TW201040286A - Annealing device - Google Patents

Annealing device Download PDF

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Publication number
TW201040286A
TW201040286A TW099104943A TW99104943A TW201040286A TW 201040286 A TW201040286 A TW 201040286A TW 099104943 A TW099104943 A TW 099104943A TW 99104943 A TW99104943 A TW 99104943A TW 201040286 A TW201040286 A TW 201040286A
Authority
TW
Taiwan
Prior art keywords
furnace body
sheet
lid portion
annealing apparatus
annealing
Prior art date
Application number
TW099104943A
Other languages
Chinese (zh)
Other versions
TWI417395B (en
Inventor
Hirotomo Maeda
Naoyuki Neagari
Original Assignee
Ihi Corp
Ihi Machinery & Furnace Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ihi Corp, Ihi Machinery & Furnace Co Ltd filed Critical Ihi Corp
Publication of TW201040286A publication Critical patent/TW201040286A/en
Application granted granted Critical
Publication of TWI417395B publication Critical patent/TWI417395B/en

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/28—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity for treating continuous lengths of work
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/14—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment
    • F27B9/20—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace
    • F27B9/24—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace being carried by a conveyor
    • F27B9/243—Endless-strand conveyor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/14—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment
    • F27B9/20—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace
    • F27B9/24—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace being carried by a conveyor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D1/00—Casings; Linings; Walls; Roofs
    • F27D1/18—Door frames; Doors, lids, removable covers
    • F27D1/1808—Removable covers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D7/00—Forming, maintaining, or circulating atmospheres in heating chambers
    • F27D7/06—Forming or maintaining special atmospheres or vacuum within heating chambers

Abstract

The present application provides an annealing device including: a furnace body (2) including a cover portion (2c) allowing an inside of the furnace body (2) to be exposed and an inlet opening (2a) and an outlet opening to be opened, and a carrier device (6) placed outside of the furnace body (2), for gripping a part of a sheet (S) and carrying the sheet. Thereby, the carrier device is prevented from being exposed to high temperatures, and the life span of the carrier device can be extended.

Description

201040286 . 六、發明說明： 【發明所屬之技術領域】 - 本發明係關於一種對透過爐體之入口開口部及出口 開口部插通於爐體内部之薄片進行加熱並進行退火處理之 退火裝置。 本案係依據2009年2月16日在日本申請之特願 2009-032909號主張優先權，在此援用其内容。 【先前技術】 〇 以往，在利用滾軋處理製造薄片之製造裝置等中，係 採用一種進行用以去除薄片之内部應變之退火處理的退火 裝置（參照專利文獻1至4)。 前述之退火裝置係對透過爐體之入口開口部及出口 開口部插通於爐體内部之薄片進行加熱並進行退火處理， 藉此可連續地處理連續被供給之薄片。 此外，前述之退火裝置為了在維護等之時間點可目視 〇或修補爐體之内部，而構成為於爐體之一部分形成開口。 再者，例如，由於要在薄片未插通於爐體之狀態下進 行維護，故必須在維護結束後再度使薄片插通於爐體之内 部。 因此，習知之退火裝置係設置有搬送裝置，該搬送裝 置係具備：配置於爐體内部且用以把持薄片之一部分的皮 帶部；及使前述皮帶部旋轉行進之驅動部。 (先前技術文獻） (專利文獻） 321825 201040286 (專利文獻1):日本特開平11-32〇656號公報 (專利文獻2):日本特開2005-265360號公報 (專利文獻3):日本特開昭57-190378號公報 (專利文獻4):日本特開平9-24536號公報 【發明内容】 (發明所欲解決之課題） 然而，上述搬送裝置之皮帶部係配置在爐體之内部， 因此恒常地曝露在爐體之加熱環境。 因此，在習知之退火裝置中，具備用以把持薄片而進 行搬送之皮帶部的搬送裝置之壽命短，其係被視為問題所 在。 本發明係鑑於上述問題而研創者，其目的在於使退火 裝置中之搬送裝置的壽命長期化。 (解決課題之手段） 作為用以解決上述課題的手段，本發明係採用以下構 成。 第1態樣之發明係對透過爐體之入口開口部及出口開 口部插通於爐體内部之薄片進行加熱，藉此實施退火處理 之退火裝置。該退火裝置係採用具備以下構件之構成：前 述爐體，具有可使前述爐體内部露出且可使前述入口開口 及前述出口開口開放之蓋部；及搬送裝置，設置於該爐體 之外部且用以把持前述薄片之一分以進行搬送。 第2態樣之發明係在第1態樣之發明中，採用具備密 封構件之構成，該密封構件係介置在前述爐體之蓋部與嵌 4 321825 201040286 合有該蓋部之前述爐體之基部之間隙。 第3態樣之發明係在第1或第2態樣之發明中，採用 具備被覆部之構成，該被覆部係覆蓋前述爐體之蓋部與嵌 合有該蓋部之前述爐體之基部之間隙。 第4態樣之發明係在第丨至第3態樣中任一態樣之發 明中，前述搬送裝置係採用具備用以把持前述薄片之一部 分的橡膠皮帶、及使該橡膠皮帶旋轉行進之驅動部的構成。 (發明之效果） 依據本發明，由於爐體具有可使爐體内部露出且可使 入口開π及出口開口開放之蓋部，因此可在不用使薄片之 端部通過開π部之情形下，將薄片收容在爐體内部。此外， ^據本發明，由於仙設置在爐叙外部㈣送裝置把持 專片以進行搬送，因此無須在爐體之内部配置搬送裝置之 構成構件。 ◎ 因此，依據本發明，可防止搬送裝置曝露在高 境’可使搬送裝置之壽命長期化。 【實施方式】 —徐下參』、第1圖至第4圖說明本發明之退火裝置 焉％形態。再者，在以下之$ h日士 各禮社丄 * 乂下之說明令’為了作成為可辨- 件之大小，係適當地變更各構件之比例尺。 略構Γ圖1圖Ϊ第2圖係顯示本實施形態之退火裝置1之4 裝圖係退火裝置1之側面圖，第2圖綠 衣罝1之正面圖。 如第1圖及第2圖所示，本實施形態之退火裝置1^ 321825 5 201040286 昇降裝置5及搬送裝 具備爐體2、搬送滾輪3、加熱器4 置6。 。 在爐體2之内部，透過入口 入有薄U，在該㈣崎料片口以插 2係形成為朝薄片S之搬送方向延伸之箱形：理。該爐體 可#^’爐體2之上部係作成為蓋部2e，該蓋部2c係 了使爐體2之内部露出，並且可使 2b形成開口。 了使人口開Q及出口開口 _亦即’本實_態之敎裝置1係具備具有蓋部2。 之爐體2，該蓋部2c係可使爐體2之内部露出，並且可使 入口開口 2a及出口開口 2b形成開口。 如第2圖所示，蓋部2c之薄片s之搬送方向的端部 係構成為·具有從薄片s之搬送方向觀視朝下方突出 之突出部2c2。[Technical Field] [Technical Field] The present invention relates to an annealing apparatus that heats and anneals a sheet inserted through an inlet opening portion and an outlet opening portion of a furnace through a furnace body. This case claims priority based on Japanese Patent Application No. 2009-032909, filed on February 16, 2009 in Japan, the content of which is hereby incorporated herein. [Prior Art] Conventionally, in an apparatus for manufacturing a sheet by a rolling process, an annealing apparatus for performing annealing treatment for removing internal strain of a sheet is used (see Patent Documents 1 to 4). In the annealing apparatus described above, the sheet inserted through the inlet opening portion and the outlet opening portion of the furnace body through the inside of the furnace body is heated and annealed, whereby the continuously supplied sheet can be continuously processed. Further, the annealing apparatus described above is configured to form an opening in one portion of the furnace body in order to visually or repair the inside of the furnace body at the time of maintenance or the like. Further, for example, since maintenance is performed in a state where the sheet is not inserted into the furnace body, it is necessary to reinsert the sheet into the inside of the furnace body after the maintenance is completed. Therefore, the conventional annealing apparatus is provided with a conveying device that includes a belt portion that is disposed inside the furnace body and that holds a portion of the sheet, and a driving portion that rotates the belt portion. (Prior Art Document) (Patent Document 1): Japanese Laid-Open Patent Publication No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. 2005-265360 (Patent Document 3): Japanese Patent Laid-Open Japanese Laid-Open Patent Publication No. Hei 9-24536 (Patent Document 4): SUMMARY OF THE INVENTION PROBLEMS TO BE SOLVED BY THE INVENTION However, the belt portion of the above-described conveying device is disposed inside the furnace body, so that it is constant The ground is exposed to the heating environment of the furnace body. Therefore, in the conventional annealing apparatus, the life of the conveying apparatus having the belt portion for carrying the sheet to be conveyed is short, which is considered to be a problem. The present invention has been made in view of the above problems, and an object thereof is to prolong the life of a conveying apparatus in an annealing apparatus. (Means for Solving the Problem) The present invention has the following constitution as means for solving the above problems. The first aspect of the invention is an annealing apparatus that performs annealing treatment by heating a sheet inserted through the inlet opening portion and the outlet opening portion of the furnace body into the furnace body. The annealing apparatus has a configuration in which the furnace body has a lid portion that exposes the inside of the furnace body and allows the inlet opening and the outlet opening to be opened, and a conveying device that is disposed outside the furnace body and It is used to hold one of the aforementioned sheets for transport. According to a second aspect of the invention, in a first aspect of the invention, a sealing member is provided, and the sealing member is interposed between the cover portion of the furnace body and the furnace body in which the cover portion is fitted with 4321825 201040286 The gap between the bases. According to a third aspect of the invention, in the first or second aspect of the invention, there is provided a covering portion that covers a lid portion of the furnace body and a base portion of the furnace body to which the lid portion is fitted The gap. According to a fourth aspect of the invention, in any one of the third aspect to the third aspect, the conveying device is provided with a rubber belt for holding a part of the sheet, and a driving for rotating the rubber belt. The composition of the department. (Effects of the Invention) According to the present invention, since the furnace body has a lid portion which can expose the inside of the furnace body and can open the inlet opening π and the outlet opening, it is possible to prevent the end portion of the sheet from passing through the π portion. The sheet is housed inside the furnace body. Further, according to the present invention, since the outside of the furnace is provided in the outside of the furnace (4), the conveying device holds the sheet for transportation, and therefore it is not necessary to arrange the constituent members of the conveying device inside the furnace body. ◎ Therefore, according to the present invention, it is possible to prevent the conveying device from being exposed to a high environment, and the life of the conveying device can be prolonged. [Embodiment] - Xu Xia, "Fig. 1 to Fig. 4" illustrate the 焉% form of the annealing apparatus of the present invention. In addition, in the following $h 日士礼礼社丄 * The following instructions are made to change the scale of each component in order to be identifiable. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a side view showing a pattern annealing apparatus 1 of an annealing apparatus 1 of the present embodiment, and a front view of a green sheet 1 of Fig. 2; As shown in Fig. 1 and Fig. 2, the annealing apparatus 1 321825 5 201040286 of the present embodiment includes a furnace body 2, a conveying roller 3, and a heater 4 in a lifting device 5 and a conveying device. . Inside the furnace body 2, a thin U is introduced through the inlet, and the (four) baffle opening is formed in a box shape extending in the conveying direction of the sheet S. The upper portion of the furnace body 2 is used as a lid portion 2e which exposes the inside of the furnace body 2 and allows the opening 2b to be formed. In order to open the population and open the outlet _, that is, the 本 本 敎 敎 敎 。 。 。 。 。 。 。 。 。 。 。 。 。 。 The furnace body 2, which exposes the inside of the furnace body 2, and allows the inlet opening 2a and the outlet opening 2b to form an opening. As shown in Fig. 2, the end portion of the sheet portion s in the conveying direction of the lid portion 2c is configured to have a projecting portion 2c2 that protrudes downward from the direction in which the sheet s is conveyed.

此外，嵌合有蓋部2c之爐體2的基部2d係從薄片S 之搬送方向觀視形成為具有凹部2dl之凹形狀。該凹部 21dl之深度距離係設定為比突出部2c2之高度距離更長。 再者’藉由以使蓋部2c之突出部2c2插入基部2d之 凹部2dl的方式將蓋部2c嵌合在基部2d，而將由蓋部2c 與基部2d所圍繞之區域作成為入口開口 2a及出口開口 2b。 此外’為了使蓋部2c之安裝及拆卸容易，蓋部2c之 突出部2c2的寬度距離係設定為比基部2d之寬度距離略 短。 6 321825 201040286 而且，如裳1面1 ? 2c ^ 2(1時介置在^ )’該襯墊7係在嵌合蓋部&與基部 爐體2内部Γ古 基部％之間隙A。該概塾7係抑制 内…溫氣體從間隙A漏出至外部者，且由且伸 縮性之材料所形成，俾不會阻礙蓋部2C之安裝及拆卸、。伸 卜_ 7亦可不固定在蓋部2c，而固定在基部 亦可在進行蓋部2c之安裝及拆卸時被拆卸。 Ο 罢接Γ第3圖所示，在基部％設置有用以覆蓋_ A之 8(被覆部）。罩構件8係抑麵體 體«隙A漏出至外部者，且配置在爐體2之外部了2 固疋在基部2d之壁面’俾不會阻礙蓋部。之安裝及拆卸。 此外’罩構件8亦可不固定在基部^ ,而固定在蓋部 2C °而且’亦可在進行蓋部之絲及拆卸時被拆卸。° 搬运滾輪3係在爐體2之内部朝薄片s之搬送方向排 列複數個之自由滾輪，且從下方支持藉由在爐體2之外部 被拉引而被搬送之薄片S。 加熱器4係配置在爐體2之内部，且對通過爐體2之 内部的薄片S進行加熱。 昇降裝置5係藉由將爐體2之蓋部及舉升至上部， 而使爐體2之内部露出且可使人口開口 a及出口開口㉛ 開放所用者，且在爐體2之側部配置複數個。 該昇降裝置5例如可作為具備油覆血之昇降裝置來使 用。 搬送裝置6係例如從爐體2 之内部的維護後等之未在 321825 7 201040286 爐體2插通薄片S之狀態，將薄片S插通於爐體2之内部 所用者，且設置在爐體2之外部並藉由把持薄片S之一部 分而進行搬送。 再者，該搬送裝置6係具備：用以把持薄片S之一部 分的橡膠皮帶6a ;使該橡膠皮帶6a旋轉行進之驅動滾輪 6b ;及用以調節施加在橡膠皮帶6a之張力的張力滾輪6c。 橡膠皮帶6a係被複數個滾輪6d所支持，藉此，遍及 爐體2之延伸方向的全長而被架設。如第4圖所示，在該 橡膠皮帶6a，朝長度方向形成有複數個切入部6al，該等 切入部6al係藉由插入薄片S而可把持薄片S。 驅動滾輪6b係配置在橡膠皮帶6a之途中部位，藉由 將從未圖示之馬達等驅動源所供給之動力傳達至橡膠皮帶 6a，而使橡膠皮帶6a旋轉行進。 張力滾輪6c係可朝與所接觸之橡膠皮帶6a之表面交 叉的方向移動之滾輪，且依據其本身之移動位置調節施加 在橡膠皮帶6a之張力。 在本實施形態之退火裝置1中，例如在進行雉護等之 情形下，首先藉由昇降裝置5舉升爐體2之蓋部2c，而將 蓋部2c從基部2d拆下。接著，使爐體2之内部露出，並 且使入口開口 2a及出口開口 2b開放。 此外，薄片S係在例如爐體2之上游侧被切斷，且在 該狀態下搬送薄片S，藉此將薄片S取出至爐體2之外部。 當爐體2内部之維護等結束時，使上游側之薄片S的 端部附近把持在搬送裝置6的橡膠皮帶6a。 8 321825 201040286 * 更詳細而言，作業者將薄片s之端部附近插入至形成 在橡膠皮帶6a之切入部6al，藉此使薄片S把持在橡膠皮 - 帶 6a 〇 ， 在使薄片S把持在橡膠皮帶6a後，以搬送裝置6之 驅動滾輪6b使橡膠皮帶6a旋轉行進，藉此使薄片S從爐 體2之上游側端部2e的附近搬送至下游側端部2f的附近。 此外，橡膠皮帶6a係朝使薄片S不會通過設置有驅 動滾輪6b及張力滾輪6c之位置（在本實施形態中為橡膠 ^ 皮帶6a之下側位置）的方向旋轉行進。 當薄片S被搬送至爐體2之下游側端部2f的附近時， 作業者係將薄片S從橡膠皮帶6a拆下並收容在爐體2之内 部。 此時，在本實施形態之退火裝置1中，藉由拆除蓋部 2c而使爐體2之内部露出。此外，使入口開口 2a及出口 開口 2b朝上方形成開口。因此，作業者係可容易地將薄片 Q S收容在爐體2之内部。 接著，令藉由昇降裝置5所舉升之蓋部2c下降而嵌 合在爐體2之基部2d。 結果，在蓋部2c與基部2d之間形成有入口開口 2a 及出口開口 2b，且作成令薄片S透過入口開口 2a及出口 開口 2b插通爐體2之内部的狀態。 此外，藉由將薄片S之端部捲繞於配置於爐體2之下 游側的未圖示之驅動滾輪等並予以拉引，而可再度搬送薄 片S 〇 321825 201040286 再者，在薄片s被搬送而進行退火處理時，本實施形 態之退火裝置1係藉由襯墊7及罩構件8，雙重地抑制高 溫氣體從形成在蓋部2c與基部2d之間的間隙A之漏出。 因此，使來自爐體2内部之散熱量減少，使本實施形 態之退火裝置1的熱效率提升。 依據以上所述之本實施形態之退火裝置1，由於爐體 2具備可使爐體2内部露出且可使入口開口 2a及出口開口 2b開放之蓋部2c，因此可在不用使薄片S之端部通過開口 部之狀態下，將薄片S收容在爐體2内部。此外，依據本 實施形態之退火裝置1，由於可利用設置在爐體2之外部 的搬送裝置6把持薄片S並進行搬送，因此無須在爐體2 之内部配置搬送裝置6之構成構件。 因此，依據本實施形態之退火裝置1，可防止搬送裝 置6曝露在高溫環境，且可使搬送裝置6之壽命長期化。 此外，依據本實施形態之退火裝置1，由於採用在爐 體2之外部配置有搬送裝置6之構成，因此可使用橡膠皮 帶作為搬送裝置6之皮帶。 因此，依據本實施形態之退火裝置1，與作為因應高 溫環境之對策而使用鏈皮帶作為皮帶的搬送裝置相比較， 搬送裝置6之處理性會提升。 以上，雖參照圖式針對本發明之較佳實施形態進行說 明，但本發明並非為限定於上述實施形態者。上述實施形 態所示之各構成構件之諸形狀或組合等係為一例，在不脫 離本發明之主旨的範圍内，可依據設計要求等進行各種變 10 321825 201040286 • 更。 例如，在上述實施形態中，係採用以下構成：蓋部2c • 具備突出部2c2，藉由將該突出部2c2插入基部2d之凹部 2dl而將蓋部2c嵌合於基部2d。藉由採用上述之構成，可 防止蓋部2c與基部2d之位置關係偏離。 然而，本發明並非限定於上述構成，例如亦可將蓋部 2c形成為平板狀。 此外，在上述實施形態中，係針對使用橡膠皮帶6a ◎作為搬送裝置6之皮帶的構成加以說明。 然而，本發明並不限定於此，亦可利用鏈皮帶作為搬 送裝置6之皮帶。 (產業上之可利用性） 依據本實施形態之退火裝置，由於爐體具有可使爐體 内部露出且可使入口開口及出口開口開放之蓋部，因此可 在不用使薄片之端部通過開口部之情形下，將薄片收容在 Q 爐體内部。此外，由於可利用設置在爐體之外部的搬送裝 置把持薄片以進行搬送，因此無須在爐體之内部配置搬送 裝置之構成構件。 因此，依據本發明，可防止搬送裝置曝露在高溫環 境，可使搬送裝置之壽命長期化。 【圖式簡單說明】 第1圖係顯示本發明之一實施形態之退火裝置之概略 構成的側面圖。 第2圖係顯示本發明之一實施形態之退火裝置之概略 11 321825 201040286 構成的正面圖。 第3圖係顯示本發明之一實施形態之退火裝置之平面 剖面的放大圖。 第4圖係顯示本發明之一實施形態之退火裝置所具備 之橡膠皮帶的放大圖。 【主要元件符號說明】 1 退火裝置 2 爐體 2a 入口開口 2b 出口開口 2c 蓋部 2d 凹部 2c2 突出部 2d 基部 2e 上游侧端部 2f 下游側端部 3 搬送滾輪 4 加熱器 5 昇降裝置 6 搬送裝置 6a 橡膠皮帶 6al 切入部 6b 驅動滾輪（驅動部） 6c 張力滾輪 6d 滾輪 7 禰:墊（密封構件） 8 罩構件（被覆部） A 間隙 S 薄片 321825 12Further, the base portion 2d of the furnace body 2 to which the lid portion 2c is fitted is formed in a concave shape having the concave portion 2d1 from the direction in which the sheet S is conveyed. The depth of the concave portion 21d1 is set to be longer than the height of the protruding portion 2c2. Furthermore, the cover portion 2c is fitted to the base portion 2d so that the projection portion 2c2 of the lid portion 2c is inserted into the recess portion 2d1 of the base portion 2d, and the region surrounded by the lid portion 2c and the base portion 2d serves as the inlet opening 2a and Exit opening 2b. Further, in order to facilitate the attachment and detachment of the lid portion 2c, the width of the projection portion 2c2 of the lid portion 2c is set to be slightly shorter than the width of the base portion 2d. 6 321825 201040286 Moreover, if the skirt 1 is 1 ? 2c ^ 2 (1 at the time of ^), the spacer 7 is in the gap A between the fitting cover portion and the base portion of the base furnace body 2. This outline 7 suppresses the leakage of the warm gas from the gap A to the outside, and is formed of a material which is extensible, and does not hinder the attachment and detachment of the lid portion 2C. The extension _ 7 may not be fixed to the lid portion 2c, and the base portion may be detached when the lid portion 2c is attached and detached.罢 Strike Γ Figure 3 shows that the base % is set to cover _ A 8 (covered part). The cover member 8 is a body-inhibiting body «the gap A leaks to the outside, and is disposed outside the furnace body 2 and is fixed to the wall surface of the base portion 2d" so as not to obstruct the cover portion. Installation and disassembly. Further, the cover member 8 may be fixed to the cover portion 2C ° without being fixed to the base portion, and may be detached when the cover portion is removed and removed. The conveyance roller 3 arranges a plurality of free rollers in the conveyance direction of the sheet s inside the furnace body 2, and supports the sheet S conveyed by being pulled outside the furnace body 2 from below. The heater 4 is disposed inside the furnace body 2, and heats the sheet S passing through the inside of the furnace body 2. The lifting device 5 is configured such that the inside of the furnace body 2 is exposed by lifting the lid portion of the furnace body 2 to the upper portion, and the population opening a and the outlet opening 31 can be opened, and the side of the furnace body 2 is disposed. Multiple. The lifting device 5 can be used, for example, as a lifting device equipped with oil. The conveyance device 6 is installed in the state in which the sheet S is inserted into the furnace body 2 in a state where the sheet S is not inserted in the furnace body 2 after the maintenance of the inside of the furnace body 2, for example, after the maintenance of the inside of the furnace body 2, and is placed in the furnace body. The outside of 2 is transported by holding a part of the sheet S. Further, the conveying device 6 includes a rubber belt 6a for holding a part of the sheet S, a driving roller 6b for rotating the rubber belt 6a, and a tension roller 6c for adjusting the tension applied to the rubber belt 6a. The rubber belt 6a is supported by a plurality of rollers 6d, and is thereby stretched over the entire length of the furnace body 2 in the extending direction. As shown in Fig. 4, in the rubber belt 6a, a plurality of cut-in portions 6a1 are formed in the longitudinal direction, and the cut-in portions 6a can hold the sheet S by inserting the sheet S. The drive roller 6b is disposed in the middle of the rubber belt 6a, and transmits the power supplied from a drive source such as a motor (not shown) to the rubber belt 6a, thereby rotating the rubber belt 6a. The tension roller 6c is a roller that can move in a direction intersecting the surface of the rubber belt 6a that is in contact with it, and adjusts the tension applied to the rubber belt 6a in accordance with its own moving position. In the annealing apparatus 1 of the present embodiment, for example, in the case of performing the protection or the like, first, the lid portion 2c of the furnace body 2 is lifted by the lifting device 5, and the lid portion 2c is removed from the base portion 2d. Next, the inside of the furnace body 2 is exposed, and the inlet opening 2a and the outlet opening 2b are opened. Further, the sheet S is cut, for example, on the upstream side of the furnace body 2, and the sheet S is conveyed in this state, whereby the sheet S is taken out to the outside of the furnace body 2. When the maintenance of the inside of the furnace body 2 is completed, the vicinity of the end portion of the sheet S on the upstream side is held by the rubber belt 6a of the conveying device 6. 8 321825 201040286 * In more detail, the operator inserts the vicinity of the end portion of the sheet s into the cut portion 6a formed in the rubber belt 6a, whereby the sheet S is held by the rubber sheet-belt 6a, and the sheet S is held at After the rubber belt 6a, the rubber belt 6a is rotated by the drive roller 6b of the conveying device 6, whereby the sheet S is conveyed from the vicinity of the upstream side end portion 2e of the furnace body 2 to the vicinity of the downstream side end portion 2f. Further, the rubber belt 6a is rotated so as not to pass through the position where the driving roller 6b and the tension roller 6c are provided (in the present embodiment, the position of the lower side of the rubber belt 6a). When the sheet S is conveyed to the vicinity of the downstream end portion 2f of the furnace body 2, the operator removes the sheet S from the rubber belt 6a and accommodates it inside the furnace body 2. At this time, in the annealing apparatus 1 of the present embodiment, the inside of the furnace body 2 is exposed by removing the lid portion 2c. Further, an opening is formed in the inlet opening 2a and the outlet opening 2b upward. Therefore, the operator can easily accommodate the sheet Q S inside the furnace body 2. Then, the lid portion 2c lifted by the lifting device 5 is lowered and fitted into the base portion 2d of the furnace body 2. As a result, the inlet opening 2a and the outlet opening 2b are formed between the lid portion 2c and the base portion 2d, and the sheet S is inserted into the state inside the furnace body 2 through the inlet opening 2a and the outlet opening 2b. In addition, the end portion of the sheet S is wound around a driving roller (not shown) disposed on the downstream side of the furnace body 2, and the sheet S can be transported again. 〇321825 201040286 Further, the sheet s is In the annealing apparatus 1 of the present embodiment, the annealing apparatus 1 of the present embodiment double-prevents leakage of high-temperature gas from the gap A formed between the lid portion 2c and the base portion 2d by the gasket 7 and the cover member 8. Therefore, the amount of heat radiation from the inside of the furnace body 2 is reduced, and the thermal efficiency of the annealing apparatus 1 of the present embodiment is improved. According to the annealing apparatus 1 of the present embodiment described above, since the furnace body 2 includes the lid portion 2c which can expose the inside of the furnace body 2 and can open the inlet opening 2a and the outlet opening 2b, the end of the sheet S can be omitted. The sheet S is housed inside the furnace body 2 while passing through the opening. Further, according to the annealing apparatus 1 of the present embodiment, since the sheet S can be gripped and transported by the conveying device 6 provided outside the furnace body 2, it is not necessary to arrange the constituent members of the conveying device 6 inside the furnace body 2. Therefore, according to the annealing apparatus 1 of the present embodiment, the conveying apparatus 6 can be prevented from being exposed to a high temperature environment, and the life of the conveying apparatus 6 can be prolonged. Further, according to the annealing apparatus 1 of the present embodiment, since the conveying device 6 is disposed outside the furnace body 2, a rubber belt can be used as the belt of the conveying device 6. Therefore, according to the annealing apparatus 1 of the present embodiment, the conveying apparatus 6 is more rational in comparison with the conveying apparatus which uses the chain belt as a belt in response to the countermeasure against a high temperature environment. The preferred embodiments of the present invention have been described above with reference to the drawings, but the present invention is not limited to the embodiments described above. The shapes, combinations, and the like of the respective constituent members shown in the above-described embodiments are examples, and various changes can be made according to design requirements and the like without departing from the gist of the present invention. For example, in the above-described embodiment, the lid portion 2c is provided with the protruding portion 2c2, and the lid portion 2c is fitted to the base portion 2d by inserting the protruding portion 2c2 into the concave portion 2d1 of the base portion 2d. By adopting the above configuration, the positional relationship between the lid portion 2c and the base portion 2d can be prevented from deviating. However, the present invention is not limited to the above configuration, and for example, the lid portion 2c may be formed in a flat plate shape. In the above embodiment, the configuration of the belt using the rubber belt 6a ◎ as the conveying device 6 will be described. However, the present invention is not limited thereto, and a chain belt may be used as the belt of the conveying device 6. (Industrial Applicability) According to the annealing apparatus of the present embodiment, since the furnace body has a lid portion which can expose the inside of the furnace body and can open the inlet opening and the outlet opening, the end portion of the sheet can be prevented from passing through the opening. In the case of the part, the sheet is housed inside the Q furnace body. Further, since the sheet can be conveyed by the transport device provided outside the furnace body, it is not necessary to arrange the constituent members of the transport device inside the furnace body. Therefore, according to the present invention, it is possible to prevent the conveying device from being exposed to a high temperature environment, and it is possible to prolong the life of the conveying device. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a side view showing a schematic configuration of an annealing apparatus according to an embodiment of the present invention. Fig. 2 is a front view showing the outline of an annealing apparatus according to an embodiment of the present invention 11 321825 201040286. Fig. 3 is an enlarged plan view showing a planar cross section of an annealing apparatus according to an embodiment of the present invention. Fig. 4 is an enlarged view showing a rubber belt provided in the annealing apparatus according to the embodiment of the present invention. [Description of main components] 1 Annealing device 2 Furnace body 2a Entrance opening 2b Exit opening 2c Cover portion 2d Concave portion 2c2 Projection portion 2d Base portion 2e Upstream side end portion 2f Downstream side end portion 3 Transport roller 4 Heater 5 Lifting device 6 Transporting device 6a Rubber belt 6al Cutting part 6b Drive roller (drive part) 6c Tension roller 6d Roller 7 祢: Pad (sealing member) 8 Cover member (covered part) A Clearance S Sheet 321825 12

Claims (1)

201040286 七、申請專利範圍： 1. 一種退火裝置，係對透過爐體之入口開口部及出口開口 部插通於爐體内部之薄片進行加熱以實施退火處理 者，該退火裝置係具備： 前述爐體，具有可使前述爐體内部露出且可使前述 入口開口及前述出口開口開放之蓋部；及 搬送裝置，設置於該爐體之外部且用以把持前述薄 片之一部分以進行搬送。 ° 2.如申請專利範圍第1項之退火裝置，其中，具備密封構 件，該密封構件係介置在前述爐體之蓋部與嵌合有該蓋 部之前述爐體之基部之間隙。 3. 如申請專利範圍第1項之退火裝置，其中，具備被覆 部，該被覆部係覆蓋前述爐體之蓋部與嵌合有該蓋部之 前述爐體之基部之間隙。 4. 如申請專利範圍第2項之退火裝置，其中，具備被覆 Q 部，該被覆部係覆蓋前述爐體之蓋部與嵌合有該蓋部之 前述爐體之基部之間隙。 5. 如申請專利範圍第1項至第4項中任一項之退火裝置， 其中，前述搬送裝置係具備： 用以把持前述薄片之一部分的橡膠皮帶；及 使該橡膠皮帶旋轉行進之驅動部。 13 321825201040286 VII. Patent application scope: 1. An annealing device for heating an in-situ opening and an outlet opening through a furnace body to perform annealing treatment, the annealing device comprising: the furnace The body has a lid portion that can expose the inside of the furnace body and can open the inlet opening and the outlet opening; and the conveying device is disposed outside the furnace body and holds one of the sheets to be conveyed. The annealing apparatus according to claim 1, wherein the sealing member is provided with a sealing member interposed between a lid portion of the furnace body and a base portion of the furnace body to which the lid portion is fitted. 3. The annealing apparatus according to claim 1, wherein the covering portion covers a gap between a lid portion of the furnace body and a base portion of the furnace body to which the lid portion is fitted. 4. The annealing apparatus according to claim 2, further comprising a coating Q portion covering a gap between a lid portion of the furnace body and a base portion of the furnace body to which the lid portion is fitted. 5. The annealing apparatus according to any one of claims 1 to 4, wherein the conveying apparatus comprises: a rubber belt for holding a part of the sheet; and a driving unit for rotating the rubber belt . 13 321825
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JP2505358Y2 (en) * 1989-06-21 1996-07-31 ローム株式会社 Muffle firing furnace for thick film formation in electronic parts
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