CN101893296A - Accurate temperature adjusting system and control device thereof - Google Patents

Accurate temperature adjusting system and control device thereof Download PDF

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Publication number
CN101893296A
CN101893296A CN2010101846230A CN201010184623A CN101893296A CN 101893296 A CN101893296 A CN 101893296A CN 2010101846230 A CN2010101846230 A CN 2010101846230A CN 201010184623 A CN201010184623 A CN 201010184623A CN 101893296 A CN101893296 A CN 101893296A
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China
Prior art keywords
temperature adjusting
object space
air
cooling device
temperature
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CN2010101846230A
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CN101893296B (en
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岩田英之
松本宏治
藤原弘绘
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Fuji Electric Co Ltd
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Fuji Electric Systems Co Ltd
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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00—Control of temperature
    • G05D23/19—Control of temperature characterised by the use of electric means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F11/00—Control or safety arrangements
    • F24F11/89—Arrangement or mounting of control or safety devices
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B11/00—Automatic controllers
    • G05B11/01—Automatic controllers electric
    • G05B11/36—Automatic controllers electric with provision for obtaining particular characteristics, e.g. proportional, integral, differential
    • G05B11/42—Automatic controllers electric with provision for obtaining particular characteristics, e.g. proportional, integral, differential for obtaining a characteristic which is both proportional and time-dependent, e.g. P.I., P.I.D.

Abstract

The present invention relates to accurate temperature adjusting system and control device thereof.Problem of the present invention is, in accurate temperature adjusting system, even produce unstable state when disturbing, also the variation of the air themperature of temperature adjusting object space can be suppressed to Min..Accurate temperature adjusting system is provided with possesses the disturbance-observer portion (10) of inferring portion (11), nominal equipment (14) that disturbs.Nominal equipment (14) is the model of simulation control object (5).The modelling of control object (5) considers that heat, the flow of air in temperature adjusting object space (chamber etc.) and the air duct carry out.The corresponding transfer function of model of portion (11) use and this nominal equipment (14) is inferred in interference, according to the output (y) of control object (5) and the output (y of nominal equipment (14) N) between deviation (y N-y), presumed value (dm) is disturbed in generation/output.To disturb the gain K of presumed value (dm) with regulation ADD(≤1, for example about 0.7) joins operational ton MV (s) with income value.

Description

Accurate temperature adjusting system and control device thereof
Technical field
The present invention relates to accurate temperature adjusting system and control device thereof.
Background technology
In (chambers) such as clean rooms of uses such as semiconductor fabrication factory, the conditional request strictness of operating environment.As this condition, can enumerate the maintenance, solemn silence (vibrationless space) of the management of room temperature for example, cleanliness factor etc.About the temperature treatment of indoor (in the chamber), require to carry out high-precision temperature treatment by air-conditioning equipment.To be called accurate temperature adjusting system about the system that such chamber etc. carries out high-precision temperature treatment.
As such accurate temperature adjusting system, be to use for example device of feedback controller (PID) as everyone knows.
In addition, the prior art of for example being put down in writing in the patent documentation 1 is known for people.
The invention of patent documentation 1 relates to the temperature control equipment of hot system equipment (for example cylinder of the extrusion moulding machine shown in this Figure 12), can not rely on practician's sensation and experience, and do not make it produce distortion (wind up), and can carry out temperature control simply.
The temperature control equipment of patent documentation 1 has PID control part, operational ton appendix and normative model Pm, also has the normative model portion and first switching part that are provided with the means of eliminating ineffective time.The output of operational ton appendix is used to operate the operational ton of control object P.The means of eliminating ineffective time are removed key element e ineffective time from normative model Pm -LsFirst switching part will be input to from the operational ton of operational ton appendix control object P side, with pass through switching circuit between the PID control part input operation amount side.
And above-mentioned normative model portion measures by elimination ineffective time means and removes key element e ineffective time -LsThe output of normative model Pm, when this measurement result reaches predefined desired value, operate first switching part, make from the operational ton of operational ton appendix and do not import control object P.
In addition, the technology that is provided with FEEDFORWARD CONTROL portion is also disclosed in patent documentation 1.
In addition, shown in Figure 3 as it in patent documentation 1, the structure that possesses the disturbance-observer portion with above-mentioned normative model Pm is also disclosed.
[patent documentation 1] spy opens the 2001-265408 communique
At this,, produce sometimes and for example follow certain operation must open and close the situation of chamber door about above-mentioned accurate temperature adjusting system.Because the switching of such door, the extraneous gas inflow chamber is indoor etc., and temperature produces change in the chamber.That is to say, produce temperature change owing to disturb.For the interference (being called unstable state disturbs) of this pattern, the inventor waits affirmation by experiment, utilizes based on the sufficient inadequately situation of the control of feedforward more.
In addition, the reason that takes place is disturbed in above-mentioned unstable state, is not limited to the switching of above-mentioned chamber door.As other examples, for example, owing to be arranged on the switching of the baffle plate of chamber, workpiece (wafer, glass substrate etc.) is the discrepancy of chamber relatively, and the discrepancy of mechanical arm etc. also can produce above-mentioned unstable state and disturb.
As mentioned above, in patent documentation 1, relevant disturbance-observer portion with normative model Pm is disclosed also.In addition, be not limited to patent documentation 1,, normative model be set and disturbance-observer portion itself is that people are known about PID control according to prior art.
But, its be mostly with for example motor, generator etc. as the control object, even in above-mentioned patent documentation 1 also with extrusion moulding machine (its cylinder) as controlling object.That is, the control object is the situation of machine (mechanical device).
On the other hand, in above-mentioned accurate temperature adjusting system, electric control to as if fan, heater, cooler etc., but control in essence to as if chamber in temperature, be air.
In the past, in accurate temperature adjusting system,, carried out concrete modeled example and almost can not find about control object model suitable or disturbance-observer portion with above-mentioned normative model.Particularly disturb the control object model that can carry out fully effectively control, the concrete example of disturbance-observer portion not to find for above-mentioned unstable state.
Summary of the invention
The present invention proposes for solving above-mentioned existing in prior technology problem, problem of the present invention is, a kind of accurate temperature adjusting system and control device thereof etc. are provided, in accurate temperature adjusting system, even the situation that unstable state is disturbed takes place, also the change of the air themperature of temperature adjusting object space can be suppressed at Min..
Accurate temperature adjusting system of the present invention with accurate temperature adjusting system as described below as prerequisite: promptly this accurate temperature adjusting system comprises: temperature adjusting object space; Cooling device is arranged in the feed path of the air that supply cooled off in this temperature adjusting object space; Heater is arranged in the above-mentioned feed path, the air that heating is supplied with from above-mentioned cooling device, and to above-mentioned temperature adjusting object space air-supply; The first control device of above-mentioned cooling device and the second control device of above-mentioned heater.
And, above-mentioned first, second control device certain also possesses disturbance-observer (observer) portion at least, generate to disturb the corresponding compensation amount with unstable state and it is added on the operational ton.
This disturbance-observer portion comprises nominal equipment (nominal plant) and disturbs estimating device.Nominal equipment simulating and the relevant action of entire system that comprises said temperature controlled plant space, above-mentioned cooling device, above-mentioned heater and above-mentioned feed path.Disturb the temperature and the temperature of the air from above-mentioned cooling device supplied with or deviation temperature said temperature controlled plant space between of estimating device input, according to this deviation generation/output interference presumed value from above-mentioned nominal equipment output.
Above-mentioned nominal equipment by will with the relevant action modelization of entire system that comprises said temperature controlled plant space, above-mentioned cooling device, above-mentioned heater and above-mentioned feed path, and then condition according to the rules simplifies this model, uses the model of the simplification that obtains thus and determines.
For example, as an example, if the structural formula relevant with the simulated action of nominal equipment is made as P N(s), then disturbing the transfer function of estimating device is 1/P N(s).
In addition, another accurate temperature adjusting system of the present invention comprises: temperature adjusting object space; Cooling device is arranged in the feed path of the air that supply cooled off by this temperature adjusting object space; The control device of above-mentioned cooling device, above-mentioned control device also is provided with disturbance-observer portion, it generates with unstable state interference corresponding compensation amount and with it and is added on the operational ton, this disturbance-observer portion comprises: nominal equipment, simulate and the relevant action of entire system that comprises said temperature controlled plant space, above-mentioned cooling device and above-mentioned feed path; With the interference estimating device, input from the temperature of above-mentioned nominal equipment output with from the temperature of the air of above-mentioned cooling device supply or the deviation between the temperature in the said temperature controlled plant space, disturb presumed value according to this deviation generation/output, determine above-mentioned compensation rate according to interference presumed value based on this interference estimating device.
Like this, also can constitute in not having the structure of above-mentioned heater, in the control device of cooling device, possess the interference observation unit of said structure.
According to accurate temperature adjusting system of the present invention and control device thereof etc., in accurate temperature adjusting system,, also the variation of the air themperature of temperature adjusting object space can be suppressed at Min. even produce under the situation that unstable state disturbs.
Description of drawings
Fig. 1 is the pie graph of control device of the accurate temperature adjusting system of one embodiment of the invention.
Fig. 2 is the summary pie graph (perspective view) of the accurate temperature adjusting system of one embodiment of the invention.
Fig. 3 is system's pie graph of the accurate temperature adjusting system of one embodiment of the invention.
Fig. 4 (a) also comprises control device to control object and carry out modeled figure, (b) is the figure that is used to illustrate the control device function.
Fig. 5 (a) and (b) are the modeled figure that are used to illustrate the control object.
Fig. 6 is the simplification model that the model shown in Fig. 5 (b) is simplified.
Fig. 7 (a) is the general models of cooler, (b) is the figure of decision that is used to illustrate the value of heat exchange coefficient.
Fig. 8 is that expression is with deciding the figure of an example of result of the test.
Temperature variation when Fig. 9 (a) is expression use one type of prior art syringe generation interference is that the temperature variation of the inventive method when the generation interference used in expression (b).
Figure 10 (a) is the figure that schematically shows the accurate temperature adjusting system formation of one embodiment of the invention, (b)～(d) is the figure that schematically shows other embodiment.
Symbol description:
The 1-control device, 2-feedback controller (PID), 3-adder, the 4-adder, 5-controls object, 10-disturbance-observer portion, 11-disturbs the portion, 12-addition multiplier (-icator), 13-adder of inferring, 14-nominal equipment, 20-accurate temperature adjusting system, 21-heater, the 22-fan, 23-door, 24-blower (fan), the 25-clean room, the indivedual heaters of 26-outlet, 27-aspirating air pipe, the 28-cooler, 29-air entry, 30-cubicle, the 31-suction and exhaust ports, 32-upper space, 33-clean room upper space, the 41-adder, 42-PID, 43-heater driving device, 44-heater driving device.
The specific embodiment
Below, the embodiment that present invention will be described in detail with reference to the accompanying.
Fig. 1 is the pie graph of control device of the accurate temperature adjusting system of one embodiment of the invention.
This control device 1 is to be used for control example as described later at the device of the indivedual heaters 26 of outlet shown in Fig. 2, Fig. 3.Control device 1 is provided with accordingly with the indivedual heaters 26 of each outlet.In Fig. 2, example shown in Figure 3, the indivedual heaters 26 of outlet have 3, and therefore, control device 1 also is provided with 3.
In control device 1, on the existing structure basis, be provided with disturbance-observer portion 10.
In addition, the virtual condition of control device 1 for example is the arithmetic processor of CPU etc.In the memory in CPU or outside the CPU, preserve preset application program.CPU realizes the processing capacity of the disturbance-observer portion 10 of following explanation by reading and carry out this application program.Existing structure about feedback controller (PID) 2 grades is also identical.In addition, in this application program, preestablish various transfer functions described later etc.
Prior art constructions is a feedback controller 2 etc.The structure of at first simple declaration the prior art.
At first, to temperature y and the target temperature r of illustrated adder 4 inputs from the space (temperature adjusting object space) of control object 5 detected adjustment control objects.This temperature y by any one detection of temperature sensor TA01～TA03, is the temperature in the clean room 25 (chamber) in the example of aftermentioned Fig. 3.In addition, in aftermentioned Fig. 3, indivedual heater 26c are example with outlet, and the following description is carried out based on this example.
Therefore, under this routine situation, said temperature y is by the detected value of temperature sensor TA03.In addition, target temperature r is transfused to from controller not shown in the figures.Operators etc. are set/are changed target temperature r by operation control.
Draw deviation E (s)=(r-y) between target temperature r and the actual detection temperature y by above-mentioned adder 4.Deviation E (s) is transfused to feedback controller 2.The output of feedback controller 2 is operational ton MV (s).
This MV (s) can try to achieve according to following (1) formula." s " in later various of following (1) formula and (2) described later formula is Laplace operator.
[formula 1]
MV ( s ) = K w { 1 + 1 T I S + T D s } · E ( s ) (1) formula
MV (s): operational ton
E (s): deviation (r-y)
K W: proportional gain
T I: the time of integration
T D: derivative time
In addition, as mentioned above, feedback controller 2 itself is existing structure, and above-mentioned (1) formula is that people are known, therefore, does not do special instruction at this.
In the prior art, be transfused to control object 5, carry out corresponding action with this operational ton MV (s) as the operational ton MV (s) of the output of feedback controller 2.In example shown in Figure 3, this operational ton MV (s) is transfused to heater driving device 44c.As shown in Figure 3, indivedual heater 26c have heater 21, fan 22 etc. as the outlet of control device 1 directly actuated object, and heater driving device 44c drives control heater 21 according to the operational ton MV (s) that is imported.In addition, in fact also carry out the control of fan 22, do not mention the control of fan 22 at this, with its air quantity for necessarily describing.
In addition, as shown in Figure 3, in temperature adjusting object space (being clean room 25 in this example), be provided with temperature sensor TA03.This temperature sensor TA03 is the sensor that is used to detect the temperature in the clean room 25, especially detects because the indivedual heater 26c of outlet and affected space near the temperature of (it, the space of waiting under for example).By the detected temperature data of this temperature sensor TA03 is above-mentioned detected temperatures y.
As shown in Figure 1, by disturbance-observer portion 10 being set, add the value that the output of disturbance-observer portion 10 obtains by adder 3 at aforesaid operations amount MV (s) to 5 inputs of control object with respect to above-mentioned existing structure.The output of disturbance-observer portion 10, promptly be output as from addition multiplier (-icator) 12, the output dm that infers portion 11 in illustrated interference multiply by the gain (K that sets ADD) and the value that obtains.That is dm * K, ADD
Output y with above-mentioned detected temperatures y and nominal equipment 14 NDeviation (y N-y) input is disturbed and is inferred portion 11, exports above-mentioned dm.
Interference is inferred the structural formula (transfer function) of portion 11 and is represented with following (2) formula:
[formula 2]
K OBS ( 1 + T O 1 s ) 1 + T O 2 s (2) formula
T O1: the time constant of observation
T O2Be used to remove the time constant of noise
K OBS: the gain of observation
Thus, above-mentioned dm can try to achieve according to following (3) formula:
[formula 3]
dm = ( y N - y ) · K OBS ( 1 + T O 1 s ) 1 + T O 2 s (3) formula
In addition, nominal equipment 14 is models (model) of simulation control object 5, its transfer function P N(s) represented as following (4) formula:
[formula 4]
P N ( s ) = K P 1 + T O s (4) formula
K P: the gain of equipment
T O: the time constant of equipment
At this, in structure self medelling of disturbance-observer portion 10 to the situation of level shown in Fig. 4 (a), with roughly the same according to the structure of general interference observer known in the art.Disturbance-observer portion 10 shown in Fig. 1 is based on the structure of this general interference observer, infers portion 11 and nominal equipment 14 about above-mentioned interference, further considers especially as above-mentioned (2) formula, the represented transfer function of (4) formula.
The structure of general interference observer for example as an example, is disclosed in list of references 1 (spy opens the 2002-108410 communique).About interference observer, the difference of the structure of Fig. 1, Fig. 2 of the structure of Fig. 1 and list of references 1 is to be provided with addition multiplier (-icator) 12, still, if with the gain K in the list of references 1 ADD=1 considers, this structure is roughly the same with the structure of list of references 1.
In addition, gain K ADDValue be arbitrary value below 1, designers etc. can the arbitrary decision setting, the inventor is according to experiment and experience etc., thinks gain K ADDAbout=0.7 suitable (can obtain good control result).This is because as gain K ADDUnder=1 the situation, that is, make the situation of disturbing the output dm that infers portion 11 to maintain the original state and using, become overcompensation.This is owing to there is the modelling error in nominal equipment 14, also contains the cause of error at the dm as the interference presumed value.Also have, usually, inferring out the interference that puts on control object 5 needs spended time.
But, identical with prior art, also can make gain K ADD=1.That is, can omit addition multiplier (-icator) 12.In the present invention, for the purpose of simplifying the description, there is the situation of omitting addition multiplier (-icator) 12 and describing.
The action of the control device 1 under the situation of omission addition multiplier (-icator) 12, at first, the input of control object 5 becomes and adds on the operational ton MV (s) as the output of above-mentioned feedback controller 2 that the output dm of portion 11 is inferred in above-mentioned interference and the value that obtains promptly becomes (MV (s)+dm).
In addition, obtain this " MV (s)+dm " and above-mentioned interference by adder 13 and infer deviation between output (interference presumed value) dm of portion 11.That is deviation=MV (s)+dm-dm=MV (s).Then, this deviation is transfused to nominal equipment 14.That is, to the operational ton MV (s) of nominal equipment 14 inputs as the output of above-mentioned feedback controller 2.And, according to the transfer function P of above-mentioned (4) formula N(s) draw the above-mentioned y corresponding with this operational ton MV (s) N
As mentioned above, the basic structure of disturbance-observer portion 10 (rank shown in Fig. 4 (a)) self can be general structure, and this example is characterised in that disturbs the content of inferring portion 11 and nominal equipment 14.
At first, the nominal equipment of simulating certain control object itself is the equipment that in the past just existed as shown in above-mentioned list of references 1.But, for example in list of references 1, relate to the modelling of motor/generator, it is undiscovered to carry out concrete modeled example about accurate temperature adjusting system.The inventor carries out concrete modelling as hereinafter to the detailed description that Fig. 5, Fig. 6 did for control object 5, more as described later, according to the hypothesis that sets this model is simplified, and simplifies model decision above-mentioned (4) formula according to this.
At this, the control device 1 directly actuated just indivedual heaters 26 of outlet (heater 21 in the present embodiment) of present embodiment.It detects as the temperature in the clean room 25 (chamber) of an example of temperature adjusting object space, the increase and decrease of the output of decision/control heater 21/keep.But be not as long as simply with the relational modelization between the interior temperature of output and clean room 25 (chamber) of heater 21.
Temperature in the clean room 25 (chamber) is not only by the output decision of heater 21, also be subjected to cooler 28 cooling performance, arrive before the cooler 28 influence of the various key elements such as heat of coming in and going out and the influence that according to circumstances also is interfered with the mixing of extraneous air, with respect to clean room 25.
Therefore, the control object 5 shown in Fig. 1 does not singly refer to the indivedual heaters 26 of outlet (heater 21), means in Fig. 2, accurate temperature adjusting system integral body shown in Figure 3.That is to say that control object 5 shown in Figure 1 means the entire system that is made of the indivedual heaters 26 of outlet, cooler 28, clean room 25, air duct (feed path) etc.And, in order to control the action modelization of object 5, not only to consider the output of heater 21, the cooling performance of cooler 28, also must consider flowing of air (heat) etc.
The nominal equipment 14 of present embodiment is the model of the action of " control object 5 " on this meaning of simulation.To elaborate later about nominal equipment 14.
In addition, according to interference infer portion 11 by the transfer function shown in above-mentioned (2) formula, can carry out suitable interference and infer.At this, in this routine most preferred embodiment, in above-mentioned (2) formula be:
K OBS＝1/K P
T O1＝T O
At this, the denominator " 1+T in above-mentioned (2) formula O2S " be only used for noise removal of measuring system etc.At this, if ignore T O2S, in above-mentioned most preferred embodiment, above-mentioned (2) formula is represented as following (5) formula:
[formula 5]
1 + T O s K P (5) formula
As mentioned above, (5) formula is with the branch parent molecule counter-rotating of (2) formula, promptly becomes 1/P N(s).Thus, carry out suitable interference and infer, and obtain suitable output valve (interference presumed value) dm.The theory explanation that can obtain effect like this can not prove absolutely at this, but as described later, confirm by experiment to obtain effect.In addition, the consideration method about basic hereinafter is elaborated with reference to Fig. 4.
Below, before carrying out the later explanation of Fig. 4, with reference to Fig. 2, Fig. 3 to the concrete example of control object 5, further the accurate temperature adjusting system integral body that is suitable for this routine control device 1 is described.
Fig. 2 is the summary structure chart (perspective view) of this routine accurate temperature adjusting system.In addition, Fig. 3 is the system construction drawing of this routine accurate temperature adjusting system.In Fig. 3, with the expression of Fig. 2 plane earth medelling ground.In addition, Fig. 3 is fastening the pass of Fig. 2 medelling ground level ground expression, the configuration relation at each position is relatively being described, and is not the position that is provided with of expression reality.In addition, Fig. 2, Fig. 3 are concrete examples of the structure of control object 5.
In Fig. 2, Fig. 3, clean room 25 is as utilizing native system 20 to carry out an example in the space (temperature adjusting object space) of accurate thermoregulator object.Such temperature adjusting object space is not limited to clean room's (be called chamber etc. and all can become object), at this, is example with the clean room.
Expression but the aspirating air pipe 27 represented in Fig. 3 are not inhaled in the air duct (feed path) air in the clean room 25 from Fig. 2.
At this, in this configuration example, " feed path " comprises a plurality of cubicles (adjustment space) 30 (30a, 30b, 30c), upper space 32 and clean room's upper space 33.Here particularly, be that the space of a passage is compared with in the past feed path, be divided into a plurality of cubicles (adjustment space) 30 (30a, 30b, 30c) in this example.Air in the clean room 25 is inhaled into illustrated cubicle (adjustment space) the 30a cubicle of below () from above-mentioned aspirating air pipe 27.
In this cubicle 30a, be provided with cooler 28 and blower (fan) 24.In addition, though not expression (representing in Fig. 3) among Fig. 2 is provided with the air entry 29 that sucks extraneous air at cubicle (adjustment space) 30a.Air in the above-mentioned clean room that is inhaled into 25 and the extraneous air that flows into from air entry 29 mix, and after being cooled by the higher cooler 28 that utilizes water to cool off of cooling performance, are sent into the cubicle 30b on upper strata by blower 24.
In addition, in example shown in Figure 3, the target temperature relevant with this cooling (for distinguish mutually about the target temperature of the temperature in the clean room described later 25, be called the cooling target temperature) be 21.5 ℃, therefore, sending into the temperature of the air (cooling air) of cubicle 30b should be near this cools off target temperature.
In addition, in Fig. 2, in cubicle 30a, exist at interval between cooler 28 and blower 24, still, (as shown in Figure 3) can not have yet.
The cooling air of sending into cubicle 30b further flows into the cubicle 30c on upper strata, flows into illustrated upper space 32 more therefrom, and then flows into clean room's upper space 33.As shown in the figure, be provided with the indivedual heaters 26 of outlet at clean room's upper space 33.The air that flows into clean room's upper space 33 is heated respectively by the indivedual heaters 26 of illustrated many outlets (being three of 26a, 26b, 26c in illustrated example).In example shown in Figure 3, target temperature is 23.0 ℃.That is, accurate temperature adjusting system 20 is controlled at this target temperature (23.0 ℃) with the temperature in the clean room 25.
As mentioned above, air in the clean room 25 is by cooler 28 temporary transient cooling backs (the cooling target temperature is 21.5 ℃), be heated individually respectively at the indivedual heaters 26 of each outlet (26a, 26b, 26c), become the air of temperature, flow in the clean room 25 near target temperature (23.0 ℃).In addition, the indivedual heaters 26 of each outlet are made of fan 22+ heater 21 as shown in Figure 3.It perhaps also can be the structure that constitutes by fan 22+ heater 21+ filter.
The air of clean room's upper space 33 (flowing into the air of the indivedual heaters 26 of outlet) is easy to carry out temperature control because temperature change is little, can realize high-precision temperature control.That is to say that the air (cooling air) that is cooled off by cooler 28 flows into clean room's upper spaces 33 by above-mentioned two cubicle 30b, 30c and upper space 32.In each cubicle 30b, 30c and upper space 32, air is stirred, so temperature becomes roughly evenly (temperature change diminishes).
In example shown in Figure 2, between each cubicle 30 and between cubicle 30c and the upper space 32, be provided with the suction and exhaust ports 31 (31a, 31b, 31c) that becomes air inlet/exhaust outlet.Air flows into the cubicle 30 (perhaps upper space 32) on upper strata from the cubicle 30 of lower floor by this suction and exhaust ports 31.Just flow to downstream (is to flow according to direction shown in the diagram arrow mark A as the big flow direction) from upstream side.That is, the above-mentioned cooling air of cubicle 30a flows into the cubicle 30b on its upper strata by illustrated suction and exhaust ports 31a.Similarly, the air of cubicle 30b flows into the cubicle 30c on its upper strata by illustrated suction and exhaust ports 31b.Similarly, the air of cubicle 30c flows into the upper space 32 on its upper strata by illustrated suction and exhaust ports 31c.Then, further, the air of upper space 32 flows into clean room's upper space 33.
At this, preferably, dispose each suction and exhaust ports 31, make air mobile become zigzag (air that forms non-rectilinear ground, long distance is mobile).In addition, the suction and exhaust ports 31 that is arranged at each cubicle 30 (adjustment space) is set at position as described below: the mobile distance of the air in each adjustment space does not become the shortest at least.For example, preferably, the mobile distance of the air in each adjustment space, be that distance between two suction and exhaust ports in each adjustment space is long as far as possible.That is, be example for example with cubicle 30c, if suction and exhaust ports 31b is arranged at a side in room as shown in the figure, then suction and exhaust ports 31c is arranged on opposition side as shown in the figure.
Thus, be the situation of a passage when comparing with air duct (feed path), become the local more of obstruction with respect to the flow direction of air, therefore, air and obstruction place (ceiling of cubicle 30 or sidewall etc.) collide, and change direction, are stirred thus.Thereby, realize the homogenization of air themperature.And even the structure of miniaturization, the distance that air is flowed is elongated, also can realize the homogenization of air themperature thus.Like this, be not only the mobile distance of air and also air mixed mutually, can increase the air themperature effect of uniform by stirring.In addition, arrow mark A shown in Figure 2 shows the flow direction (ignoring stirring, zigzag etc.) of air as the big flow direction.
Above-mentioned control device 1 does not show in Fig. 2, but as shown in Figure 3, is used to control the indivedual heaters 26 of outlet.As mentioned above, at this, be that example describes with one in three indivedual heaters 26 of outlet (the indivedual heater 26c of outlet).In this embodiment, the control device 1c corresponding with the indivedual heater 26c of outlet possesses PID2c, adder 4c, adder 3c, the disturbance-observer portion 10c suitable with above-mentioned feedback controller 2, adder 4, adder 3, disturbance-observer portion 10.In addition, heater driving device 44c is illustrated in the outside of the indivedual heater 26c of outlet on figure, but also can consider to be contained in the structure of the indivedual heater 26c of outlet.
Import above-mentioned deviation E (s)=(r-y) from adder 4c to PID2c.At this, r=23.0 ℃, y is by the detected temperature of temperature sensor TA03.Temperature sensor TA03 is the sensor that is used to detect temperature in the clean room 25, especially detects the sensor of the temperature of the indivedual heater 26c of outlet The corresponding area in clean room 25 (for example the indivedual heater 26c of outlet under space).
Also be transfused to the 10c of disturbance-observer portion by the detected temperature y of temperature sensor TA03.Then, by adder 3, in the output (operational ton MV (s)) of PID2c, add output (dm * K from the 10c of disturbance-observer portion ADD, but as mentioned above, at this K ADD=1, be dm therefore).Then, (MV (s)+dm) is transfused to heater device drive unit 44c to this addition results, and also is transfused to the 10c of disturbance-observer portion.
At this, as Fig. 2, shown in Figure 3,25 are provided with door 23 in the clean room.For example, the operator waits from 23 turnover of this.Above-mentioned what is called " interference " for example is temperature that generated by this switching of 23, in the clean room 25 rise (perhaps temperature declines).The 10c of disturbance-observer portion carries out influencing corresponding compensation with this interference causes.
In Fig. 3, in order to compare, about representing prior art constructions with the indivedual heater 26a of outlet, control device that 26b is corresponding, but in fact these control device also constitute as shown in Figure 1 structure in the same manner with above-mentioned control device 1c.As shown in the figure, in existing structure, from the output (operational ton MV (s)) of PID2a, 2b keep intact input heater driving device 44a, 44b.
In addition, in Fig. 3, expression roughly is used to control the structure (adder 41, PID42, heater driving device 43, temperature sensor TA06, FS1, FS2, H1 etc.) of cooler 28, and cooler 28 and control method thereof self can be roughly the same with prior art, therefore is not specifically noted.
Below, also with reference to Fig. 4 explanation action about above-mentioned control device 1 shown in Figure 1.
At first, as mentioned above, the structure (degree shown in Fig. 4 (a)) that is provided with disturbance-observer portion 10 self is the general structure of prior art, and its action is according to for example shown in the above-mentioned list of references 1.That is to say, shown in the formula 1 in the list of references 1 for example, formula 2, formula 3.Different is to have addition multiplier (-icator) 12, as mentioned above, if in list of references 1, set K ADD=1, then can think roughly the same.But, use Fig. 4 (a) explanation earlier about this point.
Fig. 4 (a) also comprises control object 5 interior above-mentioned control device shown in Figure 11 to be carried out modeled figure.Interference is identical with the situation of Fig. 2 of list of references 1 for the influence of control object 5, will be made as the value that deducts after disturbing d to the input of control object 5.That is to say, at K ADD=1 the time, obtain u+dm-d by illustrated adder 6, its become control object 5 input.
In addition, in Fig. 4 (a), in order to simplify, the transfer function of above-mentioned PID2, the part that promptly multiplies each other with E (s) in above-mentioned (1) formula are made as " C ", with above-mentioned interference infer the transfer function of portion 11, promptly above-mentioned (2) formula is made as " PM ".In addition, MV (s) is made as " u ", and P (s) is made as " P ".Thus, for example become " u+K to the input of controlling object 5 ADDDm-d ".
According to Fig. 4 (a) institute representation model, try to achieve the transmission characteristic of d → y.
At first, draw following (a) formula, (b) formula, (c) formula by the model shown in Fig. 4 (a):
(a)：(y N-y)·P M＝dm
(b)：(dm·K ADD+u-d)·P＝y
(c)：(-dm+dm·K ADD+u)P N＝y N
At this, be with y=y with y in the formula 2 of above-mentioned list of references 1 u+ y dForm represent.That is, exist based on the influence of operational ton u with based on the influence of disturbing d about y.Therefore, also can be expressed as for example y u=k u* u, y d=k d* d (k u, k dBe coefficient).At this, if only to y dDescribe, launch above-mentioned (a) formula, (b) formula and (c) formula, can obtain following (6) formula about y.
In addition, when asking for y dThe time, being made as in above-mentioned (a) formula, (b) formula, (c) formula does not have u, and tries to achieve the calculating formula of y.Equally, when asking for y uThe time, being made as in above-mentioned (a) formula, (b) formula, (c) formula does not have d, and tries to achieve the calculating formula of y.
(a)→(b)
{(y N-y)·P M·K ADD-d}·P＝y …(b)’
(a)→(c)
{(y N-y)·P M·(K ADD-1)}P N＝y N
→(y N-y)(K ADD-1)·P MP N＝y N …(c)’
By (b) '
(y N-y)·P M·K ADD＝(y/P)+d …(b)”
According to (b) " → (c) ', draw following (6) formula:
Y={P (1-K ADDP MP N+ P MP N)/(K ADDP MP N-P MP N-1-PK ADDP M) * d ... (6) formula
Y in above-mentioned (6) formula is equivalent to above-mentioned y d
Thus, here in above-mentioned (6) formula, if K ADD=1, then obtain following (6) ' formula:
y d＝{P(1-P MP N+P MP N)/(P MP N-P MP N-1-PP M)}×d
＝{P/(-1-PP M)}×d
={ P/ (1+PP M) * d ... (6) ' formula
(-P/(1+PP M)＝k d)
Y in the formula 2 of above-mentioned list of references 1 d(second) is " (P/ (1+PL)) ", P MCan think to be equivalent to L (though inequality, content is variant) therefore, above-mentioned (6) ' formula can think and the formula 2 of above-mentioned list of references 1 in y d(second) is identical.
About y uBe not specifically noted, same, when establishing K ADD=1 o'clock, then with the formula 2 of above-mentioned list of references 1 in first identical.
Like this, even addition multiplier (-icator) 12 is arranged, also can think the action roughly the same with prior art.
And, in the control device 1 of present embodiment, as mentioned above, about accurate temperature adjusting system, control the concrete modelling of object 5, and particularly as above-mentioned most preferred embodiment, be made as correspondingly by the transfer function of interference being inferred portion 11, carry out suitable interference compensation with this model (nominal equipment 14).Relevant these contents describe with reference to Fig. 4 (b).In addition, with K ADD=1 describes.
In Fig. 4 (b), its ground floor is represented the concrete example of d, the concrete example that the second layer is represented y, the 3rd layer of expression y NConcrete example, the 4th layer expression " y N-y " concrete example, the concrete example that layer 5 is represented dm.
At first, shown in ground floor, be made as and disturbing sometime, d change (for example 0 → 1).This for example is made as above-mentioned door 23 and is opened.In addition, at this, the temperature in the clean room 25 is made as than external temperature height.At this moment, the value of y is that the temperature in the clean room 25 reduces, and as shown in the second layer, ought to become the variations in temperature according to the transfer function ((4) formula) of above-mentioned nominal equipment 14.That is, become according to P N=K P/ (1+T OS) variations in temperature.In addition, the variations in temperature of this second layer represents not by the situation of disturbing observation unit 10 to compensate, and under the situation about compensating by disturbance-observer portion 10, this variations in temperature becomes very little.
On the other hand, the output y of nominal equipment 14 NThe influence that is not interfered, thus if for example the value of u is made as and does not change, so shown in the 3rd layer, output y NValue do not change yet.Therefore, shown in the 4th layer, become " the y that disturbs the input of inferring portion 11 N-y " become the value of variation of the above-mentioned y of expression.That is, expression about the temperature of temperature adjusting object space because of disturbing the value of the degree of influence that produces.
At this, under the situation of above-mentioned most preferred embodiment, disturb and infer the transfer function P of portion 11 MBecome:
P M＝(1+T Os)/K P
That is, be the inverse of the transfer function ((4) formula) of above-mentioned nominal equipment 14.
Therefore, relative " y N-y " dm become the inverse of situation of the y of above-mentioned relatively d.That is, shown in layer 5, be equivalent to d.This dm is added on the output u of PID2, roughly becomes " u " to the input " u+dm-d " of the control object 5 of the model shown in Fig. 4 (a), if u does not change in theory, then y does not change (in fact can not get rid of the influence of interference fully) yet.
The inventor's this routine control device 1 that in fact completes is confirmed its effect by experiment.That is to say that as shown in Fig. 9 (a) and (b), compare with the prior art structure based on the compensation of disturbance-observer portion 10 not, affirmation can reduce the influence (variations in temperature in the clean room 25) that is caused by interference.
In this experiment, door 23 was opened 60 seconds.In prior art control, as shown in Fig. 9 (a), the maximum temperature that produces 0.024 ℃ descends.On the other hand, in the control of this example, as shown in Fig. 9 (b), the maximum variations in temperature that produces 0.009 ℃.Be made as K according to this experimental verification ADDDuring=0.7 left and right sides, best results.
And in this experiment, the transfer function P of portion 11 is inferred in transfer function of above-mentioned nominal equipment 14 ((4) formula) and interference MIn T O, K pValue be in advance according to the value of other experiment decisions.Hereinafter describe about this point with reference to Fig. 8.
Below, how explanation determines the transfer function ((4) formula) of above-mentioned nominal equipment 14 with reference to Fig. 5, Fig. 6.
At first, the control device 1 of present embodiment is the device of the output of control heater 21, and the modelling of control object must be carried out at system's 20 integral body shown in Fig. 2, Fig. 3.
In addition, the structure of Fig. 2, Fig. 3 is only represented an example, and the present invention is not limited to this example.In the structure of Fig. 2, Fig. 3, air duct (feed path) is separated into a plurality of cubicles (adjustment space) 30 (30a, 30b, 30c), can obtains above-mentioned effect.But the applicable object of this method is not limited to this example, though do not illustrate especially, also the structure of air duct (feed path) can be made as a passage (single channel) as prior art.
Fig. 5 (a) is illustrated in the simple model of the structural entity shown in Fig. 2, Fig. 3 (control object 5).
In this simple model, at first, be made as Q1 as the total amount of heat in the clean room 25 of temperature adjusting object space, be made as t1 with the corresponding indoor temperature of this total amount of heat Q1.By the detected temperature of said temperature sensor TA03 is t1.In addition, the heat that flows in the clean room 25 by the indivedual heaters 26 of outlet is made as q0 (air themperature is t0), and the heat that flows out (flowing into air duct (feed path)) from aspirating air pipe 27 outside clean room 25 is made as q1.In addition, the air quantity of fan 22 is made as Fa.Thus, also regard Fa as from the air quantity of the outflow air of aspirating air pipe 27.In addition, door 23 is opened the variations in temperature (interference) that causes and is made as td.In addition, the temperature of the extraneous air that flows into from air entry 29 is made as t OA
The air of above-mentioned heat q1 and said temperature t OAExtraneous air mix in the ratio that sets (, be made as " r: (1-r) " at this, wherein, r is more than or equal to 0 less than 1 value, as an example, for example is made as about 0～0.3), be cooled at cooler 28.Heat at cooler 28 cooled air is made as q2.This air is flowed in the clean room 25 by the indivedual heaters 26 of outlet (heater 21) heating.
In above-mentioned simple model, at first, above-mentioned Q1 is represented by following (7) formula.That is, be expressed as the integration of the difference between heat q1 and the heat q0.
[formula 6]
Q 1 = ∫ ( q 0 - q 1 ) dt ≡ 1 s ( q 0 - q 1 ) (7) formula
In addition, at two " air themperature-heat conversion coefficient " ka, kv of this definition.
If air quantity of fan is made as Fa[m 3/ s], atmospheric density is made as ρ [kg/m 3], specific heat is made as c[J/kgK], the device volume is made as V[m 3] (wherein, V is the volume of clean room 25 (chamber)), then ka, kv are expressed from the next:
ka＝Fa×ρ×c[J/s·K]
kv＝V×ρ×c[J/K]
Be shown below as if using these " air themperatures-heat conversion coefficient " to represent above-mentioned q0, t1, q1, then becoming.Wherein, heat be [W], temperature for [℃].
q0＝ka×t0
t1＝Q1/kv
q1＝ka×t1
Use the model of above-mentioned " air themperature-heat conversion coefficient " expression to be Fig. 5 (b) on the simple model shown in Fig. 5 (a).
In addition, the heat qF that in Fig. 5 (b), also considers to follow the rotation of fan 22 to produce.Heat q FBe the heat that produces by the rotation of the motor of fan, or the fricative heat during by the extruding air etc.
At first, as mentioned above, are q2 at cooler 28 cooled air heats, as shown in Fig. 5 (b), in the indivedual heaters 26 of outlet, above-mentioned heat qF and the heat u[W that produces by heater 21] join this heat q2, heat q0 enters in the chamber.
In Fig. 5 (b), the part that dotted line surrounds is the model of the inflow/outflow of the heat in chamber, and the output of this model is the heat q1 that flows out from chamber.This heat q1 is fed and obtains " q0-q1 ".This " q0-q1 " carried out integration, obtain the total amount of heat Q1 in the chamber.
This total amount of heat Q1 utilizes above-mentioned " air themperature-heat conversion coefficient ", and kv is scaled air themperature.That is, calculate t=Q * (1/kv).On this air themperature t, add the above and disturb td (still, at this, establishing td is negative value), obtain above-mentioned t1.That is, obtain the interior air themperature t1 of chamber.By this air themperature t1 and above-mentioned " air themperature-heat conversion coefficient " ka, try to achieve the heat (above-mentioned q1) that flows out from chamber.This q1 obtains " q0-q1 " according to above-mentioned feedback.
As mentioned above, " model of the inflow/outflow of the heat in chamber " is output as q1, and the model on right side is the model of air duct (feed path) on this figure.At first, use above-mentioned " air themperature-heat conversion coefficient " ka that above-mentioned heat q1 is converted into air themperature { t3=q1 * (1/ka) }.As mentioned above, with the air and the temperature t of this temperature t 3 OAExtraneous air mix in the ratio that sets, therefore, as shown in the figure, through type " t4={t3 * (1-r) }+(t OA* r) " (r for for example about 0.3) try to achieve the temperature t 4 of mixing air.After using " air themperature-heat conversion coefficient " ka that this air themperature t4 is converted into heat, input cooler model.From cooler model quantity of heat given up q2.
At this, by the hypothesis of following (1)-(3), with the model simplification of Fig. 5 (b).
[hypothesis]
(1) fan heat q FNo change.Perhaps follow its variation to Temperature Influence in the temperature adjusting object space, disturb the influence cause to compare enough little with unstable state.This just means the heat no change of fan.
(2) extraneous gas temperature t OANo change.Perhaps disturb the influence that causes to compare enough little (little) to ignoring degree in the variations in temperature of control object in the time and unstable state.
(3) the cold water temperature no change of the cold water coil of cooler.Perhaps, disturb the influence that causes to compare enough little with unstable state to Temperature Influence in the temperature adjusting object space.
According to above-mentioned hypothesis, the model of Fig. 5 (b) can be made as simplification model as shown in Figure 6.
At first, according to above-mentioned hypothesis (1) and (2), the fan heat q in the model of Fig. 5 (b) FWith the extraneous gas temperature t OARelated part can be omitted.In addition, " model of the inflow/outflow of the heat in chamber " self is identical with Fig. 5 (b).In addition, according to above-mentioned hypothesis (1), (3), cooler (its cold water coil) can be according to mode modelling as shown in Figure 6.
In simplification model as shown in Figure 6, the indoor heat q0 of inflow chamber is q0=q2+u.In addition, similarly be fed, obtain " q0-q1 " as heat q1 and above-mentioned Fig. 5 (b) of the output of " model of the inflow/outflow of the heat in chamber ".
At this, above-mentioned heat q1 and t1 (being converted into before the heat q1) are transfused to illustrated cooler (cold water coil), and its output q2 is shown below as shown in the figure:
q2＝q1-(t1·kf)
(at this, kf is the coefficient that the pass with t1 and heat exchange amount ties up near the linear approximation t1, and unit is [W/K].In the following description, with this coefficient as heat exchange coefficient.)
At this, with reference to the simple modelling of Fig. 7 explanation about cooler.
At first, the general summary construction diagram of Fig. 7 (a) expression cooler.
In this schematic configuration, mainly represent the cold water coil (other incomplete structures) of cooler.The air of temperature t a (heat q1) flows into the cold water coil with air quantity Fa, and the air (wind speed no change Fa) that becomes to heat q2 flows out.Cooling water is with water speed Fw inflow/outflow in the cold water coil.The temperature that is about to flow into the cooling water before the cold water coil is made as twa, and just the cooling water temperature that flows out from the cold water coil is made as tw1.In addition, in cooler, also there is the structure that generates/send cooling water certainly, in this omission.
If the heat exchange amount of this cooling coil is made as qex, then becomes: q2=q1-qex.
At this, the heat exchange amount qex of cold water coil is by trying to achieve with following formula:
qex＝kf×(ta-twa)
At this, according to above-mentioned hypothesis (3), cold water temperature twa no change, therefore, cold water temperature twa omits (being considered as 0), and then above-mentioned formula becomes as follows:
qex＝kf×ta
Therefore, q2=q1-kf * ta
In the example of above-mentioned Fig. 5, Fig. 6, therefore ta=t1, becomes following formula:
q2＝q1-kf×t1
It is carried out becoming after the modelling model of cold water coil as shown in Figure 6.
At this, the performance plot of the value of heat exchange coefficient kf shown in Fig. 7 (b) is such, by the structures shape of air quantity Fa, water speed Fw and cold water coil.Therefore,, be predetermined its value, then can obtain the value of the heat exchange coefficient kf corresponding with it if air quantity Fa and water speed Fw are made as necessarily.In illustrated example, air quantity Fa=40, water speed Fw is made as illustrated " water speed 1 ", and the value of the heat exchange coefficient kf corresponding with it is 360.Thus, in this explanation, with heat exchange coefficient kf=360[W/K] describe.
Use such simplification model as shown in Figure 6, as described below, carry out the derivation of " u → t1 ".But, be made as and do not disturb td (nominal equipment 14 self and interference-free influence as mentioned above).
At first, if with reference to Fig. 6, obviously can draw following (d) formula, (e) formula, (f) formula.
(u+q2-q1) (1/kvs)=t1 ... (d) formula
Q1=t1ka ... (e) formula
Q1-(t1kf)=q2 ... (f) formula
And,, then can draw following (f) if with (e) formula substitution (f) formula ' and formula:
(t1ka)-(t1kf)=q2 ... (f) ' formula
Below, if with above-mentioned (e) formula, (f) ' formula substitution (d) formula, launch in the following manner, can draw the derivation formula of " u → t1 ".
(u+t1·ka-t1·kf-t1·ka)·(1/kv·s)＝t1
(u-t1·kf)·(1/kv·s)＝t1
U=t1kvs+t1kf=t1 (kvs+kf) is formula (g)
Draw following (8) formula according to above-mentioned (g) formula:
[formula 7]
t 1 u = 1 kv · s + kf = 1 kf kv kf · s + 1 (8) formula
In above-mentioned (8) formula, if kv/kf=To, 1/kf=Kp then becomes following (9) formula:
[formula 8]
t 1 u = K P To · s + 1 (9) formula
Above-mentioned (9) formula is identical with (4) formula.That is, as mentioned above, the transfer function P of decision nominal equipment 14 N(s).In addition, as mentioned above, K OBS=1/Kp is so become K OBS=kf.
In addition, the concrete example (example of the device of actual experiment) of above-mentioned To, Kp is as follows.
In this example, device volume V=6m 3In addition, set kf=360[W/K].
If change unit then becomes:
Figure GSA00000122040100203
Thus, at first become Kp=1/kf=1/0.4=2.5[0.001 ℃/W].
In addition, if atmospheric density ρ=1.203[kg/m 3], specific heat c=1.006[kJ/kgK], then become: kv=6 * 1.203 * 1.006 * 10 3=7261[J/K].
Thus, become:
Figure GSA00000122040100204
Therefore, in this concrete example, the transfer function P of nominal equipment 14 N(s) become following (10) formula:
[formula 9]
P N ( s ) = 2.5 1 + 20 s (10) formula
But the inventor also uses other experimental provision to experimentize.The following description is that other experiments are set forth.
At this, Fig. 8 represents an example of experimental result.
Chart shown in Fig. 8 is in Fig. 2 for example, structure shown in Figure 3, carries out following such same fixed test (heater heat generation characteristic), uses commercially available generally same to decide the figure that instrument is represented.
With testing summary surely: this test makes the output of the heater 21 of the indivedual heaters 26 of each outlet change with 10%, 20%, 30% three phases, tries to achieve temperature sensor TA01, the TA02 when respectively exporting, the variations in temperature of TA03 (control point temperature).
Content of the test is as follows more specifically:
＜collection condition 〉
Cold water coil: automatic (SV value: common utilization value)
Fan 22: running (specified running)
Heater 21: manually (the output initial value: 0, change by 10%, 20%, 30% later on) interimly
Internal load: 0W
＜collection method 〉
After operating side input part temperature, control point temperature both sides stablize, continue to collect data 10 minutes.
At first, the output of heater 21 is made as 10%, according to collecting data as mentioned above.
Secondly, the output of heater 21 is made as 20%, according to collecting data as mentioned above.At last, the output of heater 21 is made as 30%, according to collecting data as mentioned above.
Each waveform shown in Fig. 8 is expressed as follows:
PV: control point temperature
Ident 01: with standing wave shape (the PV waveform of the device model of inferring)
SV: target temperature
MV: operational ton (output quantity of heater 21)
According to the data shown in Fig. 8, use the above-mentioned commercially available same instrument decision parameter of deciding.
Consequently obtain following transfer function G1 (s):
[formula 10]
G 1 ( s ) = 0.8 e - 0.01 s 20 s + 1
That is, time constant T=20[sec], gain K=0.8.
At this, ineffective time L compare with time constant T very little, so as observation it is ignored.
Thus, above-mentioned transfer function G1 (s) can regard as:
G1(s)＝0.8/(20s+1)
In addition, so-called time constant is meant 63.2% the time that reaches end value.In addition, be meant that input signal sends the time delay when transmitting so-called ineffective time.
Infer the concrete numerical value of the transfer function of portion 11 and nominal equipment 14 about interference, for example can determine according to experiment.
For example, in the example of Fig. 8, as mentioned above, and the gain K=0.8 among the transfer function G1 (s) that draws according to experimental result, therefore time constant T=20 can keep intact these numerical value as the concrete numerical value of the transfer function of nominal equipment 14.That is, can set the transfer function P of nominal equipment 14 N(s) gain Kp=0.8, time constant To=20.
In addition, infer portion 11, the observation gain K of its transfer function about interference OBSTherefore=1/Kp, can be set at K OBS=1/0.8=1.25.In addition, as mentioned above, the T in above-mentioned (2) formula O1Identical with above-mentioned To, so can be made as T O1=20.In addition, about the T in above-mentioned (2) formula O2, be used to remove noise etc. as mentioned above, so the inventor sets the arbitrary value (being 1sec at this) that oneself sees fit.
Thus, above-mentioned in this concrete example (2) formula becomes as follows:
[formula 11]
1.25 ( 1 + 20 s ) 1 + s
As mentioned above, set concrete parameter, setting K as mentioned above in addition about (2) formula, (4) formula ADDOn=0.7 the basis, the result who experimentizes by equipment (stating as mentioned) is shown in Fig. 9 (b) practically.Set forth about this point, so do not do special instruction at this.
In addition, above-mentioned what is called " interference " in this explanation is meant " the unstable state interference " of having set forth in problem, as described in the problem, disturb the reason that takes place as such unstable state, be not limited to the switching of above-mentioned door 23, because other reasons, the discrepancy of the workpiece (wafer, glass substrate etc.) of for example switching of the baffle plate that is provided with in the chamber, relative chamber, the discrepancy of mechanical arm etc. also can produce above-mentioned unstable state and disturb.
That is, the one of the main reasons of " unstable state interference " generation is because the temporary transient inflow of the relative chamber of extraneous gas such as switching (temperature adjusting object space) of door or baffle plate.In addition, the main cause that " unstable state interference " takes place also has other reasons, and for example wafer, machine material, people etc. enter in the chamber, thereby becomes medium-term and long-term pyrotoxin.That is, in the temperature adjusting object space of chamber etc., because of certain variations in temperature principal element that enters extraneous gas, people etc. from the outside causes producing " unstable state interference ".
But, the main cause that " unstable state interference " takes place is not limited to above-mentioned " entering the variations in temperature principal element from the outside with respect to temperature adjusting object space ", also has for example change of internal load (running of device/stop etc.) to wait the reason that also becomes " unstable state interference " generation.
The interference observer of present embodiment is the equipment that the such unstable state of reply is disturbed, and the influence that unstable state can be disturbed (control point variation of temperature, i.e. variations in temperature in the chamber) is suppressed at Min..
In addition, an example is represented in above-mentioned explanation, and the present invention is not limited to this example.
For example, Figure 10 (a) schematically shows the structure of the accurate temperature adjusting system of an above-mentioned example.Shown in Figure 10 (a), the accurate temperature adjusting system of an above-mentioned example can be described as the structure of " cooler+heater (OBS function) ".Promptly, will from as the air of the clean room 25 (in Figure 10, being designated as temperature adjusting object space 25) of an example of temperature adjusting object space temporarily by after cooler 28 coolings, in the structure that the indivedual heaters 26 of outlet heat, be that the OBS function based on this method is applied to heater 26 '.That is be to append for example structure of the disturbance-observer portion 10 shown in Fig. 1.
In addition, the heater 26 ' shown in Figure 10 (a)～(d) means for example indivedual heaters 26 of outlet and the control device (1c shown in Fig. 3 and heater driving device 44c etc.) thereof in the example of Fig. 3 etc.Similarly, illustrated cooler 28 ' means for example cooler 28 and control device (adder 41 shown in Fig. 3, PID42, heater driving device 43 etc.) thereof.No matter which kind of situation is actually the OBS function of control device application based on this method.
Accurate temperature adjusting system of the present invention is not limited to the such configuration example of Figure 10 (a) as mentioned above, also can be the structure shown in Figure 10 (b), (c), (d) for example.
Figure 10 (b) is the structure of " cooler (OBS function) ".Figure 10 (c) is the structure of " cooler (OBS function)+heater ".Figure 10 (d) is the structure of " cooler (OBS function)+heater (OBS function) ".Like this, be not limited to be applied to separately the example of heater 26 ', also can be applied to cooler 28 ' separately, perhaps be applied to heater 26 ' and cooler 28 ' two sides based on the OBS function of this method.In addition, also be not only " cooler+heater " as the structure of prerequisite, also can be " cooler separately ", shown in above-mentioned Figure 10 (b), also the OBS function based on this method can be applied to cooler 28 ' under these circumstances.
In the time will being applied to cooler 28 ' based on the OBS function of this method, for the control device that constitutes by for example adder shown in Fig. 3 41, PID42, heater driving device 43, can use OBS function (appending for example disturbance-observer portion 10 shown in Fig. 1) based on this method.
But, in the structure of Figure 10 (b), flow into temperature adjusting object space 25 owing to keep intact by the cooling air of cooler 28 cooling, the target temperature r that therefore is input to above-mentioned adder 41 also can be made as the target temperature (being 23.0 ℃ in the example of Fig. 3) of temperature adjusting object space 25 etc.In addition, in this case, the result that the detected temperatures y that is input to adder 41 both can adopt the temperature sensor TA06 that is arranged on cubicle (adjustment space) 30a (detecting the sensor of cooling air temperature) by as shown in Figure 3 to detect for example also can use temperature adjusting object space 25 in the temperature sensor TA03 of setting etc.Perhaps,, also temperature sensor can be set, be used to detect the air themperature that will flow into before the temperature adjusting object space 25, this is detected the detected temperatures y of data as input summer 41 though in Fig. 3, do not show.
In addition, in structure shown in Figure 10 (c), the detected temperatures y of input summer 41 also can adopt said temperature sensor TA06.Perhaps, though in Fig. 3, do not show, but also temperature sensor can be set newly, be used to detect the air themperature that is blown into side (air themperature of clean room's upper space 33), with the testing result of this temperature sensor detected temperatures as input summer 41 with respect to the indivedual heaters 26 of outlet.
Perhaps, in the structure shown in Figure 10 (c), the detected temperatures y of input summer 41 also can use said temperature sensor TA03 etc.But, in this case, in the deviation (r-y) that generates by adder 41, comprise the changing unit α (temperature rising) that produces by heater 26 '.That is, in the example of Fig. 3, about changing unit α=1.5 ℃, detected temperatures y becomes about 23 ℃.Therefore in this case, the target temperature r that for example imports above-mentioned adder 41 is not 21.5 ℃ but 23.0 ℃ etc.
Above with reference to description of drawings embodiments of the present invention, but the present invention is not limited to above-mentioned embodiment.Can do all changes in the technology of the present invention thought range, they all belong to protection scope of the present invention.

Claims (14)

1. accurate temperature adjusting system comprises:
Temperature adjusting object space;
Cooling device is arranged in the feed path of the air that supply cooled off in this temperature adjusting object space;
Heater is arranged in the described feed path, the air that heating is supplied with from described cooling device, and to described temperature adjusting object space air-supply; With
The first control device of described cooling device, the second control device of described heater,
This accurate temperature adjusting system is characterised in that:
At least one of described first, second control device also possesses disturbance-observer portion, and this disturbance-observer portion generates with unstable state interference corresponding compensation amount and with it and adds on operational ton,
This disturbance-observer portion comprises:
Nominal equipment is simulated and the relevant action of entire system that comprises described temperature adjusting object space, described cooling device, described heater and described feed path; With
Disturb estimating device, input generates and output interference presumed value according to this deviation from the temperature and the temperature of the air of supplying with from described cooling device or the deviation between the temperature in the described temperature adjusting object space of described nominal equipment output,
Determine described compensation rate according to interference presumed value based on this interference estimating device.
2. accurate temperature adjusting system comprises:
Temperature adjusting object space;
Cooling device is arranged in the feed path of the air that supply cooled off in this temperature adjusting object space;
Heater is arranged in the described feed path, the air that heating is supplied with from described cooling device, and to described temperature adjusting object space air-supply; With
The first control device of described cooling device, the second control device of described heater,
This accurate temperature adjusting system is characterised in that:
At least one of described first, second control device,
The entire system that will comprise described temperature adjusting object space, described cooling device, described heater and described feed path is as the control object, and possesses:
FEEDBACK CONTROL portion, the deviation of the measured value of input setting value and described control object, calculating operation amount;
Disturbance-observer portion calculates with unstable state and disturbs the corresponding compensation amount; With
First adder carries out add operation to described operational ton and described compensation rate, calculates the controlled quentity controlled variable that is used for to described control object input,
Described disturbance-observer portion comprises:
Simulate the nominal equipment of described control object;
Disturb estimating device, import the deviation between the measured value of the output of this nominal equipment and described control object;
The addition multiplier (-icator) makes the output of this interference estimating device multiply by specified multiple and calculate described compensation rate;
Second adder calculates the deviation between the output of the controlled quentity controlled variable of described control object input and described interference estimating device, generates the signal of importing to described nominal equipment.
3. accurate temperature adjusting system according to claim 1 and 2 is characterized in that:
Described nominal equipment by will with the relevant action modelization of entire system that comprises described temperature adjusting object space, described cooling device, described heater and described feed path, and then condition according to the rules simplifies this model, uses resulting simplification model and determined.
4. accurate temperature adjusting system according to claim 3 is characterized in that:
Mix under the situation of the structure of cooling off by described cooling device the back at the air and the extraneous air that flow into from described temperature adjusting object space in the described feed path,
Described defined terms is:
The air-supply air quantity that is produced by described heater or cooling device does not change, and that perhaps follows its variation disturbs the influence that is produced to compare enough little to Temperature Influence in the temperature adjusting object space and described unstable state;
The temperature no change of described extraneous air, that perhaps follows its variation disturbs the influence that is produced to compare enough little to Temperature Influence in the temperature adjusting object space and described unstable state;
The cooling capacity no change of described cooling device perhaps disturbs the influence that is produced to compare enough little to Temperature Influence in the temperature adjusting object space and described unstable state.
5. accurate temperature adjusting system comprises:
Temperature adjusting object space;
Cooling device is arranged in the feed path of the air that supply cooled off in this temperature adjusting object space; With
The control device of described cooling device,
This accurate temperature adjusting system is characterised in that:
Described control device also possesses disturbance-observer portion, and this disturbance-observer portion generates with unstable state interference corresponding compensation amount and with it and adds on operational ton,
This disturbance-observer portion comprises:
Nominal equipment is simulated the action relevant with the entire system that comprises described temperature adjusting object space, described cooling device and described feed path;
Disturb estimating device, input generates and output interference presumed value according to this deviation from the temperature and the temperature of the air of supplying with from described cooling device or the deviation between the temperature in the described temperature adjusting object space of described nominal equipment output,
Determine described compensation rate according to interference presumed value based on this interference estimating device.
6. accurate temperature adjusting system comprises:
Temperature adjusting object space;
Cooling device is arranged in the feed path of the air that supply cooled off in this temperature adjusting object space; With
The control device of described cooling device,
Described accurate temperature adjusting system is characterised in that:
Described control device will comprise the entire system of described temperature adjusting object space, described cooling device and described feed path as the control object,
Described control device comprises:
FEEDBACK CONTROL portion, the deviation between the measured value of input setting value and described control object, calculating operation amount;
Disturbance-observer portion calculates with unstable state and disturbs the corresponding compensation amount; With
First adder carries out add operation to described operational ton and described compensation rate and calculates the controlled quentity controlled variable that is used for to described control object input,
Described disturbance-observer portion comprises:
Simulate the nominal equipment of described control object;
Disturb estimating device, import the deviation between the measured value of the output of this nominal equipment and described control object;
The addition multiplier (-icator), the output that makes this interference infer portion be multiply by specified multiple and is calculated described compensation rate;
Second adder calculates the deviation between the output that portion is inferred in the controlled quentity controlled variable and the described interference of described control object input, generates the signal to described nominal equipment input.
7. according to claim 5 or 6 described accurate temperature adjusting systems, it is characterized in that:
Described nominal equipment by will with the relevant action modelization of entire system that comprises described temperature adjusting object space, described cooling device and described feed path, and then condition according to the rules simplifies this model and uses resulting simplification model and determine.
8. accurate temperature adjusting system according to claim 7 is characterized in that:
Mixed at the air and the extraneous air that flow in the described feed path from described temperature adjusting object space, then under the situation of the structure of cooling off by described cooling device,
Described defined terms is:
The air-supply air quantity that is produced by described cooling device does not change, and that perhaps follows its variation disturbs the influence that is produced to compare enough little to Temperature Influence in the temperature adjusting object space and described unstable state;
The temperature no change of described extraneous air, that perhaps follows its variation disturbs the influence that is produced to compare enough little to Temperature Influence in the temperature adjusting object space and described unstable state;
The cooling capacity no change of described cooling device perhaps disturbs the influence that is produced to compare enough little to Temperature Influence in the temperature adjusting object space and described unstable state.
9. according to each described accurate temperature adjusting system in the claim 1,2,5,6, it is characterized in that:
Described nominal equipment is as follows:
[formula 12]
P N ( s ) = K P 1 + T O S
The transfer function of described interference estimating device is 1/P N(s).
10. according to each described accurate temperature adjusting system in the claim 1,2,5,6, it is characterized in that:
Described unstable state is disturbed to owing to the variations in temperature principal element enters variations in temperature in the temperature adjusting object space that produce, described with respect to described temperature adjusting object space from the outside.
11. the control device of an accurate temperature adjusting system, described accurate temperature adjusting system comprises:
Temperature adjusting object space;
Cooling device is arranged in the feed path of the air that supply cooled off in this temperature adjusting object space; With
Heater is arranged in the described feed path, the air that heating is supplied with from described cooling device, and to described temperature adjusting object space air-supply,
The control device of described accurate temperature adjusting system is the control device of the described cooling device in the accurate temperature adjusting system or the control device of described heater,
Described control device is characterised in that:
Also possess disturbance-observer portion, generate with unstable state and disturb the corresponding compensation amount, and it is added on operational ton,
This disturbance-observer portion comprises:
Nominal equipment is simulated and the relevant action of entire system that comprises described temperature adjusting object space, described cooling device, described heater and described feed path; With
Disturb estimating device, input generates and output interference presumed value according to this deviation from the temperature and the temperature of the air of supplying with from described cooling device or the deviation between the temperature in the described temperature adjusting object space of described nominal equipment output,
Determine described compensation rate according to interference presumed value based on this interference estimating device.
12. the control device of an accurate temperature adjusting system, described accurate temperature adjusting system comprises:
Temperature adjusting object space;
Cooling device is arranged in the feed path of the air that supply cooled off in this temperature adjusting object space; With
Heater is arranged in the described feed path, the air that heating is supplied with from described cooling device, and to described temperature adjusting object space air-supply,
The control device of described accurate temperature adjusting system is the control device of described cooling device of accurate temperature adjusting system or the control device of described heater,
Described control device is characterised in that:
The entire system that will comprise described temperature adjusting object space, described cooling device, described heater and described feed path is as the control object;
Described control device comprises:
FEEDBACK CONTROL portion, the deviation between the measured value of input setting value and described control object, calculating operation amount;
Disturbance-observer portion calculates with unstable state and disturbs the corresponding compensation amount; With
First adder carries out add operation to described operational ton and described compensation rate, calculates the controlled quentity controlled variable that is used for to described control object input,
Described disturbance-observer portion comprises:
Simulate the nominal equipment of described control object;
Disturb estimating device, import the deviation between the measured value of the output of this nominal equipment and described control object;
The addition multiplier (-icator), the output of this interference being inferred portion be multiply by specified multiple and is calculated described compensation rate; With
Second adder calculates the deviation between the output that portion is inferred in the controlled quentity controlled variable and the described interference of described control object input, generates the signal to described nominal equipment input.
13. the control device of an accurate temperature adjusting system, described accurate temperature adjusting system comprises:
Temperature adjusting object space; With
Cooling device is arranged in the feed path of the air that supply cooled off in this temperature adjusting object space,
The control device of described accurate temperature adjusting system is the control device of the described cooling device of accurate temperature adjusting system,
Described control device is characterised in that:
Also possess disturbance-observer portion, generate with unstable state and disturb the corresponding compensation amount, and it is added on operational ton,
This disturbance-observer portion possesses:
Nominal equipment is simulated the action relevant with the entire system that comprises described temperature adjusting object space, described cooling device and described feed path; With
Disturb estimating device, input generates and output interference presumed value according to this deviation from the temperature and the temperature of the air of supplying with from described cooling unit or the deviation between the temperature in the described temperature adjusting object space of described nominal equipment output,
Determine described compensation rate according to interference presumed value based on this interference estimating device.
14. the control device of an accurate temperature adjusting system, described accurate temperature adjusting system comprises:
Temperature adjusting object space; With
Cooling device is arranged in the feed path of the air that supply cooled off in this temperature adjusting object space,
The control device of described accurate temperature adjusting system is the control device of the described cooling device of accurate temperature adjusting system,
Described control device is characterised in that:
The entire system that will comprise described temperature adjusting object space, described cooling device and described feed path is as the control object,
Described control device comprises:
FEEDBACK CONTROL portion, the deviation between the measured value of input setting value and described control object, calculating operation amount;
Disturbance-observer portion calculates with unstable state and disturbs the corresponding compensation amount; With
First adder carries out add operation to described operational ton and described compensation rate, calculates the controlled quentity controlled variable that is used for to described control object input,
This disturbance-observer portion possesses:
Simulate the nominal equipment of described control object;
Disturb estimating device, import the deviation between the measured value of the output of this nominal equipment and described control object;
The addition multiplier (-icator), the output of this interference being inferred portion be multiply by specified multiple and is calculated described compensation rate; With
Second adder calculates the deviation between the output that portion is inferred in the controlled quentity controlled variable and the described interference of described control object input, generates the signal to described nominal equipment input.
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