specifically, 实施 /1000 of the embodiment. Fig. 14 (8) shows a system in accordance with the present invention. Each trapezoidal =;: is set as shown in the figure 'only its relative to: the second level = can move, that is, the station 罝; straight you touch or exceed the boundary of the material 40. For example, in the upper edge of the ff material 40 and/or the proximity, the connection, and the "invention, the illumination system, the sub-group exchange material, and the integrated source" can be '_〇a is 4 = 〇: f:? Block, - organic colloid, or two = block, a pottery fluorescein powder secret material 4 〇 private;; phase 1 &. For example The upper or the New Recorder Green Line unit is formed in the system, the screen (4), the deposition, or the materials 40a and 40b, the material 4〇a, the material 40b, and the light source. Figure (8) ^: m light direction, preferably, two materials two; 40b is arranged in the light source - light emitting a material 40b, or material 4〇a and preferably, in the direction of the material 40, but The department is not in direct contact with it, as shown in Figure 16, the private decision is collectively referred to as the light source from the embodiment); the color is 201104914. For the relevant implementation of the wavelength conversion material, refer to the above figure 15 (a) The wavelength conversion material can emit green light or yellow light. In the figure (b), the wavelength conversion material can emit red light and yellow light. (c) Yin, 矣 material emission Color light, wavelength conversion material in another area (4), the wavelength of the area turns ^ = 糸, the color of the escaping light, the wavelength conversion material of the other area emits red light, and the powder or the illusion of H Raw. & catch, _ should be the first indicator, some or several shots in the illumination system or subgroup; greater than the power of the red light system unit, for example, a few (8) clearly, illuminate =, 2 =, medium 1 · 5 / ι /. Such as the 17th light, and the material 40 is mixed with the right έ system single 30 series emission blue two 7 optional use. Example of red and yellow fluorescent such as = medium mixed with appropriate ratio The effective or active system in the group is 201104914 mixed with yellow fluorescent powder, and the material is mixed with red fluorescent powder. As shown in Figure 19 (a), in the lighting system or subgroup A system emits blue light, part of the system unit emits green light, and some of the elements emit red. As shown in Figure 19 (b), the illumination system or one of the system units Blue light is emitted, and the other part emits red light. The material 40b is configured in this two-part system. Above the element, there is a green fluorescent powder. As shown in Figure 19(4), the illumination system or subgroup, and some of the system units emit blue light, and the other part emits red light, and the material is 4〇b. It is disposed on the 'blue, light, and θ η fluorescent powders. As shown in Figure 19(4), the illumination system or sub-group 70 emits blue light, and the other part of the system unit emits color. First, the material 40b is disposed on a partial or partial blue light system mixed with green phosphor powder. ^ As shown in Figures 20(a) to 20(c), the illumination system or the effect or actuation system unit Blue light is emitted. In Figure (a): i0b==Light tr another material in another area 4_= ^ In Figure (8), the material of the - region is mixed with green and the material of the domain is 4〇b is mixed with red fluorescent Powder, and the two regions are 3 abundance, and the short-wavelength illuminating region is a longer-wavelength illuminating region. The near-m sm material is mixed with red and yellow fluorescing powder. The unit emits a person to perceive the perception, for example: = Green and red fluorescent powder material 40b, respectively, arranged in the system i °, infernal touch The efficiency of the filament, the recession is specially made or the continuation of the 'application' blue light with the appropriate ratio ΐ ί ί can produce cool white light; blue light with the appropriate proportion of yellow ΐϊ,, work color can produce warm Self-light. The ratio of blue light to red light power is about 2: 丨 ~ 5 : such as .2.5 : Bu 3 : Bu 3.5 : Bu 4 : Bu 4.5 : i. The work of green light and yellow light 201104914 = ^., 4 non; ^ = mid-month = 4 () and 4% of the size ratio and configuration area adjustment, exchange H month, - implementation method 'users can be based on the situation unit a system that can be fed to the path of (4)

i體二=:4:b與編體搭配方式上S 心、、《塊體、陶瓷塊體、染料、或苴纽 更可統3群組除包括可發射光線之系統單元30外, 如第21 (a)圖^為1或部分之糸統單元30之電路中繼’ • 連接系统單it3。,71"。/〒電路,光電系統或子群組更可以 統,財,祕單元3G’係一供電系 中,系統單元^於-實施例 而古,系绩罝斧如,/坚糸、.先、交頻糸統、整流糸統。具體i body two =: 4: b and the matching mode on the S heart, "block, ceramic block, dye, or 苴 更 更 3 3 3 3 3 3 3 3 3 3 3 3 3 21 (a) Figure 2 is a circuit relay of unit 1 or part of the unit 30. • Connect the system unit it3. ,71". /〒 circuit, photoelectric system or subgroup can be unified, financial, secret unit 3G' is a power supply system, system unit ^ in the case of the ancient, the performance of the axe, / firm, first, pay Frequency system, rectification system. specific

Su;ply ;'SWMP) , 元件為限,-或二飢糸糸統早兀30非以皆為發光 料,域料秘《光功能之 之’ &依_純之—賊細狀光電系統 flm提供—载具ig(於本實施例中亦稱為暫 暫時基板1G上以旋轉塗佈、紐或_等方式形 成黏巧之層或結構20 (於本實施例中亦稱為第 一連接層)’並可以藉由一挑選放置系統(Pick & Place system) 系統單元30 (於本實施例令亦稱為光電元 件)放置並連接在上述第一連接層20之上,並在複數個光電 70件30之間隔區域形成複數個走道區304,其中光電元件30 放置時之對位精準度主要係由挑選放置系統決定,例如,誤差 =超,15哗。其中上述光電元件3〇可為一發光二極體,其結 構可〇含-基板303、形成在基板上之半導體蟲晶層3〇2與至 13 201104914 i 料導體蟲晶層302可包含―第—導電型 4+ff層、—活性層,以及—第二導電型半導體層。此外,基 板303可以選擇性地於製造流程中移除 :較=例中’此光電元件30之至少一個電 第連接層20接觸。上述複數個光電元件3〇可發出具有相同 或不同波長之光,其發光範圍可從紫外光至紅外線。Su;ply;'SWMP), the component is limited, or the two hunger 兀 兀 兀 非 非 非 非 非 非 非 非 非 非 非 , , , , , , , 域 域 域 域 域 域 域 域 域 域 域 域 域 域 域 域 域 域 域 域 域The flm provides a carrier ig (also referred to as a temporary layer on the temporary substrate 1G in this embodiment in a spin coating, a button or the like) to form a layer or structure 20 (also referred to as a first connection in this embodiment). And can be placed and connected to the first connecting layer 20 by a Pick & Place system system unit 30 (also referred to as a photovoltaic element in this embodiment), and in multiple layers The spacing area of the photoelectric 70 pieces 30 forms a plurality of aisle areas 304, wherein the alignment accuracy when the photoelectric elements 30 are placed is mainly determined by the selection placement system, for example, error=super, 15哗. The above photoelectric element 3〇 can be a light-emitting diode, the structure of which may include a substrate 303, a semiconductor crystal layer formed on the substrate, 3〇2 and 13 201104914, the material conductor layer 302 may include a “conducting type 4+ff layer, An active layer, and a second conductive type semiconductor layer. Further, the substrate 303 may Optionally removed in the manufacturing process: in comparison with at least one electrical connection layer 20 of the photovoltaic element 30. The plurality of photovoltaic elements 3 〇 can emit light having the same or different wavelengths, and the illumination range thereof can be From ultraviolet light to infrared light.

—上述暫時基板10之材料可選自矽膠(silic〇ne)、玻璃、 石英、陶瓷、合金或印刷電路板(PCB);上述第一連接 的材料可選自料,例如為熱移轉帶(thermal一)、 紫外線移轉帶(UVi*eleasetape)、化學移轉帶π— release tape)、耐熱膠帶或藍膜;上述光電元件3〇之基板3〇3 ,材?可選自贿石(Sapphire )、碳切(Sic )、氧化鋅(Zn〇 )、 氮化鎵(GaN)切、玻璃、石英、或陶料高導熱基板;上 述光電το件30之第-導電型半導體層、活性層及第二導電型 ,導體層之材料包含-種或—種以上之物f選自鎵(Ga)、銘 (A1)、錮(in)、砷(As)、磷(p)、氮(N)以及石夕(si)所 構成群組。The material of the temporary substrate 10 may be selected from the group consisting of silica, glass, quartz, ceramic, alloy or printed circuit board (PCB); the first connected material may be selected from materials such as a heat transfer belt ( Thermal one), UVi*eleasetape, π-release tape, heat-resistant tape or blue film; substrate 3〇3 of the above-mentioned photovoltaic element, material can be selected from bribe stone (Sapphire) , carbon cut (Sic), zinc oxide (Zn), gallium nitride (GaN) cut, glass, quartz, or ceramic high thermal conductivity substrate; the first conductive type semiconductor layer, active layer and In the second conductivity type, the material of the conductor layer contains - or more than a substance f selected from the group consisting of gallium (Ga), indium (A1), indium (in), arsenic (As), phosphorus (p), and nitrogen (N). And the group formed by Shi Xi (si).

^接著,如第23B圖所示,提供一材料40 (於本實施例中 係具體為黏性膠材)填滿上述複數個光電元件3〇之走道區 304,並且覆蓋上述複數個光電元件3〇及未被光電元件覆蓋之 第一連接層20表面。其中上述黏性膠材4〇可以利用旋轉塗 佈、印刷或鑄模灌膠等方式形成,且黏性膠材4〇亦可為一彈 性材料,其材料可選自石夕膠(silic〇ne灿⑹)、石夕樹脂(础 resm)、矽膠、彈性PU、多孔pu、丙烯酸橡釈acrylicrubber) 或晶粒切割膠,如藍膜或UV膠。在本實施例中,也可進行一 抛,製程(polish process),使上述複數個光電元件30之表 面平坦化,並讓上述光電元件3〇表面不會產生過剩(〇ver£j〇w) 或凹陷之黏性膠材40。 隨後,如第23C圖所示,提供一次載具5〇 (於本實施例 中亦稱為永久基板),並將之與塗佈黏性膠材4〇之複數個光 14 201104914 2件30、接合’此接合方式可為—熱壓製程。在—較佳實施 繊ΙΛ匕水久基板50與上述光電元件30之基板303直接接 Ξ ° 水i基板5G之材料可為梦膠(―、玻璃、石 央、陶^、合金或印刷電路板(PCB)。 安接第23D圖所示’可以雷射剝離、加熱分離膠膜 谷解賴圖案等方式移除上述暫時基板1〇、第一連接 U部分黏性膠材4〇後裸露出複數個光電元件30之_ 301及部分半導體磊晶層302。 如·ΐ23Ε圖所示,以黃光導線接合、打線接合之方 61(於本實施例中係具體為複數條導線)以 ί 3 ί牛之電極30卜以串聯此複數個光電元件 以g iffί60之材料可為金、銘、合金或多層金屬, 以形成一系統級光電結構。 ϋ24(ϊ圖為根據本發明另—具體實施例製造 二其中與第23圖之實施例相近或相同之元 時美杯1Π相標Γ虎’以下同)。如第24A圖所示’提供一暫 基板1G上以旋轉塗佈、蒸鍍或印刷等方式 ‘糸絲具黏性之第—連接層20,並可以藉由挑選放 2'ίt e SyStem)將複數絲雜之光電元件30 w 在上述第一連接層20之上,並在複數個光電元件 30之間隔區域形成複數個走道區跡其中光電元件放置時之 =精準度以不超過挑選放置系統之容許誤差為限 ,例如不超 ^人述光電元件3G可為—發光二極體,其結構可 形成在基板上之半導體蟲晶層與至少一 個電極301。上述半導體蟲晶㉟302可包含-第-導電型半導 層’以及一第二導電型以層在 20接觸卜H30之至少一個電極301與上述第一連接層 亍光電元件30可發出具有相同或不同波長之光, 其發先棘圍可從紫外光至紅外線。 上述暫時基板1〇之材财選自娜(silic〇ne) 、玻璃、 15 201104914 石英、陶瓷、合金或印刷電路板(PCB);上述第一連接層2〇 的材料可選自膠帶,例如為熱移除膠帶(therma】 release tape)、 紫外線移除膠帶(UV release tape)、化學移除膠帶(Chemical release tape)、耐熱膠帶、藍膜或金屬;上述光電元件3〇之基 板303的材料可選自藍寳石(Sapphire)、碳化石夕(Si〇、氧化鋅 々(?0)、氮化鎵(GaN)或矽、玻璃、石英、GaAs、或陶瓷 專尚導熱基板,上述光電元件3〇之第一導電型半導體層、活 性層及第二導電型半導體層之材料包含一種或一種以上之物 質選自鎵(Ga)、!呂(A1)、銦(in)、砷(As)、磷⑺、氮 (N)以及石夕(Si)所構成群組。 此外,如第24A圖所示,在本發明的系統級光電結構中,籲 也可先以一螢光材料p包覆每個上述光電元件3〇。藉由螢光 材料的平均被覆,可提供-個穩定的白光光源,並減少之後製 程上每個光電元件30之白光的差異性。其申上述螢光材料p 可以旋轉塗佈、沉積、點膠、刮刀或鑄膜灌膠等方式形成。在 另一實施例中,上述複數個光電元件3〇也可各別包覆不同之 螢光材料。在另一實施例中,上述複數個光電元件3〇也可以 選擇性的各別包覆不同之螢光材料,而非所有的光電元件3〇 都包覆,以混合出不同的色光。例如在一實施例中,複數個光 電元件30可為藍光發光二極體,並將複數個光電元件3〇中之 二個光電元件30視為一組,其中第一個光電元件包覆之螢光籲 材料P可為紅色螢光粉、第二個光電元件包覆之螢光材料p 可為綠色螢光粉’且第三個光電元件可不包覆榮光材料,以混 合發出白光。 接著,如第24B圖所示,提供一黏性膠材4〇填滿上述複 數個光電元件30之走道區304,並且覆蓋上述複數個光電元 件30及未被光電元件覆蓋之第一連接層2〇表面。其中上述黏 性膠材40可以利用旋轉塗佈、印刷或鑄模灌膠等方式形成, 且黏性膠材40可為一彈性材料,其材料可選自矽膠(smc〇ne rubber)、石夕樹脂(siiicone resin)、石夕膠、彈性pu、多孔扣、 16 201104914 丙烯酸橡膠(acrylic rubber)或晶粒切割膠’如藍膜或^膠 在本實施例中’也可進行一拋光製程,可"° 上述複數個光電元件30之表面平坦化,並讓上述光電元件3〇 表面不會產生過剩(overflow)或凹陷之黏性膠材4〇。 隨後,如第24C圖所示,提供一永久基板5〇,並將之盥 塗佈黏性膠材40之複數個光電元件30接合,此接合方式可^ =熱壓製程。在一較佳實施例中,此永久基板5〇與上以光^ 元件30之基板303直接接觸。上述永久基板50之材料可為 璃或石英等高透明度基板。 …Then, as shown in FIG. 23B, a material 40 (specifically, a viscous rubber material in the present embodiment) is provided to fill the aisle region 304 of the plurality of photovoltaic elements 3, and cover the plurality of photovoltaic elements 3 The surface of the first connection layer 20 that is not covered by the photovoltaic element. The above-mentioned adhesive rubber material can be formed by spin coating, printing or mold filling, and the adhesive material can also be an elastic material, and the material can be selected from the group of silicin. (6)), Shixi resin (base resm), silicone, elastic PU, porous pu, acrylic rubber (acrylic rubber) or grain cutting glue, such as blue film or UV glue. In this embodiment, a polishing process may be performed to planarize the surface of the plurality of photovoltaic elements 30, and the surface of the photovoltaic element 3 is not excessively generated (〇ver£j〇w). Or a viscous adhesive 40. Subsequently, as shown in FIG. 23C, a carrier 5〇 (also referred to as a permanent substrate in this embodiment) is provided, and is combined with a plurality of lights 14 coated with a viscous adhesive material. Bonding 'this joining method can be--hot pressing process. In the preferred embodiment, the water-repellent substrate 50 and the substrate 303 of the above-mentioned photovoltaic element 30 are directly connected to each other. The material of the water substrate i can be Mengjiao (-, glass, stone, ceramic, alloy or printed circuit board). (PCB). The second substrate shown in Figure 23D can be removed by laser stripping, heating and separation of the film, and the first layer of the adhesive layer is removed. _ 301 of a plurality of photovoltaic elements 30 and a portion of the semiconductor epitaxial layer 302. As shown in Fig. 23, the side 61 of the yellow wire bonding and wire bonding (in the present embodiment, specifically a plurality of wires) is ί 3 ί The electrode of the cow 30 is connected in series with the plurality of photovoltaic elements, and the material of g iffί60 can be gold, metal, alloy or multi-layer metal to form a system-level photovoltaic structure. ϋ24 (The figure is made according to another embodiment of the invention) 2. In the same way as the embodiment of Fig. 23, the Yuanshimei Cup is the same as the above. As shown in Fig. 24A, 'providing a temporary substrate 1G for spin coating, evaporation or printing, etc. The way 'the silk is sticky - the connecting layer 20, and can The plurality of wires 30w are placed on the first connecting layer 20 by a pick-and-place 2', and a plurality of track regions are formed in the spaced regions of the plurality of photovoltaic devices 30. The accuracy is not limited to the tolerance of the pick-and-place system. For example, the photo-electric component 3G may be a light-emitting diode having a structure in which a semiconductor crystal layer and at least one electrode 301 are formed on the substrate. The semiconductor crystallite 35302 may comprise a -first conductivity type semiconductive layer 'and a second conductivity type to have at least one electrode 301 of the layer contact H30 and the first connection layer 亍 photovoltaic element 30 may emit the same or different The wavelength of light, from the first to the spine can be from ultraviolet light to infrared light. The material of the temporary substrate 1 is selected from the group consisting of silica, glass, 15 201104914 quartz, ceramic, alloy or printed circuit board (PCB); the material of the first connecting layer 2 can be selected from tape, for example Heat removal tape (therma) release tape, UV release tape, chemical release tape, heat resistant tape, blue film or metal; the material of the above-mentioned photovoltaic element 3 基板 substrate 303 can be Selected from sapphire (Sapphire), carbonized stone (Si〇, zinc oxide yttrium (?0), gallium nitride (GaN) or tantalum, glass, quartz, GaAs, or ceramic heat-conductive substrate, the above-mentioned photovoltaic element 3〇 The material of the first conductive semiconductor layer, the active layer and the second conductive semiconductor layer comprises one or more substances selected from the group consisting of gallium (Ga), Lu (A1), indium (in), arsenic (As), and phosphorus. (7), nitrogen (N) and Shi Xi (Si) group. Further, as shown in Fig. 24A, in the system-level photovoltaic structure of the present invention, the call may first be coated with a fluorescent material p. The above-mentioned photovoltaic element 3〇. By the average coating of the fluorescent material, it can be mentioned a stable white light source and reducing the difference in white light of each of the photovoltaic elements 30 in the subsequent process. The fluorescent material p can be formed by spin coating, deposition, dispensing, doctor blade or cast film filling. In another embodiment, the plurality of photovoltaic elements 3 can also be coated with different fluorescent materials. In another embodiment, the plurality of photovoltaic elements 3 can also be selectively coated differently. The phosphor material, rather than all of the photovoltaic elements 3〇, is coated to mix different colored lights. For example, in one embodiment, the plurality of photovoltaic elements 30 can be blue light emitting diodes and a plurality of photovoltaic elements The two photovoltaic elements 30 of the three turns are regarded as a group, wherein the fluorescent material C coated by the first photoelectric element may be red fluorescent powder, and the fluorescent material p coated by the second photoelectric element may be green The phosphor powder 'and the third photovoltaic element may not be coated with the luminescent material to be mixed to emit white light. Next, as shown in Fig. 24B, a viscous adhesive material 4 is provided to fill the aisle region 304 of the plurality of photovoltaic elements 30. And covering the above plural The photovoltaic element 30 and the surface of the first connecting layer 2 which are not covered by the photovoltaic element, wherein the adhesive adhesive 40 can be formed by spin coating, printing or mold potting, and the adhesive adhesive 40 can be elastic. The material may be selected from the group consisting of smc〇ne rubber, siiicone resin, shijiao rubber, elastic pu, porous buckle, 16 201104914 acrylic rubber or crystal cutting gel such as blue film. Or in the present embodiment, 'a polishing process can be performed, and the surface of the plurality of photovoltaic elements 30 can be flattened, and the surface of the above-mentioned photovoltaic element 3 does not have an excess of overflow or depression. Sex rubber 4 〇. Subsequently, as shown in Fig. 24C, a permanent substrate 5 is provided, and a plurality of photovoltaic elements 30 coated with the adhesive adhesive 40 are bonded, which can be joined by a hot pressing process. In a preferred embodiment, the permanent substrate 5 is in direct contact with the substrate 303 on which the optical component 30 is placed. The material of the permanent substrate 50 may be a highly transparent substrate such as glass or quartz. ...

接著,如第24D圖所示,可以雷射剝離、加熱分離膠膜 圖案、溶解膠膜圖案等方式移除上述暫時基板丨〇、第一連接 層20與部分黏性膠材40後裸露出複數個光電元件3〇之電極 3〇1及部分半導體磊晶層3〇2。 然後’如第24E圖所示,以電鍍或蒸鍍之方式,將複數個 擴張電極(Fan-out electrode) 305連接在複數個光電元件之 電極301之上。其中擴張電極3〇5之面積大於光電元件之電極 301可增加後續封褒的對位容忍度。此外,由於加大擴張電Then, as shown in FIG. 24D, the temporary substrate 丨〇, the first connecting layer 20 and the partial adhesive layer 40 may be removed by laser stripping, heating and separating the film pattern, and the film pattern is dissolved. The electrodes 3 〇 1 of the photovoltaic element 3 and the partial epitaxial layer 3 〇 2 of the semiconductor. Then, as shown in Fig. 24E, a plurality of Fan-out electrodes 305 are connected to the electrodes 301 of the plurality of photovoltaic elements by electroplating or evaporation. Wherein the area of the dilated electrode 3〇5 is larger than the electrode 301 of the optoelectronic element to increase the parametric tolerance of the subsequent encapsulation. In addition, due to increased expansion

,305的面積,將更可有效把熱源導到後續封裝之金屬或PCB 等基板上。上述擴張電極之材料可為金、鋁、合金或多層金屬 結構。 最後,如第24F〜24G圖所示,切割此複數個光電元件, 形成各別之晶粒後,藉由至少一焊料(solder) 601將之黏接 至次載體(submount) 60之上,以形成一系統級光電結構。 上述之次載體60可以是導線架(lead frame)或大尺寸鑲嵌基 底^mounting substrate),以方便系統級光電結構之電路規劃並 k南其散熱效果。 值得注意的是,上述兩實施例中的製程步驟也可互相參照 或組合,如第一實施例中之光電元件也可選擇性的包覆螢光材 料,或在第23D圖後也可接續第24E圖之製作擴張電極、切 割晶片等後續步驟;同理,第二實施例也可在第24D圖後接 17 201104914 續第23E圖之步驟’以導線電連接複數個光電元件。 之德此1 卜莖明另一實施例中’接續在第23B或24B圖 久某板,可提供—永久基板5G,並先將此永 ί ^ %之场將讀塗佈黏性膠 P。Μ上u 2件3G接合,此接合方式可為—熱壓製 ,其中十”:連接層70之材料可為⑽肩、石夕膠 圖=^如第2=明另一實施例中’接續在第23B或24B 圖之後々第25B圖所示,上述第車技 複數通道701之第二雜展7n第一連接層7〇也可為一包含 .之散熱,並可提升ϋ之曰瓦=增加本系統級光電元件The area of 305 will be more effective in guiding the heat source to the substrate such as metal or PCB of the subsequent package. The material of the above-mentioned expanding electrode may be gold, aluminum, alloy or a multilayer metal structure. Finally, as shown in Figures 24F-24G, the plurality of photovoltaic elements are diced to form respective dies, and then bonded to the submount 60 by at least one solder 601. A system level photovoltaic structure is formed. The secondary carrier 60 may be a lead frame or a large-sized mounting substrate to facilitate circuit planning of the system-level photovoltaic structure and its heat dissipation effect. It should be noted that the process steps in the above two embodiments may also be referred to or combined with each other. For example, the photovoltaic element in the first embodiment may also selectively coat the fluorescent material, or may continue after the 23D image. The subsequent steps of making the electrode, cutting the wafer, etc. in Fig. 24E; similarly, the second embodiment can also be electrically connected to the plurality of photovoltaic elements by wires in the step of Fig. 24D and subsequent steps of Fig. 23E. In the other embodiment, in the other embodiment, the panel is attached to the panel 23B or 24B, and the permanent substrate 5G is provided, and the adhesive layer P is first read and applied to the field. U 2 pieces of 3G joints, this joining method can be - hot pressing, wherein ten": the material of the connecting layer 70 can be (10) shoulder, Shishijia map = ^ as the second = Ming in another embodiment 'continued in After the 23B or 24B diagram is shown in FIG. 25B, the second hybrid layer 7n of the first vehicle technology complex channel 701 may also be a heat dissipation including a heat dissipation, and may increase the 曰 = = = increase System level optoelectronic components

. ίί 7Λ/ί、錦或合金。此外,通道701亦可與第二連 2;為相问之材質,例如藍寶石、金屬、氮化石夕、氧化 如第种;^在第加或观圖之後, 利用-中4 ^一板50 ’並先將此永久基板50 -第二連接^ 7Π 先連接—第—反射層8G,再接合在 電元件30接人 ^後’將之與塗佈黏性膠材40之複數個光 =1如合方式可為一熱壓製程。其中,中介層 RO ^ 、X SlNx、石夕膠(Slhcone)等。上述第一反射声. ίί 7Λ/ί, brocade or alloy. In addition, the channel 701 can also be connected to the second 2; for the material of the question, such as sapphire, metal, nitride, oxidized as the first species; ^ after the addition or viewing, using - 4 ^ a plate 50 ' And firstly connecting the permanent substrate 50 - the second connection ^ 7 Π first - the first reflective layer 8G, and then bonding the electrical component 30 after the connection is made ^ and the plurality of light coated with the adhesive adhesive 40 = The combination method can be a hot pressing process. Among them, the interposer RO ^, X SlNx, SlHcone, and the like. The first reflected sound

组成之或翻等金屬,或者為由介電質或半導^ 加本i統反射—,可增 而可上述複數個光電元件30若擺放得太近 中,本微=^MlCn>Py_id _y)之基板 50’。其 上之可1用轉體#職術製成,基板 錐結構,其中卜/式可為圓錐、二角錐和四角錐等多角 具中上述极角錐5〇1之底角可介於20〜70度之間。在 18 201104914 微角錐陣列基板5〇,之表面還可彼覆具高 if Γ 例如銀、銘、轉金屬:此外,上述微 陶究、合金或印刷電(=:e)、玻璃、石英、 C可讀,其材料可為銅、銘、陶£、石夕。製作 與塗佈黏性膠材如 、及先電了,之側向光反射成為正向細利增加光萃取效 i各圖式與酬雖僅分職顧定實_,缺而革各個 實施例十所說明或揭露之元件、實施方式、設計“而= 原理^在彼此顯相衝突、矛盾、或難以共同實施之外,玉人ς 可ϋίϊί參照、交換、搭配、協調、或合併〇 〇田 ® I已說明如上’然其並非用以限制本發明之範 圍、實%順序、或使用之材料與製 庫 各種修飾與變更,皆不脫本發明之精神與範圍、。-明所作之The composition or the flipping of the metal, or by the dielectric or semi-conducting plus the reflection of the system - can be increased, if the plurality of photovoltaic elements 30 are placed too close, the micro = ^ MlCn > Py_id _y The substrate 50'. The above can be made by using the body of the body, the cone structure of the substrate, wherein the shape can be a cone, a double cone and a quadrangular cone. The bottom angle of the above-mentioned polar pyramid 5〇1 can be between 20 and 70. Between degrees. In the 18 201104914 micro-corner array substrate 5 〇, the surface can also be covered with high if Γ such as silver, Ming, and metal: In addition, the above micro-ceramic, alloy or printed electricity (=: e), glass, quartz, C Readable, the material can be copper, Ming, Tao, Shi Xi. The production and application of adhesive adhesive materials, such as, and the first electricity, the lateral light reflection becomes a positive fine profit to increase the light extraction efficiency i each figure and remuneration, although only divided into the work of the real _, the lack of each of the ten examples Explain, disclose, coordinate, or merge Putian® I with the elements, implementations, and designs that are described or revealed. It is to be understood that the scope of the invention is not intended to limit the scope of the invention, the actual order, or the use of the materials and the various modifications and variations of the invention, without departing from the spirit and scope of the invention.

19 201104914 【圖式簡單說明】 ^1圖係顯示一發光二極體封裝結構; 圖至第2d圖係顯示依據本發明一實施例之光電系統 臬造方法; 、'、 ^ 3圖係顯示依據本發明一實施例之光電系統之示意圖; 第4圖係顯示依據本發明一實施例之系統單元與載具之示竟 ^ 5圖係顯示依據本發明一實施例之系統單元與次載具之示音19 201104914 [Simple description of the drawings] ^1 shows a light-emitting diode package structure; Figure 2 to Figure 2d shows a photovoltaic system manufacturing method according to an embodiment of the present invention; , ', ^ 3 A schematic diagram of an optoelectronic system according to an embodiment of the present invention; FIG. 4 is a diagram showing a system unit and a carrier according to an embodiment of the present invention, showing a system unit and a sub-carrier according to an embodiment of the present invention. Sound

第6圖係顯示依據本發明一實施例之光電系統中系統單元之電 • 連接示意圖; 第7圖係顯示依據本發明另一實施例之光電系統中系統單元 電連接示意圖; 第8圖係顯示依據本發明又一實施例之光電系統中系統單元之 電連接示意圖; 第9』Α圖至第9D圖係顯示依據本發明另一實施例之光電系統 之製造方法; 第1〇圖係顯示依據本發明一實施例之光電系統中系統單元之 電連接示意圖;Figure 6 is a schematic diagram showing the electrical connection of the system unit in the photovoltaic system according to an embodiment of the present invention; Figure 7 is a schematic view showing the electrical connection of the system unit in the photovoltaic system according to another embodiment of the present invention; A schematic diagram of electrical connections of system units in a photovoltaic system according to still another embodiment of the present invention; FIGS. 9 ′′ to 9D are diagrams showing a method of manufacturing a photovoltaic system according to another embodiment of the present invention; Schematic diagram of electrical connection of system units in an optoelectronic system according to an embodiment of the invention;

第丨1圖係顯示依據本發明一實施例之光電系統中子群組之示 . 意圖; ' 第12圖係顯示依據本發明一實施例之子群組之電性連接架 構; 第13圖係顯示依據本發明另一實施例之子群組之電性連接架 構; 第14圖係顯示依據本發明一實施例之單一系統單元之尺 圖; 第15圖係顯示依據本發明一實施例之光電系統中波長轉換材 料之配置方式; ' 第16圖係顯示依據本發明另一實施例之光電系統中波長轉換 20 201104914 材料之配置方式; 第17圖係顯示依據本發明又一實施例之光電系統中波長轉換 材料之配置方式; 第18圖係顯示依據本發明一實施例之光電系統中波長轉換材 料之配置方式; ' 第19圖係顯示依據本發明另一實施例之光電系統中波長轉換 材料之配置方式; ' 第20圖係顯示依據本發明又一實施例之光電系統中波長轉換 材料之配置方式; ' 第21圖係顯示依據本發明一實施例之光電系統中系統單元之 馨 配置不意圖; 第22圖係顯示依據本發明一實施例之光電系統或子群组之配 置示意圖; 第23A圖至第23E圖為本發明製造流程結構示意圖; 第24A圖至第24G圖為本發明製造流程結構示意圖; 第25A與25B圖為本發明實施例之製造流程結構示意圖; 第26圖為本發明實施例之製造流程結構示意圖;及 第27圖為本發明實施例之製造流程結構示意圖。 21 201104914 【主要元件符號說明】 10 載具、暫時基板 60 電性連接 10a 外部體 60a 導線 10b 外部體 60b 内部連接 20 層、結構、第一連接層 60b, 隔離區 30 系統單元、光電元件 60c 電路載體 301 電極 601 焊料 302 半導體蟲晶層 70 第二連接層 303 基板 70, 第二連接層 304 走道區 701 通道 305 擴張電極 80 第一反射層 40 材料、黏性膠材 100 光電系統 50 次載具、永久基板 100a子群組 50, 基板 100b子群組 50a 接合層 100c子群組 501 微角錐 200 發光二極體封裝結構Figure 1 is a diagram showing a subgroup in a photovoltaic system according to an embodiment of the present invention. [12] shows an electrical connection architecture of a subgroup according to an embodiment of the present invention; An electrical connection architecture of a subgroup according to another embodiment of the present invention; FIG. 14 is a plan view showing a single system unit according to an embodiment of the present invention; and FIG. 15 is a view showing an optoelectronic system according to an embodiment of the present invention. The arrangement of the wavelength converting material; '16 is a configuration showing the wavelength conversion 20 201104914 material in the photovoltaic system according to another embodiment of the present invention; and FIG. 17 is a diagram showing the wavelength in the photovoltaic system according to still another embodiment of the present invention. The arrangement of the conversion material; Fig. 18 is a view showing the arrangement of the wavelength conversion material in the photovoltaic system according to an embodiment of the present invention; '19 shows the configuration of the wavelength conversion material in the photovoltaic system according to another embodiment of the present invention. MODE 20 shows a configuration of a wavelength conversion material in a photovoltaic system according to still another embodiment of the present invention; '21 is a display according to the present invention The arrangement of the system units in the photovoltaic system of the first embodiment is not intended; FIG. 22 is a schematic diagram showing the arrangement of the photovoltaic system or the sub-group according to an embodiment of the present invention; and FIGS. 23A to 23E are the manufacturing processes of the present invention. 24A to 24G are schematic views showing the structure of a manufacturing process of the present invention; FIGS. 25A and 25B are schematic views showing the structure of a manufacturing process according to an embodiment of the present invention; and FIG. 26 is a schematic structural view of a manufacturing process according to an embodiment of the present invention; 27 is a schematic structural view of a manufacturing process according to an embodiment of the present invention. 21 201104914 [Description of main components] 10 Carrier, temporary substrate 60 Electrical connection 10a External body 60a Conductor 10b External body 60b Internal connection 20 layers, structure, first connection layer 60b, isolation area 30 System unit, photoelectric element 60c circuit Carrier 301 electrode 601 solder 302 semiconductor crystal layer 70 second connection layer 303 substrate 70, second connection layer 304 walkway region 701 channel 305 expansion electrode 80 first reflective layer 40 material, adhesive material 100 photoelectric system 50 times carrier Sub-group 50 of permanent substrate 100a, sub-group 50b of substrate 100b sub-group 501 of micro-cone 200 illuminating diode package structure

七、申請專利範圍 22VII. Application for patent scope 22

Claims (1)

201104914 【主要元件符號說明】 10 載具、暫時基板 60 電性連接 10a 外部體 60a 導線 10b 外部體 60b 内部連接 20 層、結構、第一連接層 60b, 隔離區 30 系統單元、光電元件 60c 電路載體 301 電極 601 焊料 302 半導體蟲晶層 70 第二連接層 303 基板 70, 第二連接層 304 走道區 701 通道 305 擴張電極 80 第一反射層 40 材料、黏性膠材 100 光電系統 50 次載具、永久基板 100a子群組 50, 基板 100b子群組 50a 接合層 100c子群組 501 微角錐 200 發光二極體封裝結構201104914 [Description of main components] 10 Carrier, temporary substrate 60 Electrical connection 10a External body 60a Conductor 10b External body 60b Internal connection 20 layers, structure, first connection layer 60b, isolation area 30 System unit, photoelectric element 60c Circuit carrier 301 electrode 601 solder 302 semiconductor crystal layer 70 second connection layer 303 substrate 70, second connection layer 304 walkway region 701 channel 305 expansion electrode 80 first reflective layer 40 material, adhesive material 100 photoelectric system 50 times carrier, Permanent substrate 100a subgroup 50, substrate 100b subgroup 50a bonding layer 100c subgroup 501 micro angle cone 200 light emitting diode package structure 七、申請專利範圍 22 201104914 .一種系統級光電結構製造方法,其步驟至少包含: 提供一暫時基板; 提供複數絲職域元件賴於該級社,並 個走道區; 触一黏性騎翻該歧區並覆蓋該未封Μ電元件; 提供-水久基板’藉由該黏性勝材接合該複數光電元件;以 及VII. Patent application scope 22 201104914. A system-level photoelectric structure manufacturing method, the method comprising the steps of: providing a temporary substrate; providing a plurality of silk field components depending on the level society, and a walkway area; And covering the unsealed electrical component; providing a water-repellent substrate by bonding the plurality of photovoltaic components by the adhesive material; 移除該暫時基板。 2. 如申δ月專利I巳圍第i項所述之系統級光電結構製造方法,更 bέ提供帛-連接層形成在該暫時基板之上並連接該複數 個未封裝光電元件。 3. 如申叫專利範圍第丨項所述之系統級光電結構製造方法,其 中該複數個未封裝光電元件可為發光二極體,且可具有相同 或不同之發光波長。 4. 如申請專利範圍第3項所述之系統級光電結構製造方法,其 中該發光二極體至少包含: 一基板; 一半導體磊晶層形成於該基板之上,包含—第一導電 型半導體層,一活性層,以及一第二導電型半導體層; 以及 一電極形成於該第一導電型半導體上。 5. 如申請專利範圍第4項所述之系統級光電結構製造方法,更 23 201104914 包含形成複數條導線電連接該複數個未封裝光電元件之電 極。 6·如申凊專利範圍第!項所述之系統級光電結構製造方法,其 中該複數個未封褒光電元件連接於該暫時基板後,可各別包 覆一螢光材料。 7. 如申請細_4項所述之純級域結補造方法,更 包含形成-擴張電極於各該複數個未封裝光電元件之電極 上。 8. 如申請專利範圍第1項所述之系統級光電結構製造方法,更^ 包含形成-第二連接層於該複數個未封裝光電元件與該永久 基板之間。 9. 如申w專利範圍第8項所述之系統級光電結構製造方法,其 中该第一連接層包含複數個通道。 10. 如申明專利範圍第8項所述之系統級光電結構製造方法, 更包含形成一第—反射層於該永久基板與該第二連接層之鲁 間。 η·如中μ專利範圍第1項所述之系統級光電結構製造方法, 其中°玄永久基板可為-具有複數個微角錐之陣列絲。 12.如申清專利範圍帛1項所述之系統級光電結構製造方法, /、中X暫寺基板與5亥永久基板之材料可為石夕膠(sili⑺ne)、 玻璃、石英、陶:是、合金或印刷電路板(PCB)。 13_如中料利軸第1項所述之系統級光電結構製造方法, 24 201104914 其中該複數個光電元件係利用一挑選放置系統放置於該暫時 基板之上。 14. 如申請專利範圍第1項所述之系統級光電結構製造方法, 其中該黏性膠材之材料可為矽膠(silicone rubber)、矽樹脂 (slllcone resin)、彈性 PU、多孔 PU、丙烯酸橡膠(acrylic rubber)或晶粒切割膠,如藍膜或^膠。 15. 如中料概圍第丨項職之祕級光電結構製造方法, • 其中該黏性膠材可以旋轉塗佈、印刷或鑄模灌膠等方式形成。 16. 如中料概圍第1顿述之祕級光電結構製造方法, 其中該黏性膠材藉由熱壓製程接合該複數光電元件及該永久 基板。 17·如申請專利範圍第1項所述之系統級光電結構製造方法, /、中α亥暫時基板可藉由雷射剝離、加熱分離膠膜圖案或溶解 膠膜圖案製程移除。 • 18.如申請專利範圍第2項所述之系統級光電結構製造方法, 其中為第-連接層可為膠帶,例如為熱移除膠帶(the麵】 release tape)、耐熱膠帶或藍膜。 I9·如”專利範圍第5項所述之祕級光電結構製造方法, 其中該導線的材料可為金、紹、合金或多層金屬。 2〇.如申請專利範圍第4項所述之系統級光電結構製造方法, 其中該發光二極體之電極接觸該暫時絲且該發光二極體之 基板接觸該永久基板。 25 201104914 21. 如申請專概圍第4項所述之祕級錢結構製造方法, ”中擔光一極體之該第—導電型半導體層、該活性層以及 u第一導電型半導體層之材料包含一種或—種以上之物質選 自鎵叫!呂㈤、銦(In)、坤(As),p)、氣(n) 以及矽(Si)所構成群組。 22. 如巾料·_ 8項所叙纽級光钱構製造方法, . 其中該第二連接層之材料可為Si〇x或SiNx。 • 技如申請專利範圍第9項所述之系統級光電結構製造方法,籲 其中該通道之材料可為金屬,如銅、紹、鎳或合金。 女申”月專利辜巳圍第1〇項所述之系統級光電結構製造方法, ’、中4第-反射層之材料可為銀、紹雜等金屬。 25.如申請專利範圍第11項所述之系統級光電結構製造方法, 其中該具有複數微角錐之陣列基板材料可為石夕膠 (sihcone)、玻璃、石英、喊、合金或印刷電路板(pcB )。 . 如申明專利1巳圍第11項所述之系統級光電結構製造方法,鲁 . 其中該微角錐可為—圓錐、三角錐和四角錐等多角錐結構。 27·如申請專利範圍第u項所述之系統級光電結構製造方法, 其中該微角錐之底角角度可介於20〜70度之間。 28·如”專概圍第11項所述之纽級域結構製造方法, 其中4具有魏微鱗之卩車舰板之表面可披覆—第二反射 層。 29.如申請專利範圍第28項所述之系統級光電結構製造方法, 26 201104914 其中δ亥第一反射層之材料可為銀、銘、舶等金屬。 30. 如申請專利範圍第7項所述之系統級光電結構製造方法, 更包含切割此複數個未封裝光電元件,形成各別之晶粒後, 藉由該擴張電極,將之接合至一次載體(submoimt)之上。 31. 如申請專利範圍第3〇項所述之系統級光電結構製造方法, 其中5亥次載體可以是導線架〇eadframe)或大尺寸鐵絲底 (mounting substrate )。 籲 32. —種系統級光電結構,至少包含: 一永久基板;以及 複數個未封裝光電元件形成於該永久基板之上,並在其間隔 區域形成至少-走道區,並轉性膠材填滿該走道區。 33. 如中請翻制第32顿述H級光電結構,更包含以 複數條導線電連接該複數個未封裝光電元件。 34. 如申請專利範圍第32項所述之系統級光電結構,更包含一 ^ 連接層形成在該永久基板與該複數個未封裝光電元件之間。 35. 如申„月專利|色圍第Μ項所述之系統級光電結構,其中該連 接層可包含複數個通道。 ^ 36. 士申叫專利範圍第34項所述之系統級光電結構,更包含一 第反射層形成在該永久基板與該連接廣之間。 37. 如申請專利範圍第34項所述之系統級光電結構,其中該永 久&板可#-驗肖狀陣列基板。 38. 如申明專利範圍第37項所述之系統級光電結構,其中該微 27 201104914 角錐陣列基板具有複數個微角錐。 39. 如申請專利範圍第32項所述之系統級光電結構,其中該複 數個未封裝錢元件可為發光二減,且可具有相同或不同 之發光波長。 40. 如申請專利範圍第39項所述之系統級光電結構,其中該發 光二極體至少包含: • 一基板; • 一半導體磊晶層形成於該基板之上,包含一第一導電 型半導體層,一活性層,以及一第二導電型半導體層; 以及 一電極形成於該第一導電型半導體上。 41. 如申請專利範圍第40項所述之系統級光電結構,更包括以 一螢光材料包覆該複數發光二極體。 42. 如申請專利範圍第41項所述之系統級光電結構,其中包覆 . S亥複數個發光二極體之螢光材料可為相同或不同材料。 • 43.如申請專利範圍第40項所述之系統級光電結構,其中該發 光二極體之基板直接接觸該永久基板。 4.如申明專利乾圍第4〇項所述之系統級光電結構,更包括形 成至少一擴張電極於該複數個發光二極體之電極上。 45.如申請專利範圍第32項所述之系統級光電結構,其中該永 久基板之材料可為矽膠(silic〇ne)、玻璃、石英、陶瓷、合 28 201104914 金或印刷電路板(pCB)。 46. 如申3月專利範圍第32項所述之系統級光電結構,其中該黏 f生膠材之材料可為矽膠(silic〇ne mbber)、矽樹脂(silic〇ne reSm)、彈性PU、多孔PU、丙烯酸橡膠(acryliCrubbe〇或 晶粒切割膠,如藍膜或UV膠。 47. 如申請專利範圍第32項所述之系統級光電結構,其中該導 線的材料可為金、鋁、合金或多層金屬。 • 48.如申請專利範圍帛4〇項所述之系統級光電結構,其中該發 光一極體之該第一導電型半導體層、該活性層及該第二導電 型半導體層之材料包含一種或一種以上之物質選自鎵 (Ga)、鋁(A1)、銦(In)、砷(As)、磷(P)、氮(N)以 及矽(Si)所構成群組。 49.如申請專利範圍第34項所述之系統級光電結構,其中該連 接層之材料可為Si〇x,SiNx。 鲁 5〇. *申請專利範圍帛35項所述之系統級光電結構,其中該通 道之材料可為金屬,如銅、鋁、鎳或合金。 51. 如申請專利範圍第%項所述之系統級光電結構,其中該第 一反射層之材料可為銀、鋁或鉑等金屬。 52. 如申請專利範圍第37項所述之系統級光電結構,其中該具 微角錐之陣列基板之材料可為矽膠(silicone)、玻璃、石英、 陶瓷、合金或印刷電路板(PCB)。 53. 如申請專利範圍第%項所述之系統級光電結構,其中該微 29 201104914 角錐可為-圓錐、三角錐和四角錐等多角錐結構。 如申明專利|巳圍第38項所述之系統級光電結構,其中 角錐之底角角度可介於2〇〜%度之間。 5.如申δ月專利範圍第37項所述之系統級光電結構,其中該微 角錐陣列基板之表面可披覆一第二反射層。 " 56.如申請專利範圍第55項所述之系統級光電結構,其中該第 二反射層之材料可為銀、鋁、鉑等金屬。The temporary substrate is removed. 2. The method of fabricating a system-level photovoltaic structure according to item i of the above-mentioned Japanese Patent Application No. i, further comprising forming a tantalum-connecting layer formed on the temporary substrate and connecting the plurality of unpackaged photovoltaic elements. 3. The system-level photovoltaic structure manufacturing method of claim 2, wherein the plurality of unpackaged photovoltaic elements are light emitting diodes and may have the same or different emission wavelengths. 4. The method of manufacturing a system-level photovoltaic structure according to claim 3, wherein the light emitting diode comprises at least: a substrate; a semiconductor epitaxial layer formed on the substrate, comprising: a first conductive semiconductor a layer, an active layer, and a second conductive semiconductor layer; and an electrode formed on the first conductive semiconductor. 5. The system-level photovoltaic structure manufacturing method of claim 4, wherein the method of forming a plurality of wires electrically connects the plurality of electrodes of the unpackaged photovoltaic elements. 6.·If you apply for the patent scope! The system-level photovoltaic structure manufacturing method of the present invention, wherein the plurality of unsealed photovoltaic elements are connected to the temporary substrate, and each of the fluorescent materials can be coated. 7. The method of claim 3, wherein the forming-expanding electrode is formed on the electrodes of each of the plurality of unpackaged photovoltaic elements. 8. The method of fabricating a system-level photovoltaic structure according to claim 1, further comprising forming a second connection layer between the plurality of unpackaged photovoltaic elements and the permanent substrate. 9. The system-level photovoltaic structure manufacturing method of claim 8, wherein the first connection layer comprises a plurality of channels. 10. The system-level photovoltaic structure manufacturing method of claim 8, further comprising forming a first reflective layer between the permanent substrate and the second connecting layer. The system-level photovoltaic structure manufacturing method according to the first aspect of the invention, wherein the quaternary permanent substrate can be an array wire having a plurality of micro pyramids. 12. For the system-level photoelectric structure manufacturing method described in the scope of patent application 帛1, /, the materials of the X-temporary substrate and the 5-well permanent substrate may be sili (7)ne, glass, quartz, ceramic: yes , alloy or printed circuit board (PCB). 13_ A system-level photovoltaic structure manufacturing method according to item 1, wherein the plurality of photovoltaic elements are placed on the temporary substrate by a pick and place system. 14. The method of manufacturing a system-level photovoltaic structure according to claim 1, wherein the material of the adhesive material is silicone rubber, slllcone resin, elastic PU, porous PU, acrylic rubber. (acrylic rubber) or grain cutting glue, such as blue film or glue. 15. For example, in the middle of the material, the third-level optoelectronic structure manufacturing method, • The adhesive material can be formed by spin coating, printing or mold filling. 16. The method of manufacturing a secret photovoltaic structure according to the first aspect of the invention, wherein the adhesive material bonds the plurality of photovoltaic elements and the permanent substrate by a hot pressing process. 17. The method of fabricating a system-level photovoltaic structure according to claim 1, wherein the medium-alternating substrate can be removed by a laser stripping, heating separation film pattern or a dissolving film pattern process. 18. The system-level photovoltaic structure manufacturing method according to claim 2, wherein the first connecting layer is an adhesive tape, for example, a release tape, a heat resistant tape or a blue film. I9. The method for manufacturing a secret photovoltaic structure according to the fifth aspect of the patent, wherein the material of the wire may be gold, slag, alloy or multi-layer metal. 2〇. System level as described in claim 4 The photoelectric structure manufacturing method, wherein the electrode of the light emitting diode contacts the temporary wire and the substrate of the light emitting diode contacts the permanent substrate. 25 201104914 21. The application of the secret money structure described in Item 4 of the application The method, the material of the first conductive type semiconductor layer, the active layer, and the first conductive type semiconductor layer of the medium light-receiving body includes one or more substances selected from the group consisting of gallium, ruthenium (5), and indium (In) , Kun (As), p), gas (n), and 矽 (Si) groups. 22. The method for manufacturing a new-grade light structure according to the item of the towel, wherein the material of the second connecting layer may be Si〇x or SiNx. • A method of fabricating a system-level photovoltaic structure as described in claim 9 wherein the material of the channel is a metal such as copper, sulphur, nickel or an alloy. The method of manufacturing the system-level photoelectric structure described in the first paragraph of the patent application, the material of the fourth-first reflective layer can be a metal such as silver or slag. 25. If the patent application scope is 11th The system-level photovoltaic structure manufacturing method, wherein the array substrate material having a plurality of micro pyramids may be sihcone, glass, quartz, shout, alloy or printed circuit board (pcB). The method for manufacturing a system-level photovoltaic structure according to Item 11, wherein the micro-corner can be a polygonal pyramid structure such as a cone, a triangular cone, and a quadrangular pyramid. 27· The system-level photoelectric system as described in the scope of claim U The manufacturing method of the structure, wherein the angle of the bottom angle of the micro-horn can be between 20 and 70 degrees. 28· As for the manufacturing method of the new-level domain structure described in Item 11 of the article, 4 of which has the Wei Wei scale The surface of the vehicular plate can be covered - a second reflective layer. 29. The method of manufacturing a system-level photovoltaic structure according to claim 28, wherein the material of the first reflection layer of the δ hai may be a metal such as silver, inscription, or ship. 30. The method of fabricating a system-level photovoltaic structure according to claim 7, further comprising cutting the plurality of unpackaged photovoltaic elements to form respective crystal grains, and bonding the same to the primary carrier by the expansion electrode Above (submoimt). 31. The method of fabricating a system-level photovoltaic structure according to claim 3, wherein the 5th carrier can be a lead frame or a large-sized mounting substrate. 32. A system-level photovoltaic structure comprising: at least: a permanent substrate; and a plurality of unpackaged photovoltaic elements formed on the permanent substrate and forming at least a walkway region in the spaced regions thereof, and filling the adhesive material The walkway area. 33. If you want to reproduce the 32nd grade H-level photovoltaic structure, it also includes electrically connecting the plurality of unpackaged optoelectronic components with a plurality of wires. 34. The system level photovoltaic structure of claim 32, further comprising a connection layer formed between the permanent substrate and the plurality of unpackaged photovoltaic elements. 35. The system-level photovoltaic structure as described in the application of the patent, color division, wherein the connection layer may comprise a plurality of channels. ^ 36. The system-level photovoltaic structure described in the patent scope of claim 34, Further, a reflective layer is formed between the permanent substrate and the connection. 37. The system-level photovoltaic structure of claim 34, wherein the permanent & 38. The system-level photovoltaic structure of claim 37, wherein the micro 27 201104914 pyramid array substrate has a plurality of micro pyramids. 39. The system level photovoltaic structure of claim 32, wherein The plurality of unencapsulated money elements may be light-emitting minus, and may have the same or different wavelengths of light. 40. The system-level photovoltaic structure of claim 39, wherein the light-emitting diode comprises at least: a substrate; a semiconductor epitaxial layer formed on the substrate, comprising a first conductive semiconductor layer, an active layer, and a second conductive semiconductor layer; and an electrode formed on 41. The system-level photovoltaic structure of claim 40, further comprising coating the plurality of light-emitting diodes with a fluorescent material. 42. The system-level photovoltaic structure, wherein the fluorescent material covering the plurality of light-emitting diodes may be the same or different materials. 43. The system-level photovoltaic structure according to claim 40, wherein The substrate of the light-emitting diode directly contacts the permanent substrate. 4. The system-level photovoltaic structure of claim 4, further comprising forming at least one expansion electrode on the electrodes of the plurality of light-emitting diodes. 45. The system-level photovoltaic structure of claim 32, wherein the material of the permanent substrate is silicin, glass, quartz, ceramic, plex 28 201104914 gold or printed circuit board (pCB). 46. The system-level photovoltaic structure of claim 32, wherein the material of the adhesive can be silica gelne mbber, silica crucible, elastic PU, Porous PU, An acrylic rubber (acryliCrubbe) or a granule-cutting gel, such as a blue film or a UV gel. 47. The system-level photovoltaic structure of claim 32, wherein the wire is made of gold, aluminum, alloy or multilayer. The system-level photovoltaic structure according to claim 4, wherein the material of the first conductive semiconductor layer, the active layer and the second conductive semiconductor layer of the light-emitting body comprises One or more substances selected from the group consisting of gallium (Ga), aluminum (A1), indium (In), arsenic (As), phosphorus (P), nitrogen (N), and cerium (Si). 49. The system level photovoltaic structure of claim 34, wherein the material of the connection layer is Si〇x, SiNx. Lu 5〇. *Applicable to the system-level photovoltaic structure described in paragraph 35, wherein the material of the channel may be a metal such as copper, aluminum, nickel or an alloy. 51. The system-level photovoltaic structure of claim 1 wherein the material of the first reflective layer is a metal such as silver, aluminum or platinum. 52. The system-level photovoltaic structure of claim 37, wherein the material of the micro-horned array substrate is silicone, glass, quartz, ceramic, alloy or printed circuit board (PCB). 53. The system-level photovoltaic structure as described in claim 100, wherein the micro-29 201104914 pyramid can be a polygonal pyramid structure such as a cone, a triangular cone, and a quadrangular pyramid. For example, the system-level photovoltaic structure described in claim 38, wherein the corner angle of the pyramid can be between 2 〇 and %. 5. The system level photovoltaic structure of claim 37, wherein the surface of the micro pyramid array substrate is coated with a second reflective layer. The system-level photovoltaic structure of claim 55, wherein the material of the second reflective layer is a metal such as silver, aluminum or platinum. 3030
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TW98146171A TWI474503B (en) 2009-07-21 2009-12-30 Optoelectronic system
US12/840,848 US8999736B2 (en) 2003-07-04 2010-07-21 Optoelectronic system
US13/205,987 US9000461B2 (en) 2003-07-04 2011-08-09 Optoelectronic element and manufacturing method thereof
US13/886,083 US9142740B2 (en) 2003-07-04 2013-05-02 Optoelectronic element and manufacturing method thereof
US14/657,975 US9748449B2 (en) 2003-07-04 2015-03-13 Optoelectronic system
US14/679,066 US20150214449A1 (en) 2003-07-04 2015-04-06 Optoelectronic element
US14/858,477 US9893244B2 (en) 2003-07-04 2015-09-18 Optoelectronic element
US15/657,399 US20170324009A1 (en) 2003-07-04 2017-07-24 Optoelectronic system
US15/678,885 US10529898B2 (en) 2003-07-04 2017-08-16 Optoelectronic element
US15/973,091 US10686106B2 (en) 2003-07-04 2018-05-07 Optoelectronic element
US16/900,557 US11482651B2 (en) 2003-07-04 2020-06-12 Optoelectronic element having reflective layer in contact with transparent layer covering side and bottom surfaces of the optoelectronic element
US17/220,343 US20210226101A1 (en) 2003-07-04 2021-04-01 Optoelectronic system

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TWI513045B (en) * 2012-03-23 2015-12-11 Toshiba Kk Semiconductor light emitting device and method for manufacturing the same
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CN104167480B (en) * 2013-05-20 2017-01-25 展晶科技(深圳)有限公司 Method for manufacturing light-emitting diode
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CN113299804A (en) * 2021-06-29 2021-08-24 南京阿吉必信息科技有限公司 Micro-LED chip preparation and substrate stripping method
CN113299804B (en) * 2021-06-29 2022-07-29 南京阿吉必信息科技有限公司 Micro-LED chip preparation and substrate stripping method

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