JP7161594B1 - heating furnace - Google Patents

Abstract

An object of the present invention is to suppress deterioration of a heating furnace.
A heating furnace 10 disclosed herein includes a furnace body 20 having a transfer space 20a for transferring an object to be processed A in a transfer direction, an opening/closing mechanism 30, a first exhaust duct 40, and an exhaust device 60. and a second exhaust duct 50 to be connected. The furnace body 20 has a furnace body 21 and a lid 25 having an exhaust hole 27 . The opening/closing mechanism 30 drives opening/closing of the lid 25 . The first exhaust duct 40 is attached to the upper portion of the lid 25 , is connected to the exhaust hole 27 , and has a first connection portion 45 that is connected to the second exhaust duct 50 . The second exhaust duct 50 is fixed to the outside of the furnace body 20 and has a second connection portion 55 connected to the first exhaust duct 40 . The first connecting portion 45 and the second connecting portion 55 are connected when the lid 25 is closed and disconnected when the lid is opened.
[Selection drawing] Fig. 2

Description

The present disclosure relates to furnaces.

Japanese Patent Application Laid-Open No. 2017-48977 discloses a drying apparatus that dries the material to be dried by blowing air while conveying the material to be dried in the conveying direction. The drying apparatus disclosed in the same publication includes a placing/conveying section that places an object to be dried and carries it in the conveying direction, and is arranged above the placing/conveying section to blow air toward the placing/conveying section. and a blowout box. The blowout box is attached to the cover. The cover part is moved upward by rotating about the hinge. It is said that this makes it easy to inspect the object to be dried, the rollers of the placing/conveying section, and remove foreign matter.

Japanese Patent Laying-Open No. 2012-47401 discloses a drying apparatus having a plurality of drying chambers for drying a film-like object to be coated. Each drying chamber has a main body and a lid. The drying chamber is constructed so that the lid can be opened and closed by slightly raising and lowering the lid by a lifting device and then horizontally sliding along the guide. With such a configuration, for example, even if the drying chamber has an upper and lower two-layer configuration, the height dimension of the drying device can be suppressed, and maintainability is also improved.

JP 2017-48977 A Japanese Unexamined Patent Application Publication No. 2012-47401

By the way, gas and ambient gas generated when an object to be processed is subjected to heat treatment or drying treatment may condense in the furnace interior of the heating furnace or in the exhaust duct. As a result, there is a concern that the interior of the heating furnace and the exhaust duct may deteriorate. The inventor wants to suppress the deterioration of the heating furnace.

The heating furnace disclosed herein includes a furnace body having a transfer space for transferring an object to be processed in a transfer direction, an opening/closing mechanism, a first exhaust duct, and a second exhaust duct connected to an exhaust device. there is The furnace body has a furnace body and a lid having an exhaust hole. The furnace main body has a bottom wall and a pair of side walls extending upward from the bottom wall, and an opening is formed in the upper part. The lid is overlaid on the opening of the furnace body. The opening/closing mechanism drives opening and closing of the lid. The first exhaust duct is attached to the upper portion of the lid, is connected to the exhaust hole, and has a first connecting portion connected to the second exhaust duct. The second exhaust duct is fixed to the outside of the furnace body and has a second connecting portion connected to the first exhaust duct. The first connection part and the second connection part are connected when the lid is closed and disconnected when the lid is opened. Such a heating furnace is easy to maintain, and deterioration of the heating furnace is suppressed.

The opening/closing mechanism may open and close the lid vertically.
The first exhaust duct may be connected to a trap section that is wider than the first exhaust duct.
One connection portion of the first connection portion and the second connection portion may be provided with a sealing member. The other connection portion may have a contact surface against which the seal member is pressed during connection.
At least one of the first connecting portion and the second connecting portion may have a pressure adjusting member capable of adjusting the pressure with which the seal member is pressed against the contact surface.
The first exhaust duct may consist of a circular duct.
The exhaust hole may be provided at a position facing the object to be processed.

FIG. 1 is a cross-sectional view schematically showing a heating furnace 10. FIG. FIG. 2 is a sectional view taken along line II-II of FIG. FIG. 3 is a front view of the heating furnace 10. FIG. FIG. 4 is a plan view of the heating furnace 10 viewed from above. FIG. 5 is a cross-sectional view schematically showing the configuration of the first connection portion 45 and the second connection portion 55. As shown in FIG.

One typical embodiment of the present disclosure will be described in detail below with reference to the drawings. In the drawings below, members and portions having the same function are denoted by the same reference numerals. Also, the dimensional relationships (length, width, thickness, etc.) in each drawing do not reflect the actual dimensional relationships. Up, down, left, right, front, and rear directions are indicated by arrows U, D, L, R, F, and Rr, respectively. Here, the orientations of up, down, left, right, front, and rear are defined for convenience of explanation only, and do not limit the present invention unless otherwise specified.

<Furnace 10>
The heating furnace 10 is a heating furnace for continuously heating the workpiece A while conveying it in the conveying direction. In this embodiment, the processed material A is a film-shaped processed material. FIG. 1 is a cross-sectional view schematically showing a heating furnace 10. FIG. In FIG. 1, the direction in which the object A is conveyed is indicated by an arrow. FIG. 2 is a sectional view taken along line II-II of FIG. In FIG. 2, a cross section of the heating furnace 10 is shown. In FIG. 2, illustration of the inside of the heating furnace 10 such as the object to be processed A, the guide rollers 12, the heater 13, etc. is omitted. FIG. 3 is a front view of the heating furnace 10. FIG. FIG. 3 shows the right side surface of the heating furnace 10 where the second exhaust duct is provided. FIG. 4 is a plan view of the heating furnace 10 viewed from above.

The heating furnace 10 is used when heat-treating or drying the film-like object A to be processed. The heating furnace 10 can be used, for example, when manufacturing a flexible copper clad laminate (FCCL). The object A to be processed is wound around a pay-off roll and a take-up roll (not shown). The object to be processed A wound around the unwinding roll may be, for example, a metal foil such as copper foil coated with a mixture of a resin material such as polyimide and an organic solvent. The object A to be treated is continuously heat-treated while being transported in the heating furnace 10, the organic solvent is removed, and the object A is wound around a take-up roll.

As shown in FIG. 1, the heating furnace 10 includes a furnace body 20 having a transfer space 20a for transferring the workpiece A in the transfer direction, an opening/closing mechanism 30 (see FIG. 2), and a first exhaust duct 40. and a second exhaust duct 50 (see FIG. 2) connected to the exhaust device 60 (see FIG. 2). The first exhaust duct 40 is attached to the top of the lid 25 . The second exhaust duct 50 is fixed outside the furnace body 20 . The heating furnace 10 includes guide rollers 12 for guiding the object A to be processed and a heater 13 for heat-treating the object A to be processed, in a transfer space 20 a within the furnace body 20 . The furnace body 20 has a furnace body 21 and a lid 25 . The opening/closing mechanism 30 drives opening/closing of the lid 25 . The lid 25 is closed when the object A is heat-treated. The lid 25 is opened when the object A to be processed is set in the heating furnace 10 or maintenance such as cleaning the inside of the heating furnace 10 is performed. In the following description, the state in which the lid 25 is closed with respect to the furnace body 21 is simply referred to as "closed state S1", and the state in which the lid 25 is opened with respect to the furnace body 21 is simply referred to as "open state." Also called S2. In FIG. 2, the open state S2 is indicated by a two-dot chain line.

<Furnace body 20>
As shown in FIG. 2, the furnace body 20 surrounds the entire circumference of the transfer space 20a in the closed state S1. The furnace body 20 is made of a heat insulating material. As the heat insulating material, for example, a ceramic fiber board or rock wool molded into a predetermined shape can be used. The thickness of the heat insulating material is set to a required thickness that sufficiently insulates the heat in the transfer space 20a. The outer and inner surfaces of the heat insulating material are covered with metal inner and outer walls that are excellent in rigidity and heat resistance. For example, stainless steel or the like can be used for the inner wall and the outer wall.

The furnace body 20 has a furnace body 21 and a lid 25 having an exhaust hole 27 . The furnace main body 21 has a bottom wall 21a and side walls 21b extending upward from the bottom wall 21a, and an opening 21c is formed at the top. The lid 25 is placed over the opening 21 c of the furnace body 21 . In this embodiment, the side walls 21b include a pair of side walls 21b1 extending from the ends of the bottom wall 21a along the longitudinal direction of the furnace body 20 and a pair of side walls 21b1 extending from the ends of the bottom wall 21a along the width direction of the furnace body 20. side wall 21b2 (see FIG. 1). A seal member 22 is provided on the upper surface of the side wall 21b over the entire circumference. The lid 25 has a ceiling 25a facing the bottom wall 21a and a step 25b extending downward from the ceiling 25a. The lower surface of the step 25b has a shape corresponding to the upper surface of the side wall 21b of the furnace body 21. As shown in FIG. In the closed state S1, the lower surface of the step 25b is pressed against the sealing member 22 on the upper surface of the side wall 21b over the entire circumference. Thereby, the airtightness of the furnace body 20 is maintained. As the seal member 22, for example, a silicon sponge or the like can be used.

As shown in FIG. 1, the furnace body 20 is provided with a carry-in port 10a for carrying in the object A to be processed and a carry-out port 10b for carrying out the object A to be processed. In this embodiment, the carry-in port 10a and the carry-out port 10b are provided in the side wall 21b2 of the furnace body 21. As shown in FIG. The carry-in port 10a and the carry-out port 10b are rectangular gaps wide in the width direction of the transfer space 20a, and are dimensioned so that the film-like workpiece A can be inserted through them. An object to be processed A before heat treatment is carried in from the carry-in port 10a. The heat-treated object A is carried out from the carry-out port 10b. The loading and unloading of the workpiece A can be performed by a winding device and an unwinding device (not shown). Although not particularly limited, the unwinding device and the winding device include, for example, a motor for rotating the unwinding roll and the winding roll, a tension adjusting roller for adjusting the tension applied to the workpiece A, and the workpiece A. Various configurations such as guiding guide rollers may be provided. Outside the furnace body 20, an air curtain for maintaining the atmosphere inside the furnace body 20 may be provided in the vicinity of the carry-in port 10a and the carry-out port 10b. In addition, equipment such as a heating furnace for heat-treating the object A to be processed under different conditions may be connected to the inlet 10a and the outlet 10b.

The furnace body 20 is placed on the base 15 . As shown in FIG. 2, the base 15 includes a lower frame 15a constituting the lower end of the base, a support frame 15b extending upward from the lower frame 15a, and a furnace body 20 extending horizontally from the support frame 15b. and an upper frame 15c on which the lower surface is placed.

<Guide roller 12>
The guide roller 12 is a roller that guides the object A to be processed, as shown in FIG. A plurality of guide rollers 12 are arranged in the furnace body 20 along the transport direction. The guide rollers 12 are cylindrical metal rollers, which are aligned in height and arranged at a predetermined pitch. Although not shown, the guide roller 12 passes through the side wall 21b1 of the furnace body 21 and is rotatably supported outside the furnace body 20 via bearings. In this embodiment, the workpiece A is supported by a plurality of guide rollers 12 so as not to bend during transportation. As the guide roller 12, for example, a ceramic roller may be used.
The configuration of the guide rollers 12, such as the height and pitch of the arrangement, is not limited to this form. The guide rollers 12 may be arranged at different heights for each guide roller 12, for example. Two different heights may be set for the guide rollers 12, and the guide rollers 12 may be alternately arranged at the two heights along the transport direction.

<Heater 13>
The heater 13 is a device that heats the workpiece A in the transfer space 20a. The heaters 13 are arranged along the transport direction above and below the plurality of guide rollers 12 in the transport space 20a. In this embodiment, as the heater 13, a far-infrared heating type electric plate heater is used. Although not shown, the heater 13 is supported by the furnace body 20 . The heater 13 arranged below the guide roller 12 is supported by the bottom wall 21a. The heater 13 arranged above the guide roller 12 is supported by the lid 25 . Various heaters can be used as the heater 13 depending on the heating temperature, the heating atmosphere, and the like. As the heater 13, for example, an electric pipe heater, a metal sheath heater, a ceramic heater, or the like can be used in addition to a plate-like electric plate heater. Further, the heater 13 is not limited to a far-infrared heater. For example, as the heater 13, a hot-air heating type heater that blows hot air onto the object to be processed may be used.

<Air supply hole 23>
The air supply hole 23 is a hole for supplying atmospheric gas into the furnace body 20 . A gas introduction pipe (not shown) is connected to the gas supply hole 23, and a cylinder of atmosphere gas to be introduced is connected to the gas introduction pipe. In this embodiment, a plurality of air supply holes 23 are provided above and below the side wall 21b1. The atmosphere gas supplied into the furnace body 20 is not particularly limited. As the atmosphere gas, for example, an inert gas such as nitrogen gas or argon gas, oxygen gas, hydrogen gas, chlorine gas, hydrogen chloride gas, or the like can be used.

<Exhaust hole 27>
The exhaust hole 27 is a hole for exhausting the atmosphere gas in the furnace body 20, the organic solvent volatilized from the object A to be processed, and the like. The exhaust hole 27 is provided in the ceiling 25 a of the lid 25 . The exhaust hole 27 is connected to an exhaust device 60 via a first exhaust duct 40 and a second exhaust duct 50 which will be described later (see FIG. 2). Gas in the furnace body 20 is sucked by the exhaust device 60 and exhausted from the exhaust hole 27 . A fan, a blower, or the like, for example, can be used as the exhaust device 60 . A solvent recovery device or the like may be connected to the exhaust device 60 depending on the gas to be discarded. Further, a combustion device or the like for burning the collected solvent may be connected to the exhaust device 60 .

Note that the organic solvent volatilized by the heat treatment of the object A is lighter than the atmosphere gas in the furnace body 20 and can flow upward. From this point of view, it is preferable that the exhaust hole 27 is provided on the ceiling of the lid 25 . Moreover, it is preferable that the exhaust hole 27 is provided at a position facing the object A in the height direction of the furnace body 20 . With such a configuration, the gas generated by heating the object A can be efficiently exhausted. The exhaust hole for exhausting the gas inside the furnace body 20 is not limited to the ceiling of the lid 25 and may be provided in the lower part of the furnace body 21 as well.

Further, in this embodiment, a plurality of exhaust holes 27 are provided. Two exhaust holes 27 are arranged in the width direction of the furnace body 20 on the upstream side and the downstream side in the conveying direction, and a total of four exhaust holes 27 are provided. The position and number of the exhaust holes 27 are appropriately set according to the heating conditions, the volume of the transfer space 20a, and the like. By providing a plurality of exhaust holes 27 , the gas can be easily exhausted evenly from the heating furnace 10 .

<Opening and closing mechanism 30>
As shown in FIG. 2 , the opening/closing mechanism 30 opens and closes the lid 25 of the furnace body 20 . Although the configuration of the opening/closing mechanism 30 is not particularly limited, the opening/closing mechanism 30 includes a linear guide 31, a motor 32, a ball screw 33, and a connection member 34 in this embodiment. A connection member 34 is fixed to the upper portion of the lid 25 . Both ends of the connecting member 34 are connected to the linear guides 31 . The lid 25 is opened and closed as the linear guide 31 moves up and down.

A motor 32 for driving the opening and closing of the lid 25 is attached to the lower frame 15a. The ball screw 33 is connected to the motor 32 via a coupling or the like. A ball screw 33 extends upward from the motor 32 . The ball screw 33 is covered with a strut 35 except for the surface facing the furnace body 20 . The connection member 34 connects the furnace body 20 with the ball screw 33 and the linear guide 31 . The linear guide 31 , the motor 32 , the ball screw 33 , and the struts 35 are provided on both sides of the furnace body 20 in the width direction. Both ends of the connecting member 34 are connected to the linear guides 31 on both sides of the furnace body 20 in the width direction. Also, the connecting member 34 is fixed to the upper portion of the lid 25 . By rotating the motor 32, the connection member 34 fixed to the linear guide 31 is raised and lowered, and the lid 25 is opened and closed. The opening/closing direction of the lid 25 is set by the linear guide 31 in the opening/closing mechanism 30 . In this embodiment, the opening/closing mechanism 30 opens and closes the lid 25 vertically.

<First exhaust duct 40>
The first exhaust duct 40 is an exhaust path for exhausting gas within the furnace body 20 . Since the first exhaust duct 40 is attached to the upper portion of the lid 25, it is configured to move in the opening/closing direction as the lid 25 opens and closes. The first exhaust duct 40 is connected to the exhaust hole 27 . The first exhaust duct 40 has an upstream portion 41 connected to the exhaust hole 27 and a downstream portion 43 extending toward the second exhaust duct 50 . The first exhaust duct 40 has a first connection portion 45 connected to the second exhaust duct 50 . The first connection portion 45 is provided at the tip of the downstream portion 43 of the first exhaust duct 40 that is the most downstream side. Although not particularly limited, in this embodiment, the first exhaust duct 40 is composed of a circular duct. Since the first exhaust duct 40 is a circular duct, even if the organic solvent condenses in the pipe, it is less likely to remain.

The first exhaust duct 40 is connected to a trap portion 42 wider than the first exhaust duct 40 . In this embodiment, the upstream portion 41 and the downstream portion 43 are connected to a trap portion 42 having a space wider than the diameter of the piping of the upstream portion 41 and the downstream portion 43 . The gas generated in the furnace body 20 and the atmosphere gas can flow into the trap part 42 at a high temperature. The trap part 42 is a part that can trap some of these gases. The trap section 42 is provided between the upstream section 41 and the downstream section 43 . The trap part 42 is positioned substantially in the center of the lid 25 of the furnace body 20 . The trap part 42 has a substantially rectangular parallelepiped shape and has a space inside. The trap portion 42 is attached to the lid 25 by being supported by leg portions 42 a extending upward from the upper surface of the lid 25 . A space is formed between the trap portion 42 and the lid 25 .

The upstream part 41 is composed of four pipes connected to the respective exhaust holes 27 . The upstream portion 41 is bent twice from the exhaust hole 27 and connected to the trap portion 42 . The upstream portion 41 extends upward from the exhaust hole 27, bends substantially vertically, and extends parallel to the longitudinal direction of the furnace body 20 (see FIGS. 2 to 4). The upstream portion 41 further bends substantially vertically from a portion extending parallel to the longitudinal direction of the furnace body 20 and extends parallel to the width direction of the furnace body 20 toward the trap portion 42 (see FIG. 4). The upstream portion 41 is connected to the widthwise side surface 42 b of the trap portion 42 .

The downstream portion 43 is connected to the upper portion of one side surface 42b1 of the trap portion 42 in the width direction. The downstream portion 43 extends in the width direction of the furnace body 20 from the side surface 42b1 of the trap portion 42 and then bends downward. In this embodiment, a portion of the downstream portion 43 extending in the width direction of the furnace body 20 is supported from below by a support member 26 attached to the side surface of the lid 25 . The supported portion is attached to the support member 26 by being wound in the circumferential direction with a pipe band 26a. Thereby, the downstream portion 43 of the first exhaust duct 40 is fixed to the lid 25 without bending.

<Second exhaust duct 50>
The second exhaust duct 50 is an exhaust path for exhausting the gas inside the furnace body 20 . The second exhaust duct 50 is fixed outside the furnace body 20 . In this embodiment, the secondary exhaust duct 50 is attached to the support member 16 as shown in FIG. Although not particularly limited, in this embodiment, the second exhaust duct 50 is configured from a circular duct like the first exhaust duct 40 . The inner diameter of the second exhaust duct 50 is larger than the inner diameter of the first exhaust duct 40 . Thus, by making the inner diameter of the second exhaust duct 50 larger than that of the first exhaust duct 40, the pressure loss during exhaust can be reduced.

The second exhaust duct 50 has a second connection portion 55 connected to the first exhaust duct 40 . The first connecting portion 45 of the first exhaust duct 40 and the second connecting portion 55 of the second exhaust duct 50 are connected when the lid 25 is closed and disconnected when the lid 25 is opened. It is configured. In this embodiment, the attachment/detachment direction of the first connection portion 45 and the second connection portion 55 coincides with the opening/closing direction (vertical direction) of the lid 25 .

<First connection portion 45, second connection portion 55>
FIG. 5 is a cross-sectional view schematically showing the configuration of the first connection portion 45 and the second connection portion 55. As shown in FIG. As shown in FIG. 5, the first connecting portion 45 of the first exhaust duct 40 and the second connecting portion 55 of the second exhaust duct 50 have openings 45a, 55a facing the other connecting portion, respectively. ing. In this embodiment, the opening 55 a of the second connecting portion 55 is wider than the outer diameter of the first connecting portion 45 . In the closed state S<b>1 (see FIG. 2 ), the tip portion 45 b of the first connection portion 45 is housed in the second connection portion 55 . The tip 45b of the first connection portion 45 may be provided with fluororubber or the like for filling the gap between the tip portion 45b and the inner wall of the second connection portion 55. As shown in FIG. The second connecting portion 55 is provided with an inclined portion 55b that gradually narrows toward the downstream side from the portion where the first connecting portion 45 is accommodated. The inner diameter of the second exhaust duct 50 is larger than the inner diameter of the first exhaust duct 40 on the downstream side of the inclined portion 55b.

One connection portion of the first connection portion 45 and the second connection portion 55 may be provided with a seal member 56, and the other connection portion may be provided with a contact surface 46a against which the seal member is pressed during connection. In this embodiment, the second connecting portion 55 is provided with a sealing member 56 . The second connection portion 55 is provided with a flange portion 55c. A base portion 55d to which the seal member 56 is attached is provided on the surface of the flange portion 55c facing the first connection portion 45 . The seal member 56 is not particularly limited as long as it has required heat resistance, corrosion resistance, and the like. As the seal member 56, for example, a silicon sponge or the like can be used. The first connecting portion 45 has a disc 46 extending outward from the first connecting portion 45 at the tip portion 45b. One surface of the disc 46 faces the second connection portion 55 . The surface facing the second connection portion 55 is the contact surface 46a against which the seal member 56 is pressed in the closed state S1. The seal member 56 and the contact surface 46a are provided continuously in the circumferential direction of the first connection portion 45 and the second connection portion 55, respectively. Thereby, the first connection portion 45 and the second connection portion 55 are configured to be airtightly connected in the closed state S1.

At least one of the first connecting portion 45 and the second connecting portion 55 may have a pressure adjusting member 47 capable of adjusting the pressure with which the seal member 56 is pressed against the contact surface 46a. In this embodiment, the first connecting portion 45 has a pressure adjusting member 47 . The configuration of the pressure adjusting member 47 is not particularly limited. In this embodiment, the pressure adjusting member 47 comprises a disc 47a, a threaded bolt 47b and nuts 47c, 47d.

The disc 47a extends outward from the first connecting portion 45 . The disc 47 a is provided upstream of the disc 46 and is fixed to the first connection portion 45 . The disk 47a is provided with an insertion hole 47a1 through which the screw bolt 47b is inserted. A nut 47c is fixed to the surface of the disk 46 opposite to the contact surface 46a. One end of a screw bolt 47b is fixed to the nut 47c. The screw bolt 47b is inserted through the insertion hole 47a1 of the disc 47a and is fixed to the disc 47a by being tightened by the nut 47d from above and below. The position of the disk 46 is fixed by fixing the screw bolt 47b to the disk 47a. A plurality of insertion holes 47a1, screw bolts 47b, and nuts 47c, 47d are provided along the circumferential direction of the disk 47a. As a result, the disk 46 is stably fixed to the disk 47a. By loosening the nut 47d and adjusting the position where the screw bolt 47b is fixed to the disc 47a, the position of the disc 46 relative to the disc 47a can be adjusted in the vertical direction. As a result, the distance from the contact surface 46a of the disc 47a to the seal member 56 in the open state S2 (see FIG. 2) is adjusted, and the pressure with which the seal member 56 is pressed against the contact surface 46a in the closed state S1 is adjusted. be done. For example, by moving the disk 46 upward, the pressure with which the seal member 56 is pressed against the contact surface 46a is reduced. By moving the position of the disk 46 downward, the pressure with which the seal member 56 is pressed against the contact surface 46a increases.

By the way, various gases may be generated when the object to be processed is heated or dried in the heating furnace. For example, when treating an object containing a resin material such as polyimide resin, an organic solvent contained in the object can vaporize in a heating furnace. Hydrogen sulfide may be generated when treating an object containing a sulfur component. The organic solvent vaporized in the heating furnace is recovered outside the heating furnace through an exhaust duct. However, the organic solvent vaporized in the heating furnace may condense and adhere to the exhaust duct and the heating furnace. Further, for example, when treating an object to be treated in a chlorine gas or hydrogen chloride atmosphere, such atmosphere gas may condense and adhere to the exhaust duct or the heating furnace.

On the other hand, in the embodiment described above, the heating furnace 10 includes the furnace body 20 , the opening/closing mechanism 30 , the first exhaust duct 40 and the second exhaust duct 50 . The furnace body 20 has a furnace body 21 and a lid 25 having an exhaust hole 27 . The opening/closing mechanism 30 drives opening and closing of the lid. The first exhaust duct 40 is attached to the top of the lid 25 . On the other hand, the second exhaust duct 50 is fixed outside the furnace body 20 . The first exhaust duct 40 and the second exhaust duct 50 are connected when the furnace body 21 and lid 25 of the furnace body 20 are closed, and the furnace body 21 and lid 25 of the furnace body 20 are open. sometimes separated. Therefore, maintenance work such as cleaning the inside of the exhaust duct can be performed while the first exhaust duct 40 and the second exhaust duct 50 are separated. As a result, deterioration of the heating furnace 10 including the exhaust duct is suppressed.

In the embodiment described above, the opening/closing mechanism 30 is configured to open and close the lid 25 in the vertical direction. The space for installing the heating furnace 10 can be reduced by opening and closing the lid 25 in the vertical direction. Further, the first exhaust duct 40 and the second exhaust duct 50 are also attached and detached in the vertical direction in conjunction with the opening and closing of the lid 25 . Therefore, even when the first exhaust duct 40 and the second exhaust duct 50 are separated from each other, the opening 55a of the second exhaust duct 50 is positioned below the opening 45a of the first exhaust duct 40 . For example, even when the liquid such as the condensed organic solvent remains in the first exhaust duct 40, it is possible to suppress the liquid from flowing out of the exhaust duct. Further, by making the opening 55a of the second connection portion 55 wider than the outer diameter of the first connection portion 45, it is possible to make it more difficult for the liquid to flow out of the exhaust duct.

In the embodiment described above, the first exhaust duct 40 is connected to the trap portion 42 wider than the first exhaust duct 40 . The trap part 42 has a space wider than the first exhaust duct 40 inside. Therefore, in the trap section 42, the temperature and pressure of the gas that has passed through the upstream section 41 are lowered. When the temperature and pressure of the gas are lowered, for example, an organic solvent in the gas that has flowed into the trap section 42 may condense. The condensed organic solvent accumulates at the bottom of the trap section 42 . Therefore, the organic solvent flowing into the downstream portion 43 of the first exhaust duct 40 downstream of the trap portion 42 and the second exhaust duct 50 described later can be reduced. As a result, aggregation of the organic solvent is suppressed on the downstream side of the trap section 42, and corrosion of the exhaust duct can be prevented. In addition, the trap part 42 is preferably provided with a lid or the like on the upper part so that the condensed organic solvent can be discarded.

Although detailed descriptions have been given above with reference to specific embodiments, these are merely examples and do not limit the scope of the claims. For example, in the above-described embodiment, the first connecting portion 45 of the first exhaust duct is provided with the pressure adjusting member 47 , and the second connecting portion 55 of the second exhaust duct 50 is provided with the sealing member 56 . However, it is not limited to such a form unless specifically mentioned. The sealing member 56 may be provided on the first connecting portion 45 or may be provided on both the first connecting portion 45 and the second connecting portion 55 . The pressure adjusting member 47 may be provided on the second connection portion 55 or may be provided on both the first connection portion 45 and the second connection portion 55 .

Thus, the technology set forth in the claims includes various modifications and changes of the above-described embodiments. It is also possible to employ some of the techniques exemplified in the above embodiments for the heating furnace.

10 Heating furnace 10a Carry-in port 10b Carry-out port 12 Guide roller 13 Heater 15 Base 16 Support member 20 Furnace body 20a Transfer space 21 Furnace body body 22 Seal member 23 Air supply hole 25 Lid 26 Support member 27 Exhaust hole 30 Open/close mechanism 31 Linear guide 32 Motor 33 Ball screw 34 Connecting member 35 Support 40 First exhaust duct 41 Upstream part 42 Trap part 43 Downstream part 45 First connecting part 45a Opening 45b Tip part 46 Disk 46a Contact surface 47 Pressure adjusting member 47a Disk 47a1 Insertion hole 47b Screw bolts 47c, 47d Nut 50 Second exhaust duct 55 Second connecting portion 55a Opening 55b Inclined portion 55c Flange portion 55d Base portion 56 Sealing member 60 Exhaust device A Object to be processed

Claims (7)

a furnace body;
an opening and closing mechanism;
a first exhaust duct;
A second exhaust duct connected to the exhaust device,
The furnace body is
a furnace body;
a lid having an exhaust hole;
The furnace main body has a bottom wall and a pair of side walls extending upward from the bottom wall, and an opening is formed at the top,
The lid is superimposed on the opening of the furnace body,
The furnace body is
It has a transfer space surrounded by the bottom wall, the side wall, and the lid,
The transport space is a space for transporting the object to be processed along the transport direction,
The furnace body has an inlet for transporting the object to be processed to the transport space at one end in the transport direction and an outlet for transporting the object to be processed from the transport space at the other end,
The opening and closing mechanism drives opening and closing of the lid,
The first exhaust duct is attached to the upper part of the lid, is connected to the exhaust hole, and has a first connection part connected to the second exhaust duct,
The second exhaust duct is fixed to the outside of the furnace body and has a second connection portion connected to the first exhaust duct,
The first connection part and the second connection part are configured to be connected when the lid is closed and disconnected when the lid is opened, in accordance with opening and closing of the lid. heating furnace. 2. The heating furnace according to claim 1, wherein said opening and closing mechanism vertically opens and closes said lid. 3. The heating furnace according to claim 1, wherein said first exhaust duct is connected to a trap section wider than said first exhaust duct. 2. One of said first connecting portion and said second connecting portion includes a sealing member, and the other connecting portion includes a contact surface against which said sealing member is pressed during connection. 3. The heating furnace according to any one of 1 to 3. 5. The apparatus according to claim 4, wherein at least one of said first connecting portion and said second connecting portion has a pressure adjusting member capable of adjusting pressure with which said seal member is pressed against said contact surface. heating furnace. The heating furnace according to any one of claims 1 to 5, wherein the exhaust hole is provided at a position facing the object to be processed. 7. The heating furnace according to any one of claims 1 to 6, wherein said first exhaust duct comprises a circular duct.

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