TW201042412A - Precision temperature adjustment system and its control device - Google Patents
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- 238000001816 cooling Methods 0.000 claims description 88
- 230000008859 change Effects 0.000 claims description 38
- 238000010438 heat treatment Methods 0.000 claims description 35
- 238000012546 transfer Methods 0.000 claims description 27
- 230000000694 effects Effects 0.000 claims description 11
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- 238000006243 chemical reaction Methods 0.000 description 6
- 238000012360 testing method Methods 0.000 description 5
- 238000007796 conventional method Methods 0.000 description 4
- 239000000498 cooling water Substances 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 238000004364 calculation method Methods 0.000 description 3
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D23/00—Control of temperature
- G05D23/19—Control of temperature characterised by the use of electric means
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F11/00—Control or safety arrangements
- F24F11/89—Arrangement or mounting of control or safety devices
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B11/00—Automatic controllers
- G05B11/01—Automatic controllers electric
- G05B11/36—Automatic controllers electric with provision for obtaining particular characteristics, e.g. proportional, integral, differential
- G05B11/42—Automatic controllers electric with provision for obtaining particular characteristics, e.g. proportional, integral, differential for obtaining a characteristic which is both proportional and time-dependent, e.g. P. I., P. I. D.
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- Chemical & Material Sciences (AREA)
- General Engineering & Computer Science (AREA)
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- Air Conditioning Control Device (AREA)
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Abstract
Description
201042412 六、發明說明： 【發明所屬之技術領域】 本發明係關於精密溫度調節系統及其 【先前技術】 在半導體製造工廠等使用的淨化室等 業環境的條件要求嚴格。作爲該條件，可 管理、清淨度的保持、肅靜性（無振動的 室內（腔室內）的溫度管理，要求藉由空 度的恆溫管理。將此種對於腔室等而進行 理的系統’稱爲精密溫度調節系統。 作爲這樣的精密溫度調節系統，眾所 反饋控制器（PID)的裝置。 又，例如專利文獻1中所記載的先前 所公知。 專利文獻1的發明，係關於熱系設備 獻1的圖12中所示的押出成型機的氣缸 置’可以不依賴熟練者的感覺和經驗，且 (wind-up )，能夠簡單地進行溫度控制。 專利文獻1的溫度控制裝置，係具有 作量附加部和規範模型Pm，並進而具備 除手段的規範模型部，以及第一切換部。 係輸出用於操作控制對象P的操作量。浪 ，係從規範模型Pm去除浪費時間要素e 控制裝置。 (腔室）中，作 以列舉例如室溫 空間）等。關於 調設備進行高精 高精度的恆溫管 周知是使用例如 技術，亦爲人們 (例如該專利文 )的溫度控制裝 不使其產生扭曲 PID控制部、操 設有浪費時間消 操作量附加部， 費時間消除手段 。第一切換部 201042412 ’係在將來自操作量附加部的操作量輸入到控制對 側、和藉由PID控制部輸入操作量之側，此兩者之 切換電路。 而，上述規範模型部，係對於藉由浪費時間消 而使浪費時間要素e_ts被除去後的規範模型Pm之 測定，當其測定結果達到預先設定的目標値時，則 一切換部，並使得來自操作量附加部的操作量不被 控制對象P。 又，在專利文獻1中，對於設置有前授 forward)控制部一事，係亦有所揭示。 又，在專利文獻1中，如其圖3所示，還揭示 著具有上述規範模型Pm的干擾觀測部之構成。 [專利文獻] [專利文獻1]日本特開2001-2654〇8號公報 【發明內容】 [發明所欲解決之課題] 在此，關於上述精密溫度調節系統，有時會產 伴隨某種作業而必須開閉腔室門的情況。由於這樣 開閉，外部氣體流入腔室內等，而使腔室內溫度產 。亦即是，由於千擾而產生溫度變動。對於這種型 擾（稱爲非穩態干擾），本發明人藉由實驗等確認 前饋所進行之控制中多會有不夠充分的情況。 象P之 間，來 除手段 輸出作 操作第 輸入至 Ο (feed 有具備 生例如 的門的 生變動 式的干 ，在由 -6 - 201042412 另外’上述非穩態干擾發生的原因，並不侷限於上述 腔室門的開閉。作爲其他例，例如’由於設在腔室處的閘 門之開閉’相對於腔室的工件（晶片、玻璃基板等）之出 入’機械臂的出入等’也會產生上述非穩態干擾。 如上所述’在專利文獻1中’還對於具有規範模型 P m的干擾觀測部而有所揭示。另外，不侷限於專利文獻 1 ’以往’關於PID控制而設置規範模型或是干擾觀測部 一事本身’係爲人們所公知。 但是’其大多是將例如電動機、發電機等作爲控制對 象者’即使在上述專利文獻1中，也是以押出成型機（之 氣缸）作爲控制對象。亦即是，控制對象爲機器（機械式 裝置）。 另一方面’在上述精密溫度調節系統中，電性控制對 象是風扇、加熱器、冷卻器等，但本質上的控制對象是腔 室內溫度，而爲空氣。 以往’在精密溫度調節系統中，對於相當於上述規範 模型的控制對象模型或干擾觀測部而進行具體的模型化之 例子’係幾乎找不到。特別是對於上述非穩態干擾而能夠 進行充分有效控制的控制對象模型、干擾觀測部之具體例 ’係並未被發現。 本發明，是爲了解決上述習知技術所存在之問題而提 出者’本發明的課題在於，在精密溫度調節系統中，提供 一種：即使在發生非穩態千擾的情況時，也能夠將溫度調 節對象空間中的空氣溫度變動抑制在最小限度之精密溫度 -7- 201042412 調節系統、和其之控制裝置等。 [用以解決課題之手段] 爲了解決上述課題’本發明之技術手段如下： 本發明之精密溫度調節系統的其中一種形態，係將以 下精密溫度調節系統作爲前提： 該精密溫度調節系統包含： 溫度調節對象空間；和 冷卻手段’設在向該溫度調節對象空間供給冷卻空 氣之供給路徑內；和 加熱手段，設在上述供給路徑內，加熱從上述冷卻 手段供給之空氣，向上述溫度調節對象空間送風；和 上述冷卻手段之第一控制裝置與上述加熱手段之第 二控制裝置。 並且，上述第一、第二控制裝置之至少一者，係更進 而設有干擾觀測（0 b s e r v e r )部，生成與非穩態干擾相應 的補償量，並加在操作量上。 該干擾觀測部包含： 標稱模型（nominal plant)及干擾推定手段。標稱模 型，係模擬關於包含上述溫度調節對象空間、上述冷卻手 段' 上述加熱手段、以及上述供給路徑的系統全體之動作 。干擾推定手段’係輸入從上述標稱模型輸出的溫度和從 上述冷卻手段供給的空氣溫度或上述溫度調節對象空間內 的溫度之間的偏差’並根據該偏差生成/輸出干擾推定値 -8 ' 201042412 ，根據該干擾推定手段之干擾推定値，決定上述補償量。 又，本發明之另一形態之精密溫度調節系統包含： 溫度調節對象空間； 冷卻手段’設在向該溫度調節對象空間供給冷卻空氣 之供給路徑內； 加熱手段’設在上述供給路徑內，加熱從上述冷卻手 段供給之空氣’向上述溫度調節對象空間送風； 上述冷卻手段之第一控制裝置和上述加熱手段之第二 控制裝置：其特徵在於： 上述第一、第二控制裝置之至少某個將包含上述溫度 調節對象空間、上述冷卻手段、上述加熱手段、以及上述 供給路徑的系統全體作爲控制對象； 上述第一、第二控制裝置之至少某個包含： 反饋控制部’輸入設定値和上述控制對象的實測値的 偏差，計算操作量； 干擾觀測部，計算與非穩態干擾相應的補償量； 第一加法器，將上述操作量和上述補償量進行加法運 算，計算用於向上述控制對象輸入的控制量； 上述干擾觀測部包含： 標稱模型，模擬上述控制對象； 干擾推定手段，輸入該標稱模型的輸出和上述控制對 象實測値的偏差； 加法增益器，使得該干擾推定手段的輸出乘以所定倍 數，計算上述補償値； -9 ~ 201042412 第二加法器，計算向上述控制對象輸入的控制量和上 述干擾推疋手段的輸出的偏差，生成向上述標稱模型輸入 的信號。 上述標稱模型，係將關於包含上述溫度調節對象空間 、上述冷卻手段、上述加熱手段、以及上述供給路徑的系 統全體之動作模型化，再進而根據所設定之條件來使得該 模型簡略化，並使用該簡略化模型進行決定。 例如，作爲其中一例，若將關於標稱模型之模擬動作 之結構式設爲PN(s)，則干擾推定手段之傳遞函數係設爲 l/PN(s) 〇 又，本發明之另一形態之精密溫度調節系統包含： 溫度調節對象空間；和 冷卻手段，設在向該溫度調節對象空間供給冷卻空氣 之供給路徑內；和 上述冷卻手段之控制裝置， 上述控制裝置，係更進而設有干擾觀測部，生成與非 穩態干擾相應的補償量，加在操作量上， 該干擾觀測部包含： 標稱模型，模擬關於包含上述溫度調節對象空間、上 述冷卻手段、以及上述供給路徑的系統全體之動作：和 干擾推定手段，輸入從上述標稱模型輸出的溫度和從 上述冷卻手段供給的空氣溫度或上述溫度調節對象空間內 的溫度之間的偏差，並根據該偏差生成/輸出干擾推定値 -10- 201042412 根據該干擾推定手段之干擾推定値，決定上述補償量 〇 又，本發明之又一形態之精密溫度調節系統包含： 溫度調節對象空間； 冷卻手段’設在向該溫度調節對象空間供給冷卻空氣 之供給路徑內； 上述冷卻手段之控制裝置；其特徵在於： 上述控制裝置將包含上述溫度調節對象空間、上述冷 卻手段、以及上述供給路徑的系統全體作爲控制對象； 上述控制裝置包含： 反饋控制部，輸入設定値和上述控制對象的實測値的 偏差，計算操作量； 干擾觀測部，計算與非穩態干擾相應的補償量； 第一加法器，將上述操作量和上述補償量進行加法運 算’計算用於向上述控制對象輸入的控制量； 上述干擾觀測部包含： 標稱模型，模擬上述控制對象； 干擾推定手段，輸入該標稱模型的輸出和上述控制對 象實測値的偏差； 加法增益器’使得該干擾推定手段的輸出乘以所定倍 數，計算上述補償値； 第二加法器，計算向上述控制對象輸入的控制量和上 述干擾推定手段的輸出的偏差，生成向上述標稱模型輸入 的信號。 -11 - 201042412 如此這般，也可以在沒有上述加熱手段之構成中，設 爲在冷卻手段之控制裝置中具備有上述構成之干擾觀測部 的構成。 [發明效果] 若依據本發明之精密溫度調節系統及其控制裝置等， 在精密溫度調節系統中，即使是在產生非穩態干擾的情況 時，也可以將溫度調節對象空間之空氣溫度的變化抑制到 最小限度。 【實施方式】 下面，參照附圖詳細說明本發明之實施形態。在以下 實施形態中，雖然對構成要素、種類、組合、形狀、相對 配置等作了各種限定，但是’這些僅僅是例舉，本發明並 不侷限於此。 圖1是本發明一實施例之精密溫度調節系統的控制裝 置的構成圖。 該控制裝置1係控制例如後述的在圖2 '圖3中所示 之排氣口個別加熱器26的裝置。控制裝置1是與每個排 氣口個別加熱器2 6相對應地設置。在圖2、圖3所示例 中’排氣口個別加熱器26有三台’因此’控制裝置1也 設有三台。 在控制裝置1中，除了習知技術的結構以外’亦設有 干擾觀測部1 〇。 -12- 201042412 另外’控制裝置1，其實施形態例如係爲CPU 算處理器。在CPU內或CPU外的記憶體中，係預 有特定的應用程序。CPU係藉由讀出並實行該應用 而實現以下說明的干擾觀測部1 0的處理功能。此 於反饋控制器（PID ) 2等之習知結構，亦爲相同 ，在此應用程序內，係預先被設定有後述的各種傳 等。 習知技術之構成，係爲反饋控制器2等。首先 說明該習知技術之構成。 首先，向圖示之加法器4輸入從控制對象5檢 溫度調節控制對象的空間（溫度調節對象空間）之 、和目標溫度r。該溫度y，在後述圖3的例中， 度感測器TA0 1〜TA03中之某一個所檢測出來者， 化室25 (腔室）內的溫度。另外，在後述圖3中 排氣口個別加熱器26c作爲例子，以下的說明係根 而進行。 因此，於此例的情況中，上述溫度y是由溫度 TA03所檢測出的値。另外，目標溫度r，是從未圖 制器所輸入者。作業員等藉由操作控制器’可對目 r進行設定/變更。 經由上述加法器4，而得出目標溫度r和實際 度y之間的偏差E(s)= ( i：-y)。該偏差E(s)，係被 反饋控制器2。反饋控制器2的輸出，係爲操作量 等的運 先儲存 程序， 點，關 。另外 遞函數 ，簡單 測出的 溫度y 是由溫 而是淨 ，係以 據該例 感測器 示的控 標溫度 檢測溫 輸入至 MV(S) -13- 201042412 該MV(s)可以根據以下（1 )式求得。另外，以下的 (1 )式以及後述的 (2 )式以後的其他各式中之 是拉普拉斯運算符。 [數式1】 MV(S) = KW^ 1+^Γ-+7〇5 ΚΓί； · · · (1)式 MV(s): 操作量 E(s) 偏差 Kw :比例增益 τ：: 積分時間 TD 微分時間 另外，如上所述，反饋控制器2本身是習知結構，且 上述（1 )式爲人們所公知’因此，在此不作特別說明。 在習知技術中，身爲反饋控制器2之輸出的操作量 MV(s)，係被輸入至控制對象5處’並進行與該操作量 MV(s)相應的動作。在圖3所示例中，該操作量MV(s)係 被輸入至加熱器驅動裝置44c處。如圖3所示，身爲控制 裝置1之直接控制對象的排氣口個別加熱器26c，係具有 加熱器21、風扇22等，加熱器驅動裝置44c，係根據輸 入的操作量MV(s)，而驅動控制加熱器21。另外，雖然實 際上也進行有風扇22的控制，但是，在此並不言及風扇 22之控制，並作爲其風量爲一定者來進行說明。 另外，如圖3所示，在溫度調節對象空間（在本例中 爲淨化室25 )內設有溫度感測器TA03。該溫度感測器 TA03是用於檢測淨化室25內溫度的感測器，特別是檢測 出受到排氣口個別加熱器26c所影響的空間（其附近，例 如正下方等的空間）之溫度。由該溫度感測器TA03檢測 -14- 201042412 出的溫度資料，是上述的檢測溫度y。 如圖1所示，藉由相對於上述習知結構而設置有干擾 觀測部1 〇，在控制對象5處，係被輸入有藉由加法器3 而在上述操作量MV(s)處加上了干擾觀測部1 〇的輸出所 得到之値。干擾觀測部1 〇的輸出，亦即是從加法增益器 12而來的輸出，是在圖示之干擾推定部11的輸出dm處 乘上了特定的增益（KADD )所得到的値。亦即是，dmx K A D D 0 在干擾推定部11處，係被輸入有上述檢測溫度y和 標稱模型14之輸出yN之間的偏差（yN-y)，並輸出上述 之dm。 干擾推定部1 1的結構式（傳遞函數）以下面（2 )式 表示： [數式2][Technical Field] The present invention relates to a precision temperature control system and a prior art. The conditions of a clean room such as a semiconductor manufacturing plant are strictly required. As such a condition, it is possible to manage, maintain the cleanliness, and maintain the quietness (temperature management in a room (without vibration) without vibration), and it is required to perform constant temperature management by vacancy. This system for treating a chamber or the like is called In the case of such a precision temperature control system, a device for feedback control (PID) is known. For example, it is known as described in Patent Document 1. The invention of Patent Document 1 relates to a heat system device. The cylinder arrangement of the extrusion molding machine shown in Fig. 12 can be easily controlled without depending on the feeling and experience of the skilled person, and the temperature control device of Patent Document 1 has The processing addition unit and the specification model Pm further include a specification model unit for removing the means and the first switching unit. The operation amount for operating the control object P is output. The wave is used to remove the wasted time element e from the specification model Pm. In the (chamber), for example, a room temperature space is exemplified. Regarding the high-precision and high-precision thermostat tube of the adjustment device, it is known to use, for example, a technique, and the temperature control device of the person (for example, the patent) does not cause the distortion of the PID control unit, and the waste time cancellation operation amount addition unit is provided. Time-consuming means of elimination. The first switching unit 201042412' is a switching circuit that inputs an operation amount from the operation amount adding unit to the control opposite side and a side in which the operation amount is input by the PID control unit. The specification model unit measures the specification model Pm after the wasted time element e_ts is removed by wasting time, and when the measurement result reaches a predetermined target ,, the switching unit is caused by a switching unit. The operation amount of the operation amount adding unit is not controlled by the object P. Further, in Patent Document 1, a case in which a forward control unit is provided is also disclosed. Further, in Patent Document 1, as shown in Fig. 3, the configuration of the interference observation unit having the above-described canonical model Pm is also disclosed. [Patent Document 1] [Patent Document 1] JP-A-2001-2654-A No. 2 [Invention] [Problems to be Solved by the Invention] Here, the above-mentioned precise temperature adjustment system may be produced with a certain operation. The chamber door must be opened and closed. Due to such opening and closing, the outside air flows into the chamber or the like, and the temperature in the chamber is generated. That is, temperature changes occur due to disturbances. With regard to such a type of disturbance (referred to as an unsteady disturbance), the inventors confirmed that the control by the feedforward is insufficiently sufficient by experiments or the like. Between P and P, the output of the means is input as the operation input to Ο (the feed has a change of the life of the gate, for example, the reason for the above-mentioned unsteady interference is not limited by -6 - 201042412 Opening and closing of the chamber door. As another example, for example, "opening and closing of the gate provided in the chamber" is also generated with respect to the entry and exit of the workpiece (wafer, glass substrate, etc.) of the chamber. The above-described unsteady interference is also disclosed in the above-mentioned 'Patent Document 1' for the interference observation unit having the canonical model P m. Further, it is not limited to Patent Document 1 'Before' setting the specification model for PID control It is known that the interference observation unit itself is known. However, most of them are controlled by, for example, an electric motor or a generator. Even in the above Patent Document 1, the extrusion molding machine (cylinder) is used as a control. Object, that is, the control object is a machine (mechanical device). On the other hand, in the above precise temperature regulation system, the electrical control object is a fan, Heater, cooler, etc., but the object of control is essentially the temperature in the chamber, but it is air. In the past, in the precision temperature control system, a specific model was performed for the control target model or the disturbance observation unit corresponding to the above-mentioned canonical model. The example of the invention is almost impossible to find. In particular, the control object model and the interference observation unit which are capable of sufficiently and effectively controlling the above-described unsteady disturbance are not found. The present invention is to solve the above-mentioned The problem of the present invention is that the precise temperature adjustment system provides a method for changing the temperature of the air in the temperature adjustment target space even in the case where unsteady disturbance occurs. The precise temperature -7-201042412 adjustment system, the control device thereof, and the like are suppressed. [Means for Solving the Problem] In order to solve the above problems, the technical means of the present invention are as follows: One form is the premise of the following precision temperature regulation system: The precision temperature regulation system The method includes: a temperature adjustment target space; and a cooling means 'provided in a supply path for supplying cooling air to the temperature adjustment target space; and a heating means provided in the supply path to heat the air supplied from the cooling means to the temperature Adjusting the target space air supply; and the first control device of the cooling means and the second control device of the heating means. Further, at least one of the first and second control devices is further provided with interference observation (0 bserver ) The part generates a compensation amount corresponding to the unsteady disturbance and adds it to the operation amount. The interference observation unit includes: a nominal model (nominal plant) and an interference estimation means. The nominal model is a simulation about including the temperature adjustment target described above. The space, the above-described cooling means 'the heating means, and the operation of the entire system of the supply path. The interference estimating means ' inputs a deviation between the temperature output from the above-described nominal model and the temperature of the air supplied from the cooling means or the temperature in the temperature adjustment target space', and generates/outputs an interference estimation 値-8' based on the deviation. 201042412, based on the interference estimation by the interference estimation means, the above compensation amount is determined. Further, the precision temperature control system according to another aspect of the present invention includes: a temperature adjustment target space; a cooling means 'provided in a supply path for supplying cooling air to the temperature adjustment target space; and a heating means 'provided in the supply path and heating The air supplied from the cooling means 'air is supplied to the temperature adjustment target space; the first control means of the cooling means and the second control means of the heating means are characterized in that at least one of the first and second control means The entire system including the temperature adjustment target space, the cooling means, the heating means, and the supply path is controlled; at least one of the first and second control devices includes: a feedback control unit 'input setting 値 and the above The deviation of the measured 値 of the control object is calculated, and the interference amount is calculated; the interference observation unit calculates a compensation amount corresponding to the unsteady disturbance; the first adder adds the operation amount and the compensation amount, and calculates for use in the above control The amount of control input by the object; the above interference observation unit includes a nominal model for simulating the control object; an interference estimation means for inputting a deviation of an output of the nominal model from a measured 値 of the control object; and an adder that multiplies an output of the interference estimation means by a predetermined multiple to calculate the compensation 値; -9 to 201042412 The second adder calculates a deviation between the control amount input to the control target and the output of the disturbance pushing means, and generates a signal input to the nominal model. The above-described nominal model models the operation of the entire system including the temperature adjustment target space, the cooling means, the heating means, and the supply path, and further simplifies the model based on the set conditions. Use this simplified model to make decisions. For example, as an example, if the structural expression of the simulation operation of the nominal model is PN(s), the transfer function of the interference estimation means is l/PN(s), and another form of the present invention. The precise temperature adjustment system includes: a temperature adjustment target space; and a cooling means provided in a supply path for supplying cooling air to the temperature adjustment target space; and a control means for the cooling means, wherein the control means is further provided with interference The observation unit generates a compensation amount corresponding to the unsteady disturbance, and adds the amount of the disturbance to the operation amount. The interference observation unit includes: a nominal model that simulates the entire system including the temperature adjustment target space, the cooling means, and the supply path. And an interference estimating means for inputting a deviation between a temperature output from the nominal model and an air temperature supplied from the cooling means or a temperature in the temperature adjustment target space, and generating/outputting an interference estimation based on the deviation -10- 201042412 Based on the interference estimation by the interference estimation means, the above compensation amount is determined, and A further precise temperature control system of the present invention includes: a temperature adjustment target space; a cooling means 'provided in a supply path for supplying cooling air to the temperature adjustment target space; and a control means for the cooling means; wherein the control means The entire system including the temperature adjustment target space, the cooling means, and the supply path is controlled. The control device includes: a feedback control unit that inputs a setting 値 and a deviation of the actual measurement target of the control target, and calculates an operation amount; And calculating a compensation amount corresponding to the unsteady interference; the first adder adds the operation amount and the compensation amount to calculate a control amount for input to the control object; the interference observation unit includes: a nominal a model for simulating the control object; an interference estimation means for inputting a deviation of an output of the nominal model from a measured 値 of the control object; and an adder gainer multiplying an output of the interference estimation means by a predetermined multiple to calculate the compensation 値; Adder, calculate to the above Deviation control amount and the target system inputs said disturbance estimation means output, generates a signal inputted to the nominal model. -11 - 201042412 In the configuration without the above-described heating means, the control means for the cooling means may be provided with the configuration of the interference observation unit having the above configuration. [Effect of the Invention] According to the precise temperature adjustment system of the present invention, the control device thereof, and the like, in the precise temperature adjustment system, even in the case of occurrence of unsteady disturbance, the temperature of the air in the temperature adjustment target space can be changed. Suppressed to a minimum. [Embodiment] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the following embodiments, the components, the types, the combinations, the shapes, the relative arrangements, and the like are variously limited. However, these are merely examples, and the present invention is not limited thereto. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view showing the configuration of a control device for a precision temperature control system according to an embodiment of the present invention. The control device 1 controls a device such as an exhaust port individual heater 26 shown in Fig. 2 'Fig. 3, which will be described later. The control device 1 is provided corresponding to each of the exhaust port individual heaters 26. In the example shown in Figs. 2 and 3, there are three "exhaust port individual heaters 26". Therefore, three control devices 1 are also provided. In the control device 1, an interference observation unit 1 is also provided in addition to the structure of the prior art. -12- 201042412 In addition, the control device 1 is, for example, a CPU calculation processor. In the memory inside the CPU or outside the CPU, a specific application is pre-defined. The CPU realizes the processing function of the interference observing unit 10 described below by reading and executing the application. The conventional structure of the feedback controller (PID) 2 and the like is also the same, and various kinds of transmissions to be described later are set in advance in this application. The composition of the prior art is the feedback controller 2 and the like. First, the constitution of the conventional technique will be described. First, the space (temperature adjustment target space) to be subjected to the temperature adjustment control target from the control target 5 is input to the adder 4 shown in the figure, and the target temperature r is input. This temperature y is the temperature in the chamber 25 (chamber) detected by any one of the degrees sensors TA0 1 to TA03 in the example of Fig. 3 to be described later. Further, the exhaust port individual heater 26c in Fig. 3 will be described as an example, and the following description will be made. Therefore, in the case of this example, the above temperature y is the enthalpy detected by the temperature TA03. In addition, the target temperature r is the one that was never entered by the simulator. The operator or the like can set/change the target r by operating the controller. The deviation E(s) = (i: - y) between the target temperature r and the actual degree y is obtained via the above adder 4. This deviation E(s) is fed back to the controller 2. The output of the feedback controller 2 is a pre-stored program for the operation amount, etc., point, off. In addition, the simple function of the temperature y is measured by the temperature but the net is detected by the temperature of the sensor according to the temperature sensor of the example. MV(S) -13 - 201042412 The MV(s) can be based on the following (1) The formula is obtained. Further, in the following formula (1) and other formulas (2) and later described later, the Laplace operator is used. [Expression 1] MV(S) = KW^ 1+^Γ-+7〇5 ΚΓί; · · · (1) Formula MV(s): Operation amount E(s) Deviation Kw: Proportional gain τ:: Integration Time TD Differentiation Time In addition, as described above, the feedback controller 2 itself is a conventional structure, and the above formula (1) is well known. Therefore, no specific description is given here. In the prior art, the operation amount MV(s) which is the output of the feedback controller 2 is input to the control object 5' and performs an action corresponding to the operation amount MV(s). In the example shown in Fig. 3, the operation amount MV(s) is input to the heater driving device 44c. As shown in FIG. 3, the exhaust port individual heater 26c, which is a direct control target of the control device 1, has a heater 21, a fan 22, and the like, and the heater driving device 44c is based on the input operation amount MV(s). And the drive controls the heater 21. Further, although the control of the fan 22 is actually performed, the control of the fan 22 is not mentioned here, and the air volume is constant. Further, as shown in Fig. 3, a temperature sensor TA03 is provided in the temperature adjustment target space (in this example, the clean room 25). The temperature sensor TA03 is a sensor for detecting the temperature in the clean room 25, and in particular, detects the temperature of a space (in the vicinity of, for example, a space immediately below) affected by the individual heaters 26c of the exhaust port. The temperature data from -14 to 201042412 detected by the temperature sensor TA03 is the above-described detected temperature y. As shown in Fig. 1, by providing the interference observation unit 1 相对 with respect to the above-described conventional configuration, at the control object 5, the addition of the operation amount MV(s) by the adder 3 is input. The noise obtained by the interference of the observation unit 1 〇 is obtained. The output of the interference observation unit 1 ,, that is, the output from the addition gain unit 12 is obtained by multiplying the output gain dm of the disturbance estimation unit 11 shown by the specific gain (KADD). That is, dmx K A D D 0 is input to the interference estimating unit 11 by the deviation (yN-y) between the detected temperature y and the output yN of the nominal model 14, and the above-mentioned dm is output. The structural formula (transfer function) of the interference estimating unit 1 1 is expressed by the following formula (2): [Expression 2]
K〇Bs{i + TOlS) ... (2)式 1 + T02SK〇Bs{i + TOlS) ... (2) Formula 1 + T02S
Tm :觀測器的時間常數Tm : time constant of the observer
T02 :用於除去噪音的時間常數 KOBS : 觀測器的增益 因此，上述dm可以根據下面（3 )式求得： [數式3] dm={yN.y).^&±I〇lfl . · · (3)式 另外，標稱模型14是模擬控制對象5的模式（model )，其傳遞函數Pn(s)，係藉由以下（4)式表示： -15- 201042412 [數式4] PN(s) = -^zr~ · · · (4)式T02 : time constant for removing noise KOBS : gain of the observer Therefore, the above dm can be obtained according to the following formula (3): [Expression 3] dm={yN.y).^&±I〇lfl. (3) In addition, the nominal model 14 is a model of the simulation control object 5, and its transfer function Pn(s) is expressed by the following formula (4): -15- 201042412 [Expression 4] PN(s) = -^zr~ · · · (4)
1 + V1 + V
Kp :麵的增益 TQ :模型的時間常數 在此，干擾觀測部1 0的結構本身，當被模式化至圖 4 ( a )中所示之程度的情況時，係與習知的一般的干擾觀 測器的結構大致相同。圖1中所示的干擾觀測部1 〇，是 根據此種一般性之干擾觀測器的結構，而更進而特別是關 於上述干擾推定部1 1以及標稱模型1 4，而考慮有如同上 述（2)式、（4)式中所示的傳遞函數者。 一般的干擾觀測器的結構，例如作爲一例，公開在參 考文獻1 (日本特開20〇2- 1 084 1 0號公報）中。關於干擾 觀測器，圖1的結構和參考文獻1的圖1、圖2之結構的 不同點，是在於設有加法增益器1 2，但是，如果將此視 爲在參考文獻1中的增益KADD= 1的情況來考慮，則本結 構和參考文獻1的結構係大致相同。 另外，增益KADD的値，係爲1以下的任意値，設計 者等可以任意決定’但是’本發明人根據實驗及經驗等， 認爲增益KADD = 0.7左右是合適的（可得到良好的控制結 果）。适是由於當增益Kadd=1的場合，亦即是，將干擾 推定部1 1的輸出dm保持原樣地使用的情況時，會成爲 過度補償之故。這是由於’在標稱模型1 4中，係存在有 模型化誤差，且在作爲干擾推定値的dm中也含有誤差的 緣故。又，通常’直到推定出施加於控制對象5的千擾爲 止，係會耗費時間之故。 -16- 201042412 但是’和習知相同，也可以使得增益K A D D = 1。亦即 是，可以省略加法增益器12。在本發明中，爲了簡化說 明，有時會省略加法增益器1 2而進行說明。 在省略了加法增益器1 2的情況之控制裝置1的動作 ’首先’控制對象5的輸入，係成爲在身爲上述反饋控制 器2之輸出的操作量MV(s)上，加上了前述干擾推定部Π 的輸出dm所得到的値，亦即是，成爲（MV(s) + dm ) ο 又，藉由加法器13，而得到該“ MV(s)+ dm”和上述 干擾推定部1 1的輸出（干擾推定値）dm之間的偏差。亦 即是’偏差= MV(s)+dm — dm = MV(s)。然後，該偏差係被 輸入至標稱模型14處。亦即是，向標稱模型14輸入身爲 上述反饋控制器2之輸出的操作量M V(s)。並且，根據上 述（4)式的傳遞函數Pn(s)，而得出與該操作量MV(s)對 應的上述y»。 如上所述，干擾觀測部10的基本結構（圖4(a)所 示之級別）本身，可以是一般的結構，本實施形態的特徵 ’係在於干擾推定部11和標稱模型14的內容。 首先，模擬某種控制對象的標稱模型本身，例如是如 上述參考文獻1中所示一般的習知設備。但是，在例如參 考文獻1中，係關於電動機/發電機的模型化，關於精密 溫度調節系統，係並沒有發現到進行具體的模型化之例子 。本發明人，係如同後文對於圖5、圖6所作的詳細說明 一般’對於控制對象5而進行具體的模型化，再進而如後 -17- 201042412 所述一般，根據特定假設，而使得該模型簡略化，並根據 該簡略化模型而決定了上述（4)式。 在此，本實施例的控制裝置1所直接控制的，只有排 氣口個別加熱器26 (本實施例中的加熱器2 1 )。其係將 身爲溫度調節對象空間的其中一例之淨化室2 5 (腔室） 內的溫度檢測出來，並決定/控制加熱器2 1輸出的增減/ 維持者。但是，並不是僅簡單地將加熱器2 1之輸出和淨 化室25 (腔室）內溫度之間的關係模型化即可完成者。 淨化室25(腔室）內的溫度，並不是僅由加熱器21 的輸出所決定，還會受到冷卻器28的冷卻性能、到達冷 卻器28前之和外部氣體間的混合、相對於淨化室25而進 出之熱量等的各種要素之影響，進而，依存於情況的不同 ，還會受到干擾的影響。 因此，圖1中所示的控制對象5，並不是單指排氣口 個別加熱器2 6 (加熱器21 )，而係成爲代表如圖2、圖3 中所示的精密溫度調節系統全體者。亦即是’圖1中所示 的控制對象5，是指由排氣口個別加熱器2 6、冷卻器2 8 、淨化室25、通氣道（供給路徑）等所構成的系統全體 。並且，爲了將控制對象5的動作模型化，不僅要考慮加 熱器2 1之輸出、冷卻器2 8的冷卻性能，還必須考慮空氣 (熱量）的流動等。 本實施例的標稱模型1 4 ’係對於此種意義下的“控 制對象5 ”的動作進行模擬之模型。關於標稱模型14將 在後文作詳細說明° -18- 201042412 又，藉由干擾推定部11之上述（2)式中所示的傳遞 函數，而成爲可進行適當的干擾推定。在此，在本例的最 佳實施例中，在上述（2)式中，係設爲： K〇BS=1//Kp、Τ〇1=Τ〇 ο 在此，上述（2)式中的分母“ 1+T02s”係單純爲用 於測量系統的噪音去除等者。在此，如果忽略T〇2s的話 ，在上述最佳實施例中，上述（2)式係可此用下述之（5 〇 )式來表示： [數式5] ... (5)式 Kp 如上所述，（5)式係將（2)式的分母分子翻轉，亦 即是成爲1/Pn(s)。經由此，能夠進行適當的干擾推定， 並得到適當的輸出値（千擾推定値）dm。關於能取得此 種效果的理論性之說明，在此雖然無法充分進行，但是， 如後所述一般，能夠透過實驗而對於可取得效果一事作確 〇 ^ 認。另外’針對基本的想法，於後文中，參照圖4來進行 詳細說明。 下面’在對圖4以後的內容進行說明之前，參照圖2 、圖3 ’對於控制對象5的具體例，並進而對於適用有本 實施例之控制裝置1的精密溫度調節系統全體，而進行說 明。 圖2是關於本發明一實施例之精密溫度調節系統的槪 略構成圖（立體透視圖）。另外，圖3是本發明一實施例 之精密溫度調節系統的系統構成圖。在圖3中，係將圖2 -19- 201042412 平面性地作模式化表示。另外，圖3由於係將圖2 地在平面上作表示，因此，係將各部位的配置關係 對性的描述，而並不是表示實際的設置位置。又， 圖3是控制對象5之結構的其中一個具體例。 在圖2、圖3中，淨化室25係作爲藉由本系鋪 實行精密的溫度調節之對象空間（溫度調節對象空 其中一例。此種溫度調節對象空間，係並不侷限於 (係以所有被稱爲腔室等者作爲對象），但是，在 淨化室爲例。 淨化室25內的空氣，係從在圖2中並未被表 圖3中有所表示的吸氣通道27，而被吸入通氣道 路徑）內。 在此，在本構成例中，“供給路徑”係包含複 房間（溫度調節空間）3 0 ( 3 0a、30b、30c )、和 間3 2、和淨化室上部空間3 3。這裡特別的是，與 供給路徑爲一個通道的空間相比，在本實施例中， 隔爲多個小房間（溫度調節空間）3 0 ( 3 0 a、3 0 b、 。淨化室25內的空氣，是從上述吸氣通道27而被 圖示之小房間（溫度調節空間）30a (最下面的小 中。 在該小房間30a內，設有冷卻器28和送風器 )24。又，圖2中雖並沒有表示（於圖3中表示） ，在小房間（溫度調節空間）3 0 a處，係設有吸入 氣的吸氣口 29。上述被吸入的淨化室25內的空氣 模式化 進行相 圖2、 i 20而 間）的 淨化室 此係以 示但在 (供給 數之小 上部空 習知的 係被分 3 0c) 吸入至 房間） (風扇 ，但是 外部空 、和從 -20- 201042412 吸氣口 2 9流入的外部空氣，係相互混合，並在經由冷卻 性能高的水冷之冷卻器2 8冷卻後，藉由送風器24而送入 上層的小房間30b中。 另外，在圖3所示之例中，關於該冷卻的目標溫度（ 爲了與後述淨化室25內的目標溫度作區分，稱爲冷卻目 標溫度）爲21 .5 °C，因此，被送入小房間3 Ob的空氣（冷 卻空氣）之溫度，應該成爲該冷卻目標溫度附近。 0 ·又，在圖2中，在小房間30a內，冷卻器28和送風 器24之間是存在有區隔的，但是，（如圖3中所示）也 可以沒有區隔。 被送入小房間3 Ob的冷卻空氣，係進一步流入上層的 小房間30c中，再從該處而流入圖示的上部空間32，再 進而流入淨化室上部空間3 3中。如圖所示，在淨化室上 部空間3 3，係設有排氣口個別加熱器26。流入淨化室上 部空間3 3的空氣，係經由圖示之複數台的排氣口個別加 q 熱器26 (在圖示例中，爲26a、26b、26c三台）而分別 被加熱。在圖3所示之例中，目標溫度爲2 3.0 °C。亦即是 ，精密溫度調節系統20，係以將淨化室25內的溫度控制 在此目標溫度（23.0°C )的方式來作控制。 如上所述，淨化室2 5內的空氣，係在藉由冷卻器2 8 而暫時冷卻後（冷卻目標溫度爲2 1 · 5 °C )，藉由各排氣口 個別加熱器26 ( 26a、26b、26c )而分別被加熱’並成爲 溫度接近目標溫度（23.0 °C )的空氣’而流入淨化室25 內。另外，各排氣口個別加熱器26，係如圖3中所示一 -21 - 201042412 般，爲由風扇22 +加熱器21所構成。或者是，也 風扇22 +加熱器21+過濾器所構成。 淨化室上部空間3 3的空氣（流入排氣口個另lj 26的空氣），由於溫度變動變小’因此’係成爲 行溫度控制，高精度的溫度控制成爲可能。亦即是 冷卻器28而被冷卻的空氣（冷卻空氣）’係通過 兩個小房間3 Ob、3 0c或上部空間3 2 ’而流入至淨 部空間33中。在各小房間30b、30c或是上部空序 ，由於空氣係被攪拌，因此’溫度成爲大致均一（ 動變小）。 在圖2所示之例中’在各小房間3 0之間、以 間3 0c和上部空間32之間，係設有成爲空氣吸氣 口的吸排氣口 3 1 ( 3 1 a、3 1 b、3 1 c )。空氣係經由 氣口 3 1，而從下層的小房間3 0來流入至上層的小 (或者上部空間3 2 )中。亦即是，從上游側流入 (作爲大的流向，係按照圖示箭頭標記A所示之 流動）。亦即是，在小房間3 〇a中的上述冷卻空氣 由圖示的吸排氣口 3 1 a而流入其上層的小房間3 Ob 樣的，小房間3 Ob的空氣，係經由圖示的吸排氣口 流入其上層的小房間30c中。同樣的，小房間30c ’係經由圖示的吸排氣口 3 1 c而流入其上層的上 3 2中。然後，進而，上部空間3 2的空氣，係流入 上部空間3 3中。 在此，較理想，各吸排氣口 3 1，係以使得空 可以由 加熱器 易於進 ，經由 上述之 化室上 "2中 溫度變 及小房 口 /排氣 此吸排 房間3 0 下游側 方向而 ，係經 中。同 31b而 的空氣 部空間 淨化室 氣之流 -22- 201042412 動成爲鋸齒狀（形成非直線、比較長距離的空氣流動）的 方式來作配置。另外，設於各小房間3 0 (溫度調節空間 )中之吸排氣口 3 1，係至少被設置在不會使各溫度調節 空間內的空氣的流動距離成爲最短的位置處。例如，較理 想’在各溫度調節空間內的空氣流動距離，亦即是在各溫 度調節空間處之兩個的吸排氣口之間的距離，係設爲儘可 能長。亦即是，例如以小房間3 0 c爲例，若吸排氣口 3 1 b 如圖所示一般的而設置在房間的其中一側，則吸排氣口 3 1 c係如圖所示一般而設在相反側。 藉由設爲此種構成，若與通氣道（供給路徑）爲一根 通道的情況相比，相對於空氣的流動方向，由於成爲阻礙 的地方變多，因此，空氣會成爲與阻礙物（小房間30的 房頂或側壁等）相碰撞並改變方向，並藉由此而成爲被攪 拌。藉由此’而能夠謀求空氣溫度的均一化。又，即使是 緊緻（compact )化的結構，亦能夠將空氣的流動距離增 長，藉由此’也可以謀求空氣溫度之均一化。如此這般， 不僅是經由空氣流動之距離，更經由被作攪拌，而使空氣 互相混合’並增大空氣溫度均一化的效果。另外，圖2中 所示之箭頭標記A ’係作爲大的流動而對於空氣的流動方 向（忽略擾伴、据齒形等）作表示者。 上述控制裝置1，在圖2中雖並沒有顯示，但如圖3 所示一般’係爲對於排氣口個別加熱器2 6作控制者。如 上所述，在此’以三台排氣口個別加熱器2 6中的一台（ 排氣口個別加熱器26c )爲例進行說明。在此例中，與排 -23- 201042412 氣口個別加熱器2 6 c相對應的控制裝置1 c，具備有相當 於上述反饋控制器2 '加法器4、加法器3、干擾觀測部 10的PID2C、加法器4c、加法器3c、干擾觀測部1〇c。 另外’加熱器驅動裝置44c，在圖中係顯示爲位於排氣口 個別加熱器2 6 c的外部’但也可以考慮被包含於排氣口個 別加熱器2 6 c中的構成。 上述偏差E(s)= ( r-y ) ’係從加法器4c而輸入至 PID2c。在此’ r = 2 3.〇°C ’ y是由溫度感測器TA03檢測出 的溫度。溫度感測器T A 0 3係爲用以檢測出淨化室2 5內 之溫度的感測器’尤其是爲用以檢測出在淨化室25內之 排氣口個別加熱器26c所對應的區域（例如排氣口個別加 熱器26c的正下方空間）之溫度的感測器。 由溫度感測器TA03所檢測出的溫度y，係亦被輸入 至干擾觀測部1 〇 c。然後，藉由加法器3，在PID 2 c的輸 出處（操作量MV(S))加上從干擾觀測部10c而來的輸出 (dmxKADD ’但’如上所述，在此，由於係設爲KADD=1 ，因此，係成爲dm)。然後，該加法結果（MV(s) + dm ) 係被輸入至加熱器驅動裝置44 c，同時，也被輸入至干擾 觀測部l〇c。 在此，如圖2、圖3所示，淨化室2 5設有門2 3。例 如，操作員等是從該門23而進出。上述所謂“干擾”， 是例如經由此門2 3之開閉所產生的淨化室2 5內之溫度上 升（或者溫度下降）。干擾觀測部1 ，係實行與該干擾 所產生的影響相對應之補償。 -24- 201042412 另外，在圖3中，爲了比較，關於與排氣口個別加熱 器2 6a、26b相對應的控制裝置，係表示習知之結構，但 是，在實際上，這些控制裝置也是成爲與上述控制裝置 1 c相同的如圖1所示的結構。如圖所示，在習知結構中 ，從PID2a、2b的輸出（操作量MV(S))，係保持原樣地 而被輸入至加熱器驅動裝置44a、44b。 另外，在圖3中，雖槪略表示有用以對於冷卻器28 ◎ 作控制的結構（加法器4 1、PID42、加熱器驅動裝置43、 溫度感測器TA06、FS1、FS2、H1等），但是冷卻器28 及其控制方法本身，由於可設爲以與習知裝置大致相同， 因此，並不作特別說明。 以下，亦參照圖4，而說明關於上述圖1中所示之控 制裝置1的動作。 首先，如上所述，設置有干擾觀測部10的結構（圖 4(a)所示程度）本身，係爲習知技術的一般結構，其動 Q 作係按照例如前述參考文獻1中所示一般。亦即是，按照 例如參考文獻1中的數式1、數式2、數式3所示一般。 不同之處，係在於具備有加法增益器12之點，但是，如 上所述，如果將參考文獻1視爲KADD=1者，則可以視爲 大致相同。但是，關於這點先使用圖4 ( a )作說明。 圖4 ( a )係爲使得上述圖1之控制裝置1亦包含控 制對象5地而進行了模型化者。對於控制對象5的干擾的 影響’係和參考文獻1的圖2之情況相同，設爲將對於控 制對象5的輸入減去干擾d後的値。亦即是，在KADD= 1 -25- 201042412 時，藉由圖示之加法器6，得到u + dm-d，其成爲控制對象 5之輸入。 又，在圖4(a)中，爲了簡略化，係將上述P ID 2之 傳遞函數、亦即是上述（1)式中與E(s)相乘的部分，設 爲“C” ，並將上述干擾推定部11之傳遞函數、亦即是上 述（2 )式，設爲“ PM” 。又，MV(s)設爲“ u” ，P(s)設 爲“ P ” 。藉由此，例如，對於控制對象5的輸入，係成 爲 “u + Kadd· dm-d” 。 根據圖4 ( a )所示之模型，求得d— y的傳遞特性。 首先，藉由圖4(a)所示之模型，得出以下的（a) 式、（b)式、（c)式： (a) ； (yN~y) · PM= dm (b) ; (dm.KADD + u — d) · P = yKp: the gain of the face TQ: the time constant of the model is here, and the structure of the interference observation unit 10 itself, when modeled to the extent shown in Fig. 4(a), is a conventional interference with the conventional The structure of the observer is roughly the same. The interference observation unit 1 shown in Fig. 1 is based on the structure of such a general interference observer, and more particularly with respect to the interference estimation unit 1 1 and the nominal model 14 described above, and is considered as described above ( 2) The transfer function shown in the formula (4). The structure of the general disturbance observer is disclosed, for example, in Reference No. 1 (Japanese Laid-Open Patent Publication No. H20-1-2084). Regarding the disturbance observer, the structure of FIG. 1 and the structure of FIG. 1 and FIG. 2 of Reference 1 are different in that the addition gainer 12 is provided, but if this is regarded as the gain KADD in Reference 1, Considering the case of = 1, the structure of this structure and reference 1 are substantially the same. In addition, the enthalpy of the gain KADD is arbitrarily equal to or less than one, and the designer can arbitrarily determine 'but' that the inventors have considered that the gain KADD = 0.7 is appropriate based on experiments and experience (a good control result can be obtained). ). In the case where the gain Kadd = 1, that is, when the output dm of the interference estimating unit 1 1 is used as it is, it is excessively compensated. This is because 'the model error is present in the nominal model 14 and the error is also included in the dm as the interference estimation 値. Further, it is usually "experienced until the disturbance applied to the control target 5 is estimated, which takes time. -16- 201042412 However, as in the prior art, the gain K A D D = 1 can also be made. That is, the addition gainer 12 can be omitted. In the present invention, the addition gainer 1 2 may be omitted for simplification of description. In the operation of the control device 1 in which the addition gainer 1 is omitted, the input of the control target 5 is first controlled, and the operation amount MV(s) which is the output of the feedback controller 2 is added. The 得到 obtained by the output dm of the interference estimating unit 値 is (MV(s) + dm ) ο. Further, the adder 13 obtains the "MV(s) + dm" and the interference estimating unit. The deviation between the output of 1 1 (interference presumption 値) dm. That is, 'deviation = MV(s) + dm - dm = MV(s). This deviation is then input to the nominal model 14. That is, the operation amount M V(s) which is the output of the feedback controller 2 described above is input to the nominal model 14. Then, according to the transfer function Pn(s) of the above formula (4), the above y» corresponding to the manipulated variable MV(s) is obtained. As described above, the basic configuration of the interference observing unit 10 (the level shown in Fig. 4(a)) itself can be a general configuration, and the features of the present embodiment are the contents of the interference estimating unit 11 and the nominal model 14. First, the nominal model itself of a certain control object is simulated, for example, a conventional device as shown in the above Reference 1. However, in the reference 1, for example, regarding the modeling of the motor/generator, an example of the specific modeling has not been found in the precision temperature adjustment system. The present inventors have specifically modeled the control object 5 as will be described later in detail with respect to FIGS. 5 and 6, and further, as described in the following -17-201042412, according to a specific assumption, The model is simplified, and the above formula (4) is determined based on the simplified model. Here, only the air outlet individual heater 26 (the heater 2 1 in this embodiment) is directly controlled by the control device 1 of the present embodiment. This detects the temperature in the clean room 25 (chamber) which is one example of the temperature adjustment target space, and determines/controls the increase/decrease/maintainer of the heater 2 1 output. However, it is not only a simple matter of modeling the relationship between the output of the heater 21 and the temperature in the purification chamber 25 (chamber). The temperature in the clean room 25 (chamber) is not determined solely by the output of the heater 21, but also by the cooling performance of the cooler 28, the mixing between the front and the outside of the cooler 28, and the clean room. 25 The influence of various factors such as heat entering and exiting, and depending on the situation, is also affected by interference. Therefore, the control object 5 shown in FIG. 1 is not a single-finger individual heater 26 (heater 21), but is a representative of the precise temperature adjustment system shown in FIGS. 2 and 3. . That is, the control object 5 shown in Fig. 1 refers to the entire system including the exhaust port individual heater 26, the cooler 28, the clean room 25, the air passage (supply path), and the like. Further, in order to model the operation of the control target 5, not only the output of the heater 2 1 but also the cooling performance of the cooler 28 must be considered, and the flow of air (heat) or the like must be considered. The nominal model 1 4 ' of this embodiment is a model for simulating the action of "control object 5" in this sense. The nominal model 14 will be described later in detail. -18- 201042412 Further, by interfering with the transfer function shown in the above formula (2) of the estimating unit 11, appropriate interference estimation can be performed. Here, in the preferred embodiment of the present example, in the above formula (2), it is set as follows: K〇BS=1//Kp, Τ〇1=Τ〇ο Here, in the above formula (2) The denominator "1+T02s" is simply used for noise removal in measurement systems. Here, if T 〇 2 s is omitted, in the above preferred embodiment, the above formula (2) can be expressed by the following formula (5 〇): [Expression 5] (5) Kp As described above, the formula (5) reverses the denominator of the formula (2), that is, becomes 1/Pn(s). Thereby, appropriate interference estimation can be performed, and an appropriate output 千 (caussion estimation 値) dm can be obtained. The theoretical explanation for obtaining such an effect cannot be sufficiently performed here, but as will be described later, it is possible to confirm the effect that can be obtained through experiments. Further, the basic idea will be described in detail later with reference to Fig. 4 . In the following description, the details of the control target 5 will be described with reference to Figs. 2 and 3' before the description of Fig. 2 and Fig. 3, and the entire precision temperature adjustment system to which the control device 1 of the present embodiment is applied will be described. . Fig. 2 is a schematic block diagram (perspective perspective view) of a precision temperature adjustment system according to an embodiment of the present invention. Further, Fig. 3 is a system configuration diagram of a precise temperature adjustment system according to an embodiment of the present invention. In Figure 3, Figure 2-19-201042412 is graphically represented graphically. In addition, since Fig. 3 shows the ground of Fig. 2 on a plane, the arrangement relationship of each part is described sexually, and does not indicate the actual installation position. Moreover, FIG. 3 is one specific example of the structure of the control object 5. In Fig. 2 and Fig. 3, the clean room 25 is used as a target space for precise temperature adjustment by the system (an example of temperature adjustment target space is used. Such a temperature adjustment target space is not limited to It is called a chamber or the like, but it is an example of a clean room. The air in the clean room 25 is sucked from the intake passage 27 which is not shown in Fig. 3 in Fig. 2 Inside the airway path). Here, in the present configuration example, the "supply path" includes a plurality of rooms (temperature adjustment spaces) 30 (30a, 30b, 30c), and a space 32, and a clean room upper space 33. Here, in particular, compared with the space in which the supply path is one channel, in the present embodiment, it is divided into a plurality of small rooms (temperature adjustment spaces) 3 0 (30 a, 3 0 b, in the clean room 25). The air is a small room (temperature adjustment space) 30a (the bottom of the lower part. The inside of the small room 30a is provided with a cooler 28 and a blower) 24, which is illustrated from the above-described intake passage 27. Although not shown in Fig. 2 (shown in Fig. 3), in the small room (temperature adjustment space) 30 a, an intake port 29 for the intake air is provided. The air in the inhaled clean room 25 is patterned. In the clean room of the phase diagram 2, i 20, the system is shown in the room (the small number of the upper part of the supply is divided into 3 0c) and is sucked into the room) (fan, but the outside is empty, and from -20 - 201042412 The outside air that has entered the intake port 29 is mixed with each other and cooled by the water-cooled cooler 28 having high cooling performance, and then sent to the upper small room 30b by the blower 24. Further, In the example shown in Fig. 3, the target temperature for the cooling (for the net to be described later) The target temperature in the chamber 25 is distinguished by the cooling target temperature of 21.5 ° C. Therefore, the temperature of the air (cooling air) sent to the small room 3 Ob should be near the cooling target temperature. Further, in Fig. 2, in the small room 30a, there is a space between the cooler 28 and the blower 24, but (as shown in Fig. 3) may also be separated. The cooling air of 3 Ob flows further into the upper small room 30c, from which it flows into the upper space 32 of the figure, and then flows into the upper space 3 of the clean room. As shown in the upper space of the clean room 3 3, an exhaust port individual heater 26 is provided. The air flowing into the upper space 3 3 of the clean room is individually heated by the exhaust port of the plurality of stages shown in the figure (in the illustrated example, 26a) , 26b, 26c, respectively, are heated. In the example shown in Figure 3, the target temperature is 2 3.0 ° C. That is, the precision temperature adjustment system 20 is to control the temperature in the clean room 25 This target temperature (23.0 ° C) is controlled as a method. As described above, the clean room 2 5 The air is temporarily cooled by the cooler 28 (the cooling target temperature is 2 1 · 5 ° C), and is heated by the individual heaters 26 ( 26a , 26b , 26c ) of the respective exhaust ports. And it becomes the air whose temperature is close to the target temperature (23.0 °C) and flows into the clean room 25. In addition, each of the individual heaters 26 of the exhaust port is a fan 22 as shown in Fig. 3 - 21 - 201042412 The heater 21 is composed of a heater 21 or a fan 22 + a heater 21 + a filter. The air in the upper space 3 3 of the clean room (the air flowing into the exhaust port) becomes smaller as the temperature fluctuates, so that the temperature control is performed, and high-precision temperature control is possible. That is, the air (cooling air) cooled by the cooler 28 flows into the clean space 33 through the two small rooms 3 Ob, 30c or the upper space 3 2 '. In each of the small rooms 30b, 30c or the upper empty sequence, since the air is stirred, the temperature becomes substantially uniform (movement becomes small). In the example shown in Fig. 2, between the small rooms 30, between the room 30c and the upper space 32, an air intake port 3 1 (3 1 a, 3) is provided as an air intake port. 1 b, 3 1 c ). The air flows into the small (or upper space 3 2 ) of the upper layer from the lower small room 30 through the air port 3 1,. That is, it flows in from the upstream side (as a large flow direction, it flows according to the arrow A shown in the figure). That is, the cooling air in the small room 3 〇a flows into the upper small room 3 Ob from the intake and exhaust port 3 1 a as shown in the figure, and the air in the small room 3 Ob is shown by The intake and exhaust ports flow into the small room 30c of the upper layer. Similarly, the small room 30c' flows into the upper portion 3 of the upper layer via the intake and exhaust port 3 1 c as shown. Then, the air in the upper space 3 2 flows into the upper space 3 3 . Here, it is preferable that each of the suction and exhaust ports 31 is such that the air can be easily moved by the heater, and the temperature is changed and the small room/exhaust is sucked in the room 3 through the above-mentioned room. In the lateral direction, it is in the middle. The air space in the same room as 31b is cleaned. The flow of gas -22- 201042412 is configured in a zigzag manner (forming a non-linear, relatively long-distance air flow). Further, the intake and exhaust port 315 provided in each of the small rooms 30 (temperature adjustment space) is provided at least at a position where the flow distance of the air in each temperature adjustment space is not minimized. For example, it is preferable that the air flow distance in each temperature adjustment space, i.e., the distance between the two intake and exhaust ports at each temperature adjustment space, is as long as possible. That is, for example, taking the small room 30c as an example, if the air intake and exhaust port 3 1 b is generally disposed on one side of the room as shown, the air intake and exhaust port 3 1 c is as shown in the figure. Generally located on the opposite side. With such a configuration, when the air passage (supply path) is one passage, the amount of the obstacle is increased with respect to the flow direction of the air, so that the air becomes a hindrance (small The roof or side walls of the room 30 collide and change direction, and thereby become stirred. By this, it is possible to achieve uniformity of the air temperature. Further, even in the compact structure, the flow distance of the air can be increased, whereby the uniformity of the air temperature can be achieved. In this way, not only is the distance through which the air flows, but also the air is mixed with each other by stirring, and the effect of uniformizing the air temperature is increased. Further, the arrow mark A' shown in Fig. 2 is expressed as a large flow and is directed to the flow direction of the air (ignoring the disturbance, the tooth shape, etc.). Although the above-described control device 1 is not shown in Fig. 2, as shown in Fig. 3, it is generally assumed that the individual heaters 26 are controlled by the exhaust port. As described above, one of the three exhaust port individual heaters 26 (the exhaust port individual heater 26c) will be described as an example. In this example, the control device 1 c corresponding to the row -23-201042412 port individual heaters 2 6 c is provided with PID2C corresponding to the feedback controller 2 'adder 4, the adder 3, and the disturbance observing unit 10 The adder 4c, the adder 3c, and the interference observation unit 1〇c. Further, the heater driving device 44c is shown as being located outside the exhaust port individual heaters 26c. However, it is also conceivable to be included in the exhaust port heaters 2 6 c. The above deviation E(s) = ( r - y ) ' is input from the adder 4c to the PID 2c. Here, 'r = 2 3. 〇 ° C ' y is the temperature detected by the temperature sensor TA03. The temperature sensor TA 0 3 is a sensor for detecting the temperature in the clean room 25, in particular, an area corresponding to the exhaust port individual heater 26c for detecting the exhaust port in the clean room 25 ( For example, a sensor for the temperature of the space immediately below the individual heater 26c of the exhaust port. The temperature y detected by the temperature sensor TA03 is also input to the disturbance observation unit 1 〇 c. Then, by the adder 3, the output from the interference observation unit 10c is added to the output of the PID 2c (the operation amount MV(S)) (dmxKADD 'but as described above, here, since the system is set KADD=1, so it becomes dm). Then, the addition result (MV(s) + dm) is input to the heater driving device 44c, and is also input to the disturbance observing portion lc. Here, as shown in FIGS. 2 and 3, the clean room 25 is provided with a door 23. For example, an operator or the like enters and exits from the door 23. The above-mentioned "interference" is, for example, a temperature rise (or a temperature drop) in the clean room 25 generated by the opening and closing of the door 23. The interference observation unit 1 performs compensation corresponding to the influence of the interference. Further, in Fig. 3, for comparison, the control devices corresponding to the individual heaters 6 6a, 26b of the exhaust port are conventional structures, but in practice, these control devices are also The above control device 1c has the same structure as shown in Fig. 1. As shown in the figure, in the conventional configuration, the outputs (operating quantities MV(S)) from the PIDs 2a and 2b are input to the heater driving devices 44a and 44b as they are. In addition, in FIG. 3, the structure (the adder 4 1 , the PID 42 , the heater drive device 43 , the temperature sensor TA06, FS1, FS2, H1, etc.) which is used for control of the cooler 28 ◎ is shown. However, the cooler 28 and its control method itself are substantially the same as those of the conventional device, and therefore, they are not particularly described. Hereinafter, the operation of the control device 1 shown in Fig. 1 described above will be described with reference to Fig. 4 as well. First, as described above, the structure (the degree shown in Fig. 4(a)) itself provided with the interference observation unit 10 is a general structure of the prior art, and the dynamic Q system is generally as shown in, for example, the aforementioned reference 1. . That is, it is generally shown by, for example, Equation 1, Formula 2, and Formula 3 in Reference 1. The difference is that the point with the addition gainer 12 is provided, but as described above, if reference 1 is regarded as KADD = 1, it can be regarded as substantially the same. However, this point is first explained using Figure 4 (a). Fig. 4 (a) is modeled so that the control device 1 of Fig. 1 described above also includes the control object 5. The influence of the interference of the control target 5 is the same as that of the case of Fig. 2 of Reference 1, and it is assumed that the input to the control object 5 is subtracted from the interference d. That is, at KADD = 1 -25 - 201042412, u + dm-d is obtained by the adder 6 shown, which becomes the input of the control object 5. Further, in FIG. 4(a), for the sake of simplification, the transfer function of the P ID 2, that is, the portion multiplied by E(s) in the above formula (1) is set to "C", and The transfer function of the disturbance estimating unit 11, that is, the above formula (2), is set to "PM". Also, MV(s) is set to "u" and P(s) is set to "P". Thereby, for example, the input to the control object 5 is "u + Kadd·dm-d". According to the model shown in Fig. 4 (a), the transfer characteristics of d - y are obtained. First, by the model shown in Fig. 4(a), the following formulas (a), (b), and (c) are obtained: (a); (yN~y) · PM = dm (b); (dm.KADD + u — d) · P = y
(c) ; (-dm+dm · KAD〇+u) PN=yN 在此，上述參考文獻1中之數式2中，係將y以 y = yu + yd的形式作表示。亦即是，關於y，係受到操作量u 的影響以及干擾d的影響。因此，例如也可以表示爲 yu = kuxu，yd = kdxd ( ku ’ kd爲係數）。在此，如果僅僅針 對yd作說明，則係將上述（a)式、（b )式、（c )式展 開，而得到關於y的以下（6 )式。 另外，當求取yd的情況時，係在上述（a )式、（b )式、（c )式中設爲沒有U而求得y的計算式。同樣的 ，在求取yu的情況時，係在上述（a )式、（b )式、（C )式中設爲沒有d而求得y的計算式。 -26- 201042412 (a ) — (b ) { (yN-y) · pm · KADD-d} . p = y . · . (b)， (a ) — ( c )(c); (-dm+dm · KAD〇+u) PN=yN Here, in the above formula 2 in the reference 1, the y is expressed in the form of y = yu + yd. That is, regarding y, it is affected by the influence amount u and the disturbance d. Therefore, for example, it can also be expressed as yu = kuxu, yd = kdxd (ku ’ kd is a coefficient). Here, if only yd is described, the above formula (a), (b), and (c) are developed to obtain the following formula (6) regarding y. In addition, when yd is obtained, in the above formula (a), (b), and (c), a calculation formula in which y is obtained without U is used. Similarly, in the case of obtaining yu, in the above equations (a), (b), and (c), a calculation formula in which y is obtained without d is used. -26- 201042412 (a) — (b ) { (yN-y) · pm · KADD-d} . p = y . . . (b), (a) — ( c )
((yy) ·(Kade^-1) ” PN=yN —(yN-y) (KADD-1) * PMpN=yN . · . (c) » 由（b)’ (yN-y) · PM · KADD= (y/P) +d * * * (b) » , 根據（b)”~^(c)’ ，得出以下（6)式’· y = {P (1-K DDPMPN+PMPN) / (KaDDPmPn—PmPN—1 一 PKadD?M) . o 上述（6)式中，y相當於上述yd。 因此，這裡在上述（6)式中，如果KADD=1，則胃 以下（6)’式： yd = {P (1—PMPN+PMP尽) ^ (PMPN~PMPN~1_；PPM) }xd =(P/-1-PPM) }xd = {-P/ (1 +PPM) }xd (6) ’ 式 (-P/ (1+PPM) =kd) 上述參考文獻i之數式2中的yd (第2項）隻“ -(P/ ( 1+PL )) ” ，由於Pm係可視爲相當於L (雖然並 非相同，在內容上有所差異），因此，上述（6)’式可認胃 和上述參考文獻1之數式2中的yd (第2項）相同。 關於yu，並不作特別說明，但是，同樣的，如果設 爲KADD=1，則係成爲與上述參考文獻1之數式2中的第 1項相同。 如此這般，即使具有加法增益器1 2 ’也可認爲是與 習知技術大致相同的動作。 並且，在本實施例的控制裝置1中’如上所述’關於 -27- 201042412 精密溫度調節系統，係實行有控制對象5的具體模型化， 且特別如同上述最佳實施例一般地，經由將千擾推定部 1 1之傳遞函數設爲與該模型（標稱模型1 4 )相對應者， 而成爲能夠進行適當的干擾補償。關於此，參照圖4 ( b )而進行說明。另外，在此，係以K A D D = 1來進行說明。 在圖4(b)中，於第1層展示d之具體例，第2層 爲y，第3層爲yN，第4層爲（yN-y)，第5層爲dm的 具體例。 首先，如第1層所示一般，假設在某個時刻發生干擾 ，d發生變化（例如〇— 1 )。此係例如設爲上述門23被 打開。又，在此，淨化室2 5內的溫度係設爲比外部溫度 高。此時，y的値、亦即是淨化室2 5內的溫度’係成爲 降低，但是，如第2層中所示一般，理應成爲根據上述標 稱模型1 4之傳遞函數（（4 )式）的溫度變化。亦即是， 應成爲根據PN = KP/ ( l+T〇s )的溫度變化。另外，該第2 層的溫度變化，係爲表示不藉由干擾觀測部1 0而進行補 償的情況者，當藉由干擾觀測部1 〇而進行了補償的情況 時，該溫度變化係成爲非常小。 另一方面，標稱模型14的輸出yN由於並不受到干擾 的影響，因此，若例如u的値設爲不變化’則便如第3層 所示，輸出yN的値也成爲不變化。因此’如第4層所示 ，成爲干擾推定部11的輸入之“ π-y” ’係成爲表示上 述y的變化者。亦即是，係表示關於溫度調節對象空間的 溫度之因干擾所產生的影響度。 -28- 201042412 在此，上述最佳實施例的情況時，干擾推定 傳遞函數Pm爲： PM= (l+T〇s) /Kp 亦即是’爲上述標稱模型1 4之傳遞函數（ 的倒數。 因此’相對於“ yN-y”的dm，係成爲相對 的y時之倒數。亦即是，如同第5層所示，成爲 者。藉由將該dm加到PID2的輸出u處，在圖 不之模型中的d於控制對象5之輸入“ u + d m - d ” 是U，在理論上，若是U不變化，則y也不變化 實際上不能完全排除干擾的影響）。 本發明人’係實際地製作完成本實施例的控 ，並根據實驗而確認了其效果。亦即是，如圖 (b )所示，與沒有藉由干擾觀測部1 〇而進行補 技術結構相比’確認可以減少由干擾所帶來的影 室2 5內的溫度變化）。 在該實驗中，門2 3打開6 0秒。在習知技術 如圖9(a)所示，最大產生0.02 4 °C的溫度降低 面，在本實施例的控制中，如圖9 ( b )所示， 0.0 0 9 °C的溫度變化。另外，根據本實驗確認到 KADD = 0.7左右的情況時，效果最佳。 另外，在本實驗中，係將上述標稱模型14 數（（4)式）以及干擾推定部11之傳遞函數P 、KP之値，設爲預先根據其他實驗所決定的値 部1 1之((yy) ·(Kade^-1) ” PN=yN —(yN-y) (KADD-1) * PMpN=yN . · . (c) » by (b)' (yN-y) · PM · KADD= (y/P) +d * * * (b) » , according to (b)"~^(c)', the following formula (6)'· y = {P (1-K DDPMPN+PMPN) / (KaDDPmPn - PmPN - 1 - PKadD? M) . o In the above formula (6), y corresponds to the above yd. Therefore, in the above formula (6), if KADD = 1, the stomach below (6)' Formula: yd = {P (1—PMPN+PMP) ^ (PMPN~PMPN~1_;PPM) }xd =(P/-1-PPM) }xd = {-P/ (1 +PPM) }xd ( 6) ' Formula (-P/(1+PPM) = kd) The yd (item 2) in the above formula i is only "-(P/(1+PL))"), since the Pm system is visible It is equivalent to L (although it is not the same, and there is a difference in content), and therefore, the above-mentioned (6)'-type stomach can be the same as yd (the second item) in the formula 2 of the above-mentioned reference 1. Regarding yu, In the same manner, if KADD=1, it is the same as the first term in Equation 2 of the above-mentioned reference 1. Thus, even with the addition gainer 1 2 ' It is considered to be an action that is substantially the same as the conventional technique. Further, in the control device 1 of the present embodiment, as described above, with respect to the -27-201042412 precision temperature adjustment system, the specific modeling of the control object 5 is carried out, and in particular, as in the above-described preferred embodiment, The transfer function of the disturbance estimation unit 1 1 is set to correspond to the model (nominal model 1 4 ), and appropriate interference compensation can be performed. This will be described with reference to FIG. 4( b ). This is illustrated by KADD = 1. In Figure 4(b), the specific example of d is shown in the first layer, the second layer is y, the third layer is yN, and the fourth layer is (yN-y). The fifth layer is a specific example of dm. First, as shown in the first layer, it is assumed that interference occurs at a certain time, and d changes (for example, 〇-1). For example, the door 23 is opened. Here, the temperature in the clean room 25 is set to be higher than the external temperature. At this time, the temperature of y, that is, the temperature in the clean room 25 is lowered, but as shown in the second layer. In general, it should be the temperature change according to the transfer function of the above nominal model 14 (formula (4)). , should be the temperature change according to PN = KP / ( l + T 〇 s ). Further, the temperature change of the second layer is a case where the compensation is not performed by the interference observation unit 10, and when the compensation is performed by the interference observation unit 1 ,, the temperature change is very small. On the other hand, since the output yN of the nominal model 14 is not affected by the disturbance, if, for example, 値 of u is not changed, then as shown in the third layer, the 输出 of the output yN does not change. Therefore, as shown in the fourth layer, "π-y" which becomes the input of the interference estimating unit 11 is a changer indicating the above y. That is, it indicates the degree of influence caused by the disturbance of the temperature of the temperature adjustment target space. -28- 201042412 Here, in the case of the above-described preferred embodiment, the interference estimation transfer function Pm is: PM = (l + T 〇 s) / Kp, that is, 'for the transfer function of the above nominal model 14 Therefore, dm relative to "yN-y" is the reciprocal of the relative y. That is, as shown in layer 5. By adding this dm to the output u of PID2, In the model of the graph, the input "u + dm - d " of the control object 5 is U. In theory, if U does not change, then y does not change, and the influence of interference cannot be completely eliminated. The inventors have actually produced and controlled the present embodiment, and confirmed the effects based on experiments. That is, as shown in Fig. (b), it is confirmed that the temperature change in the chamber 25 caused by the disturbance can be reduced as compared with the case where the compensation structure is not made by the interference observation unit 1 。. In this experiment, the door 2 3 was opened for 60 seconds. In the conventional technique, as shown in Fig. 9(a), a temperature lowering surface of 0.02 4 °C is generated at the maximum, and in the control of this embodiment, as shown in Fig. 9 (b), the temperature changes at 0.00 9 °C. In addition, it is best to confirm that KADD = 0.7 based on this experiment. In addition, in the present experiment, the number of the above-mentioned nominal model 14 (formula (4)) and the transfer function P and KP of the disturbance estimating unit 11 are assumed to be determined in advance according to other experiments.
(4)式） 於上述d 丨相當於d 4 ( a )所 ，幾乎就 (但是， 制裝置1 9(a)、 償的習知 響（淨化 控制中， 0 另一方 最大產生 :當設爲 之傳遞函 Μ中的T〇 。關於這 -29- 201042412 點，於後文參照圖8進行說明。 以下，參照圖5、圖6說明如何決定上述標稱模型14 之傳遞函數（（4)式）。 首先，本實施例的控制裝置1，係爲控制加熱器2 1 之輸出的裝置，但是，控制對象的模型化，係必須針對圖 2、圖3中所示系統20全體而進行。 另外，圖2、圖3的結構，僅僅代表其中一例，本發 明並不侷限於這個例子。在圖2、圖3結構中’係爲藉由 將通氣道（供給路徑）分隔成複數之小房間（溫度調節空 間）3 0 ( 3 0 a、3 Ob、3 0c )，而能夠取得上述效果者。但 是，本方法的適用對象，並不侷限於這個例子，雖沒有特 別作圖示，但也可以將通氣道（供給路徑）的結構設爲如 習知技術那樣的一根通道（單通道）。 於圖5(a)中，表示在圖2、圖3中所示的結構全體 (控制對象5)之簡略模型。 在該簡略模型中，首先，將身爲溫度調節對象空間的 淨化室2 5內之總熱量設爲Q 1，並將與該總熱量Q 1相應 的室內溫度設爲u。上述溫度感測器TA03檢測出的溫度 ，係爲11。又，將經由排氣口個別加熱器2 6而流入淨化 室25內的熱量設爲(空氣溫度爲t〇) ’並將從吸氣通 道27而向淨化室25外流出（流入通氣道（供給路徑）內 )的熱量設爲qi。又’將風扇22的風量設爲Fa。因應於 此，從吸氣通道2 7所流出空氣的風量也視爲F a。又’將 由於門23打開所產生的溫度變化（干擾）設爲td。另外 -30- 201042412 ’將從吸氣口 29流入的外部空氣之溫度設爲t〇A。 上述熱量ql的空氣和上述溫度tOA的外部空氣，係 以特定比例（在此，設爲“ r : ( 1 -r ) ” ，其中，：r爲〇 以上、未滿1的値，作爲—例，例如設爲〇〜〇.3左右） 混合，並在冷卻器2 8被冷卻，將冷卻器2 8冷卻後的空氣 熱量設爲q2。該空氣，係經由排氣口個別加熱器26 (加 熱器21)而被加熱，並流入淨化室25內。 在上述簡略模型中，首先，上述Q1係藉由以下（7 )式而表示。亦即是，作爲熱量ql和熱量q〇之間之差分 的積分而表示。 [數式6] Q\ = . · . (7)式(4) Formula) The above d 丨 corresponds to d 4 ( a ), almost (but, the device 19 (a), the reconciliation of the conventional sound (in the purification control, 0 the other maximum generation: when set The T Μ in the transfer function 关于. -29- 201042412 will be described later with reference to Fig. 8. Hereinafter, how to determine the transfer function of the above-mentioned nominal model 14 ((4)) will be described with reference to Figs. First, the control device 1 of the present embodiment is a device that controls the output of the heater 2 1 . However, the modeling of the control target must be performed for the entire system 20 shown in Figs. 2 and 3 . The structure of Fig. 2 and Fig. 3 is merely an example, and the present invention is not limited to this example. In the structure of Fig. 2 and Fig. 3, 'the air passage (supply path) is divided into a plurality of small rooms ( The temperature adjustment space is 3 0 (30 a, 3 Ob, 3 0c ), and the above effects can be obtained. However, the application of the method is not limited to this example, and although it is not particularly illustrated, it may be The structure of the air passage (supply path) is set as in the prior art One channel (single channel). In Fig. 5(a), a simplified model of the entire structure (control object 5) shown in Fig. 2 and Fig. 3 is shown. In this simplified model, first, the temperature is assumed to be The total heat in the clean room 2 5 of the adjustment target space is set to Q 1, and the indoor temperature corresponding to the total heat amount Q 1 is set to u. The temperature detected by the temperature sensor TA03 is 11. The amount of heat that flows into the clean room 25 via the exhaust port individual heaters 26 is set to (air temperature is t〇)' and will flow out from the intake passage 27 to the outside of the clean room 25 (flow into the air passage (supply path) The heat in the interior is set to qi. In addition, the air volume of the fan 22 is set to Fa. Accordingly, the air volume of the air flowing out from the air intake passage 27 is also regarded as F a. Further, it will be generated due to the opening of the door 23. The temperature change (interference) is set to td. -30- 201042412 'The temperature of the outside air flowing in from the intake port 29 is t〇A. The air of the above heat ql and the outside air of the above temperature tOA are in a specific ratio. (Here, set to "r : ( 1 -r ) ", where: r is above 〇, less than 1 As an example, for example, it is set to 〇~〇.3 or so), and is cooled in the cooler 28, and the air heat after cooling the cooler 28 is set to q2. The air is individually heated via the exhaust port. The heater 26 (heater 21) is heated and flows into the clean room 25. In the above simplified model, first, the Q1 is expressed by the following formula (7), that is, as heat ql and heat q〇. The integral of the difference between them is expressed. [Expression 6] Q\ = . · . (7)
S 又，在此，定義兩個“空氣溫度-熱量變換係數” ka 、k v ° 若風扇風量設爲Fa〔 m3/s〕，空氣密度設爲P 〔 kg/m3〕，比熱設爲c〔 J/kg ·κ〕，裝置容積設爲V〔m3 〕（V爲淨化室2 5 (腔室）之容積），則ka、kv係成爲 由下式表示： ka^FaX/oxc [j/s· K] k v=VXpxc [J/K] 若使用此些之“空氣溫度-熱量變換係數”來表示上 述qO、tl、ql，則係成爲下式一般。其中’熱量爲[W]’ 溫度爲[°C ]。 qO=kaXtO tl=Ql/kv ql=kaXtl -31 - 201042412 將圖5 ( a )所示的簡略模型使用上述“空氣溫度-熱 量變換係數”來作袠示的模型，係爲圖5 ( b )。 另外’在圖5 (b)中，還考慮有伴隨風扇22之旋轉 所發生的熱量qF。熱量是由風扇的馬達旋轉所產生的 熱量’或是由推出空氣時所致之摩擦而產生的熱量等。 首先，如上所述，在冷卻器28冷卻後的空氣熱量， 係爲q2，如圖5 ( b )中所示，在排氣口個別加熱器26中 ’藉由將上述熱量qF和由加熱器21所產生的熱量U[W] 加入到該熱量q2處，熱量q〇進入腔室內。 在圖5(b)中，虛線圍住的部分是在腔室內熱量的 流入/流出之模型，該模型的輸出，是從腔室流出的熱量 q 1。該熱量q 1被作反饋並得到“ q〇-q 1 ” 。藉由對該“ q〇-ql”進行積分’而得到腔室內的總熱量Q1。 該總熱量Q 1，係藉由上述“空氣溫度-熱量變換係數 ” kv而被換算成空氣溫度。亦即是，對於t = Qx ( Ι/kv ) 作運算。藉由在該空氣溫度t上加上上述干擾td(但是， 在此，t d是負値），而得到上述11。亦即是’得到腔室 內的空氣溫度11。藉由該空氣溫度11和上述“空氣溫度-熱量變換係數” ka，而求得從腔室流出的熱量（上述q i )。該q 1，係如同上述一般地作反饋，並得到“ q 〇 - q 1 ” 〇 如上所述，“在腔室內的熱量的流入/流出的模型” 的輸出，係爲q 1 ’該圖上右側的模型，是通氣道（供給 路徑）的模型。首先’使用上述“空氣溫度-熱量變換係 -32- 201042412 數” ka來將上述熱量ql換算成空氣溫度{t3 = qix(l/ka) }。如上所述，由於係將該溫度t3的空氣和溫度tOA的外 部空氣按特定比例作混合，因此，如圖所示，經由式“ t4= {t3x ( 1 -r ) }+ ( t〇Axr ) (r 爲例如 0.3 左右），而 求得混合空氣的溫度Μ。在使用“空氣溫度-熱量變換係 數 ka而將該空氣溫度t4換算成熱量後，輸入至冷卻器 模型，並從從冷卻器模型而輸出熱量q2。 在此’藉由以下（1) - (3)的假設，來將圖5(b) 的模型簡略化。 [假設] (1)風扇熱量qF無變化。或者伴隨其變化而對於溫 度調節對象空間內溫度的影響’與非穩態干擾產生的影響 相比’係爲充分小。這代表風扇的風量無變化。 (2 )外部氣體溫度tOA無變化。或者在控制對象時 間內的溫度變化與非穩態干擾產生的影響相比，係爲充分 小（小到可忽略的程度）。 (3 )冷卻器的冷水線圈之冷水溫度無變化。或者其 對於溫度調節對象空間內溫度的影響，與非穩態干擾產生 的影響相比，係爲充分小。 根據上述假設，圖5(b)的模型可以設爲如圖6所 示的簡略化模型。 首先，根據上述假設（1)和（2)，圖5(b)的模 型中，可將相關於風扇熱量qF以及外部氣體溫度tOA的部 -33- 201042412 分省略。又，“在腔室內的熱量的流入/流出的模型”本 身，係和圖5(b)相同。又’根據上述假設（1) 、 （3 )，冷卻器（其冷水線圈）係可進行如圖6所示的模型化 〇 在如圖6所示的簡略化模型中，流入腔室內的熱量 q〇，係成爲q〇 = q2+u。又，身爲“在腔室內的熱量的流入 /流出的模型”之輸出的熱量qi ’係與上述圖5 ( b )同樣 地而被反饋，並得到“ q〇-ql” 。 在此，於圖式之冷卻器（冷水線圈）中，係被輸入有 上述熱量ql和tl (換算成熱量ql之前），如圖所示，其 輸出q2係成爲如下所不： q2 = ql — (tl.kf) (在此，kf是將11和熱交換量間之關係在11周圍作 了線性近似的係數，單位是[W/K]。在以下之說明中，將 本係數作爲熱交換係數）》 在此，參照圖7，針對冷卻器的簡略模型化作說明。 首先，在圖7 ( a )中，表示冷卻器的一般性之槪略 構成圖。 在該槪略構成中，主要表示冷卻器的冷水線圈（其他 構成省略）。溫度ta的空氣（熱量ql)以風量Fa流入冷 水線圈，並成爲熱量q2的空氣（風速無變化’ Fa)而流 出。冷水線圈中，冷卻水以水速Fw而作流入/流出。將正 要流入冷水線圈之前的冷水線圈之冷卻水的溫度設爲tw a ’將剛從冷水線圈而流出的冷卻水溫度設爲tw 1。另外’ -34- 201042412 在冷卻器中，當然也存在生成/送出冷卻水的結構，但是 ，在此係省略。 若將該冷卻線圏中的熱交換量設爲qex，則係成爲： q2=ql-qex 。 在此 冷卻線圈中的熱交換量qex係藉由下式而求得 qex= k f X (t a — t wa) 在此 化，因此 爲如下： ❹ 根據上述假設（3)，由於冷水濫度twa無變 冷水溫度twa係省略（視爲0 )，而上述式成 qex=k f X t a 因此，q2=ql—kfXta 在上述圖5'圖6之例中，由於ta = tl，因此，係成 爲下式： q2 = ql—kfXtl 對其進行模型化後’則成爲如圖6所示的冷水線圈之 〇 模型。 在此，熱交換係數k f的値’係如同圖7 ( b )中所示 之特性圖一般，爲由風量Fa、水速Fw以及冷水線圈的結 構而決定。因此，若將風量Fa和水速Fw設爲一定，並 預先決定其値，則可得到與其相對應的熱交換係數kf之 値。在圖示之例中，風量Fa = 40，水速Fw設爲圖示的“ 水速1” ，與其對應的熱交換係數kf的値設爲3 60。藉由 此，在本說明中，以熱交換係數kf=360[W/K]來進行說明 -35- 201042412 使用此種如圖6所示一般之簡略化模型，如下所述， 進行“ u— tl ”的導出。但是，設爲沒有干擾td (如上所 述，標稱模型14本身並不受千擾的影響）。 首先，若參照圖6，則可得出以下（d )式、（e )式 、⑴式。 (u + q 2 — q 1) . (l/kv.s)=tl ·.· (d)式 q 1 = t 1 · k a ... (e)式 ql— (tl.kf)=q2 ... (f)式 並且，如果將（e )式代入（f)式，可得出以下（f)’ 式： (tl.ka) — (tl.kf)=q2 ... (f)’ 式 接著，如果將上述（e )式、（f) ’式代入（d )式，並 按以下方式展開，則可得出“ u— 11”的導出式。 (u+tl-ka — tl-kf — tl*ka) . (l/kv-s)=tl (u — t 1 · k f ) · (l/kv.s)=tl u=tl.kv，s + tl.kf = tl (kv-s + kf) (g)式 根據上述（g)式，可得出以下（8)式： [數式7] 1 ¥ » · · w kv - S + kf kv. J -—· s + 1¥ (8)式 l/kf=Kp，則 在上述（8)式中，如果設爲kv/kf=T〇 係成爲以下（9 )式： [數式8] κρ u To-s + 1 上述（9 )式，係和（4 )式相同。亦即是，如上所述 -36 - 201042412 ，決定標稱模型14的傳遞函數Pn(s)。又，如上所述， K〇Bs = l/ Kp，所以 ’ K〇bs — kf。 又，上述To’ Kp的具體一例（實際作了實驗的裝置 之例），係如下所示一般。 在本例中，裝置容積V = 6m3。又，設定kf=360[W/K] 如果改變單位，則成爲：kf=3 60[W/K]与0.4[W/0.001S Again, here, define two "air temperature-heat conversion coefficients" ka, kv °. If the fan air volume is set to Fa [ m3 / s], the air density is set to P [ kg / m3], and the specific heat is set to c [ J /kg ·κ], the device volume is V[m3] (V is the volume of the clean room 25 (chamber)), then ka and kv are expressed by the following formula: ka^FaX/oxc [j/s· K] kv=VXpxc [J/K] If the above-mentioned "air temperature-heat conversion coefficient" is used to express the above qO, tl, and ql, the following equation is obtained. Wherein the heat is [W]' and the temperature is [°C]. qO=kaXtO tl=Ql/kv ql=kaXtl -31 - 201042412 The simplified model shown in Fig. 5(a) is modeled using the above-mentioned "air temperature-heat conversion coefficient", which is shown in Fig. 5(b). . Further, in Fig. 5(b), heat amount qF which occurs in association with the rotation of the fan 22 is also considered. The heat is the heat generated by the rotation of the fan motor or the heat generated by the friction caused by the introduction of the air. First, as described above, the heat of the air after cooling by the cooler 28 is q2, as shown in Fig. 5(b), in the individual heaters 26 of the exhaust port 'by the above heat qF and by the heater The heat U[W] generated by 21 is added to the heat q2, and the heat q〇 enters the chamber. In Fig. 5(b), the portion enclosed by the broken line is a model of the inflow/outflow of heat in the chamber, and the output of the model is the amount of heat q 1 flowing out of the chamber. This heat q 1 is fed back and gives "q〇-q 1 ". The total heat amount Q1 in the chamber is obtained by integrating the "q〇-ql". The total heat quantity Q1 is converted into an air temperature by the above-mentioned "air temperature-heat conversion coefficient" kv. That is, for t = Qx ( Ι / kv ). The above 11 is obtained by adding the above-mentioned disturbance td to the air temperature t (however, t d is negative 値). That is, the air temperature 11 in the chamber is obtained. The heat flowing out of the chamber (the above q i ) is obtained by the air temperature 11 and the above-mentioned "air temperature - heat transfer coefficient" ka. The q1 is generally fed back as described above, and gives "q 〇-q 1 " 〇 as described above, the output of the "model of the inflow/outflow of heat in the chamber" is q 1 ' on the graph The model on the right is a model of the airway (supply path). First, the above heat amount ql is converted into an air temperature {t3 = qix(l/ka) } by using the above-mentioned "air temperature-heat conversion system -32 - 201042412 number" ka. As described above, since the air of the temperature t3 and the outside air of the temperature tOA are mixed in a specific ratio, as shown in the figure, via the formula "t4= {t3x ( 1 -r ) }+ ( t〇Axr ) (r is, for example, about 0.3), and the temperature 混合 of the mixed air is obtained. After the air temperature-heat conversion coefficient ka is used to convert the air temperature t4 into heat, it is input to the cooler model, and from the slave cooler model. And the output heat q2. Here, the model of Fig. 5(b) is simplified by the assumptions of (1) - (3) below. [Assumption] (1) There is no change in fan heat qF. Or, the influence on the temperature in the temperature adjustment target space accompanying the change is sufficiently smaller than the influence of the unsteady interference. This means that the fan's air volume is unchanged. (2) There is no change in the outside air temperature tOA. Or the temperature change in the control object time is sufficiently small (small to negligible) compared to the effect of unsteady interference. (3) The cold water temperature of the cold water coil of the cooler does not change. Or its effect on the temperature in the temperature-regulating object space is sufficiently small compared to the effect of unsteady interference. Based on the above assumptions, the model of Fig. 5(b) can be set to a simplified model as shown in Fig. 6. First, according to the above assumptions (1) and (2), in the model of Fig. 5(b), the portion -33 - 201042412 relating to the fan heat amount qF and the outside air temperature tOA can be omitted. Further, the "model of the inflow/outflow of heat in the chamber" itself is the same as that of Fig. 5(b). 'According to the above assumptions (1), (3), the cooler (the cold water coil) can be modeled as shown in Fig. 6. In the simplified model shown in Fig. 6, the heat flowing into the chamber q 〇, the system becomes q〇= q2+u. Further, the heat qi' which is the output of the "model of the inflow/outflow of heat in the chamber" is fed back in the same manner as in the above-mentioned Fig. 5 (b), and "q〇-ql" is obtained. Here, in the cooler (cold water coil) of the figure, the above-mentioned heats ql and t1 (before converted into heat ql) are input, and as shown in the figure, the output q2 is as follows: q2 = ql — (tl.kf) (here, kf is a coefficient that linearly approximates the relationship between 11 and the heat exchange amount around 11, and the unit is [W/K]. In the following description, this coefficient is used as the heat exchange. Coefficient) Here, a brief modelling of the cooler will be described with reference to FIG. First, in Fig. 7(a), a general schematic diagram of the cooler is shown. In this schematic configuration, the cold water coil of the cooler is mainly shown (the other configuration is omitted). The air (heat ql) at the temperature ta flows into the cold water coil with the air volume Fa, and flows out as air of the heat q2 (the wind speed does not change 'F). In the cold water coil, the cooling water flows in/out at a water velocity Fw. The temperature of the cooling water of the cold water coil immediately before flowing into the cold water coil is set to tw a ', and the temperature of the cooling water that has just flowed out from the cold water coil is set to tw 1 . Further, - -34- 201042412 In the cooler, of course, there is also a structure for generating/sending cooling water, but it is omitted here. When the amount of heat exchange in the cooling coil is qex, it is: q2 = ql - qex . The amount of heat exchange qex in the cooling coil is obtained by the following equation: qex = kf X (ta - t wa) is determined as follows: ❹ According to the above assumption (3), since the cold water shortage twa is not The chilled water temperature twa is omitted (considered as 0), and the above formula is qex=kf X ta. Therefore, q2=ql_kfXta in the example of Fig. 5' Fig. 6 above, since ta = tl, the system becomes : q2 = ql—kfXtl After modeling it, it becomes the model of the cold water coil shown in Figure 6. Here, the 値' of the heat exchange coefficient k f is generally the same as the characteristic diagram shown in Fig. 7 (b), and is determined by the air volume Fa, the water velocity Fw, and the structure of the cold water coil. Therefore, if the air volume Fa and the water velocity Fw are set to be constant, and the enthalpy is determined in advance, the heat exchange coefficient kf corresponding thereto can be obtained. In the illustrated example, the air volume Fa = 40, the water speed Fw is set to "water speed 1" as shown, and the enthalpy of the corresponding heat exchange coefficient kf is set to 3 60. Therefore, in the present description, the heat exchange coefficient kf=360 [W/K] is used for explanation - 35 - 201042412. Using the general simplified model shown in FIG. 6, as described below, "u- The export of tl ”. However, it is assumed that there is no interference td (as described above, the nominal model 14 itself is not affected by the disturbance). First, referring to Fig. 6, the following formulas (d), (e), and (1) can be obtained. (u + q 2 — q 1) . (l/kv.s)=tl ··· (d) Equation q 1 = t 1 · ka (e) Equation ql—(tl.kf)=q2 . . . . (f) and, if the formula (e) is substituted into the formula (f), the following formula (f)' can be obtained: (tl.ka) — (tl.kf)=q2 ... (f)' Then, if the above formula (e), (f) ' is substituted into the formula (d) and developed in the following manner, the derivative of "u-11" can be obtained. (u+tl-ka — tl-kf — tl*ka) . (l/kv-s)=tl (u — t 1 · kf ) · (l/kv.s)=tl u=tl.kv,s + tl.kf = tl (kv-s + kf) (g) According to the above formula (g), the following formula (8) can be obtained: [Expression 7] 1 ¥ » · · w kv - S + kf kv J - - · s + 1 ¥ (8) Formula l / kf = Kp, in the above formula (8), if kv / kf = T 〇 is the following formula (9): [Expression 8] Κρ u To-s + 1 The above formula (9) is the same as the formula (4). That is, as described above -36 - 201042412, the transfer function Pn(s) of the nominal model 14 is determined. Also, as described above, K 〇 Bs = l / Kp, so ' K 〇 bs — kf. Further, a specific example of the above To' Kp (an example of an apparatus actually experimented) is as follows. In this example, the device volume is V = 6m3. Also, set kf=360[W/K] If you change the unit, it becomes: kf=3 60[W/K] and 0.4[W/0.001
°C ]。 因此，首先’係成爲：Kp=l/kf=l/0.4 = 2.5[0.001 t /W]。 又，如果設爲空氣密度p = 1.203 [kg/m3]、比熱 c=1.006[kJ/kg · K]，則成爲：kv = 6 x 1.203 X 1.006 X 1 03 = 726 1 [ J/K]。 因此，成爲：To=kv/kf= 7261x360 与 20[sec] 因此，在該具體例中，標稱模型1 4的傳遞函數PN(S) 。係成爲下述之（10)式： [數式9] PN(S) = 2.5 T+20s • · · (1 0)式 但是’本發明人係亦使用其他實驗裝置而進行實驗。 以下之說明，是對其他實驗進行說明。 在此，於圖8中表示實驗結果之一例。 圖8中所示的圖線，係爲在例如圖2、圖3所示的結 構中’進行如同下述一般之參數同定試驗（加熱器發熱特 性）’並使用市售之一般性的同定工具來作表示者。 -37- 201042412 同定試驗槪略：本試驗，係將各排氣口個別加熱器 26中之加熱器21的輸出’以10%、20%、30%的三個階 段而作變化，並求得各輸出下之溫度感測器TA01、TA02 、TA03 (控制點溫度）的溫度變化。 更具體的試驗內容如下： [收集條件] 冷水線圈：自動（SV値：通常運用値） 風扇22:運轉（額定運轉） 加熱器21 :手動（輸出初始値：0，以後按、20 %、3 0 %而階段性變化）°C]. Therefore, first, the system becomes: Kp = l / kf = l / 0.4 = 2.5 [0.001 t / W]. Further, if the air density p = 1.203 [kg/m3] and the specific heat c = 1.006 [kJ/kg · K], then kv = 6 x 1.203 X 1.006 X 1 03 = 726 1 [J/K]. Therefore, it becomes: To = kv / kf = 7261x360 and 20 [sec] Therefore, in this specific example, the transfer function PN(S) of the nominal model 14 is used. The following formula (10) is obtained: [Formula 9] PN(S) = 2.5 T+20s • · (1 0) Formula However, the inventors also conducted experiments using other experimental devices. The following description is for explaining other experiments. Here, an example of the experimental results is shown in FIG. The graph shown in Fig. 8 is such that, in the structure shown in Fig. 2 and Fig. 3, 'the same general parameter test (heater heating characteristic) as described below is performed' and a commercially available general-purpose tool is used. To be the presenter. -37- 201042412 The same test strategy: This test is to change the output 'of the heater 21 in the individual heaters 26 of each exhaust port in three stages of 10%, 20%, and 30%. Temperature changes of temperature sensors TA01, TA02, TA03 (control point temperature) at each output. More specific test contents are as follows: [Collection conditions] Cold water coil: Automatic (SV値: Normal operation 値) Fan 22: Operation (rated operation) Heater 21: Manual (output initial 値: 0, later, 20%, 3 0% and phased change)
內部負載：0WInternal load: 0W
[收集方法] 在操作端輸入部溫度、控制點溫度之雙方穩定後’繼 續收集數據10分鐘。 最初，加熱器21的輸出設爲10 %，如上所述，收集 數據。 接著，加熱器21的輸出設爲2 0 %，如上所述，收集 數據。最後，加熱器21的輸出設爲3 0 %，如上所述，收 集數據。 圖8中所示各波形，係如下所述一般： pv :控制點溫度 I d e n 10 1 :同定波形（所推定的設備模型之P V被形） SV :目標溫度 -38- 201042412 MV:操作量（加熱器21之輸出量） 根據圖8中所示之數據，使用上述市售的同定 決定參數。 其結果，得到以下的傳遞函數G 1 (s): [數式10] 0.8e~°ou 20^ + 1 其中’ Gl(s)表示作爲處理的同定試驗之結果得 0 模型（傳遞函數），亦即是，時間常數T = 20[sec]， K = 0.8 〇 在此’浪費時間L爲0.0 1，由於與時間常數T 係爲十分小，所以，於觀測中係忽略。 因此，上述傳遞函數Gl(s)可以看作： G 1 (s) =0. 8/ (2 0 s + 1) 另外’所謂時間常數，係指達到最終値之63.2 % 間。又，所謂浪費時間，係指輸入信號發送傳遞時的 ◎ 時間。 關於干擾推定部11和標稱模型14之傳遞函數的 數値，例如係可根據實驗來決定即可。 例如，在圖8之例中，如上所述，在根據實驗結 得出的傳遞函數Gl(s)中，增益K = 0.8，時間常數T = 因此，可以將這些數値直接作爲標稱模型14之傳遞 的具體數値。亦即是，在標稱模型14之傳遞函數Ρν ，可以設定增益Κρ = 0.8，時間常數Το = 20。 又，關於干擾推定部11，由於其傳遞函數中的 具來 到的 增益 相比 的時 延遲 具體 果所 20 > 函數 (s)中 觀測 -39- 201042412 增益 K0BS = 1/Kp’ 因此，可設定 kobs=1/0.8 = 如上所述’上述（2 )式中T〇,由於係設爲與」 ’所以，可以設爲Τ〇! =20。又，關於上述（ T02，如上所述’由於係爲用以去除噪音等， 明人係設定自己認爲合適的任意値（在此爲1: 藉由此，在本具體例中，上述（2)式係 般： [數式11] 1.25(1 + 20^) 如上所述，在針對（2)式、（4)式而設 ，再如上所述而設定KADD = 0.7後，實際上藉 實驗，其結果，如上所述，爲如圖9 ( b )所 此，由於係已經作了說明，故在此不再作特別 另外' 在本說明書中，上述所謂“干擾” 經在課題中所說明了的“非穩態干擾”，如同 中所述一般，作爲此種非穩態干擾的發生原因 於上述門23的開閉，即使是其他原因，例如 處的閘門之開閉，相對於腔室之工件（晶片， )的出入，機械臂的出入等，也會產生上述非 亦即是，“非穩態干擾”發生的主要原因 於門或閘門之開閉等所導致的外部氣體之相對 度調節對象空間）的暫時流入。又，“非穩態 的主要原因還有其他原因，例如晶圓、機器材 入腔室內，其形成中長期的發熱源。亦即是， :1 · 2 5。又， 二述T〇相同 2 )式中的 因此，本發 丨 e c )。 成爲如下一 定具體參數 由設備來作 示者。關於 說明。 係特別指已 已經在課題 ，並不侷限 設置在腔室 玻璃基板等 穩態干擾。 之一，係由 於腔室（溫 干擾”發生 料、人等進 在腔室等的 -40- 201042412 溫度調節對象空間內，因從外部進入外部氣體、人等的某 種的溫度變化主要因素，而會產生“非穩態干擾”。 但是’ “非穩態干擾”發生的主要原因，並不侷限於 上述“相對於溫度調節對象空間而從外部進入有溫度變化 主要因素”，還有例如內部負荷之變動（裝置之運轉/停 止等）等，也會成爲“非穩態干擾”發生的原因。 本實施例之干擾觀測器，係爲與此種非穩態干擾相對 應者，能將非穩態干擾之影響（控制點溫度之變化，亦即 是腔室內之溫度變化）抑制至最小限度。 另外上述說明，係僅爲其中一例，本發明並不侷限於 這個例子。 例如，在圖1 〇 ( a )中，係模式地表示上述一例之精 密溫度調節系統的結構。如圖1 〇 ( a )所示，上述一例之 精密溫度調節系統，可以說是“冷卻器+加熱裝置（OB S 功能）”的結構。亦即是，將從身爲溫度調節對象空間的 —例之淨化室25 (在圖1 0中係記載爲溫度調節對象空間 25 )而來的空氣，暫時在冷卻器28冷卻，之後，藉由排 氣口個別加熱器2 6來作加熱的結構，在上述構成中，係 將由本方法所致之OBS功能適用於加熱裝置26’。亦即是 ，係爲將例如圖1中所示的干擾觀測部1 〇作了追加之結 構。 另外，圖10(a)〜（d)所示之加熱裝置26’，例如 在圖3等的例中，是指排氣口個別加熱器26及其控制裝 置（圖3中所示之lc或加熱器驅動裝置44c等）。同樣 -41 - 201042412 的，圖示之冷卻器2 8 ’，例如是指冷卻器2 8及其控制裝 置（圖3中所示之加法器41、P ID 42、加熱器驅動裝置43 等）。不論是任何場合，實際上均係對於控制裝置適用本 方法所致之〇 B S功能者。[Collection method] After both the input unit temperature and the control point temperature were stabilized, the data was continuously collected for 10 minutes. Initially, the output of the heater 21 was set to 10%, and data was collected as described above. Next, the output of the heater 21 was set to 20%, and data was collected as described above. Finally, the output of the heater 21 is set to 30%, and data is collected as described above. The waveforms shown in Fig. 8 are as follows: pv: control point temperature I den 10 1 : the same waveform (the PV of the estimated device model is shaped) SV: target temperature -38 - 201042412 MV: operation amount ( Output of Heater 21) According to the data shown in Fig. 8, the above-mentioned commercially available same decision parameters were used. As a result, the following transfer function G 1 (s) is obtained: [Expression 10] 0.8e~°ou 20^ + 1 where 'Gl(s) denotes a 0 model (transfer function) which is the result of the same experiment as the process, That is, the time constant T = 20 [sec], K = 0.8 〇 where the 'waste time L is 0.0 1, because the time constant T is very small, so it is ignored in the observation. Therefore, the above transfer function Gl(s) can be regarded as: G 1 (s) =0. 8/ (2 0 s + 1) Further, the so-called time constant means that the final 値 is 63.2%. Further, the term "wasted time" refers to the time ◎ when the input signal is transmitted and transmitted. The number of the transfer functions of the interference estimating unit 11 and the nominal model 14 can be determined, for example, based on an experiment. For example, in the example of Fig. 8, as described above, in the transfer function G1(s) obtained from the experimental knot, the gain K = 0.8, the time constant T = Therefore, these numbers can be directly used as the nominal model 14 The specific number of passes. That is, in the transfer function Ρν of the nominal model 14, the gain Κρ = 0.8 and the time constant Το = 20 can be set. Further, regarding the interference estimating unit 11, the time delay due to the arrival gain in the transfer function is specifically 20; the observation in the function (s) is -39-201042412, the gain K0BS = 1/Kp', Setting kobs = 1/0.8 = As described above, "T〇 in the above formula (2), since the system is set to "", it can be set to Τ〇! =20. In addition, as for the above (T02, as described above, it is used to remove noise, etc., and the genus is set to any 値 which it considers appropriate (here is 1: by this, in this specific example, the above (2) In the case of the formula: [Expression 11] 1.25 (1 + 20^) As described above, the equations (2) and (4) are set, and after KADD = 0.7 is set as described above, the experiment is actually performed. The result, as described above, is as shown in Fig. 9(b), and since it has already been described, it is not particularly specific here. In the present specification, the above-mentioned "interference" is explained in the subject. The "non-steady-state interference", as described above, occurs as the cause of such unsteady disturbance in the opening and closing of the door 23, even for other reasons, such as the opening and closing of the gate, the workpiece relative to the chamber The access of the (wafer, ), the entry and exit of the robot arm, etc., also causes the above-mentioned non-sense, the main cause of the occurrence of "unsteady-state interference" is the relative adjustment of the external gas caused by the opening or closing of the door or the gate. a temporary inflow. Again, "the main cause of non-steadiness is its For other reasons, for example, wafers and machine equipment enter the chamber, which forms a medium-and long-term heat source. That is, :1 · 2 5 . Also, the two T-same in the same 2), therefore, the hairpin ec) The following specific parameters are indicated by the device. Regarding the description, it refers to the problem that is already in the subject, and is not limited to the steady-state interference such as the glass substrate of the chamber. One of them is due to the chamber (temperature disturbance). In the temperature adjustment target space of the room, etc., in the temperature adjustment target space of the chamber, etc., due to the main factors of temperature change from outside to outside air, people, etc., "unsteady interference" occurs. The main cause of the occurrence of "non-steady-state interference" is not limited to the above-mentioned "main factor of temperature change from the outside with respect to the temperature adjustment target space", and for example, fluctuation of internal load (operation/stop of the device, etc.) It may also be the cause of the occurrence of “unsteady interference.” The interference observer of this embodiment is the one that corresponds to such unsteady interference and can influence the unsteady interference (control point temperature). The change, that is, the temperature change in the chamber, is suppressed to a minimum. The above description is merely an example, and the present invention is not limited to this example. For example, in Fig. 1 (a), the mode is The structure of the above-described precision temperature adjustment system is shown in Fig. 1 (a), and the above-described example of the precise temperature adjustment system can be said to be a "cooler + heating device (OB S function)". The air from the clean room 25 (described as the temperature adjustment target space 25 in FIG. 10) which is the space for the temperature adjustment target is temporarily cooled by the cooler 28, and then, by the exhaust port. The individual heaters 26 are configured to be heated. In the above configuration, the OBS function caused by the method is applied to the heating device 26'. That is, for example, the interference observation unit 1 shown in Fig. 1 is added. Further, the heating device 26' shown in Figs. 10(a) to (d), for example, in the example of Fig. 3 and the like, refers to the individual heater 26 of the exhaust port and its control device (lc or shown in Fig. 3). Heater drive unit 44c, etc.). Similarly, the illustrated cooler 2 8 ' of -41 - 201042412, for example, refers to the cooler 28 and its control device (adder 41, P ID 42, heater drive 43, etc. shown in Fig. 3). In any case, it is actually the 〇 B S function caused by the method applied to the control device.
本發明之精密溫度調節系統，如上所述，並不侷限於 圖1 0 ( a ) —般之構成例，也可以是例如圖1 0 ( b ) 、 ( C )、（d)中所示之結構。 圖1 〇 ( b )，係爲“冷卻器（Ο B S功能）”的結構。 圖1 0 ( c )，係爲“冷卻器（OBS功能）+加熱裝置”的 結構。圖1 0 ( d )，係爲“冷卻器（OB S功能）+加熱裝 置（OBS功能）”的結構。如此這般，本方法所致之OBS 功能，係並不侷限於單獨適用於加熱裝置26 ’的例子， 也可以單獨適用於冷卻器28’，或者適用於加熱裝置26’ 和冷卻器28’兩方。又，作爲前提的構成也不僅僅是“冷 卻器+加熱裝置”，也可以是“單獨冷卻器”，於此情況 ，如上述圖10(b)所示，也可以將本方法所致之OBS功 能適用於冷卻器2 8 ’。 在將本方法所致之OBS功能適用於冷卻器28’的情況 時’例如只要對於圖3中所示之由加法器41、PID42、加 熱器驅動裝置43所構成之控制裝置，而適用本方法所致 之OB S功能（追加例如圖丨中所示之干擾觀測部1 〇 )即 可。 但是，在圖1 〇 ( b )之結構中，由於冷卻器2 8產生 的冷卻空氣係直接流入溫度調節對象空間25，因此，輸 ~ 42 - 201042412 入到上述加法器4丨中的目標溫度r，也可以設爲溫度調 節對象空間25的目標溫度（在圖3例中爲23.01 )等。 又’此時，輸入到加法器41中的檢測溫度y，既可以採 藉由如圖3中所示的設在小房間（溫度調節空間）3 〇a 中之溫度感測器T A 0 6 (檢測冷卻空氣溫度之感測器）所 得到的檢測結果’也可以使用例如在溫度調節對象空間 25內設置的溫度感測器ta〇3等。或者，雖然在圖3中沒 ¢) 有顯示，但是也可以設置溫度感測器，而將正要流入溫度 調節對象空間25前的空氣溫度檢測出來，並將該檢測數 據作爲輸入至加法器4 1中的檢測溫度y。 又’在圖10(c)所示之結構中，輸入至加法器41 中的檢測溫度y，也可以採用上述溫度感測器TA06。或 者，雖然在圖3中沒有顯示’也可以新設置溫度感測器， 用於檢測相對於排氣口個別加熱器2 6的吹入側之空氣溫 度（淨化室上部空間3 3的空氣溫度），並將該溫度感測 Q 器的檢測結果作爲輸入至加法器4 1中的檢測溫度y。 或者’在圖10(c)所不之結構中，輸入至加法器41 中的檢測溫度y，也可以使用上述溫度感測器TA03等。 但是，於此情況，在藉由加法器41生成的偏差（r-y)中 ，係成爲包含有由加熱裝置26’所產生的變化部分〇：( 溫度上升）。亦即是，在圖3之例中，係成爲變化部分α =1.5 °c左右，檢測溫度y係成爲23 °C左右。因此，於此情 況，例如，輸入至上述加法器41中的目標溫度r，並不 是 21.5T：，而是 23.0°C 等。 -43- 201042412 本發明已以較佳實施例揭露如上’然其並非用以限定 本發明，任何所屬技術領域中具有通常知識者’在不脫離 本發明之精神和範圍內，當可作些許之更動與潤飾’因此 本發明之保護範圍當視後附之申請專利範圍所界定者爲準 【圖式簡單說明】 圖1是本發明一實施例之精密溫度調節系統的控制裝 置的構成圖。 圖2是本發明一實施例之精密溫度調節系統的槪略構 成圖（立體透視圖）。 圖3是本發明一實施例之精密溫度調節系統的系統構 成圖。 圖4 ( a )是將控制裝置亦包含控制對象地而進行了 模型化者’（b )是用於說明控制裝置功能的圖。 Η 5 ( a ) 、（ b )係用於針對控制對象的模型化作說 明的圖。 匱I 6是將圖5(b)中所示模型作了簡略化的簡略化 模型。 m 7 ( a )是冷卻器的普通模型，（b )係用於對於熱 交換係數値的決定作說明的圖。 Η 8彳系表示同定試驗結果其中一例的圖。 m 9 ( a )係表示由習知技術所致之發生干擾時的溫 ® _ ft U ’ （ b )係表示由本發明方法所致之發生干擾時 -44- 201042412 的溫度變化圖。 圖1 〇 ( a )係模式地表示本發明一實施例之精密溫度 調節系統之構成的圖，（b ) - ( d )係模式地表示其他實 施例的圖。 【主要元件符號說明】 1 :控制裝置 2 :反饋控制器（PID ) 3 :加法器 4 :加法器 5 :控制對象 1 〇 :千擾觀測部 1 1 :千擾推定部 1 2 :加法增益器 1 3 :加法器 1 4 :標稱模型 20 :精密溫度調節系統 21 :加熱器 22 :風扇 23 :門 24:送風扇（風扇） 2 5 :淨化室 26 :排氣口個別加熱器 27 :吸氣通道 -45- 201042412 2 8 :冷卻器 29 :吸氣口 3 0 :小房間 3 1 :吸排氣口 3 2 :上部空間 3 3 :淨化室上部空間 4 1 :加法器The precise temperature adjustment system of the present invention is not limited to the configuration example of Fig. 10 (a) as described above, and may be, for example, as shown in Figs. 10 (b), (C), and (d). structure. Figure 1 〇 (b) is the structure of the "cooler (Ο B S function)". Figure 10 (c) shows the structure of "cooler (OBS function) + heating device". Fig. 10 (d) is the structure of "cooler (OB S function) + heating device (OBS function)". As such, the OBS function resulting from the method is not limited to the example of the heating device 26' alone, and may be applied to the cooler 28' alone or to the heating device 26' and the cooler 28'. square. Further, the configuration as a premise is not limited to "cooler + heating device", but may be "individual cooler". In this case, as shown in FIG. 10(b) above, the OBS may be caused by the method. The function is suitable for the cooler 2 8 '. In the case where the OBS function by the present method is applied to the cooler 28', the method is applied to, for example, the control device composed of the adder 41, the PID 42, and the heater driving device 43 shown in FIG. The OB S function (additional, for example, the interference observation unit 1 shown in the figure) may be used. However, in the configuration of Fig. 1 (b), since the cooling air generated by the cooler 28 directly flows into the temperature adjustment target space 25, the target temperature into the above-mentioned adder 4丨 is input from 42 to 201042412. The target temperature of the temperature adjustment target space 25 (23.01 in the example of FIG. 3) or the like may be used. Further, at this time, the detected temperature y input to the adder 41 can be taken by the temperature sensor TA 0 6 (in the small room (temperature adjustment space) 3 〇a as shown in FIG. 3 ( For the detection result obtained by the sensor for detecting the temperature of the cooling air, for example, a temperature sensor ta〇3 or the like provided in the temperature adjustment target space 25 can be used. Alternatively, although not shown in FIG. 3, a temperature sensor may be provided, and the temperature of the air immediately before flowing into the temperature adjustment target space 25 is detected, and the detection data is input as an input to the adder 4 The detection temperature y in 1. Further, in the configuration shown in Fig. 10 (c), the temperature sensor TA06 may be employed as the detected temperature y input to the adder 41. Alternatively, although not shown in FIG. 3, a temperature sensor may be newly provided for detecting the air temperature of the blowing side of the individual heaters 26 with respect to the exhaust port (the air temperature of the upper space of the clean room 3 3) And the detection result of the temperature sensing Q is taken as the detection temperature y input to the adder 41. Alternatively, the temperature sensor TA03 or the like may be used as the detection temperature y input to the adder 41 in the configuration of Fig. 10(c). However, in this case, in the deviation (r-y) generated by the adder 41, the change portion 〇: (temperature rise) generated by the heating device 26' is included. That is, in the example of Fig. 3, the change portion α is about 1.5 °C, and the detection temperature y is about 23 °C. Therefore, in this case, for example, the target temperature r input to the above adder 41 is not 21.5T: but 23.0 °C or the like. The present invention has been disclosed in its preferred embodiments as described above, but it is not intended to limit the invention, and any one of ordinary skill in the art will be able to make some modifications without departing from the spirit and scope of the invention. The scope of the present invention is defined by the scope of the appended claims. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a configuration diagram of a control device for a precision temperature adjustment system according to an embodiment of the present invention. Fig. 2 is a schematic structural view (stereoscopic perspective view) of a precision temperature adjustment system according to an embodiment of the present invention. Fig. 3 is a system configuration diagram of a precision temperature adjustment system according to an embodiment of the present invention. Fig. 4 (a) is a diagram in which the control device is also controlled by including the control target. (b) is a diagram for explaining the function of the control device. Η 5 ( a ) and ( b ) are diagrams for the modeling of the control object.匮I 6 is a simplified model that simplifies the model shown in Fig. 5(b). m 7 ( a ) is a general model of the cooler, and (b) is a diagram for explaining the determination of the heat exchange coefficient 値. Η 8彳 indicates a diagram of one of the same test results. m 9 ( a ) indicates the temperature at which interference occurs by a conventional technique ® ft U ' ( b ) is a graph showing the temperature change of -44 - 201042412 when interference occurs by the method of the present invention. Fig. 1 (a) schematically shows a configuration of a precision temperature adjustment system according to an embodiment of the present invention, and (b) - (d) schematically shows a diagram of another embodiment. [Description of main component symbols] 1 : Control device 2 : Feedback controller (PID ) 3 : Adder 4 : Adder 5 : Control target 1 千 : Interference observation unit 1 1 : Interference estimation unit 1 2 : Addition gain 1 3 : Adder 1 4 : Nominal model 20 : Precision temperature control system 21 : Heater 22 : Fan 23 : Door 24 : Fan (fan) 2 5 : Clean room 26 : Vent individual heater 27 : Suction Air passage -45- 201042412 2 8 : Cooler 29 : Suction port 3 0 : Small room 3 1 : Suction and exhaust port 3 2 : Upper space 3 3 : Clean room upper space 4 1 : Adder
42 ： PID 43 :加熱器驅動裝置 44 :加熱器驅動裝置 -46-42 : PID 43 : heater drive 44 : heater drive -46-
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| JP2009124503A JP5428525B2 (en) | 2009-05-22 | 2009-05-22 | Precision temperature control system and its control device |
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| JP (1) | JP5428525B2 (en) |
| KR (1) | KR101270568B1 (en) |
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| TWI467354B (en) * | 2011-09-30 | 2015-01-01 | Quanta Comp Inc | Electronic device and temperature modulation method |
| TWI551970B (en) * | 2014-09-29 | 2016-10-01 | Azbil Corp | Control device and control method |
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| TWI677775B (en) * | 2017-05-25 | 2019-11-21 | 日商阿自倍爾股份有限公司 | Controller adjustment system and adjustment method |
| TWI697749B (en) * | 2018-01-09 | 2020-07-01 | 日商歐姆龍股份有限公司 | heating equipment |
| TWI823295B (en) * | 2021-08-26 | 2023-11-21 | 日商歐姆龍股份有限公司 | Temperature control device and temperature control method |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| TWI467354B (en) * | 2011-09-30 | 2015-01-01 | Quanta Comp Inc | Electronic device and temperature modulation method |
| TWI551970B (en) * | 2014-09-29 | 2016-10-01 | Azbil Corp | Control device and control method |
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| TWI677775B (en) * | 2017-05-25 | 2019-11-21 | 日商阿自倍爾股份有限公司 | Controller adjustment system and adjustment method |
| TWI697749B (en) * | 2018-01-09 | 2020-07-01 | 日商歐姆龍股份有限公司 | heating equipment |
| US11602011B2 (en) | 2018-01-09 | 2023-03-07 | Omron Corporation | Heating device |
| TWI823295B (en) * | 2021-08-26 | 2023-11-21 | 日商歐姆龍股份有限公司 | Temperature control device and temperature control method |
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| JP2010270996A (en) | 2010-12-02 |
| KR101270568B1 (en) | 2013-06-03 |
| CN101893296A (en) | 2010-11-24 |
| CN101893296B (en) | 2013-07-03 |
| TWI437400B (en) | 2014-05-11 |
| KR20100126212A (en) | 2010-12-01 |
| JP5428525B2 (en) | 2014-02-26 |
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